JP2003211620A - Film sticking device - Google Patents

Abstract

(57) [Summary] [Problem] It is possible to measure the change in the roll diameter of a lamination roll, and to accurately adhere a film to a substrate even if the roll diameter of the lamination roll changes, thereby preventing the occurrence of bubbles and wrinkles. It is an object of the present invention to provide a film sticking device capable of performing the above. A film for sandwiching a film and a substrate with a lamination roll coated on the surface of a roll body with an elastic member, and pressing the film and the substrate while transporting the film and the substrate as the lamination roll rotates, to attach the film to the substrate. The sticking device measures a deformation state of an elastic member in a radial direction of the lamination roll, and adjusts a rotation amount of the lamination roll based on the deformation state of the elastic member.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film sticking apparatus, and in particular, a film and a substrate are sandwiched by a lamination roll having a surface of a roll body coated with an elastic member, and the film is rotated with the rotation of the lamination roll. The present invention relates to a film sticking device for sticking the film to the substrate while pressing the substrate while conveying the film.

[0002]

2. Description of the Related Art A lamination roll used in this type of film sticking device has an induction heating device consisting of a coil and an iron core inside the roll main body, and a plurality of heat pipes around the roll main body, which are mounted on the surface of the roll main body. Is coated with an elastic member such as silicon rubber in order to sufficiently press the substrate and the film to improve the sticking property between them.

When the substrate and the film are attached, the lamination roll shaft is pressed and rotated with a stronger force than the vertical direction to press the substrate and the film while conveying them. Pressurization of the substrate is often repeated at the same position on the lamination roll, and the elastic member in contact with the substrate is fatigued and deformed, or becomes discolored black due to dirt. When the deformation becomes large, the operator removes the lamination roll from the apparatus and replaces the elastic member. Also, when replacing the elastic member,
The judgment is based on the number of times the substrate and film are attached.

[0004]

[Problems to be Solved by the Invention] In a mass production site,
Each substrate transported at an appropriate interval and the film whose bonding length has been adjusted are aligned at the tip position and pressure is started, and the adhesive feed amount (the substrate and film in the transport direction The length of pasting is controlled by the amount of rotation of the lamination roll and pressure is often stopped at the trailing edge of the film. It is smaller than the amount of adhesive feeding, and there is a non-adhered portion at the rear end of the film.

The longer the sticking feed amount and the larger the rotation amount of the lamination roll, the larger the length of the trailing edge of the unpressurized film becomes. The film in the non-pressurized area comes into contact with the substrate in a state of containing air to form bubbles, which causes wrinkles. Considering that the roll diameter of the lamination roll becomes thin, if the pasting feed length is longer than the film length, the location without the film will be pressed,
The dirt on the surface of the lamination roll adheres to the substrate. Therefore, an object of the present invention is to provide a film sticking apparatus capable of measuring a change in roll diameter of a lamination roll.

Another object of the present invention is to provide a film sticking apparatus capable of accurately sticking a film to a substrate even when the diameter of the lamination roll changes, thereby preventing the formation of bubbles and wrinkles. To do.

[0007]

To achieve the above object, the present invention is characterized in that a film and a substrate are sandwiched by a lamination roll whose surface is coated by an elastic member, and the lamination roll is rotated. In connection with this, in the film sticking device for sticking the film on the substrate while pressing the film while conveying the film and the substrate, the means for measuring the deformation state of the elastic member in the radial direction of the lamination roll is provided. is there. Further, there is provided means for adjusting the rotation amount of the lamination roll based on the deformed state of the elastic member obtained by the measuring means.

[0008]

1 is a schematic sectional view of a film sticking apparatus according to an embodiment of the present invention.

In FIG. 1, K is a substrate to which the film K is attached.

The film K is formed of three layers of a cover film, a resist film and a base film, and is wound as a film roll 1 from the inside in the order of the cover film, the resist film and the base film.

In order to convey the film F fed from the film roll 1 to the conveyance path of the substrate K, the film roll 1
There is a guide roll 3 on the lower side, where the cover film 2 is peeled off and the direction is changed.

