JP6865687B2 - Method for manufacturing polyimide film using particles with pores and polyimide film with low dielectric constant - Google Patents
Method for manufacturing polyimide film using particles with pores and polyimide film with low dielectric constant Download PDFInfo
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- 239000002245 particle Substances 0.000 title claims description 116
- 229920001721 polyimide Polymers 0.000 title claims description 79
- 239000011148 porous material Substances 0.000 title claims description 70
- 238000004519 manufacturing process Methods 0.000 title claims description 50
- 238000000034 method Methods 0.000 title description 11
- 239000003795 chemical substances by application Substances 0.000 claims description 41
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 32
- 239000004642 Polyimide Substances 0.000 claims description 16
- 108010025899 gelatin film Proteins 0.000 claims description 16
- 239000002243 precursor Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 49
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical compound CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 18
- 239000000126 substance Substances 0.000 description 16
- 239000000203 mixture Substances 0.000 description 14
- 239000000377 silicon dioxide Substances 0.000 description 12
- 229920005575 poly(amic acid) Polymers 0.000 description 11
- 239000003495 polar organic solvent Substances 0.000 description 10
- 239000012024 dehydrating agents Substances 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 8
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 8
- 239000003054 catalyst Substances 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- 229910052731 fluorine Inorganic materials 0.000 description 8
- 239000011737 fluorine Substances 0.000 description 8
- 239000009719 polyimide resin Substances 0.000 description 8
- 239000011259 mixed solution Substances 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- ITQTTZVARXURQS-UHFFFAOYSA-N 3-methylpyridine Chemical compound CC1=CC=CN=C1 ITQTTZVARXURQS-UHFFFAOYSA-N 0.000 description 6
- 238000009835 boiling Methods 0.000 description 6
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 description 5
- 239000002253 acid Substances 0.000 description 5
- 150000004985 diamines Chemical class 0.000 description 5
- 229920001477 hydrophilic polymer Polymers 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 3
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229920006015 heat resistant resin Polymers 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- GEYOCULIXLDCMW-UHFFFAOYSA-N 1,2-phenylenediamine Chemical compound NC1=CC=CC=C1N GEYOCULIXLDCMW-UHFFFAOYSA-N 0.000 description 1
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 1
- 125000001140 1,4-phenylene group Chemical group [H]C1=C([H])C([*:2])=C([H])C([H])=C1[*:1] 0.000 description 1
- HWZGZWSHHNWSBP-UHFFFAOYSA-N 3-(2,3-diaminophenoxy)benzene-1,2-diamine Chemical compound NC1=CC=CC(OC=2C(=C(N)C=CC=2)N)=C1N HWZGZWSHHNWSBP-UHFFFAOYSA-N 0.000 description 1
- ZBMISJGHVWNWTE-UHFFFAOYSA-N 3-(4-aminophenoxy)aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(N)=C1 ZBMISJGHVWNWTE-UHFFFAOYSA-N 0.000 description 1
- JVERADGGGBYHNP-UHFFFAOYSA-N 5-phenylbenzene-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C(C(=O)O)=CC(C=2C=CC=CC=2)=C1C(O)=O JVERADGGGBYHNP-UHFFFAOYSA-N 0.000 description 1
- -1 Polytetrafluoroethylene Polymers 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000004984 aromatic diamines Chemical class 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000445 field-emission scanning electron microscopy Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000010528 free radical solution polymerization reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 229940018564 m-phenylenediamine Drugs 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1003—Preparatory processes
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
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- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
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- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1067—Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
- C08G73/1071—Wholly aromatic polyimides containing oxygen in the form of ether bonds in the main chain
-
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- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K7/00—Use of ingredients characterised by shape
- C08K7/22—Expanded, porous or hollow particles
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- C08K7/00—Use of ingredients characterised by shape
- C08K7/22—Expanded, porous or hollow particles
- C08K7/24—Expanded, porous or hollow particles inorganic
- C08K7/26—Silicon- containing compounds
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- C08G2261/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
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- C08J2379/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
- C08J2379/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
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Description
本発明は、気孔を有する粒子を用いてポリイミドフィルムを製造する方法、および前記方法によって製造された低誘電率のポリイミドフィルムに関するものである。 The present invention relates to a method for producing a polyimide film using particles having pores, and a polyimide film having a low dielectric constant produced by the above method.
一般的に、ポリイミド(PI)樹脂とは、芳香族ジアンヒドリドと、芳香族ジアミンまたは芳香族ジイソシアネートとから、溶液重合を用いてポリアミック酸誘導体を製造した後、高温における閉環脱水反応によりイミド化して製造される高耐熱性樹脂のことを指す。 Generally, a polyimide (PI) resin is obtained by producing a polyamic acid derivative from aromatic dianhydride and aromatic diamine or aromatic diisocyanate by solution polymerization, and then imidizing it by a ring-closing dehydration reaction at a high temperature. Refers to the highly heat-resistant resin that is manufactured.
ポリイミド樹脂は、不溶、不融の超高耐熱性樹脂であって、耐熱酸化性、耐熱特性、耐放射線性、低温特性、耐薬品性などに優れた特性を有しており、自動車材料、航空素材、宇宙船素材などの耐熱先端素材および絶縁コーティング剤、絶縁膜、半導体、TFT−LCDの電極保護膜などの電子材料において幅広い分野に用いられている。 Polyimide resin is an insoluble and insoluble ultra-high heat resistant resin, and has excellent properties such as heat oxidation resistance, heat resistance, radiation resistance, low temperature characteristics, and chemical resistance, and is used for automobile materials and aviation. It is used in a wide range of fields in materials, heat-resistant advanced materials such as spacecraft materials, and electronic materials such as insulating coating agents, insulating films, semiconductors, and electrode protective films for polyimide-LCDs.
