JP3663660B2 - Ink jet apparatus and manufacturing method thereof - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to an ink ejecting apparatus.
[0002]
[Prior art]
Today, instead of conventional impact printing devices, the non-impact printing devices that are expanding the market greatly have the simplest principle, and are easy to achieve multi-gradation and colorization. As an example, an inkjet printing apparatus can be used. Among them, a drop-on-demand type that ejects only ink droplets used for printing is rapidly spreading due to its good ejection efficiency and low running cost.
[0003]
Typical examples of the drop-on-demand type include a Kaiser type disclosed in Japanese Patent Publication No. 53-12138 or a thermal jet type disclosed in Japanese Patent Publication No. 61-59914. Among these, the former is difficult to reduce in size, and the latter requires a heat resistance requirement for applying high heat to the ink, and each has a very difficult problem.
[0004]
As a new method for simultaneously solving the above-mentioned defects, shearing disclosed in Japanese Patent Laid-Open Nos. 63-247051, 63-252750 and 2-150355 is proposed. It is a mode type. FIG. 2, FIG. 3, FIG. 4, FIG. 5 and FIG.
[0005]
The configuration of the conventional example will be specifically described below with reference to FIG. 2 showing a cross-sectional view of the ink ejecting apparatus. The ink ejecting apparatus 1 includes an actuator plate 2, a cover plate 3, and a nozzle plate 31 (FIG. 4). The actuator plate 2 is made of a piezoelectric material having ferroelectricity, for example, a lead zirconate titanate (PZT) ceramic material, and is polarized in the direction of arrow 5. There is a side wall 11 separating 15. The cover plate 3 is formed of a ceramic material or a resin material. By joining the actuator plate 2 and the cover plate 3 via a bonding layer 4 made of an adhesive, for example, an epoxy-based adhesive, the grooves 15 are formed with a plurality of ink liquid chambers 12 spaced apart from each other in the lateral direction. Become. The ink liquid chamber 12 has an elongated shape with a rectangular cross section, and the side wall 11 extends over the entire length of the ink liquid chamber 12. An electrode 13 for applying a driving voltage is formed on both surfaces from the upper part of the side wall 11 near the bonding layer 4 of the side wall 11 to the central part of the side wall 11. Ink 81 is introduced into the ink chamber 12 from the ink supply port 21 (FIG. 4) through the manifold 22 (FIG. 4).
[0006]
Next, the operation of the conventional example will be described with reference to FIG. 3 showing a cross-sectional view of the ink ejecting apparatus 1. In the ink ejecting apparatus 1, for example, when the ink liquid chamber 12b is selected according to desired print data, a positive drive voltage is rapidly applied to the electrodes 13c and 13d, and the electrodes 13b and 13e are grounded. As a result, a driving electric field in the direction of arrow 14a acts on the side wall 11a, and a driving electric field in the direction of arrow 14b acts on the side wall 11b. At this time, since the driving electric field directions 14a and 14b and the polarization direction 5 are orthogonal to each other, the side walls 11a and 11b are rapidly deformed in the ink liquid chamber 12b due to the piezoelectric thickness slip effect. Due to this deformation, the volume of the ink liquid chamber 12b decreases, the pressure of the ink 81 inside the ink liquid chamber 12b rapidly increases, and a pressure wave is generated from the nozzle 32 (FIG. 4) communicating with the ink liquid chamber 12b. A part of the ink 81 is ejected as ink droplets. Further, when the application of the drive voltage is stopped, the side walls 11a and 11b return to the positions before deformation (see FIG. 2), so that the pressure of the ink 81 inside the ink liquid chamber 12b decreases, and the ink supply port 21 (FIG. 4). Ink 81 is supplied into the ink liquid chamber 12b through the manifold 22 (FIG. 4).
[0007]
However, the above operation is only a basic operation of the conventional example, and when it is embodied as a product, first, a driving voltage is applied in a direction in which the volume of the ink liquid chamber 12b increases, and the ink liquid chamber 12b is first applied. In some cases, the supply of the drive voltage is stopped after the ink is supplied, and the side walls 11a and 11b are returned to the positions before the deformation (see FIG. 2) to eject the ink.
