JP3948591B2 - Acceleration power supply - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an acceleration power supply device used for a neutral particle injection device or the like of a fusion device.
[0002]
[Prior art]
The acceleration power supply device for a neutral particle injector is used for accelerating ions in a plasma gas, for example, hydrogen ions, and for accelerating ions neutralized on the way to other plasma. This is a high voltage DC power supply. The ion source that is a load is often short-circuited, and the acceleration power supply device needs to have a function of detecting a short-circuit and shutting off at high speed.
[0003]
An example of a conventional acceleration power supply of this type is configured as shown in FIG. The thyristor rectifier 11 is connected to an AC power source (not shown) via a transformer, and a plurality of thyristors for converting AC to DC are bridge-connected. The self-excited inverter 31 is formed by bridge-connecting a plurality of self-excited semiconductor elements such as GTO or IGBT, and converts direct current rectified by the thyristor rectifier 11 into alternating current. The DC reactor 12 and the smoothing capacitor 13 are connected in series and in parallel between the thyristor rectifier 11 and the inverter 31, respectively, and constitute a DC filter.
[0004]
The transformer 32 boosts the AC voltage that is the output of the inverter 31, and the diode rectifier 33 is connected to the secondary side of the boost transformer 32, and rectifies the AC voltage boosted by the transformer 32. A DC voltage is applied to the ion source 6 as a load through a smoothing capacitor 34 connected in parallel to the diode rectifier 33.
[0005]
The configuration described above is the main circuit, but the configuration of the control device will be described next. The voltage divider 2 includes resistors 21 and 22, and detects the voltage across the smoothing capacitor 13, that is, the input voltage of the inverter 31. The voltage divider 4 includes resistors 41 and 42, and detects the voltage across the smoothing capacitor 34, that is, the input voltage of the ion source 6.
[0006]
The overcurrent detection circuit 51 is inserted between the ion source 6 and the resistor 42 and receives the DC current detected by the DC current transformer 5 that detects the DC current flowing through the ion source 6. When an ion source 6 is short-circuited, an overcurrent detection signal 51s is output. The one-shot circuit 52 receives the overcurrent detection signal 51s, and generates an output signal 52s when the input is extended for an arbitrary period.
[0007]
The operation circuit 7 generates an operation signal 7s for the entire apparatus.
[0008]
When the operation signal 7s is “0”, the proportional gain 831 and the integral gain 832 in the voltage control regulator 83 for the thyristor rectifier 11 are set to “0”, and the gate from the phase control circuit 84 to the thyristor rectifier 11 is set. The signal is blocked.
[0009]
The AND circuit 71 outputs an output signal 71s when both the output signal 52s of the one-shot circuit and the operation signal 7s exist.
[0010]
An output signal 71s of the AND circuit 71 is generated for resetting the voltage control regulator 86 of the inverter 31 and for a gate block to the pulse modulation circuit 87. That is, when the AND circuit output signal 71s is “0”, the proportional gain 861 and the integral gain 862 in the voltage control regulator 86 are set to “0”, and the gate signal from the pulse modulation circuit 87 to the inverter 31 is blocked. Is done.
[0011]
The AND circuit output signal 71s is equal to the one-shot circuit output signal 52s when the operation signal 7s is “1”.
[0012]
The voltage setting unit 81 sets the output voltage of the thyristor rectifier 11 and the inverter 31, and the voltage setting value 81 s is input to one input terminal of the adder 82 with the polarity shown in the figure. The inverter input voltage 2 s detected by the voltage divider 2 is input to the other input terminal of the adder 82 with the polarity shown in the figure.
[0013]
In the voltage control adjuster 83, a proportional gain 831 and an integral gain 832 are connected in parallel, and an adder 833 is connected to the output side thereof, and a phase control signal 83s is amplified by amplifying a deviation between the voltage set value 81s and the inverter input voltage 2s. appear. The phase control circuit 84 receives the phase control signal 83 s and the operation signal 7 s and outputs a phase control signal for controlling the output voltage of the thyristor rectifier 11.
[0014]
The load voltage 4 s divided by the voltage divider 8 is input to one input terminal of the adder 85 with the illustrated polarity, and the voltage set value 81 s of the voltage setter 81 is input to the other input terminal of the adder 85. Is input with the polarity shown in the figure, and the deviation between the voltage setting value 81 s and the load voltage 4 s is output.