A winding roll 4 is adjacent to the film roll 1, and the cover film 2 separated by the guide roll 3 is wound up.

A driving device (for example, a motor) for the film roll 1 and the take-up roll 4 is provided with a function of adjusting the torque according to the remaining amount of the film so that the tension of the film is constant and the film is conveyed.

Below the guide roll 3, there are a leading end holding member 5 and a trailing end holding member 6 for adsorbing and holding the leading end or the trailing end of the film F and conveying it to the left in the drawing.

A vacuum chamber is provided inside the front end holding member 5, a suction hole is provided on the upper surface, and the vacuum chamber is connected to a vacuum pump through an intermediate valve, so that the front surface of the film F is sucked by the upper surface. It has become.

Reference numeral 7 is an air cylinder fixed to a movable portion 11 which is movable in the left-right direction by a ball screw 10 directly connected to the servomotor 9, and the tip holding member 5 is an air cylinder 7
Since it is fixed to the movable part, the leading end of the film F can be accurately conveyed to the vicinity of the lamination roll 13. Like the front end holding member 5, the rear end holding member 6 also has a vacuum chamber inside and a suction hole on the upper surface. In addition, the width direction (FIG. 1) orthogonal to the transport direction of the film F (left direction in FIG. 1).
Groove is provided in a direction perpendicular to the paper surface of FIG. 2) and is used as a cutter receiver when the film F is cut in the width direction by the cutter 8 or the like. The trailing edge holding member 6 is fixed to the coupling member 12 of the rotary actuator provided in the movable portion 11, and the trailing edge holding member 6 retracts downward from the film transport surface as the coupling material 12 rotates.

The rear end holding member 6 is located closer to the lamination roll 13 than the front end holding member 5 when aligned with the front end holding member 5.

The cutter 8 is provided on the upper side of the rear end holding member 6 and moves in the width direction of the film F by a rodless cylinder or the like to cut the film F in the width direction. Reference numeral 13 denotes a lamination roll, which is located above and below a conveyance path constituted by a plurality of conveyance rollers 15, and is arranged so that the conveyance roller 15 can move the substrate K conveyed from the left to the right in the drawing in a vertical direction. is there. The vertical movement is performed by an air cylinder, but the illustration is omitted. The lamination roll 13 is composed of a roll main body and silicon rubber coated on the outer peripheral surface thereof. There is a heater inside the roll body. An encoder 14 for measuring the amount of rotation is attached to the lower lamination roll 13. An electrode 16 is installed above the upper lamination roll 13 and is connected to a static electricity generator 17. When a high voltage is applied to the electrode 16 from the static electricity generator 17, the film F conveyed to the lower side of the electrode 16 is charged, and the leading end of the film F adheres to the surface of the upper lamination roll 13 by Coulomb force. A dustproof cover 18 is provided so as to surround the upper lamination roll 13 and the electrode 16. Therefore, dust or the like does not adhere to the film F charged by the electrode 16. Reference numerals 21 and 22 are optical sensors formed of a plurality of transport rollers 15 and attached to the transport path at appropriate intervals in order to detect the front end of the substrate K moving on the transport path. Reference numeral 23 is a control device for controlling the operation of the film sticking device, which is a monitor 24 for displaying data such as the sticking length of the film F, and a keyboard 2 for inputting the data.
5 is included. The control device 23 is a counter or memory for measuring the pulse from the encoder 14, and further,
Program of the operation of each part that constitutes the film sticking device,
In particular, a program for controlling the rotation of the lamination roll 13, a program for calculating the deformation state of the silicone rubber (elastic member) in the radial direction of the lamination roll 13 due to the detection of the substrate tip by the optical sensors 21 and 22, and the program It also includes a program for adjusting the amount of rotation of the lamination roll 13 based on the deformed state of the silicone rubber, a program for warning the replacement of the silicone rubber, and the like. When the interval between the optical sensors 21 and 22 is, for example, the circumferential length of the lamination roll 13 in the unused state, the lamination roll 13 nips and conveys the substrate K, and the front end of the substrate K is conveyed to each optical sensor 21. , 22 detects the number of pulses of the encoder 14 corresponding to the amount of lamination roll rotation G detected by a counter in the control device 23, and a memory (not shown) in the control device 23.
Save to. When the distance between the optical sensors 21 and 22 is set to a length different from the circumferential length of the lamination roll 13, the lamination roll 13 in the unused state is used for the substrate K.
Of the lamination roll while the optical sensors 21 and 22 detect the front end of the substrate K, respectively.
The pulse number of the encoder 14 corresponding to is measured by the counter in the control device 23 and stored in the memory in the control device 23. Further, when the lamination roll 13 sandwiches and presses (bonds) the substrate F from the up and down direction, the silicone rubber is elastically deformed by the applied pressure, and the roll diameter of the lamination roll 13 changes, so the lamination roll 13 in the unused state The number of pulses of the encoder 14 corresponding to the amount G of rotation of the lamination roll while the optical sensors 21 and 22 detect the front end of the substrate K is measured for each pressing force and stored in the memory in the control device 23. In the following description, the encoder 1 corresponding to the rotation amount G of the lamination roll corresponding to the distance between the optical sensors 21 and 22.
The number of pulses of 4 is collectively referred to as a rotation amount G of the lamination roll.

