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JPS647153B2 - - Google Patents

Info

Publication number
JPS647153B2
JPS647153B2 JP9479785A JP9479785A JPS647153B2 JP S647153 B2 JPS647153 B2 JP S647153B2 JP 9479785 A JP9479785 A JP 9479785A JP 9479785 A JP9479785 A JP 9479785A JP S647153 B2 JPS647153 B2 JP S647153B2
Authority
JP
Japan
Prior art keywords
base material
film
electroless plating
black
nickel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9479785A
Other languages
Japanese (ja)
Other versions
JPS61253383A (en
Inventor
Toshio Yamada
Kanji Masui
Shigeo Maruno
Hiroyuki Nakamura
Yukihiro Kai
Keiji Kamio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai Rika Co Ltd
Original Assignee
Tokai Rika Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Rika Co Ltd filed Critical Tokai Rika Co Ltd
Priority to JP9479785A priority Critical patent/JPS61253383A/en
Publication of JPS61253383A publication Critical patent/JPS61253383A/en
Publication of JPS647153B2 publication Critical patent/JPS647153B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/32Coating with nickel, cobalt or mixtures thereof with phosphorus or boron

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Chemical Treatment Of Metals (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は金属又はプラスチツク等の母材表面に
黒色被膜を形成する黒色被膜形成方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for forming a black film on the surface of a base material such as metal or plastic.

〔従来技術〕[Prior art]

この種の被膜形成方法としては、従来、塗装の
他、電気メツキ法による黒色クロメート、黒色ク
ロム、黒色ニツケル膜の形成等があつた。ところ
が、塗装によるものでは耐摩耗性が悪いため傷が
つき易く、また電気メツキ法による黒色クロメー
ト被膜は耐蝕性が悪く塩水等により白色のさびが
発生し易く、更には黒色クロムや黒色ニツケル被
膜も耐蝕性及び耐摩耗性において不十分であると
いう欠点がある。また、母材を陽極酸化法により
多孔質化した後黒色塗料を浸透させる方法もある
が、これでは母材がアルミニウムやマグネシウム
等に限られる上、耐侯性に劣るという問題があ
る。
In addition to painting, conventional methods for forming this type of film include forming black chromate, black chromium, and black nickel films by electroplating. However, paint-based coatings have poor abrasion resistance and are easily scratched, and black chromate coatings made by electroplating have poor corrosion resistance and are susceptible to white rust when exposed to salt water, etc. Furthermore, black chromium and black nickel coatings It has the disadvantage of being insufficient in corrosion resistance and abrasion resistance. Another method is to make the base material porous by anodic oxidation and then infiltrate it with black paint, but this method limits the base material to aluminum, magnesium, etc., and has the problem of poor weather resistance.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、母材の種類を問わず、優れた
耐蝕性、耐摩耗性及び耐侯性等の特性を有する黒
色被膜を形成することができる黒色被膜形成方法
を提供するにある。
An object of the present invention is to provide a method for forming a black film that can form a black film having excellent characteristics such as corrosion resistance, abrasion resistance, and weather resistance, regardless of the type of base material.

〔発明の要約〕[Summary of the invention]

本発明は、酸化触媒を含有せる無電解メツキ液
により母材に7%以下のリンを含むニツケル膜又
はコバルト膜を形成し、この後、母材表面を酸化
処理するようにしたところに特徴を有するもので
ある。
The present invention is characterized in that a nickel film or cobalt film containing 7% or less phosphorus is formed on a base material using an electroless plating solution containing an oxidation catalyst, and then the surface of the base material is oxidized. It is something that you have.

