JP2946381B2 - Surface roughness measuring method and device - Google Patents
Surface roughness measuring method and deviceInfo
- Publication number
- JP2946381B2 JP2946381B2 JP13844393A JP13844393A JP2946381B2 JP 2946381 B2 JP2946381 B2 JP 2946381B2 JP 13844393 A JP13844393 A JP 13844393A JP 13844393 A JP13844393 A JP 13844393A JP 2946381 B2 JP2946381 B2 JP 2946381B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measuring
- diffraction image
- processing
- processing surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003746 surface roughness Effects 0.000 title claims description 27
- 238000000034 method Methods 0.000 title claims description 18
- 230000003287 optical effect Effects 0.000 claims description 12
- 238000003384 imaging method Methods 0.000 claims description 8
- 238000004441 surface measurement Methods 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000001131 transforming effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 16
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 238000002834 transmittance Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は表面粗さ測定方法及び
装置に係り、特に加工面をレーザ光で照射して加工面で
反射されたレーザ光をフーリエ変換レンズで集光してフ
ラウンホーファ回析像を結像させて加工面の表面粗さを
測定する表面粗さ測定方法及び装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for measuring surface roughness, and more particularly to a Fraunhofer diffraction by irradiating a processing surface with a laser beam and condensing a laser beam reflected by the processing surface with a Fourier transform lens. The present invention relates to a surface roughness measuring method and apparatus for measuring the surface roughness of a processed surface by forming an image.
【０００２】[0002]
【従来の技術】磁気ディスク、シリコンウエハ等の超精
密加工面を非接触状態で高速測定する方法として、超精
密加工面から反射されたレーザ光をフラウンホーファ回
析して超精密加工面の振幅を測定する方法が知られてい
る。この方法は図２に示すように光源（例えばＨｅ−Ｎ
ｅレーザ）１２からレーザ光１４を投光して、投光され
たレーザ光１４をハーフミラー１０を透過させて被測定
物２０の加工面２０Ａまで導き、加工面２０Ａで反射さ
れたレーザ光１４をハーフミラー１０で全反射させる。
全反射されたレーザ光１４はフーリエ変換レンズ１６を
介してＣＣＤカメラ１８の結像面に導かれる。従って、
ＣＣＤカメラ１８の結像面に加工面２０Ａのフラウンホ
ーファ回析像が結像され、結像されたフラウンホーファ
回析像はフレームメモリに記憶される。2. Description of the Related Art As a method for non-contact high-speed measurement of an ultra-precision machined surface such as a magnetic disk or a silicon wafer, the amplitude of the ultra-precision machined surface is measured by Fraunhofer diffraction of a laser beam reflected from the ultra-precision machined surface. Methods for measuring are known. This method uses a light source (for example, He-N) as shown in FIG.
e) emits a laser beam 14 from the laser beam 12, transmits the projected laser beam 14 through the half mirror 10, guides the projected laser beam 14 to the processing surface 20 A of the DUT 20, and reflects the laser beam 14 reflected by the processing surface 20 A. Is totally reflected by the half mirror 10.
The totally reflected laser light 14 is guided to an image forming plane of a CCD camera 18 via a Fourier transform lens 16. Therefore,
The Fraunhofer diffraction image of the processing surface 20A is formed on the imaging surface of the CCD camera 18, and the formed Fraunhofer diffraction image is stored in the frame memory.
【０００３】一方、レーザ光１４がハーフミラー１０を
透過する場合や加工面２０Ａで反射される場合に、ハー
フミラー１０の透過率や加工面２０Ａの反射率等でレー
ザ光１４は減衰する。従って、フレームメモリに記憶さ
れたフラウンホーファ回析像から被測定物２０の加工面
２０Ａの粗さの振幅を測定するためには、レーザ光１４
は減衰を補正する必要がある。そして、レーザ光１４の
減衰を補正するために参照面が使用される。参照面を求
める場合、ハーフミラー１０を９０°反時計回り方向に
回動して参照面測定位置に位置決めする（図３参照）。
次に、光源１２からレーザ光１４を投光してハーフミラ
ー１０で全反射させ、フーリエ変換レンズ１６を介して
ＣＣＤカメラ１８の結像面に結像させる。これにより、
参照面が測定され、この参照面でフラウンホーファ回析
像を補正して被測定物２０の加工面２０Ａの粗さの振幅
を測定する。On the other hand, when the laser beam 14 passes through the half mirror 10 or is reflected by the processing surface 20A, the laser beam 14 is attenuated by the transmittance of the half mirror 10 and the reflectance of the processing surface 20A. Therefore, in order to measure the amplitude of the roughness of the processing surface 20A of the workpiece 20 from the Fraunhofer diffraction image stored in the frame memory, the laser light 14
Need to compensate for attenuation. Then, the reference surface is used to correct the attenuation of the laser light 14. When obtaining the reference plane, the half mirror 10 is rotated in a counterclockwise direction by 90 ° to be positioned at the reference plane measurement position (see FIG. 3).