[0008]
In the ink ejecting apparatus 1, since ink droplets cannot be ejected simultaneously from two nozzles communicating with two adjacent ink liquid chambers, for example, ink droplets are ejected from nozzles communicating with the ink liquid chambers 12b and 12d. After the ejection, the ink liquid chamber 12 and the nozzle are ejected from the nozzle communicating with the ink liquid chamber 12c, and then the ink droplet is ejected again from the nozzle communicating with the ink liquid chambers 12b and 12d. 32 is divided into a plurality of groups to eject ink droplets.
[0009]
Next, the configuration and manufacturing method of the conventional example will be described with reference to FIG. Parallel grooves 15 forming the ink liquid chambers 12 having the above-described shape are formed on the actuator plate 2 subjected to the polarization process by grinding using a thin disk-shaped diamond blade. The groove 15 is a parallel groove having the same depth in almost the entire area of the actuator plate 2, but is gradually shallower as it approaches the end surface 17, and is formed to be a shallow parallel shallow groove 18 in the vicinity of the end surface 17. Electrodes are formed on the inner surfaces of the grooves 15 and the shallow grooves 18 by vacuum deposition, sputtering, or the like. When this electrode is formed, an electrode is also formed at the zenith portion of the side wall 11, so that it is necessary to separate the electrodes on both sides of the side wall 11. For this purpose, the electrode at the zenith portion of the side wall 11 is removed by lapping or the like. Thereby, the electrode 13 is formed on the inner surface of the groove 15 only in the upper half of the side surface, and the electrode 19 is formed on the inner surface of the shallow groove 18 on the entire side surface and bottom surface. By this electrode 19, the electrode 13 formed on the side wall 11 on both sides of the groove 15 is electrically connected.
[0010]
Further, the ink introduction port 21 and the manifold 22 are formed on the cover plate 3 made of a ceramic material or a resin material by grinding or cutting.
[0011]
Next, the groove 15 processing side surface of the actuator plate 2 and the manifold 22 processing side surface of the cover plate 3 are connected to each other by the bonding layer 4 (FIG. 2) made of an epoxy adhesive or the like. Adhesion is performed so as to form the ink liquid chamber 12 having a shape. Next, the nozzle plate 31 provided with the nozzles 32 at the positions corresponding to the positions of the ink liquid chambers 12 is bonded to the end surfaces 16 of the actuator plate 2 and the cover plate 3. A substrate 41 provided with a conductive layer pattern 42 at a position corresponding to the position of each shallow groove 18 is adhered to the surface of the actuator plate 2 opposite to the processed side of the groove 15 with an epoxy adhesive or the like.
[0012]
Then, the electrode 19 on the bottom surface of the shallow groove 18 and the conductive layer pattern 42 are connected by a conductive wire 43. Usually, a known technique called wire bonding is used for such connection. Since the diameter of the conductor 43 is usually very small and its mechanical strength is small, in order to prevent contact between adjacent conductors 43 and disconnection, and corrosion due to moisture and dust in the atmosphere, generally an epoxy resin or the like is used. Using this, a protective film (not shown) is formed (potted). The protective film is cured by heating.
[0013]
Next, the configuration of the conventional control unit will be described with reference to FIG. 5 showing a block diagram of the control unit. The conductive layer patterns 42 provided on the substrate 41 are individually connected to the LSI chip 51, and the clock line 52, the data line 53, the voltage line 54 and the ground line 55 are also connected to the LSI chip 51. The LSI chip 51 determines which nozzle 32 should eject ink droplets from data appearing on the data line 53 based on continuous clock pulses supplied from the clock line 52. Then, the LSI chip 51 applies the voltage V of the voltage line 54 to the pattern 42 of the conductive layer that conducts to the electrode 13 in the ink liquid chamber 12 that ejects ink. Further, the LSI chip 51 connects the ground line 55 to the conductive layer pattern 42 which is conductive to the electrodes 13 other than the ink liquid chamber 12.
[0014]
Next, the configuration and operation of the conventional example will be described with reference to FIG. 6 showing a perspective view of the printer. The ink ejecting apparatus 1 and the nozzle plate 31 have the configurations and operations described with reference to FIGS. 2, 3, 4, and 5. The ink ejecting apparatus 1 is fixed on the carriage 62, the ink supply tube 63 communicates with the ink supply port 21 (FIG. 4), the LSI chip 51 (FIG. 5) is built in the carriage 62, and the flexible cable 64 is shown in FIG. It corresponds to the clock line 52, data line 53, voltage line 54 and earth line 55 shown. The carriage 62 reciprocates over the entire width of the recording paper 71 in the direction of the arrow 65 along the slider 66, and the ink ejecting device 61 moves the nozzle against the recording paper 71 held by the platen roller 72 when the carriage 62 is moving. Ink droplets are ejected from the nozzles 32 (FIG. 4) provided on the plate 31 to adhere the ink droplets on the recording paper 71.
