JP4000571B2 - Liquid discharge head, liquid discharge apparatus, image forming apparatus, and method of manufacturing liquid discharge head - Google Patents

Description

The present invention relates to a liquid ejection head, a liquid ejection apparatus , an image forming apparatus , and a method for manufacturing a liquid ejection head, and more particularly, to a technology for forming a supply restrictor and a nozzle formed in the liquid ejection head.

  Some inkjet image forming apparatuses include a print head in which a large number of nozzles are arranged in a matrix, and eject ink droplets from each nozzle onto a recording medium to form an image on the recording medium. Some print heads are assembled by laminating a plurality of plate members and bonding them with an adhesive or the like. In such a print head, an ink supply port (ink flow path) is provided between a pressure chamber communicating with each nozzle and a common liquid chamber for storing ink and supplying ink to each pressure chamber. In addition, a supply restrictor having a fine hole diameter is provided in the ink supply port or a part thereof. The supply restrictor functions as a fluid resistance of the liquid flowing inside, reduces the backflow of ink from the pressure chamber to the common liquid chamber, and stabilizes ink discharge from the nozzle.

  In such an image forming apparatus, in recent years, further higher image quality is desired. In order to achieve high image quality, it is required that the nozzles provided in the print head are uniformly formed and have little variation. This is because if the nozzle diameters and nozzle positions are not uniform, the ink discharge amount and discharge speed of the nozzles vary, resulting in differences in the sizes and landing positions of dots formed on the recording medium, leading to a reduction in image quality. Therefore, conventionally, a technique for processing a nozzle with high accuracy has been disclosed (see, for example, Patent Document 1 to Patent Document 4).

  Patent Document 1 discloses a technique for forming a nozzle by irradiating a nozzle plate (nozzle plate) with a laser beam from both the ink inflow side and the ejection side.

  Patent Document 2 discloses a technique for forming a nozzle by assembling a print head and irradiating a nozzle forming position (nozzle surface) with a laser beam spreading from the outside of the nozzle surface.

  Patent Document 3 discloses a technique for simultaneously processing a plurality of inversely tapered nozzles by irradiating light through a telecentric optical system while assembling a print head and scanning a laser light source.

In Patent Document 4, after the print head is assembled, a plurality of masks and a telecentric optical system are arranged between the laser light source and the print head so that a mask image is formed with respect to the nozzle formation position (nozzle surface) of the print head. A technique for simultaneously processing a plurality of inversely tapered nozzles by irradiating a plurality of corresponding laser beams is disclosed.
JP-A-10-76666 JP-A-5-330064 Japanese Patent Laid-Open No. 10-291318 JP 2000-218802 A

However, Patent Documents 1 to 4 propose a technique for processing the nozzle with high accuracy, but do not consider the supply restriction. Even if the nozzle is processed with high accuracy, if the processing accuracy of the supply throttle communicating with the nozzle via the pressure chamber is low, the pressure loss of the supply throttle varies. As a result, the ratio (pressure loss ratio) between the flow loss of the supply throttle and the flow loss of the nozzle is not uniform, and the pressure loss balance is not stable among the pressure chambers. For this reason, the ink ejection force when ejecting ink droplets from the nozzles is not constant, causing a difference in the ink ejection amount and ejection speed, and a difference appears in the size and position of the dots formed on the recording medium. The image quality will be degraded.

  Further, since the supply throttle and the nozzle have a small hole diameter, if foreign matter or the like is mixed into the common liquid chamber, the supply throttle or the nozzle may be clogged, resulting in a discharge failure.

The present invention has been made in view of such circumstances, and a liquid discharge head and a liquid that are highly effective in preventing nozzle clogging in which the supply throttle communicating with each pressure chamber and the pressure loss balance of the nozzle are stable between the pressure chambers. An ejection device , an image forming apparatus , and a method for manufacturing a liquid ejection head are provided.

In order to achieve the above object, the invention according to claim 1 provides a plurality of discharge ports for discharging a liquid, a plurality of pressure chambers communicating with each of the plurality of discharge ports, and a supply to the plurality of pressure chambers. A common liquid chamber in which liquid to be stored is stored, and a supply throttle that forms at least a part of a supply flow path that communicates the common liquid chamber and the pressure chamber, and the minimum opening size of the discharge port is the supply throttle minimum opening dimension greater configured than the discharge port and the ratio of the flow path loss of the supply restrictors respectively corresponding to the plurality of pressure chambers are uniformly configured between the pressure chambers, wherein the common liquid chamber liquid A supply port to which a supply pipe member is connected is formed, and the supply port is provided with a filter member having a valve function that opens and closes according to the flow of liquid, from the pipe member side to the common liquid chamber side When liquid flows in the direction toward The supply port is closed by the filter member, and liquid is supplied to the common liquid chamber via the filter member, and when the liquid flows in a direction from the common liquid chamber side to the tube member side, the supply port At least a part of the liquid discharge head is opened, and the liquid is discharged from the common liquid chamber without using the filter member .

According to the present invention, the pressure loss balance is stabilized by uniformly configuring the ratio of the flow passage loss (pressure loss ratio) between the discharge port communicating with each pressure chamber and the supply throttle between the pressure chambers. As a result, variations in the discharge performance between the pressure chambers are reduced, the liquid discharge amount of each discharge port is stabilized, and high image quality can be realized. Further, even when foreign matter or the like smaller than the minimum opening size of the supply restrictor enters the pressure chamber through the supply restrictor, the foreign matter or the like can be reliably discharged from the discharge port. Furthermore, the filter member that can be opened and closed according to the flow of the liquid can prevent foreign matter and the like from entering the common liquid chamber and ensure that even if foreign matter and the like are mixed into the common liquid chamber. Foreign matter can be discharged.

According to a second aspect of the present invention, in the liquid discharge head according to the first aspect, the discharge port is formed in a tapered shape that becomes gradually narrower in the liquid discharge direction, and the supply throttle is the common liquid. It is characterized by having a tapered shape that becomes gradually narrower in the liquid supply direction corresponding to the direction from the chamber side toward the pressure chamber side .

A third aspect of the present invention is the liquid discharge head according to the first or second aspect, wherein at least a part of the discharge port and the supply throttle communicating with each of the pressure chambers have the same diffraction position. It is processed by the laser beam that has passed .

According to the aspect of the third aspect, it is possible to process a plurality of discharge ports and supply apertures at the same time even when there are variations in the laser beams constituting the laser beam train. Are processed by the same laser beam, even when there is variation between the discharge ports, the pressure loss ratio of the discharge port communicating with the pressure chamber and the supply throttle is uniform between the pressure chambers, and the pressure loss balance is stabilized. Accordingly, similarly to the first aspect, the liquid discharge amount of each discharge port is stable, and high image quality can be realized.

According to a fourth aspect of the present invention, there is provided the liquid discharge head according to any one of the first to third aspects, a pressure chamber deforming unit that deforms one wall surface of the pressure chamber, and the pressure chamber deforming unit. In contrast, there is provided a liquid ejection apparatus further comprising drive waveform applying means for applying a drive waveform different from that during liquid ejection.

According to the aspect of the fourth aspect, the backflow from the supply throttle can be increased by increasing the driving waveform, and foreign matter can be easily removed.

According to a fifth aspect of the present invention, there is provided the liquid discharge head according to any one of the first to third aspects of the present invention, and the liquid discharge head according to any one of the first aspect to the liquid discharge head according to the present invention. And a pressing means for applying pressure in a direction opposite to the flying direction of the liquid discharged from the discharge port. According to the present invention, even if a foreign substance or the like is clogged on the common liquid chamber side, the clogging of the supply throttle can be eliminated by applying pressure to the liquid in the discharge port by the pressing means.

According to the present invention, the pressure loss balance is stabilized by uniformly configuring the ratio of the flow passage loss ( pressure loss ratio ) between the discharge port communicating with each pressure chamber and the supply throttle between the pressure chambers. As a result, variations in the discharge performance between the pressure chambers are reduced, the liquid discharge amount of each discharge port is stabilized, and high image quality can be realized. Further, even when foreign matter or the like smaller than the minimum opening size of the supply restrictor enters the pressure chamber through the supply restrictor, the foreign matter or the like can be reliably discharged from the discharge port. Furthermore, the filter member that can be opened and closed according to the flow of the liquid can prevent foreign matter and the like from entering the common liquid chamber and ensure that even if foreign matter and the like are mixed into the common liquid chamber. Foreign matter can be discharged.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[Overall configuration of inkjet recording apparatus]
FIG. 1 is an overall configuration diagram showing an outline of an embodiment of an ink jet recording apparatus as an image forming apparatus according to the present invention. As shown in FIG. 1, the inkjet recording apparatus 10 includes a printing unit 12 having a plurality of printing heads 12K, 12C, 12M, and 12Y provided for each ink color, and each printing head 12K, 12C, 12M, and 12Y. An ink storage / loading unit 14 for storing ink to be supplied to the paper, a paper feeding unit 18 for supplying the recording paper 16, a decurling unit 20 for removing curling of the recording paper 16, and a nozzle surface of the printing unit 12 An adsorption belt conveyance unit 22 that is arranged opposite to the (ink ejection surface) and conveys the recording paper 16 while maintaining the flatness of the recording paper 16, a print detection unit 24 that reads a printing result by the printing unit 12, and a print And a paper discharge unit 26 for discharging the printed recording paper (printed matter) to the outside.

  In FIG. 1, a magazine for rolled paper (continuous paper) is shown as an example of the paper supply unit 18, but a plurality of magazines having different paper widths, paper quality, and the like may be provided side by side. Further, instead of the roll paper magazine or in combination therewith, the paper may be supplied by a cassette in which cut papers are stacked and loaded.

