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JP2536006Y2 - Ultrasonic atomizer - Google Patents

Ultrasonic atomizer

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Publication number
JP2536006Y2
JP2536006Y2 JP10228591U JP10228591U JP2536006Y2 JP 2536006 Y2 JP2536006 Y2 JP 2536006Y2 JP 10228591 U JP10228591 U JP 10228591U JP 10228591 U JP10228591 U JP 10228591U JP 2536006 Y2 JP2536006 Y2 JP 2536006Y2
Authority
JP
Japan
Prior art keywords
net
thin plate
piezoelectric vibrator
porous
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10228591U
Other languages
Japanese (ja)
Other versions
JPH0544257U (en
Inventor
実 高橋
小野  誠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP10228591U priority Critical patent/JP2536006Y2/en
Priority to EP92420177A priority patent/EP0516565B1/en
Priority to US07/889,067 priority patent/US5299739A/en
Priority to DE69210096T priority patent/DE69210096T2/en
Publication of JPH0544257U publication Critical patent/JPH0544257U/en
Application granted granted Critical
Publication of JP2536006Y2 publication Critical patent/JP2536006Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【考案の詳細な説明】[Detailed description of the invention]

【0001】[0001]

【産業上の利用分野】本考案は、小電力で小霧化量の吸
入器等の用途に適した超音波霧化器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic atomizer suitable for use as an inhaler having a small amount of power and a small amount of atomization.

【0002】[0002]

【従来の技術】従来、圧電磁器の厚さ方向の共振による
超音波振動を利用した超音波霧化器としては、室内加湿
用の家庭用霧化器が知られている。このような室内加湿
用の霧化器は、水を入れた水槽の底部に圧電振動子を取
り付けたもので、数100cc/時、程度の比較的大きな
霧化量を実現している。
2. Description of the Related Art Conventionally, a household atomizer for indoor humidification has been known as an ultrasonic atomizer utilizing ultrasonic vibration caused by resonance in the thickness direction of a piezoelectric ceramic. Such an atomizer for indoor humidification is one in which a piezoelectric vibrator is attached to the bottom of a water tank filled with water, and realizes a relatively large amount of atomization of several hundred cc / hour.

【0003】しかし、最近になって、電池駆動に適した
5W以下の小電力で小霧化量の超音波霧化器が、薬液等
を喉、気管、肺等に吸入するための吸入器等の用途に要
求されるようになってきている。
However, recently, an ultrasonic atomizer with a small amount of electric power of 5 W or less and suitable for driving a battery has been developed by using an inhaler for inhaling a chemical solution or the like into the throat, trachea, lungs, or the like. Is being demanded for applications.

【0004】図8は、上述のような吸入器等の用途向け
に本出願人が先に提案している超音波霧化器を示してお
り、円板状の圧電磁器1の主面2A及び該主面の反対面
である対向面2Bにそれぞれ電極3A,3Bを形成して
なる圧電振動子4の霧化作用面5 (主面上に電極を形成
した面)側に圧電振動子4とほぼ同径で円形平板状の多
孔乃至網状薄板6を載置し、その圧電振動子4周縁部分
の上下両面を弾性環状支持体7で取り囲んでその溝11
にて多孔乃至網状薄板6と一体的に保持し、霧化作用面
5上に給液手段 (給液パイプ等)8を配置して霧化すべ
き液体を適量滴下、又は毛細管を用いて浸透供給する構
成である。この場合、滴下された液体が毛細管現象で圧
電振動子4の霧化作用面5に広がることができるよう
に、圧電振動子4の霧化作用面5と多孔乃至網状薄板6
下面との間に微小な隙間を設けており、この微小な隙間
は圧電振動子4に対して僅かに遊びを持たせて多孔乃至
網状薄板6を弾性環状支持体7で保持することで実現し
ている。前記多孔乃至網状薄板6には穴径が約10μm
乃至100μm程度の微小穴9が多数形成されている。
FIG. 8 shows an ultrasonic atomizer previously proposed by the present applicant for use as an inhaler or the like as described above. The ultrasonic atomizer includes a main surface 2A and a main surface 2A of a disc-shaped piezoelectric ceramic 1. The piezoelectric vibrator 4 is formed by forming electrodes 3A and 3B on the opposite surface 2B opposite to the main surface, and the piezoelectric vibrator 4 is formed on the atomizing action surface 5 (the surface on which the electrodes are formed on the main surface). A circular plate-shaped porous or net-like thin plate 6 having substantially the same diameter is placed, and the upper and lower surfaces of the peripheral portion of the piezoelectric vibrator 4 are surrounded by an elastic annular support 7 and the groove 11 is formed.
And a liquid supply means (liquid supply pipe or the like) 8 is disposed on the atomizing surface 5 to drop an appropriate amount of liquid to be atomized, or permeate and supply using a capillary tube. It is a configuration to do. In this case, the atomizing action surface 5 of the piezoelectric vibrator 4 and the porous or net-like thin plate 6 are so formed that the dropped liquid can spread on the atomizing action surface 5 of the piezoelectric vibrator 4 by capillary action.
A minute gap is provided between the piezoelectric vibrator 4 and the lower surface. The small gap is realized by allowing the piezoelectric vibrator 4 to have a slight play and holding the porous or net-like thin plate 6 by the elastic annular support 7. ing. The hole diameter of the porous or net-like thin plate 6 is about 10 μm.
Many small holes 9 of about 100 μm are formed.

