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JP6845706B2 - Ceramic heater - Google Patents

Ceramic heater Download PDF

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Publication number
JP6845706B2
JP6845706B2 JP2017024995A JP2017024995A JP6845706B2 JP 6845706 B2 JP6845706 B2 JP 6845706B2 JP 2017024995 A JP2017024995 A JP 2017024995A JP 2017024995 A JP2017024995 A JP 2017024995A JP 6845706 B2 JP6845706 B2 JP 6845706B2
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flange
ceramic
metal member
ceramic heater
ceramic substrate
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JP2018133167A (en
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牧野 友亮
友亮 牧野
直也 中西
直也 中西
敦俊 杉山
敦俊 杉山
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Niterra Co Ltd
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NGK Spark Plug Co Ltd
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Description

本発明は、例えば温水洗浄便座、ファンヒータ、電気温水器、24時間風呂、半田ごて、ヘアアイロン等に用いられるセラミックヒータに関する。 The present invention relates to a ceramic heater used for, for example, a warm water washing toilet seat, a fan heater, an electric water heater, a 24-hour bath, a soldering iron, a hair iron and the like.

従来、例えば温水洗浄便座には、樹脂製の容器(熱交換器)を有する熱交換ユニットが用いられており、この熱交換ユニットには、熱交換器内に収容された洗浄水を暖めるために、長尺のパイプ状のセラミックヒータが配置されている。
このセラミックヒータとしては、円筒状のセラミック製碍管にヒータ配線を印刷したセラミックシートを巻き付け、一体焼成したものが用いられている。さらに、セラミックヒータ本体の外周にフランジがガラス等により接合され、フランジを介してセラミックヒータが熱交換器に固定されている(特許文献1参照)。
そして、熱交換器の内壁と、セラミックヒータの外周との隙間に流れる水がセラミックヒータで加熱される。
Conventionally, for example, a heat exchange unit having a resin container (heat exchanger) has been used for a warm water washing toilet seat, and this heat exchange unit is used to warm the washing water contained in the heat exchanger. , A long pipe-shaped ceramic heater is arranged.
As this ceramic heater, a ceramic sheet in which heater wiring is printed is wound around a cylindrical ceramic porcelain tube and integrally fired. Further, a flange is joined to the outer periphery of the ceramic heater body by glass or the like, and the ceramic heater is fixed to the heat exchanger via the flange (see Patent Document 1).
Then, the water flowing in the gap between the inner wall of the heat exchanger and the outer circumference of the ceramic heater is heated by the ceramic heater.

特開2006−236617号公報Japanese Unexamined Patent Publication No. 2006-236617

ところで、セラミックヒータ本体の軸心とフランジの軸心とがずれて(芯ずれして)取り付けられると、熱交換器の内壁とセラミックヒータとのクリアランスが狭くなる。このため、隙間を通る水の流れが滞り、水温が変動したり、局所的に水が一気に蒸発して泡が発生し、ヒータと樹脂製の熱交換器が接触すれば熱交換器が軟化し変形する虞がある。
そこで、本発明は、筒状のセラミック基体とその外周に接合されるフランジとの芯ずれを抑制したセラミックヒータの提供を目的とする。
By the way, if the axial center of the ceramic heater body and the axial center of the flange are misaligned (misaligned), the clearance between the inner wall of the heat exchanger and the ceramic heater becomes narrow. For this reason, the flow of water through the gap is blocked, the water temperature fluctuates, the water evaporates locally at once to generate bubbles, and if the heater and the resin heat exchanger come into contact, the heat exchanger softens. There is a risk of deformation.
Therefore, an object of the present invention is to provide a ceramic heater that suppresses misalignment between a tubular ceramic substrate and a flange joined to the outer periphery thereof.

上記課題を解決するため、本発明のセラミックヒータは、発熱抵抗体が内部に埋設された、軸線方向に延びる筒状のセラミック基体と、接合部材を介して前記セラミック基体の外周に接合され、環状又は有端環状のセラミック製のフランジと、を備えるセラミックヒータであって、前記接合部材に少なくとも一部が埋設され、前記セラミック基体の外周面と、前記フランジの内周面との間の空間に配置された環状又は有端環状の金属部材を有することを特徴とする。


In order to solve the above problems, the ceramic heater of the present invention is joined to the outer periphery of the ceramic base via a joining member with a cylindrical ceramic base extending in the axial direction in which a heat generating resistor is embedded inside, and is annular. Alternatively, a ceramic heater comprising an endd ring ceramic flange, at least partially embedded in the joining member, in a space between the outer peripheral surface of the ceramic substrate and the inner peripheral surface of the flange. It is characterized by having an arranged annular or endless annular metal member.


このセラミックヒータによれば、セラミック基体とフランジとの隙間を埋めるように両者の間に金属部材が配置されている。従って、セラミック基体にフランジを接合する際、予めセラミック基体とフランジとの隙間に金属部材を配置することで、当該隙間を埋めて芯ずれ(セラミック基体とフランジの軸心同士のずれ)を抑制することができる。 According to this ceramic heater, a metal member is arranged between the ceramic substrate and the flange so as to fill the gap between the two. Therefore, when joining the flange to the ceramic substrate, by arranging the metal member in the gap between the ceramic substrate and the flange in advance, the gap is filled and the misalignment (misalignment between the axes of the ceramic substrate and the flange) is suppressed. be able to.