  In the case of an apparatus configuration using roll paper, a cutter 28 is provided as shown in FIG. 1, and the roll paper is cut into a desired size by the cutter 28. The cutter 28 includes a fixed blade 28A having a length equal to or greater than the conveyance path width of the recording paper 16, and a round blade 28B that moves along the fixed blade 28A. The fixed blade 28A is provided on the back side of the print. The round blade 28B is arranged on the print surface side with the conveyance path interposed therebetween. Note that the cutter 28 is not necessary when cut paper is used.

  When multiple types of recording paper are used, an information recording body such as a barcode or wireless tag that records paper type information is attached to the magazine, and the information on the information recording body is read by a predetermined reader. Therefore, it is preferable to automatically determine the type of paper to be used and perform ink ejection control so as to realize appropriate ink ejection according to the type of paper.

  The recording paper 16 delivered from the paper supply unit 18 retains curl due to having been loaded in the magazine. In order to remove this curl, heat is applied to the recording paper 16 by the heating drum 30 in the direction opposite to the curl direction of the magazine in the decurling unit 20. At this time, it is more preferable to control the heating temperature so that the printed surface is slightly curled outward.

  After the decurling process, the cut recording paper 16 is sent to the suction belt conveyance unit 22. The suction belt conveyance unit 22 has a structure in which an endless belt 33 is wound between rollers 31 and 32, and at least a portion facing the nozzle surface of the printing unit 12 and the sensor surface of the printing detection unit 24 is flat ( Flat surface).

  The belt 33 has a width that is wider than the width of the recording paper 16, and a plurality of suction holes (not shown) are formed on the belt surface. As shown in FIG. 1, an adsorption chamber 34 is provided at a position facing the nozzle surface of the print unit 12 and the sensor surface of the print detection unit 24 inside the belt 33 spanned between the rollers 31 and 32. Then, the suction chamber 34 is sucked by the fan 35 to make a negative pressure, whereby the recording paper 16 on the belt 33 is sucked and held.

  The power of a motor (not shown) is transmitted to at least one of the rollers 31 and 32 around which the belt 33 is wound, so that the belt 33 is driven in the clockwise direction in FIG. The recording paper 16 is conveyed from left to right in FIG.

  Since ink adheres to the belt 33 when a borderless print or the like is printed, the belt cleaning unit 36 is provided at a predetermined position outside the belt 33 (an appropriate position other than the print area). Although details of the configuration of the belt cleaning unit 36 are not shown, for example, there are a method of niping a brush roll, a water absorbing roll, etc., an air blowing method of spraying clean air, or a combination thereof. In the case where the cleaning roll is nipped, the cleaning effect is great if the belt linear velocity and the roller linear velocity are changed.

  Although a mode using a roller / nip transport mechanism instead of the suction belt transport unit 22 is also conceivable, when the print area is transported by a roller / nip, the roller comes into contact with the print surface of the paper immediately after printing, so that the image blurs. There is a problem that it is easy. Therefore, as in this example, suction belt conveyance that does not contact the image surface in the printing region is preferable.

  A heating fan 40 is provided on the upstream side of the printing unit 12 on the paper conveyance path formed by the suction belt conveyance unit 22. The heating fan 40 heats the recording paper 16 by blowing heated air onto the recording paper 16 before printing. Heating the recording paper 16 immediately before printing makes it easier for the ink to dry after landing.

  The printing unit 12 is a so-called full-line type head in which line-type heads having a length corresponding to the maximum paper width are arranged in a direction (main scanning direction) orthogonal to the paper transport direction (sub-scanning direction) ( (See FIG. 2).

  As shown in FIG. 2, the print heads 12K, 12C, 12M, and 12Y constituting the printing unit 12 discharge ink over a length that exceeds at least one side of the maximum-size recording paper 16 targeted by the inkjet recording apparatus 10. It is composed of a line type head in which a plurality of outlets (nozzles) are arranged.

Printing corresponding to each color ink in the order of black (K), cyan (C), magenta (M), and yellow (Y) from the upstream side (left side in FIG. 1) along the conveyance direction (paper conveyance direction) of the recording paper 16 Heads 12K, 12C, 12M, and 12Y are arranged. The recording paper 16 is ejected from each of the print heads 12K, 12C, 12M, and 12Y while the recording paper 16 is conveyed.
A color image can be formed on top.

  Thus, according to the printing unit 12 in which the full line head that covers the entire width of the paper is provided for each ink color, the recording paper 16 and the printing unit 12 are relatively moved in the paper transport direction (sub-scanning direction). It is possible to record an image on the entire surface of the recording paper 16 by performing this operation only once (that is, by one sub-scan). Accordingly, high-speed printing is possible as compared with a shuttle type head in which the print head reciprocates in a direction (main scanning direction) orthogonal to the paper transport direction, and productivity can be improved.

  In this example, the configuration of KCMY standard colors (four colors) is illustrated, but the combination of ink colors and the number of colors is not limited to this embodiment, and light ink and dark ink are added as necessary. May be. For example, it is possible to add a print head that discharges light ink such as light cyan and light magenta.

  As shown in FIG. 1, the ink storage / loading unit 14 has tanks that store inks of colors corresponding to the print heads 12K, 12C, 12M, and 12Y, and each tank has a pipeline that is not shown. The print heads 12K, 12C, 12M, and 12Y communicate with each other. Further, the ink storage / loading unit 14 includes notifying means (display means, warning sound generating means, etc.) for notifying when the ink remaining amount is low, and has a mechanism for preventing erroneous loading between colors. is doing.

  The print detection unit 24 includes an image sensor (line sensor or the like) for imaging the droplet ejection result of the print unit 12, and means for checking nozzle clogging and other ejection defects from the droplet ejection image read by the image sensor. Function as.

  The print detection unit 24 of this example is composed of a line sensor having a light receiving element array that is wider than at least the ink ejection width (image recording width) by the print heads 12K, 12C, 12M, and 12Y. The line sensor includes an R sensor row in which photoelectric conversion elements (pixels) provided with red (R) color filters are arranged in a line, a G sensor row provided with green (G) color filters, The color separation line CCD sensor includes a B sensor array provided with a blue (B) color filter. Instead of the line sensor, an area sensor in which the light receiving elements are two-dimensionally arranged can be used.

  The print detection unit 24 reads the test patterns printed by the print heads 12K, 12C, 12M, and 12Y for each color, and detects the ejection of each head. The ejection determination includes the presence / absence of ejection, measurement of dot size, measurement of dot landing position, and the like.

  A post-drying unit 42 is provided following the print detection unit 24. The post-drying unit 42 is means for drying the printed image surface, and for example, a heating fan is used. Since it is preferable to avoid contact with the printing surface until the ink after printing is dried, a method of blowing hot air is preferred.

  When printing on porous paper with dye-based ink, the weather resistance of the image is improved by preventing contact with ozone or other things that cause dye molecules to break by blocking the paper holes by pressurization. There is an effect to.

  A heating / pressurizing unit 44 is provided following the post-drying unit 42. The heating / pressurizing unit 44 is a means for controlling the glossiness of the image surface, and pressurizes with a pressure roller 45 having a predetermined uneven surface shape while heating the image surface to transfer the uneven shape to the image surface. To do.

  The printed matter generated in this manner is outputted from the paper output unit 26. It is preferable that the original image to be printed (printed target image) and the test print are discharged separately. The ink jet recording apparatus 10 is provided with sorting means (not shown) for switching the paper discharge path in order to select the print product of the main image and the print product of the test print and send them to the discharge units 26A and 26B. ing. Note that when the main image and the test print are simultaneously formed in parallel on a large sheet, the test print portion is separated by a cutter (second cutter) 48. The cutter 48 is provided immediately before the paper discharge unit 26, and cuts the main image and the test print unit when the test print is performed on the image margin. The structure of the cutter 48 is the same as that of the first cutter 28 described above, and includes a fixed blade 48A and a round blade 48B.

  Although not shown, the paper output unit 26A for the target prints is provided with a sorter for collecting prints according to print orders.

[Explanation of control system]
FIG. 3 is a principal block diagram showing the system configuration of the inkjet recording apparatus 10. The inkjet recording apparatus 10 includes a communication interface 70, a system controller 72, an image memory 74, a motor driver 76, a heater driver 78, a print control unit 80, an image buffer memory 82, a head driver 84, and the like.

The communication interface 70 is an interface unit that receives image data sent from the host computer 86. A serial interface such as USB (Universal Serial Bus) , IEEE 1394, Ethernet (registered trademark) , a wireless network, or a parallel interface such as Centronics can be applied to the communication interface 70. In this part, a buffer memory (not shown) for speeding up communication may be mounted. Image data sent from the host computer 86 is taken into the inkjet recording apparatus 10 via the communication interface 70 and temporarily stored in the image memory 74. The image memory 74 is a storage unit that temporarily stores an image input via the communication interface 70, and data is read and written through the system controller 72. The image memory 74 is not limited to a memory composed of semiconductor elements, and a magnetic medium such as a hard disk may be used.

  The system controller 72 is a control unit that controls each unit such as the communication interface 70, the image memory 74, the motor driver 76, and the heater driver 78. The system controller 72 includes a central processing unit (CPU) and its peripheral circuits, and performs communication control with the host computer 86, read / write control of the image memory 74, and the like, as well as a transport system motor 88 and heater 89. A control signal for controlling is generated.

  The motor driver 76 is a driver (drive circuit) that drives the motor 88 in accordance with an instruction from the system controller 72. The heater driver 78 is a driver that drives the heater 89 such as the post-drying unit 42 in accordance with an instruction from the system controller 72.

