JP3367069B2 - Manufacturing method of giant magnetostrictive alloy rod - Google Patents
Manufacturing method of giant magnetostrictive alloy rodInfo
- Publication number
- JP3367069B2 JP3367069B2 JP29268193A JP29268193A JP3367069B2 JP 3367069 B2 JP3367069 B2 JP 3367069B2 JP 29268193 A JP29268193 A JP 29268193A JP 29268193 A JP29268193 A JP 29268193A JP 3367069 B2 JP3367069 B2 JP 3367069B2
- Authority
- JP
- Japan
- Prior art keywords
- giant magnetostrictive
- rod
- alloy
- mold
- magnetostrictive alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910045601 alloy Inorganic materials 0.000 title claims description 74
- 239000000956 alloy Substances 0.000 title claims description 74
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 238000000034 method Methods 0.000 claims description 34
- 238000010438 heat treatment Methods 0.000 claims description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 14
- 238000007711 solidification Methods 0.000 claims description 14
- 230000008023 solidification Effects 0.000 claims description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 6
- 150000002910 rare earth metals Chemical class 0.000 claims description 6
- 229910017052 cobalt Inorganic materials 0.000 claims description 5
- 239000010941 cobalt Substances 0.000 claims description 5
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 description 30
- 238000002844 melting Methods 0.000 description 11
- 230000008018 melting Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000002994 raw material Substances 0.000 description 5
- 238000002441 X-ray diffraction Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 238000005266 casting Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910000765 intermetallic Inorganic materials 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000004857 zone melting Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 241001174051 Thesium arvense Species 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- -1 iron Chemical class 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ＲＴx（Ｒは、一種ま
たは二種以上の希土類金属、Ｔは鉄、コバルト、ニッケ
ル、マンガンから選択される一種または二種以上を示
し、ｘは１.５〜２.０）で示される組成の金属間化合物
からなる超磁歪合金の製造方法に係わり、磁歪特性の優
れた合金ロッドを容易に製造する技術に関する。The present invention relates to RT x (R is one or more rare earth metals, T is one or more selected from iron, cobalt, nickel and manganese, and x is 1 The present invention relates to a method for producing a giant magnetostrictive alloy composed of an intermetallic compound having a composition shown in 0.5 to 2.0), and to a technique for easily producing an alloy rod having excellent magnetostrictive properties.
【０００２】[0002]
【従来の技術】磁性体を磁化すると、磁性体の長さが変
化する。この磁歪現象を応用したものとしては、例えば
超音波振動子、変位制御アクチュエータなどがあり、従
来は、Ｎｉ基合金あるいはフェライトなどが磁歪材料と
して用いられていた。2. Description of the Related Art When a magnetic material is magnetized, the length of the magnetic material changes. Applications of this magnetostriction phenomenon include, for example, ultrasonic vibrators, displacement control actuators, etc., and conventionally Ni-based alloys or ferrites have been used as magnetostrictive materials.
【０００３】近年、Ｎｉ基合金などに比較して磁歪量が
桁違いに大きい、希土類と鉄などの遷移金属との金属間
化合物ＲＴx（Ｒは一種または二種以上の希土類金属、
Ｔは鉄、コバルト、ニッケル、マンガンから選択される
一種または二種以上を示し、ｘは通常１.５〜２.０の値
である）が開発され、超磁歪合金と呼ばれて注目されて
いる。Recently, an intermetallic compound RT x (R is one or more rare earth metals, which is a rare earth and a transition metal such as iron, which has an order of magnitude larger magnetostriction than Ni-based alloys,
T is one or two or more selected from iron, cobalt, nickel and manganese, and x is usually a value of 1.5 to 2.0) has been developed and called attention as a giant magnetostrictive alloy. There is.
【０００４】超磁歪合金は、その応用に際して、ロッド
状に加工し、その軸方向の変位を利用することが多い。
また、超磁歪合金は、合金の結晶状態から、結晶がラン
ダムに配置している多結晶型、多結晶ではあるが結晶方
向が揃って配向性を有している結晶配向型と、合金が単
一結晶からできている単結晶型に大別することができ
る。多結晶型超磁歪合金は、アーク溶解法、高周波溶解
法、粉末焼結法などを用いて容易に製造することができ
る。しかし、超磁歪合金の磁歪特性が、＜１１１＞方向
の変位量が大きく、＜１００＞方向では小さいという大
きな異方性を示すので、結晶配向型あるいは単結晶型が
材料として望ましい。しかし、単結晶型は、製造可能な
寸法が数ｍｍから数ｃｍ程度であるため、超磁歪合金と
しては結晶配向型が最も実用的である。In its application, the giant magnetostrictive alloy is often processed into a rod shape and its axial displacement is often used.