即ち、還元剤として次亜リン酸塩や亜リン酸等
を用いた無電解メツキ液により母材表面に例えば
ニツケルの無電解メツキを施すと、母材表面に
Ni―P合金膜が形成されることが知られており、
そのリン濃度は一般に液成分やメツキ条件を適宜
選定することにより従来8〜12%に調整されてい
た。ところが、本発明者はこのNi―P合金膜に
関する種々の研究の結果、無電解メツキにより形
成したリンを含むニツケル膜にあつては、リン濃
度が7%以上の場合はNi―P合金が非晶質構造
となつて安定化し、7%以下の場合には過飽和固
溶体を形成するために黒色化を伴う酸化反応が生
じ易くなることを見出した。本発明は、斯かる知
験に基き完成されたものであつて、無電解メツキ
液中に予め酸化触媒を含有せしめておいて母材に
7%以下(最も好ましくは1〜5%)のリン濃度
のニツケル膜又はコバルト膜を形成すると共に、
この後、酸化処理によりニツケル膜又はコバルト
膜表面を酸化することにより、ニツケル膜又はコ
バルト膜の表面を安定化すると同時にこれを黒色
化するようにしたものである。
That is, when electroless plating of nickel, for example, is applied to the surface of a base material using an electroless plating solution using hypophosphite, phosphorous acid, etc. as a reducing agent, the surface of the base material becomes
It is known that a Ni-P alloy film is formed.
The phosphorus concentration has conventionally been adjusted to 8 to 12% by appropriately selecting liquid components and plating conditions. However, as a result of various studies regarding this Ni-P alloy film, the present inventor found that in a phosphorous-containing nickel film formed by electroless plating, the Ni-P alloy is non-functional when the phosphorus concentration is 7% or more. It has been found that it becomes a crystalline structure and becomes stable, and when it is 7% or less, an oxidation reaction accompanied by blackening is likely to occur because a supersaturated solid solution is formed. The present invention has been completed based on such knowledge, and involves pre-containing an oxidation catalyst in the electroless plating solution and adding 7% or less (most preferably 1 to 5%) of phosphorus to the base material. While forming a high concentration nickel film or cobalt film,
Thereafter, the surface of the nickel film or cobalt film is oxidized by oxidation treatment, thereby stabilizing the surface of the nickel film or cobalt film and turning it black at the same time.

〔実施例〕〔Example〕

以下本発明を母材を鉄系とした場合に適用され
る第1実施例につき第1図及び第2図を参照して
説明する。
A first embodiment of the present invention in which the base material is iron-based will be described below with reference to FIGS. 1 and 2.

まず、母材をオルソ珪酸ナトリウム
(2Na2O・SiO2)の30g/液により例えば50〜
70℃で脱脂処理する。この後、HClの500ml/
液により酸洗し、次いで無電解メツキ液により母
材表面にリン濃度が7%以下(最も好ましくは1
〜5%)のニツケル膜を形成する。無電解メツキ
液は、硫酸ニツケル30g/、酒石酸ナトリウム
30g/及び還元剤としての次亜リン酸ナトリウ
ム15g/を主成分とし、その他PH調整剤、緩
衝剤、光沢剤等の補助成分を有する。ここで、本
実施例では、酸化処理をより迅速たらしめるため
各種の光沢剤の中から特にイオウを含んだサツカ
リン(C7H5NO3S)又はそのナトリウム塩等の誘
導体を選定することにより、無電解メツキ液中に
酸化触媒として作用するイオウを含有させてい
る。この無電解メツキは、例えば液温度90℃の下
で母材を液中に約15分間浸漬することにより行な
う。このようにしてニツケル膜を母材表面に形成
した後に、母材を酸化処理する。酸化処理は、例
えば塩酸100ml/の溶液中に母材を浸漬する化
学的酸化法、或は所定の液中で陽極酸化させる陽
極酸化法により行なう。これにより、第2図に示
すように、母材1の表面にNi―Pの過飽和固溶
体として形成されていたニツケル膜2表面が酸化
してニツケルのリン酸塩被膜3が形成され、表面
が安定化すると同時に、黒色化される。この後、
水洗・乾燥すれば全工程が完了する。
First, the base material is treated with 30g/liquid of sodium orthosilicate (2Na 2 O・SiO 2 ), for example,
Degrease at 70℃. After this, 500ml of HCl/
The surface of the base material is pickled with an electroless plating solution, and then the phosphorus concentration is 7% or less (most preferably 1%).
~5%) to form a nickel film. Electroless plating solution is nickel sulfate 30g/sodium tartrate.
The main ingredients are 30g/ and 15g/ of sodium hypophosphite as a reducing agent, and other auxiliary ingredients such as a PH adjuster, buffering agent, and brightening agent. Here, in this example, in order to make the oxidation treatment more rapid, saccharin (C 7 H 5 NO 3 S) containing sulfur or its derivatives such as sodium salts were selected from among various brightening agents. , the electroless plating solution contains sulfur that acts as an oxidation catalyst. This electroless plating is performed, for example, by immersing the base material in the liquid for about 15 minutes at a liquid temperature of 90°C. After the nickel film is thus formed on the surface of the base material, the base material is oxidized. The oxidation treatment is carried out, for example, by a chemical oxidation method in which the base material is immersed in a solution of 100 ml of hydrochloric acid, or by an anodization method in which it is anodized in a predetermined solution. As a result, as shown in Fig. 2, the surface of the nickel film 2, which had been formed as a supersaturated solid solution of Ni-P on the surface of the base material 1, is oxidized and a nickel phosphate film 3 is formed, making the surface stable. At the same time, it becomes black. After this,
The entire process is completed by washing and drying.

