JP2003240138A - Flow rate controller - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flow rate controller which is inexpensively manufactured with a simple structure, and performs the precision control of a temperature and a flow rate of a mixed fluid. <P>SOLUTION: A plurality of fluid regulating mechanisms 2A, 2B, 2C are mounted in channels 3A, 3B for regulating the flow of the fluid by opening and closing, and the plurality of fluid regulating mechanisms 2A, 2B, 2C are arranged in parallel, so that the flow rate of the channel 3A, 3B are corresponded to the total sum of the flow passing through the plurality of fluid regulating mechanisms 2A, 2B, 2C. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow rate control device that regulates the flow rate of a flow path.

[0002]

2. Description of the Related Art For example, Japanese Patent Application Laid-Open No. 6-15953 discloses a method of mixing fluids of two systems, water and hot water, to obtain a predetermined temperature.
A flow rate control device (hot water mixing device) described in Japanese Patent No. 3 is known. As shown in FIG. 6, this flow rate control device controls the flow rates of water 66 and hot water 67, respectively.
A fluid regulating mechanism 71 for adjusting the flow rate is provided in the flow paths 70A and 70B for supplying the water 66 and the hot water 67. This fluid control mechanism 71 has a valve 61 that slides inside a housing 69 as shown in FIG. 6, and this valve 61 has a temperature sensitive coil spring 62 made of a shape memory alloy and a bias spring 63 made of a normal spring material. It is positioned by the balance. As the temperature-sensitive coil spring 62 expands and contracts according to the temperature of the mixed fluid 68, the valve 61 is displaced between the hot water fully opened position and the water fully opened position, and the temperature and flow rate of the mixed fluid 68 are automatically adjusted. There is.

[0003]

However, the fluid regulating mechanism 71 has a complicated structure as shown in FIG. Further, since the temperature-sensitive coil spring 62 for positioning the valve 61 is formed by processing a shape memory alloy into a spring shape, the manufacturing cost thereof increases. Further, since the fluid regulation mechanism 71 is a mechanism that mechanically controls it through the adjusting screw 64 having the handle 65, there is a drawback that the temperature and flow rate of the mixed fluid 68 cannot be finely adjusted.

Therefore, in view of the above problems, the present invention provides a flow rate control device which has a simple structure and can be manufactured at low cost, and which can finely control the temperature and flow rate of a mixed fluid. .

[0005]

According to the technical means of the present invention for solving this technical problem, a plurality of fluid regulating mechanisms for regulating the flow of fluid by opening and closing are provided in the channel, and The plurality of fluid regulating mechanisms are arranged in parallel so that the flow rate corresponds to the sum of the flow rates passing through the plurality of fluid regulating mechanisms. Another technical means of the present invention includes a fluid mixing section for mixing a first fluid and a second fluid, a first flow path for supplying the first fluid to the fluid mixing section, and a second fluid for the fluid mixing section. A second flow path to be supplied is provided, and at least one of the first flow path and the second flow path is provided with a plurality of fluid restriction mechanisms that restrict the flow of the fluid by opening and closing, and the flow rate of the flow path is The plurality of fluid regulating mechanisms are arranged in parallel so that the flow rate corresponds to the sum of the flow rates passing through the plurality of fluid regulating mechanisms.

According to another technical means of the present invention, the flow rate of the flow path is changed stepwise by the combination of opening and closing of each fluid regulating mechanism, and the number of steps of flow rate change corresponding to the number of opening and closing combinations is obtained. As described above, the plurality of fluid regulating mechanisms are set to different passage flow rates. Another technical means of the present invention is to provide an opening / closing valve having a passage flow rate corresponding to the passage flow rate of each fluid regulation mechanism, so that the plurality of fluid regulation mechanisms are set to different passage flow rates. Are provided respectively.

