JP2017192998A - Flange mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a flange mechanism which can smoothly mount a cutting blade to a spindle.SOLUTION: A flange mechanism is detachably mounted at a tip end of a spindle rotatably supported, and supports and fixes an annular cutting blade. The flange mechanism has a boss portion which is inserted in a center hole of the cutting blade and supports an inner peripheral surface of the cutting blade; and a receiving flange portion which projects out from an axial direction rear end of the boss portion and supports the cutting blade. On the boss position, three or more ball plungers are installed in a circumferential direction so as to make balls energized by a spring project out from a peripheral surface of the boss portion. The inner peripheral surface of the cutting blade is supported by the balls, and the balls move forward/backward when the cutting blade is attached/detached.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a flange mechanism.

  In a device manufacturing process, a cutting apparatus that uses a cutting blade to cut a plate-like workpiece such as a semiconductor wafer or the like is used. The cutting blade is attached to the spindle using a flange mechanism having a boss portion (see Patent Document 1).

Japanese Patent No. 4913346

  The cutting blade needs to be mounted on the spindle in a state in which the cutting blade and the spindle are positioned so that the center of the cutting blade inserted through the flange mechanism and the rotation center of the spindle coincide with each other. In order to make the center of the cutting blade coincide with the center of rotation of the spindle, when the difference between the boss part through which the cutting blade is inserted and the inner diameter of the cutting blade is set to the micron unit, the cutting blade is inclined to the boss part. When mounted, the boss portion and the inner peripheral surface of the cutting blade interfere with each other and become engaged, making it difficult to smoothly mount the cutting blade on the boss portion. Further, when the boss portion and the inner peripheral surface of the cutting blade interfere with each other and the material of the cutting blade adheres to the boss portion, it becomes difficult to smoothly attach the cutting blade to the boss portion at the next and subsequent mounting.

  An object of the present invention is to provide a flange mechanism capable of smoothly mounting a cutting blade on a spindle.

  The present invention is a flange mechanism that is detachably attached to the tip of a spindle that is rotatably supported, and supports and fixes an annular cutting blade. The flange mechanism is inserted through the center hole of the cutting blade and the inner peripheral surface of the cutting blade is A boss portion to be supported, and a receiving flange portion that protrudes in a radial direction from an axial rear end of the boss portion to support the cutting blade, and the boss portion is spring-loaded from a peripheral surface of the boss portion. A flange mechanism in which three or more ball plungers are installed in the circumferential direction so that the biased ball protrudes in the radial direction, the ball supports the inner circumferential surface of the cutting blade, and the ball advances and retreats when the cutting blade is attached / detached I will provide a.

  In the flange mechanism according to the present invention, the receiving flange portion includes a suction port facing the cutting blade to be supported, and a suction path communicating the external suction source and the suction port, and the cutting blade is sucked and fixed. May be.

  In the flange mechanism according to the present invention, a male screw is formed at the tip of the boss portion, and a female screw that engages with the male screw of the boss portion is provided on the inner periphery, and the receiving flange portion and the cutting blade are clamped. An annular fixing nut may be further provided.

  According to the flange mechanism of the present invention, the cutting blade can be smoothly mounted on the spindle.

FIG. 1 is a perspective view schematically showing an example of a cutting apparatus according to the first embodiment. FIG. 2 is an assembled perspective view showing an example of the cutting means according to the first embodiment. FIG. 3 is a cross-sectional view showing an example of the cutting means according to the first embodiment. FIG. 4 is an assembled perspective view showing an example of the cutting means according to the second embodiment.

  Embodiments according to the present invention will be described below with reference to the drawings, but the present invention is not limited thereto. The components of the embodiments described below can be combined as appropriate. Some components may not be used.

  In the following description, an XYZ rectangular coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ rectangular coordinate system. One direction in the horizontal plane is defined as the X-axis direction, a direction orthogonal to the X-axis direction in the horizontal plane is defined as the Y-axis direction, and a direction orthogonal to each of the X-axis direction and the Y-axis direction is defined as the Z-axis direction. In addition, the rotation directions around the X axis, the Y axis, and the Z axis are the θX, θY, and θZ directions.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a perspective view schematically showing an example of a cutting apparatus 1 according to the present embodiment. The cutting device 1 uses the cutting blade 43 to cut the workpiece W.

