JP6021575B2 - Optical fiber scanning device, optical fiber scanning device driving method, and optical scanning endoscope - Google Patents

Description

  The present invention relates to a microscope, an endoscope, or the like that obtains an image by scanning an optical fiber, and more particularly to an optical fiber scanning device, a driving method of the optical fiber scanning device, and an optical scanning necessary for a configuration for scanning an optical fiber using a magnetic field The present invention relates to a type endoscope.

  As is well known, there is an electronic endoscope in which a subject image is photoelectrically converted by an imaging device having a solid-state imaging device such as a CCD or CMOS, and an acquired image is displayed on a monitor. 2. Description of the Related Art In recent years, an optical fiber scanning device that scans an optical fiber and scans a light spot on a subject to photograph the subject is known as a device that displays an image of a subject without using such a solid-state imaging device technology. ing.

  In this optical fiber scanning device, the tip of an optical fiber for illumination that guides light from a light source is two-dimensionally scanned, and the return light from the subject is received by a light receiving fiber bundle and detected over time. Two-dimensional imaging is performed using the light intensity signal.

  Optical fiber scanning methods include using a piezoelectric element in the optical fiber to scan using the piezoelectric effect, or using a magnetic field generator with a permanent magnet in the optical fiber and an electromagnetic coil around the permanent magnet. It is known that an optical fiber is scanned using a magnetic force generated between a magnetic field induced by a current flowing in a coil and a permanent magnet.

  For example, Patent Document 1 discloses an optical fiber scanner that uses a magnetic force generated between a permanent magnet and a magnetic field induced by a current flowing in the coil by arranging a circular coil in a cylinder. This conventional optical fiber scanning device has a structure in which an optical fiber having a permanent magnet is arranged in a cylinder and two pairs of coils are provided in the periphery, so that biaxial fiber driving in the X direction and the Y direction is possible. The technology is disclosed.

  The coils of the conventional optical fiber scanning device have an elliptical cross section. When the fiber is placed at the center, there are a total of four coils at positions facing each other in the X and Y directions. Has been placed. Although these coil structures are not disclosed in detail, Patent Document 1 uses a copper wire wound in an elliptical shape. Further, by using a coil having an elliptical cross section, the occupied area is reduced with respect to the circular coil, thereby achieving both the scanning range and the diameter.

  The two pairs of coils arranged in the cylinder perform independent control for each coil. For example, when a current is passed through the coil, a magnetic field is generated with the N or S pole located at the end of the coil. To do. In this way, current is applied to opposite ends of the pair of coils so that a magnetic field of opposite polarity is generated, and the light spot from the optical fiber is scanned on the object surface on the two pairs of coils. The current direction is controlled with respect to the opposing coils.

JP 2008-116922 A

  However, the structure of the optical fiber scanning device disclosed in Patent Document 1 is a complicated structure in which a copper wire is wound in an elliptical shape, and the elliptical winding coil cross section becomes three-dimensional. As the dimensions become larger and thicker, it becomes difficult to reduce the diameter of the cylinder. Therefore, when the magnetic field generator as a coil of the optical fiber scanning device of Patent Document 1 is used for the optical scanning endoscope, the diameter and size of the distal end portion of the insertion portion of the optical scanning endoscope are reduced. There was a problem that it was difficult.

  Accordingly, the present invention has been made in view of the above-described problems, and it is possible to reduce the diameter and reduce the size of the optical fiber scanning apparatus with a simple structure, a driving method of the optical fiber scanning apparatus, and the optical fiber scanning apparatus. An object of the present invention is to provide an optical scanning endoscope in which the distal end portion of the insertion portion has a small diameter and a small size.

  In order to achieve the above object, an optical fiber scanning device according to an aspect of the present invention includes: an optical fiber provided with a permanent magnet; and a drive coil of a conductor formed on an insulating layer formed on a planar substrate. A coil chip in which a driving coil is covered with a non-conductive resin; and a coil unit in which the four coil chips are continuously arranged in parallel, and the coil unit is formed by bending between adjacent coil chips. The optical fiber having the permanent magnet was disposed at the center of the cross section of the cylindrical body.

