JPS6116913B2 - - Google Patents

Description

[Detailed Description of the Invention] 1. Industrial Application Field The present invention relates to a continuous processing apparatus, and more specifically, to an improved continuous heating furnace suitable for heating a workpiece in a predetermined atmosphere. .

2. Prior Art Among continuous processing equipment, for example, a continuous heating furnace is used especially for heat treatment and powder curing, which require heating the object in a predetermined atmosphere for the purpose of preventing oxidation of the object, surface treatment, etc. It is used in a wide range of fields such as sintering gold and firing ceramics.

In a continuous heating furnace, the charge is generally carried into the furnace intermittently from the entrance of the furnace body. The charge located at the farthest end is discharged from the furnace, and a predetermined temperature curve is provided in the furnace as required. Also,
It is often necessary to heat in a predetermined atmospheric gas depending on the heating temperature, the type of the object to be heated, or the purpose of heating. Hereinafter, in this specification, such a heating furnace will be referred to as an atmosphere continuous heating furnace.

Continuous atmosphere heating furnaces used for such purposes have traditionally had a charging chamber adjacent to the inlet of the furnace body and an outlet chamber adjacent to the outlet of the furnace body. The atmospheric gas supplied to the chamber is guided outside from these chambers, and when the door that opens and closes between these chambers and the outside is opened, it ignites and is discharged as combustion gas at the boundary between these chambers and the outside. A frame curtain is formed to prevent outside air from entering the room when the door is opened.

In such conventional atmosphere continuous heating furnaces, when the door is opened, a large amount of the atmospheric gas inside the furnace is released into the outside air, and a large amount of atmospheric gas must be supplied, resulting in high costs. will increase.

3. Purpose of the Invention The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a continuous processing apparatus that consumes less atmospheric gas.

4. Structure of the invention That is, the present invention provides a predetermined atmosphere inside the device,
In a continuous processing device, the material to be processed is intermittently carried into the device main body (for example, the furnace body 3 described later) from the inlet of the device main body, and the material to be processed is discharged from the outlet of the device main body. A first charging chamber (for example, a first charging chamber 1 to be described later) adjacent to the main body entrance and equipped with a mechanism for feeding the workpiece into the apparatus main body; For example, it is divided by an opening/closing means (e.g., a second door 2a described later) in a state where ventilation is permitted by a first gas passage hole 1b (described later), and an opening/closing means for opening/closing between the outside and the outside on the other side. (for example, a second door 2a to be described later) and a mechanism for feeding the workpiece into the first charging chamber; feeding the workpiece into the second charging chamber; a first outlet chamber having a mechanism on the inlet side of the apparatus main body, and a first outlet chamber having a mechanism for sending out the processed material sent from within the apparatus main body; allowing ventilation between the first outlet chamber; A second outlet chamber is provided on the exit side of the apparatus main body, which is divided by an opening/closing means in a state in which have,
In addition, an exhaust passage (for example, a discharge hole 2b, a gas discharge pipe 2c, and a flow rate control valve 2d, which will be described later) that discharges atmospheric gas to the outside into one or both of the second charging chamber and the second outlet chamber is provided. The present invention relates to a continuous processing apparatus characterized in that it has an exhaust passage configured with a

5. Examples The present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a plan view showing an example of an atmospheric continuous heating furnace for firing IC substrates, and FIG. 2 is a sectional view taken along the line - in FIG. 1. A green (to-be-fired) substrate (not shown) is placed on a refractory tray 31 (not shown in FIG. 1) and is pushed by the main pusher 13 in the direction of the arrow in the figure. It is sent into the furnace main body 3 one after another from the first charging chamber 1, and the temperature rising zone 3a,
It passes through a high-temperature holding zone 3b and a cooling zone 3c, is fired through a process of increasing temperature, maintaining high temperature, and decreasing temperature in a furnace with a temperature curve shown in FIG. 3, and is sent to the first outlet chamber 4.
Next, it passes through the second outlet chamber 5 and the first table 6 extending into the second outlet chamber 5, moves onto the first pallet 8, and is moved onto the first guide 7 by a drive device (not shown). is sent to a position in contact with the end of the conveyor 9 on the furnace exit side, which is provided parallel to the furnace body 3.

The charge is heated by an electric resistance heating element (not shown) connected to a terminal 3d, the temperature is measured by a thermocouple 3e inserted into the furnace from the ceiling, and the temperature is measured by a control device (not shown). A predetermined temperature curve is maintained.