The length of the film F attached to the substrate K having an arbitrary length in the transport direction is predetermined, and the length is represented by R.

The relationship between the length R of the film F attached to the substrate K and the rotation amount G of the lamination roll can be expressed by the following equation, where the coefficient is a.

R = a · G (1) The coefficient a has a value which changes depending on the pressure applied to the lamination roll 13. The control device 23 gives the driving device of the lamination roll 13 the rotation amount of the lamination roll 13 for the substrate conveyance amount that the lamination roll 13 holds and conveys the substrate K. Whether the rotation is as specified or not is determined by the number of pulses of the encoder 14. Are being monitored by. Next, the operation of the film sticking apparatus will be described according to the flow shown in FIG. First, the film sticking operation preparation in step (hereinafter abbreviated as “S”) 100 is performed. As shown in FIG. 3, as a preparation for performing the film sticking operation, the film F is manually pulled out from the film roll 1 and passed to the guide roll 3, and the cover film 2 is peeled off. The peeled cover film 2 is wound around the winding roll 4. The film F from which the cover film 2 has been peeled off is pulled out to the tip of the rear end holding member 6 and vacuum-adsorbed on the upper surfaces of the front end holding member 5 and the rear end holding member 6.

At this time, the film roll 1 and the take-up roll 4 operate a motor (not shown) so that the tension of the film F becomes constant.

The cutter 8 is moved in the width direction of the film F while allowing the cutter 8 to pass through the groove portion of the trailing edge holding member 6, and the film F is cut in the width direction. The vacuum suction of the rear end holding member 6 which has sucked the film F is stopped,
Pieces of the film F on the trailing edge holding member 6 are discarded.

At this time, the film is vacuum-adsorbed on the tip holding member 5 with the film protruding by about 10 mm.

This completes the film sticking operation preparation S100, and then proceeds to the film delivery processing S200 of FIG.

In the film delivery process S200, as shown in FIG. 4, the ball screw 10 is rotated by the servomotor 9 to move the movable portion 11 to the lamination roll 13 side. Next, the connecting member 12 provided on the movable portion 11 is rotated to retract the rear end holding member 6 to the lower side.

