JP2003012338A - Method for manufacturing optical fiber preform using MCVD method - Google Patents
Method for manufacturing optical fiber preform using MCVD methodInfo
- Publication number
- JP2003012338A JP2003012338A JP2001198601A JP2001198601A JP2003012338A JP 2003012338 A JP2003012338 A JP 2003012338A JP 2001198601 A JP2001198601 A JP 2001198601A JP 2001198601 A JP2001198601 A JP 2001198601A JP 2003012338 A JP2003012338 A JP 2003012338A
- Authority
- JP
- Japan
- Prior art keywords
- soot
- glass pipe
- glass
- optical fiber
- fiber preform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000013307 optical fiber Substances 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 239000011521 glass Substances 0.000 claims abstract description 79
- 239000004071 soot Substances 0.000 claims abstract description 68
- 238000005530 etching Methods 0.000 claims abstract description 15
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract 3
- 239000007789 gas Substances 0.000 claims description 34
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000012808 vapor phase Substances 0.000 claims description 7
- 239000012071 phase Substances 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 4
- 238000007790 scraping Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 3
- 238000009825 accumulation Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000007796 conventional method Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 229910003902 SiCl 4 Inorganic materials 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002222 fluorine compounds Chemical class 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 102100033040 Carbonic anhydrase 12 Human genes 0.000 description 1
- 102100022626 Glutamate receptor ionotropic, NMDA 2D Human genes 0.000 description 1
- 101000867855 Homo sapiens Carbonic anhydrase 12 Proteins 0.000 description 1
- 101000972840 Homo sapiens Glutamate receptor ionotropic, NMDA 2D Proteins 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000001089 thermophoresis Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01846—Means for after-treatment or catching of worked reactant gases
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
(57)【要約】
【課題】 ＭＣＶＤ法において従来法より厚いガラス層
を形成し、かつガラスパイプの外径変動や破裂等の発生
なく高い歩留りでガラス母材を製造できる方法。
【解決手段】ＭＣＶＤ法による光ファイバ母材の製造方
法において、内付け工程としてガラスパイプ内にガラス
原料含有ガスを流しつつ１又は複数回加熱バーナーをト
ラバースしてガラスパイプ内面にガラス層を堆積させた
後にトラバースターン部から下流側に堆積したススを物
理的掻き出し及び／又は化学的除去（気相エッチング）
により除去することを１セットとして１セット以上行う
ことを特徴とする光ファイバ母材の製造方法。
PROBLEM TO BE SOLVED: To provide a method of forming a glass layer thicker than a conventional method in an MCVD method, and producing a glass base material at a high yield without a change in the outer diameter of a glass pipe or rupture. In a method for manufacturing an optical fiber preform by an MCVD method, a glass layer is deposited on the inner surface of a glass pipe by traversing a heating burner one or more times while flowing a glass material-containing gas into a glass pipe as an internal attaching step. Physical removal and / or chemical removal of soot deposited on the downstream side from the traverse stern part after gas (gas phase etching)
The method of manufacturing an optical fiber preform according to claim 1, wherein the removal is performed as one set or more.
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ＭＣＶＤ法により
光ファイバ母材を製造する方法に関する。TECHNICAL FIELD The present invention relates to a method for producing an optical fiber preform by an MCVD method.
【０００２】[0002]
【従来の技術】ＭＣＶＤ（Modefied Chemical Vapor De
position：内付けＣＶＤ）法による光ファイバ母材の製
造は、一般にガラスパイプ内面のエッチングによる清浄
化、該パイプ内面へのガラス層の堆積（内付け）、内付
け終了後のコラプスによる中実化の各プロセスからな
る。図４に示すようにガラス層の内付けでは、出発材で
あるガラスパイプ１のガス供給側から該ガラスパイプ１
内に ＳｉＣｌ4 ，ＧｅＣｌ4 等のガラス原料及びＯ2
等からなるガラス原料含有ガス２を流し、ガラスパイプ
１の外部に設けた加熱用のバーナー３と該ガラスパイプ
１を相対的に往復運動（トラバース）させる。本明細書
においてはガス供給側を上流側、排気側を下流側ともい
う。該バーナー３がトラバースされるにしたがい、主原
料ガスであるＳｉＣｌ4 が酸化して生成するスス（Ｓｉ
Ｏ2 微粒子）４がバーナー３の下流側のガラスパイプ１
内面に堆積し、バーナー３が移動するにつれてスス５は
透明ガラス化され、バーナー３のトラバースを繰り返す
ことによりガラス層５が堆積してゆく〔図４の
（ａ）〕。バーナー３がトラバースの方向を反転する位
置であるトラバースターン部６より下流側では高温に加
熱されることはないため、その部分のガラスパイプ１内
面に付着したススは透明ガラス化されず、スス４の状態
で厚くカサ高に堆積する〔図４の（ｂ）〕。2. Description of the Related Art MCVD (Modefied Chemical Vapor Deposition
(position: internal CVD) optical fiber preform is generally manufactured by cleaning the inner surface of a glass pipe by etching, depositing a glass layer on the inner surface of the pipe (internal mounting), and solidifying by collapsing after completion of the internal mounting. Of each process. As shown in FIG. 4, when the glass layer is internally attached, the glass pipe 1 which is the starting material is supplied from the gas supply side.