最近では、高度情報化社会に対応する大量の情報を蓄積して、このような情報を高速で処理し、高速で転送するための電子機器において、これらに用いられるポリイミド樹脂にも高性能化、特に高周波化に対応する電気的特性として、低誘電率化および低誘電正接化が求められている。 Recently, in electronic devices for accumulating a large amount of information corresponding to the highly information-oriented society, processing such information at high speed, and transferring it at high speed, the polyimide resin used for these has also been improved in performance. In particular, low dielectric constant and low dielectric loss tangent are required as electrical characteristics corresponding to high frequencies.
ポリイミド樹脂の低誘電率化の試みとしては、例えば、特許文献1において、有機溶媒に対して可溶性であるポリイミド樹脂の前駆体中に親水性ポリマーを分散させ、このような親水性ポリマーを焼成または溶媒抽出によって除去することにより多孔質化して、多孔質ポリイミド樹脂を得ることが提案されている。しかし、このように親水性ポリマーを除去して多孔質化する場合は、親水性ポリマーがポリイミド樹脂の前駆体中に分散されているミクロ相分離構造の形態が維持されたまま穴が形成されるのが理想であるが、親水性ポリマーをそのまま焼成または溶媒抽出によって除去した後にイミド化すると、穴が平らまたは閉塞されて空孔率が理想値よりも小さくなり、誘電率を十分に低下させることができないという問題を招く。 As an attempt to reduce the dielectric constant of the polyimide resin, for example, in Patent Document 1, a hydrophilic polymer is dispersed in a precursor of a polyimide resin that is soluble in an organic solvent, and such a hydrophilic polymer is calcined or fired. It has been proposed to obtain a porous polyimide resin by removing it by solvent extraction to make it porous. However, when the hydrophilic polymer is removed to make it porous in this way, holes are formed while maintaining the morphology of the microphase-separated structure in which the hydrophilic polymer is dispersed in the precursor of the polyimide resin. Ideally, if the hydrophilic polymer is removed as it is by firing or solvent extraction and then imidized, the holes will be flattened or closed, the porosity will be smaller than the ideal value, and the dielectric constant will be sufficiently reduced. Invites the problem of not being able to.
特許文献2は、軟性金属積層板を製造するにおいて、フッ素粒子を使用する構成について開示しているが、その方法はフッ素粒子の単分子の適用に関するものであり、前記フッ素粒子は分散され難い欠点がある。 Patent Document 2 discloses a configuration in which fluorine particles are used in producing a flexible metal laminated plate, but the method relates to the application of a single molecule of fluorine particles, and the drawback is that the fluorine particles are difficult to disperse. There is.
そこで、本発明者らは、空気が有する電気的特性を、気孔を有する粒子により実現して、既存のポリイミドフィルムが有する誘電率よりも低い誘電率を実現するのは無論のこと、製造工程において前記気孔を有する粒子の分散性および沈降現象を改善したポリイミドフィルムの製造方法を開発することにより、本発明を完成した。 Therefore, it goes without saying that the present inventors realize the electrical characteristics of air by particles having pores to realize a dielectric constant lower than that of an existing polyimide film, of course, in the manufacturing process. The present invention has been completed by developing a method for producing a polyimide film in which the dispersibility and sedimentation phenomenon of the particles having pores are improved.
したがって、本発明の目的は、気孔を有する粒子を用いてポリイミドフィルムを製造する方法および前記方法により製造された低誘電率のポリイミドフィルムを提供するものである。 Therefore, an object of the present invention is to provide a method for producing a polyimide film using particles having pores and a polyimide film having a low dielectric constant produced by the above method.
前記目的を達成するために、本発明は、
1)ポリイミド前駆体を製造する段階と、
2)前記ポリイミド前駆体に、気孔を有する粒子を含むイミド化剤を混合してゲルフィルムを製造する段階と、
3)前記ゲルフィルムを熱処理してイミド化する段階とを含み、
この際、前記気孔を有する粒子が、10μm以下の平均粒径を有し、その粒子固有物質の真密度に対して95%以下の真密度を有することを特徴とする、ポリイミドフィルムの製造方法を提供する。
In order to achieve the above object, the present invention
1) The stage of manufacturing the polyimide precursor and
2) A step of producing a gel film by mixing the polyimide precursor with an imidizing agent containing particles having pores.
3) Including the step of heat-treating the gel film to imidize it.
At this time, a method for producing a polyimide film, wherein the particles having pores have an average particle size of 10 μm or less and a true density of 95% or less with respect to the true density of the particle-specific substance. provide.
前記他の目的を達成するために本発明は、気孔を有する粒子を含むポリイミドフィルムであって、前記気孔を有する粒子が、10μm以下の平均粒径を有し、その粒子固有物質の真密度に対して95%以下の真密度を有する、ポリイミドフィルムを提供する。 In order to achieve the other object, the present invention is a polyimide film containing particles having pores, and the particles having pores have an average particle size of 10 μm or less, and the true density of the particle-specific substance is adjusted. A polyimide film having a true density of 95% or less is provided.
本発明によると、気孔を有する粒子を利用することにより、誘電率を最小化したポリイミドフィルムを製造することができるので、電子機器等の内部絶縁体、緩衝材、回路基板などに有効に用いることができる。 According to the present invention, a polyimide film having a minimized dielectric constant can be produced by using particles having pores, so that it can be effectively used for an internal insulator of an electronic device, a cushioning material, a circuit board, or the like. Can be done.
本発明は、1)ポリイミド前駆体を製造する段階と、2)前記ポリイミド前駆体に気孔を有する粒子を含むイミド化剤を混合してゲルフィルムを製造する段階と、3)前記ゲルフィルムを熱処理してイミド化する段階とを含み、この時、前記気孔を有する粒子が、10μm以下の平均粒径を有し、その粒子固有物質の真密度に対して95%以下の真密度を有することを特徴とする、ポリイミドフィルムの製造方法を提供する。 The present invention includes 1) a step of producing a polyimide precursor, 2) a step of mixing an imidizing agent containing particles having pores in the polyimide precursor to produce a gel film, and 3) a heat treatment of the gel film. At this time, the particles having pores have an average particle size of 10 μm or less and a true density of 95% or less with respect to the true density of the particle-specific substance. Provided is a method for producing a polyimide film, which is a feature.