The trays on the conveyor 9 are sent one after another from the furnace outlet side end to the furnace inlet side end by the tray return pusher 14, and are moved onto the second pallet 11.
Next, a second table 12 is extended over the second guide 10 into the second charging chamber 2 by a drive device (not shown), and then the second table 12 is extended through the second charging chamber 2 to the first charging chamber 1. It is beginning to be sent to

The movement of the trays from the second pallet 11 to the second charging chamber 2 via the second table 12 is carried out by the first subsidiary pusher 15. The movement from the second outlet chamber 5 to the The movement through the first table 6 to the first pallet 7 is effected by a fourth sub-pusher 18.

In the furnace body 3, 60 trays 31 are lined up in one row, and the trays 31 are passed through the furnace body 3 over a period of 8 hours. Further, while the tray is moving on the conveyor 9, the fired substrate is collected from the tray, and a green substrate is placed thereon.

The atmospheric gas in the furnace body 3 is relative to the nitrogen gas 3.
AX gas (ammonia decomposition gas) is a mixed gas mixed at a ratio of 5, and the gas is supplied into the furnace through the cooling zone 3c, the first charging chamber 1 and the first outlet chamber 4.
This is done through an introduction hole 3f provided in the ceiling of the building. 3
g is an explosion-proof valve. Most of the atmospheric gas introduced into the furnace body 3 (approximately 90%) is passed through the gas passage hole 1b provided in the door 1a between the first charging chamber 1 and the second charging chamber 2. It is sent to the second charging chamber 2. When the door 2a that opens and closes between the second charging chamber 2 and the outside is opened, the gas released from the second charging chamber 2 to the outside is ignited and becomes a flame, and the second charging chamber 2 A frame curtain is formed at the boundary between the inside and outside to prevent outside air from entering.

The remaining part (approximately 10%) of the atmospheric gas is sent to the second exit chamber 5 through a gas passage hole 4b provided in the door 4a between the first exit chamber 4 and the second exit chamber 5. . When the door 5a that opens and closes between the second outlet chamber 5 and the outside is opened, the gas released from the second outlet chamber 5 to the outside is ignited and becomes a flame, which separates the second outlet chamber 5 from the outside. form a frame curtain at the border to prevent intrusion.

As shown in Figure 4, which is a sectional view of the second charging chamber and its surroundings taken along the - line in Figure 1, the atmospheric gas is located at the back of the second charging chamber 2 in the figure. After passing through a first charging chamber (not shown), the first door 1a is opened.
It enters the second charging chamber 2 through the first gas passage hole 1b provided in the floor, and passes through the gas discharge hole 2b provided in the floor thereof to the gas discharge pipe 2c and the flow rate control valve provided in the middle thereof. 2d, it is ignited and discharged. The amount of atmospheric gas supplied into the furnace is adjusted by the control valve 2d.

When the second door 2a is opened, the ignition pipe 33 is provided near the lower end of the second door 2a in the closed state in a direction perpendicular to the moving direction of the charge, and is connected to an ignition pipe 33 having a large number of nozzles 33a. The fuel gas released from the nozzle of the ignition pipe 33 is ignited by the pilot burner 32, and the atmospheric gas is released from the second charging chamber to the outside. is ignited, becomes a flame, and enters the second charging chamber 2.
A frame curtain is formed at the boundary between the air and the outside to prevent outside air from entering, and the air is exhausted through the hood 34. The gas exhaust hole 2b, the gas exhaust pipe 2c, and the flow control valve 2d constitute an exhaust passage for exhausting the atmospheric gas in the second charging chamber 2 to the outside of the furnace.

The first subsidiary pusher 15 consists of an air cylinder 15a and a push rod 15d fixed to its piston 15b via a coupling 15c,
The charge is moved from the second table 12 to the second charging chamber 2 by operating the air cylinder 15a and pushing the tray 31 with the push rod 15d.

a second secondary pusher 16 for transferring the charge from the second charging chamber 2 to the first charging chamber 1 (see FIG. 1);
Also, a structure similar to that of the first sub-pusher 15 is used.

When moving the charge from the top of the second pallet 11 to the second charging chamber 2, the second door 2a is opened, and at that time, the first door 1a is closed and the second charging chamber 2 is moved. 2 and the first charging chamber. When moving the charge from the second charging chamber 2 to the first charging chamber, the first door 1a is opened while the second door 2a is closed and isolated from the outside.

