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JP3171268U - Polishing mechanism - Google Patents

Polishing mechanism Download PDF

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JP3171268U
JP3171268U JP2011004724U JP2011004724U JP3171268U JP 3171268 U JP3171268 U JP 3171268U JP 2011004724 U JP2011004724 U JP 2011004724U JP 2011004724 U JP2011004724 U JP 2011004724U JP 3171268 U JP3171268 U JP 3171268U
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polishing
wheel
spacer assembly
body portion
fixing means
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伯仲 陳
伯仲 陳
智治 中田
智治 中田
明欽 王
明欽 王
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グリーン エナジー テクノロジー インク．
グリーン エナジー テクノロジー インク．
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/005—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents using brushes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/02—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery
    • B24D13/10—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery comprising assemblies of brushes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/14—Zonally-graded wheels; Composite wheels comprising different abrasives

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

【課題】作業ステップを削減可能であり、研磨ホイールの位置を簡単に調整可能な研磨機構を提供する。【解決手段】研磨機構は、回転体１０と、第１研磨ホイール１３と、第２研磨ホイール１４と、第１固定手段３１と、第２固定手段３２と、スペーサーアセンブリ１５とを備える。第１固定手段３１は、第１本体部１３１を貫通し、回転体内に締結する。第２研磨ホイールは、第２本体部１４１及び第２研磨部を有する。第１及び第２研磨部は、互いに異なる直径を有し、互いに軸方向に離隔し、且つ、異なる研磨密度を有する。スペーサーアセンブリは、第１研磨ホイールと第２研磨ホイールとの間に介在する。第２固定手段は、第２本体部及びスペーサーアセンブリを貫通し、第１本体部内に締結して、第２本体部及び前記スペーサーアセンブリを、第１研磨ホイールの前記第１本体部に対して押圧すると共に、前記第１本体部上に固定する。【選択図】図２A polishing mechanism capable of reducing work steps and easily adjusting the position of a polishing wheel is provided. The polishing mechanism includes a rotating body, a first polishing wheel, a second polishing wheel, a first fixing means, a second fixing means, and a spacer assembly. The 1st fixing means 31 penetrates the 1st main-body part 131, and is fastened in a rotary body. The second polishing wheel has a second main body portion 141 and a second polishing portion. The first and second polishing portions have different diameters, are spaced apart from each other in the axial direction, and have different polishing densities. The spacer assembly is interposed between the first grinding wheel and the second grinding wheel. The second fixing means penetrates through the second body portion and the spacer assembly and is fastened in the first body portion to press the second body portion and the spacer assembly against the first body portion of the first grinding wheel. At the same time, it is fixed on the first main body. [Selection] Figure 2

Description

本考案は、研磨機構に関し、特には、研磨ホイールの位置調整機能を有する研磨機構に関する。   The present invention relates to a polishing mechanism, and more particularly to a polishing mechanism having a function of adjusting the position of a polishing wheel.

現在、研磨設備が広く採用されており、特には、研磨ワークピースの表面を研磨及び平滑化するように、研磨ホイール（例えば、サンドホイール又はブラシホイール）の使用を製造工場において見ることができる。したがって、研磨ホイールは、一般消費者により広く受け入れられている。   Currently, polishing equipment is widely employed, and in particular, the use of polishing wheels (eg, sand wheels or brush wheels) can be found in manufacturing plants to polish and smooth the surface of the polishing workpiece. Therefore, grinding wheels are widely accepted by the general consumer.

従来のサンドホイールでは、サンドホイールの研磨粒は、ほぼ同じ等級（グレード）である。したがって、ワークピースの鏡面研磨を実施しようとする場合、作業者は、所望の研磨ワークピースを得るように、粗研磨工程、それから、細研磨工程を順番に実行する必要がある。換言すると、様々な等級の研磨粒のサンドホイール又は細研磨工程のためのブラシホイールでの各作業工程が必要である。従来の構成（設計）では、異なる仕様の２つのサンドホイールを研磨装置の２つの駆動装置に搭載する。例えば、従来の研磨装置は、図１に示すとおり、異なるモータ３、４にそれぞれ駆動される２つのサンドホイール１、２を有する。   In the conventional sand wheel, the abrasive grains of the sand wheel are almost the same grade. Therefore, when performing mirror polishing of a workpiece, an operator needs to perform a rough polishing process and then a fine polishing process in order so as to obtain a desired polishing workpiece. In other words, each work step on a sand wheel of various grades of abrasive grains or a brush wheel for a fine polishing step is required. In the conventional configuration (design), two sand wheels having different specifications are mounted on two driving devices of the polishing apparatus. For example, the conventional polishing apparatus has two sand wheels 1 and 2 respectively driven by different motors 3 and 4 as shown in FIG.