[0015]
In the voltage control adjuster 86, a proportional gain 861 and an integral gain 862 are connected in parallel, and an adder 863 is connected to the output side, and a deviation between the voltage set value 81s that is an output from the adder 85 and the load voltage 4s is obtained. Amplified and generates a phase control signal 83s.
[0016]
The pulse modulation circuit 87 inputs the output signal 71 s of the AND circuit 71 and the modulation signal 86 s from the voltage control regulator 86, and outputs a pulse modulation signal 87 s that controls the output voltage of the inverter 31.
[0017]
Here, there are two types of voltage control systems, the thyristor rectifier 11 and the inverter 31, for the following reason. Specifically, the acceleration power supply is required to have a voltage of 100 kV to 500 kV, a current of about 100 A, and a voltage ripple of 2% or less. The ion source 6 that is a load often generates a short circuit, but in order to secure an electrode of the ion source 6, the energy flowing into the ion source 6 needs to be 50 joules or less.
[0018]
The method shown in FIG. 8 is one of the methods for realizing the above, and a DC voltage obtained by smoothing the DC power exchanged from AC by the thyristor rectifier 11 by the DC reactor 12 and the smoothing capacitor 13 (as a specific example, 3 kV) is converted to AC voltage by the inverter 31, boosted to 100 kV to 500 kV by the transformer 32, converted again to DC by the diode rectifier 33, and ripple is reduced by the smoothing capacitor 34. Since the frequency of the inverter 31 is relatively high, the DC reactor is omitted. A short circuit of the ion source 6 is detected by the DC current transformer 5 and the overcurrent detection circuit 51, the inverter 31 is gate-blocked at high speed, and the inflow energy to the ion source 6 is reduced.
[0019]
The specifications of “voltage ripple is 2% or less” and “inflow energy is 50 joules or less” are contradictory requirements. In order to realize this, the frequency of the inverter 31 is increased as much as possible (specifically, 1 kHz) The capacitance of the capacitor 34 is made as small as possible.
[0020]
In addition, since it is desired to reduce the voltage drop at the time of load feeding to 5% or less, a relatively large-capacity smoothing capacitor 13 is provided, and a DC reactor 12 is provided to reduce ripple, so that the voltage across the smoothing capacitor 13 is constant. Thus, the thyristor rectifier 11 is controlled at a constant voltage.
[0021]
[Problems to be solved by the invention]
The conventional acceleration power supply device configured as described above has the following problems. This problem will be described with reference to FIG. 8 and FIG. 9 which is an operation explanatory diagram of the conventional embodiment.
[0022]
Time t shown in FIG. ₁ Until the inverter input voltage 2s is Vd ₁ The load voltage 4s is Vo ₁ Which is equal to the voltage setting value 81s. Time t ₁ When a short circuit occurs in the ion source 6, the pulse width T ₁ Since the overcurrent detection signal 51s is obtained and the inverter 31 is gate-blocked, the overcurrent state is restored immediately. ₁ The overcurrent detection signal 51 s is set to a period until the insulation of the ion source 6 as a load is restored by the one-shot circuit 52. ₂ (Till 10ms or more as a specific example) ₂ During this period, the proportional gain 861 and integral gain 862 in the inverter voltage control regulator 86 are set to “0” by the signal “0” of the AND circuit output signal 71 s, and the pulse modulation circuit 87 supplies the inverter 31 to the inverter 31. The gate signal is blocked.
[0023]
On the other hand, the operation for setting the proportional gain 831 and the integral gain 832 to “0” is not performed on the voltage control regulator 83 of the thyristor rectifier 11. This is because the time constants of the DC reactor 12 and the smoothing capacitor 13 are large and the time until restart is large (as a specific example, 200 ms or more).
[0024]
By blocking the gate signal to the inverter 31, the inverter input voltage 2 s becomes Vd as shown in FIG. 9 due to the energy stored in the DC reactor 12. ₁ Vd ₂ Rise to.
[0025]
Along with this, the phase control signal 83s is changed to the steady state level Ec. ₁ Lower level Ec ₂ And time t ₂ Until the saturation value “0” is reached in order to control the voltage to the minimum. ₂ Continue for a period of. Time t _Three When the one-shot circuit output signal 52 s becomes “1” at the time of, the inverter 31 enters the operating state again, and power is supplied to the ion source 6 at time t. _Four Then, as shown in the figure, the inverter input voltage 2s is Vd. _Three To drop.