  The print control unit 80 has a signal processing function for performing various processing and correction processing for generating a print control signal from the image data in the image memory 74 according to the control of the system controller 72, and the generated print A control unit that supplies a control signal (print data) to the head driver 84. Necessary signal processing is performed in the print controller 80, and the ejection amount and ejection timing of the ink droplets of the print heads 12K, 12C, 12M, and 12Y are controlled via the head driver 84 based on the image data. Thereby, a desired dot size and dot arrangement are realized.

The print controller 80 includes an image buffer memory 82, and the print controller 8
Data such as image data and parameters is temporarily stored in the image buffer memory 82 during image data processing at 0. In FIG. 3, the image buffer memory 82 is shown in a mode accompanying the print control unit 80, but it can also be used as the image memory 74. Also possible is an aspect in which the print controller 80 and the system controller 72 are integrated and configured with one processor.

  The head driver 84 drives the piezoelectric elements of the print heads 12K, 12C, 12M, and 12Y for each color (not shown in FIG. 3 and indicated by reference numeral 58 in FIG. 6) based on the print data supplied from the print control unit 80. The head driver 84 may include a feedback control system for keeping the head driving conditions constant.

  As described with reference to FIG. 1, the print detection unit 24 is a block including a line sensor (not shown), reads an image printed on the recording paper 16, performs necessary signal processing, etc. Presence / absence, variation in droplet ejection, etc.) and the detection result is provided to the print controller 80.

  The print control unit 80 performs various corrections on the print heads 12K, 12C, 12M, and 12Y based on information obtained from the print detection unit 24 as necessary.

[Print head structure]
Next, the structure of the print heads 12K, 12C, 12M, and 12Y will be described. Since the structures of the print heads 12K, 12C, 12M, and 12Y provided for each ink color are common, the print head is represented by the reference numeral 50 below.

  4 is a plan perspective view showing a structural example of the print head 50, and FIG. 5 is an enlarged view showing a nozzle arrangement of the print head 50 shown in FIG.

  As shown in FIG. 4, the print head 50 includes a nozzle 51 that ejects ink droplets, a pressure chamber 52 that applies pressure to ink when ink is ejected, and an ink supply port 53 that supplies ink to the pressure chamber 52. The configured pressure chamber units 54 are arranged in a zigzag two-dimensional matrix so that the nozzles 51 are densified.

  In the example shown in FIG. 4, when each pressure chamber 52 is viewed from above, the planar shape thereof is a substantially square shape, but the planar shape of the pressure chamber 52 is not limited to such a square shape. Alternatively, it may be a rectangle, a rhombus, an ellipse or the like. As shown in FIG. 4, the pressure chamber 52 is provided with a nozzle 51 at one corner of the diagonal line and an ink supply port 53 at the other corner.

  As shown in FIG. 5, a large number of pressure chamber units 54 having such a structure are arranged in the row direction along the main scanning direction and in the oblique column direction having a constant angle θ that is not orthogonal to the main scanning direction. The structure is arranged in a lattice pattern. With a structure in which a plurality of pressure chamber units 54 are arranged at a constant pitch d along the direction of an angle θ with respect to the main scanning direction, the pitch P of the nozzles projected so as to be aligned in the main scanning direction is d × cos θ. .

  That is, in the main scanning direction, each nozzle 51 can be handled equivalently as a linear arrangement with a constant pitch P. With such a configuration, it is possible to realize a high-density nozzle configuration in which 2400 nozzle rows are projected per inch (2400 nozzles / inch) so as to be aligned in the main scanning direction.

When the nozzles are driven by a full line head having a nozzle row having a length corresponding to the entire printable width, (1) all the nozzles are driven simultaneously, (2) the nozzles are sequentially moved from one side to the other. (3) The nozzles are divided into blocks, and each block is sequentially driven from one side to the other, etc., and one line or one in the sheet width direction (direction perpendicular to the sheet conveyance direction) Nozzle driving for printing individual strips is defined as main scanning.

  In particular, when driving the nozzles 51 arranged in a matrix as shown in FIG. 5, the main scanning as described in (3) above is preferable. That is, nozzles 51-11, 51-12, 51-13, 51-14, 51-15, 51-16 are made into one block (other nozzles 51-21,..., 51-26 are made into one block, Nozzles 51-31,..., 51-36 as one block,...), And the nozzles 51-11, 51-12,. One line is printed in 16 width directions.

  On the other hand, by moving the full line head and the paper relative to each other, it is possible to repeatedly print one line formed by the main scanning described above (a line composed of a single row of dots or a line composed of a plurality of rows of dots). This is defined as sub-scanning.

  FIG. 6 is a perspective perspective view showing a part of the schematic configuration inside the print head 50. In the figure, four pressure chamber units 54 are included.

  As shown in FIG. 6, the print head 50 includes a nozzle 51, a substantially rectangular pressure chamber 52 that communicates with the nozzle 51 via the nozzle flow path 60, a common liquid chamber 55 that communicates with each pressure chamber 52, and It has.

  The top surface of the pressure chamber 52 is constituted by a diaphragm 56. On the diaphragm 56, piezoelectric elements 58 each having individual electrodes 57 are arranged so as to correspond to the pressure chambers 52. That is, the piezoelectric element 58 is provided on the diaphragm 56 on the side opposite to the side where the nozzle 51 of the pressure chamber 52 is formed. In the print head 50 shown in FIG. 6, the diaphragm 56 serves as a common electrode for the piezoelectric element 58.

  On the piezoelectric element 58, the lower part of the wiring member 90 formed in the shape of a tapered column is joined. The upper part of the wiring member 90 is joined to the flexible cable 92 connected to the head driver 84 (see FIG. 3). Such a wiring member 90 is comprised from electroconductive members, such as copper.

  Although one wiring member 90 is provided for one piezoelectric element 58, the present invention is not limited to such a structure, and one wiring member 90 is provided for a plurality of piezoelectric elements 58. But you can. In this case, the number of wiring members 90 formed on the print head 50 can be reduced.

  A sealing member 102 for sealing the liquid in the common liquid chamber 55 is provided on the lower surface of the flexible cable 92. The sealing member 102 is made of, for example, a SUS material. A protective film (not shown in FIG. 6, described as reference numeral 103 in FIGS. 8 and 9) and a resin (not shown in FIG. 6, indicated as reference numeral 104 in FIG. 9) are provided on the upper surface of the sealing member 102. Yes. Further, the head driver 84 may be provided on the protective film 103 or the resin 104.

  A space formed between the diaphragm 56 and the flexible cable 92 is a common liquid chamber 55. The common liquid chamber 55 is formed as one large space in a region extending over all the pressure chambers 52 shown in FIG. 4 and stores ink to be supplied to each pressure chamber 52. The common liquid chamber 55 is not limited to such a configuration, and may be a plurality of spaces divided into several regions.

The wiring member 90 that connects the piezoelectric element 58 and the flexible cable 92 is configured to penetrate through the ink stored in the common liquid chamber 55. Therefore, an insulating / protective film 98 is formed on the surface of the wiring member 90 made of a conductive member. The wiring member 90 is also called an electric column because of its shape and function.

  In addition to the surface of the wiring member 90, an insulating / protective film 98 is formed on a portion of the diaphragm 56, the piezoelectric element 58, and the flexible cable 92 that constitute a part of the wall surface of the common liquid chamber 55 and in contact with ink. It also functions as a sealing plate for storing ink in the common liquid chamber 55.

  An ink supply port 53 is formed between the common liquid chamber 55 and each pressure chamber 52, and the common liquid chamber 55 and each pressure chamber 52 communicate with each other. In the print head 50 shown in FIG. 6, the ink supply port 53 is finely formed, and the hole diameter of the ink supply port 53 is smaller than the hole diameter of the nozzle 51. Thus, the fine ink supply port 53 (or a part thereof) is a supply restrictor 53A that functions as a fluid resistance. The supply restrictor 53A reduces the backflow of ink from the pressure chamber 52 to the common liquid chamber 55 when ink droplets are ejected from the nozzle 51, and stabilizes ink ejection from the nozzle.

  Next, the operation of the print head 50 configured as described above will be described.

  The ink stored in the common liquid chamber 55 is supplied to the pressure chamber 52 through the ink supply port 53. When the head driver 84 (see FIG. 3) sends a drive signal to the piezoelectric element 58, the drive signal is supplied to the individual electrode 57 through the flexible cable 92 and the wiring member 90.

  When the drive signal is supplied to the individual electrode 57, the piezoelectric element 58 is deformed, and the diaphragm 56 constituting the top surface of the pressure chamber 52 is deformed. Then, the volume of the pressure chamber 52 decreases, and the ink filled in the pressure chamber 52 passes through the nozzle channel 60 and is ejected as ink droplets from the nozzle 51.

  In the print head 50 shown in FIG. 6, a common liquid chamber 55 is provided on the opposite side of the pressure chamber 52 from the side where the nozzles 51 (discharge ports) are formed, and further penetrates the common liquid chamber 55. In addition, a wiring member 90 connected to the individual electrode 57 of the piezoelectric element 58 on the vibration plate 56 is provided. Accordingly, a space for electrical wiring such as the head driver 84 (see FIG. 3) and the flexible cable 92 connected to the head driver 84 can be secured on the side opposite to the diaphragm 56 with the common liquid chamber 55 interposed therebetween. Therefore, it is possible to cope with an increase in electrical wiring accompanying the increase in the density.

