JPH06273930A - Curable resin composition and multilayer printed circuit board using the same and its manufacture - Google Patents
Curable resin composition and multilayer printed circuit board using the same and its manufactureInfo
- Publication number
- JPH06273930A JPH06273930A JP5914293A JP5914293A JPH06273930A JP H06273930 A JPH06273930 A JP H06273930A JP 5914293 A JP5914293 A JP 5914293A JP 5914293 A JP5914293 A JP 5914293A JP H06273930 A JPH06273930 A JP H06273930A
- Authority
- JP
- Japan
- Prior art keywords
- resin composition
- general formula
- printed wiring
- wiring board
- carbon atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Macromonomer-Based Addition Polymer (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Laminated Bodies (AREA)
Abstract
(57)【要約】
【構成】一般式(1)(但し、式中R1は芳香環を含む
炭素数6〜15の有機残基、R2は水素,フェニル基,
アルコキシフェニル基、R3,R4,R5は水素、炭素数
9以下のアルキル基を示し、R3,R4,R5の少なくと
も二つは水素を示す。)で表わされる繰返し単位を有す
る共重合体100重量部に対し、光重合開始剤及び/ま
たは熱重合開始剤10〜0.5重量部を含む硬化性樹脂
組成物およびそれをパターン絶縁に用いた多層プリント
配線板。
【化21】
【効果】ポリマレイミド骨格と不飽和二重結合を側鎖に
有し、光重合開始剤の添加によって光反応性に優れ、硬
化後の耐熱性が優れた硬化物を与えるので、プリント配
線板の絶縁性パターンとして優れている。(57) [Summary] [Structure] General formula (1) (wherein R 1 is an organic residue containing an aromatic ring and having 6 to 15 carbon atoms, R 2 is hydrogen, a phenyl group,
The alkoxyphenyl group, R 3 , R 4 and R 5 represent hydrogen and an alkyl group having 9 or less carbon atoms, and at least two of R 3 , R 4 and R 5 represent hydrogen. A curable resin composition containing 10 to 0.5 parts by weight of a photopolymerization initiator and / or a thermal polymerization initiator per 100 parts by weight of a copolymer having a repeating unit represented by Multilayer printed wiring board. [Chemical 21] [Effect] Having a polymaleimide skeleton and an unsaturated double bond in the side chain, the addition of a photopolymerization initiator gives a cured product with excellent photoreactivity and heat resistance after curing. Excellent as an insulating pattern.
Description
【0001】[0001]
【産業上の利用分野】本発明は熱及び光により硬化し、
耐熱性に優れた硬化物を与える硬化性樹脂組成物および
それを用いた多層プリント配線板に関する。FIELD OF THE INVENTION The present invention cures by heat and light,
The present invention relates to a curable resin composition that gives a cured product having excellent heat resistance and a multilayer printed wiring board using the same.
【0002】[0002]
【従来の技術】電子計算機の大容量,小型化に伴い、そ
れに用いるプリント配線板の高密度化の要求が高まって
いる。高密度プリント配線板は図1に示すような基本工
程からなるフルアディティブ法で製造される。2. Description of the Related Art With the increase in capacity and size of electronic computers, there is an increasing demand for higher density of printed wiring boards used therein. The high-density printed wiring board is manufactured by the full additive method including the basic steps shown in FIG.
【0003】(a)基板上にめっきレジスト層を設ける
工程。(A) A step of providing a plating resist layer on a substrate.
【0004】(b)露光、現像して必要なレリーフパタ
ーンを形成する工程。(B) A step of exposing and developing to form a required relief pattern.
【0005】(c)めっきにより配線パターンを形成す
る工程。(C) A step of forming a wiring pattern by plating.
【0006】(d)プリント配線板を多層化する工程。(D) A step of forming a multilayered printed wiring board.
【0007】上記フルアディティブ法で使用されるめっ
きレジストは、最終的に配線間の絶縁層となることが望
ましい。これによって配線の剥離、多層化時の配線のず
れ等を防止できるので、高アスペクト比の配線を有する
プリント配線板を多層化することができる。It is desirable that the plating resist used in the above-mentioned full additive method finally becomes an insulating layer between wirings. As a result, it is possible to prevent the peeling of the wiring, the deviation of the wiring when the wiring is multi-layered, etc. Therefore, it is possible to multi-layer the printed wiring board having the wiring with a high aspect ratio.
【0008】絶縁材料としてプリント配線板内に残るめ
っきレジストとしては絶縁性、耐熱性等が優れているこ
とが要求される。更にまた、高密度,小型化の要求に対
して絶縁層の低誘電率化が要求されている。The plating resist remaining in the printed wiring board as an insulating material is required to have excellent insulating properties and heat resistance. Furthermore, the low dielectric constant of the insulating layer is required to meet the demand for high density and miniaturization.