[0026]
At the same time, the voltage control regulator 83 determines that the inverter input voltage 2s is lower than the voltage set value 81s, and the phase control signal 83s is EC. _Three To rise. Accordingly, time t _Five The inverter input voltage 2s is Vd _Four The phase control signal 83s becomes EC _Four To time t ₆ Again, steady state EC ₁ It becomes the value of.
[0027]
On the other hand, the pulse modulation signal 86s is received at time t. _Three Then, the AND circuit output signal 71s becomes "1" and the gate block of the inverter 31 is also released (referred to as gate deblocking), so that the load voltage 4s rises as quickly as possible to the voltage set value 81s, and the saturation level Ei _Three Until time t _Five The inverter input voltage 2s is Vd _Four Ei _Four Time t ₆ Thereafter, Ei in steady state _Four Return to.
[0028]
The behavior of the load voltage 4s is as follows. Time t ₁ When the ion source 6 is short-circuited, the capacitance of the capacitor 34 is selected as small as possible as described above, so that the electric charge is discharged rapidly, and the inverter 31 is also instantaneously gate-blocked. As shown, time t ₁ To t _Three Voltage Vo ₂ Is almost “0”.
[0029]
Time t _Three When the AND circuit output signal 71 s becomes “1”, a closed loop for voltage control is formed, and the pulse modulation signal 86 s rises as quickly as possible so that the load voltage 4 s reaches the voltage set value 81 s as described above, and Ei at the saturation level. _Three (As an example, integral gain T ₂ As shown in the figure, the waveform is substantially the same as that of the inverter input voltage 2s, and the time t _Four At Vo _Three The drop time t _Five At Vo _Four Overshoot and then time t ₆ Thereafter, the steady value Vo ₁ To settle down.
[0030]
The case where a short circuit has occurred in the ion source 6 has been described above for the sake of convenience, but the same can be said for the case of emergency stop / re-operation due to other causes.
[0031]
As described above, in the conventional acceleration power supply apparatus, when the inverter 31 is gate-blocked after the ion source 6 is short-circuited, the voltage drop and the voltage overshoot when the insulation of the ion source 6 is restored and the operation is restarted. Is 10% or more.
[0032]
For these reasons, there has been a demand for reducing the drop in the load voltage and overshooting as much as possible for stable ion acceleration operation.
[0033]
An object of the present invention is to solve the above-mentioned drawbacks, and to provide a control method for an acceleration power supply apparatus capable of remarkably improving a drop in load voltage and an overshoot.
[0034]
[Means for Solving the Problems]
In order to achieve the above object, an invention corresponding to claim 1 is directed to a thyristor rectifier that converts alternating current of an alternating current power source into direct current, and direct current obtained by the thyristor rectifier is input through a direct current filter, and the direct current is alternating current. In an accelerating power supply device comprising: an inverter for converting to a transformer; a transformer for transforming an alternating current obtained by the inverter; and a diode rectifier for rectifying the alternating current transformed by the transformer and supplying the direct current output to a load. The phase control signal supplied to the thyristor rectifier during the period until the load is in a normal state and the power supply to the load is stopped and the power supply to the load is started again is the power supply to the load A phase control signal adjusting means for maintaining the value immediately before the power supply is stopped and using the value of the phase control signal as an initial value when power supply to the load is restarted An acceleration power supply apparatus characterized by comprising.
[0035]
According to the invention corresponding to claim 1, the phase control signal is maintained during the re-operation by holding the phase control signal of the thyristor rectifier during the period until the load is in a normal state and the power supply to the load is stopped and then restarted. By using the value immediately before the power supply is stopped as the initial value, the drop in load voltage and the overshoot during re-operation can be prevented. In order to achieve the object, an invention corresponding to claim 2 is directed to a thyristor rectifier that converts alternating current of an alternating current power source into direct current, and direct current obtained by the thyristor rectifier is input through a direct current filter, and the direct current is alternating current. In an accelerating power supply device comprising: an inverter for converting to a transformer; a transformer for transforming an alternating current obtained by the inverter; and a diode rectifier for rectifying the alternating current transformed by the transformer and supplying the direct current output to a load. The phase control signal given to the thyristor rectifier is short-circuited during the period from when the load stops power supply due to an accident such as a short circuit, and then after the power is supplied to the load and restarted. And a phase control signal adjusting means for maintaining the value of the phase control signal as an initial value when the load is restarted. An acceleration power supply.
