JP3943701B2 - Ozone generator - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ozone generator used in water treatment facilities, air purifiers, deodorizers, and the like, and more particularly to an ozone generator capable of adhering a high dielectric constant dielectric to an electrode with good adhesion.
[0002]
[Prior art]
Conventionally, an ozone generator has one electrode, the other electrode arranged with a gap between the one electrode, and a high voltage power source for applying a high voltage between the one electrode and the other electrode. Things are known. A dielectric is provided on one electrode surface.
[0003]
In such an ozone generator, source gas (air or oxygen) is supplied between one electrode and the other electrode. During this time, a high voltage is applied between one electrode and the other electrode, and a silent discharge is generated between the one electrode and the other electrode, and ozone is generated from the source gas by this discharge.
[0004]
For the members used in such ozone generators, ozone resistance is required, so the electrodes and dielectrics are stainless steel, glass, quartz, ceramic, sand, asbestos, polyvinylidene chloride, fluororesin, etc. In addition, iron or aluminum can be used in the dry state.
[0005]
The materials for the ozone generator are selected considering not only ozone, which has a stronger oxidizing power than conventional ozone, but also the durability against excited oxygen atoms and nitrogen molecules, replicating nitrogen oxides, and nitric acid generated by moisture absorption. .
[0006]
The other electrode is cooled by cooling water. In this case, slime generation that reduces cooling efficiency, mixing of rust and earth and sand are prevented, and pH or various ion pigments that cause corrosion are taken into consideration. It is necessary to improve the cooling water quality. In particular, when cooling water containing a large amount of chlorine ions is used, even a stainless steel having good corrosion resistance may cause gap corrosion and the like, often resulting in inconvenience for electrode life and periodic inspection.
[0007]
[Problems to be solved by the invention]
By the way, stainless steel is most often used as an electrode material. For example, a stainless steel film is attached to the inner surface of borosilicate glass by sputtering to form a high-voltage electrode, and the ground electrode is made of stainless steel with a mirror-polished inner surface. May occur. In this case, since both electrodes use stainless steel, when using air as the source gas, both electrodes show strong corrosion resistance against nitric acid generated by oxidation and moisture absorption of nitrogen present in the air.
[0008]
However, since the difference in thermal expansion coefficient between glass and stainless steel is large, the stainless steel film thickness cannot be made sufficiently thick. Moreover, since stainless steel itself is not good in electric conductivity, it has a lot of electric conduction loss, which causes a temperature rise, and the ozone generation efficiency may not be raised beyond a certain level. In addition, an electrode in which aluminum is sprayed on the inside of the glass may be used, but this can form a thick film, but is weak against nitric acid corrosion. Furthermore, if a part of the glass becomes a bolus, there is a problem that the electrodes corrode immediately, which may be a cause of trouble even in an advanced water treatment system. In particular, when the dew point of the source gas is lowered, even if a slight leakage of cooling water occurs, nitric acid production is promoted, and corrosion at the aluminum electrode is often fatal.
[0009]
On the other hand, in order to prevent the temperature of the electrode from rising, both electrodes need to be cooled, and a technique for forming a high-voltage electrode with a strong metal tube and covering the surface with glass has been developed. According to the method, the surface of the film may be cracked and peeled off during repainting of the glass. In this case, if it peels even a little, nitric acid mixes from this part, and there exists a danger of spreading to the whole electrode surface from partial corrosion. As described above, in the conventional technology, the adhesion between the electrode and the glass is not sufficient, and it is necessary to improve the ozone generation rate by forming a dense film having a high dielectric constant using a thick film. .
[0010]
The present invention has been made in consideration of such points, and an object of the present invention is to provide an ozone generator capable of adhering a dielectric having a high dielectric constant to an electrode with good adhesion.
[0011]
[Means for Solving the Problems]
The present invention includes one electrode and the other electrode arranged with a gap between the one electrode and a high voltage applied between the one electrode, and the one electrode is made of at least one kind of metal. A lower dielectric composed mainly of the metal of the metallic substrate, and an upper dielectric composed mainly of a metal other than the metal of the metallic substrate, on the other electrode side of the one electrode. Are provided sequentially, and the thickness of the upper dielectric is larger than the thickness of the lower dielectric . According to the present invention, a high dielectric constant dielectric can be adhered to an electrode with good adhesion.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings. 1 to 3 are diagrams showing an embodiment of an ozone generator according to the present invention.
