JP2005161627A

JP2005161627A - Conductive sheetlike elastomer and its manufacturing method

Info

Publication number: JP2005161627A
Application number: JP2003402152A
Authority: JP
Inventors: Masashi Sato; 正史佐藤; Nami Kato; 奈美加藤
Original assignee: Inoue MTP KK; Inoac Corp; Rogers Inoac Corp
Current assignee: Inoac Corp; Rogers Inoac Corp
Priority date: 2003-12-01
Filing date: 2003-12-01
Publication date: 2005-06-23

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conductive sheetlike elastomer together having various physical properties required in packing and conductivity sufficient to prevent charging and excellent in mass productivity. <P>SOLUTION: This conductive sheetlike elastomer is composed of a sheetlike elastic substrate 12 and a conductive layer 16 formed at least on one side of the sheetlike elastic substrate 12 by metallizing one side of the sheetlike elastic substrate 12. The conductive layer 16 is constituted so as to be transferred to the sheetlike elastic substrate 12 in a laminar state by laminating the metal vapor-deposited on a separately prepared base material 18 at least on one side of the sheetlike elastic substrate 12 and subsequently removing the base material 18. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

この発明は、導電性シート状弾性体およびその製造方法に関し、更に詳細には、導電性を有して電子機器や精密機器等のガスケットまたはパッキン等といったシール材として好適に使用され、導電性を備えることで帯電を防止し得ると共に、量産性に優れた導電性シート状弾性体と、該導電性シート状弾性体の製造方法に関するものである。 The present invention relates to a conductive sheet-like elastic body and a method for producing the same, and more specifically, has conductivity and is suitably used as a sealing material such as a gasket or packing for electronic equipment, precision equipment, etc. The present invention relates to a conductive sheet-like elastic body that can prevent electrification and is excellent in mass productivity, and a method for producing the conductive sheet-like elastic body.

携帯電話，テレビ，その他コンピュータのディスプレイ等の電気機器には，液晶等の表示部，マイク部、その他スピーカー部等の入出力部が配設されている。このような入出力部は、電気機器筐体が外部に対して開口した部位に設けられており、例えば液晶の場合、この開口部と液晶との僅かな隙間から、ゴミの侵入，液晶表示に用いられるバックライトの光漏れおよび筐体に対するガタつき等を防止するためのパッキンが液晶の周縁と筐体との間に配設されている。このパッキンに用いられる材料は通常，絶縁体であるため、前記パッキンは静電気が帯電し易い。このような状態では、液晶等に対して静電気の放電による、所謂静電気破壊等の悪影響を及ぼす虞がある。この他，静電気によってその周囲の入出力部および筐体に，ゴミ、粉塵、その他埃が付着するという問題も指摘される。 A display unit such as a liquid crystal display, a microphone unit, and other input / output units such as a speaker unit are disposed in an electric device such as a mobile phone, a television, and other computer displays. Such an input / output unit is provided in a portion where the electrical equipment casing is opened to the outside. For example, in the case of liquid crystal, the intrusion of dust and liquid crystal display is performed through a slight gap between the opening and the liquid crystal. A packing for preventing light leakage of the backlight used and rattling of the casing is disposed between the periphery of the liquid crystal and the casing. Since the material used for the packing is usually an insulator, the packing is easily charged with static electricity. In such a state, there is a risk of adverse effects such as so-called electrostatic breakdown caused by electrostatic discharge on the liquid crystal or the like. In addition, there is a problem that dust, dust, and other dust adhere to the surrounding input / output unit and casing due to static electricity.

このような問題に対してパッキンの原料中に，例えばカーボンブラック，カーボンファイバー等の電子伝導系の導電性フィラーやカチオン系または非イオン系等の界面活性剤等の導電性物質を混入して，導電性を付与し、これにより帯電を防止する方法が一般的に採用されている。この方法の場合、帯電を充分に防止し得る程度に前記パッキンの導電性を高めるには，多量の導電性フィラーを使用し、かつパッキン中に均質に分散させる必要があるが、多量の導電性物質の使用によりパッキンの成形性や引張強度等の諸物性が低下する問題が生ずる。この他、パッキンの表面に対して、金属箔等の導電性シートを一体成形または粘着剤や接着剤等により一体化して導電性を付与する方法もあるが、この場合，導電性シートの剛性故にパッキンの弾力性や柔軟性が損なわれてしまう。このような問題に対して本願発明者は、下記の特許文献１に示す発明「帯電防止パッキン材」を案出している。この帯電防止パッキン材は、弾力性等を備える有する基材シートに対して，その表側面に金属等の酸化物をスパッタリングすることにより導電性を有するスパッタリング層８９(図１２参照)を形成し、これにより前述した各問題を回避し得るよう構成されている。 In order to solve such a problem, a conductive material such as an electron conductive filler such as carbon black or carbon fiber or a cationic or nonionic surfactant is mixed in the packing material, A method of imparting conductivity and thereby preventing electrification is generally employed. In this method, in order to increase the conductivity of the packing to such an extent that charging can be sufficiently prevented, it is necessary to use a large amount of conductive filler and disperse it uniformly in the packing. There is a problem that the physical properties such as the moldability and tensile strength of the packing are lowered due to the use of the substance. In addition, there is also a method of imparting conductivity by integrally forming a conductive sheet such as a metal foil on the surface of the packing or by integrating with a pressure sensitive adhesive or an adhesive, but in this case, because of the rigidity of the conductive sheet The elasticity and flexibility of the packing will be lost. In order to solve such a problem, the present inventor has devised an invention “antistatic packing material” shown in Patent Document 1 below. This antistatic packing material forms a sputtering layer 89 (see FIG. 12) having conductivity by sputtering an oxide such as metal on the front side surface of a base sheet having elasticity and the like, Thus, the above-described problems can be avoided.

しかし、特許文献１に開示される発明「帯電防止パッキン材」には以下の問題が指摘される。すなわち、
(１)「帯電防止パッキン材」は、図１２に示す如く、基材シート８８を巻回した送出ドラム８２と，巻取ドラム８４と，冷却ドラム８６とをチャンバー８１内に備えるスパッタリング装置８０によって、その系全体が一定以上の真空状態とされた基材シート８８に対して、冷却ドラム８６の下方に配置されたスパッタリング金属であるステンレス鋼からなるターゲット８７によりスパッタリングを行ない、その表面にスパッタリング層８９を形成することで製造される。このためチャンバー８１の大きさにより一度に収納可能な基材シート８８の量、すなわち一度に加工可能な基材シート８８の量が限定されると共に、バッチ式の生産となるため、量産性に乏しい。
(２)前述の如く、スパッタリングは一定以上の真空状態によって実施されるが、パッキン機能を備える基材シート８８は、多数のセルを備える発泡体から構成されているため、セル内部に存在する水分およびガス等の吸引に時間が掛かり、やはり量産性が非常に低いものとなる。またセル内に存在する水分およびガス等は、スパッタリング層８９の安定的な形成の阻害要因であるため、この点からも真空状態とするための吸引を充分に実施する必要がある。この問題は、スパッタリング装置８０内に基材シート８８を収納するに先立ち、基材シート８８に対して乾燥炉等を使用した加熱乾燥を実施することで回避されるが、その場合、加熱乾燥に使用する別途機材および工程が必要となるため量産性の向上は期待できない。
特開２００３−４２０９６号公報 However, the following problems are pointed out in the invention “antistatic packing material” disclosed in Patent Document 1. That is,
(1) As shown in FIG. 12, the “antistatic packing material” is produced by a sputtering apparatus 80 including a delivery drum 82 around which a base sheet 88 is wound, a take-up drum 84, and a cooling drum 86. The base material sheet 88 whose entire system is in a vacuum state above a certain level is sputtered by a target 87 made of stainless steel, which is a sputtering metal disposed below the cooling drum 86, and a sputtering layer is formed on the surface thereof. It is manufactured by forming 89. For this reason, the amount of the base sheet 88 that can be stored at one time, that is, the amount of the base sheet 88 that can be processed at one time is limited depending on the size of the chamber 81, and batch production is performed, so that mass productivity is poor. .
(2) As described above, sputtering is performed in a vacuum state of a certain level or more. However, since the base sheet 88 having a packing function is composed of a foam having a large number of cells, moisture present in the cells is present. In addition, it takes time to suck gas and the like, and the mass productivity is very low. In addition, since moisture, gas, and the like present in the cell are factors that hinder the stable formation of the sputtering layer 89, it is necessary to sufficiently perform suction in order to achieve a vacuum state. This problem can be avoided by carrying out heat drying using a drying furnace or the like on the base material sheet 88 prior to housing the base material sheet 88 in the sputtering apparatus 80. Since additional equipment and processes to be used are required, improvement in mass productivity cannot be expected.
JP 2003-42096 A

前記課題を克服し、所期の目的を達成するため、本発明に係る導電性シート状弾性体は、所要の弾性を発現するシート状弾性基体と、
このシート状弾性基体の少なくとも一方の表面に金属を蒸着して形成した導電層とからなり、
前記導電層は、別途用意した基材フィルム上に蒸着した後、前記シート状弾性基体の少なくとも一方の表面に積層し、該基材フィルムを除去することで該シート状弾性基体に積層的に転写されていることを特徴とする In order to overcome the above-mentioned problems and achieve the intended purpose, the conductive sheet-like elastic body according to the present invention comprises a sheet-like elastic substrate that exhibits the required elasticity,
It consists of a conductive layer formed by vapor-depositing metal on at least one surface of this sheet-like elastic substrate,
The conductive layer is deposited on a separately prepared substrate film, and then laminated on at least one surface of the sheet-like elastic substrate, and the substrate film is removed to transfer the sheet layer to the sheet-like elastic substrate. It is characterized by being

前記課題を克服し、所期の目的を達成するため、本願の別の発明に係る導電性シート状弾性体は製造方法は、所定厚みのシート状弾性基体と、基材フィルムの一方の表面に離型剤を介して金属の導電層を蒸着した導電層転写用フィルムとを準備し、
前記シート状弾性基体および導電層転写用フィルムを、該シート状弾性基体と前記導電層とが対向するよう接着剤を介して接合し、
前記導電層から基材フィルムを剥離することで、該シート状弾性基体に導電層が転写された導電性シート状弾性体を製造することを特徴とする。 In order to overcome the above-mentioned problems and achieve the intended purpose, a conductive sheet-like elastic body according to another invention of the present application is a method for producing a sheet-like elastic substrate having a predetermined thickness on one surface of a base film. Prepare a conductive layer transfer film vapor-deposited metal conductive layer through a release agent,
The sheet-like elastic substrate and the conductive layer transfer film are bonded via an adhesive so that the sheet-like elastic substrate and the conductive layer face each other,
By peeling the substrate film from the conductive layer, a conductive sheet-like elastic body in which the conductive layer is transferred to the sheet-like elastic substrate is produced.