  The cutting apparatus 1 moves the base 2, the chuck table 3 that holds the workpiece W, the cutting means 4 that has the cutting blade 43 that cuts the workpiece W held on the chuck table 3, and the chuck table 3. A table moving means 6 for moving, a blade moving means 7 for moving the cutting means 4, and a control means 8 for controlling each component of the cutting apparatus 1.

  The workpiece W is a plate-like member. In the present embodiment, the workpiece W is a disk-shaped semiconductor wafer. The semiconductor wafer includes at least one of silicon, sapphire, and gallium. The workpiece W may be at least one of a rectangular package substrate, a ceramic substrate, a glass substrate, and a resin substrate.

  The chuck table 3 is supported by the base 2. The chuck table 3 includes a vacuum chuck mechanism, and has a holding surface 3A that holds the workpiece W in a detachable manner. A suction port connected to a vacuum suction source is provided on the holding surface 3A. When the vacuum suction source is operated in a state where the workpiece W is placed on the holding surface 3A, the workpiece W is sucked and held on the holding surface 3A. When the operation of the vacuum suction source is stopped, the holding of the workpiece W by the holding surface 3A is released.

  The workpiece W may be supported on the annular frame via an adhesive tape. Around the chuck table 3, a plurality of clamp portions 9 that hold an annular frame are provided. The clamp part 9 holds the annular frame by being driven by, for example, an air actuator.

  The cutting means 4 has a cutting blade 43 that cuts the workpiece W held on the chuck table 3. The cutting means 4 contacts the rotating cutting blade 43 and the workpiece W to cut and divide the plate-like workpiece W.

  The table moving means 6 includes an X moving mechanism 11 that moves the chuck table 3 in the X-axis direction, and a rotating mechanism 12 that rotates the chuck table 3 in the θZ direction.

  The X movement mechanism 11 generates a stage 11S that supports the chuck table 3 through the rotation mechanism 12, a guide member 11G that guides the stage 11S in the X-axis direction, and power for moving the stage 11S in the X-axis direction. An actuator 11 </ b> A that transmits the power of the actuator 11 </ b> A to the stage 11 </ b> S. The guide member 11G is supported by the base 2. The actuator 11A includes a rotary motor. When the actuator 11A operates, the power generated by the actuator 11A is transmitted to the stage 11S via the ball screw mechanism 11B. The stage 11S moves in the X-axis direction while being guided by the guide member 11G. When the stage 11S moves in the X-axis direction, the rotation mechanism 12 supported by the stage 11S and the chuck table 3 supported by the rotation mechanism 12 move in the X-axis direction together with the stage 11S.

  The rotation mechanism 12 has an actuator for rotating the chuck table 3 in the θZ direction. By the operation of the rotation mechanism 12, the chuck table 3 rotates in the θZ direction.

  The blade moving means 7 includes a Y moving mechanism 13 that moves the cutting means 4 in the Y-axis direction, and a Z moving mechanism 14 that moves the cutting means 4 in the Z-axis direction.

  The cutting means 4 is supported by the frame 10 via the Y moving mechanism 13 and the Z moving mechanism 14. The frame 10 is supported by the base 2. In the present embodiment, two cutting means 4 are provided. Two Y moving mechanisms 13 and two Z moving mechanisms 14 are also provided.

  The Y moving mechanism 13 generates a guide member 13G provided on the frame 10, a stage 13S movable in the Y axis direction while being guided by the guide member 13G, and power for moving the stage 13S in the Y axis direction. The actuator 13A has a ball screw mechanism 13B that transmits the power of the actuator 13A to the stage 13S. The guide member 13G is supported by the frame 10. The actuator 13A includes a rotary motor. When the actuator 13A operates, the power generated by the actuator 13A is transmitted to the stage 13S via the ball screw mechanism 13B. The stage 13S moves in the Y-axis direction while being guided by the guide member 13G.

  The Z moving mechanism 14 generates a guide member 14G provided on the stage 13S, a stage 14S that can move in the Z-axis direction while being guided by the guide member 14G, and power for moving the stage 14S in the Z-axis direction. The actuator 14A has a ball screw mechanism 14B that transmits the power of the actuator 14A to the stage 14S. The guide member 14G is supported by the stage 13S. The actuator 14A includes a rotary motor. When the actuator 14A operates, the power generated by the actuator 14A is transmitted to the stage 14S via the ball screw mechanism 14B. The stage 14S moves in the Z-axis direction while being guided by the guide member 14G.

