JP2004078108A - Exposure equipment mask plate fixing jig - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mask plate fixing fixture for an exposure device with which an exposure is performed by using a mask plate supporting device for different sizes of mask plates when such a large substrate as a plasma display panel (PDP) is exposed, and which cancels a dead weight of the mask plate by a vacuum suction. <P>SOLUTION: The mask plate fixing fixture serves as a mask attachment which is sucked and held detachably on a mask holder, and the mask plate is held via a cramp mechanism or a sucking port, thus, the mask plate mounted on the mask plate fixing fixture is handled as a single unit. Further, the mask plate is mounted on a mask holder base via the mask plate fixing fixture, thus, the mask plate corresponding to the size of the aperture determining the inner diameter of the mask plate fixing fixture is selectively mounted on the mask holder base. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a mask plate fixing jig for an exposure apparatus, and more particularly, to exposing a large substrate such as a PDP (plasma display panel), the same mask plate supporting device is used even if the size of the mask plate is different. The present invention relates to a mask plate fixing jig of an exposure apparatus which can perform exposure and cancel the own weight of the mask plate due to negative pressure suction.
[0002]
[Prior art]
In the production of display panels such as PDPs and liquid crystal panels, there is a process of using a mask plate on which a pattern is drawn on a transparent plate as an original plate and projecting and exposing an image of the original plate on a glass substrate coated with a photosensitive material to copy the pattern. . Examples of this type of exposure apparatus include JP-A-3-272127, JP-A-4-5659, and JP-A-7-134426.
FIG. 6 is a plan view of a main part of a mask plate support device and a side view centering on a mask plate support portion in the latter exposure device disclosed in Japanese Patent Application Laid-Open No. 7-134426. is there.
In FIG. 6A, a frame 7 having good flatness is formed by four sides 7a, 7b, 7c, 7d having the same dimensions as the outer diameter of the mask plate 1, and an air suction groove Gr is provided on each side. Make it an adsorption surface. The mask plate 1 adsorbed by the air is held with good parallelism.
[0003]
Next, an L-shaped fitting 81 shown in FIG. 6B and a steel ball S at the tip are provided at the center of one side 7a of the frame 7 and at two symmetrical locations near both ends of the opposite side 7c. Each of the support members 8 including the adjusting screws 82 is attached. By rotating each adjusting screw 82, the position of each of the three steel balls S is adjusted to be the same distance with respect to the lower surface of the frame 7, and each of the three steel balls S is connected to the horizontal portion 3a of the support member 3. To support the frame 7 at three points.
Next, a connection composed of an L-shaped bracket 91, a mounting tool 92, and a connection pin 93 for connecting them, shown at (c), at two symmetrical points near both ends of one side 7a and at the center of the opposite side 7c. Tools 9 are provided respectively. When the L-shaped bracket 91 is fixed to the horizontal portion 3a of the support member 3 and the fixture 92 is fixed to the frame 7, the frame 7 is flexibly connected to the support member 3.
As described above, the small mask plate 1 is not curved, and the frame 7 is not distorted, the mask plate 1 is fixed to the support member 3 with good parallelism, the focus adjustment accuracy is improved, and accurate exposure is performed. It becomes possible.
[0004]
On the lower side of the mask plate 1, a mounting table (glass plate chuck stage) for a plate to be exposed is arranged. In the proximity type exposure, the mask plate 1 and the glass substrate mounted on the mounting table are used. Is adjusted to a proximity gap, that is, a parallel and minute gap Δg (for example, 50 to 100 μm). In this adjustment, the mounting table is lowered to place the glass substrate, and then raised to approach the mask plate 1, and the gap between the mask plate 1 and the glass substrate is usually measured at three points by a plurality of gap measuring devices. Is measured. Referring to the measured gaps of the three points, the three positions of the mounting table are raised or lowered by the three tilt mechanisms so that the mask plate 1 and the glass substrate are adjusted to have a uniform gap Δg. .
[0005]
[Problems to be solved by the invention]
The above is an example of a small liquid crystal panel. On the other hand, recently, PDPs are used for large TVs exceeding 30 inches. In this connection, a substrate larger than the liquid crystal panel is used, and the size of the substrate is various. Therefore, the size of the mask plate is also increasing.
