JP5098245B2 - Actuator and manufacturing method thereof - Google Patents

Description

The present invention relates to an actuator, and more particularly, to an actuator that can stably form an electrode layer and can be stably operated in various atmospheres, and a manufacturing method thereof.

  In the fields of medical equipment, industrial robots, micromachines, etc., actuators that are compact, lightweight, and have excellent flexibility are required, and use electrostatic force, piezoelectricity, ultrasonic waves, shape memory alloys, polymer expansion and contraction, etc. Actuators have been proposed.

  For example, Non-Patent Document 1 below entitled “SMA artificial muscle suitable for human body wearing” includes the following description.

  Although there is no strict definition for artificial muscle, it is often used as a general term for "actuators that stretch and contract like human muscles". The classification of actuators called artificial muscles includes actuators using polymer materials (polymactuators), actuators using shape memory materials (shape memory actuators), actuators using electrostatic forces (electrostatic actuators), There is an air pressure actuator (air actuator), and research and development is thriving.

  The polymer actuator is a general term for polymers that cause deformation by external stimulus. The stimuli range from chemical stimuli (changes in pH, changes in the amount of impregnated water, etc.), electrical stimuli, thermal stimuli, light stimuli, magnetic stimuli and the like. In recent years, research on actuators that control polymers by electrical stimulation has been active.

  An ICPF (Ionic Conductive Polymer Film) actuator that deforms the polymer by moving ions in the polymer when voltage is applied, a conductive polymer actuator that deforms when the polymer electrode absorbs ions in the electric field solution by applying voltage, and the polymer itself is dielectric Piezoelectric polymer actuators that are polarized and deformed by the inverse piezoelectric effect, electrostrictive polymer actuators in which the polymer in the intermediate layer is deformed by the Coulomb force generated between the electrodes between the polymers, are the main examples using electrical stimulation.

  The polymer actuator has many attractive features such as high energy efficiency and low cost production, but there are many research technologies, and there are concerns such as durability. In addition, since the generated force is small by itself, in order to apply it to assist rehabilitation and the like, it is necessary to develop technology for increasing the output. The above is the description of Non-Patent Document 1.

  The above-mentioned ICPF actuator is also called IPMC (Ionic Polymer Metal Composite) actuator. When a voltage is applied between the electrodes of the joined body in which electrodes are joined to both sides of an ion conductive polymer (polymer electrolyte gel), the cation moves. As a result, water molecules also move, one side expands and the other side contracts, resulting in bending. It has features such as flexibility, light weight, silence, and easy miniaturization. In this actuator, characteristics such as the amount of deformation and generated force vary greatly depending on the material of the electrode and its structure.

  Non-patent document 2 entitled “Piezoelectric Actuator—Application to Precision Positioning” describes a bimorph pressure actuator that causes bending deformation of the entire actuator.

  For example, the following conventional techniques are known regarding the operation principle of the IPMC or ICPF actuator and the electrode forming method.

  Patent Document 1 below titled “Actuator Element” has the following description.

  The actuator element is composed of an ion exchange membrane and electrodes bonded to both surfaces of the ion exchange membrane, and in the water-containing state of the ion exchange membrane, the ion exchange membrane is subjected to a potential difference to bend and deform the ion exchange membrane. It is characterized by giving birth. Hereinafter, the actuator element will be described with reference to the drawings.

  FIG. 5 is FIGS. 1 and 2 described in Patent Document 1. FIG. 5A is a schematic cross-sectional view of the actuator element without voltage application, and FIG. 5B is an outline of the voltage application state of the actuator element. It is sectional drawing.

  As shown in FIG. 5A, the actuator element 201 includes an ion exchange membrane 202 and electrodes 203 and 203 ′ in contact with both surfaces of the ion exchange membrane 202. As the ion exchange membrane 202, either a cation exchange membrane or an anion exchange membrane can be used. For example, a polystyrene sulfonic acid membrane or a fluororesin ion exchange membrane having a sulfone group or a carboxyl group as a cation exchange membrane. Can be mentioned.

  For the electrodes 203 and 203 ′ bonded to both surfaces of the ion exchange membrane, noble metals such as platinum, iridium, palladium, and ruthenium are preferable, but other materials having both conductivity and corrosion resistance such as conductive polymers and graphite can be used. . As the bonding method, all known methods for attaching an electrode material such as chemical plating, electroplating, vacuum deposition, sputtering, coating, pressure bonding, and welding to a polymer film can be used.

  When the electrodes 203 and 203 'are connected to the DC power source 205 through lead wires, an actuator element is obtained. When the actuator element is operated, the ion exchange membrane needs to be in a water-containing state. Here, the water-containing state means that the actuator operates in water or in a high humidity atmosphere. In water, ions contained in the surrounding water may affect the operation, but can operate even in liquids containing various ions and solutes.

  Although the operating mechanism or principle of the actuator element is not clear, the positive ion 204 in the ion exchange membrane 202 moves to the cathode 203 ′ side as shown in FIG. It is presumed that there is a difference in moisture content between the anode side and the cathode side because the water molecules move in the membrane accompanying this ion. Therefore, it swells when the water content increases, and shrinks when the water content decreases, so it is considered that the film bends if there is a difference in moisture content between the front and back of the film. However, even if there is a difference in the distribution of ions, if the movement of ions stops in that state, it is estimated that the moisture distribution gradually approaches the original uniform state due to the diffusion of water from the outside of the membrane.

That is, if the current in the membrane decreases even when a constant voltage is applied, the distribution of the moisture content that has once occurred is gradually averaged, so that the curve is considered to return to its original state. When the cation exchange membrane is used in pure water, the ions that move are H ⁺ ions, and when used in saline, it is thought to be Na ^+. Move to the cathode side. Considering this, the moisture content of the polymer film on the cathode side increases and the moisture content on the anode side decreases, so the cathode side extends and the anode side shrinks, so the membrane curves to the anode side, and this tendency Corresponds to the results of the examples.

According to the invention described in Patent Document 1, an actuator element having the following features is obtained.
1) It has a simple structure and can be miniaturized.
2) Even if it is miniaturized, a large force that can overcome the viscous resistance of water and the frictional force of the surface can be generated.
3) Operates in liquid such as in vivo.
4) Operates at a low voltage of about 1V.
5) If it is ultra-compact, it can operate even with a very small current.
6) The response is relatively fast.
7) The operation of the actuator can be controlled by the voltage.
8) While a relatively large force is generated, the element itself is flexible.

  That is, by applying a direct current voltage of 0.1 to 3 V between the electrodes, a displacement as much as 1/10 of the element length can be obtained within 1 second, and a flexible element that operates in water can be produced. If the element is shaped like a long and narrow bar, it can be greatly bent and a large displacement can be obtained. Therefore, it is possible to use an underwater micro power generation mechanism that was impossible with conventional actuators, so it can be used as an artificial muscle for a micro robot that operates in water, and it can be used in vivo. It can also be applied to the power of instruments.

  Patent Document 2 below entitled “Actuator Method Manufacturing Method” includes the following description.

  After the metal complex is adsorbed on the ion exchange resin molded article in an aqueous solution, the metal complex adsorbed on the ion exchange resin molded article is reduced with a reducing agent, and the metal is deposited on the surface of the ion exchange resin molded article. A metal electrode is formed.

  As such a metal complex, a gold complex, a platinum complex, a palladium complex, a rhodium complex, a ruthenium complex, or the like is used. Among these, a gold complex and a platinum complex are particularly preferable because the displacement of the actuator element can be increased.

  Adsorption of these metal complexes onto an ion exchange resin molded product is performed by immersing the ion exchange resin molded product in an aqueous solution containing the metal complex. Further, such reduction of the metal complex is performed by immersing the ion exchange resin molded article on which the metal complex is adsorbed in an aqueous solution containing a reducing agent.

  Examples of the reducing agent include sodium sulfite, hydroxylamine hydrochloride, hydrazine, potassium borohydride and the like, although depending on the type of metal complex used. Moreover, when reducing a metal complex, you may add an acid or an alkali as needed.

  When the metal complex adsorbed on the ion exchange resin molded product is reduced in this way, metal is deposited on the surface of the ion exchange resin molded product, and a metal electrode is formed. When forming the metal electrode, the surface of the ion exchange resin molded product to be used may be roughened. Examples of the film surface roughening treatment include sand blast treatment and sand paper treatment. The degree of surface roughening may be such that the surface layer is scraped.

  By performing such roughening treatment, the contact area between the surface of the ion-exchange resin molded product and the electrode formed later can be increased, and the displacement of the actuator element can be increased.

  Japanese Patent Application Laid-Open No. 2004-228688 entitled “Polymer Actuator Manufacturing Method” includes the following description.