In addition, a giant magnetostrictive alloy is a polycrystalline type in which crystals are randomly arranged, a crystalline orientation type in which crystals are aligned but have crystal orientations aligned from the crystalline state of the alloy, and the alloy is a single crystal. It can be roughly classified into a single crystal type made of one crystal. The polycrystalline giant magnetostrictive alloy can be easily manufactured by an arc melting method, a high frequency melting method, a powder sintering method, or the like. However, since the magnetostrictive properties of the giant magnetostrictive alloy show a large anisotropy that the displacement amount in the <111> direction is large and the displacement amount in the <100> direction is small, a crystal orientation type or a single crystal type is desirable as a material. However, since the single crystal type has a manufacturable dimension of several mm to several cm, the crystal orientation type is most practical as a giant magnetostrictive alloy.
【０００５】一般的に、結晶配向型の超磁歪合金ロッド
は、ゾーンメルト法およびブリッジマン法により、ロッ
ドの軸方向を＜１１２＞方向として結晶成長させる方法
により製造される。Generally, the crystal orientation type giant magnetostrictive alloy rod is manufactured by the zone melting method and the Bridgman method by the crystal growth method with the axial direction of the rod as the <112> direction.
【０００６】ゾーンメルト法は、先ず、アーク溶解法な
どにより多結晶超磁歪合金を溶製し、さらに、合金を円
柱形状のロッドに形成する。このロッド状合金を、ロッ
ドの軸方向に移動可能に設置された高周波加熱あるいは
赤外集中加熱装置などにより連続的に熱処理し、一方向
的に結晶軸方向を揃えた結晶組織に変える。In the zone melting method, first, a polycrystalline giant magnetostrictive alloy is melted by an arc melting method or the like, and then the alloy is formed into a cylindrical rod. This rod-shaped alloy is continuously heat-treated by a high-frequency heating device or an infrared concentrated heating device, which is installed so as to be movable in the axial direction of the rod, and is transformed into a crystal structure in which the crystal axis directions are unidirectionally aligned.
【０００７】ブリッジマン法は、アーク溶解などにより
溶製された合金を坩堝に挿入し、所定の温度勾配を有す
る炉内にて合金を再溶解したのち、坩堝あるいは炉を一
方向に移動することにより坩堝を冷却し、一方向的な結
晶組織をもつ超磁歪合金を製造する。In the Bridgman method, an alloy produced by arc melting or the like is inserted into a crucible, the alloy is remelted in a furnace having a predetermined temperature gradient, and then the crucible or the furnace is moved in one direction. The crucible is cooled in accordance with to produce a giant magnetostrictive alloy having a unidirectional crystal structure.
【０００８】また、上記の方法のほかに、合金の融点近
傍まで加熱された鋳型を用いて溶解鋳造を行い、鋳型の
一方向から抜熱することにより一方向に結晶が発達成長
した合金を作製する、いわゆる一方向凝固法によっても
結晶配向型超磁歪合金ロッドを作製することができる。In addition to the above method, melting casting is performed using a mold heated to near the melting point of the alloy, and heat is removed from one direction of the mold to produce an alloy in which crystals develop and grow in one direction. The crystal orientation type giant magnetostrictive alloy rod can be produced by the so-called unidirectional solidification method.
【０００９】[0009]
【発明が解決しようとする課題】ゾーンメルト法には以
下のような問題がある。（１）高周波あるいは赤外集中
加熱により溶解された合金ロッドは、表面張力によりそ
の溶融状態を保持しているため、ロッドの直径が約１０
ｍｍ以上では溶滴の落下あるいはロッドの切断などの問
題が生じる。（２）結晶が一方向に配向するためには、
加熱装置を毎時数ｍｍから数１０ｍｍの低速度で移動さ
せなければならず、生産性が著しく悪い。（３）アーク
溶解などにより母合金を製造した後、一方向的な結晶組
織にするよう熱処理を施すという、二段階のプロセスを
踏むためコストが増大し、工業的に不利益である。The zone melt method has the following problems. (1) The alloy rod melted by high-frequency or infrared concentrated heating maintains its molten state due to surface tension, so the diameter of the rod is about 10
If it is more than mm, problems such as drop of droplets or cutting of rod occur. (2) In order for crystals to be oriented in one direction,
Since the heating device has to be moved at a low speed of several mm to several tens of mm per hour, the productivity is extremely poor. (3) Since a mother alloy is manufactured by arc melting or the like, and then heat treatment is performed so as to form a unidirectional crystal structure, the cost is increased because of a two-step process, which is industrially disadvantageous.
