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JP2008189338A - Exhaust valve structure - Google Patents

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Publication number
JP2008189338A
JP2008189338A JP2007023507A JP2007023507A JP2008189338A JP 2008189338 A JP2008189338 A JP 2008189338A JP 2007023507 A JP2007023507 A JP 2007023507A JP 2007023507 A JP2007023507 A JP 2007023507A JP 2008189338 A JP2008189338 A JP 2008189338A
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exhaust valve
exhaust
vent pipe
tank
main body
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JP4469377B2 (en
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Toshio Tainaka
利夫 胎中
Keita Nishino
圭太 西野
Shinsuke Maeshiba
信介 前芝
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Showa Kiki Kogyo Co Ltd
Eneos Corp
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Nippon Oil Corp
Showa Kiki Kogyo Co Ltd
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Abstract

【課題】排気弁構造を通気管の垂直部分の任意の位置に設置でき、しかも、その設置のための空間容量に制約を受けることなく、その上、弁機構の動作を常に正常に維持できる排気弁構造を提供すること。
【解決手段】揮発性の液体を貯蔵するタンクと外気とを連通する通気管Aに排気弁を取り付けるための排気弁構造Cである。この排気弁構造Cは、タンク内の気体を外気側に排出するための排気口2およびこの排気口2を開閉する排気弁本体3を備えた排気弁本体部分C1と、この排気弁本体部分C1を通気管Aの垂直部分の直線上に垂直に取り付けるための取り付け手段C2、C2とを有する。
【選択図】図1
The exhaust valve structure can be installed at an arbitrary position in the vertical portion of the vent pipe, and the exhaust of the valve mechanism can always be maintained normally without being restricted by the space capacity for the installation. Providing a valve structure.
An exhaust valve structure C for attaching an exhaust valve to a vent pipe A that communicates between a tank for storing a volatile liquid and outside air. The exhaust valve structure C includes an exhaust valve body portion C1 having an exhaust port 2 for discharging gas in the tank to the outside and an exhaust valve body 3 for opening and closing the exhaust port 2, and the exhaust valve body portion C1. Mounting means C2 and C2 for vertically mounting on the straight line of the vertical portion of the vent pipe A.
[Selection] Figure 1

Description

本発明は、石油類を貯蔵する地下タンクから地上に引き出された通気管に排気弁を取り付けるための排気弁構造に関する。   The present invention relates to an exhaust valve structure for attaching an exhaust valve to a vent pipe drawn out from an underground tank for storing petroleum.

石油類を取り扱う給油所の地下貯蔵タンクからは外気と連通する通気管が引き出され、その先端の通気口には40メッシュ程度の防火網が取り付けられていた。   A vent pipe communicating with the outside air was drawn out from an underground storage tank of a gas station that handles petroleum, and a fire mesh of about 40 mesh was attached to the vent at the tip.

この防火網によって、外部で火災が発生しても炎が通気口からタンク内に侵入しないようになっていたが、通気口からは石油蒸気が防火網を介して外気に垂れ流し状態で放出され続けている状況にあった。   This fire net prevented flames from entering the tank through the vents even if an external fire occurred, but oil vapor continues to be released from the vents to the outside air via the fire net. Was in a situation.

このようなタンクからの石油蒸気の垂れ流し放出に対し、近年、環境問題への認識の高まりにより、常時の石油蒸気の放出を止め、タンク内の石油蒸気圧が一定の許容圧力以上になったたときだけ外気に排出する排気弁が通気管先端の通気口に取り付けられるようになった。   In recent years, due to the increasing awareness of environmental issues, the oil vapor pressure in the tank has become more than a certain permissible pressure due to the increasing awareness of environmental issues. An exhaust valve that only discharges to the outside air is now attached to the vent at the tip of the vent pipe.

本願出願人は先に下記特許文献1において、図4に示すように、垂直通気管A先端の通気口に設ける排気弁において、排気口2を上側から閉止する排気弁本体3の下側に、排気口2より下方に位置するように錘5を取り付けた構造を開示した。この排気弁は、排気弁本体3の重心位置が低くなり、その重心位置を排気口2よりも低い位置にすることができるので、排気弁本体3がスムーズに上下動できるようになり、従前の排気弁によるチャタリング現象をなくし、近隣への騒音を発生することがなく、弁の寿命も長くなるという効果を奏するものである。   The applicant of the present application previously described in Patent Document 1 below, as shown in FIG. 4, in the exhaust valve provided at the vent at the tip of the vertical vent pipe A, on the lower side of the exhaust valve main body 3 that closes the exhaust port 2 from above, A structure in which the weight 5 is attached so as to be positioned below the exhaust port 2 is disclosed. In this exhaust valve, the center of gravity of the exhaust valve main body 3 is lowered, and the center of gravity can be set lower than the exhaust outlet 2, so that the exhaust valve main body 3 can move up and down smoothly. The chattering phenomenon due to the exhaust valve is eliminated, no noise is generated in the vicinity, and the life of the valve is extended.