At this time, the lamination roll 13 is open and heated by the internal heater.
Then, the air cylinder 7 is placed so that the front end of the film F is located near the center of the upper surface of the upper lamination roll 13.
The tip holding member 5 is moved by. Here, a high voltage is applied from the static electricity generating device 17 to the electrode 16, and the high voltage is applied between the electrode 16 and the lamination roll 13, and the tip holding member 5 is provided.
The leading edge of the film F protruding from the outside is charged,
When the leading end of the film F is adsorbed by the grounded lamination roll 13, the application of the high voltage from the static electricity generator 17 to the electrode 16 is stopped. The lamination roll 13 starts to rotate in the transport path direction of the substrate K constituted by the transport roller 15 and tries to transport the attracted film F downward. In this case, by releasing the vacuum suction of the film F by the front end holding member 5, the film F is conveyed to the lower side as the lamination roll 13 rotates, and at the guide roll 3, the film F is unwound in accordance with the unwinding of the film F. The film 2 is stripped off. Whether or not the leading edge of the film F has reached the center of the lower surface of the upper lamination roll 13 by the rotation of the lamination roll 13 is confirmed by the pulse number from the encoder 14, and when confirmed, the lamination roll 13 stops rotating. Next, the process proceeds to the film cutting process S300 of FIG. As shown in FIG. 5, the front end holding member 5 that has transferred the film F to the lamination roll 13 is returned by the servo motor 9 to an arbitrary position according to the length of the resist film attached to the substrate K. Then, the retracted trailing edge holding member 6 is returned to the transporting position of the film F by aligning the leading edge holding member 5 with the rotation of the connecting member 12.

The film F on the upper side of the front end holding member 5 and the rear end holding member 6 is vacuum-sucked and held, and the film F is cut by the cutter 8 in the width direction. At this time, the length of the film F from the tip of the film F located at the center of the lower surface of the upper lamination roll 13 to the position cut by the cutter 8 is the length to be attached to the substrate K.

When the film F is cut by the cutter 8 in the width direction, the rotation of the lamination roll 13 is not stopped,
The cutter 8, the leading end holding member 5, and the trailing end holding member 6 may be moved in synchronization with the transport of the film F, and the film may be suction-held and cut. Then, the film sticking process S400 of FIG. 2 is performed. As shown in FIG. 5, the substrate K is moved from the left to the right in FIG. In this case, the movement amount is detected by a sensor (not shown), and the movement is temporarily stopped when the film sticking start position of the leading end portion coincides with the leading end of the film F located at the center of the lower surface of the upper lamination roll 13. It has become. Here, the upper and lower lamination rolls 13 move up and down in the direction of the substrate K, and both lamination rolls 1
The substrate K is sandwiched (nipped) by 3, and the front end of the film F is thermocompression bonded to the substrate K. After that, both lamination rolls 1
3 rotates with the substrate K being nipped,
While being conveyed rightward, the film F on the upper lamination roll 13 is thermocompression bonded to the substrate K. At this time, the rear end holding member 6 is synchronized with the rotation of the lamination roll 13.
Moves to the upper lamination roll 13 side so that the tension of the film F becomes constant. When the optical sensor 21 for detecting the front end of the substrate detects the front end of the substrate K moving along the transport path during the attachment of the film F to the substrate K, the counter in the controller 23 measures the number of pulses from the encoder 14. Start. After the film F is attached to the substrate K, the substrate K moves to the right in the transport path, and when the optical sensor 22 for detecting the substrate front end on the downstream side detects the front end of the substrate K, the counter in the control device 23. Stops measuring the number of pulses from the encoder 14. Then, in the control device 23, the number of pulses measured by the counter while the substrate K is passing through the optical sensors 21 and 22 is converted into the lamination roll rotation amount Nn and stored in the memory in the control device 23.

As for the rear end of the film F, as shown in FIG. 6, the rear end holding member 6 is the upper lamination roll 1
When the vicinity of 3 is reached, the static electricity generator 17
A high voltage is applied to the electrode 16 to charge the rear end of the film F so that the film F is attracted to the lamination roll.

After all the trailing edges of the film have been transferred to the upper lamination roll 13, the vacuum suction of the trailing edge holding member 6 is released, and the connecting member 12 is rotated and retracted to the lower side. Then, while the leading edge holding member 5 holds the leading edge of the next film by vacuum suction, the upper lamination roll 13
It moves to the vicinity and waits for the next attachment to the substrate K.

When both the lamination rolls 13 rotate and the rear end of the film F is thermocompression-bonded to the substrate K, the control unit 23 measures the pulse number from the encoder 14 to determine the cumulative pulse number in the counter. Since the determination can be made by converting the amount of rotation of the lamination roll 13, the lamination rolls 13 are moved up and down to be opened as the completion of the attachment of the film F, and the film attachment processing S400 is completed.

