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JP2971005B2 - Optical scanning device - Google Patents

Optical scanning device

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Publication number
JP2971005B2
JP2971005B2 JP1510195A JP1510195A JP2971005B2 JP 2971005 B2 JP2971005 B2 JP 2971005B2 JP 1510195 A JP1510195 A JP 1510195A JP 1510195 A JP1510195 A JP 1510195A JP 2971005 B2 JP2971005 B2 JP 2971005B2
Authority
JP
Japan
Prior art keywords
light beam
light
deflector
detection
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1510195A
Other languages
Japanese (ja)
Other versions
JPH0894953A (en
Inventor
善紀 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP1510195A priority Critical patent/JP2971005B2/en
Publication of JPH0894953A publication Critical patent/JPH0894953A/en
Application granted granted Critical
Publication of JP2971005B2 publication Critical patent/JP2971005B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Mechanical Optical Scanning Systems (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、レーザープリンタ、デ
ジタル複写機、レーザーファクシミリ等の画像形成装置
の書き込み光学系に用いられる光走査装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical scanning device used in a writing optical system of an image forming apparatus such as a laser printer, a digital copying machine, a laser facsimile and the like.

【0002】[0002]

【従来の技術】レーザープリンタ、デジタル複写機、レ
ーザーファクシミリ等の画像形成装置の書き込み光学系
として、画像信号に応じて強度変調されたレーザー光束
を偏向器で偏向走査して感光体等の被走査面上を走査し
画像を書き込む光走査装置が知られている。図11に従
来の光走査装置の光学系の一例を示す。図11におい
て、半導体レーザー等からなる光源21を発した発散光
束はカップリングレンズ22によってカップリングさ
れ、シリンダレンズ23によって回転多面鏡等からなる
偏向器24の近傍で副走査方向(偏向面と垂直な方向)
について一度集光された後、偏向器24の偏向反射面に
入射する。そして、偏向器24によって偏向された光束
はfθレンズ等の結像光学素子25により集光され、反
射ミラー30及び面倒れ補正用のシリンダレンズ27を
介して感光体等の被走査面28上に微小なスポット光と
して結像され、該結像点は偏向器24の回転に伴って被
走査面上を等速に移動する。また、偏向器24による偏
向角が有効書き込み範囲を超える光束中には、検出部2
9に光束を導くための折り返しミラー31とシリンドリ
カルレンズ32が配置されており、検出部29において
集光するような構成となっている。検出部29は偏向器
24からの光束を折り返しミラー31とシリンドリカル
レンズ32を介して受光し、光束の走査位置を検出して
書き込み開始等の同期信号を発生するものである。
2. Description of the Related Art As a writing optical system of an image forming apparatus such as a laser printer, a digital copying machine, and a laser facsimile, a laser beam, intensity-modulated according to an image signal, is deflected and scanned by a deflector to scan a photosensitive member or the like. 2. Related Art An optical scanning device that scans a surface and writes an image is known. FIG. 11 shows an example of an optical system of a conventional optical scanning device. In FIG. 11, a divergent light beam emitted from a light source 21 composed of a semiconductor laser or the like is coupled by a coupling lens 22 and is sub-scanning direction (perpendicular to the deflection surface) near a deflector 24 composed of a rotary polygon mirror or the like by a cylinder lens 23. Direction)
Is condensed once, and then enters the deflecting reflection surface of the deflector 24. The light beam deflected by the deflector 24 is condensed by an image forming optical element 25 such as an fθ lens, and is reflected on a scanning surface 28 such as a photosensitive member via a reflection mirror 30 and a cylinder lens 27 for correcting surface tilt. An image is formed as a minute spot light, and the image forming point moves on the surface to be scanned at a constant speed as the deflector 24 rotates. In a light beam whose deflection angle by the deflector 24 exceeds the effective writing range, the detection unit 2
A folding mirror 31 and a cylindrical lens 32 for guiding a light beam to the light source 9 are arranged so that the light is condensed in the detection unit 29. The detection unit 29 receives the light beam from the deflector 24 via the return mirror 31 and the cylindrical lens 32, detects the scanning position of the light beam, and generates a synchronization signal such as a start of writing.

【0003】[0003]

【発明が解決しようとする課題】図11に示した構成の
光走査装置では、走査用の結像光学素子25、反射ミラ
ー30、シリンダレンズ27の他に、検出部29に光束
を導くための折り返しミラー31やシリンドリカルレン
ズ32が設けられているため、光学系を構成する部品点
数が多く、装置が大掛かりになってしまい、コスト的に
も不利である。また、上記各光学部品に対して位置決め
し固定する必要が有り、組付けや調整に手間がかかると
いう問題も有る。また、検出部は偏向器による偏向角が
有効書き込み範囲を超えた位置の光束を検出するため、
偏向器に入射した光束がその偏向反射面の端部によって
ケラレを生じる場合が有り、検出部でのビーム形状が非
対称な形状になり、同期の位置検出を行なうときに誤差
を生じてしまうという問題がある。
In the optical scanning device having the configuration shown in FIG. 11, a light beam for guiding a light beam to a detection unit 29 is provided in addition to the imaging optical element 25 for scanning, the reflection mirror 30, and the cylinder lens 27. Since the folding mirror 31 and the cylindrical lens 32 are provided, the number of components constituting the optical system is large, the device becomes large, and the cost is disadvantageous. In addition, it is necessary to position and fix each optical component, and there is a problem that it takes time to assemble and adjust. In addition, since the detection unit detects a light beam at a position where the deflection angle of the deflector exceeds the effective writing range,
The light incident on the deflector may be vignetted due to the end of the deflecting reflection surface, and the beam shape at the detection unit is asymmetric, causing an error when performing synchronous position detection. There is.