【0009】従来、配線基板としては、ガラスクロス等
の補強材にマレイミド誘導体及びスチリル誘導体よりな
る樹脂組成物を含浸したプリプレグが知られている(特
開平2−99545号公報)。このプリプレグは成型作
業性に優れ、耐熱性、難燃性の多層基板用積層材料とし
て知られている。Conventionally, as a wiring board, there is known a prepreg in which a reinforcing material such as glass cloth is impregnated with a resin composition comprising a maleimide derivative and a styryl derivative (Japanese Patent Laid-Open No. 2-99545). This prepreg has excellent molding workability, and is known as a heat-resistant and flame-retardant laminated material for multilayer substrates.
【0010】[0010]
【発明が解決しようとする課題】しかし、ガラスクロス
等の無機補強材は、樹脂組成物に比べて比誘電率が高
い。従って、樹脂組成物の比誘電率を低減してもガラス
クロスで補強された絶縁板の低誘電率化にはおのずと限
界がある。However, the inorganic reinforcing material such as glass cloth has a higher relative dielectric constant than the resin composition. Therefore, even if the relative permittivity of the resin composition is reduced, there is a limit in reducing the permittivity of the insulating plate reinforced with the glass cloth.
【0011】また、前記マレイミド誘導体及びスチリル
誘導体よりなる樹脂組成物を用いてレリーフパターンを
作製することが困難なために、基板表面に、例えば、ア
クリレート系樹脂のレジストを用いる等して配線パター
ンを形成し、多層化接着して多層配線板が作製されてい
る。Further, since it is difficult to form a relief pattern using the resin composition comprising the maleimide derivative and the styryl derivative, a wiring pattern is formed on the substrate surface by using, for example, an acrylate resin resist. A multi-layer wiring board is produced by forming and adhering in multiple layers.
【0012】アクリレート系レジストを用いた場合、レ
リーフパターンの耐熱性が低いためにパターン形成後該
レリーフパターンを剥離し、別の材料で新たに絶縁層を
形成して用いている。しかし、一旦配線パターンを形成
した基板表面はパターンによる凹凸が存在し、多層化に
よる高密度化には限界がある。When an acrylate-based resist is used, the heat resistance of the relief pattern is low, so the relief pattern is peeled off after the pattern is formed and a new insulating layer is formed using another material. However, the surface of the substrate on which the wiring pattern has been once formed has irregularities due to the pattern, and there is a limit to increasing the density by multilayering.
【0013】本発明の目的は、多層板用積層材料と同等
の耐熱性を有するレリーフパターンを形成できる樹脂組
成物を提供することにある。An object of the present invention is to provide a resin composition capable of forming a relief pattern having heat resistance equivalent to that of a laminated material for a multilayer board.
【0014】また、本発明の他の目的は、上記樹脂組成
物を用いることにより表面の凹凸がない多層プリント配
線板とその製法を提供することにある。Another object of the present invention is to provide a multilayer printed wiring board having no surface irregularities by using the above resin composition and a method for producing the same.
【0015】[0015]
【課題を解決するための手段】前記課題を解決する本発
明の要旨は次のとおりである。Means for Solving the Problems The gist of the present invention for solving the above problems is as follows.
【0016】〔1〕 一般式(1)[1] General formula (1)
【0017】[0017]
【化7】 [Chemical 7]
【0018】(但し、式中R1は芳香環を含む炭素数6
〜15の有機残基、R2は水素,フェニル基,アルコキ
シフェニル基、R3,R4,R5は水素、炭素数9以下の
アルキル基を示し、R3,R4,R5の少なくとも二つは
水素を示す。)で表わされる繰返し単位を有する共重合
体100重量部に対し、光重合開始剤及び/または熱重
合開始剤10〜0.5重量部を含むことを特徴とする硬
化性樹脂組成物。(In the formula, R 1 has 6 carbon atoms including an aromatic ring.
To 15 organic residues, R 2 represents hydrogen, a phenyl group, an alkoxyphenyl group, R 3 , R 4 and R 5 represent hydrogen and an alkyl group having 9 or less carbon atoms, and at least R 3 , R 4 and R 5 Two represent hydrogen. ) A curable resin composition comprising 10 to 0.5 parts by weight of a photopolymerization initiator and / or a thermal polymerization initiator with respect to 100 parts by weight of a copolymer having a repeating unit represented by the formula (1).
【0019】〔2〕 一般式(2)[2] General formula (2)
【0020】[0020]
【化8】 [Chemical 8]
【0021】(但し、式中R6,R7,R8は水素、炭素
数1〜20の有機残基を示す。)で表わされる繰返し単
位を有する化合物を含む前記〔1〕に記載の硬化性樹脂
組成物。The curing according to the above [1], which contains a compound having a repeating unit represented by the formula (wherein R 6 , R 7 and R 8 represent hydrogen and an organic residue having 1 to 20 carbon atoms). Resin composition.
