JP3030795B2 - Work cleaning equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning method and a cleaning method for removing foreign matter such as cutting chips, cutting oil and abrasives used in processing of an article formed by machining or the like. The present invention relates to a cleaning device for performing.

[0002]

2. Description of the Related Art As an example of a conventional cleaning apparatus, Japanese Patent Laid-Open Publication No.
No. 139832. According to this, in a cleaning apparatus for holding a wafer as a work on a chuck, rotating the chuck, and spraying high-pressure water onto the wafer from the nozzle to wash the surface of the wafer, the wafer, the chuck, and the nozzle are cleaned. The structure to be housed is made watertight and water is built in the inside thereof, and the wafer, the chuck holding it and the outlet of the nozzle for jetting high-pressure water are arranged below the water surface, The injected high-pressure water reaches the wafer surface through the still water, but friction occurs between the high-pressure water jet and the still water during this time, cavitation bubbles are generated, and the cavitation bubbles are destroyed when they reach the wafer surface. Thus, a large impact pressure is generated, and dirt on the wafer surface is removed by the impact pressure.

[0003]

According to such a conventional cleaning apparatus, even if the foreign matter adhering to the work placed in the cleaning tank is removed by the destruction of the cavitation bubbles, the cleaning liquid in the cleaning tank remains in the cleaning liquid. The removed foreign matter is mixed and present. In this method, water is supplied from the upper part of the cleaning tank through a water supply port, and water is discharged from the lower part of the cleaning tank.The cleaning liquid containing foreign substances is restricted and discharged from a relatively small-diameter drain port. It depends. In other words, the cleaning solution containing foreign substances cannot be sufficiently discharged. According to the above, when the work is taken out of the cleaning tank after cleaning the work in the cleaning tank, foreign substances mixed in the cleaning liquid may adhere to the work again, and the cleaning effect is hindered.

[0004] The present invention has been made in view of the above problems,
An object of the present invention is to provide a cleaning device having a high cleaning effect on a workpiece.

[0005]

According to the present invention, there is provided an apparatus for cleaning a work, comprising:
A work support for imparting rotation and linear reciprocation to the work, a washing tank in which the washing liquid is stored, an overflow means for overflowing the washing liquid at the top of the washing tank out of the washing tank, , The reciprocating movement in the linear direction is allowed toward the work in the cleaning tank or the work outside the cleaning tank, and the cleaning liquid in the storage tank pressurized by the liquid pump is supplied, And a spray nozzle for spraying the cleaning liquid toward the opposing work.

[0006]

In the first cleaning step, the cleaning liquid is sprayed from the spray nozzle toward the work arranged in a rotating state outside the cleaning tank, whereby the work is roughly cleaned. Second
In the cleaning process, the work is arranged in a rotating state so as to face an injection nozzle in the cleaning tank, and the inside of the work is cleaned by cavitation action of the cleaning liquid injected into the cleaning tank from the injection nozzle. In the third washing step,
The cleaning liquid is again sprayed from the spray nozzle toward the work arranged in a rotating state outside the cleaning tank, whereby finish cleaning of the work is performed. Since the cleaning of the work is performed in three steps, the cleaning effect can be enhanced.

[0007]

