JP2002353534A - Magnetoresistive element, magnetoresistive magnetic sensor and magnetoresistive magnetic head - Google Patents
Magnetoresistive element, magnetoresistive magnetic sensor and magnetoresistive magnetic headInfo
- Publication number
- JP2002353534A JP2002353534A JP2001161016A JP2001161016A JP2002353534A JP 2002353534 A JP2002353534 A JP 2002353534A JP 2001161016 A JP2001161016 A JP 2001161016A JP 2001161016 A JP2001161016 A JP 2001161016A JP 2002353534 A JP2002353534 A JP 2002353534A
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- Prior art keywords
- magnetoresistive
- magnetic domain
- electrode
- opening
- domain stabilizing
- Prior art date
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-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nanotechnology (AREA)
- Power Engineering (AREA)
- Measuring Magnetic Variables (AREA)
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
- Hall/Mr Elements (AREA)
Abstract
(57)【要約】
【課題】 磁気抵抗効果素子のトラック幅方向の感度の
急峻化を図って、実質的トラック幅をより狭小に規制す
ることができるようにする。
【解決手段】 磁化感知膜を有する磁気抵抗効果素子部
10と、この磁気抵抗効果素子部10を挟んでその両側
にその磁化感知膜の端面に対接ないしは対向して配置さ
れ、磁気感知膜を単磁区化する磁区安定化膜13とを有
し、磁気抵抗効果素子部10に、面垂直通電がなされる
磁気抵抗効果素子にあって、感度の急峻化を、電流通路
幅、電流密度分布の規制のみならず、磁気抵抗効果素子
において、その磁化感知膜の単磁区化のための磁区安定
化膜による実質的透磁率感度分布による影響をも考慮
し、この感度分布の半値幅と、磁化感知膜における面垂
直通電電流密度分布の半値幅とをほぼ一致させる構成と
することによって、磁気抵抗効果素子としてのトラック
幅方向の感度の急峻化を図る
(57) [Summary] [PROBLEMS] To steepen the sensitivity of a magnetoresistive element in the track width direction so that the substantial track width can be regulated to be narrower. SOLUTION: A magnetoresistive effect element section 10 having a magnetization sensing film, and disposed on both sides of the magnetoresistive effect element section 10 so as to be in contact with or facing an end face of the magnetization sensing film, And a magnetic domain stabilizing film 13 for forming a single magnetic domain. In addition to the regulation, in the magnetoresistive effect element, considering the influence of the substantial magnetic permeability sensitivity distribution by the magnetic domain stabilizing film for making the magnetization sensing film a single magnetic domain, the half width of this sensitivity distribution and the magnetization sensing The sensitivity in the track width direction as a magnetoresistive element is sharpened by adopting a configuration in which the half-value width of the current density distribution perpendicular to the surface of the film is substantially matched.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、特に、面垂直通電
型のスピンバルブ型巨大磁気抵抗効果素子あるいはトン
ネル磁気抵抗効果素子による磁気抵抗効果素子、磁気抵
抗効果型磁気センサおよび磁気抵抗効果型磁気ヘッドに
係わる。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetoresistive element, a magnetoresistive magnetic sensor, a magnetoresistive magnetic sensor and a magnetoresistive magnetic element using a spin valve type giant magnetoresistive element or a tunnel magnetoresistive element of a plane perpendicular conduction type. Related to the head.
【0002】[0002]
【従来の技術】高感度磁気検出がなされる磁気センサや
磁気ヘッドとして、スピンバルブ型巨大磁気抵抗効果素
子(以下GMR素子という)あるいはトンネル磁気抵抗
効果素子(以下TMR素子という)による磁気センサあ
るいは磁気ヘッドが用いられる方向にある。2. Description of the Related Art A magnetic sensor or a magnetic head using a spin valve type giant magnetoresistive element (hereinafter, referred to as a GMR element) or a tunnel magnetoresistive element (hereinafter, referred to as a TMR element) is used as a magnetic sensor or a magnetic head for performing high-sensitivity magnetic detection. The head is in the direction of use.
【0003】高記録密度の磁気記録媒体例えばハード・
ディスクにおいて、高記録密度化がなされると、そのH
DD(ハード・ディスク・ドライブ)における再生磁気
ヘッドとしては、より高い感度をもって記録を読み出す
再生磁気ヘッドが要求され、面垂直通電型すなわちCP
P(Current Perpedicular to Plane) モードのGMR素
子およびTMR素子による磁気ヘッドが用いられる方向
にある。A high-density magnetic recording medium such as a hard disk
When the recording density of a disc is increased, its H
As a reproducing magnetic head for a DD (hard disk drive), a reproducing magnetic head for reading and writing data with higher sensitivity is required, and a perpendicular magnetic type, that is, CP
A magnetic head using a GMR element and a TMR element in a P (Current Perpedicular to Plane) mode is used.
【0004】この種の磁気ヘッドにおいて、トラック幅
方向に関する感度分布を、できるだけ磁気ギャップ長方
向の中央で急峻に立ち上がる特性とすることによって、
実質的トラック幅の狭小化を図ることができ、より記録
密度の向上を図ることができる。[0004] In this type of magnetic head, the sensitivity distribution in the track width direction has a characteristic that rises as steeply as possible at the center in the magnetic gap length direction.
The track width can be substantially reduced, and the recording density can be further improved.
【0005】因みに、従来、この実質的トラック幅の規
制を、磁気抵抗効果素子に対する対向電極の幅を狭小と
することによって電流通路、したがって、電流密度の分
布の広がりを制御してトラック幅方向の感度分布を急峻
にするにすることの提案がなされている(特開平10−
55512号参照)。しかしながら、この構成による場
合、対向電極を相互に正対させる位置合わせが難しいな
ど、製造上の問題、さらに特性の均一性に問題が生じ
る。Conventionally, the regulation of the substantial track width is conventionally controlled by reducing the width of the counter electrode with respect to the magnetoresistive effect element, thereby controlling the spread of the current path and, hence, the distribution of the current density, in the track width direction. It has been proposed to sharpen the sensitivity distribution (Japanese Patent Laid-Open No.
No. 55512). However, with this configuration, there are problems in manufacturing, such as difficulty in positioning the opposing electrodes to face each other, and further, problems in uniformity of characteristics.
【0006】[0006]
【発明が解決しようとする課題】本発明においては、そ
の磁気抵抗効果素子部をGMR素子あるいはTMR素子
構成とする磁気抵抗効果素子、またこれを感磁部とする
磁気抵抗効果型磁気センサおよび磁気抵抗効果型磁気ヘ
ッドにおいて、トラック幅方向の感度の急峻化を図っ
て、実質的トラック幅をより狭小に規制することができ
るようにする。SUMMARY OF THE INVENTION According to the present invention, a magnetoresistive effect element having a magnetoresistive effect element portion composed of a GMR element or a TMR element, a magnetoresistive effect type magnetic sensor using the magnetoresistive effect element as a magnetic sensing part, and In a resistance effect type magnetic head, the sensitivity in the track width direction is sharpened so that the substantial track width can be regulated to be smaller.
【0007】そして、本発明においては、この構成にお
いて、構造の簡潔化、特性の均一化を図ることができる
ようにする。According to the present invention, in this configuration, the structure can be simplified and the characteristics can be made uniform.
【0008】[0008]
【課題を解決するための手段】本発明においては、上述
した感度の急峻化を、電流通路幅、電流密度分布の規制
のみならず、磁気抵抗効果素子において、その磁化感知
膜の単磁区化のための磁区安定化膜による透磁率感度分
布をも利用してトラック幅の規定を行う。In the present invention, the steepening of the sensitivity described above can be achieved not only by controlling the current path width and the current density distribution, but also by making the magnetization sensing film of the magnetoresistive effect element a single magnetic domain. The track width is also specified using the magnetic permeability sensitivity distribution of the magnetic domain stabilizing film for the purpose.
