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JP2009038160A - Light emitting element storage package - Google Patents

Light emitting element storage package Download PDF

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Publication number
JP2009038160A
JP2009038160A JP2007200261A JP2007200261A JP2009038160A JP 2009038160 A JP2009038160 A JP 2009038160A JP 2007200261 A JP2007200261 A JP 2007200261A JP 2007200261 A JP2007200261 A JP 2007200261A JP 2009038160 A JP2009038160 A JP 2009038160A
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emitting element
light emitting
ceramic
metal
storage package
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Masashi Tezuka
将志 手塚
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Sumitomo Metal SMI Electronics Device Inc
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Sumitomo Metal SMI Electronics Device Inc
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1517Multilayer substrate
    • H01L2924/15172Fan-out arrangement of the internal vias
    • H01L2924/15174Fan-out arrangement of the internal vias in different layers of the multilayer substrate

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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive light emitting element storage package which is superior in mountability and prevents the cost for mounting from increasing, as a package for flip-chip mounting a light emitting element. <P>SOLUTION: The light emitting element storage package has a pair of planar ceramic bumps 14 and 14a which project from a top surface of a planar ceramic base 13 made of one or a plurality of junction bodies and are made of the same ceramic with the ceramic base 13, and electrode terminal pads 15 and 15a which are made of metal conductor films and are disposed so as to mounting the light emitting element 11 on top surfaces of the ceramic bumps 14 and 14a on a flip-chip basis in a straddling state, and also has an insulation space where the top surface of the ceramic base 13 is exposed between the electrode terminal pads 15 and 15a, wherein the top surfaces of the electrode terminal pads 15 and 15a are at nearly the same height from the top surface of the ceramic base 13. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、発光ダイオード(Light Emitting Diode:以下、LEDという。)等の半導体発光素子をセラミックバンプ上にフリップチップ方式で搭載し収納するための発光素子収納用パッケージに関する。   The present invention relates to a light emitting element storage package for mounting and storing a semiconductor light emitting element such as a light emitting diode (hereinafter referred to as an LED) on a ceramic bump in a flip chip manner.

従来からLED等の発光素子を収容するためには、樹脂や、セラミックで作製された発光素子収納用パッケージが用いられている。一方、一般照明や大画面液晶用バックライト、自動車用ランプ等のような高い光出力を必要とする用途の発光素子は、消費電力が大きくなり、発熱する発光素子の熱を取り除かなければ、発光素子の温度が上昇して発光効率が低下して高い光出力が得られないという問題を有している。このような発光素子を樹脂製の発光素子収納用パッケージに収納した場合には、樹脂の熱伝導率が低いために発光素子への投入電力を増加させて光出力を上げると発生する高熱を取り除くことができず、発光素子の温度が上昇して逆に高い光出力が得られないこととなっている。また、樹脂製のパッケージは、このパッケージを鉛フリー半田等で実装する時等に更に加熱があるので、樹脂の耐熱性の問題を抱えている。更に、樹脂製のパッケージは、発光素子に紫外光を含む発光素子を多く用いるので、樹脂の耐光性(UV劣化)の問題を抱えている。そこで、最近では、発光素子収納用パッケージには、熱伝導性、耐熱性、耐光性が高く、放熱性に優れるアルミナ(Al)や、窒化アルミニウム(AlN)等からなるセラミック製のパッケージが多く用いられるようになってきている。 Conventionally, in order to accommodate light emitting elements such as LEDs, a light emitting element accommodating package made of resin or ceramic has been used. On the other hand, light-emitting elements that require high light output, such as general lighting, backlights for large-screen LCDs, and lamps for automobiles, consume more power and emit light without removing the heat generated by the light-emitting elements. There is a problem that a high light output cannot be obtained due to an increase in the temperature of the element and a decrease in luminous efficiency. When such a light-emitting element is housed in a resin-made light-emitting element housing package, since the thermal conductivity of the resin is low, the high heat generated when the light output is increased by increasing the input power to the light-emitting element is removed. In other words, the temperature of the light-emitting element rises and high light output cannot be obtained. In addition, since the resin package is further heated when the package is mounted with lead-free solder or the like, the resin package has a problem of heat resistance of the resin. Furthermore, since a resin package uses many light emitting elements including ultraviolet light as a light emitting element, it has a problem of resin light resistance (UV degradation). Therefore, recently, a package made of a ceramic made of alumina (Al 2 O 3 ), aluminum nitride (AlN), or the like that has high heat conductivity, heat resistance, light resistance, and excellent heat dissipation is used as the light emitting element storage package. Are increasingly being used.

一方、従来から発光素子収納用パッケージに収納される発光素子の電気的な導通を形成するためには、いくつかの実装方式が考えられている。例えば、この実装方式には、発光素子を発光素子収納用パッケージに予め設けるダイボンドパッドに接合させた後、Au線からなるボンディングワイヤを用いて発光素子の上面に設ける電極パッドと、発光素子収納用パッケージのワイヤボンドパッドを接続させるワイヤボンド方式がある。しかしながら、このワイヤボンド方式では、発光素子の上面側にボンディングワイヤが存在することとなり、発光素子からの発光を遮るように作用するので、発光素子からの発光効率を低下させることとなっている。そこで、この実装方式には、発光素子の下面に設ける電極パッドに予めAu−Sn等のろう材を蒸着して、このろう材を介して発光素子収納用パッケージの電極端子パッドに直接発光素子を接続させるようにして発光素子の上面側を解放するフリップチップ方式が取り入られるようになってきている。なお、このフリップチップ方式には、発光素子の下面に設ける電極パッドに電解めっき法や、転写バンプ法や、ボールボンディング法等でAuバンプを形成し、このAuバンプを介して発光素子収納用パッケージの電極端子パッドに直接発光素子を接続させるようにして発光素子の上面側を解放させる方法もある。   On the other hand, conventionally, several mounting methods have been considered in order to form electrical continuity of light emitting elements housed in a light emitting element housing package. For example, in this mounting method, after a light emitting element is bonded to a die bond pad provided in advance in a light emitting element storage package, an electrode pad provided on the upper surface of the light emitting element using a bonding wire made of Au wire, and a light emitting element storage There is a wire bond system in which wire bond pads of a package are connected. However, in this wire bonding method, a bonding wire exists on the upper surface side of the light emitting element, and acts to block light emission from the light emitting element, so that the light emission efficiency from the light emitting element is lowered. Therefore, in this mounting method, a brazing material such as Au—Sn is vapor-deposited in advance on the electrode pad provided on the lower surface of the light emitting element, and the light emitting element is directly applied to the electrode terminal pad of the light emitting element storage package through this brazing material. A flip-chip system that releases the upper surface side of the light-emitting element so as to be connected has been introduced. In this flip chip method, an Au bump is formed on the electrode pad provided on the lower surface of the light emitting element by an electrolytic plating method, a transfer bump method, a ball bonding method or the like, and the light emitting element storage package is provided via the Au bump. There is also a method of releasing the upper surface side of the light emitting element by directly connecting the light emitting element to the electrode terminal pad.

