JP4224495B2 - Method for producing flexible composite cable for vacuum resistance and flexible composite cable for vacuum resistance - Google Patents

Description

  The present invention is suitable for use in a case where a plurality of circuit wirings are required under a high vacuum environment, for example, when a CCD provided in a housing placed in a vacuum environment and operating in an atmospheric environment is connected in the vacuum environment. The present invention relates to a method for manufacturing a flexible composite cable for vacuum resistance and a flexible composite cable for vacuum resistance.

  For cables used in a vacuum atmosphere, it is required to suppress as much as possible the residual gas that is generated due to the covering material and structure of the cable.

Conventionally, when a plurality of circuit wirings are required in a high vacuum environment, for example, a cable having a structure in which a silver plated copper wire is passed through a kabuton tube (kabuton is a registered trademark) has been separately prepared for each wiring. . However, this type of vacuum-resistant cable has a problem in terms of economy, and has a problem that the length of the cable is prescribed and flexibility is difficult, so that the versatility is poor. Furthermore, in electronic equipment that handles high-frequency signals placed in a vacuum environment, for example, a vacuum-proof camera equipment that connects a CCD operating in an atmospheric environment and connected in a circuit in the vacuum environment. In addition, there is a problem in electrical characteristics that the frequency characteristics (characteristic impedance) on the transmission path of the high-frequency signal and output video signal for driving the CCD cannot be managed accurately.
JP 2004-63371 A

  As described above, the conventional vacuum resistant cable has a problem in terms of economy, and has a problem that the cable length is specified and flexibility is difficult, so that the versatility is poor. Furthermore, there has been a problem in electrical characteristics when applied to electronic devices such as a vacuum-resistant camera that handles high-frequency signals placed in a vacuum environment.

  The present invention has been made in view of the above circumstances, and is capable of easily transmitting a plurality of types of signals including high-frequency signals in a high vacuum environment, is economically advantageous, and is versatile enough to be processed to an arbitrary length. It is an object of the present invention to provide a method for producing a vacuum-resistant flexible composite cable and a vacuum-resistant flexible composite cable.

The present invention relates to a method for manufacturing a flexible composite cable used in a high vacuum environment, in which a braided shield is used as an outer skin, and a coaxial core wire using fluorine resin as a central conductor insulation material, and fluorine resin as a conductor insulation. after passing through the braided tube by twisting and other core wire was wood and shells, said braided tube untwisted and the other core wire and the coaxial core wire, and characterized by applying baking treatment.

Further, the flexible composite cable for vacuum resistance of the present invention includes a coaxial core wire having a braided shield as an outer skin and a fluorine-based resin as an insulating material for a central conductor, and other materials having a fluorine-based resin as an insulating material and a skin for a conductor. After the core wire is twisted and passed through the braided tube, the coaxial core wire and the other core wire are twisted back in the braided tube, and a baking process is performed .

In addition, the present invention provides a vacuum-resistant and flexible vacuum placed in the high-vacuum environment for connecting a vacuum- proof camera placed in a high-vacuum environment and a circuit of a device provided on the atmosphere side. a FLEXIBLE composite cable, the braided shield tube, the loosely inserted into the shield braid tube, and a central conductor of the twisted wire, a fluorine-based resin as a dielectric material of the center conductor, a braided shield of a plurality of that outer skin coaxial core wire, said shield braid tube loosely inserted, a stranded wire as a conductor, characterized in that the fluorine-based resin was provided and another core wire of a plurality of which an insulating material of the conductor.

Further, the present invention includes a camera body and a CCD which is provided within a housing placed in a high vacuum environment, was placed under the high vacuum environment for connecting the circuit device provided on the atmosphere side flexible A flexible composite cable for vacuum resistance, which is used for high-frequency signal transmission of the CCD, and is used for coaxial signal with a fluororesin as an insulating material and a braided shield as an outer shell, and other signal transmission of the CCD A plurality of signal wires having a fluororesin outer skin are loosely inserted into a shield braided tube and subjected to a vacuum baking process.

  It is possible to provide a flexible composite cable for vacuum resistance that can easily process a plurality of types of signals including high-frequency signals in a high vacuum environment, is economically advantageous, and can be processed to an arbitrary length. .