本発明のセラミックヒータにおいて、前記金属部材は径方向外側に広がる複数の突起を有し、該突起が前記フランジの内周面に当接していてもよい。
このセラミックヒータによれば、フランジの内周面に当接した突起が、セラミック基体とフランジとの軸心が揃う(つまり、隙間が周方向でより均等になる)ように芯出しする力が働き、芯ずれをさらに抑制することができる。
In the ceramic heater of the present invention, the metal member may have a plurality of protrusions extending outward in the radial direction, and the protrusions may be in contact with the inner peripheral surface of the flange.
According to this ceramic heater, a force is applied to center the protrusions in contact with the inner peripheral surface of the flange so that the axes of the ceramic substrate and the flange are aligned (that is, the gaps are more even in the circumferential direction). , The misalignment can be further suppressed.

本発明のセラミックヒータにおいて、前記フランジの一方の面から内周面に向かい、径方向内側に向かって窄まる先細りのテーパ面を有し、前記金属部材が前記テーパ面及び前記セラミック基体の外周に当接していてもよい。
このセラミックヒータによれば、セラミック基体にフランジを接合する際、予めセラミック基体とフランジとの隙間に、テーパ面側から金属部材を配置し、テーパ面側に押圧すると、金属部材がテーパ面に沿ってテーパ面側へ移動し、セラミック基体の外周とテーパ面とに共に接したときに金属部材の移動が止まる。このとき、金属部材の軸心がフランジの軸心に丁度合うように芯出しする力が働き、セラミック基体とフランジの芯ずれをほぼ解消することができる。
In the ceramic heater of the present invention, the ceramic heater has a tapered surface that is tapered inward in the radial direction from one surface of the flange toward the inner peripheral surface, and the metal member is formed on the tapered surface and the outer periphery of the ceramic substrate. It may be in contact.
According to this ceramic heater, when joining a flange to a ceramic substrate, a metal member is arranged in advance in the gap between the ceramic substrate and the flange from the tapered surface side, and when pressed against the tapered surface side, the metal member is along the tapered surface. The metal member stops moving when it moves to the tapered surface side and comes into contact with both the outer periphery of the ceramic substrate and the tapered surface. At this time, a force for centering the metal member so that the axis of the metal member is exactly aligned with the axis of the flange acts, and the misalignment between the ceramic substrate and the flange can be substantially eliminated.

本発明のセラミックヒータにおいて、前記接合部材は、前記テーパ面の反対側にて前記セラミック基体と前記フランジと前記金属部材との間に介在してなってもよい。
このセラミックヒータによれば、金属部材のテーパ面よりも前記フランジの一方の面側に接合部材が介在せず、接合部材の使用量を削減できる。
In the ceramic heater of the present invention, the joining member may be interposed between the ceramic substrate, the flange, and the metal member on the opposite side of the tapered surface.
According to this ceramic heater, the joining member does not intervene on one surface side of the flange with respect to the tapered surface of the metal member, and the amount of the joining member used can be reduced.

本発明のセラミックヒータにおいて、前記金属部材は、全周の3/4以上の円弧をなす有端環状であってもよい。
このセラミックヒータによれば、金属部材が有端環状であるので径方向に撓み、セラミック基体とフランジとの隙間に配置し易い。また、金属部材が全周の3/4以上の円弧をなすことで、セラミック基体とフランジとの隙間のより多くの部位に金属部材が介在し、この隙間を確実に埋めることができる。
In the ceramic heater of the present invention, the metal member may be an endd ring forming an arc of 3/4 or more around the entire circumference.
According to this ceramic heater, since the metal member has an endless ring shape, it bends in the radial direction and can be easily placed in the gap between the ceramic substrate and the flange. Further, since the metal member forms an arc of 3/4 or more of the entire circumference, the metal member is interposed in a larger portion of the gap between the ceramic substrate and the flange, and this gap can be reliably filled.

本発明のセラミックヒータにおいて、前記金属部材の線膨張係数が前記フランジの線膨張係数より大きくてもよい。
このセラミックヒータによれば、接合部材となる接合材料を加熱した際、金属部材が膨張してセラミック基体とフランジとの隙間をより埋めることができる、特に、金属部材が膨張してフランジの内周面に接触した場合には、セラミック基体とフランジが芯ずれしていても、これを矯正して芯出しする力を作用させることができる。
In the ceramic heater of the present invention, the coefficient of linear expansion of the metal member may be larger than the coefficient of linear expansion of the flange.
According to this ceramic heater, when the joining material to be the joining member is heated, the metal member expands to further fill the gap between the ceramic substrate and the flange. In particular, the metal member expands to fill the inner circumference of the flange. When it comes into contact with the surface, even if the ceramic substrate and the flange are misaligned, this can be corrected and a centering force can be applied.

本発明のセラミックヒータにおいて、前記接合部材は、ガラス、エポキシ樹脂、又はロウ材からなってもよい。
これらの材料は、加熱することでセラミック基体とフランジとの隙間に容易に流動し、金属部材を埋設した状態で固化させることができる。
In the ceramic heater of the present invention, the joining member may be made of glass, epoxy resin, or brazing material.
When these materials are heated, they easily flow into the gap between the ceramic substrate and the flange, and can be solidified in a state where the metal member is embedded.

