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JP6066103B2 - Burner for manufacturing porous glass base material - Google Patents

Burner for manufacturing porous glass base material Download PDF

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JP6066103B2
JP6066103B2 JP2014036734A JP2014036734A JP6066103B2 JP 6066103 B2 JP6066103 B2 JP 6066103B2 JP 2014036734 A JP2014036734 A JP 2014036734A JP 2014036734 A JP2014036734 A JP 2014036734A JP 6066103 B2 JP6066103 B2 JP 6066103B2
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nozzles
small
gas
diameter
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JP2015160774A (en
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真 吉田
真 吉田
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Shin Etsu Chemical Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • C03B37/0142Reactant deposition burners
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/04Multi-nested ports
    • C03B2207/06Concentric circular ports
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/04Multi-nested ports
    • C03B2207/12Nozzle or orifice plates
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/04Multi-nested ports
    • C03B2207/14Tapered or flared nozzles or ports angled to central burner axis
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/20Specific substances in specified ports, e.g. all gas flows specified
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/36Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/50Multiple burner arrangements
    • C03B2207/52Linear array of like burners

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Pre-Mixing And Non-Premixing Gas Burner (AREA)
  • Glass Melting And Manufacturing (AREA)

Description

本発明は、多孔質ガラス母材製造用バーナに関する。   The present invention relates to a burner for producing a porous glass base material.

光ファイバ母材を製造するために、各種方法が提案されている。それらの方法の中でも、回転する出発部材にバーナの火炎中で生成したガラス微粒子をバーナもしくは出発部材を相対往復運動させて、付着堆積させてスートを合成し、これを電気炉内で脱水、焼結させる外付け法(OVD法)は、比較的任意の屈折率分布のものが得られ、しかも、大口径の光ファイバ母材を量産できることから汎用されている。
従来、ガラス微粒子堆積体を合成するバーナとしては、同芯多重管バーナが用いられてきたが、このような構造のバーナは、ガラス原料ガス、可燃性ガス及び助燃性ガスの混合が充分に行われないため、ガラス微粒子の生成が充分に行われなかった。その結果、収率が伸びずに、高速な合成が困難であった。
Various methods have been proposed for producing optical fiber preforms. Among these methods, glass soot generated in the flame of the burner is reciprocated by the reciprocating motion of the burner or the starting member on the rotating starting member, and deposited and deposited to synthesize soot, which is dehydrated and baked in an electric furnace. The external attachment method (OVD method) is widely used because it can obtain a relatively arbitrary refractive index distribution and can mass-produce a large-diameter optical fiber preform.
Conventionally, a concentric multi-tube burner has been used as a burner for synthesizing a glass particulate deposit. However, a burner having such a structure sufficiently mixes a glass raw material gas, a combustible gas, and an auxiliary combustible gas. As a result, glass fine particles were not sufficiently produced. As a result, the yield was not increased and high-speed synthesis was difficult.

この問題を解決するために、特許文献1では、可燃性ガス噴出ノズル内に、中心の原料ガス噴出ノズルを取り囲むように小口径助燃性ガス噴出ノズルを配置したマルチノズル型バーナが提案されている。
さらに特許文献2では、小口径助燃性ガス噴出ノズルの焦点距離をLとし、小口径助燃性ガス噴出ノズルの先端と母材堆積面との距離をLとした場合、LをLよりも大きくすることで、原料ガス流が乱れることを防いで堆積効率を向上させる方法が提案されている。
In order to solve this problem, Patent Document 1 proposes a multi-nozzle burner in which a small-diameter auxiliary combustion gas ejection nozzle is disposed in a combustible gas ejection nozzle so as to surround a central raw material gas ejection nozzle. .
Furthermore, in Patent Document 2, if the focal length of the small-diameter supporting gas injection nozzle and L 1, the distance between the tip and the base metal deposition surface of the small-diameter supporting gas injection nozzle was set to L 2, the L 1 L 2 A method for improving the deposition efficiency by preventing the flow of the raw material gas from being disturbed has been proposed.