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 shows the overall configuration of a camera apparatus using a vacuum-resistant flexible composite cable according to an embodiment of the present invention.
The vacuum-resistant camera 10 according to the embodiment of the present invention includes a vacuum-resistant flexible composite cable 20 in a vacuum chamber (for example, a vacuum chamber) 1 in a high vacuum environment of about 10 ⁻⁶ [Pa]. By using this, it is possible to observe (monitor) the object to be inspected (subject) 2 by arbitrary position and posture control in the vacuum chamber 1. A vacuum-resistant multipolar through connector is used as a connection interface between the vacuum-resistant camera 10 and the vacuum-resistant flexible composite cable 20.

The vacuum-resistant camera 10 using the vacuum-resistant flexible cable 20 can freely position the object to be inspected (object) 2 in the vacuum chamber 1 and adjust the alignment in the vicinity of the object to be inspected. This makes it possible to realize a TV camera for observation that allows easy positioning and angle setting. In addition, while realizing the same electrical characteristics as a general-purpose camera, a vacuum-proof camera with a camera cable that emits almost no gas into the vacuum environment even in a high vacuum environment of about 10 ⁻⁶ [Pa] is realized. is doing. In order to realize this vacuum-resistant camera, the vacuum-resistant camera 10 and the vacuum-resistant flexible composite cable 20 operate stably even when exposed to a high vacuum with a degree of vacuum of 10 ⁻⁶ [Pa]. In addition, the structure and the material configuration are such that the emission of impurities (unnecessary gas emission) into the vacuum space is minimized.

  The vacuum chamber 1 is provided with a sealed flange 40 having a through connector 30 having a connection interface for the vacuum-resistant flexible composite cable 20. The vacuum-resistant camera 10 placed in the vacuum chamber 1 is provided outside (atmosphere side) of the vacuum chamber 1 via a vacuum-resistant flexible composite cable 20 and a through connector 30 provided on the flange 40. The controller 50 is connected to the circuit. The flange 40 has a shape and strength conforming to the standard and dimensions of the vacuum chamber 1. The through connector 30 has a highly airtight structure. The controller 50 sends a drive signal to the image sensor provided in the vacuum resistant camera 10 and outputs a video signal according to the output signal of the image sensor to the outside.

  A vacuum-resistant camera 10 provided in the vacuum chamber 1 includes a camera housing that houses an imaging device, a lens mount that mounts a lens that forms an image on the imaging device, and a vacuum-proof multipolar penetration that connects the imaging device to a circuit. A connector and a jacket covering the connector, and the camera housing is hermetically sealed with a lens mount and a connector jacket as partition walls. As a result, the image pickup device accommodated in the camera housing is placed in the atmosphere on the atmosphere side in the vacuum region.

  The outer casing exposed to the vacuum of the vacuum resistant camera 10 is configured using a metal material that emits very little gas in the vacuum. Here, the camera casing, the lens mount, and the jacket constituting the outer casing of the vacuum resistant camera 10 are all made of stainless steel. The specific structure of the vacuum resistant camera 10 will be described later with reference to FIGS.

  The vacuum-resistant flexible composite cable 20 provided in the vacuum chamber 1 is a signal cable connected to the vacuum-resistant multipolar through connector (see reference numeral 14 in FIGS. 7 to 11) according to the embodiment of the present invention. It uses a material and structure that minimizes the emission of impurities in a vacuum, and uses a multi-core cable structure that includes a constant impedance signal line (coaxial core line). It enables ideal transmission of drive signals.

  2 and 3 show the cross-sectional structure of the vacuum-resistant flexible composite cable 20, and FIG. 8 shows the same cable provided with a cable connector.

  The vacuum-resistant flexible composite cable 20 is manufactured in consideration of the wire and the manufacturing method so as not to cause air accumulation between the wires and the core wire in a vacuum and to prevent unnecessary gas from being released. As shown in FIG. 3, the coaxial cores 21, 21,. Are twisted together and passed through the braided tube 23, and then the twists of the coaxial core wires 21, 21,... And the other core wires 22, 22,. Manufactured by making the gap between the core wires dense and baking.

  Each of the core wires 21 and 22 has a flexible cable structure using a stranded wire for the internal conductors 21a and 22a so as to maintain flexibility and withstand long-term use. It has almost the same flexibility as a flexible cable.

