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JP7510137B2 - Mode converter and method for manufacturing the same - Google Patents

Mode converter and method for manufacturing the same Download PDF

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JP7510137B2
JP7510137B2 JP2020189824A JP2020189824A JP7510137B2 JP 7510137 B2 JP7510137 B2 JP 7510137B2 JP 2020189824 A JP2020189824 A JP 2020189824A JP 2020189824 A JP2020189824 A JP 2020189824A JP 7510137 B2 JP7510137 B2 JP 7510137B2
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泰志 坂本
雅樹 和田
和秀 中島
剛 藤澤
晋聖 齊藤
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Hokkaido University NUC
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特許法第30条第2項適用 2019年11月19日の Microoptics Conference 2019 にて、「A Broadband PLC-type Mode Converter Designed by Wavefront Matching Method」の演題で発表Applicable to Article 30, Paragraph 2 of the Patent Act. Presented at Microoptics Conference 2019 on November 19, 2019 under the title "A Broadband PLC-type Mode Converter Designed by Wavefront Matching Method."

本発明は、マルチモード光ファイバを利用するモード多重伝送システムにおいて、伝搬する複数のモードを変換する技術に関する。 The present invention relates to a technology for converting multiple propagating modes in a mode multiplexing transmission system that uses a multimode optical fiber.

光ファイバ通信システムでは、光ファイバ中で発生する非線形効果やファイバヒューズが問題となり、伝送の大容量化が制限されている。これらの制限を緩和するために、マルチコアやマルチモードファイバを用いた空間多重技術が検討されている。 In optical fiber communication systems, nonlinear effects and fiber fuses that occur in optical fibers are problems that limit the increase in transmission capacity. To alleviate these limitations, spatial multiplexing technology using multi-core or multi-mode fibers is being considered.

モード多重伝送技術においては、複数のモードを合分波するために、従来の光通信システムで用いられている基本モードから、高次モードへの変換並びに合波が必要である。また、伝送路においては、伝搬するモードごとに損失が異なっており、それによって生じるモード間損失差はモード多重伝送路の伝送容量を低下させる。 In mode multiplexing transmission technology, in order to multiplex and split multiple modes, it is necessary to convert the fundamental mode used in conventional optical communication systems into a higher-order mode and multiplex it. In addition, in the transmission line, the loss differs for each propagating mode, and the resulting difference in loss between modes reduces the transmission capacity of the mode multiplexing transmission line.

G. Labroille et al, “Efficient and mode selective spatial mode multiplexer based on multi-plane light conversion,” Opt. Express, vol. 22, p.15599 (2014)G. Labroille et al., "Efficient and mode selective spatial mode multiplexer based on multi-plane light conversion," Opt. Express, vol. 22, p. 15599 (2014) T. Fujisawa et al., “One chip, PLC three-mode exchanger based on symmetric and asymmetric directional coupler with integrated mode rotator, ” OFC2017 paper, W1B.2 (2017)T. Fujisawa et al. , "One chip, PLC three-mode exchanger based on symmetric and asymmetric directional coupler with integrated mode rotor," OFC2017 paper, W1B. 2 (2017) Y. Sakamaki et al., “New optical waveguide design based on wavefront matching method,” IEEE JLT, vol.25 pp.3511-3518 (2007).Y. Sakamaki et al. , "New optical waveform design based on wavefront matching method," IEEE JLT, vol. 25 pp. 3511-3518 (2007). T. Fujisawa et al., “Wide-bandwidth, low-waveguide-width-sensitivity InP-based multimode interference coupler designed by wavefront matching method,” IEICE ELEX, vol.8, pp.2100-2105 (2011).T. Fujisawa et al. , "Wide-bandwidth, low-waveguide-width-sensitivity InP-based multimode interference coupler designed by wavefront matching method," IEICE ELEX, vol. 8, pp. 2100-2105 (2011).

モードの合分波並びにモードの損失差補償のために、これまで多種多様なモード合分波器やモード変換器(例えば非特許文献1,2)が提案されてきたが、何れの方式においても複雑な光学系もしくは波長依存性を有しており、挿入損失の増大もしくは動作帯域が制限される。 A wide variety of mode multiplexers/demultiplexers and mode converters (e.g., Non-Patent Documents 1 and 2) have been proposed to multiplex/demultiplex modes and compensate for mode loss differences, but all of these methods have complex optical systems or wavelength dependence, which increases insertion loss or limits the operating band.