【0022】〔3〕 一般式(3)[3] General formula (3)
【0023】[0023]
【化9】 [Chemical 9]
【0024】(但し、式中R8はフェニル基,アルコキ
シフェニル基,ヒドロキシフェニル基,安息香酸残基,
ピロリドン残基を表わす。)で表わされる繰返し単位を
有する化合物を含む前記〔1〕に記載の硬化性樹脂組成
物。(Wherein R 8 is a phenyl group, an alkoxyphenyl group, a hydroxyphenyl group, a benzoic acid residue,
Represents a pyrrolidone residue. The curable resin composition according to the above [1], which comprises a compound having a repeating unit represented by
【0025】〔4〕 前記一般式(1)で表わされる繰
返し単位を有する共重合体100重量部に対し、光重合
開始剤及び/または熱重合開始剤10〜0.5重量部を
含む樹脂組成物の硬化物からなるフィルムの少なくとも
片面に配線回路が形成されており、該配線回路が形成さ
れたフィルムが積層,接着されていることを特徴とする
多層プリント配線板。[4] A resin composition containing 10 to 0.5 parts by weight of a photopolymerization initiator and / or a thermal polymerization initiator with respect to 100 parts by weight of the copolymer having the repeating unit represented by the general formula (1). A multilayer printed wiring board, wherein a wiring circuit is formed on at least one surface of a film made of a cured product, and the films on which the wiring circuit is formed are laminated and adhered.
【0026】〔5〕 前記樹脂組成物が前記一般式
(2)で表わされる繰返し単位を有する化合物を含む前
記〔4〕に記載の多層プリント配線板。[5] The multilayer printed wiring board according to the above [4], wherein the resin composition contains a compound having a repeating unit represented by the general formula (2).
【0027】〔6〕 前記樹脂組成物が前記一般式
(3)で表わされる繰返し単位を有する化合物を含む前
記〔4〕に記載の多層プリント配線板。[6] The multilayer printed wiring board according to [4], wherein the resin composition contains a compound having a repeating unit represented by the general formula (3).
【0028】〔7〕 前記一般式(1)及び光重合開始
剤を含む光硬化性樹脂組成物の被膜を基板上に形成した
後、露光、現像して回路のネガパターンを形成し、次い
で上記被膜が形成されていない回路パターン部にめっき
により配線回路を形成したプリント配線板を積層、接着
して多層化する多層プリント配線板の製法。[7] A film of a photocurable resin composition containing the general formula (1) and a photopolymerization initiator is formed on a substrate, and then exposed and developed to form a negative pattern of a circuit. A method of manufacturing a multilayer printed wiring board in which printed wiring boards having wiring circuits formed by plating are laminated and adhered to the circuit pattern portion where the coating is not formed to form a multilayer.
【0029】〔8〕 前記一般式(1)及び熱重合開始
剤を含む熱硬化性樹脂組成物からなる基板上に、前記一
般式(1)及び光重合開始剤を含む光硬化性樹脂組成物
の被膜を形成した後、露光、現像して回路のネガパター
ンを形成し、次いで上記被膜が形成されていない回路パ
ターン部にめっきにより配線回路を形成したプリント配
線板を積層、接着して多層化する多層プリント配線板の
製法。[8] A photocurable resin composition containing the general formula (1) and a photopolymerization initiator on a substrate made of a thermosetting resin composition containing the general formula (1) and a thermopolymerization initiator. After forming the coating film, it is exposed and developed to form the negative pattern of the circuit, and then the printed circuit board on which the wiring circuit is formed by plating is laminated and adhered to the circuit pattern part where the coating film is not formed to form a multilayer. Manufacturing method of multilayer printed wiring board.
【0030】前記一般式(1)で表わされる繰返し単位
を有する化合物の具体例としては下式1〜33で示され
るものがある。Specific examples of the compound having the repeating unit represented by the general formula (1) include those represented by the following formulas 1 to 33 .
【0031】[0031]
【化10】 [Chemical 10]
【0032】[0032]
【化11】 [Chemical 11]
【0033】[0033]
【化12】 [Chemical 12]
【0034】[0034]
【化13】 [Chemical 13]
【0035】[0035]
【化14】 [Chemical 14]
【0036】[0036]
【化15】 [Chemical 15]
【0037】[0037]
【化16】 [Chemical 16]
【0038】[0038]
【化17】 [Chemical 17]
【0039】[0039]
【化18】 [Chemical 18]
【0040】また、前記一般式(2)(3)で表わされ
る繰返し単位を有する化合物の具体例としては下式(a)
〜(n)で示されるものがある。Specific examples of the compound having the repeating unit represented by the general formulas (2) and (3) include the following formula (a).
~ (N) are available.