【0009】すなわち、本発明による磁気抵抗効果素子
は、磁化感知膜を有する磁気抵抗効果素子部と、この磁
気抵抗効果素子部を挟んでその両側に、磁化感知膜の端
面に対接ないしは対向して配置された磁気感知膜の磁区
安定化膜とを有し、磁気抵抗効果素子部に、面垂直通電
がなされる磁気抵抗効果素子にあって、その磁化感知膜
の磁区安定化方向の透磁率の感度分布の半値幅と、磁化
感知膜における面垂直通電電流密度分布の半値幅とをほ
ぼ一致させる構成とする。That is, a magnetoresistive element according to the present invention has a magnetoresistive element having a magnetization sensing film, and is provided on both sides of the magnetoresistive element so as to contact or face the end face of the magnetization sensing film. And a magnetic domain stabilizing film of a magnetic sensing film disposed in a direction perpendicular to the surface of the magnetoresistive element. And the half-width of the sensitivity distribution and the half-width of the surface-perpendicular conduction current density distribution in the magnetization sensing film.
【0010】また、本発明による磁気抵抗効果素子は、
磁化感知膜を有する磁気抵抗効果素子部と、磁気抵抗効
果素子部を挟んでその両側に磁化感知膜の端面に対接な
いしは対向して配置され、磁気感知膜の磁区安定化膜と
を有し、磁気抵抗効果素子部に、面垂直通電がなされる
磁気抵抗効果素子にあって、磁気抵抗効果素子部に対す
る面垂直通電を行う対向電極の一方の電極のコンタクト
部が、両側の磁区安定化膜の間隔方向、すなわち磁区安
定化方向(以下トラック幅方向という)に関する幅を、
磁区安定化膜の間隔より小に選定する。[0010] The magnetoresistive element according to the present invention comprises:
A magnetoresistive element having a magnetization sensing film, and a magnetic domain stabilizing film of the magnetic sensing film disposed on both sides of the magnetoresistive element so as to be in contact with or facing the end face of the magnetization sensing film. In the magnetoresistive element in which the surface-perpendicular current is applied to the magnetoresistive element portion, the contact portion of one electrode of the counter electrode for conducting the surface-perpendicular current to the magnetoresistive element portion is a magnetic domain stabilizing film on both sides. , The width in the magnetic domain stabilizing direction (hereinafter referred to as the track width direction)
Select smaller than the interval of the magnetic domain stabilizing film.
【0011】更に、本発明による磁気抵抗効果型磁気セ
ンサは、これを構成する磁気抵抗効果素子の構成を上述
した本発明による磁気抵抗効果素子構成とする。Further, in the magnetoresistive effect type magnetic sensor according to the present invention, the configuration of the magnetoresistive element constituting the magnetoresistive effect sensor is the above-described magnetoresistive effect element configuration according to the present invention.
【0012】また、本発明による磁気抵抗効果型磁気ヘ
ッドは、その感磁部を上述した本発明による磁気抵抗効
果素子構成とする。Further, in the magneto-resistance effect type magnetic head according to the present invention, the magnetic sensing portion has the above-described magneto-resistance effect element configuration according to the present invention.
【0013】上述した本発明による磁気抵抗効果素子、
あるいは磁気抵抗効果素子を具備する磁気抵抗効果型磁
気センサあるいは磁気抵抗効果型磁気ヘッドにおいて
は、その磁気抵抗効果素子部に通電する電流分布と、更
に、この磁気抵抗効果素子部の磁化感知膜の、磁区安定
化膜との隣接部における磁化の回転の阻止ないしは低下
による実質的透磁率の感度分布との双方を巧みに利用す
ることによって再生感度分布の急峻化を図るものであ
る。The above-described magnetoresistive element according to the present invention,
Alternatively, in a magneto-resistance effect type magnetic sensor or a magneto-resistance effect type magnetic head having a magneto-resistance effect element, a current distribution flowing through the magneto-resistance effect element portion, and furthermore, a distribution of a magnetization sensing film of the magneto-resistance effect element portion. The steepness of the reproduction sensitivity distribution is achieved by skillfully utilizing both the magnetic permeability stabilization distribution due to the prevention or reduction of the rotation of magnetization in the portion adjacent to the magnetic domain stabilizing film.
【0014】[0014]
【発明の実施の形態】図1は、本発明による磁気抵抗効
果素子(MR素子)の一実施形態の一例の断面図を示
す。この例においては、第1の電極11上にMR素子部
10が限定的に形成され、その両側に、例えば所定方向
に磁化された硬磁性膜による磁区安定化膜13がアバッ
ト接合される。そして、この磁区安定化膜13上からM
R素子部10上に幅WT をもって跨がってAl2 O3 等
による絶縁層14が被着形成される。このようにして絶
縁層14には、MR素子部10上の中央部上に所要の幅
の開口14wが開口され、この開口14wを通じて、第
2の電極12が、MR素子部10上に電気的に、限定的
にコンタクトされる。すなわち、磁区安定化膜13間の
間隔より小なる幅に第2の電極12がコンタクトされ
る。FIG. 1 is a sectional view showing an example of an embodiment of a magnetoresistance effect element (MR element) according to the present invention. In this example, the MR element portion 10 is formed on the first electrode 11 in a limited manner, and a magnetic domain stabilizing film 13 made of, for example, a hard magnetic film magnetized in a predetermined direction is abutted on both sides thereof. Then, M
An insulating layer 14 of Al 2 O 3 or the like is deposited on the R element portion 10 over the width WT. In this manner, the insulating layer 14 is provided with an opening 14w having a required width above the central portion on the MR element section 10, and through this opening 14w, the second electrode 12 is electrically connected on the MR element section 10. Is limitedly contacted. That is, the second electrode 12 is contacted with a width smaller than the interval between the magnetic domain stabilizing films 13.
【0015】MR素子部10は、例えば図2Aに、概略
断面図を示すように、いわゆるボトム型のGMR素子構
成とすることができる。すなわち、この場合は、反強磁
性層1上に順次固定層2、非磁性スペーサ層3、自由層
4が積層された構成を有し、必要に応じて図示しない
が、表面にCu等の導電層による保護層が形成される。The MR element section 10 can have a so-called bottom type GMR element structure, as shown in a schematic sectional view in FIG. 2A, for example. That is, in this case, the pinned layer 2, the non-magnetic spacer layer 3, and the free layer 4 are sequentially laminated on the antiferromagnetic layer 1. Although not shown, a conductive material such as Cu A protective layer of a layer is formed.
【0016】あるいは、例えば図2bに概略断面図を示
すように、いわゆるボトム型のGMRと、その上にトッ
プ型のGMRが積層されたデュアル型GMR構成とする
ことができる。すなわち、この場合は、第1の反強磁性
層1a上に順次第1の固定層2a、第1の非磁性スペー
サ層3a、自由層4が積層され、更にこの上に、第2の
非磁性スペーサ層3b、第2の固定層2b、第2の反強
磁性層1bが積層された構成とすることができる。Alternatively, as shown in a schematic sectional view of FIG. 2B, for example, a so-called bottom-type GMR and a top-type GMR may be stacked on a dual-type GMR structure. That is, in this case, the first fixed layer 2a, the first nonmagnetic spacer layer 3a, and the free layer 4 are sequentially laminated on the first antiferromagnetic layer 1a, and the second nonmagnetic layer A configuration in which the spacer layer 3b, the second fixed layer 2b, and the second antiferromagnetic layer 1b are stacked can be employed.
【0017】また、図2AおよびBの各構成において、
その例えば固定層2、2aおよび2bは、それぞれ例え
ばCoFeによる強磁性層が、例えばRuによる非磁性
薄膜層を介して積層された積層フェリ磁性層、いわゆる
シンセティック構成とすることが望ましい。In each of the configurations shown in FIGS. 2A and 2B,
For example, the fixed layers 2, 2a, and 2b each preferably have a so-called synthetic structure in which a ferromagnetic layer made of, for example, CoFe is stacked via a nonmagnetic thin film layer made of, for example, Ru.