[0036]
According to the invention corresponding to claim 2, the phase of the thyristor rectifier is the period from when the load stops power supply due to an accident such as a short circuit, to the power supply to the load and then restarts. By holding the control signal and using the value immediately before the short circuit as the initial value of the phase control signal at the time of re-operation, it is possible to prevent a drop in load voltage and overshoot at the time of re-operation.
[0037]
In order to achieve the above object, an invention corresponding to claim 3 is directed to a thyristor rectifier that converts alternating current of an alternating current power source into direct current, and direct current obtained by the thyristor rectifier is input through a direct current filter, and the direct current is alternating current. In an accelerating power supply device comprising: an inverter for converting to a transformer; a transformer for transforming an alternating current obtained by the inverter; and a diode rectifier for rectifying the alternating current transformed by the transformer and supplying the direct current output to a load. The phase control signal supplied to the thyristor rectifier during the period until the load is in a normal state and the power supply to the load is stopped and the power supply to the load is started again is the power supply to the load A phase control signal adjusting means for maintaining the value immediately before the power supply is stopped and using the value of the phase control signal as an initial value when power supply to the load is restarted The pulse modulation signal applied to the inverter is held at the value immediately before the power supply to the load is stopped until the power supply to the load is stopped and the power supply to the load is started again. And an accelerating power supply apparatus comprising pulse modulation signal adjusting means for setting the value of the pulse modulation signal to an initial value when power supply to the load is restarted.
[0038]
According to the invention corresponding to claim 3, the phase control of the thyristor converter is performed during a period from when the load is in a normal state until the power supply to the load is stopped and the power supply to the load is started again. The signal and the pulse modulation signal of the inverter are held and the value immediately before the load is stopped is used as the initial value of each of the phase control signal and the pulse modulation signal at the time of reoperation. And overshoot can be prevented.
[0039]
In order to achieve the above object, an invention corresponding to claim 4 is directed to a thyristor rectifier that converts alternating current of an alternating current power source into direct current, and direct current obtained by the thyristor rectifier is input through a direct current filter, and the direct current is alternating current. In an accelerating power supply device comprising: an inverter for converting to a transformer; a transformer for transforming an alternating current obtained by the inverter; and a diode rectifier for rectifying the alternating current transformed by the transformer and supplying the direct current output to a load. When the load is short-circuited, the phase control signal applied to the thyristor rectifier is short-circuited until the power supply to the load is stopped and then the power is supplied to the load and restarted. The phase control signal adjusting means that maintains the value immediately before the load and sets the value of the phase control signal as the initial value when the load is restarted, and the load is short-circuited, etc. The pulse modulation signal applied to the inverter is held at a value immediately before the load is short-circuited during a period from when the power supply to the load is stopped, and then after the power supply to the load is performed and restarted. An acceleration power supply apparatus comprising: a pulse modulation signal adjusting unit that sets the value of the pulse modulation signal as an initial value when the load is restarted.
[0040]
According to the invention corresponding to claim 4, the phase control signal of the thyristor converter and the value of the voltage control regulator of the inverter, that is, the value of the pulse modulation signal are held for an arbitrary period from the detection of the load short circuit to the re-operation. By using the values immediately before the short circuit as the initial values of the phase control signal and the pulse modulation signal at the time of re-operation, it is possible to prevent a drop in load voltage and overshoot at the time of re-operation.
[0041]
In order to achieve the above object, the invention corresponding to claim 5 is characterized in that the impedance of a wiring circuit including a capacitor as the DC filter and electrically connected between the AC power supply and the thyristor rectifier. 5. The function unit according to claim 1, further comprising a function unit that gate-blocks the thyristor rectifier in the phase control signal adjustment unit when the capacitor is overcharged. Acceleration power supply.
[0042]
According to the invention corresponding to claim 5, in addition to the action of the invention according to any one of claims 1 to 4, it is possible to prevent the capacitor constituting the DC filter from being overcharged.
