JP7003986B2 - 研削液の再生装置及び研削液の再生方法 - Google Patents

研削液の再生装置及び研削液の再生方法 Download PDF

Info

Publication number: JP7003986B2
Authority: JP; Japan
Prior art keywords: grinding fluid; grinding; membrane; debris; filtration membrane
Prior art date: 2017-03-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

JP2019506936A

Other languages

English (en)

Japanese (ja)

Other versions

JPWO2018173376A1 (ja

Inventor

岳松本

啓一池田

徹森田

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sumitomo Electric Industries Ltd

Original Assignee

Sumitomo Electric Industries Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2017-03-23

Filing date

2017-12-04

Publication date

2022-01-21

2017-12-04 Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd

2020-01-23 Publication of JPWO2018173376A1 publication Critical patent/JPWO2018173376A1/ja

2022-01-21 Application granted granted Critical

2022-01-21 Publication of JP7003986B2 publication Critical patent/JP7003986B2/ja

Status Active legal-status Critical Current

2037-12-04 Anticipated expiration legal-status Critical

Images

Landscapes

Separation Using Semi-Permeable Membranes (AREA)
Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Auxiliary Devices For Machine Tools (AREA)

JP2019506936A 2017-03-23 2017-12-04 研削液の再生装置及び研削液の再生方法 Active JP7003986B2 (ja)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP2017057082		2017-03-23
JP2017057082		2017-03-23
PCT/JP2017/043460 WO2018173376A1 (fr)	2017-03-23	2017-12-04	Dispositif de régénération de liquide de meulage et procédé de régénération de liquide de meulage

Publications (2)

Publication Number	Publication Date
JPWO2018173376A1 JPWO2018173376A1 (ja)	2020-01-23
JP7003986B2 true JP7003986B2 (ja)	2022-01-21

Family

ID=63585144

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2019506936A Active JP7003986B2 (ja)	2017-03-23	2017-12-04	研削液の再生装置及び研削液の再生方法

Country Status (3)

Country	Link
JP (1)	JP7003986B2 (fr)
CN (1)	CN110461544A (fr)
WO (1)	WO2018173376A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2001149760A (ja)	1999-11-29	2001-06-05	Kuraray Co Ltd	クーラントの使用方法
JP2001198823A (ja)	2000-01-14	2001-07-24	Kurita Water Ind Ltd	研磨材の回収装置
JP2001347456A (ja)	1999-05-27	2001-12-18	Sanyo Electric Co Ltd	Ｃｍｐ排水の濾過方法
JP2008034827A (ja)	2006-06-26	2008-02-14	Nippon Valqua Ind Ltd	化学的機械研磨材のリサイクル方法及びその装置
JP2015142902A (ja)	2013-12-26	2015-08-06	住友電気工業株式会社	再生濾過モジュール、使用済みアルカリ脱脂液の再生装置及び使用済みアルカリ脱脂液の再生方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN100437925C (zh) *	2003-03-18	2008-11-26	野村微科学股份有限公司	半导体研磨浆料精制用原材料、半导体研磨浆料精制用模块和半导体研磨浆料的精制方法
CN101500754A (zh) *	2006-08-16	2009-08-05	旭硝子株式会社	从研磨剂浆料废液中回收研磨剂的方法及装置
KR20110132458A (ko) *	2009-03-25	2011-12-07	어플라이드 머티어리얼스, 인코포레이티드	화학기계적 폴리싱 슬러리의 소요지 재생 시스템
DE102009044204A1 (de) *	2009-10-08	2011-04-28	Fab Service Gmbh	Wiederaufbereitungsverfahren und Wiederaufbereitungsvorrichtung zur Wiederaufbereitung von Slurry-Abwasser aus einem Halbleiterbearbeitungs-prozess, insbesondere aus einem chemisch-mechanischen Polierprozess
KR20150030237A (ko) *	2012-07-25	2015-03-19	코니카 미놀타 가부시키가이샤	연마재 재생 방법
JP5941995B2 (ja) *	2012-11-28	2016-06-29	株式会社クラレ	クーラント再生方法、及びクーラント再生装置
CN203045492U (zh) *	2012-12-15	2013-07-10	焦作市科瑞斯达光电材料有限公司	一种led基板的研磨抛光系统
JP6137945B2 (ja) *	2013-06-04	2017-05-31	株式会社クラレ	使用済みシリコンクーラント処理装置及び使用済みシリコンクーラント処理方法
CN203471976U (zh) *	2013-07-22	2014-03-12	可乐丽股份有限公司	浆料再生装置

