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JP2001098053A - Thermosetting resin composition and epoxy resin molding material and semiconductor device using the same - Google Patents

Thermosetting resin composition and epoxy resin molding material and semiconductor device using the same

Info

Publication number
JP2001098053A
JP2001098053A JP28044799A JP28044799A JP2001098053A JP 2001098053 A JP2001098053 A JP 2001098053A JP 28044799 A JP28044799 A JP 28044799A JP 28044799 A JP28044799 A JP 28044799A JP 2001098053 A JP2001098053 A JP 2001098053A
Authority
JP
Japan
Prior art keywords
group
compound
molecule
molding material
epoxy resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28044799A
Other languages
Japanese (ja)
Other versions
JP3672225B2 (en
Inventor
Yoshiyuki Go
義幸 郷
Sumiya Miyake
澄也 三宅
Hiroshi Nagata
永田  寛
Akiko Okubo
明子 大久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP28044799A priority Critical patent/JP3672225B2/en
Publication of JP2001098053A publication Critical patent/JP2001098053A/en
Application granted granted Critical
Publication of JP3672225B2 publication Critical patent/JP3672225B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a thermosetting resin composition and an epoxy resin molding material exhibiting both a rapid curability and good storage stability, and a semiconductor device made by using the same. SOLUTION: A thermosetting resin composition comprises (A) a compound having at least two of an epoxy group in a molecule (B) another compound having at least two of a phenolic hydroxyl group in a molecule (C) a molecular compound as essential components. An epoxy resin molding material contains the composition; and a semiconductor device is sealed with a cured product of the material.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、硬化性と保存性が
良好で、電気・電子材料分野に有用な熱硬化性樹脂組成
物、および、これを用いたエポキシ樹脂成形材料、なら
びにその硬化物にて封止された半導体装置に関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermosetting resin composition having good curability and preservability and useful in the field of electric and electronic materials, an epoxy resin molding material using the same, and a cured product thereof. The present invention relates to a semiconductor device sealed by the above.

【0002】[0002]

【従来の技術】電気・電子材料、特に、IC封止材料
は、近年、生産効率の向上を目的とした速硬化性と、物
流・保管時のハンドリング性向上のための保存性の向上
とが、求められるようになってきている。
2. Description of the Related Art In recent years, electric and electronic materials, particularly IC encapsulating materials, have been required to have a rapid curing property for the purpose of improving production efficiency and a storage property for improving handling properties during distribution and storage. , Is being asked.

【0003】従来、電子電気分野向けエポキシ樹脂に
は、硬化触媒として、アミン類、イミダゾール系化合
物、ジアザビシクロウンデセンなどの含窒素複素環式化
合物、第四級アンモニウム、ホスホニウムあるいはアル
ソニウム化合物などの種々の化合物が使用されている。
Heretofore, epoxy resins for the field of electronics have been used as curing catalysts such as amines, imidazole compounds, nitrogen-containing heterocyclic compounds such as diazabicycloundecene, quaternary ammonium, phosphonium or arsonium compounds. Various compounds have been used.

【0004】これら一般に使用される硬化触媒は、常温
などの比較的低温においても、硬化促進作用を示す場合
が多い。このことは、樹脂組成物の製造および保存時の
粘度上昇や、流動性の低下、硬化性のばらつきなど、製
品としての品質を低下させる原因となっている。
[0004] These commonly used curing catalysts often exhibit a curing promoting action even at a relatively low temperature such as room temperature. This causes a decrease in quality as a product, such as an increase in viscosity during production and storage of the resin composition, a decrease in fluidity, and a variation in curability.

【0005】この問題を解決すべく、近年では、低温で
の粘度、流動性の経時変化を抑え、賦形、成形時の加熱
によってのみ、硬化反応を起こすような、いわゆる潜伏
性硬化促進剤の研究が盛んになされている。その手段と
して、硬化促進剤の活性点をイオン対により保護するこ
とで、潜伏性を発現する研究がなされており、特開平8
−41290号公報では、種々の有機酸とホスホニウム
イオンとの塩構造を有する潜伏性硬化促進剤が提示され
ている。しかし、このホスホニウム塩は、特定の高次の
分子構造を有さず、イオン対が比較的容易に外部環境の
影響を受けるため、近年の低分子エポキシ樹脂やフェノ
ールアラルキル樹脂のような分子の動きやすい硬化剤を
用いる半導体封止材料では、保存性が低下する問題が生
じている。
In order to solve this problem, in recent years, a so-called latent curing accelerator which suppresses a change with time in viscosity and fluidity at a low temperature and causes a curing reaction only by heating during shaping and molding has been developed. Research is being actively pursued. As a means for protecting the active site of the curing accelerator with an ion pair, studies have been made to develop latentness.
In JP-A-41290, a latent curing accelerator having a salt structure of various organic acids and phosphonium ions is proposed. However, this phosphonium salt does not have a specific higher-order molecular structure, and the ion pair is relatively easily affected by the external environment. Therefore, the movement of molecules such as recent low-molecular epoxy resins and phenol aralkyl resins has occurred. A semiconductor sealing material using an easy curing agent has a problem that storage stability is reduced.

【0006】[0006]

【発明が解決しようとする課題】本発明は、硬化性と保
存性が良好で、電気・電子材料分野に有用な熱硬化性樹
脂組成物、および、これを用いたエポキシ樹脂成形材
料、ならびにその硬化物にて封止された耐湿信頼性に優
れる半導体装置を提供することを目的とするものであ
る。
DISCLOSURE OF THE INVENTION The present invention relates to a thermosetting resin composition having good curability and preservability, which is useful in the field of electric and electronic materials, an epoxy resin molding material using the same, and an epoxy resin molding material using the same. It is an object of the present invention to provide a semiconductor device sealed with a cured product and having excellent moisture resistance reliability.

【0007】[0007]

【課題を解決するための手段】本発明者らは、1分子内
にエポキシ基を2個以上有する化合物、1分子内にフェ
ノール性水酸基を2個以上有する化合物と共に、特定構
造の分子化合物を用いることにより、優れた硬化性と保
存性を有する樹脂組成物、およびエポキシ樹脂成形材料
が得られ、さらには高い耐湿信頼性を有する半導体装置
が得られることを見いだし、本発明を完成するに至っ
た。
The present inventors use a molecular compound having a specific structure together with a compound having two or more epoxy groups in one molecule and a compound having two or more phenolic hydroxyl groups in one molecule. As a result, a resin composition having excellent curability and storage stability, and an epoxy resin molding material were obtained, and further, it was found that a semiconductor device having high moisture resistance reliability was obtained, and the present invention was completed. .

