JP3189661B2 - Light source device - Google Patents
Light source deviceInfo
- Publication number
- JP3189661B2 JP3189661B2 JP01850796A JP1850796A JP3189661B2 JP 3189661 B2 JP3189661 B2 JP 3189661B2 JP 01850796 A JP01850796 A JP 01850796A JP 1850796 A JP1850796 A JP 1850796A JP 3189661 B2 JP3189661 B2 JP 3189661B2
- Authority
- JP
- Japan
- Prior art keywords
- cooling air
- discharge lamp
- mercury discharge
- metal member
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001816 cooling Methods 0.000 claims description 82
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 80
- 229910052753 mercury Inorganic materials 0.000 claims description 80
- 229910052751 metal Inorganic materials 0.000 claims description 57
- 239000002184 metal Substances 0.000 claims description 57
- 238000007789 sealing Methods 0.000 claims description 36
- 230000003287 optical effect Effects 0.000 claims description 15
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 238000005538 encapsulation Methods 0.000 claims 1
- 230000008961 swelling Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 102220565735 Acid-sensing ion channel 4_F21S_mutation Human genes 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
- H01J61/822—High-pressure mercury lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
- H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
Landscapes
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
- Liquid Crystal (AREA)
- Fastening Of Light Sources Or Lamp Holders (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Projection Apparatus (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、集光ミラーにショ
ートアーク型水銀放電灯を組込んでなる光源装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light source device in which a short arc type mercury discharge lamp is incorporated in a focusing mirror.
【０００２】[0002]
【従来の技術】例えば液晶パネルの製造工程において、
当該パネルの露光用光源として、楕円状集光ミラーに、
紫外線放射用のショートアーク型水銀放電灯を配置して
なる光源装置が知られている。2. Description of the Related Art For example, in a manufacturing process of a liquid crystal panel,
As an exposure light source for the panel, an elliptical focusing mirror
A light source device having a short arc type mercury discharge lamp for ultraviolet radiation is known.
【０００３】図８は、このような光源装置の要部である
光源部を示す説明図であり、１は楕円状集光ミラー、２
は紫外線放射用の水銀放電灯である。この光源装置を構
成する水銀放電灯２は、発光空間を形成する中央膨出部
分３およびその両側に突出するよう伸びる封止管部４，
５よりなる封体を有し、この封体の封止管部４，５の端
部にはそれぞれ口金６，７が設けられている。FIG. 8 is an explanatory view showing a light source section which is a main part of such a light source device.
Is a mercury discharge lamp for ultraviolet radiation. A mercury discharge lamp 2 constituting this light source device has a central bulging portion 3 forming a light emitting space and a sealing tube portion 4 extending so as to protrude on both sides thereof.
The sealing pipes 4 and 5 of the sealing body are provided with caps 6 and 7, respectively.
【０００４】水銀放電灯２は、集光ミラー１の光軸に沿
って配置され、この水銀放電灯２からの放射光は、集光
ミラー１およびミラーやレンズなどの光学系（図示省
略）を介して被照射物に照射される。そして、図示しな
い冷却ファンにより、集光ミラー１の頂部側から前方開
口に向かって矢印で示すように冷却風が流され、この冷
却風により、集光ミラー１や水銀放電灯２が冷却され
る。The mercury discharge lamp 2 is arranged along the optical axis of the condenser mirror 1. The light emitted from the mercury discharge lamp 2 passes through the condenser mirror 1 and optical systems (not shown) such as mirrors and lenses. Irradiated on the object to be irradiated. Then, a cooling fan (not shown) causes cooling air to flow from the top side of the condenser mirror 1 toward the front opening as shown by an arrow, and the condenser mirror 1 and the mercury discharge lamp 2 are cooled by the cooling air. .
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記の
ような光源装置においては、水銀放電灯２が長時間点灯
されたときに、集光ミラー１の前方開口側に位置する封
止管部５の口金（以下において「前方口金」ともい
う。）７の温度が２２０〜２５０℃程度まで昇温し、こ
れに伴い、当該封止管部５の温度も２５０〜４００℃程
度に達する。然るに、封止管部がこのような過熱状態と
なると、当該封止管部に埋設されている給電用の通常モ
リブデンよりなる金属箔の酸化反応が大きく進行し、こ
の酸化に伴って金属箔に体積膨張が生ずるために当該封
止管部にクラックが生じ、その結果、水銀放電灯の封体
が破損する、という問題がある。However, in the light source device as described above, when the mercury discharge lamp 2 is turned on for a long time, the sealing tube portion 5 located on the front opening side of the condenser mirror 1 is closed. The temperature of the base (hereinafter also referred to as “front base”) 7 rises to about 220 to 250 ° C., and accordingly, the temperature of the sealing tube 5 also reaches about 250 to 400 ° C. However, when the sealing tube portion is in such an overheated state, the oxidation reaction of the metal foil made of normal molybdenum for power supply embedded in the sealing tube portion greatly progresses, and the metal foil becomes There is a problem that the volume expansion causes cracks in the sealing tube portion, and as a result, the sealing body of the mercury discharge lamp is damaged.
【０００６】上記のような問題に対して、冷却ファンに
よる冷却風の量を増加させることにより冷却効果を高
め、前方口金および封止管部の温度を低下させることが
考えられる。しかしながら、このような手段では、水銀
放電灯の封体全体の温度が低下してしまうため、当該封
体内に封入されている発光物質である水銀の全部を完全
に蒸発させることができなくなる、という別の問題を生
じる。To solve the above problem, it is conceivable that the cooling effect is enhanced by increasing the amount of cooling air by the cooling fan, and the temperatures of the front die and the sealing tube are reduced. However, with such a means, since the temperature of the entire envelope of the mercury discharge lamp decreases, it is impossible to completely evaporate all of the mercury, which is a luminescent substance, enclosed in the envelope. Another problem arises.
【０００７】以上のよう背景から、水銀放電灯の前方口
金に金属板製の冷却用フィンを設けることが提案されて
いる。このフィンは、放射される光を遮断しないよう冷
却風の流れる方向、すなわち集光ミラーの光軸方向に沿
って伸びるよう設けられる。そして、この冷却用フィン
を設けることにより放熱面積が大幅に増加するので、上
記の問題を解決するうえで有効であり、更に集光ミラー
の前方開口が上流となる状態で冷却風を流すことによ
り、一層高い効率で前方口金を冷却することができる。[0007] From the above background, it has been proposed to provide a cooling fin made of a metal plate on a front base of a mercury discharge lamp. The fins are provided so as to extend along the direction in which the cooling air flows, ie, along the optical axis of the condenser mirror, so as not to block emitted light. The provision of the cooling fins significantly increases the heat radiation area, which is effective in solving the above-described problem. The front base can be cooled with higher efficiency.