【0041】[0041]
【化19】 [Chemical 19]
【0042】[0042]
【化20】 [Chemical 20]
【0043】前記光重合開始剤として、例えば、カルコ
ン構造を有するアジド化合物がある。また、ラジカル重
合開始剤として、例えば、ベンゾイルパーオキサオド、
パラクロロベンゾイルパーオキサイド、2,4−ジクロ
ロベンゾイルパーオキサイド、ラウロイルパーオキサイ
ド、ジクミルパーオキシド、アセチルパーオキシド、メ
チルエチルケトンパーオキシド、シクロへキサノンパー
オキシド、ビス(1−ヒドロキシシクロヘキシルパーオ
キシド)、2,5−ジメチルヘキサン−2,5−ジヒドロ
パーオキシド、t−ブチルパーベンゾエート、2,5−
ジメチル−2,5−(t−ブチルパーオキシ)ヘキサ
ン、2,5−ジメチル−2,5−(t−ブチルパーオキ
シ)ヘキシン−3、2,5−ジメチルヘキシル−2,5−
ジ(パーオキシベンゾエート)、クメンヒドロパーオキ
シド、t−ブチルヒドロパーオキド、t−ブチルオキシ
アセテート、t−ブチルパーオキシオクテート、t−ブ
チルオキシイソブチレート、ジベンジルパーオキシド、
ジ−t−ブチルパーオキシフタレート等がある。これの
1種以上を用いることができる。Examples of the photopolymerization initiator include an azide compound having a chalcone structure. Further, as the radical polymerization initiator, for example, benzoyl peroxide,
Parachlorobenzoyl peroxide, 2,4-dichlorobenzoyl peroxide, lauroyl peroxide, dicumyl peroxide, acetyl peroxide, methyl ethyl ketone peroxide, cyclohexanone peroxide, bis (1-hydroxycyclohexyl peroxide), 2 , 5-Dimethylhexane-2,5-dihydroperoxide, t-butylperbenzoate, 2,5-
Dimethyl-2,5- (t-butylperoxy) hexane, 2,5-dimethyl-2,5- (t-butylperoxy) hexyne-3,2,5-dimethylhexyl-2,5-
Di (peroxybenzoate), cumene hydroperoxide, t-butylhydroperoxide, t-butyloxyacetate, t-butylperoxyoctate, t-butyloxyisobutyrate, dibenzyl peroxide,
Di-t-butyl peroxyphthalate and the like. One or more of these can be used.
【0044】[0044]
【作用】本発明の樹脂組成物は、側鎖に硬化性不飽和二
重結合を有するマレイミド誘導体の重合物を含むことに
より、硬化物の耐熱性を向上することができる。即ち、
主骨格であるポリマレイミド構造がガラス転移温度、熱
分解温度が向上するためである。The resin composition of the present invention can improve the heat resistance of the cured product by containing the polymer of the maleimide derivative having a curable unsaturated double bond in the side chain. That is,
This is because the polymaleimide structure that is the main skeleton improves the glass transition temperature and the thermal decomposition temperature.
【0045】また、側鎖に不飽和結合を有する官能基を
含み、配合された光重合開始剤より光照射でレリーフパ
ターンを容易に形成することができる。特に、カルコン
構造を有するアジド化合物を光重合開始剤とした場合、
反応性の高いアジド基により架橋点が増え、更に、カル
コン構造が開環して形成する架橋点によって耐熱性が向
上する。Further, a relief pattern can be easily formed by irradiation with light from a photopolymerization initiator that contains a functional group having an unsaturated bond in its side chain and is blended. Especially when an azide compound having a chalcone structure is used as a photopolymerization initiator,
The number of cross-linking points is increased by the highly reactive azido group, and the heat resistance is improved by the cross-linking point formed by ring opening of the chalcone structure.
【0046】これによって形成されたパターンは、基板
と同等の耐熱性を有しているので絶縁層として残すこと
ができ、従来のパターン除去による基板表面の凹凸を解
消することができる。Since the pattern thus formed has the same heat resistance as the substrate, it can be left as an insulating layer, and unevenness on the substrate surface due to conventional pattern removal can be eliminated.
【0047】[0047]
【実施例】本発明を実施例を示して具体的に説明する。EXAMPLES The present invention will be specifically described with reference to examples.
【0048】〔実施例 1〕p−アミノスチレン51.
4g、マレイン酸無水物(和光純薬製)42.1gをジ
エチルエーテル2リットル中に入れ、室温で2時間反応
させてN−(p−ビニルフェニル)マレアニリック酸を得
た(収量91.0g)。Example 1 p-Aminostyrene 51.
4 g and 42.1 g of maleic anhydride (manufactured by Wako Pure Chemical Industries, Ltd.) were put into 2 liters of diethyl ether and reacted at room temperature for 2 hours to obtain N- (p-vinylphenyl) maleanilic acid (yield 91.0 g). .
【0049】上記のN−(p−ビニルフェニル)マレアニ
リック酸10.9g、無水酢酸200ml、無水酢酸ナ
トリウム2gを100℃で1時間反応させてN−(p−
ビニルフェニル)マレイミドを得た(収量4.2g)。The above N- (p-vinylphenyl) maleanilic acid (10.9 g), acetic anhydride (200 ml) and sodium acetate (2 g) were reacted at 100 ° C. for 1 hour to give N- (p-
Vinylphenyl) maleimide was obtained (yield 4.2 g).