【0008】すなわち、本発明は、1分子内にエポキシ
基を2個以上有する化合物(A)、1分子内にフェノー
ル性水酸基を2個以上有する化合物(B)、および、一
般式(1)もしくは(2)で表される分子化合物(C)
を必須成分とすることを特徴とする熱硬化性樹脂組成
物、
That is, the present invention provides a compound (A) having two or more epoxy groups in one molecule, a compound (B) having two or more phenolic hydroxyl groups in one molecule, and a compound represented by the general formula (1) Molecular compound (C) represented by (2)
A thermosetting resin composition characterized by comprising an essential component,

【0009】[0009]

【化5】 Embedded image

【0010】[0010]

【化6】 Embedded image

【0011】(ただし、Pはリン原子、R1、R2、R3
およびR4は置換もしくは無置換の芳香族基、またはア
ルキル基、A1およびA3は2価の芳香族基、Bは単結
合、またはエーテル基、スルホン基、スルフィド基、カ
ルボニル基等から選ばれる2価の置換基、または炭素原
子数1〜13で構成される2価の有機基を表す。)
(Where P is a phosphorus atom, R 1 , R 2 , R 3
And R 4 is a substituted or unsubstituted aromatic group or an alkyl group, A 1 and A 3 are divalent aromatic groups, B is a single bond, or an ether group, a sulfone group, a sulfide group, a carbonyl group, or the like. A divalent substituent or a divalent organic group having 1 to 13 carbon atoms. )

【0012】また、分子化合物(C)が、一般式(3)
または(4)で表される分子化合物である前記の熱硬化
性樹脂組成物、
The molecular compound (C) is represented by the general formula (3)
Or the thermosetting resin composition which is a molecular compound represented by (4),

【0013】[0013]

【化7】 Embedded image

【0014】[0014]

【化8】 Embedded image

【0015】(ただし、Pはリン原子、R1、R2、R3
およびR4は置換もしくは無置換の芳香族基、またはア
ルキル基を表し、R5、R6、R7およびR8 は水素原子
またはハロゲン原子または炭素原子数1〜6で構成され
る1価の有機基を表す。Xは単結合、またはエーテル
基、スルホン基、スルフィド基、カルボニル基等から選
ばれる2価の置換基、または炭素原子数1〜13で構成
される2価の有機基を表す。)
(Where P is a phosphorus atom, R 1 , R 2 , R 3
And R 4 represent a substituted or unsubstituted aromatic group or an alkyl group, and R 5 , R 6 , R 7 and R 8 are a hydrogen atom or a halogen atom or a monovalent monovalent having 1 to 6 carbon atoms. Represents an organic group. X represents a single bond, a divalent substituent selected from an ether group, a sulfone group, a sulfide group, a carbonyl group and the like, or a divalent organic group having 1 to 13 carbon atoms. )

【0016】また、1分子内にエポキシ基を2個以上有
する化合物(A)、1分子内にフェノール性水酸基を2
個以上有する化合物(B)、一般式(1)もしくは
(2)で表される分子化合物(C)、さらには一般式
(3)もしくは(4)で表される分子化合物(C)、お
よび無機充填材(D)を必須成分とすることを特徴とす
るエポキシ樹脂成形材料、ならびにその硬化物にて封止
された半導体装置である。
Further, a compound (A) having two or more epoxy groups in one molecule, a phenolic hydroxyl group in one molecule.
(B), a molecular compound (C) represented by the general formula (1) or (2), a molecular compound (C) represented by the general formula (3) or (4), and inorganic An epoxy resin molding material comprising a filler (D) as an essential component, and a semiconductor device sealed with a cured product thereof.

【0017】[0017]

【発明の実施の形態】本発明に用いる1分子内にエポキ
シ基を2個以上有する化合物(A)は、1分子内にエポ
キシ基を2個以上有するものであれば、何ら制限はな
く、例えば、ビフェニル型エポキシ樹脂、ノボラック型
エポキシ樹脂、ナフタレン型エポキシ樹脂など、ビフェ
ノールなどのフェノール類やフェノール樹脂、ナフトー
ル類などの水酸基にエピクロロヒドリンを反応させて製
造するエポキシ樹脂、エポキシ化合物などが挙げられ
る。その他に、脂環式エポキシ樹脂のようにオレフィン
を過酸を用いて酸化させエポキシ化したエポキシ樹脂
や、ハイドロキノン等のジヒドロキシベンゼン類をエピ
クロロヒドリンでエポキシ化したものが挙げられる。
BEST MODE FOR CARRYING OUT THE INVENTION The compound (A) having two or more epoxy groups in one molecule used in the present invention is not limited as long as it has two or more epoxy groups in one molecule. Epoxy resins, epoxy compounds, etc. produced by reacting epichlorohydrin with hydroxyl groups such as biphenols, phenolic resins such as biphenol, phenolic resins, naphthols, etc., biphenyl type epoxy resin, novolak type epoxy resin, naphthalene type epoxy resin, etc. Can be Other examples include an epoxy resin such as an alicyclic epoxy resin obtained by oxidizing an olefin using a peracid and epoxidizing the same, or a resin obtained by epoxidizing dihydroxybenzenes such as hydroquinone with epichlorohydrin.

【0018】また、1分子内にフェノール性水酸基を2
個以上有する化合物(B)は、1分子内にエポキシ基を
2個以上有する化合物(A)の硬化剤として作用するも
のである。具体的には、フェノールノボラック樹脂、ク
レゾールノボラック樹脂、アルキル変性ノボラック樹脂
(シクロアルケンの二重結合をフリーデルクラフツ型の
反応でフェノール類と反応、共縮合した樹脂を含む)、
フェノールアラルキル樹脂、ナフトール類とフェノール
類をカルボニル基含有化合物と共縮合した樹脂などが例
示されるが、1分子内で芳香族性の環に結合する水素原
子が、水酸基で2個以上置換された化合物であればよ
い。
Further, two phenolic hydroxyl groups are contained in one molecule.
The compound (B) having two or more compounds functions as a curing agent for the compound (A) having two or more epoxy groups in one molecule. Specifically, a phenol novolak resin, a cresol novolak resin, an alkyl-modified novolak resin (including a resin obtained by reacting a double bond of a cycloalkene with a phenol by a Friedel-Crafts type reaction and co-condensing),
Examples thereof include phenol aralkyl resins and resins obtained by co-condensing naphthols and phenols with a carbonyl group-containing compound, wherein two or more hydrogen atoms bonded to an aromatic ring in one molecule are substituted with hydroxyl groups. Any compound may be used.

【0019】本発明において硬化促進剤として機能する
分子化合物(C)は、一般式(1)または(2)、さら
には一般式(3)または(4)で表されるテトラ置換ホ
スホニウムとフェノール化合物との分子会合体である。
この分子化合物は、1個のテトラ置換ホスホニウムカチ
オンと、3個のフェノール性水酸基および1個のフェノ
キシドアニオンの単位で構成され、テトラ置換ホスホニ
ウムイオンの正電荷の周囲を3個のフェノール性水酸基
と1個のフェノキシドアニオンが取り囲み、安定化した
構造となっているものと考えられる。
In the present invention, the molecular compound (C) which functions as a curing accelerator is a tetra-substituted phosphonium and a phenol compound represented by the general formula (1) or (2), and further represented by the general formula (3) or (4). Is a molecular association with
This molecular compound is composed of a unit of one tetra-substituted phosphonium cation, three phenolic hydroxyl groups and one phenoxide anion, and surrounds three positive phenolic hydroxyl groups with one phenolic hydroxyl group around the positive charge of the tetra-substituted phosphonium ion. It is considered that a single phenoxide anion surrounds and has a stabilized structure.