【0018】磁区安定化膜13は、CoCr、CoP
t、CoNiPt、CoCrPt等による硬磁性層によ
って構成し、これがMR素子部10の磁化感知膜すなわ
ち自由層4の両端面にアバット接合、あるいは例えば絶
縁薄膜を介して接合される。磁区安定化膜は、このよう
な硬磁性層に限られるものではなく、磁化感知膜すなわ
ち自由層4に交換結合するようにアバット接合させた例
えばFeMn、IrMn、RhMn、NiMn、PtM
n、PdPtMn、ニッケル酸化物、コバルト酸化部等
いよって構成することができる。このように磁区安定化
膜として反強磁性層によって構成する場合は、後述する
トラック幅方向の磁気的感度の立ち上がりを、より急峻
にすることができる。The magnetic domain stabilizing film 13 is made of CoCr, CoP
A hard magnetic layer made of t, CoNiPt, CoCrPt, or the like, which is joined to both ends of the magnetization sensing film of the MR element section 10, that is, both end faces of the free layer 4, through an abutt junction or, for example, an insulating thin film. The magnetic domain stabilizing film is not limited to such a hard magnetic layer, but may be, for example, FeMn, IrMn, RhMn, NiMn, or PtM which is abutted so as to be exchange-coupled to the magnetization sensing film, that is, the free layer 4.
n, PdPtMn, a nickel oxide, a cobalt oxide part or the like. When the magnetic domain stabilizing film is formed of an antiferromagnetic layer as described above, the rise of magnetic sensitivity in the track width direction described later can be made steeper.
【0019】MR素子部10には、両電極11および1
2間に、センス電流Isを通電する。すなわち、面垂直
方向に通電がなされるCPP構成とされる。The MR element 10 has both electrodes 11 and 1
Between the two, the sense current Is is supplied. That is, a CPP configuration in which current is supplied in a direction perpendicular to the plane is used.
【0020】また、MR素子部10は、上述したよう
に、GMR構成とすることもできるが、非磁性スペーサ
層2、2aおよび2bとして、例えばAl2 O3 薄膜に
よるトンネルバリア層構成としてTMR構成とすること
ができる。As described above, the MR element section 10 may have a GMR structure. However, as the nonmagnetic spacer layers 2, 2a and 2b, for example, a TMR structure is used as a tunnel barrier layer made of an Al 2 O 3 thin film. It can be.
【0021】上述の構成において、MR素子に導入する
検出磁界の向きと交叉する方向に、磁区安定化膜の磁化
の向き、すなわち自由層の検出磁界が印加されない状態
(無磁界状態)での磁化の向きが選定され、これと交叉
する方向に固定層の磁化の向きが選定される。In the above configuration, the direction of the magnetization of the magnetic domain stabilizing film, that is, the magnetization in the state where no detection magnetic field of the free layer is applied (no magnetic field state), crosses the direction of the detection magnetic field introduced into the MR element. Is selected, and the direction of magnetization of the fixed layer is selected in a direction crossing the direction.
【0022】また、本発明による磁気抵抗効果型磁気セ
ンサ(MRセンサ)、あるいは磁気抵抗効果型磁気ヘッ
ド(MR磁気ヘッド)は、図3に概略断面図を示すよう
に、例えば図1で示したMR素子部10の第1および第
2電極11および12の外面に第1および第2の磁気ー
ルド21および22が配置された構成とするか、あるい
は図示しないが、第1および第2の電極11および12
を兼ねる第1および第2の磁気シールド兼電極を配置す
る。A magnetoresistive magnetic sensor (MR sensor) or a magnetoresistive magnetic head (MR magnetic head) according to the present invention is shown, for example, in FIG. The first and second magnetic fields 21 and 22 are arranged on the outer surfaces of the first and second electrodes 11 and 12 of the MR element portion 10 or, although not shown, the first and second electrodes 11 and 12 And 12
The first and second magnetic shield / electrodes which also serve as the first and second magnetic shields are arranged.
【0023】図4Aは、本発明によるMR素子部10の
模式的断面図を示すもので、図1と対応する部分には同
一符号を付して重複説明を省略する。このように、磁化
安定化膜13が両側に配置されたMR素子部10は、こ
れら磁化安定化膜13によって所定方向、すなわち外部
磁界(検出磁界)の印加方向と交叉する方向に磁化さ
れ、単磁区化されて外部磁界による磁化の回転が安定に
行われるようにすると共にバルクハウゼンノイズの発生
が改善されるようにするようになされている。FIG. 4A is a schematic sectional view of the MR element section 10 according to the present invention, and portions corresponding to those in FIG. As described above, the MR element section 10 in which the magnetization stabilizing films 13 are arranged on both sides is magnetized by these magnetization stabilizing films 13 in a predetermined direction, that is, in a direction crossing the application direction of the external magnetic field (detection magnetic field). The magnetic domain is formed so that the rotation of the magnetization by the external magnetic field is stably performed, and the generation of Barkhausen noise is improved.
【0024】しかしながら、反面、このMR素子部10
の、感度は、磁化安定化膜13と十分離間した中央部に
おいては、高い感度を示すが、これより磁化定化膜13
に建設するにつれ、磁化安定化膜13によって強い影響
を受けて磁化の回転が阻害されて感度が低下し、更にこ
の磁化安定化膜13との接合部における両側端において
は、磁化が固定され、不感知領域となる。すなわち、図
4Bに示すように、実質的透過率が中央で最も高く、両
側において低下する分布を示す。However, on the other hand, the MR element 10
Although the sensitivity is high in the central part, which is sufficiently separated from the magnetization stabilizing film 13, the sensitivity is high.
As a result, the magnetization stabilizing film 13 strongly influences the rotation of the magnetization, thereby hindering the sensitivity and lowering the sensitivity. Further, the magnetization is fixed at both ends at the junction with the magnetization stabilizing film 13, It becomes an insensitive area. That is, as shown in FIG. 4B, the distribution shows that the substantial transmittance is highest in the center and decreases on both sides.
【0025】一方、MR素子部10に対し、電極11お
よび12間に、センス電流Isの通電がなされる。これ
による電流密度分布は、図4Cに示すように、絶縁層1
4の開口14wにおける電極12のコンタクト部直下に
おいて、すなわち開口14wの幅に対応する幅をもって
電流密度は、高い値を示し、これより両外側に向かっ
て、絶縁層14下に電流の回り込みが生じるものの、そ
の電流密度は低くなる。そして、GMRおよびTMRの
いずれにおいても、電子が通過する磁性層の磁化状態に
対応した抵抗変化をするため、電流密度が高いほど検出
される電圧が高く、またそのトラック幅方向の検出依存
性も電流が高いほど大きくなる。On the other hand, a sense current Is is supplied to the MR element section 10 between the electrodes 11 and 12. As shown in FIG. 4C, the current density distribution is
The current density shows a high value immediately below the contact portion of the electrode 12 in the opening 14w of the fourth, that is, the width corresponding to the width of the opening 14w, and the current spills below the insulating layer 14 toward both outer sides. However, the current density is low. In both GMR and TMR, since the resistance changes in accordance with the magnetization state of the magnetic layer through which electrons pass, the detected voltage is higher as the current density is higher, and the detection dependency in the track width direction is also higher. The higher the current, the greater.
【0026】この構成において、図4Bの透過率の感度
分布の半値幅W50B と、図4Cの電流密度分布の半値幅
W50C とをほぼ一致させるように、コンタクト幅、すな
わち開口14Wの幅、絶縁層14のMR素子部10上の
突出幅WT 、センス電流等の選定を行う。In this configuration, the contact width, that is, the width of the opening 14W, the insulating layer, and the half width W50B of the transmittance sensitivity distribution shown in FIG. 4B substantially match the half width W50C of the current density distribution shown in FIG. 4C. The selection of the protrusion width WT, sense current, and the like on the fourteen MR element portions 10 is performed.
【0027】これら図4Bおよび図4Cの2つトラック
幅の感度を、1つのMR素子部10について行えば、ト
ラック幅方向の感度は、それぞれの感度の空間関数の積
となり、図4Dに実線曲線で示すように、トラック幅感
度の立ち上がりが、図4D中破線曲線で示す図4Bおよ
びCにおける感度特性に比し、急峻な特性となる。If these two track width sensitivities shown in FIGS. 4B and 4C are performed for one MR element section 10, the sensitivity in the track width direction becomes the product of the spatial functions of the respective sensitivities. As shown by, the rise of the track width sensitivity becomes steeper than the sensitivity characteristics in FIGS. 4B and 4C indicated by the broken line curve in FIG. 4D.