  A method of manufacturing a polymer actuator includes an ion exchange resin molded product and a metal electrode formed in an insulated state on the surface of the ion exchange resin molded product, and the metal exchanged product in a water-containing state of the ion exchange resin molded product A method of manufacturing a polymer actuator that functions as an actuator by bending and deforming an ion exchange resin molded product by applying a potential difference between electrodes, and includes the following steps: (1) Ion exchange resin molded product (2) a step of adsorbing a metal complex in an aqueous solution (adsorption step), (2) reducing the metal complex adsorbed on the ion exchange resin molded product with a reducing agent, and depositing a metal on the surface of the ion exchange resin molded product Ion exchange tree by repeatedly performing the process (deposition process) and (3) the process (cleaning process) of washing the ion exchange resin molded product on which the metal is deposited. Surface of the molded product, or to an internal ion-exchange resin molded article is characterized by forming a metal electrode.

  By forming the metal electrode with such a configuration, the deposition of metal further proceeds inside the ion exchange resin molded product, and the contact area between the ion exchange resin molded product and the metal electrode further increases. Thereby, an electrode active point increases and the ion which moves to an electrode also increases. In such a polymer actuator, water molecules move to the electrode along with the ions, the moisture content increases in the vicinity of the electrode on the moving side, and the molded product swells to expand, while it is opposite to the moving side. In the vicinity of the electrode on the side, the moisture content decreases and shrinks. For this reason, when the number of ions that move to the electrode increases, the number of water molecules that move to the electrode increases with this ion, so the difference in moisture content between the electrodes further increases, and the curvature, that is, the amount of displacement increases. Become. Moreover, since the thickness of a metal electrode becomes large, the surface resistance of an electrode falls and the electroconductivity of an electrode improves.

  Therefore, according to the polymer actuator obtained by the polymer actuator manufacturing method of Patent Document 3, the structure is simple, the size can be easily reduced, the response is fast, and a large amount of displacement can be generated. Possible polymer actuators can be obtained.

  For example, the following conventional techniques are known for providing a coating on the actuator.

  Patent Document 4 below entitled “Actuator Element” has the following description.

  FIG. 6 is FIG. 5 described in Patent Document 4, and is a longitudinal sectional view showing a configuration example of an actuator element.

  The actuator element 301 </ b> A includes a cation exchange resin layer 302 and a pair (a set) of electrode bodies 303 and 304 disposed so as to face each other with the cation exchange resin layer 302 interposed therebetween.

  Electric power is supplied to the electrode bodies 303 and 304 by a power supply means 311 as described below, and a potential difference is given. Lead wires (conductors) 314 and 315 are connected to the electrode bodies 303 and 304, respectively. In this case, the electrode bodies 303 and 304 and the lead wires (conductors) 314 and 315 from the power source 316 are fixed by a laser welding method, an ultrasonic welding method, a high frequency welding method, or the like, or a conductive adhesive or the like. It is preferably fixed by an adhesive fixing or brazing method via the conductive materials 312 and 313. As a result, the actuator element 300 can exhibit more reproducible and stable deformation performance. Note that the power source 316 may be either a DC power source or an AC power source.

  When the actuator element 300 as described above gives a potential difference (a low voltage that does not cause electrolysis of water, for example, 1.5 V or less) between the electrode bodies 303 and 304 via a lead wire, It is curved and deformed so as to protrude to the anode side of 303 and 304. Then, from the configuration of the cation exchange resin layer 2 described above, the deformation state of the actuator element 300 is maintained while the potential difference is continuously applied. Further, when the potential difference between the electrode bodies 303 and 304 is set to 0, the actuator element 300 immediately returns to the original shape.

  In the actuator element 300 shown in the figure, a coating layer 310 made of a water-impermeable material is formed on the surface.

  By providing such a coating layer 310, ion exchange in the cation exchange resin layer 302 is prevented, and the cations in the cation exchange resin layer 302 are stably maintained regardless of the usage environment of the actuator element 300. be able to. For this reason, the deformation characteristics and shape retention of the actuator element 300 are kept constant.

  Examples of the water-impermeable material constituting the coating layer 310 include polyolefins such as polyethylene and polypropylene, polyvinyl chloride, polyester, polyamide, polyether amide, polyurethane, fluororesin, and silicone rubber. Although the thickness of the coating layer 10 is not specifically limited, It is preferable to set it as about 0.1-100 micrometers, and it is more preferable to set it as about 1-10 micrometers.

  Patent Document 5 described below entitled “Actuator Element” has the following description.

  In the actuator, the ion exchange membrane and the electrodes bonded to both sides thereof are covered with a polymer material 6. As the polymer material for coating, any polymer that can form a thin film can be used without limitation, and a water-insoluble polymer is particularly preferable. For example, polyethylene, polystyrene, polyamide and the like can be mentioned. Moreover, the coating method is not particularly limited, but a method capable of forming a thin film is preferable. For example, a device comprising an ion exchange membrane and an electrode is immersed in a coating polymer solution or melt, and then pulled up and dried. A device comprising an ion exchange membrane and an electrode is immersed in the coating polymer solution or melt. Then, the method of immersing in the poor solvent of a polymer is mentioned.

Japanese Patent Laid-Open No. 4-275078 (page 2, left column, line 45 to same page, right column, line 42, page 3, right column, line 1 to same page, same column, line 22), FIGS. 1 and 2) JP-A-11-206162 (paragraphs 0020-0025) Japanese Patent No. 2961125 (paragraphs 0012 to 0014) JP-A-9-79129 (paragraph 0015, paragraphs 0034 to 0035, paragraphs 0040 to 0042, FIG. 5) JP-A-6-6991 (paragraphs 0014 to 0016, FIGS. 2 and 4) Matsushita Electric Engineering Technical Report, Aug. (2003), pp. 59-pp. 63 (2.1 “What is artificial muscle?” 2.2.1 “Polymactuator”) Journal of Precision Engineering, Vol. 72, no. 4, p. 449-p. 452 (2006) (2. “Types of Piezoelectric Actuators”)

  Polymer actuators using ionic conductive polymers have been studied as new actuators because of their light weight and high generation force. In this polymer actuator, characteristics such as deformation amount and generated force vary greatly depending on the electrode material and its structure.

  In the production of a polymer actuator, in the prior art, an electrode is formed by a plating method in which a noble metal complex such as gold or platinum is adsorbed on an ion conductive polymer film and reduced with a reducing agent to deposit the noble metal. It has been proposed. However, when producing precious metal electrodes by plating methods, there are problems such as slow film formation, large variations in film formation, and the need for special equipment to use special chemicals. It has been difficult to manufacture a large number of inexpensive actuators.

  In addition, the deformation of polymer actuators that use ion-conductive polymers involves moisture and is vulnerable to drying. In order to expand the field of application, in various atmospheres including air. There is a demand for stable operation over a long period of time.

  For stable operation of the polymer actuator, it is required that the connection portion between the electrode to which a voltage is applied by the conductive wire and the conductive wire has sufficient strength and always maintains a stable state.

  6, the lead wires 314 and 315 are connected to the electrode bodies 303 and 304, respectively. However, the lead wires 314 and 315 and the electrode bodies 303 and 304 are connected to each other. Since the connection portion is in a vertical state and the connection portion is a convex portion, there is a problem that the connection portion is easily subjected to an external force and the connection portion is placed in an unstable state. In addition, since the connecting portion is a convex portion, there is a problem that the actuator element does not have a compact and simple shape. Further, if the connecting portion is directly sandwiched and used as the fixed end of the actuator element 300, the fixed end becomes unstable, and there is a problem that the position after the deformation of the free end by driving the actuator element 300 becomes unstable.

  In the configuration of the actuator element described in Patent Document 5, there is a problem that the connection strength of this connection portion is not sufficient because the electrodes and the conductive wires are horizontal and connected in a dot shape.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an actuator that can stably form an electrode layer and can be stably operated in various atmospheres. And a manufacturing method thereof.

  That is, the present invention includes an actuator main body containing ions and a counter electrode formed on the opposing surface of the actuator main body, and a voltage is applied between the counter electrodes to cause deformation of the actuator main body. In the present invention, a polymer layer covering the actuator body and the counter electrode so as to enclose the entire body is provided, and at least a connection portion of the conductor to which the voltage is applied is connected between the actuator body and the counter electrode. Alternatively, the present invention relates to an actuator that is held between the counter electrode and a metal layer on the counter electrode.

  The present invention also provides a first step of forming an electrode layer on the surface of the polymer layer, and between each of the opposing surfaces of the actuator body containing ions and the electrode layer, or a metal layer on the electrode layer. A second step of disposing at least a connection portion between the electrode layer and a conductor for applying a voltage to the electrode layer between the electrode layer and the electrode layer; A third step of thermocompression bonding the electrode layer and the protruding portions of the polymer layer protruding from the sides of the facing surface are fused together, and the actuator body and the entire electrode layer are bonded together. And a fourth step of sealing the inside of the polymer layer.