  Further, since the common liquid chamber 55 is disposed on the opposite side of the pressure chamber 52 from the side where the nozzle 51 (discharge port) is formed, the common liquid chamber 55 is compared with the case where the common liquid chamber 55 is disposed on the same side as the pressure chamber 52. 55 can be formed large. Further, the length of the nozzle flow path 60 between the pressure chamber 52 and the nozzle 51 is shorter than when the common liquid chamber 55 is provided on the same side as the pressure chamber 52. Further, a complicated flow path for guiding ink from the common liquid chamber 55 to the pressure chamber 52 is not required, and the common liquid chamber 55 and the pressure chamber 52 can be communicated straight. As a result, high-viscosity ink can be ejected, and a quick refill operation after ejection can be performed, enabling high-frequency driving.

  Each size of the print head 50 as described above is not particularly limited. For example, the pressure chamber 52 is a square having a plane shape of 300 μm × 300 μm, a height of 150 μm, a diaphragm 56 and Each of the piezoelectric elements 58 is formed to have a thickness of 10 μm, and the wiring member 90 is formed to have a diameter of a joint portion with the individual electrode 57 of 100 μm and a height of 500 μm.

[Print head manufacturing method]
Next, a method for manufacturing the print head 50 will be described.

  FIG. 7 is a flowchart showing a flow of manufacturing the print head 50. As shown in the figure, the pressure chamber unit forming step (S10), the common liquid chamber forming step (S12), the common liquid chamber coating process (S14), and the communication flow path forming step (S16) are performed in order, and printing is performed. The head 50 is manufactured. Below, it explains in full detail about each process.

  FIG. 8 corresponds to the 8-8 cross-sectional position in FIG. 4 and is a cross-sectional view showing a state before the supply restrictor 53A and the nozzle 51 are processed. 9 is a cross-sectional view taken along line 8-8 in FIG. 4 after the supply restrictor 53A and the nozzle 51 have been processed.

  As shown in FIG. 8, the print head 50 is assembled by joining a plurality of unprocessed plate members of the supply restrictor 53 </ b> A and the nozzle 51. This step corresponds to the pressure chamber unit forming step (S10) shown in FIG.

  The nozzle 51 is formed on the upper surface of the unprocessed nozzle plate 94 in FIG. 8, the flow path plate 97 in which the nozzle flow path 60 is formed, and the pressure chamber plate 96 in which the holes and grooves forming part of the pressure chamber 52 are formed. The top surface of the pressure chamber 52 is configured, and the supply restrictor 53A (ink supply port 53) is laminated with the unprocessed diaphragm 56 and the piezoelectric element 58 and bonded together with an adhesive or the like. The nozzle plate 94 and the diaphragm 58 are made of SUS material.

  At the time of these joinings, as shown in FIG. 8, the excess adhesive 106 protrudes from the joined portion of the nozzle plate 94 and the flow path plate 97 to the nozzle flow path 60, or the vibration plate 56 and the piezoelectric element 58 are joined. In some cases, the excess adhesive 106 protrudes from the periphery of the part and solidifies as it is. In FIG. 8, the surplus adhesive 106 at other joints is not shown.

  Subsequently, in the common liquid chamber forming step (see FIG. 7), although not shown, a copper layer is formed under the flexi cable 92 joined to the sealing member 102 made of SUS material, and the wiring member 90 is formed by etching. Form. Then, as shown in FIG. 8, the tip end portion 90a of the wiring member 90 is joined to the individual electrode 57 with a conductive adhesive, an anisotropic conductive film or the like so that the wiring member 90 faces downward in FIG. Then, the irradiation hole 100 penetrating the sealing member 102 and the upper and lower surfaces of the flex cable 92 is processed by wet etching or the like. The wiring member 90 may be formed by electroforming nickel on the flexible cable 92.

  The irradiation hole 100 is formed in the sealing member 102 and the flexi cable 92 immediately above the position where the supply diaphragm 53A is formed. That is, the irradiation hole 100 is formed so that the laser beam 110 can be irradiated to the formation position of the supply stop 53A from the non-nozzle surface 50B side opposite to the nozzle surface 50A of the print head 50. The diameter of the irradiation hole 100 is sufficiently small, for example, about 100 to 200 μm in diameter.

  Next, as a common liquid chamber coating process (see FIG. 7), an insulating coating resin is caused to flow from the ink supply tank (not shown in FIG. 8, described as reference numeral 67 in FIG. 20) to the common liquid chamber 55. Before flowing the insulating coating resin, the protective film 103 is attached to the upper surface of the sealing member 102, and the opening 100 a of the irradiation hole 100 is closed with the protective film 103. As the insulating coating resin that flows into the common liquid chamber 55, for example, liquid paint, electrodeposition paint, vaporized paint, or the like is used.

As a result, an insulating / protective film 98 is formed on a portion of the diaphragm 56, the piezoelectric element 58, and the flexible cable 92 that constitute a part of the wall surface of the common liquid chamber 55 in contact with ink. At this time, an insulating / protective film 98 is also formed on the surface of the surplus adhesive 106 generated when the diaphragm 56 and the piezoelectric element 58 are joined.

  By flowing the insulating coating resin through the common liquid chamber 55 in this way, it is possible to easily insulate members constituting part of the wall surface of the common liquid chamber 55 such as the wiring member 90 and the piezoelectric element 58.

  Further, when the insulating coating resin is allowed to flow into the common liquid chamber 55, the supply restrictor 53A (ink supply port 53) that communicates the common liquid chamber 55 and the pressure chambers 52 is in an unprocessed state, and thus the pressure chambers 52 are not processed. It is possible to prevent the insulating coating resin from being mixed in.

  Next, as a communication flow path forming step (see FIG. 7), the supply aperture 53A is processed into the diaphragm 56 by irradiating the irradiation hole 100 with the laser beam 110 from the non-nozzle surface 50B of the print head 50. At this time, the protective film 103 in the opening 100 a is melted by the irradiated laser beam 110. When the protective film 102 is attached to the sealing member 102 with an adhesive having a weak adhesive force, the supply diaphragm 53A may be processed by irradiating the laser beam 110 after removing the protective film 102. .

  As the laser beam 110, a laser beam having characteristics suitable for ablation of the material of the diaphragm 56, such as an excimer laser, is used.

  In recent years, due to the high output and price reduction of short wave lasers typified by UV-YAG lasers and the rapid progress of ultrashort pulse lasers such as femtosecond lasers, such lasers have been used for resin materials such as polyimide. In addition to being effective, it is possible to process even metals that have been difficult in the past. The present invention can also apply such a laser, and is particularly effective for yield improvement and high accuracy when the print head 50 having a long length and multiple nozzles is formed of a metal material. .

  The shape of the laser beam 110 is configured to be a forward tapered shape that becomes narrower along the irradiation direction (downward in FIG. 8) at the position where the supply diaphragm 53A of the diaphragm 56 is formed.

  When the forward tapered laser beam 110 is irradiated from the non-nozzle surface 50B side of the print head 50 to the vibration plate 56 through the irradiation hole 100, the insulating / protective film 98 existing in the irradiation direction of the laser beam 110, surplus A supply restrictor 53A is formed on the adhesive 106 and the diaphragm 56 by ablation. The shape of the supply restrictor 53A depends on the shape of the laser beam 110, and as shown in FIG. 9, becomes a tapered shape that becomes narrower from the common liquid chamber 55 side toward the pressure chamber 52 side.

  Next, as shown in FIG. 8, the nozzle 51 is perforated in the nozzle plate 94 by irradiating the nozzle 51 with the laser beam 112 from the nozzle surface 50 </ b> A side of the print head 50.

  As the laser beam 112, an excimer laser or the like is used similarly to the laser beam 110. The shape of the laser beam 112 is configured to be an inversely tapered shape that becomes wider along the irradiation direction of the laser beam 112 (upward in FIG. 8) at the position where the nozzle 51 of the nozzle plate 94 is formed. . For such an inversely tapered laser beam 112, for example, as disclosed in Patent Document 2 (Japanese Patent Laid-Open No. 5-330064), an optical lens is disposed between the laser light source and the nozzle surface 50A. Spread light after the beam waist is used.

  When the reverse tapered laser beam 112 is irradiated from the nozzle surface 50A side of the print head 50 to the position where the nozzle 51 of the nozzle plate 94 is formed, the nozzle 51 is formed by ablation. The shape of the nozzle 51 depends on the shape of the laser beam 112, and as shown in FIG. 9, becomes a tapered shape that becomes wider from the nozzle surface 50A side to the pressure chamber 52 side.

  After forming the supply restrictor 53A and the nozzle 51, as shown in FIG. 9, the surface of the protective film 103 (or the surface of the sealing member 102 when the protective film 103 is peeled off) is coated with a resin 104 such as silicon. To do. At this time, since the hole diameter of the irradiation hole 100 is sufficiently small, the opening 100 a is sealed by the resin 104. Further, a head driver 84 is mounted on the coated surface of the resin 104.

  As described above, after the print head 50 is assembled, that is, after a plurality of plate members are laminated and bonded with an adhesive or the like, and the insulation treatment is performed on the common liquid chamber 55, the nozzle surface 50A side and the non-nozzle surface of the print head 50 By processing the supply aperture 53A and the nozzle 51 by irradiating a laser beam from the 50B side, the supply aperture 53A and the nozzle 51 can be improved in accuracy, and the supply aperture 53A using an excess adhesive 106, an insulating coating resin, or the like can be realized. And clogging of the nozzle 51 can be prevented.