【0004】本発明は上記事情に鑑みなされたものであ
って、従来装置に比べて部品点数を削減でき、組付け調
整等も比較的容易な低コストでコンパクトな光走査装置
を提供することを目的とし、さらには、偏向器によるケ
ラレが生じても、同期の位置検出を正確に行なうことが
できる光走査装置を提供することを目的とする。
The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a low-cost and compact optical scanning device which can reduce the number of parts as compared with the conventional device and which can be easily adjusted. Another object of the present invention is to provide an optical scanning device capable of accurately detecting a synchronous position even if vignetting due to a deflector occurs.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するた
め、請求項1に係る発明では、光走査装置は、レーザー
光束を放射する光源(1)と、前記光源(1)からの光束を
等角速度的に偏向させる偏向器(4)と、前記偏向器(4)
による偏向光束を被走査面(8)上に集光させ且つ被走査
面上で光走査を等速化する働きを持つ結像ミラー(5)
と、前記偏向器(4)により偏向走査された光束を受光し
光束が走査された位置を検出する検出部(9)と、前記検
出部(9)に光束を導く検出用結像光学素子(6)とを有す
るものであり、前記検出用結像光学素子(6)と前記結像
ミラー(5)は、プラスチック材料により一体成形され、
表面にミラーコーティングされた部材からなる(図
1)。
In order to achieve the above object, according to the first aspect of the present invention, an optical scanning device includes a light source (1) for emitting a laser beam and a light beam from the light source (1). A deflector (4) for deflecting at an angular velocity, and the deflector (4)
An imaging mirror (5) having a function of converging the light beam deflected by the laser beam on the surface to be scanned (8) and making the optical scanning on the surface to be scanned uniform.
A detecting unit (9) for receiving a light beam deflected and scanned by the deflector (4) and detecting a position where the light beam is scanned; and a detection optical element for guiding the light beam to the detecting unit (9) ( 6), wherein the imaging optical element for detection (6) and the imaging mirror (5) are integrally formed of a plastic material,
It consists of a member whose surface is mirror-coated (FIG. 1).

【0006】ここで一例として、前記結像ミラー(5)及
び前記検出用結像光学素子(6)は少なくとも主走査方向
に凹形状をしており、前記検出用結像光学素子(6)の主
走査方向のパワーを前記結像ミラー(5)の主走査方向の
パワーよりも大きく設定している。また、前記検出用結
像光学素子(6)は主走査方向のパワーと副走査方向のパ
ワーが異なるアナモフィックな形状をしているか、ある
いは、前記検出用結像光学素子(6)は共軸球面ミラーで
あり、前記検出部の検出面近傍で少なくとも主走査方向
について光束が結像する。
Here, as an example, the image forming mirror (5) and the image forming optical element for detection (6) have a concave shape at least in the main scanning direction. The power in the main scanning direction is set to be larger than the power of the imaging mirror (5) in the main scanning direction. The detection optical element (6) has an anamorphic shape in which the power in the main scanning direction and the power in the sub-scanning direction are different, or the detection optical element (6) has a coaxial spherical surface. The light flux forms an image at least in the main scanning direction in the vicinity of the detection surface of the detection unit.

【0007】さらに請求項1に係る発明では、前記検出
用結像光学素子(6)の有効径(R)は入射光束直径よりも
小さくし、検出用結像光学素子(6)を介した後の光束の
光強度分布は主光線を中心としたほぼ線対称の形状とな
ることを特徴とする(図10)。
Further, in the invention according to the first aspect, the effective diameter (R) of the imaging optical element for detection (6) is made smaller than the diameter of the incident light beam, and after passing through the imaging optical element for detection (6). Is characterized in that the light intensity distribution of the light beam is substantially line-symmetric with respect to the principal ray (FIG. 10).

【0008】また、請求項2に係る発明では、レーザー
光束を放射する光源(1)と、前記光源(1)からの光束を
等角速度的に偏向させる偏向器(4)と、前記偏向器(4)
による偏向光束を被走査面(8)上に集光させ且つ被走査
面上で光走査を等速化する働きを持つ結像光学素子(5)
と、前記偏向器(4)により偏向走査された光束を受光し
光束が走査された位置を検出する検出部(9)を有する光
走査装置において、前記偏向器(4)によって検出部(9)
に導かれる光束の一部が偏向器(4)によってケラレを生
じるものであって、前記偏向器(4)と検出部(9)の間に
ケラレを生じた光束の一部を遮光する遮光板(13)を置
くことを特徴とする(図7)。そして、請求項3に係る
発明では、請求項2の構成に加えて、前記遮光板(13)
を通った後の光束の光強度分布は、主光線を中心とした
ときにほぼ線対称の形状となることを特徴とする(図
9)。
Further, in the invention according to claim 2, the light source (1) for emitting a laser beam, the deflector (4) for deflecting the light beam from the light source (1) at a constant angular velocity, and the deflector (4). 4)
Imaging optical element (5) having the function of converging the deflected light beam on the surface to be scanned (8) and making the optical scanning on the surface to be scanned uniform.
And an optical scanning device having a detector (9) for receiving a light beam deflected and scanned by the deflector (4) and detecting a position scanned by the light beam, wherein the detector (9) is provided by the deflector (4).
A part of the light beam guided to the device causes vignetting by the deflector (4), and a light shielding plate that shields a part of the light beam that has vignetted between the deflector (4) and the detection unit (9). (13) is provided (FIG. 7). According to the third aspect of the invention, in addition to the configuration of the second aspect, the light shielding plate (13)
The light intensity distribution of the luminous flux after passing through is substantially line-symmetric about the principal ray (FIG. 9).

【0009】[0009]

【作用】請求項1に係る光走査装置においては、光走査
用の結像ミラーと同期検知用の検出部に光束を導く検出
用結像光学素子は、プラスチック材料により一体成形さ
れ、表面にミラーコーティングされた部材からなること
により、部品点数の低減ができ、さらに検出用結像光学
素子にミラーを用いることができるため、レイアウトの
自由度が増し、低コストでコンパクトな光学系を備えた
光走査装置を提供することが可能となる。そして請求項
1に係る光走査装置においては、前記検出用結像光学素
子の有効径は入射光束直径よりも小さくし、検出用結像
光学素子を介した後の光束の光強度分布は主光線を中心
としたほぼ線対称の形状となることにより、偏向器によ
るケラレが生じても、検出部ではほぼ対称なビーム形状
を得ることができ、同期の位置検出を正確に行なうこと
が可能となる。
In the optical scanning device according to the first aspect, the imaging mirror for optical scanning and the imaging optical element for guiding the light beam to the detection unit for synchronization detection are integrally formed of a plastic material, and the mirror is formed on the surface. By using a coated member, the number of components can be reduced, and a mirror can be used for the imaging optical element for detection, so that the degree of freedom of layout is increased and a light with a low-cost and compact optical system is provided. A scanning device can be provided. In the optical scanning device according to claim 1, the effective diameter of the imaging optical element for detection is smaller than the diameter of the incident light beam, and the light intensity distribution of the light beam after passing through the imaging optical element for detection is a chief ray. , The detection unit can obtain a substantially symmetric beam shape even if vignetting occurs due to the deflector, making it possible to accurately detect the synchronous position. .

