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JP2001145825A - Method for manufacturing hydrogen separating membrane - Google Patents

Method for manufacturing hydrogen separating membrane

Info

Publication number
JP2001145825A
JP2001145825A JP33262699A JP33262699A JP2001145825A JP 2001145825 A JP2001145825 A JP 2001145825A JP 33262699 A JP33262699 A JP 33262699A JP 33262699 A JP33262699 A JP 33262699A JP 2001145825 A JP2001145825 A JP 2001145825A
Authority
JP
Japan
Prior art keywords
hydrogen
separation membrane
hydrogen separation
film
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33262699A
Other languages
Japanese (ja)
Inventor
Akira Kobuchi
彰 小渕
Hitoshi Ito
仁志 伊藤
Hiroyuki Taniguchi
浩之 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kakoki Kaisha Ltd
Original Assignee
Mitsubishi Kakoki Kaisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kakoki Kaisha Ltd filed Critical Mitsubishi Kakoki Kaisha Ltd
Priority to JP33262699A priority Critical patent/JP2001145825A/en
Publication of JP2001145825A publication Critical patent/JP2001145825A/en
Pending legal-status Critical Current

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  • Hydrogen, Water And Hydrids (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a hydrogen separating membrane by which a highly permeable hydrogen separating membrane can be easily manufactured at a price as low as possible. SOLUTION: In the method for manufacturing a Pd hydrogen separating membrane by which hydrogen is permeated and separated from a hydrogen- containing gas, a thin coating film of palladium or an alloy composed mainly of palladium is formed on the surface of a shape-forming base, which is, in turned, removed to manufacture the Pd hydrogen-separating membrane.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、水素含有ガスから
水素を透過分離するPd系水素分離膜の製造方法に関す
る。
[0001] The present invention relates to a method for producing a Pd-based hydrogen separation membrane for permeating and separating hydrogen from a hydrogen-containing gas.

【0002】[0002]

【従来の技術】水素含有ガスは、天然ガス、LPG、ナ
フサ、灯油又はメタノ−ルなどを原料として、水蒸気改
質法や部分酸化法などにより製造されており、それらの
方法で製造された水素含有ガスから純水素を回収し、燃
料電池、半導体製造、金属精錬、油脂製造又は石油精製
などに使用されている。
2. Description of the Related Art Hydrogen-containing gas is produced from natural gas, LPG, naphtha, kerosene, methanol or the like as a raw material by a steam reforming method or a partial oxidation method. Pure hydrogen is recovered from the contained gas and used for fuel cells, semiconductor production, metal refining, oil and fat production, petroleum refining, and the like.

【0003】従来、前記水素含有ガスから純水素を回収
する方法としては、溶液吸収法、吸着法又は深冷分離法
などにより水素以外の不純物を分離除去して純水素を回
収する方法や水素分離膜により水素を透過分離させて純
水素を回収する膜分離法などがあり、そのなかでも、膜
分離法は、省エネルギ−、高分離効率及び簡易な装置構
成などから注目されている。
Conventionally, methods for recovering pure hydrogen from the above-mentioned hydrogen-containing gas include a method of recovering pure hydrogen by separating and removing impurities other than hydrogen by a solution absorption method, an adsorption method or a cryogenic separation method. There is a membrane separation method in which hydrogen is permeated and separated by a membrane to recover pure hydrogen. Among them, the membrane separation method has attracted attention because of its energy saving, high separation efficiency, and simple device configuration.

【0004】前記膜分離法に用いられる水素分離膜とし
ては、ポリイミドやポリスルホンなどの有機高分子膜、
多孔質セラミックス膜及びPdやPd合金などのPd系
膜を多孔質担体の表面に被着させた膜が用いられてい
る。有機高分子膜においては、耐熱性や高温時の分離効
率低下などの問題があり、また、多孔質セラミックス膜
は分離効率が低い問題がある。更に、Pd系膜を多孔質
担体の表面に被着させた膜は、強度も強く耐熱性もあ
り、極めて高純度の水素を得ることができるため好まし
い。
Examples of the hydrogen separation membrane used in the membrane separation method include organic polymer membranes such as polyimide and polysulfone;
A film is used in which a porous ceramic film and a Pd-based film such as Pd or a Pd alloy are adhered to the surface of a porous carrier. Organic polymer membranes have problems such as heat resistance and reduced separation efficiency at high temperatures, and porous ceramics membranes have low separation efficiency. Further, a film in which a Pd-based film is adhered to the surface of a porous carrier is preferable because it has high strength and heat resistance and can obtain extremely high-purity hydrogen.