[0015]
The recording paper 71 is stationary when the ink ejecting apparatus 1 ejects ink droplets. However, each time the carriage 62 performs a predetermined operation, the recording paper 71 is fed by a certain amount in the direction of the arrow 75 by the paper feed rollers 73 and 74. Be transported. As a result, the ink ejecting apparatus 1 can form desired characters and images on the entire surface of the recording paper 71.
[0016]
Next, another conventional ink ejecting apparatus disclosed in Japanese Patent Laid-Open No. 5-92561 will be described with reference to FIGS. The ink ejecting apparatus 101 includes actuator plates 102 and 103 and a nozzle plate (not shown). The actuator plate 102 is made of a piezoelectric material having ferroelectricity, polarized in the direction of the arrow 105, and has a plurality of grooves 115 and side walls 111 separating the grooves 115. Electrodes 113 for applying a driving voltage are formed on both side surfaces of the side wall 111 and part of the zenith. The actuator plate 103 is made of a piezoelectric material having ferroelectricity, is polarized in the direction of the arrow 106, and has a plurality of grooves 117 and side walls 116 separating the grooves 117. Electrodes 114 for applying a drive voltage are formed on both side surfaces of the side wall 116 and part of the zenith.
[0017]
By joining the zenith portion of the side wall 111 of the actuator plate 102 and the zenith portion of the side wall 116 of the actuator plate 103 via the bonding layer 104 made of an adhesive, the grooves 115 and 117 are spaced apart from each other in the lateral direction. A plurality of ink liquid chambers 112 are formed. Further, the electrode 113 formed at the zenith portion of the side wall 111 and the electrode 114 formed at the zenith portion of the side wall 116 are in contact with each other to form a conductive relationship. The ink liquid chamber 112 has an elongated shape with a rectangular cross section, and the side walls 111 and 116 extend over the entire length of the ink liquid chamber 112. Ink 181 is introduced into the ink liquid chamber 112 from an ink supply port (not shown) through a manifold (not shown). Description of the electrical connection between the electrodes 113 and 114 and the drive circuit is omitted.
[0018]
In the ink ejecting apparatus 101, a driving electric field acts on the side walls 111 and 116 by applying a driving voltage to the electrodes 113 and 114 on the surfaces of the side walls 111 and 116 on both sides of the ink liquid chamber 112 to be ejected. At this time, since the drive electric field direction and the polarization directions 105 and 106 are orthogonal to each other, the side walls 111 and 116 are rapidly deformed toward the inside of the ink liquid chamber 112 by the piezoelectric thickness slip effect. Due to this deformation, the volume of the ink liquid chamber 112 decreases, the pressure of the ink 181 inside the ink liquid chamber 112 rapidly increases, and a pressure wave is generated from a nozzle (not shown) communicating with the ink liquid chamber 112. A part of the ink 181 is ejected as an ink droplet. Further, when the application of the driving voltage is stopped, the side walls 111 and 116 return to the positions before the deformation, so that the pressure of the ink 181 inside the ink liquid chamber 112 decreases, and a manifold (not shown) is supplied from the ink supply port (not shown). The ink 181 is supplied into the ink chamber 112 through
[0019]
However, the above operation is only a basic operation of the conventional example, and when embodied as a product, first, a drive voltage is applied in the direction in which the volume of the ink liquid chamber 112 increases, and the ink liquid chamber 112 is first applied. In some cases, application of the driving voltage is stopped after the ink is supplied, and the side walls 111 and 116 are returned to the positions before the deformation to eject the ink.
[0020]
[Problems to be solved by the invention]
However, in the conventional ink ejecting apparatus 1 as described above, only the upper half of the side wall 11 is deformed by the piezoelectric thickness due to the drive voltage applied to the electrode 13, and the lower half is displaced by the deformation of the upper half. The amount of deformation of the side wall 11 is small compared to the electrical energy applied to 13, and the amount of decrease in the volume of the ink liquid chamber 12 is small. For this reason, in order to form characters and images on the paper surface where the speed and volume of the ejected ink droplets face the ink ejecting apparatus 1, the drive voltage has to be increased. For this reason, since the drive circuit becomes complicated and large, there has been a limit to reducing the cost and size of the apparatus.