【0010】また、請求項2,3に係る光走査装置で
は、偏向器によって検出部に導かれる光束の一部が偏向
器によってケラレを生じるものである場合に、偏向器と
検出部の間にケラレを生じた光束の一部を遮光する遮光
板を置くので、遮光板を通った後の光束の光強度分布
を、主光線を中心としたほぼ線対称の形状とすることが
できるため、偏向器によるケラレが生じても、検出部で
はほぼ対称なビーム形状を得ることができ、同期の位置
検出を正確に行なうことが可能となる。
Further, in the optical scanning device according to the second and third aspects, when a part of the light beam guided to the detection unit by the deflector causes vignetting by the deflector, the light scanning device is disposed between the deflector and the detection unit. Since a light-shielding plate that blocks a part of the vignetting light beam is placed, the light intensity distribution of the light beam after passing through the light-shielding plate can be made almost linearly symmetric about the principal ray. Even if vignetting occurs due to the detector, a substantially symmetrical beam shape can be obtained in the detection unit, and it becomes possible to accurately detect a synchronous position.

【0011】[0011]

【実施例】以下、本発明の実施例を図面を参照して説明
する。図1は本発明による光走査装置の光学系の一例を
示す斜視図である。図1において、半導体レーザー等か
らなる光源1を発した発散光束はカップリングレンズ2
によってカップリングされ、シリンダレンズ3によっ
て、回転多面鏡等からなる偏向器4の近傍で副走査方向
(偏向面と垂直な方向)について一度集光された後、偏
向器24の偏向反射面に入射する。そして、偏向器24
の偏向反射面によって偏向された光束は、偏向光束を被
走査面8上に集光させ且つ被走査面8上で光走査を等速
化する働きを持つ共軸非球面反射ミラー(結像ミラー)
5により反射され、さらに面倒れ補正用光学素子として
の樽型トロイダルレンズ7を介して感光体等の被走査面
8上に微小なスポット光として結像され、該結像点は偏
向器4の回転に伴って被走査面8上を等速に移動する。
また、偏向器4による偏向角が有効書き込み範囲を超え
た位置の光束が入射する共軸非球面反射ミラー5の一部
分には検出用結像光学素子6が一体成形してあり、該検
出用結像光学素子6により偏向器4からの光束が検出部
9に導かれるようになっている。尚、検出用結像光学素
子6と結像ミラー5は、プラスチック材料を用いた型成
形等により一体成形され、表面にミラーコーティング加
工をすることによって作ることができる。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing an example of the optical system of the optical scanning device according to the present invention. In FIG. 1, a divergent light beam emitted from a light source 1 composed of a semiconductor laser or the like is coupled to a coupling lens 2.
After being condensed by the cylinder lens 3 once in the sub-scanning direction (direction perpendicular to the deflecting surface) in the vicinity of the deflector 4 composed of a rotating polygon mirror or the like, and then incident on the deflecting and reflecting surface of the deflector 24. I do. And the deflector 24
The light beam deflected by the deflecting reflecting surface condenses the deflecting light beam on the surface 8 to be scanned and equalizes the speed of light scanning on the surface 8 to be scanned. )
The light is reflected by the lens 5, and further formed as an image on a surface 8 to be scanned such as a photoconductor as a minute spot light via a barrel-shaped toroidal lens 7 as an optical element for correcting surface tilt. It moves on the scanned surface 8 at a constant speed with the rotation.
Further, a detection imaging optical element 6 is integrally formed with a part of the coaxial aspherical reflection mirror 5 on which a light beam at a position where the deflection angle of the deflector 4 exceeds the effective writing range is integrally formed. The light beam from the deflector 4 is guided to the detection unit 9 by the image optical element 6. The imaging optical element 6 for detection and the imaging mirror 5 can be integrally formed by molding using a plastic material or the like, and can be formed by mirror coating the surface.

【0012】検出部9は、フォトダイオード等を用いた
光検知素子からなり、この上を走査する光束を検知し、
画像書き込み開始等の同期信号を発生させるものであ
り、従って、検出部9は、この上を走査する光束の位置
を精度良く検知しなければならないから、少なくとも主
走査方向(偏向走査方向)について集光していなければ
ならない。検出部9によって発生される同期信号は被走
査面8上における主走査方向の画像書き出し位置を各走
査において一定に保つためのものであり、図示しない制
御部は同期信号から所定タイミングの後、光源1を画像
信号に応じて発光させ、各走査の画像露光を行なう。こ
こで、前記所定タイミングとは、同期信号発生後、偏向
器4からの偏向光束が検出用結像光学素子6を過ぎ、被
走査面8上で光束が所望の書き出し開始位置に達する事
が予想されるまでの時間である。
The detecting section 9 is composed of a light detecting element using a photodiode or the like, and detects a light beam that scans over the detecting element.
This is for generating a synchronizing signal such as the start of image writing. Therefore, since the detecting unit 9 must accurately detect the position of the light beam that scans over it, the detecting unit 9 collects at least the main scanning direction (deflection scanning direction). It must be lit. The synchronization signal generated by the detection unit 9 is for keeping the image writing position on the scanned surface 8 in the main scanning direction constant in each scan, and a control unit (not shown) controls the light source after a predetermined timing from the synchronization signal. 1 emits light in accordance with an image signal, and performs image exposure for each scan. Here, the predetermined timing means that after the generation of the synchronizing signal, the deflected light beam from the deflector 4 passes through the imaging optical element 6 for detection and reaches the desired writing start position on the surface 8 to be scanned. It is time to be done.

【0013】尚、本実施例では、検出用結像光学素子6
の主走査方向のパワーを共軸非球面反射ミラー5の主走
査方向のパワーよりも大きく設定しているため、検出部
9を走査用光学素子(5,7)による光束の結像位置よ
りも短距離にでき、尚且つ部品点数の増加を防いでい
る。
In this embodiment, the imaging optical element 6 for detection is used.
Is set to be larger than the power of the coaxial aspherical reflecting mirror 5 in the main scanning direction, so that the detecting unit 9 is located at a position higher than the position where the light beam is imaged by the scanning optical elements (5, 7). The distance can be reduced, and the number of parts is prevented from increasing.