【0005】なお、前記霧化作用面側の電極3Aは、反
対側の対向面2Bの周縁部分にまで延長した折り返し電
極部3Cを有し、該電極部3Cと前記電極3Bを高周波
電源に接続することで圧電振動子4を駆動することがで
きる。
The electrode 3A on the atomizing action surface side has a folded electrode portion 3C extending to the periphery of the opposing surface 2B on the opposite side, and connects the electrode portion 3C and the electrode 3B to a high frequency power supply. By doing so, the piezoelectric vibrator 4 can be driven.

【0006】図8の従来構成において、圧電振動子4を
高周波電源に接続して、圧電磁器1の厚さ方向の共振に
よる超音波振動を行わせ、圧電振動子4上に給液手段8
によって液体を滴下供給したり、毛細管現象を利用して
液体を浸透、供給すると、その液体は毛細管現象で該圧
電振動子4の霧化作用面5と多孔乃至網状薄板6下面と
の間の微小な隙間に入って広がり、多孔乃至網状薄板6
の各微小穴9に入って微小液柱を形成し、この多数の微
小液柱の先端部分が圧電振動子4の厚さ方向の超音波振
動により霧化粒子として空中に放出される。
In the conventional structure shown in FIG. 8, the piezoelectric vibrator 4 is connected to a high-frequency power source to cause ultrasonic vibration due to resonance in the thickness direction of the piezoelectric ceramic 1 to be performed.
When the liquid is dropped and supplied, or the liquid is penetrated and supplied by utilizing the capillary phenomenon, the liquid is caused by the capillary phenomenon to cause minute liquid between the atomizing action surface 5 of the piezoelectric vibrator 4 and the lower surface of the porous or net-like thin plate 6. Spread into a narrow gap, and a porous or net-like thin plate 6
The micro liquid column is formed in each of the micro holes 9, and the tip portions of the plurality of micro liquid columns are emitted into the air as atomized particles by ultrasonic vibration in the thickness direction of the piezoelectric vibrator 4.

【0007】[0007]

【考案が解決しようとする課題】ところで、図8の構成
では、圧電振動子4の霧化作用面5に対して多孔乃至網
状薄板6をぴったり密着させてしまうと、霧化作用面5
と多孔乃至網状薄板6の下面との間に滴下された液体が
広がることができず、うまく霧化ができなくなる。この
ため、霧化作用面5と多孔乃至網状薄板6の下面との間
に微小間隙が生じるように、多孔乃至網状薄板6を緩く
保持する必要がある。しかし、実際の組立において、霧
化作用面5に対して最適な微小間隙を持つように、かつ
ばらつきの発生しないように多孔乃至網状薄板6を圧電
振動子4と共に弾性環状支持体7で保持するのは難しい
きらいがある。
In the configuration shown in FIG. 8, if the porous or net-like thin plate 6 is brought into close contact with the atomizing action surface 5 of the piezoelectric vibrator 4, the atomizing action face 5 will not work.
The liquid dripped cannot be spread between the lower surface of the perforated or net-like thin plate 6 and the atomization cannot be performed properly. For this reason, it is necessary to loosely hold the porous or net-like thin plate 6 so that a minute gap is formed between the atomizing action surface 5 and the lower surface of the porous or net-like thin plate 6. However, in actual assembling, the porous or net-like thin plate 6 is held together with the piezoelectric vibrator 4 by the elastic annular support member 7 so as to have an optimum minute gap with respect to the atomizing action surface 5 and to prevent variation. It can be difficult.