Another technical means of the present invention is that the plurality of fluid regulating mechanisms are set to different passage flow rates,
The plurality of fluid regulating mechanisms are respectively provided with regulating flow passages having a flow rate corresponding to the flow rate of each fluid regulating mechanism, and an on-off valve for opening and closing each regulating flow channel. In another technical means of the present invention, the three fluid regulating mechanisms are provided, and the flow rate ratio of each of them is 1: 2: 4.
There is a point. Another technical means of the present invention is that it has a control mechanism for individually opening and closing the plurality of fluid regulating mechanisms in order to obtain a desired flow rate in the flow path.

Another technical means of the present invention is that it has a control mechanism for individually opening and closing the plurality of fluid regulating mechanisms in order to obtain a mixing ratio that achieves a desired temperature of the mixed fluid.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. 1 and 2 show a first embodiment of a flow rate control device 1 of the present invention. Two systems of fluids having different temperatures, that is, water (first fluid) 10 and hot water (second fluid) 11 are supplied to a washroom, a bathroom or a kitchen,
A flow rate control device 1 shown in FIG. 1 is provided in order to mix them and bring the hot and cold water mixture (mixed fluid) 12 to a predetermined temperature and flow rate. Further, a control mechanism 9 is provided to electrically and automatically control the flow rate control device 1.

In FIG. 1, the flow rate control device 1 has a fluid mixing section 4 for mixing water 10 and hot water 11, and a water flow path (first flow path) for supplying the water 10 to the fluid mixing section 4. 3A
And a hot water flow path (second flow path) 3B for supplying hot water 11 to the fluid mixing section 4 are connected to the fluid mixing section 4, respectively.
Each of the water flow passage 3A and the hot water flow passage 3B is provided with three fluid regulating mechanisms 2A, 2B, 2C in parallel with the flow passages 3A, 3B, and each of the fluid regulating mechanisms 2A, 2B, 2C is provided. By changing the flow rate of the flow path stepwise by the combination of opening and closing,
The plurality of fluid regulating mechanisms 2A, 2A are provided so that the number of stages of flow rate fluctuations corresponding to the number of combinations of opening and closing can be obtained.
B and 2C are set to flow rates 4 and 2 and 1 which are different from each other.

More specifically, the fluid regulating mechanisms 2A, 2
B and 2C are composed of solenoid valves (open / close valves) 6A, 6B and 6C having passage rates of 4 and 2 and 1, respectively. The electromagnetic valves 6A, 6B, and 6C are individually opened and closed to regulate the flow of fluid, that is, to block the flow of the fluid or to allow the fluid to flow down by a certain amount. The flow rate of each of the flow paths 3A and 3B is the same as that of the plurality of solenoid valves 6A and 6B provided in the flow paths 3A and 3B.
It matches the sum of the flow rates passing through 6C. The passing flow rate here is expressed with reference to 1 as the passing flow rate of the solenoid valve 6C. Therefore, the solenoid valve 6B having a passing flow rate of 2
Will pass twice the flow rate of the solenoid valve 6C, and the passing flow rate 4 of the solenoid valve 6A will pass four times the flow rate of the solenoid valve 6C.

Further, the water channel 3A is provided with water side temperature detecting means 17 for detecting the temperature in the channel 3A, and water side pressure detecting means 21 for detecting the pressure. . In the present embodiment, a thermistor embedded in the channel 3A is used as the water side temperature detecting means 17, and a diaphragm type pressure gauge embedded in the channel 3A is used as the water side pressure detecting means 21. Has been. This diaphragm type pressure gauge converts the strain of the diaphragm due to pressure change into an electric signal with a strain gauge, etc.,
The pressure value is electrically output.

A hot water side temperature detecting means 18 for detecting the temperature in the hot water flow path 3B is also provided in the hot water flow path 3B, and a hot water side pressure detecting means 22 for detecting the pressure is also provided. . Similar to the water flow path 3A, a thermistor embedded in the flow path 3B is used as the hot water temperature detecting means 18, and a diaphragm type pressure gauge embedded in the flow path 3B is used as the hot water pressure detecting means 22. Is used.
The fluid mixing section 4 is also provided with a thermistor as the mixing side temperature detecting means 19 for detecting the temperature.

