JP6969971B2 - Fluid pressure cylinder - Google Patents

Description

The present invention relates to a fluid pressure cylinder that generates thrust by fluid supply.

Various types of hydraulic cylinders, pneumatic cylinders, air hydro cylinders, etc. to realize various movements such as "pushing", "lifting", "grabbing", "carrying", and "pinching" that generate desired thrust by supplying fluid. Fluid pressure cylinders are widely used.
The air hydro cylinder converts air pressure into hydraulic pressure inside the cylinder and outputs it, and the function of the hydraulic unit can be obtained while using a pneumatic device (Patent Document 1).
The air hydrocylinder has two types of fluid chambers inside, and is composed of a hydraulic chamber that generates a high propulsive force to the outside and a pneumatic chamber for increasing the pressure in the hydraulic chamber.

However, in the conventional air hydro cylinder, the pneumatic chamber and the hydraulic chamber are arranged in series on the same axis, and the thrust is output by receiving the moving direction of the piston that separates the pneumatic chamber and the hydraulic chamber and the hydraulic pressure. It is configured so that the moving directions of the pistons are the same.
Therefore, in the conventional air hydro cylinder, the stroke lengths of the two types of fluid chambers are added to make the entire cylinder longer, and the total length is longer than that of a general pneumatic cylinder or hydraulic cylinder having only one type of fluid chamber. It was getting longer.

Japanese Patent No. 4895342

An object of the present invention is to shorten the total length of a fluid pressure cylinder.

(1) In the invention according to claim 1, a housing, a first fluid chamber formed in the housing and filled with the first fluid, and a second fluid chamber formed in the housing and filled with the second fluid. A first piston that partitions the first fluid chamber and the second fluid chamber, moves in the axial direction of the housing under the pressure of the first fluid, and pressurizes the second fluid. is arranged radially outward of the first piston, an annular moving said pressurized by the first piston receiving thrust of amplified said second fluid to the large pressure at Rukoto in the axial direction of the housing The second fluid chamber includes a second piston and an output means formed on the second piston to output the amplified thrust of the second fluid to the outside, and the second fluid chamber is the second of the first piston. Provided is a fluid pressure cylinder characterized in that a surface for pressurizing a fluid and a surface for receiving the pressure of the second fluid of the second piston are formed so as to be in the same direction.
( 2 ) In the invention according to claim 2 , a housing, a first fluid chamber formed in the housing and filled with the first fluid, and a second fluid chamber formed in the housing and filled with the second fluid. A first piston that partitions the first fluid chamber and the second fluid chamber, moves in the axial direction of the housing under the pressure of the first fluid, and pressurizes the second fluid. An annular second piston disposed outside in the radial direction of the first piston and moving in the axial direction of the housing under the pressure of the second fluid pressurized by the first piston, and the first piston . The second fluid chamber includes a first fluid supply path that passes through the inside in the radial direction of the piston, communicates with the first fluid chamber, and supplies the first fluid to the first fluid chamber, and the second fluid chamber is the first piston. Provided is a fluid pressure cylinder characterized in that a surface for pressurizing the second fluid and a surface for receiving the pressure of the second fluid of the second piston are formed so as to be in the same direction. ..
( 3 ) The invention according to claim 3 comprises an inner cylinder portion arranged inside the radial direction of the housing and a central rod arranged inside the radial direction of the inner cylinder portion. The first fluid supply path is formed in the central rod, the first piston is disposed between the central rod and the inner cylinder portion, and the second piston is the inner cylinder portion and the housing. The fluid pressure cylinder according to claim 2 , wherein the fluid pressure cylinder is arranged between the two.
( 4 ) The invention according to claim 4 is characterized in that the first fluid is a compressible fluid or an incompressible fluid, and the second fluid is a compressible fluid or an incompressible fluid. The fluid pressure cylinder according to any one of claims 1 to 3 is provided.
( 5 ) In the invention according to claim 5 , a housing, a first fluid chamber formed in the housing and filled with the first fluid, and a second fluid chamber formed in the housing and filled with the second fluid. A first piston that partitions the first fluid chamber and the second fluid chamber, moves in the axial direction of the housing under the pressure of the first fluid, and pressurizes the second fluid. An annular second piston disposed outside in the radial direction of the first piston and moving in the axial direction of the housing under the pressure of the second fluid pressurized by the first piston, and the first piston . The first fluid chamber is formed on the side opposite to the first fluid chamber in the axial direction with respect to the piston, passes through the third fluid chamber filled with the first fluid and the inside of the first piston in the radial direction, and the first fluid chamber. The first fluid supply path for supplying the first fluid and the second fluid supply path for supplying the first fluid to the third fluid chamber are provided, and the second fluid chamber is the said of the first piston. The surface that pressurizes the second fluid and the surface that receives the pressure of the second fluid of the second piston are formed so as to be in the same direction, and the first piston is formed in the first fluid chamber and the first. (3) Provided is a fluid pressure cylinder characterized in that it moves in the axial direction due to a pressure difference of the first fluid in a fluid chamber.
( 6 ) The invention according to claim 6 comprises an inner cylinder portion arranged inside the radial direction of the housing and a central rod arranged inside the radial direction of the inner cylinder portion. The first fluid supply path is formed in the central rod, and the first piston extends toward the second fluid chamber side and includes a cylindrical guide rod that pressurizes the second fluid, and the central rod and the said. The fluid pressure cylinder according to claim 5 , wherein the second piston is disposed between the inner cylinder portion and the housing, and the second piston is disposed between the inner cylinder portion and the housing. offer.
(7) In the invention described in claim 7, wherein the third fluid chamber, said guide inside the rod, according to claim 6, wherein is arranged between the central rod, it is characterized by A fluid pressure cylinder is provided.
(8) In the invention described in claim 8, wherein the third fluid chamber, said guide outside of the rod, according to claim 6, wherein disposed are, that between the inner cylinder part Provides a fluid pressure cylinder.
( 9 ) In the invention according to claim 9 , the second fluid chamber is formed in the first chamber in which the second fluid is in contact with the first piston and on the outer side in the radial direction of the first chamber. Claims 1 to 8 include a second chamber in which the second fluid inside contacts the second piston, and a communication passage connecting the first chamber and the second chamber. The fluid pressure cylinder according to claim of any one of them is provided.

According to the present invention, the first piston and the second piston are arranged in the radial direction, and the surface that pressurizes the second fluid of the first piston and the surface that receives the pressure of the second fluid of the second piston are in the same direction. Since it is formed so as to be, the total length of the fluid pressure cylinder can be shortened.

It is a top view and a cross-sectional view of the air hydro type cylinder in 1st Embodiment. It is sectional drawing showing the whole structure of the above-mentioned air-hydro type cylinder. It is explanatory drawing which showed a part of the assembly procedure of the above-mentioned air-hydro type cylinder. It is explanatory drawing which showed the rest of the assembly procedure of the above-mentioned air-hydro type cylinder. It is explanatory drawing which showed the moving state of each part with the movement of the pneumatic piston in the above-mentioned air-hydro type cylinder. It is sectional drawing of the whole structure of the air hydro type cylinder in 2nd Embodiment. It is explanatory drawing which showed a part of the assembly procedure of the above-mentioned air-hydro type cylinder. It is explanatory drawing which showed the moving state of each part with the movement of the pneumatic piston in the above-mentioned air-hydro type cylinder. It is a side view and the sectional view of the air hydro type cylinder in 3rd Embodiment. It is sectional drawing of the whole structure of the air hydro type cylinder in 4th Embodiment. It is explanatory drawing which showed a part of the assembly procedure of the above-mentioned air-hydro type cylinder. It is explanatory drawing which showed the rest of the assembly procedure of the above-mentioned air-hydro type cylinder. It is explanatory drawing which showed the moving state of each part with the movement of the pneumatic piston in the above-mentioned air-hydro type cylinder.

Hereinafter, a preferred embodiment in which the fluid pressure cylinder of the present invention is applied to the air-hydro cylinder 1 will be described in detail with reference to FIGS. 1 to 9.
(1) Outline of the embodiment In the air hydro type cylinder 1 of the present embodiment, the cylinder has a double structure in the radial direction. That is, the inner cylinder 40 is arranged inside the outer cylinder 10 and the pneumatic supply rod 22 is arranged coaxially inside the inner cylinder 40.
Then, the first piston 30 is arranged between the pneumatic supply rod 22 and the inner cylinder 40, one surface (hydraulic surface) side of the first piston 30 in the inner cylinder 40 is the pneumatic chamber 80, and the other surface side is. The first hydraulic chamber 81 is used.
A second piston 50 is arranged between the outer cylinder 10 and the inner cylinder 40, and the surface side of the second piston 50 in both cylinders 10 and 40 facing the same direction as the hydraulic surface of the first piston 30 is provided. The second hydraulic chamber 82 is used.
In the inner cylinder 40, a communication hole 44 for moving the oil OL filled in the first hydraulic chamber 81 and the second hydraulic chamber 82 and transmitting a negative pressure is formed.
In this way, the first piston 30 and the second piston 50 are arranged in parallel in the radial direction, and both pistons 30 and 50 are formed so that the surfaces in contact with the oil OL filled in the hydraulic chamber are in the same direction. Therefore, the total length of the air hydro type cylinder 1 can be shortened.