  The cutting means 4 has a spindle housing 41 supported by the stage 14S. The cutting means 4 is supported by the stage 14S via the spindle housing 41. When the stage 14S moves in the Z-axis direction, the cutting means 4 supported by the stage 14S moves in the Z-axis direction together with the stage 14S. When the stage 13S moves in the Y-axis direction, the stage 14S supported by the stage 13S and the cutting means 4 supported by the stage 14S move in the Y-axis direction together with the stage 13S.

  Thus, in this embodiment, the chuck table 3 can be moved in the X-axis direction and the θZ direction by the table moving means 6. The cutting means 4 can be moved in the Y-axis direction and the Z-axis direction by the blade moving means 7. That is, in the present embodiment, the workpiece W held on the chuck table 3 and the cutting blade 43 of the cutting means 4 are arranged in four directions, ie, the X-axis direction, the Y-axis direction, the Z-axis direction, and the θZ direction. Relative movement is possible.

  The control unit 8 includes a computer system and controls the table moving unit 6 and the blade moving unit 7. The control means 8 outputs a control signal to the actuator of the table moving means 6 to control the relative position or relative speed between the workpiece W and the cutting blade 43 in the X axis direction and the θZ direction. The control means 8 outputs a control signal to the actuator of the blade moving means 7 to control the relative position or relative speed between the workpiece W and the cutting blade 43 in the Y-axis direction and the Z-axis direction.

  By adjusting the relative position between the workpiece W and the cutting blade 43 in the Z-axis direction, the depth of cut of the workpiece W is adjusted. By adjusting the relative position between the workpiece W and the cutting blade 43 in the X-axis direction, the processing feed amount of the cutting blade 43 relative to the workpiece W is adjusted. The index feed amount of the cutting blade 43 relative to the workpiece W is adjusted by adjusting the relative position between the workpiece W and the cutting blade 43 in the Y-axis direction.

  FIG. 2 is an assembled perspective view showing an example of the cutting means 4 according to the present embodiment. FIG. 3 is a cross-sectional view showing an example of the cutting means 4 according to the present embodiment.

  As shown in FIGS. 2 and 3, the cutting means 4 includes a spindle housing 41, a spindle 42 rotatably supported on the spindle housing 41, a flange mechanism 5 detachably attached to the tip of the spindle 42, And an annular cutting blade 43 attached to the spindle 42. The flange mechanism 5 supports and fixes the annular cutting blade 43.

  The spindle housing 41 accommodates a part of the spindle 42 and rotatably supports the spindle 42. The tip of the spindle 42 is disposed outside the spindle housing 41. The spindle housing 41 is moved in the Y-axis direction and the Z-axis direction by the operation of the blade moving means 7.

  The spindle 42 rotates around the central axis AX by the operation of the actuator. In the present embodiment, the central axis AX is parallel to the Y axis. In the present embodiment, the −Y direction is an axial front end side parallel to the central axis AX, and the + Y direction is an axial rear end side.

  The spindle 42 is accommodated in the spindle housing 41 except for the tip. The spindle 42 has a flange support portion 420 to which the flange mechanism 5 is attached at the tip. The flange support portion 420 is formed in a taper shape in which the outer diameter gradually decreases toward the distal end in the axial direction of the flange support portion 420.

  The flange mechanism 5 includes a boss portion 51 that supports the cutting blade 43 and a receiving flange portion 52 that protrudes in the radial direction of the central axis AX from the axial rear end of the boss portion 51. A fitting hole 53 is provided at the center of the flange mechanism 5. The inner peripheral surface of the fitting hole 53 is formed in a tapered shape in which the inner diameter gradually decreases toward the tip in the axial direction. The flange support portion 420 of the spindle 42 is fitted into the fitting hole 53 of the flange mechanism 5.

  The cutting blade 43 includes an annular base 431 and a cutting edge 432 provided on the outer periphery of the base 431. The base 431 is made of aluminum, for example. A central hole 433 is provided at the center of the base 431. The cutting edge 432 includes diamond abrasive grains having a particle size of about 10 [μm], for example.

