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JP3853330B2 - Cleaning method - Google Patents

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JP3853330B2
JP3853330B2 JP2004122517A JP2004122517A JP3853330B2 JP 3853330 B2 JP3853330 B2 JP 3853330B2 JP 2004122517 A JP2004122517 A JP 2004122517A JP 2004122517 A JP2004122517 A JP 2004122517A JP 3853330 B2 JP3853330 B2 JP 3853330B2
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cleaning
box
cleaning fluid
fluid supply
peripheral wall
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JP2004268039A (en
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一也 森田
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Honda Motor Co Ltd
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Description

本発明は、例えばワークに穿設された孔等を洗浄する装置の改良に関する。   The present invention relates to an improvement in an apparatus for cleaning, for example, a hole formed in a workpiece.

従来、ワークに複数のねじ孔や袋孔等を加工したような際、加工部周辺に付着する切粉等を同時に洗浄するような装置が知られている。このような装置の一例は、例えば洗浄液を貯溜するボックスの周壁から各加工部の位置に対応して複数の洗浄ノズルを突設せしめたような装置であり、この装置の前面にワークを位置決めして各洗浄ノズルをワークの夫々の加工部に対向させた後、各洗浄ノズルから洗浄液を同時に噴出させて洗浄するようにしている。そして、このような装置は、例えば加工部の位置が異なる複数のワークにも適用出来るよう、予め複数種類のワークの加工部の位置に合せて多数の洗浄ノズルが突設されている。   2. Description of the Related Art Conventionally, there has been known an apparatus for simultaneously cleaning chips and the like adhering to the periphery of a processing portion when a plurality of screw holes, bag holes, or the like are processed on a workpiece. An example of such an apparatus is an apparatus in which a plurality of cleaning nozzles are projected from the peripheral wall of a box for storing cleaning liquid in correspondence with the position of each processing portion, and a workpiece is positioned on the front surface of this apparatus. The cleaning nozzles are made to face the respective processing parts of the workpiece, and then cleaning liquid is simultaneously ejected from the cleaning nozzles for cleaning. Such an apparatus is provided with a number of cleaning nozzles protruding in advance in accordance with the positions of the processing parts of a plurality of types of workpieces so that the apparatus can be applied to, for example, a plurality of works having different positions of the processing parts.

ところが上記のような多機種対応型の装置では、1機種のワークを洗浄している際に他の機種用の洗浄ノズルからも洗浄液が吐出し、洗浄液が無駄に消費されるばかりでなく、例えばワークの未加工部である平面部等に衝突した洗浄液が跳ね返って周囲に飛散し、加工部を洗浄している近隣の洗浄液と干渉して洗浄効果を弱めるような不具合があった。また、他の機種用の洗浄ノズルからも洗浄液が一斉に吐出されるため、吐出圧が下がり、洗浄効果が低下するという不具合もあった。   However, in the multi-model compatible apparatus as described above, when cleaning one type of workpiece, not only the cleaning liquid is discharged from the cleaning nozzle for other models, but the cleaning liquid is wasted, for example There has been a problem that the cleaning liquid that collided with a flat portion or the like that is an unprocessed part of the workpiece bounces back and scatters to the surroundings, interfering with a neighboring cleaning liquid that is cleaning the processed part, and weakening the cleaning effect. Further, since the cleaning liquid is discharged all at once from the cleaning nozzles for other models, there is also a problem that the discharge pressure is lowered and the cleaning effect is lowered.

また、多機種対応型でなく1機種のワークに対応する装置の場合でも、例えば加工孔として袋状の深孔と浅孔が混在して穿設されるような場合は、すべての加工部に同種類の洗浄流体を同じ吐出圧で噴き付けると、洗浄流体が干渉する機会が増えて洗浄効果が弱まったり、効率的な洗浄が行えない等の不具合があった。   Even in the case of an apparatus that supports one type of workpiece instead of a multi-model compatible type, for example, when a bag-like deep hole and shallow hole are mixedly drilled as processing holes, When the same type of cleaning fluid is sprayed at the same discharge pressure, there are problems such as an increase in the chance of the cleaning fluid interfering and weakening the cleaning effect or inability to perform efficient cleaning.