【0008】本考案は、上記の点に鑑み、多孔乃至網状
薄板に凹部又は凸部の一方又は両方を形成しておくこと
により、圧電振動子の霧化作用面と多孔乃至網状薄板下
面間に液体が広がり得る微小間隙が常に確保されるよう
にし、ひいては安定的な霧化動作を可能にした超音波霧
化器を提供することを目的とする。
[0008] In view of the above, the present invention provides one or both of concave and convex portions in a porous or net-like thin plate, thereby providing a space between the atomizing action surface of the piezoelectric vibrator and the lower surface of the porous or net-like thin plate. It is an object of the present invention to provide an ultrasonic atomizer that always secures a minute gap in which a liquid can spread, and that enables a stable atomizing operation.

【0009】[0009]

【課題を解決するための手段】上記目的を達成するため
に、本考案の超音波霧化器は、凹部又は凸部の一方又は
両方を形成してなる多孔乃至網状薄板を圧電振動子の霧
化作用面側に配設した構成としている。
In order to achieve the above object, an ultrasonic atomizer according to the present invention comprises a porous or net-like thin plate having one or both of a concave portion and a convex portion formed by atomizing a piezoelectric vibrator. It is configured to be arranged on the chemical action side.

【0010】[0010]

【作用】本考案の超音波霧化器においては、多孔乃至網
状薄板に凹部又は凸部の一方又は両方を形成しておくこ
とにより、圧電振動子の霧化作用面と多孔乃至網状薄板
下面間に毛細管現象で液体が広がり得る微小間隙が常に
確保されることになる。この結果、多孔乃至網状薄板の
周縁部の保持に注意を払う必要が無く、例えば多孔乃至
網状薄板の周縁部を圧電振動子に密着状態として環状支
持体等で保持できる。このため、組立が容易で、ばらつ
きも発生せず、霧化動作の安定化を図ることができる。
In the ultrasonic atomizer of the present invention, by forming one or both of the concave portion and the convex portion on the porous or net-like thin plate, the gap between the atomizing action surface of the piezoelectric vibrator and the lower surface of the porous or net-like thin plate is formed. Therefore, a minute gap where the liquid can spread due to the capillary phenomenon is always secured. As a result, it is not necessary to pay attention to the periphery of the perforated or net-like thin plate. For example, the perimeter of the perforated or net-like thin plate can be held in close contact with the piezoelectric vibrator and held by an annular support or the like. Therefore, assembling is easy, there is no variation, and the atomizing operation can be stabilized.

【0011】[0011]

【実施例】以下、本考案に係る超音波霧化器の実施例を
図面に従って説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the ultrasonic atomizer according to the present invention will be described below with reference to the drawings.

【0012】図1乃至図3で本考案の第1実施例を説明
する。これらの図において、多孔乃至網状薄板6Aには
弾性環状支持体7の内周径よりもやや小さな径の円形凸
部10が形成されている。そして、この多孔乃至網状薄
板6Aは周縁部にて圧電振動子4と密着する如く重ね合
わされて弾性環状支持体7の溝11内に挿置される。こ
の結果、円形凸部10の部分においては、多孔乃至網状
薄板6Aの下面と圧電振動子4の霧化作用面5との間に
適切な間隙が確保され、仮想線で示す給液パイプ8A又
は吸液帯(樹脂、ガラス等の繊維を束ねて毛細管現象で
液体を吸い上げ給液するもの)8Bより供給された水、
薬液等の液体が毛細管現象により霧化作用面5に広がる
ことができる。なお、多孔乃至網状薄板6Aは肉厚が数
10μm程度のステンレス等の金属薄板で、図3の如く
穴径Dが約10μm乃至100μm程度の微小穴9が多数
形成されているものである。また、圧電振動子4自体の
構成は前述の図8の場合と同様であり、同一部分には同
一符号を付した。
FIGS. 1 to 3 show a first embodiment of the present invention. In these figures, a circular projection 10 having a diameter slightly smaller than the inner diameter of the elastic annular support 7 is formed on the porous or net-like thin plate 6A. The perforated or net-like thin plate 6 </ b> A is overlapped so as to be in close contact with the piezoelectric vibrator 4 at the peripheral edge, and inserted into the groove 11 of the elastic annular support 7. As a result, an appropriate gap is secured between the lower surface of the porous or net-like thin plate 6A and the atomizing action surface 5 of the piezoelectric vibrator 4 in the portion of the circular convex portion 10, and the liquid supply pipe 8A or the Water supplied from a liquid absorbing zone (which binds fibers of resin, glass, etc. and sucks and supplies liquid by capillary action) 8B;
A liquid such as a chemical solution can spread on the atomizing surface 5 by capillary action. The porous or net-like thin plate 6A is a thin metal plate made of stainless steel or the like having a thickness of about several tens of μm, and has a large number of micro holes 9 having a hole diameter D of about 10 to 100 μm as shown in FIG. The configuration of the piezoelectric vibrator 4 itself is the same as that in the case of FIG. 8 described above, and the same parts are denoted by the same reference numerals.