本発明に係るポリイミドフィルムの製造方法は、ポリイミド前駆体を製造する段階を含む。 The method for producing a polyimide film according to the present invention includes a step of producing a polyimide precursor.
本発明に用いられるポリイミド前駆体は、イミド化によってポリイミド樹脂になり得るものであれば、如何なるものでも用いることができる。例えば、通常の方法により、酸二無水物成分とジアミン成分とを有機溶媒の存在下で共重合して得られたポリアミック酸で有り得る。 Any polyimide precursor used in the present invention can be used as long as it can be made into a polyimide resin by imidization. For example, it can be a polyamic acid obtained by copolymerizing an acid dianhydride component and a diamine component in the presence of an organic solvent by a usual method.
前記酸二無水物成分および前記ジアミン成分は、それぞれポリアミック酸の調製に通常用いられるものの中から適宜選択することができる。 The acid dianhydride component and the diamine component can be appropriately selected from those usually used for preparing a polyamic acid.
前記酸二無水物成分としては、例えば、ビフェニルテトラカルボン酸二無水物(BPDA)またはその誘導体、ピロメリット酸二無水物(PMDA)、3,3’4,4’−ベンゾフェノンテトラカルボン酸二無水物、p−フェニレンビストリメリット酸二無水物等が挙げられるが、本発明はこれに限定されるものではない。 Examples of the acid dianhydride component include biphenyltetracarboxylic dianhydride (BPDA) or a derivative thereof, pyromellitic dianhydride (PMDA), and 3,3'4,4'-benzophenonetetracarboxylic dianhydride. Examples thereof include p-phenylene bistrimellitic dianhydride and the like, but the present invention is not limited thereto.
前記ジアミン成分としては、例えば、パラフェニレンジアミン(PPDA)、ジアミノフェニルエーテル、o−フェニレンジアミン、m−フェニレンジアミン、4,4’−ジアミノジフェニルエーテル(ODA)、3,4’−ジアミノジフェニルエーテル、2,4’−ジアミノジフェニルエーテル等が挙げられるが、本発明はこれに限定されるものではない。 Examples of the diamine component include para-phenylenediamine (PPDA), diaminophenyl ether, o-phenylenediamine, m-phenylenediamine, 4,4'-diaminodiphenyl ether (ODA), 3,4'-diaminodiphenyl ether, 2, Examples thereof include, but are not limited to, 4'-diaminodiphenyl ether.
酸二無水物成分およびジアミン成分は、1:0.9〜1:1.1のモル比で混合することができる。 The acid dianhydride component and the diamine component can be mixed in a molar ratio of 1: 0.9 to 1: 1.1.
前記有機溶媒としては、例えば、N、N’−ジメチルホルムアミド(DMF)、N、N’−ジメチルアセトアミド(DMAc)、N−メチルピロリドン(NMP)等が挙げられるが、本発明はこれに限定されるものではない。 Examples of the organic solvent include N, N'-dimethylformamide (DMF), N, N'-dimethylacetamide (DMAc), N-methylpyrrolidone (NMP) and the like, but the present invention is limited thereto. It's not something.
本発明に係るポリイミドフィルムの製造方法は、前記ポリイミド前駆体に、気孔を有する粒子を含むイミド化剤を混合してゲルフィルムを製造する段階を含む。 The method for producing a polyimide film according to the present invention includes a step of producing a gel film by mixing the polyimide precursor with an imidizing agent containing particles having pores.
まず、前記ポリイミド前駆体、すなわち、ポリアミック酸にイミド化剤を均一に混合し、これに、気孔を有する粒子を均一に分散および混合した後、イミド化樹脂を製造する。 First, an imidizing agent is uniformly mixed with the polyimide precursor, that is, a polyamic acid, and particles having pores are uniformly dispersed and mixed therein, and then an imidized resin is produced.
前記イミド化剤は、化学的硬化を起こすために通常用いられる物質であれば如何なるものでも使用することができる。前記イミド化剤は、例えば、脱水剤、触媒、極性有機溶剤、およびこれらの混合物からなる群より選択することができ、好ましくは脱水剤、触媒および極性有機溶剤の混合溶液であり得る。 The imidizing agent can be any substance commonly used to cause chemical curing. The imidizing agent can be selected from the group consisting of, for example, a dehydrating agent, a catalyst, a polar organic solvent, and a mixture thereof, and may be preferably a mixed solution of a dehydrating agent, a catalyst, and a polar organic solvent.
より具体的に、前記イミド化剤は無水酢酸などの脱水剤と、ピリジン、β−ピコリン、イソキノリンおよびこれらの混合物からなる群より選択される第三級アミン類などの触媒と、N−メチルピロリドン、ジメチルホルムアミド、ジメチルアセトアミドおよびこれらの混合物からなる群より選択される極性有機溶剤とを含む混合溶液であり得る。 More specifically, the imidizing agent is a dehydrating agent such as acetic anhydride, a catalyst such as tertiary amines selected from the group consisting of pyridine, β-picoline, isoquinoline and mixtures thereof, and N-methylpyrrolidone. , Dimethylformamide, dimethylacetamide and a mixture of polar organic solvents selected from the group consisting of mixtures thereof.
前記イミド化剤は、ポリイミド前駆体100重量部を基準として、30重量部〜70重量部、好ましくは40重量部〜55重量部で使用することができ、ポリイミド前駆体の種類および製造されるポリイミドフィルムの厚さなどによって変わり得る。 The imidizing agent can be used in an amount of 30 parts by weight to 70 parts by weight, preferably 40 parts by weight to 55 parts by weight based on 100 parts by weight of the polyimide precursor, and the type of polyimide precursor and the polyimide to be produced. It may change depending on the thickness of the film.
前記気孔を有する粒子は、平均粒径が10μm以下、好ましくは、1μm〜10μm、1μm〜7μmまたは2μm〜5μmであり得る。 The particles having pores may have an average particle size of 10 μm or less, preferably 1 μm to 10 μm, 1 μm to 7 μm, or 2 μm to 5 μm.