【0005】前記多孔質担体により支持されたPd系膜
(以下担体被着Pd系膜という。)の製造方法として
は、Pd系膜を、多孔質担体の表面に気相化学反応法や
真空蒸着法などで被着させる方法(特開昭62−121
616号公報)、多孔質担体の表面を化学的に活性化処
理したのち化学メッキして被着させる化学メッキ法(特
開昭62−273030号公報)、金属多孔質担体の表
面に電気メッキで被着させる電気メッキ方法(特開平4
−326931号公報)、又は、多孔質担体の表面に化
学メッキ法で被着させたのちに、電気メッキ法で更に被
着させる方法(特開平5−137979号公報)などが
ある。
[0005] As a method for producing a Pd-based film supported by the porous carrier (hereinafter referred to as a carrier-coated Pd-based film), a Pd-based film is formed on the surface of the porous carrier by a gas phase chemical reaction method or vacuum deposition. Method (Japanese Patent Laid-Open No. 62-121)
No. 616), a chemical plating method in which the surface of a porous carrier is chemically activated and then applied by chemical plating (Japanese Patent Application Laid-Open No. 62-273030), and the surface of a metal porous carrier is electroplated. Electroplating method to be applied
Japanese Patent Application Laid-Open No. 5-139791), or a method in which a porous carrier is applied on the surface of a porous carrier by a chemical plating method and then further applied by an electroplating method (Japanese Patent Application Laid-Open No. Hei 5-137797).

【0006】[0006]

【発明が解決しようとする課題】前記従来の方法で製造
された担体被着Pd系膜は、いずれも、多孔質のガラ
ス、セラミックス又は金属を担体として使用しており、
Pd系膜のピンホ−ルを防止するためには、多孔質担体
の品質管理を厳しく行う必要があるため、作業が煩雑と
なると共に多孔質担体の価格が高くなる。従って、担体
被着Pd系膜の製造価格も高価格となる問題がある。ま
た、担体による水素透過性への阻害は無視できず、分離
効率の低下をきたすなどの問題がある。更に、金属担体
では、合金化処理が900℃以上の高温域で行われるた
め、担体金属の拡散を起こしてPd系膜の水素透過性が
極端に低下するため、Pd合金膜を製造することができ
ない問題もある。
The carrier-adhered Pd-based films produced by the above-mentioned conventional methods all use porous glass, ceramics or metal as a carrier.
In order to prevent pinholes in the Pd-based film, it is necessary to strictly control the quality of the porous carrier, which complicates the operation and increases the price of the porous carrier. Therefore, there is a problem that the production cost of the carrier-adhered Pd-based film is also high. Further, the inhibition of the hydrogen permeability by the carrier cannot be ignored, and there is a problem that the separation efficiency is lowered. Further, in the case of a metal carrier, since the alloying treatment is performed in a high temperature range of 900 ° C. or higher, the diffusion of the carrier metal causes the hydrogen permeability of the Pd-based film to be extremely reduced. Some problems cannot be done.

【0007】本発明は前記従来のPd系膜の製造方法に
おける問題点に鑑みて、できるだけ低価格で、高透過性
の水素分離膜を容易に製造できる水素分離膜の製造方法
を提供する目的でなされたものである。この目的を達成
するためには、多孔質担体を使用しないPd系膜が、最
も低価格、高透過性の膜であることに至り、どうすれ
ば、そのPd系膜を容易且つ確実に製造することができ
るかを鋭意研究して本願の水素分離膜の製造方法を発明
したものである。
The present invention has been made in view of the above-mentioned problems in the conventional method of manufacturing a Pd-based membrane, and has as its object to provide a method of manufacturing a hydrogen separation membrane which can easily manufacture a highly permeable hydrogen separation membrane at the lowest possible cost. It was done. In order to achieve this object, a Pd-based membrane that does not use a porous carrier has become the lowest-priced, highly permeable membrane, and how to produce the Pd-based membrane easily and reliably. The inventor of the present invention has invented a method for producing a hydrogen separation membrane by intensively studying the possibility.