従来の発光素子収納用パッケージには、同一面側に正負一対の電極を有する発光素子をフリップチップ方式により発光素子に予め付着させたバンプを介して樹脂等からなる絶縁基板の表面に形成された配線パターンに電気的に接続するパッケージが開示されている。そして、この発光素子収納用パッケージは、発光素子の光出射面側である上面側に影となる電極が存在せず、発光面積が増大すると共に、発光層からの下向きの光を反射層に反射させ、全体として光の取り出し効率を向上させることができるようにしている(例えば、特許文献1参照)。   In a conventional light emitting element storage package, a light emitting element having a pair of positive and negative electrodes on the same surface side is formed on the surface of an insulating substrate made of resin or the like through bumps previously attached to the light emitting element by a flip chip method. A package that is electrically connected to a wiring pattern is disclosed. The light emitting element storage package has no shadow electrode on the light emitting surface side of the light emitting element, increases the light emitting area, and reflects downward light from the light emitting layer to the reflective layer. As a whole, the light extraction efficiency can be improved (for example, see Patent Document 1).

また、従来の発光素子収納用パッケージには、上側主面の中央部に発光素子が搭載される搭載部を有すると共に、搭載部から外側にかけて導出される配線導体が形成されたセラミックや樹脂の絶縁体からなる基体と、基体の上側主面の外周部に搭載部を囲むように取着された、内周側が上方に向かって外側に広がる傾斜面とされた金属からなる枠体と、基体の下側主面の中央部に接合された金属からなる放熱板とを具備しているパッケージが開示されている。そして、この発光素子収納用パッケージは、発光素子が発光する光を枠体の内周側で良好に反射させ外部に均一に効率よく放射させると共に、温度変化による光強度、光の放射角度及び光強度分布が変化しない安定した光学特性が得られるようにしている(例えば、特許文献2参照)。   In addition, the conventional light emitting element storage package has a mounting portion on which the light emitting element is mounted in the central portion of the upper main surface, and has an insulating ceramic or resin in which a wiring conductor led out from the mounting portion to the outside is formed. A base body made of a body, a frame body made of a metal attached to an outer peripheral portion of the upper main surface of the base body so as to surround the mounting portion, and an inner peripheral side having an inclined surface extending outward and upward; There is disclosed a package including a heat sink made of metal joined to a central portion of a lower main surface. The light-emitting element storage package reflects light emitted from the light-emitting element well on the inner peripheral side of the frame body and radiates the light uniformly and efficiently, and at the same time, the light intensity due to temperature change, the light emission angle, and the light A stable optical characteristic in which the intensity distribution does not change is obtained (for example, see Patent Document 2).

特開平11−168235号公報JP-A-11-168235 特開2004−259958号公報JP 2004-259958 A

しかしながら、前述したような従来の発光素子収納用パッケージは、次のような問題がある。
(1)発光素子がフリップチップ方式で搭載される発光素子収納用パッケージは、発光素子の下面に設ける電極パッドに予めAu−Sn等のろう材を蒸着して、このろう材を介して発光素子収納用パッケージの平板状のセラミック基体の上面の電極端子パッドに直接発光素子を接続させるようにしている。これを実現させるためには、蒸着で形成する発光素子の電極パッドのろう材の厚みが薄い(厚み2μm以下程度)ので、発光素子収納用パッケージの電極端子パッドに直接接合させるための電極端子パッドエリアを含めた2つの電極端子パッド間に優れた平坦性(Rmax1μm以下)が必要となっている。しかしながら、平板状のセラミック基体の上面の2つの電極端子パッド及び電極端子パッド間に優れた平坦性を実現させるためには、セラミック基体の上面を研磨したり、更にその上に蒸着や、スパッタリング等による薄膜形成手法でメタライズ膜を形成することが必要となるので、発光素子収納用パッケージを作製するためのコストアップを引き起こしている。
(2)また、発光素子がフリップチップ方式で搭載される発光素子収納用パッケージは、発光素子の下面に設ける電極パッドにAuバンプを形成し、このAuバンプを介して発光素子収納用パッケージの平板状のセラミック基体の上面の電極端子パッドに直接発光素子を接続させるようにしている。これを実現させるためには、高価な装置、例えば、ボールボンディング法ではAuバンプ形成装置や、高さを揃えるためのレベリング装置や、接合のための超音波装置等を必要とし、実装のためのコストアップを引き起こしている。
However, the conventional light emitting element storage package as described above has the following problems.
(1) In a light emitting element storage package in which a light emitting element is mounted in a flip-chip system, a brazing material such as Au-Sn is vapor-deposited in advance on an electrode pad provided on the lower surface of the light emitting element, and the light emitting element is interposed through this brazing material The light emitting element is directly connected to the electrode terminal pad on the upper surface of the flat ceramic substrate of the storage package. In order to realize this, since the thickness of the brazing material of the electrode pad of the light emitting element formed by vapor deposition is thin (thickness of about 2 μm or less), the electrode terminal pad for direct bonding to the electrode terminal pad of the light emitting element storage package Excellent flatness (Rmax 1 μm or less) is required between the two electrode terminal pads including the area. However, in order to realize excellent flatness between the two electrode terminal pads on the upper surface of the flat ceramic substrate and the electrode terminal pads, the upper surface of the ceramic substrate is polished or further deposited, sputtered, etc. Therefore, it is necessary to form a metallized film by a thin film forming method using the above method, which causes an increase in cost for manufacturing a package for housing a light emitting element.
(2) In the light emitting element storage package in which the light emitting element is mounted by the flip chip method, an Au bump is formed on an electrode pad provided on the lower surface of the light emitting element, and a flat plate of the light emitting element storage package is formed through the Au bump. The light emitting element is directly connected to the electrode terminal pad on the upper surface of the ceramic substrate. In order to realize this, an expensive device, for example, an Au bump forming device in the ball bonding method, a leveling device for aligning the height, an ultrasonic device for bonding, and the like are required. This is causing an increase in cost.