前記課題を克服し、所期の目的を達成するため、本願の更に別の発明に係る導電性シート状弾性体の製造方法は、予め基材フィルムの一方の表面に、離型剤を介して金属を蒸着して導電層を形成した導電層転写用フィルムを準備し、
所要の弾性基体原料を前記導電層転写用フィルムの導電層側に上方から供給し、
前記供給された弾性基体原料の反応および硬化を進行させることで、前記導電層上に所定厚みのシート状弾性基体を形成し、
前記導電層にシート状弾性基体が接合された後に、該導電層から基材フィルムを剥離することで、該シート状弾性基体に導電層が積層的に転写された導電性シート状弾性体を製造するようにしたことを特徴とする。 In order to overcome the above-mentioned problems and achieve the intended object, a method for producing a conductive sheet-like elastic body according to still another invention of the present application is applied in advance to one surface of a substrate film via a release agent. Prepare a conductive layer transfer film in which a metal is deposited to form a conductive layer,
Supply the required elastic substrate material from above to the conductive layer side of the conductive layer transfer film,
By proceeding with the reaction and curing of the supplied elastic substrate material, a sheet-like elastic substrate having a predetermined thickness is formed on the conductive layer,
After the sheet-like elastic substrate is bonded to the conductive layer, the substrate film is peeled off from the conductive layer to produce a conductive sheet-like elastic body in which the conductive layer is transferred in a laminated manner to the sheet-like elastic substrate. It was made to do.

前記課題を克服し、所期の目的を達成するため、本願の更に別の発明に係る導電性シート状弾性体の製造方法は、予め基材フィルムの一方の表面に、離型剤を介して金属を蒸着して導電層を形成した導電層転写用フィルムを準備し、
所要の弾性基体原料を該導電層転写用フィルムの導電層側に上方から供給し、
次いで前記導電層上に供給された弾性基体原料に対して、別の導電層転写用フィルムを、該弾性基体原料と導電層とが対向するように連続的に供給し、
前記供給された弾性基体原料の反応および硬化を進行させることで、その両表面に前記導電層が接合された所定厚みのシート状弾性基体を形成し、
前記シート状弾性基体と、その両表面に存在する導電層とが接合された後に、該２つの導電層から基材フィルムを夫々剥離することで、該シート状弾性基体の両表面に導電層が積層的に転写された導電性シート状弾性体を製造するようにしたことを特徴とする。 In order to overcome the above-mentioned problems and achieve the intended object, a method for producing a conductive sheet-like elastic body according to still another invention of the present application is applied in advance to one surface of a substrate film via a release agent. Prepare a conductive layer transfer film in which a metal is deposited to form a conductive layer,
Supply the required elastic substrate material from above to the conductive layer side of the conductive layer transfer film,
Next, another conductive layer transfer film is continuously supplied to the elastic base material supplied onto the conductive layer so that the elastic base material and the conductive layer face each other,
By proceeding with the reaction and curing of the supplied elastic substrate raw material, a sheet-like elastic substrate having a predetermined thickness in which the conductive layer is bonded to both surfaces thereof is formed,
After the sheet-like elastic substrate and the conductive layers existing on both surfaces thereof are bonded, the base film is peeled off from each of the two conductive layers, whereby the conductive layers are formed on both surfaces of the sheet-like elastic substrate. A conductive sheet-like elastic body transferred in a laminated manner is manufactured.

前記課題を克服し、所期の目的を達成するため、本願の更に別の発明に係る導電性シート状弾性体の製造方法は、基材シート上に所要の弾性基体原料(M)を供給し、
この弾性基体原料(M)に対して、基材フィルムの一方の表面に、離型剤を介して金属を蒸着して導電層を形成した導電層転写用フィルムを、該弾性基体原料(M)と導電層とが対向するように供給し、
前記供給された弾性基体原料(M)の反応および硬化を進行させることで、その一方の表面に前記導電層が接合されると共に、他方の表面に前記基材シートが接合された所定厚みのシート状弾性基体を形成し、
前記シート状弾性基体に導電層が接合された後に、該導電層から前記基材フィルムを剥離することで、該シート状弾性基体の一方の表面に導電層が積層的に転写されると共に、他方の表面に基材シートが一体的に積層された導電性シート状弾性体を製造するようにしたことを特徴とする。 In order to overcome the above-mentioned problems and achieve the intended purpose, a method for producing a conductive sheet-like elastic body according to still another invention of the present application supplies a required elastic base material (M) on a base sheet. ,
With respect to the elastic substrate material (M), a conductive layer transfer film in which a conductive layer is formed by vapor-depositing a metal on one surface of the substrate film via a release agent is used as the elastic substrate material (M). And supply so that the conductive layer is opposite,
By proceeding with the reaction and curing of the supplied elastic base material (M), the conductive layer is joined to one surface thereof, and the base sheet is joined to the other surface. Forming an elastic substrate,
After the conductive layer is bonded to the sheet-like elastic substrate, the substrate film is peeled off from the conductive layer, whereby the conductive layer is transferred to one surface of the sheet-like elastic substrate and the other A conductive sheet-like elastic body in which a base sheet is integrally laminated on the surface of is prepared.

以上に説明した如く、本発明に係る導電性シート状弾性体およびその製造方法によれば、薄く場所をとらず、かつ発泡体等に較べて表面積が少ない基材フィルムに対して、予め蒸着により導電層を形成した導電層転写用フィルムを使用し、シート状弾性基体に対して導電層を積層的に転写するようにしたので、パッキンに求められる各種物性と、帯電を防止するに足る導電率とを併有すると共に、量産性に優れた導電性シート状弾性体を製造し得る。 As described above, according to the conductive sheet-like elastic body and the method for producing the same according to the present invention, the base film having a small surface area as compared with the foam or the like is not previously deposited by vapor deposition. Since the conductive layer transfer film with the conductive layer formed is used to transfer the conductive layer to the sheet-like elastic substrate in a laminated manner, various physical properties required for packing and conductivity sufficient to prevent electrification In addition, a conductive sheet-like elastic body excellent in mass productivity can be produced.

次に、本発明に係る導電性シート状弾性体およびその製造方法につき、好適な実施例を挙げて、添付図面を参照しながら以下説明する。本願の発明者は、クッション性やシール性等のパッキンに必要とされる物性を備えるシート状弾性基体の少なくとも一方の表面に対して、別途基材フィルムに各種金属を蒸着して導電層を形成した導電層転写用フィルムを積層させ、該シート状弾性基体と導電層とを接合することで、携帯電話等にパッキンとして好適に使用し得るクッション性やシール性、柔軟性、形状追従性および形状保持性等の各種物性を有し、かつ所要の導電性が付与された肉薄の導電性シート状弾性体を容易に量産し得ることを知見したものである。 Next, the conductive sheet-like elastic body and the method for producing the same according to the present invention will be described below with reference to the accompanying drawings, taking preferred examples. The inventor of the present application forms a conductive layer by separately depositing various metals on a base film on at least one surface of a sheet-like elastic substrate having physical properties required for packing such as cushioning and sealing properties. Cushioning property, sealing property, flexibility, shape following property and shape that can be suitably used as a packing for a mobile phone or the like by laminating the conductive layer transfer film and bonding the sheet-like elastic substrate and the conductive layer It has been found that a thin conductive sheet-like elastic body having various physical properties such as retainability and imparted with required conductivity can be easily mass-produced.

導電性シート状弾性体１０は、図１に示す如く、所要のクッション性、シール性、柔軟性および形状追従性等の各物性を達成する弾性体からなるシート状弾性基体１２と、このシート状弾性基体１２の少なくとも一方の表面に積層的に転写された導電層１６とから基本的に構成される。シート状弾性基体１２は、導電性シート状弾性体１０の主体をなし、パッキンに要求される各種物性を備える部材である。従ってその材質としては、防塵および光漏れ等の機能を長期間に亘って維持し得る、すなわち材質的にヘタリおよび発生ガスが少なく、かつクッション性や柔軟性、曲面への追従性等を有する従来公知の物質、例えば合成樹脂やエラストマー等の発泡体等を使用することができる。具体的には、ウレタン樹脂、ポリエチレン樹脂またはポリプロピレン樹脂等のオレフィン系樹脂、ポリスチレン樹脂、シリコーン樹脂、アクリル樹脂、ポリ塩化ビニル或いはＮＢＲ(アクリロニトリルブタジエン共重合体)、ＳＢＲ(スチレンブタジエン共重合体)、ＥＰＤＭ(エチレンプロピレンジエン三元共重合体)またはＥＰＭ(エチレンプロピレン共重合体)等の各種ゴムを材質としたソリッド体または発泡体が好適に使用される。 As shown in FIG. 1, the conductive sheet-like elastic body 10 includes a sheet-like elastic base 12 made of an elastic body that achieves various physical properties such as required cushioning properties, sealing properties, flexibility, and shape followability, and the sheet-like shape. It is basically composed of a conductive layer 16 transferred in a laminated manner on at least one surface of the elastic substrate 12. The sheet-like elastic base 12 is a member that constitutes the main body of the conductive sheet-like elastic body 10 and has various physical properties required for packing. Therefore, the material can maintain functions such as dust prevention and light leakage over a long period of time, that is, the material has little settling and gas generation, and has a cushioning property, flexibility, followability to a curved surface, etc. Known substances such as foams such as synthetic resins and elastomers can be used. Specifically, urethane resin, olefin resin such as polyethylene resin or polypropylene resin, polystyrene resin, silicone resin, acrylic resin, polyvinyl chloride or NBR (acrylonitrile butadiene copolymer), SBR (styrene butadiene copolymer), Solid bodies or foams made of various rubbers such as EPDM (ethylene propylene diene terpolymer) or EPM (ethylene propylene copolymer) are preferably used.