Next, a laser beam 14 is projected from the light source 12, totally reflected by the half mirror 10, and is imaged on the image plane of the CCD camera 18 via the Fourier transform lens 16. This allows
The reference surface is measured, and the Fraunhofer diffraction image is corrected on the reference surface to measure the amplitude of the roughness of the processed surface 20A of the workpiece 20.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、従来の
測定方法ではハーフミラー９０°回動させないと、加工
面の測定と参照面の測定を切り換えることができないの
で、加工面の測定時と参照面の測定時に時間差が生じ
る。そして、この時間差でレーザ光や加工面が変動する
場合がある。また、従来の測定方法ではレーザ光の光路
長が参照面測定時（Ｌ1 ＋Ｌ2 ）と加工面測定時（Ｌ1
＋Ｌ2 ＋Ｌ3 ）とで異なるので、参照面の測定時と加工
面の測定時でレーザ光の散乱状態に差が生じる。このよ
うに、参照面と加工面の測定時にレーザ光や加工面が変
動し、さらにレーザ光の散乱状態に差があると、加工面
の粗さ振幅を測定する場合に測定誤差が生じて十分な測
定精度を得ることができないという問題がある。However, in the conventional measuring method, it is not possible to switch between the measurement of the processing surface and the measurement of the reference surface unless the half mirror is turned by 90 °. There is a time difference during measurement. Then, the laser beam or the processing surface may fluctuate due to the time difference. Further, in the conventional measuring method, the optical path length of the laser beam is measured when the reference surface is measured (L 1 + L 2 ) and when the processed surface is measured (L 1
+ L 2 + L 3 ), there is a difference in the scattering state of the laser light between the measurement of the reference surface and the measurement of the processed surface. As described above, when the laser light or the processing surface fluctuates when the reference surface and the processing surface are measured, and there is a difference in the scattering state of the laser light, a measurement error occurs when measuring the roughness amplitude of the processing surface, and thus the measurement is insufficient. There is a problem that high measurement accuracy cannot be obtained.
【０００５】本発明はこのような事情に鑑みてなされた
もので、加工面と参照面を同時に測定してレーザ光や加
工面の変動をなくし、さらに加工面と参照面の測定時の
レーザ光の光路長を同一に設定してレーザ光の散乱状態
に差が生じないようにして十分な測定精度を得ることが
できる表面粗さ測定方法及び装置を提供することを目的
とする。The present invention has been made in view of such circumstances, and measures a processing surface and a reference surface at the same time to eliminate fluctuations in laser light and the processing surface. It is an object of the present invention to provide a surface roughness measuring method and apparatus which can obtain sufficient measurement accuracy by setting the same optical path length so that no difference occurs in the scattering state of laser light.