本発明は、かかる事情に鑑みてなされたものであって、発光素子のフリップチップ方式での搭載のためのパッケージとして、実装性に優れ、実装のためのコストアップを防止する安価な発光素子収納用パッケージを提供することを目的とする。   The present invention has been made in view of such circumstances, and as a package for mounting a light-emitting element in a flip-chip system, it is excellent in mountability and inexpensive light-emitting element storage that prevents an increase in cost for mounting. The purpose is to provide a package.

前記目的に沿う本発明に係る発光素子収納用パッケージは、1枚、又は複数枚の接合体からなる平板状のセラミック基体の上面から突出してセラミック基体と同一のセラミックからなる一対の平板状のセラミックバンプと、それぞれのセラミックバンプの上面に発光素子をフリップチップ方式で跨げるように搭載するための金属導体膜からなる電極端子パッドを有すると共に、それぞれの電極端子パッドの間にセラミック基体の上面が露出する絶縁空間を有し、しかも、セラミック基体の上面からそれぞれの電極端子パッドの上面までの高さが略同一からなる。   The light-emitting element storage package according to the present invention that meets the above-described object is a pair of flat ceramics made of the same ceramic as the ceramic base, protruding from the upper surface of the flat ceramic base consisting of one or a plurality of joined bodies. Bumps and electrode terminal pads made of metal conductor films for mounting the light emitting elements on the upper surfaces of the respective ceramic bumps so as to be sandwiched in a flip chip manner, and the upper surface of the ceramic substrate between the respective electrode terminal pads And the height from the upper surface of the ceramic substrate to the upper surface of each electrode terminal pad is substantially the same.

ここで、上記の発光素子収納用パッケージは、セラミックバンプがセラミック基体に積層され、金属導体膜と同時焼成されて設けられているのがよい。   Here, it is preferable that the light emitting element storage package is provided by laminating ceramic bumps on a ceramic base and simultaneously firing the metal conductor film.

前記目的に沿う本発明に係る他の発光素子収納用パッケージは、1枚、又は複数枚の接合体からなる平板状のセラミック基体の上面の一対の金属導体膜からなる金属導体パッドの上面に接合して突出する金属導体膜と同一の金属導体からなる一対の半球状の金属バンプと、それぞれの金属バンプの上部に発光素子をフリップチップ方式で跨げるように搭載するための平坦面、又は球体面を有すると共に、それぞれの金属導体パッド及び金属バンプの間にセラミック基体の上面が露出する絶縁空間を有し、しかも、セラミック基体の上面からそれぞれの金属バンプの平坦面、又は球体面までの高さが略同一からなる。   Another light emitting element storage package according to the present invention that meets the above-mentioned object is bonded to the upper surface of a metal conductor pad made of a pair of metal conductor films on the upper surface of a flat ceramic substrate made of one or a plurality of bonded bodies. A pair of hemispherical metal bumps made of the same metal conductor as the protruding metal conductor film, and a flat surface for mounting the light emitting element on the top of each metal bump in a flip-chip manner, or It has a spherical surface and an insulating space in which the upper surface of the ceramic substrate is exposed between each metal conductor pad and metal bump, and further, from the upper surface of the ceramic substrate to the flat surface of each metal bump or the spherical surface. The height is substantially the same.

ここで、上記の発光素子収納用パッケージは、金属バンプが金属導体パッドの上面にディスペンサーで塗布され、セラミック基体と同時焼成されて設けられているのがよい。   Here, the light emitting element storage package is preferably provided by applying metal bumps to the upper surface of the metal conductor pads with a dispenser and simultaneously firing the ceramic base.

請求項1又はこれに従属する請求項2記載の発光素子収納用パッケージは、1枚、又は複数枚の接合体からなる平板状のセラミック基体の上面から突出してセラミック基体と同一のセラミックからなる一対の平板状のセラミックバンプと、それぞれのセラミックバンプの上面に発光素子をフリップチップ方式で跨げるように搭載するための金属導体膜からなる電極端子パッドを有すると共に、それぞれの電極端子パッドの間にセラミック基体の上面が露出する絶縁空間を有し、しかも、セラミック基体の上面からそれぞれの電極端子パッドの上面までの高さが略同一からなるので、電極パッドに薄いろう材を被着させた発光素子をブリッジ状態にしてセラミック基体の平坦性に影響されることなくセラミック基体の上面に突出するセラミックバンプの上面の電極端子パッド上に発光素子の電極パッドを載置させて搭載でき、実装性に優れ、実装のためのコストアップを防止することができる発光素子収納用パッケージを安価に提供できる。   The light emitting element storage package according to claim 1 or claim 2 dependent thereon is a pair of ceramics that is the same as the ceramic base and protrudes from the upper surface of a flat ceramic base made of one or a plurality of joined bodies. Plate-like ceramic bumps, and electrode terminal pads made of a metal conductor film for mounting the light emitting element on the upper surface of each ceramic bump so as to be sandwiched in a flip chip manner, and between the electrode terminal pads In addition, there is an insulating space in which the upper surface of the ceramic substrate is exposed, and the height from the upper surface of the ceramic substrate to the upper surface of each electrode terminal pad is substantially the same, so a thin brazing material is applied to the electrode pad. Ceramic that protrudes from the upper surface of the ceramic substrate without affecting the flatness of the ceramic substrate by bridging the light emitting element The upper surface of the electrode on the terminal pad of the amplifier is placed on the electrode pads of the light emitting element can be mounted, easy mounting, can be provided at low cost package for housing a light-emitting element capable of preventing an increase in cost for implementation.