逆に、特許文献3では、L1をL2よりも小さくすることで、ガス混合の効率を高め、堆積効率を向上させる方法が提案されている。
また、特許文献4では、小口径ガスノズルを環状に複数列配設し、これらの外側の環状列の焦点距離を内側の環状列の焦点距離よりも長くする多焦点構成とすることにより、堆積効率を向上させる方法が提案されている。
On the other hand, Patent Document 3 proposes a method of increasing the efficiency of gas mixing and improving the deposition efficiency by making L1 smaller than L2.
Further, in Patent Document 4, a plurality of small-diameter gas nozzles are annularly arranged, and the deposition efficiency is improved by adopting a multifocal configuration in which the focal lengths of the outer annular rows are longer than the focal lengths of the inner annular rows. A method for improving the above has been proposed.

特公平3-9047号公報Japanese Patent Publication No. 3-9047 特許第3543537号Patent No. 3543537 特開2003-226544号公報JP2003-226544 特開平5-323130号公報JP-A-5-323130

焦点を合わせた小口径ガス噴出ノズルから線速の大きい助燃性ガスを供給し、ガスの混合効率を向上させるマルチノズル型バーナは、さらにガス混合を促進させようと、小口径ガス噴出ノズルの数を増やす、もしくは、小口径ガス噴出ノズルに供給するガス量を増やすと、助燃性ガスが1点に集中しすぎて火炎が大きく乱れ、堆積効率が低下する。
他方、集中することを避けて、小口径ガス噴出ノズルの数を抑える、もしくは、小口径ガス噴出ノズルに供給するガス量を減らすと、ガスの混合効率が低下し、マルチノズル型のメリットが薄れ、堆積効率が向上しない。
A multi-nozzle burner that improves the gas mixing efficiency by supplying a high-speed auxiliary combustion gas from a focused small-diameter gas injection nozzle and increasing the gas mixing efficiency. If the amount of gas supplied to the small-diameter gas jet nozzle is increased, the auxiliary combustion gas is concentrated too much at one point, the flame is greatly disturbed, and the deposition efficiency is lowered.
On the other hand, avoiding concentration and reducing the number of small-diameter gas ejection nozzles or reducing the amount of gas supplied to the small-diameter gas ejection nozzles will reduce the gas mixing efficiency and diminish the merits of the multi-nozzle type The deposition efficiency is not improved.

また、特許文献4の様な方法では、複数の列間同士のガス集中は避けられるが、同一列のガスは集中する。そのため、可燃性ガス噴出ノズル内に同じ本数の小口径ガス噴出ノズルを収納する場合、同一列のノズルの本数を減らしてノズル列を増やす必要が有り、その結果、これらを覆う外管の口径が大きくなり、可燃性ガスの使用量が大幅に増えることになる。
このため本発明は、火炎の乱れを抑えて、堆積効率を高めることができる多孔質ガラス母材製造用バーナを提供することを目的としている。
Moreover, in the method like patent document 4, although the gas concentration between several rows is avoided, the gas of the same row concentrates. Therefore, when storing the same number of small-diameter gas injection nozzles in the combustible gas injection nozzle, it is necessary to reduce the number of nozzles in the same row and increase the nozzle row. This will increase the amount of flammable gas used.
Therefore, an object of the present invention is to provide a burner for producing a porous glass base material that can suppress the disturbance of the flame and increase the deposition efficiency.

本発明は、上記課題を解決するためになされたもので、本発明の多孔質ガラス母材製造用バーナは、中心のガラス原料ガス噴出ノズルの外側に、ガラス原料ガス噴出ノズルに対し同心円状に1列または複数列に配置される小口径助燃性ガス噴出ノズルを内包する可燃性ガス噴出ノズルを備えたガラス微粒子合成用バーナにおいて、同一列上に配置された上記小口径助燃性ガス噴出ノズルが、同一焦点を持つノズルの組合せを2組以上含み、かつ、それぞれの組の持つ焦点が異なることを特徴としている。
なお、前記同一列の小口径助燃性ガス噴出ノズルは、同一焦点を持つノズルが互いに隣接していないように配置されていることが好ましい。また、前記小口径助燃性ガス噴出ノズルの開口径が、焦点によって異なっていることが好ましい。さらに、可燃性ガス噴出ノズル内に、複数列の小口径助燃性ガス噴出ノズルを有し、より内側に配列されたノズルほど焦点距離を短くするのが好ましい。
The present invention has been made to solve the above problems, and the porous glass preform manufacturing burner of the present invention is concentrically formed outside the central glass raw material gas injection nozzle with respect to the glass raw material gas injection nozzle. In the glass fine particle synthesis burner having a combustible gas injection nozzle including a small-diameter auxiliary combustion gas injection nozzle arranged in one or a plurality of rows, the small-diameter auxiliary combustion gas injection nozzle arranged on the same row includes In addition, two or more combinations of nozzles having the same focus are included, and the focus of each set is different.
In addition, it is preferable that the small-diameter auxiliary combustible gas ejection nozzles in the same row are arranged so that nozzles having the same focal point are not adjacent to each other. Moreover, it is preferable that the opening diameter of the said small-diameter auxiliary | assistant combustible gas ejection nozzle changes with focus. Furthermore, it is preferable to have a plurality of rows of small-diameter auxiliary gas-injecting nozzles in the combustible gas-injecting nozzles, and the shorter the focal length of the nozzles arranged on the inner side.

