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JPH08236105A - Manufacture of lithium secondary battery positive electrode - Google Patents

Manufacture of lithium secondary battery positive electrode

Info

Publication number
JPH08236105A
JPH08236105A JP7039772A JP3977295A JPH08236105A JP H08236105 A JPH08236105 A JP H08236105A JP 7039772 A JP7039772 A JP 7039772A JP 3977295 A JP3977295 A JP 3977295A JP H08236105 A JPH08236105 A JP H08236105A
Authority
JP
Japan
Prior art keywords
lithium
positive electrode
substrate
film
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP7039772A
Other languages
Japanese (ja)
Inventor
Hiroya Kirimura
浩哉 桐村
Kiyoshi Ogata
潔 緒方
Akinori Ebe
明憲 江部
Yasushi Iwamoto
泰志 岩本
Satoru Nishiyama
哲 西山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP7039772A priority Critical patent/JPH08236105A/en
Publication of JPH08236105A publication Critical patent/JPH08236105A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

Landscapes

  • Physical Vapour Deposition (AREA)
  • Battery Electrode And Active Subsutance (AREA)

Abstract

PURPOSE: To manufacture a lithium secondary battery positive electrode with high film-adhesion property and excellent characteristic of battery by forming a metal oxide film containing lithium on an electrode substrate by jointly using vapor deposition of a lithium containing material and ion beam irradiation. CONSTITUTION: A lithium-containing material is vaporized from a vaporizing source 3 inside a vacuum chamber 1 having an exhaust device 7, and a vaporized material 3a is vapor-deposited on an electrode substrate S mounted on a base holder 2. At the same time, ion beams are irradiated on the substrate S from an ion source 4. A lithium-containing metal oxide film is formed on the substrate S. As the lithium-containing metal oxide, LiMn2 O4 , LiWO3 , LiCoO2 , LiNiCoO, and LiV2 O5 are used. This ion beam is preferably formed by using an inert gas or an oxygen gas as a raw gas, and an accelerating energy of 100eV-500KeV. By using the lithium-containing metal oxide film as the positive electrode of a lithium secondary battery, the mobility of a lithium ion on the inside hardly drops and desirable battery characteristics is easily obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、リチウム二次電池の正
極、特に大電流放電時の放電エネルギ密度の高いリチウ
ム二次電池の正極の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positive electrode for a lithium secondary battery, and more particularly to a method for manufacturing a positive electrode for a lithium secondary battery having a high discharge energy density during high-current discharge.

【0002】[0002]

【従来の技術】リチウム二次電池の正極活物質は、充放
電の可逆性が良いこと、すなわちリチウムイオン(Li
+ )の出入りに伴う結晶構造の変化が小さいことが望ま
れる。このような物質として、チタン(Ti)、ニオブ
(Nb)、モリブデン(Mo)等の硫化物やセレン化
物、リチウムを含む金属酸化物等が用いられる。特に、
リチウムマンガン酸化物(LiMn2 4 )等のリチウ
ムを含む金属酸化物は高いエネルギ密度を与えることが
知られている。LiMn2 4 からなる正極は、従来、
2酸化マンガン(MnO2 )と水酸化リチウム(LiO
H)の粉体を混合し焼成して得られるLiMn2 4
粉体に、結着剤と導電剤を混合し板状に成形して製造さ
れている。また、近年、真空蒸着法により正極基体上に
LiMn2 4 膜を形成する方法も用いられている。
2. Description of the Related Art A positive electrode active material for a lithium secondary battery is charged and discharged.
Good reversibility of electricity, that is, lithium ion (Li
+) It is desirable that the change in crystal structure with the comings and goings is small.
Be done. Such substances include titanium (Ti) and niobium.
Sulfide such as (Nb) and molybdenum (Mo) and selenization
And metal oxides containing lithium are used. Especially,
Lithium manganese oxide (LiMn2OFour) Etc.
Metal oxides containing aluminum can give high energy density
Are known. LiMn2OFourThe positive electrode consisting of
Manganese dioxide (MnO2) And lithium hydroxide (LiO
LiMn obtained by mixing and firing the powder of H)2OFourof
It is manufactured by mixing a binder and a conductive agent into powder and molding it into a plate shape.
Have been. In addition, in recent years, the vacuum evaporation method has been applied to the positive electrode substrate.
LiMn2O FourA method of forming a film is also used.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、このよ
うに板状に成形して製造されたLiMn2 4 正極は、
結晶欠陥や結晶粒界を多く含むため、またLiMn2
4 粉体に配合される結着剤及び導電剤が非晶質領域とし
て存在するため、これらの部分がリチウムイオンの移動
を抑制して、正極におけるリチウムイオンの移動度が低
下する。特に大電流放電を行おうとする場合は、結晶欠
陥、結晶粒界及び前記の非晶質領域がリチウムイオンの
移動度を律速し、大電流放電が困難になる。
However, the LiMn 2 O 4 positive electrode manufactured by molding in the plate shape as described above has the following problems.
Since it contains many crystal defects and crystal grain boundaries, LiMn 2 O
4 Since the binder and the conductive agent mixed in the powder exist as an amorphous region, these portions suppress the movement of lithium ions, and the mobility of lithium ions in the positive electrode decreases. In particular, when a large current discharge is to be performed, crystal defects, crystal grain boundaries, and the amorphous region control the mobility of lithium ions, making a large current discharge difficult.

