JPH11307250A - Manufacture of emissive display panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing an emissive display panel which solves problems such as the spreading of dark spots, etc. SOLUTION: A method for manufacturing an emissive display panel having a plurality of light emitting parts includes a first electrode forming process for forming a plurality of first electrodes 103 on a substrate 102, a barrier rib forming process for forming barrier ribs each exposing a part of each first electrode 103 and entirely projecting from over the substrate 102, an emitter layer forming process for forming a plurality of emitter layer 106 each consisting of at least one layer, by accumulating emitters on the exposed parts of the first electrodes 103, a second electrode forming process for forming a plurality of second electrodes 107 on the emitter layers 106, and a barrier rib removing process for removing the barrier ribs after the second electrodes 107 have been formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for manufacturing a light-emitting display panel such as an organic EL display panel using an organic EL material as a light-emitting material.

[0002]

2. Description of the Related Art Light-emitting display panels such as organic EL display panels using an organic EL material as a light-emitting material have been known. This type of light emitting display play panel is configured by sequentially laminating a first electrode (transparent electrode), a light emitting layer, and a second electrode (metal electrode) on a substrate. The region of the light emitting layer sandwiched therebetween is to be the light emitting portion. Then, in order to form the light-emitting portion by dividing it into a plurality, it is necessary to divide the second electrode into a plurality of parts and pattern them. For this purpose, various methods have been proposed.

FIG. 4 shows that the present applicant has disclosed Japanese Patent Application Laid-Open No. 8-31598.
1 illustrates a method of patterning a second electrode proposed in No. 1. In this method, a partition is formed on a substrate, and thereby the second electrode is formed by patterning.

On one surface of a substrate 102, a plurality of first electrodes 103 made of ITO or the like are first formed. The first electrodes 103 are each formed in a substantially strip shape, and are arranged so as to extend in parallel with each other at a predetermined interval. First electrode 103
A plurality of partition walls 105 extending in a direction orthogonal to the first electrode are formed on the substrate so as to protrude from the substrate. The plurality of partition walls 105 are arranged in parallel with each other at a predetermined interval so as to cover a part of the first electrode 103 and expose a part thereof. The partition 105 is a substrate 102
4 has a cross-sectional shape in which the width in contact with the substrate (root side) is small, and the width increases as the distance from the substrate increases, for example, an inverted tapered shape shown in FIG.

Thereafter, a multi-layer or single-layer light emitting layer 106 made of an organic material or the like is formed by vapor deposition. At this time, since the material of the light-emitting layer is divided by the partition 105, the light-emitting layer 106 is formed in the gap region of the partition 105 on the substrate. Thus, the light emitting layer 106 is laminated on the exposed portion of the first electrode 103.

Thereafter, a second electrode 107 made of a metal material such as Al is formed by vapor deposition. Since the metal material of the second electrode 107 is divided and patterned by the partition 105 like the light-emitting layer 106, the metal material is stacked on the light-emitting layer 106 in the gap region of the partition 105.

As a result, each of the second electrodes has a partition 105
And a plurality of belt-like shapes extending in parallel with the above. At this time, since the partition wall 105 has the above-described cross-sectional shape, a short circuit between the adjacent second electrodes is prevented. In other words, the direction of radiation of the metal material during vapor deposition is not uniformly perpendicular to the substrate. Therefore, if the side surface of the partition 105 is a surface perpendicular to the substrate, the metal material adheres and The division of the second electrode that fits is incomplete,
As described above, the cross-sectional shape of the partition 105 is such that the width in contact with the substrate 102 is narrower and the width increases as the distance from the substrate 102 increases, so that the metal material is prevented from adhering to the side surface of the partition 105. The adjacent second electrodes are surely separated.

Thereafter, a sealing can (not shown) is provided so as to cover the entire surface of the substrate, and the first electrode, the light emitting layer, and the second electrode are sealed by the substrate and the sealing can. Thus, the manufacture of the light emitting display panel is completed.

The insulating film layer 104 extending in the direction parallel to the base of the partition 105 may be formed at the base of the partition 105 to prevent the edge of the second electrode from short-circuiting with the first electrode. This insulating film layer 104 is formed in advance immediately before the partition 105 is formed.