特に、請求項2記載の発光素子収納用パッケージは、セラミックバンプがセラミック基体に積層され、金属導体膜と同時焼成されて設けられているので、一対のセラミックバンプがセラミック基体からそれぞれ部分的に突出する砲台状であり、上面の金属導体膜をセラミック基体の反りや、うねりからの影響が少ない平坦面にでき、発光素子の実装性に優れ、実装のためのコストアップを防止することができる発光素子収納用パッケージを安価に提供できる。   In particular, in the light emitting element storage package according to claim 2, since the ceramic bumps are laminated on the ceramic base and fired simultaneously with the metal conductor film, the pair of ceramic bumps partially protrude from the ceramic base. It is a turret-like shape, and the metal conductor film on the top surface can be made flat with less influence from warping and waviness of the ceramic base, making it easy to mount light-emitting elements and preventing cost increase for mounting An element storage package can be provided at low cost.

請求項3又はこれに従属する請求項4記載の発光素子収納用パッケージは、1枚、又は複数枚の接合体からなる平板状のセラミック基体の上面の一対の金属導体膜からなる金属導体パッドの上面に接合して突出する金属導体膜と同一の金属導体からなる一対の半球状の金属バンプと、それぞれの金属バンプの上部に発光素子をフリップチップ方式で跨げるように搭載するための平坦面、又は球体面を有すると共に、それぞれの金属導体パッド及び金属バンプの間にセラミック基体の上面が露出する絶縁空間を有し、しかも、セラミック基体の上面からそれぞれの金属バンプの平坦面、又は球体面までの高さが略同一からなるので、電極パッドに薄いろう材を被着させた発光素子をブリッジ状態にしてセラミック基体の平坦性に影響されることなく金属導体パッドの上面に突出する金属バンプの上面の平坦面、又は球体面上に発光素子の電極パッドを載置させて搭載でき、実装性に優れ、実装のためのコストアップを防止することができる発光素子収納用パッケージを安価に提供できる。   The light emitting element storage package according to claim 3 or claim 4 dependent thereon is a metal conductor pad comprising a pair of metal conductor films on the upper surface of a flat ceramic substrate comprising one or a plurality of joined bodies. A pair of hemispherical metal bumps made of the same metal conductor as the metal conductor film protruding and bonded to the upper surface, and a flat surface for mounting the light emitting element on top of each metal bump in a flip-chip manner And an insulating space in which the upper surface of the ceramic substrate is exposed between the metal conductor pads and the metal bumps, and the flat surfaces or spheres of the metal bumps from the upper surface of the ceramic substrate. Since the height to the surface is almost the same, the light emitting element with a thin brazing material applied to the electrode pad is bridged and affected by the flatness of the ceramic substrate. The electrode pad of the light emitting element can be mounted by mounting it on the flat surface of the upper surface of the metal bump protruding from the upper surface of the metal conductor pad or on the spherical surface, and it is excellent in mountability and prevents an increase in cost for mounting. It is possible to provide a light emitting element storage package that can be manufactured at low cost.

また、特に、請求項4記載の発光素子収納用パッケージは、金属バンプが金属導体パッドの上面にディスペンサーで塗布され、セラミック基体と同時焼成されて設けられているので、一対の金属バンプがセラミック基体の金属導体膜から突出する上面が押圧されたそれぞれ平坦面、あるいは上面がディスペンサーで塗布された形状のままの球体面であり、セラミック基体の反りや、うねりからの影響が少ない平坦面や、球体面にでき、発光素子の実装性に優れ、実装のためのコストアップを防止することができる発光素子収納用パッケージを安価に提供できる。   In particular, in the light emitting element storage package according to claim 4, since the metal bumps are provided on the upper surface of the metal conductor pad by a dispenser and fired simultaneously with the ceramic base, the pair of metal bumps are provided on the ceramic base. Each flat surface pressed from the upper surface of the metal conductor film is pressed, or a spherical surface with the upper surface remaining in a shape applied with a dispenser, and a flat surface or sphere that is less affected by warping or waviness of the ceramic substrate. Thus, a light emitting element storage package that can be formed on the surface, has excellent mountability of the light emitting element, and can prevent an increase in cost for mounting can be provided at low cost.

続いて、添付した図面を参照しつつ、本発明を具体化した実施するための最良の形態について説明し、本発明の理解に供する。
ここに、図1(A)、(B)はそれぞれ本発明の一実施の形態に係る発光素子収納用パッケージの平面図、A−A’線縦断面図、図2(A)、(B)はそれぞれ同発光素子収納用パッケージの変形例の平面図、B−B’線縦断面図である。
Subsequently, the best mode for carrying out the present invention will be described with reference to the accompanying drawings to provide an understanding of the present invention.
1A and 1B are a plan view, a longitudinal sectional view taken along line AA ′, and FIGS. 2A and 2B, respectively, of the light emitting element storage package according to the embodiment of the present invention. These are the top view of the modification of the package for the said light emitting element accommodation, and a BB 'line longitudinal cross-sectional view, respectively.