【0020】このような構造をとりうるホスホニウムイ
オンは、置換または無置換のアリール基やアルキル基を
置換基にもつテトラ置換ホスホニウムイオンが、熱や、
加水分解に対して安定であり好ましく、具体的には、テ
トラフェニルホスホニウム、テトラトリルホスホニウム
などのテトラアリール置換ホスホニウム、トリフェニル
メチルホスニウムなどのトリアリールホスフィンとアル
キルハライドから合成されたホスホニウムハライドに起
源をもつトリアリールモノアルキルホスホニウム、テト
ラブチルホスホニウムなどのテトラアルキル置換ホスホ
ニウムなどが例示される。
The phosphonium ion which can have such a structure is a tetra-substituted phosphonium ion having a substituted or unsubstituted aryl or alkyl group as a substituent.
Stable and preferable for hydrolysis, specifically, tetraphenylphosphonium, tetraaryl-substituted phosphonium such as tetratolylphosphonium, and phosphonium halide synthesized from triarylphosphine such as triphenylmethylphosphonium and alkyl halide. And tetraalkyl-substituted phosphoniums such as triarylmonoalkylphosphonium and tetrabutylphosphonium.

【0021】また、分子化合物(C)を形成するもう一
方の成分である、フェノール化合物としては、ビスフェ
ノールA(2,2-ビス(4-ヒドロキシフェニル)プロパ
ン)、ビスフェノールF(4,4-メチレンビスフェノー
ル、2,4-メチレンビスフェノール、2,2-メチレンビスフ
ェノール)、ビスフェノールS(2,2-ビス(4-ヒドロキ
シフェニル)スルホン)、ビスフェノールE(4,4-エチ
リデンビスフェノール)、ビスフェノールフルオレン
(4,4-(9H-フルオレン-9-イリデン)ビスフェノー
ル)、4,4-メチリデンビス(2,6-ジメチルフェノー
ル)、ビス(4-ヒドロキシフェニル)メタノンなどのビ
スフェノール類、4,4-ビフェノール、2,2-ビフェノー
ル、3,3,5,5-テトラメチルビフェノールなどのビフェノ
ール類、ヒドロキノン、レゾルシノール、カテコール、
2,6-ジヒドロキシナフタレン、1,4-ジヒドロキシナフタ
レン、2,3-ジヒドロキシナフタレン、1,6-ジヒドロキシ
ナフタレン、1,1-ビ-2-ナフトール、1,4−ジヒドロキシ
アントラキノンなどが例示されるが、分子化合物の安定
性や硬化性、硬化物物性の点で、ビスフェノールA、ビ
スフェノールF(4,4-メチレンビスフェノール、2,4-メ
チレンビスフェノール、2,2-メチレンビスフェノール
や、本州化学製ビスフェノールF−Dのようなこれらの
異性体混合物を含む)、ビスフェノールS、4,4-ビフェ
ノール、2,2-ビフェノール、2,6-ジヒドロキシナフタレ
ンが好適である。
The phenol compounds which are the other components forming the molecular compound (C) include bisphenol A (2,2-bis (4-hydroxyphenyl) propane) and bisphenol F (4,4-methylene). Bisphenol, 2,4-methylenebisphenol, 2,2-methylenebisphenol), bisphenol S (2,2-bis (4-hydroxyphenyl) sulfone), bisphenol E (4,4-ethylidenebisphenol), bisphenolfluorene (4, Bisphenols such as 4- (9H-fluorene-9-ylidene) bisphenol), 4,4-methylidenebis (2,6-dimethylphenol), bis (4-hydroxyphenyl) methanone, 4,4-biphenol, 2,2 -Biphenols, biphenols such as 3,3,5,5-tetramethylbiphenol, hydroquinone, resorcinol, catechol,
Examples include 2,6-dihydroxynaphthalene, 1,4-dihydroxynaphthalene, 2,3-dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 1,1-bi-2-naphthol, and 1,4-dihydroxyanthraquinone. In terms of the stability and curability of molecular compounds and physical properties of cured products, bisphenol A and bisphenol F (4,4-methylenebisphenol, 2,4-methylenebisphenol, 2,2-methylenebisphenol, and bisphenol F manufactured by Honshu Chemical Co., Ltd.) Preferred are bisphenol S, 4,4-biphenol, 2,2-biphenol, 2,6-dihydroxynaphthalene.

【0022】分子化合物(C)は、前述のようなフェノ
ール化合物と、最終的に脱ハロゲン化水素を助ける塩
基、例えば水酸化ナトリウム、水酸化カリウムなどのア
ルカリ金属水酸化物や、ピリジン、トリエチルアミンな
どの有機塩基をアルコールなどの溶媒に溶解し、続いて
適当な溶媒に溶解した前記テトラ置換ホスホニウムのハ
ライドを添加し反応させて、最終的には再結晶や再沈殿
などの操作により固形分として取り出す方法や、テトラ
置換ホスホニウムテトラ置換ボレートとフェノール化合
物を熱反応後、アルコールなどの溶媒中で加熱反応させ
る方法で合成可能である。
The molecular compound (C) is obtained by mixing the above-mentioned phenol compound with a base which finally helps dehydrohalogenation, for example, an alkali metal hydroxide such as sodium hydroxide or potassium hydroxide, pyridine or triethylamine. Is dissolved in a solvent such as alcohol, followed by adding and reacting the tetra-substituted phosphonium halide dissolved in an appropriate solvent, and finally taking out as a solid by an operation such as recrystallization or reprecipitation. It can be synthesized by a method or a method in which a tetra-substituted phosphonium tetra-substituted borate and a phenol compound are thermally reacted and then heated and reacted in a solvent such as alcohol.

【0023】本発明に用いる分子化合物(C)は、前述
のようにホスホニウム−フェノキシド型の塩を構造に有
するが、これが従来のホスホニウム−有機酸アニオン塩
型の化合物と異なる点は、分子化合物(C)では、フェ
ノール性水酸基のプロトンが関与した水素結合による高
次構造が、このイオン結合を取り囲んでいる点である。
従来の塩では、イオン結合の強さのみにより反応性を制
御していたのに対し、分子化合物(C)では、常温では
反応活性点のイオン対が高次構造により囲い込まれて、
活性点が保護され、一方、実際の賦形の段階において
は、この高次構造が崩れることで活性点がむき出しにな
り、反応性を発現する、いわゆる潜伏性が付与される。
The molecular compound (C) used in the present invention has a phosphonium-phenoxide type salt in its structure as described above, and this is different from the conventional phosphonium-organic acid anion salt type compound in that the molecular compound (C) In C), a tertiary structure due to a hydrogen bond involving a proton of a phenolic hydroxyl group surrounds this ionic bond.
In the conventional salt, the reactivity is controlled only by the strength of the ionic bond. On the other hand, in the molecular compound (C), the ion pair at the reaction active site is surrounded by a higher-order structure at room temperature.
The active sites are protected, while in the actual shaping stage, the active sites are exposed due to the collapse of the higher-order structure, and so-called latency, which expresses reactivity, is imparted.