本発明のセラミックヒータにおいて、前記フランジは、アルミナからなってもよい。
この材料は、低コストであると共に、金属部材の線膨張係数よりもフランジの線膨張係数を確実に小さくすることができる。
In the ceramic heater of the present invention, the flange may be made of alumina.
This material has a low cost and can surely make the coefficient of linear expansion of the flange smaller than the coefficient of linear expansion of the metal member.

本発明のセラミックヒータにおいて、前記金属部材は銅、ニッケル若しくはニッケル合金、チタン若しくはチタン合金、又はステンレスのいずれかからなってもよい。
これらの材料は、耐食性に優れると共に、接合部材としてガラスを用いた場合に溶融ガラスとの濡れ性に優れる。
In the ceramic heater of the present invention, the metal member may be made of any of copper, nickel or nickel alloy, titanium or titanium alloy, or stainless steel.
These materials are excellent in corrosion resistance and also excellent in wettability with molten glass when glass is used as a joining member.

本発明のセラミックヒータにおいて、前記接合部材のうち、前記軸線方向の最も先端側に位置する先端向き面上の点であって、前記軸線方向の最も後端側に近づく第1の点を通過する、前記軸線に垂直な仮想線Aと、前記接合部材のうち、前記軸線方向の最も後端側に位置する後端向き面上の点であって、前記軸線方向の最も先端側に近づく第2の点を通過する、前記軸線に垂直な仮想線Bとの最短距離で表される前記接合部材の厚みD1が、前記フランジの最大厚みD2の1/2以上であってもよい。
このセラミックヒータによれば、接合部材がフランジの軸線方向の両面側を支持する部位のうち、厚みが薄くて強度が弱い厚みD1の部位を、D2の1/2以上に維持するので、セラミック基体にフランジを確実に接合できる。
In the ceramic heater of the present invention, among the joining members, the point on the tip facing surface located on the most tip side in the axial direction passes through the first point approaching the rearmost end side in the axial direction. A second virtual line A perpendicular to the axis, and a point on the rear end facing surface located on the rearmost end side in the axis direction of the joining member, which is closest to the tip end side in the axis direction. The thickness D1 of the joining member represented by the shortest distance from the virtual line B perpendicular to the axis passing through the point may be ½ or more of the maximum thickness D2 of the flange.
According to this ceramic heater, among the portions where the joining member supports both sides of the flange in the axial direction, the portion having a thickness of D1 which is thin and weak in strength is maintained at 1/2 or more of D2, so that the ceramic substrate is used. Can be reliably joined to the flange.

この発明によれば、セラミックヒータにおける筒状のセラミック基体とその外周に接合されるフランジとの芯ずれを抑制することができる。 According to the present invention, it is possible to suppress misalignment between the cylindrical ceramic substrate in the ceramic heater and the flange joined to the outer periphery thereof.

本発明の第1の実施形態に係るセラミックヒータを示す正面図である。It is a front view which shows the ceramic heater which concerns on 1st Embodiment of this invention. セラミックヒータのセラミックシートを示す展開図である。It is a developed view which shows the ceramic sheet of a ceramic heater. 図1の軸線方向に沿う断面図である。It is sectional drawing which follows the axial direction of FIG. 図1のA−A線に沿う断面図である。It is sectional drawing which follows the AA line of FIG. 金属部材の外観を示す斜視図である。It is a perspective view which shows the appearance of a metal member. セラミック基体に金属部材を介してフランジを接合する方法を示す部分断面図である。It is a partial cross-sectional view which shows the method of joining a flange to a ceramic substrate via a metal member. 本発明の第2の実施形態に係るセラミックヒータの軸線方向に沿う部分断面図である。It is a partial cross-sectional view along the axial direction of the ceramic heater which concerns on 2nd Embodiment of this invention. 本発明の第2の実施形態に係るセラミックヒータにおいて、セラミック基体に金属部材を介してフランジを接合する方法を示す部分断面図である。FIG. 5 is a partial cross-sectional view showing a method of joining a flange to a ceramic substrate via a metal member in the ceramic heater according to the second embodiment of the present invention. 金属部材の変形例を示す部分断面図である。It is a partial cross-sectional view which shows the deformation example of a metal member.

以下に、本発明の実施形態を図面と共に説明する。
図1は本発明の第1の実施形態に係るセラミックヒータ11を示す正面図、図2はセラミックヒータ11のセラミックシート19を示す展開図、図3は図1の軸線L方向に沿う断面図、図4は図1のA−A線に沿う断面図、図5は金属部材50の外観を示す斜視図である。
本発明の第1の実施形態に係るセラミックヒータ11は、例えば温水洗浄便座の熱交換ユニットの熱交換器において、洗浄水を温めるために用いることができる。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a front view showing the ceramic heater 11 according to the first embodiment of the present invention, FIG. 2 is a developed view showing a ceramic sheet 19 of the ceramic heater 11, and FIG. 3 is a cross-sectional view taken along the axis L direction of FIG. FIG. 4 is a cross-sectional view taken along the line AA of FIG. 1, and FIG. 5 is a perspective view showing the appearance of the metal member 50.
The ceramic heater 11 according to the first embodiment of the present invention can be used for warming the washing water, for example, in the heat exchanger of the heat exchange unit of the warm water washing toilet seat.