  According to one embodiment of the present invention, there is provided a method of driving an optical fiber scanning device in which a conductor drive coil is formed on an optical fiber provided with a permanent magnet and an insulating layer formed on a planar substrate, and the drive coil is not A coil chip covered with a conductive resin; and a coil unit in which the four coil chips are continuously arranged side by side. The coil unit is formed into a cylindrical body by bending between adjacent coil chips. Then, in the driving method of the optical fiber scanning device in which the optical fiber having the permanent magnet is disposed at the center position of the cross section of the cylindrical body, the drive coils of the two coil chips disposed at opposing positions are the same. A magnetic field acting on the permanent magnet in the direction is generated.

  According to an optical scanning endoscope of one embodiment of the present invention, a conductive coil is formed on an optical fiber provided with a permanent magnet and an insulating layer formed on a flat substrate, and the drive coil is non-conductive. A coil chip covered with a conductive resin, and a coil unit in which the four coil chips are continuously arranged in parallel, and the coil unit is formed into a cylindrical body by bending between adjacent coil chips. An optical fiber scanning device in which the optical fiber having the permanent magnet is disposed at the center of the cross section of the cylindrical body is disposed at the distal end portion of the insertion portion.

  According to the present invention, an optical fiber scanning device having a simple structure that can be reduced in diameter and size, a driving method of the optical fiber scanning device, and a distal end portion of the insertion portion can be reduced in diameter and size by the optical fiber scanning device. An optical scanning endoscope can be provided.

The perspective view which shows the structure of the scanning endoscope system which has the scanning endoscope of 1st Embodiment. Schematic diagram showing the configuration of a scanning endoscope system having a scanning endoscope Sectional drawing showing the configuration of the optical scanning unit A plan view showing the configuration of the thin film coil chip Sectional drawing which shows the structure of the thin film coil chip | tip along the VV line of FIG. A plan view showing the configuration of the thin film coil unit Sectional drawing which shows the structure of the thin film coil unit along the VII-VII line of FIG. Side view showing the optical scanning unit Sectional view showing the optical scanning unit Sectional drawing which shows the optical scanning unit along the XX line of FIG. Side view showing the configuration of the optical scanning unit of the second embodiment. Sectional drawing which shows the structure of the optical scanning unit along the XII-XII line | wire of FIG.

  Hereinafter, the endoscope according to the present invention will be described. In the following description, the drawings based on each embodiment are schematic, and the relationship between the thickness and width of each part, the thickness ratio of each part, and the like are different from the actual ones. It should be noted that the drawings may include portions having different dimensional relationships and ratios between the drawings.

(First embodiment)
First, the configuration of a scanning endoscope system having a scanning endoscope according to the first embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a perspective view showing the configuration of a scanning endoscope system having a scanning endoscope, FIG. 2 is a schematic diagram showing the configuration of a scanning endoscope system having a scanning endoscope, and FIG. FIG. 4 is a plan view showing the configuration of the thin film coil chip, FIG. 5 is a cross sectional view showing the configuration of the thin film coil chip along the line VV in FIG. 4, and FIG. 7 is a plan view showing the configuration of the coil unit, FIG. 7 is a cross-sectional view showing the configuration of the thin film coil unit along the line VII-VII in FIG. 6, FIG. 8 is a side view showing the optical scanning unit, and FIG. FIG. 10 is a cross-sectional view showing the optical scanning unit along the line XX in FIG.

  As shown in FIG. 1, an optical scanning endoscope system (hereinafter simply referred to as an endoscope system) 1 according to the present embodiment includes an optical scanning endoscope (hereinafter simply referred to as an endoscope) 2, It is mainly composed of a main body device 3 having functions of a light source device and a video processor, and a monitor 4. The endoscope 2 here irradiates the subject while scanning the illumination light, and obtains the return light from the subject and displays the subject image obtained by the main body device 3 connected to the monitor 4. It has become.

  The endoscope 2 is configured mainly with a tube body having a predetermined flexibility, and includes an elongated insertion portion 51 that is inserted into a living body, an operation portion 52, and a universal cable 53 that is an electric cable. It is configured. The insertion portion 51 of the endoscope 2 includes a distal end portion 54, a bending portion 55, and a flexible tube portion 56 in order from the distal end. The endoscope 2 illustrated here is a so-called flexible endoscope, but is not limited thereto, and the surgical insertion portion 51 may be a rigid endoscope.