【0024】本発明に用いる、硬化促進剤として機能す
る、分子化合物(C)の配合量は、1分子内にエポキシ
基を2個以上有する化合物(A)と、硬化剤として機能
する、1分子内にフェノール性水酸基を2個以上有する
化合物(B)の合計重量を100重量部とした場合、
0.5〜20重量部程度が硬化性、保存性、他特性のバ
ランスがよく好適である。また、1分子内にエポキシ基
を2個以上有する化合物(A)と、1分子内にフェノー
ル性水酸基を2個以上有する化合物(B)の配合比率
は、1分子内にエポキシ基を2個以上有する化合物
(A)のエポキシ基1モルに対し、1分子内にフェノー
ル性水酸基を2個以上有する化合物(B)のフェノール
性水酸基と分子化合物(C)に含まれるフェノール性水
酸基との合算にて0.5〜2モル、好ましくは、0.8
〜1.2程度のモル比となるよう用いると、硬化性、耐
熱性、電気特性等がより良好となる。
The compounding amount of the molecular compound (C), which functions as a curing accelerator and is used in the present invention, is a compound (A) having two or more epoxy groups in one molecule, and one molecule which functions as a curing agent. When the total weight of the compound (B) having two or more phenolic hydroxyl groups is 100 parts by weight,
About 0.5 to 20 parts by weight is suitable because the curability, storage stability and other properties are well balanced. The compounding ratio of the compound (A) having two or more epoxy groups in one molecule to the compound (B) having two or more phenolic hydroxyl groups in one molecule is such that the compound has two or more epoxy groups in one molecule. The sum of the phenolic hydroxyl group of the compound (B) having two or more phenolic hydroxyl groups in one molecule and the phenolic hydroxyl group contained in the molecular compound (C) per mole of the epoxy group of the compound (A). 0.5 to 2 mol, preferably 0.8
When used so as to have a molar ratio of about 1.2, the curability, heat resistance, electric characteristics, and the like are further improved.

【0025】本発明に用いる無機充填材(D)の種類に
ついては、特に制限はなく、一般に封止材料に用いられ
ているものを使用することができる。例えば、溶融破砕
シリカ粉末、溶融球状シリカ粉末、結晶シリカ粉末、2
次凝集シリカ粉末、アルミナ、チタンホワイト、水酸化
アルミニウム、タルク、クレー、ガラス繊維等が挙げら
れ、特に溶融球状シリカ粉末が好ましい。形状は限りな
く真球状であることが好ましく、又、粒子の大きさの異
なるものを混合することにより充填量を多くすることが
できる。
The type of the inorganic filler (D) used in the present invention is not particularly limited, and those generally used for a sealing material can be used. For example, fused silica powder, fused spherical silica powder, crystalline silica powder,
Sub-agglomerated silica powder, alumina, titanium white, aluminum hydroxide, talc, clay, glass fiber, etc., are preferred, and fused spherical silica powder is particularly preferred. The shape is preferably infinitely spherical, and the filling amount can be increased by mixing particles having different particle sizes.

【0026】この無機充填材の配合量としては、1分子
内にエポキシ基を2個以上有する化合物(A)と、1分
子内にフェノール性水酸基を2個以上有する化合物
(B)の合計量100重量部あたり、200〜2400
重量部が好ましい。200重量部未満だと、無機充填材
による補強効果が充分に発現しないおそれがあり、24
00重量部を越えると、樹脂組成物の流動性が低下し成
形時に充填不良等が生じるおそれがあるので好ましくな
い。特に、無機充填材の配合量が、前記成分(A)と
(B)の合計量100重量部あたり、250〜1400
重量部であれば、成形材料の硬化物の吸湿率が低くな
り、半田クラックの発生を防止することができ、更に溶
融時の成形材料の粘度が低くなるため、半導体装置内部
の金線変形を引き起こすおそれがなく、より好ましい。
又、無機充填材は、予め充分混合しておくことが好まし
い。
The compounding amount of the inorganic filler is a total amount of the compound (A) having two or more epoxy groups in one molecule and the compound (B) having two or more phenolic hydroxyl groups in one molecule. 200 to 2400 per part by weight
Parts by weight are preferred. If the amount is less than 200 parts by weight, the reinforcing effect of the inorganic filler may not be sufficiently exerted.
If the amount is more than 00 parts by weight, the fluidity of the resin composition is reduced, and there is a possibility that poor filling may occur during molding, which is not preferable. Particularly, the compounding amount of the inorganic filler is from 250 to 1400 per 100 parts by weight of the total amount of the components (A) and (B).
If it is part by weight, the moisture absorption of the cured product of the molding material will be low, it is possible to prevent the occurrence of solder cracks, and the viscosity of the molding material at the time of melting will be low. It is more preferable because it does not cause a risk.
It is preferable that the inorganic filler is sufficiently mixed in advance.

【0027】本発明のエポキシ樹脂成形材料は、(A)
〜(D)成分の他に、必要に応じてγ−グリシドキシプ
ロピルトリメトキシシラン等のカップリング剤、カーボ
ンブラック等の着色剤、臭素化エポキシ樹脂、酸化アン
チモン、リン化合物等の難燃剤、シリコーンオイル、シ
リコーンゴム等の低応力成分、天然ワックス、合成ワッ
クス、高級脂肪酸もしくはその金属塩類、パラフィン等
の離型剤、酸化防止剤等の各種添加剤を配合することが
でき、また、本発明において硬化促進剤として機能する
分子化合物(C)の特性を損なわない範囲で、トリフェ
ニルホスフィン、1,8−ジアザビシクロ(5,4,
0)ウンデセン−7、2−メチルイミダゾール等の他の
公知の触媒と併用しても何ら問題はない。
The epoxy resin molding material of the present invention comprises (A)
In addition to the components (D), if necessary, a coupling agent such as γ-glycidoxypropyltrimethoxysilane, a coloring agent such as carbon black, a brominated epoxy resin, an antimony oxide, a flame retardant such as a phosphorus compound, Various additives such as low-stress components such as silicone oil and silicone rubber, natural wax, synthetic wax, higher fatty acids or metal salts thereof, release agents such as paraffin, antioxidants and the like can be blended. And triphenylphosphine, 1,8-diazabicyclo (5,4,4) in a range that does not impair the properties of the molecular compound (C) that functions as a curing accelerator in
0) There is no problem when used in combination with other known catalysts such as undecene-7 and 2-methylimidazole.