Glass raw materials such as SiCl 4 , GeCl 4 and O 2
A glass raw material-containing gas 2 made of, for example, is made to flow, and a burner 3 for heating provided outside the glass pipe 1 and the glass pipe 1 are relatively reciprocated (traverse). In this specification, the gas supply side is also referred to as the upstream side and the exhaust side is also referred to as the downstream side. Soot which the burner 3 in accordance traversed, SiCl 4, the main ingredient gas is generated by oxidation (Si
O 2 particles) 4 is the glass pipe 1 downstream of the burner 3.
The soot 5 is deposited on the inner surface and becomes vitrified as the burner 3 moves, and the glass layer 5 is deposited by repeating the traverse of the burner 3 [(a) in FIG. 4]. Since the burner 3 is not heated to a high temperature on the downstream side of the traverse turn portion 6 where the traverse direction is reversed, the soot adhered to the inner surface of the glass pipe 1 at that portion is not vitrified, and soot 4 In this state, it is thickly deposited at a high height [(b) in FIG. 4].
【０００３】ＭＣＶＤ法において、多数層のガラスを堆
積して厚いガラス層とする場合、バーナーのトラバース
ターン部およびその下流部に堆積するススも厚くなり、
この部分でスス詰まりが起きやすい。その結果、出発材
ガラスパイプに圧力がかかり、ガラス層を内付けする部
分の外径が変動することがあり、場合によっては破裂に
至ることもある。従って、ＭＣＶＤ法による場合、形成
するガラス層の厚みに限界があった。In the MCVD method, when a large number of glass layers are deposited to form a thick glass layer, the soot deposited on the traverse turn portion of the burner and its downstream portion also becomes thicker,
Soot clogging easily occurs in this part. As a result, pressure is applied to the starting material glass pipe, the outer diameter of the portion where the glass layer is internally attached may fluctuate, and in some cases, rupture may occur. Therefore, when the MCVD method is used, the thickness of the glass layer to be formed is limited.
【０００４】[0004]
【発明が解決しようとする課題】本発明は、上記の現状
に鑑み、より厚くガラス層を堆積（内付け）できるＭＣ
ＶＤ法を提供することを課題とする。DISCLOSURE OF THE INVENTION In view of the above situation, the present invention is an MC which can deposit (internally) a thicker glass layer.
It is an object to provide a VD method.
