JPH052838Y2 - - Google Patents
Info
- Publication number
- JPH052838Y2 JPH052838Y2 JP7007287U JP7007287U JPH052838Y2 JP H052838 Y2 JPH052838 Y2 JP H052838Y2 JP 7007287 U JP7007287 U JP 7007287U JP 7007287 U JP7007287 U JP 7007287U JP H052838 Y2 JPH052838 Y2 JP H052838Y2
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical body
- water
- visible medium
- dry ice
- visible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 23
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 14
- 235000011089 carbon dioxide Nutrition 0.000 claims description 14
- 239000002775 capsule Substances 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 7
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 238000012800 visualization Methods 0.000 claims description 3
- 239000000779 smoke Substances 0.000 description 18
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009972 noncorrosive effect Effects 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
- Aerodynamic Tests, Hydrodynamic Tests, Wind Tunnels, And Water Tanks (AREA)
- Sampling And Sample Adjustment (AREA)
Description
【考案の詳細な説明】
〔概要〕
本考案は可視媒体発生装置において、使用に際
して筒状本体内で水をドライアイス片に接触させ
て白煙を発生させ、これをノズル部より流れの中
に噴出させることにより、この無害の白煙を流れ
の可視化に利用できるようにしたものである。[Detailed description of the invention] [Summary] The present invention is a visible medium generating device that, when used, brings water into contact with a piece of dry ice within a cylindrical body to generate white smoke, which is then introduced into the flow from the nozzle. By emitting it, this harmless white smoke can be used to visualize the flow.
本考案は可視媒体発生装置、特に気体の流れの
可視化のために使用しうる可視媒体を発生させる
装置に関する。
The present invention relates to a visible medium generating device, and more particularly to a device for generating a visible medium that can be used for visualization of gas flows.
半導体の製造設備において、例えば設備の改善
を図るために、製造設備の内部での気体の流れの
状態を確認し、更には流れを支配する法則を実証
することが必要とされることがある。 BACKGROUND ART In semiconductor manufacturing equipment, for example, in order to improve the equipment, it is sometimes necessary to confirm the state of gas flow inside the manufacturing equipment and further verify the laws governing the flow.
このためには流れを可視化する必要があり、こ
のための一つの方法として煙を流れの中に噴出さ
せて煙の流れを観察する方法がある。 To do this, it is necessary to visualize the flow, and one method for this is to eject smoke into the flow and observe the flow of smoke.
この方法を使用するためには、可視媒体である
煙を発生させる装置が必要である。 To use this method, a device is required to generate smoke, which is a visible medium.
従来の可視媒体発生装置は、第６図に示すよう
に、両端が封止された持ち易いサイズの管１内に
SnCl4２が充填されている構成である。
As shown in FIG. 6, the conventional visible medium generator is placed in a tube 1 of an easy-to-handle size with both ends sealed.
This structure is filled with SnCl 4 2.
使用に際して、第７図に示すように、管１の上
下の端部１ａ，１ｂを切除して小開口３，４を形
成し、ゴム球５を装着し、これを押し潰すように
操作して空気を管１内に注入する。 In use, as shown in FIG. 7, small openings 3 and 4 are formed by cutting off the upper and lower ends 1a and 1b of the tube 1, and a rubber bulb 5 is attached and operated to crush it. Air is injected into tube 1.
これにより、管１内で空気中の水分とSnCl4が
次のように反応する。 As a result, moisture in the air and SnCl 4 react in the tube 1 as follows.
3SnCl4＋2H2Ｏ→
SnO2＋2H2〔SnCl6〕
反応して発生したH2〔SnCl6〕よりなる白煙６
が小開口３より噴出する。 3SnCl 4 +2H 2 O→ SnO 2 +2H 2 [SnCl 6 ] White smoke composed of H 2 [SnCl 6 ] generated by the reaction 6
is ejected from the small opening 3.
この白煙６の成分であるH2〔SnCl6〕は、有害
であり、腐食性を有する。
H 2 [SnCl 6 ], which is a component of this white smoke 6, is harmful and corrosive.
このため、操作者は白煙を吸い込まないように
注意して使用する必要があると共に、部品を腐食
させてしまうという等の問題点があつた。 Therefore, the operator must be careful not to inhale the white smoke, and there are other problems such as corrosion of parts.