しかしながら、上記作業工程を実行する作業者にとってそれはより厄介である。（目が）粗い研磨ホイール及び（目が）細かい研磨ホイール（ブラシホイール）が同じ駆動装置を使用したとしても、研磨ホイール／ブラシホイールの取り付け及び取り外しのステップが不可欠である。この場合、作業者は研磨ホイールの取り付け及び取り外し時に、動的バランス、同心度、真円度等のような問題を考慮する必要がある。これらの問題を考慮することは、非常に時間の無駄である。   However, it is more troublesome for an operator who performs the above work process. Even if the (fine) grinding wheel and the (fine) grinding wheel (brush wheel) use the same drive, the steps of attaching and removing the grinding wheel / brush wheel are essential. In this case, the operator needs to consider problems such as dynamic balance, concentricity, roundness, etc. when attaching and removing the grinding wheel. Considering these issues is very time consuming.

本考案の目的は、研磨機構を提供することにあり、一方では、作業ステップを削減可能であり、他方では、研磨ホイールの位置を簡単に調整可能である。   The object of the present invention is to provide a polishing mechanism, on the one hand the work steps can be reduced and on the other hand the position of the polishing wheel can be adjusted easily.

この目的を達成するために、本考案の研磨機構は、回転体と、第１研磨ホイールと、第２研磨ホイールと、少なくとも１つの第１固定（締結）手段と、少なくとも１つの第２固定（締結）手段と、スペーサーアセンブリ（組立体）とを備え、スペーサーアセンブリが第１研磨ホイールと第２研磨ホイールとの間に介在している。   In order to achieve this object, the polishing mechanism of the present invention includes a rotating body, a first polishing wheel, a second polishing wheel, at least one first fixing (fastening) means, and at least one second fixing ( Fastening means and a spacer assembly, the spacer assembly being interposed between the first grinding wheel and the second grinding wheel.

本考案によれば、第１研磨ホイールは、第１本体部及び第１研磨部を含み、他方、第２研磨ホイールは、第２本体部及び第２研磨部を含む。第１及び第２研磨部は、互いに異なる直径を有し、互いに軸方向に離隔し、且つ、異なる研磨密度を有する。   According to the present invention, the first polishing wheel includes a first main body portion and a first polishing portion, while the second polishing wheel includes a second main body portion and a second polishing portion. The first and second polishing portions have different diameters, are spaced apart from each other in the axial direction, and have different polishing densities.

少なくとも１つの第１固定（締結）手段は、第１本体部を貫通し、第１本体部を回転体に対して押圧すると共に回転体上に固定するように、回転体内に螺子式に締結（螺着）する。少なくとも１つの第２固定（締結）手段は、第２本体部及びスペーサーアセンブリを貫通し、第２本体部及びスペーサーアセンブリを第１研磨ホイールの第１本体部に対して押圧すると共に第１本体部上に固定するように、第１本体部内に螺子式に締結する。   At least one first fixing (fastening) means is screwed into the rotating body so as to penetrate the first main body portion, press the first main body portion against the rotating body and fix it on the rotating body ( Screw). At least one second fixing (fastening) means penetrates the second body portion and the spacer assembly, presses the second body portion and the spacer assembly against the first body portion of the first grinding wheel, and the first body portion. The screw is fastened in the first main body so as to be fixed on the top.

上記固定を通して、１つの駆動装置を使用して２つの研磨ホイールを駆動するだけで、
エネルギー及び設備コストを節約できるだけでなく、１回の研磨工程で粗研磨及び細研磨を完遂可能である。その上、２つの研磨ホイール間の間隙の調整が非常に簡単である。 Through the above fixing, just drive the two grinding wheels using one drive,
In addition to saving energy and equipment costs, rough and fine polishing can be accomplished in a single polishing step. Moreover, the adjustment of the gap between the two grinding wheels is very simple.

