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JP5293163B2 - Magnetic characteristic measuring device and magnetic characteristic measuring method - Google Patents

Magnetic characteristic measuring device and magnetic characteristic measuring method Download PDF

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JP5293163B2
JP5293163B2 JP2008329743A JP2008329743A JP5293163B2 JP 5293163 B2 JP5293163 B2 JP 5293163B2 JP 2008329743 A JP2008329743 A JP 2008329743A JP 2008329743 A JP2008329743 A JP 2008329743A JP 5293163 B2 JP5293163 B2 JP 5293163B2
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signal waveform
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JP2010152973A (en
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由樹雄 平井
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Fujitsu Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a device and method for measurement of magnetic characteristics capable of properly measuring the magnetic characteristics of a perpendicular magnetic recording medium. <P>SOLUTION: The magnetic characteristic measuring device A includes: an electromagnet 1 making a perpendicular magnetic field act on a measurement unit of a magnetic disk B; a variable fixed current supplying means 2 supplying a DC driving current to the electromagnet 1 in a prescribed variable range; a magnetic reading means 3 reading a leakage magnetic field from the magnetic disk B; measurement unit moving means 6 and 7 repetitively moving the measurement unit from a position opposed to magnetic poles 1A and 1B to a position opposed to the magnetic reading means 3; a current variably controlling means 8 variably controlling the DC driving current via the variable fixed current supplying means 2 whenever prescribed movement operation is performed by the measurement unit moving means 6 and 7; and a signal waveform analyzing means 10 acquiring the signal output from the magnetic reading means 3 and analyzing the signal waveform thereof whenever the prescribed movement operation is performed by the measurement unit moving means 6 and 7. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

本発明は、垂直磁気記録媒体の磁気特性を測定するための磁気特性測定装置および磁気特性測定方法に関する。   The present invention relates to a magnetic characteristic measuring apparatus and a magnetic characteristic measuring method for measuring magnetic characteristics of a perpendicular magnetic recording medium.

磁性部材の磁気特性を測定する技術としては、特許文献1に開示されたものがある。同文献に開示された技術では、振動試料型磁力計(Vibrating Sample Magnetometer:通称VSM)を用いて磁性材料を含む圧延材の磁気特性を測定している。この振動試料型磁力計は、電磁石により発生させた磁界中に小型の試料を配置するとともに、その試料を一定の振幅および周波数で振動させ、その試料の磁化の大きさを検出コイルに誘起する磁気誘導電圧として取り込むことにより、比較的小さい試料の磁気特性を測定するものである。   As a technique for measuring the magnetic characteristics of a magnetic member, there is one disclosed in Patent Document 1. In the technique disclosed in this document, a magnetic property of a rolled material including a magnetic material is measured using a vibrating sample magnetometer (commonly known as VSM). This vibrating sample magnetometer places a small sample in a magnetic field generated by an electromagnet, vibrates the sample with a constant amplitude and frequency, and induces the magnitude of magnetization of the sample in a detection coil. By taking it as an induced voltage, the magnetic properties of a relatively small sample are measured.

特開2000−286112号公報JP 2000-286112 A

しかしながら、上記従来の振動試料型磁力計を用いた磁気特性測定方法では、磁性材料が全体にわたって均一に含有する試料には対応するものの、非磁性領域内に磁性部分が離散状に形成されたような垂直磁気記録媒体には対応することができない難点があった。たとえば垂直磁気記録媒体には、いわゆるパターンドメディアと称される磁気ディスクのように、最小記録単位となる磁性ドットが数十nm程度の大きさで非磁性領域内に多数形成されたものがある。このような磁気ディスクについては、極めて小さい磁性ドットに正確に目標を定めてその磁気特性を測定することができない。そのため、パターンドメディアといった磁気ディスクの開発に伴い、振動試料型磁力計に代わる磁気特性測定装置の実現が重要とされていた。   However, in the magnetic property measurement method using the above-described conventional vibrating sample type magnetometer, although the magnetic material corresponds to the sample containing the entire material uniformly, it seems that the magnetic portions are discretely formed in the nonmagnetic region. However, there is a difficulty that cannot be dealt with in a perpendicular magnetic recording medium. For example, a perpendicular magnetic recording medium includes a magnetic disk called a so-called patterned medium, in which a large number of magnetic dots as a minimum recording unit are formed in a non-magnetic region with a size of about several tens of nanometers. . With respect to such a magnetic disk, it is impossible to accurately set a target for extremely small magnetic dots and measure the magnetic characteristics thereof. Therefore, along with the development of magnetic disks such as patterned media, it has been important to realize a magnetic property measuring device that can replace the vibrating sample magnetometer.

本発明は、上記した事情のもとで考え出されたものであって、垂直磁気記録媒体の磁気特性を適正に測定することができる磁気特性測定装置および磁気特性測定方法を提供することをその課題としている。   The present invention has been conceived under the circumstances described above, and provides a magnetic property measuring apparatus and a magnetic property measuring method capable of appropriately measuring the magnetic properties of a perpendicular magnetic recording medium. It is an issue.

上記課題を解決するため、本発明では、次の技術的手段を講じている。   In order to solve the above problems, the present invention takes the following technical means.

本発明の第1の側面によれば、非磁性領域内に磁性領域が離散状に形成された垂直磁気記録媒体の磁気特性を測定するための磁気特性測定装置であって、上記垂直磁気記録媒体の表面における所定の測定部位に磁極を介して複数の磁性領域に同時に垂直磁界を作用させる電磁石と、上記電磁石に所定の可変範囲で直流駆動電流を供給する可変定電流供給手段と、上記垂直磁気記録媒体の表面に対向配置させられ、その表面からの漏洩磁界を上記磁性領域毎に読み取る磁気読み取り手段と、上記測定部位を上記磁極と対向する位置から上記磁気読み取り手段と対向する位置へと繰り返し移動させる測定部位移動手段と、上記測定部位移動手段によって所定の移動動作が行われるごとに上記可変定電流供給手段を介して上記直流駆動電流を可変制御する電流可変制御手段と、上記測定部位移動手段によって所定の移動動作が行われるごとに上記磁気読み取り手段から出力される信号を取得し、その信号波形を解析する信号波形解析手段と、を備え、上記信号波形解析手段は、上記電磁石が印加した垂直磁界に対する磁化方向が反転した上記磁性領域の個数から磁化曲線を生成する磁気特性測定装置が提供される。 According to a first aspect of the present invention, there is provided a magnetic property measuring apparatus for measuring magnetic properties of a perpendicular magnetic recording medium in which magnetic regions are discretely formed in a nonmagnetic region, the perpendicular magnetic recording medium An electromagnet that simultaneously applies a vertical magnetic field to a plurality of magnetic regions via magnetic poles at a predetermined measurement site on the surface of the surface, variable constant current supply means for supplying a DC drive current to the electromagnet in a predetermined variable range, and the vertical magnetism A magnetic reading means which is arranged opposite to the surface of the recording medium and reads the leakage magnetic field from the surface for each magnetic region, and the measurement site is repeatedly moved from a position facing the magnetic pole to a position facing the magnetic reading means. The measurement part moving means to be moved and the DC drive current are variably controlled via the variable constant current supply means each time a predetermined movement operation is performed by the measurement part moving means. Includes a variable current control means for, acquires the signals output from said magnetic read means each time the predetermined moving operation is performed by the measurement site moving means, and the signal waveform analyzing means for analyzing the signal waveform, and The signal waveform analyzing means is provided with a magnetic characteristic measuring device that generates a magnetization curve from the number of the magnetic regions in which the magnetization direction with respect to the vertical magnetic field applied by the electromagnet is reversed .