【0004】また、従来の真空蒸着法を用いた正極製造
方法によると、通常、電極基体上に膜厚100μm程度
のLiMn2 4 膜を形成するが、該膜に発生する内部
応力により該膜は基体との密着性が劣り、電池使用時に
一部剥離し易い欠点を有し、実用に供し難いのが現状で
ある。また、この方法によると、形成される膜の結晶性
や結晶粒密度を制御できないため、放電電圧や放電時間
等の所望の電池特性を得るためには、成膜後に高温でア
ニール処理(熱処理)しなければならず、耐熱性の点で
基体の材質が制限される。
Further, according to the conventional method for producing a positive electrode using the vacuum evaporation method, a LiMn 2 O 4 film having a film thickness of about 100 μm is usually formed on an electrode substrate, but the film is formed by internal stress generated in the film. In fact, it is difficult to put it into practical use because it has a poor adhesion to the substrate and is easily peeled off when the battery is used. Further, according to this method, the crystallinity and crystal grain density of the formed film cannot be controlled. Therefore, in order to obtain desired battery characteristics such as discharge voltage and discharge time, annealing treatment (heat treatment) at high temperature after film formation is performed. However, the material of the substrate is limited in terms of heat resistance.

【0005】そこで本発明は、電極基体上にリチウムを
含む物質を蒸着してリチウムを含む金属酸化物膜を形成
することによりリチウム二次電池の正極を製造する方法
であって、得られる正極を電池に用いる場合、内部での
リチウムイオンの移動度が低下し難く、且つ、放電電圧
や放電時間等の所望の電池特性を容易に得ることがで
き、しかも、該膜を該電極基体上に密着性良好に形成で
きる方法を提供することを課題とする。
Therefore, the present invention is a method for producing a positive electrode for a lithium secondary battery by depositing a substance containing lithium on an electrode substrate to form a metal oxide film containing lithium. When used in a battery, the mobility of lithium ions inside is less likely to decrease, and desired battery characteristics such as discharge voltage and discharge time can be easily obtained, and the film adheres to the electrode substrate closely. An object of the present invention is to provide a method capable of forming good properties.

【0006】[0006]

【課題を解決するための手段】前記課題を解決する本発
明のリチウム二次電池正極の製造方法は、電極基体上へ
のリチウムを含む物質の蒸着と、該基体へのイオンビー
ム照射を併用して、該基体上にリチウムを含む金属酸化
物の膜を形成することを特徴とする。基体へのイオンビ
ーム照射は基体上への物質蒸着と同時、又は交互に、又
は該蒸着後、又は該蒸着の前後等に行うことが考えられ
る。蒸着前にイオンビームを照射すると基体表面のクリ
ーニング、改質等も可能となる。
The method for producing a positive electrode for a lithium secondary battery of the present invention, which solves the above-mentioned problems, uses a combination of vapor deposition of a substance containing lithium on an electrode substrate and irradiation of the substrate with an ion beam. Then, a film of a metal oxide containing lithium is formed on the substrate. It is conceivable that the irradiation of the substrate with the ion beam is carried out simultaneously with or alternately with the vapor deposition of the substance on the substrate, after the vapor deposition, before or after the vapor deposition, or the like. Irradiation with an ion beam before vapor deposition enables cleaning and modification of the substrate surface.