図1(A)、(B)に示すように、本発明の一実施の形態に係る発光素子収納用パッケージ10は、外形形状が平面視して、矩形や、多角形や、円形等からなり、中央部にLED等の発光素子11を搭載するための平面視して、矩形や、多角形や、円形等からなるキャビティ部12を有している。この発光素子収納用パッケージ10には、アルミナ(Al)や、窒化アルミニウム(AlN)や、低温焼成セラミック等の1枚、あるいは複数枚が接合された接合体からなる平板状のセラミック基体13が用いられている。この発光素子収納用パッケージ10は、セラミック基体13の上面から突出してこのセラミック基体13と同一のセラミックからなる一対、又は複数個毎で一対となる平板状のセラミックバンプ14、14aを有している。そして、このそれぞれのセラミックバンプ14、14aの上面には、発光素子11をフリップチップ方式で跨げるように搭載するための金属導体膜からなり、それぞれで正負電極の一対となる電極端子パッド15、15aを有している。この発光素子収納用パッケージ10は、電極端子パッド15、15aがセラミックバンプ14、14aの上、下層を電気的に導通状態とするためや、セラミック基体13の上、下層を電気的に導通状態とするためのビア16や、セラミック基体13の層間の導体配線パターン17を介してセラミック基体13の下面に設ける外部接続端子パッド18と電気的に導通状態となるように形成されている。 As shown in FIGS. 1A and 1B, a light emitting element storage package 10 according to an embodiment of the present invention has a rectangular shape, a polygonal shape, a circular shape, or the like in plan view. In the center portion, a cavity portion 12 made of a rectangle, a polygon, a circle or the like is provided in plan view for mounting the light emitting element 11 such as an LED. The light emitting element storage package 10 includes a flat ceramic substrate made of a bonded body in which one piece or a plurality of pieces such as alumina (Al 2 O 3 ), aluminum nitride (AlN), and low-temperature fired ceramic are joined. 13 is used. The light emitting element storage package 10 includes a pair of flat ceramic bumps 14 and 14a that protrude from the upper surface of the ceramic base 13 and are made of the same ceramic as the ceramic base 13 or a pair of plural ceramic bumps. . The upper surface of each of the ceramic bumps 14 and 14a is made of a metal conductor film for mounting the light emitting element 11 so as to straddle the flip chip method, and each of the electrode terminal pads 15 is a pair of positive and negative electrodes. , 15a. In the light emitting element storage package 10, the electrode terminal pads 15 and 15 a are electrically connected to the upper and lower layers of the ceramic bumps 14 and 14 a, and the upper and lower layers of the ceramic substrate 13 are electrically connected to each other. For this purpose, the external connection terminal pad 18 provided on the lower surface of the ceramic base 13 is formed in an electrically conductive state via the vias 16 and the conductor wiring patterns 17 between the layers of the ceramic base 13.

また、この発光素子収納用パッケージ10は、セラミックバンプ14、14aの上面に形成されるそれぞれで正負電極の一対となる、例えば、正側の電極端子パッド15と、負側の電極端子パッド15aの間に、セラミック基体13の上面が露出する絶縁空間を有している。この絶縁空間によって、電極端子パッド15と、電極端子パッド15aとの短絡が防止されている。更に、この発光素子収納用パッケージ10は、セラミック基体13の上面からそれぞれの電極端子パッド15、15aの金属導体膜の上面までの高さが略同一からなっている。これによって、発光素子11は、電極端子パッド15と、電極端子パッド15a間にセラミック基体13に対して平行に正確に搭載でき、発光素子11からの発光を正確に前方に発光させることができるようになる。   In addition, the light emitting element storage package 10 is formed on the upper surfaces of the ceramic bumps 14 and 14a, respectively, and forms a pair of positive and negative electrodes, for example, a positive electrode terminal pad 15 and a negative electrode terminal pad 15a. There is an insulating space between which the upper surface of the ceramic substrate 13 is exposed. This insulation space prevents a short circuit between the electrode terminal pad 15 and the electrode terminal pad 15a. Further, the light emitting element storage package 10 has substantially the same height from the upper surface of the ceramic substrate 13 to the upper surfaces of the metal conductor films of the respective electrode terminal pads 15 and 15a. Accordingly, the light emitting element 11 can be accurately mounted in parallel with the ceramic base 13 between the electrode terminal pad 15 and the electrode terminal pad 15a, and the light emitted from the light emitting element 11 can be accurately emitted forward. become.

この発光素子収納用パッケージ10は、通常、発光素子11を収納させるためのキャビティ部12が発光素子11を載置させるためのセラミック基体13と、これに接合させた発光素子11からの光を反射させるための反射体19とで形成されている。この反射体19には、金属製や、セラミック製や、樹脂製等が用いられ、特に材質が限定されるものではないが、発光素子11からの発光の反射率の高いものが好ましい。また、反射体19には、発光素子11からの発光を前方に集光させるためにキャビティ部12の開口壁面が前方に開口を広くするテーパー状とするのが好ましい。なお、反射体19と、セラミック基体13の接合には、樹脂や、ガラスや、ろう材等の接合材を用いて接合させることができる。また、反射体19がセラミック製の場合には、セラミック基体13に積層して一体的に形成することもできる。   In the light emitting element storage package 10, the cavity 12 for storing the light emitting element 11 usually reflects the ceramic base 13 for mounting the light emitting element 11 and the light from the light emitting element 11 joined thereto. It is formed with the reflector 19 for making it. The reflector 19 is made of metal, ceramic, resin, or the like. The material of the reflector 19 is not particularly limited, but a material having a high reflectance of light emission from the light emitting element 11 is preferable. Moreover, it is preferable that the reflector 19 has a tapered shape in which the opening wall surface of the cavity portion 12 widens the opening forward in order to condense light emitted from the light emitting element 11 forward. It should be noted that the reflector 19 and the ceramic base 13 can be bonded using a bonding material such as resin, glass, or brazing material. Further, when the reflector 19 is made of ceramic, it can be laminated on the ceramic substrate 13 and formed integrally.

上記の発光素子収納用パッケージ10は、セラミックバンプ14、14aがこれを構成するセラミックグリーンシートに金属導体膜を構成する導体ペーストを用いてスクリーン印刷を行った後、セラミック基体13を構成するセラミックグリーンシートに積層した積層体を、例えば、還元雰囲気中の1550℃程度(セラミックがAlの場合)の高温でセラミックと、導体金属が同時焼成されて設けられているのがよい。 In the light emitting element storage package 10 described above, the ceramic bumps 14 and 14a are ceramic green sheets constituting the ceramic green sheet constituting the ceramic base 13 after screen printing using a conductor paste constituting the metal conductor film on the ceramic green sheet. The laminated body laminated on the sheet may be provided by, for example, simultaneously firing the ceramic and the conductor metal at a high temperature of about 1550 ° C. (when the ceramic is Al 2 O 3 ) in a reducing atmosphere.