【０００５】[0005]
【課題を解決するための手段】本発明は以下の(1) 〜
(6) の構成により、上記課題を解決するものである。
(1) 石英製のガラスパイプ内面に該ガラスパイプのガス
供給側から排気側へとガラス原料含有ガスを流しつつ該
ガラスパイプの外側からバーナーで加熱することにより
ガラスパイプ内面に付着したススをガラス化しガラス層
を形成する内付け工程を有する光ファイバ母材の製造方
法において、上記内付け工程が、１又は複数回上記バー
ナーをトラバースして上記ガラスパイプ内面にガラス層
を堆積させた後にトラバースターン部から下流側に堆積
したススを除去することを１セットとして１セット以上
行うことを特徴とする光ファイバ母材の製造方法。
(2) 上記ススの除去は、上記ガラスパイプの排気側から
棒を挿入して、トラバースターン部から下流側に堆積し
たススを掻き出すことによることを特徴とする上記(1)
記載の光ファイバ母材の製造方法。
(3) 上記ススの除去は、上記ガラスパイプのガス供給側
から排気側へと気相エッチング用ガスを流しながら該ガ
ラスパイプ外側から上記バーナーで加熱することによ
り、トラバースターン部から下流側に堆積したススを気
相エッチングすることを特徴とする上記(1) 記載の光フ
ァイバ母材の製造方法。
(4) 上記トラバースターン部近傍の掻きだすことが困難
な状態でススが堆積している領域ではガラスパイプ上流
側から気相エッチング用ガスを流しながらガラスパイプ
外側からバーナーで加熱して気相エッチングすることに
より堆積したススを除去し、上記領域より下流側では排
気側から棒を挿入して堆積したススを掻き出すことを特
徴とする上記(1) 記載の光ファイバ母材の製造方法。
(5) 上記内付け工程の間、上記トラバースターン部近傍
の掻きだすことが困難な状態でススが堆積しやすい領域
を上記ガラスパイプの外側から補助バーナーで加熱して
ススの堆積を防止し、上記領域より下流側では排気側か
ら棒を挿入して堆積したススを掻き出すことを特徴とす
る上記(1) 記載の光ファイバ母材の製造方法。
(6) 前記ガラスパイプ内の排気側から棒を挿入して堆積
したススを掻き出す際、ガス供給側から排気側へ不活性
ガスを流しつつ行うことを特徴とする上記(2), (2) ま
たは(5) のいずれかに記載の光ファイバ母材の製造方
法。The present invention provides the following (1) to
The above problem is solved by the configuration of (6). (1) The soot adhering to the inner surface of the glass pipe is heated by a burner from the outside of the glass pipe while flowing the glass raw material-containing gas from the gas supply side to the exhaust side of the glass pipe made of quartz. In the method for manufacturing an optical fiber preform having an internalizing step of forming a glass layer, the internal mounting step comprises traversing turns after traversing the burner one or more times to deposit the glass layer on the inner surface of the glass pipe. The method for producing an optical fiber preform, wherein the removal of soot accumulated on the downstream side from the portion is performed as one set, and one or more sets are performed. (2) The removal of the soot is characterized by inserting a rod from the exhaust side of the glass pipe, and scraping out the soot accumulated on the downstream side from the traverse turn portion (1)
A method for manufacturing the optical fiber preform described above. (3) The soot is removed by heating from the outside of the glass pipe with the burner while flowing a gas for gas phase etching from the gas supply side to the exhaust side of the glass pipe, thereby depositing from the traverse turn portion to the downstream side. The method for producing an optical fiber preform according to (1) above, characterized in that the soot formed is subjected to vapor phase etching. (4) In the area where soot is deposited in a state where it is difficult to scrape out near the traverse turn part, the gas for etching is heated by a burner from the outside of the glass pipe while flowing the gas for gas phase etching from the upstream side of the glass pipe. The deposited soot is removed by doing so, and a rod is inserted from the exhaust side on the downstream side of the region to scrape out the deposited soot, wherein the optical fiber preform according to (1) above is produced. (5) during the internal mounting step, to prevent soot accumulation by heating the area where soot is likely to be deposited in a state where it is difficult to scratch near the traverse turn portion from the outside of the glass pipe with an auxiliary burner, On the downstream side of the above region, a rod is inserted from the exhaust side to scrape out the accumulated soot, and the method for producing an optical fiber preform according to (1) above. (6) When the rod is inserted from the exhaust side in the glass pipe to scrape out the accumulated soot, it is performed while flowing an inert gas from the gas supply side to the exhaust side (2), (2). Alternatively, the method for producing an optical fiber preform according to any one of (5).
【０００６】[0006]
【発明の実施の形態】本発明者らが鋭意研究した結果、
ガラスパイプ（以下、パイプと略記する場合もある）内
で十分にガラス化されずにススの堆積として残ってしま
う部分を堆積中に何らかの手段で除去することにより、
非常に良好な状態で厚いガラス層を形成できることが判
明した。以下、図面を参照して説明するが、各図におい
て共通する符号は同じを意味する。また、各図において
太矢印は運動方向を示す。BEST MODE FOR CARRYING OUT THE INVENTION As a result of intensive studies by the present inventors,
By removing the portion of the glass pipe (hereinafter sometimes abbreviated as "pipe") that is not sufficiently vitrified and remains as soot deposits by some means during deposition,
It has been found that a thick glass layer can be formed in very good condition. Hereinafter, description will be made with reference to the drawings, but common reference numerals in the drawings mean the same. In each figure, the thick arrow indicates the direction of movement.