【0050】次に、上記のN−(p−ビニルフェニル)マ
レイミドとN−フェニルマレイミドのアニオン重合によ
る共重合体を得た。反応条件は、t−ブトキシカリウム
(関東化学製)0.2mmol,N−(p−ビニルフェニ
ル)マレイミド2.0mmol,N−フェニルマレイミド
3.0mmol,テトラヒドロフラン溶液の合計15m
lを窒素下,0℃,24時間反応させた。ポリマ収率は
約60mol%、スチレン換算数平均分子量(GPC)
は約8000であった。Next, a copolymer obtained by anionic polymerization of the above N- (p-vinylphenyl) maleimide and N-phenylmaleimide was obtained. The reaction conditions are: t-butoxypotassium (manufactured by Kanto Chemical Co., Ltd.) 0.2 mmol, N- (p-vinylphenyl) maleimide 2.0 mmol, N-phenylmaleimide 3.0 mmol, tetrahydrofuran solution totaling 15 m.
1 was reacted under nitrogen at 0 ° C. for 24 hours. Polymer yield is about 60 mol%, styrene equivalent number average molecular weight (GPC)
Was about 8000.
【0051】上記のN−(ビニルフェニル)マレイミドと
N−フェニルマレイミド(モル比2:3)との共重合体
の20重量%溶液に、ポリマ成分100重量部に対して
4,4'−ジアジドカルコン(シンコウ技研製)を10重
量部添加した。To a 20% by weight solution of the above-mentioned copolymer of N- (vinylphenyl) maleimide and N-phenylmaleimide (molar ratio 2: 3), 4,4'-diene was added to 100 parts by weight of the polymer component. 10 parts by weight of azidochalcone (manufactured by Shinko Giken) was added.
【0052】このテトラヒドロフラン溶液をガラス板上
に塗布、乾燥して、膜厚約10μmフィルムを作成し
た。This tetrahydrofuran solution was applied onto a glass plate and dried to form a film having a thickness of about 10 μm.
【0053】上記フィルムを高圧水銀ランプを用いて5
00mJ露光した。この露光フィルムをテトラヒドロフ
ランに1分間浸したが膜には何ら変化が生じなかった。The above film was prepared by using a high pressure mercury lamp.
It was exposed to 00 mJ. The exposed film was immersed in tetrahydrofuran for 1 minute, but no change was observed in the film.
【0054】同様に露光したポリマの熱特性を調べた。
昇温速度5℃/分で窒素下における5%重量減少温度を
観測したところ約400℃で分解した。また、示差走査
熱分析の結果、熱架橋反応による発熱が約160℃に認
められた(昇温速度10℃/分)。Thermal properties of similarly exposed polymers were investigated.
When a 5% weight loss temperature under nitrogen was observed at a temperature rising rate of 5 ° C./minute, decomposition occurred at about 400 ° C. Further, as a result of differential scanning calorimetry, exothermic heat due to the thermal crosslinking reaction was recognized at about 160 ° C (heating rate 10 ° C / min).
【0055】〔比較例 1〕実施例1で得たN−(p−
ビニルフェニル)マレイミドとN−フェニルマレイミド
のアニオン重合による共重合体だけの20重量%テトラ
ヒドロフラン溶液をガラス板上に塗布、乾燥して、膜厚
約10μmフィルムを作成した。Comparative Example 1 N- (p-obtained in Example 1)
A 20 wt% tetrahydrofuran solution of only a copolymer obtained by anionic polymerization of vinylphenyl) maleimide and N-phenylmaleimide was applied on a glass plate and dried to form a film having a thickness of about 10 μm.
【0056】上記フィルムを実施例1と同様に露光した
後、テトラヒドロフランに1分間浸したところ完全に溶
解した。The above film was exposed in the same manner as in Example 1 and then immersed in tetrahydrofuran for 1 minute to completely dissolve it.
【0057】同様に露光したポリマの熱特性を、昇温速
度5℃/分で窒素下における5%重量減少温度で観測し
たところ約420℃で分解した。また、示差走査熱分析
の結果、熱架橋反応による発熱が約160℃に認められ
た(昇温速度10℃/分)。Similarly, the thermal properties of the exposed polymer were decomposed at about 420 ° C. when observed at a 5% weight loss temperature under nitrogen at a heating rate of 5 ° C./min. Further, as a result of differential scanning calorimetry, exothermic heat due to the thermal crosslinking reaction was recognized at about 160 ° C (heating rate 10 ° C / min).