第１研磨ホイールは、サンドホイールに関し、他方、第２研磨ホイールはブラシホイールに関する。特には、例えばウエハ研磨する、高研磨密度が必要とされるところの機会に、このようなアセンブリを採用可能である。少なくとも１つの第１及び第２研磨手段の両方は、ボルトに係る。   The first grinding wheel relates to a sand wheel, while the second grinding wheel relates to a brush wheel. In particular, such assemblies can be employed on occasions where, for example, wafer polishing, where high polishing density is required. Both the at least one first and second polishing means relate to the bolt.

さらに、本考案によれば、スペーサーアセンブリは、少なくとも１つの弾性シート（例えば、ゴム弾性シート）からなり、２つの研磨ホイール間の間隙の微調整を容易にし、固定手段により受けるストレスを吸収する。   Furthermore, according to the present invention, the spacer assembly includes at least one elastic sheet (for example, a rubber elastic sheet), facilitates fine adjustment of the gap between the two polishing wheels, and absorbs stress received by the fixing means.

さらに、本考案によれば、回転体には、研磨スラリーを流すためのスラリー溝が内部に設けられている。   Furthermore, according to the present invention, the rotating body is provided with a slurry groove for flowing polishing slurry therein.

本考案の別の目的、利点、及び新規な特徴は、添付の図面と併せて以下の詳細な説明からさらに明らかなるであろう。   Other objects, advantages and novel features of the present invention will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings.

従来の２つのサンドホイールを有する研磨装置の斜視図。The perspective view of the grinding | polishing apparatus which has two conventional sand wheels. 本考案の研磨機構を示す断面図。Sectional drawing which shows the grinding | polishing mechanism of this invention. 本考案の研磨機構を示す分解図。The exploded view which shows the grinding | polishing mechanism of this invention.

図２及び３は、本考案の研磨機構の断面図及び分解図を表し、当該研磨機構は、回転体１０と、第１研磨ホイール１３と、第２研磨ホイール１４と、スペーサーアセンブリ１５と、複数の第１固定（締結）手段３１と、複数の第２固定（締結）手段３２とを備える。本考案によれば、回転体１０はモータスピンドル１１とフランジ１２とからなり、フランジ１２及びモータスピンドル１１が同軸上に配置されて同期して回転するように、フランジ１２はボルト３０でモータスピンドル１１の一端に螺子式に係合される。回転体１０には、研磨スラリーを流すためのスラリー溝１２１が内部に設けられている。   2 and 3 show a sectional view and an exploded view of the polishing mechanism of the present invention, and the polishing mechanism includes a rotating body 10, a first polishing wheel 13, a second polishing wheel 14, a spacer assembly 15, and a plurality of them. First fixing (fastening) means 31 and a plurality of second fixing (fastening) means 32. According to the present invention, the rotating body 10 includes a motor spindle 11 and a flange 12, and the flange 12 and the motor spindle 11 are bolted 30 so that the flange 12 and the motor spindle 11 are coaxially arranged and rotate synchronously. One end of the screw is engaged with a screw. The rotating body 10 is provided with a slurry groove 121 for flowing polishing slurry therein.

本考案によれば、カップ状のサンドホイールに係る第１研磨ホイール１３は、第１本体部１３１、及び、研磨粒を有する第１研磨部１３２を含み、第１本体部１３１及び第１研磨部１３２が１つに固定されている。カップ上のブラシホイールに係る第２研磨ホイール１４は、第２本体部１４１及び剛毛を有する第２研磨部１４２を含み、第２本体部１４１及び第２研磨部１４２は１つに固定されている。   According to the present invention, the first polishing wheel 13 according to the cup-shaped sand wheel includes the first main body portion 131 and the first polishing portion 132 having abrasive grains, and the first main body portion 131 and the first polishing portion. 132 is fixed to one. The second polishing wheel 14 related to the brush wheel on the cup includes a second main body portion 141 and a second polishing portion 142 having bristles, and the second main body portion 141 and the second polishing portion 142 are fixed to one. .

