JP2002145663A - Zirconia-based ceramic and method of producing the same - Google Patents
Zirconia-based ceramic and method of producing the sameInfo
- Publication number
- JP2002145663A JP2002145663A JP2000336565A JP2000336565A JP2002145663A JP 2002145663 A JP2002145663 A JP 2002145663A JP 2000336565 A JP2000336565 A JP 2000336565A JP 2000336565 A JP2000336565 A JP 2000336565A JP 2002145663 A JP2002145663 A JP 2002145663A
- Authority
- JP
- Japan
- Prior art keywords
- zirconia
- mol
- yttria
- powder
- particle size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 title claims abstract description 148
- 239000000919 ceramic Substances 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title abstract description 13
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 claims abstract description 45
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910001928 zirconium oxide Inorganic materials 0.000 claims abstract description 21
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000012528 membrane Substances 0.000 claims abstract description 11
- 239000007784 solid electrolyte Substances 0.000 claims abstract description 11
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 11
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000000843 powder Substances 0.000 claims description 55
- 239000002994 raw material Substances 0.000 claims description 18
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000005245 sintering Methods 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims 1
- 239000000446 fuel Substances 0.000 abstract description 9
- 239000002245 particle Substances 0.000 description 69
- 239000002002 slurry Substances 0.000 description 22
- 239000013078 crystal Substances 0.000 description 17
- 239000000203 mixture Substances 0.000 description 15
- 229910002077 partially stabilized zirconia Inorganic materials 0.000 description 14
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 11
- 239000011230 binding agent Substances 0.000 description 11
- -1 oxygen ion Chemical class 0.000 description 11
- 230000008859 change Effects 0.000 description 9
- 239000007787 solid Substances 0.000 description 9
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- 229920001577 copolymer Polymers 0.000 description 8
- 238000009826 distribution Methods 0.000 description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 7
- 239000010987 cubic zirconia Substances 0.000 description 7
- 239000002612 dispersion medium Substances 0.000 description 7
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- 230000007423 decrease Effects 0.000 description 6
- 238000010304 firing Methods 0.000 description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
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- 229910052726 zirconium Inorganic materials 0.000 description 4
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- 239000011976 maleic acid Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- JXSUUUWRUITOQZ-UHFFFAOYSA-N oxygen(2-);yttrium(3+);zirconium(4+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[Y+3].[Y+3].[Zr+4].[Zr+4] JXSUUUWRUITOQZ-UHFFFAOYSA-N 0.000 description 3
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- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 150000003863 ammonium salts Chemical class 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 2
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- 230000000694 effects Effects 0.000 description 2
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- 229910002078 fully stabilized zirconia Inorganic materials 0.000 description 2
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- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 2
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- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 2
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- 235000002906 tartaric acid Nutrition 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Conductive Materials (AREA)
- Fuel Cell (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明はジルコニア系セラミ
ックスとその製法に関し、高温強度や高温耐久性に優れ
ると共に、安定して高いイオン導電率を有し、例えば燃
料電池の固体電解質膜用などとして優れた性能を有する
ジルコニア系セラミックスとその製法に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a zirconia ceramic and a method for producing the same, which is excellent in high-temperature strength and high-temperature durability, has a stable high ionic conductivity, and is excellent, for example, for a solid electrolyte membrane of a fuel cell. The present invention relates to a zirconia ceramic having excellent performance and a method for producing the same.
【0002】[0002]
【従来の技術】2.8〜4.5モル%のイットリアで部
分安定化されたジルコニア系セラミックスは、高温安定
相である正方晶を室温で安定化させたジルコニアであ
り、6〜12モル%のイットリアを含む立方晶完全安定
化型ジルコニア系セラミックスに比べると、室温での機
械的強度やその靭性において非常に優れたものとされて
いる。2. Description of the Related Art Zirconia ceramics partially stabilized with 2.8 to 4.5 mol% of yttria are zirconia obtained by stabilizing a tetragonal crystal, which is a high-temperature stable phase, at room temperature, and 6 to 12 mol%. It is considered to be very excellent in mechanical strength at room temperature and its toughness as compared with cubic crystal fully stabilized zirconia-based ceramics containing yttria.
【0003】しかし高温でのイオン導電率は、立方晶型
ジルコニア系セラミックスより逆に正方晶型ジルコニア
系セラミックスの方が劣っており、これは、正方晶型ジ
ルコニア系セラミックスの方がバルク中の酸素空孔数が
少なく、しかもグレイン粒子同士の粒界長さが長いため
と考えられる。[0003] However, the ionic conductivity at high temperatures is inferior to cubic zirconia ceramics than to cubic zirconia ceramics, because tetragonal zirconia ceramics have a higher oxygen conductivity in the bulk. This is probably because the number of vacancies is small and the grain boundary length between the grains is long.
【0004】そこで高温で使用する場合には、イオン導
電率は立方晶型ジルコニアより低いものの、正方晶型ジ
ルコニアの優れた機械的強度や靭性などの長所を生かし
て正方晶型ジルコニアを固体電解質膜として使用するこ
とが検討されている。しかし、そのイオン導電率を経時
的に検討した例は少ない。[0004] Therefore, when used at a high temperature, the ionic conductivity is lower than that of cubic zirconia, but tetragonal zirconia is converted to a solid electrolyte membrane by taking advantage of the excellent mechanical strength and toughness of tetragonal zirconia. It is being considered for use. However, there are few examples of examining the ionic conductivity over time.
【0005】イオン導電率の安定性を調べたものとして
は、イットリアがドープされた3Y,8Y,10Yのイ
ットリア安定化ジルコニア(YSZ)の導電率経時変化
について、3,000時間まで検討した例がある(Elec
trochemical Proceedings,vol.97-18,p.135)。As an example of a study on the stability of ionic conductivity, there is an example in which the change with time in the conductivity of yttria-stabilized zirconia (YSZ) of 3Y, 8Y, and 10Y doped with yttria is studied up to 3,000 hours. Yes (Elec
trochemical Proceedings, vol. 97-18, p. 135).
【0006】この文献によると、3YSZは、初期の導
電率が約0.055S/cmであったものが、2,00
0時間後は約30%、3,000時間後は約33%低下
することが明らかにされており、その低下率は、8YS
Zの経時変化に比べると少ないもののイオン導電率の安
定性としては十分といい難い。According to this document, 3YSZ has an initial conductivity of about 0.055 S / cm,
It has been found that about 30% after 0 hour and about 33% after 3,000 hours, the reduction rate is 8YS.
Although it is less than the change with time of Z, it is difficult to say that the stability of the ionic conductivity is sufficient.
【0007】また特開平6−64969号公報には、通
電状態を継続したときの電気伝導度の経時変化を小さく
することを目的として、イットリアを2〜12モル%固
溶させ、アルミナを0.01〜2質量%含有させたジル
コニア系固体電解質膜が開示されている。しかしこれと
て8時間までの経時変化の検討であり、例えば燃料電池
用として実用化する際の耐久寿命は40,000時間以
上が求められるので、該8時間の経時変化はスタートレ
ベルの評価に止まり、実用上の耐久性を評価するには不
十分といわざるを得ない。Japanese Patent Application Laid-Open No. 6-64969 discloses that, for the purpose of reducing the change with time in the electrical conductivity when the current is continuously supplied, yttria is dissolved in a solid solution in an amount of 2 to 12 mol% and alumina is added in an amount of 0.1 to 0.2 mol%. A zirconia-based solid electrolyte membrane containing 0.1 to 2% by mass is disclosed. However, this is a study of the change with time up to 8 hours. For example, since the durability life of 40,000 hours or more when practically used for a fuel cell is required, the change with time of 8 hours is used for evaluating the start level. It must be said that it is insufficient to evaluate the practical durability.
【0008】[0008]
【発明が解決しようとする課題】本発明は上記の様な事
情に着目してなされてもので、その目的は、2.8〜
4.5モル%のイットリアを含み、安定した酸素イオン
導電率を有すると共に、高温においても優れた強度と強
度持続性を有するジルコニア系セラミックスとその製法
を提供することにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and the object thereof is to provide 2.8 to 2.8.
It is an object of the present invention to provide a zirconia ceramic containing 4.5 mol% of yttria, having stable oxygen ion conductivity, and having excellent strength and durability even at high temperatures, and a method for producing the same.
【0009】そしてより具体的には、燃料電池システム
としての耐久性で40,000時間が一つの目安とされ
ており、こうした目標に沿うべく、1,000時間当た
りの発電量の低下率で1%以下、好ましくは0.5%以
下、更に好ましくは0.1%以下を確保することが必要
となるので、酸素イオン導電率の耐久性能として、3,
000時間での低下率で15%以下を保証し得る様な、
ジルコニア系セラミックスとその製法を提供しようとす
るものである。[0009] More specifically, the durability of the fuel cell system is set as one standard of 40,000 hours. In order to meet such a target, the rate of decrease in the amount of power generated per 1,000 hours is 1 hour. % Or less, preferably 0.5% or less, more preferably 0.1% or less.
It can guarantee 15% or less in the reduction rate in 000 hours,
An object of the present invention is to provide a zirconia ceramic and a method for producing the same.
【0010】[0010]
【課題を解決するための手段】上記課題を解決すること
のできた本発明にかかるジルコニア系セラミックスと
は、2.8〜4.5モル%のイットリアを含有してな
り、JPCDS(Joint Committee on Power Diffr
action Standard)カード(17−0923)に記載さ
れた正方晶ジルコニウム酸化物のXRD回折ピークと、
JPCDSカード(13−307)に記載された単斜晶
ジルコニウム酸化物のXRD回折ピーク、およびJPC
DSカード1988年版の(30−1468)に記載さ
れたイットリウム・ジルコニウム酸化物(Y0.15Zr
0.85O1.93)のXRD回折ピークを有するジルコニア系
セラミックスからなるところに要旨を有している。The zirconia-based ceramic according to the present invention, which can solve the above-mentioned problems, contains 2.8 to 4.5 mol% of yttria and has a JPCDS (Joint Committee on Power). Diffr
XRD diffraction peak of tetragonal zirconium oxide described in action standard) card (17-0923),
XRD diffraction peak of monoclinic zirconium oxide described in JPCDS card (13-307), and JPC
Yttrium zirconium oxide (Y 0.15 Zr) described in DS card 1988 edition (30-1468)
The gist lies in that it is made of a zirconia ceramic having an XRD diffraction peak of 0.85 O 1.93 ).
