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IT201700105367A1 - Procedimento per produrre guide d'onda ottiche, sistema e dispositivo corrispondenti - Google Patents

Procedimento per produrre guide d'onda ottiche, sistema e dispositivo corrispondenti

Info

Publication number
IT201700105367A1
IT201700105367A1 IT102017000105367A IT201700105367A IT201700105367A1 IT 201700105367 A1 IT201700105367 A1 IT 201700105367A1 IT 102017000105367 A IT102017000105367 A IT 102017000105367A IT 201700105367 A IT201700105367 A IT 201700105367A IT 201700105367 A1 IT201700105367 A1 IT 201700105367A1
Authority
IT
Italy
Prior art keywords
procedure
corresponding device
optical wave
wave guides
producing optical
Prior art date
Application number
IT102017000105367A
Other languages
English (en)
Inventor
Mark Andrew Shaw
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102017000105367A priority Critical patent/IT201700105367A1/it
Priority to US16/130,677 priority patent/US10718900B2/en
Publication of IT201700105367A1 publication Critical patent/IT201700105367A1/it

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/25—Preparing the ends of light guides for coupling, e.g. cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Optical Integrated Circuits (AREA)
IT102017000105367A 2017-09-20 2017-09-20 Procedimento per produrre guide d'onda ottiche, sistema e dispositivo corrispondenti IT201700105367A1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IT102017000105367A IT201700105367A1 (it) 2017-09-20 2017-09-20 Procedimento per produrre guide d'onda ottiche, sistema e dispositivo corrispondenti
US16/130,677 US10718900B2 (en) 2017-09-20 2018-09-13 Method of producing optical waveguides, corresponding system and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102017000105367A IT201700105367A1 (it) 2017-09-20 2017-09-20 Procedimento per produrre guide d'onda ottiche, sistema e dispositivo corrispondenti

Publications (1)

Publication Number Publication Date
IT201700105367A1 true IT201700105367A1 (it) 2019-03-20

Family

ID=60923829

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102017000105367A IT201700105367A1 (it) 2017-09-20 2017-09-20 Procedimento per produrre guide d'onda ottiche, sistema e dispositivo corrispondenti

Country Status (2)

Country Link
US (1) US10718900B2 (it)
IT (1) IT201700105367A1 (it)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11137356B2 (en) * 2017-11-03 2021-10-05 Sela Semiconductor Engineering Laboratories Ltd. System and method of cleaving of buried defects
US10877218B2 (en) 2019-03-26 2020-12-29 Stmicroelectronics S.R.L. Photonic devices and methods for formation thereof
US20230305326A1 (en) * 2022-03-24 2023-09-28 HyperLight Corporation Singulation of lithium-containing photonic devices
US20250035840A1 (en) * 2023-07-25 2025-01-30 Globalfoundries U.S. Inc. Photonic components with chamfered sidewalls
DE102024111203A1 (de) * 2024-04-22 2025-10-23 Schott Ag Reflektierende Lichtleitvorrichtung und Verfahren zur Herstellung derselben

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5926586A (en) * 1997-07-09 1999-07-20 Lucent Technologies Inc. Non-rectangular optical devices
US20090067786A1 (en) * 2007-09-12 2009-03-12 Fuji Xerox Co., Ltd. Optical waveguide device and light outputting module
US7953305B2 (en) * 2008-06-27 2011-05-31 Fujitsu Limited Optical waveguide device and producing method thereof
WO2012006736A2 (en) * 2010-07-12 2012-01-19 Filaser Inc. Method of material processing by laser filamentation
US20140179083A1 (en) * 2012-12-20 2014-06-26 Nxp B.V. High die strength semiconductor wafer processing method and system
US9130057B1 (en) * 2014-06-30 2015-09-08 Applied Materials, Inc. Hybrid dicing process using a blade and laser

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100236432B1 (ko) * 1996-07-31 1999-12-15 미야즈 쥰이치로 광학 편광기, 이의 제조 방법 및 광학 편광기 제조용 블레이드
JP2000199827A (ja) * 1998-10-27 2000-07-18 Sony Corp 光導波装置およびその製造方法
JP2007293108A (ja) * 2006-04-26 2007-11-08 Mitsumi Electric Co Ltd 光学装置及び光学装置の製造方法
JP2010102107A (ja) * 2008-10-23 2010-05-06 Nitto Denko Corp 光導波路およびその製造方法
JP5089643B2 (ja) * 2009-04-30 2012-12-05 インターナショナル・ビジネス・マシーンズ・コーポレーション 光接続要素の製造方法、光伝送基板、光接続部品、接続方法および光伝送システム
CN103080798B (zh) * 2010-08-27 2015-09-16 住友电木株式会社 光波导和电子设备
JP5779855B2 (ja) * 2010-09-24 2015-09-16 富士通株式会社 光モジュールおよび製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5926586A (en) * 1997-07-09 1999-07-20 Lucent Technologies Inc. Non-rectangular optical devices
US20090067786A1 (en) * 2007-09-12 2009-03-12 Fuji Xerox Co., Ltd. Optical waveguide device and light outputting module
US7953305B2 (en) * 2008-06-27 2011-05-31 Fujitsu Limited Optical waveguide device and producing method thereof
WO2012006736A2 (en) * 2010-07-12 2012-01-19 Filaser Inc. Method of material processing by laser filamentation
US20140179083A1 (en) * 2012-12-20 2014-06-26 Nxp B.V. High die strength semiconductor wafer processing method and system
US9130057B1 (en) * 2014-06-30 2015-09-08 Applied Materials, Inc. Hybrid dicing process using a blade and laser

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
KUMAGAI M ET AL: "Advanced Dicing Technology for Semiconductor Wafer-Stealth Dicing", IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 20, no. 3, 1 August 2007 (2007-08-01), pages 259 - 265, XP011189520, ISSN: 0894-6507, DOI: 10.1109/TSM.2007.901849 *
MASAYOSHI KUMAGAI ET AL: "Advanced dicing technology for semiconductor wafer -Stealth Dicing", SEMICONDUCTOR MANUFACTURING, 2006. ISSM 2006. IEEE INTERNATIONAL SYMPOSIUM ON, IEEE, PISCATAWAY, NJ, USA, 25 September 2006 (2006-09-25), pages 215 - 218, XP031244688, ISBN: 978-4-9904138-0-4 *

Also Published As

Publication number Publication date
US10718900B2 (en) 2020-07-21
US20190086609A1 (en) 2019-03-21

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