The presence or absence of the next substrate K on the transport path is shown in FIG.
Confirm in S500, if there is film delivery processing S20
Return to 0 and repeat the above process, if not,
The process ends.

Next, measurement of the deformed state of the silicone rubber (elastic member) in the radial direction of the lamination roll will be described.

In the film sticking process S400, the substrate K
The number of pulses measured by the counter while passing through the optical sensors 21 and 22 is converted into the lamination roll rotation amount Nn, and the lamination roll rotation amount Nn is stored in the memory in the control device 23. Since the amount of rotation of the lamination roll Nn is stored in the memory in the control device 23 every time the substrate K passes, the number of times of pasting M times (M number of passing substrates) is set as one set, and the lamination is performed up to M times. The lamination roll rotation amount L may be calculated by calculating the average value of the roll rotation amounts N1, N2, ... Nn ... N _M.

The silicon rubber of the lamination roll 13 gradually loses its elasticity as the pressure (thermocompression bonding of the film) is repeated, and the thickness thereof becomes thin with the lapse of time. Then, the lamination roll 13 has a smaller roll diameter and a shorter circumferential length.

When the rotation of the lamination roll 13 is designated by the number of pulses and the rotation angle per pulse is the same, as the roll diameter becomes smaller, the substrate transport distance per pulse becomes shorter. Therefore, it takes time for the front end of the substrate K to pass between the optical sensors 21 and 22, that is, the rotation of the lamination roll 13 does not proceed with a larger number of pulses. The tip of K cannot pass.

Therefore, as shown in FIG. 7, as the roll diameter becomes smaller, the measured value (lamination roll rotation amount N
1, N2, ... Nn ... N _M average value) L gradually increases.

When the rotation of the lamination roll 13 is designated by the number of pulses, and when the number of pulses reaches a predetermined number, it is considered that the film sticking process on the substrate K is completed, and when both the lamination rolls 13 are opened, the film sticking is not processed. There is a risk of leaving parts.

Therefore, the control device 23 warns the roll replacement when the measured value L exceeds the roll replacement warning level Ln although the film sticking process continues if the measured value L is within the allowable dent amount range. Keep it.

Even if the measured value L is less than the roll replacement warning level Ln, if it is close, the conveyance amount of the substrate K by the lamination roll 13 is relatively reduced, so that the rotation of the lamination roll with respect to one substrate is reduced. The amount may be corrected so that the film F can be sufficiently attached to the rear end.

At any time, the substrate K is replaced by the optical sensors 21,2.
The value obtained by converting the number of pulses measured by the counter into the amount of rotation of the lamination roll while passing 2 is defined as N. This lamination roll rotation amount N has a value larger than the lamination roll rotation amount G when the lamination roll 13 is not used. The product of the coefficient a of the equation (1) and the rotation amount N of the lamination roll is the film sticking length U of the substrate K, but the rotation amount N of the lamination roll is an apparently large value. The difference U between the film sticking length R and the calculated film sticking length U of the substrate K
When −R is obtained, this difference U−R is the amount by which the transport amount of the substrate K is reduced due to the reduction of the roll diameter. Therefore, when the number of pulses of the rotation amount of the lamination roll corresponding to the difference U-R is increased as a command (the rotation amount of the lamination roll is adjusted), the lamination roll 1
3 firmly holds the substrate K and the film F to the rear end of the film F, and completes thermocompression bonding. Therefore, the film attached to the substrate K has no bubbles and no wrinkles.