【０００８】上記のようなショートアーク型水銀放電灯
による光源装置は、例えば液晶ディスプレイ装置の製造
における露光用紫外線光源装置として好適に使用される
が、最近、液晶ディスプレイ装置の大面積化が要求され
ており、これに応えるための光源装置として、大きな面
積の被照射領域の全体に対し、所定の強度のしかも均一
な照度分布で紫外線を照射することのできるものが必要
である。A light source device using a short arc type mercury discharge lamp as described above is suitably used, for example, as an ultraviolet light source device for exposure in the manufacture of a liquid crystal display device. However, recently, a large area of the liquid crystal display device has been required. Therefore, a light source device that can irradiate the entire region to be irradiated with a large area with ultraviolet light having a predetermined intensity and a uniform illuminance distribution is required as a light source device for responding to this.
【０００９】このような光源装置の水銀放電灯として
は、定格消費電力が例えば２．５ｋＷ以上のように大き
なものが必要である。然るに、このように定格消費電力
の大きい水銀放電灯を具えた光源装置においては、前方
口金が十分に冷却されるように集光ミラーの前方開口か
ら冷却風が流れるようにすると、当該水銀放電灯から十
分な強度の紫外線が放射されない場合があり、その原因
について研究したところ、封体内に封入された水銀の全
部が完全に蒸発していないことが判明した。As the mercury discharge lamp of such a light source device, a lamp having a large rated power consumption of, for example, 2.5 kW or more is required. However, in such a light source device having a mercury discharge lamp having a large rated power consumption, when the cooling air flows from the front opening of the condenser mirror so that the front base is sufficiently cooled, the mercury discharge lamp is In some cases, ultraviolet light of sufficient intensity was not radiated from, and a study of the cause revealed that all of the mercury enclosed in the envelope had not completely evaporated.
【００１０】具体的に、その理由は次のとおりであると
考えられる。すなわち、定格消費電力の大きな水銀放電
灯においては、封体内に多量の水銀を封入することが必
要であるところ、多量に封入された水銀が完全に蒸発す
るためには、封体の発光空間を包囲するすべての管壁部
分が十分に高温となっている必要がある。しかし、定格
消費電力の大きい水銀放電灯では、封体の中央膨出部分
の最大外径が大きくなっているためにその放熱面積が相
当に大きく、そのため、前方からの冷却風によって、当
該中央膨出部分の前方を向いた前面領域が過冷却状態と
なってしまい、その結果、封入された水銀の全部が完全
に蒸発しない状態となるのである。然るに、冷却風の量
を減少させると、水銀が完全に蒸発した状態を得ること
はできるが、今度は前方口金の過熱状態を防止すること
ができない。[0010] Specifically, the reason is considered to be as follows. In other words, in a mercury discharge lamp with a large rated power consumption, it is necessary to enclose a large amount of mercury in the enclosure. All surrounding tube walls must be sufficiently hot. However, in a mercury discharge lamp having a large rated power consumption, the heat dissipation area is considerably large because the maximum outer diameter of the central bulge portion of the envelope is large, and therefore, the central bulge is cooled by cooling air from the front. The front region facing the front of the exit portion is supercooled, and as a result, all of the enclosed mercury does not completely evaporate. However, when the amount of cooling air is reduced, it is possible to obtain a state in which mercury is completely evaporated, but this time, it is not possible to prevent an overheating state of the front base.
【００１１】以上のように、従来の光源装置において
は、定格消費電力の大きい水銀放電灯では前方口金およ
び封体の中央膨出部分の両方を適切に冷却することがで
きないという問題点がある。本発明は以上のような事情
に基いてなされたものであって、本発明の目的は、定格
消費電力が３．５ｋＷ以上の水銀放電灯が集光ミラー内
に配置され、集光ミラーの前方開口から流れる冷却風を
発生させる手段を有する光源装置であって、水銀放電灯
を点灯したときに、封入された水銀の全部が完全に蒸発
して十分大きな強度の光放射が得られると共に、当該水
銀放電灯の前方口金の過熱状態を有効に防止することの
できる光源装置を提供することにある。As described above, the conventional light source device has a problem that in a mercury discharge lamp having a large rated power consumption, it is not possible to appropriately cool both the front base and the central bulging portion of the envelope. The present invention has been made in view of the above circumstances, and an object of the present invention is to dispose a mercury discharge lamp having a rated power consumption of 3.5 kW or more in a converging mirror, and forward the mercury discharge lamp in front of the converging mirror. A light source device having means for generating cooling air flowing from an opening, wherein when a mercury discharge lamp is turned on, all of the enclosed mercury is completely evaporated to obtain light emission of sufficiently high intensity, and An object of the present invention is to provide a light source device capable of effectively preventing an overheated state of a front base of a mercury discharge lamp.
【００１２】[0012]
【課題を解決するための手段】本発明の光源装置は、集
光ミラーと、この集光ミラーの光軸に沿って伸びるよう
配置された、中央膨出部分と両端の封止管部とを有する
封体を具えてなり、水銀の封入量が２５ｍｇ／ｃｍ3 以
上で、定格消費電力が２．５ｋＷ以上の水銀放電灯と、
集光ミラーの前方開口から中央基部に向かって流れるよ
う冷却風を発生させる冷却風発生手段と、水銀放電灯の
前方側封止管部の口金の外周面に形成された半径方向外
方に突出する冷却風偏向部分からなる金属部材、また
は、水銀放電灯の前方側封止管部の口金に設けられた固
定用筒部より半径方向外方に突出する冷却風偏向部分か
らなる金属部材と、を有してなり、金属部材の冷却風偏
向部分は、集光ミラーの前方開口からの冷却風を光軸か
ら離間するよう外方に偏向させることを特徴とする。上
記の金属部材は、光軸に直角な面内における最大径が、
封体の中央膨出部分の外径以下であることが好ましい。
また、金属部材の冷却風偏向部分は、水銀放電灯の封体
の中央膨出部分の前面領域を覆うカバー部分を有するこ
とができる。According to the present invention, there is provided a light source device comprising: a condensing mirror; a central bulging portion and sealing pipe portions at both ends which are arranged to extend along the optical axis of the converging mirror. A mercury discharge lamp having a mercury filling amount of 25 mg / cm 3 or more and a rated power consumption of 2.5 kW or more;
Cooling air generating means for generating cooling air flowing from the front opening of the condenser mirror toward the central base, and a radially outer surface formed on an outer peripheral surface of a base of a front sealing tube portion of the mercury discharge lamp.
Metal member consisting of a cooling air deflecting part projecting toward
Is a solid fixture provided on the base of the front sealing tube of the mercury discharge lamp.