【0028】次に、本発明による磁気抵抗効果素子の実
施例を説明する。この場合、CPP型のGMR再生ヘッ
ドを作製した。そして、MR素子部10を挟んで配置し
た磁区安定化膜の間隔を同一に選定し、図4Aで説明し
た絶縁層4の突出量WT を、WT =0とした再生ヘッド
(試料1)と、WT =100nmの再生ヘッド(試料
2)を作製した。そして、これらヘッド(試料1および
2)の再生出力およびマイクロ・トラック・プロファイ
ルのトラック幅の立ち上がりを調べた。Next, an embodiment of the magnetoresistance effect element according to the present invention will be described. In this case, a CPP type GMR reproducing head was manufactured. A reproducing head (sample 1) in which the distance between the magnetic domain stabilizing films disposed so as to sandwich the MR element section 10 is selected to be the same and the protrusion amount WT of the insulating layer 4 described in FIG. A reproducing head with WT = 100 nm (sample 2) was produced. Then, the reproduction output of these heads (samples 1 and 2) and the rise of the track width of the micro-track profile were examined.
【0029】試料1および2におけるMR素子部10
は、図2Bで説明したデュアル型GMR構成とした。こ
の場合、第1および第2の反強磁性層1aおよび1bを
PtMnによって構成し、固定層は、シンセティック構
成とした。自由層4は、Ms(飽和磁化)×t(厚さ)
=800emu/cm3 ×11.5nmとした。因みに、この
値は従来通常の値より大きいものであるが、これは本発
明構成による効果を、より明確に知るためである。The MR element section 10 in the samples 1 and 2
Has a dual GMR configuration described with reference to FIG. 2B. In this case, the first and second antiferromagnetic layers 1a and 1b were made of PtMn, and the fixed layer was made of a synthetic structure. The free layer 4 has Ms (saturated magnetization) × t (thickness)
= 800 emu / cm 3 × 11.5 nm. Incidentally, this value is larger than the usual value in the related art, in order to more clearly understand the effect of the configuration of the present invention.
【0030】そして、上下に、NiFeによる磁気シー
ルド兼電極を配置した。これら磁気シールド兼電極と、
MR素子部10との接合面にはCu膜を介在させた。磁
気シールド兼電極間のギャップ間隔は、120nmとし
た。磁区安定化膜13は、CoCrPt(Ms(500
emu/cm3 )×t)を用い、規格化永久磁石係数(500
〔emu/cm3 〕×t〔nm〕/800〔emu/cm3 〕×1
1.5〔nm〕を8.3に設定した。絶縁層14は、A
l2 O3 を用いた。Then, a magnetic shield / electrode made of NiFe was arranged above and below. With these magnetic shields and electrodes,
A Cu film was interposed on the bonding surface with the MR element unit 10. The gap between the magnetic shield and electrode was 120 nm. The magnetic domain stabilizing film 13 is made of CoCrPt (Ms (500
emu / cm 3 ) × t) and the normalized permanent magnet coefficient (500
[Emu / cm 3 ] × t [nm] / 800 [emu / cm 3 ] × 1
1.5 [nm] was set to 8.3. The insulating layer 14 is made of A
l 2 O 3 was used.
【0031】そして、これら試料1および2に対する測
定は、センス電流を15mAの条件で調査した。その結
果、試料2(WT =100nm)は、試料1(WT =0
nm)に比し、33%程度出力の向上が図られた。この
効果は、感度の急峻化による分流損失の低減によるもの
と考えられる。In the measurement of Samples 1 and 2, the sense current was examined under the condition of 15 mA. As a result, Sample 2 (WT = 100 nm) was replaced by Sample 1 (WT = 0).
nm), the output was improved by about 33%. This effect is considered to be due to the reduction of the shunt loss due to the sharpening of the sensitivity.
【0032】図5は、縦軸方向に再生出力を、横軸方向
を磁区安定化膜間の距離で規格したマイクロ・トラック
・プロファイルを示したものである。図5中実線曲線
は、試料1についての測定結果を示し、破線曲線は、試
料2についての測定結果を示す。両者を比較して明らか
なように、試料2は試料1に比し、トラック幅方向の感
度の立ち上がりが改善されている。FIG. 5 shows a micro-track profile in which the reproduction output is specified in the direction of the vertical axis and the distance between the magnetic domain stabilizing films in the direction of the horizontal axis. In FIG. 5, the solid curve shows the measurement result for Sample 1, and the broken curve shows the measurement result for Sample 2. As is clear from the comparison between the two, the rising of the sensitivity in the track width direction of the sample 2 is improved as compared with the sample 1.
【0033】尚、突出幅WT =0とした場合の感度と、
WT を可なり大として、前述した半値幅W50B およびW
50C を、W50B ≫W50C としたときの感度と、WT を極
めて小としてW50B ≪W50C としたときの感度を、それ
ぞれ図11〜図13対比して示す。いずれにおいても、
本発明におけるW50B ≒W50C とした場合に比し、再生
感度分布の急峻化を図ることができない。Note that the sensitivity when the protrusion width WT = 0 is set,
Assuming that WT is considerably large, the half widths W50B and W
The sensitivity when 50C is W50B≫W50C and the sensitivity when WT is extremely small and W50B≪W50C are shown in comparison with FIGS. In each case,
As compared with the case where W50B ≒ W50C in the present invention, the reproduction sensitivity distribution cannot be sharpened.
【0034】図6〜図9は、それぞれ本発明による磁気
抵抗効果素子を感磁部とする磁気抵抗効果型磁気センサ
ないしは磁気抵抗効果型磁気ヘッドの各例の概略断面図
を示すものであるが、本発明は、これらに限定されるも
のではないことはいうでもない。FIGS. 6 to 9 are schematic sectional views showing examples of a magnetoresistive magnetic sensor or a magnetoresistive magnetic head using a magnetoresistive element according to the present invention as a magnetic sensing portion. Needless to say, the present invention is not limited to these.
【0035】図6で示す例においては、対向電極の一方
の電極11上に、コンタクト部を規定する開口を有する
絶縁層14が形成され、この絶縁層14の開口幅より大
なる間隔をもって磁区安定化膜13が配置形成され、開
口14w内から磁区安定化膜13上に差し渡ってMR素
子部10の構成膜と、他方の電極12とが形成された構
成とした場合である。In the example shown in FIG. 6, an insulating layer 14 having an opening for defining a contact portion is formed on one electrode 11 of the counter electrode, and the magnetic domain is stabilized with an interval larger than the opening width of the insulating layer 14. In this case, the constituent film of the MR element unit 10 and the other electrode 12 are formed so that the oxide film 13 is arranged and formed over the magnetic domain stabilizing film 13 from within the opening 14w.
【0036】また、図7に示す例においては、絶縁層1
4の開口14w内に対向電極の一方の電極11が配置さ
れ、開口幅より大なる間隔をもって磁区安定化膜13が
形成され、磁区安定化膜間から磁区安定化膜上に差し渡
ってMR素子部10の構成膜と、他方の電極12とが形
成された構成とした場合である。Further, in the example shown in FIG.
One of the opposing electrodes 11 is arranged in the opening 14w of the fourth magnetic field stabilization film 4 and the magnetic domain stabilizing films 13 are formed with an interval larger than the opening width. This is a case where the constituent film of the part 10 and the other electrode 12 are formed.
【0037】図8に示す例においては、絶縁層14の開
口14内に一方の電極11が配置され、開口14wから
絶縁層14上に差し渡って、開口14wとの対向部より
外側において肉薄としたMR素子部10の構成膜が形成
され、この肉薄部上に磁区安定化膜13が形成され、こ
の磁区安定化膜13間のMR素子部10から磁区安定化
膜13上に差し渡って他方の電極12が形成されて平坦
化構成とされた場合である。In the example shown in FIG. 8, one of the electrodes 11 is arranged in the opening 14 of the insulating layer 14, and extends over the insulating layer 14 from the opening 14w to be thinner outside the portion facing the opening 14w. The constituent film of the MR element portion 10 is formed, and a magnetic domain stabilizing film 13 is formed on the thin portion. The MR element portion 10 between the magnetic domain stabilizing films 13 extends over the magnetic domain stabilizing film 13 and This is a case where the electrode 12 is formed to have a flattened configuration.