From the temperature detecting means 17, 18, 19 and the pressure detecting means 21, 22, the solenoid valves 6A, 6 are connected.
Detected values 34 such as temperature values and pressure values in the respective flow paths 3A and 3B used when controlling B and 6C are electrically output. The temperature detecting means 17, 18, 1
9 and the pressure detection means 21 and 22 are not limited to the above-mentioned embodiment. There is no problem even if a thermocouple is used as the temperature detecting means 17, 18, 19. Pressure detection means 2
There is no problem even if semiconductor pressure sensors are used as Nos. 2 and 23.

Next, a flow rate control method in the flow rate control device 1 of this embodiment will be described. As described above, the flow rate control device 1 includes the three solenoid valves 6A, 6B, 6C having different passage flow rates 4 and 2 and 1 in the flow paths 3A, 3B.
have. By individually opening and closing these solenoid valves 6A, 6B, 6C, the flow rate in the flow paths 3A, 3B can be changed stepwise in eight ways. That is, when it is desired to set the flow rate of each of the flow paths 3A and 3B to 4 or 2 or 1, the solenoid valve 6A, the solenoid valve 6B, or the solenoid valve 6C having the respective passing flow rates is opened. To set the flow rate to 3, two solenoid valves 6B whose passing flow rates are 2 and 1,
Open 6C. When it is desired to set the flow rate to 5, the two solenoid valves 6A and 6C whose passing flow rates are 4 and 1 are opened. When it is desired to set the flow rate to 6, the two solenoid valves 6A and 6B having the passing flow rates of 4 and 2 are opened. Further, when it is desired to set the flow rate to 7, three solenoid valves 6A and 6A having passage flow rates of 4 and 2 and 1 are used.
Open B and 6C. When it is desired to reduce the flow rate to 0, all the solenoid valves 6A, 6B and 6C are closed.

In addition, in the case of this embodiment, the water channel 3A
Since the solenoid valves 6A, 6B, 6C are provided in each of the hot water flow path 3B and the hot water flow path 3B, the flow rate of the water 10 is variable in 8 ways and the flow rate of the hot water 11 is varied in 8 ways, and the mixing ratio of the water 10 and the hot water 11 is 8 × 8 =
It can be changed in 64 ways. As described above, the flow rate control device 1 of the present embodiment finely adjusts the flow rates of the water flow passage 3A and the hot water flow passage 3B by opening and closing the plurality of electromagnetic valves 6A, 6B, 6C having different passage flow rates. Therefore, the flow rate of the hot and cold water mixture 12 can be finely adjusted. Further, the fluid regulating mechanisms 2A, 2B, 2C composed of the solenoid valves 6A, 6B, 6C have a simple structure and can be made lightweight. The solenoid valves 6A, 6B, 6C that only open and close may have a low unit price, so that the flow rate control device 1 of the present embodiment can be realized at low cost.

Further, the flow rate control device 1 of this embodiment has a control mechanism 9. The control mechanism 9 has three flow passages 3A and 3B provided in the flow rate control device 1 in order to obtain a mixing ratio that achieves a desired flow rate of the hot and cold water mixture 12 or the temperature of the hot and cold water mixture 12. Solenoid valves 6A, 6
B and 6C are individually controlled to be opened and closed. FIG. 2 is a block diagram showing a control mechanism 9 for controlling the solenoid valves 6A, 6B, 6C by a feedback control method. In FIG. 2, the control mechanism 9 includes a set value input means 26 for setting and inputting a desired temperature and flow rate of the hot and cold water mixture 12, and a flow rate calculating means 27 for determining the flow rate of each of the flow paths 3A and 3B. Based on the flow rates of the respective flow paths 3A, 3B thus determined, the valve opening determining means 28, 29 for deciding which of the solenoid valves 6A, 6B, 6C to open, and the solenoid valves 6A, 6B determined to open. , 6C electrically open / close control signal 15
And a deviation detecting means 32 for detecting a deviation between the temperature value of the hot and cold water mixture 12 and the temperature value inputted to the set value input means 26 and feeding back the same to the flow rate calculating means 27. It