【0058】〔実施例 2〕実施例1と同様にして作成
したN−(ビニルフェニル)マレイミドとN−フェニルマ
レイミドとの共重合体(モル比で4:1)の20重量%
溶液に、ポリマ成分100重量部に対して10重量部の
4,4'−ジアジドカルコンを添加した。Example 2 20% by weight of a copolymer of N- (vinylphenyl) maleimide and N-phenylmaleimide prepared in the same manner as in Example 1 (molar ratio 4: 1).
To the solution was added 10 parts by weight of 4,4'-diazidochalcone per 100 parts by weight of the polymer component.
【0059】上記溶液を実施例1と同様にしてガラス板
で膜厚約10μmのフィルムを形成し、露光した。これ
をテトラヒドロフランに1分間浸したが膜には何ら変化
が生じなかった。同様に露光したポリマの昇温速度5℃
/分で窒素下における5%重量減少温度を観測したとこ
ろ約400℃で分解した。また、示差走査熱分析の結
果、熱架橋反応による発熱約170℃が認められた(昇
温速度10℃/分)。A glass plate was used to form a film having a thickness of about 10 μm from the above solution in the same manner as in Example 1, and the film was exposed. This was immersed in tetrahydrofuran for 1 minute, but no change occurred in the film. Similarly, the temperature rise rate of exposed polymer is 5 ℃
When a 5% weight loss temperature under nitrogen was observed at 1 / min, it decomposed at about 400 ° C. Further, as a result of differential scanning calorimetry, an exotherm of about 170 ° C. due to the thermal crosslinking reaction was recognized (heating rate 10 ° C./min).
【0060】〔実施例 3〕表1に示すマレイミド共重
合体について実施例1と同様に4,4'−ジアジドカルコ
ンを添加し、露光、現像した。表1の全ての共重合体が
光架橋することを確認した。Example 3 With respect to the maleimide copolymer shown in Table 1, 4,4′-diazidochalcone was added in the same manner as in Example 1, and exposure and development were carried out. It was confirmed that all the copolymers in Table 1 were photocrosslinked.
【0061】[0061]
【表1】 [Table 1]
【0062】〔実施例 4〕2,2'−〔ビス(N−フェ
ニルマレイミド)〕プロパンをガラスクロスに含浸させ
た後、加圧、加熱して基板を作製した。これを日立化成
工業製のHS10SB液で処理して表面にめっき触媒を
付着させた。乾燥後、実施例2で作成した感光製樹脂溶
液を塗布、乾燥し、膜厚約10μmの塗膜を形成した。
これにライン/スペースが100μm/100μmの模
擬パターンを露光(露光量500mJ)し、次いでジク
ロロメタンで現像したところレリーフパターンが得られ
た。Example 4 A glass cloth was impregnated with 2,2 ′-[bis (N-phenylmaleimide)] propane, which was then pressed and heated to prepare a substrate. This was treated with an HS10SB solution manufactured by Hitachi Chemical Co., Ltd. to deposit a plating catalyst on the surface. After drying, the photosensitive resin solution prepared in Example 2 was applied and dried to form a coating film having a film thickness of about 10 μm.
A simulated pattern having a line / space of 100 μm / 100 μm was exposed to this (exposure amount: 500 mJ), and then developed with dichloromethane to obtain a relief pattern.
【0063】上記レリーフパターンを形成した基板を2
00℃で20分加熱後、硫酸銅0.04mol/l、エ
チレンジアミン四酢酸0.08mol/l、ホルムアル
デヒド0.03mol/l、2,2−ジピリジル30mg
/l、ポリエチレングリコール10g/lに水酸化ナト
リウムを配合してpH12.6に調整しためっき液を用
いて、浸漬法により銅めっきし配線パターンを形成した
(めっき条件:70℃、3時間)。The substrate on which the relief pattern is formed is 2
After heating at 00 ° C for 20 minutes, copper sulfate 0.04 mol / l, ethylenediaminetetraacetic acid 0.08 mol / l, formaldehyde 0.03 mol / l, 2,2-dipyridyl 30 mg
/ L, polyethylene glycol 10 g / l and sodium hydroxide were mixed to adjust the pH to 12.6, and copper was plated by a dipping method to form a wiring pattern (plating condition: 70 ° C., 3 hours).
【0064】得られた模擬プリント配線板を2,2'−
〔ビス(N−フェニルマレイミド)〕プロパンをガラスク
ロスに含浸させたプリプレグ介在させて積層接着し、4
層の多層プリント配線板を作製した。The obtained simulated printed wiring board was set to 2,2'-
[Bis (N-phenylmaleimide)] Propane impregnated with propane is laminated and adhered through a prepreg.
A multilayer printed wiring board of layers was prepared.
