JP7572775B2 - Manufacturing method of RTB based sintered magnet - Google Patents
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Description
本開示は、R-T-B系焼結磁石の製造方法に関する。 This disclosure relates to a method for producing R-T-B based sintered magnets.
R2T14B型化合物を主相とするR-T-B系焼結磁石(Rは希土類元素であり、Nd、PrおよびCeからなる群から選択された少なくとも1つを含む、TはFe又はFeとCoであり、Tの90質量%以上がFeである)は、永久磁石の中で最も高性能な磁石として知られており、ハイブリッド自動車用、電気自動車用や家電製品用の各種モータ等に使用されている。 R-T-B system sintered magnets (R is a rare earth element containing at least one selected from the group consisting of Nd, Pr and Ce, T is Fe or Fe and Co, and 90% or more by mass of T is Fe) with an R 2 T 14 B type compound as the main phase are known as the highest performance magnets among permanent magnets, and are used in various motors for hybrid cars, electric cars and home appliances.
R-T-B系焼結磁石は、高温で保磁力HcJ(以下、単に「HcJ」と記載する場合がある)が低下し、不可逆熱減磁が起こる。そのため、特にハイブリッド自動車用や電気自動車用モータに使用される場合、高温下でも高いHcJを維持することが要求されている。 At high temperatures, R-T-B based sintered magnets lose their coercive force H cJ (hereinafter sometimes simply referred to as "H cJ "), causing irreversible thermal demagnetization. Therefore, when they are used in motors for hybrid and electric vehicles, in particular, they are required to maintain a high H cJ even at high temperatures.
従来、HcJ向上のために、R-T-B系焼結磁石に重希土類元素(主としてDy)が多量に添加されていたが、残留磁束密度Br(以下、単に「Br」と記載する場合がある)が低下するという問題があった。そのため、近年、R-T-B系焼結磁石の表面から内部に重希土類元素を拡散させて主相結晶粒の外殻部に重希土類元素を濃化してBrの低下を抑制しつつ、高いHcJを得る方法が採られている。 Conventionally, large amounts of heavy rare earth elements (mainly Dy) have been added to sintered R-T-B magnets to improve HcJ , but this has the problem of reducing the remanence B r (hereinafter sometimes simply referred to as "B r "). For this reason, in recent years, a method has been adopted in which heavy rare earth elements are diffused from the surface to the interior of a sintered R-T-B magnet, concentrating the heavy rare earth elements in the outer periphery of the main phase crystal grains, thereby obtaining a high HcJ while suppressing the reduction in B r .
しかし、Dyは、産出地が限定されている等の理由から、供給が不安定である、および価格が変動するなどの問題を有している。そのため、Dyなどの重希土類元素をできるだけ使用せずに(使用量をできるだけ少なくして)R-T-B系焼結磁石のHcJを向上させる技術が求められている。 However, Dy has problems such as unstable supply and price fluctuations due to the limited production areas, etc. For this reason, there is a demand for technology that improves the HcJ of R-T-B based sintered magnets while using as little heavy rare earth elements as possible, such as Dy (using as little as possible).
特許文献1には、通常のR-T-B系合金よりもBの含有量を低くするとともに、Al、Ga、Cuのうちから選ばれる1種以上の金属元素Mを含有させることによりR2T17相を生成させ、該R2T17相を原料として生成させた遷移金属リッチ相(R6T13M)の体積率を充分に確保することにより、Dyの含有量を抑制しつつ、保磁力HcJの高いR-T-B系焼結磁石が得られることが記載されている。 Patent Document 1 describes that by reducing the B content compared to normal R-T-B based alloys and adding one or more metal elements M selected from Al, Ga, and Cu to form an R 2 T 17 phase, and by sufficiently ensuring the volume fraction of a transition metal-rich phase (R 6 T 13 M) formed using the R 2 T 17 phase as a raw material, an R-T-B based sintered magnet with a high coercive force H cJ can be obtained while suppressing the Dy content.
特許文献1に記載されているようなDyの含有量の少ないR-T-B系焼結磁石において、さらなる磁気特性の向上が模索されている。本開示は、Dyの含有量を抑制したまま、高いBrと高いHcJを有するR-T-B系焼結磁石の製造方法を提供することを目的とする。 There has been a demand for further improvements in the magnetic properties of sintered R-T-B magnets with a low Dy content, such as those described in Patent Document 1. An object of the present disclosure is to provide a method for producing a sintered R-T-B magnet that has high B r and high H cJ while keeping the Dy content low.
本発明の態様1は、
少なくともR、B、GaおよびTを含み、
R:27.0質量%以上35.0質量%以下であり、Rは希土類元素であり、Nd、PrおよびCeからなる群から選択された少なくとも1つを含んでおり、
B:0.80質量%以上0.93質量%以下であり、
Ga:0.15質量%以上1.0質量%以下であり、
T:61.5質量%以上70.0質量%以下(TはFe又はFeとCoであり、Tの90質量%以上がFeである)であり、かつ下記式(1)を満たすR-T-B系焼結磁石素材を準備する工程と、
14[B]/10.8<[T]/55.85 (1)
([B]は質量%で示すBの含有量であり、[T]は質量%で示すTの含有量である)
前記R-T-B系焼結磁石素材を、400℃以上600℃以下の熱処理温度で、10秒以上30分未満の保持時間で保持して熱処理する熱処理工程と、を含む、R-T-B系焼結磁石の製造方法である。
Aspect 1 of the present invention is
Contains at least R, B, Ga and T;
R: 27.0% by mass or more and 35.0% by mass or less, R is a rare earth element and includes at least one selected from the group consisting of Nd, Pr, and Ce;
B: 0.80% by mass or more and 0.93% by mass or less;
Ga: 0.15% by mass or more and 1.0% by mass or less;
preparing a sintered R-T-B based magnet material having T of 61.5 mass % or more and 70.0 mass % or less (T is Fe or Fe and Co, and 90 mass % or more of T is Fe) and satisfying the following formula (1);
14[B]/10.8<[T]/55.85 (1)
([B] is the content of B in mass%, and [T] is the content of T in mass%)
and a heat treatment step of heat treating the sintered R-T-B based magnet material by holding the heat treatment temperature at 400° C. or higher and 600° C. or lower for a holding time of 10 seconds or higher and less than 30 minutes.