【0014】このように、図1に示す構成の光走査装置
では、偏向器4による偏向光束を被走査面8上に集光さ
せ且つ被走査面上で光走査を等速化する働きを持つ結像
光学素子に結像ミラー5を用い、この結像ミラー5と同
期検知用の検出部9に光束を導く検出用結像光学素子6
とを一体化したことにより、図11に示した構成の従来
の光走査装置と比較して部品点数の低減ができ、低コス
トでコンパクトな光学系を備えた光走査装置を実現する
ことができる。
As described above, the optical scanning device having the configuration shown in FIG. 1 has a function of condensing the deflecting light beam by the deflector 4 on the surface 8 to be scanned and making the optical scanning on the surface to be scanned uniform. An imaging mirror 5 is used as an imaging optical element, and a detection imaging optical element 6 that guides a light beam to the imaging mirror 5 and a detection unit 9 for synchronization detection.
The number of components can be reduced as compared with the conventional optical scanning device having the configuration shown in FIG. 11, and an optical scanning device having a low-cost and compact optical system can be realized. .

【0015】さらに本発明のもう一つの利点は、検出用
結像光学素子6にミラーを用いることができるため、折
り返しミラー31とレンズ32とを組み合わせた従来構
成よりも検出部のレイアウトの自由度が増すことであ
る。すなわち、検出用結像光学素子6が反射型であるの
で、検出部9の配置位置の自由度が大きく、図2に示す
ように、検出部を図中の符号9,9’,9”で示す位置
にそれぞれ配置することが可能である。例えば、図2の
9の位置ある検出部に光束を導くには、図3に示すよう
に、検出用結像光学素子6の光軸L1が、偏向器4から検
出用結像光学素子6に向かう光路と検出用結像光学素子
6から検出部9に向かう光路を挾む角θ1を2等分する
ようにすればよい。同様に検出部が図2の9’の位置に
ある場合には、図4に示すように、検出用結像光学素子
6の光軸L2が、偏向器4から検出用結像光学素子6に向
かう光路と検出用結像光学素子6から検出部9’に向か
う光路を挾む角θ2 を2等分するようにすればよい。
尚、図示しないが、図2の9”の位置にある検出部に光
束を導く場合も同様である。
Another advantage of the present invention is that since a mirror can be used for the imaging optical element 6 for detection, the degree of freedom in the layout of the detection unit is higher than in the conventional configuration in which the folding mirror 31 and the lens 32 are combined. Is to increase. That is, since the detection imaging optical element 6 is of a reflection type, the degree of freedom of the arrangement position of the detection unit 9 is large. As shown in FIG. 2, the detection units are denoted by reference numerals 9, 9 ', 9 "in the figure. can be arranged in the position shown. for example, to direct the light beam at a position a certain detector 9 of FIG. 2, as shown in FIG. 3, the optical axis L 1 of the detection imaging optical element 6 it may be the angle theta 1 which sandwich the optical path extending from the light path and the detection imaging optical element 6 in the detecting unit 9 toward the detection imaging optical element 6 from the deflector 4 to bisect. Similarly detection when the parts are in the position of 9 'in FIG. 2, as shown in FIG. 4, the optical axis L 2 of the detection imaging optical element 6, the optical path toward the detection imaging optical element 6 from the deflector 4 And the angle θ 2 sandwiching the optical path from the imaging optical element 6 for detection to the detection section 9 ′ may be divided into two equal parts.
Although not shown, the same applies to the case where the light beam is guided to the detection unit at the position 9 "in FIG.

【0016】次に、本発明の光走査装置においては、例
えば、図1に示す実施例の場合、検出用結像光学素子6
が、図5に示すように、(a)主走査方向のパワーと(b)
副走査方向のパワーが異なるアナモフィックな形状をし
ていれば、検出面上に光束を主走査方向、副走査方向と
もに集光することができる。また、このとき、偏向器4
の偏向反射面と検出部9は副走査方向について共役な関
係になっているため、面倒れ補正機能を有し、多少偏向
器4の面倒れが発生しても検出部9に光束を導くことが
可能となる。
Next, in the optical scanning device of the present invention, for example, in the case of the embodiment shown in FIG.
However, as shown in FIG. 5, (a) the power in the main scanning direction and (b)
If the power in the sub-scanning direction has an anamorphic shape different from that in the sub-scanning direction, the light beam can be focused on the detection surface in both the main scanning direction and the sub-scanning direction. At this time, the deflector 4
Since the deflecting reflection surface and the detection unit 9 have a conjugate relationship with respect to the sub-scanning direction, the deflecting surface has a function of correcting surface tilt, and can guide the light flux to the detection unit 9 even if the deflector 4 slightly tilts. Becomes possible.

【0017】ところで、前記アナモフィックな形状をし
た光学素子は加工上の制約を受ける可能性がある。そこ
でこの場合は、検出用結像光学素子6は共軸球面ミラー
にし、主走査方向のみに結像させる。このとき、検出部
9上のビームスポット形状は図6に示すように副走査方
向に長い形状となり、副走査方向には大きな幅を持つ
が、主走査方向については集光しているため、位置検出
は可能となる。また、この構成の場合、面倒れは補正さ
れないが、副走査方向に大きな幅を持つため、多少の面
倒れが有っても検出可能となる。
Incidentally, the optical element having the anamorphic shape may be restricted in processing. So in this case, the detection imaging optical element 6 is a coaxial spherical mirror, Ru is focused only in the main scanning direction. At this time, the shape of the beam spot on the detection unit 9 is long in the sub-scanning direction as shown in FIG. 6 and has a large width in the sub-scanning direction. Detection is possible. In addition, in the case of this configuration, face tilt is not corrected, but has a large width in the sub-scanning direction, so that even if there is some face tilt, it can be detected.