【０００６】[0006]
【課題を解決するための手段】本発明は、光源から投光
された光で加工面を照射し、該加工面で反射された反射
光をフーリエ変換レンズで集光して前記加工面の回析像
を結像し、該結像された加工面の回析像を参照面で補正
して前記加工面の表面粗さを測定する表面粗さ測定方法
において、前記光源から投光された光をハーフミラーで
透過光及び反射光に分割し、前記分割された透過光の光
路長と反射光の光路長を同一に設定し、前記透過光で前
記加工面を照射して加工面の反射光を加工面測定用のフ
ーリエ変換レンズで集光して加工面の回析像を結像し、
前記ハーフミラーの反射光を参照面測定用のフーリエ変
換レンズで集光して前記参照面の回析像を前記加工面の
回析像と同時に結像し、前記参照面の回析像及び前記加
工面の回析像に基づいて前記加工面の表面粗さを測定す
ることを特徴とする表面粗さ測定方法、及びそれを実施
するための装置である。According to the present invention, a processing surface is irradiated with light emitted from a light source, and the light reflected by the processing surface is condensed by a Fourier transform lens, and the light is reflected on the processing surface. In the surface roughness measuring method of forming an image of the processed surface and correcting the formed diffraction image of the processed surface with a reference surface to measure the surface roughness of the processed surface, the light projected from the light source may be used. Is divided into a transmitted light and a reflected light by a half mirror, an optical path length of the divided transmitted light and an optical path length of the reflected light are set to be the same, and the reflected light of the processed surface is irradiated with the transmitted light. Is focused by a Fourier transform lens for measuring the processed surface to form a diffraction image of the processed surface,
The reflected light of the half mirror is condensed by a Fourier transform lens for reference surface measurement to form a diffraction image of the reference surface simultaneously with the diffraction image of the processed surface, and the diffraction image of the reference surface and the diffraction image A surface roughness measuring method for measuring the surface roughness of the processed surface based on a diffraction image of the processed surface, and an apparatus for performing the method.
【０００７】[0007]
【作用】本発明によれば、光源から投光された光をハー
フミラーを透過する透過光とハーフミラーで反射された
反射光に分割して、透過光と反射光は光路長が同一にな
るように設定されている。ハーフミラーの透過光は加工
面で反射されて加工面測定用のフーリエ変換レンズで集
光され、加工面の回析像を結像する。また、ハーフミラ
ーで反射された反射光は参照面測定用のフーリエ変換レ
ンズで集光して参照面の回析像を結像する。そして、参
照面の回析像に基づいて加工面の回析像を補正して加工
面の表面粗さを測定する。According to the present invention, the light projected from the light source is divided into the transmitted light passing through the half mirror and the reflected light reflected by the half mirror, and the transmitted light and the reflected light have the same optical path length. It is set as follows. The light transmitted through the half mirror is reflected by the processing surface, is collected by a Fourier transform lens for measuring the processing surface, and forms a diffraction image of the processing surface. Further, the reflected light reflected by the half mirror is condensed by a Fourier transform lens for measuring the reference surface to form a diffraction image of the reference surface. Then, the diffraction image of the processed surface is corrected based on the diffraction image of the reference surface, and the surface roughness of the processed surface is measured.
【０００８】このように、加工面と参照面を同時に測定
することができるので時間差で生じるレーザ光の変動や
加工面の変動をなくことができ、さらにレーザ光の散乱
状態に差が生じないようにすることができる。As described above, since the processing surface and the reference surface can be measured at the same time, the fluctuation of the laser light and the fluctuation of the processing surface caused by the time difference can be eliminated, and the difference in the scattering state of the laser light can be prevented. Can be
【０００９】[0009]
【実施例】以下添付図面に従って本発明に係る表面粗さ
測定方法及び装置について詳説する。図１は本発明に係
る表面粗さ測定装置５０の全体図である。表面粗さ測定
装置５０はレーザ光源５２を備えていて、レーザ光源５
２はＨｅ−Ｎｅ等のレーザ光５４を下方に投光する。レ
ーザ光源５２の下方にはハーフミラー５６が４５°傾斜
した状態で配置されていて、ハーフミラー５６のコーテ
ィング面５６Ａは下面側に形成されている。これによ
り、レーザ光源５２から投光されたレーザ光５４はハー
フミラー５６を透過する加工面測定用のレーザ光５４Ａ
とハーフミラー５６のコーティング面５６Ａで反射され
る参照面測定用のレーザ光５４Ｂに分けられる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method and an apparatus for measuring surface roughness according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is an overall view of a surface roughness measuring device 50 according to the present invention. The surface roughness measuring device 50 includes a laser light source 52,
2 projects a laser beam 54 such as He-Ne downward. Below the laser light source 52, a half mirror 56 is arranged in a state inclined at 45 °, and a coating surface 56A of the half mirror 56 is formed on the lower surface side. Thus, the laser light 54 emitted from the laser light source 52 is transmitted through the half mirror 56 and is used as a processing surface measurement laser light 54A.
And a reference surface measurement laser beam 54B reflected by the coating surface 56A of the half mirror 56.