【0008】[0008]

【課題を解決するための手段】本発明の要旨は、請求項
1に記載した発明においては、水素含有ガスから水素を
透過分離するPd系水素分離膜の製造方法において、形
状形成基体の表面にPd若しくはPdを主体とした合金
の薄膜を形成させたのち、形状形成基体を除去してPd
系水素分離膜を製造する水素分離膜の製造方法である。
前記の方法により、高価な担体を使用しないため低価格
であり、ピンホ−ルの発生がないため高透過性であるP
d系膜を容易且つ確実に製造することができる。
The gist of the present invention is to provide a method for manufacturing a Pd-based hydrogen separation membrane for permeating and separating hydrogen from a hydrogen-containing gas, according to the first aspect of the present invention. After forming a thin film of Pd or an alloy mainly composed of Pd, the shape-forming substrate is removed to remove Pd.
This is a method for producing a hydrogen separation membrane for producing a system hydrogen separation membrane.
According to the above-mentioned method, a low-priced P is used because no expensive carrier is used, and high permeability is obtained because no pinhole is generated.
A d-based film can be easily and reliably manufactured.

【0009】請求項2に記載した発明は、請求項1記載
の製造方法における形状形成基体が、外径1〜10mm
の熱収縮性細管であることを特徴とする水素分離膜の製
造方法である。前記の方法により、容易に形状形成基体
を除去することができるため更に低価格であり、高透過
性のPd系膜を製造することができる。
According to a second aspect of the present invention, in the manufacturing method of the first aspect, the shape-forming substrate has an outer diameter of 1 to 10 mm.
A method for producing a hydrogen separation membrane, characterized in that it is a heat-shrinkable thin tube. According to the above-described method, the shape-forming substrate can be easily removed, so that a Pd-based film with lower cost and higher permeability can be manufactured.

【0010】[0010]

【発明の実施の形態】以下に本発明の実施の形態につい
て図面に基づいて説明する。図1は本発明の一実施の形
態の製造方法で製造された水素分離膜の概略斜視図であ
り、(イ)図は円筒細管状水素分離膜、(ロ)図は表面
積を拡張した細管状水素分離膜、(ハ)図は表面積を拡
張した平膜状水素分離膜である。図2は図1(イ)図の
円筒細管状水素分離膜をモジュ−ル化した要部の概略縦
断面図である。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic perspective view of a hydrogen separation membrane produced by a production method according to an embodiment of the present invention. FIG. 1A is a cylindrical tubular hydrogen separation membrane, and FIG. The hydrogen separation membrane, (c) is a flat membrane-shaped hydrogen separation membrane having an enlarged surface area. FIG. 2 is a schematic longitudinal sectional view of a main part obtained by modularizing the cylindrical tubular hydrogen separation membrane shown in FIG.

【0011】図1において、1aは、Pd若しくはPd
を主体とした合金の薄膜で、一端が閉塞された、内径1
〜10mmの細管形状のPd系水素分離膜(以下単に水
素分離膜という)であり、1bは、細管の側面の長手方
向に多数の凹溝を平行して形成し、表面積を拡張した水
素分離膜であり、1cは、平膜を曲線で蛇腹状に形成
し、表面積を拡張した平膜状水素分離膜である。なお、
本発明の製造方法で製造される水素分離膜は、前記の形
状に限定されるものではなく、細管の側面に形成した円
弧状の凹溝を長手方向に多数平行して形成してもよく、
また、膜表面積を拡張するために、膜を適宜な凹凸形状
としてもよい。更に、管状膜をモジュール化するにあた
り、両端を開放した形状としてもよい。
In FIG. 1, 1a is Pd or Pd
A thin film of an alloy mainly composed of
A Pd-based hydrogen separation membrane (hereinafter simply referred to as a hydrogen separation membrane) in the form of a thin tube having a diameter of 10 to 10 mm; Numeral 1c denotes a flat membrane-shaped hydrogen separation membrane in which the flat membrane is formed in a bellows shape with a curve and the surface area is expanded. In addition,
The hydrogen separation membrane produced by the production method of the present invention is not limited to the above-described shape, and may have a large number of arc-shaped concave grooves formed on the side surface of the thin tube parallel to the longitudinal direction,
Further, in order to increase the surface area of the film, the film may have an appropriate uneven shape. Further, when the tubular membrane is modularized, both ends may be opened.