本発明の第2の側面によれば、非磁性領域内に磁性領域が離散状に形成された垂直磁気記録媒体の磁気特性を測定するための磁気特性測定方法であって、上記垂直磁気記録媒体の表面における所定の測定部位に電磁石の磁極を介して複数の磁性領域に同時に垂直磁界を作用させるとともに、上記垂直磁気記録媒体の表面からの漏洩磁界を上記磁性領域毎に読み取るようにその表面に対して磁気読み取り手段を対向配置し、上記測定部位を上記磁極と対向する位置から上記磁気読み取り手段と対向する位置へと繰り返し移動させ、その一連の移動動作が行われるごとに上記電磁石に供給する直流駆動電流を可変制御するとともに、上記磁気読み取り手段から出力される信号を取得し、上記電磁石が印加した垂直磁界に対する磁化方向が反転した上記磁性領域の個数から磁化曲線を生成するように、その信号波形を解析するといった磁気特性測定方法が提供される。 According to a second aspect of the present invention, there is provided a magnetic property measuring method for measuring magnetic properties of a perpendicular magnetic recording medium in which magnetic regions are discretely formed in a nonmagnetic region, the perpendicular magnetic recording medium A vertical magnetic field is simultaneously applied to a plurality of magnetic regions via a magnetic pole of an electromagnet at a predetermined measurement site on the surface of the magnetic recording medium, and a leakage magnetic field from the surface of the perpendicular magnetic recording medium is read on each surface of the magnetic region. On the other hand, the magnetic reading means is arranged oppositely, and the measurement site is repeatedly moved from the position facing the magnetic pole to the position facing the magnetic reading means, and is supplied to the electromagnet each time a series of moving operations are performed. the DC drive current with variable control, obtains a signal output from the magnetic reading unit, the magnetization direction with respect to the vertical magnetic field which the electromagnet is applied is inverted From the number of the serial magnetic regions to generate the magnetization curve, the magnetic characteristic measuring method such that analyzes the signal waveform is provided.

本発明により開示された技術によれば、たとえばパターンドメディアといった垂直磁気記録媒体の磁気特性を測定する場合、所定の測定部位に電磁石によって垂直磁界を作用させた後、その測定部位からの漏洩磁界として残留磁気を読み取る。このような一連の動作が行われるごとに電磁石は、垂直磁気記録媒体に対する垂直磁界の大きさを変化させられ、それに伴い残留磁気を読み取って得られる信号波形も変化する。これにより、垂直磁界の大きさに応じて複数の信号波形が得られ、色々なパターンの信号波形を解析して磁気特性を求めることができるので、垂直磁気記録媒体の磁気特性を適正に測定することができる。   According to the technique disclosed by the present invention, when measuring the magnetic characteristics of a perpendicular magnetic recording medium such as a patterned medium, a perpendicular magnetic field is applied to a predetermined measurement site by an electromagnet, and then the leakage magnetic field from the measurement site is measured. Read the residual magnetism. Each time such a series of operations is performed, the electromagnet changes the magnitude of the perpendicular magnetic field with respect to the perpendicular magnetic recording medium, and accordingly, the signal waveform obtained by reading the residual magnetism also changes. As a result, a plurality of signal waveforms can be obtained according to the magnitude of the vertical magnetic field, and the magnetic characteristics can be obtained by analyzing the signal waveforms of various patterns, so that the magnetic characteristics of the perpendicular magnetic recording medium are appropriately measured. be able to.

本発明のその他の特徴および利点は、添付図面を参照して以下に行う詳細な説明によって、より明らかとなろう。   Other features and advantages of the present invention will become more apparent from the detailed description given below with reference to the accompanying drawings.

以下、本発明の好ましい実施の形態を、図面を参照して具体的に説明する。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

図1〜9は、本発明に係る磁気特性測定装置の一実施形態を示している。本実施形態の磁気特性測定装置Aは、垂直磁気記録媒体として円盤状の磁気ディスクBの磁気特性を測定するためのものである。この種の磁気ディスクBの代表例としては、図2の(A)に示すようなディスクリートトラックメディアB1と、同図の(B)に示すようなパターンドメディアB2がある。ディスクリートトラックメディアB1は、基板100上に裏打ち軟磁性層110を形成するとともに、さらに裏打ち軟磁性層110上に非磁性領域120Aと磁気記録部となる磁性領域120Bとを形成し、この磁性領域120Bをディスク周方向に沿って細長い帯状としたものである。パターンドメディアB2は、裏打ち軟磁性層110上の非磁性領域120A内に磁気記録部が点在するように磁性領域120Bをドット状に配置したものである。   1 to 9 show an embodiment of a magnetic property measuring apparatus according to the present invention. The magnetic characteristic measuring apparatus A of this embodiment is for measuring the magnetic characteristics of a disk-shaped magnetic disk B as a perpendicular magnetic recording medium. Typical examples of this type of magnetic disk B include a discrete track medium B1 as shown in FIG. 2A and a patterned medium B2 as shown in FIG. In the discrete track medium B1, a backing soft magnetic layer 110 is formed on a substrate 100, and a nonmagnetic region 120A and a magnetic region 120B to be a magnetic recording portion are further formed on the backing soft magnetic layer 110, and this magnetic region 120B is formed. Is formed into a strip shape along the circumferential direction of the disk. In the patterned medium B2, the magnetic regions 120B are arranged in dots so that the magnetic recording portions are scattered in the nonmagnetic regions 120A on the backing soft magnetic layer 110.

図1に示すように、磁気特性測定装置Aは、電磁石1、可変定電流供給回路2、磁気ヘッド3、スイングアーム4、スイング用モータ5、回転モータ6、測定部位移動制御部7、電流可変制御部8、記録制御部9、および信号波形解析部10を備えている。電磁石1、可変定電流供給回路2、磁気ヘッド3、スイングアーム4、スイング用モータ5、および回転モータ6は、磁気ディスクBを収容する本体ユニット(図示略)に内蔵されており、測定部位移動制御部7、電流可変制御部8、記録制御部9、および信号波形解析部10は、たとえば本体ユニットに接続されるコンピュータによって実現される。   As shown in FIG. 1, the magnetic characteristic measuring apparatus A includes an electromagnet 1, a variable constant current supply circuit 2, a magnetic head 3, a swing arm 4, a swing motor 5, a rotation motor 6, a measurement site movement control unit 7, and a variable current. A control unit 8, a recording control unit 9, and a signal waveform analysis unit 10 are provided. The electromagnet 1, variable constant current supply circuit 2, magnetic head 3, swing arm 4, swing motor 5, and rotary motor 6 are built in a main unit (not shown) that accommodates the magnetic disk B, and move the measurement site. The control unit 7, the variable current control unit 8, the recording control unit 9, and the signal waveform analysis unit 10 are realized by, for example, a computer connected to the main unit.