Therefore, a mask plate supporting mechanism for a liquid crystal panel as shown in FIG. 6 cannot expose a large mask plate exceeding 30 inches. The reason for this is that deflection of its own weight occurs and the gap Δg with the glass substrate cannot be maintained uniformly.
Conventionally, two methods have been proposed to correct the self-weight deflection.
One is a two-side correction method that applies a moment in the opposite direction to the deflection when supporting two opposite sides of the mask plate, and the other is to make the upper part of the mask plate a closed space and This is a method in which the self-weight of the mask plate is canceled by making the pressure negative.
In the former two-side correction method, there is a limit to the size of the substrate, and it is difficult to perform uniform correction as the substrate becomes larger. In the latter method of canceling its own weight, it is necessary to provide a mask holder for each size of the mask plate because of forming a closed space. Therefore, a mask plate support device including a support mechanism fixed to the exposure device that supports the mask holder must be provided corresponding to the mask size, and a transfer robot for the mask plate or the like must also correspond thereto.
SUMMARY OF THE INVENTION An object of the present invention is to solve such a problem of the prior art. When exposing a large substrate such as a PDP, the same mask plate supporting device is used even when the size of the mask plate is different. It is an object of the present invention to provide a mask plate fixing jig of an exposure apparatus which can perform exposure and cancel the own weight of the mask plate due to negative pressure suction.
[0006]
[Means for Solving the Problems]
A feature of the mask plate fixing jig of the exposure apparatus of the first invention that achieves the above object is that the jig is detachably suction-held through suction holes provided in a mask holder base having a window through which exposure light is transmitted. A mask plate fixing jig of an exposure apparatus for forming a mask holder by
The outer shape covers the suction hole, and the inner diameter is formed by a rectangular opening that is opened according to the size of the rectangular mask plate to be mounted, and the periphery of the opening is a rectangle for holding the mask plate. A plurality of clampers are provided corresponding to each side of the mask plate, and each side of the mask plate having a size corresponding to the opening is held by the plurality of clampers, and the mask plate fixing jig is suction-held on the mask holder base. The air in the space between the mask plate and the mask base is sucked, and this space becomes a negative pressure chamber.
A feature of the mask plate fixing jig of the exposure apparatus of the second invention that achieves the above object is that the exposure apparatus detachably held on a mask holder base having a window through which exposure light passes to form a mask holder. Mask plate fixing jig,
The outer shape covers the suction hole, and the inner diameter is formed by an opening formed according to the size of the mask plate to be mounted, and around the opening, the suction hole for sucking the mask plate and the mask plate are held. And a mask plate of a size corresponding to the opening is sucked by suction holes provided around the opening to hold the mask plate, and the mask plate fixing jig is held by suction on the mask holder base. This forms a space serving as a negative pressure chamber with the mask base. When the mask plate is not held by suction, the mask plate is held by the clamp mechanism.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
As in the above configuration, in the first and second inventions, the mask plate fixing jig is a mask attachment which is detachably attached to and held by the mask holder. In order to hold a rectangular mask plate around the opening, a plurality of clampers are provided corresponding to the respective sides of the rectangle, so that the clamper holds each side of the rectangular mask plate with high surface accuracy. This makes it possible to mount the mask plate on the mask holder base via the mask plate fixing jig which is sucked in a state close to the airtight state. Then, by sucking air in the space between the mask plate and the mask base, this space becomes a negative pressure chamber, and the mask plate can be brought into close contact with the mask base.
According to the second aspect of the present invention, when the mask plate fixing jig is not held by the mask holder base, the mask plate is held by the clamp mechanism. These can be handled integrally.
In the first and second inventions, since the mask plate is mounted on the mask holder base via the mask plate fixing jig, the size of the opening for determining the inner diameter of the mask plate fixing jig is reduced. The corresponding mask plate can be selectively mounted on the mask holder base.
As described above, since the outer size of the mask plate fixing jig is constant, it is possible to prepare mask holders of the same shape having mask plates of various shapes regardless of the mask size. Transport processing and the like are also facilitated. Further, since the negative pressure chamber is formed by the mask holder base and the mask plate fixing jig, the own weight of the mask plate can be canceled by the negative pressure, and the deflection due to the own weight can be prevented. As a result, when exposing a large substrate such as a PDP, the exposure can be performed using the same mask plate supporting apparatus even if the sizes of the mask plates are different.