The partition 105 is formed using a resist as a material as follows. First, the substrate 102 on which the first electrode 103 is formed by patterning is washed, and a chemically amplified resist (for example, Negative Photoresist ZPN-1100 manufactured by Zeon) layer 105 serving as a partition material is formed on the entire surface of the substrate.
a is formed by spin coating. Next, after prebaking in a hot-air circulation oven, the resist layer 105a is covered with a stripe-shaped photomask 108 orthogonal to the first electrode 103 and exposed, as shown in FIG. As a result, the unmasked portion of the resist layer 105a is gradually cured from the upper side, and as shown in the figure, the inverted trapezoidal region is cured. Further, after removing the mask 108, the P.O. E. FIG. After B, development is performed to remove the masked portions (unexposed portions) of the resist layer. As a result, the partition 105 is formed in a predetermined shape as shown in FIG.

[0011]

According to the above-described conventional method for manufacturing a light emitting display panel, the second electrode can be patterned and formed satisfactorily, but the dark spot spreads from the edge of the light emitting portion near the partition wall. In addition, there is a problem that a light emitting area becomes narrow.

As a cause of this, as shown in FIG. 7, the moisture adhering to the side surfaces of the partition walls penetrates from the edge of the light emitting layer close to the partition walls, thereby deteriorating the light emitting function. Further, the root portion of the partition wall is likely to be incompletely cured, and the gas generated from the uncured portion reacts with the edge of the light emitting layer, resulting in a decrease in the light emitting function.

[0013]

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems, and the invention according to claim 1 is a method for manufacturing a light-emitting display panel having a plurality of light-emitting portions. Forming a plurality of first electrodes corresponding to the light emitting portions on a substrate, and forming a partition that exposes at least a portion of the first electrodes and that entirely protrudes from above the substrate. A partition wall forming step, a light emitting layer forming step of depositing a light emitting material on an exposed portion of the first electrode to form a plurality of at least one light emitting layer, and a plurality of second electrodes on the light emitting layer Forming a second electrode, and a partition removing step of removing the partition after forming the second electrode.

According to a second aspect of the present invention, there is provided a method of manufacturing a light-emitting display panel in which a plurality of light-emitting portions are arranged in a matrix, wherein the plurality of light-emitting portions extend parallel to each other at predetermined intervals on a substrate. A first electrode forming step of forming a first electrode; and a partition wall arranged in parallel at a predetermined interval and each extending in a direction substantially orthogonal to the first electrode so as to cover a part of the first electrode. Forming a plurality of light-emitting layers, forming a plurality of light-emitting layers disposed in a gap between the adjacent partition walls so as to cover the first electrode, and extending in parallel with the partition walls, and the light-emitting layer. A second electrode forming step of forming a plurality of second electrodes extending in parallel with the partition on the second electrode, and a partition removing step of removing the partition after forming the second electrode.

According to a third aspect of the present invention, in the first or second aspect, the second electrode comprises a metal material.

According to a fourth aspect of the present invention, in the first aspect of the present invention, the first electrode and the light emitting layer cooperate with the substrate after the partition removing step. And a sealing tube forming step of forming a sealing tube for sealing the second electrode.

According to a fifth aspect of the present invention, in the invention according to any one of the first to third aspects, at least an edge of the second electrode for sealing the light emitting layer after the partition wall removing step. A sealing film forming step of forming a sealing film covering the portion is performed.

According to a sixth aspect of the present invention, in the first aspect of the present invention, the partition has an overhang portion projecting in a direction parallel to the substrate at an upper portion thereof. Features.

The invention according to claim 7 is characterized in that, in the invention according to any one of claims 1 to 6, the light emitting layer contains an organic EL material.

[0020]

By removing the partition walls, adhesion of moisture and generation of gas are eliminated, and the spread of dark spots generated from the edge of the light emitting layer can be suppressed.

[0021]

Embodiments of the present invention will be described below with reference to the drawings. Note that the same components as those in the related art are denoted by the same reference numerals.

The method for manufacturing a light-emitting display of the present invention comprises:
The method is characterized in that the partition 105 is removed after the second electrode is formed by patterning. Therefore, the manufacturing process up to the point where the second electrode 108 shown in FIG. 4 is formed by patterning is the same as the conventional process.

After the formation of the second electrode is completed, the partition 105
Is carried out. Removal of the partition walls is performed by conventionally known dry etching. At this time, since the light emitting layer made of an organic material is in a state of being covered with the second electrode,
The second electrode acts as a mask for the light emitting layer, thereby preventing the light emitting layer from being removed.