[0013]
As shown in FIG. 1 to FIG. 3, the ozone generator 10 includes one electrode 1 and the other electrode 2 arranged at a predetermined interval from the one electrode 1, A dielectric 3 is provided on the other electrode 2 side surface.
[0014]
An AC high voltage power source 12 is connected to one electrode 1 and the other electrode 2 of the ozone generator 10, and the other electrode 2 side is grounded. Furthermore, a raw material gas supply device 11 for supplying dry air (raw material gas) is connected to the ozone generator 10 in a gap between one electrode 1 and the other electrode 2. The dry air supplied in the gap between one electrode 1 and the other electrode 2 is ozonized when silent discharge occurs between the one electrode 1 and the other electrode 2, and is discharged as ozonized gas. Is done.
[0015]
The ozone generator 10 is provided with a cooling device 14 that mainly cools the other electrode 2 side.
[0016]
Next, one electrode 1 will be described in detail with reference to FIG. One electrode 1 has a metal substrate made of at least one kind of metal. The dielectric 3 includes a lower dielectric 3a and an upper dielectric 3b. Of these, the lower dielectric 3a is made of a material mainly composed of a metal substrate of one of the electrodes 1, and the upper dielectric 3b is It consists of the material which has metals other than the metal of the metal board | substrates of one electrode 1 as a main component. The thickness of the upper dielectric 3b is larger than the thickness of the lower dielectric 3a. For example, the thickness of the lower dielectric 3a is set in the range of 1 nm to 10 μm.
[0017]
Next, the material of each part will be described.
[0018]
First, the metal substrate constituting one electrode 1 is made of a metal mainly composed of at least one of aluminum, titanium, iron, nickel, chromium, vanadium, and palladium. In the case of aluminum, since the strength is weak and the corrosion resistance is somewhat inferior, it is desirable to use a material containing at least one of zinc, copper, silicon, magnesium, etc. up to 10 wt%. Of course, in the case where the dielectric 3 is strong and the metal substrate does not require strength, pure aluminum may be used. In addition, it is desirable to improve the strength by adding up to 20 wt% of nickel, copper, etc. to palladium, but since it is an expensive material, it can be attached to the dielectric 3 as a thin film and used as a thin film electrode, or another metal rigid body It is better to adopt a method of growing as a thin film on top.
[0019]
Titanium and vanadium are most desirable as a metal substrate because of the good adhesion of the oxide film to the dielectric. Nickel, copper, aluminum, molybdenum or the like may be added as a complement to strength. When using iron and nickel as a metal substrate, in order to match the thermal expansion coefficient with that of the dielectric 3, it is necessary to adjust nickel as an iron / nickel alloy within a range of 30-45% and use it as a low thermal expansion metal. preferable. In this case, cobalt may be added up to 10 wt% in order to increase the strength of the oxide film. When stainless steel is used as a metal substrate, it is most convenient as a metal substrate because it is sufficient in strength and corrosion resistance. Since chromium alone has poor moldability and cannot be used as a tube, it can be used as a chromium film as in the previous palladium or as an alloy with iron or nickel.
[0020]
The other electrode 2 is made of stainless steel.
[0021]
Next, the lower dielectric 3a is a dielectric layer mainly composed of a metal of a substrate constituting one electrode 1, and includes an upper dielectric 3b having a high dielectric constant and one electrode 1 made of a metal substrate. It has a function as a buffer for difference in thermal expansion coefficient and a buffer for chemical structure change. Here, the dielectrics 3a and 3b are layers having a dielectric constant higher than that of a metal, and are composed of an oxide layer, a nitride layer, a boride layer, a sulfide layer, and the like. In view of adhesion to the dielectric layer, the most preferable dielectric is an oxide layer.
[0022]
The thickness of the lower dielectric 3a is in the range of 1 nm to 10 μm. If the thickness is less than this, the adhesion to the upper dielectric 3 b cannot be obtained, while if the thickness is higher than this, the metal substrate and the lower dielectric Peeling at the interface with the body 3a is likely to occur. More preferably, the lower dielectric 3a is 3 nm-1 μm. As a method of forming the lower dielectric 3a, a method of forming by oxidizing at room temperature or higher is conceivable. At this time, if there is an organic contaminant in the oxidizing atmosphere, it is necessary to clean it later. The atmosphere includes air, oxygen, carbon dioxide, etc., and depending on conditions, the atmosphere may be a wet atmosphere. However, if the oxidation is started from a low oxygen potential in the initial stage and the potential is increased in the second half, a dense film is likely to be formed. Desirably, the oxygen potential in the subsequent stage in the oxidation reaction is preferably at least twice that in the previous stage. The reaction temperature is desirably 700 ° C. or lower, and if it is higher than this, the film may become harsh. If it is a contamination layer of 1 nm or less, it may be peeled off when the upper dielectric 3b is formed.