【0065】上記多層プリント配線板は、フルアディテ
ィブ法による微細化配線が可能であり、平坦な表面を有
し、かつ、絶縁特性および耐熱性に優れ、低比誘電率の
ものを得ることができた。The above-mentioned multilayer printed wiring board can be miniaturized by the full-additive method, has a flat surface, is excellent in insulating properties and heat resistance, and can have a low relative dielectric constant. It was
【0066】[0066]
【発明の効果】本発明の硬化性樹脂組成物は、耐熱性に
優れたポリマレイミド骨格にビニル基等の不飽和二重結
合を側鎖に有し、溶解性に優れており、光重合開始剤と
して、特に、カルコン構造を有するアジド化合物を添加
したことによって光反応性に優れ、硬化後の耐熱性が優
れた硬化物を与える。従って、プリント配線板の絶縁性
パターンとして優れている。The curable resin composition of the present invention has an unsaturated double bond such as a vinyl group in the side chain in the polymaleimide skeleton which is excellent in heat resistance, is excellent in solubility, and initiates photopolymerization. By adding an azide compound having a chalcone structure as an agent, a cured product having excellent photoreactivity and excellent heat resistance after curing is provided. Therefore, it is excellent as an insulating pattern of a printed wiring board.
【図1】フルアディティブ法による多層プリント配線板
の製造工程の概略断面図である。FIG. 1 is a schematic cross-sectional view of a manufacturing process of a multilayer printed wiring board by a full additive method.
1…めっきレジスト、2…基板、3…配線、4…接着
層。1 ... Plating resist, 2 ... Substrate, 3 ... Wiring, 4 ... Adhesive layer.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 G03F 7/027 514 H01L 23/29 23/31 H05K 1/03 D 7011−4E 3/46 T 6921−4E (72)発明者 佐通 祐一 茨城県日立市大みか町七丁目1番1号 株 式会社日立製作所日立研究所内 (72)発明者 三輪 崇夫 茨城県日立市大みか町七丁目1番1号 株 式会社日立製作所日立研究所内 (72)発明者 高橋 昭雄 茨城県日立市大みか町七丁目1番1号 株 式会社日立製作所日立研究所内─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Internal reference number FI Technical display location G03F 7/027 514 H01L 23/29 23/31 H05K 1/03 D 7011-4E 3/46 T 6921 −4E (72) Inventor Yuichi Sado, 7-1, 1-1 Omika-cho, Hitachi, Hitachi, Ltd. Hitachi Research Laboratory, Hitachi, Ltd. (72) Inventor, Takao Miwa 7, 1-1, Omika-cho, Hitachi, Ibaraki Inside the Hitachi Research Laboratory, Hitachi Ltd. (72) Inventor Akio Takahashi 7-1-1 Omika-cho, Hitachi City, Ibaraki Prefecture Inside the Hitachi Research Laboratory, Hitachi Ltd.
Claims (8)
残基、R2は水素,フェニル基,アルコキシフェニル
基、R3,R4,R5は水素、炭素数9以下のアルキル基
を示し、R3,R4,R5の少なくとも二つは水素を示
す。)で表わされる繰返し単位を有する共重合体100
重量部に対し、光重合開始剤及び/または熱重合開始剤
のそれぞれを0.5〜10重量部を含むことを特徴とす
る硬化性樹脂組成物。1. A compound represented by the general formula (1): (However, in the formula, R 1 is an organic residue having an aromatic ring and having 6 to 15 carbon atoms, R 2 is hydrogen, a phenyl group, an alkoxyphenyl group, R 3 , R 4 , and R 5 are hydrogen and have 9 or less carbon atoms. A copolymer 100 having a repeating unit represented by an alkyl group and at least two of R 3 , R 4 and R 5 represent hydrogen.
A curable resin composition comprising 0.5 to 10 parts by weight of each of a photopolymerization initiator and / or a thermal polymerization initiator with respect to parts by weight.
有機残基を示す。)で表わされる繰返し単位を有する化
合物を含む請求項1に記載の硬化性樹脂組成物。2. A general formula (2): The curable resin composition according to claim 1, comprising a compound having a repeating unit represented by the formula (wherein R 6 , R 7 and R 8 represent hydrogen and an organic residue having 1 to 20 carbon atoms). .
基,ヒドロキシフェニル基,安息香酸残基,ピロリドン
残基を表わす。)で表わされる繰返し単位を有する化合
物を含む請求項1に記載の硬化性樹脂組成物。3. A compound represented by the general formula (3): (Wherein R 8 represents a phenyl group, an alkoxyphenyl group, a hydroxyphenyl group, a benzoic acid residue, a pyrrolidone residue), and the curable resin according to claim 1 containing a repeating unit. Composition.
残基、R2は水素,フェニル基,アルコキシフェニル
基、R3,R4,R5は水素、炭素数9以下のアルキル基
を示し、R3,R4,R5の少なくとも二つは水素を示
す。)で表わされる繰返し単位を有する共重合体100
重量部に対し、光重合開始剤及び/または熱重合開始剤
のそれぞれを0.5〜10重量部を含む樹脂組成物の硬
化物からなるフィルムの少なくとも片面に配線回路が形
成されており、該配線回路を有するフィルムが積層,接
着されていることを特徴とする多層プリント配線板。4. A compound represented by the general formula (1): (However, in the formula, R 1 is an organic residue having an aromatic ring and having 6 to 15 carbon atoms, R 2 is hydrogen, a phenyl group, an alkoxyphenyl group, R 3 , R 4 , and R 5 are hydrogen and have 9 or less carbon atoms. A copolymer 100 having a repeating unit represented by an alkyl group and at least two of R 3 , R 4 and R 5 represent hydrogen.
