JPH0835897A - Adjustment resistor for pressure sensor - Google Patents
Adjustment resistor for pressure sensorInfo
- Publication number
- JPH0835897A JPH0835897A JP6172298A JP17229894A JPH0835897A JP H0835897 A JPH0835897 A JP H0835897A JP 6172298 A JP6172298 A JP 6172298A JP 17229894 A JP17229894 A JP 17229894A JP H0835897 A JPH0835897 A JP H0835897A
- Authority
- JP
- Japan
- Prior art keywords
- zero
- pressure sensor
- resistors
- point adjusting
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Measurement Of Current Or Voltage (AREA)
Abstract
(57)【要約】
【目的】本発明の目的は、１種類の集積回路基板で、調
整範囲が異なる機種へ使用できるようにすることにあ
る。
【構成】出力電圧のゼロ点調整抵抗を少なくとも２ケ以
上の抵抗で成形し、前記ゼロ点調整抵抗の配線を導体で
直列と並列両方に配線する。機種に応じて導体切断箇所
を変えて前記ゼロ点調整抵抗を直列または並列とする。
【効果】本発明によれば、１種類の集積回路基板で調整
範囲が異なる機種で使用できるため、集積回路基板の共
用ができコスト低減がはかれる効果がある。
(57) [Summary] [Object] An object of the present invention is to enable one type of integrated circuit board to be used for models having different adjustment ranges. [Structure] A zero-point adjusting resistor for an output voltage is formed by at least two resistors, and the wiring of the zero-point adjusting resistor is wired by a conductor both in series and in parallel. Depending on the model, the conductor cutting point is changed to make the zero-point adjusting resistors serial or parallel. According to the present invention, since one type of integrated circuit board can be used in a model having a different adjustment range, the integrated circuit board can be commonly used and the cost can be reduced.
Description
【０００１】[0001]
【産業上の利用分野】本発明は、絶対圧型圧力センサの
出力電圧ゼロ点調整抵抗器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an output voltage zero point adjusting resistor for an absolute pressure sensor.
【０００２】[0002]
【従来の技術】従来は特公昭47−22973 号公報に記載の
ようにセラミック等の絶縁基板上に形成した平面抵抗器
の抵抗値調節（トリミング）は、単一抵抗であるため、
調整範囲は自ずと限界があった。また、トリミング量を
大きくしなければならない。2. Description of the Related Art Conventionally, as described in Japanese Patent Publication No. 47-22973, resistance adjustment (trimming) of a planar resistor formed on an insulating substrate such as ceramic is performed by a single resistor.
The adjustment range was naturally limited. Also, the trimming amount must be increased.
【０００３】[0003]
【発明が解決しようとする課題】上記従来技術は、絶対
圧型圧力センサ用集積回路を共用化する場合に配慮しな
ければならない真空室の残圧バラツキ及び機種によるダ
イアフラム板厚の違いから来るゼロ点調整抵抗値範囲拡
大の点について配慮がされていない。本発明は、ゼロ点
調整抵抗値範囲を拡大できる様にすることを目的とす
る。In the above-mentioned prior art, the zero point which should be taken into consideration when the integrated circuit for absolute pressure type pressure sensor is shared is caused by the residual pressure variation in the vacuum chamber and the difference in the diaphragm plate thickness depending on the model. No consideration is given to expanding the range of adjustment resistance values. An object of the present invention is to make it possible to expand the zero point adjustment resistance value range.
【０００４】[0004]
【課題を解決するための手段】出力電圧のゼロ点調整抵
抗を少なくとも２ケ以上の抵抗で成形し、前記ゼロ点調
整抵抗の配線パターンで直列と並列両方に配線する。A zero-point adjusting resistor for an output voltage is formed of at least two resistors, and is wired in series and in parallel with the wiring pattern of the zero-point adjusting resistor.
【０００５】機種に応じて短絡切断箇所を変えて前記ゼ
ロ点調整抵抗を直列又は並列とする。The zero point adjusting resistors are connected in series or in parallel by changing the short-circuit cut location according to the model.
【０００６】[0006]
【作用】ゼロ点調整抵抗を少なくとも２ケ以上の抵抗で
成形し、前記ゼロ点調整抵抗を短絡して直列と並列両方
に配線してあるため短絡切断箇所を変えることにより、
ゼロ点調整範囲が変えられる。例えば、図１においてａ
とｃの導体を切断すれば抵抗ＲAとＲBは直列接続であ
り、高抵抗値調整機種に適する。The zero-point adjusting resistor is formed by at least two resistors, and the zero-point adjusting resistor is short-circuited and wired in both series and parallel.
The zero point adjustment range can be changed. For example, in FIG.
If the conductors of c and c are cut, the resistors RA and RB are connected in series, which is suitable for high resistance adjustment models.
