JPH1164302A - Sample tray for ultrasonic inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sample tray which can prevent the positional deviation of a sample and the occurrence of bubbles by only changing the configuration of the container forming the tray itself by taking the water flow that is generated when the tray is put underwater, with which ultrasonic inspections can be carried out inexpensively, which the time and labor required for the inspections can be reduced, and which, the automation of the inspections can be facilitated. SOLUTION: An ultrasonic inspection device is constituted in such a way that a probe radiates ultrasonic waves upon a sample put underwater, receives reflected waves returning from the sample, and fetches echo signals from the reflected waves, and the device inspects the sample based on the echo signals. A sample tray used for the inspection device is constituted in such a container 11 that its bottom section can be put underwater together with the sample put on the bottom of the container 11. The container 11 is formed in a three- dimensional container having a bottom wall section 11a, side wall sections 11b-11d, and water inlets 14 formed at the boundary sections between the bottom wall section 11a and the side wall sections 11b-11d.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample mounting table of an ultrasonic inspection apparatus, and more particularly to a sample mounting table of an ultrasonic inspection apparatus which does not cause a displacement of a sample or an adhesion of bubbles to the sample.

[0002]

2. Description of the Related Art In an ultrasonic inspection apparatus, when inspecting a sample such as an IC chip, the sample is immersed in an ultrasonic medium such as water. At this time, the sample is mounted on the sample mounting table, and is immersed in water by submerging the sample mounting table in water. By the way, in the conventional sample mounting table, no special measures were taken for the form itself.When the sample mounting table was immersed in water, water flowed into the container constituting the sample mounting table. There is a problem that the sample placed on the sample mounting table moves from a predetermined position due to the momentum of the water flow.

Conventionally, in order to solve the above problems, a sample is fixed on a sample mounting table using a powerful magnet (Japanese Utility Model Laid-Open No. 5-25355) or a vacuum suction cup is used. A method of fixing has been proposed. Further, when the sample mounting table is submerged in water, the speed at which the sample mounting table is submerged is slowed down so that the sample does not move, or the position of the sample is corrected after the sample mounting table is submerged.

[0004] When the sample mounting table is submerged in water, water flows into a container forming the sample mounting table, and bubbles tend to form due to the flowing action. This foam easily adheres to the sample and hinders the subsequent ultrasonic inspection. As a technique for removing bubbles attached to a sample, a method of blowing off using a water flow has been conventionally proposed (Japanese Utility Model Application Laid-Open No. 4-4).
No. 1659). In addition, humans later visually monitor the state of adhesion of the bubbles, and when they adhere, the bubbles may be removed by hand or with a dedicated device.

[0005]

The method of using a strong magnet or a vacuum suction cup to eliminate the displacement of the sample on the sample mounting table during immersion poses a problem in that the cost of the apparatus is high. In addition, the method of lowering the speed of lowering the sample mounting table increases the inspection time and lowers the inspection efficiency. Further, correcting the displacement of the sample after submerging the sample mounting table causes a problem that the inspection efficiency is lowered and that the inspection cannot be automated.

[0006] In addition, the method of blowing off the bubbles using a water stream with respect to the adhesion of the bubbles to the sample is costly due to the apparatus configuration.
Furthermore, a method of monitoring the adhesion state of the foam by a human and removing the foam by hand or a dedicated tool as needed raises a problem that the inspection efficiency is reduced and the productivity is deteriorated.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problem, and to change the form of a container itself forming a sample mounting table in consideration of the flow of a fluid when submerged in a liquid as an ultrasonic medium. To solve the problems of sample misalignment and bubble generation by simply adding, to achieve a low cost, to reduce the labor of the inspection, and to provide a sample mounting table of the ultrasonic inspection device that is useful for the automation of the inspection is there.

[0008]

A sample mounting table of an ultrasonic inspection apparatus according to the present invention is configured as follows to achieve the above object.