本発明の態様2は、
前記熱処理工程における前記保持時間が10秒以上10分以下である、態様1に記載のR-T-B系焼結磁石の製造方法である。
Aspect 2 of the present invention is
Aspect 2 is a method for producing a sintered RTB based magnet according to aspect 1, wherein the holding time in the heat treatment step is from 10 seconds to 10 minutes.
本発明の態様3は、
前記熱処理工程における前記保持時間が10秒以上3分以下である、態様1又は2に記載のR-T-B系焼結磁石の製造方法である。
Aspect 3 of the present invention is
3. The method for producing a sintered RTB based magnet according to claim 1, wherein the holding time in the heat treatment step is from 10 seconds to 3 minutes.
本開示の製造方法よれば、Dyの含有量を抑制したまま、高いBrと高いHcJを有するR-T-B系焼結磁石の製造方法を提供することができる。 The manufacturing method of the present disclosure can provide a method for producing a sintered RTB based magnet having high B r and high H cJ while keeping the Dy content low.
R-T-B系焼結磁石は、焼結後に熱処理を行うことでHcJが向上することが一般的に知られている。HcJが最大値をとるためには、最適の熱処理温度に達した後、その熱処理温度で、最低でも1.5時間~3時間程度保持する必要であると考えられていた。そのため、R-T-B系焼結磁石の磁気特性(特にHcJ)を十分発揮させるために、保持時間を通常は1.5時間以上として熱処理が行われていた。また、Br及びHcJの関係はトレードオフの関係にある。そのため通常、保持時間が短いと(例えば5分)Brの値は高いが、HcJの値は大幅に低下する。そして、保持時間を長くすると(例えば3時間)HcJの値は高く、HcJの向上に伴いBrの値は低下する。 It is generally known that the H cJ of an R-T-B based sintered magnet is improved by heat treatment after sintering. In order for H cJ to reach its maximum value, it was thought that it was necessary to hold the heat treatment temperature at the optimum temperature for at least 1.5 to 3 hours. Therefore, in order to fully exhibit the magnetic properties (especially H cJ ) of an R-T-B based sintered magnet, the heat treatment was usually performed with a holding time of 1.5 hours or more. In addition, there is a trade-off between B r and H cJ . Therefore, usually, if the holding time is short (e.g., 5 minutes), the value of B r is high, but the value of H cJ is significantly reduced. And, if the holding time is long (e.g., 3 hours), the value of H cJ is high, and the value of B r is reduced as H cJ is improved.
しかし、本発明者らが鋭意検討した結果、特許文献1に記載されるような、Bの含有量がR2T14B化合物の化学量論組成比よりも少なく、かつ、Gaを含有するR-T-B系焼結磁石においては、全く意外なことに保持時間を30分未満と極めて短時間として熱処理を行うことにより、HcJを向上できることを見いだした。また、保持時間を長くしていくと、Br及びHcJが両方とも低下していくことがわかった。すなわち、Bの含有量がR2T14B化合物の化学量論組成比よりも少なく、かつ、Gaを含有するR-T-B系焼結磁石においては、保持時間が30分未満(好ましくは10分以下、さらに好ましくは3分以下)の時にBr及びHcJの両方で極大値又は極大値に近い値を示すことがわかった。この知見に基づいて、本発明者らは、本発明に係るR-T-B系焼結磁石の製造方法を完成するに至った。 However, as a result of intensive research by the present inventors, it was unexpectedly found that, in an R-T-B based sintered magnet containing Ga and having a B content less than the stoichiometric composition ratio of the R 2 T 14 B compound as described in Patent Document 1, the H cJ can be improved by performing heat treatment for an extremely short holding time of less than 30 minutes. It was also found that as the holding time was increased, both B r and H cJ decreased. That is, in an R-T-B based sintered magnet containing Ga and having a B content less than the stoichiometric composition ratio of the R 2 T 14 B compound, it was found that both B r and H cJ showed maximum values or values close to maximum values when the holding time was less than 30 minutes (preferably 10 minutes or less, more preferably 3 minutes or less). Based on this finding, the present inventors have completed a method for producing an R-T-B based sintered magnet according to the present invention.
以下に本発明の実施形態に係る製造方法について詳述する。
なお、本発明において、特定条件の熱処理(400℃以上600℃以下の温度で10秒以上30分未満の保持時間で保持する熱処理)が完了する前の段階にある材料を「R-T-B系焼結磁石素材」または単に「焼結磁石素材」という。R-T-B系焼結磁石素材を、上記の特定条件の熱処理を行った後に得られる材料を「R-T-B系焼結磁石」または単に「焼結磁石」という。つまり、本明細書では、上記の特定条件の熱処理を行う前の材料、および当該熱処理を行っている途中の材料を、「R-T-B系焼結磁石素材」と称する。
The manufacturing method according to the embodiment of the present invention will be described in detail below.
In the present invention, a material at a stage prior to completion of heat treatment under specific conditions (heat treatment at a temperature of 400°C or higher and 600°C or lower for a holding time of 10 seconds to less than 30 minutes) is referred to as an "RTB-based sintered magnet material" or simply as a "sintered magnet material." A material obtained after subjecting an R-T-B based sintered magnet material to heat treatment under the above-mentioned specific conditions is referred to as an "RTB-B based sintered magnet" or simply as a "sintered magnet." In other words, in this specification, the material before the heat treatment under the above-mentioned specific conditions and the material in the middle of said heat treatment are referred to as an "RTB-B based sintered magnet material."
<R-T-B系焼結磁石の製造方法>
本発明に係るR-T-B系焼結磁石の製造方法を説明する。
R-T-B系焼結磁石の製造方法は、所定の組成を有するR-T-B系焼結磁石素材を準備する工程と、前記R-T-B系焼結磁石素材を特定の条件で熱処理する熱処理工程とを含んでいる。
以下、各工程について説明する。
<Method of manufacturing R-T-B based sintered magnet>
A method for producing a sintered RTB based magnet according to the present invention will now be described.
The method for producing a sintered R-T-B based magnet includes a step of preparing a sintered R-T-B based magnet material having a predetermined composition, and a heat treatment step of heat treating the sintered R-T-B based magnet material under specific conditions.
Each step will be described below.
(1)R-T-B系焼結磁石素材を準備する工程
本開示におけるR-T-B系焼結磁石素材は、少なくともR、B、GaおよびTを含み、それらの組成は、以下の規定を満たす。
(1) Step of Preparing Sintered RTB Based Magnet Material The sintered RTB based magnet material of the present disclosure contains at least R, B, Ga, and T, and the composition thereof satisfies the following requirements.
