JP2002060877A - Ni alloy powder for conductive paste - Google Patents
Ni alloy powder for conductive pasteInfo
- Publication number
- JP2002060877A JP2002060877A JP2000246693A JP2000246693A JP2002060877A JP 2002060877 A JP2002060877 A JP 2002060877A JP 2000246693 A JP2000246693 A JP 2000246693A JP 2000246693 A JP2000246693 A JP 2000246693A JP 2002060877 A JP2002060877 A JP 2002060877A
- Authority
- JP
- Japan
- Prior art keywords
- alloy powder
- conductive paste
- mass
- temperature
- sintering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Powder Metallurgy (AREA)
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Conductive Materials (AREA)
Abstract
(57)【要約】
【課題】焼結開始温度の上昇を図り、耐酸化性向上を図
った、耐熱性に優れた導電ペースト用Ni合金粉末を提
供する。
【解決手段】導電ぺ一スト用Ni合金粉は、Ni:70
〜99.9質量%及びV,Cr,Zr,Nb,Mo,T
a,Wから成る群から選ばれた1又は2以上の元素0.
1〜30質量%から成り、平均粒径が0.1〜1μm
で、比較例(Ni単独)に比べて高性能である。
(57) [Problem] To provide a Ni alloy powder for a conductive paste excellent in heat resistance, in which the sintering start temperature is raised and oxidation resistance is improved. Kind Code: A1 A Ni alloy powder for conductive paste is Ni: 70.
9999.9% by mass and V, Cr, Zr, Nb, Mo, T
a, one or more elements selected from the group consisting of
1 to 30% by mass, average particle size of 0.1 to 1 μm
And has higher performance than the comparative example (Ni alone).
Description
【0001】[0001]
【発明の属する技術分野】本発明は、積層セラミックコ
ンデンサ内部電極形成などに用いられる、導電ペースト
用Ni合金粉末に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a Ni alloy powder for a conductive paste used for forming internal electrodes of a multilayer ceramic capacitor.
【0002】[0002]
【従来の技術】積層セラミックコンデンサは従来、セラ
ミック誘電体シート上に金属粉末ペーストを印刷又はス
プレイし、該誘電体シートを相互に電極構造をもつよう
に多数枚を積み重ね、圧着により一体化したものを焼結
し、外部引出し電極を焼きつけて製造されている。この
ような積層セラミックコンデンサは実効誘電体の厚みを
薄くすることができ、大きな容量容積比をもつことがで
き、また内部インダクタンスが小さく、高周波数帯域例
えばGHzオーダーまで使用できるなどの特性がある。2. Description of the Related Art Conventionally, a multilayer ceramic capacitor has conventionally been obtained by printing or spraying a metal powder paste on a ceramic dielectric sheet, stacking a large number of such dielectric sheets so as to have an electrode structure with each other, and integrating them by pressure bonding. Sintering and baking an external extraction electrode. Such a multilayer ceramic capacitor has characteristics such that the thickness of the effective dielectric can be reduced, a large capacitance-volume ratio can be obtained, the internal inductance is small, and it can be used in a high frequency band, for example, on the order of GHz.
【0003】このような積層セラミックコンデンサはセ
ラミック誘電体と内部電極とを同時に焼成するため、電
極材料としてはセラミックスの焼結温度より高い融点を
もつこと、及びセラミックスと反応しないことが必要で
ある。このため以前はPt,Pdなどの貴金属を使用し
ていたが高価であるという欠点があった。この欠点を解
決するため、誘電体セラミックスの焼結温度を900〜
1100℃に低下させ、電極材料にAg−Pd合金を用
いたり、Niなどの安価な金属を用いたものが実用化さ
れている。In such a multilayer ceramic capacitor, since the ceramic dielectric and the internal electrode are simultaneously fired, it is necessary that the electrode material has a melting point higher than the sintering temperature of the ceramic and does not react with the ceramic. For this reason, noble metals such as Pt and Pd have been used before, but have the disadvantage of being expensive. In order to solve this drawback, the sintering temperature of the dielectric ceramic is set to 900 to
The temperature is reduced to 1100 ° C., and an electrode material using an Ag—Pd alloy or using an inexpensive metal such as Ni has been put to practical use.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、Niは
誘電体と比較すると低融点であるため、Ni電極と誘電
体は焼結温度の差が大きい。従って、焼成工程で電極の
割れや剥離、あるいは誘電体の焼成不良等が発生しやす
いという問題がある。また、Niは雰囲気中の酸素によ
り、脱バインダ工程や焼結工程で容易に酸化される。そ
の結果、酸化物の混入によって電極が焼結不良になった
り、電気比抵抗が増加するという問題がある。従来は、
雰囲気を還元性にすることにより、Niの酸化を防止し
ているが、セラミック誘電体の性能を十分発揮させるに
は酸化性雰囲気で焼成することが好ましい。従って、電
極材料も酸化性雰囲気で焼成できるものが好ましい。However, since Ni has a lower melting point than a dielectric, the difference in sintering temperature between the Ni electrode and the dielectric is large. Therefore, there is a problem that cracks and peeling of the electrodes, defective firing of the dielectric, and the like are likely to occur in the firing step. Ni is easily oxidized by oxygen in the atmosphere in the binder removal step and the sintering step. As a result, there is a problem that the electrode becomes poor in sintering or the electric resistivity increases due to the mixing of the oxide. conventionally,
Although the oxidation of Ni is prevented by reducing the atmosphere, firing in an oxidizing atmosphere is preferable in order to sufficiently exhibit the performance of the ceramic dielectric. Therefore, it is preferable that the electrode material can be fired in an oxidizing atmosphere.