【0012】図2は、図1(イ)図の円筒細管状水素分
離膜をモジュ−ル化したもので、1aは一端が閉塞した
細管状水素分離膜、2は管内に挿入された金網状の支持
部材であり、水素分離膜は極めて薄く傷や破れが発生し
やすいため配置される。3は管板であり、多数の細管状
水素分離膜1aが一定間隔で挿通される挿通孔5が穿孔
されており、挿通された細管状水素分離膜1aは開放端
側の溶接部4で溶接される。なお、前記支持部材2は、
金属細線で形成された不織布やスプリングなどであって
もよい。また、細管状水素分離膜1aを管板3に係着す
る方法としては、適宜な接着剤による接着や係止部材を
介しての係着であってもよい。また、前記モジュ−ル
は、図示しないシェル内にシェルアンドチュ−ブ型に配
設される。シェル内に配設される場合には、前記の構成
以外に細管状水素分離膜1aの両端が開放され、両端側
を管板3に係着する構成も好ましい。
FIG. 2 shows a modularized tubular thin-film hydrogen separation membrane shown in FIG. 1 (a), wherein 1a is a thin-tube tubular hydrogen separation membrane whose one end is closed, and 2 is a wire mesh inserted into the tube. The hydrogen separation membrane is disposed because the hydrogen separation membrane is extremely thin and is easily damaged or broken. Reference numeral 3 denotes a tube sheet, which has perforations 5 through which a large number of tubular hydrogen separation membranes 1a are inserted at regular intervals, and the inserted tubular hydrogen separation membrane 1a is welded at a welding portion 4 on the open end side. Is done. The supporting member 2 is
It may be a nonwoven fabric or a spring formed of a thin metal wire. In addition, as a method of attaching the thin tubular hydrogen separation membrane 1a to the tube sheet 3, adhesion by an appropriate adhesive or attachment via a locking member may be used. Further, the module is disposed in a shell (not shown) in a shell and tube type. When disposed in a shell, it is also preferable to have a configuration in which both ends of the tubular hydrogen separation membrane 1a are opened and both ends are engaged with the tube sheet 3 in addition to the above configuration.

【0013】前記のモジュ−ルで水素含有ガスから水素
を分離するには、細管状水素分離膜1aの開放端側から
水素含有ガスを細管状水素分離膜1a内に導入すると、
水素のみが分離膜1aを透過するため、それを純水素と
してして回収する。なお、前記においては、細管状水素
分離膜1aの外側に水素含有ガスを流通させ、開放端側
から純水素を回収する構成でもよい。
In order to separate hydrogen from a hydrogen-containing gas by the above-mentioned module, a hydrogen-containing gas is introduced into the tubular hydrogen separation membrane 1a from the open end side of the tubular hydrogen separation membrane 1a.
Since only hydrogen permeates the separation membrane 1a, it is recovered as pure hydrogen. In the above, a configuration may be adopted in which a hydrogen-containing gas is circulated outside the tubular hydrogen separation membrane 1a and pure hydrogen is recovered from the open end side.