(Rの含有量:27.0質量%以上35.0質量%以下)
Rは希土類元素であり、Nd、PrおよびCeからなる群から選択された少なくとも1つを含む。Rの含有量は、27.0質量%以上35.0質量%以下である。Rの含有量が27.0質量%未満であると焼結時の緻密化が困難となるおそれがあり、35.0質量%を超えると主相比率が低下して高いBrを得られないおそれがある。Rの含有量は、好ましくは29.5質量%以上33.0質量%以下である。Rがこのような範囲であれば、より高いBrを得ることができる。
(R content: 27.0 mass% or more and 35.0 mass% or less)
R is a rare earth element, and includes at least one selected from the group consisting of Nd, Pr, and Ce. The content of R is 27.0 mass% or more and 35.0 mass% or less. If the content of R is less than 27.0 mass%, densification during sintering may be difficult, and if it exceeds 35.0 mass%, the main phase ratio may decrease and high B r may not be obtained. The content of R is preferably 29.5 mass% or more and 33.0 mass% or less. If R is in such a range, higher B r can be obtained.
(Bの含有量:0.80質量%以上0.93質量%以下)
焼結磁石素材中のBの含有量は、0.80質量%以上0.93質量%以下であり、かつ後述する式(1)を満たす。Bの含有量が0.80質量%未満であるとR2T17相が生成されて高いHcJが得られないおそれがあり、0.93質量%を超えるとR-T-Ga相の生成量が少なすぎて高いHcJが得られないおそれがある。Bの含有量は、より好ましくは0.88質量%以上0.90質量%以下であり、より高いHcJ向上効果が得られる。
(B content: 0.80 mass% or more and 0.93 mass% or less)
The content of B in the sintered magnet material is 0.80% by mass or more and 0.93% by mass or less, and satisfies the formula (1) described below. If the content of B is less than 0.80% by mass, the R 2 T 17 phase may be generated, and a high H cJ may not be obtained, whereas if the content of B exceeds 0.93% by mass, the amount of the R-T-Ga phase generated may be too small to obtain a high H cJ . The content of B is more preferably 0.88% by mass or more and 0.90% by mass or less, and a higher effect of improving H cJ may be obtained.
(Gaの含有量:0.15質量%以上1.0質量%以下)
Gaの含有量は、0.15質量%以上1.0質量%以下である。Gaが0.15質量%未満であると、R-T-Ga相の生成量が少なすぎて、R2T17相を消失させることができず、高いHcJを得ることができないおそれがあり、1.0質量%を超えると不要なGaが存在することになり、主相比率が低下してBrが低下するおそれがある。好ましくは、Gaの含有量は0.2質量%以上0.8質量%以下であり、さらに好ましくは0.3質量%以上0.6質量%以下である。より高いBrと高いHcJを得ることができる。
(Ga content: 0.15 mass% or more and 1.0 mass% or less)
The Ga content is 0.15 mass% or more and 1.0 mass% or less. If the Ga content is less than 0.15 mass%, the amount of R-T-Ga phase produced is too small to eliminate the R 2 T 17 phase, and there is a risk that a high H cJ cannot be obtained, and if the Ga content exceeds 1.0 mass%, unnecessary Ga is present, and there is a risk that the main phase ratio decreases and B r decreases. Preferably, the Ga content is 0.2 mass% or more and 0.8 mass% or less, and more preferably 0.3 mass% or more and 0.6 mass% or less. A higher B r and a higher H cJ can be obtained.
(Tの含有量:61.5質量%以上70.0質量%以下)
Tは、Fe又はFeとCoであり、Tの90質量%以上がFeである。Coを含有することにより耐食性を向上させることができるが、Coの置換量がTの10質量%を超えると、高いBrが得られないおそれがある。Tの含有量は、61.5質量%以上70.0質量%以下であり、且つ、上述した式(1)を満足する。Tの含有量が61.5質量%未満であると、大幅にBrが低下する恐れがある。
(T content: 61.5% by mass or more and 70.0% by mass or less)
T is Fe or Fe and Co, and 90 mass % or more of T is Fe. By including Co, the corrosion resistance can be improved, but if the amount of Co substituted exceeds 10 mass % of T, If the content of T is less than 61.5 mass %, a high B r may not be obtained. The content of T is 61.5 mass % or more and 70.0 mass % or less, and satisfies the above-mentioned formula (1). If it is less than 61.5% by mass, there is a risk of the Br decreasing significantly.
焼結磁石素材中のTの含有量は、Bの含有量との間で、以下の式(1)を満たす。
14[B]/10.8<[T]/55.85 (1)
式(1)を満足することにより、Bの含有量が一般的なR-T-B系焼結磁石よりも少なくなる。一般的なR-T-B系焼結磁石は、主相であるR2T14B相以外に軟磁性相であるR2T17相が生成しないように、[T]/55.85(Feの原子量)は14[B]/10.8(Bの原子量)よりも少ない組成となっている([T]は、質量%で示すTの含有量である)。本発明のR-T-B系焼結磁石は、一般的なR-T-B系焼結磁石と異なり、[T]/55.85が14[B]/10.8よりも多くなるように式(1)で規定している。なお、本発明のR-T-B系焼結磁石におけるTの主成分はFeであるため、Feの原子量を用いた。
The content of T in the sintered magnet material and the content of B together satisfy the following formula (1).
14[B]/10.8<[T]/55.85 (1)
By satisfying formula (1), the content of B becomes smaller than that of a general R-T-B based sintered magnet. A general R-T-B based sintered magnet has a composition in which [ T]/55.85 (atomic weight of Fe) is smaller than 14[B]/10.8 (atomic weight of B) ([T] is the content of T in mass%) so that the soft magnetic phase R 2 T 17 phase is not generated in addition to the main phase R 2 T 14 B phase. Unlike a general R-T-B based sintered magnet, the R-T-B based sintered magnet of the present invention is specified by formula (1) so that [T]/55.85 is larger than 14[B]/10.8. Note that the main component of T in the R-T-B based sintered magnet of the present invention is Fe, so the atomic weight of Fe is used.