上記実施例によれば、母材1の表面に形成され
た黒色のリン酸塩被膜3は極めて安定であるか
ら、耐蝕性、耐侯性及び耐摩耗性等の諸特性に優
れ、特に耐摩耗性はビツカース硬度でHv500以上
の値を得ることができる。しかも、無電解メツキ
の後に酸化処理を行なうという極めて簡単な工程
で黒色被膜を形成できるから、設備費が安価に済
むと共に、大量生産が可能で、総じてコストダウ
ンを図ることができる。このようにして形成した
黒色被膜は、その優れた耐蝕性、耐侯性及び耐摩
耗性等の諸特性を生かして、金属表面の防食を兼
ねた装飾処理(例えば車両のシリンダキーの装飾
処理)或は太陽熱利用機器の熱吸収面の表面処
理、更には遠赤外線ヒーターの輻射面形成処理等
に広く適用することができるものである。
According to the above embodiment, the black phosphate film 3 formed on the surface of the base material 1 is extremely stable, so it has excellent properties such as corrosion resistance, weather resistance, and abrasion resistance, and in particular, the abrasion resistance. can obtain a value of Hv500 or more on the Bitkers hardness. Moreover, since the black film can be formed by an extremely simple process of performing oxidation treatment after electroless plating, equipment costs are low, mass production is possible, and overall costs can be reduced. The black film formed in this way takes advantage of its excellent properties such as corrosion resistance, weather resistance, and abrasion resistance, and can be used for decorative treatments that also serve as corrosion protection for metal surfaces (for example, decorative treatments for vehicle cylinder keys). This method can be widely applied to surface treatment of heat absorption surfaces of solar heat utilization equipment, and further to treatment for forming radiation surfaces of far-infrared heaters.

第3図は母材を銅系とした場合に適用される第
2実施例を示す工程流れ図で、前記第1実施例と
の相違は、酸洗と無電解メツキとの間に活性化処
理を行なうようにした点にある。この活性化処理
は、二塩化鉛(PdCl2)3g/、二塩化すず
(SnCl2)30g/及び塩酸100〜200ml/から
なる液中に母材を浸漬することにより行われる。
FIG. 3 is a process flowchart showing the second embodiment applied when the base material is copper-based. The difference from the first embodiment is that an activation treatment is performed between pickling and electroless plating. The point is that I decided to do it. This activation treatment is carried out by immersing the base material in a solution consisting of 3 g of lead dichloride (PdCl 2 ), 30 g of tin dichloride (SnCl 2 ), and 100 to 200 ml of hydrochloric acid.

第4図は母材をアルミニウム又はマグネシウム
系とした場合に適用される第3実施例の工程流れ
図を示す。前記第1実施例との相違は、無電解メ
ツキを行なう前に、第1実施例と同様の脱脂処理
後、炭酸ナトリウム25g/、第3リン酸ナトリ
ウム25g/の溶液中に60〜80℃で母材を浸漬し
ながらの電解脱脂と、硝酸500ml/溶液による
酸洗と、塩化亜鉛0.5g/、シアン化ナトリウ
ム0.5g/及び水酸化ナトリウム10g/の溶
液中に母材を浸漬することによる亜鉛置換処理
と、硫酸銅240g/及び硫酸60g/の溶液中
に母材を常温で1分間浸漬する銅ストライク処理
と、硫酸100ml/による酸洗とを順に行なうよ
うにしたところにある。
FIG. 4 shows a process flowchart of the third embodiment, which is applied when the base material is aluminum or magnesium based. The difference from the first embodiment is that, before electroless plating, after the same degreasing treatment as in the first embodiment, a solution of 25 g of sodium carbonate and 25 g of tribasic sodium phosphate was added at 60 to 80°C. Electrolytic degreasing while immersing the base material, pickling with nitric acid 500ml/solution, and zinc immersion by immersing the base material in a solution of 0.5g/zinc chloride, 0.5g/sodium cyanide, and 10g/sodium hydroxide. The replacement treatment, the copper strike treatment in which the base material is immersed in a solution of 240 g of copper sulfate and 60 g of sulfuric acid for 1 minute at room temperature, and pickling with 100 ml of sulfuric acid are performed in this order.