【0011】該セラミックスの好ましい厚さは0.01
〜0.5mmの範囲の薄膜シート状であり、この様な薄
膜シート状のジルコニア系セラミックスは、燃料電池な
どに用いられる固体電解質膜用として極めて有効に活用
できる。The preferred thickness of the ceramic is 0.01
It is in the form of a thin film sheet having a thickness of about 0.5 mm. Such a zirconia ceramic in the form of a thin film sheet can be used very effectively for a solid electrolyte membrane used in a fuel cell or the like.
【0012】また本発明の製法は、上記XRD回折ピー
ク特性を有するジルコニア系セラミックスを工業的に効
率よく製造することのできる方法として位置付けられる
もので、その構成は、イットリアを2.7〜3.0モル
%含有するジルコニア系粉末に、酸化イットリウム粉末
を0.1〜1.8モル%を添加した粉末を原料と、これ
を成形してから焼結するところに要旨を有している。Further, the production method of the present invention is positioned as a method for industrially efficiently producing a zirconia-based ceramic having the XRD diffraction peak characteristic described above. The gist lies in the fact that a powder obtained by adding 0.1 to 1.8 mol% of a yttrium oxide powder to a zirconia-based powder containing 0 mol% is used as a raw material, which is molded and then sintered.
【0013】[0013]
【発明の実施の形態】上記の様に本発明では、2.8〜
4.5モル%のイットリアを含有し、JPCDSカード
(17−923)に記載された正方晶ジルコニウム酸化
物のXRD回折ピークと共に、JPCDSカード(13
−307)に記載された単斜晶ジルコニウム酸化物のX
RD回折ピークおよびJPCDSカード(30−146
8)に記載されたイットリウム・ジルコニウム酸化物の
XRD回折ピークを有するジルコニア系セラミックスを
対象とし、導電率の更なる安定性向上を図るべく様々の
角度から研究を進めてきた。DESCRIPTION OF THE PREFERRED EMBODIMENTS As described above, in the present invention, 2.8 to 2.8 are used.
It contains 4.5 mol% of yttria and has the XRD diffraction peak of tetragonal zirconium oxide described in JPCDS card (17-923) together with the JPCDS card (13).
X of the monoclinic zirconium oxide described in -307)
RD diffraction peak and JPCDS card (30-146)
Research has been conducted on zirconia-based ceramics having an XRD diffraction peak of yttrium / zirconium oxide described in 8) from various angles in order to further improve the stability of conductivity.
【0014】その結果、ジルコニア系セラミックスとし
て、JPCDSカード(17−923)に記載されたX
RD回折ピークを有する正方晶ジルコニウム酸化物をメ
インとし、JPCDSカード(13−307)に記載さ
れたXRD回折ピークを有する単斜晶ジルコニウム酸化
物と共に、JPCDSカード(17−923)に記載さ
れた回折ピークより面間隔で約0.2〜0.4Å大きい
回折ピークとして現れるJPCDSカード(30−14
68)に記載されたXRD回折ピークを有するイットリ
ウム・ジルコニウム酸化物が共存するものは、イオン導
電率の安定性、つまり導電率経時変化特性において非常
に優れたものであることを突き止めた。As a result, as a zirconia ceramic, X described in JPCDS card (17-923) was used.
Diffraction described on a JPCDS card (17-923), with a tetragonal zirconium oxide having an RD diffraction peak as the main, together with a monoclinic zirconium oxide having an XRD diffraction peak described on a JPCDS card (13-307). JPCDS card (30-14) which appears as a diffraction peak larger than the peak by about 0.2 to 0.4 ° in plane spacing.
It has been found that those having the yttrium / zirconium oxide having the XRD diffraction peak described in (68) coexist with them are very excellent in the stability of ionic conductivity, that is, the conductivity with time.
【0015】まず本発明では、2.8〜4.5モル%の
イットリアを含有する正方晶型の部分安定化ジルコニア
系セラミックスを対象とするが、その理由は次の通りで
ある。First, the present invention is directed to a partially stabilized zirconia-based ceramic of the tetragonal type containing 2.8 to 4.5 mol% of yttria for the following reasons.
【0016】即ち、イットリアの含有率が2.8モル%
未満のものでは、焼結体の結晶構造に単斜晶系の割合が
多くなってジルコニアの安定化が不十分となり、イオン
導電率の経時変化は少ないものの、その初期値が著しく
低くなり、しかも満足のいく高温耐久強度が得られなく
なる。That is, the content of yttria is 2.8 mol%
If less than 1, the monoclinic proportion in the crystal structure of the sintered body increases, the zirconia stabilization becomes insufficient, and although the ionic conductivity changes little with time, its initial value is significantly lower, and Satisfactory high-temperature durability cannot be obtained.
【0017】一方、イットリアの含有率が4.5モル%
を超えると、焼結体としての結晶構造に立方晶系の割合
が多くなり、イオン導電率の初期値は高くなるもののそ
の経時変化が大きくなり、しかも粒子径が大きくなると
共にその分布も広くなって、やはり十分な高温強度が得
られなくなる。On the other hand, the content of yttria is 4.5 mol%
Exceeds, the cubic proportion in the crystal structure of the sintered body increases, the initial value of the ionic conductivity increases, but the change with time increases, and the particle size increases and the distribution also increases. As a result, sufficient high-temperature strength cannot be obtained.
【0018】適量のイットリアによるイオン導電率の安
定化効果を有効に発揮させると共に、焼結体の粒子径や
その分布を極力小さくして高温強度を高める上でより好
ましいイットリアの含有率は3.0モル%以上、更に好
ましくは3.1モル%以上で、4.0モル%以下、更に
好ましくは3.8モル%以下である。In order to effectively exert the effect of stabilizing the ionic conductivity by an appropriate amount of yttria, and to minimize the particle size and distribution of the sintered body as much as possible to enhance the high-temperature strength, the more preferable yttria content is 3. It is 0 mol% or more, more preferably 3.1 mol% or more, and 4.0 mol% or less, and further preferably 3.8 mol% or less.
【0019】本発明に係るジルコニア系セラミックスの
主体は正方晶であるが、部分的に立方晶と単斜晶が混在
していることが導電率の安定性に大きく寄与しており、
立方晶および単斜晶の結晶系の存在が必要であることを
確認したのである。しかし単斜晶の割合が2%を超え、
あるいは0%であると、長時間高温に曝されたときに正
方晶から単斜晶への相変化が促進され、この結果とし
て、導電率の経時変化が大きくなると共に高温強度の耐
久性も乏しくなる。The main component of the zirconia-based ceramics according to the present invention is tetragonal, but the partial mixture of cubic and monoclinic greatly contributes to the stability of conductivity.
It was confirmed that the presence of cubic and monoclinic crystal systems was necessary. However, the proportion of monoclinic exceeds 2%,
Alternatively, if it is 0%, the phase change from tetragonal to monoclinic when exposed to high temperature for a long time is promoted, and as a result, the change with time of the conductivity becomes large and the durability at high temperature strength is poor. Become.
【0020】なお単斜晶の分率は、下記計算式(1) (M)=m(1,1,-1)÷[t(1,1,1)+c(1,1,1)]……(1) によって求められる単斜晶(1,1、-1)面のCuKαで測定
したX線回折のピーク強度m(1,1,-1)、正方晶(1,1,1)
面のピーク強度t(1,1,1)と、ジルコニアもしくはイッ
トリウム・ジルコニウム酸化物の立方晶(1,1,1)面のピ
ーク強度c(1,1,1)から,ピーク強度比を用いて簡便に
表した。The monoclinic fraction is calculated by the following equation (1) (M) = m (1,1, -1) ÷ [t (1,1,1) + c (1,1,1)] ... X-ray diffraction peak intensity m (1,1, -1) measured with CuKα on monoclinic (1,1, -1) plane determined by (1), tetragonal (1,1,1)
From the peak intensity t (1,1,1) of the plane and the peak intensity c (1,1,1) of the cubic (1,1,1) plane of zirconia or yttrium / zirconium oxide, the peak intensity ratio is used. And expressed simply.
【0021】上記計算式(1)によって算出される単斜晶
の割合(M)は、0%超、2%以下が好ましく、より好
ましくは0.05%以上、1%以下である。The proportion (M) of the monoclinic crystal calculated by the above formula (1) is preferably more than 0% and 2% or less, more preferably 0.05% or more and 1% or less.
【0022】結晶相を経時的に見た場合、単斜晶率
(M)が0%であるよりも0.05%以上含まれている
方が、単斜晶への相変化が小さくなる傾向があり、この
ことがイオン導電率の安定性と高温耐久性に好ましい結
果をもたらしているものと予想される。When the crystal phase is observed over time, the phase change to monoclinic tends to be smaller when the monoclinic fraction (M) is contained at 0.05% or more than at 0%. This is expected to have a favorable effect on the stability of ionic conductivity and high-temperature durability.