第１研磨ホイール１３の第１本体部１３１は、例えばボルトである第１固定手段３１でフランジ１２の端面に螺子式に固定されている。スペーサーアセンブリ１５は、同じ又は異なる材質の複数のスペーサー１５１からなる。本考案では、スペーサー１５１は、少なくとも１つの弾性シートに関し、特には、ゴム弾性シートである。   The 1st main-body part 131 of the 1st grinding | polishing wheel 13 is being fixed to the end surface of the flange 12 by the screw type with the 1st fixing means 31 which is a volt | bolt, for example. The spacer assembly 15 includes a plurality of spacers 151 made of the same or different materials. In the present invention, the spacer 151 relates to at least one elastic sheet, in particular, a rubber elastic sheet.

例えばボルトである第２固定手段３２は、第２研磨ホイール１４の第２本体部１４１及びスペーサーアセンブリ１５の両方を貫通し、第１研磨ホイール１３の第１本体部１３１内に螺子式に固定され、第２研磨ホイール１４及びスペーサーアセンブリ１５を第１研磨ホール１３に固定して取り付けることが可能である。   For example, the second fixing means 32, which is a bolt, penetrates both the second main body portion 141 and the spacer assembly 15 of the second grinding wheel 14 and is screwed into the first main body portion 131 of the first grinding wheel 13. The second polishing wheel 14 and the spacer assembly 15 can be fixedly attached to the first polishing hole 13.

本考案によれば、サンドホイールである第１研磨ホイール１３は、ワークピースの粗研磨に採用される。他方、ブラシホイールである第２研磨ホイール１４は、ワークピースの細研磨に利用される。換言すると、第２研磨ホール１４はより高い研磨密度を有する。さらに、第１研磨ホイール１３は、第２研磨ホイール１４の直径よりも大きい直径を有するので、第１研磨部１３２は、第２研磨部１４２より、さらに回転体１０の軸Ｘから離れている。第２研磨部１４２は、第１研磨部１３２よりも、軸方向の下方にさらに延びており、これらの間隙ｈは、利用時の必要性によって決定される。間隙ｈは、第１研磨部１３２の最外端面（自由端面）から、第２研磨部１４２の最外端面までの距離を表す。   According to the present invention, the first grinding wheel 13 that is a sand wheel is employed for rough grinding of a workpiece. On the other hand, the second polishing wheel 14 which is a brush wheel is used for fine polishing of a workpiece. In other words, the second polishing hole 14 has a higher polishing density. Further, since the first polishing wheel 13 has a diameter larger than the diameter of the second polishing wheel 14, the first polishing unit 132 is further away from the axis X of the rotating body 10 than the second polishing unit 142. The second polishing unit 142 extends further downward in the axial direction than the first polishing unit 132, and the gap h is determined according to the necessity during use. The gap h represents the distance from the outermost end surface (free end surface) of the first polishing unit 132 to the outermost end surface of the second polishing unit 142.

上記構造を通して、研磨機構がワークピース研磨を実行するときに、外側に位置する第１研磨部１３２が最初に採用されてワークピースに粗研磨を実行し、そして、剛毛を有する第２研磨部１４２が細研磨のために続く。したがって、１の研磨ストロークにおいて、粗研磨及び細研磨の両方のステップを完遂可能である。これにより、時間及び工数を著しく節約可能であり、その上、より精密な研磨結果を得ることができる。   Through the above structure, when the polishing mechanism performs workpiece polishing, the first polishing unit 132 located outside is first employed to perform rough polishing on the workpiece, and the second polishing unit 142 having bristles. Followed for fine polishing. Accordingly, both rough polishing and fine polishing steps can be completed in one polishing stroke. Thereby, time and man-hours can be remarkably saved, and more precise polishing results can be obtained.

研磨部１３２、１４２が摩耗して交換が必要であるとき、２つの研磨部１３２、１４２間の間隙ｈを再調整又は再設定する必要があるところ、第２固定手段３２を最初に取り外す必要があり、そして、スペーサーアセンブリ１５の厚さを、スペーサー１５１の数を増減させることにより変更する。したがって、スペーサー１５１の厚さが、どの程度、間隙ｈを調整するかについて決定する。つまり、スペーサー１５１を薄くするほど、調整の範囲が広くなる。   When the polishing parts 132 and 142 are worn and need to be replaced, the gap h between the two polishing parts 132 and 142 needs to be readjusted or reset. Yes, and the thickness of the spacer assembly 15 is changed by increasing or decreasing the number of spacers 151. Accordingly, the thickness of the spacer 151 determines how much the gap h is adjusted. That is, the thinner the spacer 151, the wider the range of adjustment.