(残部)
焼結磁石素材の好ましい1つの態様は、残部がTおよび不可避不純物である。つまり、Tが式(1)を満たす限りにおいて、Tと不可避不純物とが残部を構成してもよい。
不可避不純物としては、ジジム合金(Nd-Pr)、電解鉄、フェロボロンなどに通常含有されるCr、Mn、Si、La、Ce、Sm、Ca、Mgなどを含有することができる。さらに、製造工程中の不可避的不純物として、O(酸素)、N(窒素)およびC(炭素)などを例示できる。
(Remainder)
In one preferred embodiment of the sintered magnet material, the balance is T and inevitable impurities. In other words, as long as T satisfies formula (1), T and inevitable impurities may constitute the balance.
The inevitable impurities may include Cr, Mn, Si, La, Ce, Sm, Ca, Mg, etc., which are usually contained in didymium alloys (Nd-Pr), electrolytic iron, ferroboron, etc. Furthermore, the inevitable impurities in the manufacturing process may include O (oxygen), N (nitrogen), C (carbon), etc.
焼結磁石素材の更に別の好ましい態様では、本発明の目的を達成する範囲内で、任意のその他の元素を更に含んでもよい。そのように選択的に含有させることができるその他の元素を以下に例示する。 In yet another preferred embodiment of the sintered magnet material, any other elements may be further included within the scope of achieving the object of the present invention. Examples of other elements that can be selectively included in this way are listed below.
(Cu:0質量%超、1.0質量%以下)
Cuを適量含むことにより、HcJをさらに向上させることができる。
Cuは、1.0質量%以下で含まれてもよい。Cuの含有量は、好ましくは0.05~0.50質量%である。Cuを0.05質量%~0.50質量%で含有すると、HcJをさらに向上させることができる。
(Cu: more than 0 mass%, 1.0 mass% or less)
By including an appropriate amount of Cu, the HcJ can be further improved.
Cu may be contained in an amount of 1.0 mass% or less. The Cu content is preferably 0.05 to 0.50 mass%. When contained, HcJ can be further improved.
(Al:0質量%超、1.0質量%以下)
Alを適量含むことにより、HcJをさらに向上させることができる。
Alは、1.0質量%以下で含まれてもよい。Alの含有量は、好ましくは0.05~0.50質量%である。Alを0.50質量%以下で含有すると、HcJをさらに向上させることができる。Alは通常、製造工程で不可避的不純物として0.05質量%以上含有され得るが、不可避的不純物で含有される量と意図的に添加した量の合計で1.0質量%以下含有してもよい。Alの含有量は、より好ましくは0.05質量%以上0.5質量%以下である。
(Al: more than 0 mass%, 1.0 mass% or less)
By including an appropriate amount of Al, HcJ can be further improved.
Al may be contained in an amount of 1.0 mass% or less. The content of Al is preferably 0.05 to 0.50 mass%. When Al is contained in an amount of 0.50 mass% or less, H cJ Generally, 0.05 mass % or more of Al may be contained as an unavoidable impurity in the manufacturing process, but the total amount of the unavoidable impurities and the amount intentionally added is 1. The Al content may be 0 mass % or less, and more preferably 0.05 mass % or more and 0.5 mass % or less.
(その他の元素)
また、焼結磁石素材は、上述した元素の他にも、1種以上の他の元素(不可避的不純物以外の意図的に加えた元素)を含んでもよい。例えば、このような元素として、少量(各々0.1質量%程度)のAg、Zn、In、Sn、Ti、Ge、Y、H、F、P、S、V、Ni、Mo、Hf、Ta、W、Nb、Zrなどを含有してもよい。また、上述した不可避的不純物として挙げた元素を意図的に加えてもよい。このような元素は、合計で例えば1.0質量%程度含まれてもよい。この程度であれば、高いHcJを有するR-T-B系焼結磁石を得ることが十分に可能である。
(Other elements)
In addition to the above elements, the sintered magnet material may contain one or more other elements (elements added intentionally other than unavoidable impurities). For example, such elements may contain small amounts (about 0.1 mass% each) of Ag, Zn, In, Sn, Ti, Ge, Y, H, F, P, S, V, Ni, Mo, Hf, Ta, W, Nb, Zr, etc. Furthermore, the elements listed as the above-mentioned unavoidable impurities may be intentionally added. Such elements may be contained in a total amount of, for example, about 1.0 mass%. This amount is sufficient to obtain an R-T-B based sintered magnet with a high H cJ .
前記組成を有するR-T-B系焼結磁石素材は、以下の工程(i)~(iii)によって準備することができる。つまり、焼結磁石素材を準備する工程は、以下の工程(i)~(iii)を含むことができる。なお、工程(i)~(iii)は、焼結磁石素材を製造できる一例に過ぎず、本発明をこれに限定するものではない。
また、焼結磁石素材を準備する工程は、工程(i)~(iii)に加えて、さらに、高温加熱工程(工程(iv))や拡散工程(工程(v))を含んでいてもよい。
The R-T-B based sintered magnet material having the above composition can be prepared by the following steps (i) to (iii). In other words, the process for preparing the sintered magnet material can include the following steps (i) to (iii). Note that steps (i) to (iii) are merely examples of how the sintered magnet material can be manufactured, and the present invention is not limited thereto.
Furthermore, the process of preparing the sintered magnet material may further include a high-temperature heating step (step (iv)) and a diffusion step (step (v)) in addition to steps (i) to (iii).
(i)合金粉末を準備する工程
前記組成となるようにそれぞれの元素の金属または合金を準備し、これらをストリップキャスティング法等を用いてフレーク状の合金を製造する。
得られたフレーク状の合金を水素粉砕し、粗粉砕粉のサイズを例えば1.0mm以下とする。次に、粗粉砕粉をジェットミル等により微粉砕することで、例えば粒径D50(気流分散法によるレーザー回折法で得られた値(メジアン径))が3~7μmの微粉砕粉(合金粉末)を得る。なお、ジェットミル粉砕前の粗粉砕粉、ジェットミル粉砕中およびジェットミル粉砕後の合金粉末に助剤として公知の潤滑剤を使用してもよい。
(i) Step of Preparing Alloy Powder Metals or alloys of the respective elements are prepared so as to obtain the above-mentioned composition, and these are subjected to strip casting or the like to produce alloy flakes.