[0021]
In the conventional ink ejecting apparatus 101 as described above, both of the side walls 111 and 116 are driven by the driving voltage applied to the electrode 113, so that the ink ejecting apparatus 1 and the ink ejecting apparatus 1 are driven at half the driving voltage of the ink ejecting apparatus 1. The same ink pressure can be generated. Therefore, the drive voltage can be made lower than that of the injection device 1.
[0022]
However, in the ink ejecting apparatus 101, the electrical connection between the electrode 113 formed on the side wall 111 and the electrode 114 formed on the side wall 116 is performed by joining the zenith portion of the side wall 111 and the zenith portion of the side wall 116. Therefore, in this electrical connection by contact, there is a problem that reliability is low, for example, if the surface roughness and waviness of the zenith portions of the side walls 111 and 116 are large, the connection is not reliable. Further, there is a problem that the electrode 113 and the electrode 114 are not connected due to the protrusion of the adhesive that bonds the zenith portion of the side wall 111 and the zenith portion of the side wall 116. Further, the ink 181 enters the contact surface between the electrodes 113 and 114 to hinder the electrical connection, or the contact surface between the electrodes 113 and 114 is worn by the vibration caused by the driving of the side walls 111 and 116, so that the electrical connection is established. There is a problem that the ejection of the ink droplet stops during use, and the reliability is low.
[0023]
The present invention has been made to solve the above-described problems, and can eject ink droplets having a speed and volume sufficient to form characters and images with a low driving voltage. An object of the present invention is to provide an ink ejecting apparatus having high coupling reliability and a method for manufacturing the same.
[0024]
[Means for Solving the Problems]
In order to achieve this object, according to claim 1 of the present invention, there is provided a first actuator plate having a plurality of first grooves and a first wall at least partially made of a piezoelectric material with the first grooves being separated. A second actuator plate having a plurality of second grooves provided corresponding to the first grooves, and a second wall at least partly made of a piezoelectric material across the second grooves; A first electrode formed on a side surface of the first wall; and a second electrode formed on a side surface of the second wall; and a zenith portion of the first wall of the first actuator plate and a second electrode of the second actuator plate. by joining a top portion of the second wall covering, in the ink jet apparatus constituting the ink liquid chamber composed of the first grooves and second grooves, the before and Symbol ink the first electrode to the chamber and the second electrode It was formed, the second electrode and the first electrode Having a third electrode connected to each other to.
[0025]
According to a second aspect of the present invention, a first actuator plate having a plurality of first grooves and a first wall at least partially made of a piezoelectric material with the first grooves being provided, and provided corresponding to the first grooves. A second actuator plate having a plurality of second grooves formed, a second wall at least partially made of a piezoelectric material across the second groove, and a first actuator formed on a side surface of the first wall. In the manufacturing method of an ink ejecting apparatus including an electrode and a second electrode formed on a side surface of the second wall, a zenith portion of the first wall of the first actuator plate and a second wall of the second actuator plate A step of forming an ink liquid chamber composed of the first groove and the second groove, introducing a metal substance into the ink liquid chamber, and the first electrode and the second electrode, covering the phases and the second electrode and the first electrode Characterized in that comprising the step of forming a third electrode connected to.
[0026]
[Action]
In the ink ejecting apparatus of the present invention having the above-described configuration, a third electrode formed in the ink liquid chamber is formed on the first electrode and the second electrode so as to cover the first electrode and the second electrode. The second electrode is electrically connected.
[0027]
In the method of manufacturing the ink ejecting apparatus of the invention, first, the zenith portion of the first wall of the first actuator plate and the zenith portion of the second wall of the second actuator plate are joined, and then A step of forming an ink liquid chamber composed of one groove and a second groove; and introducing a metal substance into the ink liquid chamber to cover the first electrode and the second electrode in the ink liquid chamber. Three electrodes are formed, and the first electrode and the second electrode are electrically connected.
[0028]
【Example】
Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In addition, the same code | symbol is attached | subjected to the member same as a prior art, and the description is abbreviate | omitted.
