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JP2008155361A - Articulated robot - Google Patents

Articulated robot Download PDF

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Publication number
JP2008155361A
JP2008155361A JP2007299111A JP2007299111A JP2008155361A JP 2008155361 A JP2008155361 A JP 2008155361A JP 2007299111 A JP2007299111 A JP 2007299111A JP 2007299111 A JP2007299111 A JP 2007299111A JP 2008155361 A JP2008155361 A JP 2008155361A
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Prior art keywords
articulated robot
rotation center
hand unit
joint
hand
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Granted
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JP2007299111A
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Japanese (ja)
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JP4596375B2 (en
Inventor
Satoshi Sueyoshi
智 末吉
Kentaro Tanaka
謙太郎 田中
Toshihiro Matsuo
智弘 松尾
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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Priority to JP2007299111A priority Critical patent/JP4596375B2/en
Publication of JP2008155361A publication Critical patent/JP2008155361A/en
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Publication of JP4596375B2 publication Critical patent/JP4596375B2/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a multijoint robot preventing contamination of a substrate due to dusts generated from a vertically moving shaft, and putting in and taking out thin-board-shaped workpiece having improved productivity, such as a glass substrate for liquid crystal and a semiconductor wafer, to and from a stocker. <P>SOLUTION: This multijoint robot 1 is composed of: a hand part 8 for placing an object to be carried; a multijoint arm 1 connected to the hand part 8, having at least two or more rotating joints 3, 4 and 5, extending and retracting to move the hand part 8 in one direction and arranged to face a shaft direction; a supporting member 10 for connecting the multijoint arm 1 to a moving mechanism 11 vertically moving; and a base 13 provided on the moving mechanism 11 and having a turning function. The moving mechanism 11 has a column 12 arranged in the same direction as the moving direction of the hand part 8. The supporting member 10 arranged on the moving mechanism 11 protrudes in a direction orthogonal to the moving direction of the hand part 8 and is connected to the multijoint arm 2. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、液晶用のガラス基板や半導体ウェハ等の薄板状のワークをストッカに出し入れする多関節ロボットに関する。   The present invention relates to an articulated robot that takes a thin plate-like work such as a liquid crystal glass substrate or a semiconductor wafer into and out of a stocker.