  In the operation section 52 of the endoscope 2, a bending operation knob 57 for bending the bending section 55 of the insertion section 51 is rotatably disposed, and switches for various endoscope functions are provided. It has been. In the bending operation knob 57, an UP bending operation knob 57a for bending the bending portion 55 in the vertical direction and an RL bending operation knob 57b for bending the bending portion 55 in the left-right direction are superimposed. It is arranged.

  The connecting portion between the insertion portion 51 and the operation portion 52 includes a gripping portion 58 that also serves as a gripping portion by the user, and a bend preventing portion provided between the gripping portion 58 and one end of the flexible tube portion 56 of the insertion portion 51. And a treatment instrument channel insertion portion 59 serving as an opening of a treatment instrument channel through which various treatment instruments arranged in the insertion portion 51 are inserted.

  The universal cable 53 extended from the operation unit 52 has an endoscope connector 60 that is detachable from the main body device 3 at the extended end. The endoscope connector 60 has a coiled coil cable 60a extending, and an electrical connector 60b that is detachably attached to the main unit 3 is provided at the extending end of the coil cable 60a.

  The main unit 3 is electrically connected to a monitor 4 that displays an endoscopic image. Note that the endoscope system 1 may be provided with an air / water supply function in the main body device 3 for ejecting air and water from the distal end portion 54 of the insertion portion 51 of the endoscope 2.

  As shown in FIG. 2, an illumination optical system 13 and a detection optical system 16a configured by illumination lenses 13a and 13b are provided on the distal end surface 54a of the distal end portion 54 of the insertion portion 51. Further, inside the insertion portion 51, the illumination optical system 13 and an optical element that is inserted from the proximal end side to the distal end side, guides light from the light source unit 24 described later, and irradiates the living body with illumination light. Optical fiber scanning that constitutes an illumination fiber 14 that is an optical fiber and an actuator that is provided on the distal end side of the illumination fiber 14 and that scans the distal end of the illumination fiber 14 in a desired direction based on a drive signal from a driver unit 27 described later. An optical scanning unit 40 provided with an optical fiber scanning device 15 as a magnetic field generator is mounted. With such a configuration, the subject is irradiated with illumination light from the light source unit 24 guided by the illumination fiber 14 of the optical scanning unit 40.

  Further, inside the insertion portion 51, a detection fiber 16 is provided as a light receiving portion that is inserted from the proximal end side to the distal end side along the inner periphery of the insertion portion 51 and receives return light from the subject. . The detection optical system 16 a described above is disposed at the tip of the detection fiber 16. The detection fiber 16 may have a configuration of at least two fiber bundles. When the endoscope connector 60 of the endoscope 2 is connected to the main body device 3, the detection fiber 16 is connected to a duplexer 36 described later.

  In addition, a memory 19 that stores various types of information related to the endoscope 2 is provided inside the insertion unit 51. When the endoscope 2 is connected to the main body device 3, the memory 19 is connected to a controller 23 as a control unit described later via a signal line (not shown), and various information related to the endoscope 2 is transmitted by the controller 23. Read out.

  The main body device 3 includes a power source 21, a memory 22, a controller 23, a light source unit 24, a drive unit 25, and a detection unit 26. The light source unit 24 includes three light sources 31a, 31b, and 31c and a multiplexer 32.

  The drive unit 25 is provided with the driver unit 27 described above, and the optical fiber scanning device 15 is driven by the driver unit 27.

  The power supply 21 controls the supply of power to the controller 23 in accordance with an operation of a power switch (not shown). The memory 22 stores a control program for controlling the main device 3 as a whole.

  When power is supplied from the power source 21, the controller 23 as a control unit reads a control program from the memory 22, controls the light source unit 24 and the drive unit 25, and returns from the subject detected by the detection unit 26. The light intensity of the light is analyzed, and the periphery of the obtained subject image is masked as an image having a predetermined aspect ratio and displayed on the monitor 4.