A wiring circuit is formed on at least one side of a film made of a cured product of a resin composition containing 0.5 to 10 parts by weight of each of a photopolymerization initiator and / or a thermal polymerization initiator, relative to parts by weight. A multilayer printed wiring board, characterized in that films having wiring circuits are laminated and adhered.
有機残基を示す。)で表わされる繰返し単位を有する化
合物を含む請求項4に記載の多層プリント配線板。5. The resin composition has the general formula (2): The multilayer printed wiring board according to claim 4, comprising a compound having a repeating unit represented by the formula (wherein R 6 , R 7 and R 8 represent hydrogen and an organic residue having 1 to 20 carbon atoms).
基,ヒドロキシフェニル基,安息香酸残基,ピロリドン
残基を表わす。)で表わされる繰返し単位を有する化合
物を含む請求項4に記載の多層プリント配線板。6. The resin composition has the general formula (3): (Wherein R 8 represents a phenyl group, an alkoxyphenyl group, a hydroxyphenyl group, a benzoic acid residue, or a pyrrolidone residue). The multilayer printed wiring according to claim 4 containing a compound having a repeating unit. Board.
む光硬化性樹脂組成物の被膜を基板上に形成した後、露
光、現像して回路のネガパターンを形成し、次いで上記
被膜が形成されていない回路パターン部にめっきにより
配線回路を形成したプリント配線板を積層、接着して多
層化することを特徴とする多層プリント配線板の製法。7. A film of a photocurable resin composition containing the general formula (1) and a photopolymerization initiator is formed on a substrate, exposed and developed to form a negative pattern of a circuit, and then the film is formed. A method for producing a multilayer printed wiring board, comprising: laminating and adhering a printed wiring board on which a wiring circuit is formed by plating on a circuit pattern portion where no wiring is formed, to form a multilayer.
む熱硬化性樹脂組成物からなる基板上に、前記一般式
(1)及び光重合開始剤を含む光硬化性樹脂組成物の被
膜を形成した後、露光、現像して回路のネガパターンを
形成し、次いで上記被膜が形成されていない回路パター
ン部にめっきにより配線回路を形成したプリント配線板
を積層、接着して多層化することを特徴とする多層プリ
ント配線板の製法。8. A photocurable resin composition containing the general formula (1) and a photopolymerization initiator on a substrate made of a thermosetting resin composition containing the general formula (1) and a thermopolymerization initiator. After forming a coating, it is exposed and developed to form a negative pattern of the circuit, and then a printed wiring board having a wiring circuit formed by plating on the circuit pattern portion where the coating is not formed is laminated and adhered to form a multilayer. A method for manufacturing a multilayer printed wiring board, which is characterized in that
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5914293A JPH06273930A (en) | 1993-03-18 | 1993-03-18 | Curable resin composition and multilayer printed circuit board using the same and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5914293A JPH06273930A (en) | 1993-03-18 | 1993-03-18 | Curable resin composition and multilayer printed circuit board using the same and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06273930A true JPH06273930A (en) | 1994-09-30 |
Family
ID=13104787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5914293A Pending JPH06273930A (en) | 1993-03-18 | 1993-03-18 | Curable resin composition and multilayer printed circuit board using the same and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06273930A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1156036A3 (en) * | 2000-05-18 | 2003-09-10 | National Starch and Chemical Investment Holding Corporation | Compounds with electron donor and electron acceptor functionality |
| JP2005141243A (en) * | 2000-01-31 | 2005-06-02 | Mitsubishi Paper Mills Ltd | Photosensitive composition and photosensitive lithographic printing plate material |
| US6908957B2 (en) | 2000-05-18 | 2005-06-21 | National Starch And Chemical Investment Holding Corporation | Curable electron donor compounds |
-
1993
- 1993-03-18 JP JP5914293A patent/JPH06273930A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005141243A (en) * | 2000-01-31 | 2005-06-02 | Mitsubishi Paper Mills Ltd | Photosensitive composition and photosensitive lithographic printing plate material |
| EP1156036A3 (en) * | 2000-05-18 | 2003-09-10 | National Starch and Chemical Investment Holding Corporation | Compounds with electron donor and electron acceptor functionality |
| US6908957B2 (en) | 2000-05-18 | 2005-06-21 | National Starch And Chemical Investment Holding Corporation | Curable electron donor compounds |
| US7326746B2 (en) | 2000-05-18 | 2008-02-05 | National Starch And Chemical Investment Holding Corporation | Curable electron donor compositions |
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