またその物性についてもパッキン用途に好適に使用されるシート状弾性基体１２に準じるが、例えば２５％圧縮荷重(硬度)が、０.０３５ＭＰａ以下またはアスカーＣ硬度計による測定で２０°以下に設定される。この値を超える場合には、パッキンすべき筐体等に過大な負荷が常時掛かってしまい、筐体にカケ等の物理的欠陥を生じさせる虞がある。この点からシート状弾性基体１２としては、殊にメカニカルフロス法により製造される低硬度のポリウレタン発泡体が好適である。このメカニカルフロス法については、例えば特公昭５３−８７３５号公報にその内容が記載されているので詳細は割愛するが、基本的には主原料であるポリオールおよびイソシアネート成分からなる２液性のウレタン原料に対して、触媒または整泡剤等の副原料を必要に応じて添加し、更に窒素等の造泡用気体を混合し、更にオークスミキサ等により混合攪拌することで弾性基体原料Ｍ(後述［００１６］)を得るものである。 Further, the physical properties thereof are also in accordance with the sheet-like elastic substrate 12 suitably used for packing applications. For example, the 25% compression load (hardness) is set to 0.035 MPa or less or 20 ° or less as measured with an Asker C hardness meter. The When this value is exceeded, an excessive load is constantly applied to the casing to be packed, which may cause physical defects such as chipping in the casing. In this respect, the sheet-like elastic substrate 12 is particularly preferably a low-hardness polyurethane foam produced by a mechanical floss method. The details of this mechanical flossing method are described in, for example, Japanese Examined Patent Publication No. 53-8735, and will not be described in detail. Basically, however, this is a two-component urethane raw material comprising a polyol and an isocyanate component as main raw materials. On the other hand, an auxiliary raw material such as a catalyst or a foam stabilizer is added as necessary, a foaming gas such as nitrogen is further mixed, and further mixed and stirred by an Oaks mixer or the like to thereby produce an elastic base material M (described later [ 0016]).

そしてシート状弾性基体１２は、その厚みが０.１〜５.０ｍｍの範囲に設定される。この厚みが０.１ｍｍ未満の場合には充分な弾力性、すなわち充分なパッキン性を発現することが困難となる。一方５.０ｍｍを超える場合には厚過ぎて、やはり充分なパッキン性を発現することが困難となり、更に製造時における巻き取り等による回収性が低下し、製造効率が悪化する虞がある。またその長さとしては、５ｍ以上の長尺品であることが好ましく、この場合、製造される導電性シート状弾性体１０を所要形状に加工する、打ち抜き等の加工の連続実施が可能となるため、生産効率の向上による製造コストの低減が期待できる。 The thickness of the sheet-like elastic base 12 is set in the range of 0.1 to 5.0 mm. When this thickness is less than 0.1 mm, it becomes difficult to exhibit sufficient elasticity, that is, sufficient packing property. On the other hand, when the thickness exceeds 5.0 mm, it is too thick, and it is difficult to develop sufficient packing property. Further, the recoverability due to winding at the time of manufacture is lowered, and the production efficiency may be deteriorated. Further, the length is preferably a long product of 5 m or longer, and in this case, the conductive sheet-like elastic body 10 to be manufactured is processed into a required shape, and continuous execution such as punching becomes possible. Therefore, a reduction in manufacturing cost can be expected due to an improvement in production efficiency.

シート状弾性基体１２に導電性を付与する導電層１６は、シート状弾性基体１２の表面抵抗値を１×１０^−１〜１×１０^８Ωの範囲に設定して導電性を確保することで、静電気等による各種弊害を回避するものである。導電層１６は、基材フィルム１８上に金属１５を所定の厚みに蒸着させた導電層転写用フィルム２０を用いることで、シート状弾性基体１２に対して転写される(詳細は後述［００２９］)。蒸着される各種金属１５としては、銅、銀、アルミニウム、クロム、錫、ニッケルまたはチタン等が好適である。また導電層１６の厚みは、前述の金属１５の種類によらず３〜２００ｎｍの範囲に設定される。この値が３ｎｍ未満であると、表面抵抗値が静電気等による各種弊害を回避し得る１.０×１０^８Ωを越える場合があり、一方２００ｎｍを越えると、シート状弾性基体１２に積層された導電層１６、すなわち導電性シート状弾性体１０の表面のヒビ割れ等の物理的欠損が起こる場合があり、導電性シート状弾性体１０のクッション性を損なう虞があるためである。 The conductive layer 16 that imparts conductivity to the sheet-like elastic substrate 12 ensures the conductivity by setting the surface resistance value of the sheet-like elastic substrate 12 in the range of 1 × 10 ⁻¹ to 1 × 10 ⁸ Ω. It avoids various harmful effects caused by static electricity. The conductive layer 16 is transferred to the sheet-like elastic substrate 12 by using the conductive layer transfer film 20 in which the metal 15 is deposited on the base film 18 to a predetermined thickness (details will be described later [0029]). ). As the various metals 15 to be deposited, copper, silver, aluminum, chromium, tin, nickel, titanium, or the like is preferable. The thickness of the conductive layer 16 is set in the range of 3 to 200 nm regardless of the type of the metal 15 described above. If this value is less than 3 nm, the surface resistance value may exceed 1.0 × 10 ⁸ Ω, which can avoid various harmful effects due to static electricity, etc., whereas if it exceeds 200 nm, the surface-like elastic substrate 12 is laminated. This is because physical defects such as cracks on the surface of the conductive layer 16, that is, the conductive sheet-like elastic body 10, may occur, and the cushioning property of the conductive sheet-like elastic body 10 may be impaired.

(製造方法)
次に、本実施例に係る導電性シート状弾性体の好適な製造装置と、該製造装置を用いた製造方法を以下説明する。なお原料となる弾性基体原料Ｍおよび導電層１６が蒸着により基材フィルム１８に形成された導電層転写用フィルム２０が準備されているものとする。導電性シート状弾性体１０の製造は、図２に示すように原料準備工程Ｓ１、原料供給・成形工程Ｓ２、加熱工程Ｓ３、フィルム除去工程Ｓ４および最終工程Ｓ５から基本的に構成され、図３に示す製造装置３０により好適に製造される。この製造装置３０は、基本的に前述の原料供給・成形工程Ｓ２、加熱工程Ｓ３、フィルム除去工程Ｓ４および最終工程Ｓ５を連続的に実施するものであり、原料準備工程Ｓ１は別の装置で実施している。なお原料準備工程Ｓ１については、製造すべき導電性シート状弾性体１０をなすシート状弾性基体１２の弾性基体原料Ｍを適宜な従来公知等の方法によって準備し、更に後述(［００１７］)する方法で導電層転写用フィルム２０を準備する工程であり、詳細な説明については省略すると共に、後述の実験例([００３５])で一例を挙げている。 (Production method)
Next, the suitable manufacturing apparatus of the electroconductive sheet-like elastic body which concerns on a present Example, and the manufacturing method using this manufacturing apparatus are demonstrated below. It is assumed that a conductive layer transfer film 20 in which an elastic base material M as a raw material and a conductive layer 16 are formed on a base film 18 by vapor deposition is prepared. As shown in FIG. 2, the production of the conductive sheet-like elastic body 10 basically comprises a raw material preparation step S1, a raw material supply / molding step S2, a heating step S3, a film removal step S4 and a final step S5. The manufacturing apparatus 30 shown in FIG. This manufacturing apparatus 30 basically performs the above-described raw material supply / molding step S2, heating step S3, film removal step S4 and final step S5 continuously, and the raw material preparation step S1 is performed by another device. doing. In the raw material preparation step S1, the elastic base material M of the sheet-like elastic base 12 constituting the conductive sheet-like elastic body 10 to be manufactured is prepared by an appropriate method known in the art and further described later ([0017]). This is a step of preparing the conductive layer transfer film 20 by a method, and detailed description is omitted and an example is given in an experimental example ([0035]) described later.