【0023】JPCDSカード(30−1468)に記
載される立方晶型イットリウム・ジルコニウム酸化物と
して同定されるXRD回折ピークは、本発明に係るジル
コニア系セラミックスの主体となる正方晶のXRD回折
ピークの近傍に位置し、また、同じ結晶系である立方晶
型ジルコニアのJPCDSカード(27−997)に記
載される回折ピークとも近傍に位置するので、その成分
比からXRD回折ピークは明確に判別し難く、多くの場
合ショルダーと認められるだけである。従って、立方晶
型イットリウム・ジルコニウム酸化物が存在しているか
否かの判別は、面間隔dが2.7〜2.4Åの領域に観
察される夫々の(002)面、(200)面の多重ピーク分離によ
って、正方晶ジルコニアの(002)面のピークと(200)面の
ピークとの間に、立方晶型イットリウム・ジルコニウム
酸化物の(200)面のピークが認められるか否かによっ
た。The XRD diffraction peak identified as the cubic yttrium / zirconium oxide described in the JPCDS card (30-1468) is in the vicinity of the tetragonal XRD diffraction peak which is the main component of the zirconia-based ceramic according to the present invention. , And also located near the diffraction peak described in the JPCDS card (27-997) of cubic zirconia of the same crystal system, so that the XRD diffraction peak is hard to be clearly distinguished from its component ratio, In most cases, it is only recognized as a shoulder. Therefore, whether or not the cubic yttrium / zirconium oxide is present is determined by determining the (002) plane and the (200) plane of the plane spacing d observed in the region of 2.7 to 2.4 °. Depending on whether or not a peak of the (200) plane of cubic yttrium / zirconium oxide is observed between the peak of the (002) plane and the peak of the (200) plane of tetragonal zirconia by multiple peak separation. Was.
【0024】立方晶型ジルコニアと同定される回折ピー
クのみがジルコニア系セラミックスに認められたとして
も、本発明で意図する様なイオン導電率の安定性は得ら
れ難く、また、立方晶型イットリウム・ジルコニウム酸
化物と同定される回折ピークが認められないときは、イ
オン導電率の安定性と高温耐久性が不十分となることか
ら、該立方晶型イットリウム・ジルコニウム酸化物の存
在がイオン導電率の安定性と高温耐久性に好ましい影響
を及ぼしているものと判断される。Even if only a diffraction peak identified as cubic zirconia is observed in the zirconia-based ceramics, it is difficult to obtain the stability of ionic conductivity as intended in the present invention. When the diffraction peak identified as zirconium oxide is not observed, the stability of the ionic conductivity and the high-temperature durability are insufficient, so the presence of the cubic yttrium / zirconium oxide indicates that the ionic conductivity is low. It is judged that this has a favorable effect on stability and high-temperature durability.
【0025】この時、JPCDSカード(30−146
8)に記載される立方晶型イットリウム・ジルコニウム
酸化物として同定されるXRD回折ピークの割合が大き
な影響を及ぼすことはなく、該立方晶の分率は特に限定
されない。At this time, the JPCDS card (30-146)
The ratio of the XRD diffraction peak identified as cubic yttrium zirconium oxide described in 8) does not have a significant effect, and the fraction of the cubic crystal is not particularly limited.
【0026】本発明においては、常温強度と高温強度を
一段と高めるため、上記適量のイットリアを含有させる
と共に、4A族、5A族、3B族、4B族元素の酸化物
から選ばれる分散強化型酸化物の少なくとも1種を0.
1〜2質量%程度含有させることも有効である。しかし
て、上記分散強化型酸化物の少なくとも1種を、イット
リアで部分安定化されたジルコニア中の(ジルコニア+
イットリア)の合計100モル%の質量に対し0.1〜
2質量%となる様に含有させると、分散強化型酸化物は
ジルコニア系セラミックスの中で粒界付近に存在し、高
温に長時間曝された時の粒子同士の焼結による粗大粒子
化が防止されると共に、正方晶から単斜晶あるいは立方
晶への結晶相転移も防止するものと考えられる。In the present invention, in order to further enhance the room-temperature strength and the high-temperature strength, an appropriate amount of the above-mentioned yttria is contained, and a dispersion-strengthened oxide selected from oxides of 4A, 5A, 3B and 4B elements is used. At least one of 0.
It is also effective to contain about 1 to 2% by mass. Thus, at least one of the above dispersion-strengthened oxides is converted into (zirconia +) in zirconia partially stabilized with yttria.
0.1 to 100% by mass of the total of yttria)
When contained in an amount of 2% by mass, the dispersion-strengthened oxide is present near the grain boundary in the zirconia-based ceramics and prevents coarsening due to sintering of the particles when exposed to a high temperature for a long time. In addition, it is considered that the crystal phase transition from tetragonal to monoclinic or cubic is prevented.
【0027】上記分散強化型酸化物の作用を有効に発揮
させる上でより好ましい分散強化型酸化物の含有率は
0.2質量%以上、更に好ましくは0.3質量%以上
で、1.5質量%以下、更に好ましくは1.0質量%以
下である。The content of the dispersion-enhanced oxide is more preferably 0.2% by mass or more, even more preferably 0.3% by mass or more, in order to effectively exert the function of the dispersion-enhanced oxide. It is at most 1.0% by mass, more preferably at most 1.0% by mass.
【0028】上記分散強化型酸化物としては、4A族、
5A族、3B族、4B族の各元素の酸化物が挙げられ、
具体的には、Ti,V,Nb,Ta,Al,Ga,I
n,Ge,Sn,Pbの酸化物が挙げられるが、これら
の中でも特に好ましいのは酸化チタン、酸化ニオブ、酸
化アルミニウムである。As the dispersion-strengthened oxide, Group 4A,
Oxides of elements of 5A group, 3B group and 4B group,
Specifically, Ti, V, Nb, Ta, Al, Ga, I
Oxides of n, Ge, Sn, and Pb may be mentioned, and among these, titanium oxide, niobium oxide and aluminum oxide are particularly preferable.
【0029】本発明に係るジルコニア系セラミックスの
好ましい粒子径(グレイン粒子径)は、平均値が0.1
〜0.4μmで且つ最大径が0.4〜0.8μmであ
り、その変動係数が30%以下であることが、導電率の
経時安定性を高める上で好ましい。The preferred particle size (grain particle size) of the zirconia-based ceramics according to the present invention has an average value of 0.1.
It is preferable that the conductivity is 0.4 to 0.8 μm, the maximum diameter is 0.4 to 0.8 μm, and the coefficient of variation is 30% or less in order to increase the stability of the conductivity with time.
【0030】ちなみに、平均粒子径が0.1μm未満で
最大径が0.4μmを下回るものは、粒子界面の増大に
より界面抵抗が大きくなって導電率が低くなる傾向があ
り、一方、平均粒子径が0.4μm超で最大径が0.8
μmを上回るものでは、粒子界面が少なくなって界面抵
抗が減少し導電率は高くなるが、強度や高温耐久性が低
下傾向を示すようになる。Incidentally, those having an average particle diameter of less than 0.1 μm and a maximum diameter of less than 0.4 μm have a tendency that the interface resistance increases due to the increase in the particle interface and the conductivity decreases, while the average particle diameter decreases. Is over 0.4μm and maximum diameter is 0.8
If the particle size exceeds μm, the particle interface decreases, the interface resistance decreases and the conductivity increases, but the strength and high-temperature durability tend to decrease.
【0031】ここで焼結体としての粒子径は、ジルコニ
ア系セラミックスの表面を走査型電子顕微鏡(10.0
00〜20,000倍)で写真撮影し、写真内視野の全
粒子径をノギスで測定した値を元に、個々のデータを集
計して全粒子の平均粒子径、最大粒子径、最小粒子径、
標準偏差および変動係数を求めた。なお、粒子径をノギ
スで測定する際に、写真視野の端縁に位置する粒子で粒
子全体が現れていないものは測定対象から外し、また縦
・横方向の寸法の異なる粒子については、長径と短径の
平均値をそのまま粒子径とした。Here, the particle size of the sintered body is determined by scanning the surface of the zirconia-based ceramic with a scanning electron microscope (10.0
(0000 to 20,000 times), and based on the value obtained by measuring the total particle diameter of the visual field in the photograph with a vernier caliper, individual data are totaled, and the average particle diameter, maximum particle diameter, and minimum particle diameter of all particles are obtained. ,
The standard deviation and coefficient of variation were determined. When measuring the particle size with a vernier caliper, particles located at the edge of the photographic visual field, where the entire particle does not appear, are excluded from the measurement target.For particles having different vertical and horizontal dimensions, the longer diameter is used. The average value of the minor axis was directly used as the particle diameter.
【0032】かくして本発明のジルコニア系セラミック
スは、イオン導電率の安定性、常温強度および高温耐久
性の全てにおいて非常に優れたものであるから、例え
ば、燃料電池用の固体電解質膜、光ファイバーのフェル
ール(コネクター)、各種プリンターのジルコニア基
板、ボールミルのメディア等として有効に活用できる。Thus, the zirconia-based ceramics of the present invention are extremely excellent in all of the stability of ionic conductivity, the strength at normal temperature and the durability at high temperature, and therefore, for example, a solid electrolyte membrane for a fuel cell and a ferrule of an optical fiber. (Connectors), zirconia substrates for various printers, media for ball mills, etc.
【0033】中でも、分散強化型酸化物として酸化チタ
ン、酸化ニオブまたは酸化アルミニウムを使用した本発
明のジルコニア系セラミックスは、導電性においても優
れたものであり、また前述の如く粒子径が微細且つ均一
で、うねりや反り等が少なく平坦度の高い薄膜シート状
物を容易に得ることができ、且つその高温強度や高温耐
久性も非常に優れたものであるから、例えば0.01〜
0.5mm程度の薄膜シート状にすることによって、燃
料電池用の固体電解質膜等として極めて優れた性能を発
揮する。Among them, the zirconia-based ceramics of the present invention using titanium oxide, niobium oxide or aluminum oxide as the dispersion-strengthened oxide has excellent conductivity, and has a fine and uniform particle diameter as described above. Thus, a thin sheet having a high degree of flatness with little undulation or warpage can be easily obtained, and its high-temperature strength and high-temperature durability are also extremely excellent.
By forming a thin film sheet having a thickness of about 0.5 mm, extremely excellent performance is exhibited as a solid electrolyte membrane for a fuel cell.