  According to the actuator of the present invention, the actuator body has a polymer layer covering the whole of the actuator body and the counter electrode, and at least a connection portion of the conductor to which the voltage is applied is connected to the actuator body. Since it has a configuration held between the counter electrode or between the counter electrode and the metal layer on the counter electrode, the connection site is protected, and it has a simple and compact shape. This makes it difficult to cause poor electrical connection and improves the reliability and reproducibility of the actuator. Even if the part including the connection part is used as a fixed end for fixing the actuator and a voltage is applied to the actuator to cause deformation many times, the connection part is kept in a stable state. Good characteristics can be maintained over a long period of time. In other words, if a constant voltage is applied, the response characteristics of deformation caused by this will be the same. In addition, the metal layer on the counter electrode can reduce the electric resistance of the counter electrode, and by connecting a conductor to the metal layer and applying a voltage, deformation can be increased, which is excellent. Deformation performance (deformation amount and / or deformation speed) can be obtained with high reliability. In addition, since the actuator body, the counter electrode, and the connection part are cut off from the outside, the actuator can be stably maintained in various atmospheres such as in water, in a solvent, and in air while maintaining good characteristics over a long period of time. Can be operated. Further, the polymer film acts as a film that protects the entire actuator.

  Further, according to the method for manufacturing an actuator of the present invention, an electrode layer is formed on the surface of the polymer layer, and then between each of the opposing surfaces of the actuator body containing ions and the electrode layer, or the electrode Between the metal layer on the layer and the electrode layer, at least a connection portion with the electrode layer of the conductor for applying a voltage to the electrode layer is disposed, and then the polymer layer is formed on each of the opposing surfaces. The electrode layer is thermocompression-bonded to the outside, and then the projecting portions of the polymer layer projecting to the respective sides of the facing surface are fused together to form the actuator body and the electrode layer. Since the whole is sealed inside the polymer layer, the electrode layer can be stably and inexpensively formed on the surface of the polymer layer by a simple method, and the actuator body and the counter electrode can be formed. And shut off the connection part from the outside The granulation, can realize a simple configuration in a compact, it is possible to produce an actuator capable of stably operating while maintaining good properties over a long period of time in the air secondary various atmosphere. Moreover, the metal layer on the electrode layer can reduce the electrical resistance of the electrode layer, increase the deformation, and manufacture an actuator that can obtain excellent deformation performance with high reliability. it can. Further, the polymer film acts as a film that protects the entire actuator.

  In the actuator of the present invention, it is preferable that the conductive wire as the conductor is taken out from the polymer film as the polymer layer in a direction parallel to the actuator body from the connection site. The connecting portion is held and protected between the polymer layer and the actuator body, and can have a simple and compact shape.

  The metal layer between the polymer layer and the counter electrode is preferably formed of gold or platinum. By forming the metal layer with a chemically stable noble metal such as gold or platinum, the surface resistance of the counter electrode can be lowered, and the displacement of the actuator can be increased. Further, the metal layer can reduce moisture permeability (moisture permeability), and the metal layer and the polymer layer can improve moisture permeation prevention performance. As a result, the actuator body can be in a stable state.

  Moreover, it is preferable that the said actuator main body is comprised by the ion conductive polymer layer. The actuator body has a simple structure and can be miniaturized, and the drive can be controlled by a voltage, and a large deformation is caused by the drive by a small voltage. Can be generated. That is, a large driving force can be generated by the lightweight actuator body.

  In addition, it is preferable that the ion conductive polymer layer is impregnated with a cationic substance, and the cationic substance is any one of water and metal ions, water and organic ions, and an ionic liquid. By moving in the ion conductive polymer layer by the electric field of the metal cation or organic cation existing as hydrated ions, by moving in the ion conductive polymer layer by the electric field of the cation of the ionic liquid, The actuator is deformed. A special combination of cations and anions that is liquid and stable at room temperature (also called room temperature molten salt or ionic liquid, flame retardant, non-volatile, high polarity, high ionic conductivity, high heat resistance, etc. Can be used in a high temperature or in a vacuum without worrying about volatilization.

  The counter electrode is preferably formed of carbon powder and an ion conductive resin. Since the counter electrode is formed as a carbon electrode layer using carbon powder and an ion conductive resin, the carbon electrode layer can be formed on the polymer film with a desired thickness stably at a low cost by a simple method. .

  In addition, the deformation performance of the actuator is adjusted by at least one of the specific surface area of the carbon powder, the weight ratio of the solid content of the carbon powder and the ion conductive resin, and the thickness of the counter electrode. Is good. The deformation performance of the actuator can be adjusted by the specific surface area of the carbon powder that can be easily adjusted, the weight ratio of the solid content of the carbon powder and the ion conductive resin, and the thickness of the carbon electrode layer, By making the carbon electrode layer a structure in which the carbon powders are bonded via an ion conductive resin, the deformation performance can be realized with good reproducibility.

  The counter electrode may be configured to be heat-pressed to the ion conductive polymer layer. The counter electrode and the ion conductive polymer layer are integrated by thermocompression bonding, and the actuator can be obtained with high productivity.

  Moreover, it is good to set it as the structure whose melting | fusing point of the polymer film as said polymer layer is 150 degrees C or less. By using a polymer film having a melting point of 150 ° C. or lower, it can be thermocompression-bonded and sealed at a low temperature to make the actuator in a stable state shut off from the outside. The influence from the outside on the main body is small. In the case where the melting point of the actuator body is 150 ° C. or less and the structure is impregnated with an ionic liquid, thermocompression bonding of the counter electrode and the actuator body, and fusion between the polymer films (sealing films) ( Heat sealing, heat bonding, thermocompression bonding, heat fusion, etc.) can be performed at the same time, so that an actuator can be manufactured with few steps. Further, the polymer film acts as a film that protects the actuator.

  Further, the polymer film as the polymer layer is preferably configured to prevent moisture permeation. As this polymer film, a membrane with low moisture permeability (moisture permeability) including water vapor and a membrane with low water absorption are used, so that the polymer film dissipates moisture from the inside to the outside of the actuator. And it acts as a moisture permeation preventing film that can prevent moisture from entering the inside of the actuator from the external environment where the actuator is placed, so that the actuator body can be in a stable state. At the same time, the polymer film acts as a protective film for protecting the actuator.

  Moreover, it is good to set it as the structure by which the 2nd metal layer was provided inside the polymer film as said polymer layer. Since the second metal layer is provided inside the polymer film, the moisture permeability can be lowered by the metal layer, and the moisture permeation prevention performance can be improved by the metal layer and the polymer film. Can do. As a result, the actuator body can be in a stable state.

  Moreover, it is good to set it as the structure by which the 2nd metal layer was provided in the outer surface of the polymer film as said polymer layer. The polymer film and the second metal layer provided on the outer surface of the polymer film can improve the moisture permeation prevention performance, and the actuator body can be in a stable state.

  Moreover, it is good to set it as the structure by which the 2nd polymer film as said polymer layer was provided in the outer surface of the said 2nd metal layer. The polymer film and the metal layer provided on the outer surface of the polymer film and the second polymer film provided on the metal layer can improve the water permeation prevention performance, thereby stabilizing the actuator body. It can be made into the state which carried out.

In the manufacturing method of the actuator of the present invention, the metal layer on the electrode layer,
It is good to set it as the structure formed with gold | metal | money or platinum. The metal layer is formed by a chemically stable noble metal such as gold or platinum, the surface resistance of the electrode layer can be reduced, the displacement of the actuator can be increased, and the metal layer can reduce the moisture content. The transmittance can be lowered, and the moisture permeation preventing performance can be improved by the metal layer and the polymer layer. As a result, the actuator body can be in a stable state.

  Further, in the second step prior to the third step, the connection portion is held between the actuator body and the electrode layer, or in the first step, the connection portion is connected to the metal layer and the metal layer. It is preferable that the second step held between the electrode layers is performed. With the connection site protected, the actuator can be made into a simple and compact shape, and stable operation can be achieved.

  In the fourth step, it is preferable that the conductive wire as the conductor for applying a voltage to the electrode layer is taken out of the polymer film as the polymer layer in a direction parallel to the actuator body. . The actuator can have a simple and compact shape.

  Further, it is preferable that the third step and the fourth step are performed simultaneously. An actuator can be manufactured with few processes.

  In the first step, the electrode layer is formed as a carbon electrode layer by applying a mixture of carbon powder and an ion conductive resin onto a polymer film as the polymer layer and drying it. It is good. The carbon electrode layer can be formed on the polymer film with a desired thickness stably at a low cost by a simple method.