(導電層転写用フィルムの準備について)
ここで予め準備される導電層転写用フィルム２０の製造は以下のように実施されている。具体的には、図４に示す如く、従来技術で説明したスパッタリング装置８０と同様の構造を備える、すなわち基材フィルム１８を巻回した送出ドラム４４と、巻取ドラム４６と、冷却ドラム４８とをチャンバー４２内に備え、図示しない真空ポンプ等により自在に減圧可能な蒸着真空槽装置４０を使用し、１.３３×１０^−２Ｐａ(１×１０^−４Ｔｏｒｒ)程度の圧力雰囲気下で、るつぼの如き収納容器４１(加熱装置図示せず)に貯留された、例えば高純度のアルミニウムの如き金属１５を高温状態(アルミニウムの場合は１６００℃)として気化させ、送出ドラム４４から冷却ドラム４８を経て巻取ドラム４６に順次巻き取られる基材フィルム１８上に蒸着させて所定の厚みの導電層１６を形成するものである。 (Preparation of conductive layer transfer film)
The production of the conductive layer transfer film 20 prepared in advance is carried out as follows. Specifically, as shown in FIG. 4, it has the same structure as the sputtering apparatus 80 described in the prior art, that is, a delivery drum 44 around which the base film 18 is wound, a winding drum 46, and a cooling drum 48. In the chamber 42, and using a vapor deposition vacuum chamber apparatus 40 that can be freely depressurized by a vacuum pump (not shown) or the like, under a pressure atmosphere of about 1.33 × 10 ⁻² Pa (1 × 10 ⁻⁴ Torr), A metal 15 such as high-purity aluminum stored in a storage container 41 (heating device not shown) such as a crucible is vaporized in a high temperature state (1600 ° C. in the case of aluminum), and the cooling drum 48 is transferred from the delivery drum 44. The conductive layer 16 having a predetermined thickness is formed by vapor deposition on the base film 18 that is sequentially wound around the winding drum 46.

このように従来技術と略同一の構成を備える装置で導電層１６を形成するようにしているが、導電層１６の形成対象物が単なるフィルムだけであるため、真空引きの際に問題となる水分やガス等が系内に入り込むことがない。このため製造時間が短縮され、一度に蒸着真空槽装置４０内に収納できる量が増大して量産性の大きな向上が達成される。また、この蒸着法で形成された導電層１６は、スパッタリング法により形成される導電層に較べて剥離性が良いため、導電層１６の導電層転写用フィルム２０からシート状弾性基体１２への転写が安定的に実施可能であり、また一般のコーティング法により形成される導電層に較べて、層形成の均質性および安定性が高いメリットを備える。 As described above, the conductive layer 16 is formed by an apparatus having substantially the same configuration as that of the prior art. However, since the object to be formed of the conductive layer 16 is only a film, moisture that causes a problem in evacuation. Or gas does not enter the system. For this reason, manufacturing time is shortened, the quantity which can be accommodated in the vapor deposition vacuum chamber apparatus 40 at a time increases, and the big improvement in mass productivity is achieved. Moreover, since the conductive layer 16 formed by this vapor deposition method has better peelability than the conductive layer formed by the sputtering method, the transfer of the conductive layer 16 from the conductive layer transfer film 20 to the sheet-like elastic substrate 12 is possible. Can be stably implemented, and has the advantage of high homogeneity and stability of layer formation as compared with a conductive layer formed by a general coating method.

そして導電層転写用フィルム２０を製造するに際しては、図５に示す如く、基材フィルム１８の導電層１６の形成される側に、転写の際の剥離性を高める、例えばシリコーン系物質またはポリオレフィン系物質等の離型剤１７が予め各種コーター等の従来公知の手段で付与され(図５(ａ)参照)、この離型剤１７を介して金属１５が蒸着される(図５(ｂ)参照)。そして基材フィルム１８の導電層１６の表面には、その融点が６０〜１５０℃である、例えばポリ塩化ビニル、ポリ酢酸ビニル、ポリオレフィンまたはアクリル樹脂の如きホットメルト型接着剤等の接着剤１４がスプレー塗布や各種コーター等の従来公知の手段で付与される(図５(ｃ)参照)。これによりシート状弾性基体１２と導電層１６とが強固に接合されることになる。 When the conductive layer transfer film 20 is manufactured, as shown in FIG. 5, on the side of the base film 18 where the conductive layer 16 is formed, the peelability at the time of transfer is increased. A release agent 17 such as a substance is applied in advance by a conventionally known means such as various coaters (see FIG. 5A), and a metal 15 is deposited through the release agent 17 (see FIG. 5B). ). On the surface of the conductive layer 16 of the base film 18, an adhesive 14 such as a hot melt adhesive such as polyvinyl chloride, polyvinyl acetate, polyolefin or acrylic resin having a melting point of 60 to 150 ° C. is provided. It is applied by a conventionally known means such as spray coating or various coaters (see FIG. 5C). As a result, the sheet-like elastic substrate 12 and the conductive layer 16 are firmly bonded.

ここで６０℃未満の融点を有する接着剤１４を使用した場合、例えば夏場等の高温下で導電性シート状弾性体１０を製造する場合にブロッキング等の弊害を起こす虞があり、一方１５０℃を越える融点を有する接着剤１４を使用した場合、後述([００２７])する加熱工程Ｓ３でのトンネル式加熱炉３８による加熱によっても溶融されず、その接着効果が充分に期待できなくなる。なおこの接着剤１４による接合は、弾性基体原料Ｍの種類によっては補助的なものとなり、場合によっては不要としてもよい。例えば弾性基体原料Ｍとしてがポリウレタン発泡体原料が使用された場合、その反応・硬化によって接着剤としての役割も果たすため、弾性基体原料Ｍがシート状弾性基体１２となると共に、この基体１２と導電層１６とが強固に接合される。 Here, when the adhesive 14 having a melting point of less than 60 ° C. is used, for example, when the conductive sheet-like elastic body 10 is produced at a high temperature such as in summer, there is a risk of causing adverse effects such as blocking, while 150 ° C. When the adhesive 14 having a melting point exceeding is used, it is not melted by the heating by the tunnel heating furnace 38 in the heating step S3 described later ([0027]), and the adhesive effect cannot be sufficiently expected. The bonding with the adhesive 14 is auxiliary depending on the type of the elastic base material M, and may be unnecessary depending on the case. For example, when a polyurethane foam raw material is used as the elastic base material M, the elastic base material M becomes a sheet-like elastic base 12 because it also serves as an adhesive by its reaction and curing. The layer 16 is firmly bonded.

また基材フィルム１８は導電層転写用フィルム２０の基材であり、均質かつ安定的な導電層１６の形成のために、金属１５を均質に蒸着させるべく所定の張力に対して伸張せず、かつ蒸着真空槽装置４０のチャンバー４２内の雰囲気温度に対する耐熱性が要求されている。そしてその一方で、製造工程における弾性基体原料Ｍの移送媒体としての役割も果しているため、その詳細は後述する([００２３])。 Further, the base film 18 is a base material for the conductive layer transfer film 20, and in order to form a homogeneous and stable conductive layer 16, the metal 15 is not stretched to a predetermined tension in order to deposit it uniformly. In addition, heat resistance to the atmospheric temperature in the chamber 42 of the vapor deposition vacuum chamber apparatus 40 is required. On the other hand, since it also serves as a transfer medium for the elastic substrate material M in the manufacturing process, the details will be described later ([0023]).

(製造装置について)
製造装置３０は、図３に示す如く、導電層１６が形成されると共に、各種原料からメカニカルフロス法における原料調整により混合された弾性基体原料Ｍの移送媒体となる導電層転写用フィルム２０を図示しない駆動源により駆動する供給ロール３２ａ、基材フィルム回収ロール３２ｂおよび製品回収ロール３２ｃからなるロール機構３２と、導電層１６上に弾性基体原料Ｍを供給する吐出ノズル３４と、吐出ノズル３４の下流側に設置され、供給された弾性基体原料Ｍを所定の厚みのシート状とする製品厚制御手段３６と、その下流側に設けられる所定長さのトンネル式加熱炉３８とから基本的に構成される。 (About manufacturing equipment)
As shown in FIG. 3, the manufacturing apparatus 30 illustrates a conductive layer transfer film 20 that is formed with a conductive layer 16 and serves as a transfer medium for an elastic base material M mixed from various raw materials by raw material adjustment in a mechanical froth method. A roll mechanism 32 including a supply roll 32 a, a base film recovery roll 32 b and a product recovery roll 32 c driven by a drive source that does not operate, a discharge nozzle 34 for supplying the elastic substrate material M onto the conductive layer 16, and a downstream of the discharge nozzle 34. The product is basically composed of a product thickness control means 36 which is installed on the side and makes the supplied elastic base material M into a sheet shape with a predetermined thickness, and a tunnel-type heating furnace 38 with a predetermined length provided downstream thereof. The

ロール機構３２は、基本的に導電層１６が形成された基材フィルム１８(導電層転写用フィルム２０)に対して所定の張力を掛けつつ製造ラインに供給し、その結果、得られる導電性シート状弾性体１０と、導電層１６を転写した後の基材フィルム１８とを夫々回収する機構である。そして製造装置３０の最上流に設置される供給ロール３２ａには、導電層転写用フィルム２０が巻き付けられ、制御下に送出されるようになっている。基材フィルム１８は、導電層転写用フィルム２０の基材となるだけでなく、本発明に係る導電性シート状弾性体１０の主体であるシート状弾性基体１２の移送媒体としての役割も果たす部材である。 The roll mechanism 32 basically supplies the production film while applying a predetermined tension to the base film 18 (conductive layer transfer film 20) on which the conductive layer 16 is formed. As a result, the resulting conductive sheet is obtained. This is a mechanism for collecting the elastic body 10 and the base film 18 after the conductive layer 16 is transferred. Then, the conductive layer transfer film 20 is wound around the supply roll 32a installed in the uppermost stream of the manufacturing apparatus 30 and is sent out under control. The base film 18 not only serves as a base material for the conductive layer transfer film 20 but also serves as a transfer medium for the sheet-like elastic substrate 12 that is the main body of the conductive sheet-like elastic body 10 according to the present invention. It is.