Is the cooling air deflection part projecting radially outward from the fixed cylinder
And a metal member comprising:
Direction, the cooling air from the front opening of the collecting mirror
It is characterized in that it is deflected outward so as to be separated from it . The above metal member has a maximum diameter in a plane perpendicular to the optical axis,
It is preferable that the outer diameter be equal to or less than the outer diameter of the central bulging portion of the sealing body.
Further, the cooling air deflecting portion of the metal member may have a cover portion that covers a front area of the central bulging portion of the envelope of the mercury discharge lamp.
【００１３】本発明の構成によれば、水銀放電灯の前方
側封止管部の口金に、冷却風を外方に偏向させる冷却風
偏向部分を有する金属部材が設けられているため、当該
金属部材が冷却風によって高い効率で冷却されるように
なり、従って水銀放電灯の前方口金が十分に冷却されて
当該前方側封止管部が過熱状態となることが確実に防止
される。しかも、金属部材の冷却風偏向部分により、水
銀放電灯の封体の中央膨出部分の前面領域に冷却風の流
れが直接に衝突することが防止されるため、中央膨出部
分に過冷却状態の個所が生ずることがなく、その結果、
封入された水銀の全部が完全に蒸発し、所期の大きな放
射強度が得られる。さらに、当該水銀放電灯の中央膨出
部分は相当に大きいものであるため、集光ミラーとの組
合せにおいて、照射される光を大きく犠牲にすることな
しに、金属部材の冷却風偏向部分の径が比較的大きいも
のを用いることができる。According to the structure of the present invention, since the metal member having the cooling air deflecting portion for deflecting the cooling air outward is provided in the base of the front sealing tube of the mercury discharge lamp.
The metal member is cooled by the cooling air with high efficiency, so that the front base of the mercury discharge lamp is sufficiently cooled and the front sealing tube portion is reliably prevented from being overheated. In addition, the cooling air deflecting portion of the metal member prevents the flow of the cooling air from directly colliding with the front area of the central bulging portion of the envelope of the mercury discharge lamp. Is not generated, and as a result,
All of the enclosed mercury evaporates completely, providing the desired high radiation intensity. Further, since the central bulge portion of the mercury discharge lamp is considerably large, in combination with the condensing mirror, the diameter of the cooling air deflecting portion of the metal member can be reduced without largely sacrificing the irradiated light. Can be used.
【００１４】[0014]
【発明の実施の形態】以下、本発明の実施例について説
明するが、本発明の範囲は、これらによって限定される
ものではない。Embodiments of the present invention will be described below, but the scope of the present invention is not limited by these embodiments.
【００１５】図１は、本発明の光源装置の一例を示す説
明図である。図１において、１０はショートアーク型水
銀放電灯、２０は金属部材、３０はランプハウス、４０
はランプハウス３０内に収納された楕円状の集光ミラ
ー、７０は空気吸引口、８１および８２は一対のコール
ドミラー、８３はインテグレータレンズなどを備えた光
学ユニットであり、水銀放電灯１０は集光ミラー４０内
にその光軸に沿って配置されている。FIG. 1 is an explanatory view showing an example of the light source device of the present invention. In FIG. 1, 10 is a short arc type mercury discharge lamp, 20 is a metal member , 30 is a lamp house, 40
Is an elliptical condenser mirror housed in the lamp house 30, 70 is an air suction port, 81 and 82 are a pair of cold mirrors, 83 is an optical unit equipped with an integrator lens and the like, and the mercury discharge lamp 10 is a condenser. It is arranged inside the optical mirror 40 along its optical axis.
【００１６】集光ミラー４０は、内面に紫外線反射層が
コートされた凹面反射鏡であり、集光ミラー４０の開口
の大きさは、水銀放電灯１０の大きさなどによっても異
なるが、例えば１５０〜４００ｍｍとされる。The condensing mirror 40 is a concave reflecting mirror having an inner surface coated with an ultraviolet reflecting layer. The size of the opening of the converging mirror 40 varies depending on the size of the mercury discharge lamp 10 and the like. ４００400 mm.
【００１７】空気吸引口７０はランプハウス３０の壁面
に設けられ、このランプハウス３０の外部に配置された
吸込式の冷却ファン（図示省略）に接続されている。こ
の空気吸引口７０からランプハウス３０内の空気が排出
されることにより、集光ミラー４０内において、前方開
口から頂部に向かって流れる冷却風が発生する（ランプ
ハウス３０内における冷却風の流れ方向を矢印で示
す）。The air suction port 70 is provided on the wall of the lamp house 30 and is connected to a suction-type cooling fan (not shown) disposed outside the lamp house 30. When the air in the lamp house 30 is exhausted from the air suction port 70, cooling air flowing from the front opening toward the top is generated in the condenser mirror 40 (the flow direction of the cooling air in the lamp house 30). Is indicated by an arrow).
【００１８】このような構成の光源装置によれば、水銀
放電灯１０からの放射光は集光ミラー４０を経てあるい
は直接に前方開口から前方に投射され、コールドミラー
８１に到達して反射され、光学ユニット８３およびコー
ルドミラー８２を経てランプハウス３０の照射窓３１か
ら被照射物Ｓに照射される。According to the light source device having such a configuration, the radiated light from the mercury discharge lamp 10 is projected forward from the front opening through the condenser mirror 40 or directly, reaches the cold mirror 81 and is reflected therefrom. The irradiation target S is irradiated from the irradiation window 31 of the lamp house 30 through the optical unit 83 and the cold mirror 82.
【００１９】図２は、本発明の光源装置に組込まれるシ
ョートアーク型水銀放電灯１０の一例を示す説明図であ
る。この例の水銀放電灯１０は、発光空間を形成する中
央膨出部分１１Ａおよびその両側に突出するよう伸びる
棒状の封止管部１１Ｂ，１１Ｃよりなる封体１１を有
し、封体１１の中央膨出部分１１Ａ内において陰極１２
および陽極１３が対向する状態に配置され、封体１１の
封止管部１１Ｂ，１１Ｃの先端には口金１４，１５が設
けられて構成されている。この水銀放電灯１０の前方側
封止管部１１Ｃに係る口金１５には、金属部材２０が取
り付けられている。FIG. 2 is an explanatory view showing an example of a short arc type mercury discharge lamp 10 incorporated in the light source device of the present invention. The mercury discharge lamp 10 of this example has a central bulging portion 11A forming a light emitting space and a sealing body 11 composed of bar-shaped sealing tube portions 11B and 11C extending so as to protrude on both sides thereof. The cathode 12 in the bulging portion 11A
And the anode 13 are arranged to face each other, and caps 14 and 15 are provided at the tips of the sealing tube portions 11B and 11C of the sealing body 11. A metal member 20 is attached to a base 15 associated with the front sealing tube portion 11C of the mercury discharge lamp 10.