【0034】こうした優れた特性を有する本発明のジル
コニア系セラミックスの製法は特に制限されないが、次
に示す様な方法を採用すれば、上記特性を満たすセラミ
ックスを容易に得ることができる。The method for producing the zirconia-based ceramic of the present invention having such excellent characteristics is not particularly limited, but a ceramic satisfying the above characteristics can be easily obtained by employing the following method.
【0035】その製法とは、2.7〜3.0モル%のイ
ットリアを含有するジルコニア粉末に、酸化イットリウ
ム粉末を0.1〜1.8モル%添加した粉末を原料と
し、これを成形してから焼結する方法である。The manufacturing method is a method in which a powder obtained by adding 0.1 to 1.8 mol% of yttrium oxide powder to zirconia powder containing 2.7 to 3.0 mol% of yttria is used as a raw material, and the resultant is molded. And then sintering.
【0036】得られる焼結体は、(ジルコニア+イット
リア)の合計量に対し、イットリアとして2.8〜4.
5モル%を含有することになり、本発明の特徴を有効に
発揮し得るものとなる。The obtained sintered body is 2.8 to 4.0 as yttria based on the total amount of (zirconia + yttria).
The content of 5 mol% makes it possible to effectively exhibit the features of the present invention.
【0037】しかし、例えばイットリア3モル%含有ジ
ルコニア粉末とイットリア8モル%含有ジルコニア粉末
とを所定量混合し、これを成形してから焼結する方法で
は、焼結体の粒子が小さな正方晶ジルコニアと大きな立
方晶ジルコニアの混合物となり、粒子径の分布が広くな
るためか、本発明で意図するような導電率の安定性や高
温強度の耐久性を得ることができない。However, for example, in a method in which a predetermined amount of zirconia powder containing 3 mol% of yttria and zirconia powder containing 8 mol% of yttria are mixed, and then molded and sintered, tetragonal zirconia having small particles of a sintered body is used. Because of the large cubic zirconia mixture, the distribution of the particle size is widened, and the stability of conductivity and the durability of high-temperature strength as intended in the present invention cannot be obtained.
【0038】また、最終的に得られるセラミックスの粒
子径は使用する原料粉末の粒度構成によってある程度影
響を受け、粗めのものを使用すると焼結体の粒子径は相
対的に大きくなり、微細なものを使用すると粒子径は相
対的に小さくなる。Further, the particle size of the finally obtained ceramics is affected to some extent by the particle size composition of the raw material powder to be used. The use of a material makes the particle size relatively small.
【0039】そして、前記好ましい粒度構成のジルコニ
ア系セラミックスを効率よく得るには、使用するイット
リアを2.7〜3.0モル%含有するジルコニア粉末の
平均粒径が0.1〜0.5μmの範囲で、且つできるだ
け粒径の揃ったもの(粒度分布の小さなもの)、具体的
には、該粉末の90体積%以上が1μm以下であるも
の、また、酸化イットリウム粉末の平均粒径が0.5〜
2.5μmの範囲で、且つできるだけ粒径の揃ったもの
(粒度分布の小さなもの)、具体的には、該粉末の90
体積%以上が5μm以下であるものを使用することが好
ましい。In order to efficiently obtain the zirconia-based ceramics having the above preferred particle size configuration, the zirconia powder containing 2.7 to 3.0 mol% of yttria used has an average particle size of 0.1 to 0.5 μm. A powder having a uniform particle size as small as possible (with a small particle size distribution), specifically, a powder in which 90% by volume or more of the powder is 1 μm or less, and an average particle diameter of yttrium oxide powder of 0.1 μm or less. 5-
In the range of 2.5 μm and as uniform as possible in particle size (particle size distribution is small), specifically, 90 μm of the powder
It is preferable to use one having a volume percentage of 5 μm or less.
【0040】特にジルコニア粉末に関しては、イットリ
アを2.7〜3.0モル%含有する特別仕様品である必
要はなく、市販の標準品であるイットリアを3モル%含
有する粉体(3Y品)を用いることができ、これらは汎
用性や価格の点でも好ましい。In particular, the zirconia powder need not be a special product containing 2.7 to 3.0 mol% of yttria, but a powder containing 3 mol% of yttria which is a commercially available standard product (3Y product) And these are also preferable in terms of versatility and price.
【0041】但し、市販の標準3Y粉体は、イットリア
を3モル%含有しておらず、蛍光X線分析やICP分析
によるイットリウムの定量では、イットリアとして2.
8〜2.95モル%しか含まれていないものが多いの
で、3モル%に達していない分も考慮して、酸化イット
リウム粉末を所定量添加することが望ましい。However, the commercially available standard 3Y powder does not contain 3 mol% of yttria, and in the determination of yttrium by fluorescent X-ray analysis or ICP analysis, it is determined as 2.36%.
Since most of them contain only 8 to 2.95 mol%, it is desirable to add a predetermined amount of yttrium oxide powder in consideration of the fact that the amount does not reach 3 mol%.
【0042】しかし本発明者らが更に研究を重ねたとこ
ろでは、本発明で規定する上記粒子径を確保する上でよ
り重要なことは、前述した様な原料粉末自体の粒度構成
ではなく、焼結原料となるセラミックス成形体を得る際
のスラリー中に含まれる固形成分の粒度構成であり、該
粒度構成が、平均粒子径(50体積%径)で0.05μ
m以上、0.5μm以下、90体積%径で0.5μm以
上、2μm以下、限界粒子径(100体積%径)で3μ
m以下、の要件を満たすスラリーを使用すれば、前記粒
子径の要件を満たすジルコニア系セラミックスがより確
実に得られることを確認している。However, the present inventors have further studied and found that what is more important in securing the above-mentioned particle size specified in the present invention is not the particle size composition of the raw material powder itself as described above, but the firing. This is the particle size composition of the solid component contained in the slurry when the ceramic molded body as the binding raw material is obtained, and the particle size composition is 0.05 μm in average particle diameter (50% by volume diameter).
m or more, 0.5 μm or less, 0.5 μm or more at 90% by volume diameter, 2 μm or less, 3 μm at the critical particle diameter (100% by volume diameter)
It has been confirmed that the use of a slurry satisfying the requirement of not more than m can more reliably provide a zirconia ceramic satisfying the requirement of the particle size.
【0043】上記スラリー中に含まれる固形成分のより
好ましい粒度構成は、平均粒子径(50体積%径)で
0.1μm以上、0.4μm以下、90体積%径で0.
6μm以上、1.5μm以下である。A more preferred particle size composition of the solid component contained in the slurry is 0.1 μm or more and 0.4 μm or less in average particle diameter (50 volume% diameter) and 0.1 μm in 90 volume% diameter.
6 μm or more and 1.5 μm or less.
【0044】ちなみに、上記スラリーの調製に当たって
は、原料粉末を含めた前記原料配合の懸濁液をボールミ
ル等にかけて均一に混練破砕する方法が採用されるが、
該混練条件(分散剤の種類や添加量などを含む)によっ
ては、該スラリー調製過程で原料粉末の一部が2次凝集
を起こしたり、一部は更に破砕されるので、原料粉末の
粒度構成がそのままスラリー中の固形成分の粒度構成と
同じになるわけではない。よって、本発明のジルコニア
系セラミックスを製造する際には、該セラミックスの粒
子径に最も影響を及ぼす要因として、未焼成のジルコニ
ア系成形体に成形する前のスラリー中に含まれる固形成
分の粒度構成が、上記好適範囲内となる様に調整するこ
とが重要となる。For the preparation of the slurry, a method of uniformly kneading and crushing a suspension of the raw material mixture including the raw material powder using a ball mill or the like is adopted.
Depending on the kneading conditions (including the type and amount of the dispersant), a part of the raw material powder undergoes secondary agglomeration or a part of the raw material powder is further crushed during the slurry preparation process. Is not necessarily the same as the particle size configuration of the solid component in the slurry. Therefore, when producing the zirconia-based ceramics of the present invention, the most influential factor on the particle size of the ceramics is the particle size composition of the solid component contained in the slurry before being formed into an unfired zirconia-based formed body. However, it is important to adjust so as to fall within the above preferable range.
【0045】なお上記原料粉末およびスラリー中の固形
成分の粒度構成とは、下記の方法で測定した値をいう。
即ち原料粉末の粒度構成は、島津製作所製のレーザー回
折式粒度分布測定装置「SALD−1100」を使用
し、蒸留水中に分散剤として0.2質量%のメタリン酸
ナトリウムを添加した水溶液を分散媒とし、該分散媒約
100cm3中に原料粉末0.01〜0.5質量%を加
え1分間超音波処理して分散させた後の測定値であり、
またスラリー中の固形成分の粒度構成は、スラリー中の
溶媒と同じ組成の溶媒を分散媒として使用し、該分散媒
100cm3中に各スラリーを0.1〜1質量%となる
様に加え、同様に1分間超音波処理して分散させた後の
測定値である。The particle size composition of the solid components in the raw material powder and the slurry is a value measured by the following method.
That is, the particle size of the raw material powder was determined using a laser diffraction particle size distribution analyzer “SALD-1100” manufactured by Shimadzu Corporation, and an aqueous solution in which 0.2% by mass of sodium metaphosphate was added as a dispersant in distilled water was used as a dispersion medium. And the measured value after adding 0.01 to 0.5% by mass of the raw material powder in about 100 cm 3 of the dispersion medium and ultrasonically dispersing for 1 minute to disperse;
The particle size composition of the solid components in the slurry is such that a solvent having the same composition as the solvent in the slurry is used as a dispersion medium, and each slurry is added in an amount of 0.1 to 1% by mass in 100 cm 3 of the dispersion medium. Similarly, it is a measured value after being dispersed by ultrasonic treatment for 1 minute.