[0043]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0044]
<First Embodiment: Corresponding to Claim 1>
(Constitution)
FIG. 1 is a schematic configuration diagram for explaining a first embodiment of the present invention. An analog switch 91 is connected between an adder 82 and a voltage control regulator 83 in FIG. The circuit is closed when the signal 71s is "1", and is opened when the output signal 71s is "0". Except for this point, the configuration is the same as that of FIG.
[0045]
In the embodiment of FIG. 1, the phase control signal adjustment means includes an operation circuit 7, a voltage setting device 81, an adder 82, a voltage control adjustment device 83, and a phase control circuit 84, whereby the ion source 6 as a load is In the normal state, the phase control signal of the thyristor rectifier 11 is held during the period until the power supply to the load 6 is stopped and restarted, and the value immediately before the power supply is stopped as the initial value of the phase control signal at the time of restarting. By using it, it is possible to prevent a drop in load voltage and an overshoot during re-operation.
[0046]
(Function)
The operation of the first embodiment configured as described above will be described with reference to FIG.
[0047]
Time t ₁ The stop signal 7s is output from the operation circuit 7 at time t. _Three Period T until _Three Output, time t _Three When the operation resumption signal is output at, the following operation is performed. When the stop signal 7s is output, the AND circuit output signal 71s becomes “0” and the analog switch 91 is opened, so that the input of the voltage control regulator 83 becomes “0” and the integral gain 832 holds the value. To do.
[0048]
That is, the period T _Three The phase control signal 83s is Ec ₂ Ec ₁ Is exactly equal to
[0049]
Time t _Three Since the AND circuit output signal 71 s becomes “1”, the inverter 31 is gate-deblocked and supplied to the ion source 6, so that the inverter input voltage 2 s is Vd ₂ Decrease gradually and time t _Four Vd _Three However, the degree of the decrease is much less than that of FIG.
[0050]
This is because the time t of the phase control signal 83s _Three The initial value at is Ec ₁ (= Ec ₂ This is because of Therefore, as shown in the figure, the fluctuation of the subsequent phase control signal (83s) is also small. Further, the fluctuation of the inverter input voltage 2s is reduced.
[0051]
The behavior of the pulse modulation signal 86s is determined at time t. _Three Drop of inverter input voltage 2s Vd _Three Since the degree of is extremely small, there is no overshoot or undershoot as shown in FIG.
[0052]
Therefore, the load voltage 4s also drops as shown in the figure, and no overshoot occurs.
[0053]
<Second Embodiment: Corresponding to Claim 2>
(Constitution)
The schematic configuration diagram of the second embodiment of the present invention is the same as FIG. 1 except that the phase control signal adjusting means stops the power supply to the ion source 9 when the ion source 9 is short-circuited, After that, the period T from when power is supplied to the ion source 9 until it is restarted ₂ The phase control signal applied to the thyristor rectifier 11 is held at a value immediately before the ion source 9 is short-circuited, and the value of the phase control signal is set as an initial value when the ion source 9 is restarted. Is a point.
[0054]
(Function)
The operation of the second embodiment configured as described above will be described with reference to FIG.
[0055]
Time t ₁ When the short circuit occurs in the ion source 6, the AND circuit output signal 71 s becomes “0”, the analog switch 91 is opened, the input of the voltage control regulator 83 becomes “0”, and the integral gain 832 sets the value. Hold.
[0056]
That is, the period T ₂ The phase control signal 83s is Ec ₂ Ec ₁ Is exactly equal to Time t _Three When the AND circuit output signal 71 s becomes “1”, the inverter 31 is gate-deblocked and supplied to the ion source 6, so that the inverter input voltage 2 s becomes Vd ₂ Decrease gradually and time t _Four Vd _Three However, the degree of the decrease is much less than that of FIG.
[0057]
This is because the time t of the phase control signal 83s _Three The initial value at is Ec ₁ (= Ec ₂ This is because of Therefore, as shown in the figure, the fluctuation of the subsequent phase control signal 83s is also small. Further, the fluctuation of the inverter input voltage 2s is reduced.
[0058]
The behavior of the pulse modulation signal 86s is determined at time t. _Three Drop of inverter input voltage 2s Vd _Three Since the degree of is extremely small, there is no overshoot or undershoot as shown in FIG.
[0059]
Therefore, the load voltage 4s also drops as shown in the figure, and no overshoot occurs.