【００１０】ブリッジマン法においては以下のような問
題がある。（１）前記ゾーンメルト法における問題と同
様に、炉あるいは坩堝を毎時数ｍｍから数１０ｍｍの低
速度で移動させなければならず、生産性が著しく悪い。
（２）アーク溶解などにより母合金を製造したのち、坩
堝内で再び溶解、凝固させるという、二段階のプロセス
を踏むためコストが増大し、工業的に不利益である。
（３）坩堝内で長時間溶融状態を保持しなければならな
いため、坩堝からの汚染を防ぎえない。The Bridgman method has the following problems. (1) Similar to the problem in the zone melt method, the furnace or crucible must be moved at a low speed of several mm to several tens mm per hour, resulting in extremely poor productivity.
(2) Since the mother alloy is manufactured by arc melting or the like and then melted and solidified again in the crucible, the cost is increased because of the two-step process, which is industrially disadvantageous.
(3) Since the molten state must be maintained for a long time in the crucible, it is impossible to prevent contamination from the crucible.
【００１１】これに対して一方向凝固法は、溶解−鋳造
という単一プロセスから構成されているため、ゾーンメ
ルト法およびブリッジマン法に比較して生産性が高く、
低コストで結晶配向型ロッドを製造できるというメリッ
トがある。しかし、本発明者らの実験によると鋳型を加
熱すると同時に一方向から（普通は下方に冷し金を置
き）抜熱するという通常の一方向凝固法を超磁歪合金に
対して行うと、軸方向が〔１１０〕方向に配向したロッ
ドが得られる。これは、Ｐｒｏｃｅｅｄｉｎｇｓｏｆ
Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｓｙｍｐｏｓｉｕｍ ｏ
ｎ ＧｉａｎｔＭａｇｎｅｔｏｓｔｒｉｃｔｉｖｅ Ｍ
ａｔｅｒｉａｌｓ ａｎｄ Ｔｈｅｉｒ Ａｐｐｌｉｃ
ａｔｉｏｎｓ，ＧＭＭＡ＆Ａ Ｔｏｋｙｏ Ｓｙｍｐｏ
ｓｉｕｍ，ｐ３３−３８，１９９２にも報告されてい
る。ところが、前述のように、超磁歪合金の最大の磁歪
発生方向が〔１１１〕方向であるため、〔１１０〕方向
とのなす角度が約３５.３°であり、一方、〔１１１〕
方向と〔１１２〕方向とのなす角度は約１９.５゜なの
で、一方向凝固法で得られるロッドの磁歪特性は、〔１
１２〕方向に配向する前記ゾーンメルト法およびブリッ
ジマン法により製造されるロッドに劣るという問題があ
る。On the other hand, the unidirectional solidification method has a high productivity as compared with the zone melt method and the Bridgman method because it is composed of a single process of melting-casting.
There is an advantage that the crystal orientation type rod can be manufactured at low cost. However, according to the experiments conducted by the present inventors, when the normal unidirectional solidification method of heating the mold and simultaneously removing heat from one direction (usually by placing a cooling metal on the lower side) is performed on the giant magnetostrictive alloy, A rod whose direction is oriented in the [110] direction is obtained. This is Proceedings of
International Symposium o
n GiantMagnetostrictive M
materials and Their Applic
ations, GMMA & A Tokyo Sympo
It is also reported in the sium, p33-38,1992. However, as described above, since the maximum magnetostriction generation direction of the giant magnetostrictive alloy is the [111] direction, the angle formed with the [110] direction is about 35.3 °, while the [111] direction is
Since the angle between the direction and the [112] direction is approximately 19.5 °, the magnetostrictive characteristics of the rod obtained by the unidirectional solidification method are [1
12] There is a problem that it is inferior to the rod manufactured by the zone melt method and the Bridgman method which are oriented in the direction.
【００１２】本発明は、前述の結晶配向型超磁歪合金の
製造方法における諸問題を解決すること、即ち、ロッド
の軸方向に結晶軸の＜１１２＞方向が配向した磁歪特性
の優れた超磁歪合金ロッドを、低コストで容易に製造す
る方法を提供することを目的としている。The present invention solves various problems in the above-described method for producing a crystal orientation type giant magnetostrictive alloy, that is, a giant magnetostriction having excellent <RTIgt; magnetostriction </ RTI> characteristics in which the <112> direction of the crystal axis is oriented in the axial direction of the rod. It is an object of the present invention to provide a method for easily manufacturing an alloy rod at low cost.