また、前記気孔を有する粒子は、気孔を含まないその粒子固有物質の真密度に対して95%以下、好ましくは30%〜95%、より好ましくは50%〜90%の真密度を有することができる。 Further, the particles having pores may have a true density of 95% or less, preferably 30% to 95%, more preferably 50% to 90% with respect to the true density of the particle-specific substance containing no pores. it can.
本発明において「真密度」とは、粒子の単位容積当たりの重さを意味するもので、粒子自体の密度のことを指し、「粒子固有物質」とは、粒子に気孔が存在しない物質のことを意味する。 In the present invention, the "true density" means the weight per unit volume of a particle, and refers to the density of the particle itself, and the "particle-specific substance" is a substance having no pores in the particle. Means.
前記気孔を有する粒子は、フィルムの総重量を基準にして、2重量%〜30重量%、好ましくは5重量%〜20重量%、例えば5重量%〜10重量%の量で含まれ得る。前記気孔を有する粒子の含有量が30重量%以下であればポリイミドフィルムの機械的物性が低下せず、2重量%以上であればポリイミドフィルムの低誘電率効果を実現することができる。 The particles having pores may be contained in an amount of 2% by weight to 30% by weight, preferably 5% by weight to 20% by weight, for example, 5% by weight to 10% by weight, based on the total weight of the film. When the content of the particles having pores is 30% by weight or less, the mechanical properties of the polyimide film are not deteriorated, and when it is 2% by weight or more, the low dielectric constant effect of the polyimide film can be realized.
前記気孔を有する粒子は、細孔を有する粒子であり、シリカ、アルミナ、チタニア、ゼオライトおよびこれらの混合物からなる群より選択される中空型またはメソ細孔(mesoporous)型の粒子でもよく、好ましくは、中空シリカであり得る。 The particles having pores are particles having pores, and may be hollow type or mesoporous type particles selected from the group consisting of silica, alumina, titania, zeolite and a mixture thereof, and preferably. , Can be hollow silica.
前記気孔を有する粒子は、粒子そのもので投入されることができ、イミド化樹脂内でより均一に分散および混合されることが望ましいので、極性有機溶剤に分散した分散液状またはコロイド状で投入されることもできる。 The particles having pores can be charged as particles themselves, and it is desirable that the particles are more uniformly dispersed and mixed in the imidized resin. Therefore, the particles are charged in a dispersed liquid or colloidal form dispersed in a polar organic solvent. You can also do it.
次いで、ポリアミック酸にイミド化剤を均一に混合し、これに気孔を有する粒子を均一に分散および混合した後、イミド化樹脂からゲルフィルムが製造され得る。 Next, an imidizing agent is uniformly mixed with the polyamic acid, and particles having pores are uniformly dispersed and mixed therein, and then a gel film can be produced from the imidized resin.
具体的に、前記イミド化樹脂は、支持体(例えば、ステンレス板、ガラス板、アルミ箔、循環ステンレスベルトまたはステンレスドラム等)に塗布した後、1次熱処理および乾燥して化学的に部分イミド化されたゲルフィルムに製造され得る。 Specifically, the imidized resin is applied to a support (for example, a stainless plate, a glass plate, an aluminum foil, a circulating stainless belt, a stainless drum, etc.), and then subjected to a primary heat treatment and dried to be chemically partially imidized. Can be produced in a stainless steel film.
前記化学的に部分イミド化するための1次熱処理過程は、100℃〜200℃で5分〜15分間行うことができる。 The primary heat treatment process for chemical partial imidization can be carried out at 100 ° C. to 200 ° C. for 5 to 15 minutes.
本発明に係るポリイミドフィルムの製造方法は、前記ゲルフィルムを熱処理してイミド化する段階を含む。 The method for producing a polyimide film according to the present invention includes a step of heat-treating the gel film to imidize it.
前記で製造された、化学的に部分イミド化されたゲルフィルムは、完全イミド化のために支持体から分離して2次熱処理をすることができる。 The chemically partially imidized gel film produced above can be separated from the support and subjected to a secondary heat treatment for complete imidization.
前記完全イミド化のための2次熱処理過程は、250℃〜850℃で5分〜25分間行うことができる。2次熱処理の際には、一定の張力下で熱処理することが、製膜過程において発生したフィルム内部の残留応力を除去することができるので好ましい。 The secondary heat treatment process for complete imidization can be carried out at 250 ° C. to 850 ° C. for 5 to 25 minutes. At the time of the secondary heat treatment, it is preferable to perform the heat treatment under a constant tension because the residual stress inside the film generated in the film forming process can be removed.
本発明の一実施様態によると、本発明は、ポリイミド前駆体としてポリアミック酸を調製する段階と、気孔を有する粒子が均一に分散されたイミド化剤を前記ポリアミック酸に混合してイミド化樹脂を製造する段階と、前記イミド化樹脂を支持体上に塗布し、1次熱処理および乾燥して、ゲルフィルムを製造する段階と、前記ゲルフィルムを2次熱処理してポリイミドフィルムを製造する段階とを含み、この時、前記気孔を有する粒子が、10μm以下の平均粒径を有し、その粒子固有物質の真密度に対して95%以下の真密度を有することを特徴とするポリイミドフィルムの製造方法を提供する。 According to one embodiment of the present invention, the present invention prepares an imidized resin by mixing a step of preparing a polyamic acid as a polyimide precursor and an imidizing agent in which particles having pores are uniformly dispersed with the polyamic acid. The stage of production, the stage of applying the imidized resin on the support, primary heat treatment and drying to produce a gel film, and the stage of secondary heat treatment of the gel film to produce a polyimide film. A method for producing a polyimide film, which comprises, at this time, the particles having pores have an average particle size of 10 μm or less and a true density of 95% or less with respect to the true density of the particle-specific substance. I will provide a.
一方、本発明は、気孔を有する粒子を含むポリイミドフィルムであって、前記気孔を有する粒子が、10μm以下の平均粒径を有し、その粒子固有物質の真密度に対して95%以下の真密度を有する、ポリイミドフィルムを提供する。 On the other hand, the present invention is a polyimide film containing particles having pores, and the particles having pores have an average particle size of 10 μm or less, and the true density is 95% or less with respect to the true density of the particle-specific substance. Provided is a polyimide film having a density.