上記課題を解決するため本発明の請求項1においては、ワークの加工部に洗浄ノズルを対向させ、この洗浄ノズルから洗浄流体を噴き付けて加工部周辺を洗浄するようにした洗浄方法において、この洗浄方法は、洗浄流体を貯溜する洗浄流体供給部と、この洗浄流体供給部に連通する第1ボックスと、この第1ボックス内に収容され且つ洗浄流体供給部に連通する第2ボックスと、前記第1ボックスの周壁から外方に向けて突出する第1洗浄ノズル群と、前記第2ボックスの周壁から外方に向け前記第1ボックスの周壁を貫いて外部に突出する第2洗浄ノズル群を備えた洗浄装置を用い、前記第1ボックスと前記第2ボックスに異なる洗浄流体供給部から異なる流体を供給し、前記第1洗浄ノズル群と前記第2洗浄ノズル群から異なる洗浄流体を噴き付けるようにした。 In order to solve the above-mentioned problem, according to claim 1 of the present invention , in a cleaning method in which a cleaning nozzle is opposed to a workpiece processing portion, and a cleaning fluid is sprayed from the cleaning nozzle to clean the periphery of the processing portion. The cleaning method includes: a cleaning fluid supply unit that stores cleaning fluid; a first box that communicates with the cleaning fluid supply unit; a second box that is housed in the first box and communicates with the cleaning fluid supply unit; A first cleaning nozzle group projecting outward from the peripheral wall of the first box; and a second cleaning nozzle group projecting outward from the peripheral wall of the second box through the peripheral wall of the first box. A different cleaning flow is supplied from the first cleaning nozzle group and the second cleaning nozzle group by supplying different fluids from different cleaning fluid supply units to the first box and the second box. It was to the spraying.

また、請求項2においては、ワークの加工部に洗浄ノズルを対向させ、この洗浄ノズルから洗浄流体を噴き付けて加工部周辺を洗浄するようにした洗浄方法において、この洗浄方法は、洗浄流体を貯溜する洗浄流体供給部と、この洗浄流体供給部に連通する第1ボックスと、この第1ボックス内に収容され且つ洗浄流体供給部に連通する第2ボックスと、前記第1ボックスの周壁から外方に向けて突出する第1洗浄ノズル群と、前記第2ボックスの周壁から外方に向け前記第1ボックスの周壁を貫いて外部に突出する第2洗浄ノズル群を備えた洗浄装置を用い、前記第1ボックスと前記第2ボックスに洗浄流体供給部から供給する流体圧を異ならせ、前記第1洗浄ノズル群と前記第2洗浄ノズル群から噴き付ける洗浄流体の圧力を異ならせるようにした。 According to a second aspect of the present invention, there is provided a cleaning method in which a cleaning nozzle is opposed to a workpiece processing portion, and a cleaning fluid is sprayed from the cleaning nozzle to clean the periphery of the processing portion. A cleaning fluid supply section for storing, a first box communicating with the cleaning fluid supply section, a second box housed in the first box and communicating with the cleaning fluid supply section, and an outer wall from the peripheral wall of the first box A first cleaning nozzle group protruding toward the direction, and a cleaning device including a second cleaning nozzle group protruding outward from the peripheral wall of the second box through the peripheral wall of the first box, The fluid pressure supplied from the cleaning fluid supply unit to the first box and the second box is made different, and the pressure of the cleaning fluid sprayed from the first cleaning nozzle group and the second cleaning nozzle group is made different. Was Unishi.