電磁石1は、U字型の磁性体10にコイル11を巻き、一対の磁極1A,1Bを互いに対峙させたものである。コイル11の両端部は、可変定電流供給回路2に接続されている。一対の磁極1A,1Bの間には、測定対象となる磁気ディスクBが配置される。この磁気ディスクBの表面と磁極1A,1Bとの隙間は、たとえば0.1mm以下に設定されている。コイル11に電流が供給されると、磁極1A,1B間には、その電流の大きさに応じた磁界が生じ、この磁界が垂直磁界として磁気ディスクBに作用する。コイルに流れる電流の向きを変化させると、磁気ディスクBに対する垂直磁界の向きも変化する。   The electromagnet 1 is obtained by winding a coil 11 around a U-shaped magnetic body 10 and causing a pair of magnetic poles 1A and 1B to face each other. Both ends of the coil 11 are connected to the variable constant current supply circuit 2. A magnetic disk B to be measured is disposed between the pair of magnetic poles 1A and 1B. The gap between the surface of the magnetic disk B and the magnetic poles 1A and 1B is set to 0.1 mm or less, for example. When a current is supplied to the coil 11, a magnetic field corresponding to the magnitude of the current is generated between the magnetic poles 1A and 1B, and this magnetic field acts on the magnetic disk B as a vertical magnetic field. When the direction of the current flowing through the coil is changed, the direction of the perpendicular magnetic field with respect to the magnetic disk B is also changed.

たとえば図3に示すようなパターンドメディアB2を測定対象とした場合、電磁石1の垂直磁界は、ディスク周方向およびディスク径方向にドット状の磁性領域120Bが所定個数並ぶ一定の測定区画Cに作用する。同図には、磁性領域120Bの磁化方向を白抜きおよび黒塗りで示している。各磁性領域120Bの磁化方向が全て同一方向に揃えられた測定区画Cに電磁石1の垂直磁界を作用させ、この垂直磁界の大きさを次第に大きくしていくと、それに応じて磁化方向が反転した磁性領域120Bの個数も次第に多くなる。垂直磁界の大きさが所定のレベルを超えると、測定区画Cに含まれる全ての磁性領域120Bにおける磁化方向が反転する。   For example, when a patterned medium B2 as shown in FIG. 3 is used as a measurement target, the vertical magnetic field of the electromagnet 1 acts on a fixed measurement section C in which a predetermined number of dot-like magnetic regions 120B are arranged in the disk circumferential direction and the disk radial direction. To do. In the figure, the magnetization direction of the magnetic region 120B is shown in white and black. When the perpendicular magnetic field of the electromagnet 1 is applied to the measurement section C in which the magnetization directions of the magnetic regions 120B are all aligned in the same direction, and the magnitude of the perpendicular magnetic field is gradually increased, the magnetization direction is reversed accordingly. The number of magnetic regions 120B also increases gradually. When the magnitude of the vertical magnetic field exceeds a predetermined level, the magnetization directions in all the magnetic regions 120B included in the measurement section C are reversed.

可変定電流供給回路2は、電磁石1のコイル11に対して所定の可変範囲で直流駆動電流を供給するものである。この可変定電流供給回路2は、磁気ディスクBの所定の測定部位に対して電磁石1により垂直磁界を作用させる際には、直流駆動電流を所定の電流値に保った状態で供給する。その一方、可変定電流供給回路2は、一連の測定動作ごとに直流駆動電流の電流値を変化させたり、その電流の向きを変化させることができる。   The variable constant current supply circuit 2 supplies a DC drive current to the coil 11 of the electromagnet 1 within a predetermined variable range. The variable constant current supply circuit 2 supplies a direct current drive current in a state where a predetermined current value is maintained when a vertical magnetic field is applied to a predetermined measurement portion of the magnetic disk B by the electromagnet 1. On the other hand, the variable constant current supply circuit 2 can change the current value of the DC drive current or change the direction of the current for each series of measurement operations.

磁気ヘッド3は、スイングアーム4の先端に図示しないスライダを介して設けられており、磁気ディスクBの表面に対向配置させられている。スライダは、微小な浮上量で磁気ヘッド3を高速回転する磁気ディスクBの表面上に浮上させるためのものである。磁気ヘッド3は、スイングアーム4の揺動動作に応じて磁気ディスクBの略径方向に往復移動させられる。この磁気ヘッド3には、図示しない読み取り素子と記録素子が搭載されている。読み取り素子は、磁気ディスクBの表面からの漏洩磁界を読み取る磁気読み取り手段として設けられている。記録素子は、磁気ディスクBに対して記録磁界を作用させる磁気記録手段として設けられている。読み取り素子は、信号波形解析部10に接続されており、記録素子は、記録制御部9に接続されている。   The magnetic head 3 is provided at the tip of the swing arm 4 via a slider (not shown), and is disposed opposite to the surface of the magnetic disk B. The slider is for floating the magnetic head 3 on the surface of the magnetic disk B rotating at a high speed with a small flying height. The magnetic head 3 is reciprocated in the substantially radial direction of the magnetic disk B according to the swinging motion of the swing arm 4. The magnetic head 3 is equipped with a reading element and a recording element (not shown). The reading element is provided as magnetic reading means for reading a leakage magnetic field from the surface of the magnetic disk B. The recording element is provided as magnetic recording means for applying a recording magnetic field to the magnetic disk B. The reading element is connected to the signal waveform analysis unit 10, and the recording element is connected to the recording control unit 9.

たとえば図4に示すようなパターンドメディアB2を測定対象として磁気ヘッド3のディスク径方向位置を固定した場合、記録素子による記録磁界は、たとえばディスク周方向に沿ってドット状の磁性領域120Bが列状に並ぶ複数列のうち、磁気ヘッド3に対向する所定の測定列Dに作用する。磁気ヘッド3をディスク径方向に移動させることにより、複数の測定列Dに記録磁界を作用させることができる。同図には、磁性領域120Bの磁化方向を白抜きおよび黒塗りで示している。磁性領域120Bの磁化方向が全て同一方向に揃えられた所定の測定列Dに記録磁界を作用させ、この記録磁界の大きさを次第に大きくしていくと、その測定列Dにおいて磁化方向が反転した磁性領域120Bの個数も次第に多くなる。記録磁界の大きさが所定のレベルを超えると、測定列に含まれる全ての磁性領域120Bにおける磁化方向が反転する。ただし、図3および図4に示すように電磁石1による垂直磁界と同じ大きさの記録磁界を所定の測定列Dに作用させても、隣接する磁性領域120Bの磁気的な影響から磁化方向が反転しない磁性領域120Bもあり、測定結果としては異なることもある。   For example, when the position of the magnetic head 3 in the disk radial direction is fixed using the patterned medium B2 as shown in FIG. 4 as a measurement object, the dot-shaped magnetic region 120B is arranged along the disk circumferential direction, for example. Of the plurality of rows arranged in a line, the predetermined measurement row D facing the magnetic head 3 is acted. By moving the magnetic head 3 in the disk radial direction, a recording magnetic field can be applied to the plurality of measurement rows D. In the figure, the magnetization direction of the magnetic region 120B is shown in white and black. When a recording magnetic field is applied to a predetermined measurement column D in which the magnetization directions of the magnetic regions 120B are all aligned in the same direction, and the magnitude of the recording magnetic field is gradually increased, the magnetization direction is reversed in the measurement column D. The number of magnetic regions 120B also increases gradually. When the magnitude of the recording magnetic field exceeds a predetermined level, the magnetization directions in all the magnetic regions 120B included in the measurement sequence are reversed. However, even if a recording magnetic field having the same magnitude as the vertical magnetic field generated by the electromagnet 1 is applied to the predetermined measurement array D as shown in FIGS. 3 and 4, the magnetization direction is reversed due to the magnetic effect of the adjacent magnetic region 120B. There are also magnetic regions 120B that do not, and the measurement results may differ.