  The diaphragm 56 on which the supply restrictor 53A is formed and the nozzle plate 94 on which the nozzle 51 is formed are both made of SUS material. In this way, the plate members on which the supply restrictor 53A and the nozzle 51 are respectively formed are made of substantially the same material, so that further processing stabilization and optimization can be achieved, and the flow path in the print head 50 due to temperature change can be achieved. Warpage can also be reduced. As these materials, in addition to the SUS material shown in FIGS. 8 and 9, polyimide, Ni electroforming, or the like is used. For example, in the case of a SUS material, there are SUS304, SUS316, SUS430, and the like, and it is not necessary that the number is the same. good. The same applies to polyimide and Ni electroforming.

  Here, as shown in FIG. 9, when the hole diameter of the supply restrictor 53A is d1 and the thickness of the diaphragm 56 is t1, the flow path loss K1 of the supply restrictor 53A is as shown in the following equation (1). .

  Similarly, when the hole diameter of the nozzle 51 is d2 and the thickness of the nozzle plate 94 is t2, the flow path loss K2 of the nozzle 51 is as shown in the following equation (2).

  In the print head 50 in the present embodiment, the supply throttle 53A communicating with each pressure chamber 52 and the flow path losses K1, K2 of the nozzle 51 are configured to satisfy the following expression (3), respectively.

That is, in each pressure chamber 52, the ratio (pressure loss ratio) of the flow path loss K1 of the supply restrictor 53A and the flow path loss K2 of the nozzle 51 is configured to be approximately 1: 1. Such a pressure loss ratio can be made uniform as described above by adjusting the thickness t1 of the diaphragm 56, the thickness t2 of the nozzle plate 94, the laser output, and the like. For example, when the hole diameter d1 of the supply restrictor 53A is smaller than the hole diameter d2 of the nozzle 51 and the pressure loss ratio is 1: 1, the thickness t1 of the diaphragm 56 is made thinner than the thickness t2 of the nozzle plate 94. You may adjust to.

  Thus, by making the pressure loss ratio between the pressure chambers 52 uniform and stabilizing the pressure loss balance, the ink discharge amount of each nozzle 51 is stabilized, and the image quality of the inkjet recording apparatus 10 provided with such a print head 50 is improved. Can be realized. A method for stabilizing the pressure loss balance between the pressure chambers 52 will be described later.

  FIG. 10 illustrates another configuration example of the print head 50, and is a cross-sectional view corresponding to a cross section 8-8 in FIG. As shown in FIG. 10, the ink supply port 53 that communicates the common liquid chamber 55 and the pressure chamber 52 has a fine supply diaphragm 53 </ b> A formed on the diaphragm plate 108 stacked on the diaphragm 56 and the diaphragm 56. It is comprised from the formed through-hole 53B.

  In the print head 50 shown in FIG. 10, the diaphragm plate 108 and the nozzle plate 94 are made of the same material, and as described above, the processing can be stabilized and optimized, and the print head due to temperature changes. It is also possible to reduce the warpage of the flow path in 50.

  Similarly to the print head 50 shown in FIGS. 8 and 9, the supply aperture 53 </ b> A and the nozzle 51 are processed with a laser beam after the plate members are stacked and the print head 50 is assembled. Therefore, clogging of the supply throttle 53A can be prevented, and the supply throttle 53A and the nozzle 51 can be processed with high accuracy.

[Method to stabilize pressure loss balance between pressure chambers]
Next, a method for stabilizing the pressure loss balance between the pressure chambers 52 will be described.

  FIG. 11 is an explanatory view showing an outline of a processing method of the supply restrictor 53A and the nozzle 51. FIG. As shown in FIG. 11, a beam expander 124 and a mask 128 are sequentially formed from the laser oscillator 120 side with respect to the irradiation direction (downward direction in FIG. 11) of the laser beam 122 irradiated from a laser oscillator 120 such as an excimer laser. A telecentric lens system 132 and the print head 50 are arranged.

  The beam expander 124 expands the laser beam 122 irradiated from the laser oscillator 120 so as to correspond to the shape of the mask 126 arranged at the rear stage in the irradiation direction of the laser beam 122. An enlarged laser beam (hereinafter referred to as an enlarged laser beam) 126 is applied to the mask 128.

  FIG. 12 is a plan view of the mask 126 shown in FIG. As shown in the figure, the mask 128 has a plurality of substantially circular openings 142, 142,... Arranged in the longitudinal direction (hereinafter, this arrangement is referred to as an opening row 143). The irradiation range of the enlarged laser beam 126 (see FIG. 11) irradiated to the mask 128 is configured to be a region surrounded by a broken line in FIG.

  In FIG. 11, when the enlarged laser beam 126 passes through the mask 128 having the opening row 143 as described above, a beam row 131 including a plurality of beams 130, 130,... Corresponding to the shape of the opening 142 is obtained. . This beam train 131 is parallel to the optical axis and is applied to the telecentric lens system 132.

The telecentric lens system 132 maintains parallelism with respect to the optical axis P of each incident beam 130 and reduces the projection of each beam 130 at a predetermined reduction magnification, thereby reducing the reduced laser beam consisting of reduced laser beams 134, 134,. The column 135 is emitted.

  By maintaining the parallelism of each reduced laser beam 134 to the optical axis P, the laser beams 110 and 112 (see FIG. 8) are irradiated in a direction substantially perpendicular to the non-nozzle surface 50B or the nozzle surface 50A of the print head 50. Therefore, it is possible to perform highly accurate processing without deviation in the hole diameter and the pitch between holes.

  The reduction magnification of the telecentric lens system 132 is determined according to the shape of the aperture row 143 of the mask 128 and the shape of the supply aperture 53A or the nozzle 51 formed in the print head 50.

  When forming a plurality of supply diaphragms 53 </ b> A in the print head 50, the reduced laser beam array 135 emitted from the telecentric lens system 132 is irradiated to the non-nozzle surface 50 </ b> B of the print head 50. At this time, at the position where the supply diaphragm 53A of the diaphragm 56 is formed, the supply diaphragm 53A is formed such that each reduced laser beam 134 constituting the reduced laser beam array 135 has a forward tapered shape that becomes narrower along the irradiation direction. Adjust the position and the pulse intensity during machining.

  The shape of the supply diaphragm 53A formed by such a reduced laser beam array 135 is a taper that becomes narrower from the common liquid chamber 55 side toward the pressure chamber 52 side, as shown in FIG.

  On the other hand, when a plurality of nozzles 51 are formed on the print head 50, the nozzle surface 50A of the print head is irradiated with the reduced laser beam array 135 emitted from the telecentric lens system 132. At this time, at the position where the nozzle 51 of the nozzle plate 94 is formed, the reduced laser beam array 135 is formed so that each reduced laser beam 134 constituting the reduced laser beam array 135 has an inversely tapered shape that becomes wider along the irradiation direction. The position of the nozzle plate 94 and the pulse intensity during processing are adjusted.

  FIGS. 13A and 13B are plan views of the diaphragm 56 in which an array of supply restrictors 53A is formed by the processing method shown in FIG. FIG. 13A shows a state where the arrangement of the supply restrictors 53A is first processed, and FIG. 13B shows a state where all the supply restrictors 53A are processed in a matrix. The supply diaphragm 53A formed on the diaphragm 56 is formed by irradiating a laser beam from the non-nozzle surface 50B side of the print head 50 after assembling the print head 50 as described above.

  When the reduced laser beam array 135 is irradiated to the non-nozzle surface 50B of the print head 50 in a substantially oblique direction in the longitudinal direction of the print head 50 by the processing method shown in FIG. 11, as shown in FIG. A plurality of supply restrictors 53A arranged in a substantially oblique direction in the longitudinal direction are formed on the diaphragm 56 at a time. The shape of the plurality of supply apertures 53A arranged in this way is similar to the shape of the opening row 143 of the mask 128.

  Subsequently, the irradiation position of the reduced laser beam train 135 is translated by a small amount in the longitudinal direction of the diaphragm 56 (printing head 50), and the same reduced laser beam train 135 as that at the beginning is irradiated to the diaphragm 56 in the longitudinal direction. A plurality of supply restrictors 53A arranged in a substantially oblique direction are formed. If such an operation is repeated several times, as shown in FIG. 13B, supply diaphragms 53A arranged in a matrix on the diaphragm 56 are formed.

The irradiation position of the reduced laser beam array 135 may be relatively changed by moving the print head 50 (the vibration plate 56) by a small amount in the longitudinal direction without moving the irradiation position of the reduced beer array 135. .

  FIG. 14 is a plan perspective view of the print head 50 in which the supply restrictor 53A and the nozzles 51 are processed in a matrix by the processing method shown in FIG.

  FIG. 14 shows a state in which the supply diaphragm 53A is processed into a matrix with the reduced laser beam array 135 (see FIG. 13B), and the same reduced laser beam array 135 used for processing the supply diaphragm 53A is used. Thus, the nozzles 51 are processed into a matrix.

  In the example shown in FIG. 14, the hole diameter of the nozzle 51 is formed larger than the hole diameter of the supply restrictor 53A. By moving the position of the telecentric lens system 132 shown in FIG. 11 in the irradiation direction or adjusting the laser intensity, the hole diameter of the nozzle 51 is made larger than the hole diameter of the supply diaphragm 53A while using the same reduced laser beam array 135. Can also be increased.

  In FIG. 11, there is a variation factor between the reduced laser beams 134 (see FIG. 11) constituting the reduced laser beam array 135 between the laser oscillator 120 and the print head 50. For example, the laser beam 122 emitted from the laser oscillator 120 may not be uniform, or there may be variations in the openings 142 formed in the mask 128. Then, in the plurality of supply diaphragms 53A or nozzles 51 formed by such a reduced laser beam array 135, there may be variations in hole diameter and pitch (distance between the center portions between the holes).