Also, when the lamination roll 13 on the upper side is rotated and the adsorbed film F is sent to the conveying path side during the film delivery process, if the roll diameter of the lamination roll 13 becomes smaller, the rotation amount of the lamination roll 13 decreases and the film F becomes smaller. Since it becomes impossible to match the tip of the lamination roll with the position of the sticking tip of the substrate K, the correction amount (lamination in the embodiment of FIG. 1) of the rotation amount of the lamination roll 13 (half rotation of the lamination roll 13 in the embodiment of FIG. Adjust the amount of roll rotation)
The embodiment of FIG. 1 which can obtain a reliable alignment between the leading end of the film F and the sticking leading end position of the substrate K is provided for each substrate K.
An embodiment in which the present invention is applied to a continuous film sticking apparatus that cuts the film F with the cutter 8 in correspondence with the above, but is a continuous film sticking apparatus that does not cut the film F will be described below.

FIG. 8 schematically shows a continuous type film sticking apparatus which is another embodiment of the present invention. The same or corresponding parts as those shown in FIG. 1 are designated by the same reference numerals. .

In this embodiment, the front end holding member 5, the rear end holding member 6, the cutter 8, the electrode 16, the static electricity generating device 17 and the like provided in the embodiment of FIG. 1 are not provided, and instead, the inter-substrate processing cutter is used. 31 and a substrate separating cutter 32.

With respect to the length D2 of the region of the substrates K1 and K2 that moves back and forth on the transport path constituted by the transport rolls 15 where the resist film is not attached, the inter-substrate processing cutter having a pair of disk cutters in advance. Film F at 31
A slit is provided in the resist film in the width direction, and the resist film between the pair of disc cutters is removed by a peeling means (not shown).

The film F from which the resist film has been removed is continuous with the base film, and the resist film remaining on the base film is attached by the lamination roll 13 to the preceding substrate K1.

After passing through the lamination roll 13, when the film is attached to the subsequent substrate K2, the base film connecting the preceding substrate K1 and the succeeding substrate K2 is cut by the substrate separating cutter 32 in the width direction of the film F. Then, the front and rear substrates K1 and K2 are separated.

The detection of the substrate tips by the optical sensors 21 and 22 and the measurement of the deformation state of the silicon rubber (elastic member) by the control device 23 are performed in the same manner as in the embodiment of FIG. Omit it.

As means for measuring the deformation state of the elastic member in the radial direction of the lamination roll, the means shown in FIGS. 9 and 10 can be used in addition to the means described in the above embodiment.

In FIG. 9, both lamination rolls 1
The light projector 41 and the light receiver 42 are separately arranged on the upstream side and the downstream side of the transport path of the substrate K with the substrate 3 interposed therebetween so as to be vertically movable.

That is, the light projector 41 and the light receiver 42 are provided on the substrate K.
During the process of sticking the film to the substrate, as shown by the dotted line, the substrate K can be retracted so as not to hinder the transport of the substrate K, and the projector 41 and the light receiver 42 are shown by the solid line when the substrate K is not on the transport path. And then the lamination roll 13
And the light is projected from the light projector 41 to the nip portion, and the light leak from the nip portion can be captured by the light receiver 42.

When the elastic member of the lamination roll 13 repeatedly presses the substrate at the same place, the section that repeatedly presses the substrate shifts from elastic deformation to plastic deformation and becomes thinner, and the lamination roll 13 partially Roll diameter changes.

When the trace of the pressing of the substrate became conspicuous on the elastic member due to the plastic deformation, the light transmitter 41 and the light receiver 42 were positioned in the transport path, the lamination roll 13 was nipped, and the light leak from the nip portion was measured. To do.

When the amount of light leakage exceeds a predetermined level, warning of replacement of elastic member is issued.

In the embodiment of FIG. 10, a dielectric is used as the elastic member, and the detection coil 52 is provided on the ground wire 51 of the heater in the upper lamination roll 13.

When the film F is not on the lamination roll 13, a pulsed high voltage is applied from the static electricity generator 17 to the electrode 16 and the pulse current flowing through the ground wire 51 in the lamination roll 13 is measured by the detection coil 52. And

When the elastic member of the lamination roll 13 deteriorates and its thickness becomes thin, the capacitance of the elastic member changes, and the pulse current value flowing through the ground wire 51 changes. To detect.

When the fluctuation of the pulse current value exceeds a predetermined level, the controller 23 warns the replacement of the elastic member.