  The light sources 31a, 31b, and 31c of the light source unit 24 multiplex light of different wavelength bands, for example, light of R (red), G (green), and B (blue) wavelength bands, based on the control of the controller 23. The light is emitted to the container 32. The multiplexer 32 combines the light in the R, G, and B wavelength bands emitted from the light sources 31 a, 31 b, and 31 c, and emits the light to the illumination fiber 14.

  The driver unit 27 of the drive unit 25 scans the drive signal for scanning the tip of the illumination fiber 14 in a desired direction, for example, an elliptical spiral (spiral) or a raster, based on the control of the controller 23. Output to the device 15. In other words, the driver unit 27 supplies the optical fiber scanning device 15 with a predetermined distance so as to drive the tip of the illumination fiber 14 in the left-right direction (X-axis direction) and the vertical direction (Y-axis direction) with respect to the insertion axis of the insertion portion 51. A drive signal is output.

  In this way, the optical fiber scanning device 15 generates a magnetic field based on the drive signal from the driver unit 27, swings the tip (free end) of the illumination fiber 14, and scans the elliptical spiral or raster. Thereby, the light emitted from the light source unit 24 to the illumination fiber 14 is sequentially irradiated to the subject in an elliptical spiral shape (spiral shape) or a raster shape. The illumination fiber 14 is provided with a cylindrical permanent magnet 17 to be described later for receiving and swinging the magnetic field from the optical fiber scanning device 15.

  The detection fiber 16 receives the return light reflected by the surface region of the subject and guides the received return light to the duplexer 36. The demultiplexer 36 is a dichroic mirror, for example, and demultiplexes the return light in a predetermined wavelength band. Specifically, the demultiplexer 36 demultiplexes the return light guided by the detection fiber 16 into return light in the R, G, and B wavelength bands, and outputs the demultiplexed light to the detectors 37a, 37b, and 37c, respectively. .

  The detectors 37a, 37b, and 37c detect the light intensities of the return lights in the R, G, and B wavelength bands, respectively. Light intensity signals detected by the detectors 37a, 37b, and 37c are output to A / D converters 38a, 38b, and 38c, respectively. The A / D converters 38 a to 38 c convert the light intensity signals output from the detectors 37 a to 37 c from analog signals to digital signals, and output them to the controller 23.

  The controller 23 performs predetermined image processing on the digital signals from the A / D converters 38 a to 38 c to generate a subject image and displays it on the monitor 4.

  Next, in the configuration of the endoscope system 1 configured as described above, the detailed configuration of the optical scanning unit 40 provided inside the distal end portion 54 of the insertion portion 51 will be described below.

  As shown in FIG. 3, the optical scanning unit 40 includes an illumination optical system 13 including illumination lenses 13a and 13b, a frame 43 that holds the illumination optical system 13, an optical fiber scanning device 15, and the light. A ferrule 41 as a holding member that fixes and holds the proximal end portion of the fiber scanning device 15 and the illumination fiber 14 is inserted and fixed, and a holding body 44 that holds the ferrule 41 together with the optical fiber scanning device 15 in the frame body 43. It is configured. The optical fiber scanning device 15 is connected to a wiring (not shown) to which a drive signal from a driver unit 27 (see FIG. 2) of the drive unit 25 is supplied.

  The ferrule 41 here is a member used in the field of optical communication, and the material is zirconia (ceramic), nickel, etc., and is highly accurate (for example, ± 1 μm) with respect to the outer diameter of the illumination fiber 14. Center hole machining can be easily realized. Further, the ferrule 41 is a quadrangular column (columnar shape) having a square cross section, and a center hole processing based on the diameter of the illumination fiber 14 is applied to the approximate center thereof, and the illumination fiber 14 is fixed with an adhesive or the like. . The center hole processing makes the clearance (gap) as small as possible and the adhesive layer as thin as possible. In addition, a low viscosity thing is used for the adhesive agent which adhere | attaches the ferrule 41 and the illumination fiber 14. FIG.

  As shown in FIGS. 4 and 5, the optical fiber scanning device 15 according to the present embodiment is a thin film in which an insulating layer 62 is formed on a silicon substrate 61 as a planar substrate, and a drive coil 63 is formed on the insulating layer 62. As shown in FIGS. 6 and 7, the coil chip 50 is a basic configuration, and a plurality of (here, four) thin film coil chips 50 are continuously arranged side by side.