第5図は母材がABS樹脂等のプラスチツク或
はセラミツク等の非導電材である場合に適用され
る第4実施例を示す工程流れ図である。前記第1
実施例との相違は、脱脂処理後、母材を硫酸400
ml/、三酸化クロム400g/の溶液中に70℃
で15分間浸漬するエツチング処理と、二塩化鉛3
g/、二塩化すず30g/、塩酸100〜200ml/
の溶液中に常温で2分浸漬する触媒付与処理
と、硫酸30ml/の溶液中に浸漬する活性化処理
とを順に実行し、且つ無電解メツキ液を、塩化ニ
ツケル(NiCl2)15〜30g/、クエン酸ナトリ
ウム50g/、還元剤としての次亜リン酸ナトリ
ウム20g/、塩化アンモニウム40g/から調
整して水素イオン濃度をPH8.3〜9.3にすると共
に、35〜38℃のこの無電解メツキ液中に母材を約
5分間浸漬するようにした点にある。
FIG. 5 is a process flowchart showing a fourth embodiment applied when the base material is plastic such as ABS resin or non-conductive material such as ceramic. Said first
The difference from the example is that after degreasing, the base material was treated with 400% sulfuric acid.
ml/, 70℃ in a solution of chromium trioxide 400g/
Etching treatment by soaking in water for 15 minutes and lead dichloride 3
g/, tin dichloride 30g/, hydrochloric acid 100-200ml/
A catalyst application treatment of immersion in a solution of 2 minutes at room temperature and an activation treatment of immersion in a solution of 30 ml of sulfuric acid were carried out in sequence, and the electroless plating solution was immersed in a solution of 15 to 30 g of nickel chloride (NiCl 2 ). , sodium citrate 50g/, sodium hypophosphite 20g/ as a reducing agent, ammonium chloride 40g/ to adjust the hydrogen ion concentration to PH8.3-9.3, and this electroless plating solution at 35-38℃. The main point is that the base material is immersed in the water for about 5 minutes.

上記第2乃至第4の各実施例のようにしても、
第1実施例と同様に、無電解メツキにより形成し
たリン濃度が7%以下のニツケル膜の表面を酸化
して安定なニツケルのリン酸塩被膜を形成できる
ので、母材表面に耐蝕性、耐侯性及び耐摩耗性等
の諸特性に優れた黒色被膜を形成することができ
る。
Even if it is as in each of the second to fourth embodiments,
As in the first embodiment, a stable nickel phosphate film can be formed by oxidizing the surface of a nickel film with a phosphorus concentration of 7% or less formed by electroless plating, thereby providing corrosion and weather resistance to the surface of the base material. It is possible to form a black film with excellent properties such as hardness and abrasion resistance.

尚、上記各実施例では、母材表面に無電解メツ
キによりニツケル膜を形成するようにしたが、本
発明はこれに限らず、無電解メツキ液中のニツケ
ル塩に代えてコバルト塩を含ませて母材表面に7
%以下のリン濃度のコバルト膜を形成することに
より、前記各実施例と同様に諸特性に優れた黒色
被膜を形成することができる。本法の特徴の一つ
は、イオウのアノード反応極作用を触媒作用とし
て利用し、リン酸塩皮膜の形成を著しく迅速・容
易にした点にあるが、酸化触媒としては、光沢剤
に含まれるイオウを利用するに限らず、イオウを
含まない光沢剤を使用する場合には無電解メツキ
液中にイオウを含んだ化合物を含有させるように
しても良い。この場合イオウ濃度はppmオーダー
が適当である。更には、酸化触媒としては、イオ
ウに限らず、亜鉛、カドミウム、水銀、タリウ
ム、すず、鉛、リン、ヒ素、アンチモン、ビスマ
ス、セレン等であつても良い。
In each of the above embodiments, a nickel film was formed on the surface of the base material by electroless plating, but the present invention is not limited to this. 7 on the base material surface
By forming a cobalt film having a phosphorus concentration of % or less, it is possible to form a black film having excellent properties as in each of the above embodiments. One of the characteristics of this method is that it uses the anode reaction electrode action of sulfur as a catalyst, making the formation of a phosphate film extremely quick and easy. In addition to using sulfur, if a brightener that does not contain sulfur is used, a compound containing sulfur may be included in the electroless plating solution. In this case, the appropriate sulfur concentration is on the order of ppm. Furthermore, the oxidation catalyst is not limited to sulfur, but may also be zinc, cadmium, mercury, thallium, tin, lead, phosphorus, arsenic, antimony, bismuth, selenium, or the like.