従来の多関節ロボットしては、肩関節部の回転中心と台座の回転中心とをオフセットすることで台座を回動させる際に多関節ロボットの旋回半径を小さくするものが提案されている（例えば、特許文献１参照）。
従来の多関節ロボット１は、図５に示すように関節部３，４，５により回転可能に連結されて回転駆動源よる回転力を伝達し所望の動作をさせるアーム２を二組備えてなるもので、二組のアーム２に設けられる基端の関節部３の回転中心軸を上下（または軸方向）に配置するように構成されている。
多関節ロボット１は、二組のアーム２を備え、一方のアーム駆動型装置２を供給用、他方を取り出し用とし、ワーク９の供給動作と別のワーク９の取り出し動作とを同時に行うことを可能としている。
また、従来の多関節ロボット１は、アーム２によりワーク９を保持するハンド部８は図中矢印Ｘで示すワーク９の取り出し・供給方向に直線移動可能であるように構成される。
また、従来の多関節ロボット１は、アーム２が設けられている支持部材１０を上下に移動させる移動部材１１（以下、上下移動機構１１と呼ぶ）を備えて、アーム２の上下位置を調整可能としている。また、上下移動機構１１の台座１３は回動可能に設けられ、多関節ロボット１を旋回して向きを変えられるようにしている。
さらに、本実施形態の多関節ロボット１では、図中矢印Ｙで示す方向、即ちハンド部８の移動方向と支持部材１０の上下移動方向とのそれぞれに直交する方向に、台座１３を基台１４に対して移動可能に設けて上下移動機構１１の位置を調整可能としている。
また、従来の多関節ロボット１に備えられる二組のアーム２は、例えば、複数の関節部を有するものであり、即ち多関節ロボット１は、水平多関節型ロボットとして構成される。本実施形態でのアーム２は、第一アーム６（以下、上腕６と呼ぶ）と、上腕６と連結される第二アーム７（以下、前腕７と呼ぶ）と、前腕７と連結されワーク９を保持するハンド部８とを備える。
上腕６の基端は、支持部材１０に駆動軸を介して連結されて、回動可能な関節部３（以下、肩関節部３と呼ぶ）を構成する。この肩関節部３がアーム２の基端の関節部３となる。また、上腕６の先端と前腕７の基端とが駆動軸を介して連結されて、回動可能な関節部４（以下、肘関節部４と呼ぶ）を構成する。また、前腕７の先端とハンド部８とが駆動軸を介して連結されて、回動可能な関節部５（以下、ハンド関節部５と呼ぶ）を構成する。肩関節部３の回転中心軸が同軸上であるように、上下方向に対面するように配置する。
アーム２は、図示しない回転駆動源により肩関節部３と肘関節部４とハンド関節部５とを回動させて、ハンド部８をワーク取り出し・供給方向に移動させる。この際、アーム２では、その機構上、ハンド部８が一方向を向いて、上腕６と前腕７とを伸ばしきった伸長位置と、上腕６と前腕７とを折り畳んだ状態とした縮み位置との間を直線移動するように、伸縮動作を行う。
ここで、従来の多関節ロボット１では、図６に示すアーム２の縮み位置において、ハンド部８により保持されるワーク９の中心が、台座１３の回転中心と一致するものとなるように設計されている。さらに、肩関節部４の回転中心と台座１３の回転中心とをハンド部８の移動方向に対して直交方向にオフセットすることで台座１３を回動させる際に多関節ロボット１の周囲に必要となる最小領域円１５から肘関節部４やハンド部８が突出することがないようにして、多関節ロボット１の旋回半径を小さくすることができる。
特開２００１−２７４２１８（第４頁〜５頁、図１、図２） Conventional articulated robots have been proposed that reduce the turning radius of the articulated robot when the pedestal is rotated by offsetting the rotational center of the shoulder joint and the rotational center of the pedestal (for example, , See Patent Document 1).
As shown in FIG. 5, the conventional articulated robot 1 includes two sets of arms 2 that are rotatably connected by joint portions 3, 4, and 5 to transmit a rotational force from a rotational drive source and perform a desired operation. Therefore, the rotation center axis of the joint portion 3 at the base end provided on the two sets of arms 2 is arranged vertically (or axially).
The articulated robot 1 is provided with two sets of arms 2, one arm drive type device 2 is used for supplying and the other is used for taking out, and the supply operation of the workpiece 9 and the extraction operation of another workpiece 9 are performed simultaneously. It is possible.
Further, the conventional articulated robot 1 is configured such that the hand portion 8 that holds the workpiece 9 by the arm 2 can linearly move in the direction of taking out and supplying the workpiece 9 indicated by an arrow X in the figure.
Further, the conventional articulated robot 1 includes a moving member 11 (hereinafter, referred to as a vertical movement mechanism 11) that moves the support member 10 provided with the arm 2 up and down, and can adjust the vertical position of the arm 2. It is said. The pedestal 13 of the vertical movement mechanism 11 is provided so as to be rotatable so that the articulated robot 1 can be turned to change its direction.
Further, in the articulated robot 1 of the present embodiment, the base 13 is mounted on the base 14 in the direction indicated by the arrow Y in the drawing, that is, in the direction orthogonal to the moving direction of the hand portion 8 and the vertical moving direction of the support member 10. The position of the vertical movement mechanism 11 can be adjusted.
Further, the two sets of arms 2 provided in the conventional articulated robot 1 have, for example, a plurality of joint portions, that is, the articulated robot 1 is configured as a horizontal articulated robot. The arm 2 in this embodiment includes a first arm 6 (hereinafter referred to as the upper arm 6), a second arm 7 (hereinafter referred to as the forearm 7) connected to the upper arm 6, and a work 9 connected to the forearm 7. And a hand portion 8 for holding the.
The base end of the upper arm 6 is connected to the support member 10 via a drive shaft, and constitutes a rotatable joint 3 (hereinafter referred to as a shoulder joint 3). This shoulder joint 3 becomes the joint 3 at the base end of the arm 2. Further, the distal end of the upper arm 6 and the proximal end of the forearm 7 are connected via a drive shaft to constitute a rotatable joint 4 (hereinafter referred to as an elbow joint 4). Further, the tip of the forearm 7 and the hand portion 8 are connected via a drive shaft to constitute a rotatable joint portion 5 (hereinafter referred to as a hand joint portion 5). It arrange | positions so that it may face in the up-down direction so that the rotation center axis | shaft of the shoulder joint part 3 may be coaxial.
The arm 2 rotates the shoulder joint 3, the elbow joint 4, and the hand joint 5 by a rotation drive source (not shown), and moves the hand 8 in the workpiece take-out / supply direction. At this time, in the arm 2, due to the mechanism, the hand portion 8 faces in one direction, the extended position where the upper arm 6 and the forearm 7 are fully extended, and the contracted position where the upper arm 6 and the forearm 7 are folded. The telescopic movement is performed so as to move in a straight line.
Here, the conventional articulated robot 1 is designed so that the center of the work 9 held by the hand portion 8 coincides with the rotation center of the pedestal 13 at the retracted position of the arm 2 shown in FIG. ing. Further, when the pedestal 13 is rotated by offsetting the rotation center of the shoulder joint portion 4 and the rotation center of the pedestal 13 in a direction orthogonal to the moving direction of the hand portion 8, it is necessary around the multi-joint robot 1. The turning radius of the articulated robot 1 can be reduced by preventing the elbow joint 4 and the hand 8 from projecting from the minimum region circle 15.
JP-A-2001-274218 (pages 4 to 5, FIGS. 1 and 2)