  However, in the present embodiment, as shown in FIG. 14, the plurality of supply apertures 53 </ b> A and the plurality of nozzles 51 that are respectively arranged in the substantially oblique direction of the longitudinal direction of the print head 50 are processed by the same reduced laser beam array 135. Therefore, the supply restrictor 53 </ b> A and the nozzle 51 communicating with each other via the pressure chamber 52 are processed with the same reduced laser beam 134. Therefore, the hole diameter ratio between the supply restrictor 53 </ b> A and the nozzle 51 communicating with each other via the pressure chambers 52 is configured to be substantially constant between the pressure chambers 52. In particular, if the supply restrictor 53A and the nozzle 51 are made of the same material, the processing conditions are stabilized, and further effects can be expected.

  For example, when the diameter of a specific reduced laser beam 134 in the reduced laser beam row 135 is 1% larger than the other reduced laser beams, the diameters of the supply stop 53A and the nozzle 51 formed by the reduced laser beam 134 are as follows. Although the diameter of the supply restrictor 53A and the nozzle 51 is about 1% larger than the diameters of the other supply restrictors 53A and the nozzles 51, the hole diameter ratio between the supply restrictors 53A and the nozzles 51 is different from the supply restrictors 53A and nozzles 51 formed by the other reduced laser beams 134. It is the same as the pore diameter ratio.

  Thus, even if there is a variation in the reduced laser beam row 135, the supply diaphragm 53A and the nozzle 51 communicating with each other through the pressure chamber 52 are processed by the same reduced laser beam 134. The hole diameter ratio of the nozzle 51 becomes substantially constant between the pressure chambers 52. As a result, the pressure loss ratio of each pressure chamber 52 becomes substantially uniform, and the pressure loss balance is stabilized. As a result, the amount of ink discharged from the nozzles 51 is stabilized, and the image quality of the inkjet recording apparatus 10 including such a print head 50 can be realized.

  In addition, after processing the supply aperture 53A and the nozzle 51 with a laser beam row, trimming can be performed with a single laser beam or the like as necessary to further improve variation.

  FIG. 15 is a plan perspective view showing another example of the structure of the print head 50. The print head 50 shown in FIG. 15 has a nozzle array having a length corresponding to the entire width of the recording paper 16 by connecting short heads 50 'in which a plurality of nozzles 51 are arranged in a matrix in a staggered manner. It has a full line head.

In the case of such a print head 50, the short heads 50 'are assembled, arranged in a staggered manner and connected to form the full line type print head 50, and then the supply restrictor 53A and the nozzle 51 are processed. Preferably it is done.

  The print head 50 connected with the short head 50 'is placed on an XY stage or the like, and the reduced laser beam train 135 (see FIG. 11) is applied to each short head 50' in the same manner as the processing method shown in FIG. Irradiation makes it possible to process the supply restrictor 53A and the nozzle 51 with high accuracy while stabilizing the pressure loss balance between the pressure chambers.

  After processing the supply aperture 53A and the nozzle 51, misalignment is likely to occur when the short head 50 'is joined. This is because when the nozzle 51 is processed, accurate positioning is possible. For example, the supply restrictor 53A and the nozzle 51 can be processed with a positional accuracy of 1 μm or less.

  FIG. 16 is a plan perspective view showing another example of the structure of the print head 50. FIG. 17 is an enlarged view showing the nozzle arrangement of the print head 50 shown in FIG.

  In the print head 50 shown in FIGS. 16 and 17, droplets are ejected in a predetermined order (droplet ejection timing) according to the conveyance speed of the recording paper 16, and one dot row in the main scanning direction of the recording paper 16. The nozzles 51-11, 51-12, 51-13, 51-14, 51-15, and 51-16 forming the nozzle constitute a nozzle row 510. The nozzle array 510 is divided into two in the sub-scanning direction, and includes a nozzle array 512 including nozzles 51-11, 51-12, and 51-13, and nozzles 51-14, 51-15, and 51-16. The nozzle row 514 is configured. The nozzle row 512 and the nozzle row 514 are arranged with a phase shift in the main scanning direction by ½ of the nozzle pitch P in the main scanning direction. Note that nozzle rows having the same structure as the nozzle row 510 are arranged in the main scanning direction.

  In the case of such a print head 50, a reduced laser beam row 135 (see FIG. 11) is irradiated for each block unit such as nozzle rows 512 and 514 that are divided in the sub-scanning direction and shifted in phase in the main scanning direction. It is desirable to process the supply restrictor 53A and the nozzle 51.

  As well as stabilizing the pressure loss balance between the pressure chambers 52, it is possible to reduce the visibility of unevenness occurring in the dot group formed on the recording paper 16, as will be described below.

  In the print head 50 shown in FIGS. 16 and 17, when the nozzles 51-11, 51-12,..., 51-16 constituting the nozzle row 510 are projected so as to be aligned in the main scanning direction, as shown in FIG. The nozzle 51-14 is arranged between the nozzle 51-11 and the nozzle 51-12. Similarly, the nozzle 51-15 is arranged between the nozzle 51-12 and the nozzle 51-13, and between the nozzle 51-13 and the nozzle 51-21 of the nozzle row adjacent to the nozzle row 510 in the main scanning direction. Nozzles 51-16 are arranged.

  FIG. 18 is an explanatory diagram of the droplet ejection timing of the print head 50 shown in FIGS. 16 and 17. The numbers shown in the circles representing the nozzles 51 indicate the droplet ejection timing, and at time t1, droplet ejection is performed from the nozzles 51-11, 51-21, 51-31,. Next, at timing t2, droplet ejection is performed from the nozzles 51-12,. Further, at the timing t3 to the timing t6, the nozzles 51-13,..., The nozzle 51-16, the nozzle 51-26, the nozzle 51-36,... Are ejected, and one cycle of the ejection from the timing t1 to the timing t6 is performed. Thus, as shown in the lower part of FIG. 18, one line of dot row can be formed in the main scanning direction.

Here, in the droplet ejection performed at the timings t1 to t3, the ink droplets ejected at each timing do not come into contact with the other ink droplets on the recording paper 16, and the ink droplets by each droplet ejection alone form dots. Form. Note that the nozzle pitch P in the main scanning direction is determined so that the ink droplets ejected at the timing t1 to the timing t3 do not interfere on the recording paper 16.

  On the other hand, at timing t4 to timing t6, when the ejected ink droplets have landed, ink droplets have already been deposited at the droplet ejection points on both sides adjacent to each other in the main scanning direction, and landed on the recording paper 16 first. Therefore, it lands to come into contact with the ink droplets on both sides.

  That is, the ink droplets ejected at timing t4 land between ink droplets ejected at timing t1 and timing t2, and ink droplets ejected at timing t5 are similarly ejected at timing t2 and timing t3. The ink droplets that have landed between the dropped ink droplets and have been ejected at timing t6 land between the ink droplets that have been ejected at timing t1 and timing t3.

  Since the ink droplets ejected at the timing t4 to the timing t6 are attracted to the adjacent ink droplets that have landed first, the ink droplets ejected at the timing t4 to the timing t6 do not cause a phenomenon that approaches one direction. It is possible to reduce the visibility of unevenness generated at the folding position (nozzle row connecting portion) such as the nozzle 51-16 and the nozzle 51-21.

  FIG. 19 is an explanatory view showing an outline of another processing method of the supply restrictor 53A and the nozzle 51. As shown in FIG. 19, the diffraction grating 136 is arranged in the irradiation direction (downward direction in FIG. 19) of the laser beam 122 irradiated from the laser oscillator 120. When the laser beam 122 is incident on the diffraction grating 136, a plurality of radial laser beams 138 are emitted from the substantially central portion of the diffraction grating 122.

  When a plurality of radial laser beams 138 are incident on the telecentric lens system 132, a reduced laser beam array 135 similar to that shown in FIG. 11 is emitted, which is corrected parallel to the optical axis P and reduced at a predetermined magnification.

  In the same manner as described above, the reduced laser beam row 135 is irradiated to the non-nozzle surface 50B and the nozzle surface 50A of the print head 50, respectively, and the supply diaphragm 53A and the nozzle 51 communicating with each other through the pressure chamber 52 are made the same reduced laser. By processing with the beam 134, the pressure loss ratio between the pressure chambers 52 can be made uniform, the pressure loss balance is stabilized, and the ink discharge amount from each nozzle 51 can be stabilized.

[Configuration of ink supply system]
FIG. 20 is a schematic diagram showing the configuration of the ink supply system of the inkjet recording apparatus 10. As shown in FIG. 20, the ink jet recording apparatus 10 includes a sub tank 61, pumps P <b> 1 and P <b> 2, buffer tanks 62 and 63, and the like between the ink supply tank 67 and the print head 50.

  The ink supply tank 67 is a base tank for supplying ink, and is installed in the ink storage / loading unit 14 described with reference to FIG. The ink supply tank 67 has a method of replenishing ink from a replenishment port (not shown) when the ink remaining amount is low, a cartridge method of replacing the entire tank, and the like depending on the intended use. When changing, the latter cartridge system is suitable. In this case, it is preferable that the ink type information is identified by a barcode or the like, and ejection control is performed according to the ink type.

The sub tank 61 collects ink supplied from the ink supply tank 67 and removes bubbles in the ink as much as possible. Instead of the sub tank 61 or in combination with the sub tank 61, a filter (not shown) for removing foreign substances and bubbles may be provided. Sub tank 6
1 is provided with a sensor (not shown) connected in a circuit with a system controller 72 (see FIG. 3). The system controller 72 detects the presence or absence of ink. When the system controller 72 no longer detects the remaining ink, it is determined that the ink supply tank 67 has run out of ink.