[0008]
【Example】
FIGS. 1A and 1B are explanatory views of a mask plate supporting mechanism using a mask plate fixing jig of the present invention, wherein FIG. 1A is a cross-sectional view of a mask plate supporting device, and FIG. FIG. 2 is a perspective view of a used mask attachment, FIG. 2 is a plan view of an embodiment of another mask plate fixing jig having a different clamper, FIG. 3 is a plan view of another mask plate fixing jig, and FIG. FIG. 5 is a plan view of another mask plate fixing jig, and FIG. 5 is a perspective view showing a state in which a mask plate is mounted on the mask plate fixing jig of FIG. Note that the same components as those in FIG. 6 are denoted by the same reference numerals, and description thereof will be omitted.
In FIG. 1A, a mask plate supporting device 10 includes a mask holder including a mask holder base 2 and a mask attachment plate 11, and a support member 3 shown in FIG. 6 for supporting the mask holder. The mask attachment plate 11 includes the mask plate 1 and a mask fixing jig 13 to which the mask plate 1 is attached.
The mask holder base 2 corresponds to the frame 7 in FIG. 6, and is supported by the support member 3 via the three steel balls S of the connecting tool 9 and the supporting tool 8 as in the case of the frame 7. The mask holder base 2 has a frame-shaped frame 5 having a rectangular opening 4a corresponding to the maximum exposure area of the mask plate. The upper surface of the opening 4a receiving the exposure light is made of the same material as the mask plate 1. The window plate 5a is fixed by an adhesive, and the space of the opening 4a is kept airtight together with the mounted mask plate 1. Thereby, the space of the opening 4 a forms the negative pressure chamber 6.
[0009]
A mask attachment plate 11 is fixed to the lower surface of the opening 4a of the frame 5 by vacuum suction. For this purpose, a rectangular groove is double formed along the rectangular side on the contact surface between the frame 5 and the mask attachment plate 11, and as shown in FIG. 4b. These suction holes 4b, 4b are suctioned by air through the port 6a, and the mask attachment plate 11 is suctioned to the lower surface of the frame 5 by negative pressure.
Further, a port 6b communicating with the negative pressure chamber 6 is opened on the opposite side to the port 6a to make the negative pressure chamber 6 formed by the opening 4a of the frame 5 into a negative pressure, and through this port 6b. The air in the negative pressure chamber 6 is sucked and maintained at a negative pressure, thereby canceling the own weight of the mask plate 1 and preventing the mask plate 1 from sagging by its own weight.
As shown in FIGS. 1A and 1B, the mask attachment plate 11 is formed by a mask plate 1 and a frame-shaped mask fixing jig 13 having a rectangular opening 12a one size smaller than the size of the mask plate 1. The mask plate 1 having a size suitable for the opening 12a is suction-fixed to the lower surface of the mask fixing jig 13, and twelve clampers (clamp mechanisms) 14, 14 provided on the lower surface of the mask fixing jig 13. ,..., The mask plate 1 is fixed to the opening 12a. Here, the space formed by the rectangular opening 12a is a part of the negative pressure chamber 6 continuous with the opening 4a.
[0010]
As shown in FIG. 1B, three clampers 14 are provided at equal intervals corresponding to each side of the mask fixing jig 13, and slide along the lower surface of the mask fixing jig 13. Go back and forth towards the center. The grooves in which the clampers 14, 14,... Slide are not shown in the figure, but are cut straight on the lower surface of the mask fixing jig 13 and fitted with inverted mountain-shaped projections. Slide without falling from the bottom. When the clamper 14 advances toward the inside (toward the center) of the mask plate 1, the claw portion 14 a formed as a step on the tip side abuts and engages with the lower surface of the mask plate 1, so that the mask plate 1 Hold each side. Further, when the clamper 14 is retracted, the claw portion 14a on the tip end side is detached from the lower surface of the mask plate 1 and the mask plate 1 is detached from the lower surface of the mask fixing jig 13 when the suction of the mask plate 1 is released. it can. Note that the engaging surface of the claw portion 14a is an inclined surface having a small angle so that the gap with the lower surface of the mask fixing jig 13 is slightly widened in the forward direction.
The clamper 14 is manually moved forward and backward, and the lower surface of the mask plate 1 is held by the clamper 14. This prevents the mask plate 1 from falling when transporting the mask fixing jig 13 (mask attachment plate 11) on which the mask plate 1 is mounted, or when attracting the mask plate 1 to the mask attachment plate 11.