【００１０】また、ハーフミラー５６の右側には加工面
測定用のフーリエ変換レンズ５８Ａが配置されていて、
フーリエ変換レンズ５８Ａの後方には加工面測定用のＣ
ＣＤカメラ６０Ａが配置されている。また、ハーフミラ
ー５６の左側には参照面測定用のフーリエ変換レンズ５
８Ｂが配置されていて、フーリエ変換レンズ５８Ｂの後
方には参照面測定用のＣＣＤカメラ６０Ｂが配置されて
いる。On the right side of the half mirror 56, a Fourier transform lens 58A for measuring a machined surface is arranged.
Behind the Fourier transform lens 58A, there is a C for processing surface measurement.
A CD camera 60A is provided. On the left side of the half mirror 56, a Fourier transform lens 5 for measuring a reference surface is provided.
8B, and a CCD camera 60B for measuring a reference plane is arranged behind the Fourier transform lens 58B.
【００１１】この場合、加工面測定用と参照面測定用の
フーリエ変換レンズ５８Ａ、５８Ｂ及び加工面測定用と
参照面測定用のＣＣＤカメラ６０Ａ、６０Ｂは、加工面
測定用のレーザ光５４Ａ及び参照面測定用のレーザ光５
４Ｂの光路長が、それぞれＬ 2 ＋Ｌ3 になるように設定
されている。従って、加工面測定用のレーザ光５４Ａと
参照面測定用のレーザ光５４Ｂの散乱状態に差が生じな
いようにすることができる。[0011] In this case, the measured surface and the reference surface are measured.
For Fourier transform lenses 58A, 58B and for processing surface measurement
The CCD cameras 60A and 60B for measuring the reference surface are processed surfaces.
Measurement laser beam 54A and reference surface measurement laser beam 5
The optical path length of 4B is L Two+ LThreeSet to be
Have been. Therefore, the laser light 54A for measuring the processed surface is
No difference occurs in the scattering state of the reference plane measuring laser beam 54B.
Can be done.
【００１２】そして、ハーフミラー５６の下方に被測定
物６２が配置されると、ハーフミラー５６で分割された
加工面測定用のレーザ光５４Ａは被測定物６２の加工面
６２Ａとハーフミラー５６のコーティング面５６Ａで反
射される。コーティング面５６Ａで反射されたレーザ光
５４Ａはフーリエ変換レンズ５８Ａで集光されて、ＣＣ
Ｄカメラ６０Ａの結像面に加工面６２Ａのフラウンホー
ファ回析像を結像する。一方、ハーフミラー５６で分割
された参照面測定用のレーザ光５４Ｂはフーリエ変換レ
ンズ５８Ｂで集光されてＣＣＤカメラ６０Ｂの結像面に
参照面のフラウンホーファ回析像を結像する。これによ
り、フレームメモリ６４にはＣＣＤカメラ６０Ａの結像
面に結像したフラウンホーファ回析像の光強度分布デー
タと、ＣＣＤカメラ６０Ｂの結像面に結像したフラウン
ホーファ回析像の光強度分布データが同時に入力され
る。When the object 62 is placed below the half mirror 56, the laser light 54A for measuring the processing surface split by the half mirror 56 is applied to the processing surface 62A of the object 62 and the half mirror 56. The light is reflected by the coating surface 56A. The laser light 54A reflected by the coating surface 56A is condensed by the Fourier transform lens 58A,
A Fraunhofer diffraction image of the processing surface 62A is formed on the image forming surface of the D camera 60A. On the other hand, the reference surface measuring laser beam 54B split by the half mirror 56 is condensed by the Fourier transform lens 58B and forms a Fraunhofer diffraction image of the reference surface on the image forming surface of the CCD camera 60B. Accordingly, the frame memory 64 stores the light intensity distribution data of the Fraunhofer diffraction image formed on the imaging surface of the CCD camera 60A and the light intensity distribution data of the Fraunhofer diffraction image formed on the imaging surface of the CCD camera 60B. Are input at the same time.