また、クリンルーム内では微粒子による汚染が
ある為使用できない。 Additionally, it cannot be used in a clean room due to contamination by particulates.
本考案は、気体の流れの可視化のために気体の
流れの中に煙状の可視媒体を噴出させる組立式の
可視媒体発生装置であつて、
一端にノズル部１１を有する第１の筒状体１２
と、
一端に空気注入口１３を有し、内部にドライア
イス片１９を保持する第２の筒状体１４と、
上記第１、第２の筒状体の他端同士を連結させ
て筒状本体２２を形成する可撓性の連結用筒体１
５と、
上記連結用筒体１５の内側に支持され、折曲時
に割ることのできる、水１７が封入されているガ
ラス製のカプセル１８と、
上記第２の筒状体の上記一端に取り付けられた
空気注入用のゴム球１６とを有する構成としたも
のである。
The present invention is an assembly-type visible medium generator that spouts a smoke-like visible medium into a gas flow for visualization of the gas flow, and includes a first cylindrical body having a nozzle portion 11 at one end. 12
a second cylindrical body 14 having an air inlet 13 at one end and holding a piece of dry ice 19 therein; and a cylindrical body formed by connecting the other ends of the first and second cylindrical bodies to each other. Flexible connecting cylinder 1 forming main body 22
5, a glass capsule 18 that is supported inside the connecting cylindrical body 15 and that can be broken when bent and contains water 17; and a glass capsule 18 that is attached to the one end of the second cylindrical body. This configuration has a rubber bulb 16 for air injection.
上記の煙状可視媒体の成分は水であり、無害で
あり、且つ腐食性もなく、安全に使用できる。
The component of the above smoke-like visible medium is water, which is harmless and non-corrosive, and can be used safely.
水をカプセル化しているため、使用する直前ま
では水をドライアイスに対して確実に非接触とし
得、しかも水をドライアイスに接触させる操作は
カプセルを割る操作でよく、使い勝手が良い。 Since the water is encapsulated, the water can be reliably kept out of contact with the dry ice until immediately before use, and the operation of bringing the water into contact with the dry ice can be accomplished by breaking the capsule, making it easy to use.
第１図は本考案の一実施例による可視媒体発生
装置１０の使用時の状態を示す。
FIG. 1 shows a state in which a visible medium generator 10 according to an embodiment of the present invention is used.
この装置１０は、ドライアイスと水とを接触さ
せたときに生ずる白煙を可視媒体として使用する
ものである。この白煙の成分はH2Ｏであり、無
害である。 This device 10 uses white smoke produced when dry ice and water come into contact as a visible medium. The component of this white smoke is H 2 O and is harmless.
ドライアイスと水とを使用し、水が凍つてしま
うと白煙が発生しなくなり、水とドライアイスを
近接させておくと水が凍つてしまうため、使用に
際して組み立てゝ使用する。 Dry ice and water are used, and if the water freezes, white smoke will no longer be generated, and if the water and dry ice are placed close together, the water will freeze, so they must be assembled before use.
以下、組立ての手順及び操作の手順に沿つて説
明する。 Below, the assembly procedure and operation procedure will be explained.
第２図に示すように、装置１０は、一端にノズ
ル部１１を有する第１の筒状体１２と、一端に空
気注入口１３を有する第２の筒状体１４と、ゴム
製の連結用筒体１５と、第２の筒状体１４の空気
注入口１３側に取り付けられた空気注入用のゴム
球１６と、水１７が封入されている使い捨ての水
封入ガラス製カプセル１８とよりなる。 As shown in FIG. 2, the device 10 includes a first cylindrical body 12 having a nozzle portion 11 at one end, a second cylindrical body 14 having an air inlet 13 at one end, and a rubber connecting member. It consists of a cylindrical body 15, a rubber bulb 16 for air injection attached to the air inlet 13 side of the second cylindrical body 14, and a disposable water-filled glass capsule 18 in which water 17 is sealed.
１９はドライアイス片である。 19 is a piece of dry ice.
装置１０を組み立てるには、まず、複数のドラ
イアイス片１９を第２の筒状体１４内に装填す
る。 To assemble the device 10, first a plurality of dry ice pieces 19 are loaded into the second cylindrical body 14.