  The buffer tanks 62 and 63 are provided near the print head 50 or integrally with the print head 50 between the sub tank 61 and the print head 50. These buffer tanks absorb the pulsation (internal pressure fluctuation) generated in the pressure in the common liquid chamber 55 by driving the pumps P1 and P2, and have a damper effect that maintains the pressure in the print head 50 at an appropriate constant value. To get.

  Further, in the vicinity of the print head 50, a maintenance including a cap 64 as a means for preventing the nozzle 51 from drying or preventing an increase in ink viscosity near the nozzle 51, a cleaning blade 66 as a means for cleaning the nozzle surface 50A, and the like. A unit 65 is provided.

  The maintenance unit 65 can be moved relative to the print head 50 by a moving mechanism (not shown), and is moved from a predetermined retracted position to a maintenance position below the print head 50 as necessary.

  The cap 64 is displaced up and down relatively with respect to the print head 50 by an elevator mechanism (not shown). The cap 64 is raised to a predetermined raised position when the power is turned off or during image formation standby, and is brought into close contact with the print head 50, thereby covering the nozzle surface 50 </ b> A of the print head 50 with the cap 64.

  FIG. 21 is a plan perspective view showing the ink supply system of the print head 50 shown in FIG. As shown in FIG. 21, the planar shape of the common liquid chamber 55 provided in the print head 50 is configured to cover the entire surface of the pressure chambers 52 arranged in a matrix. Further, as described above, the common liquid chamber 55 communicates with each pressure chamber 52 via each ink supply port 53.

  A main supply port 150 is formed at each corner of the common liquid chamber 55, and an ink supply supply pipe 152 is connected to the main supply port 150. Each main supply port 150 is provided with a filter 158 that can be opened and closed in accordance with the flow of ink. The supply pipes 152 and 152 at both ends in the short direction of the print head 50 on the right side in FIG. 21 join to constitute a main flow path 156A. Similarly, the supply pipes 152 and 152 at both ends in the short direction of the print head 50 on the left side in FIG. 21 join to constitute the main flow path 156B. As shown in FIG. 20, the main flow path 156 </ b> A is connected to the buffer tank 62, and the main flow path 156 </ b> B is connected to the buffer tank 63.

  FIGS. 22A and 22B are cross-sectional views (cross-sectional views taken along line 22-22 in FIG. 21) illustrating a configuration example of the filter 158. FIGS. 22A shows the state of the filter 158 when ink is discharged from the common liquid chamber 55, and FIG. 22B shows the state of the filter 158 when ink is supplied to the common liquid chamber 55. To express.

  As shown in FIG. 22A, when ink flows from the common liquid chamber 55 side to the buffer tank 63 side (the direction of the arrow in FIG. 22A), the filter 158 opens the main supply port 150. Composed. When ink is discharged from the supply liquid chamber 55, foreign matter contained in the ink is not blocked by the filter 158 and can be reliably discharged from the common liquid chamber 55.

On the other hand, as shown in FIG. 22B, when ink flows from the buffer tank 63 side to the common liquid chamber 55 side (the direction of the arrow in FIG. 22B), the filter 158 closes the main supply port 150. Configured as follows. When ink is supplied to the common liquid chamber 55, foreign matter or the like contained in the ink is blocked by the filter 158, and foreign matter or the like can be prevented from entering the common liquid chamber 55.

  Note that the filter 158 arranged at the lower left in FIG. 21 has the same configuration as that in FIG. 22, and the two filters 158 arranged at the right in FIG.

  As described above, the filter 158 that can be opened and closed in accordance with the flow of ink can prevent foreign matter and the like from entering the common liquid chamber 55, and in the unlikely event that foreign matter and the like have entered the common liquid chamber 55. Even in this case, the foreign matter can be reliably discharged.

  In the configuration of the ink supply system of the ink jet recording apparatus 10 shown in FIGS. 20 and 21, when the power is turned on to the ink jet recording apparatus 10, the pumps P1 and P2 are both driven as liquid supply, and the sub tank 61 and the buffer tank 62 are driven. , 63 until the ink in the sub tank 61 and the buffer tanks 62, 63 are filled with ink until the ink reaches a predetermined liquid level. Then, ink is supplied from the supply pipe 152 to the common liquid chamber 55 through the main supply port 150, and the common liquid chamber 55 is filled with ink. At this time, the filter 158 provided in the main supply port 150 is in a state in which the main supply port 150 is closed as shown in FIG. Is done.

  Further, during image formation or standby, the frequency of use of specific nozzles 51 is low, ink drops are not ejected from the nozzles 51 for a predetermined standby time, and the print controller 50 needs to be recovered. The system controller 72 When the determination is made (see FIG. 3), the piezoelectric element 58 of the print head 50 is driven, and the deteriorated ink (ink in the vicinity of the nozzle whose viscosity has increased) is preliminarily ejected from the nozzle 51 toward the cap 64 (see FIG. 3). (Purge, empty discharge, spit, dummy discharge).

  At this time, in order to reliably discharge the deteriorated ink, at least one of the pumps P1 and P2 is driven to supply the ink while pressurizing it. Thereby, the deteriorated ink generated in the vicinity of the nozzles 51 due to the thickening over time can be surely discharged.

  Further, when air bubbles are mixed in the ink in the print head 50, the ink cannot be ejected from the nozzles 51 even if the piezoelectric element 58 is operated. In such a case, a recovery process is performed in which the cap 64 is brought into close contact with the nozzle surface 50A of the print head 50, and the pump P3 is driven to suck and remove ink mixed with bubbles in the pressure chamber 52. The collected ink is sent to the collection tank 68 and returned to the sub tank 61 as necessary.

  This suction operation is also performed when the initial ink is loaded into the print head 50 or at the start of use after a long stop, and the deteriorated ink that has increased in viscosity (solidified) is sucked out.

  Since the suction operation is performed on the entire ink in the pressure chamber 52, the amount of ink consumption increases. Therefore, when the increase in the viscosity of the ink is small, it is preferable to perform the preliminary ejection described above.

  When foreign matter or the like enters the print head 50, the cap 64 is brought into close contact with the nozzle surface 50A of the print head 50, and the pump P3 is pressurized to apply pressure to the ink in the pressure chamber 52. Thus, foreign matter or the like is discharged outside the common liquid chamber 55.

The cleaning blade 66 is made of an elastic member such as rubber, and is slidably provided on the nozzle surface 50A of the print head 50 by a blade movement mechanism (wiper) (not shown). When ink droplets or foreign matters adhere to the nozzle surface 50A, the nozzle surface 50A is wiped by sliding the cleaning blade 66 on the nozzle surface 50A to clean the nozzle surface 50A. During cleaning by this blade mechanism, preliminary discharge is performed after cleaning in order to prevent foreign matters from being mixed into the nozzle 51 by the cleaning blade 66.

  FIG. 23 is an explanatory diagram showing an outline of a method for eliminating clogging of the supply restrictor 53A. As shown in FIG. 23, when a foreign matter 160 such as dust adheres to the common liquid chamber 55 side of the supply restrictor 53A and becomes clogged, the above-described piezoelectric element 58 is driven to preliminarily discharge deteriorated ink. The method in which the cap 64 is brought into close contact with the nozzle surface 50A and the pump P3 (see FIG. 20) is driven to suck and remove the ink in the pressure chamber 52 may not solve the clogging of the supply throttle 53A. In the following, a method for eliminating clogging of the supply restrictor 53 will be described with reference to FIGS.

  If an image defect is detected by the print detection unit 24 (see FIG. 3) and the image defect cannot be recovered even after preliminary ejection, the pump P1 is driven to feed liquid and the pump P2 is driven to absorb liquid. 23, the ink in the common liquid chamber 55 is circulated in the direction of arrow A. The pump P1 may be driven to absorb liquid and the pump P2 may be driven to supply liquid.

  Further, as shown in FIG. 23, the cap 64 is brought into close contact with the nozzle surface 50 </ b> A of the print head 50. Then, using the pump P3, pressure is applied to the position corresponding to the nozzle 51 of the cap 64 in the direction opposite to the discharge direction of the nozzle 51 (direction of arrow B in FIG. 23).

  The pressure applied in this way is transmitted through the ink in the pressure chamber 52 and acts upward in FIG. 23 against the foreign matter 160 adhering to the common liquid chamber 55 side of the supply throttle 53A. At this time, since the ink in the common liquid chamber 55 flows in the direction of arrow A in FIG. 23, the foreign matter 160 is discharged in the direction of the broken line arrow in FIG. At this time, the filter 158 provided in the main supply port 150 is in a state in which the main supply port 150 is opened as shown in FIG. 22A, so that the foreign matter 160 is reliably discharged from the common liquid chamber 55. Is done.

  In this embodiment, when the mesh size of the filter 158 shown in FIG. 22 is d0, and the hole diameter of the supply restrictor 53A is d1 and the hole diameter of the nozzle 51 is d2, as shown in FIG. It is desirable to be satisfied.

d0 <d1 <d2 (4)
By making the mesh size d0 of the filter 158 smaller than the hole diameter d1 of the supply restrictor 53A, foreign matter larger than the hole diameter d1 of the supply restrictor 53A does not enter the common liquid chamber 55, and the supply restrictor 53A is prevented from being clogged. Can do. Even if foreign matter larger than the hole diameter d1 of the supply restrictor 53A is mixed, the cap 64 is brought into close contact with the nozzle surface 50A of the print head 50 while flowing the ink into the common liquid chamber 55 as described above. By applying pressure to the position corresponding to 64 nozzles 51 in the direction of arrow B in FIG. 23, the clogging of the supply throttle 53 </ b> A is eliminated, and foreign matter can be reliably discharged from the common liquid chamber 55.