請求項1において、例えばワークに深さの異なる加工孔を穿設したような場合に、深孔を洗浄する時は洗浄液を噴き付け、浅孔を洗浄する時は洗浄エアを噴き付ける等、加工態様等に応じて適切な洗浄流体の種類を選択すれば効率良く洗浄出来る。また、洗浄エアを乾燥工程に用いることも出来る。   In claim 1, for example, when machining holes having different depths are drilled in the workpiece, the cleaning liquid is sprayed when cleaning the deep holes, and the cleaning air is sprayed when cleaning the shallow holes. If an appropriate type of cleaning fluid is selected according to the mode and the like, cleaning can be performed efficiently. Also, cleaning air can be used in the drying process.

また、請求項2において、第1ボックスと第2ボックスの洗浄流体の流体圧を異ならせることで、加工態様等に応じた洗浄を効率良く行うことが出来る。すなわち、例えば前例の場合であれば、深孔に対しては流体圧を高め、浅孔に対しては流体圧を弱める。そして、これを請求項1の洗浄流体の種類変更と組合せれば一層洗浄効率が良くなる。   Moreover, in Claim 2, the washing | cleaning according to a process aspect etc. can be performed efficiently by making the fluid pressure of the washing fluid of a 1st box and a 2nd box differ. That is, for example, in the case of the previous example, the fluid pressure is increased for deep holes and the fluid pressure is decreased for shallow holes. If this is combined with the change in the type of cleaning fluid of claim 1, the cleaning efficiency is further improved.

本発明の実施例について添付した図面に基づき説明する。ここで図1は洗浄装置の断面図、図2は第1発明の要部図である。図1に示すように、洗浄装置は二重箱構造の外箱である第1ボックス1と、内箱である第2ボックス2を備え、この第2ボックス2は第1ボックス1内にボルト3、…等にて固定されている。   Embodiments of the present invention will be described with reference to the accompanying drawings. Here, FIG. 1 is a cross-sectional view of the cleaning apparatus, and FIG. 2 is a main part view of the first invention. As shown in FIG. 1, the cleaning device includes a first box 1 that is an outer box of a double box structure and a second box 2 that is an inner box. The second box 2 includes a bolt 3 in the first box 1, ... fixed by etc.

第1ボックス1の周壁には、複数の第1ノズル4a、…からなる第1洗浄ノズル群4が取り付けられている。すなわち、第1ボックス1の周壁には、特定機種のワークWの加工孔Wh、…に対応した位置に複数の貫通孔が設けられ、これら貫通孔に第1ノズル4a、…の基端部を密着状に固定している。   A first cleaning nozzle group 4 made up of a plurality of first nozzles 4 a,... Is attached to the peripheral wall of the first box 1. That is, the peripheral wall of the first box 1 is provided with a plurality of through holes at positions corresponding to the processing holes Wh,... Of the workpiece W of a specific model, and the base end portions of the first nozzles 4a,. It is fixed in close contact.

第2ボックス2の周壁にも、複数の第2ノズル5a、…からなる第2洗浄ノズル群5が取り付けられている。すなわち、この第2ボックス2の周壁には、他機種のワークの加工孔に対応する位置に複数の貫通孔が設けられ、これら貫通孔に第2ノズル5a、…の基端部が密着状に固定されている。また、これら第2ノズル5a、…は、第1ボックス1の周壁を貫いて外部に突出し、貫通部には密封用のシール部材6、…が設けられるとともに、第2ノズル5a…の先端部は第1ノズル4a、…先端部の線に一致するまで延出している。   A second cleaning nozzle group 5 composed of a plurality of second nozzles 5 a,... Is also attached to the peripheral wall of the second box 2. That is, the peripheral wall of the second box 2 is provided with a plurality of through holes at positions corresponding to the machining holes of other types of workpieces, and the base ends of the second nozzles 5a,. It is fixed. Further, these second nozzles 5a,... Project outside through the peripheral wall of the first box 1. Sealing members 6,... For sealing are provided in the penetrating portions, and the tip portions of the second nozzles 5a,. The first nozzle 4a extends until it coincides with the line at the tip.