【0007】前記のリチウムを含む金属酸化物として
は、LiMn2 4 、リチウムタングステン酸化物(L
ixWO3 )、リチウムコバルト酸化物(LiCo
2 )、リチウムニッケルコバルト酸化物(LiNix
CoyO2 )、リチウムマンガン酸化物(LixMnO
2 )、リチウムバナジウム酸化物(LiV2 5 )等を
挙げることができる。
Examples of the metal oxide containing lithium include LiMn 2 O 4 and lithium tungsten oxide (L
ixWO 3 ), lithium cobalt oxide (LiCo
O 2 ), lithium nickel cobalt oxide (LiNix
CoyO 2 ), lithium manganese oxide (LixMnO
2 ), lithium vanadium oxide (LiV 2 O 5 ) and the like.

【0008】前記のリチウムを含む物質の蒸着は、電子
ビームにより蒸発物質を加熱して蒸発させる真空蒸着
法、又は抵抗により蒸発物質を加熱して蒸発させる真空
蒸着法、又はレーザにより蒸発物質を加熱して蒸発させ
る真空蒸着法、又は高周波により蒸発物質を誘導加熱し
て蒸発させる真空蒸着法、又はイオンビーム、マグネト
ロン、高周波等の手段によりターゲットをスパッタする
スパッタ蒸着法等を用いて行うことができる。前記のリ
チウムを含む物質の蒸着のための元になる前記蒸発物質
又はスパッタターゲットとなる物質が複数ある場合、各
物質を1つの蒸発源から蒸発させることも、或いはそれ
ぞれ別の蒸発源から蒸発させることも可能である。
The vapor deposition of the substance containing lithium is performed by a vacuum vapor deposition method in which the vaporized substance is heated and vaporized by an electron beam, a vacuum vapor deposition method in which the vaporized substance is heated and vaporized by resistance, or the vaporized substance is heated by laser. Vapor deposition method of evaporating and then evaporating the vaporized material by induction heating with a high frequency, or a vapor deposition method of sputtering a target by means of ion beam, magnetron, high frequency or the like. . When there are a plurality of evaporation materials or sputtering target materials for vapor deposition of the lithium-containing material, each material may be evaporated from one evaporation source or may be evaporated from different evaporation sources. It is also possible.

【0009】前記イオンビーム照射においては、通常、
原料ガスからイオンと共に生成されるラジカルも照射さ
れる。前記照射するイオンビームは、不活性ガス(ヘリ
ウム(He)ガス、ネオン(Ne)ガス、アルゴン(A
r)ガス、クリプトン(Kr)ガス、キセノン(Xe)
ガス)又は酸素(O2 )ガス又は前記不活性ガスと酸素
ガスとの混合ガス等を原料として得られるイオンビーム
であることが考えられる。
In the ion beam irradiation, usually,
Radicals generated together with ions from the source gas are also irradiated. The ion beam for irradiation is an inert gas (helium (He) gas, neon (Ne) gas, argon (A)
r) gas, krypton (Kr) gas, xenon (Xe)
Gas) or oxygen (O 2 ) gas or a mixed gas of the above-mentioned inert gas and oxygen gas or the like, which is considered to be an ion beam obtained.

【0010】前記イオンビームの照射は、リチウムを含
む物質の蒸着と同時、交互、又は該物質蒸着後、又は該
物質蒸着の前後等に行うが、物質蒸着と同時又は交互に
行う場合には物質蒸着の初期にのみイオンビームを照射
してもよい。また、基体へのイオンビームの入射角度は
基体表面に対して10°〜90°程度とすることが考え
られる。
Irradiation with the ion beam is performed simultaneously with, or alternately with, vapor deposition of a substance containing lithium, or after vapor deposition of the substance, or before or after vapor deposition of the substance. The ion beam may be irradiated only at the initial stage of vapor deposition. Further, it is considered that the angle of incidence of the ion beam on the substrate is about 10 ° to 90 ° with respect to the surface of the substrate.