[0023]
Even when a metal substrate is formed by a physical method such as vapor deposition or sputtering or a chemical method such as coating, it is necessary to provide the lower dielectric 3a at the interface with the upper dielectric 3b. For example, after attaching a metal substrate, oxygen may be gettered to the metal substrate by thermal diffusion or the like to form an oxide layer. The lower dielectric 3a needs to be thinner than the upper dielectric 3b. The thickness of the upper dielectric 3b is preferably at least 10 times the thickness of the lower dielectric 3a. Below this, the dielectric constant of the upper dielectric 3b is difficult to obtain, and when it is less than 1 times, the ozone generation efficiency is completely I can't expect it.
[0024]
As the upper dielectric 3b, silica glass or alumina can be used. In that case, it is effective to add up to 20% in total of oxides such as strontium, titanium, barium, lead, zinc, tantalum and yttrium. It is. In order to obtain the upper dielectric 3b having a higher dielectric constant, it is desirable that the main component is an oxide mainly having a perovskite or rutile structure. Of course, some of them are NaCl type or monoclinic and have a high dielectric constant, so that they may be used as the upper dielectric 3b. The main oxides include Ta ₂ O ₅ , SrTiO ₃ , TiO ₂ , BaSrTiO ₃ , PbZnO ₃ , ZrO _2, etc., and these have a stoichiometric ratio, but to a certain extent an indefinite ratio. It does n’t matter. If the total amount of iron, nickel, manganese, chromium, or the like as an additive element is added to the upper dielectric 3b to about 5 wt%, the stability of the dielectric constant of the upper dielectric 3b can be achieved.
[0025]
The main components of the upper dielectric 3b and the lower dielectric 3a must be different. This is because, when the main components of the upper dielectric 3b and the lower dielectric 3a are the same, cracks (small defects) formed in the dielectrics 3a and 3b penetrate to the metal substrate surface constituting one electrode 1. This is because the metal surface where the crack has reached is corroded. It is desirable that the upper dielectric 3b and the lower dielectric 3a have different crystal structures and crystal grain sizes.
[0026]
One may be amorphous and the other may be crystalline. In this case, there is an advantage that the crack stops at the interface between the upper dielectric 3b and the lower dielectric 3a and does not progress any further. Further, it is incidentally useful for absorbing stress due to a difference in thermal expansion coefficient between the upper dielectric 3b and the metal substrate. The method of attaching the upper dielectric 3b to the metal substrate constituting one electrode 1 may be either a physical method or a chemical method. Specifically, vapor deposition, ion plating, sputtering, chemical vapor deposition, CVD, plating, thermal spraying, coating, film adhesion, etc. are conceivable. In addition, when a thick film type dielectric 3 has to be formed, such as a cylindrical ozone generator, thermal spraying and coating methods are the best. Also, when one electrode 1 or dielectric 3 is formed on the same surface as a creeping discharge, sputtering, CVD or the like is suitable.
[0027]
In the case of creeping discharge, the dielectric 3 may be selectively attached to only one electrode 1 by screen printing or lithography, and one electrode 1 and the other electrode 2 are directly bonded via the dielectric 3. It ’s okay, and it ’s easier to make.
[0028]
If the material of the upper dielectric 3b is made of an amorphous material, there is no grain boundary and corrosion is less likely to occur. However, as described above, in the case of a high dielectric film, it is more convenient to be made of a crystalline material. It is. The degree of crystallinity of the upper dielectric 3b is desirably 30% or more. Below this, the effect of the high dielectric film is not so much. In order to form the upper dielectric 3b more easily, a dielectric film mainly composed of an oxide can be formed by applying an organometallic liquid and baking at a temperature of 100 ° C. or higher. The organometallic liquid is made thicker by repeatedly applying and drying with a liquid such as a metal alkoxide.
[0029]
According to the present embodiment, the upper dielectric 3b having a high dielectric constant can be brought into close contact with the one electrode 1 through the lower dielectric 3a with high accuracy.