(2) Details of the Embodiment Hereinafter, the first embodiment in which the fluid pressure cylinder of the present invention is applied to the air-hydro cylinder 1 will be described.
1 and 2 are views showing the configuration of the air-hydro cylinder 1 of the present embodiment.
In FIG. 1, (a) is a left side view of the air-hydro cylinder 1, (b) is a cross-sectional view taken along the cross-sectional line AA shown in the left side view of (a), and (c) is a right side view. In the figure, (d) represents a cross-sectional view taken along the cross-sectional line BB shown in the cross-sectional view of (b).

FIG. 2 is a cross-sectional view taken along the line AA'of the air-hydro cylinder 1 according to the present embodiment.
In addition, in FIG. 2 and the cross-sectional view showing the cross section on the line A, the pneumatic pipe joint 28 is shown excluding the object of the cross section.
Further, in each of the following cross-sectional views, since it is difficult to distinguish from the leader line of the code, the diagonal line showing the cross section of each part is omitted. However, in the figures showing the overall configuration (FIGS. 2 and 6), in order to clarify the distinction between each part, the density of the space where the supply air (air) AR and the oil OL exist in each cylinder is different. It is distinguished by different halftone dots.
As shown in FIG. 2, the air-hydro cylinder (fluid pressure cylinder) 1 includes an outer cylinder 10 that functions as a housing, a pneumatic supply unit 20, a first piston 30, an inner cylinder 40 that functions as an inner cylinder portion, and a first cylinder. It includes two pistons 50, a lid 60, and coil springs 70 and 71.

The outer cylinder 10 has the virtual central axis C shown by the alternate long and short dash line in FIG. 2 as the axis, and the outer cylinder portion 11 constituting the cylinder body (housing) and one side of the outer cylinder portion 11 (left side in the drawing). It is provided with an outer cylinder lid 12 arranged in the above.
As shown in FIG. 1D, the cross-sectional shape of the outer cylinder portion 11 orthogonal to the central axis C is a square with a circular shape on the inner peripheral surface side and a square shape on the outer peripheral surface side.
Although the outer cylinder portion 11 and the outer cylinder lid 12 of the present embodiment are integrally formed, they may be screwed together by screws screwed on the inner and outer peripheral surfaces of each other, and are thrust through a seal member. It may be formed by screwing both the combined members.
A circular through hole 13 centered on the central axis C of the outer cylinder lid 12 is formed.

The outer cylinder portion 11 is formed with an oil supply hole 14 penetrating the outer cylinder portion 11 on the same surface as a plurality of communication holes 44 described later. The oil supply hole 14 is for filling the first hydraulic chamber 81, the second hydraulic chamber 82, and the communication hole 44 with an oil OL that functions as a second fluid.
Although four communication holes 44 of the present embodiment are formed as shown in FIG. 1 (d), one of them exists on the A'line of FIG. 1 (a) and does not exist on the A line. .. Therefore, in FIG. 2 showing the cross section of AA', the communication hole 44 located at a position displaced by 45 degrees from the line A is indicated by a dotted line. However, halftone dots are also attached to the oil OL that fills the inside of the communication hole 44 represented by the dotted line. The number and arrangement positions of the communication holes 44 are arbitrary and may be other numbers and positions.
The oil supply hole 14 is sealed with a sealing screw 15, and the sealing screw 15 is provided with a sealing member 16 for preventing oil OL from flowing out from the second hydraulic chamber 82.
The sealing screw 15 may be provided with a pressure sensor (not shown) for measuring the oil pressure in the first hydraulic chamber 81, the communication hole 44, and the second hydraulic chamber 82.
Further, the oil supply hole 14 and the sealing screw 15 do not have to be one set, and a plurality of sets may be arranged. In this case, by refueling while leaving at least one refueling hole 14, the air inside is released from the refueling hole 14 that has not been refueled, so that refueling becomes easy. Then, refueling can be performed more easily by drawing a vacuum from the refueling hole 14 that has not been refueled.
Further, it is also possible to dispose a pressure sensor on one of the plurality of sets of sealing screws 15 and refuel from the other refueling item 14.

The pneumatic supply unit 20 includes a lid 21 and a pneumatic supply rod 22 integrally formed from the center of the lid 21. The pneumatic supply rod 22 functions as a central rod.
The outer cylinder 10 and the pneumatic supply unit 20 are fixed by a plurality of bolts 26 (four in this embodiment) from the lid 21 toward the outer cylinder lid 12.
A male screw is formed at the tip of the pneumatic supply rod 22, and a hook nut 27 having an outer diameter larger than the outer diameter of the pneumatic supply rod 22 is screwed.

A first pneumatic supply path 23 is formed on the lid 21 from its side end surface (thickness surface) toward the central axis C, and a second pneumatic supply path 24 continuous with the first pneumatic supply path 23 is provided. , Is formed on the pneumatic supply rod 22 along the central axis C. The second pneumatic supply path 24 is formed so as to penetrate to the tip of the pneumatic supply rod 22. The first pneumatic supply path 23 and the second pneumatic supply path 24 function as the first fluid supply path.
The outer diameter of the pneumatic supply rod 22 is set to a clearance fit that is appropriately smaller than the inner diameter of the through hole 13. A seal member (O-ring) 25 is arranged in a groove formed on the pneumatic supply rod 22 side over the entire circumference on the facing surface between the outer peripheral surface of the pneumatic supply rod 22 and the inner peripheral surface of the through hole 13. This prevents the oil OL in the first hydraulic chamber 81, which will be described later, from flowing out.
A pneumatic pipe joint 28 is attached to the lid 21 so as to be continuous with the first pneumatic supply path 23, and a supply air AR functioning as a first fluid is supplied from the pneumatic pipe joint 28 to be the first. It is supplied from the tip of the pneumatic supply rod 22 to the pneumatic chamber 80 functioning as the first fluid chamber through the pneumatic supply passage 23 and the second pneumatic supply passage 24.

A guide rod 31 extending outward in the central axis C direction is formed in the central portion of the first piston 30.
A through hole is formed in the central portion of the first piston 30 and the guide rod 31, and the pneumatic supply rod 22 is slidably inserted into the through hole. The surface of the first piston 30 on the opposite side of the guide rod 31 comes into contact with the hook nut 27 so as not to come off from the pneumatic supply rod 22.
A coil spring 70 having a coil inner diameter larger than the diameter of the guide rod 31 is disposed between the pneumatic supply rod 22 and the guide rod 31 and the inner cylindrical portion 41 described later. One end of the coil spring 70 is in contact with the outer cylinder lid 12, and the other end is in contact with the first piston 30.
The coil spring 70 is compressed when the first piston 30 under the air pressure moves in the retracting direction (left direction in the drawing), and when the air pressure becomes small, the first piston 30 is returned until it comes into contact with the locking nut 27.

On the facing surface between the inner peripheral surface of the first piston 30 and the outer peripheral surface of the pneumatic supply rod 22, the inner peripheral sealing member 32 is formed in a groove formed on the inner peripheral surface side of the first piston 30 over the entire circumference. Are arranged.
Further, on the facing surface between the outer peripheral surface of the first piston 30 and the inner peripheral surface of the inner cylindrical portion 41 described later, the outer peripheral sealing member 33 is formed in a groove formed on the outer peripheral surface side of the first piston 30 over the entire circumference. Are arranged.
The inner peripheral sealing member 32 and the outer peripheral sealing member 33 prevent the supply air AR in the pneumatic chamber 80 and the oil OL in the first hydraulic chamber 81 from flowing out to each other.

The inner cylinder 40 includes an inner cylindrical portion 41 on which the first piston 30 slides on the inner peripheral surface, a flange 42 formed on one side of the inner cylindrical portion 41 (pneumatic supply portion 20 side), and an inner cylindrical portion 41. A lid portion 43 formed so as to close the other end side is provided. The inner cylindrical portion 41, the flange 42, and the lid portion 43 of the present embodiment are integrally formed.
A plurality of communication holes 44 for communicating the first hydraulic chamber 81 and the second hydraulic chamber 82 are formed in the radial direction on the peripheral surface of the inner cylindrical portion 41 on the flange 42 side. The communication hole 44 is formed at a position that does not overlap with the sliding range of the first piston 30 and the sliding range of the second piston 50 (described later).
The inner cylinder 40 and the outer cylinder 10 are fixed by a plurality of bolts 46 (four in this embodiment) from the flange 42 toward the outer cylinder lid 12. In this embodiment, the mounting screw holes for the bolts 46 do not penetrate the outer cylinder lid 12. However, when the mounting screw hole for the bolt 46 is formed through the outer cylinder lid 12, a sealing member is arranged so that the oil OL of the second hydraulic chamber 82 does not flow out.