液晶用のガラス基板や半導体ウェハ等の薄板状のワークをストッカに出し入れする多関節ロボットは大型化が進み、処理する基板の枚数も増えるとともに短時間で処理することが求められ、さらには基板の歩留まりを上げるためにロボットからの発塵を極力抑えることが要求されている。このためロボットには、基板を配置するストッカが天井に届くほどの高さになるまで設備自体が大型化するにも関わらず、高速、高精度、低発塵を実現することが大きな課題となっている。一方、大型化する設備は、周囲のクリーン度を清浄に保つために多額の設備投資が必要となっており、そのためにストッカにはより多くの基板を配置させ、処理することが望まれている。また、多関節ロボットにはフットプリントを小さくして、工場に配置する装置との干渉がないように旋回半径を小さくすることも望まれている。
また、液晶基板や半導体ウェハの生産枚数は、年々多くなっており、生産性を上げるためにロボットには、搬送する-プットが求められている。しかしながら、ロボットは機械部品を含んでいるためにメンテナンスが必要であり、メンテナンス時間もスループットに関わる大きなファクタとなっており、容易にメンテナンスできることが望まれている。
しかしながら、従来の多関節ロボットは、アーム基端が移動面から突出して搬送基板に対向するように配置された構造であるために、上下移動機構からの発塵を防ぐことができないことから細かな塵が基板上に堆積する等の問題が生じていた。
また、アームが上下移動機構により下方へ移動した場合、アームの支持部材は、台座と衝突するために上下移動機構の最下面まで移動することができず、可動範囲が狭くなるという問題が生じ、液晶基板や半導体ウェハを出し入れするストッカの高さが高くなるという問題が生じていた。さらに言うと、ストッカの高さは工場建物の高さに制限されるために、配置されるパネルや基板の枚数は、上下移動機構の可動範囲が狭くなることで少なくなり、生産性を低下させる問題が生じることになっている。
また、アーム基端にはモータやプーリなどがあるために、上下方向に厚い構造となっている。このために、ストッカ内の液晶基板や半導体基板を配置する間隔を広く取らざるを得なる問題が生じていた。つまり、ストッカ内に配置できるパネルや基板の枚数が少なくなることから生産性が低下すると言う問題が生じていた。これを回避するために、上下移動機構で出し入れする時にアームの高さを変えることが考えられるが、この場合は、アームを上下に移動させるシーケンスを繰り返すために時間がかかり、作業時間が長くなる等の問題が生じていた。
また、従来の多関節ロボットは、アーム基端が上下に同軸に配置された構造となっている。このために、アーム基端に配置された機構部品であるモータやプーリの交換を行うためには、片方のアームを取り外した後に交換する等の方法を取らざるを得ないため、メンテナンス時間が膨大に係り、生産性が低下するという問題が生じていた。
また、従来の多関節ロボットは、1つのコラム上を移動機構により支持部材が移動するために、ストッカが天井に届くほど高くなると、必然的にコラム長を長くする必要があり、剛性が低下するとともに、内部に配置された移動機構の案内機構もコラム長に合わせた長さにする必要がある。しかしながら、案内機構を長くする場合、案内精度が長くすることで低下するために移動機構で移動される支持部材の移動精度が低下し、アーム先端のハンド部８に載置された液晶基板や半導体ウェハの位置決め精度が低下することになり、ストッカに基板やウェハが衝突することが起こることから歩留まりの低下をまねくという問題が生じていた。
本発明はこのような問題点に鑑みてなされたものであり、上下移動軸からの発塵による基板の汚染を防止するとともに、生産性を向上させた液晶用のガラス基板や半導体ウェハ等の薄板状のワークをストッカに出し入れする多関節ロボットを提供することを目的とする。 Articulated robots that take in and out thin-plate workpieces such as liquid crystal glass substrates and semiconductor wafers into and out of stockers are required to be processed in a short time as the number of substrates to be processed increases and the number of substrates to be processed further increases. In order to increase the yield, it is required to suppress dust generation from the robot as much as possible. For this reason, it is a major challenge for robots to achieve high speed, high accuracy, and low dust generation despite the fact that the equipment itself increases in size until the stocker on which the board is placed reaches the ceiling. ing. On the other hand, large-scale equipment requires a large amount of capital investment in order to keep the cleanliness of the surroundings clean. For this reason, it is desirable to arrange and process more substrates in the stocker. . In addition, it is also desired that the articulated robot has a small footprint and a small turning radius so as not to interfere with a device placed in a factory.
In addition, the number of liquid crystal substrates and semiconductor wafers produced is increasing year by year, and robots are required to have a transfer-put to increase productivity. However, since the robot includes mechanical parts, maintenance is required, and the maintenance time is a large factor related to the throughput, and it is desired that the robot can be easily maintained.
However, since the conventional articulated robot has a structure in which the base end of the arm protrudes from the moving surface and faces the transfer substrate, dust generation from the vertical movement mechanism cannot be prevented. There has been a problem that dust accumulates on the substrate.
Further, when the arm is moved downward by the vertical movement mechanism, the support member of the arm cannot move to the lowermost surface of the vertical movement mechanism because it collides with the pedestal, and there is a problem that the movable range becomes narrow, There has been a problem that the height of the stocker for taking in and out the liquid crystal substrate and the semiconductor wafer is increased. Furthermore, since the height of the stocker is limited to the height of the factory building, the number of panels and boards to be arranged decreases as the movable range of the vertical movement mechanism becomes narrower, reducing productivity. A problem is to arise.
Further, since the arm base end has a motor, a pulley and the like, it has a thick structure in the vertical direction. For this reason, there has been a problem that a wide interval is required for arranging the liquid crystal substrate and the semiconductor substrate in the stocker. That is, there has been a problem that productivity is lowered because the number of panels and substrates that can be arranged in the stocker is reduced. In order to avoid this, it is conceivable to change the height of the arm when the vertical movement mechanism is taken in and out, but in this case, it takes time to repeat the sequence of moving the arm up and down, and the work time becomes longer. Etc. had occurred.
Further, the conventional articulated robot has a structure in which the arm base ends are arranged coaxially in the vertical direction. For this reason, in order to replace the motor or pulley, which is a mechanical component arranged at the base end of the arm, it is necessary to take a method such as replacing it after removing one arm, so the maintenance time is enormous. However, there has been a problem that productivity is lowered.
Further, in the conventional articulated robot, since the support member moves on one column by the moving mechanism, if the stocker becomes high enough to reach the ceiling, the column length must be increased, and the rigidity is reduced. At the same time, the guide mechanism of the moving mechanism arranged inside needs to have a length corresponding to the column length. However, when the guide mechanism is lengthened, since the guide accuracy is lowered, the movement accuracy of the support member moved by the moving mechanism is lowered, and the liquid crystal substrate or semiconductor placed on the hand portion 8 at the end of the arm is reduced. As a result, the wafer positioning accuracy is lowered, and the substrate and the wafer collide with the stocker, resulting in a problem that the yield is lowered.
The present invention has been made in view of such problems, and prevents the substrate from being contaminated by dust generated from the vertical movement shaft, and improves the productivity of thin substrates such as glass substrates for liquid crystals and semiconductor wafers. An object of the present invention is to provide an articulated robot that takes a workpiece into and out of the stocker.