〔発明の効果〕〔Effect of the invention〕

本発明は以上述べたように、酸化触媒を含有せ
る無電解メツキ液により母材に7%以下のリンを
含むニツケル膜又はコバルト膜を形成し、この
後、母材表面を酸化処理するようにしたところに
特徴を有するものであつて、この結果、ニツケル
膜又はコバルト膜の表面を酸化により安定化する
と同時に黒色化できるので、母材の種類を問わず
且つ安価に、耐蝕性、耐摩耗性及び耐侯性等の諸
特性に優れた黒色被膜を形成することができると
いう著効を奏するものである。
As described above, the present invention involves forming a nickel film or a cobalt film containing 7% or less of phosphorus on a base material using an electroless plating solution containing an oxidation catalyst, and then oxidizing the surface of the base material. As a result, the surface of the nickel film or cobalt film can be stabilized by oxidation and at the same time be blackened, so it can be made to have corrosion resistance and wear resistance regardless of the type of base material and at low cost. It also has the remarkable effect of being able to form a black film with excellent properties such as weather resistance.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図は本発明の第1実施例を示
し、第1図は工程流れ図、第2図は母材表面の模
式的断面図、第3図乃至第5図は本発明の第2乃
至第4実施例を夫々示す工程流れ図である。 図面中、1は母材、2はニツケル膜、3はニツ
ケルのリン酸塩膜である。
1 and 2 show a first embodiment of the present invention, FIG. 1 is a process flow chart, FIG. 2 is a schematic cross-sectional view of the surface of the base material, and FIGS. 3 to 5 show the first embodiment of the present invention. 3 is a process flowchart showing second to fourth embodiments, respectively. In the drawings, 1 is a base material, 2 is a nickel film, and 3 is a nickel phosphate film.

Claims (1)

【特許請求の範囲】 1 酸化触媒を含有せる無電解メツキ液により母
材に7%以下のリンを含むニツケル膜又はコバル
ト膜を形成し、この後、母材表面を酸化処理する
ことを特徴とする黒色被膜形成方法。 2 酸化触媒はイオウであることを特徴とする特
許請求の範囲第1項に記載の黒色被膜形成方法。
[Claims] 1. A method comprising forming a nickel film or a cobalt film containing 7% or less phosphorus on a base material using an electroless plating solution containing an oxidation catalyst, and then oxidizing the surface of the base material. A method for forming a black film. 2. The method for forming a black film according to claim 1, wherein the oxidation catalyst is sulfur.
JP9479785A 1985-05-02 1985-05-02 Formation of black film Granted JPS61253383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9479785A JPS61253383A (en) 1985-05-02 1985-05-02 Formation of black film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9479785A JPS61253383A (en) 1985-05-02 1985-05-02 Formation of black film

Publications (2)

Publication Number Publication Date
JPS61253383A JPS61253383A (en) 1986-11-11
JPS647153B2 true JPS647153B2 (en) 1989-02-07

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP9479785A Granted JPS61253383A (en) 1985-05-02 1985-05-02 Formation of black film

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Country Link
JP (1) JPS61253383A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005014881A2 (en) * 2003-08-08 2005-02-17 Showa Denko K.K. Production method of substrate with black film and substrate with black film
JP4705776B2 (en) * 2004-12-17 2011-06-22 日本カニゼン株式会社 Method for forming electroless nickel plating film having phosphate coating and film for forming the same
JP5186763B2 (en) * 2006-12-11 2013-04-24 新日鐵住金株式会社 Ni-plated steel sheet excellent in slidability and corrosion resistance and method for producing the same
JP4599433B2 (en) * 2008-06-12 2010-12-15 株式会社ネクスコ東日本パトロール LED sign
JP5747147B2 (en) * 2010-09-06 2015-07-08 パナソニックIpマネジメント株式会社 Method for forming black composite plating film and member for heating cooker using the formation method on the surface
WO2013168528A1 (en) * 2012-05-09 2013-11-14 奥野製薬工業株式会社 BLACKENING TREATMENT SOLUTION FOR BLACK Cr-Co ALLOY PLATING FILM
CN105039952B (en) * 2015-06-29 2017-08-25 北京鼎臣超导科技有限公司 A kind of passivation hair blackening liquid and its application for neodymium iron boron magnetic body nickel plating surface
JP6688066B2 (en) * 2015-12-22 2020-04-28 上村工業株式会社 Blackening treatment agent and method for producing black film using the same
US20230103643A1 (en) * 2021-10-04 2023-04-06 Applied Materials, Inc. ADVANCED BARRIER NICKEL OXIDE (BNiO) COATING DEVELOPMENT FOR THE PROCESS CHAMBER COMPONENTS
JP2023075461A (en) * 2021-11-19 2023-05-31 株式会社 コーア Plated product, method of manufacturing plated product and plating solution
US12522923B2 (en) 2022-03-11 2026-01-13 Applied Materials, Inc. Advanced barrier nickel oxide (BNiO) coating development for process chamber components via ozone treatment

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