The second piston 50 is integrally formed with an output cylindrical portion 51 that outputs thrust by hydraulic pressure to the outside. The output cylindrical portion 51 has a cylindrical portion formed by extending outward in the central axis C direction at the central portion of the second piston 50, and a cylindrical portion lid is provided at the end of the cylindrical portion on the opposite side of the second piston 50. It has an output plate formed so as to.
At the center of the output plate formed at the end of the output cylinder portion 51, a through hole 52 for moving air between the space formed between the outer peripheral surface of the inner cylinder 40 and the outside is formed. Has been done.
A through hole is formed in the central portion of the second piston 50, and the second piston 50 is slidably inserted into the inner cylindrical portion 41.
The inner diameter of the output cylindrical portion 51 on the second piston 50 side is formed to have the same inner diameter as the through hole of the second piston 50, and the output cylindrical portion 51 slides on the outer peripheral surface of the inner cylindrical portion 41 to form the second piston. It guides the movement (sliding) of 50. The inner diameter of the output cylindrical portion 51 opposite to the second piston 50 is formed to be larger than the outer diameter of the inner cylindrical portion 41, thereby suppressing an increase in resistance due to friction with the inner cylindrical portion 41.

The projected area of the surface where the end faces of the first piston 30 and the guide rod 31 are in contact with the oil OL in the first hydraulic chamber 81 on the plane perpendicular to the central axis C direction is S1, and the surface where the second piston 50 is in contact with the second hydraulic chamber 82. When the projected area on the same vertical plane is S2, both projected areas are formed so that S1 <S2.
As a result, the second piston 50 receives the thrust amplified by the hydraulic pressure larger than the pressure applied to the first hydraulic chamber 81 by the air pressure of the guide rod 31 from the pneumatic chamber 80, and outputs the thrust from the output cylindrical portion 51. be able to.
In the present embodiment, the second piston 50 is arranged on the outer side of the inner cylindrical portion 41 of the first piston 30 with the inner cylindrical portion 41 interposed therebetween. That is, when the difference between the outer diameter and the inner diameter of the first piston 30 is δ1 and the same difference of the second piston 50 is δ2, the inner diameter of the second piston 50 is larger than the outer diameter of the first piston 30. , Δ1 = δ2, but both projected areas are S1 <S2. In the present embodiment, by further setting δ1 <δ2, a larger thrust can be output.

As shown in FIG. 2, by arranging the first piston 30 and the second piston 50 in parallel in the radial direction instead of arranging them in series in the central axis C direction, the total length of the air hydro cylinder 1 can be reduced. Can be shortened.
In the present embodiment, the position of the second piston 50 is on the retracting direction side (in the state of FIG. 2) rather than the position of the first piston 30 in the state where the flood pressure from the second hydraulic chamber 82 is not received (the state of FIG. 2). It is located on the left side of the drawing). As a result, the total length of the air-hydro cylinder 1 can be further shortened.

On the facing surface between the inner peripheral surface of the second piston 50 and the outer peripheral surface of the inner cylindrical portion 41, an inner peripheral seal member 54 is provided in a groove formed on the inner peripheral surface side of the second piston 50 over the entire circumference. It is arranged.
Further, on the facing surface between the outer peripheral surface of the second piston 50 and the inner peripheral surface of the outer cylinder portion 11, the outer peripheral seal member 55 is arranged in the groove formed on the outer peripheral side of the second piston 50 over the entire circumference. Has been done.
The inner peripheral seal member 54 and the outer peripheral seal member 55 prevent the oil OL in the second hydraulic chamber 82 from flowing out.

The lid 60 is formed with a hole 61 through which the output cylindrical portion 51 of the second piston 50 is inserted, and is fixed to the outer cylinder portion 11 by a plurality of bolts 63.
A coil spring 71 having a coil inner diameter larger than the outer diameter of the output cylindrical portion 51 is disposed between the output cylindrical portion 51 and the outer cylinder portion 11. One end of the coil spring 71 is in contact with the second piston 50, and the other end is in contact with the lid 60.
The coil spring 71 is compressed when the second piston 50 that receives the hydraulic pressure from the second hydraulic chamber 82 is moved in the output direction (to the right in the drawing), and returns the second piston 50 to the original position when the hydraulic pressure becomes small.

In the present embodiment, the second fluid chamber is formed by the first hydraulic chamber 81 that functions as the first chamber, the second hydraulic chamber 82 that functions as the second chamber, and the communication hole 44 that functions as the communication passage.
The outer peripheral surfaces of the pneumatic supply rod 22 and the guide rod 31 face each other with the inner peripheral surfaces of the inner cylindrical portion 41 and the flange 42, and the first hydraulic chamber 81 is provided by a region where the outer cylinder lid 12 and the first piston 30 face each other. Is formed.
Further, the outer peripheral surface of the inner cylindrical portion 41 and the inner peripheral surface of the outer cylinder portion 11 face each other, and the second hydraulic chamber 82 is formed by the region where the flange 42 and the second piston 50 face each other.

Next, the assembly procedure of the air hydro type cylinder 1 in the present embodiment will be described.
3 and 4 are cross-sectional views taken along the line AA'for the assembly procedure of the air-hydro cylinder 1.
The following assembly procedures (a) to (f) correspond to FIGS. 3 (a) to 3 (c) and FIGS. 4 (d) to 4 (f).
(A) First, the pneumatic supply rod 22 of the pneumatic supply unit 20 in which the seal member 25 is set is inserted into the through hole 13 of the outer cylinder 10.
As shown in FIG. 1A, the outer cylinder 10 and the pneumatic supply unit 20 are fixed by a plurality of bolts 26 from the lid 21 side in a state where the outer cylinder lid 12 and the lid 21 are in contact with each other.

(B) Next, the pneumatic supply rod 22 is inserted into the coil spring 70 from the tip end side thereof, and is inserted into the first piston 30 in which the inner peripheral sealing member 32 and the outer peripheral sealing member 33 are set.
At this time, the guide rod 31 of the first piston 30 is arranged so as to be located between the pneumatic supply rod 22 and the coil spring 70.
(C) Then, the hooking nut 27 for hooking the inserted first piston 30 is screwed into the tip of the pneumatic supply rod 22.

(D) Next, the pneumatic supply rod 22, the coil spring 70, the first piston 30, and the hook nut 27 are inserted into the inner cylinder portion 41 of the inner cylinder 40 until the flange 42 abuts on the outer cylinder lid 12.
Then, the inner cylinder 40 and the outer cylinder 10 are fixed from the flange 42 side with a plurality of bolts 46.
(E) Next, the inner cylinder portion 41 of the inner cylinder 40 is inserted into the second piston 50 and the output cylinder portion 51 in which the inner peripheral seal member 54 and the outer peripheral seal member 55 are set.

(F) Next, the output cylindrical portion 51 is inserted into the coil spring 71.
Then, the output cylinder portion 51 is passed through the hole 61 of the lid 60, and the lid 60 is fixed to the outer cylinder 10 with four bolts 63 as shown in FIG. 1 (c).
Finally, oil OL is injected from the oil supply hole 14 into the second hydraulic chamber 82, the communication hole 44, and the first hydraulic chamber 81, and sealed with the sealing screw 15.
The pneumatic pipe joint 28 may be attached at any stage of (a) to (f).

Next, the operation of the air-hydro cylinder 1 configured in this way will be described.
FIG. 5 is a cross-sectional view taken along the line AA ′ showing the state before and after the operation of the air hydro type cylinder 1.
In the air-hydro cylinder 1 shown in FIG. 5A, the output cylinder portion 51 is located closest to the pneumatic supply portion 20. In this state, as shown in FIG. 5A, the first piston 30 is in contact with the locking nut 27 by the spring force of the coil spring 70, and the second piston 50 is most retracted by the spring force of the coil spring 71. It is in a state of being. Hereinafter, the position where each part of the air-hydro cylinder 1 is in this state (state in FIG. 5A) is set as the starting position.
Further, the first piston 30 and the second piston 50, which are operating members arranged inside the air-hydro cylinder 1, are arranged coaxially with the central axis C as the center, and move in the axial direction, respectively. Hereinafter, the direction in which the second piston 50 on the central axis C moves from the start position (right direction in the drawing) is referred to as an output direction, and the opposite direction (left direction in the drawing) is referred to as a retracting direction.

When the supply air AR is supplied from the pneumatic pipe joint 28, the pneumatic chamber 80 is pressurized through the first pneumatic supply passage 23 and the second pneumatic supply passage 24.
In the present embodiment, as described above, the first piston 30 is arranged on the radial outer side of the pneumatic supply rod 22 that supplies the supply air AR to the pneumatic chamber 80. That is, the pneumatic supply rod 22 and the first piston 30 are not arranged in series in the central axis C direction, but are arranged in parallel in the radial direction.
As a result, the supply air AR is supplied from the pneumatic supply rod 22 to the pneumatic chamber 80 in the output direction, while the air pressure from the pneumatic chamber 80 acts in the retracting direction with respect to the first piston 30.
Therefore, when the air pressure in the pneumatic chamber 80 exceeds the spring force of the coil spring 70, the first piston 30 moves in the retracting direction while compressing the coil spring 70 by the air pressure.