具体的には、前記気孔を有する粒子を含むポリイミドフィルムは、ポリアミック酸および気孔を有する粒子を含むイミド化剤から合成したポリイミド化樹脂より得られ、前記気孔を有する粒子が、10μm以下の平均粒径を有し、その粒子固有物質の真密度に対して95%以下の真密度を有する、ポリイミドフィルムであり得る。 Specifically, the polyimide film containing the particles having pores is obtained from a polyimide resin synthesized from a polyamic acid and an imidizing agent containing particles having pores, and the particles having pores are average particles of 10 μm or less. It can be a polyimide film having a diameter and having a true density of 95% or less with respect to the true density of the particle-specific substance.
本発明に係るポリイミドフィルムは、5μm〜200μmの薄い厚さを有する。 The polyimide film according to the present invention has a thin thickness of 5 μm to 200 μm.
また、本発明に係るポリイミドフィルムは、1GHzで、3.0以下の誘電率、好ましくは2.0〜2.9の低い誘電率を示し、0.002未満の誘電正接、好ましくは0.0005〜0.001の誘電正接を示すので、電子機器等の内部絶縁体、緩衝材、回路基板等に有効に使用され得る。 Further, the polyimide film according to the present invention exhibits a dielectric constant of 3.0 or less, preferably a low dielectric constant of 2.0 to 2.9 at 1 GHz, and has a dielectric loss tangent of less than 0.002, preferably 0.0005. Since it exhibits a dielectric loss tangent of ~ 0.001, it can be effectively used for internal insulators of electronic devices, cushioning materials, circuit boards, and the like.
以下、本発明を下記実施例によりさらに詳細に説明する。但し、下記実施例は、本発明を例示するためだけのもので、本発明の範囲がこれらに限定されるものではない。 Hereinafter, the present invention will be described in more detail with reference to the following examples. However, the following examples are merely for exemplifying the present invention, and the scope of the present invention is not limited thereto.
(製造例)
<製造例1:ポリアミック酸溶液の製造>
0.5L反応器にジメチルホルムアミド(DMF)320gを入れ、温度を20℃に設定し、ジアミノジフェニルエーテル(ODA)27.59gを投入して溶解した後、ピロメリット酸二無水物(PMDA)を20.03gずつ2回投入後溶解した。溶解が終了すると、これにパラフェニレンジアミン(PPDA)3.97gを投入して30分間反応させた後、溶液をサンプリングして分子量を測定した。その後反応が完了すると、反応器の温度を30℃に昇温した後、PPDA 1.00gを投入して、[ジアミン]/[酸二無水物]のモル比を1:1に調節した。原料投入が完了すると、40℃で2時間の間十分に反応させてポリアミック酸溶液を得た。
(Manufacturing example)
<Production Example 1: Production of polyamic acid solution>
320 g of dimethylformamide (DMF) is placed in a 0.5 L reactor, the temperature is set to 20 ° C., 27.59 g of diaminodiphenyl ether (ODA) is added and dissolved, and then 20 pyromellitic dianhydride (PMDA) is added. It was dissolved after adding .03 g twice. When the dissolution was completed, 3.97 g of para-phenylenediamine (PPDA) was added thereto and reacted for 30 minutes, and then the solution was sampled and the molecular weight was measured. After that, when the reaction was completed, the temperature of the reactor was raised to 30 ° C., and then 1.00 g of PPDA was added to adjust the molar ratio of [diamine] / [acid dianhydride] to 1: 1. When the feeding of the raw materials was completed, the mixture was sufficiently reacted at 40 ° C. for 2 hours to obtain a polyamic acid solution.
<製造例2:気孔を有する粒子が添加されたイミド化剤の製造(1)>
イミド化剤に用いられる硬化用触媒としてβ−ピコリン(沸点144℃)2.8gと、脱水剤として無水酢酸21.2gと、極性有機溶剤としてジメチルホルムアミド(DMF)13.4gとの混合溶液に、中空シリカ(Hollow silica)の分散液13.4g(中空シリカ(白山鉄鋼社製VHSN−1000、粒子の平均粒径:3μm、粒子の平均気孔:200nm)固形分6%含有DMF混合液)を添加した後に撹拌して、気孔を有する粒子が添加されたイミド化剤50.8gを得た。
<Production Example 2: Production of an imidizing agent to which particles having pores are added (1)>
In a mixed solution of 2.8 g of β-picolin (boiling point of 144 ° C.) as a curing catalyst used as an imidizing agent, 21.2 g of acetic anhydride as a dehydrating agent, and 13.4 g of dimethylformamide (DMF) as a polar organic solvent. , 13.4 g of a dispersion of Hollow silica (Hollow silica (VHSN-1000 manufactured by Hakusan Steel Co., Ltd., average particle size of particles: 3 μm, average pores of particles: 200 nm), DMF mixture containing 6% solid content). After the addition, the mixture was stirred to obtain 50.8 g of an imidizing agent to which particles having pores were added.
<製造例3:気孔を有する粒子が添加されたイミド化剤の製造(2)>
イミド化剤に用いられる硬化用触媒としてβ−ピコリン(沸点144℃)2.8gと、脱水剤として無水酢酸21.2gと、極性有機溶剤としてDMF0.9gとの混合溶液に、中空シリカの分散液26.7g(中空シリカ(白山鉄鋼社製VHSN−1000、粒子の平均粒径:6μm、粒子の平均気孔:200nm)固形分6%含有DMF混合液)を添加した後に撹拌して、気孔を有する粒子が添加されたイミド化剤51.6gを得た。
<Production Example 3: Production of an imidizing agent to which particles having pores are added (2)>
Dispersion of hollow silica in a mixed solution of 2.8 g of β-picolin (boiling point of 144 ° C.) as a curing catalyst used as an imidizing agent, 21.2 g of acetic anhydride as a dehydrating agent, and 0.9 g of DMF as a polar organic solvent. After adding 26.7 g of a liquid (hollow silica (VHSN-1000 manufactured by Hakusan Steel Co., Ltd., average particle size of particles: 6 μm, average pores of particles: 200 nm) DMF mixed solution containing 6% solid content), the pores are closed. 51.6 g of an imidizing agent to which the particles having were added was obtained.