  Prior to the first step, the metal layer is formed on the surface of the polymer film as the polymer layer to which the mixture is applied, and the mixture is applied to the surface of the metal layer. It is good. The electric resistance of the electrode layer can be lowered by the metal layer on the electrode layer, and excellent deformation performance can be obtained with high reliability by connecting a conductor (conductive wire) to the metal layer. In addition, since the metal layer is provided between the polymer layer and the electrode layer, the metal layer can reduce moisture permeability, and the metal layer and the polymer layer prevent moisture permeation. Performance can be improved. As a result, the actuator body can be held in a stable state.

  In the fourth step, the polymer film as the polymer layer may be fused at a temperature of 150 ° C. or lower. The actuator can be thermocompression-bonded and sealed at a low temperature, and the influence on the counter electrode and the actuator body from outside can be reduced.

  Moreover, it is good to set it as the structure which has a 5th process of providing a 2nd metal layer in the outer surface of the polymer film as said polymer layer. The polymer film and the second metal layer provided on the outer surface of the polymer film can improve the moisture permeation prevention performance, and the actuator body can be in a stable state.

  Moreover, it is good to set it as the structure which has a 6th process of providing the 2nd polymer film as the said polymer layer in the outer surface of a said 2nd metal layer. Moisture permeation prevention performance can be improved by the polymer film and the metal layer provided on the outer surface of the polymer film and the second polymer layer provided on the second metal layer, and the actuator. The main body can be in a stable state.

  Hereinafter, as a representative example of an actuator including ions, an embodiment of the present invention will be described by taking as an example a polymer actuator of a type called an IPMC or ICPF actuator that uses an ion conductive polymer including a movable ion by applying a voltage. Will be described in detail.

  In the polymer actuator, a carbon electrode layer is provided on the opposite surface of the ion conductive polymer layer constituting the actuator body, and a polymer film is provided outside each carbon electrode layer. The whole is bent or deformed by applying a voltage. The carbon electrode layer is composed of carbon powder and an ion conductive resin.

  The carbon electrode layer is previously formed on the polymer film by carbon powder and an ion conductive resin. The two polymer films on which the carbon electrode layers are formed are thermocompression-bonded to both surfaces of the ion conductive polymer layer with the carbon electrode layer forming surface (the surface on which the carbon electrode layer is formed) facing inward. to paste together. The polymer film covers the actuator body and the carbon electrode layer so as to wrap the whole.

  The melting point of this polymer film is 150 ° C. or less. Moreover, it is good also as a structure by which a metal layer is formed in the carbon electrode layer formation surface of a polymer film, and a carbon electrode layer is formed on this metal layer. Furthermore, it is good also as a structure by which the metal layer which consists of Al etc. is formed in the opposite side to the carbon electrode layer formation surface of a polymer film, or the inside of a polymer film.

  In forming the carbon electrode layer, a method of forming a carbon electrode layer by directly applying a mixture of carbon powder and ion conductive resin powder dispersed in a solvent together with a solvent to the ion conductive polymer layer is a simple method. However, as the above solvent, a solvent having a good affinity with the ion conductive polymer layer is used, so that the solvent molecules enter the ion conductive polymer layer and the ion conductive polymer layer easily swells, and the mixture is applied. Sometimes, the dimensions of the base material (ion conductive polymer layer) itself are likely to fluctuate, and it is necessary to devise in order to form a uniform thick carbon electrode layer.

  In this embodiment, considering the resistance to the solvent, the type of polymer film is selected, and the mixture is applied onto the polymer film to form a carbon electrode layer. A dimensional change caused by swelling of the polymer film caused by the solvent is small or negligible, and a uniform and thick carbon electrode layer can be formed.

  This polymer film uses a film with low moisture permeability (moisture permeability) including water vapor, a film with low water absorption, and a film with excellent solvent resistance. Of the sealing film (moisture permeation preventive film, solvent permeation preventive film) that has the function of enclosing and sealing the entire polymer actuator and suppressing the ingress and egress of moisture including water vapor to and from the sealed space. It also has a role to prevent the polymer actuator from drying out and to keep the internal state of the polymer actuator sealed with voltage applied at a substantially constant level. It can also be used in various atmospheres such as in a solvent and air.

  In the present embodiment, at least one of the specific surface area of the carbon powder, the solid content weight ratio of the carbon powder and the ion conductive resin, and the thickness of the carbon electrode layer to be formed can be easily adjusted. Deformation performance can be adjusted, and by making the carbon electrode layer a structure in which carbon powders are bonded together via an ion conductive resin, the deformation performance can be realized with good reproducibility.

  Instead of directly forming the carbon electrode layer on the ion conductive polymer layer, the carbon electrode layer is formed by a simple method by applying a mixture of carbon powder and ion conductive resin on the polymer film and drying it. Next, a carbon electrode layer is thermocompression bonded to each of the opposing surfaces of the ion conductive polymer layer with the polymer film as the outside, and the polymer film on each side of the opposing surfaces of the ion conductive polymer layer Are fused to seal the ion conductive polymer layer and the carbon electrode layer inside the polymer film.

  Since the carbon electrode layer is formed on the polymer film in advance and then heat-pressed onto the ion conductive polymer layer, the dimensional change of the polymer film as the substrate is small and uniform even when the carbon electrode layer is formed. The carbon electrode layer can be formed, and the degree of freedom in designing the polymer actuator is increased.

  Thus, in this embodiment, the carbon electrode layer can be stably and inexpensively formed on the polymer film by a simple method, and the ion conductive polymer layer and the entire carbon electrode layer are formed by the polymer film. Since the ion conductive polymer layer can be placed in a stable state, the large deformation performance can be reliably controlled, and the actuator can be used in water, in a solvent, It can be stably operated while maintaining good characteristics over a long period of time in various atmospheres such as air.

  Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings.

  1A and 1B are diagrams for explaining the structure and manufacturing method of a polymer actuator according to an embodiment of the present invention. FIG. 1A is a cross-sectional view illustrating the structure of a polymer actuator, and FIG. It is sectional drawing explaining the manufacturing method of a polymer actuator.

  FIG. 2 is a cross-sectional view for explaining a modification of the manufacturing method of the polymer actuator in the embodiment of the present invention.

  FIG. 3 is a schematic diagram for explaining the operation of the polymer actuator in the embodiment of the present invention.

  1, 2, and 3 are cross-sectional views taken along a plane parallel to the longitudinal direction of the polymer actuator.

  First, a polymer actuator according to an embodiment of the present invention will be described with reference to FIG.

  As shown in FIG. 1A, a polymer actuator 40a before deformation includes an ion conductive polymer layer (ion conductive polymer film) 15 impregnated with a cationic substance, and the ion conductive polymer layer. 15 are provided with carbon electrode layers 25a and 25b provided on both surfaces of the surface 15 and conductive wires 42 electrically connected to the carbon electrode layers 25a and 25b, respectively.

  Between the carbon electrode layers 25a and 25b and the ion conductive polymer layer 15, the conductive wire 42 is held in a state of being sandwiched between both, and the portion of the held conductive wire 42 is the carbon electrode layer 25a, This is an electrical connection portion between 25b and the conductive wire. The polymer film 30 wraps the carbon electrode layers 25a and 25b, the ion conductive polymer layer 15, and the entire electrical connection portion.

  A voltage is applied between the carbon electrode layers 25a and 25b by the pair of conductive wires 42, the ion conductive polymer layer 15 is bent or deformed, and the polymer actuator 40a before deformation is deformed as described later.

  The ion conductive polymer layer 15 is made of an ion exchange resin having a skeleton made of fluororesin, hydrocarbon, or the like, and has a shape having two main surfaces. For example, a strip shape, a disk shape, a columnar shape, a cylindrical shape and the like can be mentioned. The ion exchange resin may be any of an anion exchange resin, a cation exchange resin, or a both ion exchange resin, and among these, a cation exchange resin is preferred.

  Examples of the cation exchange resin include those in which a functional group such as a sulfonic acid group or a carboxyl group is introduced into polyethylene, polystyrene, fluororesin or the like, and in particular, a functional group such as a sulfonic acid group or a carboxyl group is introduced into the fluororesin. Preferred cation exchange resins are preferred.

  The carbon electrode layers 25a and 25b are made of carbon powder and an ion conductive resin, and the carbon powders are bonded to each other through the ion conductive resin. The carbon powder is a fine powder of carbon black having conductivity, and the larger the specific surface area, the larger the surface area in contact with the ion conductive polymer layer 15 as the carbon electrode layers 25a and 25b, thereby obtaining a larger deformation amount. Can do. For example, the use of ketjen black (KB), which is a highly conductive carbon black, is preferable. Further, the ion conductive resin may be the same as the material constituting the ion conductive polymer layer 15.

  As will be described later, the carbon electrode layers 25a and 25b are formed by applying a coating containing an ion conductive resin component or an ion exchange resin and carbon powder on a polymer film (made of an electrically insulating thermoplastic resin) 30. Is done. The carbon electrode layers 25 a and 25 b are thermocompression bonded to the ion conductive polymer layer 15. The carbon electrode layers 25a and 25b can be easily formed in a short time.