【００１３】前記の如く構成された本発明に係る表面粗
さ測定装置の作用について説明する。先ず、レーザ光源
５２からレーザ光５４を下方に投光する。投光されたレ
ーザ光５４はハーフミラー５６で、ハーフミラー５６を
透過する加工面測定用のレーザ光５４Ａとハーフミラー
５６のコーティング面５６Ａで反射される参照面測定用
のレーザ光５４Ｂに分けられる。分割された加工面測定
用のレーザ光５４Ａは被測定物６２の加工面６２Ａで反
射して再度ハーフミラー５６まで導かれてハーフミラー
５６のコーティング面５６Ａで全反射される。The operation of the surface roughness measuring apparatus according to the present invention having the above-described structure will be described. First, a laser beam 54 is projected downward from the laser light source 52. The projected laser light 54 is divided by a half mirror 56 into a laser light 54A for measuring the processing surface transmitted through the half mirror 56 and a laser light 54B for measuring the reference surface reflected by the coating surface 56A of the half mirror 56. . The split laser light 54A for measuring the processed surface is reflected on the processed surface 62A of the workpiece 62, guided again to the half mirror 56, and totally reflected on the coating surface 56A of the half mirror 56.
【００１４】コーティング面５６Ａで全反射されたレー
ザ光５４Ａはフーリエ変換レンズ５８Ａで集光されて、
ＣＣＤカメラ６０Ａの結像面に加工面６２Ａのフラウン
ホーファ回析像を結像する。ＣＣＤカメラ６０Ａの結像
面に結像した加工面６２Ａのフラウンホーファ回析像の
光強度分布は電気信号に変換され、変換された電気信号
はドライバ６６Ａで読み出されてフレームメモリ６４に
加工面６２Ａのフラウンホーファ回析像の光強度分布デ
ータとして蓄えられる。The laser light 54A totally reflected on the coating surface 56A is condensed by a Fourier transform lens 58A.
A Fraunhofer diffraction image of the processing surface 62A is formed on the image forming surface of the CCD camera 60A. The light intensity distribution of the Fraunhofer diffraction image of the processing surface 62A formed on the imaging surface of the CCD camera 60A is converted into an electric signal, and the converted electric signal is read out by a driver 66A and stored in the frame memory 64 by the processing surface 62A. Is stored as light intensity distribution data of the Fraunhofer diffraction image.
【００１５】一方、ハーフミラー５６で分割された参照
面測定用のレーザ光５４Ｂはフーリエ変換レンズ５８Ｂ
で集光されてＣＣＤカメラ６０Ｂの結像面に参照面のフ
ラウンホーファ回析像が結像する。ＣＣＤカメラ６０Ｂ
の結像面に結像した参照面のフラウンホーファ回析像の
光強度分布は電気信号に変換され、変換された電気信号
はドライバ６６Ｂで読み出されてフレームメモリ６４に
参照面の光強度分布データとして蓄えられる。この場
合、フレームメモリ６４には加工面６１Ａのフラウンホ
ーファ回析像の光強度分布データと、参照面の光強度分
布データが同時に入力される。従って、加工面の測定時
と参照面の測定時に時間差が生じないので、参照面と加
工面の測定時にレーザ光の変動や加工面の変動の影響を
受けない。さらに、加工面測定用のレーザ光５４Ａと参
照面測定用のレーザ光５４Ｂの光路長は同一に設定され
ているので、レーザ光５４Ａとレーザ光５４Ｂの散乱状
態に差が生じない。On the other hand, the reference plane measuring laser beam 54B split by the half mirror 56 is supplied to a Fourier transform lens 58B.
And a Fraunhofer diffraction image of the reference surface is formed on the image forming surface of the CCD camera 60B. CCD camera 60B
The light intensity distribution of the Fraunhofer diffraction image of the reference surface formed on the image forming surface is converted into an electric signal, and the converted electric signal is read out by the driver 66B and stored in the frame memory 64 as the light intensity distribution data of the reference surface. It is stored as. In this case, the light intensity distribution data of the Fraunhofer diffraction image of the processing surface 61A and the light intensity distribution data of the reference surface are simultaneously input to the frame memory 64. Therefore, there is no time difference between the measurement of the processing surface and the measurement of the reference surface, so that the measurement of the reference surface and the processing surface is not affected by the fluctuation of the laser beam or the fluctuation of the processing surface. Further, since the optical path lengths of the laser light 54A for measuring the processed surface and the laser light 54B for measuring the reference surface are set to be the same, there is no difference between the scattering states of the laser light 54A and the laser light 54B.