【０００７】本発明においてはバーナーがトラバースさ
れ、ガラス層を１層または複数層堆積させる毎に、トラ
バースターン部からその下流側に堆積したススを除去す
る。スス除去手段としては、(A) 図１に示すようにガラ
スパイプ１の排気側からパイプ１内に棒７を挿入して物
理的にスス４をパイプ１外へと掻き出す、又は(B) 図２
に示すようにパイプ１内に気相エッチング用ガス８を流
しながらパイプ１外側よりバーナー３で加熱して気相エ
ッチングする、上記 (A), (B) のいずれでも可能であ
る。In the present invention, the burner is traversed, and the soot deposited on the downstream side of the traverse turn portion is removed every time one or more glass layers are deposited. As the soot removing means, (A) as shown in FIG. 1, a rod 7 is physically inserted into the pipe 1 from the exhaust side of the glass pipe 1 to physically scrape the soot 4 out of the pipe 1, or (B). Two
It is possible to use either of the above (A) and (B), in which the vapor etching gas 8 is made to flow in the pipe 1 as shown in FIG.
【０００８】(A) に従いススを掻き出す際には、図１に
示すようにガス供給側からＮ2 等の不活性ガス９を流し
ながら行うと、掻きだしたスス４が逆流することを防止
できて有効である。When scraping out the soot according to (A), if the inert gas 9 such as N 2 is allowed to flow from the gas supply side as shown in FIG. 1, the scraped soot 4 can be prevented from flowing backward. Is effective.
【０００９】ところで、バーナー３の火炎には拡がりが
あるため、トラバースターン部６付近のスス４は透明化
まではされないが、ススが加熱されることで硬くなりパ
イプ１内面に密着するため容易に掻き出すことは難し
い。そこで、スス４の掻き出しが困難な領域に関して
は、(B) により気相エッチングすることが望ましい。図
１及び２においてトラバースターン部からの距離Ｌ内に
ある範囲が、上記容易に掻き出しにくい領域を示す。具
体的にはＬは約２０〜３０ｍｍ程度である。トラバース
ターン部以降の下流を、物理的掻き出しに代えてすべて
気相エッチングによりスス除去することも可能である
が、(A), (B)の両方法を併用することで効率的かつ確実
にススを除去することができ、厚いガラス層を効率良く
形成できる。By the way, since the flame of the burner 3 has spread, the soot 4 near the traverse turn portion 6 is not made transparent, but the soot is hardened by heating and adheres to the inner surface of the pipe 1 easily. It's difficult to scrape. Therefore, it is desirable to vapor-etch the soot 4 in the region where it is difficult to scrape it out, by the process (B). In FIGS. 1 and 2, the range within the distance L from the traverse turn portion indicates the above-mentioned area where scratching is difficult. Specifically, L is about 20 to 30 mm. It is possible to remove soot by vapor phase etching in place of physical scraping in the downstream area after the traverse turn, but by using both methods (A) and (B) together, soot can be removed efficiently and reliably. Can be removed, and a thick glass layer can be efficiently formed.
【００１０】本発明に係る気相エッチング用ガスとして
は、フッ素の化合物が好ましく、特に常温において気体
であり、高温に加熱された時に化合物が分解されてフッ
素が生じるようなフッ素系化合物ガスを用いる。このよ
うなフッ素系化合物ガスとしては、硫黄（Ｓ），炭素
（Ｃ）および／又はケイ素（Ｓｉ）とフッ素の化合物が
挙げられ、さらに具体的にはＳＦ6 ，ＣＦ4 ，ＳｉＦ4
等を挙げることができる。加熱温度は約１４００°程度
である。As the gas for vapor phase etching according to the present invention, a fluorine compound is preferable, and a fluorine compound gas which is a gas at room temperature and which is decomposed to generate fluorine when heated to a high temperature is used. . Examples of such a fluorine-based compound gas include compounds of fluorine with sulfur (S), carbon (C) and / or silicon (Si), and more specifically SF 6 , CF 4 , SiF 4
Etc. can be mentioned. The heating temperature is about 1400 °.
