JP3001339B2 - Burn-in board inspection equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a burn-in board inspection apparatus for inspecting the positions of a plurality of IC sockets (hereinafter simply referred to as sockets) mounted on a burn-in board from a reference position.

[0002]

2. Description of the Related Art Conventionally, in order to inspect the position of a socket on a burn-in board, an inspection jig is inserted into a gap between a socket and an adjacent socket measured by measuring the position of a socket closest to a reference position with a scale or the like. (Gap gauge) Inspection was performed to determine whether the gap was correct by inserting.

[0003] In another method, a burn-in board is placed on a stage of a tool microscope, the position of an IC socket is measured, and pass / fail is determined based on the measured value.

[0004]

However, in an inspection using an inspection jig (gap), there is a problem that the measurement result is affected by the force applied to the inspection jig and the insertion direction of the inspection jig, and the reliability of the inspection result is low. .

In the measurement using a factory microscope, there are many types of burn-in boards that are larger than the stage of the factory microscope, and it is not possible to measure all the positions of the IC sockets on one burn-in board at one time. For this reason, it is necessary to perform measurement in several times, and it is necessary to add up the measured values in several times. For this reason, there is a problem that not only increases the number of measurement steps but also increases the measurement error. In addition, there may be a false measurement error. In addition, the man-hour required to judge the acceptability of the socket position on the burn-in board by comparing the measured value and the reference value with each other is required.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a burn-in board inspection apparatus capable of automatically measuring the position of a socket without including false errors and determining whether the position is good.

[0007]

A feature of the present invention is that a table on which a burn-in board on which a plurality of sockets are arranged is placed, and a predetermined angle with respect to the surface of the burn-in board.
Laser light from the inclined surface that is inclined to the surface of the burn-in board
And a laser displacement meter for receiving the reflected light from the surface on the inclined surface , wherein the inclined surface is on the rear side and the socket is
The laser displacement meter and the burn-in board in the direction in which
And the light reflected from the upper surface of the socket.
To recognize the position of the socket and compare with the reference value before
This is a burn-in board inspection device that determines whether or not the interval between the sockets is good.

[0008]

Next, the present invention will be described with reference to the drawings.

FIG. 1 is a view schematically showing a burn-in board inspection apparatus according to one embodiment of the present invention. As shown in FIG. 1, this burn-in board inspection apparatus mounts a burn-in board on which a plurality of sockets 4 are arranged and mounted, and moves in an two-dimensional direction to an XY table 1; There is provided a laser displacement meter 2 for detecting the position of the socket 4 by detecting the reflected light on the light receiving surface 2a.

FIGS. 2A and 2B are diagrams for explaining the operation of the laser displacement meter of FIG. Next, a laser displacement meter that recognizes the position of the socket will be described. In this laser displacement meter 2, the light emitting surface and the light receiving surface are inclined with respect to the burn-in board 6, and as shown in FIG. When the laser light 5 is irradiated at an angle, the laser reflected light 6 of the laser light 5 is received by the light receiving surface 2a at an angle inclined by about 11 degrees. Therefore, the difference between the heights of the objects 7 and 8 can be measured as the difference between the light receiving points. Therefore, the present invention has obtained the prospect that the position of the socket can be recognized by applying this principle.

The laser displacement meter 2 capable of recognizing the position as described above
As shown in FIG. 2B, the burn-in board 3 placed on the XY table 1 having the above-described movement amount measuring function is irradiated with laser light, and the XY table is moved in the arrow direction. The light receiving surface 2a of the laser displacement meter 2 receives the reflected light from the socket 4, detects the position of the socket 4, and counts the detected position, its position, and the amount of movement from the reference position. Can be measured.

FIGS. 3A to 3E are diagrams showing the behavior of the output waveform of the laser displacement meter according to the moving direction. Here, the direction and the moving direction of the laser displacement meter will be described. if,
In the case where the direction of movement of the burn-in board in the direction of inclination of the light receiving surface 2a receiving the laser reflected light of the laser displacement meter is opposite, that is, as shown in FIG.
Edge cannot be detected.