  At least the ion conductive polymer layer 15 is impregnated with a cationic substance, and this cationic substance is preferably any one of water and metal ions, water and organic ions, and ionic liquid. Here, examples of the metal ion include sodium ion, potassium ion, lithium ion, and magnesium ion.

  Examples of organic ions include alkyl ammonium ions. These ions exist as hydrates in the ion conductive polymer layer 15. When the ion conductive polymer layer 15 contains water and metal ions or water and organic ions and is in a water-containing state, the carbon actuator layer 25a, 25 b and the ion conductive polymer layer 15 are sealed inside by a polymer film 30.

  In addition, the ionic liquid is a solvent composed only of non-flammable and nonvolatile ions, which is also called a room temperature molten salt. For example, an imidazolium ring compound, a pyridinium ring compound, or an aliphatic compound should be used. Can do. When the ion conductive polymer layer 15 is impregnated with an ionic liquid, the polymer actuator can be used at high temperature or in vacuum without worrying about volatilization.

  Here, the operation principle of the polymer actuator will be described with reference to FIG. In FIG. 3, the polymer actuator is shown in a simplified manner, and a cross section perpendicular to the thickness direction is shown only for the outer shape. Here, it is assumed that the ion conductive polymer layer 15 is impregnated with sodium ions.

  FIG. 3A shows the polymer actuator 40a before deformation with SW turned off. As shown in the figure, no voltage is applied from the power source, and there is no potential difference between the two carbon electrode layers 25a and 25b, so that the region between the two carbon electrode layers 25a and 25b in the ion conductive polymer layer 15 is not. There is no volume difference, and the ion conductive polymer layer 15 is in a straight state without bending deformation. In FIGS. 3B and 3C, the polymer actuator 40a before deformation is shown by a dotted line.

  SW is turned on and a positive potential is applied to the carbon electrode layer 25a of the upper polymer actuator in FIG. 3B through the conductive line 42 from the power source, and a negative potential is applied to the lower carbon electrode layer 25b in FIG. Applied. Due to this potential difference, sodium ion hydrate is attracted and moved to the carbon electrode layer 25b on the side to which a negative potential is applied (the lower side in the figure) in the ion conductive polymer layer 15 of the polymer actuator. However, it concentrates in the vicinity of the carbon electrode layer 25b and this region expands in volume. On the other hand, the sodium hydrate concentration in the vicinity of the carbon electrode layer 25a on the side to which the positive potential is applied (the upper side in the figure) decreases, and this region shrinks in volume. As a result, a volume difference is generated between the two carbon electrode layers 25a and 25b in the ion conductive polymer layer 15, and in the deformed polymer actuator 40b, the ion conductive polymer layer 15 is shown in FIG. Curved in a concave shape on the inside upper side.

  In FIG. 3C, a negative potential is applied to the carbon electrode layer 25a of the upper polymer actuator in the figure and a positive potential is applied to the lower carbon electrode layer 25b in the figure through the conductive line 42 from the power source. The voltage application method is opposite to that in FIG. Due to this potential difference, in the ion conductive polymer layer 15 of the polymer actuator, a region in the vicinity of the carbon electrode layer 25a on the side to which a negative potential is applied (upper side in the figure) is volume-expanded to a positive potential. The area in the vicinity of the carbon electrode layer 25b on the side to which is applied (lower side in the figure) shrinks in volume. As a result, in the polymer actuator 40b after deformation, the ion conductive polymer layer 15 is curved in a concave shape downward in the figure.

  The deformation performance (deformation amount and / or deformation speed) of the polymer actuator is at least one of the specific surface area of the carbon powder, the solid weight ratio of the carbon powder and the ion conductive resin, and the thickness of the carbon electrode layers 25a and 25b. It is possible to control by adjusting one. Further, the deformation performance (deformation amount and / or deformation speed) of the polymer actuator can also be controlled by adjusting the ratio between the thickness of the carbon electrode layers 25a and 25b and the thickness of the ion conductive polymer layer 15. it can.

  As shown in FIG. 1B, the polymer actuator can be manufactured by the following procedure.

  As shown in FIG. 1 (B1), carbon electrode layers 25a and 25b are formed on the polymer film 30. First, the ion conductive polymer layer 15 is prepared. A coating material is obtained by mixing a carbon powder having a predetermined specific surface area in an organic solvent dissolved in an organic solvent so that the solid weight ratio of the carbon powder and the ion conductive resin becomes a target value, and dispersing the mixture. .

  One surface of the polymer film 30 is dipped on the coating material, or the coating material is applied to the polymer film 30 by a printing method, and the formed coating film is dried in the air. This coating film formation and drying are repeated to form carbon electrode layers 25a and 25b having a desired thickness.

  Next, the ion conductive polymer layer 15 is impregnated with a cationic substance. Specifically, the laminate in which the carbon electrode layers 25a and 25b are formed on the ion conductive polymer layer 15 is immersed in a chloride solution or hydroxide solution containing either metal ions or organic ions, or an ionic liquid. Thus, these metal ions, organic ions, and ionic liquid are impregnated in the ion conductive polymer layer 15 and the carbon electrode layers 25a and 25b. The laminate impregnated with the cationic substance is cut into a desired shape.

  Next, as shown in FIG. 1 (B2), the conductive wire 42 is arranged on the carbon electrode layers 25a and 25b of the laminate, and is fixed using the conductive adhesive 43. This fixing may be performed by other methods. The conductive wire 42 is covered with a polymer film 49 made of an electrically insulating thermoplastic resin. The polymer coating 49 may be the same material as the polymer film 30.

  In the example shown in FIG. 1 (B2), two portions are formed by folding the conductive wire 42 exposed at the tip, and one portion is formed by bending a part of the two portions substantially at a right angle. The portion is brought into contact with the side wall portions of the carbon electrode layers 25a and 25b, and the one portion is brought into contact with the surface portion of the carbon electrode layers 25a and 25b, so that the two portions, the side wall portions of the carbon electrode layers 25a and 25b, and the polymer film 30 The surfaces are connected to each other using a conductive adhesive 43 and fixed to the surface of the polymer film 30. In this way, an electrical connection portion is formed by one and two portions of the conductive wire 42.

  Also, two portions are formed such that the conductive wire 42 exposed at the tip and the polymer film 49 overlap each other, and one portion is formed by bending a portion of the two conductive wires 42 at a substantially right angle. Then, the two portions are brought into contact with the side walls of the carbon electrode layers 25a and 25b, the one portion is brought into contact with the surface portions of the carbon electrode layers 25a and 25b, and (1) the two portions and the carbon electrode layers 25a, The side wall portion of 25b and the surface of the polymer film 30 are connected by using a conductive adhesive 43 to be fixed to the surface of the polymer film 30, or (2) two-part polymer The film 49 and the polymer film 30 are fused, and the two portions, the side walls of the carbon electrode layers 25a and 25b, and the surface of the polymer film 30 are connected using the conductive adhesive 43, and the polymer film It can also be set as the structure fixed to 30 surfaces. Thus, an electrical connection portion is formed by one portion of the conductive wire 42 connected to the side wall portion and the surface portion of the carbon electrode layers 25a and 25b.

  As described above, by connecting the polymer film 30 and the electrical connection portion, the electrical connection portion can be protected, and the conductive wire 42 and the carbon electrode layers 25a and 25b are electrically connected. The electrical connection portion can be protected.

  In FIG. 1 (B1), prior to the formation of the carbon electrode layers 25a and 25b on the polymer film 30, the polymer film 30 and the polymer film 49 are connected by thermal bonding (fusion). Alternatively, the carbon electrode layers 25a and 25b may be formed so as to cover the conductive wire 42 exposed at the tip, and the conductive wire 42 and the carbon electrode layers 25a and 25b may be electrically connected. In this case, the carbon electrode layers 25a and 25b can be formed while the electrical connection portion is protected.

  Next, as shown in FIG. 1 (B3), the carbon electrode layers 25a and 25b of the laminate shown in FIG. 1 (B2) are opposed to the ion conductive polymer layer 15 with the ion conductive polymer layer 15 interposed therebetween. Let them be arranged.

  Next, although not shown in FIG. 1 (B4), the carbon electrode layers 25a and 25b of the laminate are thermocompression bonded to the opposing surfaces of the ion conductive polymer layer 15 with the polymer film 30 as the outside. Thereafter, the thermocompression bonded body is left in an atmosphere of 40 ° C. and 90% for 1 hour and humidified.

  Next, although not shown in FIG. 1 (B5), sealing is performed by thermocompression bonding of a pair of laminated polymer films 30. At this time, the pair of conductive wires 42 are taken out of the polymer film 30.