When the first piston 30 moves in the retracting direction, the volume of the first hydraulic chamber 81 is reduced, so that the oil OL in the first hydraulic chamber 81, the communication hole 44, and the second hydraulic chamber 82 is pressurized. .. When the oil pressure of the pressurized oil OL exceeds the spring force of the coil spring 71, the second piston 50 moves in the output direction due to the oil pressure.
As described above, in the present embodiment, the surface of the first piston 30 on the first hydraulic chamber 81 side and the surface of the second piston 50 on the second hydraulic chamber 82 side are formed so as to face the same direction. , The second piston 50 moves in the direction opposite to the moving direction of the first piston 30.

In the present embodiment, as described above, the projected area S2 of the second piston 50 is larger than the projected area S1 of the first piston 30 (S1 <S2), so that the second piston 50 is S2 / S1 times larger. It receives the amplified oil pressure in the output direction.
Further, as described above, the second piston 50 is arranged on the radial outer side of the first piston 30. That is, the first piston 30 and the second piston 50 are not arranged in series in the central axis C direction, but are arranged in parallel in the radial direction.
As a result, the second piston 50 moves in the opposite direction to the first piston 30 that moves in the retracting direction due to the air pressure from the pneumatic chamber 80, that is, in the output direction due to the amplified hydraulic pressure from the second hydraulic chamber 82. It moves and outputs a large thrust from the output cylindrical portion 51.

FIG. 5B shows a state in which the first piston 30 moves to the most retracted direction (moves to the maximum stroke width) in response to the air pressure from the pneumatic chamber 80.
When the first piston 30 moves by the maximum stroke width (pneumatic stroke), the coil spring 70 contracts and the volume of the first hydraulic chamber 81 becomes the minimum, and the oil OL moves from the communication hole 44 to the second hydraulic chamber 82 by that amount. ..
As described above, since the relationship between the projected areas is S1 <S2, as shown in FIG. 5B, the first piston 30 moves by the pneumatic stroke, whereas the second piston 50 and the output cylindrical portion move. 51 moves only by the hydraulic stroke. A large thrust due to the hydraulic pressure amplified in the output direction is output to the plate-shaped portion at the tip of the output cylindrical portion 51 in this state.

Next, the operation when the second piston 50 is retracted will be described.
In the state of FIG. 5B, when the pressure of the supply air AR supplied from the pneumatic piping joint 28 drops, the first piston 30 moves in the locking nut 27 direction (output direction) by the compressed coil spring 70. do.
With the movement of the first piston 30, the volume of the first hydraulic chamber 81 increases, and the oil pressure of the entire hydraulic chamber also decreases. As a result, the second piston 50 is moved in the retracting direction by the compressed coil spring 71.
Then, when the first piston 30 comes into contact with the hook nut 27 and returns to the start position, the second piston 50 also returns to the start position.
As described above, in the present embodiment, in the retracting operation of returning from the state of FIG. 5B to the state of FIG. 5A, the first piston 30 and the second piston 50 are the springs of the compressed coil springs 70 and 71, respectively. The force returns to the starting position.

Next, a second embodiment of the air-hydro cylinder 1 will be described.
In the first embodiment described, a so-called single-acting air-hydro cylinder 1, that is, one system for output is provided as a path of the supply air AR acting on the first piston 30, and the first piston 30 is retracted. The case where the coil spring 70 is used has been described.
On the other hand, the air-hydro cylinder 1 of the second embodiment is a so-called double-acting air-hydro cylinder 1, and has two systems, one for output and the other for evacuation, as the path of the supply air AR acting on the first piston 30. Is provided.

FIG. 6 is a cross-sectional view showing the overall configuration of the air-hydro cylinder according to the second embodiment.
In FIG. 6, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted as appropriate, and the different parts will be mainly described below.
Further, in FIG. 6, not the AA cross section but the AA'cross section is shown for easy comparison with the first embodiment. Therefore, the supply air AR system for recovery (third pneumatic supply path 94 to fifth pneumatic supply path 96) existing on the AA'line does not appear on the cross section and should be indicated by a dotted line. However, the drawings are shown in solid lines for convenience because it is difficult to see.
The pneumatic pipe joint 28 and the pneumatic pipe joint 98 are shown excluding the objects of the cross section as in the first embodiment.

In the present embodiment, in addition to the pneumatic chamber 80a for moving the first piston 30 in the retracting direction (left side in the drawing), the pneumatic chamber 80b for moving the first piston 30 in the output direction is on the opposite side of the pneumatic chamber 80a. It is provided in.
The pneumatic chamber 80a functions as a forward pneumatic chamber for moving the first piston 30 in the retracting direction and the second piston 50 in the output direction in the reciprocating operation, and the pneumatic chamber 80b functions as a restoring pneumatic chamber. do.
In the present embodiment, since the supply air AR system for recovery and the pneumatic chamber 80b are provided, the coil spring 70 in the first embodiment is not arranged.

In order to form the pneumatic chamber 80b, the first piston 30 of the present embodiment has the inner diameter of the guide rod 31 larger than the outer diameter of the pneumatic supply rod 22. As a result, on the surface of the first piston 30 opposite to the pneumatic chamber 80a, in addition to the surface constituting the first hydraulic chamber 81, a surface in contact with the pneumatic chamber 80b is formed.

Further, an intermediate cylinder 90 having the same outer diameter as the inner diameter of the guide rod 31 and having a part of the outer peripheral surface of the end portion in contact with the inner peripheral surface on the tip end side of the guide rod 31 is provided, and one end thereof is a pneumatic supply portion 20. It is arranged in contact with the lid 21 of the above.
A female screw is threaded on the inner peripheral surface on one end side of the intermediate cylinder 90, and is screwed with a male screw screwed on the outer periphery of the pneumatic supply rod 22 on the lid 21 side.
Since the inner diameter from the other end side of the intermediate cylinder 90 to the female screw is formed to be larger than that of the pneumatic supply rod 22, a gap 91 is formed between the intermediate cylinder 90 and the pneumatic supply rod 22 over the entire circumference. The supply air AR is supplied to the pneumatic chamber 80b from the fifth pneumatic supply passage 96, which will be described later, through the gap 91.

On the facing surface between the outer peripheral surface of the intermediate cylinder 90 and the inner peripheral surface of the guide rod 31, a seal member 93 is arranged in a groove formed on the outer peripheral surface side of the intermediate cylinder 90 over the entire circumference. The seal member 93 prevents the supply air AR of the pneumatic chamber 80b and the oil OL of the first hydraulic chamber 81 from flowing out to each other.
Further, a seal member 92 is arranged in a groove formed on the intermediate cylinder 90 side over the entire circumference on the facing surface between the outer peripheral surface of the intermediate cylinder 90 and the inner peripheral surface of the through hole 13 of the outer cylinder lid 12. This prevents the oil OL in the first hydraulic chamber 81 from flowing out. The seal member 92 corresponds to the seal member 25 of the first embodiment.

In the present embodiment, the third pneumatic supply passage 94, the fourth pneumatic supply passage 95, and the fifth pneumatic supply passage 96 are newly emptied as a system for supplying the supply air AR for recovery to the pneumatic chamber 80b. It is formed in the pressure supply unit 20.
That is, a third pneumatic supply path 94 is formed on the lid 21 from its side end surface (thickness surface) toward the central axis C, and a fourth pneumatic supply path continuous with the third pneumatic supply path 94. 95 is formed on the pneumatic supply rod 22 in the direction of the central axis C. The fourth pneumatic supply path 95 is formed from the lid 21 side to the position of the gap 91 between the pneumatic supply rod 22 forming the pneumatic chamber 80b and the intermediate cylinder 90. An embedding plug 97 is screwed into the fourth pneumatic supply path 95 in order to close the open portion on the lid 21 side.
Further, the pneumatic supply rod 22 is formed with a fifth pneumatic supply path 96 continuous with the tip of the fourth pneumatic supply path 95 from the outer peripheral surface thereof.

The second pneumatic supply path 24 in the first embodiment is formed on the central axis C, but in the present embodiment, both the outward path system and the return path system need to be formed on the pneumatic supply rod 22. The second pneumatic supply path 24 and the fourth pneumatic supply path 95 are formed outside the central axis C so as not to interfere with each other.

Similar to the pneumatic piping joint 28, the pneumatic piping joint 98 is attached to the peripheral surface of the lid 21 of the pneumatic supply unit 20 so as to be continuous with the third pneumatic supply path 94. The supply air AR for recovery is supplied from the pneumatic pipe joint 98, passes through the third pneumatic supply passage 94, the fourth pneumatic supply passage 95, and the fifth pneumatic supply passage 96, and is peripheral to the pneumatic supply rod 22. It is supplied from the surface to the pneumatic chamber 80b.

Next, the assembly procedure of the air-hydro cylinder 1 in the second embodiment will be described.
FIG. 7 is a cross-sectional view taken along the line AA'for a part of the assembly procedure of the air-hydro cylinder 1.
The following assembly procedures (a) to (c) correspond to FIGS. 7 (a) to 7 (c).
(A) First, the intermediate cylinder 90 in which the seal members 92 and 93 are set is screwed to the pneumatic supply rod 22 of the outer cylinder 10 until it comes into contact with the lid 21.
(B) Next, the intermediate cylinder 90 is inserted into the through hole 13 of the outer cylinder 10.
With the outer cylinder lid 12 and the lid 21 in contact with each other, the outer cylinder 10 and the pneumatic supply unit 20 are fixed by a plurality of bolts 26 from the lid 21 side.
(C) Next, the pneumatic supply rod 22 is inserted into the first piston 30 in which the inner peripheral sealing member 32 and the outer peripheral sealing member 33 are set until the intermediate cylinder 90 enters the guide rod 31.
Then, the hooking nut 27 for hooking the inserted first piston 30 is screwed into the tip of the pneumatic supply rod 22.