【００２０】図３は、図２の水銀放電灯１０における金
属部材２０を示す斜視図である。この金属部材２０は口
金１５の外周に嵌着されるものであり、口金１５の外径
に適合する内径の貫通孔Ｈを有する円管状の固定用筒部
２１と、この固定用筒部２１の外周面から外方に突出す
る冷却風偏向部分２２とにより構成され、これらはアル
ミニウム、銅などの熱伝導率の高い金属材料によって一
体的に形成されている。FIG. 3 shows the gold in the mercury discharge lamp 10 of FIG.
It is a perspective view which shows the metal member 20. The metal member 20 is fitted on the outer periphery of the base 15, and has a cylindrical fixing cylindrical portion 21 having a through hole H having an inner diameter adapted to the outer diameter of the base 15. The cooling air deflecting portions 22 project outward from the outer peripheral surface, and are integrally formed of a metal material having high thermal conductivity such as aluminum and copper.
【００２１】この金属部材２０の冷却風偏向部分２２
は、前方から流れて来る冷却風（矢印でその方向が示さ
れている）を光軸から離間するよう、すなわち固定用筒
部２１の半径方向外方に偏向させるよう、固定用筒部２
１の半径方向外方に突出する形態を有するものであれば
よく、その具体的な形状は限定されず、種々の形状とす
ることができる。The cooling air deflecting portion 22 of the metal member 20
The fixing cylinder 2 is arranged so that the cooling air flowing from the front (the direction of which is indicated by an arrow) is separated from the optical axis, that is, deflected radially outward of the fixing cylinder 21.
Any shape may be used as long as it has a form projecting outward in the radial direction, and the specific shape is not limited, and may be various shapes.
【００２２】図示の金属部材２０は、固定用筒部２１の
中央膨出部分側の端部（冷却風の流れの下流側端部、図
３で下端部）に、軸方向に直角な面に沿って外方に突出
する円形鍔状フィン２２Ａにより冷却風偏向部分２２が
形成され、同時に、各々半径方向外方に放射状に突出し
軸方向に伸びて円形鍔状フィン２２Ａに至る順方向フィ
ンＦが形成されて構成されている。The illustrated metal member 20 is formed on an end (the downstream end of the flow of cooling air, the lower end in FIG. 3) on the side of the central bulging portion of the fixing cylinder 21 and a surface perpendicular to the axial direction. The cooling air deflecting portion 22 is formed by the circular flange fins 22A protruding outward along the same direction. At the same time, the forward fins F radially outwardly projecting and extending in the axial direction to reach the circular flange fins 22A are formed. It is formed and configured.
【００２３】図４〜図６は、それぞれ異なる形態の金属
部材２０の例を示す。図４の金属部材２０は、複数（図
の例では３枚）の円形鍔状フィン２２Ａが互いに軸方向
に離間する位置に設けられてなる重層円形鍔状フィンに
より冷却風偏向部分２２が形成されて構成されている。
図５の金属部材２０は、固定用筒部２１の外周面に、半
径方向外方に突出し軸方向に次第に変位して螺旋状に伸
びるスクリューフィン２２Ｂにより冷却風偏向部分２２
が形成されて構成されている。FIGS. 4 to 6 show different forms of metal.
The example of the member 20 is shown. In the metal member 20 of FIG. 4, the cooling air deflecting portion 22 is formed by a multilayer circular flange fin in which a plurality of (three in the example in the figure) circular flange fins 22 </ b> A are provided at positions separated from each other in the axial direction. It is configured.
The metal member 20 shown in FIG. 5 is provided on the outer peripheral surface of the fixing tubular portion 21 by a screw fin 22B which projects radially outward, gradually displaces in the axial direction, and extends in a spiral manner.
Is formed.
【００２４】図６の金属部材２０は、固定用筒部２１の
下流側部分の外周面に、中央膨出部分側端部に向かうに
従って次第に半径が大きくなる全体が円錐台状のホーン
状フィン２２Ｃにより冷却風偏向部分２２が形成されて
構成されている。The metal member 20 shown in FIG. 6 has a horn-like fin 22C having a truncated conical shape on the outer peripheral surface of a downstream portion of the fixing tubular portion 21. The cooling air deflecting portion 22 is thus formed.
【００２５】金属部材２０を構成する固定用筒部２１の
高さＬは口金１５の高さ（ランプ軸方向における長さ）
の０．５倍〜１．５倍程度であることが好ましい。この
高さＬが過大である場合には、前方に投射される光が徒
に遮断されるために光の利用率が低下する。The height L of the fixing cylinder 21 constituting the metal member 20 is the height of the base 15 (length in the lamp axis direction).
It is preferably about 0.5 to 1.5 times of the above. When the height L is excessively large, the light projected forward is unnecessarily blocked, so that the light utilization rate decreases.
【００２６】冷却風偏向部分２２の最大外径、すなわち
軸方向投影像における輪郭の外径Ｒの最大値は、水銀放
電灯１０の中央膨出部分１１の最大外径Ｄ以下とされ、
冷却風偏向部分２２の軸方向投影像は、中央膨出部分１
１の軸方向投影像の領域内に収まることが必要である。
ここにＲ＞Ｄであると、前方に投射される光が大きく遮
断されるために光の利用率が低下する。冷却風偏向部分
２２の最大外径Ｒの寸法および中央膨出部分１１の最大
外径Ｄに対する比率は、冷却風偏向部分２２の具体的な
形態、軸方向の長さ（設置領域の長さ）、当該金属部材
２０の装着位置、その他の条件によって異なり、また冷
却風の量や流れの状態によっても異なるので、一概に規
定することはできないが、例えばＤに対するＲの比率
は、５〜９０％、好ましくは１０〜８０％、特に２０〜
６０％であることが好ましい。The maximum outer diameter of the cooling air deflecting part 22, that is, the maximum value of the outer diameter R of the contour in the axial projection image is set to be equal to or less than the maximum outer diameter D of the central bulging part 11 of the mercury discharge lamp 10.
The axially projected image of the cooling air deflecting part 22 is the central bulging part 1.
It is necessary to fit within the area of one axial projection image.
Here, if R> D, the light projected forward is largely blocked, so that the light utilization rate decreases. The size of the maximum outer diameter R of the cooling air deflecting portion 22 and the ratio to the maximum outer diameter D of the central bulging portion 11 are determined by the specific form of the cooling air deflecting portion 22 and the axial length (length of the installation area). Since it depends on the mounting position of the metal member 20 and other conditions, and also on the amount of cooling air and the state of the flow, it cannot be unconditionally specified. For example, the ratio of R to D is 5 to 90%. , Preferably 10-80%, especially 20-
Preferably it is 60%.