[0030]
Next, another embodiment of the ozone generator will be described with reference to FIG. As shown in FIG. 4, the ozone generator 10 includes a cylindrical container 10a, and a glass tube functioning as an upper dielectric 3b is inserted into the cylindrical container 10a concentrically with the container 10a, and an upper dielectric made of a glass tube. One electrode 1 is provided on the inner surface of the body 3b.
[0031]
One electrode 1 on the inner surface of the upper dielectric 3b is connected to the high-voltage insulator 24 via the electrode terminal 22, the fuse 23, and the connection plate 32, and further communicates with the power source 12 (see FIG. 1) outside the container 10a. The other electrode (ground electrode) 2 is disposed in the container 10a, and the other electrode 2 is welded to the end plate 26 and has the same potential as the container 10a.
[0032]
Further, the container 10 a is sealed by the end plate 27, a raw material gas having a dew point of −60 ° C. is supplied from the raw material gas inlet 28 into the container 10 a, and the ozone gas in the container 10 a is discharged from the ozone outlet 29. On the other hand, the cooling water inserted from the cooling water introduction pipe 30 passes through the outside of the other grounded electrode 2 and is discharged from the cooling water discharge pipe 31.
[0033]
In FIG. 4, a lower dielectric 3a is provided between an upper dielectric 3b made of a glass tube and one electrode 1 provided on the inner surface of the upper dielectric 3b. The dielectric 3 is constituted by the dielectric 3b.
[0034]
In the embodiment shown in FIG. 4, one electrode 1, lower dielectric 3a and upper dielectric 3b are made of the same material as in the embodiment shown in FIGS.
[0035]
【Example】
Next, specific examples of the present invention will be described.
[0036]
Example 1
In order to produce an ozone generator having a structure as shown in FIG. 4, an electrode was produced as follows. First, a cylindrical glass tube having an inner diameter of 75 mm and a wall thickness of 2 mm and having a tip sealed was prepared, and the inner surface was washed with hydrofluoric acid and ion-exchanged water. The glass tube was placed in a sputtering apparatus, a rod-like sputtering target was inserted into the glass tube, and the inside of the chamber of the sputtering apparatus was sealed with argon. At this time, a small amount of dry air was also enclosed so that titanium oxide adhered to the inner surface of the glass tube in the initial sputtering. Next, reverse sputtering was performed at high frequency to clean the inner surface of the glass tube, and then titanium oxide was deposited to about 5 nm by high frequency normal sputtering. Thereafter, the degree of vacuum was raised and argon was sealed again to continue sputtering, and titanium coating with a film thickness of 300 nm was performed. In this manner, 50 glass tubes having titanium coated on the inner surface through titanium oxide were produced. In this case, the glass tube becomes the upper dielectric 3 b, the coated titanium oxide becomes the lower dielectric 3 a, and the coated titanium becomes one electrode 1.
[0037]
As one electrode (ground electrode) 2, a stainless steel tube was used. In this case, the end portion of the stainless steel tube is welded according to the end plate 26 having a hole with the same diameter, the stainless steel tube 2 and the end plate 26 are inserted into the container 10a, and the end plate 26 is inserted into the container 10a. Welded to. The number of the other electrodes 2 made of stainless steel tube was 25, and both ends were welded to the end plate 26. Thereafter, the upper dielectric 3b, the lower dielectric 3a, and one of the electrodes 1 that were produced earlier are connected to each other while holding the gap between the outside of the glass tube (upper dielectric) 3b and the inside of the stainless steel tube 2 at 1 mm through a spacer. Each was inserted into the stainless steel tube 2. An electrode terminal 22 and a fuse 23 were attached to one electrode 1, and the tip of the fuse 23 was attached to a high-pressure insulator 24 to complete the ozone generator 10. The ozone generator 10 was attached to the pedestal, and the ozone generator 10 was connected to a cooling device 14, a raw material gas supply device 11, and a power source 12. Next, when a raw material gas was passed through the ozone generator 10, a high voltage was applied, and discharge was performed at a high frequency, the ozone generation efficiency was good and the long-term stability was improved.
[0038]
Example 2
In order to make an ozone generator as shown in FIG. 2 as in Example 1, electrodes were made as follows. First, as one electrode 1, a stainless steel (SUS316) tube was used, one end surface of the stainless tube was sealed with a stainless material, and the outer surface of the stainless tube was once all mirror-polished and then averaged to 2 μm by sandblasting. . Thereafter, the outer surface of the stainless steel tube was oxidized in the air for 10 days to form an oxide film mainly composed of about 3 nm of chromium. Next, after removing surface contamination with ethanol, a tantalum oxide film having a thickness of 15 μm was formed by thermal spraying. Thereafter, an ozone generator was assembled in the same manner as in Example 1 and operated in the same manner as in Example 1. Good results were obtained. In this case, the stainless steel tube functions as one electrode 1, the oxide film functions as the lower dielectric 3a, and the tantalum oxide film functions as the upper dielectric 3b.