  One thin film coil chip 50 of the optical fiber scanning device 15 has a drive coil 63 having a spiral shape formed on an insulating layer 62 on a silicon substrate 61, and is formed at both ends of the coil wiring of the drive coil 63. Electrical connection portions 64 and 65, which are electrode pads, are provided. That is, the thin-film coil chip 50 can be connected to the power supply wiring by the electrical connection portions 64 and 65. Here, the silicon substrate 61 has a taper 61a in which both corner portions are processed by edging or the like.

  The drive coil 63 is covered with a non-conductive resin 66 to ensure electrical insulation from the surroundings. Further, contact holes 67 and 68 are opened in the non-conductive resin 66 on the electrical connection portions 64 and 65 so that wiring connection is possible.

  Here, the electrical connection portions 64 and 65 are arranged at both ends of the coil wiring of the drive coil 63. However, the present invention is not limited to this, and a MEMS process such as two-layer wiring through the insulating layer 62 is used. Thus, the electrical connection pads 64 and 65 may be formed at positions where electrical connection can be easily made.

  In the manufacture of the thin film coil chip 50 of the present embodiment, first, the insulating layer 62 is formed on the silicon substrate 61 and the drive coil 63 is formed. The drive coil 63 is a low-resistance metal and is formed of gold, copper, or the like, which is relatively easy to manufacture.

  The drive coil 63 is formed by a MEMS process such as forming a metal thin film that serves as a seed for plating growth, forming a resin mold using a photoreactive resin, and growing the plating only on the metal thin film in the opening. Can be used. The drive coil 63 can be formed as a multilayered coil using a MEMS process instead of a single layer, and the coil wiring length can be increased.

  The non-conductive resin 66 can ensure electrical insulation and is preferably easily formed on the silicon substrate 61, and a high electrical pressure resistant resin such as polyimide or epoxy can be used. With such a configuration, a thin film coil chip 50 for a magnetic field generator in which a drive coil 63 is formed on a silicon substrate 61 can be manufactured. An optical fiber scanning device 15 as a magnetic field generator can be configured by using a plurality of the thin film coil chips 50.

  As described above, the thin film coil chip 50 can be configured to be very thin as compared with a conventional coil in which a copper wire is wound in an elliptical shape by forming the drive coil 63 using the MEMS process. it can.

  Here, the configuration of the optical fiber scanning device 15 provided with a plurality of, here four, thin film coil chips 50 will be described.

  The optical fiber scanner 15 includes a thin film coil unit 70 in which the above-described thin film coil chips 50 are continuously arranged in parallel as shown in FIGS. 6 and 7. The thin film coil unit 70 is integrally formed with a non-conductive resin 66 and is connected so that the four thin film coil chips 50 are integrally continuous.

  As shown in FIGS. 8 to 10, the thin film coil unit 70 configured as described above is bent between the thin film coil chips 50 and deformed into a cylindrical body having a rectangular cross section (square).

  Specifically, in the thin film coil unit 70, a part of the rear surface of the silicon substrate 61 is adhered to the four outer surfaces of the front end portion of the ferrule 41 fitted to the holding body 44 with an adhesive or the like. Attached and fixed. At this time, the connecting portion 66a of the non-conductive resin 66 connecting the thin film coil chip 50 is bent as a base point. That is, the thin film coil unit 70 is a column having a square section so that the connecting portion 66a of the nonconductive resin 66 between the adjacent thin film coil chips 50 is bent at a substantially right angle so that the silicon substrate 61 is on the inside. It becomes a cylindrical shape with a rectangular cross section so as to be wound around the outer peripheral surface of the ferrule 41.

  The thin film coil unit 70 is bent at the connecting portion 66a of the non-conductive resin 66. In order to easily determine the bending position in the connecting portion 66a, a cut such as a perforation is made. It may be easy to bend. Further, an adhesive or the like may be used to fix the shape when the thin film coil unit 70 is bent into a rectangular shape.