【００２７】金属部材２０の冷却風偏向部分２２の肉厚
は例えば０．５〜５ｍｍとされる。この肉厚が０．５ｍ
ｍより小さい場合には、当該冷却風偏向部分２２の熱伝
導の程度が低いため十分な放熱効果が得られない。ま
た、この肉厚が５ｍｍより大きい場合には、重量が大き
くなる。The thickness of the cooling air deflection portion 22 of the metal member 20 is, for example, 0.5 to 5 mm. This wall thickness is 0.5m
If it is smaller than m, a sufficient heat dissipation effect cannot be obtained because the degree of heat conduction of the cooling air deflection portion 22 is low. If the thickness is larger than 5 mm, the weight increases.
【００２８】金属部材２０の冷却風偏向部分２２が冷却
風の流れに対して直角方向に伸びるものでなく、例えば
図６のホーン状フィン２２Ｃのように冷却風の下流側に
向かうに従って外方に傾斜する冷却風偏向面を有する場
合には、冷却風を円滑に外方に偏向させる作用を有し、
冷却風の流れが大きく乱されないので好ましい。The cooling air deflecting portion 22 of the metal member 20 does not extend in a direction perpendicular to the flow of the cooling air. For example, the horn fins 22C shown in FIG. When having a cooling air deflecting surface that is inclined, it has an action of smoothly deflecting the cooling air outward.
This is preferable because the flow of the cooling air is not greatly disturbed.
【００２９】金属部材２０の固定用筒部２１を、前方側
封止管部の口金１５に固定するための手段は特に限定さ
れるものではない。例えば、固定用筒部２１に軸方向ス
リットを形成しておき、これを拡開させて水銀放電灯１
０の前方側封止管部の口金１５に嵌着することができ
る。この場合には、固定用筒部２１の復元力によってそ
の内周面が口金１５の外周面に密着した状態が容易に得
られ、良好な熱伝導路が確保される。The means for fixing the fixing tubular portion 21 of the metal member 20 to the base 15 of the front sealing tube is not particularly limited. For example, an axial slit is formed in the fixing cylinder portion 21, and the slit is expanded to form a mercury discharge lamp 1.
0 can be fitted to the base 15 of the front sealing tube portion. In this case, a state in which the inner peripheral surface is in close contact with the outer peripheral surface of the base 15 is easily obtained by the restoring force of the fixing cylinder portion 21, and a good heat conduction path is secured.
【００３０】以上において、固定用筒部２１の内周面
と、口金１５の外周面とが接触していない部分には、そ
の隙間に熱伝導性グリースを充填することが好ましい。
これによって、口金１５から金属部材２０への熱伝導性
が向上し、口金１５の冷却効果を高めることができる。In the above, it is preferable to fill the gap between the inner peripheral surface of the fixing tubular portion 21 and the outer peripheral surface of the base 15 with heat conductive grease in the gap.
Thereby, the heat conductivity from the base 15 to the metal member 20 is improved, and the cooling effect of the base 15 can be enhanced.
【００３１】金属部材２０は、水銀放電灯１０の前方側
封止管部の口金１５の外周面に直接、一体的に形成され
ていてもよい。この場合には、金属部材２０は、固定用
の部分が不要であるから、固定用筒部２１を有さずに冷
却風偏向部分２２のみからなるものとすることができ
る。このように、口金自体に冷却風偏向部分が形成され
ている場合には、良好な熱伝導状態が得られるので、一
層高い冷却効果が得られる。The metal member 20 may be directly and integrally formed on the outer peripheral surface of the base 15 of the front sealing tube portion of the mercury discharge lamp 10. In this case, since the metal member 20 does not need a fixing portion, the metal member 20 can be formed only of the cooling air deflecting portion 22 without the fixing tube portion 21. As described above, when the cooling air deflecting portion is formed on the base itself, a good heat conduction state can be obtained, so that a higher cooling effect can be obtained.
【００３２】上記のような構成の光源装置によれば、水
銀放電灯１０が定格消費電力の大きいものである場合に
も、当該水銀放電灯１０の前方側封止管部１１Ｃは、そ
の口金１５に設けられた金属部材２０の冷却風偏向部分
２２が効率的に冷却風の作用を受けるために十分に高い
冷却効果で冷却され、従って当該封止管部１１Ｃが過熱
状態となることが有効にかつ確実に防止されるので、封
止管部１１Ｃにおけるクラックなどの発生を防止するこ
とができる。しかも、金属部材２０は冷却風偏向部分２
２を有することにより、前方からの冷却風が光軸方向か
ら外方に向かって偏向されるので、水銀放電灯１０の中
央膨出部分１１Ａの前面領域が過冷却状態となることが
有効に防止され、その結果、封体１１内に封入された水
銀の全部が完全に蒸発するので、常に所期の十分な放射
強度の発光を得ることができる。According to the light source device having the above-described configuration, even when the mercury discharge lamp 10 has a large rated power consumption, the front sealing tube portion 11C of the mercury discharge lamp 10 has its base 15 The cooling air deflecting portion 22 of the metal member 20 provided in the cooling member is cooled with a sufficiently high cooling effect to efficiently receive the action of the cooling air, so that the sealing pipe portion 11C effectively becomes overheated. Further, since it is reliably prevented, it is possible to prevent cracks and the like from occurring in the sealing tube portion 11C. In addition, the metal member 20 is the cooling air deflecting portion 2
2, the cooling air from the front is deflected outward from the optical axis direction, so that the front area of the central bulging portion 11A of the mercury discharge lamp 10 is effectively prevented from being supercooled. As a result, all of the mercury sealed in the envelope 11 completely evaporates, so that the desired emission of sufficient radiation intensity can always be obtained.
【００３３】金属部材２０が図６に示されているような
ホーン状フィン２２Ｃを有する場合には、図７に示すよ
うに、当該金属部材２０を水銀放電灯１０の中央膨出部
分１１に接近させて配置することにより、当該ホーン状
フィン２２Ｃ内に中央膨出部分１１の前面領域１１Ｆが
収容された状態となり、当該ホーン状フィン２２Ｃによ
り当該前面領域１１ＦがギャップＧを介して蔽われた状
態となるが、この状態において、例えばギャップＧの寸
法を十分に小さく、例えば５ｍｍ以下に設定すると、上
述の効果に加え、ホーン状フィン２２Ｃが中央膨出部分
１１の前面領域１１Ｆに対して保温作用を発揮する効果
を得ることができる。[0033] When having horn shaped fins 22C as metal member 20 is shown in FIG. 6, as shown in FIG. 7, close to the metal member 20 in the central bulging portion 11 of the mercury discharge lamp 10 By arranging the horn-shaped fins 22C, the front area 11F of the central bulging portion 11 is accommodated in the horn-shaped fin 22C, and the front area 11F is covered by the horn-shaped fin 22C via the gap G. However, in this state, if the dimension of the gap G is set to be sufficiently small, for example, 5 mm or less, in addition to the above-described effects, the horn-shaped fins 22 </ b> C have a heat retaining action on the front surface region 11 </ b> F of the central bulging portion 11. Can be obtained.