9 can be applied to either the single-wafer type shown in FIG. 1 or the continuous type shown in FIG. Since the electrode of FIG. 10 requires an electrode, the static electricity generator and the electrode may be prepared in the continuous type of FIG.

[0061]

As described above, according to the present invention,
It is possible to measure the change in the roll diameter of the lamination roll, and moreover, even if the roll diameter of the lamination roll changes, the film can be accurately attached to the substrate, and thus the occurrence of bubbles and wrinkles can be prevented.

[0062]

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view showing a film sticking apparatus which is an embodiment of the present invention.

FIG. 2 is a flowchart illustrating an operation procedure in the film sticking apparatus of FIG.

FIG. 3 is a diagram illustrating a film sticking operation preparation process in the film sticking apparatus of FIG.

FIG. 4 is a diagram illustrating a film delivery process in the film sticking apparatus of FIG.

5 is a diagram illustrating a film cutting process in the film sticking apparatus of FIG.

6 is a diagram illustrating a film sticking process in the film sticking apparatus of FIG.

7 is a diagram illustrating a relationship between a roll diameter of a lamination roll and substrate transfer in the film sticking apparatus of FIG.

FIG. 8 is a schematic cross-sectional view showing a film sticking apparatus which is another embodiment of the present invention.

FIG. 9 is a schematic cross-sectional view showing a film sticking apparatus which is another embodiment of the present invention.

FIG. 10 is a schematic cross-sectional view showing a film sticking apparatus which is another embodiment of the present invention.

[Explanation of symbols]

F ... film K ... substrate 1 ... Film roll 2 ... Cover film 3 ... Guide roll 4 ... Winding roll 5 ... Tip holding member 6 ... Rear end holding member 7 ... Air cylinder 8 ... Cutter 9 ... Servo motor 10 ... Ball screw 11 ... Movable part 12 ... Connecting material 13 ... Lamination roll 15 ... Conveyor roller 16 ... Electrode 17 ... Static electricity generator 18 ... Dustproof cover 21, 22 ... Optical sensor 23 ... Control device 24 ... Monitor 25 ... Keyboard

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Jun Miura             4-13 Nakagawa Adachi-ku, Tokyo Stock Exchange             Inside Hitachi Industries (72) Inventor Ken Fujii             4-13 Nakagawa Adachi-ku, Tokyo Stock Exchange             Inside Hitachi Industries F-term (reference) 4F100 AK01B AT00A BA02 BA10A                       BA10B EC032 EJ192 EJ422                       EK01 EK03 EK06 EK08 EK11                       EK13 EK15 GB43                 5E314 AA24 BB02 BB11 BB12 CC02                       CC15 EE03 FF01 GG11 GG24                 5E339 BE13 CC01 CC02 CD01 CE11                       CE16 CF01 GG10

Claims (5)

[Claims] 1. A film and a substrate are sandwiched by a lamination roll having the surface of a roll body coated with an elastic member, and the film and the substrate are conveyed and pressed by the rotation of the lamination roll to press the substrate. A film sticking apparatus for sticking the film, comprising means for measuring a deformation state of the elastic member in a radial direction of the lamination roll. 2. The film sticking apparatus according to claim 1, wherein the measuring means is based on a change in the rotation amount of the lamination roll corresponding to the conveyance of the substrate by the lamination roll for an arbitrary distance. A film sticking apparatus, which measures a deformed state of the elastic member in the radial direction. 3. The film sticking apparatus according to claim 1, further comprising sticking the film on a substrate by rotation based on the deformed state of the elastic member obtained by the measuring means, to the rear end of the film. A film sticking apparatus provided with means for adjusting a rotation amount of the lamination roll that conveys a substrate. 4. The film sticking apparatus according to claim 1, further comprising the lamination for conveying the sticking tip of the film to the sticking tip of the substrate based on the deformed state of the elastic member obtained by the measuring means. A film sticking apparatus comprising means for adjusting the amount of rotation of a roll. 5. The film sticking apparatus according to claim 1, further comprising means for warning the replacement of the elastic member based on the deformed state of the elastic member obtained by the measuring means. Sticking device.