Therefore, even if the second door 2a is opened, the atmospheric gas inside the second charging chamber 2 will only be exhausted to the outside of the furnace.
Very little of the atmospheric gas in the furnace body 3 and the first charging chamber 1 is discharged to the outside of the furnace through the gas passage hole 1b, and a large amount of atmospheric gas is not discharged to the outside of the apparatus. The gas passage hole 1b allows atmospheric gas to be sent into the second charging chamber 2 so that the inside of the second charging chamber 2 has the same atmospheric gas as the inside of the furnace body 3, and the first door 1a is opened. Also, outside air is prevented from entering the furnace body 3 through the first charging chamber 1. Further, the atmospheric gas in the second charging chamber 2 is ignited when the second door 2a is opened to form the above-mentioned frame curtain. Note that, like in a normal atmosphere furnace, the pressure of the atmosphere inside the device is made slightly higher than atmospheric pressure, so the gas passage hole 1b cannot be completely prevented by the frame curtain and flows into the second charging chamber. 2
A small amount of the outside air that has entered the inside of the furnace is discharged to the outside of the device via the gas exhaust pipe 2c and replaced with atmospheric gas, thereby preventing the outside air from entering the furnace body 3 even slightly. This prevents a large amount of atmospheric gas from having to be sent into the furnace body 3 in order to expel outside air that has entered the furnace.

The opening and closing of the door is performed by an air cylinder, and to explain the second door, the second door 2a is opened and closed by an air cylinder 3 connected to the sprocket wheel 37 via a chain 36 that engages with the second door 2a.
This is done by operating 5.

The second outlet chamber 5 and its surroundings also have the same mechanism as the second charging chamber 2 and its surroundings.

In addition, in this example, the first gas passage hole 1b,
Although the third gas passage holes 4b are provided in the first door 1a and the third door 4a, respectively, these gas passage holes do not necessarily need to be provided in these doors. Doors 1a and 4 are provided between the second charging chamber 2 and between the first outlet chamber 4 and the second outlet chamber 5, respectively.
It is also possible to provide a gas passage path by providing a position away from point a, or by providing piping from one outer wall to another.

In addition, in this example, a gas containing hydrogen is used as the atmospheric gas, so the gas released to the outside is ignited and forms a flame curtain. When using a non-combustible gas such as carbon, it is best to form a gas curtain with the emitted gas to isolate it from the outside.

As shown in FIG. 5, which is a cross-sectional view taken along the line - in FIG.
9mm thick carbon steel plate SS41 installed at a distance from
It has a double structure with an outer shell 20 made of aluminum, and a ceramic fiber 20 is used as a heat insulating material in the space between the two.
1 is filled. 19a is a reinforcing rib attached to the inner shell 19.

In this example, the maximum temperature inside the furnace is 1600°C in the high temperature holding zone 3b, and the temperature of the inner shell 19 rises to several hundred degrees, so SUS310 is used as the material for the inner shell 19. In general, it is preferable to use an appropriate material depending on the temperature inside the furnace.

Furthermore, the inside of the inner shell 19 is lined with refractory bricks 23. By making the side wall of the furnace have a multilayer structure in this way, even if the inner shell 19 is heated by the heated atmospheric gas and the refractory bricks 23, the outer wall 20
Heating is small, and the ceramic fibers 21 filled between the inner and outer walls 19, 20 further increase the insulation effect and prevent the heat inside the furnace from being released outside the furnace. As mentioned above, this effect
Hydrogen gas easily penetrates the refractory bricks and directly heats the outer shell of the furnace, so it is particularly large when the inside of the furnace is made into a hydrogen atmosphere or an atmosphere containing hydrogen. In addition, the inner and outer walls 1
If the pressure in the space between 9 and 20 is reduced to about 10 ^-1 Torr or less, the above-mentioned heat insulation effect will be further enhanced.

In the case of a continuous heating furnace, where the temperature varies depending on the position in the furnace, the outer shell of the furnace is distorted during operation, causing unevenness on the hearth surface, and the charging material (in this example, placed on a tray) caused by the main pusher 13. It may be difficult to transport the placed substrates. Therefore, as shown in Figure 5,
The floor of the furnace shell is sloped so that the central part is located at a lower level than both ends, and a crosspiece 22, preferably made of heat-resistant steel, is placed on top of the slope, and a refractory lining 23 is laid flat on top of the crosspiece 22. It is desirable to spread the material evenly. When using such a hearth structure, even if the hearth shell is strained during operation, the strain is absorbed by the floor of the hearth, meaning that the hearth bulges only outward. As a result, the refractory bricks of the hearth can maintain a flat surface, and the transport of the charge inside the furnace cannot become difficult. In this example, a crosspiece 22 made of a heat-resistant steel plate SUS310S and having a thickness of 6 mm and a width of 40 mm as shown in FIG. 6 is used in the high temperature holding part of the furnace body.