Hereinafter, although not shown, assembly is performed in the same manner as in the assembly procedures (d) to (f) in the first embodiment shown in FIG.
That is, (d) a set of an inner cylinder 40, (e) a set of a second piston 50 and an output cylindrical portion 51, (f) a set of a lid 60, a set of pneumatic piping joints 28 and 98, and injection of oil OL. Sealing.

Next, the operation of the double-acting air-hydro cylinder 1 configured in this way will be described.
FIG. 8 is a cross-sectional view taken along the line AA showing the state before and after the operation of the double-acting air-hydro cylinder 1.
When the first piston 30 is advanced in the retracting direction, the supply air AR is sent from the pneumatic pipe joint 28 through the first pneumatic supply passage 23 and the second pneumatic supply passage 24 in the start state of FIG. 8A. Is supplied to the pneumatic chamber 80a. At this time, the supply air AR in the pneumatic chamber 80b is discharged to the outside from the pneumatic pipe joint 98 via the fifth pneumatic supply passage 96, the fourth pneumatic supply passage 95, and the third pneumatic supply passage 94.
In this way, when the supply air AR is supplied to the pneumatic chamber 80a, the first piston 30 is pushed by the supply air AR pressure of the pneumatic chamber 80a and moves in the retracting direction, and the volume of the first hydraulic chamber 81 is reduced. do.

By reducing the volume of the first hydraulic chamber 81, the oil pressure of the second hydraulic chamber 82 is amplified as described in the first embodiment, and the second piston 50 and the output cylindrical portion 51 move in the output direction. It moves and becomes the state shown in FIG. 8 (b).

On the other hand, when the second piston 50 and the output cylindrical portion 51 are retracted from the state shown in FIG. 8B, the supply air AR is supplied from the pneumatic pipe joint 98 to the third pneumatic supply path 94 and the fourth pneumatic pressure. It is supplied to the pneumatic chamber 80b via the passage 95 and the fifth pneumatic supply passage 96. Further, the supply air AR in the pneumatic chamber 80a is discharged to the outside from the pneumatic piping joint 28 via the second pneumatic supply passage 24 and the first pneumatic supply passage 23.
When the supply air AR is supplied into the pneumatic chamber 80b, the pressure on the pneumatic chamber 80b side becomes higher than that on the pneumatic chamber 80a side due to the supply pressure, and the first piston 30 moves in the output direction (right side in the drawing). The volume of the second hydraulic chamber 82 returns to the original size, and the second piston 50 and the output cylindrical portion 51 also return to the starting position when the hydraulic pressure drops.

Next, the third embodiment will be described.
In the first embodiment, the case where the outer cylinder lid 12 and the flange 42 are fixed by the bolt 46 from the flange 42 side has been described, but in the present embodiment, the outer cylinder lid 12 and the flange 42 are fixed from the outer cylinder lid 12 side. ..
FIG. 9 shows a side view of the air-hydro cylinder 1 of the third embodiment and a sectional view taken along the line AA'.
In this embodiment, as shown in FIG. 9B, the outer cylinder lid 12 and the flange 42 are fixed by a plurality of bolts 17 from the outer cylinder lid 12 side.
In order to fix with the bolt 17, a through hole 29 is formed in the lid 21 of the pneumatic supply unit 20 at a position corresponding to each bolt 17.
As shown in FIG. 9A, in the present embodiment, three bolts 17 and three bolts 26 for fixing the lid 21 of the pneumatic supply unit 20 and the outer cylinder lid 12 are provided, and FIG. 9 (a) shows. As shown in a), the three points on the concentric circles are arranged so as to be out of phase with each other. This is because the bolts 17 and 26, and the bolts 17 and 26 and the first pneumatic supply path 23 do not interfere with each other.
In this embodiment, since the bolts 17 are fixed to the bolts 17 from the lid 21 side through the outer cylinder lid 12, the sealing member 18 is attached to each bolt 17 so that the oil OL of the first hydraulic chamber 81 does not flow out. It is arranged.

As a procedure for assembling the air-hydro cylinder 1 of the present embodiment, in the process shown in FIG. 4 (d), the bolt 18 is first set in the recess formed in the outer cylinder lid 12. After that, the pneumatic supply rod 22 or the like is inserted into the inner cylinder portion 41 of the inner cylinder 40, and the outer cylinder lid 12 and the flange 42 are in contact with each other and fixed with bolts 17 from the outer cylinder lid 12 and the lid 21 side. .. The other steps before and after are the same as those in the first embodiment.
According to the present embodiment, since there is a margin in the area as compared with the case where the bolt 46 is fixed between the outer cylinder portion 11 and the inner cylinder portion 41, the bolt 26 and the bolt 17 may have the same standard. It is possible.

As a third embodiment, the case where the direction of the bolt for fixing the outer cylinder lid 12 and the flange 42 in the single-acting air-hydro cylinder 1 of the first embodiment is changed has been described as an example. The same can be applied to the double-acting air-hydro cylinder 1 of the embodiment.
When the third embodiment is applied to the double-acting air-hydro cylinder 1, the arrangement positions of the third pneumatic supply path 94 and the pneumatic piping joint 98 are positioned so as not to interfere with both bolts 17 and 26. Change to. Alternatively, the positions of both bolts 17 and 26 are changed to positions different from those of the third embodiment.

According to each of the above-described embodiments, the total length of the air-hydro cylinder 1 can be shortened.
That is, in the conventional air-hydro cylinder 1, since the two types of fluid chambers are configured to move in series or in the same direction, the stroke lengths of the two types of fluid chambers are added to form the total length of the cylinder. However, since the two types of fluid chambers are arranged in parallel in the radial direction with respect to the central axis C, the strokes of the fluid chambers are not added and the total length of the cylinder can be shortened.
Further, since the piston operating directions of the two types of fluid chambers are configured to be opposite to each other, the arrangement of the fluid chambers can be easily arranged in the radial direction, and the total length of the cylinder can be shortened.

The technical scope of the present invention is not limited to the above embodiment, and various changes can be made without departing from the spirit of the present invention.
For example, in the above embodiment, in the present embodiment, the case where the outer cylinder 10 and the pneumatic supply unit 20 are separately formed and both are fixed by the bolt 26 has been described.
On the other hand, the outer cylinder 10 and the pneumatic supply unit 20 may be integrally formed. In this case, the outer cylinder lid 12, the seal member 25, and the bolt 26 are unnecessary, and the outer cylinder portion 11 is integrally formed from the lid 21 so as to extend outward in the same direction as the pneumatic supply rod 22.
By integrally forming the outer cylinder 10 and the pneumatic supply portion 20, the thickness of the outer cylinder lid 12 minutes becomes unnecessary, so that the assembly process described later is shortened and the length in the length direction (center axis C direction) is shortened. Can be made shorter.

Further, in the described embodiment, the case where the internal fluid to be filled in the first hydraulic chamber 81, the communication hole 44, and the second hydraulic chamber 82 is oil OL has been described, but the fluid to be filled is limited to oil OL. It may be a fluid instead of a fluid, but an incompressible fluid is preferable. By using the oil of the incompressible fluid, it is possible to prevent a part of the thrust from being consumed for the compression of the fluid, so that a large thrust can be efficiently generated in the second piston 50 and the output cylindrical portion 51.
Further, not only the pneumatic chamber 80 but also the first hydraulic chamber 81, the communication hole 44, and the second hydraulic chamber 82 may be filled with a compressible fluid such as air. In this case as well, a short pneumatic cylinder can be used.
Further, not only the first hydraulic chamber 81, the communication hole 44, and the second hydraulic chamber 82, but also the pneumatic chamber 80 may be filled with an incompressible fluid such as oil OL.

Further, in the above-described embodiment, one case is used in which one coil spring 70 having a large diameter through which the pneumatic supply rod 22 and the guide rod 31 can be inserted and one coil spring 71 having a large diameter through which the output cylindrical portion 51 can be inserted are used. However, a plurality of coil springs 70 and 71 having a small outer diameter may be arranged.
In this case, the coil springs 70, 71 having a small outer diameter are arranged at equal intervals on the circumference on which one coil spring 70, 71 described in the embodiment is arranged. The number of coil springs 70 and 71 having a small outer diameter is 6 in each of the modified examples, but any number may be used as long as it is 2 or more. Further, the numbers of the coils 70 and the coils 71 having a small outer diameter may not be the same but may be different numbers.
The outer diameter of the coil spring 70 having a small outer diameter is smaller than the distance between the guide rod 31 and the inner cylindrical portion 41. Further, the outer diameter of the coil spring 71 having a small outer diameter is made smaller than the distance between the output cylindrical portion 51 and the outer cylinder portion 11.