【０００７】一方ｂの導体を切断すれば抵抗ＲAとＲBは
並列接続であり、低抵抗値調整機種に適する。On the other hand, if the conductor of b is cut, the resistors RA and RB are connected in parallel, which is suitable for low resistance value adjusting models.
【０００８】[0008]
【実施例】以下、本発明の一実施例を図１で説明する。
圧力信号を電気信号に変換する半導体歪式ゲージ１は、
シリコンチップ表面に４ケの拡散抵抗２が配置されてお
り導体パターンでブリッジに配線する。更に、裏面は化
学薬品によりダイアフラムに加工し前記微小電気信号を
増幅するための増幅回路を厚膜抵抗３と演算増幅器４及
び導体５で集積回路に形成する。センサ出力電圧調整は
感度を決めるスパン調整とオフセット電位を決めるゼロ
点調整が有る。前記ゼロ点調整抵抗回路６は抵抗ＲAと
ＲB及び導体５から構成する。ここで、機種に応じて導
体５のａとｃ点を切断し、抵抗ＲAとＲBを直列接続とす
るか、または導体５のｂ点を切断し抵抗ＲAとＲBを並列
接続とする。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG.
The semiconductor strain gauge 1 that converts a pressure signal into an electric signal is
Four diffusion resistors 2 are arranged on the surface of the silicon chip and are connected to the bridge with a conductor pattern. Further, the back surface is processed into a diaphragm by a chemical and an amplifier circuit for amplifying the minute electric signal is formed into an integrated circuit by the thick film resistor 3, the operational amplifier 4 and the conductor 5. Sensor output voltage adjustment includes span adjustment that determines sensitivity and zero point adjustment that determines offset potential. The zero-point adjusting resistor circuit 6 comprises resistors RA and RB and a conductor 5. Here, depending on the model, the points a and c of the conductor 5 are cut and the resistors RA and RB are connected in series, or the point b of the conductor 5 is cut and the resistors RA and RB are connected in parallel.
【０００９】[0009]
【発明の効果】本発明によれば、１種類の集積回路で調
整範囲が異なる機種に使用できるため、集積回路基板の
共用ができコスト低減がはかれる効果がある。According to the present invention, since one type of integrated circuit can be used for models having different adjustment ranges, the integrated circuit board can be shared and the cost can be reduced.
【図１】本発明の一実施例の回路構成図である。FIG. 1 is a circuit configuration diagram of an embodiment of the present invention.
１…半導体歪式ゲージ、２…拡散抵抗、３…厚膜抵抗
（または薄膜抵抗）、４…演算増幅器、５…導体、６…
ゼロ点調整抵抗回路。1 ... Semiconductor strain gauge, 2 ... Diffusion resistance, 3 ... Thick film resistance (or thin film resistance), 4 ... Operational amplifier, 5 ... Conductor, 6 ...
Zero adjustment resistor circuit.
Claims (1)
増幅回路を介して電気信号に変換する圧力センサにおい
て、出力電圧のゼロ点調整抵抗を少なくとも２ケ以上で
成形し、前記ゼロ点調整抵抗の配線を少なくとも１箇所
短絡しておき、機種に応じて短絡箇所の切断を変えて前
記ゼロ点調整抵抗を直列にしたり並列にしたりして調整
可能な範囲を広げることを特徴とする圧力センサ用調整
抵抗器。1. A pressure sensor for detecting a pressure as a resistance change and converting the signal into an electric signal through an amplifier circuit, wherein a zero-point adjusting resistor for an output voltage is formed by at least two pieces, and the zero-point adjusting is performed. A pressure sensor characterized by widening the adjustable range by short-circuiting at least one location of the resistance wiring and changing the disconnection of the short-circuited location depending on the model to connect the zero-point adjustment resistors in series or in parallel. Adjusting resistor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6172298A JPH0835897A (en) | 1994-07-25 | 1994-07-25 | Adjustment resistor for pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6172298A JPH0835897A (en) | 1994-07-25 | 1994-07-25 | Adjustment resistor for pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0835897A true JPH0835897A (en) | 1996-02-06 |
Family
ID=15939339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6172298A Pending JPH0835897A (en) | 1994-07-25 | 1994-07-25 | Adjustment resistor for pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0835897A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010036677A1 (en) | 2009-10-21 | 2011-04-28 | Fanuc Ltd. | Magnetic pulse generator with offset function |
-
1994
- 1994-07-25 JP JP6172298A patent/JPH0835897A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010036677A1 (en) | 2009-10-21 | 2011-04-28 | Fanuc Ltd. | Magnetic pulse generator with offset function |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Effective date: 20050218 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
|
| A762 | Written abandonment of application |
Effective date: 20070416 Free format text: JAPANESE INTERMEDIATE CODE: A762 |