【００１３】[0013]
【課題を解決するための手段】本発明は、ＲＴ ｘ （Ｒは
一種または二種以上の希土類金属、Ｔは鉄、コバルト、
ニッケル、マンガンから選択される一種または二種以上
を示し、ｘは１.５〜２.０）で示される組成からなる溶
融合金を一方向凝固させることにより超磁歪合金を作製
する方法において、各々独立に制御可能な加熱手段によ
り、前記溶融合金の凝固方向と直角をなす方向に温度勾
配をもたせて一方向凝固させることを特徴とする超磁歪
合金ロッドの製造方法である。また、上記の超磁歪合金
ロッドの製造方法において、前記溶融合金の凝固方向と
直角をなす方向の温度勾配が５℃／ｃｍ以上であること
を特徴とする超磁歪合金ロッドの製造方法である。 即
ち、本発明の超磁歪合金ロッドの製造方法は、以下の内
容をその要旨とする。（１）超磁歪合金としてＲＴ
ｘ（Ｒは一種または二種以上の希土類金属、Ｔは鉄、コ
バルト、ニッケル、マンガンから選択される一種また
は二種以上を示し、ｘは１.５〜２.０）合金を使用し、
不活性ガスを封入した真空容器内に設置された坩堝中
で、高周波加熱などにより前記合金を溶解する。（２）
一方向に抜熱可能な鋳型を真空容器内に設置し、前記鋳
型を６００〜１３００℃に加熱すると同時に、抜熱する
方向と直角をなす方向に温度勾配を設けておく。この温
度勾配は５℃／ｃｍ以上であることが望ましい。（３）
前記溶融状態の超磁歪合金を前記鋳型に注入し、一方向
的に抜熱することにより一方向凝固させる。According to the present invention, RT x (R is
One or more rare earth metals, T is iron, cobalt,
One or more selected from nickel and manganese
And x is a solution composed of the composition shown in 1.5 to 2.0).
Fabrication of giant magnetostrictive alloy by unidirectionally solidifying fusion metal
In the method of
Temperature gradient in a direction perpendicular to the solidification direction of the molten alloy.
Giant magnetostriction characterized by unidirectionally solidifying by placing
It is a method of manufacturing an alloy rod. In addition, the above giant magnetostrictive alloy
In the method for manufacturing a rod, the solidification direction of the molten alloy and
The temperature gradient in the direction that makes a right angle is 5 ° C / cm or more
Is a method of manufacturing a giant magnetostrictive alloy rod. Immediately
The gist of the method for manufacturing a giant magnetostrictive alloy rod of the present invention is as follows. (1) RT as a giant magnetostrictive alloy
x (R is one or more rare earth metals, T is one or more selected from iron, cobalt, nickel and manganese, and x is 1.5 to 2.0).
The alloy is melted by high-frequency heating or the like in a crucible installed in a vacuum container filled with an inert gas. (2)
A mold capable of heat removal in one direction is placed in a vacuum container, the mold is heated to 600 to 1300 ° C., and at the same time, a temperature gradient is provided in a direction perpendicular to the direction of heat removal. This temperature gradient is preferably 5 ° C./cm or more. (3)
The melted giant magnetostrictive alloy is injected into the mold and is unidirectionally solidified by unidirectionally removing heat.
【００１４】本発明の超磁歪合金ロッドの製造方法を図
面を用いてさらに詳細に説明する。図１は、本発明を用
いて、ロッドの軸方向に結晶軸の＜１１２＞方向が配向
した磁歪特性の優れた超磁歪合金ロッドを製造する装置
の一例を示している。不活性ガスを封入した真空容器１
内において、所定の超磁歪合金組成になるよう調整した
原料金属を坩堝２内に挿入する。真空容器１の底部には
鋳型下部３が設置され、さらに、鋳型下部３の上には、
６００〜１３００℃までの加熱に耐えうる材質からなる
鋳型上部４が置かれている。The method of manufacturing the giant magnetostrictive alloy rod of the present invention will be described in more detail with reference to the drawings. FIG. 1 shows an example of an apparatus for producing a giant magnetostrictive alloy rod excellent in magnetostriction characteristics in which the <112> direction of the crystal axis is oriented in the axial direction of the rod using the present invention. Vacuum container 1 containing an inert gas
Inside, a raw material metal adjusted to have a predetermined giant magnetostrictive alloy composition is inserted into the crucible 2. A lower mold part 3 is installed at the bottom of the vacuum container 1, and further on the lower mold part 3,
A mold upper part 4 made of a material capable of withstanding heating up to 600 to 1300 ° C. is placed.