このため金属１５を均質に蒸着させるべく所定の張力に対して伸張しないだけではなく、ロール機構３２によって掛けられる張力に対抗し得る物理的強度が必要とされ、また蒸着等に係る雰囲気温度に対する耐熱性だけでなく、弾性基体原料Ｍを反応・硬化させるために加えられる熱(後述［００２８］)に対する耐性も要求される。このような物性を達成する基材フィルム１８の材質としては、ポリオレフィン、ポリエステル、ポリアミドまたはポリ塩化ビニルといった樹脂、紙或いは樹脂繊維強化紙が使用可能であり、殊に熱収縮に優れる各種樹脂の使用が好ましい。また基材フィルム１８の厚みは、その材質によって変動するが、数十〜５００μｍ、好適には２５〜１２５μｍ程度に設定される。 Therefore, not only does the metal 15 not stretch to a predetermined tension in order to deposit it uniformly, but physical strength that can resist the tension applied by the roll mechanism 32 is required, and heat resistance against the atmospheric temperature related to deposition and the like. In addition to the property, resistance to heat (to be described later [0028]) applied to react and cure the elastic base material M is also required. As the material of the base film 18 that achieves such physical properties, resins such as polyolefin, polyester, polyamide, or polyvinyl chloride, paper, or resin fiber reinforced paper can be used, and in particular, various resins excellent in heat shrinkage are used. Is preferred. The thickness of the base film 18 varies depending on the material, but is set to several tens to 500 μm, preferably about 25 to 125 μm.

吐出ノズル３４は、導電層１６が上側に露出し、所定の張力を掛けた状態で移送される導電層転写用フィルム２０の上方に配置され、導電層１６上に弾性基体原料Ｍを制御下に供給するものであり、一端が図示しない弾性基体原料Ｍの混合・貯留装置に接続されている。また製品厚制御手段３６は、導電層１６上に吐出供給された弾性基体原料Ｍを所定の厚みのシート状物とするものであり、具体的にはナイフコーターまたはロールコーター等の従来公知の手段が採用される。そしてトンネル式加熱炉３８は、所定の厚みとされた弾性基体原料Ｍに制御下で加熱を施して反応・硬化を進行させてシート状弾性基体１２とするためのものである。またシート状弾性基体１２を充分に反応・硬化させ得るものであれば、如何なる加熱方式でも採用可能である。この際、弾性基体原料Ｍは導電層１６上で反応・硬化され、また導電層１６上にはホットメルト型接着剤等の接着剤１４も付与されているため、この接着剤１４に対しても加熱を行なうことになり、その結果、弾性基体原料Ｍおよび導電層１６は強固に接合される。 The discharge nozzle 34 is disposed above the conductive layer transfer film 20 that is transferred in a state where the conductive layer 16 is exposed on the upper side and is applied with a predetermined tension, and the elastic base material M is controlled on the conductive layer 16. One end is connected to an elastic base material M mixing / storage device (not shown). Further, the product thickness control means 36 is a means for forming the elastic substrate material M discharged and supplied onto the conductive layer 16 into a sheet-like material having a predetermined thickness, and specifically, a conventionally known means such as a knife coater or a roll coater. Is adopted. The tunnel-type heating furnace 38 is for heating the elastic base material M having a predetermined thickness under control to cause the reaction / curing to proceed to form the sheet-like elastic base 12. Any heating method can be adopted as long as it can sufficiently react and cure the sheet-like elastic substrate 12. At this time, the elastic base material M is reacted and cured on the conductive layer 16, and an adhesive 14 such as a hot-melt adhesive is applied on the conductive layer 16. As a result, the elastic base material M and the conductive layer 16 are firmly bonded.

製造装置３０の最下流に設置される基材フィルム回収ロール３２ｂおよび製品回収ロール３２ｃは、供給ロール３２ａと対になることで、導電層転写用フィルム２０(基材フィルム１８)に所定の張力を掛けると共に、シート状弾性基体１２に導電層１６が積層的に転写された導電性シート状弾性体１０の巻き取り回収および基材フィルム１８を巻き去り回収・除去の役割を夫々担う。なお、基材フィルム回収ロール３２ｂに巻き取られた基材フィルム１８は、再び蒸着により導電層１６を形成した導電層転写用フィルム２０とすることが可能である。 The base film recovery roll 32b and the product recovery roll 32c installed on the most downstream side of the manufacturing apparatus 30 are paired with the supply roll 32a to apply a predetermined tension to the conductive layer transfer film 20 (base film 18). At the same time, the conductive sheet-like elastic body 10 in which the conductive layer 16 is laminated and transferred to the sheet-like elastic base 12 is wound and collected, and the base film 18 is unwound and recovered and removed. In addition, the base film 18 wound up by the base film collection | recovery roll 32b can be used as the conductive layer transfer film 20 which formed the conductive layer 16 by vapor deposition again.

(原料供給・成形工程Ｓ２について)
本原料供給・成形工程Ｓ２は、図６に示す如く、ロール機構３２によって所定の張力を掛けられた状態で水平に供給される導電層転写用フィルム２０上に、原料準備工程Ｓ１で得られた弾性基体原料Ｍを吐出ノズル３４から連続的に吐出し、これを製品厚制御手段３６によって所定の厚みとする(図６(ａ)参照)工程である。 (About raw material supply and molding process S2)
This raw material supply / forming step S2 was obtained in the raw material preparation step S1 on the conductive layer transfer film 20 supplied horizontally with a predetermined tension applied by the roll mechanism 32, as shown in FIG. This is a process in which the elastic base material M is continuously discharged from the discharge nozzle 34 and is made a predetermined thickness by the product thickness control means 36 (see FIG. 6A).

(加熱工程Ｓ３について)
本加熱工程Ｓ３は、前原料供給・成形工程Ｓ２を経ることで、導電層１６上に所定の厚みとされた弾性基体原料Ｍを加熱することで反応・硬化させ、導電層１６にシート状弾性基体１２を接合する(図６(ｂ)参照)工程である。具体的には、トンネル式加熱炉３８を通過する際に所定の温度に昇温、一定時間保持することでなされる。また同時に、導電層１６およびシート状弾性基体１２間に存在する接着剤１４も加熱によって硬化し、導電層１６とシート状弾性基体１２との接合をより強固なものとしている。 (About heating process S3)
In the main heating step S3, the elastic base material M having a predetermined thickness is heated on the conductive layer 16 through the previous raw material supply / molding step S2, thereby reacting and curing, and the conductive layer 16 has a sheet-like elasticity. This is a step of bonding the base body 12 (see FIG. 6B). Specifically, the temperature is raised to a predetermined temperature when passing through the tunnel-type heating furnace 38 and held for a certain period of time. At the same time, the adhesive 14 existing between the conductive layer 16 and the sheet-like elastic substrate 12 is also cured by heating, and the bonding between the conductive layer 16 and the sheet-like elastic substrate 12 is made stronger.

(フィルム除去工程Ｓ４および最終工程Ｓ５について)
フィルム除去工程Ｓ４は、加熱工程Ｓ３を経て得られた導電層転写用フィルム２０とシート状弾性基体１２との接合体から、基材フィルム回収ロール３２ｂにより基材フィルム１８を分離除去して回収する(図６(ｃ)参照)工程であり、最終工程Ｓ５はフイルム除去工程Ｓ４に引き続き連続的に実施される、出荷前の最終加工および検査等のための工程である。そしてフィルム除去工程Ｓ４を経ることで、シート状弾性基体１２に対して導電層１６だけが積層的に転写された導電性シート状弾性体１０の長尺物が得られる。この導電性シート状弾性体１０の長尺物は、最終検査を受けつつ製品回収ロール３２ｃにより巻き取り回収され、そのままの形で出荷に供される。なお長尺の導電性シート状弾性体１０は、製品回収ロール３２ｃに回収せず、連続的に所定形状への打ち抜き等の最終加工およびその他検査等を実施等をし、パッキン等の各種最終製品としてもよい。また導電性シート状弾性体１０の形状的強度や、ハンドリング性を考慮し、基材フィルム１８の分離を実施せず、所要形状への打ち抜き加工等を実施した最終製品として出荷された後の使用直前に分離させて使用するようにしてもよい。この場合にはフィルム除去工程Ｓ４は不要となる。 (About film removal step S4 and final step S5)
In the film removal step S4, the base film 18 is separated and removed by the base film recovery roll 32b from the joined body of the conductive layer transfer film 20 and the sheet-like elastic base 12 obtained through the heating step S3. The final process S5 is a process for final processing and inspection before shipment, which is performed continuously following the film removal process S4. And the elongate thing of the electroconductive sheet-like elastic body 10 by which only the electroconductive layer 16 was transcribe | transferred laminated | stacked with respect to the sheet-like elastic base | substrate 12 by passing through film removal process S4 is obtained. The long sheet of the conductive sheet-like elastic body 10 is wound and collected by the product collection roll 32c while undergoing a final inspection, and is shipped as it is. The long conductive sheet-like elastic body 10 is not collected by the product collection roll 32c, but is continuously subjected to final processing such as punching into a predetermined shape and other inspections, and various final products such as packing. It is good. In addition, in consideration of the shape strength and handling properties of the conductive sheet-like elastic body 10, the substrate film 18 is not separated and used after being shipped as a final product that has been punched into a required shape. You may make it use by isolate | separating immediately before. In this case, the film removal step S4 becomes unnecessary.