<製造例4:気孔を有しないシリカ粒子が添加されたイミド化剤の製造(1)>
イミド化剤に用いられる硬化用触媒としてβ−ピコリン(沸点144℃)2.8gと、脱水剤として無水酢酸21.2gと、極性有機溶剤としてDMF13.4gとの混合溶液に、球状シリカの分散液13.3g(球状シリカ((株)日本触媒製KEP−250、粒子の平均粒径:3μm、気孔なし)固形分6%含有DMF混合液)を添加した後に撹拌して、球状シリカ粒子が添加されたイミド化剤50.8gを得た。
<Production Example 4: Production of an imidizing agent to which silica particles having no pores are added (1)>
Dispersion of spherical silica in a mixed solution of 2.8 g of β-picolin (boiling point 144 ° C.) as a curing catalyst used as an imidizing agent, 21.2 g of acetic anhydride as a dehydrating agent, and 13.4 g of DMF as a polar organic solvent. After adding 13.3 g of the solution (spherical silica (KEP-250 manufactured by Nippon Catalyst Co., Ltd., average particle size of particles: 3 μm, no pores), DMF mixture containing 6% solid content), the mixture was stirred to obtain spherical silica particles. 50.8 g of the added imidizing agent was obtained.
<製造例5:気孔を有しないシリカ粒子が添加されたイミド化剤の製造(2)>
イミド化剤に用いられる硬化用触媒としてβ−ピコリン(沸点144℃)2.8gと、脱水剤として無水酢酸21.2gと、極性有機溶剤としてDMF0.9gとの混合溶液に、球状シリカ分散液26.7g(球状シリカ((株)日本触媒製KEP−250、粒子の平均粒径:3μm、気孔なし)固形分6%含有DMF混合液)を添加した後に撹拌して、球状シリカ粒子が添加されたイミド化剤51.6gを得た。
<Production Example 5: Production of an imidizing agent to which silica particles having no pores are added (2)>
A spherical silica dispersion in a mixed solution of 2.8 g of β-picolin (boiling point 144 ° C.) as a curing catalyst used as an imidizing agent, 21.2 g of acetic anhydride as a dehydrating agent, and 0.9 g of DMF as a polar organic solvent. After adding 26.7 g (spherical silica (KEP-250 manufactured by Nippon Catalyst Co., Ltd., average particle size of particles: 3 μm, no pores) DMF mixture containing 6% solid content), the mixture was stirred to add spherical silica particles. 51.6 g of the imidizing agent was obtained.
<製造例6:気孔を有しないフッ素粒子が添加されたイミド化剤の製造>
イミド化剤に用いられる硬化用触媒としてイソキノリン(沸点242℃)2.8gと、脱水剤として無水酢酸21.2gと、極性有機溶剤としてDMF0.9gとの混合溶液に、ポリテトラフルオロエチレン(PTFE)の分散液26.7g(ダイキン工業(株)製、フッ素粒子(平均粒径22μm、気孔なし)固形分6%含有DMF混合液)を添加した後に撹拌して、フッ素粒子が添加されたイミド化剤51.6gを得た。
<Production Example 6: Production of an imidizing agent to which fluorine particles having no pores are added>
Polytetrafluoroethylene (PTFE) is added to a mixed solution of 2.8 g of isoquinolin (boiling point 242 ° C.) as a curing catalyst used as an imidizing agent, 21.2 g of anhydrous acetic acid as a dehydrating agent, and 0.9 g of DMF as a polar organic solvent. ) (26.7 g) (manufactured by Daikin Industries, Ltd., DMF mixture containing fluorine particles (average particle size 22 μm, no pores) solid content 6%) was added and then stirred to add the fluorine particles to the imide. 51.6 g of the agent was obtained.
<製造例7:粒子を添加しないイミド化剤の製造>
イミド化剤に用いられる硬化用触媒としてβ−ピコリン(沸点144℃)3.3gと、脱水剤として無水酢酸21.5gと、極性有機溶剤としてDMF25.2gとを混合、撹拌して、イミド化剤50gを得た。
<Production Example 7: Production of imidizing agent without adding particles>
3.3 g of β-picoline (boiling point 144 ° C.) used as an imidizing agent, 21.5 g of acetic anhydride as a dehydrating agent, and 25.2 g of DMF as a polar organic solvent are mixed and stirred to imidize. 50 g of the agent was obtained.
(実施例)
<実施例1:気孔を有する粒子適用ポリイミドフィルムの製造(1)>
製造例1で得られたポリアミック酸溶液100gに、製造例2で得られたイミド化剤50.8gを混合した後、ステンレス板に塗布し、120℃のオーブンで熱風により3分間乾燥して、ゲルフィルムを製造した。
(Example)
<Example 1: Production of particle-applied polyimide film having pores (1)>
After mixing 50.8 g of the imidizing agent obtained in Production Example 2 with 100 g of the polyamic acid solution obtained in Production Example 1, the mixture was applied to a stainless steel plate and dried in an oven at 120 ° C. for 3 minutes with hot air. A gel film was produced.
このようにして製造されたゲルフィルムをステンレス板から取り外してフレームピンで固定し、ゲルフィルムが固定されたフレームを450℃で7分間熱処理した後にフィルムを剥がして、平均厚さ25μmのポリイミドフィルムを得た。 The gel film thus produced was removed from the stainless steel plate and fixed with a frame pin, and the frame to which the gel film was fixed was heat-treated at 450 ° C. for 7 minutes, and then the film was peeled off to obtain a polyimide film having an average thickness of 25 μm. Obtained.
このようにして製造されたポリイミドフィルム断面の走査電子顕微鏡(SEM)写真を図1に示した。 A scanning electron microscope (SEM) photograph of the cross section of the polyimide film thus produced is shown in FIG.
