JPS599008Y2 - Mounting structure of energized heating type evaporation source - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a mounting structure for an energized heating type evaporation source mainly used in a vacuum evaporation apparatus.

In a vacuum evaporation apparatus, an evaporation source made of a high melting point resistance material is arranged below a long sheet-shaped material to be deposited, which is fed at a predetermined speed, and is perpendicular to the feeding direction of the material to be deposited. There is a method in which the raw material that is successively supplied onto the evaporation source is evaporated by the heat generated by energizing the evaporation source, and the evaporation process is performed on the lower surface of the object to be evaporated. .

The mounting structure of the evaporation source used in this type of device is, for example, as shown in FIG.
, b. Holder blocks e and f made of a conductive material such as carbon or stainless steel are fixedly installed, and have engagement recesses c and d on the holder blocks e and f, and an evaporation source g is placed between each of the holder blocks e and f.
Generally, both ends thereof are loosely fitted into the engagement recesses c and d of the respective holders e and f.

However, with this simple structure, poor contact is likely to occur between the holder blocks e, f and the evaporation source g.

Therefore, in an apparatus having specifications such that a current of 500 A or more is passed through the evaporation source g, intense sparks are generated at the contact surface between the evaporation source g and each of the holder blocks e and f, and the evaporation source g is sufficiently drained. There is a disadvantage that the temperature cannot be increased.

Although such inconvenience can be overcome by firmly fixing the ends of the evaporation source g to each of the holder blocks e and f, the size of the evaporation source g changes greatly due to thermal expansion. If such a solution is adopted, there is a problem in that the evaporation source g is likely to be damaged due to thermal expansion strain when the temperature rises.

This invention was developed with a focus on these circumstances.
A holder block having an engaging recess on the upper surface is disposed opposite to the pair of fixed electrode plates as described above, and both ends of the energized heating type evaporation source are fitted into the engaging recess. In a mounting structure for an evaporation source installed between holder blocks, improvements have been made in particular to the mounting structure of the evaporation source to the holder, the mounting structure between the holder and the fixed electrode plate, and the electrical connection structure between the electrode plate and the evaporation source. By devising a device, it is possible to maintain the advantages of this type of mounting structure, such as the simple structure and excellent workability, while still allowing a large current to flow through the evaporation source due to the spark generation phenomenon caused by poor electrical contact as described above. The purpose of the present invention is to provide a device that can eliminate the inconveniences such as difficulty in evaporation or damage to the evaporation source when the temperature rises.

Hereinafter, one embodiment of the present invention will be described with reference to FIGS. 2 to 5.

A slender electric heating type evaporation source 1 is connected to a pair of fixed electrode plates 2,
Holders 4 and 5 are provided oppositely on 3, and are installed between them.

The evaporation source 1 can be in the shape of an elongated rectangular block,
Concave portion 1 for receiving the raw material to be evaporated on its upper surface
a, and is made of a resistive material, such as BN Composier I-EC (trade name; manufactured by Denki Kagaku Kogyo Co., Ltd.), which is a conductive ceramic.

The holders 4 and 5 include square holder blocks 4b and 5b having engagement recesses 4a and 5a on their upper surfaces into which the ends of the evaporation source 1 fit, and are placed on the upper surfaces of the holder blocks 4b and 5b. It consists of holding plates 4 c and 5 c that fix the ends of the evaporation source 1 to the holder blocks 4 b and sb.

That is, these holder blocks 4b, 5b and the presser plate 4
c, 5c means that the tightening bolts 6 are inserted from the mounting holes 9 provided in the holding plates 4c, 5c into the through screw holes 10 of the holder blocks 4b, 5b, which are provided in the vertical direction on both sides thereof. are inserted and removably connected.

The holding plates 4c and 5c are attached to the holder block 4.
After setting the ends of the evaporation source 1 in the respective engagement recesses 4 a and 5 a of holder blocks 4 b and 5 b in a predetermined state,
5b, and is configured such that the end of the evaporation source 1 and its inner surface are directly in close contact with each other in a predetermined fastened state.

Of the blocks 4b, 5b and presser plates 4C, 5C that guard the holders 4, 5, at least the presser plates 4c, 5c
is made of a highly conductive material such as stainless steel.

Further, each holder block 4b, 5b and the fixed electrode plates 2, 2 on which it is placed are coupled so as to be relatively movable as follows.

That is, elongated long holes 2a, 2a extending in the longitudinal direction of the evaporation source 1 are pre-drilled in the fixed electrode plates 2, 2, and the long holes 2a, 2a are opened from the lower surface side of the electrode plates 2, 2.
The stepped pins 7, 7 are screwed into the through-holes 10 of the holder blocks 4b, 5b through the holes 1a and 5b, thereby connecting the two.

The stepped pins 7, 7 have their threaded portions 7c, 7c at their small diameter portions screwed into the through holes, and their shaft portions 7b, 7.
b comes into contact with the lower surfaces of the holder blocks 4b, 4b in a loosely fitted state within the elongated holes 2a, 2a.