上記問題を解決するため、本発明は、次のように構成したものである。
請求項１に記載の発明は、搬送物を載置するハンド部と、前記ハンド部と連結され、少なくとも２つ以上の回転関節を備え、前記ハンド部をワークの取り出しおよび供給方向に直線移動するように伸縮し、軸方向に対向するように配置された多関節アームと、前記多関節アームと上下に移動するコラムに取り付けられた移動機構とを連結する支持部材と、前記移動機構に備えられた旋回機能を有する台座とからなる多関節ロボットにおいて、前記コラムが、複数個のブロックが連結された構造のものである。
請求項２に記載の発明は、前記コラムのブロックには、前記移動機構の案内機構の配置を調整する開口部を備えたものである。
請求項３に記載の発明は、前記コラムのブロックの連結部は、嵌合構造が形成されたものである。
請求項４に記載の発明は、前記移動機構が、前記ハンド部の移動方向と同方向にコラムに配置され、前記移動機構に配置された支持部材は、前記ハンド部の移動方向に直交する方向に突出し、前記多関節アームと連結されたものである。
請求項５に記載の発明は、前記支持部材が、前記移動機構により前記コラムの最下位置に移動されたときに前記台座に干渉しないように前記ハンド部の移動方向にオフセットした形状に形成されたものである。
請求項６に記載の発明は、上下に配置された前記支持部材の前記回転関節が、相対的にオフセットした位置に配置されたものである。
請求項７に記載の発明は、上下に配置された前記支持部材の前記回転関節のいずれか一方が、相対的に前記ハンド部の移動方向にオフセットした位置に配置されたものである。
請求項８に記載の発明は、上下に配置された前記支持部材の前記回転関節の下側に配置された前記回転関節が、上側の前記回転関節に対して、前記ハンド部の移動方向にオフセットした位置に配置されたものである。
請求項９に記載の発明は、前記移動機構がシールド機能を有するものである。
請求項１０に記載の発明は、前記支持部材に配置された前記回転関節の回転中心と、ハンド部の回転中心と、台座の回転中心とがハンド部の移動方向の軸線上に一致するようにオフセットするように形成されたものである。
請求項１１に記載の発明は、前記回転関節の回転中心と、ハンド部の回転中心と、台座の回転中心との位置関係が、前記ハンド部を引き込むように移動させた際に、ハンド部の移動方向関する軸線上に前方から前記回転関節の回転中心、台座の回転中心、ハンド部の回転中心の順番で配置されるように形成されたものである。 In order to solve the above problems, the present invention is configured as follows.
The invention according to claim 1 is connected to the hand unit for placing the conveyed product and the hand unit, and includes at least two or more rotary joints, and linearly moves the hand unit in the workpiece take-out and supply direction. And a support member for connecting the multi-joint arm arranged so as to be opposed to each other in the axial direction, the multi-joint arm and a moving mechanism attached to a column that moves up and down, and the moving mechanism. In the articulated robot comprising a pedestal having a turning function, the column has a structure in which a plurality of blocks are connected.
According to a second aspect of the present invention, the column block is provided with an opening for adjusting the arrangement of the guide mechanism of the moving mechanism.
According to a third aspect of the present invention, the connecting portion of the column block is formed with a fitting structure.
According to a fourth aspect of the present invention, the moving mechanism is arranged in the column in the same direction as the moving direction of the hand part, and the support member arranged in the moving mechanism is a direction orthogonal to the moving direction of the hand part. And connected to the articulated arm.
According to a fifth aspect of the present invention, the support member is formed in a shape offset in the moving direction of the hand portion so as not to interfere with the pedestal when the support mechanism is moved to the lowest position of the column. It is a thing.
The invention according to claim 6 is such that the rotary joints of the support members arranged above and below are arranged at a relatively offset position.
According to the seventh aspect of the present invention, any one of the rotary joints of the support members disposed above and below is disposed at a position that is relatively offset in the moving direction of the hand portion.
In the invention according to claim 8, the rotary joint arranged below the rotary joint of the support member arranged above and below is offset in the moving direction of the hand unit with respect to the upper rotary joint. It is arranged at the position.
According to a ninth aspect of the present invention, the moving mechanism has a shield function.
According to a tenth aspect of the present invention, the rotation center of the rotary joint arranged on the support member, the rotation center of the hand unit, and the rotation center of the pedestal coincide with each other on an axis in the movement direction of the hand unit. It is formed so as to be offset.
According to an eleventh aspect of the present invention, when the positional relationship between the rotation center of the rotary joint, the rotation center of the hand unit, and the rotation center of the pedestal is moved so as to retract the hand unit, The rotation center of the rotary joint, the rotation center of the pedestal, and the rotation center of the hand unit are arranged in this order on the axis related to the movement direction from the front.