With the above structure, the above operating conditions can be achieved in an atmosphere heating furnace with a total length of the furnace body 3 of 9500 mm, a length of the high-temperature holding zone 3b of 3500 mm, and internal dimensions of a width of 315 mm and a height of 250 mm. Below, in the case of a conventional atmospheric continuous heating furnace with one charging chamber adjacent to the furnace main inlet and one outlet chamber adjacent to the furnace main outlet, the consumption of atmospheric gas The amount was 0.0191 m ³ /cm ² hr per furnace internal dimension, but in the case of the atmospheric continuous heating furnace having the structure of the present invention, this is
0.0108m ³ /cm ² hr, which is roughly half that of conventional atmospheric continuous heating furnaces.

The present invention has been explained above using a continuous heating furnace as an example, but it goes without saying that the effect of saving atmospheric gas can also be achieved by chemical treatment using atmospheric gas or surface cleaning treatment at room temperature or low temperature. do not have.

6. Effects of the Invention As explained above, the continuous processing apparatus according to the present invention is provided with a first charging chamber adjacent to the inlet of the apparatus main body and a second charging chamber adjacent thereto, Both charging chambers are separated by an opening/closing means to allow ventilation, and an opening/closing means is provided between the second charging chamber and the outside, and the outlet side of the apparatus main body is also connected to the entrance side of the apparatus main body. Since it is configured in the same way as above, the following effects can be achieved.

By opening the two types of opening/closing means at different times, when charging the object to be processed and sending out the object to be processed, the atmospheric gas is discharged to the outside of the apparatus through the second charging chamber and the second outlet. The gas is mostly limited to the atmospheric gas in the room, and the opening/closing means between the first and second charging chambers and the opening/closing means between the first and second outlet chambers allow ventilation. , the atmosphere in the second charging chamber and the second outlet chamber is the same as that in the main body of the apparatus, and outside air is prevented from entering the main body of the apparatus via the first charging chamber and the first outlet chamber. This eliminates the need to supply atmospheric gas to expel outside air that has entered the device body. As a result, the amount of atmospheric gas consumed is significantly reduced compared to when using conventional continuous processing equipment, and the industrial value is great from the viewpoint of resource saving.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an embodiment of the present invention, FIG. 2 is a sectional view taken along the line - in FIG. 1, FIG. 3 is a graph showing the temperature distribution within the main body of the device, and FIG. FIG. 5 is a cross-sectional view taken along line - in FIG. 1, and FIG. 6 is a plan view of the crosspiece. Regarding the symbols used in the drawings, 1
...first charging chamber, 2...second charging chamber, 3...furnace body, 4...first outlet chamber, 5...second outlet chamber, 1
a, 2a, 4a, 5a...door, 1b, 4b...gas passage hole, 2b...gas discharge hole, 2c...pipe, 2d...flow control valve, 13...main pusher, 15, 16, 17,
18... Deputy Pushya.

Claims (1)

[Claims] 1. A continuous mechanism in which a predetermined atmosphere is created within the apparatus, and the workpiece is intermittently carried into the apparatus body from the entrance of the apparatus main body, and the workpiece is discharged from the outlet of the apparatus main body. In the processing apparatus, a first charging chamber adjacent to the entrance of the apparatus main body and equipped with a mechanism for feeding the processed material into the apparatus main body; a state in which ventilation is allowed between the first charging chamber and the first charging chamber; a second charging chamber separated by an opening/closing means, and equipped on the other side with an opening/closing means for opening/closing between the chamber and the outside and a mechanism for feeding the material to be processed into the first charging chamber; a first exit chamber having a mechanism for feeding the processed material into the second charging chamber on the inlet side of the apparatus main body, and a mechanism for sending out the processed material fed from within the apparatus main body; The first outlet chamber is separated by an opening/closing means to allow ventilation, and the other side is provided with an opening/closing means for opening/closing between the chamber and the outside and a mechanism for sending the processed material to the outside. a second outlet chamber on the outlet side of the apparatus main body, and an exhaust passage for discharging atmospheric gas to the outside in either or both of the second charging chamber and the second outlet chamber. Features of continuous processing equipment. 2. An atmospheric gas passage hole passes through each of the opening/closing means between the first charging chamber and the second charging chamber and the opening/closing means between the first outlet chamber and the second outlet chamber. The continuous processing apparatus according to claim 1, wherein the continuous processing apparatus is provided to allow ventilation. 3. The continuous processing apparatus according to claim 1 or 2, wherein the exhaust passage is equipped with a flow control valve.