[0011]
On the lower surface of the mask fixing jig 13, a rectangular groove is formed along a rectangular side on a contact surface with the mask plate 1, and is provided as a suction hole 12 b. The suction holes 12b are suctioned by air through the ports 12c, and the mask plate 1 is suctioned to the lower surface of the mask fixing jig 13 by negative pressure. The mask plate 1 is brought into close contact with the mask fixing jig 13 by this suction holding, whereby the accuracy of the position and the thickness direction of the mask fixing jig 13 and the mask plate 1 is secured. On the other hand, the mask attachment plate 11 is also positioned and held on the mask attachment plate 11 with high precision in close contact with the mask holder base 2.
The port 6a, the port 6b, and the port 12b are pressed by a vacuum pad (not shown) against these end openings, and the air is sucked into the mask plate 1, the mask fixing jig 13, and the mask attachment. The respective suction of the plate 11 and the mask holder base 2 is performed. Therefore, if such suction is released, the mask plate 1 and the mask fixing jig 13, and the mask attachment plate 11 and the mask holder base 2 constituting the mask holder can be easily separated, and the mask plate 1 can be attached and detached. Easy.
Reference numeral 15 denotes a mounting table (glass plate chuck stage) for the plate to be exposed, which is disposed below the mask plate 1 and is moved left and right by the XYZ stage 16 while moving up and down. A glass substrate 17 of PDP is mounted on the mounting table 15 as a plate to be exposed. At this time, the gap Δg is adjusted to 50 to 100 μm by the XYZ stage 16.
[0012]
Here, as the mask fixing jig 13 of the mask attachment plate 11, one having an opening 12a corresponding to the size of the mask plate 1 used for exposure is prepared. Of course, at this time, the opening 12a is slightly smaller than the outer shape of the mask plate 1 mounted on the mask fixing jig 13, but substantially corresponds to the size of the opening 12a.
Since the size of the opening 4a of the mask holder base 2 corresponds to the maximum exposure range, a large number of openings 12a having various smaller sizes and having the same outer shape are prepared. As a result, the mask attachment plate 11 can be attached to the mask holder base 2 even if the size of the mask plate 1 changes so that the frame of the mask fixing jig 13 has the outer dimensions (size) that covers the suction holes 4b, 4b. What is necessary is just to make it equal shape.
[0013]
Here, the material of the mask fixing jig 13 of the mask attachment plate 11 is CFRP (Carbon Fiber Glass Reinforced Plastic), a so-called carbon fiber reinforced plastic, which is formed by polyimide resin 13a on the surface. Is coated. Since the carbon fiber reinforced plastic has high strength and the specific gravity is about half of the specific gravity of the glass plate, the thickness D can be twice or more than that of the mask plate 1. Thereby, the bending strength of the mask attachment plate 11 including the mask plate 1 is increased. Further, the coating of the polyimide film 13a has a function of preventing deterioration of the mask fixing jig 13 made of carbon fiber reinforced plastic against ultraviolet rays and a function of improving chemical resistance during mask cleaning.
[0014]
The thickness D (see FIG. 1B) of the mask fixing jig 13 corresponds to the weight per area (area density) of the mask plate 1 to be mounted. Therefore, even if the opening 12a of the mask fixing jig 13 is increased or decreased according to the size of the mask plate 1 to be mounted, a decrease in the frame width of the mask fixing jig 13 due to the increase or decrease causes a change in the size of the mask plate 1. And the weight of the entire mask attachment plate 11 on which the mask plate 1 is mounted is such that even if the size of the mask plate 1 changes, its weight hardly changes. I have.
That is, by selecting the thickness D of the mask fixing jig 13 and the surface density of the mask plate 1 to be mounted, the weight of the entire mask attachment plate 11 is selected so as to be substantially constant regardless of the size of the mask plate. Can be. By doing so, when changing the mask plate or transporting the mask attachment plate 11, the change in weight is minimized and the outer shape is made equal, and the transport of the mask attachment plate 11 is performed in a safe and reliable state. Can be.
As described above, the large mask plate 1 does not bend due to its own weight, and neither the mask attachment plate 11 nor the mask holder base 2 is distorted. And accurate exposure is possible.