このように、同一列の小口径助燃性ガス噴出ノズル(以下、単に小口径ノズルと称する) の焦点距離を変えることで、ガス混合効率を維持しながら、噴出されたガスの焦点を分散させることができ、火炎の乱れを抑えて、堆積効率を高めることができる。さらに、同一列上で同一焦点を持つノズルが互いに隣接していないことで、火炎の直進性を損なうことなく堆積効率を向上させることができる。   In this way, by changing the focal length of the small-diameter auxiliary combustible gas ejection nozzles (hereinafter simply referred to as small-diameter nozzles) in the same row, the focal point of the ejected gas can be dispersed while maintaining the gas mixing efficiency. It is possible to suppress the disturbance of the flame and increase the deposition efficiency. Furthermore, since nozzles having the same focus on the same row are not adjacent to each other, the deposition efficiency can be improved without impairing the straightness of the flame.

光ファイバ母材の製造装置の一例を示す概略図である。It is the schematic which shows an example of the manufacturing apparatus of an optical fiber preform. 小口径ノズルを有するガラス微粒子合成用バーナの一例を示す横断面図である。It is a cross-sectional view which shows an example of the burner for glass fine particle synthesis | combination which has a small diameter nozzle. 従来の小口径ノズルを有するバーナの横断面図である。It is a cross-sectional view of a burner having a conventional small diameter nozzle. 図3に示した小口径ノズルの縦断面である。FIG. 4 is a vertical cross-section of the small diameter nozzle shown in FIG. 3. 本発明の、同一列で焦点の異なる2組の小口径ノズルを有するバーナの一例を示す横断面である。It is a cross section which shows an example of the burner which has two sets of small diameter nozzles from which the focus differs in the same row | line | column of this invention. 図5に示した小口径ノズルの縦断面である。It is a longitudinal cross-section of the small diameter nozzle shown in FIG. 本発明の、同一列で焦点の異なる2組の小口径ノズルを有するバーナの他の例を示す横断面であり、各焦点の小口径ノズルの開口サイズが異なるパターンを示す。It is a cross section which shows the other example of the burner which has two sets of small diameter nozzles from which the focus differs in the same row | line of this invention, and shows the pattern from which the opening size of the small diameter nozzle of each focus differs. 図7に示した小口径ノズルの縦断面である。It is a longitudinal cross-section of the small diameter nozzle shown in FIG. 本発明の、焦点距離の異なる3組の小口径ノズルを有する例を示す横断面である。It is a cross section which shows the example which has three sets of small diameter nozzles from which a focal distance differs of this invention. 図9に示した小口径ノズルの縦断面である。FIG. 10 is a longitudinal section of the small diameter nozzle shown in FIG. 9. 本発明の、同一列において焦点距離の異なる3組の小口径ノズルを有する例を示す横断面である。It is a cross section which shows the example which has three sets of small diameter nozzles from which focal distance differs in the same row | line of this invention. 図11に示した小口径ノズルの縦断面である。12 is a vertical cross section of the small diameter nozzle shown in FIG.

以下、本発明の実施の形態を通じて本発明をさらに詳細に説明するが、本発明は、以下の実施形態に限定されず、特許請求の範囲内において様々な態様が可能である。
以下、本発明の光ファイバ母材の製造方法及び装置について、図面を参照しつつ詳細に説明する。
Hereinafter, the present invention will be described in more detail through embodiments of the present invention. However, the present invention is not limited to the following embodiments, and various modes are possible within the scope of the claims.
Hereinafter, the manufacturing method and apparatus of the optical fiber preform of the present invention will be described in detail with reference to the drawings.