In the case where the laser beam passes near the end of the socket, the laser beam detects both the burn-in board and the socket, the measured values are averaged, and the output voltage level of the laser displacement meter is changed as shown in FIG. A curve is drawn as shown in FIG. When the gloss of the burn-in board changes, the voltage level differs depending on the degree of the gloss, as shown in FIG. Further, when an object such as a trace of soldering on the burn-in board, whose reflectance is significantly different from that of the socket, is scanned with a laser beam, a steep waveform is generated as shown in FIG. become. Further, the gloss of the burn-in board itself also differs depending on the location, and in any case, only an unstable waveform as shown in FIG. 3D can be obtained.

In order to solve this problem, if the moving direction and the light receiving surface 2a of the laser displacement meter 2 are set as shown in FIG. 2B, the laser reflected light 6 is blocked by the socket 4 and reflected from the burn-in board. Light will not be received. When a laser beam is applied to the socket 4 as it moves, the laser displacement meter 2 generates a voltage level corresponding to the height of the socket. Even if it moves further, it receives only the light reflected from the upper surface of the socket 4 and does not receive the reflected light from the burn-in board. That is, the inclination of the light receiving surface 2a of the laser displacement meter is determined from the height of the socket.

Next, the operation of the burn-in board inspection apparatus will be described. First, the laser displacement meter 2 is positioned at the reference point of the burn-in board 3, and the coordinates at that time are read. Next, the burn-in board 3 is moved by a predetermined distance at right angles to the moving direction in FIG. Next, the XY table 1 is moved in the direction of the arrow and scanned by the laser displacement meter 2. At this time, the moving distance is obtained from the interval of the pulse-like voltage waveform due to the reception of the laser reflected light reflected from the end of the socket 4. Then, it is compared with the reference moving distance stored in advance to determine the quality. When inspecting the position in the direction perpendicular to the moving direction indicated by the arrow, the direction of the laser displacement meter should be 90 degrees.
After changing the temperature, the inspection is performed in the same manner.

In this embodiment, the laser displacement meter is fixed,
The burn-in board was moved two-dimensionally and the laser light was scanned to recognize the position of the socket.On the contrary, the burn-in board was fixed, the laser displacement meter was moved two-dimensionally, and the laser light was scanned. Alternatively, this method has the advantage that the apparatus becomes smaller.

[0017]

As described above, according to the present invention, a table for installing a burn-in board in which a plurality of sockets are arranged and a light receiving surface for irradiating the burn-in board with laser light and receiving reflected light have a predetermined inclination. The burn-in board and the laser displacement meter are relatively two-dimensionally moved, the laser light is scanned on the burn-in board, and only the reflected light from the socket is received. By counting the intervals between the obtained pulse output groups and determining the socket position, the socket position can be automatically and quantitatively determined without any artificial error, and the pass / fail judgment can be made. .

[Brief description of the drawings]

FIG. 1 is a view schematically showing a burn-in board inspection apparatus according to an embodiment of the present invention.

FIG. 2 is a diagram for explaining the operation of the laser displacement meter of FIG.

FIG. 3 is a diagram illustrating behavior of an output waveform of a laser displacement meter according to a moving direction.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 XY table 2 Laser displacement meter 2a Light-receiving surface 3 Burn-in board 4 Socket 5 Laser light 6 Laser reflected light 7,8 DUT

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int. Cl. ⁷ , DB name) G01B 11/00-11/30 102 H05K 13/08

Claims (1)

(57) [Claims] 1. A table on which a burn-in board on which a plurality of sockets are arranged is placed, and the burn-in board is mounted on the table.
Laser light from an inclined surface that is inclined at a predetermined angle to the surface
Irradiating the surface of the burn-in board and reflecting light from the surface
A laser displacement meter that receives light on the inclined surface,
The laser displacement meter in the direction in which the sockets are lined up on the back side
And the burn-in board are relatively moved, and
A burn-in board inspection apparatus, comprising: receiving reflected light from the upper surface of a socket, recognizing a position of the socket, and comparing it with a reference value to determine whether the interval between the sockets is good or not.