The obtained alloy flakes are subjected to hydrogen pulverization to obtain a coarsely pulverized powder having a size of, for example, 1.0 mm or less. The coarsely pulverized powder is then finely pulverized by a jet mill or the like to obtain a finely pulverized powder (alloy powder) having a particle size D50 (a value (median diameter) obtained by a laser diffraction method using an airflow dispersion method) of, for example, 3 to 7 μm. Note that a known lubricant may be used as an auxiliary agent in the coarsely pulverized powder before the jet mill pulverization, and in the alloy powder during and after the jet mill pulverization.
(ii)成形工程
得られた合金粉末を用いて磁界中成形を行い、成形体を得る。磁界中成形は、金型のキャビティー内に乾燥した合金粉末を挿入し、磁界を印加しながら成形する乾式成形法、金型のキャビティー内に該合金粉末を分散させたスラリーを注入し、スラリーの分散媒を排出しながら成形する湿式成形法を含む既知の任意の磁界中成形方法を用いてよい。
(ii) Compaction step: The obtained alloy powder is compacted in a magnetic field to obtain a compact. Compaction in a magnetic field may be performed by any known method including a dry compaction method in which dried alloy powder is inserted into a cavity of a die and compacted while a magnetic field is applied, and a wet compaction method in which a slurry in which the alloy powder is dispersed is poured into a cavity of a die and compacted while the dispersion medium of the slurry is discharged.
(iii)焼結工程
成形工程で得られた成形体を焼結することにより、R-T-B系焼結磁石素材が得られる。成形体の焼結は既知の方法(例えば、焼結温度1000℃~1090℃で焼結時間1時間~10時間程度)を用いることができる。なお、焼結時の雰囲気による酸化を防止するために、焼結は真空雰囲気中または不活性ガス中で行うことが好ましい。不活性ガスは、ヘリウム、アルゴンなどの不活性ガスを用いることが好ましい。
(iii) Sintering Step The compact obtained in the molding step is sintered to obtain a sintered R-T-B based magnet material. The compact can be sintered by a known method (for example, a sintering temperature of 1000°C to 1090°C and a sintering time of about 1 to 10 hours). In order to prevent oxidation due to the atmosphere during sintering, sintering is preferably carried out in a vacuum atmosphere or in an inert gas. The inert gas used is preferably an inert gas such as helium or argon.
(iv)高温加熱工程
焼結工程で得られた焼結磁石素材に、さらに、700℃以上焼結温度以下の比較的高い温度で加熱する高温加熱工程を行ってもよい。高温加熱工程を行うことにより、より高いHcJを有する焼結磁石を得ることができる。高温加熱工程における加熱時間は、1.5時間以上が好ましい。
(iv) High-temperature heating step The sintered magnet material obtained in the sintering step may be further subjected to a high-temperature heating step in which the material is heated at a relatively high temperature of 700° C. or higher and the sintering temperature or lower. By performing the high-temperature heating step, a sintered magnet having a higher HcJ can be obtained. The heating time in the high-temperature heating step is preferably 1.5 hours or longer.
(v)拡散工程
焼結工程で得られた焼結磁石素材、または高温加熱工程を行った後の焼結磁石素材に、さらに、拡散工程を行ってもよい。拡散工程は、既知の拡散源及び拡散方法を用いて行うことができる。例えば、特開2008-147634号公報には、DyおよびTb等を含有する粉末を、焼結体表面(R-T-B系焼結磁石素材の表面)に存在させた状態で、焼結温度よりも低い温度で加熱することで、前記粉末からDyおよびTb等を焼結体に拡散させる方法が開示されている。また、WO2018/143230には、R-T-B系焼結磁石素材表面の少なくとも一部に、R-Ga合金の少なくとも一部を接触させ、700℃以上950℃以下の温度で第一の熱処理を実施することで、R及びGaを磁石内部へ拡散させる方法が開示されている。
(v) Diffusion Step The sintered magnet material obtained in the sintering step or the sintered magnet material after the high-temperature heating step may be further subjected to a diffusion step. The diffusion step can be performed using a known diffusion source and diffusion method. For example, JP 2008-147634 A discloses a method in which a powder containing Dy, Tb, etc. is present on the surface of a sintered body (the surface of a sintered R-T-B magnet material) and heated at a temperature lower than the sintering temperature to diffuse Dy, Tb, etc. from the powder into the sintered body. In addition, WO2018/143230 discloses a method in which at least a part of an R-Ga alloy is brought into contact with at least a part of the surface of a sintered R-T-B magnet material, and a first heat treatment is performed at a temperature of 700°C or more and 950°C or less to diffuse R and Ga into the magnet.
焼結工程後(または、高温加熱工程および/または拡散工程後)のR-T-B系焼結磁石素材に機械加工を施してから熱処理工程を行ってもよい。 After the sintering process (or after the high-temperature heating process and/or the diffusion process), the R-T-B sintered magnet material may be machined and then subjected to a heat treatment process.
(2)熱処理工程
焼結磁石素材を準備する工程で得られた焼結磁石素材に対し、磁気特性を向上させることを目的とした熱処理を行う。熱処理温度は400℃以上600℃以下とする。熱処理温度が400℃未満または600℃超だと、HcJ及びBrの向上効果が得られない。熱処理温度の測定方法としては、熱処理炉内のR-T-B系焼結磁石素材に熱電対を接触させて温度を測定することが好ましい。また、簡易的には、あらかじめ、熱処理炉内の温度と熱処理炉内に置かれた別のR-T-B系焼結磁石素材の温度とを熱電対により同時に測定することで、熱処理炉内の温度と熱処理炉内のR-T-B系焼結磁石素材の温度との対応関係を調査しておき、その対応関係に基づいて、熱処理炉内の温度から熱処理炉内のR-T-B系焼結磁石素材の温度を読み取ってもよい。
(2) Heat Treatment Step The sintered magnet material obtained in the step of preparing the sintered magnet material is subjected to a heat treatment for the purpose of improving the magnetic properties. The heat treatment temperature is 400°C or more and 600°C or less. If the heat treatment temperature is less than 400°C or more than 600°C, the effect of improving HcJ and Br cannot be obtained. As a method for measuring the heat treatment temperature, it is preferable to measure the temperature by contacting a thermocouple with the R-T-B based sintered magnet material in the heat treatment furnace. Alternatively, simply, the temperature in the heat treatment furnace and the temperature of another R-T-B based sintered magnet material placed in the heat treatment furnace are simultaneously measured in advance using a thermocouple to investigate the correspondence between the temperature in the heat treatment furnace and the temperature of the R-T-B based sintered magnet material in the heat treatment furnace, and the temperature of the R-T-B based sintered magnet material in the heat treatment furnace can be read from the temperature in the heat treatment furnace based on the correspondence.