A sample mounting table (corresponding to claim 1) of the first ultrasonic inspection apparatus immerses a sample in a liquid such as water which is an ultrasonic medium, and applies ultrasonic waves to the sample from a probe. Emitted, the probe receives the reflected wave returning from the sample, extracts the echo signal, and is used in an ultrasonic inspection apparatus that inspects the sample based on the echo signal. The sample is placed on the bottom. The container comprises a container whose bottom is submerged in the liquid so as to be placed on the liquid and immersed in the liquid. The container is a three-dimensional container having a bottom wall and a side wall. At least one inflow port for the liquid is formed at the boundary between the portion and the side wall portion.

[0010] In the first aspect of the present invention, a liquid inlet is formed at a boundary portion (a portion including a boundary line) between a bottom wall portion and a side wall portion of a sample mounting table formed of a three-dimensional container, whereby the sample is mounted. When the mounting table is immersed in the liquid and the liquid enters the interior from the immersion inlet, the flow of the liquid as a fluid is such that the flow from the bottom wall side and the flow from the side wall side interact with each other, It is possible to face the sample placed on the bottom instead of the direction of the sample placed on the bottom. As a result, the sample placed on the bottom of the sample mounting table is maintained at the initial position without changing its position. Also, when the sample mounting table is lowered, the flow becomes smooth due to the interaction between the liquid flow from the bottom wall and the liquid flow from the side wall, and no bubbles are generated. As a result, the problem of immersing the sample in the liquid is eliminated,
It is possible to automate the inspection of the ultrasonic inspection apparatus.

[0011] In the sample mounting table (corresponding to claim 2) of the second ultrasonic inspection apparatus, in the first configuration, the inlet is provided with an opening formed in the bottom wall and an opening formed in the side wall. Department. By forming the openings in each of the bottom wall and the side wall, it is possible to cause an interaction between the flow of the liquid from the bottom wall and the flow of the liquid from the side wall. In a three-dimensional container forming a sample mounting table, if a liquid immersion inlet is formed at the boundary between the bottom wall and the side wall, usually,
It has an opening formed in the bottom wall and an opening formed in the side wall.

[0012] The sample mounting table (corresponding to claim 3) of the third ultrasonic inspection apparatus may be such that in the first or second configuration,
A plurality of infiltration ports are formed along the boundary. The sample to be inspected is mounted on the bottom of the sample mounting table.However, the number of the mounted samples and the mounting location are different depending on the case. It is set appropriately. In general, it is preferable to provide a plurality of the above-mentioned inlets at equal intervals.

[0013] In the sample mounting table of the fourth ultrasonic inspection apparatus (corresponding to claim 4), in the second configuration, the opening formed in the bottom wall portion may be larger than the opening portion formed in the side wall portion. Is also preferably small. When the liquid enters the container, which is the sample mounting table, through the inlet, in order to set the liquid inflow direction to a desired direction, it is preferable that the relationship regarding the shape of the opening is satisfied.

In the sample mounting table (corresponding to claim 5) of the fifth ultrasonic inspection apparatus, in any of the above structures, it is preferable that the side wall portion on the front side of the container is entirely open. If the front side of the container, which is the sample mounting table, is completely open, it is convenient for the measurer when placing and removing the sample on the sample mounting table.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is an external perspective view of a sample mounting table according to the present invention, FIG. 2 is a diagram showing a usage state of the sample mounting table at the time of inspection by an ultrasonic inspection apparatus, and FIG.