  The boss portion 51 is fitted into the central hole 433 of the cutting blade 43. The boss portion 51 is inserted into the central hole 433 of the cutting blade 43 and supports the inner peripheral surface of the cutting blade 43.

  The receiving flange portion 52 has a support surface 521 that supports the cutting blade 43. The support surface 521 faces the front end side in the axial direction. The rear surface of the cutting blade 43 facing the rear end side in the axial direction is in contact with the support surface 521 of the receiving flange portion 52.

  The receiving flange portion 52 has a suction port 501 that faces the supporting cutting blade 43, and a suction path 502 that communicates the external suction source 60 and the suction port 501. The suction port 501 is provided inside the support surface 521 in the radial direction of the central axis AX. A plurality of suction ports 501 are formed at equal intervals on the support surface 521 in the circumferential direction of the central axis AX. The suction path 502 includes a communication path 502A that communicates with the suction port 501 and an annular communication path 502B that is formed on the inner peripheral surface of the fitting hole 53 and communicates with the communication path 502A.

  The spindle 42 has a communication path 422 that communicates with the annular communication path 502B. The communication path 422 communicates with an annular communication path 423 formed on the outer peripheral surface of the spindle 42. The spindle housing 41 includes an annular communication passage 411 formed at a position facing the annular communication passage 423 and a communication passage 412 communicating with the annular communication passage 411. The communication path 412 is connected to the external suction source 60.

  That is, the suction port 501 and the external suction source 60 are connected via the suction path 502 including the communication path 502A and the annular communication path 502B, the communication path 422, the annular communication path 423, the annular communication path 411, and the communication path 412. Is done. When the external suction source 60 is operated, the flange mechanism 5 sucks and holds the cutting blade 43 at the suction port 501 and fixes it to the support surface 521.

  A female screw 421 is formed on the inner peripheral surface of the tip end of the spindle 42 in the axial direction. The male screw 56 is screwed into the female screw 421 via the nut 55. When the female screw 421 and the male screw 56 are screwed together, the flange mechanism 5 fitted to the flange support portion 420 is fastened and fixed.

  In the present embodiment, at least three ball plungers 100 are installed in the circumferential direction on the boss portion 51 of the flange mechanism 5 so that the balls 101 urged by the spring 102 from the outer peripheral surface of the boss portion 51 protrude in the radial direction. Has been. The ball 101 supports the inner peripheral surface of the central hole 433 of the cutting blade 43. When the cutting blade 43 is attached to and detached from the boss portion 51, the ball 101 advances and retreats.

  In the present embodiment, three ball plungers 100 are installed at equal intervals in the circumferential direction of the central axis AX. Note that the three ball plungers 100 may be arranged at different intervals in the circumferential direction of the central axis AX. Further, four ball plungers 100 may be installed in the circumferential direction, or five ball plungers 100 may be installed.

  The ball 101 is rotatably supported by the boss portion 51. The spring 102 urges the ball 101 outward in the radial direction. When no external force acts on the ball 101, a part of the ball 101 protrudes radially outward from the outer peripheral surface of the boss portion 51. When an external force radially inward acts on the ball 101 and the external force is greater than the biasing force of the spring 102, the ball 101 moves radially inward from the outer peripheral surface of the boss portion 51.

  Next, the operation of mounting the cutting blade 43 according to this embodiment on the spindle 42 will be described.

  First, the flange mechanism 5 is mounted on the spindle 42. The flange mechanism 5 is attached to the spindle 42 by fitting the fitting hole 53 of the flange mechanism 5 into the flange support portion 420 of the spindle 42.

  Next, the cutting blade 43 is attached to the flange mechanism 5. When the cutting blade 43 is attached to the flange mechanism 5, the central hole 433 of the cutting blade 43 is inserted through the boss portion 51. Before the central hole 433 of the cutting blade 43 is inserted into the boss portion 51, a part of the ball 101 of the ball plunger 100 protrudes radially outward from the outer peripheral surface of the boss portion 51. When the central hole 433 of the cutting blade 43 is inserted into the boss portion 51 and the ball 101 and the inner peripheral surface of the central hole 433 of the cutting blade 43 come into contact with each other, an external force directed radially inward acts on the ball 101. The ball 101 moves radially inward from the outer peripheral surface of the boss portion 51.