図1は、光ファイバ母材の製造装置の一例を示したものである。
図1において出発部材は、コアロッド1の両端部にダミーロッド2を溶着したもので、この出発部材は不図示の基材支持部材により軸回りに回転自在に支持されている。この出発部材に向かって、左右に移動自在のバーナ3が配置されている。ここで、バーナ3からファイバ用原料、例えばSiCl4 等の蒸気と燃焼用ガス(水素ガスおよび酸素ガス)とを吹き付け、酸水素火炎中で加水分解させて、スート5を合成し、これを出発部材1に堆積させて光ファイバ用多孔質母材を形成する。
FIG. 1 shows an example of an optical fiber preform manufacturing apparatus.
In FIG. 1, the starting member is formed by welding dummy rods 2 to both ends of the core rod 1, and this starting member is supported by a base material support member (not shown) so as to be rotatable about an axis. A burner 3 that is movable to the left and right is disposed toward the starting member. Here, a fiber raw material, for example, a vapor of SiCl 4 and a combustion gas (hydrogen gas and oxygen gas) are sprayed from the burner 3 and hydrolyzed in an oxyhydrogen flame to synthesize soot 5 and start. A porous preform for optical fiber is formed by being deposited on the member 1.

次に、このような外付け法(OVD法)による光ファイバ母材の製造方法について説明する。まず、不図示の基材支持部により支持された出発部材を軸回りに回転モータ4で回転させながら、この出発部材に向けてバーナ3から火炎を噴射して、出発部材上にスートを堆積させる。そして、バーナ3を不図示のバーナガイド機構により、長手方向に往復移動させて堆積層を形成し、光ファイバ用多孔質母材を製造する。堆積しなかったガラス微粒子(スート)は、排気口6から排出される。
得られた光ファイバ用多孔質ガラス母材をヒータと断熱材からなる加熱炉内を通過させ、脱水・透明ガラス化することで、光ファイバ母材が得られる。
Next, a method for manufacturing an optical fiber preform by such an external method (OVD method) will be described. First, while a starting member supported by a base material support (not shown) is rotated around the axis by the rotary motor 4, a flame is injected from the burner 3 toward the starting member to deposit soot on the starting member. . Then, the burner 3 is reciprocated in the longitudinal direction by a burner guide mechanism (not shown) to form a deposited layer, and a porous optical fiber preform is manufactured. The glass fine particles (soot) not deposited are discharged from the exhaust port 6.
An optical fiber preform is obtained by passing the obtained porous glass preform for an optical fiber through a heating furnace composed of a heater and a heat insulating material, followed by dehydration and transparent vitrification.

バーナは、図2に示すような同芯5重管構造を有するマルチノズル型のバーナが使用される。バーナは、第3管内に、中心管に対し同心円状一列に小口径ノズルが8本配置されている。なお、各ノズルには、図3に示すように、0時位置のノズルAから時計回りに順にHまで記号が付されている。
この小口径ノズルには、図3,4に示すように、同一列8本の焦点距離を同一にした従来型バーナと、図5、6に示すように、2種類の焦点距離を互い違いに計4本ずつ配置した本発明型バーナの2種類を用意し、表1に示すように焦点距離を変えた各3種類計6種類のバーナを用意した。
As the burner, a multi-nozzle type burner having a concentric five-pipe structure as shown in FIG. 2 is used. The burner has eight small-diameter nozzles arranged in a row concentrically with respect to the center tube in the third tube. In addition, as shown in FIG. 3, the symbols are assigned to the nozzles in order from the nozzle A at the 0 o'clock position to H in the clockwise direction.
As shown in FIGS. 3 and 4, the small-bore nozzle has a conventional burner having the same focal length of eight in the same row, and two types of focal lengths as shown in FIGS. Two types of the present invention type burner arranged four by four were prepared. As shown in Table 1, three types each with different focal lengths were prepared, and six types of burners were prepared.