また、第1、第2ノズル4a、5aは、ワークWの加工孔Whの径に合せて例えば2〜8mm程度の径にして確実に加工孔Wh内に向けて洗浄液を噴き付けることが出来るようにされるとともに、材質は、ワークWに接触してもワークWに損傷を与えることがないようワークWより軟質の例えば銅製パイプとしている。   Further, the first and second nozzles 4a and 5a have a diameter of, for example, about 2 to 8 mm in accordance with the diameter of the processing hole Wh of the workpiece W so that the cleaning liquid can be reliably sprayed into the processing hole Wh. In addition, for example, a copper pipe that is softer than the workpiece W is used so that the workpiece W is not damaged even if it contacts the workpiece W.

前記第1ボックス1には第1接続管7が接続され、第2ボックス2には第2接続管8が接続されている。そして、第2接続管8は、第1ボックス1の周壁を貫いて外部に延出し、途中の切換バルブ9を介して第1接続管7に集合している。そして、この1本に纏まった集合管10は、例えば洗浄液を貯溜した1ヵ所の洗浄流体供給部11に接続されている。そして、前記切換バルブ9は、供給停止、第1ボックス1だけへの供給、第2ボックス2だけへの供給の3位置が択一的に選択出来るタイプでも良く、或いは上記3位置の他に、第1、第2ボックス1、2両方共に供給出来る機能を備えた4位置選択のものでも良い。   A first connection pipe 7 is connected to the first box 1, and a second connection pipe 8 is connected to the second box 2. The second connecting pipe 8 extends through the peripheral wall of the first box 1 to the outside, and gathers in the first connecting pipe 7 via a switching valve 9 on the way. The collecting tube 10 combined into one is connected to, for example, a single cleaning fluid supply unit 11 that stores cleaning liquid. The switching valve 9 may be of a type in which three positions of supply stop, supply only to the first box 1 and supply only to the second box 2 can be selected, or in addition to the above three positions, A 4-position selection type having a function capable of supplying both the first and second boxes 1 and 2 may be used.

以上のような洗浄装置の作用について説明する。ワークWの所定部位に複数の加工孔Wh、…が穿設されると、ワークWは洗浄装置前方の所定位置に位置決めされ、この時の状況は、図1に示すように、各第1ノズル4a、…の前方に各加工孔Wh、…が臨んでいる。そして、切換バルブ9は第1ボックス1側の第1接続管7が連通し、第2ボックス2側の第2接続管8が閉鎖するよう操作される。このため、洗浄流体供給部11の洗浄液は第1ボックス1内だけに供給され、第1ノズル4a、…から噴き出された洗浄液によって各加工孔Wh、…周辺が洗浄される。この際、第2ノズル5a、…から洗浄液は噴き出されないため洗浄液の無駄な消費がなく、又、未加工部で跳ね返った洗浄液が干渉する虞れもない。   The operation of the above cleaning apparatus will be described. When a plurality of processing holes Wh,... Are drilled in a predetermined portion of the workpiece W, the workpiece W is positioned at a predetermined position in front of the cleaning device, and the situation at this time is as shown in FIG. Each processing hole Wh,... Faces in front of 4a,. The switching valve 9 is operated so that the first connection pipe 7 on the first box 1 side communicates and the second connection pipe 8 on the second box 2 side is closed. For this reason, the cleaning liquid of the cleaning fluid supply unit 11 is supplied only into the first box 1 and the periphery of each processing hole Wh,... Is cleaned by the cleaning liquid ejected from the first nozzles 4a,. At this time, since the cleaning liquid is not ejected from the second nozzles 5a,..., There is no wasteful consumption of the cleaning liquid, and there is no possibility that the cleaning liquid bounced off in the unprocessed part interferes.