この発光素子収納用パッケージ10には、特に、大きさが0.9mm以上の大型の発光素子11であっても、発光素子11の電極パッドに比較的安価なAu−Snのろう材を蒸着させて容易にセラミックバンプ14、14aの上面の電極端子パッド15、15a に搭載させることができるので、大型の発光素子11を搭載させることができる安価なパッケージとして用いることができる。 In this light emitting element storage package 10, a relatively inexpensive Au—Sn brazing material is deposited on the electrode pad of the light emitting element 11, even for a large light emitting element 11 having a size of 0.9 mm or more. Therefore, since it can be easily mounted on the electrode terminal pads 15 and 15a on the upper surfaces of the ceramic bumps 14 and 14a, it can be used as an inexpensive package on which the large light emitting element 11 can be mounted.

次に、図2(A)、(B)を参照しながら、本発明の一実施の形態に係る他の発光素子収納用パッケージ10aを説明する。
図2(A)、(B)に示すように、発光素子収納用パッケージ10aは、発光素子収納用パッケージ10と同様に外形形状が平面視して、矩形や、多角形や、円形等からなり、中央部にLED等の発光素子11を搭載するための平面視して、矩形や、多角形や、円形等からなるキャビティ部12を有している。この発光素子収納用パッケージ10aには、アルミナや、窒化アルミニウムや、低温焼成セラミック等の1枚、あるいは複数枚が接合された接合体からなる平板状のセラミック基体13が用いられている。この発光素子収納用パッケージ10aは、セラミック基体13の上面の一対、又は複数個毎で一対となる金属導体膜からなる金属導体パッド20、20aの上面に接合して突出する金属導体膜と同一の金属導体からなるそれぞれで正負電極の一対、又は複数個毎で一対となる半球状の金属バンプ21、21aを有している。そして、このそれぞれの金属バンプ21、21aの上部には、発光素子11をフリップチップ方式で跨げるように搭載するための平坦面、又は球体面を有している。この金属導体パッド20、20a及び金属バンプ21、21aは、セラミック基体13の上、下層を電気的に導通状態とするためのビア16や、セラミック基体13の層間の導体配線パターン17を介してセラミック基体13の下面に設ける外部接続端子パッド18と電気的な導通状態となっている。なお、この発光素子収納用パッケージ10aは、発光素子収納用パッケージ10と同様に、通常、発光素子11を収納させるためのキャビティ部12がセラミック基体13と、反射体19とで形成されている。そして、この反射体19は、発光素子収納用パッケージ10の場合と同様に、特に材質が限定されるものではないが、発光素子11からの発光の反射率の高いものが好まく、発光素子11からの発光を前方に集光させるためにキャビティ部12の開口壁面が前方に開口を広くするテーパー状とするのが好ましい。
Next, another light emitting element housing package 10a according to an embodiment of the present invention will be described with reference to FIGS.
As shown in FIGS. 2A and 2B, the light emitting element storage package 10a has a rectangular shape, a polygonal shape, a circular shape, or the like in a plan view in the same manner as the light emitting element storage package 10. In the center portion, a cavity portion 12 made of a rectangle, a polygon, a circle or the like is provided in plan view for mounting the light emitting element 11 such as an LED. The light-emitting element storage package 10a uses a flat ceramic substrate 13 made of a bonded body in which one piece or a plurality of pieces such as alumina, aluminum nitride, and low-temperature fired ceramic are joined. The light emitting element storage package 10a is the same as the metal conductor film protruding from the upper surface of the metal conductor pads 20 and 20a made of a pair of metal conductor films or a pair of upper surfaces of the ceramic base 13 or a plurality of pairs. Each of the metal conductors includes a pair of positive and negative electrodes, or a pair of hemispherical metal bumps 21 and 21a. And on each metal bump 21 and 21a, it has the flat surface or spherical surface for mounting the light emitting element 11 so that it may straddle by a flip-chip system. The metal conductor pads 20 and 20a and the metal bumps 21 and 21a are ceramic via vias 16 for electrically connecting the upper and lower layers of the ceramic substrate 13 and the conductor wiring pattern 17 between the layers of the ceramic substrate 13. The external connection terminal pad 18 provided on the lower surface of the base 13 is in electrical conduction. In the light emitting element storage package 10 a, as in the light emitting element storage package 10, a cavity portion 12 for storing the light emitting element 11 is usually formed of a ceramic base 13 and a reflector 19. The reflector 19 is not particularly limited in material as in the case of the light emitting element storage package 10, but preferably has a high reflectance of light emitted from the light emitting element 11. In order to condense light emitted from the front, it is preferable that the opening wall surface of the cavity portion 12 has a tapered shape that widens the opening forward.

また、この発光素子収納用パッケージ10aは、金属導体パッド20、20a及び金属バンプ21、21aの間に、セラミック基体13の上面が露出する絶縁空間を有している。この絶縁空間によって、金属導体パッド20及び金属バンプ21と、金属導体パッド20a及び金属バンプ21aの短絡が防止されている。更に、この発光素子収納用パッケージ10aは、セラミック基体13の上面からそれぞれの金属バンプ21、21aの平坦面、又は球体面までの高さが略同一からなっている。これによって、発光素子11は、金属バンプ21と、金属バンプ21a間にセラミック基体13に対して平行に正確に搭載でき、発光素子11からの発光を正確に前方に発光させることができるようになる。   The light emitting element storage package 10a has an insulating space in which the upper surface of the ceramic substrate 13 is exposed between the metal conductor pads 20, 20a and the metal bumps 21, 21a. By this insulating space, the metal conductor pad 20 and the metal bump 21 and the metal conductor pad 20a and the metal bump 21a are prevented from being short-circuited. Furthermore, the light emitting element storage package 10a has substantially the same height from the upper surface of the ceramic substrate 13 to the flat surfaces or spherical surfaces of the respective metal bumps 21 and 21a. Thus, the light emitting element 11 can be accurately mounted in parallel with the ceramic base 13 between the metal bump 21 and the metal bump 21a, and the light emitted from the light emitting element 11 can be accurately emitted forward. .