本開示は上記の課題に鑑みられたものであり、簡易な構造で、広帯域なモード変換を実現するための光デバイスを提供するものである。 This disclosure was made in consideration of the above problems, and provides an optical device with a simple structure that achieves broadband mode conversion.

本開示のモード変換器は、
n(nは1以上の整数)以上のモードを伝搬可能な入力導波路と、
m(mは2以上の整数)以上のモードを伝搬可能な出力導波路と、
l(lはmより大きい整数)以上のモードを伝搬可能かつ、前記入力導波路及び前記出力導波路よりも導波路幅が大きく、前記入力導波路及び前記出力導波路の間に接続された第3の導波路と、
を備え、
前記第3の導波路の少なくとも一部の導波路幅が、前記入力導波路の接続部分の導波路幅及び前記出力導波路の接続部分の導波路幅と異なり、
前記第3の導波路の少なくとも一部において、前記入力導波路から入力される1以上の特定のモードの重ね合わせである入力フィールドの順伝搬方向の波面と、前記出力導波路に出力される前記特定のモードとは異なるモードの重ね合わせである出力フィールドの逆伝搬方向の波面とが、一致する。
The mode converter of the present disclosure includes:
an input waveguide capable of propagating n or more modes (n being an integer of 1 or more);
an output waveguide capable of propagating m or more modes (m being an integer of 2 or more);
a third waveguide capable of propagating l or more modes (l being an integer greater than m), having a waveguide width greater than the input waveguide and the output waveguide, and connected between the input waveguide and the output waveguide;
Equipped with
a waveguide width of at least a part of the third waveguide is different from a waveguide width of a connection portion of the input waveguide and a waveguide width of a connection portion of the output waveguide;
In at least a portion of the third waveguide, a wavefront in the forward propagation direction of an input field, which is a superposition of one or more specific modes input from the input waveguide, coincides with a wavefront in the reverse propagation direction of an output field, which is a superposition of modes different from the specific modes output to the output waveguide.

本開示のモード変換器の製造方法は、
n(nは1以上の整数)以上のモードを伝搬可能な入力導波路と、
m(mは2以上の整数)以上のモードを伝搬可能な出力導波路と、
l(lはmより大きい整数)以上のモードを伝搬可能かつ、前記入力導波路及び前記出力導波路よりも導波路幅が大きく、前記入力導波路及び前記出力導波路の間に接続された第3の導波路と、
を備えるモード変換器の製造方法であって、
前記入力導波路から入力される1以上の特定のモードの重ね合わせである入力フィールドの順伝搬方向の波面と、前記出力導波路に出力される前記特定のモードとは異なるモードの重ね合わせである出力フィールドの逆伝搬方向の波面とが、一致するように、前記第3の導波路の少なくとも一部の導波路幅を設定する。
The method for manufacturing a mode converter according to the present disclosure includes the steps of:
an input waveguide capable of propagating n or more modes (n being an integer of 1 or more);
an output waveguide capable of propagating m or more modes (m being an integer of 2 or more);
a third waveguide capable of propagating l or more modes (l being an integer greater than m), having a waveguide width greater than the input waveguide and the output waveguide, and connected between the input waveguide and the output waveguide;
A method for manufacturing a mode converter comprising:
The waveguide width of at least a portion of the third waveguide is set so that a wavefront in the forward propagation direction of an input field, which is a superposition of one or more specific modes input from the input waveguide, coincides with a wavefront in the reverse propagation direction of an output field, which is a superposition of modes different from the specific modes output to the output waveguide.

本開示によれば、簡易な構造で、広帯域なモード変換を実現するための光デバイスを提供することができる。 This disclosure provides an optical device with a simple structure that can achieve broadband mode conversion.