[0060]
<Third Embodiment: Corresponding to Claim 3>
(Constitution)
FIG. 4 is a diagram showing a schematic configuration of the third embodiment. In the embodiment of FIG. 1, an analog switch 92 is further provided between the adder 85 and the voltage controller 86, and the analog switch 92 is the same as 91. The AND circuit 71 is closed when the output signal 71 s is “1” and open when it is “0”. Structures other than this point are the same as those in FIG. 1, and the same portions are denoted by the same reference numerals and description thereof is omitted.
[0061]
In the embodiment of FIG. 4, the phase control signal adjustment means includes an operation circuit 7, a voltage setting unit 81, an adder 82, a voltage control adjustment unit 83, a phase control circuit 84, and an analog switch 91. In the embodiment of FIG. 4, the pulse modulation signal adjustment means includes the DC current transformer 5, the overcurrent detection circuit 51, the one-shot circuit 52, the operation circuit 7, the AND circuit 71, the voltage setting unit 81, and the adder 85. , A voltage control regulator 86, a pulse modulation circuit 87, and an analog switch 92.
[0062]
Since the third embodiment includes the phase control signal adjustment unit and the pulse modulation signal adjustment unit, the load is in a normal state, the power supply to the load is stopped, and the power supply to the load is again performed. During the period until the start, the values of the phase control signal of the thyristor converter and the pulse modulation signal of the inverter are held, and the values immediately before the load stop are used as the initial values of the phase control signal and the pulse modulation signal at the time of restart. By using it, it is possible to prevent a drop in load voltage and an overshoot during re-operation.
[0063]
(Function)
The operation of the third embodiment configured as described above will be described with reference to the schematic configuration diagram of FIG. 4 and the time chart of FIG. Time t ₁ The stop signal 7s is output from the operation circuit 7 at time t. _Three Period T until _Three Output, time t _Three When the operation resumption signal is output at, the following operation is performed. When the stop signal 7s is output, the AND circuit output signal 71s becomes “0” and the analog switch 91 is opened, so that the input of the voltage control regulator 83 becomes “0” and the integral gain 832 holds the value. To do.
[0064]
That is, the period T _Three Level Ei of the pulse modulation signal 86s of ₂ Is Ei ₁ Is exactly equal to Time t _Three When the AND circuit output signal 71 s becomes “1”, the inverter 31 is gate-deblocked and the power is supplied to the ion source 6, but the time t as the pulse modulation signal 86 s ₁ Previous value Ei ₁ 1 is used, in addition to the effect of the embodiment of FIG. 1, a rise faster than the load voltage shown in FIG. 2 (10 ms or less in a specific example) can be obtained.
[0065]
<Fourth Embodiment: Corresponding to Claim 4>
(Constitution)
The schematic configuration of the fourth embodiment is the same as that of FIG. 4 except that when the load is short-circuited, the power supply to the load is stopped, and then the power supply to the load is performed to restart operation. The phase control signal applied to the thyristor rectifier is maintained at a value immediately before the load is short-circuited until the load is short-circuited, and the value of the phase control signal is set as an initial value when the load is restarted. Accordingly, during the period from when the power supply to the load is stopped, and then after the power supply to the load is performed and restarted, the pulse modulation signal applied to the inverter is held at a value immediately before the load is short-circuited, and The value of the pulse modulation signal is configured to be an initial value when the load is restarted. Structures other than this point are the same as those in FIG. 1, and the same portions are denoted by the same reference numerals and description thereof is omitted.
[0066]
(Function)
The operation of the fourth embodiment configured as described above will be described with reference to FIG. Time t ₁ When the short circuit occurs in the ion source 6, the AND circuit output signal 71 s becomes “0” and the analog switch 91 is opened, so that the input of the voltage control regulator 86 becomes “0”, and the integral gain 862 holds the value. To do. That is, the period T ₂ Level Ei of the pulse modulation signal 86s of ₂ Is Ei ₁ Is exactly equal to Time t _Three When the AND circuit output signal 71 s becomes “1”, the inverter 31 is gate-deblocked and the power is supplied to the ion source 6, but the time t as the pulse modulation signal 86 s ₁ Previous value Ei ₁ 1 is used, in addition to the effect of the embodiment of FIG. 1, a rise faster than the load voltage shown in FIG. 3 (10 ms or less in a specific example) can be obtained.