【0046】そして、本発明のジルコニアシートを成形
する方法としては、前述したセラミックス原料粉末とバ
インダーおよび分散媒からなるスラリーを、ドクターブ
レード法、カレンダー法、押出し法等によって支持板や
キャリヤフィルム上に敷き延べてシート状に成形し、こ
れを乾燥し分散媒を揮発させてグリーンシートを得、こ
れを切断、パンチング等により適当なサイズに揃えた
後、棚板上の多孔質セッターに載置して1300〜16
00℃程度の温度で1〜5時間程度加熱焼成する方法が
採用される。As a method of forming the zirconia sheet of the present invention, a slurry comprising the above-mentioned ceramic raw material powder, a binder and a dispersion medium is coated on a support plate or a carrier film by a doctor blade method, a calendar method, an extrusion method or the like. It is spread and formed into a sheet, dried, and the dispersion medium is volatilized to obtain a green sheet, which is cut, punched, etc., and arranged in an appropriate size, and then placed on a porous setter on a shelf board. 1300-16
A method of heating and firing at a temperature of about 00 ° C. for about 1 to 5 hours is employed.
【0047】シート状の該ジルコニア系セラミックス
は、高度の熱的、機械的、電気的、化学的特性を有して
おり、例えば燃料電池の固体電解質膜用などとして使用
されるが、特に燃料電池の固体電解質膜用として実用化
する場合は、要求強度を満たしつつ通電ロスを可及的に
抑えるため、シート厚さを0.01mm以上、より好ま
しくは0.02mm以上で、0.5mm以下、より好ま
しくは0.2mm以下とするのがよい。The sheet-shaped zirconia-based ceramic has high thermal, mechanical, electrical and chemical properties, and is used, for example, for a solid electrolyte membrane of a fuel cell. When practically used for solid electrolyte membranes, the sheet thickness should be 0.01 mm or more, more preferably 0.02 mm or more, and 0.5 mm or less, in order to minimize the conduction loss while satisfying the required strength. More preferably, it is good to be 0.2 mm or less.
【0048】ここで用いられるバインダーの種類に格別
の制限はなく、従来から知られた有機質もしくは無機質
のバインダーを適宜選択して使用することができる。有
機質バインダーとしては、例えばエチレン系共重合体、
スチレン系共重合体、アクリレート系及びメタクリレー
ト系共重合体、酢酸ビニル系共重合体、マレイン酸系共
重合体、ビニルブチラール系樹脂、ビニルアセタール系
樹脂、ビニルホルマール系樹脂、ビニルアルコール系樹
脂、ワックス類、エチルセルロース等のセルロース類等
が例示される。The type of the binder used here is not particularly limited, and a conventionally known organic or inorganic binder can be appropriately selected and used. As the organic binder, for example, an ethylene copolymer,
Styrene-based copolymer, acrylate-based and methacrylate-based copolymer, vinyl acetate-based copolymer, maleic acid-based copolymer, vinyl butyral-based resin, vinyl acetal-based resin, vinyl formal-based resin, vinyl alcohol-based resin, wax And celluloses such as ethylcellulose.
【0049】これらの中でも未焼成ジルコニア系成形体
を得る際の成形性や強度、焼成時の熱分解性等の点か
ら、メチルアクリレート、エチルアクリレート、プロピ
ルアクリレート、ブチルアクリレート、イソブチルアク
リレート、シクロヘキシルアクリレート、2−エチルヘ
キシルアクリレート等の炭素数10以下のアルキル基を
有するアルキルアクリレート類、およびメチルメタクリ
レート、エチルメタクリレート、ブチルメタクリレー
ト、イソブチルメタクリレート、オクチルメタクリレー
ト、2−エチルヘキシルメタクリレート、デシルメタク
リレート、ドデシルメタクリレート、ラウリルメタクリ
レート、シクロヘキシルメタクリレート等の炭素数20
以下のアルキル基を有するアルキルメタクリレート類、
ヒドロキシエチルアクリレート、ヒドロキシプロピルア
クリレート、ヒドロキシエチルメタクリレート、ヒドロ
キシプロピルメタクリレート等のヒドロキシアルキル基
を有するヒドロキシアルキルアクリレートまたはヒドロ
キシアルキルメタクリレート類、ジメチルアミノエチル
アクリレート、ジメチルアミノエチルメタクリレート等
のアミノアルキルアクリレートまたはアミノアルキルメ
タクリレート類、(メタ)アクリル酸、マレイン酸、モ
ノイソプロピルマレートの如きマレイン酸半エステル等
のカルボキシル基含有モノマーの少なくとも1種を重合
または共重合させることによって得られる、数平均分子
量が20,000〜200,000、より好ましくは5
0,000〜100,000の(メタ)アクリレート系
共重合体が好ましいものとして推奨される。これらの有
機質バインダーは、単独で使用し得る他、必要により2
種以上を適宜組み合わせて使用することができる。特に
好ましいのはイソブチルメタクリレートおよび/または
2−エチルヘキシルメタクリレートを60質量%以上含
むモノマーの重合体である。Among these, methyl acrylate, ethyl acrylate, propyl acrylate, butyl acrylate, isobutyl acrylate, cyclohexyl acrylate, and the like, from the viewpoints of moldability and strength when obtaining an unfired zirconia-based molded article, and thermal decomposability upon firing. Alkyl acrylates having an alkyl group having 10 or less carbon atoms such as 2-ethylhexyl acrylate, and methyl methacrylate, ethyl methacrylate, butyl methacrylate, isobutyl methacrylate, octyl methacrylate, 2-ethylhexyl methacrylate, decyl methacrylate, dodecyl methacrylate, lauryl methacrylate, cyclohexyl 20 carbon atoms such as methacrylate
Alkyl methacrylates having the following alkyl groups,
Hydroxyalkyl acrylates or hydroxyalkyl methacrylates having a hydroxyalkyl group such as hydroxyethyl acrylate, hydroxypropyl acrylate, hydroxyethyl methacrylate and hydroxypropyl methacrylate; aminoalkyl acrylates or aminoalkyl methacrylates such as dimethylaminoethyl acrylate and dimethylaminoethyl methacrylate Having a number average molecular weight of 20,000 to 200, obtained by polymerizing or copolymerizing at least one kind of a carboxyl group-containing monomer such as maleic acid half ester such as (meth) acrylic acid, maleic acid and monoisopropyl malate. 000, more preferably 5
000-100,000 (meth) acrylate copolymers are recommended as preferred. These organic binders can be used alone or, if necessary,
More than one species can be used in appropriate combination. Particularly preferred is a polymer of a monomer containing 60% by mass or more of isobutyl methacrylate and / or 2-ethylhexyl methacrylate.
【0050】また無機質バインダーとしては、ジルコニ
アゾル、シリカゾル、アルミナゾル、チタニアゾル等が
単独で若しくは2種以上を混合して使用することができ
る。As the inorganic binder, zirconia sol, silica sol, alumina sol, titania sol and the like can be used alone or in combination of two or more.
【0051】ジルコニア系原料粉末と酸化イットリウム
粉末との合計粉末に対するバインダーの使用比率は、合
計100質量部に対しバインダーは固形分換算で5〜3
0質量部、より好ましくは10〜20質量部の範囲が好
適であり、バインダーの使用量が不足する場合は、成形
体の強度や柔軟性が不十分となり、逆に多過ぎる場合は
スラリーの粘度調節が困難になるばかりでなく、焼成時
のバインダー成分の分解放出が多く且つ激しくなって均
質な焼結体が得られ難くなる。The ratio of the binder used to the total powder of the zirconia-based raw material powder and the yttrium oxide powder is such that the binder is 5 to 3 in terms of solid content based on 100 parts by mass in total.
The amount is preferably 0 parts by mass, more preferably 10 to 20 parts by mass. When the amount of the binder used is insufficient, the strength and flexibility of the molded product become insufficient, and when the amount is too large, the viscosity of the slurry is increased. Not only the adjustment becomes difficult, but also the decomposition and release of the binder component during firing are large and intense, making it difficult to obtain a homogeneous sintered body.
【0052】また未焼成ジルコニア成形体の製造に使用
される溶媒としては、水、メタノール、エタノール、2
−プロパノール、1−ブタノール、1−ヘキサノール等
のアルコール類、アセトン、2−ブタノン等のケトン
類、ペンタン、ヘキサン、ヘプタン等の脂肪族炭化水素
類、ベンゼン、トルエン、キシレン、エチルベンゼン等
の芳香族炭化水素類、酢酸メチル、酢酸エチル、酢酸ブ
チル等の酢酸エステル類等が適宜選択して使用される。
これらの溶媒も単独で使用し得る他、2種以上を適宜混
合して使用することができる。これら溶媒の使用量は、
グリーンシート成形時におけるスラリーの粘度を加味し
て適当に調節すればよいが、好ましくはスラリー粘度が
1〜10Pa・s、より好ましくは2〜5Pa・sの範
囲となる様に調整するのがよい。The solvent used for producing the green zirconia compact is water, methanol, ethanol,
-Alcohols such as propanol, 1-butanol and 1-hexanol; ketones such as acetone and 2-butanone; aliphatic hydrocarbons such as pentane, hexane and heptane; aromatic hydrocarbons such as benzene, toluene, xylene and ethylbenzene. Hydrogens, acetates such as methyl acetate, ethyl acetate, butyl acetate and the like are appropriately selected and used.
These solvents can be used alone or in combination of two or more. The amount of these solvents used is
The viscosity of the slurry at the time of forming the green sheet may be appropriately adjusted in consideration of the viscosity of the slurry, but is preferably adjusted so that the slurry viscosity is in the range of 1 to 10 Pa · s, more preferably 2 to 5 Pa · s. .