【0013】第1実施例の構成において、給液パイプ8
A又は吸液帯8Bより霧化すべき水、薬液等の液体が多
孔乃至網状薄板6A上に供給されると、図3のように液
体Wは毛細管現象で圧電振動子4の霧化作用面5と多孔
乃至網状薄板6Aの下面間の微小な隙間Gに入って広が
り多孔乃至網状薄板6Aの各微小穴9に入って微小液柱
を形成する。そして、多数の微小液柱の先端部分が圧電
磁器1の厚さ方向の超音波振動で霧化されて霧化粒子と
して空中に放出される。
In the configuration of the first embodiment, the liquid supply pipe 8
When a liquid such as water or a chemical liquid to be atomized is supplied onto the porous or net-like thin plate 6A from the liquid absorption zone 8A or the liquid absorption zone 8B, the liquid W is subjected to the capillary action as shown in FIG. And enters the minute gaps G between the lower surfaces of the porous or net-like thin plates 6A and spreads into the minute holes 9 of the porous or net-like thin plates 6A to form minute liquid columns. Then, the tip portions of a large number of micro liquid columns are atomized by ultrasonic vibration in the thickness direction of the piezoelectric ceramic 1, and are discharged into the air as atomized particles.

【0014】図4は本考案の第2実施例を示す。この場
合、多孔乃至網状薄板6Bは弾性環状支持体7の内周径
よりもやや小さな径の円形凸部20と、該円形凸部20
の形成領域中に複数箇所設けられた凹部21とを有して
いる。そして、該多孔乃至網状薄板6Bは周縁部にて圧
電振動子4と密着する如く重ね合わされて弾性環状支持
体7の溝11内に挿置される。その他の構成は前述の第
1実施例と同様である。
FIG. 4 shows a second embodiment of the present invention. In this case, the porous or net-like thin plate 6B has a circular convex portion 20 having a diameter slightly smaller than the inner peripheral diameter of the elastic annular support 7 and the circular convex portion 20B.
And a plurality of concave portions 21 provided in the formation region. Then, the perforated or net-like thin plate 6B is overlapped so as to be in close contact with the piezoelectric vibrator 4 at the peripheral portion, and inserted into the groove 11 of the elastic annular support 7. Other configurations are the same as those of the first embodiment.

【0015】この第2実施例では、多孔乃至網状薄板6
Bの円形凸部20の形成領域に凹部21を設けたこと
で、該凹部21の下面が圧電振動子4の霧化作用面5に
接し、多孔乃至網状薄板6Bの撓み、経時変化等に起因
する円形凸部20の部分における多孔乃至網状薄板6B
の下面と圧電振動子4の霧化作用面5との間の間隙の変
動を防止でき、常時適切な間隙に維持できる。
In this second embodiment, the porous or net-like thin plate 6
By providing the concave portion 21 in the formation region of the circular convex portion 20 of B, the lower surface of the concave portion 21 is in contact with the atomizing action surface 5 of the piezoelectric vibrator 4, resulting from bending of the perforated or net-like thin plate 6 </ b> B, aging, and the like. Or reticulated thin plate 6B at the portion of the circular convex portion 20
The gap between the lower surface of the piezoelectric vibrator 4 and the atomizing surface 5 of the piezoelectric vibrator 4 can be prevented from changing, and an appropriate gap can always be maintained.