図1に示すように、セラミックヒータ11は、発熱抵抗体40が内部に埋設された筒状のセラミック基体13と、接合部材20を介してセラミック基体13の外周に接合され、環状又は有端環状のセラミック製のフランジ30と、環状又は有端環状の金属部材50(図3参照)とを備える。
セラミック基体13は、円筒状のセラミック製の支持体17と、支持体17の外周に巻きつけられたセラミックシート19とを備え、支持体17はその軸線L方向に貫通孔17hを有してなる。そして、熱交換器にて、貫通孔17hの内部に流れる水がセラミックヒータ11で加熱され、さらに熱交換器の内壁と、セラミックヒータの外周との隙間の水もセラミックヒータ11で加熱される。
支持体17及びセラミックシート19は例えばアルミナから形成することができる。なお、セラミックシート19は支持体17の外周を完全に覆わず、セラミックシート19の巻合わせ部19aには、支持体17の軸線L方向に沿って延びるスリット13sが形成されている。
As shown in FIG. 1, the ceramic heater 11 is joined to the outer periphery of the ceramic base 13 via a joining member 20 with a tubular ceramic base 13 in which a heat generating resistor 40 is embedded, and is annular or endless annular. The ceramic flange 30 and the annular or endless annular metal member 50 (see FIG. 3) are provided.
The ceramic substrate 13 includes a cylindrical ceramic support 17 and a ceramic sheet 19 wound around the outer periphery of the support 17, and the support 17 has a through hole 17h in the L direction of the axis. .. Then, in the heat exchanger, the water flowing inside the through hole 17h is heated by the ceramic heater 11, and the water in the gap between the inner wall of the heat exchanger and the outer periphery of the ceramic heater is also heated by the ceramic heater 11.
The support 17 and the ceramic sheet 19 can be formed from, for example, alumina. The ceramic sheet 19 does not completely cover the outer periphery of the support 17, and the wound portion 19a of the ceramic sheet 19 is formed with slits 13s extending along the axis L direction of the support 17.

一方、図2に示すように、セラミックシート19には、蛇行したパターン形状のヒータ配線からなる発熱抵抗体40が印刷等で形成されている。発熱抵抗体40のヒータ配線は、互いに軸線L方向に沿って延びる複数の配線部40aの両端が幅方向にも延び、隣接する配線部40aの端部に接続される形態をなす。そして、セラミックシート19の幅方向両端の配線部40aが軸線L方向の一端でパッド状の内部端子42に一体に接続されている。
そして、この内部端子42は、図示しないビア導体等を介して、セラミックシート19の外周面(図2の裏面)に形成された外部端子43に電気的に接続されている。
発熱抵抗体40及び内部端子42は、例えばタングステンを主成分として形成することができる。
On the other hand, as shown in FIG. 2, on the ceramic sheet 19, a heat generating resistor 40 formed of a meandering pattern-shaped heater wiring is formed by printing or the like. The heater wiring of the heat generation resistor 40 has a form in which both ends of a plurality of wiring portions 40a extending along the axis L direction extend in the width direction and are connected to the end portions of the adjacent wiring portions 40a. The wiring portions 40a at both ends of the ceramic sheet 19 in the width direction are integrally connected to the pad-shaped internal terminal 42 at one end in the axis L direction.
The internal terminal 42 is electrically connected to the external terminal 43 formed on the outer peripheral surface (back surface of FIG. 2) of the ceramic sheet 19 via a via conductor (not shown) or the like.
The heat generation resistor 40 and the internal terminal 42 can be formed of, for example, tungsten as a main component.

次に、図3〜図5を参照し、金属部材50について説明する。
図5に示すように、金属部材50は上面視C字状の有端環状をなし、周方向の一部が開口50cを形成している。また、金属部材50は、自身の外周面から径方向外側に広がる複数の突起50pを、周方向に等間隔で4個有している。
なお、本実施形態では、金属部材50はステンレス(SUS304)板を環状に曲げて形成されると共に、軸方向の一端(図5では下端)をコ字状に切り欠いて切り欠き部50dを設け、切り欠き部50dの片を径方向外側に切り起こして突起50pとしている。
そして、図3に示すように、金属部材50は、自身の突起50pがフランジ30の内周面30dに当接しつつ、接合部材20に埋設されている。なお、フランジ30の内周面30dから軸線L方向の一端(図3では下端)に向かって段状に縮径するとともに、内周面30dから軸線L方向の他端(図3では上端)に向かってテーパ状に拡径してテーパ部30aが形成されている。そして、接合部材20となる接合材料20x(図6)を、セラミック基体13とフランジ30との隙間が広がったテーパ部30a側から入れやすくなっている。
Next, the metal member 50 will be described with reference to FIGS. 3 to 5.
As shown in FIG. 5, the metal member 50 has a C-shaped ended ring shape when viewed from above, and a part in the circumferential direction forms an opening 50c. Further, the metal member 50 has four protrusions 50p extending radially outward from its outer peripheral surface at equal intervals in the circumferential direction.
In the present embodiment, the metal member 50 is formed by bending a stainless steel (SUS304) plate in an annular shape, and one end in the axial direction (lower end in FIG. 5) is cut out in a U shape to provide a cutout portion 50d. , A piece of the cutout portion 50d is cut up radially outward to form a protrusion 50p.
Then, as shown in FIG. 3, the metal member 50 is embedded in the joining member 20 while its own protrusion 50p is in contact with the inner peripheral surface 30d of the flange 30. The diameter of the flange 30 is gradually reduced from the inner peripheral surface 30d toward one end in the axis L direction (lower end in FIG. 3), and from the inner peripheral surface 30d to the other end in the axis L direction (upper end in FIG. 3). The tapered portion 30a is formed by expanding the diameter toward the taper. Then, the joining material 20x (FIG. 6) to be the joining member 20 can be easily inserted from the tapered portion 30a side where the gap between the ceramic substrate 13 and the flange 30 is widened.