As shown in FIG. 1, the sample mounting table according to the present embodiment is formed by a container (tray) 11 preferably having a rectangular parallelepiped shape as a whole. The container 11 includes a bottom wall 11a and three side walls 11b, 11c, and 11d. In this embodiment, the side wall portion of the front portion is completely removed and is open. This is to enable the inspector to easily perform observation during the inspection. Furthermore, there is no wall corresponding to the ceiling of the container 11 and the upper part is open. The sample to be inspected is placed on the upper surface of the bottom wall 11a. An extended portion 11e extending laterally is formed at the upper edge of the side wall portions 11b to 11d. As shown in FIG. 2, the extension 11 e is used as a hook when the container 11 is set at a predetermined position of the ultrasonic inspection apparatus 12. The size of the extension 11e can be arbitrarily formed. FIG.
In the figure, the extended portions 11e of the side wall portions 11b and 11c are shown by cutting out the outer portions. Note that the shape of the container 11 is not limited to the above-described rectangular parallelepiped shape, and any shape can be used as long as it is a three-dimensional container having at least a bottom wall and a side wall.

In the container 11, 3 is applied to the bottom wall 11a.
The side walls 11b to 11d of the surface are preferably provided upright so as to be substantially at right angles. Bottom wall 11a and side wall 11
A straight boundary line 13 is formed between b and 11d.
In FIG. 1, the boundary 13 is indicated by a solid line portion and a broken line portion. The broken line portion is drawn assuming a boundary line in the opening 14 formed in the bottom wall and the side wall.

A boundary portion is set as the boundary line 13 and a surrounding portion including the boundary line 13. A plurality of openings 14 are preferably formed at equal intervals at the boundary between the bottom wall 11a and the side walls 11b to 11d in the container 11. The opening 14 has a function as an inflow port into which the water 19 enters the inside of the container 11 when the container 11 is immersed in, for example, water 19 which is an ultrasonic wave propagation medium as shown in FIG. Hereinafter, the opening 14 is referred to as an immersion inlet. The plurality of inlets 14 are formed along the boundary 13 at the boundary. As shown in FIG. 3, the cross section of each immersion port 14 is L
It is formed in the shape of a letter. Further, at the boundary portion related to the side wall portions 11b and 11c, for example, four
4 are formed, and, for example, three intrusions 14 are formed at a boundary portion related to the side wall portion 11d. The number and arrangement position of the immersion inlets 14 are arbitrary. At least one is required as the number of the inlets. Further, in the present embodiment, the side wall portion on the near side is completely open, but it is possible to provide a side wall portion also at the relevant portion, and it is also necessary to form a plurality of entrances at the boundary portion in the same manner. Can be.

The shape of the inlet 14 is formed by an opening (hole) formed in the bottom wall 11a and an opening (hole) formed in the side walls 11b to 11d. In this case, as shown in FIG. 3, it is desirable to make the opening formed in the bottom wall 11a smaller than the opening formed in the side walls 11b to 11d, but it is not limited to this. Absent.

The container 11 having the above-mentioned shape can be made by any manufacturing method. The opening or hole serving as the inlet 14 is formed by, for example, mechanical processing. Also, various shapes can be adopted as the shape of the inlet 14.

On the bottom wall 11a of the container 11, for example, one small sample 15 is placed. The container 11 is suspended and supported by the scanning device 16 of the ultrasonic inspection device 12, and is arranged such that the bottom wall 11 a is located in the internal space of the scanning device 16. The container 11 is actually set on the scanning device 16 by transport by a transport device (not shown) or transport by an inspector. In the internal space of the scanning device 16, a water tank 18 supported by a lifting device 17 is arranged. A water tank 18 contains water 19 as an ultrasonic wave propagation medium. In the initial state where the container 11 is set in the scanning device 16 of the ultrasonic inspection device 12, the water tank 1 is moved by the elevating device 17.
8 is in the lower position. At this stage, the container 11 contains water 19
Located outside. When the elevating device 17 rises based on a control command from the control device 20, the water tank 18 rises and the container 11
Is submerged in water 19. At this time, water 19 enters the inside of the container 11, and the sample 15 placed on the bottom wall 11 a of the container 11 is immersed in the water 19.