R-T-B系焼結磁石素材が熱処理温度に到達した後、その熱処理温度で10秒以上30分未満の時間で保持する。本実施形態に係る製造方法は、この保持時間が従来よりも極めて短い点に特徴がある。 After the R-T-B based sintered magnet material reaches the heat treatment temperature, it is held at that heat treatment temperature for a period of 10 seconds or more and less than 30 minutes. The manufacturing method according to this embodiment is characterized in that this holding time is much shorter than conventional methods.
上述したように、焼結して得られた焼結磁石素材に熱処理を行うことで、最終製品としてのR-T-B系焼結磁石のHcJを向上できることは、従来から知られていた。R-T-B系焼結磁石のHcJを最大値にするためには、最適の熱処理温度で、1.5時間~3時間程度またはそれ以上の保持時間で保持する必要があると考えられていた。また、Brは、保持時間10秒程度で最大値に達し、保持時間をさらに長くしていくとHcJの向上に伴い低下していくと考えられていた。保持時間が短いとHcJが大きく低下するため、従来は、保持時間を1.5時間以上として熱処理を行っていた。 As described above, it has been known for some time that the H cJ of the final R-T-B based sintered magnet can be improved by subjecting the sintered magnet material obtained by sintering to heat treatment. It was believed that in order to maximize the H cJ of an R-T-B based sintered magnet, it was necessary to hold the magnet at the optimum heat treatment temperature for about 1.5 to 3 hours or more. It was also believed that B r reached its maximum value with a holding time of about 10 seconds, and that as the holding time was further extended, it would decrease in line with the improvement of H cJ . Because a short holding time results in a large decrease in H cJ , heat treatment was conventionally performed with a holding time of 1.5 hours or more.
しかし、本発明者らが鋭意検討した結果、Bの含有量がR2T14B化合物の化学量論組成比よりも少なく、かつ、Gaを含有するR-T-B系焼結磁石素材では、熱処理時の保持時間を非常に短時間にすることにより、高いBrと高いHcJを有するR-T-B系焼結磁石が得られることが分かった。本実施形態で規定した組成を有するR-T-B系焼結磁石素材では、R-T-B系焼結磁石のHcJが最大になる保持時間は、保持時間10秒以上30分未満の範囲に存在することが分かった。そこで、本実施形態では、熱処理時の保持時間を10秒以上30分未満と定めた。
保持時間は、10秒以上25分以下が好ましく、10秒以上10分以下がさらに好ましく、10秒以上5分以下であるのがさらに好ましく、10秒以上3分以下がさらに好ましい。より高いHcJを有するR-T-B系焼結磁石を製造することができる。
However, as a result of intensive research by the present inventors, it was found that in an R-T-B based sintered magnet material containing Ga and having a B content less than the stoichiometric composition ratio of the R 2 T 14 B compound, an R-T-B based sintered magnet with high B r and high H cJ can be obtained by setting the holding time during heat treatment to a very short time. It was found that in an R-T-B based sintered magnet material having the composition specified in this embodiment, the holding time at which the H cJ of the R-T-B based sintered magnet is maximized exists in a range of 10 seconds or more and less than 30 minutes. Therefore, in this embodiment, the holding time during heat treatment is set to 10 seconds or more and less than 30 minutes.
The holding time is preferably from 10 seconds to 25 minutes, more preferably from 10 seconds to 10 minutes, even more preferably from 10 seconds to 5 minutes, and even more preferably from 10 seconds to 3 minutes. A sintered R-T-B based magnet having a higher HcJ can be produced.
熱処理工程中に、雰囲気中の酸素による酸化を抑制するために、真空雰囲気中または不活性ガス雰囲気中で熱処理することが好ましい。不活性ガスとしては、例えばヘリウム、アルゴンなどを用いることができる。 During the heat treatment process, it is preferable to perform the heat treatment in a vacuum atmosphere or an inert gas atmosphere to suppress oxidation due to oxygen in the atmosphere. Examples of the inert gas that can be used include helium and argon.
最終的な製品形状にするなどの目的で、得られた焼結磁石に研削などの機械加工を施してもよい。その場合、熱処理は機械加工前でも機械加工後でもよい。さらに、得られた焼結磁石に表面処理を施してもよい。表面処理は既知の表面処理であってもよく、例えばAl蒸着や電気Niめっきや樹脂塗料などの表面処理を行うことができる。 The obtained sintered magnet may be subjected to machining such as grinding in order to obtain the final product shape. In this case, the heat treatment may be performed before or after the machining. Furthermore, the obtained sintered magnet may be subjected to a surface treatment. The surface treatment may be a known surface treatment, such as Al vapor deposition, Ni electric plating, or resin paint.
このようにして得られるR-T-B系焼結磁石は、高いHcJおよびBrを有している。なお、R-T-B系焼結磁石の組成は、上記のR-T-B系焼結磁石素材と実質的に同じ組成となる。 The R-T-B based sintered magnet obtained in this manner has high HcJ and B r . The composition of the R-T-B based sintered magnet is substantially the same as that of the above-mentioned R-T-B based sintered magnet material.
本開示を実施例によりさらに詳細に説明するが、本開示はそれらに限定されるものではない。 The present disclosure will be described in more detail with reference to examples, but is not limited thereto.
R-T-B系焼結磁石の組成がおよそ表1のNo.1~No.3の組成になるように(No.2に関しては、拡散後の組成がおよそNo.2の組成となるように考慮して)各元素を秤量し、ストリップキャスト法により鋳造して、急冷合金を作製した。得られた急冷合金に水素加圧雰囲気で水素脆化させた後、550℃まで真空中で加熱、冷却する脱水素処理を施し、粗粉砕粉を得た。次に、得られた粗粉砕粉に、粗粉砕粉100質量%に対して、潤滑剤として0.04質量%のステアリン酸亜鉛を添加、混合した後、気流式粉砕機(ジェットミル装置)を用いて窒素気流中で乾式粉砕し、粒径D50(メジアン径)が4μmの微粉砕粉(合金粉末)を得た。 Each element was weighed so that the composition of the R-T-B based sintered magnet would be approximately the composition of No. 1 to No. 3 in Table 1 (for No. 2, the composition after diffusion would be approximately the composition of No. 2), and cast by strip casting to prepare a quenched alloy. The quenched alloy obtained was hydrogen embrittled in a pressurized hydrogen atmosphere, and then heated to 550°C in a vacuum and cooled to obtain a dehydrogenation treatment, to obtain a coarsely pulverized powder. Next, 0.04 mass% of zinc stearate was added to the obtained coarsely pulverized powder as a lubricant relative to 100 mass% of the coarsely pulverized powder, mixed, and then dry-pulverized in a nitrogen gas flow using an airflow pulverizer (jet mill device) to obtain a finely pulverized powder (alloy powder) with a particle size D 50 (median diameter) of 4 μm.