(変更例)
前述の実施例では、シート状弾性基体１２の一方の表面にだけ導電層１６が積層的に転写された導電性シート状弾性体１０の製造方法等について述べたが、本発明はこれに限定されるものではなく、図７に示すような導電性シート状弾性体２４の如き形態も考えられる。この導電性シート状弾性体２４は、その主体であるシート状弾性基体１２の両表面に導電層１６,１６が積層的に転写された構成を備えており、例えば導電性シート状弾性体２４をパッキンとして使用する部材において、両面において除電や導電性が必要な場合に対応し得るといった特徴を有している。 (Example of change)
In the above-described embodiment, the manufacturing method of the conductive sheet-like elastic body 10 in which the conductive layer 16 is transferred in a laminated manner only on one surface of the sheet-like elastic substrate 12 has been described. However, the present invention is not limited to this. Instead, a form such as a conductive sheet-like elastic body 24 as shown in FIG. 7 is also conceivable. The conductive sheet-like elastic body 24 has a configuration in which conductive layers 16 and 16 are laminated and transferred to both surfaces of the sheet-like elastic base 12 which is the main body. A member used as a packing has a feature that it can cope with a case where static elimination or conductivity is required on both sides.

この導電性シート状弾性体２４は、例えば図８に示す製造装置５０によって製造される。製造装置５０は、基本的に前述(［００２２］)した製造装置３０と同様の構造を備え、積層状態にある弾性基体原料Ｍおよび導電層転写用フィルム２０の弾性基体原料Ｍの上方から、別の導電層転写用フィルム２０を弾性基体原料Ｍと導電層１６とが対向するように連続的に供給することで、シート状弾性基体１２の両表面に導電層１６,１６が積層的に転写された導電性シート状弾性体２４を製造する装置である。従って製造装置５０には、製造装置３０に対して、吐出ノズル３４の下流側に設置され、導電層転写用フィルム２０を図示しない駆動源により駆動する第２供給ロール３３ａおよび第２基材フィルム回収ロール３３ｂからなる第２ロール機構３３が付加された構成となっている。なお、図８において基材フィルム１８および離型剤１７は、同一の部材として記載している。 The conductive sheet-like elastic body 24 is manufactured by, for example, a manufacturing apparatus 50 shown in FIG. The manufacturing apparatus 50 basically has the same structure as the manufacturing apparatus 30 described above ([0022]), and is separated from above the elastic base material M in the laminated state and the elastic base material M of the conductive layer transfer film 20. The conductive layer transfer film 20 is continuously supplied so that the elastic base material M and the conductive layer 16 face each other, so that the conductive layers 16 and 16 are laminated and transferred to both surfaces of the sheet-like elastic base 12. This is an apparatus for manufacturing the conductive sheet-like elastic body 24. Accordingly, in the manufacturing apparatus 50, the second supply roll 33a and the second base film recovery that are installed on the downstream side of the discharge nozzle 34 with respect to the manufacturing apparatus 30 and drive the conductive layer transfer film 20 by a driving source (not shown). The second roll mechanism 33 including the roll 33b is added. In FIG. 8, the base film 18 and the release agent 17 are shown as the same member.

(別の変更例)
更に前述の実施例および変更例においては、(接着剤１４を介して)シート状弾性基体１２の少なくとも一方の表面に導電層１６が積層的に転写された構成の導電性シート状弾性体が説明されているが、本発明においてはシート状弾性基体１２の一方の表面に対して、引張強度等の物理的強度を向上させる、基材シート２２を一体的に積層した導電性シート状弾性体２６の如き形態も考えられる。具体的に導電性シート状弾性体２６は、図９に示す如く、その主体であるシート状弾性基体１２の一方の表面に所定の基材シート２２が一体的に積層され、他方の表面に導電層１６が積層的に転写された構成となっている。 (Another change example)
Further, in the above-described embodiments and modifications, there is described a conductive sheet-like elastic body having a configuration in which the conductive layer 16 is transferred in a laminated manner to at least one surface of the sheet-like elastic substrate 12 (via the adhesive 14). However, in the present invention, a conductive sheet-like elastic body 26 in which a base sheet 22 is integrally laminated, which improves physical strength such as tensile strength, on one surface of the sheet-like elastic substrate 12. Such a form is also conceivable. Specifically, as shown in FIG. 9, the conductive sheet-like elastic body 26 has a predetermined base sheet 22 integrally laminated on one surface of the main sheet-like elastic substrate 12, and the other surface is electrically conductive. The layer 16 is transferred in a stacked manner.

この導電性シート状弾性体２６は、例えば図１０に示す製造装置６０によって製造される。製造装置６０は、基本的に製造装置５０(［００３１］参照)と同様の構造を備え、弾性基体原料Ｍの移送媒体として使用される導電層転写用フィルム２０に代えて連続的に供給される基材シート２２上に弾性基体原料Ｍを供給し、更にこの弾性基体原料Ｍの上方から、導電層転写用フィルム２０を弾性基体原料Ｍと導電層１６とが対向するように連続的に供給することで、シート状弾性基体１２の一方の面に導電層１６が積層的に転写され、他方の面に基材シート２２が一体的に積層された導電性シート状弾性体２６を製造する装置である。ここでシート状弾性基体１２と基材シート２２とは、加熱された弾性基体原料Ｍの反応・硬化時の接着作用の発現で強固に一体的に積層されるが、導電層転写用フィルム２０に用いられているホットメルト型接着剤等の接着剤１４を併用するようにしてもよい。これは吐出ノズル３４の上流に接着剤１４の付与機構を備えたり、または予め別工程で基材シート２２に対して接着剤１４を付与することでなされる。なお、図１０において基材フィルム１８および離型剤１７は、同一の部材として記載している。 The conductive sheet-like elastic body 26 is manufactured by, for example, a manufacturing apparatus 60 shown in FIG. The manufacturing apparatus 60 basically has the same structure as the manufacturing apparatus 50 (see [0031]), and is continuously supplied instead of the conductive layer transfer film 20 used as a transfer medium for the elastic base material M. The elastic base material M is supplied onto the base sheet 22, and the conductive layer transfer film 20 is continuously supplied from above the elastic base material M so that the elastic base material M and the conductive layer 16 face each other. Thus, in the apparatus for producing the conductive sheet-like elastic body 26 in which the conductive layer 16 is laminated and transferred to one surface of the sheet-like elastic substrate 12 and the base sheet 22 is integrally laminated on the other surface. is there. Here, the sheet-like elastic base 12 and the base sheet 22 are firmly and integrally laminated by the expression of the adhesive action during the reaction and curing of the heated elastic base material M. You may make it use together adhesives 14, such as the hot-melt-type adhesive agent currently used. This is done by providing a mechanism for applying the adhesive 14 upstream of the discharge nozzle 34, or by applying the adhesive 14 to the base sheet 22 in a separate process in advance. In FIG. 10, the base film 18 and the release agent 17 are shown as the same member.

本製造装置６０で使用される基材シート２２は、基本的に基材フィルム１８と同様の役割を果たす部材であるため、求められる物性および材質等も同等に設定される。また基材シート２２を使用して導電性シート状弾性体２６を製造した場合、基材シート２２がシート状弾性基体１２に対して一体的に積層し、導電性シート状弾性体２６全体としての物理的強度を向上させるため、その裂けおよび切れを未然に防き、ハンドリング性等を良好にする効果が期待できる。このため、その材質としては耐久性に優れる金属または樹脂の採用が好ましく、殊にシート状弾性基体１２と積層した際に、その動きに対して柔軟に対応して追従可能であり、安価な、例えばポリエチレンテレフタレート(ＰＥＴ)の如きポリエステル樹脂が好適である。殊に基材シート２２として、ＰＥＴ等の熱可塑性樹脂を使用した場合には加熱等による軟化が考えられるため、導電性シート状弾性体２６に張力を掛けた際に「裂け」または「皺」等が発生することのない程度の厚みが必要とされ、その厚みは１０〜５００μｍ、好適には２５〜２５０μｍの範囲内とされる。なお基材シート２２として金属、例えばステンレス鋼箔、銅箔またはアルミニウム箔といった素材の使用も可能である。 Since the base material sheet 22 used in the manufacturing apparatus 60 is a member that basically plays the same role as the base material film 18, the required physical properties, materials, and the like are set equally. Further, when the conductive sheet-like elastic body 26 is manufactured using the base sheet 22, the base sheet 22 is integrally laminated on the sheet-like elastic base 12, and the conductive sheet-like elastic body 26 as a whole is obtained. In order to improve the physical strength, it is possible to prevent the tearing and cutting, and to improve the handling properties. For this reason, it is preferable to use a metal or resin that is excellent in durability as the material, and particularly when laminated with the sheet-like elastic base 12, it can flexibly follow the movement, and is inexpensive. For example, a polyester resin such as polyethylene terephthalate (PET) is suitable. In particular, when a thermoplastic resin such as PET is used as the base material sheet 22, softening due to heating or the like can be considered. Therefore, when a tension is applied to the conductive sheet-like elastic body 26, a “tear” or a “wrinkle”. And the like, and the thickness is in the range of 10 to 500 μm, preferably 25 to 250 μm. Note that a material such as a metal, for example, a stainless steel foil, a copper foil, or an aluminum foil can be used as the base sheet 22.