【0011】前記イオンビーム照射における加速エネル
ギは、100eV〜50keV程度とすることが考えら
れる。これは、100eVより小さいと十分な膜密着力
を得ることができないからであり、50keVより大き
いと結晶構造の破壊及び欠陥を伴うからである。また、
基体に到達する蒸発物質の分子数と照射イオン数の比
(蒸発物質/イオン輸送比)は、それには限定されない
が、0.5〜200程度とすることが考えられる。これ
は0.5より小さいと膜中欠陥が増大し、膜成長が困難
となるからであり、200より大きいとイオン照射の効
果が得られないからである。
It is considered that the acceleration energy in the ion beam irradiation is about 100 eV to 50 keV. This is because if it is less than 100 eV, a sufficient film adhesion cannot be obtained, and if it is more than 50 keV, the crystal structure is destroyed and defects occur. Also,
The ratio of the number of molecules of the evaporated substance reaching the substrate to the number of irradiated ions (evaporated substance / ion transport ratio) is not limited thereto, but is considered to be about 0.5 to 200. This is because if it is less than 0.5, defects in the film increase and the film growth becomes difficult, and if it is more than 200, the effect of ion irradiation cannot be obtained.

【0012】前記の範囲内でイオンビームの加速エネル
ギ及び蒸発物質/イオン輸送比を制御することにより、
得られる膜の内部応力を制御し、また結晶性及び結晶粒
密度を所望のものにすることができる。また、成膜中
に、前記範囲内でイオンビームの加速エネルギを大きく
することにより、電解液と接触する膜表面のみについて
結晶構造をアモルファス化することもでき、これによっ
て結晶構造の疲労破壊強度を高めることができる。
By controlling the acceleration energy of the ion beam and the evaporation material / ion transport ratio within the above range,
The internal stress of the obtained film can be controlled, and the crystallinity and the grain density can be desired. Also, during film formation, by increasing the acceleration energy of the ion beam within the above range, it is possible to amorphize the crystal structure only on the film surface in contact with the electrolytic solution, thereby increasing the fatigue fracture strength of the crystal structure. Can be increased.

【0013】前記電極基体は、電池に用いられる電極で
あれば特に限定されず、材質としては、ニッケル(N
i)、アルミニウム(Al)、銅(Cu)、ステンレス
スチール(SUS)、炭素(C)等の導電性の材質を挙
げることができ、その形状は板状、フィルム状、発泡体
状、不織布状等であることが考えられ、特に限定はな
い。
The electrode substrate is not particularly limited as long as it is an electrode used in a battery, and the material is nickel (N
i), aluminum (Al), copper (Cu), stainless steel (SUS), carbon (C), and other electrically conductive materials can be mentioned, and their shapes are plate-like, film-like, foam-like, and non-woven fabric-like. Etc., and there is no particular limitation.

【0014】[0014]

【作用】本発明のリチウム二次電池正極の製造方法によ
ると、電極基体上へのリチウムを含む物質の蒸着と、該
基体へのイオンビーム照射を併用することで、該基体上
にリチウムを含む金属酸化物の膜が形成される。イオン
ビーム照射時のイオン加速エネルギ及び(又は)蒸発物
質/イオン輸送比を制御することにより、形成される正
極活物質膜の結晶性及び結晶粒密度を制御することがで
き、これにより得られる正極を用いた電池では、放電電
圧や放電時間等の所望の電池特性を容易に得ることがで
きる。
According to the method for producing a positive electrode for a lithium secondary battery of the present invention, the deposition of a substance containing lithium on an electrode substrate and the irradiation of the substrate with an ion beam are combined to contain lithium on the substrate. A film of metal oxide is formed. By controlling the ion acceleration energy and / or the evaporation material / ion transport ratio at the time of ion beam irradiation, the crystallinity and crystal grain density of the formed positive electrode active material film can be controlled. In the battery using, the desired battery characteristics such as discharge voltage and discharge time can be easily obtained.

【0015】また、従来の蒸着法を用いた正極活物質膜
形成による正極の製造方法においては、得られる膜の結
晶性が低いため、成膜後、該膜を高温でアニール処理し
て所望の結晶性を得なければならなかったが、本発明方
法においては、結晶性を容易に制御できるため、成膜後
のアニール処理を行う必要がある場合にも、該処理を低
温で行うだけで所望の結晶性を得ることができる。そし
て、それにより耐熱性の低い材質形状等の電極基体も採
用することができ、電極基体をより広い範囲から選ぶこ
とができるようになると共にアニール処理に要するコス
トを低減できる。
Further, in the conventional method for producing a positive electrode by forming a positive electrode active material film using a vapor deposition method, since the obtained film has low crystallinity, the film is annealed at a high temperature after the film is formed to obtain a desired film. Although it was necessary to obtain crystallinity, in the method of the present invention, since the crystallinity can be easily controlled, even when it is necessary to perform an annealing treatment after film formation, it is desirable to perform the treatment at a low temperature. The crystallinity of can be obtained. As a result, it is possible to employ an electrode substrate having a material shape with low heat resistance, and it is possible to select the electrode substrate from a wider range and reduce the cost required for the annealing treatment.