2017
- 2017-12-04 WO PCT/JP2017/043460 patent/WO2018173376A1/fr not_active Ceased
- 2017-12-04 JP JP2019506936A patent/JP7003986B2/ja active Active
- 2017-12-04 CN CN201780088519.1A patent/CN110461544A/zh active Pending

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2001347456A (ja)	1999-05-27	2001-12-18	Sanyo Electric Co Ltd	Ｃｍｐ排水の濾過方法
JP2001149760A (ja)	1999-11-29	2001-06-05	Kuraray Co Ltd	クーラントの使用方法
JP2001198823A (ja)	2000-01-14	2001-07-24	Kurita Water Ind Ltd	研磨材の回収装置
JP2008034827A (ja)	2006-06-26	2008-02-14	Nippon Valqua Ind Ltd	化学的機械研磨材のリサイクル方法及びその装置
JP2015142902A (ja)	2013-12-26	2015-08-06	住友電気工業株式会社	再生濾過モジュール、使用済みアルカリ脱脂液の再生装置及び使用済みアルカリ脱脂液の再生方法

Also Published As

Publication number	Publication date
JPWO2018173376A1 (ja)	2020-01-23
CN110461544A (zh)	2019-11-15
WO2018173376A1 (fr)	2018-09-27

Similar Documents

Publication	Publication Date	Title
Shalaby et al.	2021	Recent aspects in membrane separation for oil/water emulsion
TW567089B (en)	2003-12-21	Porous hollow fiber membranes and method of making the same
WO2011101961A1 (fr)	2011-08-25	Module membranaire de séparation pour le traitement d'eau résiduaire contenant de l'huile, procédé pour le traitement d'eau résiduaire contenant de l'huile et appareil pour le traitement d'eau résiduaire contenant de l'huile
CN103030252B (zh)	2015-01-07	一种乳化液废水膜法处理工艺
JP2012239948A (ja)	2012-12-10	ろ過材の洗浄方法および水処理装置
JP2010036183A (ja)	2010-02-18	含油排水処理用の分離膜モジュール、含油排水処理方法および含油排水処理装置
JPWO2015104871A1 (ja)	2017-03-23	多孔性中空糸膜及びその製造方法、並びに浄水方法
JP2010064197A (ja)	2010-03-25	シリコン含有排水の処理方法及び装置
JP7003986B2 (ja)	2022-01-21	研削液の再生装置及び研削液の再生方法
JP6226795B2 (ja)	2017-11-08	中空糸膜の製造方法
JP2018008272A (ja)	2018-01-18	中空糸膜の製造方法
CN108698860A (zh)	2018-10-23	高硬度排水的处理方法
JPWO2019044312A1 (ja)	2019-11-07	水処理方法および水処理装置
JP7082681B2 (ja)	2022-06-08	多孔質膜を用いたろ過方法
JP6839766B2 (ja)	2021-03-10	多孔質膜を用いたろ過方法
JP6839765B2 (ja)	2021-03-10	多孔質膜を用いたろ過方法
JP2015085206A (ja)	2015-05-07	分離膜モジュールの洗浄方法
WO2018123092A1 (fr)	2018-07-05	Procédé et dispositif de séparation par membrane comprenant un dispositif de tri de particules
JP2009214062A (ja)	2009-09-24	浸漬型膜モジュールの運転方法
JP7224753B2 (ja)	2023-02-20	凝集膜ろ過方法および凝集膜ろ過装置
JP2005526585A (ja)	2005-09-08	廃潤滑剤処理用の中空繊維膜およびその製造方法
JP2006167604A (ja)	2006-06-29	水処理装置及び水処理方法
JP2003103289A (ja)	2003-04-08	排水処理方法
KR20170114475A (ko)	2017-10-16	수용성 합성절삭유의 재이용 방법
US11492577B2 (en)	2022-11-08	Method for manufacturing brewed alcoholic beverage using porous membrane

Legal Events

Date	Code	Title	Description
2020-06-22	A621	Written request for application examination	Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200622
2021-05-11	A131	Notification of reasons for refusal	Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210511
2021-06-25	A521	Request for written amendment filed	Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210625
2021-11-24	TRDD	Decision of grant or rejection written
2021-11-30	A01	Written decision to grant a patent or to grant a registration (utility model)	Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20211130
2022-01-06	A61	First payment of annual fees (during grant procedure)	Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20211213
2022-01-06	R150	Certificate of patent or registration of utility model	Ref document number: 7003986 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150
2024-12-13	R250	Receipt of annual fees	Free format text: JAPANESE INTERMEDIATE CODE: R250
2025-12-10	R250	Receipt of annual fees	Free format text: JAPANESE INTERMEDIATE CODE: R250