本開示のモード変換器の基準構造を示す。1 shows a reference structure for a mode converter of the present disclosure. 導波路3の導波路幅を伝搬方向に変調しない基準構造におけるモードの入出力特性を示す。1 shows input/output characteristics of a mode in a reference structure in which the waveguide width of the waveguide 3 is not modulated in the propagation direction. 本開示における導波路幅の変調を行った結果を示す。1 shows the results of modulating the waveguide width according to the present disclosure. 本開示における導波路幅の変調例を示す。1 illustrates an example of waveguide width modulation in accordance with the present disclosure. 具体的な工程フローチャートを示す。A specific process flow chart is shown below. 波面整合の反復回数と、入出力の透過率(損失)を示す。The number of wavefront matching iterations and the input and output transmittance (loss) are shown. 透過率の波長依存税の計算結果を示す。The calculation results of the wavelength dependence of transmittance are shown.

以下、本開示の実施形態について、図面を参照しながら詳細に説明する。なお、本開示は、以下に示す実施形態に限定されるものではない。これらの実施の例は例示に過ぎず、本開示は当業者の知識に基づいて種々の変更、改良を施した形態で実施することができる。なお、本明細書及び図面において符号が同じ構成要素は、相互に同一のものを示すものとする。 The following describes in detail the embodiments of the present disclosure with reference to the drawings. Note that the present disclosure is not limited to the embodiments shown below. These implementation examples are merely illustrative, and the present disclosure can be implemented in various forms with various modifications and improvements based on the knowledge of those skilled in the art. Note that components with the same reference numerals in this specification and drawings are considered to be identical to each other.

本開示の第1の実施例について説明する。図1は、本開示のモード変換器の基準構造を示したものである。入力側の導波路1と、出力側の導波路2と、その間に配置された導波路3の基準構造で構成される。導波路1はn(nは1以上の整数)以上のモードを伝搬可能であり、導波路2はm(mは2以上の整数)以上のモードを伝搬可能であり、導波路3はl(lはmより大きい整数)以上のモードを伝搬可能である。本実施形態では、n=m=2であり、導波路1及び導波路2はLP11モードまでを導波する2モード導波路の例を示す。導波路3の基準構造は、導波路1,2の導波路幅W,Wよりも大きい導波路幅Wを有しており、導波路高さHは同じである。 A first embodiment of the present disclosure will be described. FIG. 1 shows a reference structure of the mode converter of the present disclosure. The reference structure is composed of an input side waveguide 1, an output side waveguide 2, and a waveguide 3 disposed therebetween. The waveguide 1 can propagate modes of n (n is an integer of 1 or more), the waveguide 2 can propagate modes of m (m is an integer of 2 or more), and the waveguide 3 can propagate modes of l (l is an integer larger than m). In this embodiment, n=m=2, and the waveguide 1 and the waveguide 2 are an example of a two-mode waveguide that guides up to the LP11 mode. The reference structure of the waveguide 3 has a waveguide width W3 larger than the waveguide widths W1 and W2 of the waveguides 1 and 2 , and the waveguide height H is the same.

本開示で実現する機能は、特定のモードを導波路1から入力した場合に、特定の異なるモードに変換して導波路2から出力するものである。特定のモードは、導波路1の伝搬可能なn以上のモードのうちの少なくとも一部のモードである。特定の異なるモードは、導波路2の伝搬可能なm以上のマルチモードのうちの少なくとも一部のモードである。以下、導波路1から導波路の2への光の伝搬方向をz方向であるとして説明する。 The function realized by this disclosure is to convert a specific mode input from waveguide 1 into a specific different mode and output it from waveguide 2. The specific mode is at least a part of the n or more modes that can propagate through waveguide 1. The specific different mode is at least a part of the m or more multimodes that can propagate through waveguide 2. In the following description, the propagation direction of light from waveguide 1 to waveguide 2 is assumed to be the z direction.

図2Aに、導波路3の導波路幅を伝搬方向に変調しない基準構造におけるモードの入出力特性を示す。図2Bに、導波路3の導波路幅を伝搬方向に変調した基準構造におけるモードの入出力特性を示す。図2A及び図2Bにおいて、白の線は導波路3の形状を示す。図2Bに示す本開示の例では、導波路1から基本モードを入力した場合、導波路2から同じモードが得られるよう、導波路1、2の導波路3への接続位置は設計されている。またこの例では、導波路1、2の導波路3への接続位置は、伝搬方向のz軸上で異なり、導波路幅方向(x方向)における導波路3の中心位置から対称位置に導波路1,2が接続されている。 Figure 2A shows the input/output characteristics of the mode in a reference structure in which the waveguide width of the waveguide 3 is not modulated in the propagation direction. Figure 2B shows the input/output characteristics of the mode in a reference structure in which the waveguide width of the waveguide 3 is modulated in the propagation direction. In Figures 2A and 2B, the white lines indicate the shape of the waveguide 3. In the example of the present disclosure shown in Figure 2B, the connection positions of the waveguides 1 and 2 to the waveguide 3 are designed so that when the fundamental mode is input from the waveguide 1, the same mode is obtained from the waveguide 2. In this example, the connection positions of the waveguides 1 and 2 to the waveguide 3 are different on the z-axis in the propagation direction, and the waveguides 1 and 2 are connected to symmetrical positions from the center position of the waveguide 3 in the waveguide width direction (x-direction).