ここで、図4に示すように、金属部材50は、セラミック基体13とフランジ30との隙間を埋めるように両者の間に配置されている。従って、セラミック基体13にフランジ30を接合する際、図6に示すように、予めセラミック基体13とフランジ30との隙間に金属部材50を配置することで、当該隙間を埋めて芯ずれ(セラミック基体13とフランジ30の軸心同士のずれ)を抑制することができる。
そして、金属部材50を配置した後、接合部材20となる固形の接合材料20xをセラミック基体13とフランジ30との隙間に(金属部材50を覆って)挿入し、全体を加熱して接合材料20xを溶融固化させる。これにより、金属部材50が接合部材20に埋設され、セラミック基体13の外周にフランジ30が接合される。
Here, as shown in FIG. 4, the metal member 50 is arranged between the ceramic base 13 and the flange 30 so as to fill a gap between them. Therefore, when joining the flange 30 to the ceramic substrate 13, as shown in FIG. 6, by arranging the metal member 50 in the gap between the ceramic substrate 13 and the flange 30 in advance, the gap is filled and the misalignment (ceramic substrate) is filled. It is possible to suppress the deviation between the axes of the 13 and the flange 30).
Then, after arranging the metal member 50, the solid bonding material 20x to be the bonding member 20 is inserted into the gap between the ceramic substrate 13 and the flange 30 (covering the metal member 50), and the whole is heated to heat the bonding material 20x. Is melted and solidified. As a result, the metal member 50 is embedded in the joining member 20, and the flange 30 is joined to the outer periphery of the ceramic substrate 13.

特に、本実施形態では、金属部材50に複数の突起50pを設け、この突起50pをフランジ30の内周面30dに当接させるので、セラミック基体13とフランジ30との軸心が揃う(つまり、隙間G(図6参照)が周方向でより均等になる)ように芯出しする力が働き、芯ずれをさらに抑制することができる。 In particular, in the present embodiment, since the metal member 50 is provided with a plurality of protrusions 50p and the protrusions 50p are brought into contact with the inner peripheral surface 30d of the flange 30, the axes of the ceramic substrate 13 and the flange 30 are aligned (that is,). A centering force acts so that the gap G (see FIG. 6) becomes more even in the circumferential direction), and the misalignment can be further suppressed.

なお、図5に示すように、金属部材50は、その周長50Lが全周の3/4以上の円弧をなす有端環状であるとよい。有端環状であると、金属部材50が径方向に撓むので、セラミック基体13とフランジ30との隙間に配置し易い。また、金属部材50が全周の3/4以上の円弧をなすことで、セラミック基体13とフランジ30との隙間のより多くの部位に金属部材50が介在し、この隙間を確実に埋めることができる。
また、金属部材50の線膨張係数が、フランジ30の線膨張係数より大きいとよい。これにより、接合部材20となる接合材料20xを加熱した際、金属部材50が膨張してセラミック基体13とフランジ30との隙間をより埋めることができる、特に、金属部材50が膨張してフランジ30の内周面30dに接触した場合には、セラミック基体13とフランジ30が芯ずれしていても、これを矯正して芯出しする力を作用させることができる。
As shown in FIG. 5, the metal member 50 is preferably an endd ring having a circumference of 50 L forming an arc of 3/4 or more of the entire circumference. If the ring is endless, the metal member 50 bends in the radial direction, so that it can be easily arranged in the gap between the ceramic substrate 13 and the flange 30. Further, since the metal member 50 forms an arc of 3/4 or more of the entire circumference, the metal member 50 is interposed in a larger portion of the gap between the ceramic substrate 13 and the flange 30, and the gap can be reliably filled. it can.
Further, it is preferable that the coefficient of linear expansion of the metal member 50 is larger than the coefficient of linear expansion of the flange 30. As a result, when the joining material 20x to be the joining member 20 is heated, the metal member 50 expands and the gap between the ceramic substrate 13 and the flange 30 can be further filled. In particular, the metal member 50 expands and the flange 30 In the case of contact with the inner peripheral surface 30d of the above, even if the ceramic substrate 13 and the flange 30 are misaligned, it is possible to correct the misalignment and apply a centering force.