【0005】そこで、Niよりも高温で焼結を開始し、
その際に雰囲気により酸化されない粉末が望まれてい
る。本発明は上記事情に鑑みてなされたもので、Niを
主体とする合金から成る優れた導電ぺ一スト用Ni合金
粉を開発し、これを提供することを目的とする。特に焼
結開始温度の上昇を図り、耐酸化性向上を図った、耐熱
性に優れた導電ぺ一スト用Ni合金粉を提供することを
目的とする。Therefore, sintering is started at a higher temperature than Ni,
At that time, a powder that is not oxidized by the atmosphere is desired. The present invention has been made in view of the above circumstances, and it is an object of the present invention to develop and provide an excellent Ni alloy powder for conductive paste composed of an alloy mainly composed of Ni. In particular, it is an object of the present invention to provide a conductive paste Ni alloy powder having an excellent heat resistance in which the sintering start temperature is increased and the oxidation resistance is improved.
【0006】[0006]
【課題を解決するための手段】本発明は上記問題点を解
決するためになされたもので、その特徴とする技術手段
はNi:70〜99.9質量%及びV,Cr,Zr,N
b,Mo,Ta,Wから成る群がら選ばれた1又は2以
上の元素0.1〜30質量%から成り、平均粒径が0.
1〜1μmであることを特徴とする導電ぺ一スト用Ni
合金粉である。本発明はNiの焼結開始温度を高め、高
温硬さを向上させる一方、電気比抵抗をあまり増加させ
ない元素を添加する。焼結温度を高める元素として、高
融点であり、原子半径が大きく、拡散が困難な元素を選
定した。すなわち、V,Cr,Zr,Nb,Mo,T
a,Wからなる群がら選ばれた1種又は2種以上の元素
を合金元素として用いる。また合金化によって、活量低
下と不働態の形成を図り、耐熱性を向上させることがで
きる。DISCLOSURE OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and the technical means characterized by it is that Ni: 70 to 99.9% by mass and V, Cr, Zr, N
b, Mo, Ta, W, one or more elements selected from the group consisting of 0.1 to 30% by mass and an average particle size of 0.1 to 30% by mass.
Ni for conductive paste characterized by being 1 to 1 μm
Alloy powder. The present invention increases the sintering start temperature of Ni and improves the high-temperature hardness, while adding an element that does not significantly increase the electrical resistivity. As the element for increasing the sintering temperature, an element having a high melting point, a large atomic radius and difficult to diffuse was selected. That is, V, Cr, Zr, Nb, Mo, T
One or more elements selected from the group consisting of a and W are used as alloying elements. In addition, by alloying, activity reduction and formation of passive state can be achieved, and heat resistance can be improved.
【0007】これらの添加重は0.1質量%未満では耐
熱性、耐酸化性改善の効果が少なく、30質量%を越え
ると電気比抵抗の増加が著しく、従来のNiよりも著し
く高抵抗となるため、0.1〜30質量%の範囲に限定
した。好ましくはNi:90〜99.8質量%及びV,
Cr,Zr,Nb,Mo,Ta,Wから成る群がら選ば
れた1又は2以上の元素0.2〜10質量%である。ま
た平均粒度は均一な膜厚を形成する導電ぺ一ストとして
適切な粒度とし、0.1〜1μmとした。0.1μm未
満ではスクリーン印刷等が困難になるので0.1μm以
上とした。また、1μmを越えると膜厚にばらつきを生
ずるので1μm以下に限定した。[0007] When the added weight is less than 0.1% by mass, the effect of improving heat resistance and oxidation resistance is small, and when it exceeds 30% by mass, the electrical resistivity increases remarkably, and the resistance is significantly higher than that of conventional Ni. Therefore, it was limited to the range of 0.1 to 30% by mass. Preferably Ni: 90 to 99.8 mass% and V,
One or more elements selected from the group consisting of Cr, Zr, Nb, Mo, Ta, and W are 0.2 to 10% by mass. The average particle size was set to an appropriate particle size as a conductive paste for forming a uniform film thickness, and was 0.1 to 1 μm. If the thickness is less than 0.1 μm, screen printing or the like becomes difficult. Further, if the thickness exceeds 1 μm, the film thickness varies, so the thickness is limited to 1 μm or less.