【0028】本発明のエポキシ樹脂成形材料は、(A)
〜(D)成分、及びその他の添加剤等をミキサーを用い
て常温混合し、ロール、押出機等の混練機で混練し、冷
却後粉砕して得られる。
The epoxy resin molding material of the present invention comprises (A)
-Component (D), other additives, etc. are mixed at room temperature using a mixer, kneaded with a kneader such as a roll or an extruder, cooled, and pulverized.

【0029】本発明のエポキシ樹脂成形材料を用いて、
半導体等の電子部品を封止し、半導体装置を製造するに
は、トランスファーモールド、コンプレッションモール
ド、インジェクションモールド等の成形方法で硬化成形
することができる。
Using the epoxy resin molding material of the present invention,
In order to manufacture a semiconductor device by encapsulating an electronic component such as a semiconductor, curing and molding can be performed by a molding method such as transfer molding, compression molding, and injection molding.

【0030】本発明のエポキシ樹脂成形材料の硬化物で
封止された半導体装置は、本発明の技術的範囲に含ま
れ、優れた耐湿性を示す。
The semiconductor device sealed with the cured product of the epoxy resin molding material of the present invention is included in the technical scope of the present invention and exhibits excellent moisture resistance.

【0031】[0031]

【実施例】以下に、本発明の実施例を示すが、本発明
は、これにより何ら制限を受けるものではない。
EXAMPLES Examples of the present invention will be described below, but the present invention is not limited by these examples.

【0032】[硬化促進剤の合成]合成した分子化合物
(C)の構造確認は、NMR、元素分析、および次の方
法による中和滴定(ホスホニウムフェノキシド当量の測
定)により実施した。合成した分子化合物(C)をメタ
ノール/水系溶媒中で、重量既知の過剰量のシュウ酸と
反応させ、残余のシュウ酸を規定度既知の水酸化ナトリ
ウム水溶液で定量して、分子化合物(C)の重量あたり
規定度(N/g)を算出した。この値の逆数がホスホニ
ウムフェノキシド当量となる。
[Synthesis of Curing Accelerator] The structure of the synthesized molecular compound (C) was confirmed by NMR, elemental analysis, and neutralization titration (measurement of phosphonium phenoxide equivalent) by the following method. The synthesized molecular compound (C) is reacted with a known excess amount of oxalic acid in a methanol / water-based solvent, and the remaining oxalic acid is quantified with an aqueous sodium hydroxide solution having a known normality. The normality per weight (N / g) was calculated. The reciprocal of this value is the phosphonium phenoxide equivalent.

【0033】(合成例1)撹拌装置付きの1リットルの
セパラブルフラスコに本州化学工業(株)製ビスフェノ
ールF−D(ビスフェノールF異性体混合物)40.0
g(0.2モル)、メタノール100mlを仕込み、室
温で撹拌溶解し、さらに攪拌しながら水酸化ナトリウム
4.0g(0.1モル)を予め、50mlのメタノール
で溶解した溶液を添加した。次いで、予めテトラフェニ
ルホスホニウムブロマイド41.9g(0.1モル)を
150mlのメタノールに溶解した溶液を加えた。しば
らく攪拌を継続し、300mlのメタノールを追加した
後、フラスコ内の溶液を大量の水に撹拌しながら滴下
し、白色沈殿を得た。沈殿を濾過、乾燥し、白色結晶7
1.9gを得た。この化合物をC1とする。C1は、NM
R、マススペクトル、元素分析の結果から、テトラフェ
ニルホスホニウム1分子とビスフェノールF−Dとが、
モル比1:2で錯化した一般式(3)で表される目的の
分子化合物であることが確認された。また、中和滴定の
値からホスホニウムフェノキシド当量が、理論値738に
近く、前述の構造を示した。合成の収率は97.4%で
あった。
(Synthesis Example 1) Bisphenol FD (mixture of bisphenol F isomers) manufactured by Honshu Chemical Industry Co., Ltd. was placed in a 1 liter separable flask equipped with a stirrer.
g (0.2 mol) and 100 ml of methanol were charged and dissolved by stirring at room temperature, and a solution of 4.0 g (0.1 mol) of sodium hydroxide previously dissolved in 50 ml of methanol was added with stirring. Next, a solution in which 41.9 g (0.1 mol) of tetraphenylphosphonium bromide was previously dissolved in 150 ml of methanol was added. Stirring was continued for a while, and after adding 300 ml of methanol, the solution in the flask was dropped into a large amount of water while stirring to obtain a white precipitate. The precipitate is filtered and dried, and white crystals 7
1.9 g were obtained. This compound is designated as C1. C1 is NM
From the results of R, mass spectrum and elemental analysis, one molecule of tetraphenylphosphonium and bisphenol FD
It was confirmed that this was a target molecular compound represented by the general formula (3) complexed at a molar ratio of 1: 2. Also, from the value of the neutralization titration, the phosphonium phenoxide equivalent was close to the theoretical value of 738, indicating the above-mentioned structure. The yield of the synthesis was 97.4%.

【0034】(合成例2〜6)合成例2〜6では、表1
に示した条件により、基本的な操作はすべて合成例1と
同様に行い、それぞれ化合物C2〜C6を調製した。結
果を表1に示す。
(Synthesis Examples 2 to 6)
Under the conditions shown in (1), all the basic operations were performed in the same manner as in Synthesis Example 1 to prepare compounds C2 to C6, respectively. Table 1 shows the results.

【0035】(比較合成例1)撹拌装置付きの1リット
ルのセパラブルフラスコに、ビス(4-ヒドロキシ-3,5-
ジメチルフェニル)メタンを12.8g(0.05モ
ル)、メタノール50mlを仕込み、室温で撹拌溶解
し、さらに攪拌しながら水酸化ナトリウム4.0g
(0.1モル)を、予め50mlのメタノールで溶解した
溶液を添加した。次いで、予めテトラブチルホスホニウ
ムブロマイド33.9g(0.1モル)を150mlの
メタノールに溶解した溶液を加えた。しばらく攪拌を継
続し、フラスコ内に純水100mlを撹拌しながら滴下
し、さらに2-プロパノール100mlを加え白色沈殿を
得た。沈殿を濾過、乾燥し、白色結晶を得た。この化合
物をD1とする。合成例1と同様の分析を行った結果、
ビス(4-ヒドロキシ-3,5-ジメチルフェニル)メタンの
2個の水酸基のプロトンが解離した各々のフェノキシド
に、各1分子のテトラブチルホスホニウムが、1:2で
イオン結合した化合物であった。このD1は、単なるホ
スホニウム塩であって、本発明に用いる分子化合物では
ない。
(Comparative Synthesis Example 1) A 1-liter separable flask equipped with a stirrer was charged with bis (4-hydroxy-3,5-
12.8 g (0.05 mol) of dimethylphenyl) methane and 50 ml of methanol were charged, and dissolved by stirring at room temperature.
(0.1 mol) was added in advance with a solution of 50 ml of methanol. Next, a solution in which 33.9 g (0.1 mol) of tetrabutylphosphonium bromide was previously dissolved in 150 ml of methanol was added. Stirring was continued for a while, and 100 ml of pure water was dropped into the flask while stirring, and 100 ml of 2-propanol was further added to obtain a white precipitate. The precipitate was filtered and dried to obtain white crystals. This compound is designated as D1. As a result of performing the same analysis as in Synthesis Example 1,
A compound in which one molecule of tetrabutylphosphonium was ionically bonded to each phenoxide in which two protons of the two hydroxyl groups of bis (4-hydroxy-3,5-dimethylphenyl) methane were dissociated at a ratio of 1: 2. This D1 is a simple phosphonium salt and not a molecular compound used in the present invention.