上記の発光素子収納用パッケージ10aは、金属バンプ21が金属導体パッド20の上面、金属バンプ21aが金属導体パッド20aの上面に金属バンプ21、21aを構成する導体金属ペーストがそれぞれディスペンサーで塗布され、セラミック基体13を構成するセラミックグリーンシートと還元雰囲気中の1550℃程度の高温でセラミックと、導体金属が同時焼成されて設けられているのがよい。   In the light emitting element storage package 10a, the metal bump 21 is applied to the upper surface of the metal conductor pad 20, the metal bump 21a is applied to the upper surface of the metal conductor pad 20a, and the conductive metal paste constituting the metal bumps 21 and 21a is applied by a dispenser. It is preferable that the ceramic green sheet constituting the ceramic base 13 and the ceramic and the conductor metal are simultaneously fired at a high temperature of about 1550 ° C. in a reducing atmosphere.

この発光素子収納用パッケージ10aには、特に、大きさが0.5mm以下の小型の発光素子11であっても、発光素子11の電極パッドに比較的安価なAu−Snのろう材を蒸着させて容易に金属バンプ21、21aの上部の平坦面、又は球体面に搭載させることができるので、小型の発光素子11を搭載させることができる安価なパッケージとして用いることができる。
なお、大きさが0.5mm〜0.9mm程度の中型の発光素子11は、上記の発光素子収納用パッケージ10、10aの何れにも搭載させることが可能であり、安価なパッケージとして提供できる。
In this light emitting element storage package 10a, a relatively inexpensive Au—Sn brazing material is deposited on the electrode pad of the light emitting element 11 even for a small light emitting element 11 having a size of 0.5 mm or less. Thus, the metal bumps 21 and 21a can be easily mounted on the flat surface or the spherical surface of the metal bumps 21 and 21a, so that it can be used as an inexpensive package on which the small light emitting element 11 can be mounted.
The medium-sized light-emitting element 11 having a size of about 0.5 mm to 0.9 mm can be mounted on any of the light-emitting element storage packages 10 and 10a, and can be provided as an inexpensive package. .

上記の発光素子収納用パッケージ10、10aは、発光素子11をキャビティ部12に搭載した後、キャビティ部12内に蛍光体入りの樹脂等が充填され、反射体19の開口周縁部にレンズを樹脂接着剤等を用いて接合するようになっている。   In the light emitting element storage package 10, 10 a, after the light emitting element 11 is mounted in the cavity portion 12, the cavity portion 12 is filled with a resin containing a phosphor, and a lens is resinated on the opening peripheral portion of the reflector 19. They are joined using an adhesive or the like.

ここで、発光素子収納用パッケージ10、10aに用いられるセラミック基体13に、セラミックの一例であるアルミナを用いた場合の作製方法を説明する。この作製には、先ず、アルミナ粉末にマグネシア、シリカ、カルシア等の焼結助剤を適当量加えた粉末に、ジオクチルフタレート等の可塑剤と、アクリル樹脂等のバインダー、及び、トルエン、キシレン、アルコール類等の溶剤が加えられ、十分に混練した後、脱泡して粘度2000〜40000cpsのスラリーが作製される。次に、スラリーは、ドクターブレード法等によって、例えば、厚み0.25mmのロール状のシートに形成され、適当なサイズにカットしてセラミックグリーンシートが作製される。   Here, a manufacturing method in the case where alumina which is an example of ceramic is used for the ceramic base 13 used in the light emitting element storage packages 10 and 10a will be described. For this preparation, first, a powder obtained by adding an appropriate amount of a sintering aid such as magnesia, silica, calcia to alumina powder, a plasticizer such as dioctyl phthalate, a binder such as acrylic resin, and toluene, xylene, alcohol A solvent such as the like is added and sufficiently kneaded, and then defoamed to produce a slurry having a viscosity of 2000 to 40000 cps. Next, the slurry is formed into a roll-like sheet having a thickness of, for example, 0.25 mm by a doctor blade method or the like, and cut into an appropriate size to produce a ceramic green sheet.

そして、セラミックグリーンシートには、打ち抜き金型やパンチングマシーン等を用いて、それぞれの所定位置に上層と下層との間の導通を形成するためのビア16用の貫通孔が穿設される。次いで、セラミックグリーンシートには、タングステンや、モリブデン等の高融点金属からなる金属導体ペーストを用いてスクリーン印刷でビア16用の貫通孔に充填したり、発光素子11と電気的に導通状態とするために表面に導体配線パターン17用や、電極端子パッド15、15a用や、外部接続端子パッド18用や、金属導体パッド20用等の導体印刷パターンが形成される。これらの印刷が完了したセラミックグリーンシートは、複数枚が重ね合わされ積層体が形成される。なお、発光素子収納用パッケージ10用には、セラミックバンプ14用のセラミックグリーンシートも積層される。また、発光素子収納用パッケージ10a用には、金属導体パッド20用の導体印刷パターンの上面に金属バンプ21、21a用の導体金属ペーストがそれぞれディスペンサーで塗布される。そして、次に、高融点金属と、セラミックグリーンシートとを還元性雰囲気の焼成炉で同時焼成してセラミック基体13が作製されている。   The ceramic green sheet is provided with a through hole for the via 16 for forming conduction between the upper layer and the lower layer at a predetermined position using a punching die, a punching machine, or the like. Next, the ceramic green sheet is filled with a through hole for the via 16 by screen printing using a metal conductor paste made of a refractory metal such as tungsten or molybdenum, or is electrically connected to the light emitting element 11. Therefore, printed conductor patterns for the conductor wiring pattern 17, the electrode terminal pads 15 and 15 a, the external connection terminal pad 18, and the metal conductor pad 20 are formed on the surface. A plurality of ceramic green sheets on which printing has been completed are stacked to form a laminate. A ceramic green sheet for the ceramic bump 14 is also laminated for the light emitting element storage package 10. In addition, for the light emitting element storage package 10a, the conductive metal paste for the metal bumps 21 and 21a is respectively applied to the upper surface of the conductive printed pattern for the metal conductive pad 20 with a dispenser. Next, the ceramic substrate 13 is manufactured by simultaneously firing the refractory metal and the ceramic green sheet in a firing furnace in a reducing atmosphere.