バーナに導入するガスは、第一ガス噴出ノズル7にガラス原料ガスSiClと助燃性ガスO、第二ガス噴出ノズル8にシールガスN、第三ガス噴出ノズル10に可燃性ガスH、第四ガス噴出ノズル11にシールガスN、第五ガス噴出ノズル12に助燃性ガスO、小口径ノズル9に助燃性ガスOを供給した。
ここで、同一種類のバーナを3本並べて配置し、外径60mm、長さ1500mmのコアロッドの両端部に外径60mmのダミーロッドを溶着した出発部材上に、多孔質ガラス微粒子を100kg堆積させた。
この結果、各バーナの堆積効率は、表1に示すような結果が得られた。
The gas introduced into the burner is glass raw material gas SiCl 4 and auxiliary combustion gas O 2 in the first gas injection nozzle 7, seal gas N 2 in the second gas injection nozzle 8, and combustible gas H 2 in the third gas injection nozzle 10. The fourth gas injection nozzle 11 was supplied with the seal gas N 2 , the fifth gas injection nozzle 12 was supplied with the auxiliary combustion gas O 2 , and the small diameter nozzle 9 was supplied with the auxiliary combustion gas O 2 .
Here, three burners of the same type were arranged side by side, and 100 kg of porous glass fine particles were deposited on the starting member in which a dummy rod having an outer diameter of 60 mm was welded to both ends of a core rod having an outer diameter of 60 mm and a length of 1500 mm. .
As a result, as shown in Table 1, the deposition efficiency of each burner was obtained.

Figure 0006066103
Figure 0006066103

表1より、従来型では、焦点距離を150mmに設定した従来型2の堆積効率が63.7%で、最も高かった。
他方、2種類の焦点距離を交互に配置した本発明型バーナは、高いガス混合効率と安定した火炎の効果で堆積効率が67.4〜68.3%となり、3種類とも従来型よりも堆積効率が極めて向上した。特に、従来型で最も堆積効率の良かった焦点距離150mmを中心に焦点距離を設定した本発明3のバーナの堆積効率が最も高くなった。
From Table 1, the conventional type with the focal length set to 150 mm showed the highest deposition efficiency of 63.7%.
On the other hand, the burner according to the present invention in which two kinds of focal lengths are alternately arranged has a high gas mixing efficiency and a stable flame effect, and the deposition efficiency is 67.4 to 68.3%. did. In particular, the deposition efficiency of the burner of the invention 3 having the focal length set around the focal length of 150 mm, which had the highest deposition efficiency in the conventional type, was the highest.

さらに、本発明の多孔質ガラス母材製造用バーナは、様々な態様が可能であり、例えば、以下のような例が挙げられる。
図7、8は、焦点の異なる2組の小口径ノズルを有するバーナの他の例を示す横断面であり、各焦点の小口径ノズルの開口サイズが異なるパターンを示している。図において、小口径ノズルは、開口径が大きく、焦点距離Lを有するA,C,E,Gの群と、より開口径が小さく、焦点距離Lを有するB,D,F,Hの群からなっている。
Furthermore, various aspects are possible for the burner for porous glass preform | base_material manufacture of this invention, For example, the following examples are given.
7 and 8 are cross sections showing another example of a burner having two sets of small diameter nozzles with different focal points, and show patterns in which the opening sizes of the small diameter nozzles at the respective focal points are different. In the figure, small diameter nozzle, large opening diameter, and the group of A, C, E, G, which has a focal length L 2, smaller and more opening diameter, B having a focal length L 1, D, F, H- It consists of a group.

図9、10は、焦点距離の異なる3組の小口径ノズルを有する例を示している。小口径ノズルの外側の列は、焦点距離Lを有するA,C,E,Gの群と、焦点距離Lを有するB,D,F,Hの群からなり、小口径ノズルの内側の列は、最も短い焦点距離Lを有している。 9 and 10 show examples having three sets of small diameter nozzles having different focal lengths. Outer rows of small diameter nozzles, a group of A, C, E, G, which has a focal length L 3, B having a focal length L 2, becomes D, F, from the group of H, the small diameter nozzle inner column has a shortest focal length L 1.

図11、12に示す例は、同一列において、焦点距離の異なる3組の小口径ノズルを有する例を示している。本例の小口径ノズル群は、焦点距離Lを有するA,D,G,Jの群と、焦点距離Lを有するB,E,H,Kの群と、焦点距離Lを有するC,F,I,Lの群からなっている。 The example shown in FIGS. 11 and 12 shows an example having three sets of small diameter nozzles having different focal lengths in the same row. Small diameter nozzle groups of this embodiment, C having a group A, D, G, J having a focal length L 3, B having a focal length L 1, E, H, and the group of K, the focal length L 2 , F, I, and L.