【0036】(比較合成例2)撹拌装置付きの1リット
ルのセパラブルフラスコに、p-フェニルフェノール1
7.0g(0.1モル)、メタノール50mlを仕込み
室温で撹拌溶解し、さらに攪拌しながら水酸化ナトリウ
ム4.0g(0.1モル)を、予め50mlのメタノール
で溶解した溶液を添加した。次いで、予めテトラフェニ
ルホスホニウムブロミド41.9g(0.1モル)を1
50mlのメタノールに溶解した溶液を加えた。しばら
く攪拌を継続し、フラスコ内に純水100mlを撹拌し
ながら滴下し、さらに2-プロパノール100mlを加え
白色沈殿を得た。沈殿を濾過、乾燥し、白色結晶を得
た。この化合物をD2とする。合成例1と同様の分析を
行った結果、p-フェニルフェノールの水酸基のプロトン
が脱離したフェノキシドに、1分子のテトラフェニルホ
スホニウムが、1:1でイオン結合した化合物であっ
た。このD2は、単なるホスホニウム塩であって、本発
明に用いる分子化合物ではない。
(Comparative Synthesis Example 2) A 1-liter separable flask equipped with a stirrer was charged with p-phenylphenol 1
7.0 g (0.1 mol) and 50 ml of methanol were charged and dissolved by stirring at room temperature, and a solution in which 4.0 g (0.1 mol) of sodium hydroxide had been previously dissolved in 50 ml of methanol was added while stirring. Then, 41.9 g (0.1 mol) of tetraphenylphosphonium bromide was previously added to 1
A solution dissolved in 50 ml of methanol was added. Stirring was continued for a while, and 100 ml of pure water was dropped into the flask while stirring, and 100 ml of 2-propanol was further added to obtain a white precipitate. The precipitate was filtered and dried to obtain white crystals. This compound is designated as D2. As a result of performing the same analysis as in Synthesis Example 1, it was a compound in which one molecule of tetraphenylphosphonium was ion-bonded 1: 1 with phenoxide from which the proton of the hydroxyl group of p-phenylphenol was eliminated. D2 is a simple phosphonium salt and not a molecular compound used in the present invention.

【0037】(比較合成例3)撹拌装置付きの1リット
ルセパラブルフラスコに、安息香酸12.2g(0.1
モル)、メタノール50mlを仕込み室温で撹拌溶解
し、さらに攪拌しながら水酸化ナトリウム4.0g
(0.1モル)を、予め50mlのメタノールで溶解した
溶液を添加した。次いで、予めテトラフェニルホスホニ
ウムブロミド41.9g(0.1モル)を150mlの
メタノールに溶解した溶液を加えた。しばらく攪拌を継
続し、フラスコ内の溶液を100mlの水に撹拌しなが
ら滴下し、さらに2-プロパノール100mlを加え白色
沈殿を得た。沈殿を濾過、乾燥し、白色結晶を得た。こ
の化合物をD3とする。合成例1と同様の分析を行った
結果、安息香酸のカルボキシル基のプロトンが脱離した
カルボキシラートに、1分子のテトラフェニルホスホニ
ウムが、1:1でイオン結合した化合物であった。この
D3は、単なるホスホニウム塩であって、本発明に用い
る分子化合物ではない。比較合成例の結果も、他の合成
例と同様に表1にまとめた。
(Comparative Synthesis Example 3) In a 1-liter separable flask equipped with a stirrer, 12.2 g (0.1
Mol) and methanol (50 ml), stirred and dissolved at room temperature, and further stirred to obtain 4.0 g of sodium hydroxide.
(0.1 mol) was added in advance with a solution of 50 ml of methanol. Next, a solution in which 41.9 g (0.1 mol) of tetraphenylphosphonium bromide was dissolved in 150 ml of methanol in advance was added. Stirring was continued for a while, and the solution in the flask was added dropwise to 100 ml of water while stirring, and 100 ml of 2-propanol was further added to obtain a white precipitate. The precipitate was filtered and dried to obtain white crystals. This compound is designated as D3. As a result of performing the same analysis as in Synthesis Example 1, it was a compound in which one molecule of tetraphenylphosphonium was ion-bonded 1: 1 to the carboxylate from which the proton of the carboxyl group of benzoic acid was eliminated. This D3 is a simple phosphonium salt and not a molecular compound used in the present invention. Table 1 also summarizes the results of the comparative synthesis examples as in the other synthesis examples.

【0038】[0038]

【表1】 [Table 1]

【0039】[熱硬化性樹脂組成物の評価]まず、合成し
た分子化合物(C)を、1分子内にエポキシ基を2個以
上有する化合物(A)と、1分子内にフェノール性水酸
基を2個以上有する化合物(B)、に加えて粉砕混合
し、さらに100℃で5分間、熱板上で溶融混練した
後、冷却粉砕して、組成物のサンプルを調製し、評価を
行った。評価方法は、下記のとおりである。 (1)硬化トルク 前記のサンプル調製方法により作製した樹脂組成物を用
いて、キュラストメーター(オリエンテック社製、JS
RキュラストメーターPS型)により、175℃で、4
5秒後のトルクを求めた。キュラストメーターにおける
トルクは、硬化性のパラメータであり、値の大きい方
が、硬化性が高いことを示す。 (2)硬化発熱量残存率(保存性評価) 前記のサンプル調製方法により作製した樹脂組成物を用
いて、調製直後の初期硬化発熱量、および40℃で3日
間保存処理後の硬化発熱量を測定し、初期硬化発熱量
(mJ/mg)に対する保存処理後の硬化発熱量(mJ
/mg)の百分率を算出した。尚、硬化発熱量の測定
は、昇温速度10℃/minの条件で、示差熱分析によ
り測定した。この値が大きいほど、保存性が良好である
ことを示す。
[Evaluation of Thermosetting Resin Composition] First, the synthesized molecular compound (C) was compounded with a compound (A) having two or more epoxy groups in one molecule and a phenolic hydroxyl group in one molecule. In addition to the above compound (B), the mixture was pulverized and mixed, further melt-kneaded at 100 ° C. for 5 minutes on a hot plate, and then cooled and pulverized to prepare a sample of the composition for evaluation. The evaluation method is as follows. (1) Curing torque Using a resin composition prepared by the above-described sample preparation method, a curast meter (JS, manufactured by Orientec, Inc.)
R Curastometer PS) at 175 ° C
The torque after 5 seconds was determined. Torque in a curast meter is a parameter of curability, and a larger value indicates higher curability. (2) Residual rate of curing heat generation (evaluation of storage stability) Using the resin composition prepared by the above-described sample preparation method, the initial curing heat generation immediately after preparation and the curing heat generation after storage at 40 ° C. for 3 days were measured. The measured calorific value after preservation (mJ / mg) relative to the initial curing calorific value (mJ / mg)
/ Mg) was calculated. In addition, the measurement of the calorific value of the curing was performed by differential thermal analysis under the condition of a heating rate of 10 ° C./min. A larger value indicates better storage stability.