【0018】次に、偏向器4によって検出部9に導かれ
る光束の一部が偏向器4によってケラレを生じる場合の
構成例について説明する。検出部9は、偏向器4による
偏向角が有効書き込み範囲を超えた位置の光束を検出す
るため、偏向器4に入射した光束がその偏向反射面の端
部によってケラレを生じる場合が有り、この場合、偏向
器4で反射された光束は主光線に対して非対称な形をし
ている。そこで、図7に示す例のように、偏向器4と検
出部9の間に光束の一部を遮光する遮光板13を配置
し、遮光板13の開口中心部に合わせて主光線を通過さ
せることにより、遮光板13を通った後の光束の光強度
分布を主光線に対して対称な形状にすることができ、シ
リンダレンズあるいはトロイダルレンズからなる検出用
結像光学素子12’を介して検出部9に結像させること
ができる。このとき、遮光板13の主走査方向の幅W
は、図中のΔd(主光線に対してケラレ側の光束の幅)
を用いた場合、 W<2Δd となるようにすればよい。
Next, a description will be given of a configuration example in which a part of the light beam guided to the detection unit 9 by the deflector 4 causes vignetting by the deflector 4. Since the detector 9 detects a light beam at a position where the deflection angle of the deflector 4 exceeds the effective writing range, the light beam incident on the deflector 4 may cause vignetting due to the end of the deflecting reflection surface. In this case, the light beam reflected by the deflector 4 has an asymmetric shape with respect to the principal ray. Therefore, as in the example shown in FIG. 7, a light-shielding plate 13 that blocks a part of the light beam is arranged between the deflector 4 and the detection unit 9, and the principal ray passes through the light-shielding plate 13 in accordance with the center of the opening. Thereby, the light intensity distribution of the light beam after passing through the light shielding plate 13 can be made symmetrical with respect to the principal ray, and the light intensity distribution can be detected via the detection imaging optical element 12 ′ formed of a cylinder lens or a toroidal lens. An image can be formed on the unit 9. At this time, the width W of the light shielding plate 13 in the main scanning direction
Is Δd in the figure (the width of the luminous flux on the vignetting side with respect to the principal ray)
In this case, W <2Δd may be satisfied.

【0019】さて、偏向器4に入射した光束がその偏向
反射面の端部によってケラレを生じる場合、遮光板13
を通さないときは、検出部9でのビーム形状(主走査方
向)は図8に示すように非対称な形状になり、位置を検
出するときに誤差を生じてしまうが、図7に示したよう
な遮光板13を通したときは、検出部9でのビーム形状
(主走査方向)は図9に示すように対称な形状になり、
位置検出を正確に行なうことができる。
When the light beam incident on the deflector 4 causes vignetting due to the end of the deflecting reflection surface, the light shielding plate 13 is used.
When the light does not pass through, the beam shape (main scanning direction) at the detection unit 9 becomes asymmetrical as shown in FIG. 8 and an error occurs when the position is detected, but as shown in FIG. When the light passes through the light shielding plate 13, the beam shape (main scanning direction) at the detection unit 9 becomes symmetric as shown in FIG.
Position detection can be performed accurately.

【0020】尚、上記遮光板13は図11に示した従来
装置にも同様に適用することができるものであり、検出
部による位置検出精度を向上することができる。また、
図7の例では、結像ミラー5で反射された光束を検出部
9に結像させるため、シリンダレンズあるいはトロイダ
ルレンズからなる検出用結像光学素子12’を設けてい
るが、図1のように反射型の検出用結像光学素子6を結
像ミラー5と一体に設けている場合には、遮光板13を
設けるだけで良く、図7の検出用結像光学素子12’を
省くことができる。
The light shielding plate 13 can be applied to the conventional device shown in FIG. 11 in the same manner, and the accuracy of position detection by the detection unit can be improved. Also,
In the example of FIG. 7, a detection imaging optical element 12 ′ including a cylinder lens or a toroidal lens is provided in order to form the light beam reflected by the imaging mirror 5 on the detection unit 9, as shown in FIG. 1. In the case where the reflection type imaging optical element 6 is provided integrally with the imaging mirror 5, only the light shielding plate 13 need be provided, and the detection imaging optical element 12 ′ in FIG. 7 can be omitted. it can.

【0021】次に、図1に示す光走査装置のように、反
射型の検出用結像光学素子6を結像ミラー5と一体に設
けている構成の場合は、図10に示すように、検出用結
像光学素子6の有効径を小さくし、検出用結像光学素子
6を反射した光束を主光線に対して対称にすれば、偏向
器4によるケラレが生じても、検出部9の位置では図9
に示すようなほぼ対称なビーム形状を得ることができ、
正確な位置検出を行なうことができる。尚、検出用結像
光学素子6の有効径Rは、図中のΔd(主光線に対して
ケラレ側の光束の幅)を用いた場合、 R<2Δd となるようにすればよい。以上のように、図10に示す
例では、検出用結像光学素子6の有効径を小さくし、検
出用結像光学素子6を反射した光束の光強度分布が主光
線を中心としたほぼ線対称の形状となるようにしている
ので、遮光板を設けなくても検出部9の位置でほぼ対称
なビーム形状を得ることができるため、図7の構成より
部品点数を低減することができる。
Next, as in the optical scanning device shown in FIG. 1, in the case where the reflection type imaging optical element 6 for detection is provided integrally with the imaging mirror 5, as shown in FIG. If the effective diameter of the imaging optical element for detection 6 is reduced and the light beam reflected by the imaging optical element for detection 6 is made symmetrical with respect to the principal ray, even if vignetting due to the deflector 4 occurs, the detection unit 9 can be used. Figure 9 in position
It is possible to obtain an almost symmetric beam shape as shown in
Accurate position detection can be performed. The effective diameter R of the imaging optical element 6 for detection may be set to satisfy R <2Δd when Δd (width of the light beam on the vignetting side with respect to the principal ray) in the figure is used. As described above, in the example illustrated in FIG. 10, the effective diameter of the imaging optical element 6 for detection is reduced, and the light intensity distribution of the light beam reflected by the imaging optical element 6 for detection is substantially linear with the principal ray as the center. Since a symmetrical shape is used, a substantially symmetrical beam shape can be obtained at the position of the detection unit 9 without providing a light shielding plate, so that the number of components can be reduced as compared with the configuration of FIG.