  A polymer coating 49 of the conductor wire 42 connected to the carbon electrode layers 25a and 25b is sandwiched between the polymer films 30, and the polymer films 30 are thermocompression bonded together with the polymer coating 49 to form a pair of conductive layers. The wire 42 can be taken out of the polymer film 30 electrically independently. If the polymer coating 49 is made of the same material as the polymer film 30 and is a thermoplastic material, the polymer films 30 are fused together, and the polymer film 30 and the polymer coating 49 are fused. Since the conductive wire 42 can be taken out with the polymer coating 49 on the outside, the actuator can be manufactured with few steps.

  In this way, the polymer actuator shown in FIG. 1A is completed, and the conductive wire 42 is taken out parallel to the longitudinal direction of the polymer actuator. The conductive wire 42 is electrically connected to the side wall portions of the carbon electrode layers 25a and 25b by the conductive adhesive 43, and the conductive wire 42 is connected to the surface portions of the carbon electrode layers 25a and 25b and the ion conductive polymer layer. 15 and the carbon electrode layers 25a and 25b are electrically connected.

  In the case where the ion conductive polymer layer is impregnated with an ionic liquid, thermocompression bonding between the surface of the ion conductive polymer layer 15 and the carbon electrode layers 25a and 25b, thermocompression bonding between the polymer films 30, and In addition, the thermocompression bonding of the polymer film 30 and the polymer coating 49 can be performed simultaneously, and the operation can be completed in a short time.

  Hereinafter, more specific examples of the embodiment of the present invention will be described.

  As the ion conductive polymer layer 15, for example, a perfluorosulfonic acid resin (trade name Nafion (model number N-117), manufactured by DuPont) can be used. The thickness of the ion conductive polymer layer 15 was 183 μm.

In order to form the carbon electrode layers 25a and 25b, ketjen black (BET = 800 m ² / g) or the like can be used as the carbon powder. This ketjen black is mixed with, for example, a Nafion solution (5 wt%) so that the weight ratio of solid content is 1: 2, and dispersed to prepare a carbon paint.

  As shown in FIG. 1 (B1), the produced carbon paint is applied on a polyethylene film (for example, a thickness of 50 μm, melting point is 130 ° C.) by screen printing or the like, and dried. When an electrode layer having a desired thickness (for example, 60 μm) cannot be obtained by a single application of the carbon paint, the application of the carbon paint and the drying of the applied layer are repeated until the desired thickness is reached. Then, it is immersed in a 0.1N sodium hydroxide aqueous solution for 2 hours, and then washed with pure water.

  As shown in FIG. 1 (B), two conductive polymer (polyethylene) films 30 on which carbon electrode layers 25a and 25b are formed are ion-conductive polymer with the carbon electrode layers 25a and 25b facing inside. The layer 15 is sandwiched and heat-pressed at 150 ° C. Thereafter, the thermocompression bonded body is left in an atmosphere of 40 ° C. and 90% for 1 hour to humidify, and then the polymer film around the actuator is fused. At this time, a necessary number of insulation coatings 49 of the lead wires 42 are heat-bonded together. Finally, cut into the desired shape. That is, it is divided into a pressure bonding process of the electrode layer and a sealing process around the actuator, a humidification process is provided between these processes, and when the carbon electrode layers 25a and 25b are heat bonded to the ion conductive polymer layer 15, the actuator In this state, the actuator is humidified by leaving it in an atmosphere of 40 ° C. and 90% (humidity) for 1 hour, and then the polymer film around the actuator. Fuse.

  As shown in FIG. 1 (A), the polymer actuator thus fabricated has a carbon electrode layer composed of carbon powder and an ion conductive resin on both surfaces of the ion conductive polymer layer 15 facing each other. 25a, 25b are provided, and further, the polymer film 30 is provided outside the carbon electrode layers 25a, 25b, whereby the entire ion conductive polymer layer 15 and the carbon electrode layers 25a, 25b are wrapped and covered, Having a sealed structure, the conductive wire 42 is taken out from the sealed inside to the outside from the substantially central portion of the ion conductive polymer layer 15 in the thickness direction, substantially parallel to the layer, It has a compact and simple shape.

The ion conductive polymer layer 15 and the carbon electrode layers 25a and 25b on both sides thereof are immersed in sodium hydroxide and have Na ⁺ ions. Conductive wires 42 are connected to the carbon electrode layers 25a and 25b, and when a voltage is applied between the carbon electrode layer conductive wires 25a and 25b via the conductive wires 42, the ion conductive polymer layer 15 and the carbon electrodes are applied. Na ⁺ ion hydrates present in the layers 25a and 25b are attracted to the carbon particles of the carbon electrode layer having a negative potential and expand.

At this time, in the carbon electrode layer on the plus side, the volume decreases because Na ⁺ ion hydrate moves to the opposite side. Due to the expansion and contraction due to the difference in the amount of Na ⁺ ion hydrate, a volume difference is generated between the two carbon electrode layers, thereby bending as shown in FIG. At this time, since the outer sides of the carbon electrode layers 25a and 25b are covered with the polymer film 30, the volatilization of moisture in the carbon electrode layers 25a and 25b and the ion conductive polymer layer 15 is suppressed. The molecular actuator can be operated for a long time without drying. In addition, since the polymer film 30 has a melting point of 150 ° C. or less, it can be heat-bonded and sealed at a low temperature, and the influence on the carbon electrode layers 25a and 25b and the ion conductive polymer layer 15 is small. That's it.

  Further, the carbon electrode layers 25a and 25b are not directly formed on the ion conductive polymer layer 15, but are formed on the polymer film 30, and then the carbon electrode layers 25a and 25b, the ion conductive polymer layer 15 and Is heated and pressure-bonded, so that the dimensional change of the substrate (polymer) film 30 during the formation of the carbon electrode layers 25a and 25b is small, and a uniformly thick film (carbon electrode layer) can be formed. The degree of freedom of design becomes higher. In the case where the ion conductive polymer layer is impregnated with an ionic liquid, the thermocompression bonding of the carbon electrode layers 25a and 25b and the ion conductive polymer layer 15 and the polymer film (sealing film) 30 are arranged together. Since heat sealing can be performed at the same time, the polymer actuator can be manufactured with fewer steps.

  In addition, as the ion conductive polymer film 15 and the ion conductive resin, in addition to those having a fluororesin skeleton such as Nafion, it is possible to use hydrocarbon type or other types. As a method of applying the carbon paint for forming the carbon electrode layer, a conventionally known coating method or printing method can be used in addition to screen printing.

  As ions implanted into the ion conductive polymer layer 15 and the carbon electrode layers 25a and 25b, in addition to sodium, metal ions such as potassium, lithium, magnesium and calcium, and organic ions such as alkylammonium ions can be used. Ions are implanted by treating them in a chloride or hydroxide solution. Further, instead of such ion implantation treatment, the ion conductive polymer layer 15 and the carbon electrode layers 25a and 25b may be impregnated with an ionic liquid.

  As will be described later, a chemically stable metal layer such as gold or platinum is formed on the surface of the polymer film 30 that forms the carbon electrode layers 25a and 25b, so that the surface resistance of the carbon electrode layers 25a and 25b is increased. May be lowered. Conventionally known film forming methods such as plating, vapor deposition, and sputtering can be used for forming the metal layer.

  Further, as will be described later, a metal layer (film) such as Al or Cu may be formed on the surface of the polymer film opposite to the surface on which the carbon electrode layer is formed. By forming this metal film, the moisture permeability can be further reduced as compared with the polymer film 30, and the polymer actuator can be made more difficult to dry. The metal film may be provided with a polymer layer, and the metal layer may be sandwiched between the polymer film and the polymer layer.

  In addition to polyethylene, the polymer film 30 is an electrically insulating thermoplastic film that has a melting point of 150 ° C. or lower, can be heat-sealed, is flexible and flexible, has low water absorption, and moisture permeability. Can be used as long as the film satisfies the conditions of low (that is, low water permeability). The material and thickness of the polymer film are not particularly limited as long as these conditions are satisfied, but may be any material and thickness that do not hinder the deformation of the polymer actuator. A film having a polyethylene layer as the heat-fusible layer can also be used.

  For example, if a polyethylene film laminated with aluminum is used, if the film thickness is about several hundreds of nanometers, it is possible to produce a polymer actuator having a low moisture permeability and excellent flexibility.

  As shown in FIG. 2, various modifications can be made to the manufacturing process of the polymer actuator shown in FIG.

  As shown in FIG. 2A, the carbon electrode layer 25 may be formed on the portion of the polymer film 30 on which the metal layer 44 on one side is formed. The metal layer 44 is made of gold or platinum. The polymer film 30 on which the metal layer 44 is formed is formed by removing unnecessary portions by etching so that the metal layer remains in a desired region using a polymer film with a single-sided metal layer formed on one side. It can also be produced.