請求項１から３に記載の発明によると、前記コラムは、複数個のブロックが連結された構造にしたことから、工場の天井に届くほど高いストッカにもブロックのコラムを連結することで対応できるとともに、長くなる移動機構の案内機構についても案内精度を低下することがないので、移動機構で移動される支持部材の移動精度も低下することがない。このためにハンドに載置された液晶基板や半導体ウェハの位置決め精度も低下することなく搬送され、ストッカに基板やウェハの衝突による歩留まりの低下をまねくこともない。
請求項４から９に記載の発明によると、移動機構が、ハンド部の移動方向と同方向にコラムに配置され、移動機構に配置された支持部材は、ハンド部の移動方向に直交する方向に突出し、前記多関節アームと連結された構造であることから、摺動部が液晶基板や半導体ウェハに対面することがなく配置されており、摺動部からの発塵は直接液晶基板や半導体ウェハに堆積することがないことから、液晶基板や半導体ウェハの汚染を低減できるとともに、基板やウェハの生産上の歩留まりを向上させることができる。
請求項５に記載の発明によると、支持部材は、前記移動機構により前記コラムの最下位置に移動されたときに前記台座に干渉しないように前記ハンド部の移動方向にオフセットした形状に形成されたことにより、支持部材は台座と衝突することなく、上下移動機構の最下面まで移動することができ、可動範囲を広くすることができる。このため、液晶基板や半導体ウェハを出し入れするストッカの高さが高くしなくても、ストッカ下部にも液晶基板や半導体ウェハを配置できるようになり、基板やウェハの枚数は、上下移動機構の可動範囲を広くできることから、多く配置できるようになる。このようなことから工場全体の生産性は高められることになる。
請求項６から９に記載の発明によると、上下に配置された前記支持部材の前記回転関節が、相対的にオフセットした位置に配置されたことで、
請求項１０および１１に記載の発明によると、前記支持部材に配置された前記回転関節の回転中心と、ハンド部の回転中心と、台座の回転中心とがハンド部の移動方向の軸線上に一致するようにオフセットするように形成されたことで、ハンドが液晶基板や半導体ウェハを引き込んだ位置に来た場合、台座の回転機能により旋回しても基板やウェハの旋回半径から突出することなく旋回できるので、フットプリントを小さくして、工場に配置する装置との干渉がないようにロボットを配置できる。 According to the invention described in claims 1 to 3, since the column has a structure in which a plurality of blocks are connected to each other, it is possible to cope by connecting the column of the block to a stocker that is high enough to reach the ceiling of the factory. At the same time, since the guide accuracy of the longer moving mechanism is not lowered, the moving accuracy of the support member moved by the moving mechanism is not lowered. Therefore, the positioning accuracy of the liquid crystal substrate and the semiconductor wafer placed on the hand is transported without deteriorating, and the yield of the stocker due to the collision of the substrate and the wafer is not reduced.
According to invention of Claim 4-9, a moving mechanism is arrange | positioned at the column in the same direction as the movement direction of a hand part, and the support member arrange | positioned at a movement mechanism is in the direction orthogonal to the movement direction of a hand part. Since it protrudes and is connected to the articulated arm, the sliding part is arranged without facing the liquid crystal substrate or semiconductor wafer, and the dust generated from the sliding part is directly on the liquid crystal substrate or semiconductor wafer. Therefore, the contamination of the liquid crystal substrate and the semiconductor wafer can be reduced and the production yield of the substrate and the wafer can be improved.
According to the invention described in claim 5, the support member is formed in a shape offset in the moving direction of the hand portion so as not to interfere with the pedestal when moved to the lowest position of the column by the moving mechanism. Thus, the support member can move to the lowermost surface of the vertical movement mechanism without colliding with the pedestal, and the movable range can be widened. For this reason, even if the height of the stocker for loading and unloading the liquid crystal substrate and semiconductor wafer is not increased, the liquid crystal substrate and the semiconductor wafer can be arranged below the stocker. Since the range can be widened, many can be arranged. For this reason, the productivity of the entire factory can be improved.
According to the invention described in claims 6 to 9, when the rotary joints of the support members arranged above and below are arranged at a relatively offset position,
According to invention of Claim 10 and 11, the rotation center of the said rotation joint arrange | positioned at the said supporting member, the rotation center of a hand part, and the rotation center of a base correspond on the axis line of the moving direction of a hand part. When the hand comes to the position where the liquid crystal substrate or the semiconductor wafer is pulled in, it is swung without protruding from the turning radius of the substrate or the wafer even if it is swung by the rotation function of the pedestal. Because it can, the footprint can be reduced and the robot can be placed so that there is no interference with the equipment placed in the factory.