[0029]
The configuration of an embodiment of the present invention will be specifically described with reference to FIG. 1 showing a partial sectional view of the ink ejecting apparatus 201. The ink ejecting apparatus 201 includes actuator plates 102 and 103 and a nozzle plate (not shown). The actuator plate 102 is made of a piezoelectric material having ferroelectricity, is polarized in the direction of an arrow 105 (FIG. 7), and has a plurality of grooves 115 and side walls 111 separating the grooves 115. An electrode 113 for applying a driving voltage is formed on both side surfaces of the side wall 111 and a part of the zenith portion continuous with the both side surfaces. The actuator plate 103 is made of a piezoelectric material having ferroelectricity, is polarized in the direction of an arrow 106 (FIG. 7), and has a plurality of grooves 117 and a side wall 116 separating the grooves 117. An electrode 114 for applying a driving voltage is formed on both side surfaces of the side wall 116 and a part of the zenith that is continuous with both side surfaces.
[0030]
The electrodes 113 and 114 are formed by forming a resist layer or the like on a part of the top of the side wall 111 and part of the top of the side wall 116 by patterning or the like, and then forming a thin layer of a conductive material such as nickel, aluminum, gold, or carbon. It is formed by vacuum deposition, sputtering, plating, screen printing or the like on the entire surface of the side walls 111 and 116, and removing the resist layer by mechanical peeling or chemical dissolution.
[0031]
Next, by joining the zenith portion of the side wall 111 of the actuator plate 102 and the zenith portion of the side wall 116 of the actuator plate 103 via the bonding layer 104 made of an adhesive, the grooves 115 and 117 are spaced apart from each other in the lateral direction. A plurality of ink liquid chambers 112 having The ink liquid chamber 112 has an elongated shape with a rectangular cross section, and the side walls 111 and 116 extend over the entire length of the ink liquid chamber 112.
[0032]
Next, a metal material such as nickel, gold, copper, silver, or palladium is introduced into the ink chamber 112, and the metal layer 213 is covered with the electrodes 113 and 114 by a plating method such as electrolytic plating or electroless plating. To be formed. Thus, the electrode 113 and the electrode 114 are electrically connected by the metal layer 213.
[0033]
In the ink ejecting apparatus 201 of the present embodiment, the electrode 113 and the electrode 114 form a conductive relationship by the metal layer 213 formed so as to cover them, so that the surface roughness and undulation of the zenith portions of the side walls 111 and 116 are formed. Reliable electrical connection is obtained regardless of whether the adhesive layer protrudes from the adhesive layer 104, the ink introduced into the ink liquid chamber 112 impedes electrical connection, or vibrations due to the driving of the side walls 111 and 116. The electrical connection is not broken due to wear, and the reliability of the electrical connection is remarkably increased.
[0034]
Further, since the ink is ejected by deformation of the side wall 111 and the side wall 116, it is possible to eject ink droplets having a speed and volume sufficient to form characters and images with a low driving voltage.
[0035]
In this embodiment, the ink liquid chambers 112 are adjacent to each other, but air chambers filled with air may be provided between the ink liquid chambers. In this case, ink droplets can be ejected simultaneously from two nozzles communicating with all the ink liquid chambers.
[0036]
Further, in this embodiment, after forming a resist layer or the like on a part of the zenith part of the side wall 111 and a part of the zenith part of the side wall 116, a thin layer of a conductive material is formed on the entire surface of the side walls 111 and 116. By removing the resist layer by mechanical peeling or chemical dissolution, the electrodes 113 are formed on both side surfaces of the side wall 111 and a part of the zenith, and the electrodes 114 are formed on both side surfaces of the side wall 116 and a part of the zenith. However, after forming a thin layer of a conductive material on the entire surfaces of the side walls 111 and 116, the top of the side wall 111 and the top of the side wall 116 are machined to remove a part of the electrodes 113 and 114. May be.
[0037]
Further, in this embodiment, the electrode 113 is formed on both side surfaces of the side wall 111 and a part of the zenith part continuous with both side surfaces, and the electrode 114 is formed on both side surfaces of the side wall 116 and part of the zenith part continuous with both side surfaces. However, the electrodes 113 and 114 may be formed on the entire side surfaces of the side walls 111 and 116 or on a part of the side surfaces, respectively, and may not be formed on the zenith portion.