ところが、垂直方向に通気口を有する通気管の場合、通気口から放出されるタンクからの石油蒸気が通気口の周囲近隣に四散し、このことが新たな環境問題となった。そのため、近年、図5に示すように、石油蒸気が四散することがないように、通気口Bの向きを特定の水平方向に向けた通気管が設置されるようになった。   However, in the case of a vent pipe having a vent hole in the vertical direction, petroleum vapor from the tank discharged from the vent hole is scattered in the vicinity of the vent hole, which has become a new environmental problem. Therefore, in recent years, as shown in FIG. 5, a vent pipe having the vent B oriented in a specific horizontal direction has been installed so that petroleum vapor does not scatter.

しかしながら、このように通気口の向きが特定の水平方向を向いた通気管には、弁構造上の問題から排気弁を設置することはできず、通気管の中途の垂直部分に設置せざるを得ない。例えば、下記特許文献2には、通気口に至る通気管の中途にバイパス的に垂直部分を設け、そこに弁構造設置用の専用スペースを設け、この専用スペース内に、大気に連通する吸気口と大気に開放された排気口を有する弁構造を設けたものが記載されている。   However, an exhaust valve cannot be installed in a vent pipe whose vent is oriented in a specific horizontal direction because of problems in the valve structure, and it must be installed in the vertical part of the vent pipe. I don't get it. For example, in Patent Document 2 below, a vertical part is provided in a bypass manner in the middle of a vent pipe leading to a vent, a dedicated space for installing a valve structure is provided therein, and an intake port communicating with the atmosphere is provided in this dedicated space. And a valve structure having an exhaust port opened to the atmosphere is described.

ところが、このように、通気管を屈曲して垂直バイパスを設け、そこに、弁構造設置用の専用スペース内に配置したものでは、弁構造部分には通気管内のガスの流れの曲折による圧損が生じるため、弁機構が正常に作動しなくなるおそれがあり、さらには、バイパスに設けた専用スペースが通気管から突出するため、設置位置によっては人や車輌との接触のおそれもあり、また、現場の状況によっては設置スペースを確保できないという問題もある。
特願2005−224484号 特開2001−163400号公報
However, in the case where the vertical bypass is provided by bending the vent pipe as described above and arranged in a dedicated space for installing the valve structure, the valve structure portion is subject to pressure loss due to bending of the gas flow in the vent pipe. As a result, the valve mechanism may not operate properly, and the dedicated space provided in the bypass protrudes from the vent pipe, which may cause contact with people and vehicles depending on the installation position. Depending on the situation, there is also a problem that the installation space cannot be secured.
Japanese Patent Application No. 2005-224484 JP 2001-163400 A

本発明が解決しようとする課題は、地下タンクから通気管を経て放出された石油蒸気を四散することなく特定の水平方向に効果的に排出する場合においても、その通気管に排気弁を設置することができる排気弁構造を提供することにある。   The problem to be solved by the present invention is to install an exhaust valve in the vent pipe even when the oil vapor discharged from the underground tank through the vent pipe is effectively discharged in a specific horizontal direction without being scattered. An object of the present invention is to provide an exhaust valve structure.

具体的には、本発明は、排気弁構造を通気管の垂直部分の任意の位置に設置でき、しかも、その設置のための空間容量に制約を受けることなく、その上、弁機構の動作を常に正常に維持できる排気弁構造を提供する。   Specifically, according to the present invention, the exhaust valve structure can be installed at an arbitrary position in the vertical portion of the vent pipe, and the operation of the valve mechanism can be performed without being restricted by the space capacity for the installation. Provide an exhaust valve structure that can always be maintained normally.