  When the cutting blade 43 is moved to the rear end side in the axial direction, the ball 101 moves outward in the radial direction by the biasing force of the spring 102. As a result, the cutting blade 43 and the boss portion 51 are positioned, and the boss portion 51 of the flange mechanism 5 is fitted into the central hole 433 provided in the base 431 of the cutting blade 43.

  When the external suction source 60 is activated, a negative pressure is applied to the suction port 501 through the communication path 412, the annular communication path 411, the annular communication path 423, the communication path 422, and the suction path 502. As a result, the cutting blade 43 is sucked by the receiving flange portion 52 in a state where the base 431 is fitted to the boss portion 51 of the flange mechanism 5 and is sucked and held on the support surface 521 of the flange mechanism 5.

  Next, an operation for removing the cutting blade 43 attached to the flange mechanism 5 from the flange mechanism 5 will be described. First, the operation of the external suction source 60 is stopped. Thereby, the suction holding of the cutting blade 43 by the receiving flange portion 52 is released. The cutting blade 43 is removed from the flange mechanism 5 when the cutting blade 43 is further moved to the front end side in the axial direction in a state where the ball 101 is disposed radially inward from the outer peripheral surface of the boss portion 51.

  As described above, according to the present embodiment, the ball plunger 100 is built in the boss portion 51 of the flange mechanism 5. When the cutting blade 43 is mounted, it is pushed by the inner peripheral surface of the central hole 433 of the cutting blade 43, and the ball 101 is retracted radially inward from the state protruding from the outer peripheral surface of the boss portion 51. Therefore, the cutting blade 43 can be smoothly attached to the spindle 42. The ball plunger 100 includes a ball 101 and a spring 102, and the cutting blade 43 can be fixed to the flange mechanism 5 by the biasing force of the spring 102. In the present embodiment, the ball 101 moves radially outward by the action of the spring 102, and the spindle 42 rotates while the cutting blade 43 and the spindle 42 are temporarily supported by the ball plunger 100. Moves radially outward by centrifugal force. By moving the ball 101 radially outward by the centrifugal force, the center of the cutting blade 43 and the rotation center of the spindle 42 are automatically aligned. After the center of the cutting blade 43 and the rotation center of the spindle 42 are aligned by the ball 101 moved radially outward by the centrifugal force, the external suction source 60 is activated and the cutting blade 43 is attracted to the receiving flange portion 52. There is also a usage method in which the cutting blade 43 and the spindle 42 are fixed in a state where the center of the cutting blade 43 and the rotation center of the spindle 42 are accurately aligned by being held and fixed to the flange mechanism 5. is there.

  Further, since the ball plunger 100 is provided, for example, a process for coating the boss portion 51 with a coating agent for improving the slippage of the boss portion 51 becomes unnecessary.

Second Embodiment
A second embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 4 is an assembled perspective view showing an example of the cutting means 4 according to the present embodiment. As shown in FIG. 4, in the present embodiment, the flange mechanism 5 includes an annular fixing nut 200 that sandwiches the receiving flange portion 52 and the cutting blade 43.

  A male screw 202 is formed on the outer peripheral surface of the tip of the boss portion 51 of the flange mechanism 5. On the inner peripheral surface of the fixing nut 200, a female screw 201 that is screwed with the male screw 202 of the boss portion 51 is provided.

  Next, the operation of mounting the cutting blade 43 according to this embodiment on the spindle 42 will be described.

  First, the flange mechanism 5 is mounted on the spindle 42. The flange mechanism 5 is attached to the spindle 42 by fitting the fitting hole 53 of the flange mechanism 5 into the flange support portion 420 of the spindle 42.

  Next, the cutting blade 43 is attached to the flange mechanism 5. When the cutting blade 43 is attached to the flange mechanism 5, the central hole 433 of the cutting blade 43 is inserted through the boss portion 51. Before the central hole 433 of the cutting blade 43 is inserted into the boss portion 51, a part of the ball 101 of the ball plunger 100 protrudes radially outward from the outer peripheral surface of the boss portion 51. When the central hole 433 of the cutting blade 43 is inserted into the boss portion 51 and the ball 101 and the inner peripheral surface of the central hole 433 of the cutting blade 43 come into contact with each other, an external force directed radially inward acts on the ball 101. The ball 101 moves radially inward from the outer peripheral surface of the boss portion 51.