【0040】(実施例1〜6、および比較例1〜4)実
施例1〜6、および比較例1〜4について、表2に示し
た配合により、前記の方法で、組成物のサンプルを調製
し評価した。比較例1では、実施例における化合物
(C)にかえてトリフェニルホスフィンを、比較例2〜
4では、前述比較合成例1〜3で合成された化合物D1
〜D3を用いた。得られた各組成物の評価結果は、表2
に示した通りであった。
(Examples 1 to 6 and Comparative Examples 1 to 4) For each of Examples 1 to 6 and Comparative Examples 1 to 4, a sample of the composition was prepared by the above-described method according to the formulation shown in Table 2. And evaluated. In Comparative Example 1, triphenylphosphine was used instead of the compound (C) in Examples, and Comparative Examples 2 to
4, compound D1 synthesized in Comparative Synthesis Examples 1 to 3 described above was used.
~ D3 was used. Table 2 shows the evaluation results of the obtained compositions.
As shown in FIG.

【0041】[0041]

【表2】 [Table 2]

【0042】実施例に示すように、本発明の熱硬化性樹
脂組成物は、硬化性、保存性が良好であるのに対し、比
較例1のトリフェニルホスフィンを硬化促進剤に用いた
樹脂組成物は、硬化性、保存性とも悪く、比較例2〜4
の本発明に用いる分子化合物ではないホスホニウム塩を
用いたものは、硬化性はよいものの保存性がよくない。
As shown in the Examples, the thermosetting resin composition of the present invention has good curability and storage stability, whereas the resin composition using triphenylphosphine of Comparative Example 1 as a curing accelerator. The products were also poor in curability and storage stability, and Comparative Examples 2 to 4
Those using a phosphonium salt which is not a molecular compound used in the present invention have good curability but poor storage stability.

【0043】 [エポキシ樹脂成形材料の評価] (実施例7) 油化シェルエポキシ製YX-4000H(ビフェニル型エポキシ樹脂) 52重量部 三井化学製XL225(フェノールアラルキル樹脂) 48重量部 分子化合物C1 3.0重量部 溶融球状シリカ(平均粒径15μm) 500重量部 カーボンブラック 2重量部 臭素化ビスフェノールA型エポキシ樹脂 2重量部 カルナバワックス 2重量部 を混合し、熱ロールを用いて、95℃で8分間混練して
冷却後粉砕し、エポキシ樹脂成形材料を得た。得られた
エポキシ樹脂成形材料を、以下の方法で評価した。結果
を表3に示す。
[Evaluation of Epoxy Resin Molding Material] (Example 7) 52 parts by weight of YX-4000H (biphenyl type epoxy resin) made by Yuka Shell Epoxy 48 parts by weight of XL225 (phenol aralkyl resin) made by Mitsui Chemicals 3.0 parts by weight of molecular compound C1 Parts fused spherical silica (average particle size: 15 μm) 500 parts by weight Carbon black 2 parts by weight Brominated bisphenol A type epoxy resin 2 parts by weight Carnauba wax 2 parts by weight and kneaded at 95 ° C. for 8 minutes using a hot roll. After cooling, the mixture was pulverized to obtain an epoxy resin molding material. The obtained epoxy resin molding material was evaluated by the following method. Table 3 shows the results.

【0044】評価方法 (1)スパイラルフローは、EMMI−I−66に準じ
たスパイラルフロー測定用の金型を用い、金型温度17
5℃、注入圧力70kg/cm2、硬化時間2分で測定
した。スパイラルフローは、流動性のパラメータであ
り、数値が大きい方が流動性が良好である。単位はc
m。 (2)硬化トルクは、キュラストメーター(オリエンテ
ック(株)製、JSRキュラストメーターIVPS型)を
用い、175℃、45秒後のトルクを測定した。この値
の大きい方が硬化性は良好である。単位はkgf・c
m。 (3)フロー残存率は、調製直後と30℃で1週間保存
した後のスパイラルフローを測定し、調製直後のスパイ
ラルフローに対する保存後の百分率として表した。この
値の大きい方が保存性が良い。単位は%。 (4)耐湿信頼性は、金型温度175℃、圧力70kg
/cm2、硬化時間2分で16pDIPを成形し、この
成形物を175℃で8時間の後硬化を行った後、125
℃、相対湿度100%の水蒸気中で、20Vの電圧を1
6pDIPに印加して、断線不良を調べた。15個のパ
ッケージのうちの、8個以上に不良が出るまでの時間
を、不良時間とした。単位は時間。なお、測定時間は、
最長で500時間とし、その時点で不良パッケージ数が
8個未満であったものは、不良時間を500時間以上と
示した。不良時間が長いほど、耐湿信頼性に優れる。
Evaluation Method (1) Spiral flow was measured using a mold for measuring spiral flow according to EMMI-I-66.
The measurement was performed at 5 ° C., an injection pressure of 70 kg / cm 2 , and a curing time of 2 minutes. Spiral flow is a parameter of fluidity, and the larger the value, the better the fluidity. The unit is c
m. (2) The curing torque was measured at 175 ° C. for 45 seconds using a curastometer (manufactured by Orientec Co., Ltd., model JPS Curastometer IVPS). The larger the value, the better the curability. The unit is kgf ・ c
m. (3) The residual flow rate was obtained by measuring the spiral flow immediately after preparation and after storing at 30 ° C. for one week, and expressed as a percentage of the spiral flow immediately after preparation after storage. The larger the value, the better the preservability. Units%. (4) Moisture resistance reliability: mold temperature 175 ° C, pressure 70kg
/ Cm 2 , and a curing time of 2 minutes to form a 16pDIP. The molded product is post-cured at 175 ° C. for 8 hours,
In water vapor at 100 ° C. and 100% relative humidity, a voltage of 20 V
The voltage was applied to 6 pDIP, and the disconnection defect was examined. The time required until eight or more of the 15 packages failed was defined as a failure time. The unit is time. The measurement time is
The case where the number of defective packages was less than 8 at that time was 500 hours at the maximum, and the defective time was indicated as 500 hours or more. The longer the failure time, the better the moisture resistance reliability.