[0039]
Example 3
A passive film (thickness: 50 nm) mainly composed of chromium was formed on the outer surface of the drawn stainless steel tube with a nitric acid-based corrosive liquid. Thereafter, glass spraying was performed on the outer surface of the stainless steel tube. Others completed the ozone generator similarly to Example 1, 2, and when it was tested, the favorable result was obtained.
[0040]
In this case, the stainless steel tube functions as one electrode 1, the passive film functions as the lower dielectric 3a, and the sprayed glass functions as the upper dielectric 3b.
[0041]
Reference Example In producing the creeping discharge type ozone generator 10, an electrode was manufactured as follows. First, as shown in FIG. 5, one electrode 1 of a flat plate was provided on the lower surface of the upper dielectric (glass plate) 3b via the lower dielectric (metal oxide film) 3a. The other electrode 2 was provided on the upper surface of the upper dielectric 3b at regular intervals, and a voltage was applied between the electrodes 1 and 2 to cause silent discharge around the other electrode 2.
[0042]
The ozone generator 10 is configured by arranging a plurality of upper dielectrics 3b made of, for example, a glass plate as shown in FIG. 6, and the source gas is supplied between the other electrodes 2 on the surface of the upper dielectric 3b. .
[0043]
Next, the manufacturing method of the ozone generator 10 is demonstrated. First, a film having a thickness of 10 nm was provided on one surface of a glass plate serving as the upper dielectric 3b by a vanadium layer containing an oxide and a palladium layer, and an aluminum thin film having a thickness of 400 nm was formed thereon by sputtering.
[0044]
Next, silver-palladium electrodes were arranged in a strip shape by screen printing on one surface of the glass plate. Thereafter, baking was performed to evaporate organic components in the silver-palladium electrode, and then baking was performed over time to produce the ozone generator 10. In this case, the upper dielectric 3b is constituted by the glass plate, the lower dielectric 3a is constituted by the vanadium layer containing the oxide and the palladium layer, and one electrode 1 is constituted by the aluminum thin film. The silver-vanadium electrode constitutes the other electrode 2.
[0045]
Next, when the power source 12 and the source gas supply device 11 are attached to the ozone generator 10 and a high voltage is applied between one electrode 1 and the other electrode 2 to cause a silent discharge in the vicinity of the other electrode 2, a good ozone is obtained. I was able to obtain it stably. The source gas was dry oxygen, and the ozone generator 10 was air-cooled with a heat sink.
[0046]
Example 5
A crystalline aluminum nitride plate having a thickness of 3 mm, which is formed by oxidizing 20 nm on a copper surface having a thickness of 0.5 mm and then slightly oxidizing the surface, is crimped at 800 ° C., and the interface between the copper and the crystalline aluminum nitride plate A composite oxide of copper and aluminum having a thickness of 40 nm was formed.
[0047]
Thereafter, an oxide film of 10 nm was formed on the surface of the flat wire (1 mm width) of the Fe-40Ni-5Cr alloy. Next, the wires were arranged at equal intervals on the surface of the aluminum plate at equal intervals (2.5 mm width), and pressed at 600 ° C. to form an alloy wire pattern on the aluminum plate (see FIG. 6). . At this time, a composite oxide is generated at the interface between the alloy wire and the aluminum plate. In this way, the ozone generator 10 is manufactured. In this case, the copper plate serves as one electrode 1, the copper oxide layer serves as the lower dielectric 3a, and the aluminum plate serves as the upper dielectric 3b. The alloy wire made of Fe-40Ni-5Cr alloy is the other electrode 2.
[0048]
Similarly to Example 4, the power source 12 and the raw material gas supply device 11 are attached to the ozone generator 10 to feed the raw material gas, and a high voltage is applied between the copper film and the Fe—Ni—Cr alloy wire, and silent discharge is generated in the vicinity of the alloy wire. As a result, good ozone was stably obtained.
[0049]
Example 6
By a method similar to that in Example 1, an ozone generator 10 having the following configuration was completed.