【0038】図9に示す例においては、一方の電極11
が、限定的に形成され、この電極11を挟んで磁区安定
化膜13が相対向して配置され、電極11上と磁区安定
化膜13上に差し渡って、MR素子部10の構成膜が形
成され、このMR素子部10上に、この阻止部10下の
電極11に対向して開口14wを有する絶縁層14が形
成され、絶縁層14の開口14w内とこの絶縁層14上
に差し渡って他方の電極12が形成された構成とした場
合である。In the example shown in FIG. 9, one electrode 11
Is formed in a limited manner, the magnetic domain stabilizing films 13 are arranged opposite to each other with the electrode 11 interposed therebetween, and the constituent films of the MR element portion 10 are formed over the electrodes 11 and the magnetic domain stabilizing films 13. An insulating layer 14 having an opening 14w is formed on the MR element portion 10 so as to face the electrode 11 below the blocking portion 10, and extends in the opening 14w of the insulating layer 14 and over the insulating layer 14. In this case, the other electrode 12 is formed.
【0039】尚、図1あるいは図3に示す構造による場
合、その製造方法としては、磁化安定化膜13と絶縁層
14の開口14wとをセルフアラインすることができ
る。この場合の一例を図10を参照して説明すると、図
10Aに示すように、電極11を有するMR素子部10
を構成する構成膜すなわち積層膜100を用意する。In the case of the structure shown in FIG. 1 or FIG. 3, as a manufacturing method, the magnetization stabilizing film 13 and the opening 14w of the insulating layer 14 can be self-aligned. An example of this case will be described with reference to FIG. 10. As shown in FIG.
Is prepared, that is, a laminated film 100 that constitutes the above.
【0040】図10Bに示すように、積層膜100上
に、第1および第2のフォトレジスト31および32を
形成する。第1のフォトレジスト31は、最終的に開口
14wを形成する位置およびパターンに形成し、この上
に第2のフォトレジスト32を最終的に磁区安定化膜1
3間上に相当する位置に形成する。これらフォトレジス
ト31および32の形成は、フォトリソグラフィによっ
て相互に所定の位置関係をもって正確に形成することが
できる。As shown in FIG. 10B, first and second photoresists 31 and 32 are formed on the laminated film 100. The first photoresist 31 is formed at a position and a pattern where the opening 14w is to be finally formed, and a second photoresist 32 is finally formed thereon on the magnetic domain stabilizing film 1.
It is formed at a position corresponding to the upper part between the three spaces. The photoresists 31 and 32 can be accurately formed with a predetermined positional relationship with each other by photolithography.
【0041】その後、第2のフォトレジスト32をマス
クとして、例えば異方性エッチング、例えばイオンビー
ムエッチングによってフォトレジスト32外の積層膜1
00を所要の厚さにエッチングし、MR素子部10を形
成し、その両側にく溝100Mを形成する。Thereafter, using the second photoresist 32 as a mask, the laminated film 1 outside the photoresist 32 is anisotropically etched, for example, by ion beam etching.
00 is etched to a required thickness to form the MR element portion 10, and grooves 100M are formed on both sides thereof.
【0042】図10Cに示すように、溝100Mを埋込
むように全面的に、磁区安定化膜13をスパッタリング
等によって形成し、その後斜め方向からのスパッタリン
グを行って絶縁層14を第2のフォトレジスト32内に
入り込むように形成する。As shown in FIG. 10C, a magnetic domain stabilizing film 13 is formed on the entire surface so as to fill the groove 100M by sputtering or the like, and thereafter, the insulating layer 14 is sputtered in an oblique direction to form the second photo-resist. It is formed so as to enter the inside of the resist 32.
【0043】その後、図10Dに示すように、第1およ
び第2のフォトレジスト31および32を除去し、開口
14wを形成し、全面的に他方の電極12をスパッタリ
ング等によって形成する。Thereafter, as shown in FIG. 10D, the first and second photoresists 31 and 32 are removed, an opening 14w is formed, and the other electrode 12 is entirely formed by sputtering or the like.
【0044】このようにして、開口14wと磁区安定化
膜13とが所定の位置関係にセルフアラインによって形
成された磁気抵抗効果素子、またこれを感磁部ないしは
センサ部とする磁気抵抗効果型磁気ヘッドないしは磁気
センサを構成することができる。As described above, the magnetoresistive effect element in which the opening 14w and the magnetic domain stabilizing film 13 are formed in a predetermined positional relationship by self-alignment, and the magnetoresistive effect type magnetic element using the magnetoresistive element or the sensor section as the magnetoresistive element. A head or a magnetic sensor can be configured.
【0045】上述したように本発明によれば、急峻な感
度を有する磁気抵抗効果素子、磁気抵抗効果型磁気セン
サ、磁気抵抗効果型磁気ヘッドを構成することができる
ことから、例えば高密度記録媒体を、高い分解能をもっ
て再生することができるAs described above, according to the present invention, a magnetoresistive element, a magnetoresistive magnetic sensor, and a magnetoresistive magnetic head having a steep sensitivity can be formed. Can be played with high resolution
【0046】また、本発明構成によれば、MR素子部1
0上に限定的に絶縁層の開口を形成し、電極の形成を行
うものであって、MR素子部10において限定的にセン
ス電極の通路を形成するものであって、言わばその実働
部がMR素子部10の一部に限定的に形成されることか
ら、この実働部を、例えば磁気ヘッドにおいて、記録記
録媒体との対向ないしは摺動面となる前方面より後方に
配置することによって、いわば前方磁束ガイドの配置構
成とすることができ、実働部における、摺動熱、摩耗等
の影響を回避できる。According to the structure of the present invention, the MR element 1
An electrode is formed by forming an opening in an insulating layer only on the upper electrode 0, and a path for a sense electrode is formed in the MR element section 10 in a limited manner. Since this working part is formed in a part of the element part 10 in a limited manner, for example, by arranging this working part behind a front surface which is a facing or sliding surface with a recording medium in a magnetic head, so to speak, The arrangement of the magnetic flux guide can be adopted, and the influence of sliding heat, abrasion and the like on the working part can be avoided.
【0047】また、本発明による磁気ヘッドは再生磁気
ヘッドであることから、この再生磁気ヘッド上に、周知
の例えば薄膜型電磁誘導型記録ヘッドを載置形成するこ
とによって記録再生磁気ヘッドを構成することができ
る。Further, since the magnetic head according to the present invention is a reproducing magnetic head, a recording / reproducing magnetic head is formed by mounting a well-known, for example, a thin film type electromagnetic induction type recording head on the reproducing magnetic head. be able to.
【0048】尚、本発明による磁気抵抗効果素子、磁気
抵抗効果型磁気センサ、磁気抵抗効果型磁気ヘッドは、
上述した例に限定されるものではなく、使用目的、態様
に応じて、本発明構成において種々の変形変更を行うこ
とができるものであり、また本発明磁気抵抗効果素子に
よって、例えば薄膜磁気メモリを構成することもでき
る。The magnetoresistive element, magnetoresistive magnetic sensor, and magnetoresistive magnetic head according to the present invention include:
The present invention is not limited to the above-described example, and various modifications can be made in the configuration of the present invention in accordance with the purpose of use and mode. It can also be configured.
【0049】[0049]
【発明の効果】上述したように、本発明による磁気抵抗
効果素子は、トラック幅方向の実質的感度の急峻化を図
ることから、磁界検出を高精度に行うことができ、高精
度の磁気抵抗効果型磁気センサが構成でき、また、高記
録密度磁気記録媒体に対する磁気抵抗効果型磁気ヘッド
を構成できるものである。As described above, the magnetoresistive effect element according to the present invention is capable of detecting the magnetic field with high accuracy because the sensitivity is substantially sharpened in the track width direction. An effect type magnetic sensor can be formed, and a magnetoresistive effect type magnetic head for a high recording density magnetic recording medium can be formed.
【0050】そして、その構成は、磁区安定化膜による
実質的透磁率感度分布による影響をも考慮し、この感度
分布の半値幅と、磁化感知膜における面垂直通電電流密
度分布の半値幅とをほぼ一致させるという特性の選定の
みであるので、特段の手段を付加するなどの構造上の煩
雑な構成を回避できるものである。In addition, in consideration of the influence of the substantial magnetic permeability sensitivity distribution due to the magnetic domain stabilizing film, the structure has a half width of this sensitivity distribution and a half width of the surface perpendicular conduction current density distribution in the magnetization sensing film. Since it is only the selection of the characteristic that they almost match, it is possible to avoid a complicated structure such as adding a special means.