【0053】上記スラリーの調製に当たっては、ジルコ
ニア系原料粉末の解膠や分散を促進するため、ポリアク
リル酸、ポリアクリル酸アンモニウム等の高分子電解
質、クエン酸、酒石酸等の有機酸、イソブチレンまたは
スチレンと無水マレイン酸との共重合体およびそのアン
モニウム塩あるいはアミン塩、ブタジエンと無水マレイ
ン酸との共重合体およびそのアンモニウム塩等からなる
分散剤;未焼成成形体に柔軟性を付与するためのフタル
酸ジブチル、フタル酸ジオクチル等のフタル酸エステル
類、プロピレングリコール等のグリコール類やグリコー
ルエーテル類からなる可塑剤など;更には界面活性剤や
消泡剤などを必要に応じて添加することができる。In preparing the slurry, a polymer electrolyte such as polyacrylic acid and ammonium polyacrylate, an organic acid such as citric acid and tartaric acid, isobutylene or styrene are used to promote deflocculation and dispersion of the zirconia-based raw material powder. A dispersant comprising a copolymer of styrene and maleic anhydride and its ammonium salt or amine salt, a copolymer of butadiene and maleic anhydride and its ammonium salt, etc .; phthalate for imparting flexibility to the green compact Plasticizers such as phthalic acid esters such as dibutyl acid and dioctyl phthalate, glycols such as propylene glycol, and glycol ethers; and surfactants and defoamers can be added as necessary.
【0054】上記の原料配合からなるスラリーを前述の
様な方法で成形し、乾燥してジルコニア系グリーン体を
得た後、これを加熱焼成することによって本発明のジル
コニア系セラミックスを得る。The slurry composed of the above raw materials is formed by the above-described method and dried to obtain a zirconia-based green body, which is then fired to obtain the zirconia-based ceramic of the present invention.
【0055】この焼成工程では、反りやうねり等の変形
を生じることなく平坦度の高い薄肉シート状の焼結体を
得るための手段として、該グリーンシート以上の面積を
有し、JIS K7125(1987)で規定されてい
る「プラスチックフィルムおよびシートの摩擦係数試験
方法」に準拠して測定される静摩擦係数が1.5以下
で、通気性が0.0005m/s・kPa以上である多孔質シ
ートの間に、前記グリーンシートを、その周縁がはみ出
さない様に挟み込んで焼成し、あるいは上記多孔質シー
トを前記グリーンシートの周縁がはみ出さない様に載せ
てから焼成を行なうことが望ましい。In this firing step, as a means for obtaining a thin sheet-like sintered body having a high flatness without causing deformation such as warpage or undulation, it has an area larger than that of the green sheet and conforms to JIS K7125 (1987). )), A porous sheet having a static friction coefficient of 1.5 or less and a gas permeability of 0.0005 m / s · kPa or more measured in accordance with the “Test method for friction coefficient of plastic films and sheets”. It is preferable that the green sheet is sandwiched and fired so that the peripheral edge thereof does not protrude, or that the porous sheet is placed so that the peripheral edge of the green sheet does not protrude before firing.
【0056】[0056]
【実施例】以下、実施例及び比較例を挙げて本発明をよ
り具体的に説明するが、本発明はもとより下記実施例に
よって制限を受けるものではなく、前・後記の趣旨に適
合し得る範囲で適当に変更して実施することも可能であ
り、それらはいずれも本発明の技術的範囲に包含され
る。EXAMPLES Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples. However, the present invention is not limited to the following Examples, and the scope of the present invention can be adapted to the above and following points. It is also possible to carry out the present invention with appropriate modifications, all of which are included in the technical scope of the present invention.
【0057】実施例1 2.93モル%イットリア部分安定化ジルコニア粉末
(住友大阪セメント社製:商品名「OZC−3YD」)
と、イットリアとして0.57モル%になるように酸化
イットリウム粉末(三徳金属工業社製:商品名「高純度
酸化イットリウム」)とを混合し、その合計100質量
部に、イソプロピルアルコール60質量部にチタニウム
イソプロポキシドを酸化チタンとして0.3質量部とな
る様に添加した混合物を加え、ロータリーエバポレータ
ーでイソプロピルアルコールを減圧留去した後、更に減
圧乾燥してから800℃で仮焼し、酸化チタンが0.3
質量%分散した3.5モル%相当のイットリア部分安定
化ジルコニア粉末を得た。Example 1 2.93 mol% yttria partially stabilized zirconia powder (manufactured by Sumitomo Osaka Cement: trade name "OZC-3YD")
And yttrium oxide powder (trade name: “high-purity yttrium oxide” manufactured by Santoku Metal Industry Co., Ltd.) so as to be 0.57 mol% as yttria, and a total of 100 parts by mass and 60 parts by mass of isopropyl alcohol A mixture obtained by adding titanium isopropoxide to titanium oxide in an amount of 0.3 parts by mass was added, isopropyl alcohol was distilled off under reduced pressure by a rotary evaporator, and further dried under reduced pressure, and then calcined at 800 ° C. to obtain titanium oxide. Is 0.3
3.5% by weight of yttria-partially stabilized zirconia powder equivalent to 3.5% by mole dispersed in mass% was obtained.
【0058】得られた粉末100質量部を、メタクリル
酸エステル系共重合体からなるバインダー(分子量:3
0,000、ガラス転移温度:−8℃、固形分濃度:5
0質量%)14質量部、可塑剤としてジブチルフタレー
ト2質量部、分散媒としてトルエン/イソプロピルアル
コール(質量比=3/2)の混合溶剤50質量部と共
に、直径5mmのジルコニアボールが装入されたナイロ
ンポットに入れ、臨界速度の70%の約60rpmで4
0時間混練してスラリーを調製した。100 parts by mass of the obtained powder was mixed with a binder (molecular weight: 3) comprising a methacrylic acid ester copolymer.
0000, glass transition temperature: -8 ° C, solid content: 5
(0% by mass), 14 parts by mass of dibutyl phthalate as a plasticizer, 50 parts by mass of a mixed solvent of toluene / isopropyl alcohol (mass ratio = 3/2) as a dispersion medium, and zirconia balls having a diameter of 5 mm were charged. Put in a nylon pot and set to 70% of the critical speed at about 60 rpm.
The mixture was kneaded for 0 hour to prepare a slurry.
【0059】このスラリーの一部を採取し、トルエン/
イソプロピルアルコール(質量比:3/2)の混合溶剤
で希釈して島津製作所製のレーザー回折式粒度分布測定
装置「SALD−1000」を用いて、スラリー中の固
形成分の粒度分布を測定したところ、平均粒子径(50
体積%径)が0.61μm,90体積%径が1.63μ
m、限界粒子径(100体積%径)が3.2μmである
ことが確認された。A part of this slurry was sampled, and toluene /
After diluting with a mixed solvent of isopropyl alcohol (mass ratio: 3/2) and measuring the particle size distribution of solid components in the slurry using a laser diffraction particle size distribution analyzer “SALD-1000” manufactured by Shimadzu Corporation, Average particle size (50
Volume% diameter) 0.61 μm, 90 volume% diameter 1.63 μm
m and the critical particle size (diameter of 100% by volume) were confirmed to be 3.2 μm.
【0060】このスラリーを濃縮・脱泡して粘度を3P
a・s(23℃)に調整し、最後に200メッシュのフ
ィルターに通してからドクターブレード法によりポリエ
チレンテレフタレート(PET)フィルム上に塗工し、
厚さ約0.26mmのグリーンシートを得た。The slurry is concentrated and defoamed to a viscosity of 3P.
a.s (23 ° C.), finally passed through a 200-mesh filter, and then coated on a polyethylene terephthalate (PET) film by a doctor blade method.
A green sheet having a thickness of about 0.26 mm was obtained.
【0061】このグリーンシートを切断し、その上下を
ウネリ最大高さが10μmの99.5%アルミナ多孔質
板(静摩擦係数:0.97、通気性:0.003m/s
・kPa)で挟んで脱脂した後、1425℃で3時間加
熱焼成し、一辺が約100mm角の正方形で、厚さが
0.2mmの酸化チタン0.3質量%を含む3.5モル
%イットリア部分安定化ジルコニアシートを得た。This green sheet is cut, and a 99.5% alumina porous plate having a maximum swelling height of 10 μm (static friction coefficient: 0.97, air permeability: 0.003 m / s) is cut above and below the green sheet.
After defatting by sandwiching at kPa), the mixture is heated and baked at 1425 ° C. for 3 hours, and is a square having a side of about 100 mm square and a thickness of 3.5 mol% yttria containing 0.3 mass% of titanium oxide having a thickness of 0.2 mm. A partially stabilized zirconia sheet was obtained.
【0062】得られたジルコニアシート片の表面に、イ
オンスパッタリング法により150Åの膜厚でカーボン
蒸着を施し、日立製作所社製の走査型電子顕微鏡「S−
570型」で写真撮影し、15,000倍写真の視野内
全粒子の粒子径をノギスで測定し、それらの測定値を基
に、グレイン粒子の平均粒子径、最大粒子径および変動
係数を求めた。The surface of the obtained zirconia sheet piece was carbon-deposited to a film thickness of 150 ° by an ion sputtering method, and a scanning electron microscope “S-
570 type ", the particle diameter of all the particles in the visual field of the 15,000-fold photograph was measured with a vernier caliper, and the average particle diameter, maximum particle diameter and variation coefficient of the grain particles were determined based on the measured values. Was.
【0063】この時、写真視野内の端縁に位置する粒子
で粒子全体が現れていないものは測定対象から外し、ま
た、縦・横方向の寸法の異なる粒子については、長径と
短径の平均値をその粒子径とした。At this time, the particles located at the edges in the photographic visual field, in which the whole particles do not appear, are excluded from the object of measurement, and the particles having different vertical and horizontal dimensions are averaged of the major axis and minor axis. The value was taken as the particle size.
【0064】また、得られたジルコニアシートについて
8×50mm角のテストピースを作製し、室温で3点曲
げ強度をJ1S R1601に準拠して測定し、更に電
気炉中950℃で1,000時間以上保持した後の強度
を同様に室温で測定し、初期強度と所定時間後の強度の
比から、下記式により高温耐久性を求め、表1に示す結
果を得た。Also, a test piece of 8 × 50 mm square was prepared from the obtained zirconia sheet, and the three-point bending strength was measured at room temperature in accordance with J1S R1601, and was further measured at 950 ° C. for 1,000 hours or more in an electric furnace. The strength after holding was similarly measured at room temperature, and the high-temperature durability was determined from the ratio of the initial strength and the strength after a predetermined time by the following formula, and the results shown in Table 1 were obtained.