FIG. 1 shows a first embodiment of the present invention.
This will be described with reference to FIG. Reference numeral 1 denotes a bottomed cleaning tank having an open upper part capable of storing the cleaning liquid W therein. The cleaning liquid W in a storage tank 2 is supplied by a liquid pump 3, and the cleaning liquid W is stored in the cleaning tank 1. It is stored. Specifically, the suction path 3A of the liquid pump 3 is connected to a filter 4 arranged in the liquid storage tank 2, and the discharge path 3B is connected to a cleaning liquid supply path 5 and an injection nozzle 6 described later. The injection nozzle 6 in the present embodiment is composed of three nozzles, and the first injection nozzle 6 is the cleaning tank 1.
In the center of the nozzle, the injection hole opens upward,
The third injection nozzles 6 are arranged to face each other with respect to the center of the first injection nozzle 6, and a plurality of injection holes toward the center are vertically opened. These injection nozzles 6 are fixed to the injection nozzle support 7 and each injection nozzle 6 is connected to the cleaning liquid supply path 5. The injection nozzle support 7 is allowed to reciprocate vertically in the drawing, and these reciprocations are performed by, for example, a pneumatic cylinder or a hydraulic cylinder (not shown). Reference numeral 8 denotes overflow means for discharging the cleaning liquid W from the upper portion of the cleaning tank 1 to the outside of the cleaning tank.
An overflow chamber 8A surrounding the outer periphery in the vicinity of the upper opening 1A and an overflow passage 8B connecting the bottom of the overflow chamber 8A and the liquid storage tank 2. The amount of the washing liquid flowing through the overflow passage 8B is determined by the liquid pump 3 from the washing tank. The flow rate is set to be larger than the amount of the cleaning liquid supplied to the inside of the apparatus. Reference numeral 9 denotes a work to be cleaned. The work 9 is fixed to a work support 10 capable of performing a linear reciprocating movement (vertical direction in the drawing) and a rotating movement into the cleaning tank 1 and facing the spray nozzle 6. Can. The reciprocation in the linear direction is performed by, for example, an oil or pneumatic cylinder, and the rotation is performed by a motor. (Both not shown)

Next, the cleaning of the work 9 will be described. The cleaning of the work 9 is performed in a first cleaning step, a second cleaning step, and a third cleaning step. The first cleaning step is described below with reference to FIG. The spray nozzle 6 is disposed above the upper opening 1A of the cleaning tank 1 (specifically, an overflow chamber 8A), while the work 9 in a rotating state on the work support 10 faces the spray hole of the spray nozzle 6. Placed. In this state, when the liquid pump 3 is driven and the cleaning liquid W in the liquid storage tank 2 is supplied to the cleaning liquid supply path 5 and the injection nozzle 6, the cleaning liquid W is directed from the injection hole of the injection nozzle 6 toward the work 9. It is injected. according to this,
The foreign material can be removed from the work 9 by the physical direct injection force of the cleaning liquid W, and the foreign material can be removed over the entire circumference by the rotation of the work 9. Note that the cleaning liquid W sprayed toward the work 9 is scattered by the rotating work 9, and most of the cleaning liquid W is returned to the liquid storage tank 2 from the overflow chamber 8 </ b> A and the overflow passage 8 </ b> B. Such a first cleaning step can be called rough cleaning.

The second cleaning step is performed as follows.
Is shown in In the second cleaning, the spray nozzle support 7 is moved downward, and the spray nozzle 6 is immersed in the cleaning liquid W of the cleaning tank 1, while the work 9 is also moved downward by the work support 10 in synchronization with the spray nozzle 6. Move. That is, the work 9 is in a rotating state in the cleaning liquid W of the cleaning tank 1 and is arranged to face the injection hole of the injection nozzle 6 in the cleaning liquid W. In such a state, when the liquid pump 3 is driven and the cleaning liquid W in the liquid storage tank 2 is jetted and supplied into the cleaning tank 1 through the cleaning liquid supply path 5 and the jet nozzle 6, the cleaning liquid W is stored in the cleaning tank 1. And is sprayed toward the work 9. According to this, the cleaning liquid W injected from each injection hole of the injection nozzle 6 reaches the work 9 through the cleaning liquid W in the cleaning tank 1, and cavitation bubbles are generated by friction during this. The cavitation bubbles are broken at a certain distance from the injection hole and generate a large impact pressure. Foreign matter on the workpiece 9 is removed by the impact pressure and the physical direct force of the jetted cleaning liquid W. . Such a second cleaning step can be referred to as intermediate cleaning. The foreign matter removed during such cleaning is the cleaning liquid W
The cleaning liquid W is supplied from the injection nozzle 6 into the cleaning tank 1, and the flow is directed upward together with the bubbles remaining after the cavitation action, so that the overflow chamber 8A flows from the upper opening 1A of the cleaning tank 1. The water is discharged into the washing tank 2 through the overflow passage 8B.