Further, in the described embodiment (and the above-mentioned modification), the case where both the coil spring 70 and the coil spring 71 are arranged has been described, but only one of them may be arranged.
The coil springs 70 and 71 play a role of returning the first piston 30 and the second piston 50 to the starting position.
Therefore, for example, when only the coil spring 70 is arranged, when the first piston 30 moves in the output direction (right direction in FIG. 2) by the coil spring 70, the oil OL of the first hydraulic chamber 81 increases, and the second hydraulic chamber 82 Oil OL is reduced. As a result, the second piston 50 returns to the original position (start position) in conjunction with the first piston 30.
On the other hand, when only the coil spring 71 is arranged, when the second piston 50 is moved in the retracting direction (left direction in FIG. 2) by the coil spring 71, the oil OL in the second hydraulic chamber 82 decreases and flows into the first hydraulic chamber 81 and increases. do. As a result, the first piston 30 moves in conjunction with the second piston 50 and returns to the original starting position.
As described in the embodiment, when both the coil springs 70 and 71 are arranged, the operation of returning to the start position can be quickly performed.
On the other hand, since the thrust at the time of output is offset by the spring force, the amount of decrease in the thrust due to the offset can be reduced by disposing only one of the coil springs 70 and 71.
For example, when the sliding resistance due to the sealing members 32, 33, 54, 55 arranged on the first piston 30 and the second piston 50 is large, the coil spring 70 is used to smooth the movement of both pistons 30, 50. , 71 can be arranged, and if the sliding resistance is relatively small, either one can be arranged.

Next, the air-hydro cylinder 1 of the fourth embodiment will be described with reference to FIGS. 10 to 13.
By the way, in the second embodiment (FIGS. 6 to 8), a so-called double-acting air-hydro cylinder 1 provided with two systems, one for output and the other for retracting, as a path of the supply air AR acting on the first piston 30. Explained.
In the air hydro type cylinder 1 of the second embodiment, the guide rod 31 is formed on the first piston 30, but the inner diameter of the guide rod 31 is passed through the pneumatic supply rod 22 of the first piston 30. A case has been described in which a pneumatic chamber 80b (functioning as a third fluid chamber) is formed between the guide rod 31 and the pneumatic supply rod 22 by forming the rod larger than the inner diameter.

This fourth embodiment is also a double-acting air-hydro cylinder 1, but unlike the second embodiment, the inner diameter of the guide rod 31 is the same as the inner diameter of the first piston 30, that is, the pneumatic supply rod 22. A pneumatic chamber 80b (functioning as a third fluid chamber) is formed between the inner cylinder 40 and the outside of the guide rod 31 in the same size as the diameter of the guide rod 31.
As a result, the projected area S1 at the tip of the guide rod 31 in the first hydraulic chamber 81 can be reduced.
Therefore, according to the fourth embodiment, as compared with the second embodiment, with respect to the projected area Sa of the first piston 30 in the pneumatic chamber 80a and the projected area S2 of the second piston 50 in the second hydraulic chamber 82. Both Sa / S1 and S2 / S1 can be increased. That is, a larger output pressure (thrust) can be output from the output cylindrical portion 51 with respect to the pressure of the supply air AR of the first hydraulic chamber 81a.

However, in the second embodiment, as compared with the fourth embodiment, the reciprocating system of the supply air AR (second pneumatic supply path 24, fourth pneumatic supply path 95, etc.) is accommodated in the pneumatic supply rod 22 together. Therefore, the size of the air hydro type cylinder 1 in the radial direction can be reduced.

FIG. 10 is a cross-sectional view showing the overall configuration of the air-hydro cylinder 1 according to the fourth embodiment. In FIG. 10, the same parts as those in the first to third embodiments are designated by the same reference numerals, and the description thereof will be omitted as appropriate, and the description thereof will be focused on different parts below.
FIG. 10 shows a cross section taken along the line AA'as in FIG. 9B. Further, the pneumatic pipe joint 28 and the pneumatic pipe joint 98 are shown excluding the objects of the cross section as in the other embodiments.

In the present embodiment, in addition to the pneumatic chamber 80a for moving the first piston 30 in the retracting direction (left direction in the drawing), the pneumatic chamber 80b for moving the first piston 30 in the output direction (right direction in the drawing) is provided. It is provided on the opposite side of the pneumatic chamber 80a.
The pneumatic chamber 80a functions as a forward pneumatic chamber for moving the first piston 30 in the retracting direction and the second piston 50 in the output direction in the reciprocating operation, and the pneumatic chamber 80b functions as a restoring pneumatic chamber. do.
In the present embodiment, since the supply air AR system for recovery and the pneumatic chamber 80b are provided, the coil spring 70 in the first embodiment is not arranged.

In order to form the pneumatic chamber 80b, the first piston 30 of the present embodiment is formed with a through hole through which the pneumatic supply rod 22 penetrates, and a guide rod having the same inner diameter as the diameter of the through hole (inner diameter of the first piston 30). 31 is formed from the first piston 30 in the retracting direction (to the left in the drawing).
As a result, the pneumatic chamber 80b is formed in the region between the guide rod 31 and the inner cylindrical portion 41.

The inner cylinder 40 of this embodiment is formed by a lid portion 43 and an inner cylinder portion 41 (the flange 42 in the second embodiment does not exist), and a screw portion 73 (female) is inside the tip side of the inner cylinder portion 41. Screws) are formed.

Then, instead of the flange 42 in the second embodiment, the intermediate cylinder 72 is arranged in the outer cylinder 10 in a state of being in contact with the outer cylinder lid 12.
The intermediate cylinder 72 is composed of a body portion 72a and a flange portion 72b, and a through hole having the same diameter as the outer diameter of the guide rod 31 is formed in the center, and the guide rod 31 slides in the center axis C direction inside the through hole. Arranged as possible.
The body portion 72a has a screw portion 73 (male screw) formed on the flange portion 72b side so as to be screwed with the inner cylindrical portion 41. The end surface of the body portion 72a on the opposite side of the flange portion 72b in the central axis C direction is in contact with the pneumatic chamber 80b by facing the end surface of the first piston 30.

The outer diameter of the flange portion 72b of the intermediate cylinder 72 is formed to be the same as the inner diameter of the outer cylinder portion 11.
The flange portion 72b is fixed in a state where the entire end surface (the surface opposite to the body portion 72a) is in contact with the inner surface of the outer cylinder lid 12 of the outer cylinder 10, and the outer cylinder lid 12 is fixed to the lid 21. It is fixed.
That is, as shown in FIG. 10, the outer cylinder lid 12 and the flange portion 72b are fixed by a plurality of bolts 17 from the outer cylinder lid 12 side. In order to fix with the bolt 17, a through hole 29 is formed in the lid 21 of the pneumatic supply unit 20 at a position corresponding to each bolt 17.
The outer cylinder lid 12 is fixed to the lid 21 of the pneumatic supply unit 20 from the lid 21 side with a bolt 26.
Although one bolt is displayed in the cross section of FIG. 10, each of the bolt 17 and the bolt 26 for fixing the lid 21 and the outer cylinder lid 12 in the present embodiment are used at least in two places, and each of them has a central axis C. It is arranged in a substantially evenly divided phase on a circle centered on. Further, the positions of the bolts 17 and 26 in the radial direction may be changed from the central axis C so as not to interfere with each other. At this time, the position of each bolt is selected so as not to interfere with the first pneumatic supply path 23 and the second pneumatic supply path 24.
In this embodiment, since the outer cylinder lid 12 is penetrated and fixed with bolts 17 from the lid 21 side, the oil OL of the first hydraulic chamber 81 and the second hydraulic chamber 82 is prevented from flowing out. A seal member 18 is arranged on each bolt 17.

As described above, the intermediate cylinder 72 is formed with a through hole having the same diameter as the outer diameter of the guide rod 31. The first hydraulic chamber 81 is formed by a region surrounded by the inner peripheral surface of the through hole in the flange portion 72b, the annular tip surface of the guide rod 31, the outer peripheral surface of the pneumatic supply rod 22, and the outer cylinder lid 12. It is formed.
On the other hand, the second hydraulic chamber 82 is formed by the outer peripheral surface of the body portion 72a, the surface of the flange portion 72b outside the body portion 72a, the inner peripheral surface of the outer cylinder portion 11, and the region surrounded by the second piston 50. Will be done.

In the second embodiment, a communication hole 44 for communicating the first hydraulic chamber 81 and the second hydraulic chamber 82 in an annular shape (doughnut shape) in the radial direction is formed in the inner cylindrical portion 41 (see FIG. 6). ..
On the other hand, in the present embodiment, as shown in FIG. 10, a communication hole 44 that communicates the first hydraulic chamber 81 and the second hydraulic chamber 82 is formed in the flange portion 72b. The communication hole 44 communicates so that the radial passage connecting to the first hydraulic chamber 81 and the axial passage connecting to the second hydraulic chamber 82 are orthogonal to each other.
In the present embodiment, the communication holes 44 are formed at two places, but in FIG. 10, the communication holes 44 are displayed at one place due to the cut surface. However, the number of the communication holes 44 may be one, or may be formed by a plurality of three or more.