本発明の排気弁構造は、揮発性の液体を貯蔵するタンクと外気とを連通する通気管に排気弁を取り付けるための排気弁構造であって、タンク内の気体を外気側に排出するための排気口およびこの排気口を開閉する排気弁本体を備えた排気弁本体部分と、この排気弁本体部分を通気管の垂直部分の直線上に垂直に取り付けるための取り付け手段とを有することを特徴とするものである。   The exhaust valve structure of the present invention is an exhaust valve structure for attaching an exhaust valve to a vent pipe that communicates between a tank storing volatile liquid and outside air, and is for exhausting gas in the tank to the outside air side. An exhaust valve main body portion having an exhaust port and an exhaust valve main body for opening and closing the exhaust port, and an attachment means for vertically mounting the exhaust valve main body portion on a straight line of a vertical portion of the vent pipe To do.

すなわち、本発明の排気弁構造は上記の取り付け手段を有するので、通気管の垂直部分の任意の位置に設置可能であり、しかも排気弁本体部分は通気管の垂直部分の直線上に垂直に取り付けられるので、通気管内で圧損が生じることがなく、弁機構の動作を正常に維持できる。   That is, since the exhaust valve structure of the present invention has the above-mentioned attachment means, it can be installed at an arbitrary position in the vertical portion of the vent pipe, and the exhaust valve main body portion is mounted vertically on a straight line of the vertical portion of the vent pipe. Therefore, pressure loss does not occur in the vent pipe, and the operation of the valve mechanism can be maintained normally.

取り付け手段は、具体的には排気弁本体部分の上下に設けたフランジまたは管継手とすることができる。   Specifically, the attaching means can be flanges or pipe joints provided above and below the exhaust valve main body.

本発明の排気弁構造は以下の効果を奏する。   The exhaust valve structure of the present invention has the following effects.

1.通気管の垂直部分の任意の位置に設置可能である。したがって、地下タンクから通気管を経て放出された石油蒸気を四散することなく特定の水平方向に効果的に排出する場合においても、その通気管に排気弁を設置することができる。さらに、既設の通気口がそのまま使用可能で経済的であり、また、排気弁を設置可能な通気口の種類が限定されることもない。 1. It can be installed at any position in the vertical part of the vent pipe. Therefore, even when oil vapor discharged from the underground tank through the vent pipe is effectively discharged in a specific horizontal direction without being scattered, an exhaust valve can be installed in the vent pipe. Furthermore, the existing vents can be used as they are and are economical, and the types of vents in which exhaust valves can be installed are not limited.

2.通気管の垂直部分の任意の位置に設置可能であるので、通気管の低い位置にも設置可能となり、排気弁のメンテナンスや点検等における高所作業が不要となり、作業の安全性が向上する。 2. Since it can be installed at an arbitrary position in the vertical portion of the vent pipe, it can be installed at a lower position of the vent pipe, so that work at a high place in maintenance and inspection of the exhaust valve is not required, and work safety is improved.

3.排気弁が通気管の垂直部分の直線上に設置されるので、通気管内で圧損が生じることがなく、弁機構の動作を正常に維持できる。また、排気弁は通気管の管路内に設置されるので、設置のための専用スペースが不要であり、設置スペースに制約がない。 3. Since the exhaust valve is installed on the straight line of the vertical portion of the vent pipe, pressure loss does not occur in the vent pipe, and the operation of the valve mechanism can be maintained normally. Moreover, since the exhaust valve is installed in the pipe line of the ventilation pipe, a dedicated space for installation is not required, and the installation space is not limited.

4.フランジまたは管継手によって通気管に設置するようにしているので、その設置、交換を容易に行うことができ、メンテナンス性が向上する。 4). Since it is installed in the ventilation pipe by a flange or a pipe joint, its installation and replacement can be easily performed, and the maintainability is improved.

以下、図面に示す実施例に基づき本発明の実施の形態を説明する。   Embodiments of the present invention will be described below based on examples shown in the drawings.

図1は、本発明の排気弁構造を適用した通気管を断面によって示す。   FIG. 1 is a sectional view showing a vent pipe to which an exhaust valve structure of the present invention is applied.