  Also, fluorine resin is used for the insulating materials 21b and 22b of the core wires 21 and 22, and the conductors 21a and 22a, the braided shield 21c, and the braided tube 23 of the core wires 21 and 22 are silver plated wires. The material composition does not release gas. In the baking process, vacuum baking is performed at about 200 ° C. for 10 to several tens hours to remove unnecessary gas components in the resin.

The vacuum-resistant flexible composite cable 20 manufactured in this way is a resin-insulated cable, and the cable itself bends very softly, so that it is similar to a general camera cable used in the atmosphere. Flexibility can be realized, and the camera can be moved and handled freely in the vacuum chamber 1 according to the subject. Further, by converging the core wires 21 and 22 by the braided tube 23, the electromagnetic shielding effect is improved. With such a cable structure, an economically advantageous configuration and electrical characteristics are equivalent to those of a general-purpose camera cable, but gas emission to the vacuum environment is almost zero even at 10 ⁻⁶ [Pa]. The vacuum resistant flexible camera cable can be realized.

  As shown in FIGS. 4 and 8, one end of the vacuum resistant flexible composite cable 20 is provided with a vacuum resistant multipolar through connector (FIGS. 7 to 7) provided in the housing of the vacuum resistant camera 10. 11 is provided with a cable connector 28 that is coupled to the through connector 30 of the flange 40 at the other end.

  The assembled structure of each part of the vacuum resistant camera 10 provided in the vacuum chamber 1 together with the above-described vacuum resistant flexible composite cable 20 is shown in FIGS. The external appearance structure of the vacuum resistant camera 10 is shown in FIG. 4, the assembly structure of the camera head portion of the vacuum resistant camera 10 is shown in FIGS. 5 and 6, and a vacuum resistant multipolar through connector and a jacket portion covering this connector 7 and 8 show the vacuum-resistant flexible composite cable 20 provided with the cable connector 28 into which the connector is fitted, and FIG. 8 shows the assembly structure of the vacuum-proof multipolar through connector. It is shown in FIGS.

  As shown in FIGS. 4 to 8, the vacuum-resistant camera 10 provided in the vacuum chamber 1 includes a camera housing 12 that houses a camera body 11 that is configured by an image sensor (CCD in this embodiment), and an image sensor. A lens mount 13 for mounting a lens for imaging, a vacuum-proof multipolar through connector 14 for connecting an image pickup device in a circuit, and a connector jacket (connector case) 15 for covering the through connector 14.

  Further, as shown in FIG. 4, a clamp fitting 18 for attaching the vacuum-resistant camera 10 to a camera moving mechanism (manipulator) (not shown) is attached to the outer peripheral portion of the camera housing 12. FIG. 4 illustrates a state where the cable connector 28 provided at one end of the vacuum resistant flexible composite cable 20 is fitted to the vacuum resistant multipolar through connector 14 provided in the connector jacket 15. Yes.

  The metal parts exposed to the vacuum region, such as the camera housing 12, the lens mount 13, and the connector jacket 15, the clamp metal fitting 18, and the outer housing of the cable connector 28 that constitute the outer casing of the vacuum-resistant camera 10, Each is made of stainless steel. Although the lens and the lens case attached to the lens mount 13 are not shown in the figure, the lens case attached to the lens mount 13 is also made of stainless steel.

  As shown in FIGS. 5 and 6, an O-ring 133 for maintaining confidentiality, a windshield 134, and a slip plate 135 are arranged on the imaging surface portion 13b of the lens mount 13, and the glass presser 132 is screwed to the imaging surface portion 13b. Thus, the windshield 134 is attached to the lens mount 13. Further, as shown in FIG. 6, a mount adapter 136 for mounting a lens case (not shown) is screwed onto the imaging surface portion 13b of the lens mount 13 and fixed with a tightening screw. 136 is attached. FIG. 6B shows an attachment state when the lens mount 13 is viewed from the imaging surface side.