このような観点から、金属部材50を、銅、ニッケル若しくはニッケル合金、チタン若しくはチタン合金、又はステンレスのいずれかから形成するとよい。また、これらの材料は、耐食性に優れると共に、接合部材20としてガラスを用いた場合に溶融ガラスとの濡れ性に優れる。
また、フランジ30は、アルミナから形成するとよい。
また、接合部材20は、ガラス、エポキシ樹脂、又はロウ材からなるとよい。
さらに、図3に示すように、接合部材20のうち、軸線L方向の最も先端側に位置する先端向き面上の点であって、軸線L方向の最も後端側に近づく第1の点P1を通過する、軸線Lに垂直な仮想線Aと、接合部材20のうち、軸線L方向の最も後端側に位置する後端向き面上の点であって、軸線L方向の最も先端側に近づく第2の点P2を通過する、軸線Lに垂直な仮想線Bとの最短距離で表される厚みD1が、フランジ30の最大厚みD2の1/2以上であると、セラミック基体13にフランジ30を確実に接合できる。
これは、D1は、接合部材20がフランジ30の軸線方向の両面側を支持する部位のうち、厚みが薄い箇所を表し、このD1がD2の1/2以上でないと接合強度を確保することが困難な場合があるからである。
又、第1の点P1をフランジ30の両面を基準にしたときのD1をそれぞれ求め、そのうち最小の値をD1として採用する。図3の例では、フランジ30の他の面(図3の上面)に臨む側から見ると第1の点はP2となるが、これを基準して求めたD1は、フランジ30の一方の面(図3の下面)を基準した上述のD1と等しいから、いずれの値を採用してもよい。
From this point of view, the metal member 50 may be formed of copper, nickel or nickel alloy, titanium or titanium alloy, or stainless steel. Further, these materials are excellent in corrosion resistance and also excellent in wettability with molten glass when glass is used as the joining member 20.
Further, the flange 30 may be formed of alumina.
Further, the joining member 20 may be made of glass, epoxy resin, or brazing material.
Further, as shown in FIG. 3, among the joining members 20, the first point P1 which is a point on the tip facing surface located on the most tip side in the axis L direction and approaches the rearmost end side in the axis L direction. A virtual line A perpendicular to the axis L and a point on the rear end facing surface of the joining member 20 located on the rearmost end side in the axis L direction, and on the most tip side in the axis L direction. When the thickness D1 represented by the shortest distance to the virtual line B perpendicular to the axis L passing through the second approaching point P2 is ½ or more of the maximum thickness D2 of the flange 30, the flange on the ceramic substrate 13 30 can be reliably joined.
This means that D1 represents a portion where the joining member 20 supports both sides of the flange 30 in the axial direction and is thin, and the joining strength can be ensured unless this D1 is 1/2 or more of D2. This is because it can be difficult.
Further, D1 when the first point P1 is referred to both sides of the flange 30 is obtained, and the smallest value thereof is adopted as D1. In the example of FIG. 3, the first point is P2 when viewed from the side facing the other surface (upper surface of FIG. 3) of the flange 30, but D1 obtained with reference to this is one surface of the flange 30. Since it is equal to the above-mentioned D1 based on (the lower surface of FIG. 3), any value may be adopted.

セラミックヒータ11は、例えば以下のようにして製造することができる。
まず、アルミナ等のセラミック粉末のスラリーから、支持体17となる部材を押出成形し、仮焼成する。また、上記同様のスラリーから、セラミックシート19となるグリーンシートを形成し、その表面に図2に示すような発熱抵抗体40及び内部端子42となる導電性ペーストを印刷して乾燥させる。そして、このグリーンシートの印刷面に他のグリーンシートを積層して押圧し、発熱抵抗体40及び内部端子42を両グリーンシートの間に埋設させる。さらに、両グリーンシートの積層体の片面に外部端子43となる導電性ペーストを印刷して乾燥させる。
そして、両グリーンシートの積層体の反対面にセラミックペーストを塗布し、支持体17に巻き付けて接着し、全体を焼成する。
また、アルミナ等のセラミック粉末を金型にて加圧成形し、焼成することによりフランジ30を得る。
The ceramic heater 11 can be manufactured, for example, as follows.
First, a member to be a support 17 is extruded from a slurry of ceramic powder such as alumina and calcined. Further, a green sheet to be a ceramic sheet 19 is formed from the same slurry as described above, and a conductive paste to be a heat generating resistor 40 and an internal terminal 42 as shown in FIG. 2 is printed on the surface thereof and dried. Then, another green sheet is laminated and pressed on the printed surface of the green sheet, and the heat generating resistor 40 and the internal terminal 42 are embedded between the two green sheets. Further, a conductive paste serving as an external terminal 43 is printed on one side of the laminate of both green sheets and dried.
Then, a ceramic paste is applied to the opposite surfaces of the laminated bodies of both green sheets, wrapped around the support 17 and adhered, and the whole is fired.
Further, a ceramic powder such as alumina is pressure-molded with a mold and fired to obtain a flange 30.

このようにして製造したセラミック基体13及びフランジ30を、図6に示すように金属部材50を介して配置した後、接合部材20となる固形の接合材料20x(ガラス)をセラミック基体13とフランジ30との隙間に配置してガラスの溶融温度以上に加熱し、セラミック基体13の外周にフランジ30を接合する。 After the ceramic substrate 13 and the flange 30 manufactured in this manner are arranged via the metal member 50 as shown in FIG. 6, the solid bonding material 20x (glass) to be the bonding member 20 is placed on the ceramic substrate 13 and the flange 30. The flange 30 is joined to the outer periphery of the ceramic substrate 13 by arranging it in the gap between the ceramic substrate 13 and heating it above the melting temperature of the glass.

次に、図7、図8を参照し、本発明の第2の実施形態に係るセラミックヒータについて説明する。なお、第2の実施形態に係るセラミックヒータは、フランジ32及び金属部材52の構成が異なること以外は、第1の実施形態に係るセラミックヒータと同一であるので、同一構成部分の説明を省略する。また、第2の実施形態に係るセラミックヒータの全体構成は図1と略同一であるので、図7、図8はセラミックヒータの部分断面図として簡略にしている。 Next, the ceramic heater according to the second embodiment of the present invention will be described with reference to FIGS. 7 and 8. Since the ceramic heater according to the second embodiment is the same as the ceramic heater according to the first embodiment except that the configurations of the flange 32 and the metal member 52 are different, the description of the same configuration portion will be omitted. .. Further, since the overall configuration of the ceramic heater according to the second embodiment is substantially the same as that of FIG. 1, FIGS. 7 and 8 are simplified as partial cross-sectional views of the ceramic heater.