【００１１】なお本発明においては、ガラス層形成の際
に、図３に示すようにトラバースターン部１を補助バー
ナ１０で加熱しながらガラス層の内付けを行うことも好
ましい実施の態様として挙げられる。補助バーナ１０で
加熱している部分には、ススがあまり堆積しない。スス
は温度の低い場所に堆積する傾向があり、これは「サー
モフォレシス効果」として良く知られている。このよう
にするとススが堆積する場所は、有効部（ここに堆積し
たススは透明ガラス化される）、および、トラバースタ
ーン部から離れた部分のみとなり、後者に堆積したスス
は加熱されないので硬くならず容易に掻き出せる。つま
り、前記したトラバース部６から距離Ｌにある物理的掻
き出し困難な部分にススが堆積しなくなる。このように
補助バーナ１０を用いると、気相エッチングをしなくて
も、余分なススを除去することができる。In the present invention, when forming the glass layer, it is also preferable that the traverse turn portion 1 is heated by the auxiliary burner 10 to internally attach the glass layer as shown in FIG. . Soot is not so much deposited on the portion heated by the auxiliary burner 10. Soot tends to accumulate in cold areas, which is well known as the "thermophoresis effect." In this way, the soot is deposited only in the effective part (the soot deposited here becomes vitrified) and the part away from the traverse turn part. The soot deposited in the latter is not heated, so if it is hard. It can be easily scratched out. That is, soot does not accumulate on the portion that is physically hard to scrape away at the distance L from the traverse portion 6 described above. By using the auxiliary burner 10 in this way, it is possible to remove the excess soot without performing vapor phase etching.
【００１２】内付け工程、および次工程のコラプス（パ
イプの中実化）やロッドインコラプス（心棒を入れてパ
イプをつぶし、心棒をパイプと一体化する）を行う前プ
ロセスとして行われるパイプ縮径工程においては、内付
けの際より高温にバーナー加熱するが、このときにトラ
バースターン部付近にススが残存していると、強加熱に
よってこのススがガラス化しパイプ内径が細くなり、ガ
ラスパイプ内圧が高くなりやすく石英パイプ自体が膨張
する可能性が高い。本発明に従いススを除去しておくこ
とは厚いガラス層を形成できることに加え、上記したガ
ラスパイプの膨張を防ぐためにも極めて効果的である。
ＭＣＶＤ法を用いる光ファイバ母材を高い歩留りで製造
するためには、ガラス層が堆積される石英ガラスパイプ
の膨張を抑制することは重要である。[0012] The pipe diameter reduction as a pre-process for the internal mounting step and the subsequent collapse (solidification of the pipe) and rod in collapse (inserting the mandrel to crush the pipe and integrating the mandrel with the pipe) In the process, the burner is heated to a higher temperature than during internal installation, but if soot remains in the vicinity of the traverse turn part at this time, the soot vitrifies due to strong heating and the pipe inner diameter becomes thin, and the glass pipe internal pressure is There is a high possibility that the quartz pipe itself will expand because it tends to be high. Removing soot in accordance with the present invention is extremely effective not only for forming a thick glass layer but also for preventing the expansion of the above glass pipe.
In order to manufacture the optical fiber preform using the MCVD method with a high yield, it is important to suppress the expansion of the quartz glass pipe on which the glass layer is deposited.
【００１３】[0013]
【実施例】以下、実施例を挙げて本発明を具体的に説明
するが、本発明はこれらの実施例に限定されるところは
ない。The present invention will be specifically described below with reference to examples, but the present invention is not limited to these examples.