[0038]
In this embodiment, the metal layer 213 is formed on the entire side surfaces of the side walls 111 and 116, but may be formed on a part of the side surfaces of the side walls 111 and 116.
[0039]
In this embodiment, the bonding layer 104 did not cover the electrodes 113 and 114. However, when the bonding layer 104 covers a part of the electrodes 113 and 114, the bonding layer 104 covered with a solvent or the like is dissolved. May be removed. Further, by adding a powder of a conductive material such as a metal to the adhesive forming the bonding layer 104, the formation of the metal layer 213 is promoted on the surface of the coated bonding layer 104 without removing the coated bonding layer 104. You may let them.
[0040]
In this embodiment, the side walls 111 and 116 are each formed of one piezoelectric material member (actuator plates 102 and 103). However, a plurality of piezoelectric material members stacked in parallel with the polarization direction, The piezoelectric material and the piezoelectric material may be formed of a member laminated in parallel with the polarization direction.
[0041]
In this embodiment, three ink liquid chambers 112 are shown. However, the number of ink liquid chambers 112 may be any number such as 50 or 100.
[0042]
【The invention's effect】
As is apparent from the above description, according to the present invention, the ink liquid chamber is formed by joining the zenith portion of the first wall of the first actuator plate and the zenith portion of the second wall of the second actuator plate. Since the third electrode that covers the first electrode and the second electrode is formed in the ink liquid chamber, the first electrode and the second electrode are electrically connected. Therefore, a reliable electrical connection can be obtained regardless of the surface roughness and undulation of the top and second walls and the protruding adhesive, etc., and the ink introduced into the ink chamber can be electrically connected. The connection is not hindered, and the electrical connection is not cut off due to the vibration caused by the driving of the first wall and the second wall, and the reliability of the electrical connection is remarkably increased. Further, since the ink is ejected by the deformation of the first wall and the second wall, it is possible to eject ink droplets having a speed and volume sufficient to form characters and images with a low driving voltage.
[Brief description of the drawings]
FIG. 1 is a partial cross-sectional view of an ink ejecting apparatus according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view illustrating a conventional ink ejecting apparatus.
FIG. 3 is an explanatory diagram illustrating an operation of a conventional ink ejecting apparatus.
FIG. 4 is a perspective view showing a conventional ink ejecting apparatus.
FIG. 5 is a block diagram illustrating a conventional control unit.
FIG. 6 is a perspective view illustrating a conventional printer.
FIG. 7 is a cross-sectional view illustrating a conventional ink ejecting apparatus.
FIG. 8 is a partial cross-sectional view of a conventional ink ejecting apparatus.
[Explanation of symbols]
201 Ink Ejector 111 Side Wall 116 Side Wall 112 Ink Liquid Chamber 113 Electrode 114 Electrode 213 Metal Layer

Claims (2)

A first actuator plate having a plurality of first grooves and a first wall at least partially made of a piezoelectric material across the first grooves;
A second actuator plate having a plurality of second grooves provided corresponding to the first grooves, and a second wall at least partly made of a piezoelectric material with the second grooves being spaced apart;
A first electrode formed on a side surface of the first wall;
A second electrode formed on a side surface of the second wall,
An ink ejecting apparatus that joins the zenith portion of the first wall of the first actuator plate and the zenith portion of the second wall of the second actuator plate to form an ink liquid chamber composed of the first groove and the second groove. In
Is formed by coating and said second electrode and said first electrode before Symbol ink chamber, ink ejection, characterized in that it comprises a third electrode for connecting the second electrode and the first electrode to each other apparatus. A first actuator plate having a plurality of first grooves and a first wall at least partially made of a piezoelectric material across the first grooves;
A second actuator plate having a plurality of second grooves provided corresponding to the first grooves, and a second wall at least partly made of a piezoelectric material with the second grooves being spaced apart;
A first electrode formed on a side surface of the first wall;
A second electrode formed on a side surface of the second wall;
In a method of manufacturing an ink ejecting apparatus comprising:
Joining the zenith portion of the first wall of the first actuator plate and the zenith portion of the second wall of the second actuator plate to form an ink liquid chamber composed of the first groove and the second groove;
A step of introducing a metal substance into the ink liquid chamber to form a third electrode that covers the first electrode and the second electrode and interconnects the first electrode and the second electrode. A method of manufacturing an ink ejecting apparatus.

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