[0067]
<Fifth Embodiment: Corresponding to Claim 5>
In the fifth embodiment described above, when the impedance of a transformer (not shown) for the thyristor rectifier 11 (a transformer connected between the thyristor rectifier 11 and an AC power source (not shown) connected thereto) is relatively small, That is, when there is no difference in the required control delay angle of each thyristor rectifier 11 at full load, for example, T in FIG. ₂ This is a case where the gate block of the thyristor rectifier 11 is not required.
[0068]
However, when the impedance of the transformer (not shown) for the thyristor rectifier 11 is relatively large, the required control delay angle at full load is smaller than that at no load, and the time t ₁ Since the capacitor 13 is overcharged thereafter, T ₂ It is better to gate block the thyristor rectifier 11 during this period, and the configuration in this case is shown in the schematic configuration diagram of FIG. That is, in FIG. 4, the output signal 7s of the operation circuit 7 is stopped being input as one of the input signals of the phase control circuit 84, and the output signal 71s of the AND circuit 71 is input instead. Is.
[0069]
T in FIG. ₂ FIG. 9 shows a fifth embodiment of the present invention in which the thyristor rectifier 11 is gate-blocked for a period of time. 4 is that the output signal 71 s of the AND circuit 71 is input as one input signal of the phase control circuit 84 instead of the output signal 7 s of the operation circuit 7.
[0070]
Even if the configuration of FIG. 7 is applied to the embodiment of FIG. 1, the same effects as those of the fifth embodiment can be obtained.
[0071]
【The invention's effect】
According to the present invention described above, it is possible to provide an acceleration power supply device capable of obtaining the following operational effects.
[0072]
According to the invention corresponding to claim 1, the phase control signal is maintained during the re-operation by holding the phase control signal of the thyristor rectifier during the period until the load is in a normal state and the power supply to the load is stopped and then restarted. By using the value immediately before the power supply is stopped as the initial value, the drop in load voltage and the overshoot during re-operation can be prevented.
[0073]
According to the invention corresponding to claim 2, the phase of the thyristor rectifier is the period from when the load stops power supply due to an accident such as a short circuit, to the power supply to the load and then restarts. By holding the control signal and using the value immediately before the short circuit as the initial value of the phase control signal at the time of re-operation, it is possible to prevent a drop in load voltage and overshoot at the time of re-operation.
[0074]
According to the invention corresponding to claim 3, the phase control of the thyristor converter is performed during a period from when the load is in a normal state until the power supply to the load is stopped and the power supply to the load is started again. The signal and the pulse modulation signal of the inverter are held and the value immediately before the load is stopped is used as the initial value of each of the phase control signal and the pulse modulation signal at the time of reoperation. And overshoot can be prevented.
[0075]
According to the invention corresponding to claim 4, the phase control signal of the thyristor converter and the value of the voltage control regulator of the inverter, that is, the value of the pulse modulation signal are held for an arbitrary period from the detection of the load short circuit to the re-operation. By using the values immediately before the short circuit as the initial values of the phase control signal and the pulse modulation signal at the time of re-operation, it is possible to prevent a drop in load voltage and overshoot at the time of re-operation.
[0076]
According to the invention corresponding to claim 5, in addition to the action of the invention according to any one of claims 1 to 4, it is possible to prevent the capacitor constituting the DC filter from being overcharged.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram for explaining a first embodiment of an acceleration power supply device according to the present invention;
FIG. 2 is a view for explaining the operation of the first embodiment;
FIG. 3 is a diagram for explaining the operation of the second embodiment;
FIG. 4 is a schematic configuration diagram for explaining a third embodiment of the acceleration power supply device of the present invention;
FIG. 5 is a diagram for explaining the operation of the third embodiment;
FIG. 6 is a view for explaining the operation of the fourth embodiment.
FIG. 7 is a schematic configuration diagram for explaining a fifth embodiment of an acceleration power supply device according to the present invention;
FIG. 8 is a schematic configuration diagram showing an example of a conventional acceleration power supply device.