The third cleaning step is performed as follows, and FIG.
Is shown in In the third cleaning, the injection nozzle 6 moves up the injection nozzle support 7 again from the state of the second cleaning step, and arranges the injection nozzle 6 at a position higher than the cleaning liquid W in the cleaning tank 1 while the work 9 is also moved. It is moved upward by the work support 10 in synchronization with the injection nozzle 6. That is,
The work 9 is disposed to face the injection hole of the injection nozzle 6 located above the cleaning liquid W in the cleaning tank 1. In other words, the work 9 and the injection nozzle 6 have returned to the state where the first cleaning step is performed. In this state, when the liquid pump 3 is driven and the cleaning liquid W in the liquid storage tank 2 is supplied to the cleaning liquid supply path 5 and the injection nozzle 6, the cleaning liquid W is injected from the injection nozzle 6 toward the work 9. . According to this, even in a state where the foreign matter cannot be removed in the second cleaning step, or even if the foreign matter in the cleaning liquid adheres and the foreign matter remains on the work 9, the foreign matter is completely removed in the third cleaning step. Can be removed. Such a third cleaning step can be called finish cleaning. Thus, the cleaning of the work 9 is completed.

Next, a second embodiment of the present invention will be described with reference to FIGS.
This will be described with reference to FIG. (Note that only the differences in structure from FIG. 1 will be described.) Reference numeral 20 denotes a pressurized air supply path provided with an air pump 21, which is connected to the cleaning liquid supply path 5 via a switching valve 22. The following switching operation is performed. That is, when the liquid pump 3 and the injection nozzle 6 are communicated via the cleaning liquid supply path 5, the cleaning liquid supply path 5
And the pressurized air supply path 20 to shut off the air pump 21 and the injection nozzle 6, and the cleaning liquid supply path 5 connecting the liquid pump 3 and the injection nozzle 6 to shut off the liquid pump 5 and the injection nozzle 6. When the air pump 2 is shut off, the pressurized air supply path 20
1 and the injection nozzle 6 are communicated.

The cleaning is performed by a first cleaning step, a second cleaning step, a third cleaning step, and a drying step. The first cleaning step is described below with reference to FIG. The switching valve 22 communicates the cleaning liquid supply path 5 with the liquid pump 3 and the injection nozzle 6, and shuts off the pressurized air supply path 20 and the cleaning liquid supply path 5 to shut off the air pump 21 and the injection nozzle 6. I do. On the other hand, the spray nozzle 6 is disposed above the upper opening 1A of the cleaning tank 1 (specifically, an overflow chamber 8A), while the work 9 which is rotating in the work support 10 is formed by the spray hole of the spray nozzle 6. Are arranged opposite to each other. In this state, when the liquid pump 3 is driven and the cleaning liquid W in the liquid storage tank 2 is supplied to the cleaning liquid supply path 5 and the injection nozzle 6, the cleaning liquid W is injected from the injection nozzle 6 toward the work 9. Thus, the cleaning action is the same as that of the first cleaning step of the first embodiment.

The second cleaning step is performed as follows, and FIG.
Is shown in In the second cleaning, the spray nozzle support 7 is moved downward, and the spray nozzle 6 is immersed in the cleaning liquid W of the cleaning tank 1, while the work 9 is also moved downward by the work support 10 in synchronization with the spray nozzle 6. Move. On the other hand, the switching valve 22 is in the same state as in the first cleaning step, and makes the cleaning liquid supply path 5 in communication with the liquid pump 3 and the injection nozzle 6.
And the pressurized air supply path 20 and the cleaning liquid supply path 5 are shut off to shut off the air pump 21 and the injection nozzle 6. In such a state, the liquid pump 3 is driven,
The cleaning liquid W in the liquid storage tank 2 is supplied to the cleaning liquid supply path 5 and the injection nozzle 6.
When the cleaning liquid W is sprayed and supplied into the cleaning tank 1 through the cleaning tank 1, the cleaning liquid W fills the cleaning tank 1 and is sprayed toward the work 9, and has the same cleaning effect as the second cleaning step of the first embodiment. Make

The third cleaning step is performed as follows, and FIG.
Is shown in In the third cleaning, the injection nozzle 6 moves up the injection nozzle support 7 again from the state of the second cleaning step, and arranges the injection nozzle 6 at a position higher than the cleaning liquid W in the cleaning tank 1 while the work 9 is also moved. It is moved upward by the work support 10 in synchronization with the injection nozzle 6. That is,
The work 9 is disposed to face the injection hole of the injection nozzle 6 located above the cleaning liquid W in the cleaning tank 1. In other words, the work 9 and the injection nozzle 6 have returned to the state where the first cleaning step is performed. In this state, when the liquid pump 3 is driven and the cleaning liquid W in the liquid storage tank 2 is supplied to the cleaning liquid supply path 5 and the injection nozzle 6, the cleaning liquid W is injected from the injection nozzle 6 toward the work 9. The cleaning action is the same as that of the third cleaning step of the first embodiment.