【００３４】本発明において、金属部材は、集光ミラー
の前方開口からの冷却風を光軸から外方に偏向させる冷
却風偏向部分を有するものであればよいので、種々の形
態とすることができる。例えば、図３〜図６に示されて
いる金属部材２０の冷却風偏向部分２２は、いずれも固
定用筒部２１の周方向に３６０度にわたって連続する形
状を有するが、周方向において分割されたものであって
もよく、また冷却風偏向部分には、適宜スリットや貫通
孔が形成されていてもよい。また図４の例のように、複
数の冷却風偏向部分２２を軸方向に重なる状態で設ける
こともできる。更に、冷却風偏向部分を含む金属部材の
表面には微小凹凸形成加工を施すことも可能である。In the present invention, the metal member may be of any type as long as it has a cooling air deflecting portion for deflecting the cooling air from the front opening of the condenser mirror outward from the optical axis. it can. For example, the cooling air deflecting portion 22 of the metal member 20 shown in FIGS. 3 to 6 has a shape that continues 360 degrees in the circumferential direction of the fixing tubular portion 21, but is divided in the circumferential direction. The slits and through holes may be appropriately formed in the cooling air deflection portion. Also, as in the example of FIG. 4, a plurality of cooling air deflecting portions 22 can be provided in a state of overlapping in the axial direction. Further, the surface of the metal member including the cooling air deflecting portion can be subjected to a fine unevenness forming process.
【００３５】[0035]
【実施例】図１に示した構成に従って本発明の光源装置
を製造した。この光源装置の具体的詳細は以下のとおり
である。EXAMPLE A light source device according to the present invention was manufactured according to the structure shown in FIG. The specific details of this light source device are as follows.
【００３６】〔イ〕ランプハウス（３０）の大きさは、
高さ５００ｍｍ、幅１０００ｍｍ、奥行４００ｍｍ、内
容積が２００，０００ｃｍ3 である。 〔ロ〕集光ミラー（４０）の開口の大きさ（径）は３０
０ｍｍである。 〔ハ〕水銀放電灯（１０）は、図２に示したようなショ
ートアーク型の超高圧水銀ランプであって、定格消費電
力が３．０ｋＷ、封体の長さが８５ｍｍ、封体の中央膨
出部分の最大外径が８０ｍｍ、封体の内容積が２２０ｃ
ｍ3 であり、水銀の封入量が３０ｍｇ／ｃｍ3 のもので
ある。[A] The size of the lamp house (30)
The height is 500 mm, the width is 1000 mm, the depth is 400 mm, and the internal volume is 200,000 cm 3 . [B] The size (diameter) of the opening of the condenser mirror (40) is 30
0 mm. [C] The mercury discharge lamp (10) is a short arc type ultra-high pressure mercury lamp as shown in FIG. 2, having a rated power consumption of 3.0 kW, a length of the envelope of 85 mm, and a center of the envelope. The maximum outer diameter of the bulging portion is 80 mm, and the inner volume of the envelope is 220 c.
m 3 and the amount of enclosed mercury is 30 mg / cm 3 .
【００３７】水銀放電灯（１０）の集光ミラーの開口側
に位置する口金（１５）には、図３に示した構成の金属
部材（２０）が取り付けられている。この金属部材はア
ルミニウム製であり、固定用筒部（２１）は、その高さ
が５０ｍｍ、内径が３３ｍｍ、肉厚が１ｍｍであり、円
形鍔部２２Ａの直径が４５ｍｍ、肉厚が１ｍｍであり、
順方向フィン（Ｆ）の枚数は４枚、肉厚が１ｍｍ、突出
長さが５ｍｍである。 〔ニ〕空気吸引口（７０）からの排気量、すなわち、冷
却ファンによる冷却風の送風量は毎秒０．１ｍ3 に設定
した。The base (15) located on the opening side of the condenser mirror of the mercury discharge lamp (10) has a metal structure shown in FIG.
A member (20) is attached. The metal member is made of aluminum, and the fixing cylinder (21) has a height of 50 mm, an inner diameter of 33 mm, a thickness of 1 mm, a diameter of the circular flange 22A of 45 mm, and a thickness of 1 mm. ,
The number of forward fins (F) is four, the thickness is 1 mm, and the protrusion length is 5 mm. [D] The amount of exhaust air from the air suction port (70), that is, the amount of cooling air blown by the cooling fan was set to 0.1 m 3 per second.
【００３８】上記の光源装置の冷却ファンを動作させる
と共に水銀放電灯を点灯し、点灯を開始してから３０分
間経過後における口金（１５）の表面温度を測定したと
ころ１７０℃であった。また、ランプハウスの照射窓
（３１）から１００ｍｍ離間したところに照度計を配置
してｇ線（波長４３６ｎｍの紫外線）の放射照度を測定
したところ１５０ｍＷ／ｃｍ2 であった。When the mercury discharge lamp was turned on while the cooling fan of the light source device was operated, and the surface temperature of the base (15) was measured 30 minutes after the start of the lighting, the temperature was 170 ° C. An illuminometer was placed at a distance of 100 mm from the irradiation window (31) of the lamp house, and the irradiance of g-line (ultraviolet light having a wavelength of 436 nm) was measured to be 150 mW / cm 2 .
【００３９】＜対照実験例１＞ 口金（１５）の金属部材を取り外した水銀放電灯を用い
たこと以外は、上記の実験例と同様にして口金温度およ
び照度を測定したところ、口金温度は２２０℃、放射照
度は１００〜１２０ｍＷ／ｃｍ2 の範囲で変動した。こ
れは、冷却風によって封体が過冷却されてしまうため
に、封入した水銀の一部が未蒸発の状態であり、その結
果、放電が不安定になったものと考えられる。<Control Experimental Example 1> The cap temperature and the illuminance were measured in the same manner as in the above-described experimental example except that a mercury discharge lamp from which the metal member of the cap (15) was removed was used. ° C., irradiance was varied from 100~120mW / cm 2. It is considered that this is because the sealed mercury was overcooled by the cooling air, and a part of the enclosed mercury was in a non-evaporated state, and as a result, the discharge became unstable.
【００４０】＜対照実験例２＞ 口金（１５）の金属部材において、円形鍔状フィン２２
Ａを除去して順方向フィンＦのみとした水銀放電灯を用
いたこと以外は、上記の実験例と同様にして口金温度お
よび照度を測定したところ、口金温度は１６０℃、放射
照度は１００〜１２０ｍＷ／ｃｍ2 の範囲で変動した。
この理由も、対照実験例１の場合と同様であると考えら
れる。<Control Experimental Example 2> In the metal member of the base (15), the circular flange-shaped fins 22 were used.