【図1】本発明による磁気抵抗効果素子の一例の概略断
面図である。FIG. 1 is a schematic sectional view of an example of a magnetoresistance effect element according to the present invention.
【図2】AおよびBは、それぞれ磁気抵抗効果素子部の
一例の概略断面図である。FIGS. 2A and 2B are schematic cross-sectional views each illustrating an example of a magnetoresistive element unit.
【図3】本発明による磁気抵抗効果型磁気センサもしく
は磁気抵抗効果型磁気ヘッドの一例の概略断面図であ
る。FIG. 3 is a schematic sectional view of an example of a magnetoresistive magnetic sensor or a magnetoresistive magnetic head according to the present invention.
【図4】本発明による磁気抵抗効果素子の特性の説明に
供する図で、Aは、磁気抵抗効果素子の概略断面図、B
は、その透磁率の感度分布図、Cは、電流密度分布図、
Dは、再生感度分布図。FIG. 4 is a diagram for explaining the characteristics of the magnetoresistive element according to the present invention, wherein A is a schematic sectional view of the magnetoresistive element, and B is
Is a sensitivity distribution diagram of the magnetic permeability, C is a current density distribution diagram,
D is a reproduction sensitivity distribution diagram.
【図5】本発明による磁気抵抗効果素子を用いた磁気ヘ
ッドの実施例の再生出力分布図である。FIG. 5 is a reproduction output distribution diagram of an embodiment of a magnetic head using a magnetoresistive element according to the present invention.
【図6】本発明による磁気抵抗効果型磁気センサもしく
は磁気抵抗効果型磁気ヘッドの一例の概略断面図であ
る。FIG. 6 is a schematic sectional view of an example of a magnetoresistive magnetic sensor or a magnetoresistive magnetic head according to the present invention.
【図7】本発明による磁気抵抗効果型磁気センサもしく
は磁気抵抗効果型磁気ヘッドの他の一例の概略断面図で
ある。FIG. 7 is a schematic sectional view of another example of a magnetoresistive magnetic sensor or a magnetoresistive magnetic head according to the present invention.
【図8】本発明による磁気抵抗効果型磁気センサもしく
は磁気抵抗効果型磁気ヘッドの他の一例の概略断面図で
ある。FIG. 8 is a schematic sectional view of another example of a magnetoresistive magnetic sensor or a magnetoresistive magnetic head according to the present invention.
【図9】本発明による磁気抵抗効果型磁気センサもしく
は磁気抵抗効果型磁気ヘッドの他の一例の概略断面図で
ある。FIG. 9 is a schematic sectional view of another example of a magnetoresistive magnetic sensor or a magnetoresistive magnetic head according to the present invention.
【図10】A〜Dは、本発明による磁気抵抗効果素子の
製造工程図である。10A to 10D are manufacturing process diagrams of the magnetoresistance effect element according to the present invention.
【図11】磁気抵抗効果素子の一般的特性の説明図であ
る。Aは、磁気抵抗効果素子の概略断面図、Bは、その
透磁率の感度分布図、Cは、電流密度分布図、Dは、再
生感度分布図。FIG. 11 is an explanatory diagram of general characteristics of a magnetoresistance effect element. A is a schematic cross-sectional view of the magnetoresistive element, B is a sensitivity distribution diagram of the magnetic permeability, C is a current density distribution diagram, and D is a reproduction sensitivity distribution diagram.
【図12】磁気抵抗効果素子の一般的特性の説明図であ
る。Aは、磁気抵抗効果素子の概略断面図、Bは、その
透磁率の感度分布図、Cは、電流密度分布図、Dは、再
生感度分布図。FIG. 12 is an explanatory diagram of general characteristics of a magnetoresistive element. A is a schematic cross-sectional view of the magnetoresistive element, B is a sensitivity distribution diagram of the magnetic permeability, C is a current density distribution diagram, and D is a reproduction sensitivity distribution diagram.
【図13】磁気抵抗効果素子の特性の一般的説明図であ
る。Aは、磁気抵抗効果素子の概略断面図、Bは、その
透磁率の感度分布図、Cは、電流密度分布図、Dは、再
生感度分布図。FIG. 13 is a general explanatory diagram of characteristics of a magnetoresistive element. A is a schematic cross-sectional view of the magnetoresistive element, B is a sensitivity distribution diagram of the magnetic permeability, C is a current density distribution diagram, and D is a reproduction sensitivity distribution diagram.
1・・・反強磁性層、1a・・・第1の反強磁性層、1
b・・・第2の反強磁性層、2・・・固定層、2a・・
・第1の固定層、2b・・・第2の固定層、3・・・非
磁性スペーサ層、3a・・・第1の非磁性スペーサ層、
3b・・・第2の非磁性スペーサ層、4・・・自由層、
10・・・磁気抵抗効果素子部(MR素子部)、11・
・・第1の電極、12・・・第2の電極、13・・・磁
気安定化膜、14・・・絶縁層、21・・・第1の磁気
シールド、22・・・第2の磁気シールド、100・・
・積層膜、100M・・・溝1 ... Antiferromagnetic layer, 1a ... First antiferromagnetic layer, 1
b ... second antiferromagnetic layer, 2 ... fixed layer, 2a ...
A first fixed layer, 2b a second fixed layer, 3 a non-magnetic spacer layer, 3a a first non-magnetic spacer layer,
3b: second nonmagnetic spacer layer, 4: free layer,
10 ... Magnetoresistance effect element part (MR element part), 11
..First electrode, 12 ... second electrode, 13 ... magnetic stabilizing film, 14 ... insulating layer, 21 ... first magnetic shield, 22 ... second magnetism Shield, 100 ...
・ Laminated film, 100M ・ ・ ・ Groove
Claims (21)
と、該磁気抵抗効果素子部を挟んでその両側に上記磁化
感知膜の端面に対接ないしは対向して配置された上記磁
気感知膜の磁区安定化膜とを有し、上記磁気抵抗効果素
子部に、面垂直通電がなされる磁気抵抗効果素子にあっ
て、 上記磁化感知膜の上記磁区安定化方向の透磁率の感度分
布の半値幅と、上記磁化感知膜における上記面垂直通電
電流密度分布の半値幅とをほぼ一致させて成ることを特
徴とする磁気抵抗効果素子。1. A magnetoresistive element having a magnetization sensing film, and a magnetoresistive element arranged on both sides of the magnetoresistive element so as to contact or face an end face of the magnetization sensing film. A magnetic domain stabilizing film, wherein the magnetoresistive effect element portion has a magnetoresistive effect element in which a surface-perpendicular current is applied to the magnetoresistive effect element portion, wherein the half width of the sensitivity distribution of the magnetic permeability of the magnetization sensing film in the magnetic domain stabilizing direction. And a half-width of the distribution of the current density perpendicular to the surface of the magnetization sensing film.
垂直通電を行う対向電極の一方の電極のコンタクト部
が、上記磁気抵抗効果素子部の両側に配置された上記磁
区安定化膜の間隔方向に関する幅を上記磁区安定化膜の
間隔より小なる幅としたことを特徴とする請求項1に記
載の磁気抵抗効果素子。2. A method according to claim 1, wherein a contact portion of one electrode of the counter electrode for conducting the surface-perpendicular current to the magnetoresistive element portion is related to an interval direction of the magnetic domain stabilizing films disposed on both sides of the magnetoresistive element portion. 2. The magnetoresistive element according to claim 1, wherein the width is smaller than the interval between the magnetic domain stabilizing films.
抵抗効果素子部が、限定的に所要の幅をもって形成さ
れ、 該磁気抵抗効果素子部を挟んでその両側に上記磁区安定
化膜が形成され、 該磁区安定化膜上から上記磁気抵抗効果素子部上に差し
渡って、上記コンタクト部を規定する開口が形成された
絶縁層が形成され、 上記開口内と上記絶縁層上に差し渡って、上記対向電極
の他方の電極が被着形成されて成ることを特徴とする請
求項2に記載の磁気抵抗効果素子。3. The magnetoresistive effect element portion is formed on one of the opposed electrodes with a limited required width, and the magnetic domain stabilizing films are formed on both sides of the magnetoresistive effect element portion. An insulating layer having an opening defining the contact portion is formed over the magnetic domain stabilizing film and over the magnetoresistive effect element portion, and is formed over the inside of the opening and over the insulating layer. 3. The magnetoresistive element according to claim 2, wherein the other electrode of said counter electrode is formed by adhesion.