本発明の発光素子収納用パッケージは、LED等の発光素子を搭載させて発光効率のよい照明や、ディスプレイ等に用いることができる。   The light-emitting element storage package of the present invention can be used for lighting, a display, or the like having a light-emitting efficiency by mounting a light-emitting element such as an LED.

(A)、(B)はそれぞれ本発明の一実施の形態に係る発光素子収納用パッケージの平面図、A−A’線縦断面図である。(A), (B) is a top view of the light emitting element storage package which concerns on one embodiment of this invention, respectively, and an A-A 'line longitudinal cross-sectional view. (A)、(B)はそれぞれ同発光素子収納用パッケージの変形例の平面図、B−B’線縦断面図である。(A), (B) is the top view of the modification of the package for the said light emitting element accommodation, respectively, and the B-B 'line longitudinal cross-sectional view.

符号の説明Explanation of symbols

10、10a:発光素子収納用パッケージ、11:発光素子、12:キャビティ部、13:セラミック基体、14、14a:セラミックバンプ、15、15a:電極端子パッド、16:ビア、17:導体配線パターン、18:外部接続端子パッド、19:反射体、20、20a:金属導体パッド、21、21a:金属バンプ   10, 10a: Light-emitting element storage package, 11: Light-emitting element, 12: Cavity, 13: Ceramic base, 14, 14a: Ceramic bump, 15, 15a: Electrode terminal pad, 16: Via, 17: Conductor wiring pattern, 18: External connection terminal pad, 19: Reflector, 20, 20a: Metal conductor pad, 21, 21a: Metal bump

Claims (4)

1枚、又は複数枚の接合体からなる平板状のセラミック基体の上面から突出して該セラミック基体と同一のセラミックからなる一対の平板状のセラミックバンプと、それぞれの該セラミックバンプの上面に発光素子をフリップチップ方式で跨げるように搭載するための金属導体膜からなる電極端子パッドを有すると共に、それぞれの前記電極端子パッドの間に前記セラミック基体の上面が露出する絶縁空間を有し、しかも、前記セラミック基体の上面からそれぞれの前記電極端子パッドの上面までの高さが略同一からなることを特徴とする発光素子収納用パッケージ。   A pair of flat ceramic bumps made of the same ceramic as the ceramic base projecting from the top surface of the flat ceramic base made of one or a plurality of joined bodies, and a light emitting element on the top surface of each ceramic bump It has an electrode terminal pad made of a metal conductor film for mounting so as to be straddled by a flip chip method, and has an insulating space in which the upper surface of the ceramic substrate is exposed between the electrode terminal pads, The light emitting element storage package, wherein the height from the upper surface of the ceramic substrate to the upper surface of each electrode terminal pad is substantially the same. 請求項1記載の発光素子収納用パッケージにおいて、前記セラミックバンプが前記セラミック基体に積層され、前記金属導体膜と同時焼成されて設けられていることを特徴とする発光素子収納用パッケージ。   2. The light emitting element storage package according to claim 1, wherein the ceramic bumps are provided on the ceramic substrate and are fired simultaneously with the metal conductor film. 1枚、又は複数枚の接合体からなる平板状のセラミック基体の上面の一対の金属導体膜からなる金属導体パッドの上面に接合して突出する前記金属導体膜と同一の金属導体からなる一対の半球状の金属バンプと、それぞれの該金属バンプの上部に発光素子をフリップチップ方式で跨げるように搭載するための平坦面、又は球体面を有すると共に、それぞれの前記金属導体パッド及び前記金属バンプの間に前記セラミック基体の上面が露出する絶縁空間を有し、しかも、前記セラミック基体の上面からそれぞれの前記金属バンプの前記平坦面、又は球体面までの高さが略同一からなることを特徴とする発光素子収納用パッケージ。   A pair of metal conductors made of the same metal conductor as the metal conductor film projecting bonded to the upper surface of a metal conductor pad made of a pair of metal conductor films on the upper surface of a flat ceramic substrate made of one or more joined bodies A hemispherical metal bump, and a flat surface or a spherical surface for mounting the light emitting element so as to straddle the flip-chip method on each metal bump, and each of the metal conductor pad and the metal An insulating space in which the upper surface of the ceramic substrate is exposed between the bumps, and the height from the upper surface of the ceramic substrate to the flat surface or spherical surface of each of the metal bumps is substantially the same. A package for storing light emitting elements. 請求項3記載の発光素子収納用パッケージにおいて、前記金属バンプが前記金属導体パッドの上面にディスペンサーで塗布され、前記セラミック基体と同時焼成されて設けられていることを特徴とする発光素子収納用パッケージ。   4. The light emitting element storage package according to claim 3, wherein the metal bumps are provided on a top surface of the metal conductor pad by a dispenser and fired simultaneously with the ceramic substrate. .
JP2007200261A 2007-08-01 2007-08-01 Light emitting element storage package Pending JP2009038160A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012044011A3 (en) * 2010-09-30 2012-06-07 Seoul Opto Device Co., Ltd. Wafer level light emitting diode package and method of fabricating the same
TWI669029B (en) * 2016-11-11 2019-08-11 日商京瓷股份有限公司 Package for mounting an electric component, array package, and electrical device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012044011A3 (en) * 2010-09-30 2012-06-07 Seoul Opto Device Co., Ltd. Wafer level light emitting diode package and method of fabricating the same
TWI669029B (en) * 2016-11-11 2019-08-11 日商京瓷股份有限公司 Package for mounting an electric component, array package, and electrical device

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