次いで、カプセル１８をその上下部のスポンジ
製リング２０，２１を利用して第１、第２の筒状
体１２，１３の間に支持すると共に、連結用筒体
１５を利用して第１、第２の筒状体１２，１４と
距離ｌ離して連結する。 Next, the capsule 18 is supported between the first and second cylindrical bodies 12 and 13 using the upper and lower sponge rings 20 and 21, and the first and second cylindrical bodies 12 and 13 are supported using the connecting cylindrical body 15. It is connected to the second cylindrical bodies 12 and 14 at a distance l.
これにより、第３図に示すように筒状の本体２
２よりなる装置１０が完成する。 As a result, as shown in FIG. 3, the cylindrical main body 2
The device 10 consisting of 2 is completed.
装置１０は携帯し易いサイズである。 Device 10 is of a portable size.
次いで、第４図に示すように、連結用筒体１５
がゴム製であることを利用して、装置１０を連結
用筒体１５の個所で折り曲げ、カプセル１８を折
つて割る。 Next, as shown in FIG. 4, the connecting cylinder 15
Taking advantage of the fact that the capsule is made of rubber, the device 10 is bent at the connecting cylinder 15, and the capsule 18 is broken and broken.
カプセル１８が割られると水１７が流れ出し、
第２の筒状体１４内に流れ落ち、ドライアイス片
１９と接触し、可視媒体である白煙２３が発生す
る。 When the capsule 18 is broken, water 17 flows out,
It flows down into the second cylindrical body 14 and comes into contact with the dry ice pieces 19, generating white smoke 23 as a visible medium.
白煙２３が十分に発生し、第１、第２の筒状体
１２，１４内に充満した後に、第１図及び第５図
に示すように、所定方向を向けて、ゴム球１６を
指先で押し潰すように操作する。 After sufficient white smoke 23 is generated and fills the first and second cylindrical bodies 12 and 14, as shown in FIGS. 1 and 5, point the rubber bulb 16 in a predetermined direction and insert Operate to crush it with .
この操作によりゴム球１６内の空気が矢印２４
で示すように空気注入口１３を通つて筒状本体２
２内に注入され、白煙２３がノズル部１１よりウ
エハ処理装置３０の内部の空気の流れの中に噴出
される。 By this operation, the air inside the rubber bulb 16 is
The cylindrical body 2 passes through the air inlet 13 as shown in
2, and white smoke 23 is ejected from the nozzle portion 11 into the air flow inside the wafer processing apparatus 30.
ウエハ処理装置３０では、フアン３１により送
り込まれフイルタ３２により過された清浄な空
気が下方に流れる雰囲気内で、ウエハ３３が薬品
槽３４内で処理されている。薬品槽３４より蒸発
した蒸気は排気口３５より排気される。 In the wafer processing apparatus 30, wafers 33 are processed in a chemical tank 34 in an atmosphere in which clean air sent by a fan 31 and filtered by a filter 32 flows downward. Steam evaporated from the chemical tank 34 is exhausted from the exhaust port 35.
上記白煙２３は空気と共に矢印３６で示すよう
に下方に流れ、且つ蒸気と共に矢印３７で示すよ
うに流れる。この白煙の流れの状態より、薬品槽
３４より蒸発した蒸気が排気される状況を視認す
ることが出来る。 The white smoke 23 flows downward as shown by an arrow 36 together with air, and flows as shown by an arrow 37 together with steam. From the flow of this white smoke, it is possible to visually confirm the state in which the vapor evaporated from the chemical tank 34 is exhausted.
上記の白煙は水蒸気であり、全く無害であり、
安全であると共に、ウエハ処理装置３０を腐食し
たり腐食させることもない。 The white smoke above is water vapor and is completely harmless.
It is safe and does not corrode or corrode the wafer processing apparatus 30.
本考案によれば、発生する煙状可視媒体は水を
主成分とするものであり、無害であり且つ腐食性
もない。このため、気体の流れの可視化が安全に
且つ装置等を汚染したり腐蝕する虞れなく可能と
なる。また水はカプセル化されているため、所定
の操作をするまでは水とドライアイスとを確実に
非接触とすることが出来る。また可撓性筒体の個
所で折り曲げることにより、カプセルを割つて水
をドライアイスと接触させる構成であるため、使
い勝手もよい。
According to the present invention, the smoke-like visible medium generated is mainly water-based and is harmless and non-corrosive. Therefore, the gas flow can be visualized safely and without the risk of contaminating or corroding the equipment. Furthermore, since the water is encapsulated, it is possible to ensure that water and dry ice do not come into contact with each other until a predetermined operation is performed. Furthermore, since the capsule is broken by bending the flexible cylindrical body and the water is brought into contact with the dry ice, it is easy to use.