  The silicon substrate 61 adjacent to the thin film coil chip 50 here does not interfere with each other even if the thin film coil unit 70 is deformed into a cylindrical shape having a rectangular cross section because the taper 61a described above is formed. ing. Note that the cross section of the silicon substrate 61 is tapered by utilizing the property of the crystal orientation of silicon when anisotropic etching is performed. Therefore, even if the thin film coil unit 70 is deformed into a cylindrical shape having a rectangular cross section, the inner relief is formed by the taper 61a of the silicon substrate 61, and the adjacent silicon substrate 61 can be easily bent without interference. It becomes a possible structure. The silicon substrate 61 can be divided by a method other than anisotropic etching such as blade dicing.

  After the thin film coil unit 70 is fixed to the ferrule 41, the illumination fiber 14 provided with the cylindrical permanent magnet 17 is bonded and fixed to the ferrule 41. At this time, the tip portion of the illumination fiber 14 is disposed in a cylindrical hollow portion formed by the four thin film coil chips 50. Further, the permanent magnet 17 disposed in the middle of the tip of the illumination fiber 14 is aligned with the center position of the drive coil 63 of the four thin film coil chips 50, and the fixing position of the illumination fiber 14 to the ferrule 41 is adjusted. .

  That is, in the optical fiber scanning device 15, the illumination fiber 14 is disposed at the center position of the cross section of the cylinder formed by the thin film coil unit 70. Here, the permanent magnet 17 has the illumination fiber 14 inserted through a through-hole formed at the center, and is bonded and fixed to a middle part of the tip of the illumination fiber 14.

  As shown in FIG. 10, the optical fiber scanner 15 configured as described above is arranged so that four thin film coil chips 50 face each other in the X direction and the Y direction. That is, the two thin film coil chips 50a and 50b provided with the drive coil 63 that drives the illumination fiber 14 in the X direction by generating a magnetic force that acts on the permanent magnet 17 are opposed to each other to generate a magnetic force that acts on the permanent magnet 17. The two thin film coil chips 50c and 50d provided with the drive coil 63 for driving the illumination fiber 14 in the Y direction are arranged so as to face each other.

  Note that when the winding directions of the drive coils 63 are the same in the opposite form, a magnetic field in one direction is generated in the X direction or the Y direction when a current is passed through each drive coil 63. In addition, the number of driving coils 63 of the thin film coil chip 50 here is one, but two or more can be freely set. Furthermore, it is possible to change the direction of winding of the drive coil 63 to change the direction of generation of the magnetic field.

  For example, when the silicon substrate 61 is manufactured with a width of 1.2 mm, a length of 3 mm, and a thickness of 0.3 mm, the optical fiber scanning device 15 includes a cylindrical magnetic field generator having a square cross section with a side of 1.6 mm. Become. Of course, the size of the silicon substrate 61 can be changed, and further miniaturization is possible.

  Each thin film coil chip 50 here has a configuration in which two electrical connection portions 64 and 65 are provided. However, the thin film coil chip 50 is provided with a means such as forming the electrical connection portion into a two-layer wiring. It is good also as a structure which provides the wiring which passes through and integrates an electrical-connection part in one thin film coil chip | tip 50. FIG.

  The optical fiber scanning device 15 of the present embodiment configured as described above has a permanent magnet 17 provided on the illumination fiber 14 by electromagnetic force when a current is passed through the drive coils 63 of the two thin film coil chips 50a and 50b facing each other. Moves in the X direction, and the illumination fiber 14 vibrates (oscillates) in the X direction by switching the current direction. On the other hand, when a current is passed through the drive coils 63 of the two thin film coil chips 50c and 50d facing each other, the permanent magnet 17 provided in the illumination fiber 14 moves in the Y direction by electromagnetic force. Vibrates (oscillates) in the Y direction.

  As described above, the optical fiber scanning device 15 causes the current to flow through the drive coils 63 of the two thin film coil chips 50a and 50b that form a pair and the two thin film coil chips 50c and 50d that form the pair. The illumination fiber 14 can be driven two-dimensionally by combining the vibration (swing) of the illumination fiber 14 in the Y direction.

  The optical fiber scanning device 15 makes, for example, the vibration (swing) of the illumination fiber 14 in the X direction at a high speed (for example, about 7 KHZ) and the vibration (swing) of the illumination fiber 14 in the Y direction at a low speed (for example, 30HZ), a raster scan can be carried out, and the illumination fiber 14 is vibrated (oscillated) at a constant speed in both the X and Y directions to change the phase of the driving force in the X and Y directions. Spiral scan can be performed by scanning.