図3に、本開示における導波路幅の変調例を示す。導波路1から入力された前記特定のモードは導波路3に入力され、入力フィールドを形成する。前記特定のモードはn以上のモードを有するため、入力フィールドはn以上のモードの重ね合わせとなる。一方、導波路3から導波路2に出力される前記特定の異なるモードは、m以上のモードを有し、出力フィールドはm以上のモードの重ね合わせとなる。本開示は、入力フィールドの順伝搬方向の断面方向フィールドの波面と出力フィールドの逆伝搬方向の断面方向フィールドの波面とが一致するように、導波路3の位置zにおける微小区間Δzごとの導波路幅Wを変化させる。 FIG. 3 shows an example of the modulation of the waveguide width in the present disclosure. The specific mode input from the waveguide 1 is input to the waveguide 3 to form an input field. Since the specific mode has n or more modes, the input field is a superposition of n or more modes. On the other hand, the specific different mode output from the waveguide 3 to the waveguide 2 has m or more modes, and the output field is a superposition of m or more modes. In the present disclosure, the waveguide width W3 is changed for each minute section Δz at the position z of the waveguide 3 so that the wavefront of the cross-sectional field in the forward propagation direction of the input field and the wavefront of the cross-sectional field in the reverse propagation direction of the output field coincide with each other.

図4に具体的な工程フローチャートを示す。
まず、導波路幅Wが一定の構造を基準構造として定める(S11)。
光の伝搬方向における任意の位置zの導波路幅Wを決定するために、
最適化位置zを設定し(S12)、
入力フィールドが順伝搬し位置zに至った時のフィールドと、出力フィールドが逆伝搬し位置zに至った時のフィールドと、を計算し(S13)、
これらのフィールドが一致するよう導波路幅Wを変化させる(S14)。
これらS12~S14の工程を、順次位置zを導波路3における導波路1との接続端から導波路2と接続される出力端まで走査し繰り返す。
A specific process flow chart is shown in FIG.
First, a structure with a constant waveguide width W3 is defined as a reference structure (S11).
To determine the waveguide width W3 at any position z in the light propagation direction,
Set the optimization position z (S12);
Calculate the field when the input field propagates forward and reaches position z, and the field when the output field propagates backward and reaches position z (S13).
The waveguide width W3 is changed so that these fields coincide (S14).
These steps S12 to S14 are repeated by sequentially scanning the position z from the connection end of the waveguide 3 with the waveguide 1 to the output end connected with the waveguide 2.

結果として、導波路3の任意の位置zにおいて、入力導波路1からの順伝搬フィールドと、出力導波路2からの逆伝搬フィールドが一致するような導波路3の構造が決定される。この構造を有する平面光波回路を製造することで、所望の入力フィールドから所望の出力フィールドを得る光デバイスが実現できる。ここで、平面導波路の製造方法は任意であるが、例えば、設計した導波路構造のパターンマスクを作製し、当該パターンマスクを用いたパターンニングによって導波路を形成することができる。なお、このようなフィールドの一致は、導波路3の少なくとも一部であってもよい。 As a result, a structure of the waveguide 3 is determined in which the forward propagation field from the input waveguide 1 and the reverse propagation field from the output waveguide 2 coincide at any position z of the waveguide 3. By manufacturing a planar lightwave circuit having this structure, an optical device that obtains a desired output field from a desired input field can be realized. Here, the method of manufacturing the planar waveguide is arbitrary, but for example, a pattern mask of the designed waveguide structure can be produced and the waveguide can be formed by patterning using the pattern mask. Note that such coincidence of fields may be at least a part of the waveguide 3.