When controlling the flow control device 1,
First, a desired temperature value or flow rate of the hot and cold water mixture 12 is input to the set value input means 26. The input temperature value (set temperature value) and flow rate are sent to the flow rate calculation means 27, and the temperature detection means 17, 18, 19 and pressure detection means installed in the water flow passage 3A, the hot water flow passage 3B, and the fluid mixing section 4 are detected. The flow rate of each of the flow paths 3A and 3B is determined based on the detected value 34 such as the temperature value and the pressure value detected from 21 and 22. The obtained flow rate of the water flow path 3A is sent to the water side valve opening determining means 28, where the opening / closing of the solenoid valves 6A, 6B, 6C is specifically determined to obtain the flow rate. Further, the result of the water side valve opening determination means 28 is converted into an electric signal via the water side valve control means 30, and the opening / closing control signal 15 is sent to the solenoid valves 6A, 6B, 6C, whereby the solenoid valves 6A, 6B, 6C is actually opened and closed.

Similarly, also in the hot water flow path 3B, the flow rate of the hot water flow path 3B obtained by the flow rate calculation means 27 is sent to the hot water side valve opening determination means 29, where electromagnetic waves are obtained in order to obtain such flow rate. The opening / closing of the valves 6A, 6B, 6C is specifically determined. Further, the result of the hot water valve opening determination means 29 is converted into an electric signal via the hot water valve control means 31, and the electromagnetic valve 6A,
When the opening / closing control signal 15 is sent to 6B and 6C, the solenoid valves 6A, 6B and 6C are actually opened and closed. The deviation detecting means 32 detects the deviation between the temperature value of the hot and cold water mixture 12 and the set temperature value, and feeds it back to the flow rate calculating means 27.

Based on this fed back deviation,
When the temperature value of the mixed hot and cold water 12 is higher than the set temperature value, the flow rate calculation means 27 determines to increase the flow rate of the water 10 or decrease the flow rate of the hot water 11 to calculate a specific flow rate. To do. On the contrary, when the temperature of the hot / water mixed water 12 is lower than the set temperature value, it is decided to decrease the flow rate of the water 10 or increase the flow rate of the hot water 11 to calculate a specific flow rate. With this control mechanism 9, the desired hot and cold water mixture 1
Flow rate control device 1 so that the temperature and flow rate of 2 are always obtained.
Can be electrically and automatically operated. In addition, water 10 and hot water 11 supplied to the fluid mixing unit 4
Even if the temperature and flow rate of the water rapidly change, the feedback control of the control mechanism 9 causes the hot and cold water mixture 1
It is possible to keep the temperature and flow rate of 2 substantially constant.

As a modification of the first embodiment, it is conceivable that the feedback control method of detecting the deviation between the temperature value of the hot and cold water mixture 12 and the set temperature value and returning it to the flow rate calculating means 27 is not used. That is, as shown in FIG.
Hot and cold mixed water 1 with only the temperature and pressure values of water 10 and hot water 11
It is also possible to control the fluid control device 1 by the control mechanism 9 of the type that feed-forward controls the temperature and flow rate of the fluid 2. In this control mechanism 9, first, the set value input means 2
In 6, a desired temperature value and flow rate of the hot / water mixed water 12 are input.
The input temperature value (set temperature value) and the flow rate are sent to the flow rate calculation means 27, and the detected values 34 such as the temperature value and the pressure value detected from the water flow passage 3A, the hot water flow passage 3B, and the fluid mixing unit 4 are also stored. Then, the flow rate of each flow path 3A, 3B is determined.