【００１５】鋳型上部４は、金属製およびセラミックス
製いずれでもよいが、超磁歪合金への不純物の混入を防
止するために、Ａｌ2Ｏ3，ＣａＯ，ＭｇＯ，ＢＮ，Ｙ2
Ｏ3の少なくとも一つを主成分とするセラミックス製で
あることが望ましい。The upper part 4 of the mold may be made of metal or ceramics, but in order to prevent impurities from mixing into the giant magnetostrictive alloy, Al 2 O 3 , CaO, MgO, BN, Y 2 is used.
It is preferably made of ceramics containing at least one of O 3 as a main component.
【００１６】鋳型上部４の周囲には、図２に示している
ように、鋳型上部４を１３００℃まで加熱可能な抵抗加
熱式ヒーター５および６が設置されており、ヒーター５
および６はそれぞれ独立に制御することが可能になって
おり、鋳型上部４の水平方向（図面で左右の方向）の温
度勾配を任意に設定することができる。As shown in FIG. 2, resistance heating type heaters 5 and 6 capable of heating the upper mold part 4 to 1300 ° C. are installed around the upper mold part 4.
And 6 can be controlled independently of each other, and the temperature gradient of the upper part 4 of the mold in the horizontal direction (left and right direction in the drawing) can be arbitrarily set.
【００１７】坩堝２に挿入された超磁歪合金の原料を高
周波加熱により溶解し、１３００〜１６００℃まで加熱
する。また、ヒーター５および６により、鋳型上部４の
水平方向（図面で左右の方向）に温度勾配を設けながら
６００〜１３００℃に鋳型上部を加熱する。溶融状態の
超磁歪合金をタンディッシュ７を介して鋳型上部４およ
び鋳型下部３からなる鋳型に注入した後、例えば鋳型下
部３を水冷することにより鋳型下部３から鉛直方向に凝
固させる。The raw material of the giant magnetostrictive alloy inserted in the crucible 2 is melted by high frequency heating and heated to 1300 to 1600 ° C. The heaters 5 and 6 heat the upper part of the mold to 600 to 1300 ° C. while providing a temperature gradient in the horizontal direction (left and right in the drawing) of the upper part 4 of the mold. After the molten giant magnetostrictive alloy is injected into the mold composed of the upper mold part 4 and the lower mold part 3 through the tundish 7, the lower mold part 3 is water-cooled to be solidified in the vertical direction from the lower mold part 3.
【００１８】鋳型上部４において、水平方向（超磁歪合
金の凝固方向と直角方向で図面で左右の方向）に温度勾
配を有していることにより、鉛直方向に結晶軸が＜１１
２＞方向を有する配向材、すなわち、ロッドの軸方向に
結晶軸の＜１１２＞方向が配向した超磁歪ロッドが得ら
れる。Since the upper part 4 of the mold has a temperature gradient in the horizontal direction (the direction perpendicular to the solidification direction of the giant magnetostrictive alloy and to the left and right in the drawing), the crystal axis becomes <11 in the vertical direction.
An orientation material having a 2> direction, that is, a giant magnetostrictive rod in which the <112> direction of the crystal axis is oriented in the axial direction of the rod is obtained.
【００１９】鋳型上部４の水平方向の温度勾配は、５℃
／ｃｍ未満では温度勾配が小さいために、鉛直方向（ロ
ッドの軸方向）に＜１１２＞方向を完全に配向させるこ
とが困難であり、一部に＜１１０＞方向が成長するた
め、５℃／ｃｍ以上の温度勾配とすることが好ましい。The temperature gradient in the horizontal direction of the upper part 4 of the mold is 5 ° C.
If the temperature is less than 1 / cm, it is difficult to completely orient the <112> direction in the vertical direction (axial direction of the rod) because the temperature gradient is small, and the <110> direction is partially grown, so that the temperature is 5 ° C / It is preferable that the temperature gradient is cm or more.
【００２０】[0020]
【作用】本発明によれば、不活性ガスを封入した真空容
器内で溶解され、６００〜１３００℃に加熱された鋳型
に注入された超磁歪合金は、鋳型の一方向から抜熱して
いると同時に、抜熱している方向と直角をなす方向に温
度勾配を有しているために、抜熱している方向に＜１１
２＞方向が成長した合金を作製することができ、ロッド
の軸方向に＜１１２＞方向が配向した超磁歪合金を容易
に製造することができる。According to the present invention, the giant magnetostrictive alloy melted in a vacuum vessel containing an inert gas and injected into a mold heated to 600 to 1300 ° C. is removed from one direction of the mold. At the same time, since there is a temperature gradient in the direction perpendicular to the direction of heat removal, <11
An alloy in which the 2> direction has grown can be produced, and a giant magnetostrictive alloy in which the <112> direction is oriented in the axial direction of the rod can be easily manufactured.