得られた合金粉末を分散媒と混合しスラリーを作製した。溶媒にはノルマルドデカンを用い、潤滑剤としてカプリル酸メチルを混合した。スラリーの濃度は合金粉末70質量%、分散媒30質量%とし、潤滑剤は合金粉末100質量%に対して0.16質量%とした。前記スラリーを磁界中で成形して成形体を得た。成形時の磁界は0.8MA/mの静磁界で、加圧力は5MPaとした。なお、成形装置には、磁界印加方向と加圧方向とが直交する、いわゆる直角磁界成形装置(横磁界成形装置)を用いた。 The obtained alloy powder was mixed with a dispersion medium to prepare a slurry. Normal dodecane was used as the solvent, and methyl caprylate was mixed as the lubricant. The concentration of the slurry was 70% by mass of alloy powder, 30% by mass of dispersion medium, and 0.16% by mass of lubricant relative to 100% by mass of alloy powder. The slurry was molded in a magnetic field to obtain a compact. The magnetic field during molding was a static magnetic field of 0.8 MA/m, and the pressure was 5 MPa. The molding device used was a so-called perpendicular magnetic field molding device (horizontal magnetic field molding device), in which the magnetic field application direction and pressure direction are perpendicular to each other.
得られた成形体を、真空中、1000℃以上1090℃以下(サンプル毎に焼結による緻密化が十分起こる温度を選定)で4時間焼結して室温まで冷却後、更に真空中、800℃で2時間保持する高温加熱処理を行った後、室温まで急冷してR-T-B系焼結磁石素材(No.1´~3´)を得た。得られたR-T-B系焼結磁石素材の密度は7.5Mg/m3以上であった。 The obtained compacts were sintered in a vacuum at 1000°C to 1090°C (a temperature at which sufficient densification by sintering occurs for each sample) for 4 hours, cooled to room temperature, and then subjected to a high-temperature heat treatment in a vacuum at 800°C for 2 hours, after which they were rapidly cooled to room temperature to obtain sintered R-T-B magnet materials (Nos. 1' to 3'). The densities of the obtained sintered R-T-B magnet materials were 7.5 Mg/ m3 or more.
次にNo.2´のR-T-B系焼結磁石素材に対して拡散処理を行った。まず、拡散合金を準備した。拡散合金は、およそ拡散合金の組成がPr:80質量%、Tb:10質量%、Ga:5質量%、Cu:5質量%となるように各元素の原料を秤量しそれらの原料を溶解して、単ロール超急冷法(メルトスピニング法)によりリボンまたはフレーク状の合金を作製した。得られた合金を、乳鉢を用いてアルゴン雰囲気中で粉砕した後、目開き425μmの篩を通過させ、拡散合金(PrTbGaCu合金)を準備した。得られた拡散合金の成分を高周波誘導結合プラズマ発光分光分析法(ICP-OES)を使用して測定したところ、ほぼ狙い通りの組成(Pr:80質量%、Tb:10質量%、Ga:5質量%、Cu:5質量%)であった。次に、No.2´のR-T-B系焼結磁石素材の表面(全面)に前記拡散合金を散布した。散布量は、R-T-B系焼結磁石素材の100質量%に対して、3.3質量%であった。その後、50Paに制御した減圧アルゴン中で、900℃の温度で3時間加熱する拡散処理を行った。これにより、拡散工程をおこなったR-T-B系焼結磁石素材(No.2´´)を準備した。 Next, the R-T-B sintered magnet material No. 2' was subjected to a diffusion treatment. First, a diffusion alloy was prepared. The raw materials of each element were weighed so that the composition of the diffusion alloy was approximately Pr: 80 mass%, Tb: 10 mass%, Ga: 5 mass%, and Cu: 5 mass%, and the raw materials were melted and a ribbon or flake-shaped alloy was produced by a single roll super-quenching method (melt spinning method). The obtained alloy was crushed in an argon atmosphere using a mortar and then passed through a sieve with a mesh size of 425 μm to prepare a diffusion alloy (PrTbGaCu alloy). The components of the obtained diffusion alloy were measured using high-frequency inductively coupled plasma optical emission spectroscopy (ICP-OES), and the composition was almost as intended (Pr: 80 mass%, Tb: 10 mass%, Ga: 5 mass%, Cu: 5 mass%). Next, No. The diffusion alloy was sprayed onto the surface (entire surface) of the R-T-B based sintered magnet material No. 2'. The amount sprayed was 3.3 mass% relative to 100 mass% of the R-T-B based sintered magnet material. After that, a diffusion process was performed in which the material was heated at 900°C for 3 hours in reduced pressure argon controlled at 50 Pa. In this way, an R-T-B based sintered magnet material (No. 2'') that had been subjected to the diffusion process was prepared.
次に、No.1´、2´´及び3´のR-T-B系焼結磁石素材に対して表2に示す条件で熱処理を行うことにより、R-T-B系焼結磁石を得た。なお、熱処理温度は、熱処理炉内のR-T-B系焼結磁石素材に熱電対を接触させることにより測定した。 Next, the R-T-B based sintered magnet materials No. 1', 2'' and 3' were subjected to heat treatment under the conditions shown in Table 2 to obtain R-T-B based sintered magnets. The heat treatment temperature was measured by contacting a thermocouple with the R-T-B based sintered magnet material in the heat treatment furnace.