以下、本発明の実施の形態について図を参照して説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図１は、本発明の多関節ロボットの斜視図である。図２は、本発明の多関節ロボットの上面図である。図３は本発明の多関節ロボットの正面図である。
本発明の多関節ロボット１は、図示しないストッカの高層化に対応するために複数ブロックに分けられたコラム１２が連結された構造となっている。このように各コラムブロック１６を順次連結することで高層に対応した高さをもつ多関節ロボット１を形成している。本実施例では、４つのコラムブロック１６が連結された構造となっている。各コラムブロック１６の両端面は、コラムブロック１６間が連結されるように嵌合構造となっており、さらに、リニアガイドからなる案内機構を精度良く配置するために図示しない位置決め穴を有し、位置決め冶具を用いて調整することで組み立てられる。
また、本発明の多関節ロボット１は、関節部３，４，５により回転可能に連結されて回転駆動源よる回転力を伝達し所望の動作をさせるアーム２を二組備えている。また、アーム２によりワーク９を保持するハンド部８は図中矢印Ｘで示すワーク９の取り出し・供給方向に直線移動可能であるように構成される。また、二組のアーム２に設けられる基端の関節部３の回転中心軸の関係は、図２に示すように、上アーム２１の基端の関節部３に対してハンド部８の移動方向にずれるように下アーム２２の基端の関節部３が配置するように構成されている。
また、アーム２が設けられている支持部材１０を上下に移動させる上下移動部材１１を備えて、アーム２の上下位置を調整可能としている。また、上下移動機構１１の台座１３は回動可能に設けられ、多関節ロボット１を旋回して向きを変えられるようにしている。ここで、上下移動機構１１は、ハンド部８の移動方向と同方向に配置され、支持部材１０は上下駆動機構１１からハンド部８の移動方向に対して直交する方向に突出し、アーム２の基端の関節部３に連結されている。また、下アーム２２に連結する支持部材１０は、アーム２が上下移動機構１１により下方へ移動した際に、台座１３に干渉しないように図２に示すようにハンド部８の移動方向にオフセットした形状を形成している。また、上下移動機構１１は、図示しないシールド機能を有する保護カバーで覆われ、コラム１２内部からの発塵を抑制している。
本発明が特許文献１と異なる部分は、上下移動機構がハンド部の移動方向と同方向に配置され、上下移動機構とアーム２の基端の関節部とを連結する支持部材１０がハンド部の移動方向に直交するように突出し、かつ下アーム２２と連結する支持部材１０が台座１３に干渉しないようにハンド部の移動方向にオフセットしたように形成された部分である。 FIG. 1 is a perspective view of an articulated robot according to the present invention. FIG. 2 is a top view of the articulated robot of the present invention. FIG. 3 is a front view of the articulated robot of the present invention.
The articulated robot 1 of the present invention has a structure in which columns 12 divided into a plurality of blocks are connected to cope with an increase in the height of a stocker (not shown). In this way, the articulated robot 1 having a height corresponding to a high layer is formed by sequentially connecting the column blocks 16. In this embodiment, four column blocks 16 are connected. Both end surfaces of each column block 16 have a fitting structure so that the column blocks 16 are connected to each other, and further have positioning holes (not shown) for accurately arranging a guide mechanism including a linear guide, It is assembled by adjusting using a positioning jig.
Further, the articulated robot 1 of the present invention includes two sets of arms 2 that are rotatably connected by the joint portions 3, 4, and 5 and transmit a rotational force from a rotational drive source to perform a desired operation. Further, the hand portion 8 that holds the workpiece 9 by the arm 2 is configured to be linearly movable in the direction of taking out and supplying the workpiece 9 indicated by an arrow X in the drawing. Further, as shown in FIG. 2, the relationship between the rotation center axes of the proximal joint portions 3 provided in the two sets of arms 2 is the movement direction of the hand portion 8 with respect to the proximal joint portion 3 of the upper arm 21. The joint portion 3 at the base end of the lower arm 22 is arranged so as to be displaced.
Moreover, the vertical movement member 11 which moves the support member 10 with which the arm 2 is provided up and down is provided, and the vertical position of the arm 2 can be adjusted. The pedestal 13 of the vertical movement mechanism 11 is provided so as to be rotatable so that the articulated robot 1 can be turned to change its direction. Here, the vertical movement mechanism 11 is arranged in the same direction as the movement direction of the hand unit 8, and the support member 10 protrudes from the vertical drive mechanism 11 in a direction orthogonal to the movement direction of the hand unit 8, It is connected to the joint portion 3 at the end. Further, the support member 10 connected to the lower arm 22 is offset in the moving direction of the hand portion 8 as shown in FIG. 2 so as not to interfere with the pedestal 13 when the arm 2 is moved downward by the vertical movement mechanism 11. Form a shape. Further, the vertical movement mechanism 11 is covered with a protective cover having a shield function (not shown) to suppress dust generation from the inside of the column 12.
The part in which the present invention is different from Patent Document 1 is that the vertical movement mechanism is arranged in the same direction as the movement direction of the hand portion, and the support member 10 that connects the vertical movement mechanism and the joint portion at the base end of the arm 2 is the hand portion. This is a portion formed so as to be perpendicular to the moving direction and offset in the moving direction of the hand portion so that the support member 10 connected to the lower arm 22 does not interfere with the base 13.

次に、動作について説明する。本発明の多関節ロボット１に備えられる二組のアーム２は、例えば、複数の関節部を有するものであり、即ち多関節ロボット１は、水平多関節型ロボットとして構成される。本実施形態でのアーム２は、従来のアーム２の構造と同様な構造を備えている。
上腕６の基端は、支持部材１０に駆動軸を介して連結されて、回動可能な肩関節部３を構成する。この肩関節部３がアーム２の基端の関節部３となる。また、上腕６の先端と前腕７の基端とが駆動軸を介して連結されて、回動可能な肘関節部４を構成する。また、前腕７の先端とハンド部８とが駆動軸を介して連結されて、回動可能なハンド関節部５を構成する。
アーム２は、図示しない回転駆動源により肩関節部３と肘関節部４とハンド関節部５とを回動させて、ハンド部８をワーク取り出し・供給方向に移動させる。この際、アーム２では、その機構上、ハンド部８が一方向を向いて、上腕６と前腕７とを伸ばしきった伸長位置と、上腕６と前腕７とを折り畳んだ状態とした縮み位置との間を直線移動するように、伸縮動作を行う。 Next, the operation will be described. The two sets of arms 2 provided in the articulated robot 1 of the present invention have, for example, a plurality of joints, that is, the articulated robot 1 is configured as a horizontal articulated robot. The arm 2 in the present embodiment has a structure similar to that of the conventional arm 2.
The base end of the upper arm 6 is connected to the support member 10 via a drive shaft, and constitutes a rotatable shoulder joint 3. This shoulder joint 3 becomes the joint 3 at the base end of the arm 2. Further, the distal end of the upper arm 6 and the proximal end of the forearm 7 are connected via a drive shaft to constitute a rotatable elbow joint 4. Moreover, the front-end | tip of the forearm 7 and the hand part 8 are connected via the drive shaft, and the rotatable hand joint part 5 is comprised.
The arm 2 rotates the shoulder joint 3, the elbow joint 4, and the hand joint 5 by a rotation drive source (not shown), and moves the hand 8 in the workpiece take-out / supply direction. At this time, in the arm 2, due to the mechanism, the hand portion 8 faces in one direction, the extended position where the upper arm 6 and the forearm 7 are fully extended, and the contracted position where the upper arm 6 and the forearm 7 are folded. The telescopic movement is performed so as to move in a straight line.