【００１４】（実施例１）外径が２５ｍｍ、内径が１２
ｍｍの石英ガラスパイプをガラス旋盤にセットし、該石
英ガラスパイプの一端に原料ガスの供給系を、他端には
排気系を接続した。石英ガラスパイプ内にＳｉＣｌ4 ：
１５０ｃｃ／ｍｉｎ、ＧｅＣｌ4 ：６０ｃｃ／ｍｉｎ、
Ｏ2 ：２０００ｃｃ／ｍｉｎの割合で供給し、ガラスパ
イプ１を回転させながら往復運動して、ガラスパイプ１
内側にガラス層５を堆積させた。バーナー３がガス供給
側である上流側から排気側である下流側に移動完了する
たびに、図１に示すように、ガラスパイプ１の排気側か
らガラスパイプ１内に棒７を挿入して、トラバースター
ン部６から下流側、Ｌが２０ｍｍ〜３０ｍｍの位置より
下流側、の領域に存在するスス４を掻き出した。なお、
スス掻き出しの際には、掻き出したススが逆流すること
を防ぐために、ガス供給側からＮ2 を２０００ｃｃ／ｍ
ｉｎ流し続けた。その後、図２に示すようにガラスパイ
プ１内でスス掻きをしていない領域であるトラバースタ
ーン部６からＬが２０ｍｍ〜３０ｍｍの領域をガス供給
側からＳＦ6 を２００ｃｃ／ｍｉｎ流しながらバーナー
３で１４００℃に加熱し、トラバースターン部６付近に
堆積したスス４を３分間気相エッチングした。このよう
にトラバースターン部６より下流側のススを除去した後
に、ガラス原料含有ガスの供給を再開し、バーナー３を
上流側に移動させ一往復させ、トラバースターン部６ま
で移動完了した時点で上記のスス除去の工程を繰り返し
た。その結果、ガラスパイプ１は膨張することなく、ガ
ラス層５を３０層堆積させることができた。Example 1 The outer diameter is 25 mm and the inner diameter is 12
A quartz glass pipe of mm was set on a glass lathe, and a source gas supply system was connected to one end of the quartz glass pipe and an exhaust system was connected to the other end. SiCl 4 in the quartz glass pipe:
150 cc / min, GeCl 4 : 60 cc / min,
O 2 : supplied at a rate of 2000 cc / min, reciprocating while rotating the glass pipe 1,
A glass layer 5 was deposited on the inside. Each time the burner 3 completes its movement from the upstream side, which is the gas supply side, to the downstream side, which is the exhaust side, as shown in FIG. 1, the rod 7 is inserted into the glass pipe 1 from the exhaust side of the glass pipe 1, The soot 4 present in the region downstream from the traverse turn portion 6 and downstream from the position where L was 20 mm to 30 mm was scraped out. In addition,
When soot is scraped out, N 2 is 2,000 cc / m 2 from the gas supply side to prevent the scraped soot from flowing backward.
I kept flowing in. After that, as shown in FIG. 2, from the traverse turn portion 6 which is the area where the soot is not scratched in the glass pipe 1, a region where L is 20 mm to 30 mm is supplied by the burner 3 while flowing SF 6 at 200 cc / min from the gas supply side. The soot 4 deposited near the traverse turn portion 6 was heated at 1400 ° C. and vapor-phase etched for 3 minutes. After removing the soot on the downstream side of the traverse turn portion 6 in this way, the supply of the glass raw material-containing gas is restarted, the burner 3 is moved to the upstream side and reciprocated once, and when the movement to the traverse turn portion 6 is completed, The step of removing soot was repeated. As a result, 30 glass layers 5 could be deposited without expanding the glass pipe 1.
【００１５】（比較例）実施例と同じサイズの石英製の
ガラスパイプに、実施例と同じ流量条件、加熱温度でガ
ラス層を堆積させた。ただし、トラバースターン部６よ
り下流側に堆積したスス４を除去しなかった。その結
果、ガラス層５を４層堆積させた後、トラバースターン
部６およびその下流側でスス詰まりが起き、トラバース
ターン部６付近でガラスパイプの膨張・パンクが生じ
た。Comparative Example A glass layer was deposited on a quartz glass pipe having the same size as in the example, under the same flow rate conditions and heating temperature as in the example. However, the soot 4 deposited on the downstream side of the traverse turn portion 6 was not removed. As a result, after four glass layers 5 were deposited, soot clogging occurred in the traverse turn portion 6 and its downstream side, and expansion and puncture of the glass pipe occurred in the vicinity of the traverse turn portion 6.
【００１６】[0016]
【発明の効果】以上説明のように、本発明によればＭＣ
ＶＤ法によるガラス層の堆積厚さを従来より厚くでき、
またスス詰まりを無くすことによりパイプの外径変動や
破裂発生を防止できる。さらに次工程等におけるパイプ
縮径工程での外径変動や破裂も防止できる。またこのよ
うな効果を奏することにより、光ファイバ母材製造の歩
留向上及び製造コスト低減に非常に有利である。As described above, according to the present invention, MC
The deposition thickness of the glass layer by the VD method can be made thicker than before,
Also, by eliminating soot clogging, it is possible to prevent fluctuations in the outer diameter of the pipe and the occurrence of rupture. Further, it is possible to prevent fluctuations in outer diameter and rupture in the pipe diameter reduction step in the next step or the like. Further, by exhibiting such an effect, it is very advantageous in improving the yield in manufacturing the optical fiber preform and reducing the manufacturing cost.