Upper dielectric 3b: Yttrium-added alumina (0.3mm)
Lower dielectric 3a: Chromium oxide (3nm)
One electrode 1: stainless steel The other electrode 2: stainless steel
Example 7
The ozone generator 10 having the following configuration was completed in the same manner as in Example 1.
Upper dielectric 3b: Silica glass doped with zirconium oxide (0.1 μm)
Lower dielectric 3a: Ni, Cr added magnetite (20nm)
One electrode 1: stainless steel The other electrode 2: stainless steel
Example 8
By the same method as in Example 2, an ozone generator 10 having the following configuration was completed.
Upper dielectric 3b: strontium titanate (10 μm)
Lower dielectric 3a: Aluminum oxide (10nm)
One electrode 1: Al-3Cu-1Si
The other electrode 2: stainless steel
Example 9
By the same method as in Example 2, an ozone generator 10 having the following configuration was completed.
Upper dielectric 3b: titanium oxide (10 μm)
Lower dielectric 3a: iron nitride (partially iron oxide, 2 μm)
One electrode 1: stainless steel The other electrode 2: stainless steel
Example 10
By the same method as in Example 4, an ozone generator 10 having the following configuration was completed.
Upper dielectric 3b: iron-doped strontium barium titanate. However, this layer is formed by sputtering 300 nm on the lower dielectric Lower dielectric 3a: Aluminum oxide (10 nm)
One electrode 1: Al-2Zn-1Mg (5 mm plate)
The other electrode 2: gold-copper alloy
Example 11
An ozone generator 10 having the following configuration was completed by the same method as in Example 4.
Upper dielectric 3b: silicate glass (0.5 mm thick) with tantalum oxide (300 nm thickness) formed on the lower dielectric 3a: chromium oxide (5 nm)
One electrode 1: Chrome The other electrode 2: Nickel
The ozone generator 10 produced by these Examples 1-11 was excellent in the following points compared with the conventional one.
(1) Since it can be mounted without worrying about peeling of electrodes and dielectric films during handling during manufacturing, the manufacturing time has been greatly reduced. It also helped improve manufacturing yield.
(2) There was no film peeling during the operation period, and regular inspections could be reduced.
(3) Since film peeling does not occur, corrosion due to nitric acid generated by cooling water or discharge does not occur, and the desired efficiency can be maintained forever.
(4) A high dielectric film and a high dielectric could be used as the dielectric, and the ozone generation efficiency could be improved.
(5) Because it can withstand high pressure and high frequency discharge, the ozone generation efficiency could be improved.
(6) Ozone generation efficiency could be improved because a large humidity gradient can be created by cooling water or air cooling.
[0056]
【The invention's effect】
As described above, according to the present invention, since a dielectric having a high dielectric constant can be adhered to the electrode with good adhesion, a stable ozone generator with minimal problems of peeling between the electrode and the dielectric. Can be obtained. Moreover, ozone generation efficiency can be improved by using a dielectric having a high dielectric constant.
[Brief description of the drawings]
FIG. 1 schematically shows an embodiment of an ozone generator according to the present invention.
FIG. 2 is a diagram showing a state where a power source, a raw material gas supply device and a cooling device are connected to an ozone generator.
FIG. 3 is a diagram schematically showing an electrode structure of an ozone generator.
FIG. 4 is a view showing another embodiment of the ozone generator according to the present invention.
FIG. 5 is a side sectional view showing an electrode structure of a creeping discharge type ozone generator.
FIG. 6 is a diagram showing an internal structure of a creeping discharge type ozone generator.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 One electrode 2 The other electrode 3 Dielectric material 3a Lower dielectric material 3b Upper dielectric material 10 Ozone generator 11 Raw material gas supply device 12 Power supply 14 Cooling device

Claims (3)

One electrode,
It is arranged with a gap between the one electrode and the other electrode to which a high voltage is applied between the one electrode,
One electrode has a metal substrate made of at least one kind of metal, and the other electrode side of one electrode has a lower dielectric composed mainly of the metal of the metal substrate and a metal other than the metal of the metal substrate. And an upper dielectric mainly composed of
An ozone generator characterized in that the thickness of the upper dielectric is larger than the thickness of the lower dielectric .   2. The ozone generator according to claim 1, wherein the metal substrate is made of at least one of aluminum, iron, nickel, chromium, and titanium.   2. The ozone generator according to claim 1, wherein the lower dielectric has a thickness of 1 nm to 10 [mu] m.

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