特には、本考案の実施形態に採用された弾性シート（スペーサー１５１）は、いくつかの利点を有する。つまり、これらの弾性特徴は、間隙ｈの微調整を容易とするだけでなく、固定手段３１、３２により受けるストレスを吸収する。   In particular, the elastic sheet (spacer 151) employed in the embodiment of the present invention has several advantages. That is, these elastic features not only facilitate fine adjustment of the gap h, but also absorb the stress received by the fixing means 31 and 32.

本考案を好適な実施形態に関して説明したが、請求される本考案の技術的範囲から外れることなく、他の多くの可能な改変、変更が実施可能であることは理解されよう。   Although the present invention has been described with reference to preferred embodiments, it will be understood that many other possible modifications and changes can be made without departing from the scope of the claimed invention.

Claims (9)

回転体と、
第１本体部及び第１研磨部を含む第１研磨ホイールと、
前記第１本体部を貫通し、前記回転体内に螺子式に締結して、前記第１本体部を前記回転体に対して押圧すると共に前記回転体上に固定する、少なくとも１つの第１固定手段と、
第２本体部及び第２研磨部を含む第２研磨ホイールであって、前記第１及び前記第２研磨部が、互いに異なる直径を有し、互いに軸方向に離隔し、及びに、異なる研磨密度を有する、第２研磨ホイールと、
前記第１研磨ホイールと前記第２研磨ホイールとの間に介在するスペーサーアセンブリと、
前記第２本体部及び前記スペーサーアセンブリを貫通し、前記第１本体部内に締結して、前記第２本体部及び前記スペーサーアセンブリを、前記第１研磨ホイールの前記第１本体部に対して押圧すると共に、前記第１本体部上に固定する、少なくとも１つの第２固定手段と、
を備えることを特徴とする研磨機構。 A rotating body,
A first polishing wheel including a first body portion and a first polishing portion;
At least one first fixing means that penetrates through the first main body and is screwed into the rotating body to press the first main body against the rotating body and to fix the first main body on the rotating body. When,
A second polishing wheel including a second body portion and a second polishing portion, wherein the first and second polishing portions have different diameters, are spaced apart from each other in the axial direction, and have different polishing densities. A second grinding wheel having
A spacer assembly interposed between the first grinding wheel and the second grinding wheel;
The second body part and the spacer assembly are penetrated and fastened in the first body part to press the second body part and the spacer assembly against the first body part of the first grinding wheel. And at least one second fixing means for fixing on the first body portion;
A polishing mechanism comprising: 前記第１研磨ホイールは、サンドホイールに関することを特徴とする請求項１に記載の研磨機構。   The polishing mechanism according to claim 1, wherein the first polishing wheel relates to a sand wheel. 前記第２研磨ホイールは、ブラシホイールに関することを特徴とする請求項２に記載の研磨機構。   The polishing mechanism according to claim 2, wherein the second polishing wheel relates to a brush wheel. 前記第２研磨ユニットは、ブラシホイールに関することを特徴とする請求項１に記載の研磨機構。   The polishing mechanism according to claim 1, wherein the second polishing unit relates to a brush wheel. 前記スペーサーアセンブリは、少なくとも１つの弾性シートからなることを特徴とする請求項１に記載の研磨機構。   The polishing mechanism according to claim 1, wherein the spacer assembly is made of at least one elastic sheet. 前記少なくとも１つの弾性シートは、ゴム弾性シートであることを特徴とする請求項５に記載の研磨機構。   The polishing mechanism according to claim 5, wherein the at least one elastic sheet is a rubber elastic sheet. 前記少なくとも１つの第１固定手段は、ボルトに関することを特徴とする請求項１に記載の研磨機構。   The polishing mechanism according to claim 1, wherein the at least one first fixing means relates to a bolt. 前記少なくとも１つの第２固定手段は、ボルトに関することを特徴とする請求項１に記載の研磨機構。   The polishing mechanism according to claim 1, wherein the at least one second fixing means relates to a bolt. 前記回転体には、研磨スラリーを流すためのスラリー溝が内部に設けられていることを特徴とする請求項１に記載の研磨機構。   The polishing mechanism according to claim 1, wherein a slurry groove for flowing polishing slurry is provided in the rotating body.
JP2011004724U 2011-01-28 2011-08-11 Polishing mechanism Expired - Fee Related JP3171268U (en)

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