【0016】図5は本考案の第3実施例を示す。この場
合、多孔乃至網状薄板6Cの周縁部及び吸液帯8Bの先
端が接する部分を低くし、その他の中央部分を略円形の
凸部30としている。その他の構成は前述の第1実施例
と同様である。
FIG. 5 shows a third embodiment of the present invention. In this case, the portion where the peripheral edge of the perforated or net-like thin plate 6C and the tip of the liquid absorbing zone 8B are in contact with each other is lowered, and the other central portion is a substantially circular convex portion 30. Other configurations are the same as those of the first embodiment.

【0017】これまでの各実施例では、多孔乃至網状薄
板上に吸液帯が接触している場合を例示したが、吸液帯
が圧電振動子の霧化作用面に直接接触する構造とするこ
とも可能であり、この場合の1例を図6の第4実施例に
示す。この図6では、多孔乃至網状薄板6Dに形成され
た円形凸部10の吸液帯8Bの先端位置に対応する部分
に開口40が形成されており、前記吸液帯8Bの先端は
開口40を通して圧電振動子の霧化作用面5に接触して
いる。そして、吸液帯8Bを介し浸透供給された液体は
円形凸部10における多孔乃至網状薄板下面と霧化作用
面5との間隙に効果的に広がることができる。なお、そ
の他の構造は前述の第1実施例と同様である。
In each of the embodiments described above, the case where the liquid-absorbing zone is in contact with the porous or net-like thin plate is exemplified. However, the structure is such that the liquid-absorbing zone directly contacts the atomizing action surface of the piezoelectric vibrator. An example of this case is shown in the fourth embodiment in FIG. In FIG. 6, an opening 40 is formed at a portion corresponding to the position of the tip of the liquid absorbing band 8B of the circular convex portion 10 formed on the porous or net-like thin plate 6D, and the tip of the liquid absorbing band 8B passes through the opening 40. It is in contact with the atomizing surface 5 of the piezoelectric vibrator. Then, the liquid permeated and supplied through the liquid absorption zone 8 </ b> B can effectively spread to the gap between the lower surface of the porous or net-like thin plate and the atomizing surface 5 in the circular convex portion 10. The other structure is the same as that of the first embodiment.

【0018】図7の本考案の第5実施例を示す。この場
合、円形凸部10Aを有する多孔乃至網状薄板6Eの円
形凸部10Aよりも外側位置に開口41が形成され、該
開口41を通して吸液帯8Bの先端が圧電振動子の霧化
作用面5に接触している。その他の構造は前述の第1実
施例と同様である。
FIG. 7 shows a fifth embodiment of the present invention. In this case, an opening 41 is formed at a position outside the circular convex portion 10A of the porous or net-like thin plate 6E having the circular convex portion 10A, and the tip of the liquid absorption zone 8B passes through the opening 41 to form the atomizing surface 5 of the piezoelectric vibrator. Is in contact with Other structures are the same as those in the first embodiment.

【0019】なお、上記各実施例では、圧電振動子4を
水平配置としているが、圧電振動子4を傾斜させたり、
垂直配置とすることもできる。さらに、前記図3では、
多孔乃至網状導電性薄板6Aの微小穴9として下部に向
かって穴径が広がったテーパー穴の場合を図示している
が、上から下まで同一穴径となったストレートな穴でも
差し支えない。また、圧電振動子及び多孔乃至網状薄板
をそれほど弾性を有しない樹脂製支持体等で支える構造
の場合にも本考案は有用である。
In each of the above embodiments, the piezoelectric vibrator 4 is arranged horizontally.
It can also be arranged vertically. Further, in FIG.
Although a tapered hole whose hole diameter increases toward the bottom as the minute hole 9 of the porous or net-like conductive thin plate 6A is illustrated, a straight hole having the same hole diameter from top to bottom may be used. The present invention is also useful for a structure in which a piezoelectric vibrator and a porous or net-like thin plate are supported by a resin support or the like which does not have much elasticity.