図7に示すように、フランジ32の一方の面(図7の下面)から内周面に向かい、径方向内側に向かって窄まる先細りのテーパ面32bが形成されている。また、フランジ32の他の面(図7の上面)から内周面に向かい、径方向内側に向かって窄まる先細りのテーパ面32aが形成されている。
一方、金属部材52は無端に繋がる断面円形のリングとなっている。
そして、金属部材52がテーパ面32b及びセラミック基体13の外周に当接している。また、接合部材20は、テーパ面32bの反対側にてセラミック基体13とフランジ2と金属部材52の間に介在してなる。つまり、金属部材52の下面には接合部材20が介在せず、金属部材52の一部が接合部材20に埋設されていることになる。
なお、金属部材52をC字状の有端環状とした場合には、金属部材52の切り欠き部から接合部材20の溶融体が金属部材52の下方まで流れ、金属部材52の下部も接合部材20に埋設されてもよい。
As shown in FIG. 7, a tapered tapered surface 32b is formed that narrows inward in the radial direction from one surface of the flange 32 (lower surface of FIG. 7) toward the inner peripheral surface. Further, a tapered tapered surface 32a is formed that narrows inward in the radial direction from the other surface of the flange 32 (upper surface in FIG. 7) toward the inner peripheral surface.
On the other hand, the metal member 52 is a ring having a circular cross section that connects endlessly.
Then, the metal member 52 is in contact with the tapered surface 32b and the outer periphery of the ceramic substrate 13. Further, the joining member 20 is interposed between the ceramic substrate 13, the flange 2, and the metal member 52 on the opposite side of the tapered surface 32b. That is, the joining member 20 does not intervene on the lower surface of the metal member 52, and a part of the metal member 52 is embedded in the joining member 20.
When the metal member 52 has a C-shaped ended ring shape, the melt of the joining member 20 flows from the notch portion of the metal member 52 to the lower part of the metal member 52, and the lower part of the metal member 52 is also a joining member. It may be buried in 20.

ここで、図8に示すように、セラミック基体13にフランジ32を接合する際、予めセラミック基体13とフランジ32との隙間に、テーパ面32b側から金属部材52を配置し、治具100等によりテーパ面32b側(上側)に所定の押圧力Fで押圧すると、金属部材52がテーパ面32bに沿って上方へ移動し、セラミック基体13の外周とテーパ面32bとに共に接したときに金属部材52の移動が止まる。このとき、金属部材52の軸心がフランジ32の軸心に丁度合うように芯出しする力が働き、セラミック基体13とフランジ32の芯ずれをほぼ解消することができる。
そして、金属部材52を配置した後、接合部材20となる固形の接合材料20xをセラミック基体13とフランジ32との隙間に(金属部材52の上から)挿入し、全体を加熱して接合材料20xを溶融固化させる。これにより、金属部材52の上部が接合部材20に埋設され、セラミック基体13の外周にフランジ32が接合される。
このように、第2の実施形態では、テーパ面32bの作用により、セラミック基体13とフランジ32との隙間G(図8参照)が周方向でほぼ均等になる芯出し効果が働き、芯ずれをほぼ解消する。
Here, as shown in FIG. 8, when joining the flange 32 to the ceramic base 13, a metal member 52 is arranged in advance in the gap between the ceramic base 13 and the flange 32 from the tapered surface 32b side, and a jig 100 or the like is used. When a predetermined pressing force F is applied to the tapered surface 32b side (upper side), the metal member 52 moves upward along the tapered surface 32b, and when the outer periphery of the ceramic substrate 13 and the tapered surface 32b come into contact with each other, the metal member 52 moves upward. The movement of 52 stops. At this time, a force for centering the metal member 52 so that the axis of the metal member 52 is exactly aligned with the axis of the flange 32 acts, and the misalignment between the ceramic substrate 13 and the flange 32 can be substantially eliminated.
Then, after arranging the metal member 52, the solid bonding material 20x to be the bonding member 20 is inserted into the gap between the ceramic substrate 13 and the flange 32 (from above the metal member 52), and the whole is heated to heat the bonding material 20x. Is melted and solidified. As a result, the upper portion of the metal member 52 is embedded in the joining member 20, and the flange 32 is joined to the outer periphery of the ceramic substrate 13.
As described above, in the second embodiment, the action of the tapered surface 32b exerts a centering effect in which the gap G (see FIG. 8) between the ceramic substrate 13 and the flange 32 becomes substantially uniform in the circumferential direction, thereby causing misalignment. Almost resolved.

本発明は上記実施形態に限定されず、本発明の思想と範囲に含まれる様々な変形及び均等物に及ぶことはいうまでもない。
金属部材の形状は限定されず、例えば図9に示すように、断面がC字状の金属板を環状に形成して径方向に撓む金属部材54とし、セラミック基体13とフランジ34との隙間に密着するようにしてもよい。
フランジの形状も限定されない。
It goes without saying that the present invention is not limited to the above embodiments and extends to various modifications and equivalents included in the ideas and scope of the present invention.
The shape of the metal member is not limited. For example, as shown in FIG. 9, a metal plate having a C-shaped cross section is formed in an annular shape to form a metal member 54 that bends in the radial direction, and a gap between the ceramic substrate 13 and the flange 34. You may make it adhere to.
The shape of the flange is also not limited.