スイングアーム4は、その先端部にスライダや磁気ヘッド3を有し、基端部を中心として先端部を磁気ディスクBの略径方向に往復移動させるように揺動する。   The swing arm 4 has a slider and a magnetic head 3 at its distal end, and swings so that the distal end reciprocates in the substantially radial direction of the magnetic disk B around the base end.

スイング用モータ5は、たとえばボイスコイルモータからなり、測定部位移動制御部7からの指令に応じて磁気ディスクBの径方向所定位置に磁気ヘッド3を移動させるようにスイングアーム4を揺動させる。   The swing motor 5 is composed of, for example, a voice coil motor, and swings the swing arm 4 so as to move the magnetic head 3 to a predetermined position in the radial direction of the magnetic disk B in response to a command from the measurement site movement control unit 7.

回転モータ6は、たとえばスピンドルモータからなり、測定部位移動制御部7からの指令に応じて磁気ディスクBの測定部位を磁極1A,1Bと対向する位置や磁気ヘッド3と対向する位置へと移動させるように磁気ディスクBを高速回転させる。   The rotary motor 6 is composed of, for example, a spindle motor, and moves the measurement part of the magnetic disk B to a position facing the magnetic poles 1A and 1B or a position facing the magnetic head 3 in accordance with a command from the measurement part movement control unit 7. Thus, the magnetic disk B is rotated at a high speed.

測定部位移動制御部7は、スイング用モータ5を介して磁気ディスクBの径方向所定位置に磁気ヘッド3を移動させる一方、回転モータ6を介して磁気ディスクBを高速回転させることにより、その磁気ディスクBの測定部位を磁極1A,1Bと対向する位置から磁気ヘッド3と対向する位置へと繰り返し移動させる。このような測定部位移動制御部7の制御動作は、図示しないクロック生成回路から一定の周波数で出力されるクロック信号や、磁気ディスクBに形成されたプリアンブル部や位相サーボ部から磁気ヘッド3の読み取り素子を介して得られる磁気読み取り信号に基づき、磁気ディスクBの径方向および周方向における各磁性領域120Bの位置を認識することで行われる。   The measurement site movement control unit 7 moves the magnetic head 3 to a predetermined position in the radial direction of the magnetic disk B via the swing motor 5, while rotating the magnetic disk B at a high speed via the rotary motor 6, thereby The measurement site of the disk B is repeatedly moved from a position facing the magnetic poles 1A and 1B to a position facing the magnetic head 3. The control operation of the measurement site movement control unit 7 is performed by reading the magnetic head 3 from a clock signal output at a constant frequency from a clock generation circuit (not shown) or from a preamble unit or a phase servo unit formed on the magnetic disk B. This is performed by recognizing the position of each magnetic region 120B in the radial direction and circumferential direction of the magnetic disk B based on the magnetic read signal obtained through the element.

電流可変制御部8は、測定部位移動制御部7によって所定の移動動作が行われるごとに可変定電流供給回路2を介して電磁石1のコイル11に供給される直流駆動電流の電流値や電流の向きを可変制御する。   The current variable control unit 8 is configured to control the current value or current of the DC drive current supplied to the coil 11 of the electromagnet 1 through the variable constant current supply circuit 2 every time a predetermined movement operation is performed by the measurement site movement control unit 7. Variable control of direction.

記録制御部9は、磁気ヘッド3の記録素子に所定の大きさの記録磁界を発生させるよう制御する。この記録制御部9には、磁気ディスクBに対する記録磁界が変化させられるように記録素子に対する駆動電流を変化させる機能が設けられている。この駆動電流は、記録制御部9により直流として可変制御されるほか、交流としても可変制御される。   The recording control unit 9 controls the recording element of the magnetic head 3 to generate a recording magnetic field having a predetermined magnitude. The recording control unit 9 has a function of changing the drive current for the recording element so that the recording magnetic field for the magnetic disk B can be changed. This drive current is variably controlled as a direct current by the recording control unit 9 and also variably controlled as an alternating current.

信号波形解析部10は、磁気ディスクBの表面からの残留磁界に応じて磁気ヘッド3の読み取り素子から出力される磁気読み取り信号を高速フーリエ変換して取得し、その信号波形を解析する。   The signal waveform analysis unit 10 obtains a magnetic read signal output from the reading element of the magnetic head 3 according to the residual magnetic field from the surface of the magnetic disk B by fast Fourier transform, and analyzes the signal waveform.

たとえば図5に示すように、測定対象としてパターンドメディアB2を用い、電磁石1による垂直磁界の強さを−20kOeとしてパターンドメディアB2を初期化する。その後、パターンドメディアB2のプリアンブル部や位相サーボ部を測定部位とし、これらの測定部位が磁極1A,1Bと対向する位置にくるごとに、垂直磁界を所定の変化割合で0kOeから+15kOe、+15kOeから0kOe、0kOeから−15kOe、−15kOeから0kOeへと順次変化させる。こうして垂直磁界が作用したプリアンブル部や位相サーボ部については、磁気ヘッド3の読み取り素子によって残留磁界が読み取られる。これにより、同図に一例として示すような磁気読み取り信号が得られる。信号波形解析部10は、磁気読み取り信号から残留磁界の強さを正規化することにより、垂直磁界(H)の強さに応じて飽和磁化(Ms)の変化傾向を示す磁化曲線を生成する。このような磁化曲線は、プリアンブル部や位相サーボ部の磁気特性を示す解析結果として得られ、図示しないコンピュータの表示装置あるいは印刷装置から出力される。   For example, as shown in FIG. 5, the patterned media B2 is used as a measurement target, and the patterned media B2 is initialized by setting the strength of the vertical magnetic field by the electromagnet 1 to −20 kOe. Thereafter, the preamble part and phase servo part of the patterned medium B2 are used as measurement parts, and the vertical magnetic field is changed from 0 kOe to +15 kOe and +15 kOe at a predetermined change rate each time these measurement parts are located opposite to the magnetic poles 1A and 1B. It is changed sequentially from 0 kOe, 0 kOe to −15 kOe, and from −15 kOe to 0 kOe. The residual magnetic field is read by the reading element of the magnetic head 3 in the preamble portion and the phase servo portion to which the vertical magnetic field acts in this way. Thereby, a magnetic read signal as shown in the figure as an example is obtained. The signal waveform analysis unit 10 normalizes the strength of the residual magnetic field from the magnetic read signal, thereby generating a magnetization curve indicating a change tendency of the saturation magnetization (Ms) according to the strength of the vertical magnetic field (H). Such a magnetization curve is obtained as an analysis result indicating the magnetic characteristics of the preamble portion and the phase servo portion, and is output from a computer display device or printing device (not shown).