【0020】[0020]

【考案の効果】以上説明したように、本考案の超音波霧
化器によれば、凹部又は凸部の一方又は両方を形成して
なる多孔乃至網状薄板を圧電振動子の霧化作用面側に配
設したので、多孔乃至網状薄板下面と霧化作用面との間
に常に適切な間隙を確保でき、霧化動作の安定化を図り
得るととにも、給液手段により水、薬液等の液体を多孔
乃至網状薄板下面と霧化作用面との微小間隙による毛細
管現象(表面張力)で効率的に供給できる。
As described above, according to the ultrasonic atomizer of the present invention, the porous or net-like thin plate having one or both of the concave portion and the convex portion is provided on the atomizing action surface side of the piezoelectric vibrator. , So that an appropriate gap can always be secured between the lower surface of the perforated or net-like thin plate and the atomizing action surface, and the atomizing operation can be stabilized. Can be efficiently supplied by capillary action (surface tension) due to the minute gap between the lower surface of the porous or reticulated thin plate and the atomizing surface.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本考案に係る超音波霧化器の第1実施例を示す
正断面図である。
FIG. 1 is a front sectional view of a first embodiment of an ultrasonic atomizer according to the present invention.

【図2】同平面図である。FIG. 2 is a plan view of the same.

【図3】第1実施例の動作説明のための部分拡大断面図
である。
FIG. 3 is a partially enlarged sectional view for explaining the operation of the first embodiment.

【図4】本考案の第2実施例を示す正断面図である。FIG. 4 is a front sectional view showing a second embodiment of the present invention.

【図5】本考案の第3実施例を示す正断面図である。FIG. 5 is a front sectional view showing a third embodiment of the present invention.

【図6】本考案の第4実施例を示す平面図である。FIG. 6 is a plan view showing a fourth embodiment of the present invention.

【図7】本考案の第5実施例を示す平面図である。FIG. 7 is a plan view showing a fifth embodiment of the present invention.

【図8】本出願人が先に提案している超音波霧化器の正
断面図である。
FIG. 8 is a front sectional view of an ultrasonic atomizer previously proposed by the present applicant.

【符号の説明】[Explanation of symbols]

1 圧電磁器 4 圧電振動子 5 霧化作用面 6,6A,6B,6C,6D,6E 多孔乃至網状薄板 7 弾性環状支持体 8 給液手段 9 微小穴 10,10A,20,30 円形凸部 21 凹部 Reference Signs List 1 piezoelectric ceramic 4 piezoelectric vibrator 5 atomizing action surface 6, 6A, 6B, 6C, 6D, 6E perforated or net-like thin plate 7 elastic annular support 8 liquid supply means 9 minute hole 10, 10A, 20, 30 circular convex portion 21 Recess

Claims (2)

(57)【実用新案登録請求の範囲】(57) [Scope of request for utility model registration] 【請求項1】 凹部若しくは凸部のいずれか一方、又は
凹部及び凸部の両方を有する多孔乃至網状薄板を、圧電
振動子の霧化作用面側に配設したことを特徴とする超音
波霧化器。
An ultrasonic mist wherein a porous or net-like thin plate having one of a concave portion and a convex portion, or both a concave portion and a convex portion, is disposed on the atomizing surface of a piezoelectric vibrator. Chemist.
【請求項2】 前記多孔乃至網状薄板の周縁部が前記圧
電振動子と共に環状支持体で支持されている請求項1記
載の超音波霧化器。
2. The ultrasonic atomizer according to claim 1, wherein a peripheral portion of the perforated or net-like thin plate is supported by an annular support together with the piezoelectric vibrator.
JP10228591U 1991-05-27 1991-11-16 Ultrasonic atomizer Expired - Lifetime JP2536006Y2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10228591U JP2536006Y2 (en) 1991-11-16 1991-11-16 Ultrasonic atomizer
EP92420177A EP0516565B1 (en) 1991-05-27 1992-05-26 An ultrasonic wave nebulizer
US07/889,067 US5299739A (en) 1991-05-27 1992-05-26 Ultrasonic wave nebulizer
DE69210096T DE69210096T2 (en) 1991-05-27 1992-05-26 Ultrasonic atomizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10228591U JP2536006Y2 (en) 1991-11-16 1991-11-16 Ultrasonic atomizer

Publications (2)

Publication Number Publication Date
JPH0544257U JPH0544257U (en) 1993-06-15
JP2536006Y2 true JP2536006Y2 (en) 1997-05-21

Family

ID=14323343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10228591U Expired - Lifetime JP2536006Y2 (en) 1991-05-27 1991-11-16 Ultrasonic atomizer

Country Status (1)

Country Link
JP (1) JP2536006Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006006963A2 (en) * 2004-04-02 2006-01-19 The Government Of The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services, Centers For Disease Control And Prevention Aerosol delivery systems and methods

Also Published As

Publication number Publication date
JPH0544257U (en) 1993-06-15

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