上記の導波路幅最適化手法は、非特許文献3、4に記載のシングルモードデバイスの設計と同様の手法を用いることができる。例えば、入力導波路1の入力端からの入力フィールドの順伝搬のフィールドの波面と、出力導波路2の出力端からの出力フィールドの逆伝搬させたフィールドの波面とが一致するように、波面整合法を用いて導波路幅Wを光の伝搬方向に沿って変動させ、特性を向上させる。しかしながら、その適用は入出力導波路がシングルモード導波路の場合に限られており、本開示のような、入出力が1対のマルチモード導波路の場合の特性改善に関してはまったく検討されておらず、また、本開示におけるような、導波路3におけるマルチモード干渉を利用してモード変換を生ずるモード変換器に関しては全く検討が行われていない。 The above-mentioned waveguide width optimization method can use a method similar to that used for designing single-mode devices described in Non-Patent Documents 3 and 4. For example, the waveguide width W3 is varied along the light propagation direction using a wavefront matching method so that the wavefront of the forward-propagated field of the input field from the input end of the input waveguide 1 coincides with the wavefront of the backward-propagated field of the output field from the output end of the output waveguide 2, thereby improving the characteristics. However, the application of this method is limited to the case where the input and output waveguides are single-mode waveguides, and there is no consideration at all of improving the characteristics in the case where the input and output are a pair of multimode waveguides, as in the present disclosure, and there is no consideration at all of a mode converter that generates mode conversion by utilizing multimode interference in the waveguide 3, as in the present disclosure.

例えば、導波路1から基本モード、導波路2からLP11モードを出力する前提で最適化を行った結果の導波路幅形状を図2Bに示す。ここで、導波路1~3の比屈折率差Δを1.0%、導波路1の幅W及び導波路2の幅Wを11.0μm、導波路高さHを10.0μm、導波路3の導波路幅Wを30.0μm、各導波路長をL=L=100.0μm、L=4000.0μmとしている。 2B shows the waveguide width shape as a result of optimization on the premise that the fundamental mode is output from waveguide 1 and the LP11 mode is output from waveguide 2. Here, the relative refractive index difference Δ of waveguides 1 to 3 is 1.0%, the width W1 of waveguide 1 and the width W2 of waveguide 2 are 11.0 μm, the waveguide height H is 10.0 μm, the waveguide width W3 of waveguide 3 is 30.0 μm, and the lengths of the respective waveguides are L1 = L2 = 100.0 μm and L3 = 4000.0 μm.

図5に、波面整合の反復回数と、入出力の透過率(損失)を示す。およそ5回のS12~S14の計算反復により、広い波長帯域で-2dB以上の低損失性が得られていることがわかる。これは、基準構造において入力フィールドと出力フィールドが同じである構造に対して波面整合法を適用したことによるものである。 Figure 5 shows the number of wavefront matching iterations and the input/output transmittance (loss). It can be seen that by repeating the calculations of S12 to S14 approximately five times, a low loss of -2 dB or more was obtained over a wide wavelength band. This is because the wavefront matching method was applied to a structure in which the input field and output field are the same in the reference structure.

図6に、透過率の波長依存税の計算結果を示す。波面整合法の設計においては、最適化する波長範囲がパラメータであり、1.5~1.6または1.3~1.7μmの2種類の波長範囲を想定した場合の結果を併記している。本結果から分かる通り、波長範囲を広げるとその分波長帯域は増加するが、波長帯域が狭いほうが、局所的に優れた損失特性を得ることができることがわかる。 Figure 6 shows the calculation results for the wavelength dependence of transmittance. In designing the wavefront matching method, the wavelength range to be optimized is a parameter, and the results are shown for two assumed wavelength ranges of 1.5 to 1.6 and 1.3 to 1.7 μm. As can be seen from these results, widening the wavelength range increases the wavelength band accordingly, but a narrower wavelength band allows for locally superior loss characteristics to be obtained.