  For example, a soft magnetic material such as permalloy is provided so as to cover the outer periphery of the optical fiber scanning device 15 to prevent leakage of the magnetic field to the outside and increase the magnetic force acting on the inner permanent magnet 17. Anyway.

  As described above, the optical fiber scanning device 15 of the present embodiment has a small diameter and a small and simple structure by using the four thin-film coil chips 50 that are cylindrical as compared with the conventional winding coil structure. It becomes. As a result, the optical fiber scanning device 15 can be reduced in size and size, which can contribute to the reduction in the diameter of the insertion portion 51 of the endoscope 2 in which the optical fiber scanning device 15 is provided.

(Second Embodiment)
Next, a scanning endoscope system according to a second embodiment of the present invention will be described below with reference to FIGS. 11 is a side view showing the configuration of the optical scanning unit, and FIG. 12 is a cross-sectional view showing the configuration of the optical scanning unit along the line XII-XII in FIG. In the scanning endoscope system 1 here, the configuration of the optical fiber scanning device 15 built in the optical scanning endoscope 2 is a modification of the first embodiment, and the configuration described above. Are given the same reference numerals and explanations thereof are omitted.

  In the first embodiment described above, the four thin film coil chips 50 form a cylindrical shape with a rectangular cross section so that the drive coil 63 formed on the silicon substrate 61 is outward (outside) in the optical fiber scanning device 15. The configuration formed as described above is exemplified, but in order to strengthen the magnetic field in the cylinder formed by the four thin film coil chips 50, it is desirable that the distance (interval) between the opposing drive coils 63 is short.

  Therefore, in the present embodiment, the drive coil 63 formed on the silicon substrate 61 is formed into a cylindrical shape by the four thin film coil chips 50 so as to be inward (inner side) in the optical fiber scanning device 15. Yes.

  Specifically, as shown in FIGS. 12 and 13, in the optical fiber scanning device 15 of the present embodiment, the surface of the nonconductive resin 66 that covers the drive coil 63 of each thin film coil chip 50 is on the inside. The connecting portion 66a of the non-conductive resin 66 is bent as a base point. The optical fiber scanning device 15 has a square cross section so that the connecting portion 66a of the nonconductive resin 66 between the adjacent thin film coil chips 50 is bent at a substantially right angle so that the surface of the nonconductive resin 66 is inside. It becomes a cylindrical shape with a rectangular cross section so as to be wound around the outer peripheral surface of the ferrule 41 which is a columnar body.

  When the surface of the non-conductive resin 66 is bent so as to be on the inner side, as shown in FIG. 13, the electrical connection portion 64 (65) and the contact hole 67 (68) are arranged on the inner side. Therefore, various methods can be used for electrical connection to the electrical connection portion 64 (65), such as connecting a flexible substrate for through wiring or wiring lead-out, and any means can be used.

  By adopting such a configuration, the optical fiber scanning device 15 has a distance from the drive coil 63 to the center by the thickness of the silicon substrate 61 and the insulating layer 62 as compared with the configuration of the first embodiment. Is closer, and a larger magnetic field can be obtained.

  Compared to the configuration in which the drive coil 63 of the first embodiment is disposed outward, in the configuration in which the drive coil 63 is disposed inward as in the present embodiment, for example, the thickness of the silicon substrate 61 is Is set to 0.3 mm, the magnetic field acting on the permanent magnet 17 can be increased about twice.

  The optical fiber scanning device 15 configured as described above can have a simple structure with a small diameter as in the first embodiment, and further, the distance between the opposing drive coils 63 can be reduced to reduce the distance. A large magnetic field can be obtained with an electric current.

  According to the optical fiber scanning device 15 of the present embodiment described above, the silicon substrate 61 on which the drive coil 63 is formed is connected to the top by the non-conductive resin 66 and bent to form a cylindrical shape with a rectangular cross section. Thus, it is possible to reduce the size with a simple structure, and it is possible to realize a high-performance optical fiber scanner as a scanner that is easy to assemble.