  As shown in FIGS. 5 and 6, the camera body 11 is inserted into the camera mounting portion 13 a of the lens mount 13, the camera holder 131 is screwed into the lens mount 13, and the camera body is attached to the camera mounting portion 13 a of the lens mount 13. 7, as shown in FIG. 7, one end of the cylindrical camera housing 12 is screwed to the housing joint portion 13 c of the lens mount 13 with an O-ring 137 for maintaining confidentiality interposed therebetween. By attaching the camera housing 12 around the main body 11, the camera head portion of the vacuum resistant camera 10 is configured. Further, as shown in FIGS. 7 and 8, a connector jacket 15 provided with a vacuum-resistant multi-pole through connector 14 is screwed to the other end of the camera housing 12 with an O-ring 151 for maintaining confidentiality interposed therebetween. Then, by attaching the connector jacket 15 to the camera housing 12, the vacuum resistant camera 10 in which the camera housing 12 is sealed is configured. Reference numeral 19 shown in FIG. 7 is an internal wiring that connects the camera body 11 and the vacuum-proof multipolar through connector 14 in the vacuum-proof camera 10.

  As shown in FIGS. 9 to 11, the vacuum-resistant multipolar through connector 14 provided in the connector jacket 15 includes a pair of insulators 141, 142 having a plurality of holes a, and holes a of the insulators 141, 142. ,... And a plurality of pin contacts 143,... And an adhesive 145 filled between the insulators 141 and 142. The insulators 141 and 142 are formed of a polyether ether ketone (PEEK) resin. The pin contacts 143,... Are plated with gold or electroless nickel that does not contain Sn and Zn components. As the adhesive 145, a two-component mixed epoxy adhesive is used. The insulator 141 is formed with a recessed portion A on the surface side to be joined with the insulator 142, and a plurality of holes a for attaching pin contacts are provided at the bottom of the recessed portion A. The recessed portion A is formed with a high flange portion B and a low flange portion C, and the flange portion C serves as a relief groove for an excess amount of the adhesive 145 applied to the recessed portion A.

  The vacuum-resistant multi-pole through connector 14 is formed by applying an epoxy adhesive 145 to one insulator 141 on the camera body side, out of a pair of insulators 141 and 142 having holes through which a plurality of pin contacts pass. Are inserted into the holes a of the insulator 141, and the pin contacts 143 are inserted into the holes a of the insulator 141 into the holes a of the other insulator 142. By inserting the epoxy adhesive 145 between the pair of insulators 141, 142 and between the pin contacts 143,... Manufactured. In the step of curing the adhesive 145, in consideration of the adaptability of the subsequent connector connection, as shown in FIG. 11, it is temporarily attached to the cable connector 28 to be connected to the vacuum resistant flexible composite cable 20 later. And cured.

  An epoxy adhesive is applied to the insulator peripheral portion of the vacuum-resistant multipolar through connector 14, and the vacuum resistant multipolar through connector 14 is connected to the connector mounting portion 15a of the connector jacket 15 as shown in FIGS. And the connector holder 153 is screwed into the connector mounting portion 15a, so that the gap between the vacuum-resistant multipolar through connector 14 and the connector mounting portion 15a is filled with an epoxy adhesive. The multipolar through connector 14 is attached to the connector jacket 15.

  As a result, a connector jacket 15 is formed in which the vacuum side and the atmosphere side are separated by the vacuum-resistant multipolar through connector 14. The above-described structure of the vacuum-resistant multipolar through connector 14 can be applied not only to the through connector of the vacuum resistant camera 10 but also to the through connector 30 provided on the flange 40 having a sealed structure, for example.

  By applying the vacuum-resistant flexible composite cable 20 according to the above-described embodiment of the present invention to the vacuum-resistant camera 10, the object to be inspected, such as positioning and alignment adjustment of the object to be inspected (subject) in the vacuum region It is possible to realize a television camera for monitoring / observation having an economically advantageous configuration that enables free positioning and angle setting in the vicinity. The vacuum-resistant camera 10 using the vacuum-resistant flexible composite cable 20 can be applied to various industrial vacuum apparatuses such as a vacuum film forming apparatus (deposition deposition, sputtering, etc.) and other vacuum equipment.

  Further, illumination wiring is provided on the vacuum-resistant flexible composite cable 20, pin contacts of the illumination wiring are provided on the vacuum-resistant multipolar through connector 14, and LEDs are provided on the lens mount 13, thereby providing illumination. A vacuum-proof camera having a function can be provided.