The obtained flow rate of the water flow path 3A is sent to the water side valve opening determining means 28, where the solenoid valves 6A, 6B and 6C which are opened and closed to obtain the flow rate are specifically determined. Further, the result of the water side valve opening determination means 28 is the water side valve control means 3
Is converted into an electric signal via 0, and each solenoid valve 6A, 6B,
When the opening / closing control signal 15 is sent to 6C, the solenoid valve 6A,
6B and 6C are actually opened and closed. Similarly, the flow rate of the hot water flow path 3B obtained by the flow rate calculation means 27 is sent to the hot water side valve opening determination means 29, where the solenoid valves 6A, 6B, 6C that are opened and closed to obtain the flow rate are concrete. Is decided. Further, the result of the hot water valve opening determination means 29 is converted into an electric signal through the hot water valve control means 31, and the open / close control signal 15 is sent to each electromagnetic valve 6A, 6B, 6C, whereby the electromagnetic valves 6A, 6B. , 6C is actually opened and closed.

As described above, the control mechanism 9 includes the deviation detecting means 3
Since the control mechanism 9 does not have the configuration 2, the configuration of the control mechanism 9 is simplified. In addition, the response speed is faster than that of the feedback control method, and the temperature value of the hot and cold water mixture 12 converges to the set temperature value in a short time. Next, a second embodiment of the present invention will be described based on FIG. The flow rate control device 1 of the present embodiment has substantially the same configuration as that of the first embodiment, but three fluid regulation mechanisms 2A, 2B, 2 provided in parallel in the flow paths 3A, 3B.
Only C is different.

That is, the fluid regulating mechanism 2A, 2B, 2C
Is the restriction flow paths 7A, 7B, 7C having the same flow rates as the flow rates of the respective fluid restriction mechanisms 2A, 2B, 2C, and the respective flow rates provided immediately before the restriction flow paths 7A, 7B, 7C. Are composed of the same solenoid valves 6A, 6B, 6C. In the case of this embodiment, each regulation flow path 7
The passage flow rates of A, 7B and 7C are set to 4 and 2 and 1, and the solenoid valves 6A, 6B and 6C provided immediately in front of the restriction flow paths 7A, 7B and 7C are individually opened and closed. As a result, a flow rate corresponding to the flow rate of each of the restriction flow paths 7A, 7B, 7C flows. Therefore, by the combination of opening and closing of the solenoid valves 6A, 6B and 6C, the flow rate in the flow passages 3A and 3B is 0 to 7 as in the first embodiment.
It is possible to make a total of eight adjustments in each step.

In addition, since three fluid regulating mechanisms 2A, 2B and 2C are provided in each of the water flow path 3A and the hot water flow path 3B, the flow rate of water 10 is 8 ways and the flow rate of hot water 11 is 8 ways. It becomes variable, and the mixing ratio of the water 10 and the hot water 11 can be changed to 8 × 8 = 64 ways. Furthermore, as in the first embodiment,
Each of the flow paths 3A and 3B is provided with water side and hot water side temperature detecting means 17 and 18 for detecting the temperature, and also water side and hot water side pressure detecting means 21 and 22 for detecting the pressure.
Is provided. A thermistor embedded in the channels 3A and 3B is used as the temperature detecting means 17 and 18, and a diaphragm type pressure gauge embedded in the channels 3A and 3B is used as the pressure detecting means 21 and 22. It is used.

The fluid mixing section 4 is also provided with a thermistor as the mixing side temperature detecting means 19 for detecting the temperature.
These temperature detecting means 17, 18, 19 and pressure detecting means 2
The detection values 34 such as the temperature value and the pressure value of each installation site are electrically output from 1 and 22, and the control mechanism 9 similar to the first embodiment uses the detection values 34. As a result, the solenoid valves 6A, 6B and 6C can be electrically and automatically controlled. In the present embodiment, other configurations are the same as those in the first embodiment.