ンタクト部を規定する開口を有する絶縁層が形成され、 該絶縁層の上記開口幅より大なる間隔をもって上記磁区
安定化膜が形成され、 上記開口内から上記磁区安定化膜上に差し渡って上記磁
気抵抗効果素子部と、上記対向電極の他方の電極とが形
成されて成ることを特徴とする請求項2に記載の磁気抵
抗効果素子。4. An insulating layer having an opening that defines the contact portion is formed on one of the counter electrodes, and the magnetic domain stabilizing film is formed at intervals larger than the opening width of the insulating layer. 3. The magnetoresistive effect according to claim 2, wherein the magnetoresistive effect element portion and the other electrode of the counter electrode are formed so as to extend over the magnetic domain stabilizing film from within the opening. element.
の一方の電極が配置され、 上記開口幅より大なる間隔をもって上記磁区安定化膜が
形成され、 該磁区安定化膜間から該磁区安定化膜上に差し渡って上
記磁気抵抗効果素子部と、上記対向電極の他方の電極と
が形成されて成ることを特徴とする請求項2に記載の磁
気抵抗効果素子。5. An electrode of the counter electrode is arranged in the opening of the insulating layer, the magnetic domain stabilizing films are formed at intervals larger than the opening width, and the magnetic domain stabilizing films are formed between the magnetic domain stabilizing films. The magnetoresistance effect element according to claim 2, wherein the magnetoresistance effect element portion and the other electrode of the counter electrode are formed over the stabilization film.
の一方の電極が配置され、 上記開口から上記絶縁層上に差し渡って、上記開口との
対向部より外側において肉薄とした磁気抵抗効果素子が
形成され、 該肉薄部上に上記磁区安定化膜が形成され、 該磁区安定化膜間の上記磁気抵抗効果素子上から上記磁
区安定化膜上に差し渡って上記対向電極の他方の電極が
形成されて成ることを特徴とする請求項2に記載の磁気
抵抗効果素子。6. A magnetoresistive element, wherein one of the counter electrodes is arranged in the opening of the insulating layer, and is thinned outside the portion facing the opening from the opening over the insulating layer. An effect element is formed, the magnetic domain stabilizing film is formed on the thin portion, and the other of the counter electrodes extends from the magnetoresistive effect element between the magnetic domain stabilizing films onto the magnetic domain stabilizing film. The magnetoresistive element according to claim 2, wherein an electrode is formed.
形成され、該電極を挟んで上記磁区安定化膜が相対向し
て配置され、 上記電極上と上記磁区安定化膜上に差し渡って、磁気抵
抗効果素子が形成され、 該磁気抵抗効果素子上に、該磁気抵抗効果素子下の上記
電極に対向して上記開口を有する絶縁層が形成され、 該絶縁層の上記開口内と該絶縁層上に差し渡って他方の
電極が形成されて成ることを特徴とする請求項2に記載
の磁気抵抗効果素子。7. One of the opposed electrodes is formed in a limited manner, and the magnetic domain stabilizing films are arranged opposite to each other with the electrode interposed therebetween, and are placed on the electrodes and the magnetic domain stabilizing films. A magnetoresistive effect element is formed, and an insulating layer having the opening is formed on the magnetoresistive effect element so as to face the electrode below the magnetoresistive effect element. 3. The magnetoresistive element according to claim 2, wherein the other electrode is formed over the insulating layer.
と、該磁気抵抗効果素子部を挟んでその両側に上記磁化
感知膜の端面に対接ないしは対向して配置された上記磁
気感知膜の磁区安定化膜とを有し、上記磁気抵抗効果素
子部に、面垂直通電がなされる磁気抵抗効果素子が形成
された磁気抵抗効果型磁気センサにあって、 上記磁化感知膜の上記磁区安定化方向の透磁率の感度分
布の半値幅と、上記磁化感知膜における上記面垂直通電
電流密度分布の半値幅とをほぼ一致させて成ることを特
徴とする磁気抵抗効果型磁気センサ。8. A magnetoresistive element having a magnetization sensing film, and said magnetoresistive element disposed on both sides of said magnetoresistive element so as to be in contact with or face an end face of said magnetization sensing film. A magnetic domain stabilizing film, wherein the magnetoresistive effect element is provided with a magnetoresistive effect element in which a surface-perpendicular current is applied, wherein the magnetic domain stabilization of the magnetization sensing film is performed. A half-width of a sensitivity distribution of magnetic permeability in a direction substantially equal to a half-width of a current distribution perpendicular to the surface of the magnetization sensing film.
垂直通電を行う対向電極の一方の電極のコンタクト部
が、上記磁気抵抗効果素子部の両側に配置された上記磁
区安定化膜の間隔方向に関する幅を上記磁区安定化膜の
間隔より小なる幅としたことを特徴とする請求項8に記
載の磁気抵抗効果型磁気センサ。9. A contact portion of one electrode of an opposing electrode for conducting said surface-perpendicular current to said magnetoresistive element portion is related to an interval direction of said magnetic domain stabilizing films arranged on both sides of said magnetoresistive element portion. 9. The magnetoresistive effect type magnetic sensor according to claim 8, wherein the width is smaller than the interval between the magnetic domain stabilizing films.
気抵抗効果素子部が、限定的に所要の幅をもって形成さ
れ、 該磁気抵抗効果素子部を挟んでその両側に上記磁区安定
化膜が形成され、 該磁区安定化膜上から上記磁気抵抗効果素子部上に差し
渡って、上記コンタクト部を規定する開口が形成された
絶縁層が形成され、 上記開口内と上記絶縁層上に差し渡って、上記対向電極
の他方の電極が被着形成されて成ることを特徴とする請
求項9に記載の磁気抵抗効果型磁気センサ。10. The magnetoresistive element portion is formed on one electrode of the counter electrode with a limited required width, and the magnetic domain stabilizing films are formed on both sides of the magnetoresistive effect element portion. An insulating layer having an opening defining the contact portion is formed over the magnetic domain stabilizing film and over the magnetoresistive effect element portion, and is formed over the inside of the opening and over the insulating layer. 10. The magnetoresistive effect type magnetic sensor according to claim 9, wherein the other electrode of the counter electrode is formed by being adhered.
コンタクト部を規定する開口を有する絶縁層が形成さ
れ、 該絶縁層の上記開口幅より大なる間隔をもって上記磁区
安定化膜が形成され、 上記開口内から上記磁区安定化膜上に差し渡って上記磁
気抵抗効果素子部と、上記対向電極の他方の電極とが形
成されて成ることを特徴とする請求項9に記載の磁気抵
抗効果型磁気センサ。11. An insulating layer having an opening that defines the contact portion is formed on one of the opposed electrodes, and the magnetic domain stabilizing film is formed with an interval larger than the opening width of the insulating layer. 10. The magnetoresistance effect according to claim 9, wherein the magnetoresistance effect element portion and the other electrode of the counter electrode are formed so as to extend from inside the opening onto the magnetic domain stabilizing film. Type magnetic sensor.
極の一方の電極が配置され、 上記開口幅より大なる間隔をもって上記磁区安定化膜が
形成され、 該磁区安定化膜間から該磁区安定化膜上に差し渡って上
記磁気抵抗効果素子部と、上記対向電極の他方の電極と
が形成されて成ることを特徴とする請求項9に記載の磁
気抵抗効果型磁気センサ。12. An electrode of the counter electrode is arranged in the opening of the insulating layer, the magnetic domain stabilizing films are formed at intervals larger than the opening width, and the magnetic domain stabilizing films are formed between the magnetic domain stabilizing films. The magnetoresistance effect type magnetic sensor according to claim 9, wherein the magnetoresistance effect element portion and the other electrode of the counter electrode are formed over the stabilization film.