The end surface of the body portion 72a (the surface opposite to the flange portion 72b) is in contact with the pneumatic chamber 80b. Therefore, on the inner peripheral surface side of the through hole formed in the body portion 72a, the oil OL of the first hydraulic chamber 81 passes between the guide rod 31 and is prevented from flowing out to the pneumatic chamber 80b. 77 is arranged.
Further, the outer peripheral surface on the tip end side of the inner cylinder portion 41 is in contact with the second hydraulic chamber 82, and the body portion 72a is arranged inside the tip end side of the inner cylinder portion 41. Therefore, a seal member 76 is provided on the outer peripheral surface of the body portion 72a so that the oil OL of the second hydraulic chamber 82 does not flow out to the pneumatic chamber 80b.

In the second embodiment, since the pneumatic chamber 80b is formed between the inside of the guide rod 31 and the pneumatic supply rod 22, the system for the return route connected to the pneumatic chamber 80b has the same pneumatic pressure as the system for the outward route. It is formed on the supply rod 22. Therefore, the second pneumatic supply path 24 (for the outward path) and the fourth pneumatic supply path 95 (for the return path) are formed outside the central axis C so as not to interfere with each other (see FIG. 6). ..

On the other hand, in the fourth embodiment, the inner peripheral surface of the guide rod 31 is brought into contact with the pneumatic supply rod 22 to form a pneumatic chamber 80b between the outer side of the guide rod 31 and the inner cylindrical portion 41. ing. As a result, the distance between the guide rod 31 and the inner cylindrical portion 41, that is, the radial width of the body portion 72a disposed between them (= (inner diameter of the inner cylindrical portion 41-outer diameter of the guide rod 31) / 2) can be widely secured.
Therefore, in the present embodiment, the system for the return path communicating with the pneumatic chamber 80b is formed so as to penetrate the intermediate cylinder 72 instead of the inside of the pneumatic supply rod 22.
That is, a through hole 74 is formed in a direction parallel to the central axis C of the intermediate cylinder 72, and a through hole 75 communicating the through hole 74 and the through hole 75 of the lid 21 is formed in the outer cylinder lid 12. A sixth pneumatic supply path 99 is formed.

Since the sixth pneumatic supply path 99 penetrates the intermediate cylinder 72 located outside the pneumatic supply rod 22, the fourth pneumatic supply path 95 formed in the lid 21 is the pneumatic supply rod. It is formed radially outside the 22.
Further, in the present embodiment, since the sixth pneumatic supply path 99 is formed on the outside of the pneumatic supply rod 22, the second pneumatic supply path 24 for the outbound system is the central axis of the pneumatic supply rod 22. It is formed on C.

As shown in FIG. 10, in order to prevent supply air AR leakage on the sixth pneumatic supply passage 99, at the connection point between the fourth pneumatic supply passage 95 of the lid 21 and the through hole 75 of the outer cylinder lid 12. The seal member 79 is arranged, and the seal member 78 is arranged at the connection point between the through hole 75 of the outer cylinder lid 12 and the through hole 74 of the intermediate cylinder 72.

Also in this embodiment, pressure is applied in the retracting direction (to the left in the drawing) to the second piston 50 that has received the oil pressure from the second hydraulic chamber 82, and when the oil pressure becomes smaller, the second piston 50 is retracted. A coil spring 71 for returning to the direction is arranged.
However, in the first to third embodiments, one large-diameter coil spring 71 having the same inner diameter as the outer diameter of the output cylindrical portion 51 is arranged, whereas in the present embodiment, the outer cylinder portion 11 and the output Three or more small-diameter coil springs 71 having substantially the same width and outer diameter as the cylindrical portion 51 are arranged at equal intervals.
Recesses for fixing the small-diameter coil spring 71 are formed at positions facing each other of the second piston 50 and the lid 60.
Instead of arranging a plurality of small-diameter coil springs 71, one large-diameter coil spring 71 may be arranged as in the first embodiment or the like.

Next, a method for manufacturing the air-hydro cylinder 1 according to the fourth embodiment will be described.
11 and 12 show the assembly procedure of the air-hydro cylinder 1 in the fourth embodiment.
The following assembly procedures (a) to (f) correspond to FIGS. 11 (a) to 11 (c) and FIGS. 12 (d) to 12 (f).
(A) First, the seal member 25 is set on the pneumatic supply rod 22 of the pneumatic supply unit 20, and the seal member 79 is set on the lid 21. Further, the seal member 78 and the seal member 18 are set on the outer cylinder lid 12 of the outer cylinder 10.
Then, the pneumatic supply rod 22 is inserted into the through hole 13 of the outer cylinder 10 to bring the outer cylinder lid 12 and the lid 21 into contact with each other. Then, from the lid 21 side, the lid 21 and the outer cylinder lid 12 are fixed with a plurality of bolts 26. As a result, the outer cylinder 10 and the pneumatic supply unit 20 are fixed.

(B) Next, the seal member 77 is set on the inner peripheral surface of the body portion 72a, and the seal member 76 is set on the outer peripheral surface.
Then, the intermediate cylinder 72 is inserted into the outer cylinder 10 while sliding the outer peripheral surface of the flange portion 72b on the inner peripheral surface of the outer cylinder portion 11. At the same time, the pneumatic supply rod 22 inserted into the outer cylinder 10 inserts the through hole of the intermediate cylinder 72.

(C) Next, the inner peripheral sealing member 32 is set on the inner peripheral surface of the first piston 30, and the outer peripheral sealing member 33 is set on the outer peripheral surface.
Then, the pneumatic supply rod 22 is inserted into the through hole of the first piston 30 and the guide rod 31. At this time, the tip of the guide rod 31 is arranged between the pneumatic supply rod 22 and the intermediate cylinder 72 so as to be located on the lid 21 side of the seal member 77.
Then, the hooking nut 27 for hooking the inserted first piston 30 is screwed into the tip of the pneumatic supply rod 22.

(D) Next, the first piston 30 and the body portion 72a are inserted into the inner cylinder portion 41 of the inner cylinder 40, and the inner cylinder portion 41 and the intermediate cylinder 72 are screwed and fixed by the screw portion 73.
(E) Next, the inner peripheral sealing member 54 and the outer peripheral sealing member 55 are set on the second piston 50, and the inner cylindrical portion 41 and the lid portion 43 of the inner cylinder 40 are set in the second piston 50 and the output cylindrical portion 51. To insert.
Then, oil OL is injected from the oil supply hole 14 into the second hydraulic chamber 82, the communication hole 44, and the first hydraulic chamber 81, and sealed with the sealing screw 15.

(F) Next, the coil spring 71 is set by inserting one end side of the small-diameter coil spring 71 into a plurality of recesses formed in the second piston 50.
Then, the output cylinder portion 51 is passed through the hole 61 of the lid 60 so that the other end side of each coil spring 71 enters each recess formed in the lid 60, and the lid 60 is fixed to the outer cylinder 10 with four bolts 63. do.
The pneumatic pipe joint 28 may be attached at any stage of (a) to (f).
Further, in the present embodiment, the case where the oil supply holes 14 are formed at one place has been described, but there may be a plurality of oil supply holes 14. In this case, when injecting oil from one oil supply hole 14, if the sealing screw 15 is not attached to the other oil supply hole 14 and is opened, the internal air can easily escape and the oil lubrication work can be easily performed. ..

Next, the operation of the air-hydro cylinder 1 of the fourth embodiment will be described.
FIG. 13 is an explanatory view showing a cross section of a moving state of each part accompanying the movement of the pneumatic piston in the air hydro type cylinder 1 of the fourth embodiment.
In the following operation description, as in the description of the other embodiments, from the viewpoint of the operation direction of the output cylindrical portion 51, the left direction will be described as the retracting direction and the right direction will be described as the output direction toward FIG. 13.

When the first piston 30 is advanced in the retracting direction, the supply air AR in the pneumatic chamber 80b is the third pneumatic supply passage 94, the fourth pneumatic supply passage 95, and the sixth in the start state of FIG. 13A. The end of the flow path of a hose (not shown) connected to the pneumatic piping joint 98 is opened to the atmosphere so that the hose can flow out through the pneumatic supply path 99.
In this state, the supply air AR is supplied from the pneumatic piping joint 28. This supply air AR passes through the first pneumatic supply passage 23 and the second pneumatic supply passage 24, and is supplied to the pneumatic chamber 80a.
As described above, when the supply air AR is supplied to the pneumatic chamber 80a, the pneumatic chamber 80b side is opened, so that the first piston 30 is pushed by the supply air AR pressure of the pneumatic chamber 80a and moves in the retracting direction. ..
In the present embodiment, the area of the tip of the guide rod 31 (projected area S1 of the guide rod 31 in the first hydraulic chamber 81) is smaller than the projected area Sa of the first piston 30 in the pneumatic chamber 80a as compared with the second embodiment. Since it is formed, a larger amplified input pressure can be applied to the first hydraulic chamber 81.
Therefore, as the first piston 30 moves, the guide rod 31 also moves in the retracting direction, so that a large input pressure is applied to the first hydraulic chamber 81 and its volume is reduced.