【図１】 本発明の一実施態様における物理的なスス掻
き出しを説明する概略図である。FIG. 1 is a schematic diagram illustrating a physical removal of soot in an embodiment of the present invention.
【図２】 本発明の一実施態様における気相エッチング
によるスス除去を説明する概略図である。FIG. 2 is a schematic diagram illustrating soot removal by vapor phase etching according to an embodiment of the present invention.
【図３】 本発明の一実施態様における補助バーナーの
使用を説明する概略図である。FIG. 3 is a schematic diagram illustrating the use of an auxiliary burner in one embodiment of the present invention.
【図４】 従来のＭＣＶＤ法を説明する概略図である。FIG. 4 is a schematic diagram illustrating a conventional MCVD method.
１ ガラスパイプ
２ ガラス原料含有ガス
３ 加熱バーナー
４ スス
５ ガラス層
６ トラバースターン部
７ 棒
８ 気相エッチング用ガス
９ 不活性ガス
１０ 補助バーナー
Ｌ 掻きだし困難なススが堆積している領域のトラバー
スターン部からの距離（長さ）1 Glass Pipe 2 Gas Containing Glass Raw Material 3 Heating Burner 4 Soot 5 Glass Layer 6 Traverse Turn Part 7 Rod 8 Gas for Gas Phase Etching 9 Inert Gas 10 Auxiliary Burner L Traverse Turn of Area Where Soot That Is Difficult to Scratch Distance from the part (length)
───────────────────────────────────────────────────── フロントページの続き (72)発明者 平野 正晃 神奈川県横浜市栄区田谷町１番地 住友電 気工業株式会社横浜製作所内 Ｆターム(参考） 4G021 CA12 EA02 EB11 EB22 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Masaaki Hirano Sumitomoden 1 Taya-cho, Sakae-ku, Yokohama-shi, Kanagawa Ki Industry Co., Ltd. Yokohama Works F-term (reference) 4G021 CA12 EA02 EB11 EB22
Claims (6)
イプのガス供給側から排気側へとガラス原料含有ガスを
流しつつ該ガラスパイプの外側からバーナーで加熱する
ことによりガラスパイプ内面に付着したススをガラス化
しガラス層を形成する内付け工程を有する光ファイバ母
材の製造方法において、上記内付け工程が、１又は複数
回上記バーナーをトラバースして上記ガラスパイプ内面
にガラス層を堆積させた後にトラバースターン部から下
流側に堆積したススを除去することを１セットとして１
セット以上行うことを特徴とする光ファイバ母材の製造
方法。1. A soot adhering to the inner surface of a glass pipe made of quartz by heating a glass raw material containing gas from the gas supply side to the exhaust side of the glass pipe while heating the glass pipe from the outside of the glass pipe with a burner. In the method for producing an optical fiber preform having an internal attachment step of vitrifying a glass to form a glass layer, the internal attachment step is performed after traversing the burner one or more times to deposit the glass layer on the inner surface of the glass pipe. Removing soot accumulated on the downstream side from the traverse turn part as one set 1
A method for producing an optical fiber preform characterized by performing the set or more.
排気側から棒を挿入して、トラバースターン部から下流
側に堆積したススを掻き出すことによることを特徴とす
る請求項１記載の光ファイバ母材の製造方法。2. The optical fiber according to claim 1, wherein the soot is removed by inserting a rod from the exhaust side of the glass pipe and scraping out the soot accumulated on the downstream side from the traverse turn portion. Base material manufacturing method.
ガス供給側から排気側へと気相エッチング用ガスを流し
ながら該ガラスパイプ外側から上記バーナーで加熱する
ことにより、トラバースターン部から下流側に堆積した
ススを気相エッチングすることを特徴とする請求項１記
載の光ファイバ母材の製造方法。3. The soot is removed by heating from the outside of the glass pipe with the burner while flowing the gas for gas phase etching from the gas supply side to the exhaust side of the glass pipe, and then from the traverse turn portion to the downstream side. The method for producing an optical fiber preform according to claim 1, wherein the soot deposited on the substrate is vapor-phase etched.