FIG. 9 is a diagram for explaining the operation of FIG. 8;
[Explanation of symbols]
2 ... Voltage divider
4 ... Voltage divider
5 ... DC current transformer
6 ... Load, eg ion source
7. Operation circuit
8 ... Voltage divider
11 ... Thyristor rectifier
12 ... DC reactor
13: Smoothing capacitor
31 ... Self-excited inverter
32 ... Step-up transformer
33 ... Diode rectifier
34: Smoothing capacitor
51. Overcurrent detection circuit
52. One-shot circuit
71 ... AND circuit
81 ... Voltage setting device
82 ... Adder
83 ... Voltage control regulator
84 ... Phase control circuit
85 ... Adder
86 ... Voltage control regulator
87. Pulse modulation circuit
91 ... Analog switch
92 ... Analog switch

Claims (5)

A thyristor rectifier that converts alternating current of an alternating current power source into direct current, an inverter that inputs the direct current obtained by the thyristor rectifier through a direct current filter and converts the direct current to alternating current, and a transformer that transforms the alternating current obtained by the inverter And an accelerating power supply device comprising a diode rectifier that rectifies alternating current transformed by the transformer and supplies the direct current output to a load,
The phase control signal supplied to the thyristor rectifier during the period until the load is in a normal state and the power supply to the load is stopped and the power supply to the load is started again is the power supply to the load. Accelerating power supply comprising phase control signal adjusting means for maintaining a value immediately before being stopped and using the value of the phase control signal as an initial value when power supply to the load is restarted apparatus. A thyristor rectifier that converts alternating current of an alternating current power source into direct current, an inverter that inputs the direct current obtained by the thyristor rectifier through a direct current filter and converts the direct current to alternating current, and a transformer that transforms the alternating current obtained by the inverter And an accelerating power supply device comprising a diode rectifier that rectifies alternating current transformed by the transformer and supplies the direct current output to a load,
The phase control signal applied to the thyristor rectifier is short-circuited during the period from when the load stops power supply due to an accident such as a short circuit, and then after the power is supplied to the load and restarted. An accelerating power supply apparatus comprising: a phase control signal adjusting unit that holds the value immediately before the operation and sets the value of the phase control signal as an initial value when the load is restarted. A thyristor rectifier that converts alternating current of an alternating current power source into direct current, an inverter that inputs the direct current obtained by the thyristor rectifier through a direct current filter and converts the direct current to alternating current, and a transformer that transforms the alternating current obtained by the inverter And an accelerating power supply device comprising a diode rectifier that rectifies alternating current transformed by the transformer and supplies the direct current output to a load,
The phase control signal supplied to the thyristor rectifier during the period until the load is in a normal state and the power supply to the load is stopped and the power supply to the load is started again is the power supply to the load. A phase control signal adjusting means that holds the value immediately before being stopped and sets the value of the phase control signal as an initial value when power supply to the load is restarted;
During the period until the power supply to the load is stopped and the power supply to the load is started again, the pulse modulation signal applied to the inverter is held at the value immediately before the power supply to the load is stopped. And a pulse modulation signal adjusting means that sets the value of the pulse modulation signal as an initial value when power supply to the load is restarted;
An accelerating power supply device comprising: A thyristor rectifier that converts alternating current of an alternating current power source into direct current, an inverter that inputs the direct current obtained by the thyristor rectifier through a direct current filter and converts the direct current to alternating current, and a transformer that transforms the alternating current obtained by the inverter And an accelerating power supply device comprising a diode rectifier that rectifies alternating current transformed by the transformer and supplies the direct current output to a load,
When the load is short-circuited, the phase control signal applied to the thyristor rectifier is short-circuited until the power supply to the load is stopped, and then the power is supplied to the load and restarted. A phase control signal adjusting means that holds the previous value and sets the value of the phase control signal as an initial value when the load is restarted;
The pulse modulation signal applied to the inverter is short-circuited during a period until the load is stopped due to an accident such as a short circuit and then the power is supplied to the load and then restarted. An accelerating power supply apparatus comprising: a pulse modulation signal adjusting unit that maintains a value immediately before and sets the value of the pulse modulation signal as an initial value when the load is restarted. When the capacitor is overcharged due to the magnitude of the impedance of a wiring circuit that includes a capacitor as the DC filter and is electrically connected between the AC power supply and the thyristor rectifier, the phase control signal The acceleration power supply apparatus according to any one of claims 1 to 4, wherein functional means for gate-blocking the thyristor rectifier is added to the adjusting means.

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