通気管Aの基端は、図示しない地下タンクの気相部分に連通しており、先端には外気に連通する通気口として通気口金具Bが設置されている。そして、通気管Aの垂直部分の中途に本発明の排気弁構造Cが設置されている。この排気弁構造Cは排気弁本体部分C1の上下にフランジC2を有し、このフランジC2を介して通気管Aに接続・設置される。これによって排気弁本体部分C1は通気管Aの管路の垂直部分に沿った直線上に垂直に取り付けられる。   The proximal end of the vent pipe A communicates with a gas phase portion of an underground tank (not shown), and a vent fitting B is installed at the distal end as a vent that communicates with outside air. And the exhaust valve structure C of this invention is installed in the middle of the vertical part of the vent pipe A. As shown in FIG. The exhaust valve structure C has flanges C2 above and below the exhaust valve main body C1, and is connected to and installed in the vent pipe A via the flanges C2. Thus, the exhaust valve main body portion C1 is vertically attached on a straight line along the vertical portion of the pipe line of the vent pipe A.

図2は、本発明の排気弁構造の構成を断面によって示す。   FIG. 2 shows the structure of the exhaust valve structure of the present invention in cross section.

排気弁構造Cは、上部本体金具1aと下部本体金具1bとを嵌め合わせて構成されており、上部本体金具1aの上端と下部本体金具1bの下端にそれぞれフランジC2が形成されている。   The exhaust valve structure C is configured by fitting an upper body fitting 1a and a lower body fitting 1b, and flanges C2 are formed at the upper end of the upper body fitting 1a and the lower end of the lower body fitting 1b, respectively.

上部本体金具1aの上端には円形の排気口2が形成されており、この排気口2を上側から閉止する排気弁本体3が配置されている。すなわち、通常時は排気弁本体3が排気口2を上側から閉止し、タンク内の圧力が上昇すると、その圧力により上昇して排気口2を開放する。また、排気弁本体3による排気口2の閉止を確実にするために、排気弁本体3と排気口2との間にはOリング4が設けられている。   A circular exhaust port 2 is formed at the upper end of the upper body fitting 1a, and an exhaust valve body 3 for closing the exhaust port 2 from above is disposed. In other words, the exhaust valve body 3 normally closes the exhaust port 2 from above, and when the pressure in the tank rises, the pressure rises due to the pressure and opens the exhaust port 2. An O-ring 4 is provided between the exhaust valve body 3 and the exhaust port 2 in order to ensure that the exhaust port 2 is closed by the exhaust valve body 3.

さらに、排気弁本体3の下側には錘5が一体的に設けられている。この錘5は排気口2より下方に位置するように延設されている。これによって、排気弁本体3の重心位置が排気口2よりも低い位置になり、排気弁本体3のバランスが良くなってスムーズに上下動できるようになる。また、錘5の重量を調整することで、排気設定圧力(排気弁本体3が丁度上昇するときの圧力)を調整することができる。   Further, a weight 5 is integrally provided below the exhaust valve body 3. The weight 5 is extended so as to be positioned below the exhaust port 2. As a result, the center of gravity of the exhaust valve main body 3 is lower than the exhaust port 2, and the balance of the exhaust valve main body 3 is improved so that the exhaust valve main body 3 can move up and down smoothly. Further, by adjusting the weight of the weight 5, the exhaust set pressure (pressure when the exhaust valve main body 3 just rises) can be adjusted.

この錘5は、ガイド部6としての作用も兼ね備える。このガイド部6は排気弁本体3の外周に沿って等間隔に4箇所に設けられ、それぞれのガイド部6は排気口2の内周縁に内接するように設けられている。これによって、排気弁本体3が上下動する際はガイド部5にガイドされるので排気弁本体3の上下動がよりスムーズになる。なお、実施例ではガイド部6を4箇所に設けたが、少なくとも3箇所以上の複数箇所に設ければよい。ただし、各ガイド部は重量バランスがとれた等間隔に設けることが好ましい。   The weight 5 also functions as the guide portion 6. The guide portions 6 are provided at four locations at equal intervals along the outer periphery of the exhaust valve body 3, and each guide portion 6 is provided so as to be inscribed in the inner peripheral edge of the exhaust port 2. As a result, when the exhaust valve main body 3 moves up and down, it is guided by the guide portion 5, so that the vertical movement of the exhaust valve main body 3 becomes smoother. In addition, in the Example, although the guide part 6 was provided in four places, what is necessary is just to provide in at least three places or more. However, it is preferable to provide each guide part at equal intervals in which the weight is balanced.