These shaft parts 7b, 7b are of course the long holes 2a, 2 of the electrode plates 2, 2.
It is shaped to be slightly longer than the thickness of the perforated part a, and at the same time, collars 7a, 7a are attached to the head to prevent it from falling off.

Therefore, to connect the electrode plates 2, 2 and the holder blocks 4b, 5b, simply screw the stepped pins 7, 7 firmly until their shaft portions 7b, 7b contact the lower surfaces of the blocks 4b, 4b. That's fine.

Note that the movable holder may be provided on at least one side.

Next, to explain the connection between the fixed electrode plates 2, 2 and the evaporation source 1, the fixed electrode plates 2, 2 and the evaporation source 1 are connected not through the holder blocks 4b, 5b, but with a good conductor. This is done via the presser plates 4c and 5c which are pressed together.

That is, the electrode plates 2, 2 and the holding plates 4c, 5c are directly electrically tangentially connected to each other by appropriate flexible conductive wires 8, 8.

At this time, the connection terminals on the presser plates 4c, 5c can also serve as the fastening bolts 6, 6 of the presser plates 4c, 5c, as shown in the figure.

With such a structure, the ends of the evaporation source 1 are fitted and fixed onto the engagement recesses 4a, 5a of each holder block 4b, 5b, and the electrode plates 2, 2 and the evaporation source 1 are connected. Since electrical connection is made via the holding plates 4c and 5c that are in close contact with the ends, it is possible to eliminate portions that are likely to cause poor contact.

In particular, since current is passed through the evaporation source 1 from the holding plates 4 c and 5 c, which have good electrical conductivity, the electrical resistance is kept to a minimum value, and the holder blocks 4 b and 5 b are heated with Joule heat as in the conventional case. Due to this, the holder block 4b,
There is no gap between the evaporation source 1 and the evaporation source 5b.

Therefore, sparks are generated at the poor contact area and the evaporation source 1
It is also possible to completely eliminate the inconvenience that would hinder the supply of electricity to the evaporation source 1, and for example, it is easy to supply a current of 50 OA or more to the evaporation source 1.

Furthermore, even if the evaporation source 1 expands due to heating, the holder blocks 4b and 5b that hold it are movable relative to the electrode plates 2 and 3 in the longitudinal direction corresponding to the direction of expansion and contraction. Even if the dimensions change due to thermal expansion, the evaporation source 1
No unreasonable restraining force is applied to the

Therefore, the fear that the evaporation source 1 will be damaged when the temperature rises is also accurately eliminated.

Further, as described above, the tightening bolts 6, 6 are inserted into the through screw holes 10 of the holder blocks 4b, 5b from the holding plates 4c, 5c through the mounting 'JL9, and the electrode plates 2
Since the stepped pins 7, 7 are screwed into the common through-hole 10 through the elongated holes 2a, 2a from the lower surface side of the holder block 4b, the structure is simple.
, 5b can be moved freely, and the installation and removal operations are also very simple.

As described above, according to the evaporation source mounting structure of the present invention, it is possible to accurately eliminate the problem of spark generation in the support part of the evaporation source and the problem of damage to the evaporation source. The present invention has the advantage that it can be easily implemented on existing general holder block support types without incurring the inconvenience of increasing the number of parts or making the processing of parts significantly more troublesome.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing a conventional example. 2 to 5 show an embodiment of the present invention, FIG. 2 is a perspective view, FIG. 3 is a partially omitted side view, and FIG. 4 is a sectional view taken along the line IV-IV in FIG. 3. Figure 5 shows ■ in Figure 3.
It is a sectional view taken along the line 1-V. 1... Evaporation source, 2, 3... Fixed electrode plate, 4, 5... Holder, 4 a, 5 a...
...Engagement recess, 4b, 5b...Holder block, 4c, 5c...Press plate, 6...
・Tightening bolt, 7...Stepped pin, 8...
・Flexible conductor, 9...Mounting hole, 10...
Penetrating screw hole, 2a... long hole.

Claims (1)

[Scope of utility model registration request] A holder block having an engaging recess on the upper surface is arranged to face the fixed electrode plates forming a pair, and an energized heating type evaporation source is installed.
The holder block is constructed between both holder blocks by fitting both ends thereof into the engaging recesses, and a presser plate having good conductivity is provided on the upper surface of the holder block, and is in direct contact with the end of the evaporation source. Place the holder block on the holding plate, and insert the tightening bolts into the through-holes provided vertically on both sides of the holder block through the mounting holes provided on the holding plate to removably connect the two, and place the holder block on the holder block. A long hole is drilled through the fixed electrode plate to be placed vertically and extends in the longitudinal direction of the evaporation source, and a stepped pin is screwed into the through hole of the holder block from the electrode plate side through the long hole. an energizing heating type, characterized in that the fixed electrode plate and the holding plate are directly electrically connected by a flexible conductive wire, and the fixed electrode plate and the holding plate are connected so as to be relatively movable in the longitudinal direction of the evaporation source. Mounting structure of evaporation source.