【0065】高温耐久性:(950℃で所定時間保持後
の強度)/(950℃での初期強度) 更に、同寸法のテストピースを1cm間隔ごとに4ヵ所
直径0.2mmの白金線を巻付け、白金ぺーストを塗っ
てから100℃で乾燥して固定し、電流・電圧端子とし
た直流4端子法で導電率を測定した。High-temperature durability: (strength after holding at 950 ° C. for a predetermined time) / (initial strength at 950 ° C.) Furthermore, a platinum wire having a diameter of 0.2 mm was wound around test pieces of the same dimensions at four locations at intervals of 1 cm. After applying a platinum paste, the coating was dried and fixed at 100 ° C., and the conductivity was measured by a DC four-terminal method using current and voltage terminals.
【0066】白金線が試料に密着するように白金線を巻
いたジルコニアシートの両側をアルミナの板で挟み、上
から約500gの荷重をかけた状態で、1,000℃で
空気雰囲気下に数時間保持した後、外側の2端子に0.
1mAの一定電流を流し、内側の2端子の電圧をデジタ
ルマルチメーター(アドバンテスト社製:「TR684
5型」)を用いて測定した。A zirconia sheet on which a platinum wire is wound so that the platinum wire is in close contact with the sample is sandwiched between alumina plates on both sides, and a load of about 500 g is applied from above to the zirconia sheet at 1,000 ° C. in an air atmosphere. After holding for a while, 0.
A constant current of 1 mA is passed, and the voltage of the two inner terminals is measured using a digital multimeter (trade name: TR684 manufactured by Advantest).
5 ").
【0067】更に、同時に20×50mm角のテストピ
ースを作製し、室温および950℃で更に電気炉中95
0℃で1,000時間保持した後のシートを、理学電機
社製のX線回折装置「RU−300」を使用し、CuK
α1(50kV/300mA)のX線、広角ゴニオメー
ター、湾曲結晶モノクロメーターで2θを26°〜33
°の範囲を測定し、面間隔d=3.16付近に観察され
る単斜晶ジルコニアの(1,1,-1)面、d=2.96付近に
観察される正方晶ジルコニアの(1,1,1)面、d=2.9
7付近に観察される立方晶ジルコニアの(1,1,1)面の夫
々のピーク強度から、前記(1)式により単結晶の割合
(M)を算出した。Further, a test piece of 20 × 50 mm square was prepared at the same time, and further placed in an electric furnace at room temperature and 950 ° C.
The sheet held at 0 ° C. for 1,000 hours was subjected to CuK using an X-ray diffractometer “RU-300” manufactured by Rigaku Corporation.
α1 (50kV / 300mA) X-ray, wide angle goniometer, curved crystal monochromator, 2θ from 26 ° to 33
°, the (1,1, -1) plane of monoclinic zirconia observed near d = 3.16, and the (1) plane of tetragonal zirconia observed near d = 2.96. (1,1,1) plane, d = 2.9
From the respective peak intensities of the (1,1,1) plane of cubic zirconia observed near 7, the ratio (M) of the single crystal was calculated by the above formula (1).
【0068】立方晶型イットリウム・ジルコニウム酸化
物が存在しているか否かの判別は、面間隔dが2.7〜
2.4Åの領域に観察される夫々の(002)面、(200)面の
多重ピーク分離によって、正方晶ジルコニアの(002)面
のピークと(200)面のピークとの間に、立方晶型イット
リウム・ジルコニウム酸化物の(200)面のピークが確認
できるかによった。Whether or not cubic yttrium / zirconium oxide is present is determined by determining that the plane distance d is 2.7 to
Due to the multiple peak separation of each (002) plane and (200) plane observed in the area of 2.4 °, a cubic crystal was formed between the (002) plane peak and the (200) plane peak of tetragonal zirconia. It depends on whether the peak of the (200) plane of the yttrium-zirconium oxide can be confirmed.
【0069】実施例2 2.96モル%イットリア部分安定化ジルコニア粉末
(第一稀元素社製:商品名「HSY−3.O」)と、イ
ットリアとして1.04モル%になるように酸化イット
リウム粉末(三徳金属工業社製:商品名「高純度酸化イ
ットリウム」)とを混合し、その合計100質量部に、
酸化アルミニウム粉末(大明化学工業社製:商品名「T
M−DAR」)を1.0質量部添加して混合して、酸化
アルミニウムが1.0質量%分散した4.0モル%相当
のイットリア部分安定化ジルコニア粉末を得た。Example 2 2.96 mol% yttria partially stabilized zirconia powder (trade name “HSY-3.O” manufactured by Daiichi Rare Element Co., Ltd.) and yttrium oxide so as to have a yttria content of 1.04 mol% Powder (manufactured by Santoku Metal Industry Co., Ltd .: trade name "high-purity yttrium oxide"), and a total of 100 parts by mass thereof,
Aluminum oxide powder (trade name: T
M-DAR ") was added and mixed to obtain a partially stabilized zirconia powder equivalent to 4.0 mol% of yttria in which 1.0 mass% of aluminum oxide was dispersed.
【0070】この粉末を使用し、前記実施例1と同様に
して厚さ約0.18mmのグリーンシートを得、このグ
リーンシートを用いて実施例1と同様にして、直径が約
100mmの円形で、厚さが0.15mmの酸化アルミ
ニウム1.0質量%を含む4.0モル%イットリア部分
安定化ジルコニアシートを得た。Using this powder, a green sheet having a thickness of about 0.18 mm was obtained in the same manner as in Example 1, and a circular sheet having a diameter of about 100 mm was obtained using this green sheet in the same manner as in Example 1. A 4.0 mol% yttria partially stabilized zirconia sheet containing 1.0% by mass of aluminum oxide having a thickness of 0.15 mm was obtained.
【0071】このシートを使用し、前記実施例1と同様
にしてグレイン粒子径、最大粒子径、変動係数、高温耐
久性、単斜晶率とジルコニウム・イットリウム酸化物の
存在の判別およびイオン導電率を求め、表1に示す結果
を得た。Using this sheet, the grain size, maximum particle size, coefficient of variation, high temperature durability, monoclinic crystal ratio, determination of the presence of zirconium / yttrium oxide, and ionic conductivity were performed in the same manner as in Example 1 above. Was obtained, and the results shown in Table 1 were obtained.
【0072】実施例3 2.93モル%イットリア部分安定化ジルコニア粉末
(住友大阪セメント社製:商品名「OZC−3.0Y
C」)と、イットリアとして0.27モル%になるよう
に酸化イットリウム粉末(三徳金属工業社製:商品名
「高純度酸化イットリウム」)とを混合し、3.2モル
%相当のイットリア部分安定化ジルコニア粉末を得た。Example 3 2.93 mol% yttria partially stabilized zirconia powder (manufactured by Sumitomo Osaka Cement Co., Ltd., trade name “OZC-3.0Y”)
C ") and yttrium oxide powder (manufactured by Santoku Kinzoku Kogyo Co., Ltd .: trade name" high-purity yttrium oxide ") so as to have a yttria concentration of 0.27 mol%, and 3.2 mol% of yttria partially stable Zirconia powder was obtained.
【0073】この粉末を使用し、実施例1と同様にして
厚さ約0.2mmのグリーンシートを得、このグリーン
シートを用いて実施例1と同様にして、直径が約100
mmの円形で、厚さが0.18mmの3.2モル%イッ
トリア部分安定化ジルコニアシートを得た。Using this powder, a green sheet having a thickness of about 0.2 mm was obtained in the same manner as in Example 1. Using this green sheet, a green sheet having a diameter of about 100 mm was obtained in the same manner as in Example 1.
A 3.2 mol% yttria partially stabilized zirconia sheet having a circular shape of 0.1 mm and a thickness of 0.18 mm was obtained.
【0074】このシートを用い、前記実施例1と同様に
して、グレイン粒子径、最大粒子径、変動係数、高温耐
久性、単斜晶率とジルコニウム・イットリウム酸化物の
存在の判別およびイオン導電率を求め、表1に示す結果
を得た。Using this sheet, in the same manner as in Example 1, the grain particle diameter, the maximum particle diameter, the coefficient of variation, the high-temperature durability, the monoclinic crystal ratio, the determination of the presence of zirconium / yttrium oxide, and the ionic conductivity Was obtained, and the results shown in Table 1 were obtained.
【0075】比較例1 3.16モル%イットリア部分安定化ジルコニア粉末
(住友大阪セメント社製:商品名「OZC−3.2Y
C」)を用いて、実施例1と同様にして厚さ約0.2m
mのグリーンシートを得、このグリーンシートを用い
て、実施例1と同様にして直径が約100mmの円形
で、厚さが0.17mmの3.16モル%イットリア部
分安定化ジルコニアシートを得た。Comparative Example 1 3.16 mol% yttria partially stabilized zirconia powder (manufactured by Sumitomo Osaka Cement Co., Ltd .: trade name “OZC-3.2Y”)
C)) and a thickness of about 0.2 m in the same manner as in Example 1.
m, and a 3.16 mol% yttria partially stabilized zirconia sheet having a diameter of about 100 mm and a thickness of 0.17 mm was obtained in the same manner as in Example 1 using this green sheet. .
【0076】このシートを使用し、前記実施例1と同様
にしてグレイン粒子径、最大粒子径、変動係数、高温耐
久性、単斜晶率とジルコニウム・イットリウム酸化物の
存在の判別およびイオン導電率を求め、表1に示す結果
を得た。Using this sheet, the grain size, maximum particle size, coefficient of variation, high temperature durability, monoclinic crystal ratio, determination of the presence of zirconium / yttrium oxide, and ionic conductivity were performed in the same manner as in Example 1 above. Was obtained, and the results shown in Table 1 were obtained.