【0016】また、成膜温度、イオン照射条件及び処理
時間等を最適化することでアニール処理を省略できる可
能性もある。また、イオンビーム照射時の加速エネルギ
を高くすることにより電解液と接触する膜表面のみにつ
いて結晶構造をアモルファス化することもでき、それに
より結晶構造の疲労破壊強度を高くすることができる。
Further, there is a possibility that the annealing process can be omitted by optimizing the film forming temperature, the ion irradiation conditions, the processing time and the like. Further, by increasing the acceleration energy at the time of ion beam irradiation, the crystal structure can be made amorphous only on the film surface that comes into contact with the electrolytic solution, and thereby the fatigue fracture strength of the crystal structure can be increased.

【0017】また、イオンビーム照射により、形成され
る膜と基体との界面に該両者の構成原子からなる混合層
が形成されるため、これによって該膜の密着性が向上す
る。また、イオンビーム照射時の加速エネルギを制御す
ることで膜の結晶性を制御し、それにより膜の内部応力
を緩和できるとともに、この点でも該膜の基体への密着
性を向上させることができる。さらに、膜の内部応力を
緩和できるので電極基体が導電性フィルムのときでも該
フィルム上への正極活物質膜の形成が可能となる。
Further, since the ion beam irradiation forms a mixed layer composed of the constituent atoms of the film and the substrate to be formed, the adhesion of the film is improved. In addition, the crystallinity of the film can be controlled by controlling the acceleration energy at the time of ion beam irradiation, whereby the internal stress of the film can be relaxed, and also in this respect, the adhesion of the film to the substrate can be improved. . Furthermore, since the internal stress of the film can be relaxed, even when the electrode substrate is a conductive film, the positive electrode active material film can be formed on the film.

【0018】また、従来の、正極活物質を板状に成形し
て正極を製造する場合に見られるような結着剤や導電剤
等の不純物からなる非晶質領域が存在せず、また、該従
来法に比べて、結晶成長を制御することで結晶欠陥や結
晶粒界を少なくすることができるため、電池として使用
する場合にリチウムイオンの移動度の低下が抑制され
る。
Further, there is no amorphous region composed of impurities such as a binder and a conductive agent, which is found in the case of manufacturing a positive electrode by molding a positive electrode active material into a plate shape in the related art, and As compared with the conventional method, crystal defects and crystal grain boundaries can be reduced by controlling the crystal growth, so that the decrease in the mobility of lithium ions can be suppressed when used as a battery.

【0019】[0019]

【実施例】以下、本発明の実施例を図面を参照して説明
する。図1は本発明のリチウム二次電池正極の製造方法
の実施に用いる成膜装置の概略構成を示す図である。こ
の装置は、真空容器1を有し、容器1内には被成膜電極
基体Sを支持するホルダ2、並びにこれに対向する位置
に、蒸発源3及びイオン源4が設置されている。また基
体ホルダ2付近には、例えば水晶振動子式膜厚モニタ等
の膜厚モニタ5、及び例えばファラデーカップ等のイオ
ン電流測定器6が配置されている。また容器1には排気
装置7が付設されて容器1内を所定の真空度にすること
ができる。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a schematic configuration of a film forming apparatus used for carrying out the method for producing a lithium secondary battery positive electrode of the present invention. This apparatus has a vacuum container 1, in which a holder 2 for supporting a film-forming electrode substrate S, and an evaporation source 3 and an ion source 4 are installed at positions facing the holder 2. Further, a film thickness monitor 5 such as a crystal oscillator type film thickness monitor and an ion current measuring device 6 such as a Faraday cup are arranged near the substrate holder 2. Further, an exhaust device 7 is attached to the container 1 so that the inside of the container 1 can have a predetermined degree of vacuum.