【0014】次に、細管状水素分離膜1aの製造方法に
ついて以下詳述する。プラスチック類などの熱収縮可能
な材料、アルミニウム、銅、真鍮などの電解などで溶出
可能な金属材料、炭素、木、紙などの焼却可能な材料、
又は低温で溶融する低融点金属などの細線や細管を形状
形成基体(以下単に基体という)として用いる。平膜状
や凹凸のある形状の膜を製造する場合には、それらの形
状にあった形状の基体を用いることはいうまでもない。
なお、前記基体としては、棒状よりも管状の方が、熱収
縮度合が大きく、また、焼却する場合でも燃焼効率がよ
いため好ましい。更に、管状の基体としては、熱収縮性
のフッ素樹脂などのプラスチック類で形成された外径1
〜10mmの細管を用いるのが好ましい。また、後記の
薄膜形成方法で膜が形成しにくい場合には、表面をサウ
ンドペ−パなどで削って粗面化することも好ましい。
Next, a method for producing the tubular hydrogen separation membrane 1a will be described in detail below. Heat-shrinkable materials such as plastics, metal materials that can be eluted by electrolysis such as aluminum, copper, and brass, incinerated materials such as carbon, wood, and paper;
Alternatively, a thin wire or a thin tube made of a low melting point metal or the like that melts at a low temperature is used as a shape forming base (hereinafter simply referred to as a base). When producing a film having a flat film shape or a shape having irregularities, it goes without saying that a substrate having a shape corresponding to those shapes is used.
It is preferable that the substrate has a tubular shape rather than a rod shape because of its higher heat shrinkage and higher combustion efficiency even when incinerated. Further, as the tubular substrate, an outer diameter 1 made of plastics such as heat-shrinkable fluororesin is used.
It is preferable to use a thin tube of 10 to 10 mm. When it is difficult to form a film by the method for forming a thin film described later, it is preferable to roughen the surface with a sound paper or the like.

【0015】基体の外表面にスパッタリング、無電解メ
ッキ、電解メッキ、CVD及びイオンプレ−ティングな
どの方法又はそれらの組合せ方法により、Pd若しくは
Pdを主体とした合金の薄膜を形成する。なお、Pdを
主体とした合金の薄膜を形成するには、Pd膜を形成し
たその上に、Pd膜及びCu、Ag、Auなどの1B
族、Co、Ni、Ru、Rh、Ir、Ptなどの8族又
はY、Ce、Gdなどの3A族の金属のうち、少なくと
も1種の金属膜を交互に形成させる。
A thin film of Pd or an alloy mainly composed of Pd is formed on the outer surface of the substrate by a method such as sputtering, electroless plating, electrolytic plating, CVD and ion plating, or a combination thereof. In order to form a thin film of an alloy mainly composed of Pd, a Pd film is formed thereon, and a Pd film and a 1B film of Cu, Ag, Au or the like are formed thereon.
At least one metal film is alternately formed among Group 8 metals such as Group, Co, Ni, Ru, Rh, Ir, and Pt or Group 3A metals such as Y, Ce, and Gd.

【0016】基体の外表面にPd膜などの薄膜を形成し
たのちに、基体を除去するが、その方法としては、熱収
縮性基体の場合には、適宜に加熱して基体を収縮させて
抜き取ることが可能であり、木製などの収縮しない基体
では、燃焼させて除去し、また、アルミニウム、銅など
の金属では、酸や電解により溶出させて除去し、更に、
低融点金属基体では、融点温度以上に加熱し、溶かして
除去することが可能である。
After a thin film such as a Pd film is formed on the outer surface of the base, the base is removed. In the case of a heat-shrinkable base, the base is contracted by appropriately heating to remove the base. It is possible to burn and remove in a non-shrinking substrate such as wood, and to remove in a metal such as aluminum and copper by eluting with an acid or electrolysis.
The low-melting-point metal substrate can be heated to a temperature equal to or higher than the melting point, melted and removed.

【0017】Pdを主体とした合金の薄膜を製造するに
は、前記金属膜を積層した基体を前記の方法で除去した
のち、真空又は還元性ガス雰囲気で900℃以上に加熱
し、熱処理することにより金属拡散で合金化することが
できる。前記の方法で製造された水素分離膜の膜厚は、
20〜100μmが好ましく、20μm未満では基体の
除去が難しく、強度も弱すぎる。また、100μm以上
では水素透過速度が遅くなりすぎるため好ましくない。
なお、製造された水素分離膜はモジュ−ル化して、水素
含有ガスからの水素の分離回収装置又はメンブレンリア
クタなどに用いられる。
In order to manufacture a thin film of an alloy mainly composed of Pd, the substrate on which the metal film is laminated is removed by the above-mentioned method, and then heated to 900 ° C. or more in a vacuum or a reducing gas atmosphere and heat-treated. Can be alloyed by metal diffusion. The thickness of the hydrogen separation membrane produced by the above method,
It is preferably from 20 to 100 μm, and if it is less than 20 μm, it is difficult to remove the substrate, and the strength is too weak. On the other hand, when the thickness is 100 μm or more, the hydrogen permeation rate becomes too slow, which is not preferable.
The manufactured hydrogen separation membrane is modularized and used in a device for separating and recovering hydrogen from a hydrogen-containing gas or a membrane reactor.