本実施例の排気弁構造Cは、上述の排気弁機構のほか吸気弁機構も備える。この吸気弁機構は、吸気弁本体7が通常時は排気弁本体3に設けられた吸気口8を下側から閉止し、タンク内の圧力が下降すると外気圧との差圧により下降して吸気口8を開放するように構成されている。吸気弁本体7は通常時は吸気口8を閉止するようにコイルスプリング9によって上方に付勢されており、その吸気設定圧力(吸気弁本体7が丁度下降するときの圧力)の調整はコイルスプリング9の強さを調整することにより行う。   The exhaust valve structure C of this embodiment includes an intake valve mechanism in addition to the above-described exhaust valve mechanism. In this intake valve mechanism, when the intake valve body 7 is normally closed, the intake port 8 provided in the exhaust valve body 3 is closed from the lower side, and when the pressure in the tank is lowered, the intake valve mechanism is lowered by the pressure difference from the external pressure. The mouth 8 is configured to be opened. The intake valve body 7 is normally urged upward by a coil spring 9 so as to close the intake port 8. Adjustment of the intake set pressure (pressure when the intake valve body 7 is just lowered) is adjusted by a coil spring. This is done by adjusting the strength of 9.

また、本実施例では、上部本体金具1aの側面に蓋付きの点検口10を設け、排気弁本体部分C1を容易に点検できるようにしている。   In the present embodiment, an inspection port 10 with a lid is provided on the side surface of the upper body fitting 1a so that the exhaust valve body C1 can be easily inspected.

以上の構成において、タンク内の圧力が外気圧とほぼ等しい通常時は、排気弁本体3および吸気弁本体7がそれぞれ排気口2および吸気口8を閉止しており、タンクは外気と遮断され、タンク内の気体が外気に放出されることはない。タンク内の圧力が排気設定圧力以上に上昇すると、その圧力により排気弁本体3が上昇して排気口2を開放し、タンク内の気体が排気口2から排出され通気口金具Bから外気側に放出される。この気体放出によってタンク内の圧力が排気設定圧力未満になると、排気弁本体3は自重により下降し排気口2を再び閉止する。この排気弁本体3の上下動は、上述のように、排気弁本体3の下側に錘5およびガイド部6を設けたことで非常に安定してスムーズとなるので、チャタリング現象が発生することはない。   In the above configuration, during normal times when the pressure in the tank is substantially equal to the outside air pressure, the exhaust valve body 3 and the intake valve body 7 close the exhaust port 2 and the intake port 8, respectively, and the tank is shut off from the outside air, The gas in the tank is not released to the outside air. When the pressure in the tank rises above the set exhaust pressure, the exhaust valve body 3 rises due to the pressure and opens the exhaust port 2, and the gas in the tank is discharged from the exhaust port 2 to the outside air side from the vent fitting B. Released. When the pressure in the tank becomes lower than the exhaust set pressure due to this gas release, the exhaust valve body 3 descends due to its own weight and closes the exhaust port 2 again. As described above, the vertical movement of the exhaust valve main body 3 is very stable and smooth by providing the weight 5 and the guide portion 6 on the lower side of the exhaust valve main body 3, so that a chattering phenomenon occurs. There is no.

一方、タンク内の圧力が吸気設定圧力以下に下降すると、外気圧との差圧により吸気弁本体7が下降して吸気口8を開放し、外気が通気口金具Bおよび吸気口8を通ってタンク内に流入する。この外気流入によってタンク内の圧力が吸気設定圧力を超えると、吸気弁本体7はコイルスプリング9による付勢力によって上昇し吸気口2を再び閉止する。   On the other hand, when the pressure in the tank drops below the intake set pressure, the intake valve body 7 is lowered by the pressure difference from the external pressure to open the intake port 8, and the outside air passes through the vent fitting B and the intake port 8. It flows into the tank. When the pressure in the tank exceeds the intake set pressure due to the outside air inflow, the intake valve body 7 is raised by the urging force of the coil spring 9 and closes the intake port 2 again.

このように、タンク内の圧力が変動したとしても、排気弁本体3および吸気弁本体7の作動によりタンク内の圧力は外気圧とほぼ等しい状態に復帰する。   Thus, even if the pressure in the tank fluctuates, the pressure in the tank returns to a state substantially equal to the external air pressure by the operation of the exhaust valve body 3 and the intake valve body 7.