[0015]
FIG. 2 is a plan view of another mask fixing jig 130. Instead of the slide clamper 14 of the mask fixing jig 13, the tip end side of L is rotated by an L-shaped lever centered on the root. A clamper 140 is provided as a claw for rotating the claw to move the tip end in and out. A total of twelve clampers 140 are provided, four on the long side and two on the short side. 141a, 141b, 141c, and 141d are mask positioning pins provided corresponding to the opposing sides, respectively, and only 141d is provided at a corner, and these pins are movable. 142 is a contact disk (seat surface) provided corresponding to the position where the finger of the transfer robot contacts, and 143 is a hanging bracket.
Note that, in this example, the suction holes 12b are elongated independent grooves, and are provided along the respective sides, one on the short side and two on the long side. The ports 12c are provided corresponding to the respective grooves so as to communicate with the respective grooves.
The outer shape of the mask fixing jig 130 is the same as that of the mask fixing jig 13. For example, the outer shape is 1500 mm × 1900 mm, and the opening 12 a for mounting the mask plate 1 has a size of 1050 mm × 1250 mm. . The mask plate 1 mounted thereon is horizontally long.
FIG. 3 is a plan view of another mask fixing jig 131, and its outer shape is the same as that of the mask fixing jig 131, that is, 1500 mm × 1900 mm, but the opening 12a is 1250 mm × 750 mm, and is attached thereto. The mask plate 1 is a vertically long substrate, contrary to FIG. In addition, two elongated independent grooves constituting the suction holes 12b are provided along the respective sides, two on the short side and one on the long side, contrary to FIG.
[0016]
FIG. 4 is a plan view of yet another mask fixing jig 132 in which fourteen clampers 140 are provided on each side, that is, a total of sixteen.
The suction holes 12b are elongated independent grooves, and are provided along two sides on each side. Further, ports 12c are provided so as to communicate with the respective grooves.
The outer shape of the mask fixing jig 132 is 1500 mm × 1900 mm, which is the same as that of the mask fixing jig 131, but the opening 12 a is 1500 mm × 1650 mm, and the mask plate 1 a (see FIG. Both the short side and the long side are longer than the mask plate 1 of FIG.
[0017]
FIG. 5 is a perspective view showing a state in which the mask plate 1a is mounted. In FIGS. 4 and 5, three sides of the mask fixing jig 132 guide the mounting of the mask plate 1a to the jig. A conical guide pole 144 is provided. The remaining one side is provided with a mask loading guide 145 for dropping the mask plate 1a. The mask loading guide 145 is a rotary temporary support mechanism that temporarily supports the mask plate 1a with a gap into which a finger can enter. This is a conical pole in which the rotating lever 146 is horizontally fixed to the head, and is rotatably supported by the mask fixing jig 132. A spiral flange 147 is provided on the side surface of the mask loading guide 145, and one side of the mask plate 1a is mounted on a high position of the flange 147, so that the mask plate 1a is mounted on the mask fixing jig 132. In some cases, a gap between the upper surface of the mask fixing jig 132 and the mask plate 1a for a finger to enter is secured in a part thereof.
Thus, the mask plate 1a can be temporarily placed on the mask fixing jig 132 with a gap without pinching a finger.
Next, if the rotation lever 146 of the mask loading guide 145 is manually rotated, one engaged side of the mask plate 1a is lowered along the spiral flange 147 along the spiral of the flange, and the mask is moved downward. It falls on the upper surface of the fixing jig 132. Here, by clamping the mask plate 1 a with the clamper 140, the mask plate 1 a can be safely mounted on the mask fixing jig 132.
[0018]
By the way, when the mask plate 1a becomes large, it becomes difficult to mount the mask plate 1a on the mask fixing jig 132, and in addition to pinching a finger, defects such as deformation of the mask plate and chipping around the periphery are likely to occur. However, by adopting the above-described configuration, anyone can safely and easily attach the mask plate 1a to the mask fixing jig 132.
[0019]
As described above, in the embodiment, the mask plate fixing jig has been described centering on the example of the proximity type exposure apparatus. However, the present invention is applied as a mask plate fixing jig of the contact type exposure apparatus. Of course, it can also be used.
[0020]
【The invention's effect】
As described above, in the present invention, the mask plate fixing jig is a mask attachment detachably held on the mask holder, and the mask plate is attached to the mask holder base via the mask plate fixing jig. Since the mounting is performed, the mask plate can be selectively mounted on the mask holder base according to the size of the opening that determines the inner diameter of the mask plate fixing jig.
