JPH0687900U - Electron beam irradiation device - Google Patents

Abstract

(57) [Abstract] [Purpose] The objective is to simplify the structure for cooling the opening of the vacuum chamber and the irradiation window. [Structure] A supply pipe and a discharge pipe for cooling water are connected to a jacket formed on a flange of a vacuum chamber. The jacket is formed so as to open on the lower surface of the flange. A water channel provided in the irradiation window is formed so as to open on the upper surface of the irradiation window. An irradiation window is attached to the lower surface of the vacuum chamber so that the jacket and the water channel overlap each other. The cooling water supplied to the jacket is also supplied to the water channel at the same time.
Therefore, independent supply and discharge means can be omitted for the cooling water for cooling the irradiation window.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an electron beam irradiation device.

[0002]

[Prior art]

 In the electron beam irradiation device, an irradiation window is installed in the opening of a cylindrical vacuum chamber in which a filament section that emits an electron beam is placed, and the electron beam is emitted from the outside through a foil attached to this irradiation window. A structure adapted to emit to the irradiation chamber is well known. FIG. 4 shows the conventional structure, 1 is a vacuum chamber, 2 is a filament portion disposed inside thereof, 3 is an opening of the vacuum chamber 1, 4 is a flange of the opening 3, 5 is an irradiation window, and 6 is The foil and 7 provided on the irradiation window 5 are irradiation chambers.

The electron beam from the filament section 2 is emitted into the irradiation chamber 7 through the opening 3, the irradiation window 5 and the foil 6. The irradiation target is in the irradiation chamber 7, and the emitted electron beam irradiates the irradiation target. In such a configuration, when the electron beam passes through the opening 3, a part thereof collides with the flange 4, which may cause the flange 4 to generate heat. Further, when the electron beam passes through the foil 6, the foil 6 generates heat.

Therefore, a jacket 8 for water cooling is provided inside the flange 4, a supply pipe 9 is connected to one end thereof and a discharge pipe 10 is connected to the other end thereof, and cooling water is supplied from the supply pipe 9 to recirculate the inside of the jacket 8. The flange 4 is cooled by discharging the cooling water from the discharge pipe 10.

Further, a water channel 11 is also provided inside the irradiation window 5, and cooling water is circulated in the water channel 11 to cool it, thereby cooling the foil 6. However, since the irradiation window 5 is located inside the irradiation chamber 7, in order to supply and discharge the cooling water to the water channel 11, the flexible supply tube 12 and the discharge tube 12 are conventionally provided at each end of the water channel 11. 13 is connected, and each of the tubes 12 and 13 is led out to the outside through the wall portion 14 of the irradiation chamber 7.

However, according to such a configuration, since the tubes 12 and 13 are installed through the inside of the irradiation chamber 7, the work of mounting and removing them is troublesome. Further, since each of the tubes 12 and 13 penetrates the wall portion 14 of the irradiation chamber 7, it is necessary to take a measure to shield X-rays in this penetrating portion.

[0007]

[Problems to be solved by the device]

 An object of the present invention is to simplify the structure for cooling the opening of the vacuum chamber and the irradiation window and to improve the cooling efficiency.

[0008]

[Means for Solving the Problems]

 According to the present invention, a cooling water supply pipe and a discharge pipe are connected to a jacket formed on a flange of a vacuum chamber, and the jacket is formed so as to open on the lower surface of the flange, and a water passage provided in an irradiation window. Is formed so as to open on the upper surface of the irradiation window, and the irradiation window is attached to the lower surface of the vacuum chamber so that the jacket and the water channel overlap with each other.

[0009]

[Action]

 When the cooling water is supplied from the supply pipe to the jacket provided on the flange of the vacuum chamber, this cooling water will also be supplied to the water channel of the irradiation window, and the cooling water that has recirculated through the water channel will be discharged from the jacket again. It is discharged to the outside through the pipe. As a result, the supply pipe and the discharge pipe for the cooling water need only be connected to the jacket, and there is no need to independently connect the supply pipe and the discharge pipe to the irradiation window. It will be simple. Since the jacket and the water channel are formed to be open, the cooling area of the flange and the water channel is widened, and the cooling efficiency is improved.

[0010]

【Example】

 An embodiment of the present invention will be described with reference to FIGS. In addition, the same reference numerals as those in FIG. 4 indicate the same or corresponding portions. According to the present invention, the jacket 8 is formed so as to open on the lower surface of the flange 4. The jacket 8 is provided along the periphery of the flange 4 as in the conventional configuration. The supply pipe 9 and the discharge pipe 10 are connected to the jacket 8 so as to be positioned on both sides of the opening 3 with the opening 3 interposed therebetween.

The water channel 11 is also provided along the periphery of the irradiation window 5 and is formed so as to open on the upper surface of the irradiation window 5. Then, the irradiation window 5 is attached to the flange 4 via the O-ring 15 so that the upper surface of the irradiation window 5 faces the lower surface of the flange 4. In this attached state, the opening of the jacket 8 and the opening of the water channel 11 face each other.

In the above structure, when the cooling water is supplied from the supply pipe 9, a part of the cooling water flows into the jacket 8, and the other part flows from the opening of the jacket 8 through the opening of the water channel 11. It also flows into the waterway 11. Therefore, the cooling water flows into both the jacket 8 and the water channel 11.

The cooling water that has flown in this way flows back through the jacket 8 and the water channel 11, and is then discharged to the outside through the discharge pipe 10. The flange 4 and the irradiation window 5 are cooled during this reflux process.

[0014]

[Effect of device]

 As described above, according to the present invention, the cooling water supplied to the jacket is supplied to the water channel of the irradiation window and is returned to the jacket, so that the water channel is provided for independent supply and discharge of cooling water. Since the structure is not required and the structure is simplified accordingly, and since there is no part that penetrates the wall of the irradiation chamber, there is no need to take X-ray shielding measures at that part, and both the jacket and the waterway are Since it is formed with openings, it can be easily processed and molded compared to the conventional through-hole shape, and such an opening shape allows a large cooling area. The cooling efficiency is improved accordingly.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing an embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view of a part of FIG.

FIG. 3 is a perspective view of an irradiation window.

FIG. 4 is a sectional view of a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vacuum chamber 2 Filament part 3 Opening part 4 Flange 5 Irradiation window 8 Jacket 9 Supply pipe 10 Discharge pipe 11 Water channel

Claims (1)

[Scope of utility model registration request] 1. An irradiation window is installed at an opening of a vacuum chamber in which a filament section for emitting an electron beam is arranged, and an electron beam is emitted to an external irradiation chamber through a foil attached to the irradiation window. In the electron beam irradiating device, the flange of the opening is provided with a cooling jacket opened on the lower surface of the flange, and a cooling water supply pipe and a discharge pipe are connected to the jacket, and the cooling window is connected to the irradiation window. An electron beam formed by opening a water channel for cooling the irradiation window on the upper surface of the irradiation window, and attaching the irradiation window to the lower surface of the flange so that the opening portion of the jacket and the opening portion of the water channel overlap each other. Irradiation device.