【００１６】そして、フレームメモリ６４に蓄えられた
加工面６１Ａのフラウンホーファ回析像の光強度分布デ
ータ、及び参照面の光強度分布データはＣＰＵ６６に入
力される。ＣＰＵ６６はフラウンホーファ回析像の光強
度分布データと参照面の光強度分布データに基づいて、
ハーフミラー５６の透過率や加工面６２Ａの反射率等に
よるレーザ光５４の減衰を補正して補正された加工面６
２Ａの粗さの振幅を算出する。この場合、加工面測定用
のレーザ光５４Ａと参照面測定用のレーザ光５４Ｂと
は、ハーフミラー５６のコーティング面５６Ａで１回ず
つ反射されるのでコーティング面５６Ａの粗さを差し引
くことができる。The light intensity distribution data of the Fraunhofer diffraction image of the processing surface 61A and the light intensity distribution data of the reference surface stored in the frame memory 64 are input to the CPU 66. CPU 66 is based on the light intensity distribution data of the Fraunhofer diffraction image and the light intensity distribution data of the reference surface,
The processing surface 6 corrected by correcting the attenuation of the laser beam 54 due to the transmittance of the half mirror 56, the reflectance of the processing surface 62A, and the like.
The amplitude of the roughness of 2A is calculated. In this case, the laser light 54A for measuring the processed surface and the laser light 54B for measuring the reference surface are reflected once by the coating surface 56A of the half mirror 56, so that the roughness of the coating surface 56A can be subtracted.
【００１７】[0017]
【発明の効果】以上説明したように本発明に係る表面粗
さ測定方法及び装置によれば、光源から投光された光を
ハーフミラーを透過する透過光とハーフミラーで反射さ
れた反射光に分割して、透過光と反射光を光路長が同一
になるように設定した。従って、加工面と参照面を同時
に測定することができるので時間差で生じるレーザ光の
変動や加工面の変動をなくことができ、さらにレーザ光
の散乱状態に差が生じないようにすることができる。こ
れにより、被測定物の加工面の表面粗さを測定する場合
に測定精度の向上を図ることができる。As described above, according to the surface roughness measuring method and apparatus according to the present invention, the light projected from the light source is converted into the transmitted light passing through the half mirror and the reflected light reflected by the half mirror. The divided light was set so that the transmitted light and the reflected light had the same optical path length. Therefore, since the processing surface and the reference surface can be measured at the same time, the fluctuation of the laser light and the fluctuation of the processing surface caused by the time difference can be eliminated, and the difference in the scattering state of the laser light can be prevented. . This can improve the measurement accuracy when measuring the surface roughness of the processed surface of the workpiece.
【図１】本発明に係る表面粗さ測定装置の全体図FIG. 1 is an overall view of a surface roughness measuring device according to the present invention.
【図２】従来の表面粗さ測定方法を説明する説明図FIG. 2 is an explanatory view illustrating a conventional surface roughness measuring method.
【図３】従来の表面粗さ測定方法を説明する説明図FIG. 3 is an explanatory view for explaining a conventional surface roughness measuring method.
５０…表面粗さ測定装置 ５２…光源 ５４…レーザ光 ５４Ａ…レーザ光（透過光） ５４Ｂ…レーザ光（反射光） ５６…ハーフミラー ５８Ａ、５８Ｂ…フーリエ変換レンズ ６０Ａ、６０Ｂ…ＣＣＤカメラ（撮像センサ） ６６…ＣＰＵ（演算部） ６２Ａ…加工面 Reference numeral 50: Surface roughness measuring device 52: Light source 54: Laser light 54A: Laser light (transmitted light) 54B: Laser light (reflected light) 56: Half mirror 58A, 58B: Fourier transform lens 60A, 60B: CCD camera (imaging sensor) 66: CPU (arithmetic unit) 62A: machined surface
Claims (2)
し、該加工面で反射された反射光をフーリエ変換レンズ
で集光して前記加工面の回析像を結像し、該結像された
加工面の回析像を参照面で補正して前記加工面の表面粗
さを測定する表面粗さ測定方法において、 前記光源から投光された光をハーフミラーで透過光及び
反射光に分割し、 前記分割された透過光の光路長と反射光の光路長を同一
に設定し、 前記透過光で前記加工面を照射して加工面の反射光を加
工面測定用のフーリエ変換レンズで集光して加工面の回
析像を結像し、 前記ハーフミラーの反射光を参照面測定用のフーリエ変
換レンズで集光して前記参照面の回析像を前記加工面の
回析像と同時に結像し、 前記参照面の回析像及び前記加工面の回析像に基づいて
前記加工面の表面粗さを測定することを特徴とする表面
粗さ測定方法。1. A processing surface is illuminated with light projected from a light source, and reflected light reflected by the processing surface is condensed by a Fourier transform lens to form a diffraction image of the processing surface. In a surface roughness measuring method of correcting a formed diffraction image of a processed surface with a reference surface and measuring a surface roughness of the processed surface, the light projected from the light source is transmitted and reflected by a half mirror. Dividing into light, setting the same optical path length of the divided transmitted light and the same optical path length of the reflected light, irradiating the processed surface with the transmitted light and transforming the reflected light of the processed surface into a Fourier transform for measuring the processed surface The light is condensed by a lens to form a diffraction image of the processing surface, and the reflected light of the half mirror is condensed by a Fourier transform lens for measuring the reference surface, and the diffraction image of the reference surface is analyzed by the diffraction of the processing surface The image is formed simultaneously with the diffraction image, and the surface of the processing surface is determined based on the diffraction image of the reference surface and the diffraction image of the processing surface. Surface roughness measuring method and measuring the of.