ここで、本実施例の多関節ロボット１の旋回半径について下アーム２２を用いて説明する。図４に示すアーム２２の縮み位置において、ハンド部８により保持されるワーク９の中心が、台座１３の回転中心と一致するものとなるように設計されている。さらに、肩関節部３の回転中心と、ハンド関節部５の回転中心と、台座１３の回転中心とがハンド部８の移動方向の軸線上に一致するようにオフセットすることで台座１３を回動させる際に多関節ロボット１の周囲に必要となる最小領域円１５から肘関節部４やハンド部８が突出することがないようにして、多関節ロボット１の旋回半径を小さくすることができる。
ここでは、図面が煩雑になるのを避けるために下アームを用いて説明したが、上アーム２１についても同様に、ワーク９の中心は台座１３の回転中心と一致するように設計されており、肩関節部３、ハンド関節部５と台座１３の回転中心の位置関係も下アームと同じ構成である。
次に上下方向の動作について説明する。アーム２は、支持部材１０に取り付けられ、上下移動機構１１に上下方向に図示しないコントローラの指令により移動する。図３に示すように下方に移動する際には、支持部材１０が台座１３に衝突しないようにハンド８の移動方向にオフセットした形状を形成していることから支持部材１０は、上下移動機構１１の最下点の移動位置まで下降することが可能である。
尚、本発明では、上アームと下アームを有する多関節ロボットについて述べたが、上下いずれか一方のアームからなる多関節ロボットでも良いことは自明である。また、肩関節、肘関節とハンド関節の回転関節を有する多関節ロボットについて述べたが、ハンド関節部が固定された多関節ロボットについても同様な作用および効果を有することは当然である。 Here, the turning radius of the articulated robot 1 of the present embodiment will be described using the lower arm 22. 4 is designed so that the center of the work 9 held by the hand portion 8 coincides with the rotation center of the base 13 at the contracted position of the arm 22 shown in FIG. Further, the pedestal 13 is rotated by offsetting the rotation center of the shoulder joint portion 3, the rotation center of the hand joint portion 5, and the rotation center of the pedestal 13 so as to coincide with the axis of the movement direction of the hand portion 8. The turning radius of the articulated robot 1 can be reduced by preventing the elbow joint part 4 and the hand part 8 from protruding from the minimum area circle 15 required around the articulated robot 1 when performing the operation.
Here, in order to avoid complication of the drawing, the lower arm is used for explanation. Similarly, the upper arm 21 is designed so that the center of the workpiece 9 coincides with the rotation center of the base 13. The positional relationship of the rotation center of the shoulder joint part 3, the hand joint part 5, and the base 13 is also the same as that of the lower arm.
Next, the operation in the vertical direction will be described. The arm 2 is attached to the support member 10 and moves to the vertical movement mechanism 11 in the vertical direction according to a command from a controller (not shown). As shown in FIG. 3, since the support member 10 is offset in the moving direction of the hand 8 so that the support member 10 does not collide with the pedestal 13, the support member 10 is moved up and down 11. It is possible to descend to the lowermost point movement position.
In the present invention, an articulated robot having an upper arm and a lower arm has been described. However, it is obvious that an articulated robot composed of either one of upper and lower arms may be used. Further, although the multi-joint robot having the shoulder joint, the elbow joint and the hand joint has been described, it is natural that the multi-joint robot having the hand joint portion fixed has the same action and effect.

このようなハンド部に物品を載置して搬送することによって物品の入れ替え作業をすることができるので、厚板や箱状の物品の搬送作業という用途にも適用できる。   Since an article can be exchanged by placing the article on such a hand part and transporting it, the present invention can also be applied to a transporting work of a thick plate or a box-shaped article.