以上、説明したように本実施例に示したバーナは、同一列上に配置された小口径ノズルが、同一焦点を持つノズルの組合せを2組以上備え、かつ、それぞれの組の持つ焦点が異なっていることにより、ガス混合効率を維持しながら、噴射されたガスの焦点を分散させることで、火炎の乱れを抑えることができ、さらに、同一列上で同一焦点を持つノズルが互いに隣接していないことで、火炎の直進性を損なうことなく、堆積効率を向上させることができた。   As described above, in the burner shown in this embodiment, the small-aperture nozzles arranged on the same row include two or more combinations of nozzles having the same focus, and the focus of each set is different. Therefore, it is possible to suppress the disturbance of the flame by dispersing the focus of the injected gas while maintaining the gas mixing efficiency, and the nozzles having the same focus on the same row are adjacent to each other. In this case, the deposition efficiency could be improved without impairing the straightness of the flame.

以上、本発明を実施の形態を用いて説明したが、本発明の技術的範囲は上記実施の形態に記載の範囲に限定されず、上記実施の形態に、多様な変更または改良を加えることもできることは明白である。   As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment, A various change or improvement can also be added to the said embodiment. It is clear that we can do it.

1 コアロッド、
2 ダミーロッド、
3 バーナ、
4 回転モータ、
5 スート、
6 排気口、
7 第一ガス噴出ノズル、
8 第二ガス噴出ノズル、
9 小口径ノズル、
10 第三ガス噴出ノズル、
11 第四ガス噴出ノズル、
12 第五ガス噴出ノズル。
1 core rod,
2 dummy rod,
3 Burner,
4 Rotating motor,
5 Soot,
6 Exhaust port,
7 First gas ejection nozzle,
8 Second gas ejection nozzle,
9 Small diameter nozzle,
10 Third gas ejection nozzle,
11 Fourth gas ejection nozzle,
12 Fifth gas ejection nozzle.

Claims (4)

中心のガラス原料ガス噴出ノズルの外側に、ガラス原料ガス噴出ノズルに対し同心円状に1列または複数列に配置される小口径助燃性ガス噴出ノズルを内包する可燃性ガス噴出ノズルを備えたガラス微粒子合成用バーナにおいて、同一列上に配置された上記小口径助燃性ガス噴出ノズルが、同一焦点を持つノズルの組合せを2組以上含み、かつ、それぞれの組の持つ焦点が異なることを特徴とする多孔質ガラス母材製造用バーナ。 Fine glass particles provided with a combustible gas jet nozzle containing a small-diameter auxiliary combustion gas jet nozzle arranged in one or more rows concentrically with the glass raw material gas jet nozzle outside the central glass source gas jet nozzle In the synthesis burner, the small-aperture auxiliary gas ejection nozzles arranged on the same row include two or more combinations of nozzles having the same focus, and the focus of each set is different. Burner for manufacturing porous glass base material. 前記同一列の小口径助燃性ガス噴出ノズルは、同一焦点を持つノズルが互いに隣接していないように配置されている請求項1に記載の多孔質ガラス母材製造用バーナ。 2. The burner for producing a porous glass base material according to claim 1, wherein the small-diameter auxiliary combustion gas ejection nozzles in the same row are arranged such that nozzles having the same focal point are not adjacent to each other. 前記小口径助燃性ガス噴出ノズルの開口径が、焦点によって異なっている請求項1又は2に記載の多孔質ガラス母材製造用バーナ。 The burner for manufacturing a porous glass base material according to claim 1 or 2, wherein an opening diameter of the small-diameter auxiliary combustible gas ejection nozzle varies depending on a focal point. 可燃性ガス噴出ノズル内に、複数列の小口径助燃性ガス噴出ノズルを有し、より内側に配列されたノズルほど焦点距離が短くなつている請求項1乃至3のいずかに記載の多孔質ガラス母材製造用バーナ。 The porous body according to any one of claims 1 to 3, wherein a plurality of rows of small-diameter auxiliary gas-injecting nozzles are provided in the combustible gas-injecting nozzles, and the focal length is shorter as the nozzles are arranged more inside. Burner for the production of quality glass base material.
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