  On the other hand, by making the hole diameter d2 of the nozzle 51 larger than the hole diameter d1 of the supply restrictor 53A, foreign matter or the like that has passed through the supply restrictor 53A can be reliably discharged from the nozzle 51.

  FIG. 24 shows an example of a waveform of a drive signal applied to the piezoelectric element 58 (hereinafter referred to as a drive waveform). The waveform 200 shown in the figure is applied during normal liquid ejection except when removing foreign matter, whereas the waveform 210 having a voltage larger than that of the waveform 200 is applied when removing foreign matter. In any waveform 200, 210. The meniscus is drawn into the nozzle 51 in the section A, the ink is ejected from the nozzle 51 in the section B, and the meniscus vibration is attenuated in the section C. As described above, when removing the foreign matter, by applying a drive waveform having a voltage larger than that during normal liquid ejection, the backflow from the supply restrictor 53A can be increased, and the foreign matter can be easily removed.

  The liquid ejection head of the present invention and the image forming apparatus including the liquid ejection head have been described in detail above. However, the present invention is not limited to the above examples, and various improvements and modifications can be made without departing from the spirit of the present invention. Of course, deformation may be performed.

1 is an overall configuration diagram showing an outline of an embodiment of an ink jet recording apparatus as an image forming apparatus according to the present invention. FIG. 2 is a plan view of a main part around a printing unit of the ink jet recording apparatus shown in FIG. 1. It is a principal block diagram showing the system configuration of the ink jet recording apparatus. FIG. 3 is a plan perspective view illustrating a structural example of a print head. FIG. 5 is an enlarged view showing a nozzle arrangement of the print head shown in FIG. 4. FIG. 3 is a perspective perspective view illustrating a part of the schematic configuration inside the print head. 5 is a flowchart showing a flow of manufacturing the print head 50. FIG. FIG. 8 is a cross-sectional view corresponding to the 8-8 cross-sectional position in FIG. 4 and illustrating a state before the supply restrictor and the nozzle are processed. FIG. 8 is a cross-sectional view taken along 8-8 in FIG. 4 and is a cross-sectional view illustrating a state after the supply restrictor and the nozzle are processed. FIG. 8 is a cross-sectional view illustrating another configuration example of the print head 50 and corresponding to the 8-8 cross section in FIG. 4. It is explanatory drawing which showed the outline of the processing method of a supply throttle and a nozzle. It is a top view of the mask shown in FIG. (A), (b) is a top view of the diaphragm in which the supply aperture was formed with the processing method shown in FIG. FIG. 12 is a plan perspective view of a print head in which a supply restrictor and nozzles are formed by the processing method shown in FIG. 11. FIG. 6 is a plan perspective view illustrating another example of the structure of the print head. FIG. 6 is a plan perspective view illustrating another example of the structure of the print head. FIG. 17 is an enlarged view showing a nozzle arrangement of the print head shown in FIG. 16. It is explanatory drawing of the droplet ejection timing of the print head shown in FIG.16 and FIG.17. It is explanatory drawing which showed the outline of the other processing method of a supply aperture_diaphragm | restriction and a nozzle. It is a schematic diagram which shows the structure of the ink supply system of an inkjet recording device. FIG. 21 is a plan perspective view showing an ink supply system of the print head shown in FIG. 20. (A), (b) is sectional drawing (22-22 sectional drawing in FIG. 21) which shows the structural example of a filter. It is explanatory drawing which shows the outline | summary of the method of eliminating the clogging of a supply throttle. It is explanatory drawing showing an example of the drive signal waveform.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Inkjet recording apparatus, 50 ... Print head, 50A ... Nozzle surface, 50B ... Non-nozzle surface, 51 ... Nozzle, 60 ... Nozzle flow path, 52 ... Pressure chamber, 53 ... Ink supply port, 53A ... Supply throttle, 55 ... Common liquid chamber, 56 ... diaphragm (common electrode), 57 ... individual electrode, 58 ... piezoelectric element, 62 ... buffer tank, 63 ... buffer tank, 64 ... cap, 90 ... wiring member, 91 ... wiring plate, 92 ... flexible Cable 94 94 Nozzle plate 98 Insulation / protection film 100 Irradiation hole 102 Sealing member 106 Excess adhesive 128 Mask 130 132 Telecentric lens system 158 Filter P1, P2, P3 …pump

Claims (12)

A plurality of outlets for discharging liquid;
A plurality of pressure chambers communicating with each of the plurality of discharge ports;
A common liquid chamber in which liquid to be supplied to the plurality of pressure chambers is stored;
A supply throttle that constitutes at least a part of a supply flow path that communicates the common liquid chamber and the pressure chamber;
The minimum opening size of the discharge port is configured to be larger than the minimum opening size of the supply throttle ,
The ratio of the flow path loss of the discharge port and the supply throttle respectively corresponding to the plurality of pressure chambers is configured uniformly between the pressure chambers ,
In the common liquid chamber, a supply port to which a pipe member for supplying liquid is connected is formed,
The supply port is provided with a filter member having a valve function of performing an opening and closing operation by a liquid flow,
When the liquid flows in the direction from the tube member side toward the common liquid chamber side, the supply port is closed by the filter member, and liquid is supplied to the common liquid chamber via the filter member, and the common liquid When the liquid flows in the direction from the chamber side toward the tube member side, at least a part of the supply port is opened, and the liquid is discharged from the common liquid chamber without passing through the filter member. head.   The discharge port is configured to have a tapered shape gradually narrowing in the liquid discharge direction, and the supply throttle is gradually narrowed in the liquid supply direction corresponding to the direction from the common liquid chamber side to the pressure chamber side. The liquid ejection head according to claim 1, wherein the liquid ejection head is configured in a tapered shape.   3. The liquid discharge according to claim 1, wherein at least a part of the discharge port and the supply throttle communicating with each of the pressure chambers is processed with a laser beam that has passed through the same diffraction position. 4. head. A liquid discharge head according to any one of claims 1 to 3 ,
Pressure chamber deformation means for deforming one wall surface of the pressure chamber;
A liquid ejection apparatus, further comprising drive waveform application means for applying a drive waveform different from that during liquid ejection to the pressure chamber deforming means. A liquid discharge head according to any one of claims 1 to 3 ,
A pressing unit that is provided in the vicinity of the surface where the discharge port is formed and applies pressure to the liquid in the discharge port in a direction opposite to the flying direction of the liquid discharged from the discharge port; A liquid ejection apparatus characterized by the above. The liquid discharge head according to claim 1,
A plurality of outlets for discharging liquid;
A plurality of pressure chambers communicating with each of the plurality of discharge ports;
A piezoelectric element provided on the opposite side of the plurality of pressure chambers from the side on which the discharge ports are formed, and deforming each of the plurality of pressure chambers;
A common liquid chamber provided on the opposite side of the pressure chamber from the side on which the discharge port is formed, and supplying a liquid to the plurality of pressure chambers;
A sealing member that is provided on the side opposite to the piezoelectric element side of the common liquid chamber and seals the liquid in the common liquid chamber connected to a circuit that drives the piezoelectric element;
A wiring member configured to drive at least part of the common liquid chamber in a direction substantially perpendicular to a surface on which the piezoelectric element is disposed, and to drive the piezoelectric element;
A hole corresponding to the supply flow path is provided in at least a part of the sealing member substantially directly above a position where a supply flow path for communicating the common liquid chamber and the pressure chamber is formed;
The liquid discharge head, wherein the supply flow path corresponding to the hole is formed after the common liquid chamber is formed. An image forming apparatus comprising the liquid ejecting head or a liquid ejecting apparatus according to any one of claims 1 to 6. A method for manufacturing a liquid discharge head according to any one of claims 1 to 3 ,
A manufacturing method of a liquid discharge head, characterized in that an ejection port and a supply throttle communicating with each of the pressure chambers are processed with a laser beam passing through the same diffraction position. A method for manufacturing a liquid discharge head according to any one of claims 1 to 3 ,
A plurality of outlets for discharging liquid;
A plurality of pressure chambers communicating with each of the plurality of discharge ports;
A piezoelectric element provided on the opposite side of the plurality of pressure chambers from the side on which the discharge ports are formed, and deforming each of the plurality of pressure chambers;
A common liquid chamber provided on the opposite side of the pressure chamber from the side on which the discharge port is formed, and supplying a liquid to the plurality of pressure chambers;
A sealing member that is provided on the side opposite to the piezoelectric element side of the common liquid chamber and seals the liquid in the common liquid chamber connected to a circuit that drives the piezoelectric element;
A wiring member configured to drive at least part of the common liquid chamber in a direction substantially perpendicular to a surface on which the piezoelectric element is disposed, and to drive the piezoelectric element;
A hole corresponding to the supply flow path is provided in at least a part of the sealing member substantially directly above a position where a supply flow path for communicating the common liquid chamber and the pressure chamber is formed;
A method of manufacturing a liquid discharge head, wherein the supply flow path corresponding to the hole is formed after the common liquid chamber is formed. The liquid ejection according to claim 9 , wherein after forming the common liquid chamber and coating the common liquid chamber, at least a part of the supply flow path corresponding to the hole is formed. Manufacturing method of the head. Wherein said supply passage to the common liquid chamber is formed after forming method for manufacturing a liquid discharge head according to claim 9 or claim 10, characterized in that a diaphragm supply. The method of manufacturing a liquid discharge head according to claim 10 , wherein the coating treatment of the common liquid chamber is performed by flowing a coating treatment agent from an ink tank to the common liquid chamber.