11 セラミックヒータ
13 セラミック基体
20 接合部材
30、32、34 フランジ
30d フランジの内周面
32b テーパ面
40 発熱抵抗体
50、52、54 金属部材
50p 突起
D1 接合部材の厚み
D2 フランジの最大厚み
L 軸線
P1 第1の点
P2 第2の点
A,B 仮想線
11 Ceramic heater 13 Ceramic substrate 20 Joining member 30, 32, 34 Flange 30d Inner peripheral surface of flange 32b Tapered surface 40 Heat generating resistor 50, 52, 54 Metal member 50p Protrusion D1 Thickness of joining member D2 Maximum thickness of flange L Axis P1 First point P2 Second point A, B Virtual line

Claims (10)

発熱抵抗体が内部に埋設された、軸線方向に延びる筒状のセラミック基体と、
接合部材を介して前記セラミック基体の外周に接合され、環状又は有端環状のセラミック製のフランジと、を備えるセラミックヒータであって、
前記接合部材に少なくとも一部が埋設され、前記セラミック基体の外周面と、前記フランジの内周面との間の空間に配置された環状又は有端環状の金属部材を有することを特徴とするセラミックヒータ。
A cylindrical ceramic substrate extending in the axial direction with a heat-generating resistor embedded inside,
A ceramic heater that is joined to the outer periphery of the ceramic substrate via a joining member and includes an annular or endless annular ceramic flange.
A ceramic characterized in that at least a part thereof is embedded in the joining member and has an annular or endless annular metal member arranged in a space between an outer peripheral surface of the ceramic substrate and an inner peripheral surface of the flange. heater.
前記金属部材は径方向外側に広がる複数の突起を有し、該突起が前記フランジの内周面に当接している請求項1に記載のセラミックヒータ。 The ceramic heater according to claim 1, wherein the metal member has a plurality of protrusions extending outward in the radial direction, and the protrusions are in contact with the inner peripheral surface of the flange. 前記フランジの一方の面から内周面に向かい、径方向内側に向かって窄まる先細りのテーパ面を有し、前記金属部材が前記テーパ面及び前記セラミック基体の外周に当接している請求項1に記載のセラミックヒータ。 Claim 1 has a tapered tapered surface that narrows inward in the radial direction from one surface of the flange toward the inner peripheral surface, and the metal member is in contact with the tapered surface and the outer periphery of the ceramic substrate. The ceramic heater described in. 前記接合部材は、前記テーパ面の反対側にて前記セラミック基体と前記フランジと前記金属部材との間に介在してなる請求項3に記載のセラミックヒータ。 The ceramic heater according to claim 3, wherein the joining member is interposed between the ceramic substrate, the flange, and the metal member on the opposite side of the tapered surface. 前記金属部材は、全周の3/4以上の円弧をなす有端環状である請求項1〜4のいずれか一項に記載のセラミックヒータ。 The ceramic heater according to any one of claims 1 to 4, wherein the metal member is an endd ring forming an arc of 3/4 or more of the entire circumference. 前記金属部材の線膨張係数が前記フランジの線膨張係数より大きい請求項1〜5のいずれか一項に記載のセラミックヒータ。 The ceramic heater according to any one of claims 1 to 5, wherein the coefficient of linear expansion of the metal member is larger than the coefficient of linear expansion of the flange. 前記接合部材は、ガラス、エポキシ樹脂、又はロウ材からなる請求項1〜6のいずれか一項に記載のセラミックヒータ。 The ceramic heater according to any one of claims 1 to 6, wherein the joining member is made of glass, epoxy resin, or brazing material. 前記フランジは、アルミナからなる請求項1〜7のいずれか一項に記載のセラミックヒータ。 The ceramic heater according to any one of claims 1 to 7, wherein the flange is made of alumina. 前記金属部材は銅、ニッケル若しくはニッケル合金、チタン若しくはチタン合金、又はステンレスのいずれかからなる請求項1〜8のいずれか一項に記載のセラミックヒータ。 The ceramic heater according to any one of claims 1 to 8, wherein the metal member is made of copper, nickel or nickel alloy, titanium or titanium alloy, or stainless steel. 前記接合部材のうち、前記軸線方向の最も先端側に位置する先端向き面上の点であって、前記軸線方向の最も後端側に近づく第1の点を通過する、前記軸線に垂直な仮想線Aと、前記接合部材のうち、前記軸線方向の最も後端側に位置する後端向き面上の点であって、前記軸線方向の最も先端側に近づく第2の点を通過する、前記軸線に垂直な仮想線Bとの最短距離で表される前記接合部材の厚みD1が、前記フランジの最大厚みD2の1/2以上である請求項1〜9のいずれか一項に記載のセラミックヒータ。 A virtual joint member perpendicular to the axis that passes through a point on the tip-facing surface located on the most tip side in the axis direction and that is closest to the rearmost end side in the axis direction. The line A and the point on the rear end facing surface located on the rearmost end side in the axial direction of the joining member, which passes through the second point closest to the tip end side in the axial direction. The ceramic according to any one of claims 1 to 9, wherein the thickness D1 of the joining member represented by the shortest distance from the virtual line B perpendicular to the axis is ½ or more of the maximum thickness D2 of the flange. heater.
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