次に機種の異なるワークに複数の加工孔を穿設した際の洗浄は、第2洗浄ノズル群5を使用して行う。すなわち、加工終了後ワークWを洗浄装置前方の所定位置に位置決めすると、各第2ノズル5a、…の前方に各加工孔が臨み、切換バルブ9を上記と反対側(第1ボックス1側を閉鎖、第2ボックス2側を連通)に操作することで、第2ノズル5a、…から洗浄液を噴き付け洗浄する。この際も第1ノズル4a、…から洗浄液が出ないため無駄な洗浄液を浪費することがなく、洗浄液が干渉する虞れもない。   Next, the second cleaning nozzle group 5 is used for cleaning when a plurality of machining holes are drilled in a workpiece of a different model. That is, when the workpiece W is positioned at a predetermined position in front of the cleaning device after the machining is finished, each machining hole faces in front of each second nozzle 5a,..., And the switching valve 9 is on the opposite side (the first box 1 side is closed). , The second box 2 side is communicated), and the cleaning liquid is sprayed from the second nozzles 5a,. Also in this case, since the cleaning liquid does not come out from the first nozzles 4a,..., Wasteful cleaning liquid is not wasted and there is no possibility that the cleaning liquid interferes.

更に、加工孔の位置が全てのノズル4a、…5a、…位置に対応して設けられているようなワークの場合には、切換バルブ9を第1、第2ボックス1、2両方共に連通させるよう切換えれば、このようなワークにも対応することが出来る。すなわち、本実施例の装置は、加工孔の位置が異なる3種のワークに対応可能である。   Further, in the case of a workpiece in which the positions of the machining holes are provided corresponding to all the nozzles 4a,... 5a,..., The switching valve 9 is communicated with both the first and second boxes 1 and 2. By switching in this way, it is possible to handle such workpieces. That is, the apparatus of the present embodiment can cope with three types of workpieces having different machining hole positions.

ところで、以上のような洗浄装置では、洗浄流体供給部11を単一のものとしているが、第1発明では各ボックス1、2毎に独立して一対設けるようにしている。すなわち、図2に示すように、第1ボックス1の第1接続管7を直接一方側の洗浄流体供給部12に接続し、第2ボックス2の第2接続管8を直接他方側の洗浄流体供給部13に接続するとともに、例えば一方側の洗浄流体供給部12の洗浄流体を洗浄液とし、他方側の洗浄流体供給部13の洗浄流体を洗浄エアとすることで、洗浄流体の種類を異ならせる。   By the way, in the above washing | cleaning apparatuses, although the washing | cleaning fluid supply part 11 is made into the single thing, in 1st invention, it is trying to provide one pair for each box 1 and 2 independently. That is, as shown in FIG. 2, the first connection pipe 7 of the first box 1 is directly connected to the cleaning fluid supply part 12 on one side, and the second connection pipe 8 of the second box 2 is directly connected to the cleaning fluid on the other side. For example, the cleaning fluid of the cleaning fluid supply unit 12 on one side is used as the cleaning liquid, and the cleaning fluid of the cleaning fluid supply unit 13 on the other side is used as the cleaning air. .

そしてこのように洗浄流体の種類を変えることが出来れば、例えば洗浄エアの噴き付けだけで洗浄効果があるような加工態様の場合に、わざわざ洗浄液を噴き付けて洗浄液同士が干渉する機会が増える等の不具合を防止することが出来る。また、このような装置の構成例は、他機種対応型に限られるものでなく、例えば1つのワークに対して部分的に深孔と浅孔を加工したような場合に、深孔の箇所に対応して洗浄液を噴き付けるノズルを臨ませ、浅孔の箇所に対応して洗浄エアを噴き付けるノズルを臨ませるようにすることも可能である。   If the type of the cleaning fluid can be changed in this way, for example, in the case of a processing mode that has a cleaning effect only by spraying cleaning air, there is an increased chance of the cleaning liquid interfering with the cleaning liquid. Can be prevented. In addition, the configuration example of such an apparatus is not limited to the type compatible with other models. For example, in the case where a deep hole and a shallow hole are partially machined for one work, the deep hole is formed at the position of the deep hole. Correspondingly, it is possible to face the nozzle that sprays the cleaning liquid, and to face the nozzle that sprays the cleaning air corresponding to the location of the shallow hole.