<実施例2:気孔を有する粒子適用ポリイミドフィルムの製造(2)>
製造例2で得られたイミド化剤の代わりに、製造例3で得られたイミド化剤51.6gを使用したことを除いては、実施例1と同様の工程を行って、平均厚さ25μmのポリイミドフィルムを得た。
<Example 2: Production of particle-applied polyimide film having pores (2)>
The same steps as in Example 1 were carried out except that 51.6 g of the imidizing agent obtained in Production Example 3 was used instead of the imidizing agent obtained in Production Example 2, and the average thickness was obtained. A 25 μm polyimide film was obtained.
<比較例1:気孔を有しない粒子適用ポリイミドフィルムの製造(1)>
製造例2で得られたイミド化剤の代わりに、製造例4で得られたイミド化剤50.8gを使用したことを除いては、実施例1と同様の工程を行って、平均厚さ25μmのポリイミドフィルムを得た。
<Comparative Example 1: Production of Particle-Applied Polyimide Film without Pore (1)>
The same steps as in Example 1 were carried out except that 50.8 g of the imidizing agent obtained in Production Example 4 was used instead of the imidizing agent obtained in Production Example 2, and the average thickness was obtained. A 25 μm polyimide film was obtained.
<比較例2:気孔を有しない粒子適用ポリイミドフィルムの製造(2)>
製造例2で得られたイミド化剤の代わりに、製造例5で得られたイミド化剤51.6gを使用したことを除いては、実施例1と同様の工程を行って、平均厚さ25μmのポリイミドフィルムを得た。
<Comparative Example 2: Production of Particle-Applied Polyimide Film without Pore (2)>
The same steps as in Example 1 were carried out except that 51.6 g of the imidizing agent obtained in Production Example 5 was used instead of the imidizing agent obtained in Production Example 2, and the average thickness was obtained. A 25 μm polyimide film was obtained.
<比較例3:気孔を有しないフッ素粒子適用ポリイミドフィルムの製造>
製造例2で得られたイミド化剤の代わりに、製造例6で得られたイミド化剤51.6gを使用したことを除いては、実施例1と同様の工程を行って、平均厚さ25μmのポリイミドフィルムを得た。
<Comparative Example 3: Production of Fluorine Particle Applicable Polyimide Film without Pore>
The same steps as in Example 1 were carried out except that 51.6 g of the imidizing agent obtained in Production Example 6 was used instead of the imidizing agent obtained in Production Example 2, and the average thickness was obtained. A 25 μm polyimide film was obtained.
<比較例4:粒子を添加しないポリイミドフィルムの製造>
製造例2で得られたイミド化剤の代わりに、製造例7で得られたイミド化剤50.0gを使用したことを除いては、実施例1と同様の工程を行って、平均厚さ25μmのポリイミドフィルムを得た。
<Comparative Example 4: Manufacture of Polyimide Film without Adding Particles>
The same steps as in Example 1 were carried out except that 50.0 g of the imidizing agent obtained in Production Example 7 was used instead of the imidizing agent obtained in Production Example 2, and the average thickness was obtained. A 25 μm polyimide film was obtained.
<試験例1:真密度比の測定>
本発明においてポリイミドフィルムの製造時に添加した粒子(A)およびこれら粒子固有物質(B)の真密度をそれぞれ規格(KS M 6020:2010)に準拠して測定した。この時、実施例1および2で用いられた中空シリカ、ならびに比較例1および2で用いられた球状シリカの固有物質である天然シリカは、(株)日本触媒(モデル名:KEP−250)から購入したものを用いて測定した。
<Test Example 1: Measurement of true density ratio>
In the present invention, the true densities of the particles (A) added during the production of the polyimide film and these particle-specific substances (B) were measured according to the standard (KS M 6020: 2010). At this time, the hollow silica used in Examples 1 and 2 and the natural silica which is an intrinsic substance of the spherical silica used in Comparative Examples 1 and 2 were obtained from Nippon Catalyst Co., Ltd. (model name: KEP-250). It was measured using the purchased one.
次いで、下記の計算式1に基づいて粒子固有物質に対する気孔を有する粒子の真密度比(%)を計算し、その結果を下記の表1に示した。
[計算式1]
[Calculation formula 1]
<試験例2:気孔を有する粒子の平均粒径の測定>
本発明で用いた、気孔を有する粒子の平均粒径を、レーザー回折による寸法測定器(Laser Diffraction Particle Size Analyzer、(株)島津製作所、モデル名:SALD−2201)を使用して測定し、気孔を有する粒子の平均粒径の値を下記の表1に示した。
<Test Example 2: Measurement of average particle size of particles having pores>
The average particle size of the particles having pores used in the present invention was measured using a laser diffraction particle size analyzer (Laser Diffraction Particle Size Analyzer, Shimadzu Corporation, model name: SALD-2201), and the pores were measured. The values of the average particle size of the particles having the above are shown in Table 1 below.
<試験例3:フィルムの粒子含有量の測定>
実施例1および2、ならびに比較例1〜4で製造したポリイミドフィルムの粒子含有量をASH法により測定した。ASH法は、るつぼにフィルムを入れて、900℃で3時間焼却した後、るつぼに残った残量の重さを測定して含有率を測定する方法である。測定された粒子の含有量(重量%)を下記の表1に示した。
<Test Example 3: Measurement of film particle content>
The particle content of the polyimide films produced in Examples 1 and 2 and Comparative Examples 1 to 4 was measured by the ASH method. The ASH method is a method in which a film is placed in a crucible, incinerated at 900 ° C. for 3 hours, and then the weight of the remaining amount remaining in the crucible is measured to measure the content rate. The measured particle content (% by weight) is shown in Table 1 below.