The upper portion of the partition wall 105 is covered with a metal material when the second electrode is formed by patterning. However, since the side surface of the partition wall 105 is exposed, the reaction with the plasma proceeds from the side surface and the partition wall 105 reacts. 105 is removed.

FIG. 1 shows a state in which the step of removing the partition 105 has been completed. Thereafter, a sealing step of sealing the panel is performed. FIG. 2 shows a state where the sealing is performed by the sealing can 109. As shown in the figure, the sealing can 109 cooperates with the substrate 102 to seal the first electrode, the light emitting layer, and the second electrode from the outside air. At this time, the height of the sealing can 109 can be made lower than that of the related art due to the removal of the partition wall 105, and as a result, the panel can be made thinner.

FIG. 3 shows a state where sealing is performed by the sealing film 110. For the sealing film 110, a conventionally known material is used. The sealing film 110 needs to be formed so as to cover at least the edge of the light-emitting layer 106. However, the removal of the partition wall facilitates formation of a continuous film, and the entry of moisture from the edge of the light-emitting layer 110. Is more reliably prevented. In addition,
This sealing film may be used in combination with the above-mentioned sealing can.

[0027]

As described above, according to the method for manufacturing a light emitting display panel of the present invention, since the partition is removed after the formation of the second electrode, adhesion of moisture and generation of gas are eliminated, and the light emitting layer is formed. Of the dark spot generated from the edge side of the image can be suppressed. Further, since the panel can be made thinner than before, the size of the apparatus can be reduced.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of an embodiment of the present invention.

FIG. 2 is an explanatory diagram of an embodiment of the present invention.

FIG. 3 is an explanatory diagram of an embodiment of the present invention.

FIG. 4 is an explanatory view of a conventional light emitting display.

FIG. 5 is an explanatory view showing a manufacturing process of a partition wall.

FIG. 6 is an explanatory view showing a manufacturing process of a partition wall.

FIG. 7 is a diagram showing a problem of a conventional light emitting display panel.

[Explanation of symbols]

 102 substrate 103 first electrode 104 insulating film layer 105 partition wall 105a resist film layer 106 light emitting layer 107 second electrode 108 mask 109 sealing can 110 sealing film

Claims (7)

[Claims] 1. A method for manufacturing a light-emitting display panel having a plurality of light-emitting portions, comprising: a first electrode forming step of forming a plurality of first electrodes corresponding to the light-emitting portions on a substrate; A partition wall forming step of exposing a part of the electrode and forming a partition wall projecting entirely from the substrate; and depositing a light emitting material on the exposed portion of the first electrode, forming a light emitting layer comprising at least one layer. A plurality of light emitting layer forming steps; a second electrode forming step of forming a plurality of second electrodes on the light emitting layer; and a partition removing step of removing the partition after forming the second electrode. A method for manufacturing a light-emitting display panel, comprising: 2. A method of manufacturing a light-emitting display panel in which a plurality of light-emitting portions are arranged in a matrix, comprising: forming a plurality of first electrodes extending in parallel with each other at a predetermined interval on a substrate. A step of forming one electrode, and forming a plurality of partitions arranged in parallel at a predetermined interval and each extending in a direction substantially orthogonal to the first electrode so as to cover a part of the first electrode. A light-emitting layer forming step of forming a plurality of light-emitting layers disposed in a gap between the adjacent partitions so as to cover the first electrode and extending in parallel with the partition; and forming a plurality of light-emitting layers parallel to the partition on the light-emitting layer. Multiple second
A method for manufacturing a light emitting display panel, comprising: a second electrode forming step of forming an electrode; and a partition removing step of removing the partition after forming the second electrode. 3. The method according to claim 1, wherein the second electrode includes a metal material. 4. After the partition removing step, a sealing tube forming step of forming a sealing can for sealing the first electrode, the light emitting layer, and the second electrode in cooperation with the substrate is performed. The method for manufacturing a light-emitting display panel according to any one of claims 1 to 3, wherein 5. A sealing film forming step of forming a sealing film covering at least an edge of the second electrode to seal the light emitting layer after the partition wall removing step. A method for manufacturing a light-emitting display panel according to any one of claims 1 to 3. 6. The method according to claim 1, wherein the partition has an overhang on an upper part thereof in a direction parallel to the substrate. 7. The method for manufacturing a light emitting display panel according to claim 1, wherein said light emitting layer contains an organic EL material.