ことが困難な状態でススが堆積している領域ではガラス
パイプ上流側から気相エッチング用ガスを流しながらガ
ラスパイプ外側からバーナーで加熱して気相エッチング
することにより堆積したススを除去し、上記領域より下
流側では排気側から棒を挿入して堆積したススを掻き出
すことを特徴とする請求項１記載の光ファイバ母材の製
造方法。4. In the area where the soot is deposited in a state where it is difficult to scrape out near the traverse turn, the gas for gas phase etching is made to flow from the upstream side of the glass pipe while being heated by a burner from the outside of the glass pipe. 2. The method for producing an optical fiber preform according to claim 1, wherein the deposited soot is removed by phase etching, and a rod is inserted from the exhaust side on the downstream side of the region to scrape the deposited soot.
ーン部近傍の掻きだすことが困難な状態でススが堆積し
やすい領域を上記ガラスパイプの外側から補助バーナー
で加熱してススの堆積を防止し、上記領域より下流側で
は排気側から棒を挿入して堆積したススを掻き出すこと
を特徴とする請求項１記載の光ファイバ母材の製造方
法。5. The soot accumulation is prevented by heating an area near the traverse turn portion where the soot is likely to be deposited in a state where it is difficult to be scratched out from the outside of the glass pipe with an auxiliary burner during the internal mounting step. The method for producing an optical fiber preform according to claim 1, wherein a rod is inserted from the exhaust side on the downstream side of the region to scrape out the accumulated soot.
入して堆積したススを掻き出す際、ガス供給側から排気
側へ不活性ガスを流しつつ行うことを特徴とする請求項
２，４または５のいずれかに記載の光ファイバ母材の製
造方法。6. The method of inserting a rod from the exhaust side in the glass pipe to scrape off the accumulated soot while flowing an inert gas from the gas supply side to the exhaust side. 5. The method for producing an optical fiber preform according to any one of 5 above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001198601A JP2003012338A (en) | 2001-06-29 | 2001-06-29 | Method for manufacturing optical fiber preform using MCVD method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001198601A JP2003012338A (en) | 2001-06-29 | 2001-06-29 | Method for manufacturing optical fiber preform using MCVD method |
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| Publication Number | Publication Date |
|---|---|
| JP2003012338A true JP2003012338A (en) | 2003-01-15 |
Family
ID=19036023
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009013053A (en) * | 2007-06-29 | 2009-01-22 | Draka Comteq Bv | Method for manufacturing optical fiber preform by vapor deposition process |
| JP2011238882A (en) * | 2010-05-13 | 2011-11-24 | Mitsubishi Cable Ind Ltd | Rare earth element doped optical fiber and manufacturing method thereof |
| JP2014114209A (en) * | 2012-12-11 | 2014-06-26 | Draka Comteq Bv | Method for activating inner surface of hollow glass substrate tube for manufacture of optical fiber preform |
| JP2020090418A (en) * | 2018-12-06 | 2020-06-11 | 株式会社フジクラ | Method for manufacturing optical fiber preform and method for manufacturing optical fiber using the same |
-
2001
- 2001-06-29 JP JP2001198601A patent/JP2003012338A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009013053A (en) * | 2007-06-29 | 2009-01-22 | Draka Comteq Bv | Method for manufacturing optical fiber preform by vapor deposition process |
| JP2011238882A (en) * | 2010-05-13 | 2011-11-24 | Mitsubishi Cable Ind Ltd | Rare earth element doped optical fiber and manufacturing method thereof |
| JP2014114209A (en) * | 2012-12-11 | 2014-06-26 | Draka Comteq Bv | Method for activating inner surface of hollow glass substrate tube for manufacture of optical fiber preform |
| JP2020090418A (en) * | 2018-12-06 | 2020-06-11 | 株式会社フジクラ | Method for manufacturing optical fiber preform and method for manufacturing optical fiber using the same |
| JP7105682B2 (en) | 2018-12-06 | 2022-07-25 | 株式会社フジクラ | Method for manufacturing optical fiber preform and method for manufacturing optical fiber using the same |
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