<試験例4:気孔を有する粒子の平均フィルム内分布状態の確認>
本発明の実施例1によるポリイミドフィルム内の、気孔を有する粒子の分布状態を、走査電子顕微鏡FE−SEM(JEOL(日本電子(株))製、モデル名:JSM−6700F)で観察し、SEM画像で示した。
<Test Example 4: Confirmation of average distribution of particles with pores in the film>
The distribution state of particles having pores in the polyimide film according to Example 1 of the present invention was observed with a scanning electron microscope FE-SEM (manufactured by JEOL (JEOL Ltd., model name: JSM-6700F)) and SEM. Shown in the image.
本発明の実施例1によるポリイミドフィルム断面のSEM写真を図1に示した。また、前記フィルムの表面に、気孔を有する粒子が分散している状態の写真を図2に示し、これを部分拡大した粒子の状態の写真を図3に示した。 An SEM photograph of a cross section of the polyimide film according to Example 1 of the present invention is shown in FIG. Further, FIG. 2 shows a photograph of particles having pores dispersed on the surface of the film, and FIG. 3 shows a photograph of the partially enlarged particles.
図2に示すように、本発明に係るポリイミドフィルムに用いられる、気孔を有する粒子は、フィルム全体に均等に分布されていることが確認され、良好な分散状態を示すことが分かった。 As shown in FIG. 2, it was confirmed that the particles having pores used in the polyimide film according to the present invention were evenly distributed throughout the film, and it was found that the particles showed a good dispersion state.
<試験例5:誘電率および誘電正接の測定>
実施例1および2、ならびに比較例1〜4で製造したポリイミドフィルムの1GHzにおける誘電率および誘電正接を、Keysight Technologies社のスプリットポスト誘電体共振器(SPDR)を用いて測定した。測定された誘電率および誘電正接の値を下記の表1に示した。
<Test Example 5: Measurement of permittivity and dielectric loss tangent>
The dielectric constant and dielectric loss tangent at 1 GHz of the polyimide films produced in Examples 1 and 2 and Comparative Examples 1 to 4 were measured using a Keysight Technologies split-post dielectric resonator (SPDR). The measured permittivity and dielectric loss tangent values are shown in Table 1 below.
前記表1に示すように、気孔を有する中空シリカ粒子を含む実施例1および2によるポリイミドフィルムは、3以下の低誘電率を示した。 As shown in Table 1, the polyimide films according to Examples 1 and 2 containing hollow silica particles having pores showed a low dielectric constant of 3 or less.
また、実施例1および2によるポリイミドフィルムは、真密度比が95%を超えるか、フッ素粒子を含むか、または粒子をまったく含まない比較例1〜4と比較しても、誘電率および誘電正接が低く表れており、電気的特性に優れていることが分かった。 Further, the polyimide films according to Examples 1 and 2 have a dielectric constant and dielectric loss tangent even when compared with Comparative Examples 1 to 4 having a true density ratio of more than 95%, containing fluorine particles, or containing no particles at all. Appeared low, and it was found that the electrical characteristics were excellent.
本発明のポリイミドフィルムは、低誘電率が要求されるプリント回路基板等の電気/電子機器および部品の製造に有効に使用することができる。 The polyimide film of the present invention can be effectively used in the manufacture of electrical / electronic devices and parts such as printed circuit boards that require a low dielectric constant.
Claims (3)
2)前記ポリイミド前駆体に、気孔を有する粒子を含むイミド化剤を混合してゲルフィルムを製造する段階と、
3)前記ゲルフィルムを熱処理してイミド化する段階と、を含み、
前記気孔を有する粒子が、中空型シリカ粒子であり、
前記気孔を有する粒子が、1μm〜10μmの平均粒径を有し、
前記気孔を有する粒子の真密度が、気孔を含まないその粒子固有物質の真密度に対して50%〜90%であり、
前記気孔を有する粒子が、フィルムの総重量を基準にして2重量%〜30重量%の量で含まれることを特徴とする、ポリイミドフィルムの製造方法。 1) The stage of manufacturing the polyimide precursor and
2) A step of producing a gel film by mixing the polyimide precursor with an imidizing agent containing particles having pores.
3) Including a step of heat-treating the gel film to imidize the gel film.
The particles having pores are hollow silica particles, and the particles have pores.
Particles with the pores have an average particle size of 1 m to 10 m,
The true density of the pore-bearing particles is 50% to 90% of the true density of the pore-free particle-specific material.
A method for producing a polyimide film, wherein the particles having pores are contained in an amount of 2% by weight to 30% by weight based on the total weight of the film.
前記気孔を有する粒子が、中空型シリカ粒子であり、
前記気孔を有する粒子が、1μm〜10μmの平均粒径を有し、
前記気孔を有する粒子の真密度が、気孔を含まないその粒子固有物質の真密度に対して50%〜90%であり、
前記気孔を有する粒子が、フィルムの総重量を基準にして2重量%〜30重量%の量で含まれる、ポリイミドフィルム。 A polyimide film containing particles with pores,
The particles having pores are hollow silica particles, and the particles have pores.
Particles with the pores have an average particle size of 1 m to 10 m,
The true density of the pore-bearing particles is 50% to 90% of the true density of the pore-free particle-specific material.
A polyimide film in which the particles having pores are contained in an amount of 2% by weight to 30% by weight based on the total weight of the film.
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| KR102019928B1 (en) * | 2016-09-01 | 2019-09-11 | 에스케이씨코오롱피아이 주식회사 | Graphene-polyimide composite film with improved heat dissipating and insulating properties and preparation method thereof |
| KR101851752B1 (en) | 2016-10-21 | 2018-04-24 | 에스케이씨 주식회사 | Method for preparing graphite sheet |
| KR20190025072A (en) * | 2017-08-02 | 2019-03-11 | 에스케이씨코오롱피아이 주식회사 | Method for preparation of polyimide film using fumed silica particles and polyimide film having low permittivity |
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| KR20160090153A (en) | 2016-07-29 |
| JP2018502964A (en) | 2018-02-01 |
| KR101728100B1 (en) | 2017-04-18 |
| TWI593726B (en) | 2017-08-01 |
| CN107108926A (en) | 2017-08-29 |
| WO2016117856A1 (en) | 2016-07-28 |
| CN107108926B (en) | 2021-05-07 |
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