一方、図6に示す例では、パターンドメディアB2の磁気記録部を測定部位とし、垂直磁界の強さを+20kOeで初期化した後、上記と同様のパターンで垂直磁界を変化させることにより、同図に示すような磁気読み取り信号を得ている。この磁気読み取り信号については、その信号波形の極大値をとる箇所および極小値をとる箇所のそれぞれが黒いドットマークと白いドットマークによって示される。これらのドットマークの位置は、磁気記録部における各磁性領域120Bの位置として認識される。信号波形解析部10は、たとえば黒いドットマークから白いドットマークに変化することで磁化方向が反転したとされる磁性領域120Bの数を計数する。これにより、垂直磁界(H)の強さに応じて磁化方向反転数の変化傾向を示す曲線が生成され、この曲線が磁化曲線と等価なものとして得られる。このような磁化曲線と等価な曲線も磁気記録部の磁気特性を示す解析結果となり、図示しないコンピュータの表示装置あるいは印刷装置から出力される。   On the other hand, in the example shown in FIG. 6, the magnetic recording part of the patterned medium B2 is used as a measurement site, the strength of the vertical magnetic field is initialized to +20 kOe, and then the vertical magnetic field is changed in the same pattern as described above. A magnetic read signal as shown in the figure is obtained. With respect to this magnetic read signal, each of a portion having a maximum value and a portion having a minimum value of the signal waveform is indicated by a black dot mark and a white dot mark. The positions of these dot marks are recognized as the positions of the magnetic regions 120B in the magnetic recording unit. For example, the signal waveform analysis unit 10 counts the number of magnetic regions 120B in which the magnetization direction is reversed by changing from a black dot mark to a white dot mark. As a result, a curve showing the tendency of change in the number of magnetization direction inversions according to the strength of the vertical magnetic field (H) is generated, and this curve is obtained as equivalent to the magnetization curve. A curve equivalent to such a magnetization curve is also an analysis result indicating the magnetic characteristics of the magnetic recording unit, and is output from a computer display device or printing device (not shown).

次に、図7および図8を参照して磁気特性測定装置Aの動作手順について説明する。なお、以下の説明における測定対象としては、一例としてパターンドメディアB2を適用する。   Next, the operation procedure of the magnetic property measuring apparatus A will be described with reference to FIGS. Note that the patterned medium B2 is applied as an example of a measurement target in the following description.

まず図7に示すように、測定部位移動制御部7は、パターンドメディアB2を回転させるとともに磁気ヘッド3をディスク径方向に移動させ、その際、信号波形解析部10を介して得られる磁気読み取り信号をクロック信号に基づいて所定の信号処理を行うことにより、プリアンブル部および位相サーボ部ならびに磁気記録部を測定部位として認識する。その後、測定部位移動制御部7は、測定部位の移動と垂直磁界の変化のさせ方とを関連づけた第1測定ルーチンを作成する(S1)。この第1測定ルーチンによれば、たとえばディスク径方向の所定位置に磁気ヘッド3を位置させ、その位置に対応するディスク周方向の1または複数の測定部位に対し、垂直磁界の作用、漏洩磁界の読み取り、垂直磁界を変化させて作用、再び漏洩磁界の読み取り、といった一連の測定動作が繰り返し実行される。このような第1測定ルーチンには、ディスク径方向の異なる位置へと磁気ヘッド3を位置させてから同様に一連の測定動作を繰り返し実行するための制御手順も規定されている。このような第1測定ルーチンに基づき、パターンドメディアB2における微細な磁性領域120Bであっても、効率よくかつ高精度に磁気特性が測定される。   First, as shown in FIG. 7, the measurement site movement control unit 7 rotates the patterned medium B2 and moves the magnetic head 3 in the radial direction of the disk. At this time, the magnetic reading obtained via the signal waveform analysis unit 10 is obtained. By performing predetermined signal processing on the signal based on the clock signal, the preamble portion, the phase servo portion, and the magnetic recording portion are recognized as measurement sites. Thereafter, the measurement site movement control unit 7 creates a first measurement routine that associates the movement of the measurement site with the method of changing the vertical magnetic field (S1). According to the first measurement routine, for example, the magnetic head 3 is positioned at a predetermined position in the disk radial direction, and the action of the vertical magnetic field and the leakage magnetic field are applied to one or a plurality of measurement sites in the disk circumferential direction corresponding to the position. A series of measurement operations such as reading, acting by changing the vertical magnetic field, and reading the leakage magnetic field again are repeatedly executed. Such a first measurement routine also defines a control procedure for repeatedly executing a series of measurement operations after the magnetic head 3 is positioned at a different position in the disk radial direction. Based on such a first measurement routine, even in the fine magnetic region 120B in the patterned medium B2, the magnetic characteristics are efficiently and accurately measured.

次に、測定部位移動制御部7は、第1測定ルーチンに基づいて認識した所定の測定部位を磁極1A,1Bと対向する位置へと移動させる(S2)。   Next, the measurement site movement control unit 7 moves the predetermined measurement site recognized based on the first measurement routine to a position facing the magnetic poles 1A and 1B (S2).

所定の測定部位が電磁石1の磁極1A,1Bと対向する位置にくると、電流可変制御部8は、第1測定ルーチンにより定められた所定の電流値を可変定電流供給回路2に指示する。これにより、磁極1A,1B間には、第1測定ルーチンで定められた所定の大きさの垂直磁界が生じ、この垂直磁界が所定の測定部位に作用する(S3)。   When the predetermined measurement part comes to a position facing the magnetic poles 1A and 1B of the electromagnet 1, the current variable control unit 8 instructs the variable constant current supply circuit 2 to have a predetermined current value determined by the first measurement routine. As a result, a vertical magnetic field having a predetermined magnitude determined in the first measurement routine is generated between the magnetic poles 1A and 1B, and this vertical magnetic field acts on a predetermined measurement site (S3).

垂直磁界が所定の測定部位に作用した後、測定部位移動制御部7は、その測定部位を第1測定ルーチンに基づいて磁気ヘッド3と対向する位置へと移動させる(S4)。   After the vertical magnetic field acts on the predetermined measurement site, the measurement site movement control unit 7 moves the measurement site to a position facing the magnetic head 3 based on the first measurement routine (S4).

測定部位が磁気ヘッド3と対向する位置にくると、読み取り素子は、その測定部位からの漏洩磁界として残留磁気を読み取り、信号波形解析部10は、読み取り素子から出力される磁気読み取り信号を取得する(S5)。   When the measurement part comes to a position facing the magnetic head 3, the reading element reads the residual magnetism as a leakage magnetic field from the measurement part, and the signal waveform analysis unit 10 acquires the magnetic read signal output from the reading element. (S5).