【0077】比較例2 2.93モル%イットリア部分安定化ジルコニア粉末
(住友大阪セメント社製:商品名「OZC−3.0Y
C」)94.6質量部と、7.90モル%イットリア完
全安定化ジルコニア粉末(住友大阪セメント社製:商品
名「OZC−8.0YC」)5.4質量部と混合して、
3.2モル%相当のイットリア安定化ジルコニア粉末を
得た。Comparative Example 2 2.93 mol% yttria partially stabilized zirconia powder (manufactured by Sumitomo Osaka Cement Co., Ltd., trade name “OZC-3.0Y”)
C ") 94.6 parts by mass, and 5.4 parts by mass of 7.90 mol% yttria fully stabilized zirconia powder (trade name" OZC-8.0YC "manufactured by Sumitomo Osaka Cement Co., Ltd.)
Yttria-stabilized zirconia powder equivalent to 3.2 mol% was obtained.
【0078】この粉末を使用し、実施例1と同様にして
厚さ約0.2mmのグリーンシートを得、このグリーン
シートを用いて実施例1と同様にして、直径が約100
mmの円形で、厚さが0.17mmの3.2モル%イッ
トリア部分安定化ジルコニアシートを得た。Using this powder, a green sheet having a thickness of about 0.2 mm was obtained in the same manner as in Example 1, and using this green sheet, a green sheet having a diameter of about 100 mm was obtained in the same manner as in Example 1.
A 3.2 mol% yttria partially stabilized zirconia sheet having a circular shape of 0.1 mm and a thickness of 0.17 mm was obtained.
【0079】このシートを使用し、前記実施例1と同様
にしてグレイン粒子径、最大粒子径、変動係数、高温耐
久性、単斜晶率とジルコニウム・イットリウム酸化物の
存在の判別およびイオン導電率を求め、表1に示す結果
を得た。Using this sheet, in the same manner as in Example 1, the grain particle size, maximum particle size, variation coefficient, high-temperature durability, monoclinic crystal ratio, determination of the presence of zirconium / yttrium oxide, and ionic conductivity Was obtained, and the results shown in Table 1 were obtained.
【0080】[0080]
【表1】 [Table 1]
【0081】[0081]
【発明の効果】本発明は以上の様に構成されており、分
散強化型酸化物を含む正方晶部分安定化型ジルコニア系
セラミックスに欠けていた強度不足を改善し、優れた高
温強度と高温耐久性を有すると共に、安定して高レベル
のイオン導電性を有するジルコニア系セラミックスを提
供し得ることになった。The present invention is configured as described above, and improves the lack of strength lacking in tetragonal partially stabilized zirconia-based ceramics containing a dispersion-strengthened oxide, and provides excellent high-temperature strength and high-temperature durability. Thus, it has become possible to provide a zirconia-based ceramic having high ionic conductivity and having a high level of ionic conductivity.
【0082】また本発明の製法によれば、特定量のイッ
トリアを含むジルコニア系粉末に、所定量の酸化イット
リウムを配合して最終的なイットリア含量調製した原料
粉末を使用することにより、上記特性を備えたジルコニ
ア系セラミックスを製造することができる。Further, according to the production method of the present invention, the above characteristics can be obtained by using a raw material powder having a final yttria content adjusted by mixing a predetermined amount of yttrium oxide with a zirconia-based powder containing a specific amount of yttria. Zirconia-based ceramics can be manufactured.
【0083】そしてこのジルコニア系セラミックスは、
その優れた高温強度や高温耐久性、安定したイオン導電
率を活かして、例えば燃料電池用の固体電解質膜、光フ
ァイバーのフェルール(コネクター)、各種プリンター
のジルコニア基板、ボールミルのメディア等として有効
に活用できる。This zirconia ceramic is
Utilizing its excellent high-temperature strength, high-temperature durability, and stable ionic conductivity, it can be effectively used as a solid electrolyte membrane for fuel cells, ferrules (connectors) for optical fibers, zirconia substrates for various printers, media for ball mills, and the like. .
───────────────────────────────────────────────────── フロントページの続き (72)発明者 下村 雅俊 兵庫県姫路市網干区興浜字西沖992番地の 1 株式会社日本触媒内 Fターム(参考) 4G031 AA08 AA11 AA12 BA03 CA01 GA02 5G301 CA02 CA26 CA28 CE02 5H026 AA06 BB01 BB08 EE11 EE12 HH05 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Masatoshi Shimomura 992, Nishioki, Okihama-shi, Aboshi-ku, Himeji-shi, Hyogo F-term (reference) in Nippon Shokubai Co., Ltd. BB08 EE11 EE12 HH05
Claims (3)
有してなり、JPCDSカード(17−923)に記載
された正方晶ジルコニウム酸化物のXRD回折ピーク
と、JPCDSカード(13−307)に記載された単
斜晶ジルコニウム酸化物のXRD回折ピーク、およびJ
PCDSカード(30−1468)に記載されたイット
リウム・ジルコニウム酸化物のXRD回折ピークを有す
ることを特徴とするジルコニア系セラミックス。An XRD diffraction peak of tetragonal zirconium oxide described in JPCDS card (17-923) containing 2.8-4.5 mol% of yttria, and a JPCDS card (13-307). XRD diffraction peak of the monoclinic zirconium oxide described in
A zirconia-based ceramic having an XRD diffraction peak of yttrium / zirconium oxide described in PCDS Card (30-1468).
ある請求項1に記載のジルコニア系セラミックス。2. The zirconia-based ceramic according to claim 1, which is used for a solid electrolyte membrane.
するジルコニア系粉末に、酸化イットリウム粉末を0.
1〜1.8モル%を添加した粉末を原料とし、これ成形
してから焼結することにより、請求項1〜2に記載のジ
ルコニア系セラミックスを得ることを特徴とするジルコ
ニア系セラミックスの製法。3. A zirconia-based powder containing 2.7 to 3.0 mol% of yttria and 0.1% of yttrium oxide powder.
A method for producing a zirconia-based ceramic, comprising obtaining a zirconia-based ceramic according to any one of claims 1 to 2, by using a powder to which 1 to 1.8 mol% is added as a raw material, and molding and sintering the powder.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010505235A (en) * | 2006-09-27 | 2010-02-18 | コーニング インコーポレイテッド | Electrolyte sheet with regions of different composition and fuel cell device comprising the same |
| WO2020179877A1 (en) * | 2019-03-06 | 2020-09-10 | クラレノリタケデンタル株式会社 | Zirconia molded article capable of being fired quickly and calcinated body |
| CN116231051A (en) * | 2023-05-04 | 2023-06-06 | 江苏时代新能源科技有限公司 | Composite solid electrolyte and preparation method thereof, solid state battery and electrical device |
| CN116283280A (en) * | 2023-03-29 | 2023-06-23 | 合肥商德应用材料有限公司 | Zirconia-based composite ceramics and ceramic nozzles |
| CN118005425A (en) * | 2023-12-29 | 2024-05-10 | 深圳陶陶科技有限公司 | High-reflectivity alumina ceramic substrate and preparation method and application thereof |
| WO2024227343A1 (en) * | 2023-05-04 | 2024-11-07 | 宁德时代新能源科技股份有限公司 | Modified solid-state electrolyte and preparation method therefor, solid-state battery, and electric device |
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| JPH01157072A (en) * | 1988-11-05 | 1989-06-20 | Ngk Insulators Ltd | Oxygen concentration cell |
| JPH08119732A (en) * | 1994-10-28 | 1996-05-14 | Kyocera Corp | Method for producing solid electrolyte |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59107966A (en) * | 1982-12-06 | 1984-06-22 | 東芝セラミツクス株式会社 | Manufacture of zirconia ceramics |
| JPH01157072A (en) * | 1988-11-05 | 1989-06-20 | Ngk Insulators Ltd | Oxygen concentration cell |
| JPH08119732A (en) * | 1994-10-28 | 1996-05-14 | Kyocera Corp | Method for producing solid electrolyte |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010505235A (en) * | 2006-09-27 | 2010-02-18 | コーニング インコーポレイテッド | Electrolyte sheet with regions of different composition and fuel cell device comprising the same |
| WO2020179877A1 (en) * | 2019-03-06 | 2020-09-10 | クラレノリタケデンタル株式会社 | Zirconia molded article capable of being fired quickly and calcinated body |
| JPWO2020179877A1 (en) * | 2019-03-06 | 2021-12-23 | クラレノリタケデンタル株式会社 | Zirconia molded and calcined bodies that can be fired in a short time |
| JP7336507B2 (en) | 2019-03-06 | 2023-08-31 | クラレノリタケデンタル株式会社 | Zirconia molded body and calcined body that can be fired in a short time |
| US12145888B2 (en) | 2019-03-06 | 2024-11-19 | Kuraray Noritake Dental Inc. | Zirconia molded body and pre-sintered body capable of being sintered in short time |
| CN116283280A (en) * | 2023-03-29 | 2023-06-23 | 合肥商德应用材料有限公司 | Zirconia-based composite ceramics and ceramic nozzles |
| CN116231051A (en) * | 2023-05-04 | 2023-06-06 | 江苏时代新能源科技有限公司 | Composite solid electrolyte and preparation method thereof, solid state battery and electrical device |
| CN116231051B (en) * | 2023-05-04 | 2023-10-20 | 江苏时代新能源科技有限公司 | Composite solid electrolyte, preparation method thereof, solid battery and power utilization device |
| WO2024227343A1 (en) * | 2023-05-04 | 2024-11-07 | 宁德时代新能源科技股份有限公司 | Modified solid-state electrolyte and preparation method therefor, solid-state battery, and electric device |
| CN118005425A (en) * | 2023-12-29 | 2024-05-10 | 深圳陶陶科技有限公司 | High-reflectivity alumina ceramic substrate and preparation method and application thereof |
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