本実施例における導波路幅Wの非周期的な変調は、光の伝搬方向(図1のz方向)1μmに対して、光の伝搬方向に垂直な方向(図1のx方向)への変化幅は、最大±0.2μmである。これは、急激な光導波路幅Wの変調を禁止することで、波長依存性が滑らかとなり、再現性の優れた光回路を提供することができるからである。しかしながら、本開示は、この例に限定されるものではなく、より急峻な導波路幅Wの変動があっても勿論構わない。 In this embodiment, the non-periodic modulation of the waveguide width W3 has a maximum change width of ±0.2 μm in the direction perpendicular to the light propagation direction (x direction in FIG. 1) for a light propagation direction of 1 μm (z direction in FIG. 1). This is because prohibiting abrupt modulation of the optical waveguide width W3 makes the wavelength dependency smooth, and an optical circuit with excellent reproducibility can be provided. However, the present disclosure is not limited to this example, and it is of course acceptable for the waveguide width W3 to vary more abruptly.

なお、実際に波面整合法で得られた伝搬方向に沿った導波路幅Wの変動に対し、伝搬方向において前後20点の導波路幅を平均化した値でスムージングした構造においても同等の特性が得られ、作製上、好ましい構造とすることができる。 In addition, in a structure in which the variation in the waveguide width W3 along the propagation direction actually obtained by the wavefront matching method is smoothed by averaging the waveguide widths at 20 points before and after the propagation direction, equivalent characteristics can be obtained, and this can be a preferable structure in terms of fabrication.

なお、本明細書においてはガラス系材料を用いた平面光波回路に関する実施例を記載したが、その材料は当然ほかのものであってもかまわない。たとえば、SiやInGaAsPなどの半導体、またポリマーなどの有機物を用いた平面光波回路であっても、本明細書記載の実施例と同様の効果を得ることができる。 In this specification, examples of planar lightwave circuits using glass-based materials are described, but the materials can of course be other materials. For example, similar effects to those of the examples described in this specification can be obtained with planar lightwave circuits using semiconductors such as Si or InGaAsP, or organic materials such as polymers.

また、使用する波長帯に関しても、本明細書記載の実施例では1.3~1.7μm程度としているが、より波長の長い中赤外領域(2μm以上)や可視光帯であっても構わない。 In addition, the wavelength band used in the examples described in this specification is approximately 1.3 to 1.7 μm, but it can also be a longer wavelength band such as the mid-infrared region (2 μm or more) or the visible light region.

導波路構造に関しても、本明細書記載の実施例においては、矩形の埋め込み型導波路に関するものを記載したが、他の導波構造、たとえば、リッジ導波路構造でも構わない。 As for the waveguide structure, the examples described in this specification are directed to a rectangular embedded waveguide, but other waveguide structures, such as a ridge waveguide structure, may also be used.

本開示は情報通信産業に適用することができる。 This disclosure can be applied to the information and communications industry.

1、2、3:導波路 1, 2, 3: Waveguide

Claims (5)