As a result, when exposing a large substrate such as a PDP, the exposure can be performed using the same mask plate supporting apparatus even if the sizes of the mask plates are different.
[Brief description of the drawings]
FIGS. 1A and 1B are explanatory views of a mask plate supporting mechanism using a mask plate fixing jig of the present invention, wherein FIG. 1A is a cross-sectional view of a mask plate supporting device, and FIG. It is a perspective view of the mask attachment using a fixing jig.
FIG. 2 is a plan view of an embodiment of another mask plate fixing jig having a different clamper.
FIG. 3 is a plan view of yet another mask plate fixing jig.
FIG. 4 is a plan view of yet another mask plate fixing jig.
FIG. 5 is a perspective view showing a state where a mask plate is mounted on the mask plate fixing jig of FIG. 4;
FIG. 6 is a plan view of a main part of a mask plate supporting device in the exposure apparatus disclosed in Japanese Patent Application Laid-Open No. 7-134426 and a side view centering on the mask plate supporting portion.
[Explanation of symbols]
1, 1a: mask plate, 2: mask holder base,
3 ... Support member, 4a, 12a ... Opening,
4b, 4b, 12b ... suction holes,
5 ... frame, 5a ... window board,
6 negative pressure chamber, 6a, 6b, 12c port
7 ... frame, 7a, 7b, 7c, 7d ... frame,
8: Supporting tool, 81: L-shaped bracket, 82: Adjusting screw,
9: coupling tool, 91: L-shaped bracket, 92: mounting tool, 93: coupling pin,
10 ... mask plate supporting device, 11 ... mask attachment plate,
13, 131, 132: mask fixing jig, 14, 140: clamper,
14a ... nail,
141a, 141b, 141c, 141d ... Mask positioning pins,
142 ... seat surface,
143: hanging bracket, 144: guide pole,
145: mask loading guide, 146: rotary lever,
147: Spiral flange,
15 mounting table (glass plate chuck stage)
16 XYZ stage, 17 glass substrate,
_Gr : air suction groove, S: steel ball.

Claims (4)

A mask plate fixing jig of an exposure apparatus that forms a mask holder by being removably sucked and held via suction holes provided in a mask holder base having a window through which exposure light is transmitted,
The outer shape covers the suction hole, and the inner diameter is formed by a rectangular opening that is opened according to the size of the rectangular mask plate to be mounted, and holds the mask plate around the opening. A plurality of clampers provided corresponding to each side of the rectangle, each side of the mask plate having a size corresponding to the opening is held by the plurality of clampers, and the mask holder base is provided with a plurality of clampers. A mask plate fixing jig of an exposure apparatus in which a mask plate fixing jig is sucked and held and air in a space between the mask plate and the mask base is sucked to make this space a negative pressure chamber. A mask plate fixing jig of an exposure apparatus that forms a mask holder by being removably sucked and held via suction holes provided in a mask holder base having a window through which exposure light is transmitted,
The outer shape covers the suction hole, and the inner diameter is formed by an opening formed in accordance with the size of the mask plate to be mounted, and around the opening, a suction hole for sucking the mask plate and the suction hole. A clamping mechanism for holding the mask plate is provided, the mask plate having a size corresponding to the opening is sucked by suction holes provided around the opening to hold the mask plate, and the mask plate is held by the mask holder base. The mask plate fixing jig is suction-held to form a space serving as the negative pressure chamber between the mask base and the mask base. When the mask plate is not suction-held, the mask plate is held by the clamp mechanism. Jig for fixing a mask plate of an exposure apparatus to be used. The mask plate and the mask holder are rectangular, and the mask plate fixing jig is made of carbon fiber reinforced plastic and has a thickness such that its thickness is substantially equal to the surface density of the mask plate. 3. The mask plate fixing jig of the exposure apparatus according to claim 2, wherein the jig is a selected rectangle. The clamp mechanism includes a plurality of clampers provided on each side of a rectangle, and at least three sides of each side are provided with conical guide poles for guiding the mounting of the mask plate, and the remaining one side is provided. 4. The mask plate fixing jig of the exposure apparatus according to claim 3, further comprising a temporary support mechanism for temporarily supporting the mask plate in a gap into which a finger enters and releasing the support of the mask plate.

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