【0022】ところで、請求項1記載の光走査装置にお
いては、検出部に光束を導く検出用結像光学素子を結像
ミラーと一体化しており、ここでの一体化は、前述の実
施例(図1〜4)のように検出用結像光学素子6と結像
ミラー5をプラスチック材料を用いた一体成形により一
体化することを特徴としているが、この他、以下の参考
実施例に示すように、結像ミラーに検出用結像光学素子
として用いるミラーを連結する方法もある。但し、この
場合は結像ミラーと検出用結像光学素子が別部品となる
ので、一体成形と比べて部品数が増えコスト高となる。
連結の方法としては、結像ミラーに検出用結像光学素子
を接着しても良いし、板バネ等を用いて固定しても良
い。また、検出用結像光学素子にはどのような形状のミ
ラーを用いても良い。
By the way, in the optical scanning device according to the first aspect, the image forming optical element for guiding the light beam to the detecting section is integrated with the image forming mirror. 1-4) While the detection imaging optical element 6 and the imaging mirror 5 is characterized in that integrated by integral molding using a plastic material as, the other, the following references
As described in the embodiment, there is a method of connecting a mirror used as a detection imaging optical element to an imaging mirror. However, this
In this case, the imaging mirror and the imaging optics for detection are separate components.
Therefore, the number of parts increases and the cost increases as compared with the integral molding.
As a connection method, an imaging optical element for detection may be bonded to the imaging mirror, or may be fixed using a leaf spring or the like. Further, any shape of mirror may be used for the imaging optical element for detection.

【0023】ここで、図12は結像ミラーに検出用結像
光学素子として用いるミラーを連結して一体化する場合
の実施例を示す図であり、結像ミラー5の成形時に、結
像ミラー5の一端部に予め検出用結像光学素子連結用の
突起部5aを設けておき、この突起部5aに検出用結像
光学素子6として共軸球面ミラーあるいはアナモフィッ
クミラーを接着して一体化した例である。
FIG. 12 is a view showing an embodiment in which a mirror used as a detecting image forming optical element is connected to and integrated with an image forming mirror. When the image forming mirror 5 is formed, an image forming mirror is formed. A projection 5a for connecting an imaging optical element for detection is provided in advance at one end of 5, and a coaxial spherical mirror or an anamorphic mirror is bonded to the projection 5a as an imaging optical element 6 for detection. It is an example.

【0024】また、図13は別の実施例として、結像ミ
ラー5の突起部5aに検出用結像光学素子6として平面
ミラーを接着して一体化させた例である。この場合、平
面ミラーを用いているため、検出部9’に至る光路中に
結像レンズ14を設ける必要があるが、レイアウトの自
由度の増大という意味では有効な方法である。因みに、
結像レンズ14は検出部9’のフォトダイオード上で主
走査方向にのみ結像すれば良く、シリンダレンズ(主走
査方向にのみパワーを持つ)、球面レンズ、アナモフィ
ックレンズのどれを用いても良い。
FIG. 13 shows another embodiment in which a flat mirror is bonded as a detection imaging optical element 6 to the projection 5a of the imaging mirror 5 to be integrated. In this case, since a plane mirror is used, it is necessary to provide the imaging lens 14 in the optical path to the detection unit 9 ', but this is an effective method in terms of increasing the degree of freedom in layout. By the way,
The imaging lens 14 only needs to form an image in the main scanning direction on the photodiode of the detection unit 9 ', and any of a cylinder lens (having power only in the main scanning direction), a spherical lens, and an anamorphic lens may be used. .

【0025】また、結像ミラーに検出用結像光学素子と
して用いるミラーを連結する別の方法としては、結像ミ
ラーの検出用結像光学素子連結位置に予め穴又は凹状の
形状を設けておき、その部分に検出用結像光学素子の凸
部を嵌め込む構成にすることもできる。図14はその一
例を示すものであり、結像ミラー5の一端部に穴5bを
設け、検出用結像光学素子6側には凸部6aを設けてお
き、結像ミラー5の穴5bに検出用結像光学素子6の凸
部6aを圧入して嵌め込み、一体化した例である。尚、
結像ミラー5に設ける穴又は凹状の形状は、結像ミラー
の型成形時に設けることができるが、成形後に加工して
も良い。
As another method of connecting a mirror used as a detection imaging optical element to the imaging mirror, a hole or a concave shape is provided in advance at a connection position of the detection mirror on the imaging mirror. It is also possible to adopt a configuration in which the convex portion of the imaging optical element for detection is fitted into that portion. FIG. 14 shows an example of this, in which a hole 5b is provided at one end of the imaging mirror 5 and a projection 6a is provided on the side of the imaging optical element 6 for detection. This is an example in which the convex portion 6a of the imaging optical element 6 for detection is press-fitted, fitted, and integrated. still,
The hole or concave shape provided in the imaging mirror 5 can be provided at the time of molding the imaging mirror, but may be processed after the molding.

【0026】[0026]

【発明の効果】以上説明したように、請求項1の発明に
よれば、同期検知用の検出部に光束を導く検出用結像光
学素子光走査用の結像ミラーは、プラスチック材料に
より一体成形され、表面にミラーコーティングされた部
材からなることにより部品点数の低減ができ、組み付け
調整も容易になるので、低コストでコンパクトな光学系
を備えた光走査装置を提供することができる。
As described above, according to the first aspect of the present invention, the detection imaging optical element for guiding the light flux to the synchronization detection detection unit and the light scanning imaging mirror are integrally formed of a plastic material. Since the number of parts can be reduced and assembly adjustment can be facilitated by using a member formed and mirror-coated on the surface, an optical scanning device having a low-cost and compact optical system can be provided.

【0027】尚、前記結像ミラー及び前記検出用結像光
学素子は少なくとも主走査方向に凹形状をしており、検
出用結像光学素子の主走査方向のパワーを結像ミラーよ
り大きく設定することにより、検出部を光走査用光学素
子による光束の結像位置よりも短距離な位置に配置する
ことができ、レイアウトの自由度が増し、低コストでコ
ンパクトな光学系を備えた光走査装置を提供することが
できる。
The imaging mirror and the imaging optical element for detection are concave at least in the main scanning direction, and the power of the imaging optical element for detection in the main scanning direction is set to be larger than that of the imaging mirror. This makes it possible to dispose the detection unit at a position shorter than the position where the light beam is formed by the optical scanning optical element, thereby increasing the degree of freedom in layout, and providing a low-cost and compact optical scanning device. Can be provided.