The cap temperature and the illuminance were measured in the same manner as in the above experimental example except that the mercury discharge lamp in which A was removed and only the forward fin F was used. The cap temperature was 160 ° C, and the irradiance was 100 to 100 ° C. It fluctuated in the range of 120 mW / cm 2 .
This reason is considered to be the same as in the case of the control experiment example 1.
【００４１】＜評価＞ 以上の実験例および対照実験例から、次のことが理解さ
れる。 （１）金属部材を取り付けることにより、点灯時におけ
る水銀放電灯の前方口金の温度を２２０℃から１７０℃
以下にまで低下させることができ、当該口金に係る封止
管部における金属箔の酸化を有効に防止できる。 （２）外方に伸びる冷却風偏向部分を有する金属部材を
取り付けるので、口金の温度を２００℃以下に維持しな
がらしかも封体が過冷却状態となることが防止されて封
入した水銀が完全に蒸発した状態が得られるので、高い
放射照度を得ることができる。 （３）冷却風の流れに沿って伸びるフィンのみでは、封
体が過冷却状態となって封入された水銀の全部が完全に
蒸発しないため、大きな放射照度を得ることができな
い。<Evaluation> The following is understood from the above experimental examples and control experimental examples. (1) By attaching a metal member , the temperature of the front base of the mercury discharge lamp at the time of lighting can be increased from 220 ° C. to 170 ° C.
It can be reduced to the following, and the oxidation of the metal foil in the sealing tube portion related to the base can be effectively prevented. (2) Since the metal member having the cooling air deflecting portion extending outward is attached, the temperature of the base is kept at 200 ° C. or less, and the supercooled state of the envelope is prevented, so that the enclosed mercury is completely removed. Since a vaporized state is obtained, high irradiance can be obtained. (3) With only the fins extending along the flow of the cooling air, a large irradiance cannot be obtained because the sealed body is in a supercooled state and all of the enclosed mercury does not completely evaporate.
【００４２】[0042]
【発明の効果】本発明の構成によれば、水銀放電灯の前
方側封止管部の口金に、冷却風を外方に偏向させる冷却
風偏向部分を有する金属部材が設けられているため、当
該金属部材が冷却風によって高い効率で冷却されるよう
になり、従って水銀放電灯の前方口金が十分に冷却され
て当該前方側封止管部が過熱状態となることが確実に防
止される。しかも、金属部材の冷却風偏向部分により、
水銀放電灯の封体の中央膨出部分の前面領域に冷却風の
流れが直接に衝突することが防止されるため、中央膨出
部分に過冷却状態の個所が生ずることがなく、その結
果、封入された水銀の全部が完全に蒸発し、所期の大き
な放射強度が得られる。さらに、当該水銀放電灯の中央
膨出部分は相当に大きいものであるため、集光ミラーと
の組合せにおいて、照射される光を大きく犠牲にするこ
となしに、金属部材の冷却風偏向部分の径が比較的大き
いものを用いることができる。According to the structure of the present invention, the metal member having the cooling air deflecting portion for deflecting the cooling air outward is provided in the base of the front sealing tube of the mercury discharge lamp. The metal member is cooled with a high efficiency by the cooling air, so that the front base of the mercury discharge lamp is sufficiently cooled and the front sealing tube portion is reliably prevented from being overheated. Moreover, due to the cooling air deflection part of the metal member ,
Since the flow of the cooling air is prevented from directly colliding with the front area of the central bulge of the envelope of the mercury discharge lamp, there is no place where the central bulge is in a supercooled state. All of the enclosed mercury evaporates completely, providing the desired high radiation intensity. Further, since the central bulge portion of the mercury discharge lamp is considerably large, in combination with the condensing mirror, the diameter of the cooling air deflecting portion of the metal member can be reduced without largely sacrificing the irradiated light. Can be used.
【図１】本発明の光源装置の一例の構成を示す説明図で
ある。FIG. 1 is an explanatory diagram showing a configuration of an example of a light source device of the present invention.
【図２】本発明の光源装置の水銀放電灯の構成の一例を
示す説明図である。FIG. 2 is an explanatory diagram showing an example of a configuration of a mercury discharge lamp of the light source device of the present invention.
【図３】金属部材の一例を示す斜視図である。FIG. 3 is a perspective view showing an example of a metal member .
【図４】金属部材の他の例を示す斜視図である。FIG. 4 is a perspective view showing another example of a metal member .
【図５】金属部材の更に他の例を示す斜視図である。FIG. 5 is a perspective view showing still another example of a metal member .
【図６】金属部材の他の例を示す斜視図である。FIG. 6 is a perspective view showing another example of the metal member .
【図７】ホーン状フィンを有する金属部材による例を示
す説明図である。FIG. 7 is an explanatory view showing an example using a metal member having horn-shaped fins.
【図８】従来の光源装置の要部を示す説明図である。FIG. 8 is an explanatory view showing a main part of a conventional light source device.
１ 集光ミラー ２ 水銀放電灯 ３ 中央膨出部分 ４，５ 封止管部 ６，７ 口金 １０ 水銀放電灯 １１ 封体 １１Ａ 中央膨出部分 １１Ｂ，１１Ｃ 封止管部 １１Ｆ 前面領域 １２ 陰極 １３ 陽極 １４，１５ 口金 ２０ 金属部材 ２１ 固定用筒部 ２２ 冷却風偏向部分 ２２Ａ 円形鍔状フィン ２２Ｂ スクリューフィン ２２Ｃ ホーン状フィン ３０ ランプハウス ３１ 照射窓 ４０ 集光ミラー ７０ 空気吸引口 ８１，８２ コールドミラー ８３ 光学ユニット Ｆ 順方向フィン Ｇ ギャップ Ｈ 貫通孔 Ｓ 被照射物DESCRIPTION OF SYMBOLS 1 Condensing mirror 2 Mercury discharge lamp 3 Central bulging part 4, 5 Sealing tube part 6, 7 Cap 10 Mercury discharge lamp 11 Enclosure 11A Central bulging part 11B, 11C Sealing tube part 11F Front area 12 Cathode 13 Anode 14, 15 Cap 20 Metal member 21 Fixing cylinder 22 Cooling air deflecting part 22A Circular flange fin 22B Screw fin 22C Horn fin 30 Lamp house 31 Irradiation window 40 Light collecting mirror 70 Air suction port 81, 82 Cold mirror 83 Optical Unit F Forward fin G Gap H Through hole S Irradiated object
───────────────────────────────────────────────────── フロントページの続き (72)発明者 森本 真吉 兵庫県姫路市別所町佐土1194番地 ウシ オ電機株式会社内 (56)参考文献 特開 平８−106812（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) F21V 29/00 F21S 2/00 F21V 13/00 G02F 1/13357 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Shinkichi Morimoto 1194 Sado Bessho-cho Himeji City Hyogo Prefecture Inside Ushio Electric Co., Ltd. (56) References JP-A-8-106812 (JP, A) (58) Field surveyed (Int.Cl. 7 , DB name) F21V 29/00 F21S 2/00 F21V 13/00 G02F 1/13357
Claims (3)
中央膨出部分と両端の封止管部とを有する封体を具えて
なり、水銀の封入量が２５ｍｇ／ｃｍ3 以上で、定格消
費電力が２．５ｋＷ以上の水銀放電灯と、 集光ミラーの前方開口から中央基部に向かって流れるよ
う冷却風を発生させる冷却風発生手段と、 水銀放電灯の前方側封止管部の口金の外周面に形成され
た半径方向外方に突出する冷却風偏向部分からなる金属
部材、または、水銀放電灯の前方側封止管部の口金に設
けられた固定用筒部より半径方向外方に突出する冷却風
偏向部分からなる金属部材と、 を有してなり、金属部材の冷却風偏向部分は、集光ミラ
ーの前方開口からの冷却風を光軸から離間するよう外方
に偏向させる ことを特徴とする光源装置。1. A condensing mirror, and disposed so as to extend along an optical axis of the condensing mirror.