上記S2〜S5の一連の測定動作については、垂直磁界の大きさを一定レベルに保った状態で行われ、このような測定動作を同じ測定部位に対して垂直磁界を変化させることで所定回数実行するとともに、ディスク径方向に異なる位置の測定部位についても同様の測定動作を所定回数実行することにより、第1測定ルーチンが終了する。このような第1測定ルーチンが終了すると(S6:YES)、信号波形解析部10は、所定の可変範囲で変化させられた垂直磁界に基づいて異なる測定部位ごとに取得された信号波形を解析する(S7)。信号波形としては、先述したように図5および図6に示すようなものが得られる。   The series of measurement operations from S2 to S5 is performed in a state where the magnitude of the vertical magnetic field is maintained at a constant level, and such measurement operation is performed a predetermined number of times by changing the vertical magnetic field for the same measurement site. At the same time, the same measurement operation is performed a predetermined number of times for the measurement sites at different positions in the disk radial direction, thereby completing the first measurement routine. When such a first measurement routine is completed (S6: YES), the signal waveform analysis unit 10 analyzes the signal waveform acquired for each different measurement site based on the vertical magnetic field changed within a predetermined variable range. (S7). As described above, the signal waveforms as shown in FIGS. 5 and 6 are obtained.

S6において、第1測定ルーチンが終了していない場合(S6:NO)、電流可変制御部8は、第1測定ルーチンで定められた所定の電流値に変更する旨を可変定電流供給回路2に指示し、磁極1A,1B間に生じる垂直磁界の大きさを第1測定ルーチンで定められた所定のレベルに変更する(S9)。その後、再びS2の処理に移行する。   In S6, when the first measurement routine is not completed (S6: NO), the current variable control unit 8 informs the variable constant current supply circuit 2 that the current value is changed to the predetermined current value determined in the first measurement routine. The vertical magnetic field generated between the magnetic poles 1A and 1B is changed to a predetermined level determined by the first measurement routine (S9). Thereafter, the process proceeds to S2 again.

全ての信号波形の解析が終わると、信号波形解析部10は、電磁石1による垂直磁界に応じて得られた解析結果を図5および図6に示すような磁化曲線として求め、この磁化曲線を表示装置あるいは印刷装置に出力させる(S8)。これにより、電磁石1を用いた磁気特性測定処理が終わる。   When the analysis of all the signal waveforms is completed, the signal waveform analysis unit 10 obtains an analysis result obtained according to the vertical magnetic field by the electromagnet 1 as a magnetization curve as shown in FIGS. 5 and 6 and displays this magnetization curve. The data is output to the apparatus or the printing apparatus (S8). Thereby, the magnetic characteristic measurement process using the electromagnet 1 is completed.

その後、図8に示すように、磁気ヘッド3の記録素子を用いた磁気特性測定処理が行われる。すなわち、測定部位移動制御部7は、測定部位の移動と記録素子の記録磁界の変化のさせ方とを関連づけた第2測定ルーチンを作成する(S11)。この第2測定ルーチンは、たとえば記録素子に対する駆動電流の可変範囲が異なる他は、上記第1測定ルーチンと同様の内容である。   Thereafter, as shown in FIG. 8, a magnetic characteristic measurement process using the recording element of the magnetic head 3 is performed. That is, the measurement site movement control unit 7 creates a second measurement routine in which the movement of the measurement site is associated with how to change the recording magnetic field of the recording element (S11). This second measurement routine has the same contents as the first measurement routine except that, for example, the variable range of the drive current for the recording element is different.

次に、測定部位移動制御部7は、第2測定ルーチンに基づいて認識した所定の測定部位を磁気ヘッド3と対向する位置へと移動させる(S12)。   Next, the measurement site movement control unit 7 moves the predetermined measurement site recognized based on the second measurement routine to a position facing the magnetic head 3 (S12).

所定の測定部位が磁気ヘッド3と対向する位置にくると、記録制御部9は、第2測定ルーチンにより定められた所定の大きさの駆動電流を磁気ヘッド3の記録素子に供給する。これにより、測定部位には、第2測定ルーチンで定められた所定の大きさの記録磁界が作用する(S13)。   When a predetermined measurement site comes to a position facing the magnetic head 3, the recording control unit 9 supplies a drive current having a predetermined magnitude determined by the second measurement routine to the recording element of the magnetic head 3. As a result, a recording magnetic field having a predetermined magnitude determined in the second measurement routine acts on the measurement site (S13).

記録磁界が所定の測定部位に作用した後、その測定部位が第2測定ルーチンに基づいて磁気ヘッド3の読み取り素子と対向する位置へと移動させられる。その後、読み取り素子は、測定部位から記録された磁気を読み取り、信号波形解析部10は、読み取り素子から出力される磁気読み取り信号を取得する(S14)。   After the recording magnetic field acts on a predetermined measurement site, the measurement site is moved to a position facing the reading element of the magnetic head 3 based on the second measurement routine. Thereafter, the reading element reads the magnetism recorded from the measurement site, and the signal waveform analysis unit 10 acquires the magnetic reading signal output from the reading element (S14).

上記S12〜S14の一連の測定動作についても、記録磁界の大きさを一定レベルに保った状態で行われ、このような測定動作を同じ測定部位に対して記録磁界を変化させることで所定回数実行するとともに、ディスク径方向に異なる位置の測定部位についても同様の測定動作を所定回数実行することにより、第2測定ルーチンが終了する。このような第2測定ルーチンが終了すると(S15:YES)、信号波形解析部10は、所定の可変範囲で変化させられた記録磁界に基づいて異なる測定部位ごとに取得された信号波形を解析する(S16)。   The series of measurement operations of S12 to S14 is also performed in a state where the magnitude of the recording magnetic field is maintained at a constant level, and such measurement operation is performed a predetermined number of times by changing the recording magnetic field for the same measurement site. At the same time, the second measurement routine is completed by executing the same measurement operation a predetermined number of times for measurement sites at different positions in the disk radial direction. When such a second measurement routine is completed (S15: YES), the signal waveform analysis unit 10 analyzes the signal waveforms acquired for different measurement sites based on the recording magnetic field changed within a predetermined variable range. (S16).

S15において、第2測定ルーチンが終了していない場合(S15:NO)、記録制御部9は、第2測定ルーチンで定められた所定の電流値に記録素子に対する駆動電流を変更し、この記録素子による記録磁界の大きさを第2測定ルーチンで定められた所定のレベルに変更する(S20)。その後、再びS12の処理に移行する。   In S15, when the second measurement routine has not ended (S15: NO), the recording control unit 9 changes the drive current for the recording element to a predetermined current value determined in the second measurement routine, and the recording element The magnitude of the recording magnetic field is changed to a predetermined level determined in the second measurement routine (S20). Thereafter, the process proceeds to S12 again.

全ての信号波形の解析が終わると、信号波形解析部10は、記録素子による記録磁界に応じて得られた解析結果を先述した手順と同様の手順で磁化曲線として求め、この磁化曲線を表示装置あるいは印刷装置に出力させる(S17)。   When the analysis of all the signal waveforms is completed, the signal waveform analysis unit 10 obtains an analysis result obtained according to the recording magnetic field by the recording element as a magnetization curve in the same procedure as described above, and displays this magnetization curve in the display device. Alternatively, the data is output to the printing apparatus (S17).