【0028】また、前記検出用結像光学素子が主走査方
向のパワーと副走査方向のパワーが異なるアナモフィッ
クな形状をしている場合には、偏向器の面倒れにも対応
できる高精度な位置検出が可能な光走査装置を提供する
ことができ、また、前記検出用結像光学素子が共軸球面
ミラーであり、前記検出部の検出面近傍で主走査方向に
ついてのみ光束が結像する場合には、偏向器の面倒れに
も対応できる高精度な位置検出が可能であり、しかも、
加工が容易な光走査装置を提供することができる。
In the case where the detection imaging optical element has an anamorphic shape in which the power in the main scanning direction and the power in the sub-scanning direction are different, a high-precision position capable of coping with the tilting of the deflector. An optical scanning device capable of detection can be provided, and the imaging optical element for detection is a coaxial spherical mirror, and a light beam forms an image only in the main scanning direction near the detection surface of the detection unit. Is capable of high-accuracy position detection that can cope with surface tilt of the deflector.
An optical scanning device that can be easily processed can be provided.

【0029】さらに請求項1の発明によれば、前記検出
用結像光学素子の有効径を入射光束直径よりも小さく
し、検出用結像光学素子を介した後の光束の光強度分布
が主光線を中心としたほぼ線対称の形状となることによ
り、偏向器によるケラレが生じても、検出部ではほぼ対
称なビーム形状を得ることができるため、高精度な位置
検出が可能となり、しかも部品点数の低減ができ、低コ
ストでコンパクトな光走査装置が提供できる。
Further, according to the first aspect of the present invention, the effective diameter of the imaging optical element for detection is made smaller than the diameter of the incident light beam, and the light intensity distribution of the light beam after passing through the imaging optical element for detection is mainly determined. By having a substantially line-symmetric shape with the light beam as the center, even if vignetting occurs due to the deflector, the detection unit can obtain a substantially symmetric beam shape, enabling high-accuracy position detection. The number of points can be reduced, and a low-cost and compact optical scanning device can be provided.

【0030】請求項2,3の発明によれば、偏向器によ
って検出部に導かれる光束の一部が偏向器によってケラ
レを生じるものであって、前記偏向器と検出部の間にケ
ラレを生じた光束の一部を遮光する遮光板を置くことに
より、遮光板を通った後の光束の光強度分布を、主光線
を中心としたほぼ線対称の形状とすることができるた
め、偏向器によるケラレが生じても、検出部ではほぼ対
称なビーム形状を得ることができ、高精度な位置検出が
可能となる。
According to the second and third aspects of the invention, a part of the light beam guided to the detection unit by the deflector causes vignetting by the deflector, and vignetting occurs between the deflector and the detection unit. By placing a light-shielding plate that blocks a part of the light beam, the light intensity distribution of the light beam after passing through the light-shielding plate can be made almost line-symmetrical about the principal ray. Even if vignetting occurs, a substantially symmetrical beam shape can be obtained in the detection section, and highly accurate position detection can be performed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による光走査装置の光学系の一例を示す
斜視図である。
FIG. 1 is a perspective view showing an example of an optical system of an optical scanning device according to the present invention.

【図2】図1に示す光走査装置における検出部の配置位
置の説明図である。
FIG. 2 is an explanatory diagram of an arrangement position of a detection unit in the optical scanning device shown in FIG.

【図3】偏向器、検出用結像光学素子の光軸、検出部の
配置位置の説明図である。
FIG. 3 is an explanatory diagram of a deflector, an optical axis of a detection imaging optical element, and an arrangement position of a detection unit.

【図4】偏向器、検出用結像光学素子の光軸、検出部の
配置位置の説明図である。
FIG. 4 is an explanatory diagram of a deflector, an optical axis of a detection imaging optical element, and an arrangement position of a detection unit.

【図5】アナモフィックな形状を持つ検出用結像光学素
子の主走査方向のパワーと副走査方向のパワーの説明図
である。
FIG. 5 is an explanatory diagram of the power in the main scanning direction and the power in the sub-scanning direction of the imaging optical element for detection having an anamorphic shape.

【図6】検出用結像光学素子を共軸球面ミラーとした場
合の検出部でのビームスポット形状の説明図である。
FIG. 6 is an explanatory diagram of a beam spot shape in a detection unit when a detection imaging optical element is a coaxial spherical mirror.

【図7】偏向器と検出部の間にケラレを生じた光束の一
部を遮光する遮光板を配置した例を示す光走査装置の光
学系の要部平面図である。
FIG. 7 is a plan view of a main part of an optical system of an optical scanning device showing an example in which a light shielding plate that shields a part of a light beam having vignetting is disposed between a deflector and a detection unit.

【図8】偏向器によるケラレが生じた場合の検出部での
ビーム形状(主走査方向の光強度分布)を示す図であ
る。
FIG. 8 is a diagram illustrating a beam shape (light intensity distribution in a main scanning direction) at a detection unit when vignetting due to a deflector occurs.

【図9】図7に示す遮光板を通した時の検出部でのビー
ム形状(主走査方向の光強度分布)を示す図である。
9 is a diagram illustrating a beam shape (light intensity distribution in a main scanning direction) at a detection unit when the light passes through a light shielding plate illustrated in FIG. 7;

【図10】検出用結像光学素子の有効径を入射光束直径
よりも小さくした場合の例を示す光走査装置の光学系の
要部平面図である。
FIG. 10 is a plan view of a main part of the optical system of the optical scanning device showing an example in which the effective diameter of the imaging optical element for detection is smaller than the diameter of the incident light beam.

【図11】従来の光走査装置の光学系の一例を示す斜視
図である。
FIG. 11 is a perspective view showing an example of an optical system of a conventional optical scanning device.

【図12】像ミラーに検出用結像光学素子として用い
るミラーを連結して一体化した光学系の一例を示す要部
平面図である。
12 is a fragmentary plan view showing an example of an optical system that is integrated by connecting the mirror used as the detection imaging optical element in the image forming mirror.

【図13】結像ミラーに検出用結像光学素子として用い
るミラーを連結して一体化した光学系の別の例を示す要
部平面図である。
FIG. 13 is a main part plan view showing another example of an optical system in which a mirror used as a detection imaging optical element is connected to and integrated with an imaging mirror.