【0018】[0018]

【実施例】外径3mmのフッ素樹脂チュ−ブを基体と
し、その表面をサウンドペ−パで粗面化した後、塩化第
一スズ塩酸水溶液(1g/L)と塩化パラジウム塩酸水
溶液(0.1g/L)に交互に浸漬して触媒付与したの
ち、テトラアンミンパラジウムジクロライドを5.4g
/L含有したpH11のアンモニア溶液を用い、ヒドラ
ジンによって還元する無電解メッキ法で基体の表面に3
μmのPd膜を形成した。前記形成されたPd膜を陰極
とし、中性のパラジウムメッキ浴(Pdとして25g/
L含有)及びシアン化銀水溶液(Agとして24g/L
含有)で交互に電気メッキを行い、Pd膜及びAg膜を
交互に形成した。膜形成後の膜厚は40μmであり、そ
の内Agは23重量%であった。基体外表面に膜を形成
した後、150℃の温度で基体のフッ素樹脂チュ−ブを
収縮させて抜き取った。基体が除去された膜を窒素ガス
雰囲気下、900℃以上の温度で、10時間熱処理して
合金化し、Pd−Ag水素分離膜を製造した。前記で製
造された水素分離膜は、全くピンフォ−ルがなく、形状
及び厚さも安定していた。
EXAMPLE A fluororesin tube having an outer diameter of 3 mm was used as a substrate, and the surface thereof was roughened with a sound paper. Then, an aqueous solution of stannous chloride (1 g / L) and an aqueous solution of palladium chloride (0.1 g) were used. / L) alternately to give a catalyst, and then 5.4 g of tetraamminepalladium dichloride.
/ L containing ammonia solution at pH 11 and electroless plating reduced by hydrazine on the surface of the substrate.
A Pd film of μm was formed. Using the formed Pd film as a cathode, a neutral palladium plating bath (25 g / Pd
L) and an aqueous solution of silver cyanide (24 g / L as Ag)
), And Pd films and Ag films were formed alternately. The film thickness after film formation was 40 μm, of which Ag was 23% by weight. After forming a film on the outer surface of the substrate, the fluororesin tube of the substrate was shrunk at a temperature of 150 ° C. and extracted. The film from which the substrate was removed was heat-treated under a nitrogen gas atmosphere at a temperature of 900 ° C. or more for 10 hours to be alloyed to produce a Pd—Ag hydrogen separation membrane. The prepared hydrogen separation membrane had no pinhole and was stable in shape and thickness.

【0019】[0019]

【発明の効果】担体を用いずに薄膜の水素分離膜を製造
できるため、低価格であり、ピンフォ−ルの発生もな
く、高透過性の水素分離膜を容易に製造できる。また、
各種形状の水素分離膜を容易に製造することができる。
As described above, a thin-film hydrogen separation membrane can be produced without using a carrier, so that a low-cost, no pinhole is generated, and a highly permeable hydrogen separation membrane can be easily produced. Also,
Hydrogen separation membranes of various shapes can be easily manufactured.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施の形態の製造方法で製造された
水素分離膜の概略斜視図
FIG. 1 is a schematic perspective view of a hydrogen separation membrane manufactured by a manufacturing method according to an embodiment of the present invention.

【図2】図2は図1(イ)図の円筒細管状水素分離膜を
モジュ−ル化した要部の概略縦断面図
FIG. 2 is a schematic vertical sectional view of a main part obtained by modularizing the cylindrical thin tubular hydrogen separation membrane of FIG. 1 (a).