【００２１】なお、一方向凝固法を用いてロッドの軸方
向に＜１１２＞方向が配向する理由について、詳細は明
らかではないが、水平方向に温度勾配を有していること
から水平方向に〔１１０〕方向が成長するために、それ
に伴なって、〔１１０〕と垂直をなす〔１,−１,２〕方
向が鉛直方向（ロッドの軸方向）に配向成長するものと
考えられる。The reason why the <112> direction is oriented in the axial direction of the rod using the unidirectional solidification method is not clear, but since it has a temperature gradient in the horizontal direction, it becomes Since the [110] direction grows, it is considered that the [1, -1,2] direction perpendicular to [110] grows in the vertical direction (axial direction of the rod).
【００２２】また、超磁歪合金ロッドを一方向に凝固さ
せて作製するため空隙や欠陥が少なく、溶融状態で坩堝
と接する時間が短いため不純物の少ない優れたロッドを
製造することができる。さらに、本発明は、溶解−鋳造
の単一工程で行われるため、製造コストを非常に小さく
することができる。Further, since the giant magnetostrictive alloy rod is produced by solidifying in one direction, there are few voids and defects, and since the contact time with the crucible in the molten state is short, an excellent rod with few impurities can be manufactured. Further, since the present invention is performed in a single step of melting-casting, the manufacturing cost can be greatly reduced.
【００２３】[0023]
【実施例】以下に実施例について詳細に説明する。EXAMPLES Examples will be described in detail below.
【００２４】（実施例１）図１および図２に示すよう
に、超磁歪合金ロッド製造のための鋳型を断面形状が円
形の鋳型上部４の材質をＡｌ2Ｏ3、鋳型下部３の材質を
銅として作製した。また、断面が半円の抵抗加熱ヒータ
ーを２個組み合わせることにより、円筒形状の鋳型加熱
用ヒーター５および６とした。Ｔｂ0.27Ｄｙ0.73Ｆｅ
1.9となるよう調整した原料金属を、アルゴン雰囲気中
で高周波溶解法によりアルミナ坩堝中で溶解し、同時に
鋳型上部４を鋳型加熱用ヒーター５および６により８５
０〜１２５０℃まで加熱した。ここで、鋳型加熱用ヒー
ター５および６をなす２個の抵抗加熱ヒーターをそれぞ
れ制御することにより、鋳型下部３の直上１０ｃｍの位
置での水平方向（図で左右方向）の温度勾配を約３５℃
／ｃｍとした。このとき、鋳型上部全体の水平方向の温
度勾配は、３０〜４０℃／ｃｍの範囲にあった。この鋳
型に溶融状態の合金を注入し、鋳型下部３から上方に向
って一方向凝固することにより、長さ２００ｍｍの超磁
歪合金ロッドを作製した。(Embodiment 1) As shown in FIGS. 1 and 2, a mold for manufacturing a giant magnetostrictive alloy rod is made of Al 2 O 3 having a circular cross section and Al 2 O 3 having a material of lower mold 3. Prepared as copper. In addition, cylindrical resistance heaters 5 and 6 were obtained by combining two resistance heaters having a semicircular cross section. Tb 0.27 Dy 0.73 Fe
The raw material metal adjusted to 1.9 was melted in an alumina crucible by a high-frequency melting method in an argon atmosphere, and at the same time, the upper part 4 of the mold was heated to 85 by mold heaters 5 and 6.
Heated to 0-1250 ° C. Here, by controlling the two resistance heating heaters forming the mold heating heaters 5 and 6, respectively, the temperature gradient in the horizontal direction (horizontal direction in the figure) at a position 10 cm directly above the lower mold part 3 is about 35 ° C.
/ Cm. At this time, the temperature gradient in the horizontal direction of the entire upper part of the mold was in the range of 30 to 40 ° C./cm. A molten alloy was poured into this mold and solidified upward from the lower part 3 of the mold to produce a giant magnetostrictive alloy rod having a length of 200 mm.