【図14】結像ミラーに検出用結像光学素子として用い
るミラーを連結して一体化した光学系のさらに別の例を
示す要部平面図である。
FIG. 14 is a plan view of a principal part showing still another example of an optical system in which a mirror used as a detection imaging optical element is connected to and integrated with an imaging mirror.

【符号の説明】[Explanation of symbols]

1:光源(半導体レーザ等) 2:カップリングレンズ 3:シリンダレンズ 4:偏向器 5:結像ミラー(共軸非球面反射ミラー) 5a:検出用結像光学素子連結用の突起部 5b:検出用結像光学素子連結用の穴(又は凹部) 6:検出用結像光学素子 6a:凸部 7:面倒れ補正用光学素子(樽型トロイダルレンズ等) 8:被走査面(感光体等) 9,9’,9”:検出部 12’:検出用結像光学素子(シリンダレンズあるいは
トロイダルレンズ) 13:遮光板 14:結像レンズ
1: Light source (semiconductor laser, etc.) 2: Coupling lens 3: Cylinder lens 4: Deflector 5: Imaging mirror (coaxial aspherical reflection mirror) 5a: Projection for connecting imaging optical element for detection 5b: Detection Hole (or concave portion) for connecting imaging optical element for use 6: Imaging optical element for detection 6a: Convex portion 7: Optical element for correcting surface tilt (barrel-shaped toroidal lens, etc.) 8: Surface to be scanned (photoconductor, etc.) 9, 9 ', 9 ": detection unit 12': imaging optical element for detection (cylinder lens or toroidal lens) 13: light shielding plate 14: imaging lens

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】レーザー光束を放射する光源と、前記光源
からの光束を等角速度的に偏向させる偏向器と、前記偏
向器による偏向光束を被走査面上に集光させ且つ被走査
面上で光走査を等速化する働きを持つ結像ミラーと、前
記偏向器により偏向走査された光束を受光し光束が走査
された位置を検出する検出部と、前記検出部に光束を導
く検出用結像光学素子とを有する光走査装置において、 前記検出用結像光学素子と前記結像ミラーは、プラスチ
ック材料により一体成形され、表面にミラーコーティン
グされた部材からなり、且つ、前記検出用結像光学素子
の有効径は入射光束直径よりも小さくし、検出用結像光
学素子を介した後の光束の光強度分布は主光線を中心と
したほぼ線対称の形状となることを特徴とする光走査装
置。
1. A light source for emitting a laser beam, a deflector for deflecting the light beam from the light source at a uniform angular velocity, and a light beam deflected by the deflector is condensed on a surface to be scanned, and is converged on the surface to be scanned. An image forming mirror having a function of equalizing light scanning, a detecting unit for receiving a light beam deflected by the deflector and detecting a position where the light beam is scanned, and a detecting unit for guiding the light beam to the detecting unit. An optical scanning device having an image optical element, wherein the detection image forming optical element and the image forming mirror are integrally formed of a plastic material, and are formed of a member having a surface coated with a mirror, and the detection image forming optical element. The optical scanning is characterized in that the effective diameter of the element is smaller than the diameter of the incident light beam, and that the light intensity distribution of the light beam after passing through the image-forming optical element for detection has a substantially line-symmetrical shape centered on the principal ray. apparatus.
【請求項2】レーザー光束を放射する光源と、前記光源
からの光束を等角速度的に偏向させる偏向器と、前記偏
向器による偏向光束を被走査面上に集光させ且つ被走査
面上で光走査を等速化する働きを持つ結像光学素子と、
前記偏向器により偏向走査された光束を受光し光束が走
査された位置を検出する検出部を有する光走査装置にお
いて、 前記偏向器によって検出部に導かれる光束の一部が偏向
器によってケラレを生じるものであって、前記偏向器と
検出部の間にケラレを生じた光束の一部を遮光する遮光
板を置くことを特徴とする光走査装置。
2. A light source for emitting a laser beam, a deflector for deflecting the light beam from the light source at a constant angular velocity, and a light beam deflected by the deflector is condensed on a surface to be scanned and is converged on the surface to be scanned. An imaging optical element having a function of making light scanning uniform,
In an optical scanning device having a detection unit that receives a light beam deflected and scanned by the deflector and detects a position where the light beam is scanned, a part of the light beam guided to the detection unit by the deflector causes vignetting by the deflector. An optical scanning device, wherein a light-shielding plate is provided between the deflector and the detection unit, the light-shielding plate shielding a part of a light beam having vignetting.
【請求項3】請求項2記載の光走査装置において、前記
遮光板を通った後の光束の光強度分布は、主光線を中心
としたときにほぼ線対称の形状となることを特徴とする
光走査装置。
3. An optical scanning device according to claim 2, wherein the light intensity distribution of the light beam after passing through said light shielding plate has a substantially line-symmetrical shape with respect to the principal ray. Optical scanning device.
JP1510195A 1994-07-25 1995-02-01 Optical scanning device Expired - Fee Related JP2971005B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1510195A JP2971005B2 (en) 1994-07-25 1995-02-01 Optical scanning device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6-172855 1994-07-25
JP17285594 1994-07-25
JP1510195A JP2971005B2 (en) 1994-07-25 1995-02-01 Optical scanning device

Publications (2)

Publication Number Publication Date
JPH0894953A JPH0894953A (en) 1996-04-12
JP2971005B2 true JP2971005B2 (en) 1999-11-02

Family

ID=26351193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1510195A Expired - Fee Related JP2971005B2 (en) 1994-07-25 1995-02-01 Optical scanning device

Country Status (1)

Country Link
JP (1) JP2971005B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7087892B2 (en) 2000-08-18 2006-08-08 Matsushita Electric Industrial Co., Ltd. Light scanner and image forming apparatus using the same
JP4373913B2 (en) * 2002-05-15 2009-11-25 パナソニック株式会社 Optical scanning apparatus and image forming apparatus
JP6394053B2 (en) * 2014-05-12 2018-09-26 株式会社リコー Optical scanning apparatus and image forming apparatus
JP6439925B2 (en) * 2014-11-25 2018-12-19 株式会社リコー Optical scanning apparatus and image forming apparatus
JP7293004B2 (en) * 2019-07-01 2023-06-19 東芝テック株式会社 Optical scanning device and image forming device

Also Published As

Publication number Publication date
JPH0894953A (en) 1996-04-12

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