By reducing the volume of the first hydraulic chamber 81, the oil pressure of the second hydraulic chamber 82 is amplified as described in the second embodiment, and the second piston 50 and the output cylindrical portion 51 move in the output direction. It moves and becomes the state shown in FIG. 13 (b).
In the present embodiment, since the projected area S1 of the guide rod 31 in the first hydraulic chamber 81 is formed to be small, the projected area S2 with respect to the projected area S1 (projected area S2 of the second piston 50 in the second hydraulic chamber 82). The ratio of the above becomes large, and a larger thrust force than that of the second embodiment can be output from the output cylindrical portion 51.

Next, a case where the second piston 50 and the output cylindrical portion 51 are retracted from the state shown in FIG. 13B will be described.
In this case, the supply air AR in the pneumatic chamber 80a is connected to the pneumatic pipe joint 28 so as to be able to flow out to the outside through the first pneumatic supply passage 23 and the second pneumatic supply passage 24. Do not open the end of the hose flow path to the atmosphere.
Then, the supply air AR is supplied from the pneumatic pipe joint 98 to the pneumatic chamber 80b via the third pneumatic supply passage 94, the fourth pneumatic supply passage 95, and the sixth pneumatic supply passage 99.
When the supply air AR is supplied into the pneumatic chamber 80b, the pressure on the pneumatic chamber 80b side becomes higher than that on the pneumatic chamber 80a side due to the supply pressure, and the first piston 30 moves in the output direction (right side in the drawing). The volume of the second hydraulic chamber 82 returns to the original size, and the second piston 50 and the output cylindrical portion 51 also return to the starting position when the hydraulic pressure drops.

According to the double-acting air-hydro cylinder 1 in the fourth embodiment described above, the following effects can be obtained.
(1) The projected area Sa on the plane perpendicular to the central axis C direction on the surface where the end surface of the first piston 30 is in contact with the pneumatic chamber 80a, and the surface where the tip surface of the guide rod 31 is in contact with the oil OL in the first hydraulic chamber 81. The area ratio with the projected area S1 on the plane perpendicular to the central axis C direction can be increased, and the input pressure to the hydraulic chamber can be further increased.
(2) Further, the area ratio between the projected area S1 on the vertical surface where the tip surface of the guide rod 31 is in contact with the oil OL in the first hydraulic chamber 81 and the projected area S2 in which the second piston 50 is in contact with the second hydraulic chamber 82. It can be made larger than, and the hydraulic output can be made larger.
That is, even if the radial width (= (outer diameter − inner diameter) / 2) of the first hydraulic chamber 81 is the same as that of the second embodiment, the fourth embodiment has an inner diameter (outer diameter). Is small, so that the projected area S1 with respect to the first hydraulic chamber 81 can be reduced.
Therefore, since the area ratio and the projected area Sa / projected area S1 are larger than those in the second embodiment, the hydraulic chamber (first hydraulic chamber 81, second hydraulic chamber 82, communication hole) is air-pressured. 44) It is possible to increase the expansion rate of the force for pressing.
(3) Further, since the projected area S2 / projected area S1 is also configured to be large, the thrust expansion rate in the hydraulic chamber can be increased.
(4) Further, the projected area Sb on the plane perpendicular to the central axis C direction on the surface of the first piston 30 in contact with the pneumatic chamber 80b can be made larger than in the case of the second embodiment. As a result, the first piston 30 can be smoothly returned to the initial state position.

1 Air hydro cylinder (fluid pressure cylinder)
10 Outer cylinder 11 Outer cylinder 12 Outer cylinder lid 13 Through hole 14 Oil supply hole 15 Sealing screw 16 Sealing member 17 Bolt 18 Sealing member 20 Pneumatic supply part 21 Lid 22 Pneumatic supply rod 23 1st pneumatic supply path 24 2nd pneumatic supply path 25 Sealing member 26 Bolt 27 Hanging nut 28 Pneumatic piping joint 29 Through hole 30 1st piston 31 Guide rod 32 Inner peripheral sealing member 33 Outer peripheral sealing member 40 Inner cylinder 41 Inner cylindrical part 42 Flange 43 Lid Part 44 Communication hole 46 Bolt 50 Second piston 51 Output cylindrical part 52 Through hole 54 Inner circumference sealing member 55 Outer peripheral sealing member 60 Lid 61 Hole 63 Bolt 70, 71 Coil spring 72 Intermediate cylinder 72a Body 72b Flange 73 Threaded part 74, 75 Through hole 76-79 Sealing member 80 Pneumatic chamber (first fluid chamber)
81 1st hydraulic chamber 82 2nd hydraulic chamber 90 Intermediate cylinder 91 Gap 94 3rd pneumatic supply path 95 4th pneumatic supply path 96 5th pneumatic supply path 97 Embedded plug 98 Pneumatic piping joint 99 6th pneumatic supply Road C center axis (predetermined direction)
AR supply air (supply fluid)
OL oil (internal fluid)

Claims (9)

With the housing
A first fluid chamber formed in the housing and filled with the first fluid,
A second fluid chamber formed in the housing and filled with the second fluid,
A first piston that partitions the first fluid chamber and the second fluid chamber, moves in the axial direction of the housing under the pressure of the first fluid, and pressurizes the second fluid.
Is arranged radially outward of the first piston, an annular moving said pressurized by the first piston receiving thrust of amplified said second fluid to the large pressure at Rukoto in the axial direction of the housing With the second piston
An output means formed on the second piston and outputting the amplified thrust of the second fluid to the outside is provided.
The second fluid chamber is formed so that the surface of the first piston that pressurizes the second fluid and the surface of the second piston that receives the pressure of the second fluid are in the same direction.
A fluid pressure cylinder characterized by that. With the housing
A first fluid chamber formed in the housing and filled with the first fluid,
A second fluid chamber formed in the housing and filled with the second fluid,
A first piston that partitions the first fluid chamber and the second fluid chamber, moves in the axial direction of the housing under the pressure of the first fluid, and pressurizes the second fluid.
An annular second piston that is disposed outside in the radial direction of the first piston and moves in the axial direction of the housing under the pressure of the second fluid pressurized by the first piston .
A first fluid supply path that passes through the inside of the first piston in the radial direction, communicates with the first fluid chamber, and supplies the first fluid to the first fluid chamber is provided.
The second fluid chamber is formed so that the surface of the first piston that pressurizes the second fluid and the surface of the second piston that receives the pressure of the second fluid are in the same direction.
A fluid pressure cylinder characterized by that. The inner cylinder portion disposed inside in the radial direction of the housing and the inner cylinder portion.
A central rod disposed inside in the radial direction of the inner cylinder portion is provided.
The first fluid supply path is formed in the central rod and is formed.
The first piston is disposed between the central rod and the inner cylinder portion.
The second piston is disposed between the inner cylinder portion and the housing.
The fluid pressure cylinder according to claim 2. The first fluid is a compressible fluid or an incompressible fluid.
The second fluid is a compressible fluid or an incompressible fluid.
Fluid pressure cylinder as claimed in any one of claims of claims 3, characterized in that. With the housing
A first fluid chamber formed in the housing and filled with the first fluid,
A second fluid chamber formed in the housing and filled with the second fluid,
A first piston that partitions the first fluid chamber and the second fluid chamber, moves in the axial direction of the housing under the pressure of the first fluid, and pressurizes the second fluid.
An annular second piston that is disposed outside in the radial direction of the first piston and moves in the axial direction of the housing under the pressure of the second fluid pressurized by the first piston .
A third fluid chamber formed on the opposite side of the first fluid chamber to the first piston in the axial direction and filled with the first fluid, and a third fluid chamber.
A first fluid supply path that passes through the inside of the first piston in the radial direction and supplies the first fluid to the first fluid chamber,
A second fluid supply path for supplying the first fluid to the third fluid chamber is provided.
The second fluid chamber is formed so that the surface of the first piston that pressurizes the second fluid and the surface of the second piston that receives the pressure of the second fluid are in the same direction .
The first piston moves in the axial direction due to the pressure difference between the first fluid in the first fluid chamber and the third fluid chamber.
A fluid pressure cylinder characterized by that. The inner cylinder portion disposed inside in the radial direction of the housing and the inner cylinder portion.
A central rod disposed inside in the radial direction of the inner cylinder portion is provided.
The first fluid supply path is formed in the central rod and is formed.
The first piston extends toward the second fluid chamber side, includes a cylindrical guide rod that pressurizes the second fluid, and is disposed between the central rod and the inner cylinder portion.
The second piston is disposed between the inner cylinder portion and the housing.
The fluid pressure cylinder according to claim 5. The third fluid chamber is arranged inside the guide rod and between the center rod and the guide rod.
The fluid pressure cylinder according to claim 6. The third fluid chamber is arranged outside the guide rod and between the inner cylinder portion.
The fluid pressure cylinder according to claim 6. The second fluid chamber is
A first chamber in which the second fluid inside contacts the first piston, and
A second chamber formed on the outer side in the radial direction of the first chamber, in which the second fluid inside is in contact with the second piston, and
A communication passage connecting the first room and the second room,
The fluid pressure cylinder according to any one of claims 1 to 8, wherein the fluid pressure cylinder is provided.

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