The drying step is performed as follows and is shown in FIG. The injection nozzle 6 and the work 9 are in the state of the third cleaning step. (The injection nozzle 6 and the work 9 are located above the cleaning liquid W in the cleaning tank 1.) On the other hand, the switching valve 22 is rotated counterclockwise by 90 degrees from the position shown in FIG. According to this, the cleaning liquid supply path 5 is shut off, the liquid pump 3 and the injection nozzle 6 are shut off, the cleaning liquid supply path 5 and the pressurized air supply path 20 are communicated, and the air pump 21 and the injection nozzle 6 are connected.
Communicates with Here, when the air pump 21 is driven,
The compressed air pressurized by the air pump 21 reaches the injection nozzle 6 via the pressurized air passage 20 and the cleaning liquid supply passage 5,
Compressed air is injected from the injection nozzle 6 toward the rotating work 9. Thus, the work 9 in which the cleaning liquid W is still adhered after the third cleaning step is completed is subjected to the jet of the compressed air and the cleaning liquid W is scattered, so that the work 9 can be dried immediately. The work 9 can be dried while the cleaning liquid is completely removed from the work 9. Thus, the washing and drying of the work are completed.

Further, according to the above-mentioned linear reciprocation of the injection nozzle 6 and the tank 9 in synchronization with each other,
The position of the relationship between the spray nozzle 6 and the tank 9 can always be maintained in the same state, so that the work 9 can be favorably washed and dried. In this embodiment, the spray nozzle support 7 and the work support 10 are driven. This is achieved by operating cylinders (not shown) synchronously.

Further, by providing the spray nozzle 6 or a plurality of spray holes formed in the spray nozzle, the cleaning liquid or air can be sprayed uniformly on the work and all over the work.

[0018]

As described above, according to the workpiece cleaning apparatus of the present invention, the workpiece is fixedly attached to the workpiece, the workpiece support for imparting rotation and linear reciprocation to the workpiece, and the cleaning liquid is contained inside. The washing tank to be stored, overflow means for overflowing the washing liquid at the top of the washing tank to the outside of the washing tank, and corresponding to the work, a straight line toward the work in the washing tank or the work outside the washing tank. Since the cleaning liquid in the liquid storage tank pressurized by the liquid pump is supplied while the reciprocating movement in the direction is allowed, and the cleaning nozzle is configured to spray the cleaning liquid toward the opposing work, the cleaning apparatus is configured. In one cleaning step, since the cleaning liquid can be sprayed from the spray nozzle toward the rotating work outside the cleaning liquid, most foreign substances adhering to the work can be removed. Further, in the second step, since the cleaning liquid can be sprayed from the spray nozzle arranged in the cleaning liquid toward the rotating work in the cleaning liquid, the excellent work using the cavitation action is performed. The removed foreign matter in the cleaning tank can be discharged from the upper part of the cleaning tank through the overflow means to the outside of the cleaning tank. Further, in the third cleaning step, the cleaning liquid can be sprayed from the spray nozzle toward the rotating workpiece in the air outside the cleaning liquid.
Alternatively, it is possible to completely remove foreign substances adhering when the work is pulled up in the cleaning liquid before the cleaning liquid is dried, so that the cleaning effect can be remarkably improved.