し、該加工面で反射された反射光をフーリエ変換レンズ
で集光して前記加工面の回析像を結像し、該結像された
加工面の回析像を参照面で補正して前記加工面の表面粗
さを測定する表面粗さ測定装置において、 前記光源から投光された光を透過光及び反射光に分割す
るハーフミラーと、 前記透過光で前記加工面を照射して加工面の反射光を集
光して前記加工面の回析像を結像する加工面測定用のフ
ーリエ変換レンズと、 前記加工面の回析像を受光する加工面測定用の撮像セン
サと、 前記ハーフミラーの反射光を集光して前記参照面の回析
像を結像する参照面測定用のフーリエ変換レンズと、 前記参照面の回析像を受光する参照面測定用の撮像セン
サと、 前記参照面の回析像のデータ及び前記加工面の回析像の
データに基づいて前記加工面の表面粗さを求める演算部
と、 を備え、前記ハーフミラーで分割された透過光の光路長
と反射光の光路長が同一になるように前記加工面、加工
面測定用の撮像センサ及び前記参照面測定用の撮像セン
サを位置決めすることを特徴とする表面粗さ測定装置。2. A processing surface is illuminated with light projected from a light source, and reflected light reflected by the processing surface is condensed by a Fourier transform lens to form a diffraction image of the processing surface. In a surface roughness measuring device for correcting the formed diffraction image of a processed surface with a reference surface and measuring the surface roughness of the processed surface, the light projected from the light source is divided into transmitted light and reflected light. A half mirror that irradiates the processing surface with the transmitted light, condenses reflected light from the processing surface, and forms a diffraction image of the processing surface to form a Fourier transform lens for processing surface measurement; An imaging sensor for measuring a processed surface that receives a diffraction image of the reference surface; a Fourier transform lens for measuring a reference surface that collects reflected light of the half mirror to form a diffraction image of the reference surface; An image sensor for measuring a reference surface that receives a diffraction image of a surface, and data of a diffraction image of the reference surface and An arithmetic unit for calculating the surface roughness of the processed surface based on the data of the diffraction image of the processed surface, wherein the optical path length of the transmitted light and the optical path length of the reflected light divided by the half mirror are the same. A surface roughness measuring apparatus characterized in that the processing surface, the imaging sensor for measuring the processing surface, and the imaging sensor for measuring the reference surface are positioned as described above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13844393A JP2946381B2 (en) | 1993-06-10 | 1993-06-10 | Surface roughness measuring method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13844393A JP2946381B2 (en) | 1993-06-10 | 1993-06-10 | Surface roughness measuring method and device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06347244A JPH06347244A (en) | 1994-12-20 |
| JP2946381B2 true JP2946381B2 (en) | 1999-09-06 |
Family
ID=15222121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13844393A Expired - Fee Related JP2946381B2 (en) | 1993-06-10 | 1993-06-10 | Surface roughness measuring method and device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2946381B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5892591B2 (en) * | 2010-12-09 | 2016-03-23 | 国立大学法人九州工業大学 | Three-dimensional surface measuring apparatus and method |
| CN118424143B (en) * | 2024-04-28 | 2024-10-18 | 重庆市凤中机械有限公司 | Laser detection device for shift fork shaft of speed changer |
-
1993
- 1993-06-10 JP JP13844393A patent/JP2946381B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06347244A (en) | 1994-12-20 |
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