Next, a third embodiment of the present invention will be described with reference to FIG. The flow rate control device 1 of the present embodiment has substantially the same configuration as that of the first embodiment, but three fluid regulation mechanisms 2A, 2B, 2 provided in parallel in the flow paths 3A, 3B.
Only C is different. That is, the fluid regulating mechanisms 2A, 2B, 2C are
Restricting pipeline 8A having the same flow rate as that of 2C,
8B, 8C and solenoid valves 6A, which are provided immediately before the restriction pipe lines 8A, 8B, 8C and have the same passing flow rate,
It is composed of 6B and 6C.

In the case of the present embodiment, the passage flow rates of the respective regulation pipelines 8A, 8B, 8C are set to be 4 and 2 and 1, and immediately before the regulation pipelines 8A, 8B, 8C. By individually opening and closing the provided solenoid valves 6A, 6B, 6C, the flow rate corresponding to the flow rate of the passage of each regulation pipeline 8A, 8B, 8C flows. Therefore, by the combination of opening and closing the solenoid valves 6A, 6B, 6C,
As in the first embodiment, the flow rate in the flow paths 3A and 3B is set to 0
It is possible to make a total of 8 adjustments in each of 7 steps.

In addition, since three fluid regulating mechanisms 2A, 2B, 2C are provided in each of the water flow path 3A and the hot water flow path 3B, the flow rate of water 10 is 8 ways and the flow rate of hot water 11 is 8 ways. It becomes variable, and the mixing ratio of the water 10 and the hot water 11 can be changed to 8 × 8 = 64 ways. It is also possible to electrically and automatically control the solenoid valves 6A, 6B and 6C by using the same control mechanism 9 as in the first embodiment. Also in this embodiment, the other configurations are the same as those in the first embodiment. The present invention is not limited to the above embodiment.

That is, the fluid regulating mechanism 2A, 2B, 2C
Are not limited to those of the first to third embodiments. For example, the solenoid valves 6A, 6B and 6C in the second and third embodiments are not limited to the regulation flow paths 7A, 7B,
It is not necessary to be provided immediately before 7C or the regulation pipes 8A, 8B, 8C, and there is no problem even if they are arranged immediately after them.
Restricted flow paths 7A, 7B, 7C and restricted conduits 8A, 8B, 8C
It is also possible to arrange the solenoid valves 6A, 6B, 6C at intermediate positions. Further, the solenoid valves 6A, 6B, 6C in the first to third embodiments may be open / close valves such as electric ball valves without any problem.

The plurality of fluid regulating mechanisms 2A, 2B, 2C provided in the flow paths 3A, 3B are composed of three fluid regulating mechanisms 2A, 2B, 2C having different passage flow rates. The flow rate is not limited and may be composed of two fluid regulation mechanisms having different passage flow rates as long as the purpose is to roughly adjust the flow rate. It is preferable to provide a device constituted by four or more fluid regulating mechanisms having different flow rates. In addition, the above-mentioned first to third
In the embodiment, the case where the water 10 and the hot water 11 are mixed is described, but the flow rate control device 1 of the present invention can be used for mixing two systems of fluids and powders, and has a property similar to that of salt water and fresh water. There is no problem even if it is used for mixing different fluids or vaporized fuel and gas such as air.

Furthermore, the flow rate control device 1 of the present invention is
It is not used only for mixing two fluids,
There is no problem even if it is applied to a place where the flow rate needs to be adjusted in the flow path of the book. For example, even when a flow rate control valve capable of varying the flow rate is provided in the flow path, the flow rate control device 1 of the present invention can be provided instead of the flow rate control valve. In this case, the flow rate control device 1 of the present invention can perform the same flow rate adjustment as the conventional flow rate adjusting valve, and can electrically and automatically control the flow rate. On the contrary, in a device that mixes fluids of three or more systems, there is no problem even if the flow rate control device 1 of the present invention is provided in each flow path.

[0033]

According to the present invention, it is possible to provide a flow rate control device which has a simple structure and can be manufactured at low cost, and which is capable of finely controlling the temperature and flow rate of a mixed fluid.