【0020】この装置を用いて、本発明のリチウム二次
電池正極の製造方法を実施するにあたっては、電極基体
Sをホルダ2に支持させた後、真空容器1内を所定の真
空度にする。次いで、基体Sに向けて蒸発源3から目的
とする膜の構成原子を含む蒸発物質3aを真空蒸着さ
せ、それと同時、又は交互、又は該蒸着後、又は該蒸着
の前後等にイオン源4から不活性ガス又は酸素ガス又は
不活性ガスと酸素ガスの混合ガスから得られるイオンビ
ームを当該蒸着面に照射してリチウムを含む金属酸化物
の膜を形成する。
In carrying out the method for producing a lithium secondary battery positive electrode of the present invention using this apparatus, after the electrode substrate S is supported by the holder 2, the inside of the vacuum container 1 is brought to a predetermined vacuum degree. Then, the evaporation material 3a containing the constituent atoms of the target film is vacuum-deposited from the evaporation source 3 toward the substrate S, and simultaneously with or alternately with the evaporation material 3a, after the evaporation, or before or after the evaporation, from the ion source 4. The deposition surface is irradiated with an ion beam obtained from an inert gas, an oxygen gas, or a mixed gas of an inert gas and an oxygen gas to form a metal oxide film containing lithium.

【0021】前記成膜操作において、前記イオンビーム
照射は物質3aの真空蒸着の初期にのみ行ってもよい。
また、イオンビーム加速エネルギは100eV〜50k
eVとし、基体Sに対するイオンビームの入射角度は1
0°〜90°とする。また、蒸発物質/イオン輸送比は
0.5〜200とする。該輸送比の制御は、膜厚モニタ
5で基体Sへの蒸発物質3aの蒸着量を計測し、イオン
電流測定器6で基体Sへ照射されるイオンの個数を計測
することで行う。
In the film forming operation, the ion beam irradiation may be performed only at the initial stage of the vacuum deposition of the substance 3a.
Further, the ion beam acceleration energy is 100 eV to 50 k.
eV, the incident angle of the ion beam on the substrate S is 1
The angle is 0 ° to 90 °. Further, the evaporation material / ion transport ratio is 0.5 to 200. The transport ratio is controlled by measuring the deposition amount of the evaporation material 3a on the substrate S by the film thickness monitor 5 and measuring the number of ions with which the substrate S is irradiated by the ion current measuring device 6.

【0022】この方法によると、イオン源4によるイオ
ンビームの加速エネルギ及び(又は)蒸発物質/イオン
輸送比を制御することにより、形成される膜の結晶性及
び結晶粒密度を制御することができるため、膜形成され
た正極を用いた電池は所望の電池特性を有するものとな
り、この点で電池設計も容易になる。また同様に、形成
される膜の結晶性の制御が容易であることから、成膜後
にアニール処理を行う場合でも、その処理温度を低温化
することができ、電極基体の選択許容範囲が広がると共
にアニール処理に要するコストを低減できる。
According to this method, the crystallinity and the grain density of the film formed can be controlled by controlling the acceleration energy of the ion beam by the ion source 4 and / or the evaporation material / ion transport ratio. Therefore, the battery using the film-formed positive electrode has desired battery characteristics, and in this respect, the battery design becomes easy. Similarly, since it is easy to control the crystallinity of the formed film, the processing temperature can be lowered even when the annealing treatment is performed after the film formation, and the selection allowable range of the electrode substrate is widened. The cost required for annealing can be reduced.

【0023】また、イオンビーム照射により膜と基体S
の界面に混合層が形成されることによって膜の密着性が
向上する。また、形成される膜の結晶性を制御できるた
め、該膜の内部応力を緩和することができる。そしてこ
の点でも膜の基体への密着性を向上させることができ
る。また、従来の正極活物質を板状に成形して正極を製
造する場合にみられるような、結着剤や導電剤等の不純
物からなる非晶質領域が存在せず、また結晶成長を制御
することで結晶欠陥や結晶粒界を少なくすることができ
るため、正極使用時のリチウムイオンの移動度が向上
し、それだけ大電流放電時の放電エネルギ密度を高くで
きる。
Further, the film and the substrate S are irradiated with the ion beam.
The formation of the mixed layer at the interface improves the adhesion of the film. Further, since the crystallinity of the formed film can be controlled, the internal stress of the film can be relieved. Also in this respect, the adhesion of the film to the substrate can be improved. In addition, there is no amorphous region consisting of impurities such as a binder or a conductive agent, which is seen in the case of manufacturing a positive electrode by molding a conventional positive electrode active material into a plate, and controlling the crystal growth. By doing so, crystal defects and crystal grain boundaries can be reduced, so that the mobility of lithium ions when the positive electrode is used can be improved, and the discharge energy density at the time of large current discharge can be increased accordingly.