【００２５】（実施例２）実施例１と同様の鋳型、鋳型
加熱用ヒーターおよび原料金属をもちいて、高周波溶解
ならびに一方向凝固を実施した。鋳型上部４の温度は１
０００〜１２５０℃に加熱し、水平方向の温度勾配とし
ては、鋳型下部３の直上１０ｃｍの位置での水平方向
（図で左右方向）の温度勾配が約６０℃／ｃｍとなるよ
う設定した。このとき、鋳型上部全体の水平方向の温度
勾配は、４０〜６０℃／ｃｍの範囲にあった。この鋳型
に溶融状態の合金を注入し、鋳型下部から上方に向って
一方向凝固することにより、長さ２００ｍｍの超磁歪合
金ロッドを作製した。Example 2 Using the same mold, mold heating heater and raw material metal as in Example 1, high frequency melting and unidirectional solidification were carried out. The temperature of the upper part 4 of the mold is 1
It was heated to 000 to 1250 ° C, and the temperature gradient in the horizontal direction was set so that the temperature gradient in the horizontal direction (horizontal direction in the figure) at a position 10 cm directly above the lower part 3 of the mold was about 60 ° C / cm. At this time, the temperature gradient in the horizontal direction of the entire upper part of the mold was in the range of 40 to 60 ° C./cm. A molten alloy was poured into this mold and solidified in one direction upward from the lower part of the mold to manufacture a giant magnetostrictive alloy rod having a length of 200 mm.
【００２６】（比較例１）実施例１と同様の鋳型、鋳型
加熱用ヒーターおよび原料金属をもちいて、高周波溶解
ならびに一方向凝固を実施した。鋳型上部４の温度は１
０００〜１２５０℃に加熱し、水平方向の温度勾配は設
けない、通常の一方向凝固法により、長さ２００ｍｍの
超磁歪合金ロッドを作製した。(Comparative Example 1) Using a mold, a heater for heating a mold and a raw material metal similar to those in Example 1, high frequency melting and unidirectional solidification were carried out. The temperature of the upper part 4 of the mold is 1
A giant magnetostrictive alloy rod having a length of 200 mm was produced by a normal unidirectional solidification method in which the temperature was heated to 000 to 1250 ° C. and no horizontal temperature gradient was provided.
【００２７】前記それぞれの実施例ならびに比較例で得
た超磁歪合金ロッドを、ロッドの底面から１０ｃｍの位
置で、合金ロッドの軸方向と垂直に切断し、その切断面
をＸ線回折装置により測定した。The giant magnetostrictive alloy rods obtained in the respective examples and comparative examples were cut at a position 10 cm from the bottom surface of the rod perpendicular to the axial direction of the alloy rod, and the cut surface was measured by an X-ray diffractometer. did.
【００２８】図３は、実施例１で得られたロッドのＸ線
回折結果であり、（４２２）面がピークを示しており、
ロッドの軸方向に沿って＜１１２＞方向が配向している
ことが確認された。FIG. 3 is an X-ray diffraction result of the rod obtained in Example 1, in which the (422) plane shows a peak,
It was confirmed that the <112> direction was oriented along the axial direction of the rod.
【００２９】これに対し、比較例１で得られたロッドの
Ｘ線回折結果は図４に示すように、（２２０）面ならび
に（４４０）面がピークを示しており、ロッドの軸方向
に沿って＜１１０＞方向が配向していることを示してい
る。On the other hand, as shown in FIG. 4, the X-ray diffraction results of the rod obtained in Comparative Example 1 show peaks in the (220) plane and the (440) plane, which are along the axial direction of the rod. Indicates that the <110> direction is oriented.
【００３０】表１に、前述の実施例ならびに比較例で得
た超磁歪合金ロッドの、ロッド軸方向に沿った結晶配向
方向と、印加磁場に対する軸方向の磁歪値λ＝δｌ／ｌ
（単位；×１０-6）を示す。Table 1 shows the crystal orientation directions of the giant magnetostrictive alloy rods obtained in the above-mentioned Examples and Comparative Examples along the axial direction of the rod and the magnetostriction value λ = δl / l in the axial direction with respect to the applied magnetic field.
(Unit: × 10 -6 ) is shown.
【００３１】[0031]
【表１】 [Table 1]
【００３２】本発明により製造される超磁歪合金ロッド
は、その軸方向に沿って結晶軸が＜１１２＞方向に配向
しており、磁歪特性に優れることが確認された。なお、
本実施例では、ＴｂＤｙＦｅの例で示したが、これに限
定されない。例えば、ＴｂＦｅ、ＴｂＤｙ等、ＴｂＤｙ
Ｆｅと同様の結晶構造を有する合金も同様の効果が得ら
れる。 It was confirmed that the giant magnetostrictive alloy rod manufactured according to the present invention had crystal axes oriented in the <112> direction along the axial direction, and was excellent in magnetostrictive properties. In addition,
In the present embodiment, an example of TbDyFe is shown, but it is not limited to this.