[Brief description of drawings]

FIG. 1 is a sectional front view showing a first embodiment of the present invention.

FIG. 2 is a block diagram showing a configuration of a control mechanism 9 that controls the first embodiment of the present invention.

FIG. 3 is a block diagram showing a modified example of a control mechanism 9 that controls the first embodiment of the present invention.

FIG. 4 is a sectional front view showing a second embodiment of the present invention.

FIG. 5 is a sectional front view showing a third embodiment of the present invention.

FIG. 6 is a sectional front view of a conventional example.

[Explanation of symbols]

1 Flow control device 2A Fluid regulation mechanism 2B Fluid regulation mechanism 2C fluid regulation mechanism 3A First channel 3B Second channel 4 Fluid mixing section 6A solenoid valve 6B solenoid valve 6C solenoid valve 7A regulated flow path 7B regulated flow path 7C regulated flow path 9 Control mechanism 10 First fluid (water) 11 Second fluid (hot water) 12 Mixed fluid (hot water mixed water)

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Tetsuya Nishimoto             404-1 Nishinosue, Himeji City, Hyogo Prefecture Ikeda Electric Co., Ltd.             Inside the company (72) Inventor Takahiro Hara             404-1 Nishinosue, Himeji City, Hyogo Prefecture Ikeda Electric Co., Ltd.             Inside the company (72) Inventor Kenji Sato             404-1 Nishinosue, Himeji City, Hyogo Prefecture Ikeda Electric Co., Ltd.             Inside the company F term (reference) 3H067 AA32 AA38 BB08 BB14 CC05                       CC08 CC32 DD02 DD12 DD32                       ED17 FF01 GG01

Claims (8)

[Claims] 1. A plurality of fluid regulating mechanisms for regulating the flow of fluid by opening and closing are provided in the channel, and the flow rate of the channel corresponds to the sum of the flow rates passing through the plurality of fluid regulating mechanisms. So that the plurality of fluid regulating mechanisms are arranged in parallel. 2. A fluid mixing section for mixing the first fluid and the second fluid, a first flow path for supplying the first fluid to the fluid mixing section, and a second flow path for supplying the second fluid to the fluid mixing section. And a plurality of fluid regulating mechanisms for regulating the flow of fluid by opening and closing are provided in at least one of the first channel and the second channel. A flow rate control device, wherein the plurality of fluid regulating mechanisms are arranged in parallel so that the flow rate corresponds to the total flow rate passing through the mechanism. 3. The plurality of fluids so that the flow rate of the flow path is changed stepwise by the combination of opening and closing of each fluid regulation mechanism, and the number of steps of the change of the flow rate corresponding to the number of opening and closing combinations is obtained. The flow control device according to claim 1 or 2, wherein the restriction mechanisms are set to different passage flow rates. 4. A plurality of fluid regulating mechanisms, wherein the plurality of fluid regulating mechanisms are set to different passage flow rates.
The flow rate control device according to claim 3, further comprising an on-off valve having a flow rate corresponding to a flow rate of each fluid control mechanism. 5. The plurality of fluid regulating mechanisms are set so that the plurality of fluid regulating mechanisms are set to different passage flow rates.
4. A control flow path having a flow rate corresponding to the flow rate of each fluid control mechanism is provided, and an opening / closing valve that opens and closes each control flow channel is provided.
The flow control device according to. 6. The flow rate control device according to claim 3, wherein three fluid restriction mechanisms are provided, and a ratio of flow rates of the respective passages is 1: 2: 4. 7. The flow rate control device according to claim 1, further comprising a control mechanism for individually opening and closing the plurality of fluid regulating mechanisms so as to obtain a desired flow rate in the flow passage. 8. The flow rate control device according to claim 2, further comprising a control mechanism that individually opens and closes the plurality of fluid regulation mechanisms in order to obtain a mixing ratio that achieves a desired temperature of the mixed fluid.