  It should be noted that the invention described in the above-described embodiment is not limited to the embodiment and modification examples, and various modifications can be made without departing from the scope of the invention in the implementation stage. Further, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements.

  For example, even if some constituent requirements are deleted from all the constituent requirements shown in the embodiment, the described requirements can be deleted if the stated problem can be solved and the stated effect can be obtained. The configuration can be extracted as an invention.

DESCRIPTION OF SYMBOLS 1 ... Scanning endoscope system 2 ... Optical scanning endoscope 3 ... Main body apparatus 4 ... Monitor 13 ... Illumination optical system 13a, 13b ... Illumination lens 14 ... Illumination fiber 15 ... Optical fiber scanning apparatus 16 ... Detection fiber 16a ... Detection optical system 17 ... permanent magnet 19 ... memory 21 ... power supply 22 ... memory 23 ... controller 24 ... light source unit 25 ... drive unit 26 ... detection unit 27 ... driver units 31a, 31b, 31c ... light source 32 ... multiplexer 36 ... minute Wave detectors 37a, 37b, 37c ... Detectors 38a, 38b, 38c ... Converter 40 ... Optical scanning unit 41 ... Ferrule 43 ... Frame 44 ... Holder 50, 50a, 50b, 50c, 50d ... Thin film coil chip 51 ... Insertion Part 52 ... Operation part 53 ... Universal cable 54 ... End part 54a ... End face 55 ... Bending part 56 ... Flexible tube part 57 ... Bending operation 57a ... UP bending operation knob 57b ... RL bending operation knob 58 ... Grasping part 59 ... Treatment instrument channel insertion part 60 ... Endoscope connector 60a ... Coil cable 60b ... Electrical connector 61 ... Silicon substrate 61a ... Taper 62 ... Insulating layer 63 ... Drive coils 64, 65 ... Electrical connection portion 66 ... Non-conductive resin 66a ... Connection portions 67, 68 ... Contact hole 70 ... Thin film coil unit

Claims (10)

An optical fiber provided with a permanent magnet;
A coil chip in which a drive coil of a conductor is formed on an insulating layer formed on a flat substrate, and the drive coil is covered with a non-conductive resin; and
A coil unit in which the four coil chips are arranged in parallel;
Comprising
An optical fiber scanning device, wherein the coil unit is formed in a cylindrical body by bending between adjacent coil chips, and the optical fiber having the permanent magnet is disposed at a central position of a cross section of the cylindrical body.   The optical fiber scanning device according to claim 1, wherein the four coil chips are integrally connected by the non-conductive resin. A columnar holding member having a square cross-section formed with an insertion hole through which the optical fiber is inserted and fixed at the center,
The optical fiber scanning device according to claim 1, wherein the cylindrical body is formed by fixing the coil chip to each of the outer surfaces of the holding member.   The optical fiber scanning device according to any one of claims 1 to 3, wherein a taper is formed by edging an edge corner portion of the planar substrate.   5. The optical fiber scanning according to claim 1, wherein the planar substrate is an inner side of the cylindrical body, and the drive coil is disposed on an outer side of the cylindrical body. apparatus.   5. The optical fiber scanning according to claim 1, wherein the planar substrate is located on an outer side of the cylindrical body, and the drive coil is disposed on an inner side of the cylindrical body. apparatus. In the driving method of the optical fiber scanning device according to any one of claims 1 to 6,
2. A driving method of an optical fiber scanning device, wherein driving coils of two coil chips arranged at opposing positions generate a magnetic field in the same direction acting on the permanent magnet.   The optical fiber is swung at a high speed in the first direction, and the rocking speed of the optical fiber in the second direction orthogonal to the first direction is lower than the speed in the first direction. 8. The method of driving an optical fiber scanning device according to claim 7, wherein raster scanning is performed by driving the optical fiber scanning device.   8. The optical fiber scanning according to claim 7, wherein spiral scanning is performed by driving the oscillation speed of the optical fiber in a first direction and a second direction orthogonal to the first direction at a constant speed. Device driving method.   An optical scanning endoscope characterized in that the optical fiber scanning device according to any one of claims 1 to 6 is disposed at a distal end portion of an insertion portion.

Images