【0024】次に、図1に示す装置による本発明方法実
施の具体例について説明する。 実験例 ステンレススチール(SUS)よりなる電極基体Sをホ
ルダ2に設置し、当初真空容器1内を1×10-6Tor
r以下の真空度とした。その後、酸化リチウム(Li2
O)及び1酸化マンガン(MnO)を混合した蒸発物質
3aを電子ビーム蒸発源3を用いて蒸気化し、基体S上
に成膜した。それと同時にイオン源4からArイオンビ
ームを基体Sに対して垂直に、加速エネルギを1keV
〜10keVとして照射した。このとき、容器1内は酸
素分圧1×10-6Torr〜5×10-4Torrに保っ
た。Li2 O及びMnOの蒸着量(分子数)に対するA
rイオン数の比(Li2 O+MnO/Ar)は5〜70
とした。また、成膜中の基体Sの温度は室温〜500℃
に保った。
Next, a specific example of carrying out the method of the present invention by the apparatus shown in FIG. 1 will be described. Experimental Example An electrode substrate S made of stainless steel (SUS) was installed in a holder 2, and the inside of the vacuum container 1 was initially set at 1 × 10 −6 Tor.
The degree of vacuum was set to r or less. Then, lithium oxide (Li 2
O) and manganese monoxide (MnO) were mixed to vaporize the vaporized substance 3a using the electron beam vaporization source 3 to form a film on the substrate S. At the same time, the Ar ion beam from the ion source 4 is perpendicular to the substrate S and the acceleration energy is 1 keV.
Irradiation was performed at -10 keV. At this time, the oxygen partial pressure in the container 1 was maintained at 1 × 10 −6 Torr to 5 × 10 −4 Torr. A for the deposition amount (number of molecules) of Li 2 O and MnO
The ratio of the number of r ions (Li 2 O + MnO / Ar) is 5 to 70.
And The temperature of the substrate S during film formation is room temperature to 500 ° C.
Kept at.

【0025】これにより基体S上に膜厚1μm〜50μ
mのLiMn2 4 膜を形成し、それに伴い、基体Sと
LiMn2 4 膜との界面に厚さ1μm〜5μmの混合
層が形成された。LiMn2 4 膜が形成された電極基
体Sを500℃で10時間アニール処理して得られる正
極は、電池として用いた場合に剥離が見られなかった。
また、形成されたLiMn2 4 膜は、立方晶の結晶構
造をとり、結晶性は前記のイオンビームの加速エネルギ
及びLi2 O+MnO/Ar輸送比の範囲内で制御さ
れ、その結果、得られる正極を用いたリチウム二次電池
は放電電圧2.5V〜4.5Vの範囲で放電容量200
mA・h/gの電池特性を示した。
As a result, the film thickness on the substrate S is 1 μm to 50 μm.
LiMn 2 O 4 film having a thickness of 1 μm to 5 μm was formed at the interface between the substrate S and the LiMn 2 O 4 film. No peeling was observed when the positive electrode obtained by annealing the electrode substrate S on which the LiMn 2 O 4 film was formed at 500 ° C. for 10 hours was used as a battery.
In addition, the formed LiMn 2 O 4 film has a cubic crystal structure, and the crystallinity is controlled within the range of the ion beam acceleration energy and the Li 2 O + MnO / Ar transport ratio, and as a result, it is obtained. The lithium secondary battery using the positive electrode has a discharge capacity of 200 V in a discharge voltage range of 2.5 V to 4.5 V.
The battery characteristic was mA · h / g.

【0026】[0026]

【発明の効果】本発明によると、電極基体上にリチウム
を含む物質を蒸着してリチウムを含む金属酸化物膜を形
成することによりリチウム二次電池の正極を製造する方
法であって、得られる正極を電池として用いる場合、内
部でのリチウムイオンの移動度が低下し難く、且つ、放
電電圧や放電時間等の所望の電池特性を容易に得ること
ができ、しかも、該膜を該電極基体上に密着性良好に形
成できる方法を提供することができる。
According to the present invention, a method for producing a positive electrode of a lithium secondary battery by depositing a substance containing lithium on an electrode substrate to form a metal oxide film containing lithium is obtained. When the positive electrode is used as a battery, the internal mobility of lithium ions is unlikely to decrease, and desired battery characteristics such as discharge voltage and discharge time can be easily obtained, and the film is formed on the electrode substrate. It is possible to provide a method capable of forming good adhesion.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明方法の実施に用いる成膜装置の1例の概
略構成を示す図である。
FIG. 1 is a diagram showing a schematic configuration of an example of a film forming apparatus used for carrying out a method of the present invention.