In the above condition, the sample 15 in water
Probe 22 connected to ultrasonic flaw detector 21
Are arranged to face. Thereafter, the scanning device 16 starts operating in each of the x, y, and z directions according to the control command output from the control device 20, and the ultrasonic measurement is performed. The measurement data captured by the probe 22 is amplified by the ultrasonic flaw detector 21, and necessary data processing is performed in a subsequent stage to perform an inspection.

In the above, the container 11 serving as a sample mounting table
When the water 19 is submerged in the water 19 in the water tank 18, the water 19 enters the inside of the container through the plurality of inlets 14. In this case, according to the immersion inlet 14 having the above-described shape, water (fluid) entering the container 11 is, as shown in FIG.
Water (a vector-like fluid component) 19a entering through the opening 14a of the bottom wall 11a and the opening 14b of the side wall 11b
Water (vector-like fluid component) 19b that enters from
These are combined to produce the fluid indicated by arrow 23.
The fluid 23 is directed above the sample 15 and not toward the sample 15 itself. Also, the inlet 14 is designed in advance so that such a flow occurs. Therefore, the position of the sample 15 does not change even if water enters through the inlet 14. Further, since the flow of the fluid 23 is reduced and formed so as to flow smoothly, no bubbles are generated. In addition, when the water 19 enters the container 11 through the inlet 14, it has the above-described characteristics, so that the lifting / lowering operation of the lifting / lowering device 17 can be accelerated, and the unit inspection time (tact time) can be improved. The inspection efficiency can be improved. Further, since no labor is required in the immersion operation of the sample, the entire inspection operation can be automated.

[0024]

As apparent from the above description, the present invention has the following effects.

Since a predetermined inlet is formed in the container forming the sample mounting table, when the sample mounting table is immersed in water or the like, the position of the sample on the sample mounting table does not shift and the inspection efficiency can be improved. The lifting speed of the water tank can be increased, and the productivity can be increased. The problem can be solved only by processing the sample mounting table, and other special device configurations are not required, and can be achieved at low cost. Further, since the sample is not displaced, the inspection process can be automated without requiring any manpower.

In addition, when water or the like enters the sample mounting table, no bubbles are formed, and therefore, no bubbles adhere to the sample, so that an accurate ultrasonic inspection can be performed. Since the operation of removing bubbles as in the related art is not required, the inspection efficiency can be improved.

The drainage of the sample mounting table is also improved, and the sample can be taken out quickly because no water is accumulated when the sample is taken out.

[Brief description of the drawings]

FIG. 1 is an external perspective view of a sample mounting table according to the present invention.

FIG. 2 is a diagram illustrating a use state of a sample mounting table at the time of inspection by an ultrasonic inspection apparatus.

FIG. 3 is a vertical cross-sectional view of an immersion inlet.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Container (sample mounting table) 11a Bottom wall part 11b, 11c, 11d Side wall part 12 Ultrasonic inspection device 13 Boundary line 14 Inlet (opening) 15 Sample 19 Water

Claims (5)

[Claims] A sample is immersed in a liquid as an ultrasonic medium, an ultrasonic wave is emitted from a probe to the sample, and a reflected wave returned from the sample is received by the probe, and an echo signal is received. In an ultrasonic inspection apparatus for inspecting the sample based on the echo signal, the sample is placed on the bottom, and the bottom is immersed in the liquid so that the sample is immersed in the liquid. Wherein the container is a three-dimensional container having a bottom wall portion and a side wall portion, wherein at least one inflow port for the liquid is formed at a boundary between the bottom wall portion and the side wall portion. Sample mounting table for ultrasonic inspection equipment. 2. The sample mounting table according to claim 1, wherein the inlet comprises an opening formed in the bottom wall and an opening formed in the side wall. . 3. The sample mounting table according to claim 1, wherein a plurality of the inlets are formed along the boundary. 4. The sample mounting table according to claim 2, wherein an opening formed in the bottom wall is smaller than an opening formed in the side wall. 5. The sample mounting table according to claim 1, wherein the front side wall of the container is entirely open.