A work support fixedly attached to the work and providing reciprocation of rotation and linear movement to the work, a washing tank in which a washing liquid is stored, and an upper part of the washing tank. An overflow means for overflowing the cleaning liquid to the outside of the cleaning tank, and corresponding to the work, a linear reciprocating motion is allowed for the work in the cleaning tank or the work outside the cleaning tank, and the liquid pump is used. A cleaning liquid in a pressurized storage tank is supplied via a cleaning liquid supply path, and an injection nozzle for injecting the cleaning liquid toward an opposing work, and air pressurized by an air pump toward the cleaning liquid supply path When the pressurized air supply path for supplying air, the liquid pump and the injection nozzle are communicated via the cleaning liquid supply path, the cleaning liquid supply path and the pressurized air supply path are shut off to shut off the air pump and the injection nozzle. And liquid When the liquid pump and the injection nozzle are shut off by shutting off the cleaning liquid supply path connecting the pump and the injection nozzle, the pressurized air supply path and the cleaning liquid supply path are connected to connect the air pump and the injection nozzle. According to the configuration of the work cleaning device including the switching valve, when the third cleaning process is completed, the air pressurized toward the work can be immediately injected and supplied from the injection nozzle. Since the work could be dried in a state where the cleaning liquid was completely scattered from the work without sticking to the work, the cleaning effect could be enhanced.

Further, by synchronizing the linear reciprocating motion of the work support and the linear reciprocating motion of the injection nozzle, the relative position between the injection nozzle and the tank can always be maintained in the same state, and Good cleaning and drying.

Furthermore, the provision of a plurality of injection nozzles or injection holes of the injection nozzles allows the cleaning liquid and air to impinge uniformly on the entire circumference of the workpiece, thereby eliminating unevenness in cleaning and drying.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram showing a first embodiment of a work cleaning apparatus according to the present invention, showing first and third cleaning process states.

FIG. 2 is an overall configuration diagram showing a state of a second cleaning step in the first embodiment.

FIG. 3 is an overall configuration diagram showing a second embodiment of the present invention, showing first and third cleaning process states.

FIG. 4 is an overall configuration diagram showing a state of a second cleaning step in the second embodiment.

FIG. 5 is an overall configuration diagram showing a drying process state in a second embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cleaning tank 2 Storage tank 3 Liquid pump 5 Cleaning liquid supply path 6 Injection nozzle 8 Overflow means 9 Work W Cleaning liquid 20 Pressurized air supply path 21 Air pump 22 Switching valve

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-56-67569 (JP, A) JP-A-63-42130 (JP, A) Real opening Sho-58-40837 (JP, U) (58) Field (Int.Cl. ⁷ , DB name) B08B 3/00-3/14

Claims (4)

(57) [Claims] 1. A work supporter which fixedly attaches a work, and imparts rotation and linear reciprocation to the work,
A cleaning tank in which the cleaning liquid is stored, an overflow means for overflowing the cleaning liquid at the top of the cleaning tank to the outside of the cleaning tank, and a work corresponding to the work and located in the cleaning tank or outside the cleaning tank. A cleaning liquid in a liquid storage tank pressurized by a liquid pump is supplied while a reciprocating movement in a linear direction is allowed toward the workpiece, and an injection nozzle for injecting the cleaning liquid toward an opposing workpiece is provided. Cleaning equipment. 2. A work supporter which fixedly attaches a work and imparts rotation and linear reciprocation to the work;
A cleaning tank in which the cleaning liquid is stored, an overflow means for overflowing the cleaning liquid at the top of the cleaning tank to the outside of the cleaning tank, and a work corresponding to the work and located in the cleaning tank or outside the cleaning tank. The nozzle is allowed to reciprocate in a linear direction toward the nozzle, and a cleaning liquid in a storage tank pressurized by a liquid pump is supplied through a cleaning liquid supply path, and the cleaning nozzle injects the cleaning liquid toward an opposite work. A pressurized air supply path for supplying air pressurized by an air pump toward the cleaning liquid supply path, and a cleaning liquid supply path when the liquid pump and the injection nozzle are connected via the cleaning liquid supply path. When the liquid pump and the injection nozzle are shut off by shutting off the compressed air supply path to shut off the air pump and the injection nozzle, and by shutting off the cleaning liquid supply path connecting the liquid pump and the injection nozzle. , Pressurized air supply passage and the cleaning liquid supply passage and the cleaning device of a work formed by a switching valve for communicating the injection nozzle and the air pump in communication with. 3. The apparatus for cleaning a workpiece according to claim 1, wherein the linear reciprocating motion of the workpiece support and the linear reciprocating motion of the injection nozzle are synchronized. 4. The apparatus for cleaning a workpiece according to claim 1, wherein a plurality of the injection nozzles or injection holes formed in the injection nozzles are provided.