得られたR-T-B系焼結磁石の成分を表1に示す。なお、表1における各成分は、高周波誘導結合プラズマ発光分光分析法(ICP-OES)を使用して測定した。また、式(1)の充足性を表1に示した。ここで「○」は式(1)を満たしていることを意味し、「×」は式(1)を満たしていないことを意味している。また、得られたR-T-B系焼結磁石のBr及びHcJの値を表2に示す。これらBr及びHcJの値は、R-T-B系焼結磁石に機械加工を施し、サンプルを7mm×7mm×7mmに加工し、BHトレーサにより測定した。 The components of the obtained R-T-B based sintered magnet are shown in Table 1. The components in Table 1 were measured using inductively coupled plasma optical emission spectroscopy (ICP-OES). Table 1 also shows the sufficiency of formula (1). Here, "○" means that formula (1) is satisfied, and "×" means that formula (1) is not satisfied. Table 2 also shows the B r and H cJ values of the obtained R-T-B based sintered magnet. These B r and H cJ values were measured by machining the R-T-B based sintered magnet to a sample of 7 mm × 7 mm × 7 mm using a BH tracer.
表2において、高い磁気特性と判断された値に下線を引いた。具体的には、Brが1.40(T)以上、かつ、HcJが1500(kA/m)を満たす場合に、Br値およびHcJ値の両方に下線を引いた。BrとHcJのいずれか一方でも上記基準を満たさない場合には、いずれの値にも下線を引かなかった。 In Table 2, values that were judged to have high magnetic properties were underlined. Specifically, when B r was 1.40 (T) or more and H cJ was 1500 (kA/m), both the B r value and the H cJ value were underlined. When either B r or H cJ did not meet the above criteria, neither value was underlined.
表2に示す本発明例と比較例について、No.1の5つの焼結磁石の間での比較、No.2の5つの焼結磁石の間での比較、No.4の2つの焼結磁石の間の比較、No.5の2つの焼結磁石の間の比較及びNo.6の2つの焼結磁石の間の比較から、熱処理における保持時間を本発明の範囲にすることで、Br及びHcJの両方が、その組成で得られる極大値又は極大値に近い値を示すことが分かる。これに対し、R-T-B系焼結磁石の組成が本発明の組成範囲からはずれているNo.3(B量及び式(1)が範囲外)は、本発明の保持時間(5分)ではHcJが大幅に低下している。一方、同じ組成のNo.3について、保持時間を長く(180分)すると、HcJは向上するものの、HcJの向上にともないBrが低下している。また、表2に示すように、より高いBrと高いHcJを得るには、熱処理における保持時間は、10分以下が好ましく、5分以下がさらに好ましく、3分以下がさらに好ましい。 From the comparison of the five sintered magnets No. 1, the five sintered magnets No. 2, the two sintered magnets No. 4, the two sintered magnets No. 5, and the two sintered magnets No. 6 in Table 2, it can be seen that by setting the holding time in the heat treatment within the range of the present invention, both B r and H cJ show maximum values or values close to the maximum values obtained for that composition. In contrast, for No. 3, whose composition of the R-T-B based sintered magnet is outside the composition range of the present invention (the B content and formula (1) are outside the range), the H cJ is significantly reduced at the holding time of the present invention (5 minutes). On the other hand, for No. 3, which has the same composition, when the holding time is extended (180 minutes), H cJ improves, but B r decreases with the improvement in H cJ . Furthermore, as shown in Table 2, in order to obtain a higher B r and a higher H cJ , the holding time in the heat treatment is preferably 10 minutes or less, more preferably 5 minutes or less, and even more preferably 3 minutes or less.
Claims (5)
R:27.0質量%以上35.0質量%以下であり、Rは希土類元素であり、Nd、PrおよびCeからなる群から選択された少なくとも1つを含んでおり、
B:0.80質量%以上0.93質量%以下であり、
Ga:0.15質量%以上1.0質量%以下であり、
T:61.5質量%以上70.0質量%以下(TはFe又はFeとCoであり、Tの90質量%以上がFeである)であり、かつ下記式(1)を満たすR-T-B系焼結磁石素材を準備する工程と、
14[B]/10.8<[T]/55.85 (1)
([B]は質量%で示すBの含有量であり、[T]は質量%で示すTの含有量である)
前記R-T-B系焼結磁石素材を、400℃以上600℃以下の熱処理温度で、3分以上30分未満の保持時間で保持して熱処理する熱処理工程と、を含む、R-T-B系焼結磁石の製造方法。 Contains at least R, B, Ga and T;
R: 27.0% by mass or more and 35.0% by mass or less, R is a rare earth element and includes at least one selected from the group consisting of Nd, Pr, and Ce;
B: 0.80% by mass or more and 0.93% by mass or less;
Ga: 0.15% by mass or more and 1.0% by mass or less;
preparing a sintered R-T-B based magnet material having T of 61.5 mass % or more and 70.0 mass % or less (T is Fe or Fe and Co, and 90 mass % or more of T is Fe) and satisfying the following formula (1);
14[B]/10.8<[T]/55.85 (1)
([B] is the content of B in mass%, and [T] is the content of T in mass%)
and a heat treatment step of heat treating the sintered R-T-B based magnet material at a heat treatment temperature of 400°C or higher and 600°C or lower for a holding time of 3 minutes or higher and less than 30 minutes.
請求項1に記載の組成を有する合金粉末を準備する工程と、
前記合金粉末を用いて磁界中成形を行って成形体を得る成形工程と、
前記成形体を焼結して焼結磁石素材を得る工程と、を含む、請求項1または2に記載のR-T-B系焼結磁石の製造方法。 The step of preparing the R-T-B based sintered magnet material includes:
Providing an alloy powder having the composition of claim 1;
a compacting step of compacting the alloy powder in a magnetic field to obtain a compact;
3. The method for producing a sintered R-T-B based magnet according to claim 1, further comprising the step of sintering the compact to obtain a sintered magnet material.
前記焼結磁石素材を得る工程で得られた前記焼結磁石素材を700℃以上焼結温度以下の温度で加熱する高温加熱工程を含む、請求項3に記載のR-T-B系焼結磁石の製造方法。 The step of preparing the R-T-B based sintered magnet material further includes the steps of:
The method for producing a sintered R-T-B based magnet according to claim 3, further comprising a high-temperature heating step of heating the sintered magnet material obtained in the step of obtaining the sintered magnet material at a temperature of 700° C. or higher and lower than a sintering temperature.
前記高温加熱工程を行った後の焼結磁石素材に、拡散処理を行う拡散工程を含む、請求項4に記載のR-T-B系焼結磁石の製造方法。 The step of preparing the R-T-B based sintered magnet material further includes the steps of:
The method for producing a sintered R-T-B based magnet according to claim 4, further comprising a diffusion step of subjecting the sintered magnet material after the high-temperature heating step to a diffusion treatment.
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