図3は、本発明の排気弁構造の別実施例を示す。この実施例は、上部本体金具1aと下部本体金具1aを管継手として利用し、排気弁本体部分C1を通気管Aの管路の垂直部分に沿った直線上に垂直に取り付けたものである。この実施例によっても先の実施例と同様の効果を奏する。なお、この実施例では、上部本体金具1aを直角に屈曲させ、その上面に蓋付きの点検口10を設けている。   FIG. 3 shows another embodiment of the exhaust valve structure of the present invention. In this embodiment, the upper body fitting 1a and the lower body fitting 1a are used as pipe joints, and the exhaust valve body portion C1 is vertically attached on a straight line along the vertical portion of the pipe line of the ventilation pipe A. This embodiment also has the same effect as the previous embodiment. In this embodiment, the upper body fitting 1a is bent at a right angle, and an inspection port 10 with a lid is provided on the upper surface thereof.

本発明の排気弁構造を適用した通気管を断面によって示す。The vent pipe to which the exhaust valve structure of the present invention is applied is shown by a cross section. 本発明の排気弁構造の構成を断面によって示す。The structure of the exhaust valve structure of this invention is shown with a cross section. 本発明の排気弁構造の別実施例を示す。Another embodiment of the exhaust valve structure of the present invention is shown. 従来の排気弁の構成を断面によって示す。The structure of the conventional exhaust valve is shown by a cross section. 通気口の一例を示す。An example of a vent is shown.

符号の説明Explanation of symbols

A 通気管
B 通気口(通気口金具)
C 排気弁構造
C1 排気弁本体部分
C2 フランジ
1a 上部本体金具
1b 下部本体金具
2 排気口
3 排気弁本体
4 Oリング
5 錘
6 ガイド部
7 吸気弁本体
8 吸気口
9 コイルスプリング
10 点検口
A Vent B B Vent (vent fitting)
C Exhaust valve structure C1 Exhaust valve body part C2 Flange 1a Upper body bracket 1b Lower body bracket 2 Exhaust port 3 Exhaust valve body 4 O-ring 5 Weight 6 Guide part 7 Intake valve body 8 Inlet 9 Coil spring 10 Inspection port

Claims (4)

揮発性の液体を貯蔵するタンクと外気とを連通する通気管に排気弁を取り付けるための排気弁構造であって、
タンク内の気体を外気側に排出するための排気口およびこの排気口を開閉する排気弁本体を備えた排気弁本体部分と、この排気弁本体部分を通気管の垂直部分の直線上に垂直に取り付けるための取り付け手段とを有する排気弁構造。
An exhaust valve structure for attaching an exhaust valve to a vent pipe that communicates between a tank that stores volatile liquid and outside air,
An exhaust valve main body portion having an exhaust port for discharging the gas in the tank to the outside and an exhaust valve main body for opening and closing the exhaust port, and the exhaust valve main body portion vertically on a straight line of a vertical portion of the vent pipe An exhaust valve structure having attachment means for attachment.
前記取り付け手段が、排気弁本体部分の上下に設けたフランジである請求項1に記載の排気弁構造。   The exhaust valve structure according to claim 1, wherein the attachment means is a flange provided above and below the exhaust valve main body. 前記取り付け手段が、排気弁本体部分の上下に設けた管継手である請求項1に記載の排気弁構造。   The exhaust valve structure according to claim 1, wherein the attachment means is a pipe joint provided above and below the exhaust valve main body. 排気弁本体部分において、排気弁本体は、排気口を上側から閉止し、タンク内の圧力が上昇したときにその圧力により上昇して排気口を開放するように配置されており、
排気弁本体の下側に、排気口より下方に位置するように錘が取り付けられている請求項1から請求項3のいずれかに記載の排気弁構造。
In the exhaust valve body part, the exhaust valve body is arranged so that the exhaust port is closed from above, and when the pressure in the tank rises, the pressure rises due to the pressure and the exhaust port is opened.
The exhaust valve structure according to any one of claims 1 to 3, wherein a weight is attached to the lower side of the exhaust valve main body so as to be positioned below the exhaust port.
JP2007023507A 2007-02-01 2007-02-01 Exhaust valve structure Active JP4469377B2 (en)

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Application Number Priority Date Filing Date Title
JP2007023507A JP4469377B2 (en) 2007-02-01 2007-02-01 Exhaust valve structure

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010270823A (en) * 2009-05-21 2010-12-02 Shin Etsu Polymer Co Ltd Purge valve and substrate storage container
JP2013068287A (en) * 2011-09-22 2013-04-18 Niikura Kogyo Kk Relief valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010270823A (en) * 2009-05-21 2010-12-02 Shin Etsu Polymer Co Ltd Purge valve and substrate storage container
JP2013068287A (en) * 2011-09-22 2013-04-18 Niikura Kogyo Kk Relief valve

Also Published As

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