JPS62213983A - Horizontal multi-joint type robot - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a horizontal articulated robot, which is particularly used in a clean room as a drifter for an object to be operated such as a wafer of an integrated circuit. This paper concerns improvements to horizontal articulated robots.

[Prior Art] Conventionally, as shown in FIG. 2, for example, in this Yuzu horizontal articulated robot, the arms 11 and 12 are rotated by a motor 16 on the RI axis and around the FLz axis, respectively.
The arm 12 is configured to be horizontally rotated by a two-axis motor 17, and a hand 14 is provided at the tip of the arm 12, which is horizontally rotated around the θ-axis by a θ-axis motor 18. Therefore, as is clear with reference to FIG. 2, the handling surface of the horizontal articulated robot for the operated object, which is formed through the movement of the θ-axis mechanism unit 10° arms 11, 12 and the hand 14, is as follows: Arm 11, 12 and hand pace 1 corresponding to the top part of horizontal articulated robot
3 and 14% of the hands are generally located below.

[Problem that the invention seeks to solve]

When the conventional horizontal articulated robot described above is used, for example, for loading wafers in the production process of conductor integrated circuits, the object to be operated such as the wafer is affected by the starting station from the horizontal articulated robot. The disadvantage is that it cannot be avoided. In other words, wafer handling is generally carried out in a down-flow clean room, but in that case, in a conventional horizontal articulated robot, the handling surface of the horizontal articulated robot is Since it is located below the topmost part, dust generated by the horizontal articulated robot itself can cause dust to get on the wafer surface, which can cause deterioration in the quality of semiconductor integrated circuits. There is a drawback.

In addition, as a method to avoid dust generation from horizontal multi-jointed robots, special materials are used in the movable parts of the robot, usually called clean pots, to separate the robot from the outside. Friend robots are sometimes used with various cleanliness measures, such as maintaining negative pressure inside the robot and discharging dust generated by the robot itself outside the clean room, but lean robots like this are generally It has the disadvantage that it is expensive and expensive, and the cleanliness is not always sufficient.

[Means for solving problems]

The horizontal multi-joint robot 7) of the present invention has an operation +54 that is always positioned at a lower position with respect to the handling surface corresponding to a predetermined object to be operated. It is configured with a moving mechanism section.

〔Example〕

Next, the present invention will be explained with reference to all the drawings, and FIG. 1 is a side external view of one embodiment of the invention.

As shown in the first factor, this embodiment includes the Z movement mechanism section 1, the arms 2 and 3, the hand base 4, the hand 5, the motor j16 for 2@, and the -E knee tough for the R1 axis. , a horse shaft motor 8, and a θ-axis motor 9.

In the first factor, Okinawa possible Zi in the vertical direction along the two axes
An arm 2 that is rotatable around the l'Ll axis in a horizontal plane and an arm 3 that is rotatable around the R2 axis and also in the horizontal plane are connected to the upper part of the l1 mechanism part l. Furthermore, a hand base 4 capable of rotating in a horizontal plane around the θ axis and a companion hand 5 for chucking an object to be operated are attached to the tip of the arm 3. There is.

As shown in FIG. 1, the motors that serve as driving sources for vertical movement or rotational movement on each of these axes include a Z-axis circumferential motor 6, an R1-axis motor 7, an R2-axis motor 8, and a θ
The shaft motor 9 constitutes a shaft motor 9, and obviously the movement mechanism involved in the vertical movement, rotational movement, etc.
All of them are configured to be located below the handling surface corresponding to the object to be operated. Therefore, the hand 5 that chucks the object under any handling motion conditions, including vertical movement along two axes and rotational movement around the R, R, 2, and θ axes, etc. is always located at the top, completely avoiding dust generated by the horizontal articulated robot itself such as dust on the operated object, such as the wafer surface of a semiconductor integrated circuit. .

〔Effect of the invention〕

As explained above, the invention is based on configuring the motion mechanism section of the horizontal articulated robot so that it is always located below the handling surface corresponding to the object to be operated. At times, contamination and damage to operated objects such as semiconductor integrated circuits due to dust generated from the eyes of the horizontally articulated robot can be avoided very easily without the use of special complicated mechanisms. be.

[Brief explanation of drawings]

FIG. 1 is a side external view of an embodiment of the invention, and FIG. 2 is a side external view of an example of a conventional horizontal articulated robot. In the figure, 1.10...2-axis mechanism section, 2.3.11
．． 12... Arm, 4, 13... Hand base, 5
．． 14... Hand, 6.15... 2-axis motor, 7
゜16...几1-axis motor, 8.17..., a2-axis motor, 9.18...θ-axis motor. Agent Patent Attorney Uchihara. ,. Figure 2

Claims (1)

[Claims] For a handling surface corresponding to a predetermined manipulated object,
A horizontal multi-joint robot characterized by having a motion mechanism section that is always positioned at a lower position.