本発明の実施例を示す多関節ロボットの斜視図The perspective view of the articulated robot which shows the Example of this invention 本発明の実施例を示す多関節ロボットの上面図Top view of an articulated robot showing an embodiment of the present invention 本発明の実施例を示す多関節ロボットの正面図Front view of an articulated robot showing an embodiment of the present invention 本発明の実施例を示す多関節ロボットの旋回半径を示す図The figure which shows the turning radius of the articulated robot which shows the Example of this invention 従来の多関節ロボットの斜視図Perspective view of a conventional articulated robot 従来の多関節ロボットの旋回半径を示す図The figure which shows the turning radius of the conventional articulated robot

符号の説明Explanation of symbols

１ 多関節ロボット
２ アーム
２１ 上アーム
２２ 下アーム
３ 肩関節部
４ 肘関節部
５ ハンド関節部
６ 上腕
７ 前腕
８ ハンド部
９ ワーク
１０ 支持部材
１１ 上下移動機構
１２ コラム
１３ 台座
１４ 基台
１５ 最小領域円
１６ コラムブロック DESCRIPTION OF SYMBOLS 1 Articulated robot 2 Arm 21 Upper arm 22 Lower arm 3 Shoulder joint part 4 Elbow joint part 5 Hand joint part 6 Upper arm 7 Forearm 8 Hand part 9 Work 10 Support member 11 Vertical movement mechanism 12 Column 13 Base 14 Base 15 Minimum area Yen 16 column block

Claims (11)

搬送物を載置するハンド部と、前記ハンド部と連結され、少なくとも２つ以上の回転関節を備え、前記ハンド部をワークの取り出しおよび供給方向に直線移動するように伸縮し、軸方向に対向するように配置された多関節アームと、前記多関節アームと上下に移動するコラムに取り付けられた移動機構とを連結する支持部材と、前記移動機構に備えられた旋回機能を有する台座とからなる多関節ロボットにおいて、
前記コラムは、複数個のブロックが連結された構造にしたことを特徴とする多関節ロボット。 A hand unit for placing a conveyed product, and a hand unit connected to the hand unit, including at least two or more rotary joints, extending and contracting the hand unit so as to linearly move in the workpiece take-out and supply directions, and facing the axial direction And a support member that connects the multi-joint arm and a moving mechanism attached to the column that moves up and down, and a pedestal having a turning function provided in the moving mechanism. In an articulated robot,
The column is a multi-joint robot characterized in that a plurality of blocks are connected. 前記コラムのブロックには、前記移動機構の案内機構の配置を調整する開口部を備えたことを特徴とする請求項１に記載の多関節ロボット。   2. The articulated robot according to claim 1, wherein the column block includes an opening for adjusting the arrangement of the guide mechanism of the moving mechanism. 前記コラムのブロックの連結部は、嵌合構造が形成されたことを特徴とする請求項１記載の多関節ロボット。   The articulated robot according to claim 1, wherein the connecting portion of the column block has a fitting structure. 前記移動機構は、前記ハンド部の移動方向と同方向にコラムに配置され、前記移動機構に配置された支持部材は、前記ハンド部の移動方向に直交する方向に突出し、前記多関節アームと連結されたことを特徴とする請求項１記載の多関節ロボット。   The moving mechanism is arranged on the column in the same direction as the moving direction of the hand part, and a support member arranged on the moving mechanism protrudes in a direction perpendicular to the moving direction of the hand part and is connected to the articulated arm. The articulated robot according to claim 1, wherein 前記支持部材は、前記移動機構により前記コラムの最下位置に移動されたときに前記台座に干渉しないように前記ハンド部の移動方向にオフセットした形状に形成されたことを特徴とする請求項１に記載の多関節ロボット。   The said support member is formed in the shape offset in the moving direction of the said hand part so that it may not interfere with the said base when it moves to the lowest position of the said column by the said moving mechanism. The articulated robot described in 1. 上下に配置された前記支持部材の前記回転関節が、相対的にオフセットした位置に配置されたことを特徴とする請求項１に記載の多関節ロボット。   The articulated robot according to claim 1, wherein the rotary joints of the support members arranged vertically are arranged at positions that are relatively offset. 上下に配置された前記支持部材の前記回転関節のいずれか一方が、相対的に前記ハンド部の移動方向にオフセットした位置に配置されたことを特徴とする請求項１に記載の多関節ロボット。   The articulated robot according to claim 1, wherein any one of the rotary joints of the support members disposed above and below is disposed at a position that is relatively offset in a moving direction of the hand unit. 上下に配置された前記支持部材の前記回転関節の下側に配置された前記回転関節が、上側の前記回転関節に対して、前記ハンド部の移動方向にオフセットした位置に配置されたことを特徴とする請求項１に記載の多関節ロボット。   The rotary joint arranged below the rotary joint of the support member arranged above and below is arranged at a position offset in the moving direction of the hand unit with respect to the upper rotary joint. The articulated robot according to claim 1. 前記移動機構はシールド機能を有することを特徴とする請求項１に記載の多関節ロボット。 The articulated robot according to claim 1, wherein the moving mechanism has a shield function. 前記回転関節の回転中心と、ハンド部の回転中心と、台座の回転中心との位置関係が、前記ハンド部を引き込むように移動させた際に、ハンド部の移動方向関する軸線上に前方から前記回転関節の回転中心、台座の回転中心、ハンド部の回転中心の順番で配置されるように形成されたことを特徴とする請求項１に記載の多関節ロボット。   When the positional relationship between the rotation center of the rotary joint, the rotation center of the hand unit, and the rotation center of the pedestal is moved so as to retract the hand unit, it is The articulated robot according to claim 1, wherein the multi-joint robot is configured to be arranged in the order of a rotation center of a rotary joint, a rotation center of a pedestal, and a rotation center of a hand unit. 前記支持部材に配置された前記回転関節の回転中心と、ハンド部の回転中心と、台座の回転中心とがハンド部の移動方向の軸線上に一致するようにオフセットするように形成されたことを特徴とする請求項１に記載の多関節ロボット。   The rotation center of the rotary joint arranged on the support member, the rotation center of the hand unit, and the rotation center of the pedestal are formed so as to be offset so as to coincide with the axis of the movement direction of the hand unit. The articulated robot according to claim 1.
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