Not determined. For example, TbFe, TbDy, etc., TbDy
An alloy having the same crystal structure as Fe has the same effect.
Be done.
【発明の効果】本発明により、ロッドの軸方向に沿って
＜１１２＞方向に結晶方位を揃えた配向材を一方向凝固
法により製造することが可能となり、磁歪特性に優れる
超磁歪合金ロッドを低コストで製造することが可能とな
った。According to the present invention, it is possible to manufacture an oriented material having crystal orientations aligned in the <112> direction along the axial direction of the rod by the unidirectional solidification method, and to obtain a super magnetostrictive alloy rod having excellent magnetostrictive characteristics. It has become possible to manufacture at low cost.
【図１】本発明により超磁歪合金ロッドを製造するため
の装置の構造の一例を示す概略の断面図。FIG. 1 is a schematic sectional view showing an example of the structure of an apparatus for producing a giant magnetostrictive alloy rod according to the present invention.
【図２】本発明により超磁歪合金ロッドを製造するため
の鋳型ならびに鋳型加熱用ヒーターの一例を示す説明図
で（ａ）は概略平面図、（ｂ）は概略断面図。2A and 2B are explanatory views showing an example of a mold and a heater for heating a mold for manufacturing a giant magnetostrictive alloy rod according to the present invention. FIG. 2A is a schematic plan view and FIG. 2B is a schematic sectional view.
【図３】ロッドの軸方向に結晶方位の＜１１２＞が揃っ
た超磁歪合金ロッドの断面のＸ線回折チャート。FIG. 3 is an X-ray diffraction chart of a cross section of a giant magnetostrictive alloy rod in which crystal orientations <112> are aligned in the axial direction of the rod.
【図４】ロッドの軸方向に結晶方位の＜１１０＞が揃っ
た超磁歪合金ロッドの断面のＸ線回折チャート。FIG. 4 is an X-ray diffraction chart of a cross section of a giant magnetostrictive alloy rod in which crystal orientations <110> are aligned in the axial direction of the rod.
１ 真空容器 ２ るつぼ ３ 鋳型下部 ４ 鋳型上部 ５ （鋳型加熱用）ヒーター ６ （鋳型加熱用）ヒーター ７ タンディッシュ ８ 高周波コイル 1 vacuum container 2 crucibles 3 Mold bottom 4 Upper part of mold 5 (for mold heating) heater 6 (mold heating) heater 7 Tundish 8 high frequency coil
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ Ｃ３０Ｂ 29/52 Ｃ３０Ｂ 29/52 (58)調査した分野(Int.Cl.7，ＤＢ名) C22C 1/02 B22D 27/04 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 identification code FI C30B 29/52 C30B 29/52 (58) Fields investigated (Int.Cl. 7 , DB name) C22C 1/02 B22D 27/04
Claims (2)
類金属、Ｔは鉄、コバルト、ニッケル、マンガンから選
択される一種または二種以上を示し、ｘは１.５〜２.
０）で示される組成からなる溶融合金を一方向凝固させ
ることにより超磁歪合金を作製する方法において、各々
独立に制御可能な加熱手段により、前記溶融合金の凝固
方向と直角をなす方向に温度勾配をもたせて一方向凝固
させることを特徴とする超磁歪合金ロッドの製造方法。1. RT x (R is one or more rare earth metals, T is one or more selected from iron, cobalt, nickel and manganese, and x is 1.5 to 2.
A method for making a super magnetostrictive alloy by a molten alloy having a composition represented by 0) be unidirectional solidification, respectively
A method of manufacturing a giant magnetostrictive alloy rod, characterized in that a unidirectionally solidifying a temperature gradient in a direction perpendicular to the solidifying direction of the molten alloy by an independently controllable heating means .
方法において、前記溶融合金の凝固方向と直角をなす方
向の温度勾配が５℃／ｃｍ以上であることを特徴とする
超磁歪合金ロッドの製造方法。2. The manufacture of the giant magnetostrictive alloy rod according to claim 1.
The method for producing a giant magnetostrictive alloy rod according to the method, wherein the temperature gradient in the direction perpendicular to the solidification direction of the molten alloy is 5 ° C./cm or more.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29268193A JP3367069B2 (en) | 1993-10-27 | 1993-10-27 | Manufacturing method of giant magnetostrictive alloy rod |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29268193A JP3367069B2 (en) | 1993-10-27 | 1993-10-27 | Manufacturing method of giant magnetostrictive alloy rod |
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| JP3367069B2 true JP3367069B2 (en) | 2003-01-14 |
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