n(nは1以上の整数)以上のモードを伝搬可能な入力導波路と、
m(mは2以上の整数)以上のモードを伝搬可能な出力導波路と、
l(lはmより大きい整数)以上のモードを伝搬可能かつ、前記入力導波路及び前記出力導波路よりも導波路幅が大きく、前記入力導波路及び前記出力導波路の間に接続された第3の導波路と、
を備え、
前記入力導波路及び前記出力導波路は、前記第3の導波路の導波路幅方向の中心位置から対称位置にずらして配置され、
前記第3の導波路の少なくとも一部の導波路幅が、前記入力導波路の接続部分の導波路幅及び前記出力導波路の接続部分の導波路幅と異なり、
前記第3の導波路の少なくとも一部において、前記入力導波路から入力される1以上の特定のモードの重ね合わせである入力フィールドの順伝搬方向の波面と、前記出力導波路に出力される前記特定のモードとは異なるモードの重ね合わせである出力フィールドの逆伝搬方向の波面とが、一致するように、導波路幅が伝搬方向に非周期的に変調されている、
モード変換器。
an input waveguide capable of propagating n or more modes (n being an integer of 1 or more);
an output waveguide capable of propagating m or more modes (m being an integer of 2 or more);
a third waveguide capable of propagating l or more modes (l being an integer greater than m), having a waveguide width greater than the input waveguide and the output waveguide, and connected between the input waveguide and the output waveguide;
Equipped with
the input waveguide and the output waveguide are disposed at positions symmetrically shifted from a center position in a waveguide width direction of the third waveguide,
a waveguide width of at least a part of the third waveguide is different from a waveguide width of a connection portion of the input waveguide and a waveguide width of a connection portion of the output waveguide;
a waveguide width is non-periodically modulated in a propagation direction so that, in at least a portion of the third waveguide, a wavefront in a forward propagation direction of an input field, which is a superposition of one or more specific modes input from the input waveguide, coincides with a wavefront in a reverse propagation direction of an output field, which is a superposition of modes different from the specific modes output to the output waveguide;
Mode converter.
前記第3の導波路の少なくとも一部において、前記入力導波路から入力される1以上の特定のモードの重ね合わせである入力フィールドの順伝搬方向の波面と、前記出力導波路に出力される前記特定のモードとは異なるモードの重ね合わせである出力フィールドの逆伝搬方向の波面とが、一致するように、導波路幅が伝搬方向の位置zにおける微小区間Δzごとに設定されている、
請求項1に記載のモード変換器。
a waveguide width is set for each minute section Δz at a position z in the propagation direction so that, in at least a portion of the third waveguide, a wavefront in a forward propagation direction of an input field, which is a superposition of one or more specific modes input from the input waveguide, coincides with a wavefront in a reverse propagation direction of an output field, which is a superposition of modes different from the specific modes output to the output waveguide;
The mode converter of claim 1 .
前記特定のモードはLP01モードであり、
前記特定のモードとは異なるモードはLP11モードである、
請求項1又は2に記載のモード変換器。
The specific mode is LP01 mode,
The mode different from the specific mode is an LP11 mode.
3. The mode converter according to claim 1 or 2 .
n(nは1以上の整数)以上のモードを伝搬可能な入力導波路と、
m(mは2以上の整数)以上のモードを伝搬可能な出力導波路と、
l(lはmより大きい整数)以上のモードを伝搬可能かつ、前記入力導波路及び前記出力導波路よりも導波路幅が大きく、前記入力導波路及び前記出力導波路の間に接続された第3の導波路と、
を備えるモード変換器の製造方法であって、
前記入力導波路及び前記出力導波路を、前記第3の導波路の導波路幅方向の中心位置から対称位置にずらして配置し、
前記入力導波路から入力される1以上の特定のモードの重ね合わせである入力フィールドの順伝搬方向の波面と、前記出力導波路に出力される前記特定のモードとは異なるモードの重ね合わせである出力フィールドの逆伝搬方向の波面とが、一致するように、前記第3の導波路の少なくとも一部の導波路幅を伝搬方向に非周期的に変調する、
モード変換器の製造方法。
an input waveguide capable of propagating n or more modes (n being an integer of 1 or more);
an output waveguide capable of propagating m or more modes (m being an integer of 2 or more);
a third waveguide capable of propagating l or more modes (l being an integer greater than m), having a waveguide width greater than the input waveguide and the output waveguide, and connected between the input waveguide and the output waveguide;
A method for manufacturing a mode converter comprising:
the input waveguide and the output waveguide are arranged to be shifted symmetrically from a center position in a waveguide width direction of the third waveguide,
a waveguide width of at least a part of the third waveguide is non-periodically modulated in a propagation direction so that a wavefront in a forward propagation direction of an input field, which is a superposition of one or more specific modes input from the input waveguide, coincides with a wavefront in a reverse propagation direction of an output field, which is a superposition of modes different from the specific modes output to the output waveguide.
A method for manufacturing a mode converter.
前記入力導波路から入力される1以上の特定のモードの重ね合わせである入力フィールドの順伝搬方向の波面と、前記出力導波路に出力される前記特定のモードとは異なるモードの重ね合わせである出力フィールドの逆伝搬方向の波面とが、一致するように、前記第3の導波路の少なくとも一部の導波路幅を伝搬方向の位置zにおける微小区間Δzごとに設定する、
請求項に記載のモード変換器の製造方法。
a waveguide width of at least a part of the third waveguide is set for each minute section Δz at a position z in the propagation direction so that a wavefront in a forward propagation direction of an input field, which is a superposition of one or more specific modes input from the input waveguide, coincides with a wavefront in a reverse propagation direction of an output field, which is a superposition of modes different from the specific modes output to the output waveguide;
A method for manufacturing the mode converter according to claim 4 .
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