  Further, as shown in FIG. 2B, the carbon electrode layer 25 may be formed on the metal layer 44 on one side using a polymer film 30 having a metal layer formed on the two sides. That is, the metal layer 46 may be formed on the surface of the polymer film 30 shown in FIG. 2A where the metal layer 44 is not formed. The metal layer 46 is formed of Al, Cu or the like. Using a polymer film with a double-sided metal layer with a metal layer formed on one side and the other side, unnecessary portions are removed by etching so that the metal layer remains in a desired region on one side, and the metal layer 44, etc. on one side It can also be produced as the polymer film 30 on which the surface metal layer 46 is formed.

  Further, as shown in FIG. 2C, a polymer film 30 having a metal layer 44 on one surface and a metal layer 46 and a polymer layer 48 formed on the other surface is used. The carbon electrode layer 25 may be formed on the metal layer 44 on the surface. That is, the polymer layer 48 may be formed on the surface of the metal layer 46 opposite to the polymer film 30 shown in FIG. Two layers of the polymer film with a single-sided metal layer are bonded by thermocompression bonding, and the metal layer 44 can be formed on the exposed metal layer surface in the same manner as described above.

  The carbon electrode layer 25 is formed on the metal layer 44 shown in FIGS. 2A to 2C, and a laminate is formed.

  Further, as shown in FIG. 2D, the metal layer 44 may not be formed in the structure shown in FIG.

  Similarly, as shown in FIG. 2E, the metal layer 44 may not be formed in the structure shown in FIG.

  In the configurations shown in FIGS. 2D and 2E, the carbon electrode layer 25 is formed directly on the polymer film 30 as in the configuration shown in FIG. 1, and a laminate is formed.

  As shown in FIG. 2 (F), each stacked body shown in FIGS. 2 (A) to 2 (E) is formed on the opposite surface of the ion conductive polymer layer 15 in the same manner as in FIG. 1 (B). The carbon electrode layer 25 of a laminated body is arrange | positioned, the polymer films 30 are thermocompression-bonded, and a polymer actuator is completed.

  In the example shown in FIG. 2F, in the configuration shown in FIGS. 2A to 2C, the area of the metal layer 44 formed on the surface of the polymer film 30 is the same as that of the carbon electrode layer 25. In other words, the conductive wire 42 is electrically connected to the surface of the metal layer 44 so as to have a large area of the same area as the side of the carbon electrode layer 25.

  In the example shown in FIG. 2 (F), the electrical connection between the conductive wire 42 and the carbon electrode layers 25a and 25b is performed as follows. Prior to the formation of the carbon electrode layers 25a and 25b on the metal layer 44, the conductive wire 42 exposed at the tip and the metal layer 44 are electrically connected using the conductive adhesive 43 and soldering iron. The carbon electrode layers 25a and 25b are formed so as to cover the conductive wire 42 exposed at the tip, and the conductive wire 42 and the carbon electrode layers 25a and 25b are electrically connected. Next, the conductive wire 42 exposed at the tip is bent at a substantially right angle and brought into contact with the side wall portions of the carbon electrode layers 25a and 25b, so that the conductive wire 42, the side wall portions of the carbon electrode layers 25a and 25b, and the metal layer 44 are formed. The surfaces are connected using a conductive adhesive 43 and fixed to the surface of the metal layer 44.

  As a result, electrical connection portions are formed in the side wall portions of the carbon electrode layers 25a and 25b, and in the metal layer 44 directly below the carbon electrode layers 25a and 25b and outside the side wall portions. Since the conductive wire 42 in the side wall portion is fixed to the surface of the metal layer 44 by the conductive adhesive 43, the electrical connection portion is protected.

  As described below, the conductive wire 42 can be connected after the carbon electrode layers 25a and 25b are formed on the metal layer 44 in the same manner as in the example shown in FIG.

  In the same manner as the example shown in FIG. 1 (B2), two portions are formed by folding the conductive wire 42 exposed at the tip, and one portion is formed by bending a part of the two portions substantially at a right angle. Two portions are brought into contact with the side wall portions of the carbon electrode layers 25a and 25b, and one portion is brought into contact with the surface portion of the carbon electrode layers 25a and 25b. The surface of the metal layer 44 exposed on the part side is connected with the conductive adhesive 43 to be fixed to the surface of the metal layer 44. In this manner, the one and two portions of the conductive wire 42 are used to electrically connect the side walls of the carbon electrode layers 25a and 25b and the metal layer 44 outside the side walls of the carbon electrode layers 25a and 25b. Is formed. Since the conductive wire 42 in the side wall portion is fixed to the surface of the metal layer 44 by the conductive adhesive 43, the electrical connection portion is protected.

  Also, two portions are formed such that the conductive wire 42 exposed at the tip and the polymer film 49 overlap each other, and one portion is formed by bending a portion of the two conductive wires 42 at a substantially right angle. Then, the two parts are brought into contact with the side walls of the carbon electrode layers 25a and 25b and the surface of the metal 44 outside the side walls, and the one part is brought into contact with the surface parts of the carbon electrode layers 25a and 25b. ) The two portions and the side walls of the carbon electrode layers 25a and 25b and the surface of the metal 44 outside the side walls are connected using the conductive adhesive 43, and fixed to the surface of the metal 44 outside the side walls. Or (2) the two portions of the polymer coating 49 and the surface of the metal 44 outside the sidewall portion are fused, and the two portions and the sidewall portions and the sidewall portions of the carbon electrode layers 25a and 25b. The outer surface of the metal 44 is connected with the conductive adhesive 43, and the side wall portion It may be a fixed to the surface side of the metal 44 structure. In this way, electrical connection portions are formed by the conductive wires 42 connected to the side and surface portions of the carbon electrode layers 25a and 25b and the surface of the metal 44 outside the sidewall portions.

  As described above, by connecting the surface of the metal 44 outside the side wall portion and the electrical connection portion, the electrical connection portion can be protected, and the conductive wire 42 and the carbon electrode layers 25a and 25b can be protected. Electrical connection can be established and the electrical connection can be protected.

  The conductive wire 42 is electrically connected to the sidewalls of the carbon electrode layers 25a and 25b and the surface of the metal 44 outside the sidewall portions by a conductive adhesive 43. The conductive wire 42 is connected to the carbon electrode layers 25a and 25b. The carbon electrode layers 25a and 25b are electrically connected to each other by being pressed into contact with the surface of the ion conductive polymer layer 15.

  Similarly to the polymer actuator shown in FIG. 1A, the polymer actuator shown in FIG. 2F is covered and covered with the entire ion conductive polymer layer 15 and the carbon electrode layers 25a and 25b. The conductive wire 42 is taken out from the sealed inside to the outside from the substantially central portion of the ion conductive polymer layer 15 in the thickness direction, substantially parallel to the layer, and is compact. Has a simple shape.

  The shape of the conductive wire 42 arranged in pressure contact between the surface portions of the carbon electrode layers 25a and 25b and the ion conductive polymer layer 15 described in FIGS. 1 and 2 may be any shape. For example, the polymer actuator may be arranged in a straight line substantially parallel or substantially at right angles to the longitudinal direction, or may be arranged in an arbitrary curved shape such as a spiral shape.

  In the present embodiment, the thickness of the metal layer 44 is not particularly limited. However, the thickness of the metal layer 44 is a continuous film so that the potential by the conductive wire 42 is evenly applied to the carbon electrode layers 25a and 25b. It is preferable. The metal layers 44 and 46 can be formed by a conventionally known film forming method such as a wet plating method, a vapor deposition method, or a sputtering method.

  In the configuration described above, the conductive wire 42 having the polymer coating 49 is used. However, the conductive wire 42 not having the polymer coating 49 can also be used. After the conductive wire 42 is connected to the carbon electrode layers 25a and 25b, an electrically insulating thermoplastic material between the pair of conductive wires 42 and between the pair of conductive wires 42 and the ion conductive polymer layer 15. The pair of conductive wires 42 can be taken out of the polymer film 30 electrically independently by sandwiching the films and thermocompression bonding the polymer films 30 together.

  With the configuration described above, the polymer actuator can operate stably, and excellent deformation performance can be obtained with high reliability.

  In the above description, Nafion (model number N-117) having a thickness of 183 μm is used as the ion conductive polymer layer 15, and a polyethylene film having a thickness of 50 μm is used as the polymer film 30, respectively. Although the configuration example in which the thickness is 60 μm has been described, the area of the ion conductive polymer layer 15 and the carbon electrode layers 25a and 25b is 10 mm × 50 mm. Needless to say, the material, composition, size, thickness, and the like can be arbitrarily changed according to the purpose.

  FIG. 4 is a cross-sectional view illustrating an example of the shape of the polymer actuator in the embodiment of the present invention.