更に、第2発明では第1ボックス1内の流体圧と第2ボックス2内の流体圧を異ならせるようにしている。この時、洗浄流体供給部12、13と接続管7、8を独立させて一対設けている場合には、各洗浄流体供給部12、13内の流体圧を異ならせるのは簡単であるが、図1に示すように1ヵ所の洗浄流体供給部11から各ボックス1、2に導いている場合は、集合管10、或いは第1、第2接続管7、8のいずれか1ヵ所に減圧バルブを設けるようにすれば良い。そして、切換バルブ9の操作に連動して減圧バルブを作動させるようにすれば、第1ボックス1の流体圧と第2ボックス2の流体圧を変えることが出来る。   Furthermore, in the second invention, the fluid pressure in the first box 1 and the fluid pressure in the second box 2 are made different. At this time, when the cleaning fluid supply units 12 and 13 and the connection pipes 7 and 8 are provided as a pair independently, it is easy to make the fluid pressures in the cleaning fluid supply units 12 and 13 different, As shown in FIG. 1, when the cleaning fluid supply unit 11 leads to the boxes 1 and 2, a pressure reducing valve is provided in the collecting pipe 10 or any one of the first and second connecting pipes 7 and 8. Should be provided. If the pressure reducing valve is operated in conjunction with the operation of the switching valve 9, the fluid pressure in the first box 1 and the fluid pressure in the second box 2 can be changed.

そして、このように第1ボックス1と第2ボックス2の流体圧を異ならせることで、加工態様等に応じて適切な圧力で洗浄流体を噴き付けることが出来、洗浄効率が向上する。例えば浅孔に対しては少ない圧力で噴き付け、深孔に対しては強い圧力で噴き付ける等により効率良く洗浄出来る。また、第1、第2ボックス1、2の洗浄流体を異ならせ、同時に流体圧を異ならせてこれらを組合せるようにすれば、一層効率良く洗浄出来る。   And by making the fluid pressure of the 1st box 1 and the 2nd box 2 differ in this way, a cleaning fluid can be sprayed with a suitable pressure according to a processing aspect etc., and cleaning efficiency improves. For example, it can be efficiently cleaned by spraying a shallow hole with a small pressure and spraying a deep hole with a strong pressure. Further, if the cleaning fluids of the first and second boxes 1 and 2 are made different and the fluid pressures are made different at the same time, they can be washed more efficiently.

洗浄装置の断面図Cross section of cleaning device 本第1発明の要部図Main view of the first invention

符号の説明Explanation of symbols

1…第1ボックス、2…第2ボックス、4…第1洗浄ノズル群、4a…第1ノズル、5…第2洗浄ノズル群、5a…第2ノズル、7…第1接続管、8…第2接続管、9…切換バルブ、10…集合管、11、12、13…洗浄流体供給部、W…ワーク、Wh…加工孔。   DESCRIPTION OF SYMBOLS 1 ... 1st box, 2 ... 2nd box, 4 ... 1st washing nozzle group, 4a ... 1st nozzle, 5 ... 2nd washing nozzle group, 5a ... 2nd nozzle, 7 ... 1st connection pipe, 8 ... 1st 2 connection pipes, 9 ... switching valve, 10 ... collecting pipe, 11, 12, 13 ... cleaning fluid supply unit, W ... work, Wh ... machining hole.