第１図は本考案の可視媒体発生装置の使用時の
状態を示す図、第２図は可視媒体発生装置の組立
ての仕方を説明する図、第３図は組立てられた可
視媒体発生装置を示す図、第４図は筒状本体を折
り曲げて水封入ガラス製カプセルを割つた状態を
示す図、第５図は本考案の可視媒体発生装置の使
用例を示す図、第６図は従来の可視媒体発生装置
の１例を示す図、第７図は第６図の装置の使用時
の状態を示す図である。
図中において、１０は可視媒体発生装置、１１
はノズル部、１２は第１の筒状体、１３は空気注
入口、１４は第２の筒状体、１５は連結用筒体、
１６はゴム球、１７は水、１８は水封入ガラス製
カプセル、１９はドライアイス片、２２は筒状本
体、２３は白煙である。
Fig. 1 is a diagram showing the state of use of the visible media generating device of the present invention, Fig. 2 is a diagram explaining how to assemble the visible media generating device, and Fig. 3 is a diagram showing the assembled visible media generating device. Figure 4 shows a water-filled glass capsule broken by bending the cylindrical body, Figure 5 shows an example of the use of the visible medium generator of the present invention, and Figure 6 shows a conventional visible medium generator. FIG. 7 is a diagram showing an example of a medium generation device, and FIG. 7 is a diagram showing a state in which the device of FIG. 6 is used. In the figure, 10 is a visible medium generator, 11
12 is a nozzle portion, 12 is a first cylindrical body, 13 is an air inlet, 14 is a second cylindrical body, 15 is a connecting cylindrical body,
16 is a rubber ball, 17 is water, 18 is a water-filled glass capsule, 19 is a piece of dry ice, 22 is a cylindrical body, and 23 is white smoke.
Claims (1)
煙状の可視媒体を噴出させる組立式の可視媒体発
生装置であつて、 一端にノズル部１１を有する第１の筒状体１２
と、 一端に空気注入口１３を有し、内部にドライア
イス片１９を保持する第２の筒状体１４と、 上記第１、第２の筒状体の他端同士を連結させ
て筒状本体２２を形成する可撓性の連結用筒体１
５と、 上記連結用筒体１５の内側に支持され、折曲時
に割ることのできる、水１７が封入されているガ
ラス製のカプセル１８と、 上記第２の筒状体の上記一端に取り付けられた
空気注入用のゴム球１６とを有する可視媒体発生
装置。[Claims for Utility Model Registration] A prefabricated visible medium generator for ejecting a smoky visible medium into a gas flow for visualization of the gas flow, the first device having a nozzle portion 11 at one end. cylindrical body 12
a second cylindrical body 14 having an air inlet 13 at one end and holding a piece of dry ice 19 therein; and a cylindrical body formed by connecting the other ends of the first and second cylindrical bodies to each other. Flexible connecting cylinder 1 forming main body 22
5, a glass capsule 18 that is supported inside the connecting cylindrical body 15 and that can be broken when bent and contains water 17; and a glass capsule 18 that is attached to the one end of the second cylindrical body. A visible medium generator having a rubber bulb 16 for air injection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7007287U JPH052838Y2 (en) | 1987-05-11 | 1987-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7007287U JPH052838Y2 (en) | 1987-05-11 | 1987-05-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63181851U JPS63181851U (en) | 1988-11-24 |
| JPH052838Y2 true JPH052838Y2 (en) | 1993-01-25 |
Family
ID=30911372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7007287U Expired - Lifetime JPH052838Y2 (en) | 1987-05-11 | 1987-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH052838Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7721597B2 (en) | 2008-02-28 | 2010-05-25 | Yuji Onishi | Simplified anemoscope |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009201966A (en) * | 2008-05-19 | 2009-09-10 | Yuji Onishi | Simple anemoscope for golf |
-
1987
- 1987-05-11 JP JP7007287U patent/JPH052838Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7721597B2 (en) | 2008-02-28 | 2010-05-25 | Yuji Onishi | Simplified anemoscope |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63181851U (en) | 1988-11-24 |
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