  In FIG. 1 to FIG. 3, as shown in FIG. 4A, the ion conductive polymer layer 15 has a flat plate (strip shape), and the cross section perpendicular to the longitudinal direction of the polymer actuator is a thin rectangle (strip). As shown in FIG. 4B, the ion conductive polymer layer 15 has a prismatic shape, and the cross section perpendicular to the longitudinal direction of the polymer actuator is rectangular or square. A molecular actuator can also be manufactured, and carbon electrode layers 25a and 25b and carbon electrode layers 25c and 25d are formed on opposite sides of the ion conductive polymer layer 15, respectively. These electrode layers are not limited to carbon electrode layers, and may be formed by a known method.

  In addition, as shown in FIG. 4C, it is possible to manufacture a polymer actuator in which the ion conductive polymer layer 15 has a cylindrical shape and the cross section perpendicular to the longitudinal direction of the polymer actuator is circular. Carbon electrode layers 25a and 25b and carbon electrode layers 25c and 25d are formed on opposite side surfaces of the conductive polymer layer 15, respectively.

  The polymer actuator shown in FIG. 4A can be deformed in one direction to generate a driving force, but the polymer actuator shown in FIG. 4B and FIG. It can be deformed in the direction to generate a driving force. The driving force in each direction can be generated simultaneously, or the driving force in each direction can be generated at different timings. Therefore, driving in two directions can be executed simultaneously or at different timings. Furthermore, driving in a three-dimensional direction can be made possible by combining this two-direction driving system with a driving system in a direction perpendicular to the two directions.

Ductility of the polymer actuator, for example, the amount of deformation, the BET specific surface area of the carbon powder, for example, 10m ² / g~800m ² / g and changing, solid weight ratio of the carbon powder and an ion conductive resin ( The C / B ratio can be changed to, for example, 0.2 to 2, and the thickness of the carbon electrode layer can be changed to, for example, 10 μm to 200 μm, so that various values can be obtained.

  In the above description of the embodiment, the actuator body has been described by taking, as an example, an ion conductive polymer in which ions move and deform when voltage is applied. However, the present invention is not limited to this. For example, PVDF (polyfluoride) Polymer films such as vinylidene) and piezoelectric ceramics such as PZT (lead zirconate titanate) can also be used. Bimorph type piezoelectric actuators can also be used, and an actuator that causes bending deformation can be configured.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to the above-mentioned embodiment, Various deformation | transformation based on the technical idea of this invention is possible. For example, the material, thickness, size, etc. of each part constituting the polymer actuator should be set arbitrarily and appropriately as necessary so as to meet the performance of the polymer actuator so that it matches the intended use. Can do.

  As described above, according to the present invention, it is possible to provide a compact, lightweight, and flexible actuator that can be suitably used in the fields of medical equipment, industrial robots, micromachines, and the like.

It is sectional drawing explaining the structure and manufacturing method of a polymer actuator in embodiment of this invention. It is sectional drawing explaining the deformation | transformation of the manufacturing method of a polymer actuator same as the above. It is the schematic explaining operation | movement of a polymer actuator same as the above. It is sectional drawing explaining the example of a shape of a polymer actuator same as the above. It is a general | schematic sectional drawing of the voltage non-application state of an actuator element in a prior art, and a voltage application state. It is a longitudinal cross-sectional view which shows the structural example of an actuator element same as the above.

Explanation of symbols

15 ... ion conductive polymer layer, 30 ... polymer film, 42 ... conductive wire,
25, 25a, 25b, 25c, 25d ... carbon electrode layer, 43 ... conductive adhesive,
40a ... polymer actuator before deformation, 44, 46 ... metal layer,
40b: polymer actuator after deformation, 48 ... polymer layer, 49 ... polymer coating

Claims (20)

An actuator body containing ions, and an opposite facing formed outer table surface electrodes of the actuator body, by applying a voltage between the opposed electrodes, the actuator causing deformation to the actuator body,
It has a polymer layer covering to wrap the whole including the actuator body and the counter electrode, at least the connection sites respectively and the counter electrode conductor for applying the voltage, between the actuator body and the counter electrode To the side wall surface of the counter electrode or between the counter electrode and the metal layer on the counter electrode to the side wall surface of the counter electrode so as to be electrically connected to the counter electrode ,
Said conductor, said further from the connecting portion between the counter electrode are respectively extended to a position where a phase approaching on the side wall surface of the actuator body further extending from these extended position to the side of the actuator body ,
Wherein said connecting portion of the counter electrode, before SL side wall on the actuator body from the connection sites thereof, and further has a respective extended portion which is the extended of the conductor to its side, the high molecular Actuator characterized in that it is covered by a layer . The actuator according to claim 1, wherein the connection portion of the conductor and the polymer layer covering the conductor are connected and fixed by an adhesive on the side wall surface of the counter electrode. The connection portion of the conductor is formed of a folded portion of the conductive line on the side wall surface of the counter electrode and a bent portion of the conductive line on the counter surface of the counter electrode or on the outer surface thereof. 2. The actuator according to claim 1, wherein the actuator wire is formed by bending the conductive wire from the side wall surface of the counter electrode to the outer surface of the counter electrode.   The actuator according to claim 1, wherein the conductive wire as the conductor is taken out of the polymer film as the polymer layer in a direction parallel to the actuator body from the connection site.   The actuator according to claim 1, wherein the actuator body is constituted by an ion conductive polymer layer. The actuator according to claim 5 , wherein the counter electrode is formed of carbon powder and an ion conductive resin. The specific surface area of the carbon powder, solid weight ratio of the carbon powder and the ion conductive resin, by at least one of the thickness of the counter electrode, deformation performance of the actuator is adjusted, according to claim 6 Actuator. The actuator according to claim 5 , wherein the counter electrode is thermocompression bonded to the ion conductive polymer layer. The polymer film as the polymer layer Ri der mp 0.99 ° C. or less, it blocks the permeation of moisture actuator according to claim 1.   The actuator according to claim 1, wherein a second metal layer is provided inside a polymer film as the polymer layer.   The actuator according to claim 1, wherein a second metal layer is provided on an outer surface of a polymer film as the polymer layer. The actuator according to claim 11 , wherein a second polymer film as the polymer layer is provided on an outer surface of the second metal layer. A first step of forming an electrode layer on the surface of the polymer layer;
Toward the side wall surface between or al the counter electrode of each said electrode layer of the outer table surface opposite of the actuator body including the ionic, or during or al the counter electrode between the metal layer and the electrode layer on the electrode layer At least a connection portion of the conductor for applying a voltage to the electrode layer is disposed over the side wall surface of the actuator , and the conductor extends from the connection portion to the side wall surface of the actuator body and further to the side thereof. A second step of:
Each of the outer table surface of the actuator body, and a third step of heat pressing the electrode layer using the polymer layer as the outer,
Wherein the collision portion between the polymer layer projecting from the respective sides of the outer table surface of the actuator body, while sandwiched the extended portion of the conductor towards the side of the actuator body, the heating pressure And a fourth step of sealing the whole body including the actuator body and the electrode layer inside the polymer layer. Said connecting portion is held between the electrode layer and the actuator body in the second step prior to the third step, walk, the said connecting portion and the metal layer in the first step The method of manufacturing an actuator according to claim 13 , wherein the second step of holding between the electrode layers is performed. The actuator manufacturing according to claim 13, wherein in the second step, the connection portion of the conductor and the polymer layer covering the conductor are connected and fixed on the side wall surface of the counter electrode by an adhesive. Method. In the second step, the connection portion of the conductor is formed by folding the conductive line on the side wall surface of the counter electrode and the surface of the counter electrode facing the outer surface or the outer surface thereof. The method of manufacturing an actuator according to claim 13, wherein the actuator wire is formed by bending the conductive line from the side wall surface of the counter electrode to the outer surface of the counter electrode. The actuator according to claim 13 , wherein in the fourth step, a conductive wire as the conductor for applying a voltage to the electrode layer is taken out of the polymer film as the polymer layer in a direction parallel to the actuator body. Manufacturing method. In the first step, a mixture of carbon powder and an ion conductive resin is applied on a polymer film as the polymer layer and dried to form the electrode layer as a carbon electrode layer , or the first step Prior to the step, the metal layer is formed on the surface of the polymer film as the polymer layer to which the mixture is applied, the mixture is applied to the surface of the metal layer and dried, and the electrode layer is carbonized. The method of manufacturing an actuator according to claim 13 , wherein the actuator is formed as an electrode layer . The manufacturing method of the actuator of Claim 13 which has a 5th process of providing a 2nd metal layer in the outer surface of the polymer film as said polymer layer.   The method of manufacturing an actuator according to claim 19, further comprising a sixth step of providing a second polymer film as the polymer layer on an outer surface of the second metal layer.

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