【0008】Ni合金粉の形状は球形が好ましい。これ
はぺ一ストにしたときに分散性、流動性に優れるためで
ある。このような合金粉は化学気相反応によって粒度の
揃った球形状の粉を容易に製造することができる。例え
ばNiの塩化物及び合金化すべき元素の塩化物をそれぞ
れ加熱して蒸発させ、これらの蒸気を混合し水素ガスに
よって還元する。合金の組成及び粉体の粒度は、反応条
件を変化させて制御することができる。化学気相反応で
は異種金属元素が原子レベルで混合するため均一な合金
を得ることができる。The shape of the Ni alloy powder is preferably spherical. This is because the paste has excellent dispersibility and fluidity. Such an alloy powder can easily produce a spherical powder having a uniform particle size by a chemical vapor reaction. For example, a chloride of Ni and a chloride of an element to be alloyed are each heated and evaporated, and these vapors are mixed and reduced by hydrogen gas. The composition of the alloy and the particle size of the powder can be controlled by changing the reaction conditions. In a chemical vapor reaction, a heterogeneous metal element is mixed at the atomic level, so that a uniform alloy can be obtained.
【0009】導電ぺ一ストは従来の方法で製造すること
ができる。一例を示すとNi合金粉100重量部に対し
て、エチルセルロースなどのバインダ1〜5重量部、テ
レピネオールなどの溶媒5〜20重量部を混合してペー
ストを製造できる。The conductive paste can be manufactured in a conventional manner. For example, a paste can be produced by mixing 1 to 5 parts by weight of a binder such as ethyl cellulose and 5 to 20 parts by weight of a solvent such as terpineol with 100 parts by weight of a Ni alloy powder.
【0010】[0010]
【発明の実施の形態】本発明に係るNi合金粉及び比較
例の合金粉の成分、平均粒径を変化させたNi合金粉を
試作し、表1に示した。これらのNi合金粉の焼結開始
温度、電気比抵抗及び昇温時に質量増加が0.2%に達
する温度を測定し、測定結果を表2に示した。BEST MODE FOR CARRYING OUT THE INVENTION The Ni alloy powder according to the present invention and the alloy powder of the comparative example, and the Ni alloy powder in which the average particle size was changed, were experimentally produced and are shown in Table 1. The sintering start temperature of these Ni alloy powders, the electrical resistivity, and the temperature at which the mass increase reaches 0.2% when the temperature was increased were measured. Table 2 shows the measurement results.
【0011】なお、焼結開始温度は、合金粉に圧力をか
けて圧粉体を製作し、この圧粉体の温度をあげていった
ときの圧粉体の高さ(試料高さ)と温度の関係を調査
し、圧粉体の高さが減少し始めた温度を焼結開始温度と
した。質量増加率は、TG(thermogravim
etry)測定により空気気流中で測定した。[0011] The sintering start temperature is determined by the height of the green compact (sample height) when a green compact is produced by applying pressure to the alloy powder and the temperature of the green compact is increased. The relationship between the temperatures was investigated, and the temperature at which the height of the green compact began to decrease was defined as the sintering start temperature. The mass increase rate is determined by TG (thermogravim).
(entry) measurement in an air stream.
【0012】[0012]
【表1】 [Table 1]
【0013】[0013]
【表2】 [Table 2]
【0014】図1は、実施例2としてNi:99.5質
量%、Cr:0.5質量%からなる合金粉、比較例1と
してNi単独について、温度と試料高さとの関係を模式
的に示すもので、曲線11、12はそれぞれ実施例2、
比較例1を示す。実施例2では焼結開始温度が、Ni単
独の場合よりも高いことがわかる。図2は温度上昇に伴
う合金の質量変化の関係を模式的に示すグラフである。
実施例2(曲線21)では比較例1(曲線22)に比べ
て質量増加開始温度が低く、酸化しにくいことを示して
いる。FIG. 1 schematically shows the relationship between temperature and sample height for an alloy powder composed of 99.5% by mass of Ni and 0.5% by mass of Cr as Example 2 and Ni alone as Comparative Example 1. The curves 11 and 12 are shown in Example 2,
Comparative Example 1 is shown. In Example 2, it can be seen that the sintering start temperature is higher than in the case of using Ni alone. FIG. 2 is a graph schematically showing a relationship of a change in mass of the alloy with a rise in temperature.