極の一方の電極が配置され、 上記開口から上記絶縁層上に差し渡って、上記開口との
対向部より外側において肉薄とした磁気抵抗効果素子が
形成され、 該肉薄部上に上記磁区安定化膜が形成され、 該磁区安定化膜間の上記磁気抵抗効果素子上から上記磁
区安定化膜上に差し渡って上記対向電極の他方の電極が
形成されて成ることを特徴とする請求項9に記載の磁気
抵抗効果型磁気センサ。13. A magnetoresistive device, wherein one of the counter electrodes is disposed in the opening of the insulating layer, and is thinned outside the portion facing the opening from the opening over the insulating layer. An effect element is formed, the magnetic domain stabilizing film is formed on the thin portion, and the other of the counter electrodes extends from the magnetoresistive effect element between the magnetic domain stabilizing films onto the magnetic domain stabilizing film. The magnetoresistance effect type magnetic sensor according to claim 9, wherein electrodes are formed.
に形成され、該電極を挟んで上記磁区安定化膜が相対向
して配置され、 上記電極上と上記磁区安定化膜上に差し渡って、磁気抵
抗効果素子が形成され、 該磁気抵抗効果素子上に、該磁気抵抗効果素子下の上記
電極に対向して上記開口を有する絶縁層が形成され、 該絶縁層の上記開口内と該絶縁層上に差し渡って他方の
電極が形成されて成ることを特徴とする請求項9に記載
の磁気抵抗効果型磁気センサ。14. One of the counter electrodes is formed in a limited manner, and the magnetic domain stabilizing films are arranged opposite to each other with the electrode interposed therebetween. A magnetoresistive effect element is formed, and an insulating layer having the opening is formed on the magnetoresistive effect element so as to face the electrode below the magnetoresistive effect element. 10. The magnetoresistive effect type magnetic sensor according to claim 9, wherein the other electrode is formed over the insulating layer.
部と、該磁気抵抗効果素子部を挟んでその両側に上記磁
化感知膜の端面に対接ないしは対向して配置された上記
磁気感知膜の磁区安定化膜とを有し、上記磁気抵抗効果
素子部に、面垂直通電がなされる磁気抵抗効果素子を感
磁部として有する磁気抵抗効果型磁気ヘッドにあって、 上記磁化感知膜の上記磁区安定化方向の透磁率の感度分
布の半値幅と、上記磁化感知膜における上記面垂直通電
電流密度分布の半値幅とをほぼ一致させて成ることを特
徴とする磁気抵抗効果型磁気ヘッド。15. A magnetoresistive element having a magnetization sensing film, and a magnetoresistive element disposed on both sides of the magnetoresistive element so as to contact or face an end face of the magnetization sensing film. A magnetic domain stabilizing film, wherein the magnetoresistive effect element portion includes a magnetoresistive effect element having a magnetoresistive effect element in which a surface-perpendicular current is applied as a magnetosensitive portion, wherein the magnetic domain of the magnetization sensing film is A magnetoresistance effect type magnetic head characterized in that the half width of the sensitivity distribution of the magnetic permeability in the stabilizing direction and the half width of the current distribution perpendicular to the surface of the magnetization sensing film substantially coincide with each other.
面垂直通電を行う対向電極の一方の電極のコンタクト部
が、上記磁気抵抗効果素子部の両側に配置された上記磁
区安定化膜の間隔方向に関する幅を上記磁区安定化膜の
間隔より小なる幅としたことを特徴とする請求項15に
記載の磁気抵抗効果型磁気ヘッド。16. A contact part of one electrode of a counter electrode that conducts the plane-perpendicular current to the magnetoresistive element unit is related to a spacing direction of the magnetic domain stabilizing films disposed on both sides of the magnetoresistive element unit. 16. The magnetoresistive head according to claim 15, wherein the width is smaller than the interval between the magnetic domain stabilizing films.
気抵抗効果素子部が、限定的に所要の幅をもって形成さ
れ、 該磁気抵抗効果素子部を挟んでその両側に上記磁区安定
化膜が形成され、 該磁区安定化膜上から上記磁気抵抗効果素子部上に差し
渡って、上記コンタクト部を規定する開口が形成された
絶縁層が形成され、 上記開口内と上記絶縁層上に差し渡って、上記対向電極
の他方の電極が被着形成されて成ることを特徴とする請
求項16に記載の磁気抵抗効果型磁気ヘッド。17. The magnetoresistive element portion is formed on one electrode of the counter electrode with a limited required width, and the magnetic domain stabilizing films are formed on both sides of the magnetoresistive effect element portion. An insulating layer having an opening defining the contact portion is formed over the magnetic domain stabilizing film and over the magnetoresistive effect element portion, and is formed over the inside of the opening and over the insulating layer. 17. The magnetoresistive head according to claim 16, wherein the other electrode of the counter electrode is formed by being adhered.
コンタクト部を規定する開口を有する絶縁層が形成さ
れ、 該絶縁層の上記開口幅より大なる間隔をもって上記磁区
安定化膜が形成され、 上記開口内から上記磁区安定化膜上に差し渡って上記磁
気抵抗効果素子部と、上記対向電極の他方の電極とが形
成されて成ることを特徴とする請求項16に記載の磁気
抵抗効果型磁気ヘッド。18. An insulating layer having an opening that defines the contact portion is formed on one of the counter electrodes, and the magnetic domain stabilizing film is formed at intervals larger than the opening width of the insulating layer. 17. The magnetoresistance effect according to claim 16, wherein the magnetoresistance effect element portion and the other electrode of the counter electrode are formed so as to extend over the magnetic domain stabilizing film from within the opening. Type magnetic head.
極の一方の電極が配置され、 上記開口幅より大なる間隔をもって上記磁区安定化膜が
形成され、 該磁区安定化膜間から該磁区安定化膜上に差し渡って上
記磁気抵抗効果素子部と、上記対向電極の他方の電極と
が形成されて成ることを特徴とする請求項16記載の磁
気抵抗効果型磁気ヘッド。19. One of the counter electrodes is disposed in the opening of the insulating layer, the magnetic domain stabilizing films are formed at intervals larger than the width of the opening, and the magnetic domain stabilizing films are formed between the magnetic domain stabilizing films. 17. The magneto-resistance effect type magnetic head according to claim 16, wherein the magneto-resistance effect element portion and the other electrode of the counter electrode are formed over the stabilizing film.
極の一方の電極が配置され、 上記開口から上記絶縁層上に差し渡って、上記開口との
対向部より外側において肉薄とした磁気抵抗効果素子が
形成され、 該肉薄部上に上記磁区安定化膜が形成され、 該磁区安定化膜間の上記磁気抵抗効果素子上から上記磁
区安定化膜上に差し渡って上記対向電極の他方の電極が
形成されて成ることを特徴とする請求項16に記載の磁
気抵抗効果型磁気ヘッド。20. A magnetoresistive element having one electrode of the counter electrode disposed in the opening of the insulating layer and extending from the opening onto the insulating layer and being thinner outside a portion facing the opening. An effect element is formed, the magnetic domain stabilizing film is formed on the thin portion, and the other of the counter electrodes extends from the magnetoresistive effect element between the magnetic domain stabilizing films onto the magnetic domain stabilizing film. 17. The magnetoresistive head according to claim 16, wherein an electrode is formed.
に形成され、該電極を挟んで上記磁区安定化膜が相対向
して配置され、 上記電極上と上記磁区安定化膜上に差し渡って、磁気抵
抗効果素子が形成され、 該磁気抵抗効果素子上に、該磁気抵抗効果素子下の上記
電極に対向して上記開口を有する絶縁層が形成され、 該絶縁層の上記開口内と該絶縁層上に差し渡って他方の
電極が形成されて成ることを特徴とする請求項16に記
載の磁気抵抗効果型磁気ヘッド。21. One of the opposed electrodes is formed in a limited manner, and the magnetic domain stabilizing films are arranged to face each other with the electrode interposed therebetween. A magnetoresistive effect element is formed, and an insulating layer having the opening is formed on the magnetoresistive effect element so as to face the electrode below the magnetoresistive effect element. 17. The magnetoresistive head according to claim 16, wherein the other electrode is formed over the insulating layer.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111948583A (en) * | 2019-05-17 | 2020-11-17 | 爱盛科技股份有限公司 | Magnetic field sensing device |
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| CN111948583A (en) * | 2019-05-17 | 2020-11-17 | 爱盛科技股份有限公司 | Magnetic field sensing device |
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