さらに信号波形解析部10は、電磁石1による解析結果として得られた磁化曲線と記録素子による解析結果として得られた磁化曲線とを比較する(S18)。なお、解析結果としては、たとえば図3および図4に示すような測定区画Cおよび測定列Dに対応した測定情報が得られるため、磁化曲線としても異なる傾向で比較される。信号波形解析部10は、図9に示すように、記録素子に直流駆動電流を供給することでこの記録素子のDC記録磁界に応じて得られた測定結果と、記録素子に交流駆動電流を供給することで記録素子のAC記録磁界に応じて得られた測定結果とを比較し、DC記録磁界とAC記録磁界との比較結果を測定情報として得ることができる。   Further, the signal waveform analysis unit 10 compares the magnetization curve obtained as an analysis result by the electromagnet 1 with the magnetization curve obtained as an analysis result by the recording element (S18). As the analysis result, for example, measurement information corresponding to the measurement section C and the measurement row D as shown in FIGS. 3 and 4 is obtained, so that the magnetization curves are compared with different tendencies. As shown in FIG. 9, the signal waveform analysis unit 10 supplies a DC drive current to the recording element to supply a measurement result obtained according to the DC recording magnetic field of the recording element and an AC drive current to the recording element. Thus, the measurement result obtained according to the AC recording magnetic field of the recording element can be compared, and the comparison result between the DC recording magnetic field and the AC recording magnetic field can be obtained as measurement information.

その後、信号波形解析部10は、比較結果としての各種の測定情報を表示装置あるいは印刷装置に出力させる(S19)。これにより、電磁石1を用いた磁気特性測定処理に続いて記録素子を用いた磁気特性測定処理が終わる。   Thereafter, the signal waveform analysis unit 10 outputs various measurement information as a comparison result to the display device or the printing device (S19). Thereby, the magnetic characteristic measurement process using the recording element is completed following the magnetic characteristic measurement process using the electromagnet 1.

したがって、本実施形態の磁気特性測定装置Aによれば、たとえばパターンドメディアB2といった磁気ディスクBの磁気特性を測定する場合、所定の測定部位に電磁石1によって垂直磁界を作用させた後、その測定部位からの漏洩磁界として残留磁気を読み取る。さらに、磁気ヘッド3の記録素子を介して記録磁界を作用させ、測定部位から記録磁界による残留磁気も読み取ることができる。その結果、垂直磁界の大きさや記録磁界の大きさに応じて各種の信号波形が得られ、色々なパターンの信号波形を解析することで磁気特性として測定部位に応じた磁化曲線を求めることができるので、磁気ディスクBの磁気特性を適正に測定することができる。   Therefore, according to the magnetic property measuring apparatus A of the present embodiment, when measuring the magnetic properties of the magnetic disk B such as the patterned medium B2, for example, the vertical magnetic field is applied to the predetermined measurement site by the electromagnet 1, and then the measurement is performed. The residual magnetism is read as a leakage magnetic field from the part. Furthermore, a residual magnetic field due to the recording magnetic field can be read from the measurement site by applying a recording magnetic field via the recording element of the magnetic head 3. As a result, various signal waveforms can be obtained according to the magnitude of the vertical magnetic field and the magnitude of the recording magnetic field, and by analyzing the signal waveforms of various patterns, a magnetization curve corresponding to the measurement site can be obtained as a magnetic characteristic. Therefore, the magnetic characteristics of the magnetic disk B can be measured appropriately.

なお、本発明は、上記の実施形態に限定されるものではない。   In addition, this invention is not limited to said embodiment.

上記実施形態で示した構成は、あくまでも一例にすぎず、仕様に応じて適宜設計変更することが可能である。   The configuration shown in the above embodiment is merely an example, and the design can be changed as appropriate according to the specification.

たとえば磁気ヘッドには、読み取り素子のみを設け、電磁石を用いた磁気特性測定処理のみを行うようにしてもよい。   For example, the magnetic head may be provided with only the reading element, and only the magnetic characteristic measurement process using an electromagnet may be performed.

測定部位については、少なくとも一箇所を特定して測定することができればよいので、ディスク周方向およびディスク径方向のいずれか一方に沿う特定の位置を測定部位としてもよい。   As long as the measurement site can be measured by specifying at least one location, a specific position along either the disk circumferential direction or the disk radial direction may be set as the measurement site.

測定対象となる媒体がディスク状のものではなく回転に適さない場合、電磁石や磁気ヘッドを測定部位に対して交互に移動させるようにしてもよい。   When the medium to be measured is not disk-like and is not suitable for rotation, the electromagnet or the magnetic head may be moved alternately with respect to the measurement site.

磁気ヘッドに設けられた記録素子によって磁気特性を測定する場合、所定の周波数で磁界の向きが反転するような交番磁界を記録素子に発生させ、それに応じて得られる信号波形を解析するようにしてもよい。磁気ヘッドを磁気ディスクの表面に接触させた状態で磁気特性を測定するようにしてもよい。   When measuring magnetic characteristics with a recording element provided in a magnetic head, an alternating magnetic field that reverses the direction of the magnetic field at a predetermined frequency is generated in the recording element, and a signal waveform obtained accordingly is analyzed. Also good. Magnetic characteristics may be measured with the magnetic head in contact with the surface of the magnetic disk.

磁気特性測定処理としては、記録素子を用いた処理を先に実行し、その次に電磁石を用いた処理を実行するようにしてもよい。   As the magnetic characteristic measurement process, a process using a recording element may be executed first, followed by a process using an electromagnet.

本発明に係る磁気特性測定装置の一実施形態を示す構成図である。It is a block diagram which shows one Embodiment of the magnetic characteristic measuring apparatus which concerns on this invention. 図1の磁気特性測定装置に適用可能な磁気ディスクを示す切り欠き斜視図である。It is a notch perspective view which shows the magnetic disc applicable to the magnetic characteristic measuring apparatus of FIG. パターンメディアに対する電磁石の磁気的作用を説明するための説明図である。It is explanatory drawing for demonstrating the magnetic effect | action of the electromagnet with respect to a pattern medium. パターンメディアに対する磁気ヘッドの磁気的作用を説明するための説明図である。It is explanatory drawing for demonstrating the magnetic effect | action of the magnetic head with respect to a pattern medium. 図1の磁気特性測定装置による測定結果の一例を説明するための説明図である。It is explanatory drawing for demonstrating an example of the measurement result by the magnetic characteristic measuring apparatus of FIG. 図1の磁気特性測定装置による測定結果の一例を説明するための説明図である。It is explanatory drawing for demonstrating an example of the measurement result by the magnetic characteristic measuring apparatus of FIG. 電磁石を主として用いた磁気特性測定処理を示すフローチャートである。It is a flowchart which shows the magnetic characteristic measurement process which mainly used the electromagnet. 磁気ヘッドを用いた磁気特性測定処理を示すフローチャートである。It is a flowchart which shows the magnetic characteristic measurement process using a magnetic head. パターンメディアに対する磁気ヘッドの磁気的作用を説明するための説明図である。It is explanatory drawing for demonstrating the magnetic effect | action of the magnetic head with respect to a pattern medium.