A mercury discharge lamp having a central swelling portion and sealing tubes at both ends, the mercury encapsulation amount is 25 mg / cm 3 or more, and the rated power consumption is 2.5 kW or more; Cooling air generating means for generating cooling air to flow from the front opening of the mercury discharge lamp toward the central base, and formed on the outer peripheral surface of the base of the front sealing tube of the mercury discharge lamp.
Consisting of a cooling air deflection part protruding outward in the radial direction
To the member or the base of the front sealing tube of the mercury discharge lamp.
Cooling air protruding radially outward from the fixed fixing tube
And a metal member comprising a deflecting portion.
-Cooling air from the front opening of the
A light source device, wherein the light source device deflects the light.
金属部材の最大径が、封体の中央膨出部分の最大外径以
下である請求項１に記載の光源装置。2. In a plane perpendicular to the optical axis of the condenser mirror
The light source device according to claim 1, wherein a maximum diameter of the metal member is equal to or less than a maximum outer diameter of the central bulging portion of the sealing body.
灯の封体の中央膨出部分の前面領域を覆うカバー部分を
有する請求項１または請求項２に記載の光源装置。3. The light source device according to claim 1, wherein the cooling air deflecting portion of the metal member has a cover portion covering a front area of a central bulging portion of the envelope of the mercury discharge lamp.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01850796A JP3189661B2 (en) | 1996-02-05 | 1996-02-05 | Light source device |
| KR1019970003596A KR100428959B1 (en) | 1996-02-05 | 1997-02-05 | Light source device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01850796A JP3189661B2 (en) | 1996-02-05 | 1996-02-05 | Light source device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09213129A JPH09213129A (en) | 1997-08-15 |
| JP3189661B2 true JP3189661B2 (en) | 2001-07-16 |
Family
ID=11973547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP01850796A Expired - Lifetime JP3189661B2 (en) | 1996-02-05 | 1996-02-05 | Light source device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3189661B2 (en) |
| KR (1) | KR100428959B1 (en) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000082322A (en) * | 1998-09-08 | 2000-03-21 | Ushio Inc | Light source unit |
| EP3226073A3 (en) | 2003-04-09 | 2017-10-11 | Nikon Corporation | Exposure method and apparatus, and method for fabricating device |
| TWI511179B (en) | 2003-10-28 | 2015-12-01 | 尼康股份有限公司 | Optical illumination device, exposure device, exposure method and device manufacturing method |
| TWI512335B (en) | 2003-11-20 | 2015-12-11 | 尼康股份有限公司 | Light beam converter, optical illuminating apparatus, exposure device, and exposure method |
| TWI511182B (en) | 2004-02-06 | 2015-12-01 | 尼康股份有限公司 | Optical illumination apparatus, light-exposure apparatus, light-exposure method and device manufacturing method |
| KR101762083B1 (en) | 2005-05-12 | 2017-07-26 | 가부시키가이샤 니콘 | Projection optical system, exposure apparatus and exposure method |
| WO2008026709A1 (en) | 2006-09-01 | 2008-03-06 | Nikon Corporation | Discharge lamp, light source apparatus, exposure apparatus and exposure apparatus manufacturing method |
| KR102016673B1 (en) | 2007-04-12 | 2019-08-30 | 가부시키가이샤 니콘 | Discharge lamp |
| KR101834803B1 (en) | 2007-04-12 | 2018-03-06 | 가부시키가이샤 니콘 | Discharge lamp, cable for connection, light source device, and exposure device |
| US9165738B2 (en) | 2007-04-12 | 2015-10-20 | Nikon Corporation | Discharge lamp, connecting cable, light source apparatus, and exposure apparatus |
| US7728495B2 (en) * | 2007-08-01 | 2010-06-01 | Osram Sylvania Inc. | HID lamp with frit seal thermal control |
| DE102007045079A1 (en) * | 2007-09-21 | 2009-04-02 | Osram Gesellschaft mit beschränkter Haftung | High pressure discharge lamp |
| JP5267029B2 (en) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | Illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
| JP4811482B2 (en) | 2009-03-16 | 2011-11-09 | セイコーエプソン株式会社 | Light source device and projector |
| DE102009029867A1 (en) * | 2009-06-22 | 2010-12-23 | Osram Gesellschaft mit beschränkter Haftung | High pressure discharge lamp |
| JP6645532B2 (en) * | 2018-04-11 | 2020-02-14 | 株式会社ニコン | Light source device, exposure apparatus, and device manufacturing method |
| JP2020060798A (en) * | 2020-01-09 | 2020-04-16 | 株式会社ニコン | Light source device, exposure apparatus, lamp, maintenance method and device manufacturing method |
| JP7645690B2 (en) * | 2021-04-12 | 2025-03-14 | キヤノン株式会社 | LAMP, LIGHT SOURCE DEVICE, EXPOSURE DEVICE, AND ARTICLE MANUFACTURING METHOD |
-
1996
- 1996-02-05 JP JP01850796A patent/JP3189661B2/en not_active Expired - Lifetime
-
1997
- 1997-02-05 KR KR1019970003596A patent/KR100428959B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR970063379A (en) | 1997-09-12 |
| KR100428959B1 (en) | 2004-07-16 |
| JPH09213129A (en) | 1997-08-15 |
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