(別の実施例)
ここまでで記載した実施例および変更例は、弾性基体原料Ｍを移送媒体として作用する導電層転写用フィルム２０または基材シート２２上に供給し、次いで加熱を施すことで原料Ｍからシート状弾性基体１２を製造する方法であったが、本発明において導電層転写用フィルム２０と同様にシート状弾性基体１２を予め準備し、この双方を接着剤１４を介して一体的に積層した後、導電層１６から基材フィルム１８を剥離させた導電性シート状弾性体２８の如き形態も考えられる。この導電性シート状弾性体２８は、基本的に図１に示す導電性シート状弾性体１０と同様の構成を備えており、図１１に示す製造装置７０によって製造される。製造装置７０は、基本的に前述(［００２２］)した製造装置３０と同様の構造を備えるが、シート状弾性基体１２を弾性基体原料Ｍとして供給・硬化させるのではなく、別工程で前述(［００１２］)した如き樹脂等からシート状弾性基体１２を予め製造してロール状に巻き取り、このロール状のシート状弾性基体１２をロール機構３２の一部を構成するシート状弾性基体供給ローラ３２ｄとして用い、製造装置７０に対してシート状弾性基体１２を供給している。この製造装置７０では、既に硬化されたシート状弾性基体１２を利用するため加熱機構が不要となる一方、原料Ｍの硬化による接着力をシート状弾性基体１２と導電層１６との接合に用いられない。このため接着剤１４として一般のものを採用し、かつ製造装置７０には、シート状弾性基体供給ロール２ｄの下流にシート状弾性基体１２と導電層１６とを確実に接合させる一対の押圧ロール３５,３５が備えられた構成となっている。 (Another example)
In the examples and modifications described so far, the elastic base material M is supplied onto the conductive layer transfer film 20 or the base material sheet 22 acting as a transfer medium, and then heated to form a sheet-like elasticity. In the present invention, the sheet-like elastic substrate 12 is prepared in advance in the same manner as the conductive layer transfer film 20 in the present invention, and both are integrally laminated via the adhesive 14. A form such as a conductive sheet-like elastic body 28 in which the base film 18 is peeled from the layer 16 is also conceivable. The conductive sheet-like elastic body 28 basically has the same configuration as that of the conductive sheet-like elastic body 10 shown in FIG. 1, and is manufactured by a manufacturing apparatus 70 shown in FIG. The manufacturing apparatus 70 basically has the same structure as the manufacturing apparatus 30 described above ([0022]), but the sheet-like elastic base 12 is not supplied and cured as the elastic base material M, but is described in a separate process ( [0012]) The sheet-like elastic substrate 12 is manufactured in advance from a resin or the like and wound into a roll, and the sheet-like elastic substrate 12 is a part of the roll mechanism 32. 32d is used to supply the sheet-like elastic base 12 to the manufacturing apparatus 70. In this manufacturing apparatus 70, since the already cured sheet-like elastic substrate 12 is used, a heating mechanism is not required, while the adhesive force due to the curing of the raw material M is used for joining the sheet-like elastic substrate 12 and the conductive layer 16. Absent. For this reason, a general adhesive is used as the adhesive 14 and the manufacturing apparatus 70 has a pair of pressing rolls 35 for reliably joining the sheet-like elastic substrate 12 and the conductive layer 16 downstream of the sheet-like elastic substrate supply roll 2d. , 35 are provided.

なお、実施例、別の実施例、変更例および別の変更例では、導電性シート状弾性体１０,２４,２６,２８が連続して製造されるが、本発明はこれに限定されるものではなく、例えば５ｍ程度の導電層転写用フィルム２０や、基材シート２２を使用して、パッチ的に弾性基体原料Ｍの供給および加熱等を実施するようにしてもよい。 In addition, in an Example, another Example, a modification, and another modification, the electroconductive sheet-like elastic bodies 10, 24, 26, 28 are manufactured continuously, but the present invention is limited to this. Instead, for example, the conductive layer transfer film 20 of about 5 m or the base sheet 22 may be used to supply and heat the elastic base material M in a patch manner.

(実験例)
以下に、本発明に係る導電性シート状弾性体に係る導電層を形成する金属の種類および厚みを変化させた場合の表面抵抗値についての実験例を示す。本実験に使用された導電性シート状弾性体は前述(［００２２］)した製造装置３０を使用して以下の手順で製造した。 (Experimental example)
Below, the experiment example about the surface resistance value at the time of changing the kind and thickness of the metal which form the electroconductive layer which concerns on the electroconductive sheet-like elastic body which concerns on this invention is shown. The conductive sheet-like elastic body used in this experiment was manufactured by the following procedure using the manufacturing apparatus 30 described above ([0022]).

(製造方法)
・導電層転写用フィルムの準備
別工程において、基材フィルムとして０.０５ｍｍのＰＥＴフィルムを使用し、表１に記載する金属(銀＞銅＞ニッケル＞アルミニウム(不等号は導電性の良し悪しを示す))の種類およびその蒸着された導電層の厚みとして、実施例１〜１１に係る導電層転写用フィルムを準備し、これを供給ロール３２ａにセットする。

(Production method)
・ Preparation of conductive layer transfer film In a separate process, a 0.05 mm PET film was used as the base film, and the metals listed in Table 1 (silver>copper>nickel> aluminum (inequalities indicate good or bad conductivity) )) As the type and the thickness of the deposited conductive layer, the conductive layer transfer films according to Examples 1 to 11 were prepared and set on the supply roll 32a.

ポリエーテルポリオール(平均分子量３０００、水酸基価４３.０)１００重量部に対して、金属触媒(スタナスオクトエート)０.１重量部と、シリコーン整泡剤３重量部とから混合物を得て、ここに０.１ＮＬ/分の流量で造泡用気体としての窒素と、イソシアネートインデックスが０.９〜１.１となるように設定されたポリイソシアネート(クルードＭＤＩ、ＮＣＯ含有量：３１％)とを混合・剪断を実施して弾性基体原料Ｍを得る。そしてこの弾性基体原料Ｍをロール機構３２上に２９.４〜９８.１Ｎ(３〜１０ｋｇｆ)(張力をかける対象物が１０００ｍｍ幅の場合)程度のテンションをかけられた状態で供給ロール３２ａから連続的に供給されている導電層転写用フィルムの導電層上に吐出ノズル３４から、シート状弾性基体の完成時密度が０.３ｇ/ｃｍ³となるように供給し、製品厚制御手段３６に設定により、製品完成時の導電性シート状弾性体の厚さが０.５ｍｍとなるようにする。そしてトンネル式加熱炉内で条件１５０℃〜２００℃、１〜３分間の加熱が実施して、弾性基体原料Ｍの反応および硬化が進行させて導電層１６に対してシート状弾性基体が接合した導電性シート状弾性体を得、ここに積層されている基材フィルムだけを、基材フィルム回収ロール３２ｂにより除去・回収しつつ、完成した導電性シート状弾性体を製品回収ロール３２ｃで回収する。 A mixture was obtained from 0.1 part by weight of a metal catalyst (stannas octoate) and 3 parts by weight of a silicone foam stabilizer with respect to 100 parts by weight of a polyether polyol (average molecular weight 3000, hydroxyl value 43.0), Here, nitrogen as a foaming gas at a flow rate of 0.1 NL / min, and a polyisocyanate (crude MDI, NCO content: 31%) set to have an isocyanate index of 0.9 to 1.1, Are mixed and sheared to obtain the elastic base material M. The elastic base material M is continuously supplied from the supply roll 32a in a state where a tension of about 29.4 to 98.1 N (3 to 10 kgf) (when the object to be tensioned is 1000 mm wide) is applied on the roll mechanism 32. Is supplied from the discharge nozzle 34 onto the conductive layer of the conductive layer transfer film supplied in such a manner that the density upon completion of the sheet-like elastic substrate is 0.3 g / cm ^3, and is set in the product thickness control means 36. Thus, the thickness of the conductive sheet-like elastic body when the product is completed is set to 0.5 mm. Then, heating is performed for 1 to 3 minutes under conditions of 150 ° C. to 200 ° C. in a tunnel-type heating furnace, and the reaction and curing of the elastic substrate raw material M proceeds to join the sheet-like elastic substrate to the conductive layer 16. A conductive sheet-like elastic body is obtained, and the completed conductive sheet-like elastic body is recovered by the product recovery roll 32c while only the base film laminated thereon is removed and recovered by the base film recovery roll 32b. .

そして表１の内容に従って製造された実施例１〜１１に係る導電性シート状弾性体から、寸法１００ｍｍ(縦)×１００ｍｍ(横)×０.５ｍｍ(厚さ)の試験片を得て、これらについて導電層側の表面抵抗値(Ω)を測定した。なお測定条件は以下の通りである。 And from the electroconductive sheet-like elastic bodies according to Examples 1 to 11 manufactured according to the contents of Table 1, test pieces having dimensions of 100 mm (length) x 100 mm (width) x 0.5 mm (thickness) were obtained. The surface resistance value (Ω) on the conductive layer side was measured. Measurement conditions are as follows.

・導電性シート状弾性体の導電層側の表面抵抗値の測定
(測定条件１(測定範囲：１.０×１０^６Ω以上))
抵抗値測定機器：ＴＯＡＵＬＴＲＡＭＥＧＯＨＭＭＥＴＥＲ(東亜電波工業製)
調整；各試験体は、２０℃×５５％ＲＨ、２４時間の条件で調整室に放置後、測定に供した。
(測定条件２(測定範囲：１.０×１０^−２〜１×１０^６Ω))
抵抗値測定機器：ロレスタ−ＥＰ(三菱化学製)
調整は、測定条件１に準じる。・ Measurement of surface resistance on the conductive layer side of the conductive sheet-like elastic body
(Measurement condition 1 (measurement range: 1.0 × 10 ⁶ Ω or more))
Resistance measuring device: TOA ULTRA MEGOHMMETER (manufactured by Toa Denpa Kogyo)
Adjustment: Each specimen was left in the adjustment room under the conditions of 20 ° C. × 55% RH for 24 hours and then subjected to measurement.
(Measurement condition 2 (measurement range: 1.0 × 10 ⁻² to 1 × 10 ⁶ Ω))
Resistance measuring device: Loresta-EP (Mitsubishi Chemical)
Adjustment is in accordance with measurement condition 1.