【符号の説明】[Explanation of symbols]

1 真空容器 2 基体ホルダ 3 蒸発源 3a リチウムを含む蒸発物質 4 イオン源 5 膜厚モニタ 6 イオン電流測定器 7 排気装置 S 基体 1 Vacuum Container 2 Substrate Holder 3 Evaporation Source 3a Evaporation Material Containing Lithium 4 Ion Source 5 Film Thickness Monitor 6 Ion Current Measuring Device 7 Exhaust Device S Substrate

───────────────────────────────────────────────────── フロントページの続き (72)発明者 岩本 泰志 京都市右京区梅津高畝町47番地 日新電機 株式会社内 (72)発明者 西山 哲 京都市右京区梅津高畝町47番地 日新電機 株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yasushi Iwamoto 47 Umezu Takaune-cho, Ukyo-ku, Kyoto City Nissin Electric Co., Ltd. (72) Inventor Satoshi Nishiyama 47 Umezu Takaune-cho, Ukyo-ku, Kyoto City Nissin Electric Co., Ltd.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 電極基体上へのリチウムを含む物質の蒸
着と、該基体へのイオンビーム照射を併用して、該基体
上にリチウムを含む金属酸化物の膜を形成することを特
徴とするリチウム二次電池正極の製造方法。
1. A method for forming a metal oxide film containing lithium on the substrate by using vapor deposition of a substance containing lithium on an electrode substrate and irradiation of the substrate with an ion beam. Method for manufacturing positive electrode of lithium secondary battery.
【請求項2】 前記のリチウムを含む金属酸化物が、リ
チウムマンガン酸化物、リチウムタングステン酸化物、
リチウムコバルト酸化物、リチウムニッケルコバルト酸
化物、リチウムバナジウム酸化物よりなる群から選ばれ
た物質である請求項1記載のリチウム二次電池正極の製
造方法。
2. The metal oxide containing lithium is lithium manganese oxide, lithium tungsten oxide,
The method for producing a lithium secondary battery positive electrode according to claim 1, wherein the material is a material selected from the group consisting of lithium cobalt oxide, lithium nickel cobalt oxide, and lithium vanadium oxide.
【請求項3】 前記照射するイオンビームが、不活性ガ
ス又は酸素ガス又は不活性ガスと酸素ガスの混合ガスを
原料ガスとして得られるイオンビームである請求項1又
は2記載のリチウム二次電池正極の製造方法。
3. The positive electrode for a lithium secondary battery according to claim 1, wherein the ion beam for irradiation is an ion beam obtained by using an inert gas or oxygen gas or a mixed gas of an inert gas and oxygen gas as a source gas. Manufacturing method.
【請求項4】 前記照射するイオンビームの加速エネル
ギを100eV〜50keVの範囲にあるものとする請
求項1から3の何れかに記載のリチウム二次電池正極の
製造方法。
4. The method for producing a lithium secondary battery positive electrode according to claim 1, wherein the acceleration energy of the ion beam for irradiation is in the range of 100 eV to 50 keV.
【請求項5】 前記のリチウムを含む物質の蒸着を、電
子ビームにより蒸発物質を加熱して蒸発させる真空蒸着
法、又は抵抗により蒸発物質を加熱して蒸発させる真空
蒸着法、又はレーザにより蒸発物質を加熱して蒸発させ
る真空蒸着法、又は高周波により蒸発物質を誘導加熱し
て蒸発させる真空蒸着法、又はスパッタ蒸着法により行
う請求項1から4の何れかに記載のリチウム二次電池正
極の製造方法。
5. The vapor deposition of a substance containing lithium as described above, a vacuum vapor deposition method of heating and vaporizing a vaporized substance by an electron beam, a vacuum vapor deposition method of heating and vaporizing a vaporized substance by resistance, or a vaporized substance by a laser. 5. A lithium secondary battery positive electrode according to any one of claims 1 to 4, which is carried out by a vacuum vapor deposition method of heating and evaporating a vaporized material, a vacuum vapor deposition method of inductively heating and vaporizing a vaporized material by high frequency, or a sputter vapor deposition method. Method.
JP7039772A 1995-02-28 1995-02-28 Manufacture of lithium secondary battery positive electrode Withdrawn JPH08236105A (en)

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Effective date: 20020507