The block diagram which shows the structure of the camera for vacuum-proof using the flexible composite cable for vacuum-proof concerning embodiment of this invention. The figure which shows the cross-section of the flexible composite cable for a vacuum resistance which concerns on the said embodiment. The figure which shows the cross-section of the coaxial core wire contained in the flexible composite cable for vacuum resistance shown in the said FIG. The figure which shows the external appearance structure of the vacuum-proof camera using the flexible composite cable for vacuum-proof concerning the said embodiment. The figure which shows the assembly structure of the vacuum resistant camera using the flexible composite cable for vacuum resistant which concerns on the said embodiment. The figure which shows the assembly structure of the vacuum resistant camera using the flexible composite cable for vacuum resistant which concerns on the said embodiment. The figure which shows the assembly structure of the vacuum resistant camera using the flexible composite cable for vacuum resistant which concerns on the said embodiment. The figure which shows the assembly structure of the cable connector provided in the cable end and the flexible composite cable for vacuum resistances concerning the said embodiment. The figure which shows the connector assembly structure of the vacuum-proof camera using the flexible composite cable for vacuum-proof concerning the said embodiment. The figure which shows the connector assembly structure of the vacuum-proof camera using the flexible composite cable for vacuum-proof concerning the said embodiment. The figure which shows the connector assembly structure of the vacuum-proof camera using the flexible composite cable for vacuum-proof concerning the said embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Vacuum chamber (for example, vacuum chamber), 2 ... Test object (subject), 10 ... Vacuum resistant camera, 11 ... Camera body (CCD unit), 12 ... Camera housing, 13 ... Lens mount, 14 ... Vacuum resistant Multi-pole through connector, 15 ... Connector jacket (connector case), 18 ... Clamp fitting, 20 ... Flexible composite cable for vacuum resistance, 21 ... Coaxial core wire, 21a ... Center conductor, 21b ... Insulating material, 21c ... Braided shield 22 ... Other core wires, 22a ... Conductor, 22b ... Insulating material, 23 ... Braided pipe, 28 ... Cable connector, 30 ... Through connector, 40 ... Flange, 50 ... Controller.

Claims (7)

A method of manufacturing a flexible composite cable used in a high vacuum environment,
The braided shield is used as the outer sheath, and the coaxial core wire made of fluororesin as the central conductor insulating material and the other core wire made of fluororesin made of the conductor insulating material and outer skin are twisted and passed through the braided pipe, and then the braided back twist and the other core wire and the coaxial core wire within the tube, vacuum proof for flexible composite manufacturing method of the cable, characterized in that performing baking processing. The method for producing a flexible composite cable for vacuum resistance according to claim 1, wherein the coaxial core wire and the other core wire are flexible cables having a stranded wire as a conductor. The coaxial core wire and the other wire of the conductor, the braided shield, according to claim 1 or claim 2, wherein the vacuum-tight for flexible composite cable at least one of the braided tube, characterized in that the silver-plated wire Manufacturing method. The braided shield is used as the outer sheath, and the coaxial core wire using fluororesin as the central conductor insulating material and the other core wires made of fluororesin as the conductor insulating material and outer shell are twisted and passed through the braided pipe, and then the braided A flexible composite cable for vacuum resistance , wherein the coaxial core wire and the other core wire are twisted back in a tube and subjected to a baking treatment .   The flexible composite cable for vacuum resistance according to claim 4, wherein a plurality of the coaxial core wires and the other core wires are provided. There in vacuum proof for flexible composite cable having placed the high vacuum environment for connecting the circuit device provided in the vacuum-proof camera and the atmosphere-side placed under high vacuum environment flexible And
Shield braided tube,
It said shield braid tube loosely inserted, around the stranded conductor, and a fluorine-based resin and the insulating material of said central conductor, and a plurality of coaxial core wire in which the braided shield and the outer skin,
It said shield braid tube loosely inserted, twisted wire was used as a conductor, a fluorine-based vacuum-tight for flexible composite cable, characterized in that the resin comprises a further core of the plurality of which an insulating material of the conductor. A camera body and a CCD which is provided within a housing placed in a high vacuum environment, for vacuum-tight with a flexible placed the high vacuum environment for connecting the circuit device provided on the atmosphere side A flexible composite cable,
Shield the coaxial core wire with fluororesin as an insulating material and braided shield as the outer shell used for high-frequency signal transmission of the CCD, and a plurality of signal lines with fluororesin as the outer shell used for other signal transmission of the CCD A flexible composite cable for vacuum resistance characterized by being loosely inserted into a braided tube and subjected to a vacuum baking treatment.

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