(結果)
実験例の結果を上記表１に併せて記載する。この表１から、導電性の低いアルミニウムから、最も薄い３ｎｍの導電層を蒸着した場合の表面抵抗値は５.０×１０^７Ωであり、また最も導電性の高い銀から、最も厚い２００ｎｍの導電層を蒸着した場合の表面抵抗値は３.０×１０^−１Ωであった。ここから実験に使用した全ての導電層において、本発明に係る導電率が達成されることが確認された。また安価で、かつ耐候性に優れたニッケルの場合、導電層の厚さを１０００ｎｍとしても６.０×１０^０Ωであり、蒸着させる導電層の厚みの制御精度が粗いものであっても、目的とする導電率に容易に設定し得る。 (result)
The results of the experimental examples are also shown in Table 1 above. From this Table 1, the surface resistance value when depositing the thinnest conductive layer of 3 nm from aluminum having low conductivity is 5.0 × 10 ⁷ Ω, and from the highest conductive silver to 200 nm, which is the thickest. When the conductive layer was deposited, the surface resistance value was 3.0 × 10 ⁻¹ Ω. From this, it was confirmed that the conductivity according to the present invention was achieved in all the conductive layers used in the experiment. In the case of nickel, which is inexpensive and has excellent weather resistance, even if the thickness of the conductive layer is 1000 nm, it is 6.0 × 10 ⁰ Ω, and even if the control accuracy of the thickness of the conductive layer to be deposited is rough, The target conductivity can be easily set.

本発明の好適な実施例に係る導電性シート状弾性体を一部切り欠いて示す概略斜視図である。1 is a schematic perspective view showing a conductive sheet-like elastic body according to a preferred embodiment of the present invention, partly cut away. 実施例に係る導電性シート状弾性体の製造方法を示す工程図である。It is process drawing which shows the manufacturing method of the electroconductive sheet-like elastic body which concerns on an Example. 実施例に係る導電性シート状弾性体をメカニカルフロス法により製造する製造装置の一例である。It is an example of the manufacturing apparatus which manufactures the electroconductive sheet-like elastic body which concerns on an Example by the mechanical floss method. 実施例に係る導電層転写用フィルムを蒸着により製造する製造装置の一例を示す概略図である。It is the schematic which shows an example of the manufacturing apparatus which manufactures the film for conductive layer transfer which concerns on an Example by vapor deposition. 導電層転写用フィルムを製造する際の各段階での状態を概略的に示す状態図である。It is a state figure showing roughly the state in each step at the time of manufacturing a film for conductive layer transfer. 導電性シート状弾性体を製造する際に使用する、弾性基体原料、シート状弾性基体、導電層および基材フィルム等の各工程での状態を概略的に示す状態図である。It is a state figure which shows roughly the state in each process, such as an elastic base material, a sheet-like elastic base, a conductive layer, and a base film, used when manufacturing a conductive sheet-like elastic body. 変更例に係る導電性シート状弾性体を拡大して示す縦断断面図である。It is a longitudinal cross-sectional view which expands and shows the electroconductive sheet-like elastic body which concerns on the example of a change. 変更例に係る導電性シート状弾性体の製造装置を示す概略図である。It is the schematic which shows the manufacturing apparatus of the electroconductive sheet-like elastic body which concerns on the example of a change. 別の変更例に係る導電性シート状弾性体を拡大して示す縦断断面図である。It is a longitudinal cross-sectional view which expands and shows the electroconductive sheet-like elastic body which concerns on another modification. 別の変更例に係る導電性シート状弾性体の製造装置を示す概略図である。It is the schematic which shows the manufacturing apparatus of the electroconductive sheet-like elastic body which concerns on another modification. 別の実施例に係る導電性シート状弾性体の製造装置を示す概略図である。It is the schematic which shows the manufacturing apparatus of the electroconductive sheet-like elastic body which concerns on another Example. 従来技術に係るスパッタリングによって導電性シート状弾性体を製造する製造装置を示す概略図である。It is the schematic which shows the manufacturing apparatus which manufactures a conductive sheet-like elastic body by sputtering which concerns on a prior art.

Explanation of symbols

１０導電性シート状弾性体
１２シート状弾性基体
１４接着剤
１５金属
１６導電層
１７離型剤
１８基材フィルム
２０導電層転写用フィルム
２２基材シート
２４導電性シート状弾性体
２６導電性シート状弾性体
２８導電性シート状弾性体
３６コーター(製品厚制御手段)
Ｍ弾性基体原料 DESCRIPTION OF SYMBOLS 10 Conductive sheet-like elastic body 12 Sheet-like elastic substrate 14 Adhesive 15 Metal 16 Conductive layer 17 Release agent 18 Base film 20 Conductive layer transfer film 22 Base sheet 24 Conductive sheet-like elastic body 26 Conductive sheet form Elastic body 28 Conductive sheet-like elastic body 36 Coater (product thickness control means)
M Elastic base material

Claims

A sheet-like elastic substrate (12);
It consists of a conductive layer (16) formed by vapor-depositing metal (15) on at least one surface of this sheet-like elastic substrate (12),
The conductive layer (16) is deposited on a separately prepared base film (18) and then laminated on at least one surface of the sheet-like elastic substrate (12) to remove the base film (18). Thus, the conductive sheet-like elastic body, which is laminated and transferred to the sheet-like elastic substrate (12).

The conductive sheet-like elastic body according to claim 1, wherein a base sheet (22) is integrally laminated on the side of the sheet-like elastic substrate (12) where the conductive layer (16) is not transferred in a laminated manner.

The sheet-like elastic substrate (12) is made of olefin resin such as urethane resin, polyethylene resin or polypropylene resin, polystyrene resin, silicone resin, acrylic resin, polyvinyl chloride or various rubbers. Conductive sheet-like elastic body.

The conductive sheet-like elastic body according to any one of claims 1 to 3, wherein the thickness of the conductive layer (16) is set in a range of 3 to 200 nm.

The surface resistance value of the obtained conductive sheet-like elastic body (10, 24, 26, 28) is set to 1.0 × 10 ^{−1 to} 1.0 × 10 ⁸ Ω or less by laminating the conductive layer (16). The conductive sheet-like elastic body according to any one of claims 1 to 4.

Conductive layer transfer film in which a conductive layer (16) of metal (15) is vapor-deposited on one surface of a base film (18) with a release agent (17) on a sheet-like elastic substrate (12) of a predetermined thickness (20) and prepare
The sheet-like elastic substrate (12) and the conductive layer transfer film (20) are bonded via an adhesive (14) so that the sheet-like elastic substrate (12) and the conductive layer (16) face each other,
A conductive sheet-like elastic body in which the conductive layer (16) is transferred to the sheet-like elastic substrate (12) is produced by peeling the base film (18) from the conductive layer (16). A method for producing a conductive sheet-like elastic body.

Prepare a conductive layer transfer film (20) in which a conductive layer (16) is formed by vapor-depositing a metal (15) on one surface of a base film (18) in advance through a release agent (17),
Supply the required elastic substrate material (M) from above to the conductive layer (16) side of the conductive layer transfer film (20),
By proceeding the reaction and curing of the supplied elastic substrate raw material (M), a sheet-like elastic substrate (12) having a predetermined thickness is formed on the conductive layer (16),
After the sheet-like elastic base (12) is bonded to the conductive layer (16), the base film (18) is peeled off from the conductive layer (16), so that the conductive layer is provided on the sheet-like elastic base (12). A method for producing a conductive sheet-like elastic body, characterized in that a conductive sheet-like elastic body having (16) transferred in a laminated manner is produced.

Prepare a conductive layer transfer film (20) in which a conductive layer (16) is formed by vapor-depositing a metal (15) on one surface of a base film (18) in advance through a release agent (17),
Supply the required elastic substrate material (M) from above to the conductive layer (16) side of the conductive layer transfer film (20),
Next, with respect to the elastic substrate material (M) supplied on the conductive layer (16), another conductive layer transfer film (20) is disposed so that the elastic substrate material (M) and the conductive layer (16) face each other. To feed continuously,
By proceeding the reaction and curing of the supplied elastic substrate raw material (M), a sheet-like elastic substrate (12) having a predetermined thickness in which the conductive layers (16, 16) are bonded to both surfaces thereof is formed,
After the sheet-like elastic substrate (12) and the conductive layers (16, 16) existing on both surfaces thereof are joined, the base film (18, 18) is removed from the two conductive layers (16, 16). A conductive sheet-like elastic body characterized by producing a conductive sheet-like elastic body in which the conductive layers (16, 16) are laminated and transferred to both surfaces of the sheet-like elastic substrate (12) by peeling each of them. A method for producing an elastic body.

Supply the required elastic base material (M) on the base sheet (22),
Conductive layer in which metal (15) is deposited on one surface of base film (18) via release agent (17) to form conductive layer (16) with respect to this elastic base material (M) Supply the transfer film (20) so that the elastic base material (M) and the conductive layer (16) face each other,
By proceeding with the reaction and curing of the supplied elastic base material (M), the conductive layer (16) is bonded to one surface thereof, and the base sheet (22) is bonded to the other surface. Forming a sheet-like elastic substrate (12) having a predetermined thickness,
After the conductive layer (16) is bonded to the sheet-like elastic substrate (12), the base film (18) is peeled off from the conductive layer (16), whereby one of the sheet-like elastic substrates (12). A conductive sheet-like elastic body is produced in which a conductive layer (16) is transferred in a laminated manner on the surface of the substrate and a base sheet (22) is integrally laminated on the other surface. A method for producing a sheet-like elastic body.

The method for producing a conductive sheet-like elastic body according to any one of claims 6 to 9, wherein the sheet-like elastic substrate (12) is produced by a mechanical flossing method.

The method for producing a conductive sheet-like elastic body according to any one of claims 6 to 10, wherein the elastic base material (M) has a predetermined thickness by various coaters (36) or the like.

The laminate of the sheet-like elastic substrate (12) and the conductive layer (16) is used together with an adhesive (14) such as a hot-melt adhesive having a melting point of 60 to 150 ° C. The manufacturing method of the electroconductive sheet-like elastic body in any one of.