【0045】(実施例8〜9、比較例5〜7)実施例8
〜9および比較例5〜7について、表3の配合に従い、
実施例7と同様にして、エポキシ樹脂成形材料を調製し
評価した。結果を表3に示す。
(Examples 8 to 9, Comparative Examples 5 to 7) Example 8
~ 9 and Comparative Examples 5 to 7 according to the formulation in Table 3,
In the same manner as in Example 7, an epoxy resin molding material was prepared and evaluated. Table 3 shows the results.

【0046】[0046]

【表3】 [Table 3]

【0047】実施例7〜9の本発明のエポキシ樹脂成形
材料は、保存性、硬化性がきわめて良好であり、また、
このエポキシ樹脂成形材料の硬化物で封止された半導体
装置は、耐湿性が良好であることがわかる。
The epoxy resin molding materials of the present invention of Examples 7 to 9 have extremely good storability and curability.
It can be seen that the semiconductor device sealed with the cured product of this epoxy resin molding material has good moisture resistance.

【0048】[0048]

【発明の効果】本発明の熱硬化性樹脂組成物及びエポキ
シ樹脂成形材料は、優れた硬化性、保存性を有し、この
エポキシ樹脂成形材料の硬化物で封止された半導体装置
は、耐湿信頼性に優れ有用である。
The thermosetting resin composition and the epoxy resin molding material of the present invention have excellent curability and storage properties, and the semiconductor device sealed with the cured product of the epoxy resin molding material has a high moisture resistance. Excellent reliability and useful.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H01L 23/31 (72)発明者 大久保 明子 東京都品川区東品川2丁目5番8号 住友 ベークライト株式会社内 Fターム(参考) 4J002 CC042 CC052 CC072 CD021 CD041 CD051 CD061 DE137 DE147 DJ017 DJ037 DJ047 DL007 EJ026 EJ036 EV246 EW016 FA047 FD017 FD142 FD156 GQ05 4J036 AA01 AD07 AD08 AD13 AD15 AD20 AD21 AF06 DA04 DA05 DB05 DB06 DB07 DB11 DD07 FA01 FA05 FA06 FB07 FB08 JA07 4M109 EA03 EB03 EB04 EB06 EB07 EB08 EB09 EB12 EB19 EC01 EC03 EC14 EC20 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) H01L 23/31 (72) Inventor Akiko Okubo 2-5-8 Higashishinagawa, Shinagawa-ku, Tokyo Sumitomo Bakelite Co., Ltd. F term (reference) 4J002 CC042 CC052 CC072 CD021 CD041 CD051 CD061 DE137 DE147 DJ017 DJ037 DJ047 DL007 EJ026 EJ036 EV246 EW016 FA047 FD017 FD142 FD156 GQ05 4J036 AA01 AD07 AD08 AD13 AD15 AD07 DB07 FA06 JA07 4M109 EA03 EB03 EB04 EB06 EB07 EB08 EB09 EB12 EB19 EC01 EC03 EC14 EC20

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 1分子内にエポキシ基を2個以上有する
化合物(A)、1分子内にフェノール性水酸基を2個以
上有する化合物(B)、および、一般式(1)もしくは
(2)で表される分子化合物(C)を必須成分とするこ
とを特徴とする熱硬化性樹脂組成物。 【化1】 【化2】 (ただし、Pはリン原子、R1、R2、R3およびR4は置
換もしくは無置換の芳香族基、またはアルキル基、A1
およびA2は2価の芳香族基、B1は単結合、またはエー
テル基、スルホン基、スルフィド基、カルボニル基から
選ばれる2価の置換基、または炭素原子数1〜13で構
成される2価の有機基を表す。
1. A compound (A) having two or more epoxy groups in one molecule, a compound (B) having two or more phenolic hydroxyl groups in one molecule, and a compound represented by the general formula (1) or (2). A thermosetting resin composition comprising the represented molecular compound (C) as an essential component. Embedded image Embedded image (Where P is a phosphorus atom, R 1 , R 2 , R 3 and R 4 are a substituted or unsubstituted aromatic or alkyl group, A 1
And A 2 is a divalent aromatic group, B 1 is a single bond, or a divalent substituent selected from an ether group, a sulfone group, a sulfide group, and a carbonyl group, or a bivalent substituent group having 1 to 13 carbon atoms. Represents a valent organic group.
【請求項2】 分子化合物(C)が、一般式(3)また
は(4)で表される分子化合物である請求項1記載の熱
硬化性樹脂組成物。 【化3】 【化4】 (ただし、Pはリン原子、R1、R2、R3およびR4は置
換もしくは無置換の芳香族基、またはアルキル基を表
し、 R5、R6、R7およびR8は水素原子またはハロゲ
ン原子または炭素原子数1〜6で構成される1価の有機
基を表す。Xは単結合、またはエーテル基、スルホン
基、スルフィド基、カルボニル基から選ばれる2価置換
基、または炭素原子数1〜13で構成される2価の有機
基を表す。)
2. The thermosetting resin composition according to claim 1, wherein the molecular compound (C) is a molecular compound represented by the general formula (3) or (4). Embedded image Embedded image (However, P represents a phosphorus atom, R 1 , R 2 , R 3 and R 4 represent a substituted or unsubstituted aromatic group or an alkyl group, and R 5 , R 6 , R 7 and R 8 represent a hydrogen atom or X represents a halogen atom or a monovalent organic group having 1 to 6 carbon atoms, and X represents a single bond, a divalent substituent selected from an ether group, a sulfone group, a sulfide group, and a carbonyl group, or a carbon atom number. Represents a divalent organic group composed of 1 to 13.)
【請求項3】 1分子内にエポキシ基を2個以上有する
化合物(A)、1分子内にフェノール性水酸基を2個以
上有する化合物(B)、一般式(1)もしくは(2)で
表される分子化合物(C)、および無機充填材(D)を
必須成分とすることを特徴とするエポキシ樹脂成形材
料。
3. A compound (A) having two or more epoxy groups in one molecule, a compound (B) having two or more phenolic hydroxyl groups in one molecule, and represented by the general formula (1) or (2). An epoxy resin molding material characterized by comprising a molecular compound (C) and an inorganic filler (D) as essential components.
【請求項4】 分子化合物(C)が、一般式(3)また
は(4)で表される分子化合物である請求項3記載のエ
ポキシ樹脂成形材料。
4. The epoxy resin molding material according to claim 3, wherein the molecular compound (C) is a molecular compound represented by the general formula (3) or (4).
【請求項5】 請求項3または4記載のエポキシ樹脂成
形材料の硬化物にて封止された半導体装置。
5. A semiconductor device sealed with a cured product of the epoxy resin molding material according to claim 3.
JP28044799A 1999-09-30 1999-09-30 Thermosetting resin composition, epoxy resin molding material and semiconductor device using the same Expired - Fee Related JP3672225B2 (en)

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