符号の説明Explanation of symbols

A 磁気特性測定装置
B,B1,B2 磁気ディスク(垂直磁気記録媒体)
1 電磁石
1A,1B 磁極
2 可変定電流供給回路(可変定電流供給手段)
3 磁気ヘッド(磁気読み取り手段、磁気記録手段)
4 スイングアーム(測定部位移動手段、磁気ヘッド移動機構)
5 スイング用モータ(測定部位移動手段、磁気ヘッド移動機構)
6 回転モータ(測定部位移動手段)
7 測定部位移動制御部(測定部位移動手段)
8 電流可変制御部(電流可変制御手段)
9 記録制御部
10 信号波形解析部(信号波形解析手段)
A Magnetic characteristic measuring device B, B1, B2 Magnetic disk (perpendicular magnetic recording medium)
DESCRIPTION OF SYMBOLS 1 Electromagnet 1A, 1B Magnetic pole 2 Variable constant current supply circuit (variable constant current supply means)
3 Magnetic head (magnetic reading means, magnetic recording means)
4 Swing arm (Measuring part moving means, magnetic head moving mechanism)
5 Swing motor (measuring part moving means, magnetic head moving mechanism)
6 Rotating motor (Measuring part moving means)
7 Measurement part movement control part (Measurement part movement means)
8 Current variable control unit (Current variable control means)
9 Recording control section 10 Signal waveform analysis section (signal waveform analysis means)

Claims (4)

非磁性領域内に磁性領域が離散状に形成された垂直磁気記録媒体の磁気特性を測定するための磁気特性測定装置であって、
上記垂直磁気記録媒体の表面における所定の測定部位に複数の磁性領域に同時に磁極を介して垂直磁界を作用させる電磁石と、
上記電磁石に所定の可変範囲で直流駆動電流を供給する可変定電流供給手段と、
上記垂直磁気記録媒体の表面に対向配置させられ、その表面からの漏洩磁界を上記磁性領域毎に読み取る磁気読み取り手段と、
上記測定部位を上記磁極と対向する位置から上記磁気読み取り手段と対向する位置へと繰り返し移動させる測定部位移動手段と、
上記測定部位移動手段によって所定の移動動作が行われるごとに上記可変定電流供給手段を介して上記直流駆動電流を可変制御する電流可変制御手段と、
上記測定部位移動手段によって所定の移動動作が行われるごとに上記磁気読み取り手段から出力される信号を取得し、その信号波形を解析する信号波形解析手段と、
を備え
上記信号波形解析手段は、上記電磁石が印加した垂直磁界に対する磁化方向が反転した上記磁性領域の個数から磁化曲線を生成することを特徴とする、磁気特性測定装置。
A magnetic property measuring apparatus for measuring magnetic properties of a perpendicular magnetic recording medium in which magnetic regions are discretely formed in a nonmagnetic region,
An electromagnet that causes a perpendicular magnetic field to act on a plurality of magnetic regions simultaneously via magnetic poles at a predetermined measurement site on the surface of the perpendicular magnetic recording medium;
Variable constant current supply means for supplying a DC drive current to the electromagnet in a predetermined variable range;
A magnetic reading means disposed opposite to the surface of the perpendicular magnetic recording medium and reading a leakage magnetic field from the surface for each magnetic region;
A measurement part moving means for repeatedly moving the measurement part from a position facing the magnetic pole to a position facing the magnetic reading means;
Current variable control means for variably controlling the DC drive current via the variable constant current supply means each time a predetermined movement operation is performed by the measurement site moving means;
A signal waveform analyzing means for obtaining a signal output from the magnetic reading means each time a predetermined moving operation is performed by the measurement site moving means, and analyzing the signal waveform;
Equipped with a,
The apparatus for measuring magnetic characteristics, wherein the signal waveform analyzing means generates a magnetization curve from the number of the magnetic regions in which the magnetization direction with respect to a perpendicular magnetic field applied by the electromagnet is reversed .
上記垂直磁気記録媒体としては、円盤状の磁気ディスクが適用され、上記測定部位移動手段には、上記磁気ディスクを回転させる回転モータが含まれる、請求項1に記載の磁気特性測定装置。   2. The magnetic characteristic measuring apparatus according to claim 1, wherein a disk-shaped magnetic disk is applied as the perpendicular magnetic recording medium, and the measurement site moving means includes a rotation motor that rotates the magnetic disk. 上記磁気読み取り手段は、磁気ヘッドに搭載されており、上記磁気ヘッドには、上記磁気ディスクに対して上記磁性領域毎に記録磁界を作用させる磁気記録手段が搭載されており、上記信号波形解析手段は、上記電磁石の垂直磁界に応じて得られた信号波形と上記磁気記録手段の記録磁界に応じて得られた信号波形とを比較する機能を有する、請求項1に記載の磁気特性測定装置。   The magnetic reading means is mounted on a magnetic head, and the magnetic head is mounted with magnetic recording means for applying a recording magnetic field to the magnetic disk for each magnetic region, and the signal waveform analyzing means The magnetic characteristic measuring apparatus according to claim 1, having a function of comparing a signal waveform obtained according to a perpendicular magnetic field of the electromagnet and a signal waveform obtained according to a recording magnetic field of the magnetic recording means. 非磁性領域内に磁性領域が離散状に形成された垂直磁気記録媒体の磁気特性を測定するための磁気特性測定方法であって、
上記垂直磁気記録媒体の表面における所定の測定部位に複数の磁性領域に同時に電磁石の磁極を介して垂直磁界を作用させるとともに、上記垂直磁気記録媒体の表面からの漏洩磁界を上記磁性領域毎に読み取るようにその表面に対して磁気読み取り手段を対向配置し、
上記測定部位を上記磁極と対向する位置から上記磁気読み取り手段と対向する位置へと繰り返し移動させ、その一連の移動動作が行われるごとに上記電磁石に供給する直流駆動電流を可変制御するとともに、上記磁気読み取り手段から出力される信号を取得し、上記電磁石が印加した垂直磁界に対する磁化方向が反転した上記磁性領域の個数から磁化曲線を生成するように、その信号波形を解析することを特徴とする、磁気特性測定方法。
A magnetic property measurement method for measuring magnetic properties of a perpendicular magnetic recording medium in which magnetic regions are discretely formed in a nonmagnetic region,
A perpendicular magnetic field is simultaneously applied to a plurality of magnetic regions through a magnetic pole of an electromagnet at a predetermined measurement site on the surface of the perpendicular magnetic recording medium, and a leakage magnetic field from the surface of the perpendicular magnetic recording medium is read for each magnetic region. The magnetic reading means is arranged opposite to the surface as
The measurement site is repeatedly moved from a position facing the magnetic pole to a position facing the magnetic reading means, and the direct current drive current supplied to the electromagnet is variably controlled each time a series of movement operations are performed. A signal output from the magnetic reading means is acquired , and the signal waveform is analyzed so as to generate a magnetization curve from the number of the magnetic regions in which the magnetization direction with respect to the perpendicular magnetic field applied by the electromagnet is reversed. , Magnetic property measurement method.
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