Claims (2)

ワークの加工部に洗浄ノズルを対向させ、この洗浄ノズルから洗浄流体を噴き付けて加工部周辺を洗浄するようにした洗浄方法において、In a cleaning method in which a cleaning nozzle is opposed to the workpiece processing part, and a cleaning fluid is sprayed from the cleaning nozzle to clean the periphery of the processing part.
この洗浄方法は、洗浄流体を貯溜する洗浄流体供給部と、この洗浄流体供給部に連通する第1ボックスと、この第1ボックス内に収容され且つ洗浄流体供給部に連通する第2ボックスと、前記第1ボックスの周壁から外方に向けて突出する第1洗浄ノズル群と、前記第2ボックスの周壁から外方に向け前記第1ボックスの周壁を貫いて外部に突出する第2洗浄ノズル群を備えた洗浄装置を用い、前記第1ボックスと前記第2ボックスに異なる洗浄流体供給部から異なる流体を供給し、前記第1洗浄ノズル群と前記第2洗浄ノズル群から異なる洗浄流体を噴き付けることを特徴とする洗浄方法。The cleaning method includes a cleaning fluid supply unit that stores cleaning fluid, a first box that communicates with the cleaning fluid supply unit, a second box that is housed in the first box and communicates with the cleaning fluid supply unit, A first cleaning nozzle group protruding outward from the peripheral wall of the first box, and a second cleaning nozzle group protruding outward from the peripheral wall of the second box through the peripheral wall of the first box A different cleaning fluid is supplied from different cleaning fluid supply units to the first box and the second box, and different cleaning fluids are sprayed from the first cleaning nozzle group and the second cleaning nozzle group. A cleaning method characterized by the above.
ワークの加工部に洗浄ノズルを対向させ、この洗浄ノズルから洗浄流体を噴き付けて加工部周辺を洗浄するようにした洗浄方法において、In a cleaning method in which a cleaning nozzle is opposed to the workpiece processing part, and a cleaning fluid is sprayed from the cleaning nozzle to clean the periphery of the processing part.
この洗浄方法は、洗浄流体を貯溜する洗浄流体供給部と、この洗浄流体供給部に連通する第1ボックスと、この第1ボックス内に収容され且つ洗浄流体供給部に連通する第2ボックスと、前記第1ボックスの周壁から外方に向けて突出する第1洗浄ノズル群と、前記第2ボックスの周壁から外方に向け前記第1ボックスの周壁を貫いて外部に突出する第2洗浄ノズル群を備えた洗浄装置を用い、前記第1ボックスと前記第2ボックスに洗浄流体供給部から供給する流体圧を異ならせ、前記第1洗浄ノズル群と前記第2洗浄ノズル群から噴き付ける洗浄流体の圧力を異ならせることを特徴とする洗浄方法。The cleaning method includes a cleaning fluid supply unit that stores cleaning fluid, a first box that communicates with the cleaning fluid supply unit, a second box that is housed in the first box and communicates with the cleaning fluid supply unit, A first cleaning nozzle group protruding outward from the peripheral wall of the first box, and a second cleaning nozzle group protruding outward from the peripheral wall of the second box through the peripheral wall of the first box Of the cleaning fluid sprayed from the first cleaning nozzle group and the second cleaning nozzle group by differentiating the fluid pressure supplied from the cleaning fluid supply unit to the first box and the second box. A cleaning method characterized by different pressures.
JP2004122517A 2004-04-19 2004-04-19 Cleaning method Expired - Fee Related JP3853330B2 (en)

Priority Applications (1)

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JP2004122517A JP3853330B2 (en) 2004-04-19 2004-04-19 Cleaning method

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JP2004122517A JP3853330B2 (en) 2004-04-19 2004-04-19 Cleaning method

Related Parent Applications (1)

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JP8787395A Division JP3595017B2 (en) 1995-04-13 1995-04-13 Cleaning equipment

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JP2004268039A JP2004268039A (en) 2004-09-30
JP3853330B2 true JP3853330B2 (en) 2006-12-06

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