In Example 2 (curve 21), the mass increase start temperature was lower than in Comparative Example 1 (curve 22), indicating that oxidation was difficult.
【0015】また、ドクターブレード法で製造された誘
電体シートと、本発明のNi合金粉を有機溶媒中に分散
させた導電性ぺ一ストを印刷法により成膜したものを複
数積層した後、焼成して積層セラミックコンデンサを製
造した。得られた積層セラミックコンデンサは割れ、剥
離などの欠陥がなく、従来よりも高い周波数帯域で良好
な作動特性を示した。After laminating a plurality of dielectric sheets produced by the doctor blade method and a conductive paste obtained by dispersing the Ni alloy powder of the present invention in an organic solvent by a printing method, It was fired to produce a multilayer ceramic capacitor. The obtained multilayer ceramic capacitor was free from defects such as cracking and peeling, and exhibited good operating characteristics in a higher frequency band than before.
【0016】本発明のNi合金粉は、電気比抵抗が小さ
く、焼結開始温度が高く、かつ、耐酸化性に優れるの
で、積層セラミックコンデンサ内部電極用として最適で
ある。The Ni alloy powder of the present invention has a small electric resistivity, a high sintering start temperature, and is excellent in oxidation resistance, and thus is most suitable for use as an internal electrode of a multilayer ceramic capacitor.
【0017】[0017]
【発明の効果】本発明によれば、積層セラミックコンデ
ンサ用の導電ぺ一スト用金属として高周波数帯域で良好
な作動特性を示し、電気抵抗が小さく、焼結開始温度が
高く、耐酸化性の向上した、耐熱性に優れた導電ぺ一ス
ト用Ni合金粉を提供することが可能となった。According to the present invention, as a conductive paste metal for a multilayer ceramic capacitor, it exhibits good operating characteristics in a high frequency band, a small electric resistance, a high sintering start temperature, and a high oxidation resistance. It has become possible to provide an improved Ni alloy powder for conductive paste having excellent heat resistance.
【図1】実施例2及び比較例1の焼結開始温度を模式的
に示すグラフである。FIG. 1 is a graph schematically showing sintering start temperatures of Example 2 and Comparative Example 1.
【図2】実施例2及び比較例1の質量増加率を模式的に
示すグラフである。FIG. 2 is a graph schematically showing the rate of mass increase in Example 2 and Comparative Example 1.
11,12 曲線 21,22 曲線 11,12 curve 21,22 curve
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H01G 4/30 301 H01G 4/30 301C ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) H01G 4/30 301 H01G 4/30 301C
Claims (1)
r,Zr,Nb,Mo,Ta,Wから成る群から選ばれ
た1又は2以上の元素0.1〜30質量%から成り、平
均粒径が0.1〜1μmであることを特徴とする導電ペ
ースト用Ni合金粉。1. Ni: 70 to 99.9% by mass and V, C
r, Zr, Nb, Mo, Ta, W, one or more elements selected from the group consisting of 0.1 to 30% by mass, and an average particle size of 0.1 to 1 μm. Ni alloy powder for conductive paste.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000246693A JP2002060877A (en) | 2000-08-16 | 2000-08-16 | Ni alloy powder for conductive paste |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000246693A JP2002060877A (en) | 2000-08-16 | 2000-08-16 | Ni alloy powder for conductive paste |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002060877A true JP2002060877A (en) | 2002-02-28 |
Family
ID=18736954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000246693A Pending JP2002060877A (en) | 2000-08-16 | 2000-08-16 | Ni alloy powder for conductive paste |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002060877A (en) |
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| US7744779B2 (en) | 2006-10-02 | 2010-06-29 | Shoei Chemical Inc. | Nickel-rhenium alloy powder and conductor paste containing the same |
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| KR101119809B1 (en) | 2006-10-20 | 2012-03-21 | 수미도모 메탈 인더스트리즈, 리미티드 | Nickel material for chemical plant |
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| JP2010526414A (en) * | 2007-04-25 | 2010-07-29 | フエロ コーポレーション | Formation of thick film conductor made of silver and nickel, or silver and nickel alloy, and solar cell made therefrom |
| JP2009013456A (en) * | 2007-07-03 | 2009-01-22 | Toho Titanium Co Ltd | Nickel alloy powder production method |
| JP2010059467A (en) * | 2008-09-03 | 2010-03-18 | Sumitomo Metal Mining Co Ltd | Nickel powder and method for producing the same |
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| JP2025153761A (en) * | 2024-03-29 | 2025-10-10 | Jfeミネラル株式会社 | Ni alloy powder |
| JP7777169B2 (en) | 2024-03-29 | 2025-11-27 | Jfeミネラル株式会社 | Ni alloy powder |
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