【符号の説明】 1a:円筒細管状水素分離膜 1b:拡張した細管状水素分離膜 1c:拡張した平膜状水素分離膜 2:支持部材 3:管板 4:溶接部 5:挿通孔[Description of Signs] 1a: Cylindrical tubular hydrogen separation membrane 1b: Expanded tubular hydrogen separation membrane 1c: Expanded flat membrane hydrogen separation membrane 2: Support member 3: Tube sheet 4: Welded part 5: Insertion hole

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4D006 GA41 HA21 HA41 JA02A MA02 MA03 MC02X NA31 NA50 NA62 PB66 4G040 FA02 FB09 FC01 FE01  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 4D006 GA41 HA21 HA41 JA02A MA02 MA03 MC02X NA31 NA50 NA62 PB66 4G040 FA02 FB09 FC01 FE01

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】水素含有ガスから水素を透過分離するPd
系水素分離膜の製造方法において、形状形成基体の表面
にPd若しくはPdを主体とした合金の薄膜を形成させ
たのち、形状形成基体を除去してPd系水素分離膜を製
造する水素分離膜の製造方法。
1. Pd for permeating and separating hydrogen from a hydrogen-containing gas
In the method for producing a hydrogen separation membrane, a thin film of Pd or an alloy mainly composed of Pd is formed on the surface of the shape-forming substrate, and then the shape-forming substrate is removed to produce a Pd-based hydrogen separation membrane. Production method.
【請求項2】形状形成基体が、外径1〜10mmの熱収
縮性細管であることを特徴とする請求項1記載の水素分
離膜の製造方法。
2. The method for producing a hydrogen separation membrane according to claim 1, wherein the shape-forming substrate is a heat-shrinkable thin tube having an outer diameter of 1 to 10 mm.
JP33262699A 1999-11-24 1999-11-24 Method for manufacturing hydrogen separating membrane Pending JP2001145825A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33262699A JP2001145825A (en) 1999-11-24 1999-11-24 Method for manufacturing hydrogen separating membrane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33262699A JP2001145825A (en) 1999-11-24 1999-11-24 Method for manufacturing hydrogen separating membrane

Publications (1)

Publication Number Publication Date
JP2001145825A true JP2001145825A (en) 2001-05-29

Family

ID=18257067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33262699A Pending JP2001145825A (en) 1999-11-24 1999-11-24 Method for manufacturing hydrogen separating membrane

Country Status (1)

Country Link
JP (1) JP2001145825A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003099711A1 (en) * 2002-05-27 2003-12-04 Sony Corporation Fuel reformer and method of manufacturing the fuel reformer, electrode for electrochemical device, and electrochemical device
JP2008161805A (en) * 2006-12-28 2008-07-17 National Institute Of Advanced Industrial & Technology Metal separation tube for hydrogen separation and method for producing the same
WO2009102009A1 (en) * 2008-02-15 2009-08-20 National Institute Of Advanced Industrial Science And Technology Filmy self-supporting thin metal film for hydrogen separation and process for producing the same
JP2011062699A (en) * 2004-09-15 2011-03-31 Korea Inst Of Energy Research Method for manufacturing palladium alloy composite membrane for hydrogen gas separation

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003099711A1 (en) * 2002-05-27 2003-12-04 Sony Corporation Fuel reformer and method of manufacturing the fuel reformer, electrode for electrochemical device, and electrochemical device
US7942944B2 (en) 2002-05-27 2011-05-17 Sony Corporation Fuel reformer and method for producing the same, electrode for use in electrochemical device, and electrochemical device
US8882864B2 (en) 2002-05-27 2014-11-11 Sony Corporation Fuel reformer including a two layer integrated article
JP2011062699A (en) * 2004-09-15 2011-03-31 Korea Inst Of Energy Research Method for manufacturing palladium alloy composite membrane for hydrogen gas separation
JP2008161805A (en) * 2006-12-28 2008-07-17 National Institute Of Advanced Industrial & Technology Metal separation tube for hydrogen separation and method for producing the same
WO2009102009A1 (en) * 2008-02-15 2009-08-20 National Institute Of Advanced Industrial Science And Technology Filmy self-supporting thin metal film for hydrogen separation and process for producing the same
JP5464422B2 (en) * 2008-02-15 2014-04-09 独立行政法人産業技術総合研究所 Film-like free-standing metal thin film for hydrogen separation and method for producing the same

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