  When the cutting blade 43 is moved to the rear end side in the axial direction, the ball 101 moves outward in the radial direction by the biasing force of the spring 102. As a result, the cutting blade 43 and the boss portion 51 are positioned, and the boss portion 51 of the flange mechanism 5 is fitted into the central hole 433 provided in the base 431 of the cutting blade 43.

  Next, the fixing nut 200 is attached to the boss portion 51. The cutting blade 43 and the boss portion 51 are positioned, and the male screw 202 is provided in a state where the boss portion 51 of the flange mechanism 5 is fitted in the central hole 433 provided in the base 431 of the cutting blade 43. The tip of the boss portion 51 is disposed closer to the tip end side in the axial direction than the cutting blade 43. The fixing nut 200 is inserted through the tip of the boss portion 51, and the female screw 201 of the fixing nut 200 and the male screw 202 of the boss portion 51 are screwed together. By rotating the fixing nut 200, the cutting blade 43 is fastened and fixed between the receiving flange portion 52 and the fixing nut 200, and is sandwiched between the receiving flange portion 52 and the fixing nut 200.

  Next, an operation for removing the cutting blade 43 attached to the flange mechanism 5 from the flange mechanism 5 will be described. First, the fixing nut 200 is rotated, and the screw engagement between the female screw 201 of the fixing nut 200 and the male screw 202 of the boss portion 51 is released. After the fixing nut 200 is removed from the boss portion 51, the cutting blade 43 is removed from the flange mechanism 5 by moving the cutting blade 43 toward the distal end side in the axial direction.

  As described above, according to the present embodiment, the male screw 202 is formed at the tip of the boss portion 51, and the annular fixing nut 200 is provided with the female screw 201 threadedly engaged with the male screw 202 of the boss portion 51 on the inner periphery. Is provided. Accordingly, the cutting blade 43 is sandwiched between the flange portion 52 and the fixing nut 200 without forming the suction path 502 for connection to the external suction source 60 inside the flange portion 52, so that the cutting blade The fixing of 43 can be stabilized.

DESCRIPTION OF SYMBOLS 1 Cutting device 2 Base 3 Chuck table 3A Holding surface 4 Cutting means 5 Flange mechanism 6 Table moving means 7 Blade moving means 8 Control means 9 Clamp part 10 Frame 11 X moving mechanism 11A Actuator 11B Ball screw mechanism 11G Guide member 11S Stage 12 Rotation Mechanism 13 Y moving mechanism 13A Actuator 13B Ball screw mechanism 13G Guide member 13S Stage 14 Z moving mechanism 14A Actuator 14B Ball screw mechanism 14G Guide member 14S Stage 41 Spindle housing 42 Spindle 43 Cutting blade 51 Boss portion 52 Receiving flange portion 53 Fitting hole 55 Nut 56 Male screw 60 External suction source 100 Ball plunger 101 Ball 102 Spring 200 Fixing nut 201 Female screw 202 Male screw 411 Annular communication path 412 Passage 420 flange supporting portion 421 suction passage female screw 422 communicating passage 423 annular communication passage 431 base plate 432 cutting edge 433 central bore 501 suction port 502 502A communicating passage 502B annular communication passage 521 support surface AX central axis

Claims (3)

A flange mechanism that is detachably attached to the tip of a spindle that is rotatably supported and supports and fixes an annular cutting blade,
A boss that is inserted through the central hole of the cutting blade and supports the inner peripheral surface of the cutting blade;
A receiving flange that protrudes radially from the axial rear end of the boss and supports the cutting blade;
Three or more ball plungers are installed on the boss portion in the circumferential direction so that balls urged by a spring from the circumferential surface of the boss portion protrude in the radial direction, and the inner circumferential surface of the cutting blade is placed on the ball. Supported,
A flange mechanism in which the ball advances and retreats when the cutting blade is attached and detached.   The flange according to claim 1, wherein the receiving flange portion includes a suction port facing the cutting blade to be supported, a suction path communicating with the external suction source and the suction port, and suctions and fixes the cutting blade. mechanism. A male screw is formed at the tip of the boss,
2. The flange mechanism according to claim 1, further comprising an annular fixing nut that includes a female screw that engages with the male screw of the boss portion on an inner periphery, and further includes an annular fixing nut that sandwiches the receiving flange portion and the cutting blade.

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